Linear anode layer ion source

Abstract

The invention discloses a linear anode layer ion source, and relates to the technical field of vacuum ion sources, an anode cooling channel is arranged in an annular anode, the bottom of the anode cooling channel is connected with two anode water pipes, and each anode water pipe sequentially penetrates through an annular cooling plate and a waterway plate to extend to the outside and is fixed on the waterway plate; the magnet mechanism is arranged in the annular cooling plate and is adsorbed on the waterway plate, the inner cathode is fixed at the top of the magnet mechanism and is in contact with the top of the annular cooling plate, and the annular outer cathode is fixed at the top of the cathode frame and is in contact with the top of the annular cooling plate; a cathode cooling channel is arranged at the top of the waterway plate, the top of the cathode cooling channel is of an open structure and is in contact with the bottom surface of the annular cooling plate, and the cathode cooling channel is connected with two cathode water pipes. According to the linear anode layer ion source, the anode and the cathode can be fully and uniformly cooled, and the deposition performance and the stability of equipment are prevented from being influenced.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum ion sources, and particularly to a linear anode layer ion source. Background Art

[0002] With the development of the vacuum coating industry, linear anode layer ion sources are increasingly widely used in fields such as surface treatment, thin film deposition, and ion implantation. Due to their high ion production capacity, linear anode layer ion sources have become important equipment for many industrial productions. However, the current cooling method used for linear anode layer ion sources has poor effects and is prone to uneven cooling. Under high-power and long-term operating conditions, the cathode and anode continuously release heat energy during the ionization process. If this heat energy cannot be dissipated in a timely and effective manner, it will cause the temperature inside the equipment to rise rapidly, further affecting the deposition performance and stability of the equipment. Summary of the Invention

[0003] To solve the above technical problems, the present invention provides a linear anode layer ion source, which can achieve sufficient and uniform cooling of the anode and cathode, and avoid affecting the deposition performance and stability of the equipment.

[0004] To achieve the above object, the present invention provides the following solutions:

[0005] The present invention provides a linear anode layer ion source, which includes an inner cathode, an annular outer cathode, a cathode frame, a waterway plate, an annular cooling plate, a magnet mechanism, an annular anode, an air inlet mechanism and a fixing mechanism. The waterway plate is fixed to the upper part of the fixing mechanism, the cathode frame is fixed to the upper part of the waterway plate, the annular cooling plate is fixed to the upper part of the waterway plate and is located inside the cathode frame. A first annular groove is arranged on the upper part of the annular cooling plate, and the annular anode is arranged in the first annular groove. Insulation is provided between the annular anode and the annular cooling plate. An anode cooling channel is arranged inside the annular anode, and the bottom of the anode cooling channel is connected to two anode water pipes. Each of the anode water pipes passes through the annular cooling plate and the waterway plate in sequence and extends to the outside, and is fixed to the waterway plate. Insulation is provided between the anode water pipe and the annular cooling plate and the waterway plate. The magnet mechanism is arranged inside the annular cooling plate and is adsorbed on the waterway plate. The inner cathode is fixed to the top of the magnet mechanism and is in contact with the top of the annular cooling plate. The annular outer cathode is fixed to the top of the cathode frame and is in contact with the top of the annular cooling plate. An installation hole is arranged in the middle of the fixing mechanism, and the air inlet mechanism is arranged in the installation hole and is fixed to the lower part of the waterway plate. A first gas channel is arranged on the waterway plate. There is a gap between the magnet mechanism and the inner side surface of the inner side wall of the annular cooling plate. An air outlet part communicating the gap with the discharge area is arranged at the top of the inner side wall of the annular cooling plate. The air inlet mechanism, the first gas channel, the gap and the air outlet part are communicated in sequence. A cathode cooling channel is arranged on the top of the waterway plate. The top of the cathode cooling channel is of an open structure and is in contact with the bottom surface of the annular cooling plate. The cathode cooling channel is connected to two cathode water pipes.

[0006] Preferably, it further includes an annular shielding plate. The annular shielding plate is arranged in the first annular groove. The lower part of the annular shielding plate is fixed to the annular cooling plate. A second annular groove is arranged on the upper part of the annular shielding plate, and the annular anode is arranged in the second annular groove. Insulation is provided between the annular anode and the annular shielding plate. Each of the anode water pipes passes through the annular shielding plate, the annular cooling plate and the waterway plate in sequence and extends to the outside. Insulation is provided between the anode water pipe and the annular shielding plate.

[0007] Preferably, an insulating cylinder is arranged between each of the anode water pipes and the annular shielding plate, the annular cooling plate and the waterway plate. An annular insulating gasket is fixedly sleeved on the upper end of each insulating cylinder. Each of the annular insulating gaskets is arranged between the annular anode and the annular shielding plate.

[0008] Preferably, external threads are provided at the lower ends of the anode water pipes, and a locking nut is installed at the lower part of each anode water pipe. The locking nut is used to abut against the bottom of the water circuit board.

[0009] Preferably, the air intake mechanism includes a first air intake plate, a second air intake plate, and a third air intake plate arranged in sequence from bottom to top. A first air chamber is provided at the upper part of the first air intake plate. The top of the first air chamber is an open structure and is in contact with the bottom surface of the second air intake plate. A first air hole communicating with the first air chamber is provided in the middle of the first air intake plate; a second air chamber is provided at the upper part of the second air intake plate. The top of the second air chamber is an open structure and is in contact with the bottom surface of the third air intake plate. Second air holes communicating with the first air chamber and the second air chamber are provided at both ends of the first air intake plate; a third air chamber is provided at the upper part of the third air intake plate. The top of the third air chamber is an open structure and is in communication with the intake end of the first gas passage. Third air holes communicating with the second air chamber and the third air chamber are provided at both ends and in the middle of the third air chamber.

[0010] Preferably, a first sealing ring is provided between the top of the first air intake plate and the bottom of the second air intake plate. The first sealing ring is sleeved outside the first air chamber with a gap; a second sealing ring is provided between the top of the second air intake plate and the bottom of the third air intake plate. The second sealing ring is sleeved outside the second air chamber with a gap; a third sealing ring is provided between the top of the third air intake plate and the bottom of the water circuit board. The third sealing ring is sleeved outside the third air chamber with a gap.

[0011] Preferably, the first gas passage is provided in the middle of the water circuit board. There are two cathode water cooling channels, and the two cathode water cooling channels are respectively arranged on both sides of the first gas passage. Two fourth sealing rings are provided between the top of the water circuit board and the bottom of the annular cooling plate. Each fourth sealing ring is sleeved outside one of the cathode water cooling channels with a gap.

[0012] Preferably, the magnet mechanism includes a magnet group and a magnet cover plate. The magnet group is arranged inside the annular cooling plate and is adsorbed on the water circuit board. The magnet cover plate is adsorbed on the upper part of the magnet group, and the inner cathode is fixed to the top of the magnet cover plate.

[0013] Preferably, a support step is formed on the inner side surface of the inner side wall of the annular cooling plate. The magnet cover plate is disposed on the support step and adsorbed on the upper part of the magnet group. The gap includes a first gas gap and a second gas gap. There is the first gas gap between the magnet group and the inner side surface of the inner side wall of the annular cooling plate. The air outlet end of the first gas channel is communicated with the first gas gap. There is the second gas gap between the magnet cover plate and the inner side surface of the inner side wall of the annular cooling plate. A plurality of second gas channels are sequentially arranged on both sides of the magnet cover plate along the length direction of the magnet cover plate. The second gas channels are used for communicating the first gas gap and the second gas gap. The second gas channel includes a vertical communication hole, an upper communication groove and a lower communication groove respectively disposed above the vertical communication hole. The vertical communication hole penetrates through the upper and lower ends of the magnet cover plate. The upper communication groove and the lower communication groove both penetrate through the side surface of the magnet cover plate. The air outlet part is an air outlet communication groove. A plurality of air outlet communication grooves are arranged at the top of the inner side wall of the annular cooling plate. The air outlet communication grooves are used for communicating the second gas gap with the discharge area.

[0014] Preferably, the first gas channel includes a strip-shaped groove, a plurality of first hole groups and a plurality of second communication holes. The strip-shaped groove is disposed in the middle of the bottom surface of the water channel plate. The length direction of the strip-shaped groove is consistent with the length direction of the water channel plate. A plurality of the first hole groups are sequentially arranged on the water channel plate along the length direction of the water channel plate. Each first hole group includes two first communication holes. The two first communication holes in each first hole group are respectively disposed on both sides of the strip-shaped groove. Each first communication hole penetrates through the upper and lower ends of the water channel plate. The lower part of each first communication hole is communicated with the strip-shaped groove through a first communication groove. The upper parts of the two first communication holes in each first hole group are communicated through a second communication groove. The strip-shaped groove, the first communication groove, the first communication hole, the second communication groove and the first gas gap are sequentially communicated. A plurality of the second communication holes are sequentially arranged in the strip-shaped groove along the length direction of the strip-shaped groove. Each second communication hole penetrates through the upper and lower ends of the water channel plate. A third communication groove is disposed above each second communication hole. The width of the magnet group is smaller than the width of the third communication groove. The strip-shaped groove, the second communication hole, the third communication groove and the first gas gap are sequentially communicated.

[0015] The present invention has achieved the following technical effects compared with the prior art:

[0016] In the present invention, an anode cooling channel is provided inside the annular anode. The bottom of the anode cooling channel is connected to two anode water pipes. One anode water pipe is used to introduce cooling water, and the other anode water pipe is used to discharge the cooling water after heat exchange, thereby realizing the first-stage cooling of the anode region and the ion source discharge region of the linear anode layer. The inner cathode is fixed to the top of the magnet mechanism and is in contact with the top of the annular cooling plate. The annular outer cathode is fixed to the top of the cathode frame and is in contact with the top of the annular cooling plate. A cathode cooling channel is provided on the top of the water circuit plate. The top of the cathode cooling channel is an open structure and is in contact with the bottom surface of the annular cooling plate. The cooling water in the cathode cooling channel can dissipate the heat transferred by the annular cooling plate, realizing the second-stage cooling. In the present invention, through the bipolar cooling system, sufficient and uniform cooling of the anode and cathode can be achieved, thereby solving the problem of uneven cooling of the linear anode layer ion source under high-power and long-time working conditions, avoiding the rapid increase in the internal temperature of the equipment, and avoiding affecting the deposition performance and stability of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0018] Figure 1 The first three-dimensional structure diagram of the linear anode layer ion source provided by the present invention;

[0019] Figure 2 The second three-dimensional structure diagram of the linear anode layer ion source provided by the present invention;

[0020] Figure 3 The bottom view of the linear anode layer ion source provided by the present invention;

[0021] Figure 4 For Figure 3 The cross-sectional view taken along the line A-A in

[0022] Figure 5 For Figure 3 The cross-sectional view taken along the line B-B in

[0023] Figure 6 For Figure 3 The cross-sectional view taken along the line C-C in

[0024] Figure 7 For Figure 6 The partial enlarged view at D in

[0025] Figure 8 The structural schematic diagram of the annular anode in the linear anode layer ion source provided by the present invention;

[0026] Figure 9 Schematic diagram of the annular shielding plate in the linear anode layer ion source provided by the present invention;

[0027] Figure 10 Schematic diagram of the annular cooling plate in the linear anode layer ion source provided by the present invention;

[0028] Figure 11 is Figure 10 Partial enlarged view at E in

[0029] Figure 12 Schematic diagram of the magnet cover plate in the linear anode layer ion source provided by the present invention;

[0030] Figure 13 is Figure 12 Partial enlarged view at F in

[0031] Figure 14 First three-dimensional structure diagram of the water channel plate in the linear anode layer ion source provided by the present invention;

[0032] Figure 15 is Figure 14 Partial enlarged view at G in

[0033] Figure 16 Second three-dimensional structure diagram of the water channel plate in the linear anode layer ion source provided by the present invention;

[0034] Figure 17 is Figure 16 Partial enlarged view at H in

[0035] Figure 18 Schematic diagram of the first air inlet plate in the linear anode layer ion source provided by the present invention;

[0036] Figure 19 Schematic diagram of the second air inlet plate in the linear anode layer ion source provided by the present invention;

[0037] Figure 20 Schematic diagram of the third air inlet plate in the linear anode layer ion source provided by the present invention;

[0038] Figure 21 Schematic diagram of the bottom plate in the linear anode layer ion source provided by the present invention;

[0039] Figure 22 Schematic diagram of the fixing plate in the linear anode layer ion source provided by the present invention;

[0040] Figure 23 Schematic diagram of the water channel cooling simulation of the linear anode layer ion source provided by the present invention.

[0041] Description of reference numerals: 1. Inner cathode; 2. Annular outer cathode; 3. Cathode frame; 4. Annular cooling plate; 5. First annular groove; 6. Annular shielding plate; 7. Second annular groove; 8. Annular anode; 9. Anode cooling channel; 10. Anode water pipe; 11. Insulating cylinder; 12. Annular insulating gasket; 13. Locking nut; 14. Gas outlet communication groove; 15. Support step; 16. Magnet; 17. Magnet cover plate; 18. Vertical communication hole; 19. Upper communication groove; 20. Lower communication groove; 21. Water circuit plate; 22. Cathode cooling channel; 23. Strip-shaped groove; 24. First communication hole; 25. First communication groove; 26. Second communication groove; 27. Second communication hole; 28. Third communication groove; 29. First air inlet plate; 30. First air hole; 31. First air chamber; 32. Second air inlet plate; 33. Second air hole; 34. Second air chamber; 35. Third air inlet plate; 36. Third air hole; 37. Third air chamber; 38. Bottom plate; 39. First strip-shaped hole; 40. Fixed plate; 41. Second strip-shaped hole; 42. Cathode water pipe; 43. First sealing ring; 44. Second sealing ring; 45. Third sealing ring; 46. Fourth sealing ring; 47. Fifth sealing ring; 48. Sixth sealing ring; 49. Seventh sealing ring; 50. First annular sealing groove; 51. Second annular sealing groove; 52. Third annular sealing groove; 53. Fourth annular sealing groove; 54. Fifth annular sealing groove; 55. Seventh annular sealing groove. Detailed implementation manners

[0042] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0043] The purpose of the present invention is to provide a linear anode layer ion source, which can achieve sufficient and uniform cooling of the anode and the cathode, and avoid affecting the deposition performance and stability of the device.

[0044] To make the above objects, features and advantages of the present invention more obvious and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific implementation manners.

[0045] As Figures 1 - 23As shown in the figure, this embodiment provides a linear anode layer ion source, which includes an inner cathode 1, a circular outer cathode 2, a cathode frame 3, a water channel plate 21, a circular cooling plate 4, a magnet mechanism, a circular anode 8, an air intake mechanism, and a fixing mechanism. The water channel plate 21 is fixed to the upper part of the fixing mechanism, the cathode frame 3 is fixed to the upper part of the water channel plate 21, the circular cooling plate 4 is fixed to the upper part of the water channel plate 21 and is located inside the cathode frame 3. A first circular groove 5 is provided on the upper part of the circular cooling plate 4. The inner side of the first circular groove 5 is the inner side wall of the circular cooling plate 4, and the outer side of the first circular groove 5 is the outer side wall of the circular cooling plate 4. The circular anode 8 is arranged in the first circular groove 5, and is insulated from the circular cooling plate 4. An anode cooling channel 9 is arranged inside the circular anode 8. The bottom of the anode cooling channel 9 is connected to two anode water pipes 10. Each anode water pipe 10 passes through the circular cooling plate 4 and the water channel plate 21 in sequence and extends to the outside, and is fixed to the water channel plate 21. The anode water pipe 10 is insulated from the circular cooling plate 4 and the water channel plate 21.

[0046] The magnet mechanism is arranged inside the circular cooling plate 4 and is adsorbed on the water channel plate 21. The inner cathode 1 is fixed to the top of the magnet mechanism and is in contact with the top of the circular cooling plate 4. The circular outer cathode 2 is fixed to the top of the cathode frame 3 and is in contact with the top of the circular cooling plate 4.

[0047] The magnet mechanism mainly transfers the magnetic field to the inner cathode 1, and the cathode frame 3 mainly transfers the magnetic field to the circular outer cathode 2. The inner cathode 1 and the circular outer cathode 2 form a closed magnetic field, so that the number of collisions between electrons and gas molecules increases, and the ionization rate is significantly improved. The circular anode 8 mainly plays a role in collecting electrons in the ion source and forms an electric field region. After the electrons are emitted from the cathode, they are attracted by the circular anode 8, accelerated and cause gas ionization to form plasma.

[0048] A through hole is provided in the middle of the fixing mechanism. The air intake mechanism is arranged in the through hole and is fixed to the lower part of the water channel plate 21. A first gas channel is provided on the water channel plate 21. There is a gap between the magnet mechanism and the inner side surface of the inner side wall of the circular cooling plate 4. An air outlet part communicating the gap with the discharge area is provided at the top of the inner side wall of the circular cooling plate 4. The air intake mechanism, the first gas channel, the gap and the air outlet part are communicated in sequence. The air intake mechanism in this embodiment is used for introducing gas into the linear ion source. The air intake end of the air intake mechanism is connected to the external gas, and the air outlet end of the air intake mechanism is connected to the air intake end of the first gas channel.

[0049] A cathode cooling channel 22 is provided on the top of the water channel plate 21. The top of the cathode cooling channel 22 is an open structure and is in contact with the bottom surface of the circular cooling plate 4. The cathode cooling channel 22 is connected to two cathode water pipes 42. The main function of the cathode cooling channel 22 in this embodiment is to cool the circular cooling plate 4. The circular cooling plate 4 is made of a high thermal conductivity material and is mainly used for cooling the cathode.

[0050] In this embodiment, an anode cooling channel 9 is arranged inside the annular anode 8. One anode water pipe 10 is used to introduce cooling water, and the other anode water pipe 10 is used to discharge the cooling water after heat exchange, so as to realize the first-stage cooling of the anode area and the ion source discharge area of the linear anode layer. The inner cathode 1 is in contact with the top of the annular cooling plate 4, the annular outer cathode 2 is in contact with the top of the annular cooling plate 4, a cathode cooling channel 22 is arranged on the top of the water channel plate 21. The top of the cathode cooling channel 22 is an open structure and is in contact with the bottom surface of the annular cooling plate 4. An annular cooling plate 4 made of a high thermal conductivity material is arranged at the lower end of the ion source discharge area to enhance the heat conduction efficiency, so as to quickly transfer the heat at the upper end of the linear anode layer ion source to the lower end of the annular cooling plate 4. The cooling water in the cathode cooling channel 22 can dissipate the heat transferred by the annular cooling plate 4 to realize the second-stage cooling. In this embodiment, the bipolar cooling system can realize the full and uniform cooling of the anode and the cathode, thus solving the problem of uneven cooling of the linear anode layer ion source under high-power and long-time working conditions, avoiding the rapid increase of the internal temperature of the equipment, and avoiding affecting the deposition performance and stability of the equipment.

[0051] This embodiment further includes an annular shielding plate 6. The annular shielding plate 6 is arranged in the first annular groove 5. The lower part of the annular shielding plate 6 is fixed on the annular cooling plate 4. A second annular groove 7 is arranged on the upper part of the annular shielding plate 6. The annular anode 8 is arranged in the second annular groove 7. Insulation is provided between the annular anode 6 and the annular shielding plate 6. Each anode water pipe 10 passes through the annular shielding plate 6, the annular cooling plate 4 and the water channel plate 21 in sequence and extends to the outside. Insulation is provided between the anode water pipe 10 and the annular shielding plate 6. By arranging the annular shielding plate 6, carbon generated near the annular anode 6 is prevented from contaminating the annular cooling plate 4.

[0052] The annular cooling plate 4 and the annular shielding plate 6 in this embodiment are both waist-shaped plates with a waist-shaped hole in the middle.

[0053] As Figure 4 shown, an insulating cylinder 11 is arranged between each anode water pipe 10 and the annular shielding plate 6, the annular cooling plate 4 and the water channel plate 21. An annular insulating gasket 12 is fixedly sleeved on the upper end of each insulating cylinder 11. Each annular insulating gasket 12 is arranged between the annular anode 8 and the annular shielding plate 6, so as to realize insulation between the annular anode 6 and the annular shielding plate 6 and insulation between the anode water pipe 10 and the annular shielding plate 6, the annular cooling plate 4 and the water channel plate 21, so as to prevent short circuit between the cathode and the anode. The insulating cylinder 11 and the annular insulating gasket 12 in this embodiment are of an integral structure.

[0054] External threads are provided at the lower ends of each anode water pipe 10, and a locking nut 13 is installed at the lower part of each anode water pipe 10. The locking nut 13 is used to abut against the bottom of the water circuit board 21, thereby realizing the fixation of the anode water pipe 10 and the annular anode 8.

[0055] In order to achieve the full circulation of the cooling water, in this embodiment, the two anode water pipes 10 are respectively arranged at both ends of the lower part of the annular anode 8.

[0056] As Figure 6 and Figure 7 shown, the air intake mechanism includes three first air intake plates 29, second air intake plates 32, and third air intake plates 35 arranged in sequence from bottom to top. A first air chamber 31 is provided at the upper part of the first air intake plate 29. The top of the first air chamber 31 is of an open structure and is in contact with the bottom surface of the second air intake plate 32. A first air hole 30 communicating with the first air chamber 31 is provided in the middle of the first air intake plate 29; a second air chamber 34 is provided at the upper part of the second air intake plate 32. The top of the second air chamber 34 is of an open structure and is in contact with the bottom surface of the third air intake plate 35. Second air holes 33 communicating with the first air chamber 31 and the second air chamber 34 are provided at both ends of the first air intake plate 29; a third air chamber 37 is provided at the upper part of the third air intake plate 35. The top of the third air chamber 37 is of an open structure and is in contact with the intake end of the first gas channel. Third air holes 36 communicating with the second air chamber 34 and the third air chamber 37 are provided at both ends and in the middle of the third air chamber 37. The first air hole 30 of the first air intake plate 29 is used for gas inlet. The second air intake plate 32 initially disperses the gas in the first air intake plate 29 evenly. The third air intake plate 35 further disperses the gas in the second air intake plate 32 evenly. The first air chamber 31, the second air chamber 34, and the third air chamber 37 are all used for the even dispersion of gas.

[0057] The first air intake plate 29 is a gas inlet plate. The first air chamber 31 is arranged at the upper end of the first air intake plate 29 to make the gas flow to both ends. The second air holes 33 are arranged at the lower end of the second air intake plate 32, and the second air chamber 34 is arranged at the upper end. The second air holes 33 can make the gas flow evenly to both ends. The second air chamber 34 can accurately control the gas flow rate. The second air intake plate 32 stores and controls the introduced gas to initially obtain stable and uniform gas. The third air holes 36 are arranged at the lower end of the third air intake plate 35, and the third air chamber 37 is arranged at the upper end to further process the gas in the second air intake plate 32, thereby obtaining stable and uniform gas. The three-layer air intake structure design in this embodiment enables the gas to be evenly distributed in the discharge area of the linear anode layer ion source before entering the discharge area, thereby improving the efficiency and stability of the ion source.

[0058] Specifically, the water channel plate 21, the first air inlet plate 29, the second air inlet plate 32, and the third air inlet plate 35 are all strip-shaped plates. The third air inlet plate 35 is fixed to the lower part of the water channel plate 21 by screws, and the first air inlet plate 29 and the second air inlet plate 32 are fixed to the third air inlet plate 35 by screws.

[0059] A first sealing ring 43 is provided between the top of the first air inlet plate 29 and the bottom of the second air inlet plate 32. The first sealing ring 43 is sleeved outside the first air chamber 31 with a gap; a second sealing ring 44 is provided between the top of the second air inlet plate 32 and the bottom of the third air inlet plate 35. The second sealing ring 44 is sleeved outside the second air chamber 34 with a gap; a third sealing ring 45 is provided between the top of the third air inlet plate 35 and the bottom of the water channel plate 21. The third sealing ring 45 is sleeved outside the third air chamber 37 with a gap. By providing the first sealing ring 43, the second sealing ring 44, and the third sealing ring 45, gas leakage is prevented.

[0060] In this specific embodiment, a first annular sealing groove 50 for installing the first sealing ring 43 is provided at the top of the first air inlet plate 29, a second annular sealing groove 51 for installing the second sealing ring 44 is provided at the top of the second air inlet plate 32, and a third annular sealing groove 52 for installing the third sealing ring 45 is provided at the top of the third air inlet plate 35.

[0061] The first gas channel is provided in the middle of the water channel plate 21. The cathode water cooling channels are provided in two numbers, and the two cathode water cooling channels are respectively provided on both sides of the first gas channel, thereby improving the cathode cooling effect. Two fourth sealing rings 46 are provided between the top of the water channel plate 21 and the bottom of the annular cooling plate 4. Each fourth sealing ring 46 is sleeved outside one cathode water cooling channel with a gap. By providing the fourth sealing ring 46, cooling water leakage is prevented.

[0062] In this specific embodiment, a fourth annular sealing groove 53 for installing the fourth sealing ring 46 is provided at the top of the water channel plate 21.

[0063] In this embodiment, one cathode water pipe 42 is respectively provided at both ends of the lower part of each cathode water cooling channel. Specifically, an external thread is provided on the upper part of the cathode water pipe 42, and a vertical threaded hole connected to the cathode water cooling channel is provided on the water channel plate 21. The cathode water pipe 42 is installed in the vertical threaded hole.

[0064] The magnet mechanism includes a magnet group and a magnet cover plate 17. The magnet group is arranged inside the annular cooling plate 4 and is adsorbed on the water channel plate 21. The magnet cover plate 17 is adsorbed on the upper part of the magnet group, and the inner cathode 1 is fixed to the top of the magnet cover plate 17.

[0065] The magnet group in this embodiment includes a plurality of magnets 16 arranged in sequence along the length direction of the water channel plate 21. The inner cathode 1 is fixed on the magnet cover plate 17 by screws, the annular outer cathode 2 is fixed on the cathode frame 3 by screws, the cathode frame 3 is fixed on the water channel plate 21 by screws, and the annular cooling plate 4 is fixed on the water channel plate 21 by screws.

[0066] On the inner side surface of the inner side wall of the annular cooling plate 4, a support step 15 is provided. The magnet cover plate 17 is arranged on the support step 15 and adsorbed on the upper part of the magnet group; the gap includes a first gas gap and a second gas gap. There is a first gas gap between the magnet group and the inner side surface of the inner side wall of the annular cooling plate 4, and the outlet end of the first gas channel is communicated with the first gas gap. There is a second gas gap between the magnet cover plate 17 and the inner side surface of the inner side wall of the annular cooling plate 4; on both sides of the magnet cover plate 17 along the length direction of the magnet cover plate 17, a plurality of second gas channels are sequentially arranged. The second gas channels are used to communicate the first gas gap and the second gas gap.

[0067] The second gas channel includes a vertical communication hole 18, an upper communication groove 19 and a lower communication groove 20 respectively arranged at the upper part of the vertical communication hole 18. The vertical communication hole 18 penetrates through the upper and lower ends of the magnet cover plate 17. The upper communication groove 19 and the lower communication groove 20 both penetrate through the side surface of the magnet cover plate 17. The first gas gap is communicated with the second gas gap through the lower communication groove 20. The first gas gap is also communicated with the second gas gap through the lower communication groove 20, the vertical communication hole 18 and the upper communication groove 19. The air outlet part is an air outlet communication groove 14. A plurality of air outlet communication grooves 14 are arranged at the top of the inner side wall of the annular cooling plate 4. The air outlet communication grooves 14 are used to communicate the second gas gap with the discharge area.

[0068] In this embodiment, the magnet cover plate 17 mainly transmits the magnetic field to the inner cathode 1 and makes the ion source intake air evenly. The magnet 16 mainly provides a magnetic field for the linear anode layer ion source.

[0069] The first gas channel includes a strip-shaped groove 23, a plurality of first hole groups and a plurality of second communication holes 27. The strip-shaped groove 23 is arranged in the middle of the bottom surface of the water channel plate 21. The length direction of the strip-shaped groove 23 is consistent with the length direction of the water channel plate 21. A plurality of first hole groups are sequentially arranged on the water channel plate 21 along the length direction of the water channel plate 21. Each first hole group includes two first communication holes 24. The two first communication holes 24 in each first hole group are respectively arranged on both sides of the strip-shaped groove 23. Each first communication hole 24 penetrates through the upper and lower ends of the water channel plate 21. The lower part of each first communication hole 24 is communicated with the strip-shaped groove 23 through a first communication groove 25. The upper parts of the two first communication holes 24 in each first hole group are communicated through a second communication groove 26. The strip-shaped groove 23, the first communication groove 25, the first communication hole 24, the second communication groove 26 and the first gas gap are sequentially communicated, so that the gas in the third gas chamber 37 can enter the first gas gap.

[0070] A plurality of second communication holes 27 are sequentially arranged in the strip-shaped groove 23 along the length direction of the strip-shaped groove 23. Each second communication hole 27 penetrates through the upper and lower ends of the water channel plate 21. A third communication groove 28 is arranged at the upper part of each second communication hole 27. The width of the magnet group is smaller than the width of the third communication groove 28. The strip-shaped groove 23, the second communication holes 27, the third communication groove 28 and the first gas gap are sequentially communicated, so that the gas in the third gas chamber 37 can enter the first gas gap.

[0071] In this embodiment, when the gas flows through the water channel plate 21, a plurality of gas flow structures are provided, so that the gas in the third gas chamber 37 can uniformly enter the first gas gap. At the same time, the gas in the first gas gap can uniformly enter the second gas gap through the plurality of gas flow structures on the magnet cover plate 17, and the gas in the second gas gap can be uniformly distributed in the discharge area of the linear anode layer ion source through the plurality of air outlet communication grooves 14 on the annular cooling plate 4.

[0072] As Figure 21 and Figure 22 shown, the fixing mechanism includes a fixing plate 40 and a bottom plate 38 fixed to the upper part of the fixing plate 40. A first strip-shaped hole 39 is arranged in the middle of the fixing plate 40, and a second strip-shaped hole 41 is arranged on the bottom plate 38. The first strip-shaped hole 39 and the second strip-shaped hole 41 are connected to form a mounting hole. The water channel plate 21 is fixed to the upper part of the bottom plate 38. A fifth sealing ring 47 is arranged between the top of the bottom plate 38 and the bottom of the water channel plate 21. The fifth sealing ring 47 is sleeved outside the second strip-shaped hole 41 with a gap. A sixth sealing ring 48 is arranged between the top of the fixing plate 40 and the bottom of the bottom plate 38. The fifth sealing ring 47 is sleeved outside the second strip-shaped hole 41 with a gap. A seventh sealing ring 49 is arranged on the top of the fixing plate 40. The seventh sealing ring 49 is sleeved outside the bottom plate 38 with a gap. The fixing plate 40 is used to be fixed on the vacuum furnace, and the seventh sealing ring 49 is used to realize the seal between the fixing plate 40 and the vacuum furnace.

[0073] In this embodiment, the bottom plate 38 is fixed on the water channel plate 21 by screws, and the fixing plate 40 is fixed on the bottom plate 38 by screws. During use, the fixing plate 40 is fixed on the vacuum furnace body by screws. The fifth sealing ring 47 between the bottom plate 38 and the water channel plate 21 and the sixth sealing ring 48 between the fixing plate 40 and the bottom plate 38 are used to prevent gas leakage.

[0074] In this specific embodiment, a fifth annular sealing groove 54 for installing the fifth sealing ring 47 is arranged on the top of the bottom plate 38, a sixth annular sealing groove for installing the sixth sealing ring 48 is arranged on the bottom of the bottom plate 38, and a seventh annular sealing groove 55 for installing the seventh sealing ring 49 is arranged on the top of the fixing plate 40.

[0075] As Figure 23As shown, the water-cooling system of the linear anode layer ion source in this embodiment was simulated. It can be seen that the temperature in the discharge region of the linear anode layer ion source is approximately 320K, and the temperature in the two end regions is relatively high, about 340K, but the overall temperature in the discharge region of the linear anode layer ion source is relatively low. The temperature on the back of the linear anode layer ion source is maintained at 295K, indicating that the water-cooling effect is good.

[0076] In this embodiment, the linear anode layer ion source can maintain a relatively low temperature under high-power and long-time working conditions through the design of a two-stage cooling system, thereby ensuring the stable performance output of the ion source and reducing the influence of temperature fluctuations on the quality of the ion beam. The design of the multi-layer intake plate structure can evenly disperse the gas before it enters the discharge region of the linear anode layer ion source, ensuring a stable gas flow during the operation of the ion source, and thus improving the coating quality of the linear anode layer ion source.

[0077] In this specification, specific examples are used to elaborate on the principles and implementation manners of the present invention. The description of the above embodiments is only used to help understand the method and its core idea of the present invention; at the same time, for those of ordinary skill in the art, according to the idea of the present invention, there will be changes in the specific implementation manners and application scopes. In summary, the content of this specification should not be construed as a limitation to the present invention.

Claims

1. A linear anode layer ion source, characterized in that: The invention comprises an inner cathode, an annular outer cathode, a cathode frame, a waterway plate, an annular cooling plate, a magnet mechanism, an annular anode, an air intake mechanism and a fixing mechanism, wherein the waterway plate is fixed to the upper part of the fixing mechanism, the cathode frame is fixed to the upper part of the waterway plate, the annular cooling plate is fixed to the upper part of the waterway plate and is located inside the cathode frame, a first annular groove is provided on the upper part of the annular cooling plate, the annular anode is provided in the first annular groove, the annular anode is insulated from the annular cooling plate, an anode cooling channel is provided inside the annular anode, the bottom of the anode cooling channel is connected to two anode water pipes, each of the anode water pipes passes through the annular cooling plate and the waterway plate in sequence to extend to the outside and is fixed to the waterway plate, the anode water pipe is insulated from the annular cooling plate and the waterway plate; the magnet mechanism is provided inside the annular cooling plate, and is adsorbed on the waterway plate, the inner cathode is fixed on the top of the magnet mechanism and contacts with the top of the annular cooling plate, the annular outer cathode is fixed on the top of the cathode frame and contacts with the top of the annular cooling plate; a mounting hole is provided in the middle of the fixing mechanism, the air intake mechanism is provided in the mounting hole and fixed to the lower part of the waterway plate, a first gas channel is provided on the waterway plate, there is a gap between the magnet mechanism and the inner side surface of the inner side wall of the annular cooling plate, an air outlet portion connecting the gap with the discharge area is provided on the top of the inner side wall of the annular cooling plate, the air intake mechanism, the first gas channel, the gap and the air outlet portion are connected in sequence; a cathode cooling channel is provided on the top of the waterway plate, the top of the cathode cooling channel is an open structure and contacts with the bottom surface of the annular cooling plate, and the cathode cooling channel is connected to two cathode water pipes.

2. The linear anode layer ion source according to claim 1, characterized in that: It also includes an annular shielding plate, which is arranged in the first annular groove. The lower part of the annular shielding plate is fixed to the annular cooling plate. The upper part of the annular shielding plate is provided with a second annular groove. The annular anode is arranged in the second annular groove. The annular anode is insulated from the annular shielding plate. Each of the anode water pipes passes through the annular shielding plate, the annular cooling plate and the waterway plate in sequence and extends to the outside. The anode water pipe is insulated from the annular shielding plate.

3. The linear anode layer ion source according to claim 2, characterized in that: An insulating tube is arranged between each anode water pipe and the annular shielding plate, the annular cooling plate and the waterway plate, and an annular insulating gasket is fixedly sleeved on the upper end of each insulating tube, and each annular insulating gasket is arranged between the annular anode and the annular shielding plate.

4. The linear anode layer ion source according to claim 1, characterized in that: The lower end of each anode water pipe is provided with an external thread, and the lower part of each anode water pipe is installed with a locking nut, and the locking nut is used to abut against the bottom of the waterway plate.

5. The linear anode layer ion source according to claim 1, characterized in that: The air intake mechanism includes three first air intake plates, a second air intake plate and a third air intake plate which are arranged in sequence from bottom to top. A first air chamber is arranged on the upper part of the first air intake plate, and the top of the first air chamber is an open structure and contacts with the bottom surface of the second air intake plate, and a first air hole which is connected with the first air chamber is arranged in the middle part of the first air intake plate; a second air chamber is arranged on the upper part of the second air intake plate, and the top of the second air chamber is an open structure and contacts with the bottom surface of the third air intake plate, and second air holes which are connected with the first air chamber and the second air chamber are arranged at both ends of the first air intake plate; a third air chamber is arranged on the upper part of the third air intake plate, and the top of the third air chamber is an open structure and is connected with the air intake end of the first gas channel, and third air holes which are connected with the second air chamber and the third air chamber are arranged at both ends and the middle part of the third air chamber.

6. The linear anode layer ion source according to claim 5, characterized in that: A first sealing ring is arranged between the top of the first air intake plate and the bottom of the second air intake plate, and the first sealing ring gap is sleeved on the outside of the first air chamber; a second sealing ring is arranged between the top of the second air intake plate and the bottom of the third air intake plate, and the second sealing ring gap is sleeved on the outside of the second air chamber; a third sealing ring is arranged between the top of the third air intake plate and the bottom of the waterway plate, and the third sealing ring gap is sleeved on the outside of the third air chamber.

7. The linear anode layer ion source according to claim 1, characterized in that: The first gas channel is arranged in the middle of the water circuit plate, and two cathode water cooling channels are arranged. The two cathode water cooling channels are respectively arranged on both sides of the first gas channel, and two fourth sealing rings are arranged between the top of the water circuit plate and the bottom of the annular cooling plate. Each of the fourth sealing rings is gap-mounted on the outside of one of the cathode water cooling channels.

8. The linear anode layer ion source according to claim 7, characterized in that: The magnet mechanism includes a magnet group and a magnet cover plate. The magnet group is arranged inside the annular cooling plate and adsorbed on the waterway plate. The magnet cover plate is adsorbed on the upper part of the magnet group. The inner cathode is fixed on the top of the magnet cover plate.

9. The linear anode layer ion source according to claim 8, characterized in that: The inner side surface of the inner side wall of the annular cooling plate is provided with a support step, the magnet cover is arranged on the support step and is adsorbed on the upper part of the magnet group; the gap includes a first gas gap and a second gas gap, the first gas gap exists between the magnet group and the inner side surface of the inner side wall of the annular cooling plate, the gas outlet end of the first gas channel is connected with the first gas gap, and the second gas gap exists between the magnet cover and the inner side surface of the inner side wall of the annular cooling plate; a plurality of second gas channels are sequentially arranged on both sides of the magnet cover along the length direction of the magnet cover, and the second gas channel is used to connect the first gas gap and the second gas gap; the second gas channel includes a vertical connecting hole and an upper connecting groove and a lower connecting groove respectively arranged on the upper part of the vertical connecting hole, the vertical connecting hole passes through the upper and lower ends of the magnet cover, the upper connecting groove and the lower connecting groove both pass through the side of the magnet cover, the gas outlet portion is a gas outlet connecting groove, and a plurality of gas outlet connecting grooves are arranged on the top of the inner side wall of the annular cooling plate, and the gas outlet connecting grooves are used to connect the second gas gap with the discharge area.

10. The linear anode layer ion source according to claim 9, characterized in that: The first gas channel includes a strip groove, a plurality of first hole groups and a plurality of second connecting holes, the strip groove is arranged in the middle of the bottom surface of the waterway plate, the length direction of the strip groove is consistent with the length direction of the waterway plate, and the plurality of first hole groups are sequentially arranged on the waterway plate along the length direction of the waterway plate, the first hole group includes two first connecting holes, and the two first connecting holes in each of the first hole groups are respectively arranged on both sides of the strip groove, and each of the first connecting holes passes through the upper and lower ends of the waterway plate, and the lower part of each of the first connecting holes is connected to the strip groove through a first connecting groove, and each The upper parts of two of the first connecting holes in the first hole group are connected through a second connecting groove, and the strip groove, the first connecting groove, the first connecting hole, the second connecting groove and the first gas gap are connected in sequence; a plurality of second connecting holes are arranged in sequence in the strip groove along the length direction of the strip groove, and each of the second connecting holes passes through the upper and lower ends of the waterway plate, and a third connecting groove is arranged on the upper part of each of the second connecting holes, the width of the magnet group is smaller than the width of the third connecting groove, and the strip groove, the second connecting hole, the third connecting groove and the first gas gap are connected in sequence.

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