Carrying manipulator

Abstract

The invention provides a carrying manipulator, and relates to the technical field of semiconductors. The carrying manipulator comprises a body and an arm; the body is provided with a first driving shaft, a second driving shaft and a third driving shaft; the arm comprises a shoulder joint, a big arm, an elbow joint, a small arm, a wrist joint and a wrist plate assembly, the front end of the big arm is connected with the shoulder joint, the tail end of the big arm is connected with the elbow joint, the front end of the small arm is connected with the elbow joint, the tail end of the small arm is connected with the wrist joint, and the wrist plate assembly is connected with the wrist joint and used for bearing an object to be tested. The first driving shaft drives the big arm to rotate around the shoulder joint, the second driving shaft drives the wrist joint to rotate, and the third driving shaft drives the small arm to rotate around the elbow joint. The carrying manipulator is used for preventing the to-be-measured object from spinning, and the measurement precision and accuracy are improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a transport robot. Background Art

[0002] During semiconductor measurement, the wafer to be measured needs to be transferred between chambers, and the object to be measured needs to move freely in the measurement area to complete the measurement of the coating thickness and elements on the surface of the object to be measured.

[0003] The wafer is usually driven by a robot. The robot drives the upper arm and the lower arm to rotate around the shoulder joint and the elbow joint respectively through two drive shafts to realize the linear feeding and rotation of the object to be tested, thereby moving the carrying wafer to the target position.

[0004] However, the above device is difficult to avoid the spin of the object to be measured, resulting in low measurement precision and accuracy. Summary of the invention

[0005] The present application provides a handling robot for preventing an object to be measured from spinning and improving measurement precision and accuracy.

[0006] In order to achieve the above objectives, this application provides the following technical solutions:

[0007] The present application provides a handling robot, a body and an arm;

[0008] The main body is provided with a first drive shaft, a second drive shaft and a third drive shaft;

[0009] The arm includes a shoulder joint, an upper arm, an elbow joint, a lower arm, a wrist joint and a wrist plate assembly, the front end of the upper arm is connected to the shoulder joint, the end of the upper arm is connected to the elbow joint, the front end of the lower arm is connected to the elbow joint, the end of the lower arm is connected to the wrist joint, the wrist plate assembly is connected to the wrist joint, and the wrist plate assembly is used to carry the object to be tested;

[0010] The first drive shaft drives the upper arm to rotate around the shoulder joint, the second drive shaft drives the wrist joint to rotate, and the third drive shaft drives the lower arm to rotate around the elbow joint.

[0011] In a possible implementation, the arm further includes a first pulley connected to the first drive shaft, a second pulley connected to the second drive shaft, and a third pulley connected to the third drive shaft;

[0012] The first pulley is installed on the shoulder joint and connected to the upper arm, and the first driving shaft drives the upper arm to rotate around the shoulder joint by driving the first pulley;

[0013] The second pulley is connected to the wrist joint, and the second drive shaft drives the wrist joint to rotate by driving the second pulley;

[0014] The third pulley is connected to the forearm, and the third driving shaft drives the forearm to rotate around the elbow joint by driving the third pulley.

[0015] In a possible implementation, the elbow joint includes a rotating shaft, a lower pulley and an upper pulley, and the upper pulley and the lower pulley are respectively installed on the upper part and the lower part of the rotating shaft;

[0016] The wrist joint includes a wrist joint pulley, the second pulley is connected to the lower pulley, and the upper part of the rotating shaft is connected to the wrist joint pulley, so that the second driving shaft drives the wrist joint to rotate;

[0017] The third pulley is connected to the upper pulley, and the upper pulley is connected to the forearm, so that the third driving shaft drives the forearm to rotate around the elbow joint.

[0018] In a possible implementation, the arm further includes a first steel belt, one end of the first steel belt is connected to the second pulley, and the other end of the first steel belt is connected to the lower pulley.

[0019] In a possible implementation, the arm further includes a second steel belt, one end of the second steel belt is connected to the third pulley, and the other end of the second steel belt is connected to the upper pulley.

[0020] In a possible implementation, the arm further includes a third steel belt, one end of the third steel belt is connected to the upper portion of the rotating shaft, and the other end of the third steel belt is connected to the wrist joint pulley.

[0021] In a possible implementation, the wrist plate assembly includes a wrist plate and a hand, the hand is connected to the wrist plate, and the hand carries the object to be measured.

[0022] In a possible implementation, the object to be tested is a wafer.

[0023] In a possible implementation, the wrist plate length is L1, the measurement center distance is L2, the radius of the object to be measured is L3, and L1 <L2-L3。

[0024] In a possible implementation, the length of the upper arm is L4, the length of the lower arm is L5, and L4+L5>L2-L3.

[0025] The handling robot provided by the present application has the following beneficial effects:

[0026] The handling robot provided in the present application includes a body and an arm, so that the arm is driven to rotate through the body. The arm includes a shoulder joint, an upper arm, an elbow joint, a lower arm, a wrist joint and a wrist plate assembly. The shoulder joint is connected through the front end of the upper arm, and the first drive shaft on the body drives the upper arm to rotate around the shoulder joint, so that the upper arm can rotate independently. The elbow joint is connected through the front end of the lower arm, and the third drive shaft on the body drives the lower arm to rotate around the elbow joint, so that the lower arm can rotate independently. In addition, the front end of the lower arm is connected to the elbow joint, the end of the lower arm is connected to the wrist joint, the second drive shaft on the body drives the wrist joint to rotate, and the wrist plate assembly is connected to the wrist joint, so that the second drive shaft drives the wrist plate assembly to rotate around the wrist joint, and the wrist plate assembly is used to carry the object to be tested, so that the wrist plate assembly and the object to be tested on the wrist plate assembly can achieve independent movement.

[0027] Compared with the related art, the handling robot provided in the present application adds a second drive shaft, which can drive the wrist joint to rotate, so as to drive the wrist plate assembly connected to the wrist joint and the object to be measured on the wrist plate assembly to rotate independently around the wrist joint. Thereby, on the basis of realizing the linear feeding and overall rotation of the robot, the freedom of wrist joint rotation is increased to compensate for the spin angle of the object to be measured, thereby avoiding the low measurement precision and accuracy caused by the spin of the object to be measured. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0029] Figure 1 A schematic diagram of the structure of a handling robot provided in an embodiment of the present application;

[0030] Figure 2 A schematic diagram of the structure of an arm provided in an embodiment of the present application;

[0031] Figure 3 This is a schematic diagram of the lengths of each connecting rod in a handling robot provided in an embodiment of the present application.

[0032] Description of reference numerals:

[0033] 10-Ontology;

[0034] 20-arms;

[0035] 21-shoulder joint; 22-upper arm; 23-elbow joint; 231-rotating shaft; 232-lower pulley; 233-upper pulley; 24-forearm;

[0036] 25- wrist joint; 251- wrist joint pulley; 26- wrist plate assembly; 261- wrist plate; 262- hand; 271- first pulley;

[0037] 272- second pulley; 273- third pulley; 281- first steel belt; 282- second steel belt; 283- third steel belt;

[0038] L1- wrist length; L2- measurement center distance; L3- radius of the object to be measured; L4- upper arm length; L5- lower arm length;

[0039] A1-difficult-to-control area; A2-reachable area for measurement; A3-area where measurement is required. DETAILED DESCRIPTION

[0040] The specific application scenario of this application is semiconductor measurement. Measurement is an indispensable part of the integrated circuit manufacturing process and runs through the production process in the field of integrated circuits. Measurement equipment can monitor, identify, locate, and analyze process defects in production, and plays a vital role in helping wafer fabs to promptly discover problems, improve processes, and increase yields. As integrated circuits continue to become more multi-layered and complex, the importance of measurement equipment is becoming increasingly prominent.

[0041] For example, X-ray fluorescence measurement equipment can detect the element content and film thickness of the film coated on the surface of semiconductor wafers. During measurement, the robot is required to move the wafer stored in the pre-vacuum chamber to the measurement chamber, and the measurement of different measurement points of the wafer is achieved through the movement of the robot.

[0042] During the measurement process, high-energy x-rays are injected into the atoms of the element coated on the surface of the wafer, which drives out the inner electrons of the atoms, forming holes. The outer electrons with higher energy levels transition to the inner layer, and energy equal to the difference between the two energies is released. The part radiated outward in the form of x-ray photons is fluorescent x-rays. The higher the content of a certain element, the greater the intensity of the characteristic fluorescent x-rays of the element, thereby achieving the test of the element content and thickness of the surface coating.

[0043] When the robot moves the wafer to wait for the object to be measured to achieve measurement at different measurement points, if the object to be measured spins, due to the change in angle, the fluorescence signal is disturbed by the fluctuation of the diffraction signal, affecting the test accuracy.

[0044] Combined with the above scenario, it can be seen that the manipulator in the related art has a technical problem that it is difficult to avoid the spin of the object to be measured, resulting in low measurement precision and accuracy. The reason for this problem is that the manipulator in the related art can only transport the object to be measured to the target position by rotating the upper arm and the lower arm. However, during the transportation process, the object to be measured will inevitably spin, thereby reducing the measurement precision and accuracy.

[0045] In response to the above technical problems, an embodiment of the present application provides a transport robot that can drive the wrist joint to rotate through a second drive shaft, so as to drive the wrist plate assembly connected to the wrist joint and the object to be measured on the wrist plate assembly to rotate independently around the wrist joint. Thereby, on the basis of realizing linear feeding and overall rotation of the robot arm, the degree of freedom of wrist joint rotation is increased to compensate for the spin angle of the object to be measured, thereby avoiding low measurement precision and accuracy caused by the spin of the object to be measured.

[0046] In order to make the above-mentioned purposes, features and advantages of the embodiments of the present application more obvious and understandable, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work belong to the scope of protection of this application.

[0047] like Figure 1 and Figure 2 As shown, the handling robot comprises a body 10 and an arm 20, wherein the body 10 is the power source and structural support of the handling robot, and is the basic framework for the handling robot to achieve movement.

[0048] The main body 10 includes a first drive shaft, a second drive shaft and a third drive shaft. The first drive shaft, the second drive shaft and the third drive shaft are independent of each other. The first drive shaft, the second drive shaft and the third drive shaft work independently, and their movements are not affected by other drive shafts. There is no mechanical and control coupling between the shafts.

[0049] refer to Figure 1 and Figure 2 The arm 20 is the execution part of the handling robot, which is responsible for realizing the spatial position adjustment and posture adjustment of the wafer waiting to be measured. The arm 20 is arranged on the body 10, and the arm 20 includes a shoulder joint 21, an upper arm 22, an elbow joint 23, a lower arm 24, a wrist joint 25 and a wrist plate assembly 26.

[0050] refer to Figure 1 and Figure 2 The shoulder joint 21 is connected to the main body 1, and the front end of the upper arm 22 is connected to the shoulder joint 21, or in other words, the upper arm 22 is connected to the main body 10 through the shoulder joint 21, and the shoulder joint 21 can be a revolute pair. The first drive shaft is connected to the upper arm 22 to drive the upper arm 22 to rotate around the shoulder joint 21, and because the first drive shaft, the second drive shaft and the third drive shaft are independent of each other, the upper arm 22 can achieve independent rotation.

[0051] refer to Figure 2The end of the upper arm 22 is connected to the elbow joint 23, and the front end of the lower arm 24 is connected to the elbow joint 23, or in other words, the lower arm 24 is connected to the lower arm 24 through the elbow joint 23, and the elbow joint can be a revolute pair. The third drive shaft is connected to the elbow joint 23 to drive the lower arm 24 to rotate around the elbow joint 23, and because the third drive shaft, the first drive shaft and the second drive shaft are independent of each other, the lower arm 24 can rotate independently.

[0052] The coordination of the rotation of the upper arm 22 around the shoulder joint 21 and the rotation of the lower arm 24 around the elbow joint 23 can realize linear feeding and overall rotation of the handling robot.

[0053] refer to Figure 2 , the end of the forearm 24 is connected to the wrist joint 25, and the wrist plate assembly 26 is connected to the wrist joint 25, and the wrist joint 25 can be a revolute pair. The second drive shaft is connected to the wrist joint 25 to drive the wrist joint 25 to rotate. Since the wrist plate assembly 26 is connected to the wrist joint 25, when the wrist joint 25 rotates, the wrist plate assembly 26 can drive the wrist plate assembly to rotate around the wrist joint 25. The wrist plate assembly 26 is used to carry the object to be measured, that is, the object to be measured is located on the wrist plate assembly 26, so that the wafer to be measured can rotate around the wrist joint 25. Since the third drive shaft, the first drive shaft and the second drive shaft are independent of each other, the wrist plate assembly 26 and the object to be measured on the wrist plate assembly 26 can rotate independently. By increasing the degree of freedom of rotation of the wrist joint 25, the wrist plate assembly 26 and the object to be measured on the wrist plate assembly 26 can rotate independently around the wrist joint 25, thereby compensating for the self-selected angle of the object to be measured and avoiding low measurement precision and accuracy caused by the spin of the object to be measured.

[0054] The handling robot provided in the present application adds a second drive shaft, which can drive the wrist joint 25 to rotate, so as to drive the wrist plate assembly 26 connected to the wrist joint 25 and the object to be measured on the wrist plate assembly 26 to rotate independently around the wrist joint 25. Thereby, on the basis of realizing the linear feeding and overall rotation of the robot, the degree of freedom of rotation of the wrist joint 25 is increased to compensate for the spin angle of the object to be measured, thereby avoiding the low measurement precision and accuracy caused by the spin of the object to be measured.

[0055] In some embodiments, Figure 2 As shown, the arm 20 also includes a first pulley 271 connected to the first drive shaft, a second pulley 272 connected to the second drive shaft, and a third pulley 273 connected to the third drive shaft. The first pulley 271 and the first drive shaft form a first shaft pulley structure, the second pulley 272 and the second drive shaft form a second shaft pulley structure, and the third pulley 273 and the third drive shaft form a third shaft pulley structure. The shaft pulley is a combination mechanism of a shaft and a pulley, and the pulley can be connected to the corresponding shaft by a key or by a coupling, which is not limited in this application.

[0056] like Figure 2As shown, the first pulley 271 is installed on the shoulder joint 21 and connected to the upper arm 22. The upper arm 22 is fixedly connected to the first pulley 271. The first driving shaft drives the first pulley 271 to drive the upper arm 22 to rotate around the shoulder joint 21 to achieve independent rotation of the upper arm 22.

[0057] like Figure 2 As shown, the third pulley 273 is connected to the small arm 24, and the third pulley can drive the small arm 24 to rotate around the elbow joint 23, that is, the third drive shaft drives the small arm 24 to rotate around the elbow joint 23 by driving the third pulley 273, so as to realize the independent rotation of the small arm 24. Then, the linear feeding and overall rotation of the handling robot are realized through the independent rotation of the upper arm 22 and the small arm 24.

[0058] like Figure 2 As shown, the second pulley 272 is connected to the wrist joint 25, and the second drive shaft drives the second pulley 272 to drive the wrist joint 25 to rotate, so as to realize the wrist plate assembly 26 connected to the wrist joint 25 to rotate around the wrist joint 25, so as to increase the degree of freedom of rotation of the wrist joint 25, compensate for the spin angle of the object to be measured, and thus avoid the low measurement precision and accuracy caused by the spin of the object to be measured.

[0059] In some embodiments, Figure 2 As shown, the elbow joint 23 includes a rotating shaft 231, a lower pulley 232 and an upper pulley 233, and the upper pulley 233 and the lower pulley 232 are respectively installed on the upper part and the lower part of the rotating shaft 231. In other words, the upper pulley 233 is installed on the upper part of the rotating shaft 231, and the lower pulley 232 is installed on the lower part of the rotating shaft 231.

[0060] The third pulley 273 connected to the third driving shaft is connected to the upper pulley 233, and the upper pulley 233 is connected to the forearm 24, so that the third driving shaft drives the forearm 24 to rotate around the elbow joint 23, so that the forearm 24 can achieve independent rotation.

[0061] The wrist joint 25 includes a wrist joint pulley 251, a second pulley 272 connected to the lower pulley 232, and an upper portion of the rotating shaft 231 connected to the wrist joint pulley 251, so that the second drive shaft drives the wrist joint 25 to rotate. The second drive shaft drives the lower pulley 232 of the elbow joint 23 to rotate through the second pulley 272, and then drives the wrist joint pulley 251 to rotate through the rotating shaft 231, so as to realize the rotation of the wrist joint 25.

[0062] The embodiment of the present application decouples the movement of the elbow joint 23 and the wrist joint 25 by setting a set of shaft systems at the elbow joint 23. This enables the independent rotation of the elbow joint 23 and the wrist joint 25. The shaft system includes a rotating shaft 231, an upper pulley 233 installed on the upper part of the rotating shaft 231, and a lower pulley 232 installed on the lower part of the rotating shaft 231. The upper pulley 233 and the forearm 24 are driven to rotate by the third pulley 273 connected to the third drive shaft to achieve independent rotation of the forearm 24. The lower pulley 232 and the rotating shaft 231 are connected by the second pulley 272 connected to the second drive shaft to drive the wrist joint 25 to rotate.

[0063] In some embodiments, Figure 2 As shown, the arm 20 also includes a first steel belt 281, which is a stainless steel drive belt for power transmission and can be made by a cold rolling process. One end of the first steel belt 281 is connected to the second pulley 272, and the other end of the first steel belt 281 is connected to the lower pulley 232. Compared with a rubber belt, the second pulley 272 and the lower pulley 232 are connected by the first steel belt 281 to avoid particle contamination caused by the rubber belt, which leads to low measurement precision and accuracy.

[0064] In some embodiments, Figure 2 As shown, the arm 20 also includes a second steel belt 282, which is a stainless steel drive belt for power transmission and can be made by a cold rolling process. One end of the second steel belt 282 is connected to the third pulley 273, and the other end of the second steel belt 282 is connected to the upper pulley 233. Compared with a rubber belt, the third pulley 273 and the upper pulley 233 are connected by the second steel belt 282 to avoid particle contamination caused by the rubber belt, which leads to low measurement precision and accuracy.

[0065] In some embodiments, Figure 2 As shown, the arm 20 further includes a third steel belt 283, which is a stainless steel drive belt for power transmission and can be made by a cold rolling process. One end of the third steel belt 283 is connected to the upper part of the rotating shaft 231, and the other end of the third steel belt 283 is connected to the wrist pulley 251. Compared with a rubber belt, the third steel belt 283 is used to connect the upper part of the rotating shaft 231 and the wrist pulley 251, thereby avoiding particle contamination caused by the rubber belt, which leads to low measurement precision and accuracy.

[0066] In some embodiments, Figure 2 As shown, the wrist plate assembly 26 includes a wrist plate 261 and a hand 262, wherein the wrist plate 261 is connected to the wrist joint 25, and the hand 262 is connected to the wrist plate 261, and the hand 262 is used to carry the object to be tested. For example, the hand 262 may be in the shape of a human palm, and the object to be tested may be located on the palm of the hand 262, or the object to be tested may be clamped by the fingers of the hand 262, thereby carrying the object to be tested through the wrist plate assembly 26.

[0067] In some embodiments, the object to be measured is a wafer, which is usually a silicon wafer used for fabricating silicon semiconductor integrated circuits and generally has a circular shape, so that the handling robot provided by the embodiments of the present application is applicable to the measurement of wafers.

[0068] In some embodiments, referring to Figure 3 , the length of the wrist plate is L1, the measurement center distance is L2, and the radius of the object to be measured is L3, and L1 < L2 - L3. The measurement center distance L2 is the distance between the measurement center and the shoulder joint, so that the object to be measured can avoid the difficult-to-control area A1, thereby avoiding the joint dead points during the translation process.

[0069] Based on the above embodiments, referring to Figure 3 , the length of the upper arm is L4, the length of the forearm is L5, and L4 + L5 > L2 - L3, so that the area of the measurable area A2 includes the area of the measurement requirement area A3, thereby enabling the object to be measured to freely translate in the entire measurement area.

[0070] The handling robot of the present application can also be used for wafer transfer and free translation in semiconductor process equipment, and the application of the technical solution of the present application in process equipment can also achieve the technical effects of improving process accuracy and process accuracy.

[0071] In the present specification, the embodiments or implementation manners are described in a progressive manner. Each embodiment focuses on the differences from other embodiments. The same or similar parts among the embodiments can be referred to each other.

[0072] It should be noted that the embodiments indicated by phrases such as "in specific implementation", "in some embodiments", "in this embodiment", "exemplarily", etc. mentioned in the specification may include specific features, structures or characteristics, but not necessarily every embodiment includes such specific features, structures or characteristics. In addition, such phrases do not necessarily refer to the same embodiment. In addition, when combining specific features, structures or characteristics with embodiments, it is within the knowledge scope of those skilled in the art to implement such features, structures or characteristics in combination with other embodiments, whether explicitly or implicitly described.

[0073] Generally speaking, terms should be understood at least in part by their use in the context. For example, at least in part according to the context, the term "one or more" used in the text can be used to describe any feature, structure or characteristic in a singular sense, or can be used to describe a combination of features, structures or characteristics in a plural sense. Similarly, at least in part according to the context, terms such as "a" or "" can also be understood as conveying singular usage or conveying plural usage.

[0074] It should be easily understood that “on,” “above,” and “over” in the present disclosure should be interpreted in the broadest manner, so that “on” not only means “directly on something,” but also includes the meaning of “on something” with intervening features or layers therebetween, and “above” or “over” not only includes the meaning of “above” or “over,” but also may include the meaning of “above” or “over something” with no intervening features or layers therebetween (i.e., directly on something).

[0075] In addition, spatially relative terms, such as "below," "below," "beneath," "above," "above," etc., may be used herein for ease of description to describe the relationship of one element or feature relative to other elements or features as shown in the figures. Spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation shown in the figures. The device may have other orientations (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein may likewise be interpreted accordingly.

[0076] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A handling robot, characterized in that: It comprises a body (10) and an arm (20); The body (10) has a first drive shaft, a second drive shaft and a third drive shaft; The arm (20) comprises a shoulder joint (21), an upper arm (22), an elbow joint (23), a lower arm (24), a wrist joint (25) and a wrist plate assembly (26); the front end of the upper arm (22) is connected to the shoulder joint (21); the end of the upper arm (22) is connected to the elbow joint (23); the front end of the lower arm (24) is connected to the elbow joint (23); the end of the lower arm (24) is connected to the wrist joint (25); the wrist plate assembly (26) is connected to the wrist joint (25); and the wrist plate assembly (26) is used to carry the object to be tested; The first drive shaft drives the upper arm (22) to rotate around the shoulder joint (21), the second drive shaft drives the wrist joint (25) to rotate, and the third drive shaft drives the lower arm (24) to rotate around the elbow joint (23).

2. The handling robot according to claim 1, characterized in that: The arm (20) further comprises a first pulley (271) connected to the first drive shaft, a second pulley (272) connected to the second drive shaft, and a third pulley (273) connected to the third drive shaft; The first pulley (271) is installed on the shoulder joint (21) and connected to the upper arm (22), and the first drive shaft drives the upper arm (22) to rotate around the shoulder joint (21) by driving the first pulley (271); The second pulley (272) is connected to the wrist joint (25), and the second drive shaft drives the wrist joint (25) to rotate by driving the second pulley (272); The third pulley (273) is connected to the forearm (24), and the third driving shaft drives the forearm (24) to rotate around the elbow joint (23) by driving the third pulley (273).

3. The handling robot according to claim 2, characterized in that: The elbow joint (23) comprises a rotating shaft (231), a lower pulley (232) and an upper pulley (233), wherein the upper pulley (233) and the lower pulley (232) are respectively mounted on the upper part and the lower part of the rotating shaft (231); The wrist joint (25) comprises a wrist joint pulley (251), the second pulley (272) is connected to the lower pulley (232), and the upper part of the rotating shaft (231) is connected to the wrist joint pulley (251), so that the second drive shaft drives the wrist joint (25) to rotate; The third pulley (273) is connected to the upper pulley (233), and the upper pulley (233) is connected to the forearm (24), so that the third drive shaft drives the forearm (24) to rotate around the elbow joint (23).

4. The handling robot according to claim 3, characterized in that: The arm (20) further comprises a first steel belt (281), one end of the first steel belt (281) being connected to the second pulley (272), and the other end of the first steel belt (281) being connected to the lower pulley (232).

5. The handling robot according to claim 3, characterized in that: The arm (20) further comprises a second steel belt (282), one end of the second steel belt (282) being connected to the third pulley (273), and the other end of the second steel belt (282) being connected to the upper pulley (233).

6. The handling robot according to claim 3, characterized in that: The arm (20) further comprises a third steel belt (283), one end of the third steel belt (283) being connected to the upper part of the rotating shaft (231), and the other end of the third steel belt (283) being connected to the wrist joint pulley (251).

7. The handling robot according to any one of claims 1 to 6, characterized in that: The wrist plate assembly (26) comprises a wrist plate (261) and a hand (262), wherein the hand (262) is connected to the wrist plate (261), and the hand (262) carries the object to be measured.

8. The handling robot according to claim 7, characterized in that: The object to be tested is a wafer.

9. The handling robot according to claim 7, characterized in that: The length of the wrist plate is L1, the measurement center distance is L2, the radius of the object to be measured is L3, and L1 <L2-L3。 10. The handling robot according to claim 9, characterized in that: The length of the upper arm (22) is L4, the length of the lower arm (24) is L5, and L4+L5>L2-L3.

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