Silicon wafer cleaning liquid recycling device

Abstract

The invention discloses a silicon wafer cleaning liquid recycling device which comprises a recycling box and filter plates fixedly installed on the two sides of an inner cavity of the recycling box, a filter frame is arranged between the two filter plates, and the two sides of the front portion of the recycling box are fixedly connected with fixing plates. According to the silicon wafer cleaning liquid recycling and reusing device and the using method thereof, cleaning liquid is filtered through two filtering plates, a control motor drives a left reciprocating lead screw to rotate, the reciprocating lead screw drives another reciprocating lead screw to rotate through two bevel gears, the two reciprocating lead screws drive two threaded sleeves to move, and the cleaning liquid is recycled. A threaded sleeve can drive a sliding rod to move through a connecting plate and a mounting plate, the sliding rod can drive a moving plate to move, the moving plate can drive a brush plate to move through the moving rod, the brush plate is made to brush a filter plate, impurities on the filter plate can be well cleaned, the phenomenon that the filter plate is blocked by the impurities is effectively relieved, and the service life of the filter plate is prolonged. The cleaning liquid filtering effect of the filtering plate is ensured.

Description

Technical Field

[0001] The present invention relates to the technical field of silicon wafer cleaning liquid, and particularly to a device for recycling silicon wafer cleaning liquid. Background Art

[0002] In the production of semiconductor devices, silicon wafers must be strictly cleaned. Trace amounts of contamination can also cause device failure. Currently, silicon wafers are cleaned with a cleaning liquid to remove impurities on the wafers. The cleaning liquid after cleaning the silicon wafers is directly discharged, resulting in waste of the cleaning liquid. Since the cleaning liquid only mixes with impurities during cleaning and does not undergo a chemical change, it generally does not affect its secondary use, and the cleaning liquid after cleaning will be recycled.

[0003] When recycling and reusing the cleaning liquid, it is necessary to filter the impurities in the cleaning liquid through a filter plate. However, when the filter plate filters the recycled cleaning liquid, the impurities in the cleaning liquid will be filtered on the filter plate. Over time, this will cause the filter plate to become blocked, affecting the filtering effect of the filter plate. And since the filter plate is inside the recycling tank, it is inconvenient to clean the impurities on the filter plate. Summary of the Invention

[0004] In view of the deficiencies of the prior art, the present invention provides a device for recycling silicon wafer cleaning liquid, which solves the problems that impurities in the cleaning liquid will be filtered on the filter plate, resulting in blockage of the filter plate over time, and the filter plate is inside the recycling tank, making it inconvenient to clean the impurities on the filter plate.

[0005] To achieve the above objectives, the present invention is realized through the following technical solutions: A device for recycling silicon wafer cleaning liquid includes a recycling tank and filter plates fixedly installed on both sides of the inner cavity of the recycling tank. A filter frame is arranged between the two filter plates. Both sides of the front part of the recycling tank are fixedly connected with fixing plates. One side of the fixing plate is rotatably connected with a reciprocating lead screw through an opening. One side of the front part of the recycling tank is fixedly connected with a motor. The output shaft of the motor is fixedly connected with one end of the left reciprocating lead screw through a coupling. Opposite ends of the two reciprocating lead screws are fixedly connected with bevel gears. The two bevel gears are meshed with each other. The surface of the reciprocating lead screw is threadedly connected with a threaded sleeve. The surface of the threaded sleeve is fixedly connected with a connecting plate. One side of the connecting plate is fixedly connected with a mounting plate. Both sides of the recycling tank and above the filter frame are slidably connected with sliding rods through openings. One end of the sliding rod is fixedly connected with the mounting plate. The other end of the sliding rod is fixedly connected with a moving plate. The top of the moving plate is slidably connected with a moving rod through an opening. One end of the moving rod is fixedly connected with a brush plate adapted to the filter plate.

[0006] Preferably, the other end of the moving rod is fixedly connected with a first inclined surface plate, and a first spring is sleeved on the surface of the moving rod between the moving plate and the first inclined surface plate.

[0007] Preferably, fixed blocks are fixedly connected to both sides of the front and rear parts of the inner cavity of the recycling box. A limiting cylinder is fixedly connected to the bottom of the fixed block, and a limiting rod is slidably connected inside the limiting cylinder.

[0008] Preferably, one end of the limiting rod is fixedly connected with a second inclined panel adapted to the first inclined panel, and a second spring is sleeved on the surfaces of the limiting cylinder and the limiting rod.

[0009] Preferably, a liquid inlet pipe is communicated with the top of the recycling box, and a liquid passing pipe is communicated with one end of the liquid inlet pipe.

[0010] Preferably, spray pipes are communicated with both ends of the liquid passing pipe, and a plurality of water outlets are communicated with the lower part of the surface of the spray pipe.

[0011] Preferably, a sealing block is fixedly connected to the rear part of the filter frame. The rear part of the sealing block penetrates through the recycling box and extends to the outside of the recycling box, and a rectangular through opening adapted to the sealing block is formed in the rear part of the recycling box.

[0012] Preferably, a liquid discharge pipe is communicated with the bottom of one side of the recycling box, and a protective cover is fixedly connected to the front part of the recycling box.

[0013] The present invention also discloses a using method of a silicon wafer cleaning liquid recycling and reusing device, which specifically includes the following steps:

[0014] Step 1: The used cleaning liquid is introduced into the liquid passing pipe through the liquid inlet pipe. The liquid passing pipe will add the cleaning liquid to the two spray pipes, so that a plurality of water outlets on the spray pipes evenly scatter the cleaning liquid on the filter plate. The cleaning liquid flows on the filter plate, and the cleaning liquid is filtered by the two inclined filter plates. The filtered cleaning liquid reaches the bottom of the recycling box. Some impurities filtered on the filter plate will flow into the filter frame according to their own weights and the inclined scouring of the cleaning liquid, and are filtered again through the filter frame, and the impurities are completely collected in the filter frame;

[0015] Step 2: At the same time, control the motor to drive the left reciprocating lead screw to rotate. The left reciprocating lead screw will drive the right reciprocating lead screw to rotate through two bevel gears. The two reciprocating lead screws will respectively drive the two thread sleeves to move. The thread sleeve will drive the mounting plate to move through the connecting plate. The mounting plate will drive the sliding rod to move obliquely. The sliding rod will drive the brush plate to move through the moving plate and the moving rod, so that the brush plate moves on the inclined filter plate, and the brush plate will brush and clean the impurities on the filter plate;

[0016] Step 3. While the two moving plates move outward respectively, the moving plates will drive the first inclined panel to move. The inclined surface of the first inclined panel contacts the inclined surface of the second inclined panel. Since the limiting cylinder and the limiting rod are at the extension limit, the first inclined panel will be guided above the second inclined panel. The first inclined panel will drive the brush plate to move upward through the moving rod, so that the two brush plates will not contact the filter plate during the outward movement, preventing impurities from being pushed to both sides. When the two first inclined panels move outward to the limit, the first inclined panel will move to the other inclined surface of the second inclined panel. Under the downward acting force of the second spring, the moving rod is pulled to drive the brush plate to contact the filter frame and reset downward;

[0017] Step 4. At this time, the reciprocating lead screw will drive the threaded sleeve to move in the reverse direction. The threaded sleeve will drive the sliding rod to move inward through the connecting plate and the mounting plate. The sliding rod will drive the brush plate and the first inclined panel to move inward through the moving plate. The other inclined surface of the first inclined panel will squeeze the other inclined surface of the second inclined panel, pushing the second inclined panel to move upward. The second inclined panel will drive the limiting cylinder and the limiting rod to contract, so that the two brush plates continuously contact the filter plate and move inward, brushing and cleaning the impurities on the filter plate into the filter frame for collection. After the cleaning liquid is filtered, then pull the handle to drive the sealing block to move backward, and disassemble the filter frame from the recycling box for cleaning.

[0018] Beneficial effects

[0019] The present invention provides a silicon wafer cleaning liquid recycling device. Compared with the existing technology, it has the following beneficial effects:

[0020] (1) In the present invention, the cleaning liquid is filtered by two filter plates. The motor is controlled to drive the left reciprocating lead screw to rotate. The reciprocating lead screw will drive another reciprocating lead screw to rotate through two bevel gears, so that the two reciprocating lead screws drive two threaded sleeves to move. The threaded sleeve will drive the sliding rod to move through the connecting plate and the mounting plate. The sliding rod will drive the moving plate to move. The moving plate will drive the brush plate to move through the moving rod, so that the brush plate brushes on the filter plate, and can well clean the impurities on the filter plate, effectively slowing down the blockage of the filter plate by impurities, and ensuring the effect of the filter plate filtering the cleaning liquid.

[0021] (2) In the present invention, the movement of the moving plate drives the movement of the first inclined panel. The inclined surface of the first inclined panel squeezes the inclined surface of the second inclined panel, so that the first inclined panel moves above the second inclined panel. The first inclined panel will drive the brush plate to move upward through the moving rod, so that the brush plate will no longer contact the filter plate when moving outward, effectively preventing the brush plate from pushing impurities above the filter plate. The first inclined panel moves to the outside of the second inclined panel, and drives the brush plate to fall and reset under the acting force of the first spring, so that the brush plate contacts the filter plate. By rotating the reciprocating lead screw to drive the threaded sleeve to move in the reverse direction, driving the brush plate to move inward will clean the filter plate.

[0022] (3) The present invention filters the cleaning liquid through two inclined filter plates, filters impurities on the filter plates, and part of the impurities will fall into the filter frame by their own weight and the impact of the cleaning liquid. The two brush plates clean the filter plates, which can well collect the impurities in the filter frame, filter the cleaning liquid more cleanly, and achieve the effect of recycling the cleaning liquid. Description of the Drawings

[0023] Figure 1 is a schematic diagram of the external structure of the present invention;

[0024] Figure 2 is a schematic diagram of the structures of the recycling box, fixed plate, motor, reciprocating lead screw, threaded sleeve, connecting plate, bevel gear and mounting plate of the present invention;

[0025] Figure 3 is a cross-sectional view of the structure of the recycling box of the present invention;

[0026] Figure 4 is a bottom view of the internal structure of the recycling box of the present invention;

[0027] Figure 5 is a rear view of the internal structure of the recycling box, filter frame and sealing block of the present invention;

[0028] Figure 6 is a schematic diagram of the structures of the filter plate, filter frame, sliding rod, moving plate, brush plate and first inclined panel of the present invention;

[0029] Figure 7 is a schematic diagram of the structures of the sliding rod, moving plate, moving rod, brush plate, first inclined panel and first spring of the present invention;

[0030] Figure 8 is a schematic diagram of the structures of the fixed block, limiting cylinder, limiting rod, second inclined panel and second spring of the present invention.

[0031] In the figure: 1, recycling box; 2, filter plate; 3, filter frame; 4, fixed plate; 5, motor; 6, reciprocating lead screw; 7, threaded sleeve; 8, connecting plate; 9, bevel gear; 10, mounting plate; 11, sliding rod; 12, moving plate; 13, moving rod; 14, brush plate; 15, first inclined panel; 16, first spring; 17, fixed block; 18, limiting cylinder; 19, limiting rod; 20, second inclined panel; 21, second spring; 22, liquid inlet pipe; 23, liquid passing pipe; 24, water spraying pipe; 25, water outlet head; 26, sealing block; 27, liquid discharge pipe; 28, protective cover. Detailed Embodiments

[0032] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the drawings in the embodiments of the present invention.

[0033] Please refer to Figure 1-8 , the present invention provides a technical solution: a silicon wafer cleaning liquid recycling device, including a recycling box 1 and filter plates 2 fixedly installed on both sides of the inner cavity of the recycling box 1. A filter frame 3 is arranged between the two filter plates 2. Both sides of the front part of the recycling box 1 are fixedly connected with fixing plates 4. One side of the fixing plate 4 is rotationally connected with a reciprocating lead screw 6 through an opening. One side of the front part of the recycling box 1 is fixedly connected with a motor 5. The motor 5 is a servo motor, electrically connected to an external power supply and controlled through a control switch. The output shaft of the motor 5 is fixedly connected with one end of the left reciprocating lead screw 6 through a coupling. Opposite ends of the two reciprocating lead screws 6 are fixedly connected with bevel gears 9. The two bevel gears 9 are meshed with each other. The surface of the reciprocating lead screw 6 is threadedly connected with a threaded sleeve 7. The surface of the threaded sleeve 7 is fixedly connected with a connecting plate 8. One side of the connecting plate 8 is fixedly connected with a mounting plate 10. Both sides of the recycling box 1 and above the filter frame 3 are slidably connected through openings with sliding rods 11. One end of the sliding rod 11 is fixedly connected with the mounting plate 10. The other end of the sliding rod 11 is fixedly connected with a moving plate 12. The top of the moving plate 12 is slidably connected through an opening with a moving rod 13. One end of the moving rod 13 is fixedly connected with a brush plate 14 adapted to the filter plate 2. The brush of the brush plate 14 is a hard brush.

[0034] Further, in order to facilitate driving the movement of the brush plate 14, the other end of the moving rod 13 is fixedly connected with a first inclined surface plate 15. A first spring 16 is sleeved on the surface of the moving rod 13 between the moving plate 12 and the first inclined surface plate 15.

[0035] Further, in order to facilitate guiding the first inclined surface plate 15, both sides of the front and rear parts of the inner cavity of the recycling box 1 are fixedly connected with fixing blocks 17. The bottom of the fixing block 17 is fixedly connected with a limiting cylinder 18. A limiting rod 19 is slidably connected inside the limiting cylinder 18. One end of the limiting rod 19 is fixedly connected with a second inclined surface plate 20 adapted to the first inclined surface plate 15. A second spring 21 is sleeved on the surfaces of the limiting cylinder 18 and the limiting rod 19.

[0036] Further, in order to facilitate uniformly spraying the cleaning liquid on the filter plate 2, a liquid inlet pipe 22 is connected to the top of the recycling box 1. One end of the liquid inlet pipe 22 is connected to a liquid passing pipe 23. Both ends of the liquid passing pipe 23 are connected to spray water pipes 24. A plurality of water outlet heads 25 are connected to the lower part of the surface of the spray water pipe 24.

[0037] Further, in order to facilitate disassembling and cleaning the filter frame 3, a sealing block 26 is fixedly connected to the rear part of the filter frame 3. The rear part of the sealing block 26 penetrates through the recycling box 1 and extends to the outside of the recycling box 1. A rectangular through opening adapted to the sealing block 26 is provided in the rear part of the recycling box 1.

[0038] Further, in order to protect structures such as the motor 5, a drain pipe 27 is connected to the bottom of one side of the recovery tank 1, and a protective cover 28 is fixedly connected to the front of the recovery tank 1.

[0039] The present invention also discloses a method for using a silicon wafer cleaning liquid recovery and reuse device, which specifically includes the following steps:

[0040] Step 1: Pass the used cleaning liquid into the liquid passing pipe 23 through the liquid inlet pipe 22. The liquid passing pipe 23 will add the cleaning liquid to the two water spraying pipes 24, so that the multiple water outlet heads 25 on the water spraying pipes 24 evenly disperse the cleaning liquid on the filter plate 2. The cleaning liquid flows onto the filter plate 2, and the two inclined filter plates 2 filter the cleaning liquid. The filtered cleaning liquid reaches the bottom of the recovery tank 1. Some impurities filtered on the filter plate 2 will flow into the filter frame 3 according to their own weight and the inclined scouring of the cleaning liquid, and are filtered again through the filter frame 3 to completely collect the impurities in the filter frame 3;

[0041] Step 2: At the same time, control the motor 5 to drive the left reciprocating lead screw 6 to rotate. The left reciprocating lead screw 6 will drive the right reciprocating lead screw 6 to rotate through the two bevel gears 9. The two reciprocating lead screws 6 will respectively drive the two threaded sleeves 7 to move. The threaded sleeve 7 will drive the mounting plate 10 to move through the connecting plate 8. The mounting plate 10 will drive the sliding rod 11 to move obliquely. The sliding rod 11 will drive the brush plate 14 to move through the moving plate 12 and the moving rod 13, so that the brush plate 14 moves on the inclined filter plate 2, and the brush plate 14 will brush and clean the impurities on the filter plate 2;

[0042] Step 3: While the two moving plates 12 are moving outward respectively, the moving plate 12 will drive the first inclined panel 15 to move. The inclined surface of the first inclined panel 15 contacts the inclined surface of the second inclined panel 20. Since the limiting cylinder 18 and the limiting rod 19 are at the limit of extension, the first inclined panel 15 will be guided above the second inclined panel 20. The first inclined panel 15 will drive the brush plate 14 to move upward through the moving rod 13, so that the two brush plates 14 will not contact the filter plate 2 during the outward movement, preventing the impurities from being pushed to both sides. When the two first inclined panels 15 move to the limit outward, the first inclined panel 15 will move to the other inclined surface of the second inclined panel 20, and under the downward acting force of the second spring 21, the moving rod 13 will be pulled to drive the brush plate 14 to contact the filter frame 3 and reset downward;

[0043] Step 4. At this time, the reciprocating lead screw 6 will drive the threaded sleeve 7 to move in the reverse direction. The threaded sleeve 7 will drive the sliding rod 11 to move inward through the connecting plate 8 and the mounting plate 10. The sliding rod 11 will drive the brush plate 14 and the first inclined plate 15 to move inward through the moving plate 12. The other inclined surface of the first inclined plate 15 will squeeze the other inclined surface of the second inclined plate 20, pushing the second inclined plate 20 to move upward. The second inclined plate 20 will drive the limiting cylinder 18 and the limiting rod 19 to contract, so that the two brush plates 14 continuously contact and move inward on the filter plate 2, brushing and cleaning the impurities on the filter plate 2 into the filter box 3 for collection. After filtering the cleaning liquid, pull the handle to drive the sealing block 26 to move backward, and remove the filter box 3 from the recycling box 1 for cleaning.

Claims

1. A silicon wafer cleaning liquid recycling device, comprising a recycling box (1) and filter plates (2) fixedly mounted on both sides of the inner cavity of the recycling box (1), characterized in that: A filter frame (3) is arranged between the two filter plates (2), both sides of the front of the recovery box (1) are fixedly connected with fixed plates (4), one side of the fixed plate (4) is rotatably connected with a reciprocating screw (6) through an opening, one side of the front of the recovery box (1) is fixedly connected with a motor (5), the output shaft of the motor (5) is fixedly connected to one end of the left reciprocating screw (6) through a coupling, the opposite ends of the two reciprocating screws (6) are fixedly connected with bevel gears (9), the two bevel gears (9) are meshed, the surface of the reciprocating screw (6) is threadedly connected with a threaded sleeve (7), the A connecting plate (8) is fixedly connected to the surface of the threaded sleeve (7), and a mounting plate (10) is fixedly connected to one side of the connecting plate (8). Both sides of the recovery box (1) and located above the filter frame (3) are slidably connected to sliding rods (11) through openings. One end of the sliding rod (11) is fixedly connected to the mounting plate (10), and the other end of the sliding rod (11) is fixedly connected to a moving plate (12). The top of the moving plate (12) is slidably connected to a moving rod (13) through an opening. One end of the moving rod (13) is fixedly connected to a brush plate (14) that matches the filter plate (2).

2. The device for recycling and reusing silicon wafer cleaning liquid according to claim 1, characterized in that: The other end of the moving rod (13) is fixedly connected to a first inclined plate (15), and a first spring (16) is sleeved on the surface of the moving rod (13) and located between the moving plate (12) and the first inclined plate (15).

3. The device for recycling and reusing silicon wafer cleaning liquid according to claim 2, characterized in that: Both sides of the front and rear of the inner cavity of the recovery box (1) are fixedly connected with a fixing block (17), the bottom of the fixing block (17) is fixedly connected with a limiting cylinder (18), and the interior of the limiting cylinder (18) is slidably connected with a limiting rod (19).

4. The device for recycling and reusing silicon wafer cleaning liquid according to claim 3, characterized in that: One end of the limiting rod (19) is fixedly connected to a second inclined plate (20) adapted to the first inclined plate (15), and a second spring (21) is sleeved on the surfaces of the limiting cylinder (18) and the limiting rod (19).

5. The device for recycling and reusing silicon wafer cleaning liquid according to claim 1, characterized in that: The top of the recovery box (1) is connected to a liquid inlet pipe (22), and one end of the liquid inlet pipe (22) is connected to a liquid passage pipe (23).

6. The device for recycling and reusing silicon wafer cleaning liquid according to claim 5, characterized in that: Both ends of the liquid passage pipe (23) are connected to a water spray pipe (24), and the lower part of the surface of the water spray pipe (24) is connected to a plurality of water outlet heads (25).

7. The device for recycling and reusing silicon wafer cleaning liquid according to claim 1, characterized in that: A sealing block (26) is fixedly connected to the rear of the filter frame (3); the rear of the sealing block (26) penetrates the recovery box (1) and extends to the outside of the recovery box (1); and a rectangular opening matching the sealing block (26) is provided at the rear of the recovery box (1).

8. The device for recycling and reusing silicon wafer cleaning liquid according to claim 1, characterized in that: The bottom of one side of the recovery box (1) is connected to a liquid discharge pipe (27), and the front of the recovery box (1) is fixedly connected to a protective cover (28).

9. A method for using a silicon wafer cleaning liquid recovery and reuse device, characterized in that: The specific steps include: Step 1: Used cleaning liquid is passed into the liquid passing pipe (23) through the liquid inlet pipe (22). The liquid passing pipe (23) will add the cleaning liquid to the two water spray pipes (24), so that the multiple water outlets (25) on the water spray pipes (24) evenly scatter the cleaning liquid on the filter plate (2). The cleaning liquid flows on the filter plate (2) and is filtered by the two inclined filter plates (2). The filtered cleaning liquid reaches the bottom of the recovery box (1). Part of the impurities filtered on the filter plate (2) will flow into the filter frame (3) according to its own weight and the inclination of the cleaning liquid. The impurities are filtered again by the filter frame (3) and the impurities are completely collected in the filter frame (3); Step 2: simultaneously controlling the motor (5) to drive the left reciprocating screw (6) to rotate, the left reciprocating screw (6) will drive the right reciprocating screw (6) to rotate through two bevel gears (9), the two reciprocating screws (6) will respectively drive the two threaded sleeves (7) to move, the threaded sleeves (7) will drive the mounting plate (10) to move through the connecting plate (8), the mounting plate (10) will drive the sliding rod (11) to move in an inclined manner, the sliding rod (11) will drive the brush plate (14) to move through the moving plate (12) and the moving rod (13), so that the brush plate (14) moves on the inclined filter plate (2), and the brush plate (14) will brush and clean the impurities on the filter plate (2); Step 3: When the two movable plates (12) move outwards respectively, the movable plates (12) drive the first inclined plate (15) to move, and the inclined surface of the first inclined plate (15) contacts the inclined surface of the second inclined plate (20). Since the limiting cylinder (18) and the limiting rod (19) are at the extension limit, the first inclined plate (15) will be guided to the top of the second inclined plate (20). The first inclined plate (15) will drive the brush plate (14) to move upwards through the movable rod (13), so that the two brush plates (14) will not contact the filter plate (2) during the process of moving outwards, so as to prevent impurities from being pushed to both sides. When the two first inclined plates (15) move outwards to the limit, the first inclined plate (15) will move to the other inclined surface of the second inclined plate (20), and through the downward force of the second spring (21), the movable rod (13) will be pulled to drive the brush plate (14) to contact the filter frame (3) downwards to reset. Step 4: At this time, the reciprocating screw (6) will drive the threaded sleeve (7) to move in the opposite direction, and the threaded sleeve (7) will drive the sliding rod (11) to move inward through the connecting plate (8) and the mounting plate (10), and the sliding rod (11) will drive the brush plate (14) and the first inclined plate (15) to move inward through the moving plate (12), and the other inclined surface of the first inclined plate (15) will squeeze the other inclined surface of the second inclined plate (20), pushing the second inclined plate (20) to move upward, and the second inclined plate (20) will drive the limiting cylinder (18) and the limiting rod (19) to shrink, so that the two brush plates (14) continue to contact the filter plate (2) and move inward, brushing and cleaning the impurities on the filter plate (2) into the filter frame (3) for collection. After the cleaning liquid is filtered, the handle is pulled to drive the sealing block (26) to move backward, and the filter frame (3) is removed from the recovery box (1) for cleaning.

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