Cleaning device and wet process equipment

Abstract

The invention discloses a cleaning device and wet process equipment. The cleaning device comprises a swing arm, a nozzle, a fluid conveying device and a heating device, and the swing arm is provided with a containing cavity; the nozzle is arranged at the first end of the swing arm and used for outputting fluid. The fluid conveying device is arranged in the containing cavity, the fluid conveying device comprises a flow channel, a first fluid passes through the flow channel, and the flow channel communicates with the nozzle so as to convey the first fluid to the nozzle; the heating device is arranged in the containing cavity and used for heating the first fluid in the runner. According to the invention, the first fluid can be heated to ultra-high temperature to meet process requirements.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing technology, and in particular, to a cleaning device and a wet equipment. Background Art

[0002] The basic processes of lithography technology usually include three major steps: coating, exposure, and development. The purpose of the coating process is to establish a thin, uniform, and defect-free photoresist layer on the substrate surface. Exposure is to transfer the pattern on the photomask to the photoresist layer through an exposure lamp or other radiation light source. After exposure, the device or circuit pattern is recorded on the photoresist layer in the form of exposed and unexposed areas. After development, the pattern of the photomask is fixed on the photoresist layer. After the lithography process, the etching process or the ion implantation process can be carried out using the photoresist layer as a mask. After etching or ion implantation, the photoresist on the substrate surface needs to be removed.

[0003] The commonly used liquid medicine for removing photoresist by wet cleaning is SPM (Sulfuric Acid Hydrogen Peroxide Mixture) liquid medicine. The cleaning steps are as follows: hydrogen peroxide is injected into the sulfuric acid solution, and an exothermic reaction occurs between hydrogen peroxide and sulfuric acid to form a high-temperature SPM liquid medicine. The SPM liquid medicine is sprayed onto the surface of the photoresist. The SPM liquid medicine reacts with the photoresist to remove the photoresist. Then, the surface of the substrate is rinsed with deionized water, and finally, the surface of the substrate is dried with nitrogen. The latest research results show that by heating sulfuric acid to a high temperature (for example, above 180 °C), it is beneficial to remove the photoresist after high-dose ion implantation.

[0004] Therefore, it is necessary to provide a cleaning device and a wet equipment to solve the problem of how to heat sulfuric acid to a high temperature. Summary of the Invention

[0005] The purpose of the present invention is to solve the problem of how to heat sulfuric acid to a high temperature.

[0006] To solve the above problems, an embodiment of the present invention provides a cleaning device, including:

[0007] A swing arm having a receiving cavity;

[0008] A nozzle provided at the first end of the swing arm for outputting a fluid;

[0009] A fluid delivery device provided inside the receiving cavity. The fluid delivery device includes a flow channel for a first fluid to pass through. The flow channel is communicated with the nozzle to deliver the first fluid to the nozzle; and

[0010] A heating device provided inside the receiving cavity for heating the first fluid inside the flow channel.

[0011] An embodiment of the present invention provides a wet equipment, including:

[0012] Chamber;

[0013] A substrate support device, disposed inside the chamber, for supporting a substrate; and

[0014] The above-described cleaning device, wherein the nozzle of the cleaning device is used to supply a fluid to the substrate.

[0015] The cleaning device provided in this application integrates a fluid delivery device and a heating device together inside the accommodation cavity of the swing arm. The fluid delivery device includes a flow channel, and the heating device is used to heat a first fluid inside the flow channel, capable of heating the first fluid to a high temperature to meet the process requirements.

[0016] Other features and corresponding beneficial effects of the present invention are described in the following part of the specification, and it should be understood that at least some of the beneficial effects are obvious from the description in the specification of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a cross-sectional view of the cleaning device according to an embodiment of this application;

[0018] Figure 2 It is a partial cross-sectional view of the cleaning device according to an embodiment of this application;

[0019] Figure 3a For Figure 2 It is a cross-sectional view along the section line AA;

[0020] Figure 3b And Figure 3c It is a schematic diagram of a configuration of the fluid delivery device and the heating device of the cleaning device according to an embodiment of this application;

[0021] Figure 4 It is a cross-sectional view of the cleaning device according to another embodiment of this application;

[0022] Figure 5 For Figure 4 It is a cross-sectional view along the section line BB;

[0023] Figure 6 It is a schematic diagram of a configuration of the reflective layer and the heat insulation member of the cleaning device according to an embodiment of this application;

[0024] Figure 7 It is a schematic structural diagram of a wet process equipment according to an embodiment of this application, and

[0025] Figure 8 It is a process flow chart of applying the cleaning device to supply SPM solution to the substrate. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0026] The following specific embodiments illustrate the implementation manners of the present invention, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. Although the description of the present invention will be introduced in conjunction with preferred embodiments, this does not mean that the features of this invention are limited to this implementation manner. On the contrary, the purpose of introducing the invention in conjunction with the implementation manner is to cover other alternatives or modifications that may be extended based on the claims of the present invention. In order to provide a deep understanding of the present invention, many specific details will be included in the following description. The present invention can also be implemented without using these details. In addition, in order to avoid confusing or obscuring the key points of the present invention, some specific details will be omitted in the description. It should be noted that, without conflict, the embodiments in the present invention and the features in the embodiments can be combined with each other.

[0027] It should be noted that in this specification, similar reference numerals and letters indicate similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0028] The technical solutions of the present invention will be described clearly and completely below with reference to the drawings. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0029] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0030] In the description of the present invention, it should be noted that unless otherwise clearly specified and limited, the terms "mounted", "connected", "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0031] To make the objectives, technical solutions, and advantages of the present invention clearer, the following will further describe in detail the embodiments of the present invention with reference to the accompanying drawings.

[0032] Figure 1 A sectional view of a cleaning device according to an embodiment of the present application; Figure 2 A partial sectional view of a cleaning device according to an embodiment of the present application; Figure 3a Is Figure 2 A sectional view along the section line AA.

[0033] Referring to Figures 1 to 3a , the present application provides a cleaning device 1, including a swing arm 100, a nozzle 200, a fluid delivery device 300, and a heating device 400. The nozzle 200 is disposed at the first end of the swing arm 100. The swing arm 100 has a receiving cavity. The fluid delivery device 300 is disposed inside the receiving cavity of the swing arm 100. The fluid delivery device 300 includes a flow channel 330 for a first fluid to pass through. The flow channel 330 includes a fluid inlet 310 and a fluid outlet 320. The fluid outlet 320 of the flow channel 330 is communicated with the nozzle 200 to deliver the first fluid to the nozzle 200. The heating device 400 is disposed inside the receiving cavity of the swing arm 100 for heating the first fluid inside the flow channel 330 so that the first fluid is heated to a target temperature, for example, heated to above 190 °C to meet the process requirements. In this embodiment, the fluid delivery device 300 has a housing 331 that defines the above-mentioned flow channel 330. The first fluid may be sulfuric acid (H 2 SO 4 ), and the nozzle 200 may be made of a material with high temperature resistance, corrosion resistance, and high purity, such as quartz or silicon carbide, etc.

[0034] In some embodiments, the flow channel 330 is disposed around the outer periphery of the heating device 400. Referring to Figure 2 and Figure 3a , the fluid delivery device 300 includes a housing 331. The housing 331 includes an inner housing 3301 and an outer housing 3302. The flow channel 330 is formed by the space between the inner housing 3301 and the outer housing 3302. The heating device 400 is disposed inside the inner housing 3301 so that the flow channel 330 surrounds the outer periphery of the heating device 400. Specifically, the inner wall of the inner housing 3301 is defined as a groove 340, and the heating device 400 is integrated inside the groove 340, which can reduce the heat loss of the heating device 400. In Figures 1 to 3a The example shown, the external shape of the flow channel 330 is linear, and the cross-section of the flow channel 330 is annular. In other embodiments, the external shape of the flow channel 330 may be spiral. In other embodiments, as Figure 3b shown, the heating device 400 may be disposed to surround the outer periphery of the fluid delivery device 300. Or, as Figure 3cAs shown, the heating device 400 is disposed laterally to the fluid delivery device 300. In Figure 3b and Figure 3c In the illustrated example, the housing 331 is a single-layer housing, the flow channel 330 is surrounded by the housing 331, and the heating device 400 is disposed outside the housing 331.

[0035] In some embodiments, referring to Figure 2 and Figure 3a , the cleaning device 1 further includes a bracket 500 for supporting the heating device 400 inside the receiving cavity of the swing arm 100. Specifically, the bracket 500 supports the heating device 400 inside the groove 340.

[0036] In some embodiments, the heating device 400 includes at least one heating lamp tube, and the heating lamp tube is, for example, an infrared lamp tube.

[0037] In Figures 1 to 3a In the illustrated example, the heating device 400 includes one heating lamp tube, and a bracket 500 is installed at each of the head and tail ends of the heating lamp tube for clamping the heating lamp tube to support the heating lamp tube inside the groove 340. When the heating lamp tube needs to be replaced, it can be removed from the bracket 500.

[0038] Figure 4 is a cross-sectional view of the cleaning device according to another embodiment of the present application; Figure 5 is Figure 4 a cross-sectional view along the section line BB.

[0039] In Figure 4 and Figure 5 In the illustrated example, the heating device 400' includes two heating lamp tubes. One end of the heating lamp tube is installed on the bottom wall of the groove 340, and the other end of the heating lamp tube is supported by the bracket 500'. It should be noted that regarding Figures 1 to 5 , the same reference numerals are used to label the same elements or elements having the same functions, and repeated descriptions are omitted.

[0040] In some embodiments, referring to Figure 1 , the cleaning device 1 further includes a first temperature sensor 610, a second temperature sensor 620, a flow meter 700, and a controller 800. The first temperature sensor 610 is used to detect the temperature of the first fluid before entering the flow channel 330. The second temperature sensor 620 is used to detect the temperature of the first fluid flowing out of the flow channel 330. The types of the first temperature sensor 610 and the second temperature sensor 620 can be resistance temperature sensors, thermistor sensors, or thermocouple sensors, etc. Specifically, the first temperature sensor 610 is disposed on the first fluid supply pipe 350, and the second temperature sensor 620 is disposed at the fluid outlet 320. The description of the first fluid supply pipe 350 will be described later.

[0041] The flowmeter 700 is used to detect the flow rate of the first fluid flowing into the flow channel 330. The controller 800 is respectively connected to the flowmeter 700, the heating device 400, the first temperature sensor 610 and the second temperature sensor 620, and is configured to: obtain the temperature difference ΔT according to the target temperature T of the first fluid flowing out of the flow channel 330 and the temperature T1 of the first fluid detected by the first temperature sensor 610, ΔT = T - T1, and control the power of the heating device 400 according to the temperature difference ΔT and the flow rate of the first fluid detected by the flowmeter 700. The present application does not limit the connection manner between the controller 800 and the flowmeter 700, the heating device 400, the first temperature sensor 610 and the second temperature sensor 620, which can be wired connection or wireless connection.

[0042] In some embodiments, the calculation formula for the heating power of the heating device 400 is P = C * ρ * Q * ΔT; where P is the heating power of the heating device 400; C is the specific heat capacity of the first fluid; ρ is the density of the first fluid; Q is the flow rate of the first fluid flowing into the flow channel 330, and ΔT is the temperature difference described above, that is, the difference between the target temperature T of the first fluid flowing out of the flow channel 330 and the temperature T1 of the first fluid detected by the first temperature sensor 610, that is, ΔT = T - T1. When the flow rate of the first fluid is constant, the temperature T1 of the first fluid before entering the flow channel 330 is known through the first temperature sensor 610, and according to the difference between the target temperature T and the temperature T1 described above, that is, ΔT = T - T1, the corresponding heating power P is confirmed, so that the heating device 400 heats the first fluid inside the flow channel 330. Further, the temperature T2 of the first fluid flowing out of the flow channel 330 is detected by the second temperature sensor 620 to know whether the temperature T2 reaches the target temperature T.

[0043] In some embodiments, referring to Figure 2 , the cleaning device 1 further includes a third temperature sensor 630, and the third temperature sensor 630 is arranged on the fluid delivery device 300. Specifically, the third temperature sensor 630 is arranged on the outer shell 3302 of the fluid delivery device 300, and can timely detect whether the temperature of the surface of the outer shell 3302 is too high. When the third temperature sensor 630 detects that the temperature of the outer shell 3302 is too high, it will send an over-temperature signal to the alarm device, and the alarm device issues an alarm. The type of the third temperature sensor 630 can be a thermal resistance sensor, a thermistor sensor or a thermocouple sensor, etc.

[0044] In some embodiments, the cleaning device 1 further includes a reflective layer, which is configured to reflect the light emitted by the heating device 400 (specifically, the heating lamp tube) back into the interior of the flow channel 330 when the light passes through the flow channel 330 and reaches the reflective layer. The reflected light will act on the first fluid inside the flow channel 330, thereby effectively utilizing the irradiation light of the heating lamp tube. The reflective layer can be aluminum foil. Specifically, referring to Figure 2 , when the heating device 400 is disposed inside the inner housing 3301 of the fluid delivery device 300, the reflective layer ( Figure 2 not shown) can be disposed on the outer periphery of the outer housing 3302, or the reflective layer can be disposed on the inner periphery of the swing arm 100.

[0045] Figure 6 FIG. is a schematic diagram of a configuration of the reflective layer and the heat insulation member of the cleaning device according to an embodiment of the present application. In Figure 6 , the fluid delivery device 300 includes a housing 331, and the flow channel 330 is surrounded by the housing 331. The heating device 400 is disposed outside the housing 331. For ease of description, the housing 331 of the fluid delivery device 300 is divided into two parts 331a and 331b. The upper half of the housing 331 facing away from the heating device 400 is denoted as the housing 331a, which is schematically shown by a solid line contour. The lower half of the housing 331 close to the heating device 400 is denoted as the housing 331b, which is schematically shown by a dashed line contour. The area divided by the dashed line contour represents a light-transmitting area, which enables the light emitted by the heating device 400 to smoothly pass through the housing 331b and enter the interior of the flow channel 330, so as to achieve the purpose of heating the first fluid inside the flow channel 330. When the heating device 400 is disposed outside the housing 331, in addition to being disposed on the inner periphery of the swing arm 100, the reflective layer 940 can also be disposed on the side of the fluid delivery device 300 facing away from the heating device 400. For example, as Figure 6 shown, the reflective layer 940 is disposed on the housing 331a on the side of the fluid delivery device 300 facing away from the heating device 400. In this case, the set length of the reflective layer 940 is half of the circumference of the housing 331, where the set length of the reflective layer 940 only needs to ensure that the reflective layer 940 does not block the light emitted by the heating device 400 towards the flow channel 330. In Figure 6 , the solid arrows drawn represent the incident light of the heating device 400, and the dashed arrows represent the reflected light. In some other embodiments, the set length of the reflective layer 940 can be less than half of the circumference of the housing 331, or can be greater than half of the circumference of the housing 331 to a certain extent. It should be noted that Figure 6 the structure of the reflective layer 940 shown is only an example, and the present embodiment does not particularly limit the set length of the reflective layer 940.

[0046] In some embodiments, the cleaning device 1 further includes a heat insulation member 910, and the heat insulation member 910 covers at least a part of the outer side of the fluid delivery device 300 to play a role in heat insulation and heat preservation. Refer to Figure 2 , when the heating device 400 is disposed inside the inner housing 3301 of the fluid delivery device 300, the heat insulation member 910 can cover all areas of the outer periphery of the outer housing 3302, and the heat insulation member 910 can also cover all areas of the inner periphery or the outer periphery of the swing arm 100. Refer to Figure 6 , when the heating device 400 is disposed outside the fluid delivery device 300, in addition to covering all areas of the inner periphery or the outer periphery of the swing arm 100, the heat insulation member 910 can also cover a part of the outer side of the fluid delivery device 300. Specifically, the heat insulation member 910 covers the side of the fluid delivery device 300 facing away from the heating device 400. For example, as Figure 6 shown, the heat insulation member 910 covers the housing 331a on the side of the fluid delivery device 300 facing away from the heating device 400. In this case, the set length of the heat insulation member 910 is half of the circumference of the housing 331, as long as the heat insulation member 910 does not affect the heat transfer from the heating device 400 to the inside of the flow channel 330. The heat insulation member 910 can be quartz wool. In some other embodiments, the set length of the heat insulation member 910 can be less than half of the circumference of the housing 331 or can be greater than half of the circumference of the housing 331 to a certain extent. It should be noted that Figure 6 the structure of the heat insulation member 910 shown is only an example, and the present embodiment does not particularly limit the set length of the heat insulation member 910. When the cleaning device 1 includes a reflective layer 940, the heat insulation member 910 covers the outer periphery of the reflective layer 940.

[0047] In some embodiments, refer to Figure 2 , the swing arm 100 of the cleaning device 1 includes a main body 920, and the aforementioned accommodation cavity is located inside the main body 920. The main body 920 is made of stainless steel.

[0048] In some embodiments, the swing arm 100 of the cleaning device 1 further includes an anti-corrosion layer 930, and the anti-corrosion layer 930 covers the outer periphery of the main body 920 to prevent the acid gas in the process environment from corroding the main body 920. The material of the anti-corrosion layer 930 is PFA or PTFE.

[0049] In some embodiments, refer to Figure 1 , the cleaning device 1 further includes a column 110, and the column 110 is disposed at the second end of the swing arm 100 for driving the swing arm 100 to lift and rotate. A pipeline channel 111 is provided inside the column 110 for allowing pipelines or wires to pass through, such as the power cord of the heating device 400 and the pipeline connecting the flow channel 330, etc.

[0050] In some embodiments, refer to Figure 1, the cleaning device 1 further includes a first fluid supply pipe 350, a first control valve 351, a pre-heater 352, a bypass branch pipe 360 and a second control valve 361. The first fluid supply pipe 350 is communicated with the fluid inlet 310 and is used to supply a first fluid to the flow channel 330 through the fluid inlet 310. The first control valve 351 is communicated with the first fluid supply pipe 350 and is arranged between the pre-heater 352 and the fluid inlet 310 to control the on-off of the first fluid supply pipe 350. The pre-heater 352 is communicated with the first fluid supply pipe 350 and is configured to heat the first fluid before it enters the flow channel 330, for example, to heat it to about 170 °C. The bypass branch pipe 360 is communicated with the first fluid supply pipe 350 and is connected between the pre-heater 352 and the first control valve 351. When the first control valve 351 is closed, it is used to allow the first fluid heated by the pre-heater 352 to flow into the bypass branch pipe 360, thereby maintaining the temperature stability of the first fluid. The first fluid in the bypass branch pipe 360 will flow back to the liquid storage device for storing the first fluid. In some examples, this liquid storage device can also be used as the liquid supply source of the first fluid supply pipe 350. The second control valve 361 is communicated with the bypass branch pipe 360 to control the on-off of the bypass branch pipe 360. Among them, the flow meter 700 mentioned above is arranged on the first fluid supply pipe 350, and the pre-heater 352 can adopt an existing heater. In addition, the working process of this part will be introduced in detail in the process flow described later.

[0051] In some embodiments, referring to Figure 7 , the cleaning device 1 further includes a fluid branch 210 for supplying a second fluid to the nozzle 200. Further, referring to Figure 2 and Figure 7 , the nozzle 200 includes a confluence part 220. The confluence part 220 communicates the fluid outlet 320 of the flow channel 330 and the fluid branch 210, with a compact structure. The first fluid output from the flow channel 330 of the fluid delivery device 300 and the second fluid output from the fluid branch 210 are mixed in the confluence part 220 and then flow out of the nozzle 200. In this example, the confluence part 220 is integrated in the nozzle 200. In other examples, the confluence part 220 and the nozzle 200 can also be separate components. In this embodiment, the second fluid can be hydrogen peroxide (H 2 O 2 ).

[0052] When the first fluid is sulfuric acid and the second fluid is hydrogen peroxide, sulfuric acid and hydrogen peroxide are mixed into SPM (Sulfuric Acid Hydrogen Peroxide Mixture) liquid medicine at the confluence part 220, and then flow out of the nozzle 200. The SPM liquid medicine is, for example, applied to remove the photoresist formed on the surface of the substrate 1000. In this application, the sulfuric acid inside the flow channel 330 can be heated to above 190 °C by the heating device 400. Moreover, heat is generated when ultra-high temperature sulfuric acid is mixed with room temperature hydrogen peroxide. Therefore, the SPM liquid medicine is heated to a temperature higher than 190 °C, for example, above 200 °C when it reaches the nozzle 200. Thus, the photoresist formed on the surface of the substrate 1000 can be removed, and the photoresist removal efficiency can be significantly improved, thereby also saving the usage amount of the SPM liquid medicine.

[0053] In some embodiments, referring to Figure 2 and Figure 7 , the cleaning device 1 further includes an exhaust channel 230. The exhaust channel 230 is communicated with the confluence part 220 of the nozzle 200 and is used to discharge the bubbles generated when sulfuric acid and hydrogen peroxide are mixed at the confluence part 220. The exhaust channel 230 can be arranged at the top or side of the nozzle 200.

[0054] Referring to Figure 7 , this application provides a wet process device, including a chamber 2, a substrate support device 3, and the above-mentioned cleaning device 1. The substrate support device 3 is arranged inside the chamber 2 and is used to support the substrate 1000. The nozzle 200 of the cleaning device 1 is used to supply a fluid to the substrate 1000, and this fluid is a mixed fluid formed by mixing a first fluid and a second fluid, such as SPM liquid medicine.

[0055] Figure 8 It is a process flow chart of applying the cleaning device of this application to supply SPM liquid medicine to the substrate.

[0056] Exemplarily, referring to Figures 1 to 8 , based on the cleaning device 1 of the above wet process device, the process flow of supplying SPM liquid medicine to the substrate 1000 is described as follows:

[0057] Step S01, the substrate support device 3 rotates the substrate 1000;

[0058] Step S02, open the fluid branch 210 and supply hydrogen peroxide (H 2 O 2 ) to the substrate 1000;

[0059] Step S03, open the first control valve 351 and close the second control valve 361 to open the first fluid supply pipe 350 and close the bypass branch pipe 360;

[0060] Step S04: Supply sulfuric acid (H 2 SO 4 ) to the first fluid supply pipe 350, so that the sulfuric acid in the first fluid supply pipe 350 enters the interior of the flow channel 330 from the fluid inlet 310;

[0061] Step S05: Turn on the heating lamp tube to heat the sulfuric acid inside the flow channel 330;

[0062] Step S06: The sulfuric acid heated by the heating lamp tube enters the confluence part 220 from the fluid outlet 320, and is mixed with hydrogen peroxide to form SPM liquid medicine. The SPM liquid medicine is supplied to the substrate 1000 through the nozzle 200 to perform SPM treatment on the substrate 1000;

[0063] Step S07: After the SPM treatment of the substrate 1000 is completed, turn off the heating lamp tube;

[0064] Step S08: Close the first control valve 351 and open the second control valve 361 to cut off the first fluid supply pipe 350, so that the sulfuric acid heated by the pre-heater 352 passes through the bypass branch pipe 360 to maintain the stable temperature of the sulfuric acid. The sulfuric acid in the bypass branch pipe 360 flows back into the liquid storage device. During this process, the pre-heater 352 is always in the heating state to avoid the temperature fluctuation of the sulfuric acid caused by starting and stopping.

[0065] Step S09: Close the fluid branch 210 to stop supplying hydrogen peroxide to the substrate 1000.

[0066] The above has described the embodiments of the present application. However, the present application is not limited to the above embodiments, and various changes can be made as long as the gist is not deviated from.

[0067] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A cleaning device, characterized in that, it includes: a swing arm having a receiving cavity; a nozzle provided at a first end of the swing arm for outputting a fluid; a fluid delivery device provided inside the receiving cavity, the fluid delivery device includes a flow channel for a first fluid to pass through, and the flow channel is communicated with the nozzle to deliver the first fluid to the nozzle; and a heating device provided inside the receiving cavity for heating the first fluid inside the flow channel.

2. The cleaning device according to claim 1, characterized in that, the flow channel is disposed around the outer periphery of the heating device.

3. The cleaning device according to claim 2, characterized in that, the fluid delivery device includes a housing, the housing includes an inner housing and an outer housing, the flow channel is formed by a space between the inner housing and the outer housing, and the heating device is provided inside the inner housing.

4. The cleaning device according to claim 1, characterized in that, the fluid delivery device includes a housing, the flow channel is surrounded by the housing, and the heating device is provided outside the housing.

5. The cleaning device according to claim 1, characterized in that, it further includes: a first temperature sensor for detecting the temperature of the first fluid before entering the flow channel; a flow meter for detecting the flow rate of the first fluid introduced into the flow channel; a controller respectively connected to the flow meter, the heating device and the first temperature sensor, and configured to: obtain a temperature difference according to the target temperature of the first fluid flowing out of the flow channel and the temperature of the first fluid detected by the first temperature sensor, and control the power of the heating device according to the temperature difference and the flow rate of the first fluid detected by the flow meter.

6. The cleaning device according to claim 5, characterized in that, the heating power calculation formula of the heating device is P = C * ρ * Q * △T; wherein, P is the heating power of the heating device; C is the specific heat capacity of the first fluid; ρ is the density of the first fluid; Q is the flow rate of the first fluid introduced into the flow channel; △T is the difference between the target temperature and the temperature of the first fluid detected by the first temperature sensor.

7. The cleaning device according to claim 5, characterized in that, it further includes: a second temperature sensor for detecting the temperature of the first fluid flowing out of the flow channel.

8. The cleaning device according to claim 7, characterized in that, it further includes: a third temperature sensor for detecting the temperature of the surface of the fluid delivery device.

9. The cleaning device according to claim 1, characterized in that, it further includes a bracket for supporting the heating device inside the receiving cavity.

10. The cleaning device according to claim 1, characterized in that, the heating device includes at least one heating lamp tube.

11. The cleaning device according to claim 10, characterized in that, it further includes: a reflective layer configured to reflect the light back into the flow channel when the light emitted by the heating lamp tube passes through the flow channel and reaches the reflective layer.

12. The cleaning device according to claim 1, characterized in that, it further comprises: a heat insulation member covering at least a partial area outside the fluid delivery device.

13. The cleaning device according to claim 1, characterized in that, it further comprises: a first fluid supply pipe communicating with the flow channel; a first control valve communicating with the first fluid supply pipe for controlling the on / off of the first fluid supply pipe; a pre-heater communicating with the first fluid supply pipe and configured to heat the first fluid before it enters the flow channel.

14. The cleaning device according to claim 13, characterized in that, it further comprises: a bypass branch pipe communicating with the first fluid supply pipe and connected between the pre-heater and the first control valve for introducing the first fluid heated by the pre-heater when the first control valve is closed; a second control valve communicating with the bypass branch pipe for controlling the on / off of the bypass branch pipe.

15. The cleaning device according to claim 1, characterized in that, the swing arm comprises: a body, the accommodation cavity is located inside the body, and the body is made of stainless steel material.

16. The cleaning device according to claim 15, characterized in that, the swing arm further comprises: an anti-corrosion layer covering the outer periphery of the body.

17. The cleaning device according to claim 16, characterized in that, the material of the anti-corrosion layer is PFA or PTFE.

18. The cleaning device according to claim 1, characterized in that, it further comprises: a fluid branch for supplying a second fluid to the nozzle; the nozzle includes a confluence portion, and the confluence portion communicates the flow channel and the fluid branch so that the first fluid and the second fluid are mixed in the confluence portion and then flow out of the nozzle.

19. The cleaning device according to claim 18, characterized in that, it further comprises: an exhaust duct communicating with the confluence portion.

20. A wet process device, characterized in that, it comprises: a chamber; a substrate support device provided inside the chamber for supporting a substrate; and the cleaning device according to any one of claims 1 to 19, and the nozzle of the cleaning device is used to supply fluid to the substrate.

Images