Coating equipment

Abstract

The embodiment of the invention provides coating equipment. The coating equipment comprises a first chamber; the electrostatic chuck is located in the first cavity; the collimator is positioned in the first cavity and is provided with a plurality of collimation channels which are distributed at intervals; the second cavity is adjacent to the first cavity, a communicating channel is formed in the cavity wall, adjacent to the first cavity, of the second cavity, and the second cavity is communicated with the first cavity through the communicating channel; and the transmission device is assembled in the second cavity and is configured to be in transmission fit with the collimator through the communication channel so as to drive the collimator to rotate relative to the electrostatic chuck. By adopting the technical scheme, the transfer printing effect can be improved.

Description

Technical Field

[0001] The embodiments of the present disclosure relate to the field of semiconductor technology, and in particular to a coating device. Background Art

[0002] The most important copper seed layer (Cu Seed) in the back-end metallization process of chip manufacturing is formed by PVD coating process. The process focus at advanced nodes is to maximize the bottom coverage of the copper seed layer on the wafer surface structure. Collimators are used in PVD equipment to filter out metal atoms and ions with poor straightness in the coating, so as to improve the bottom coverage of the wafer surface structure. Applying a bias voltage to the collimator can further increase the straightness of the metal ions and further improve the bottom coverage of the wafer surface structure. The improvement in the bottom coverage of the wafer surface structure is strongly correlated to the bias voltage. Although applying a larger bias voltage can significantly improve the bottom coverage of the wafer surface structure, too good straightness will cause the side effect of transferring the collimator shape to the wafer surface. Avoiding the transfer effect greatly limits the capabilities of this type of equipment.

[0003] How to improve the transfer effect is a question worth discussing. Summary of the invention

[0004] In view of this, an embodiment of the present disclosure provides a coating device that can improve the transfer effect.

[0005] The present disclosure provides a coating device, comprising: First chamber; an electrostatic chuck, located in the first chamber; A collimator, located in the first chamber, having a plurality of collimation channels distributed at intervals; A second chamber is disposed adjacent to the first chamber, wherein a connecting passage is provided on a chamber wall of the second chamber adjacent to the first chamber, and the second chamber is connected to the first chamber through the connecting passage; The transmission device is assembled in the second chamber and is configured to cooperate with the collimator through the communication channel to drive the collimator to rotate relative to the electrostatic chuck.

[0006] Optionally, the coating equipment further includes: A gear ring, coaxially arranged with the collimator, having a plurality of gear teeth distributed along the circumference of the collimator; Wherein, the gear ring is configured to cooperate with the transmission device in transmission, and drives the collimator to rotate synchronously when driven by the transmission device.

[0007] Optionally, the gear ring and the collimator satisfy one of the following conditions: The gear ring is detachably connected to the collimator; Alternatively, the gear ring is integrally arranged with the collimator.

[0008] Optionally, the coating equipment further includes: A rotating member is located between the inner wall of the first chamber and the gear ring, wherein the gear ring and the first chamber are rotationally matched through the rotating member.

[0009] Optionally, the rotating member is a collimating bearing, an outer ring of the collimating bearing is connected to the inner wall of the first chamber, and an inner ring of the collimating bearing is connected to the gear ring.

[0010] Optionally, the number of the collimation bearing is one; Alternatively, there are multiple collimation bearings, and the collimation bearings are arranged at intervals along the extension direction of the collimation channel.

[0011] Optionally, the inner wall of the first chamber has: An annular bearing portion, wherein the top of the annular bearing portion has an annular groove; Wherein, the gear ring is arranged in the annular groove, and the rotating member is arranged on the annular groove or the gear ring.

[0012] Optionally, there are multiple rotating parts, and each rotating part satisfies one of the following conditions: The rotating members are distributed at intervals along the circumference of the annular groove at the groove bottom and / or groove sidewall of the annular groove; The rotating members are distributed at intervals on the bottom and / or side wall of the gear ring along the circumference of the collimator.

[0013] Optionally, the rotating member comprises: Collimation bearings; Or, alignment rollers.

[0014] Optionally, the first chamber has: An accommodating groove is arranged on the inner wall of the first chamber, and a portion of the gear ring away from the collimator along its radial direction is suspended in the accommodating groove; Part of the accommodating grooves located at the adjacent cavity walls of the first cavity and the second cavity are used as the communicating channel.

[0015] Optionally, the coating equipment further includes: An electric lead, one end of which is electrically connected to the gear ring, and the other end of which passes through the first chamber and is connected to a power source outside the first chamber; The gear ring is electrically connected to the collimator, and the power supply applies a bias voltage to the gear ring and the collimator through the electrical lead.

[0016] Optionally, one end of the electrical lead is electrically connected to the gear ring to satisfy one of the following conditions: One end of the electric lead penetrates the first chamber and contacts the gear ring; The rotating member is made of metal, is electrically connected to the gear ring, and one end of the electrical lead penetrates the first chamber and then contacts the rotating member.

[0017] Optionally, the electrical lead elastically conflicts with the collimator, and the electrical lead comprises at least one of the following: elastic reed; Press-in ball plunger.

[0018] Optionally, the transmission device comprises: Inner housing, inner shaft bearing, first transmission shaft, transmission member, first magnet, outer housing, outer inner bearing and second magnet; The inner housing is located outside the second chamber and is sealed to the second chamber, the inner shaft bearing is located inside the inner housing, and the first transmission shaft can be rotatably connected to the inner wall of the inner housing through the inner shaft bearing, the first magnet is located inside the inner housing and fixed on the first transmission shaft, and the transmission member is arranged on the first transmission shaft and is located inside the second chamber; The outer shell is sleeved outside the inner shell, the outer inner bearing is located inside the outer shell, and the outer shell can be rotatably connected to the inner shell through the outer inner bearing, and the second magnet is fixed on the outer shell; Wherein, the transmission device is configured so that when the outer shell rotates relative to the inner shell, the first transmission shaft and the transmission member rotate along with the first magnet under the action of the second magnet, so that the transmission member and the gear ring are in transmission cooperation.

[0019] Optionally, the transmission member is a gear, which meshes with the gear ring for transmission.

[0020] Optionally, the transmission member includes a first pulley and a first belt, the first pulley is located in the second chamber and fixed on the first transmission shaft, and the first belt is sleeved outside the first pulley and the gear ring.

[0021] Optionally, the coating equipment further includes: A first driving device is configured to drive the outer shell to rotate relative to the inner shell, the first driving device comprising: a first motor bracket, a first driving motor, a first reducer, a second transmission shaft, a second pulley and a second belt; Among them, the first motor bracket is fixed on the first chamber or the second chamber, the first drive motor, the first reducer, the second transmission shaft and the second pulley are coaxially connected in sequence, and the first reducer is fixed on the first motor bracket, and the second belt is sleeved outside the second pulley and the outer shell.

[0022] Optionally, the rotation axis of the collimator is a first axis, and a pattern on a cross section of the collimator is a non-rotationally symmetric array pattern, wherein the cross section of the collimator is perpendicular to the first axis.

[0023] Optionally, the pattern of each collimating channel on the cross section of the collimator satisfies one or more of the following: Round; Polygon; Irregular shapes.

[0024] Compared with the prior art, the technical solution of the embodiment of the present disclosure has the following advantages: The coating equipment provided by the embodiment of the present disclosure drives the collimator to rotate relative to the electrostatic chuck, and the intervals between the collimation channels also rotate accordingly. By controlling the rotation speed, the corresponding time lengths between the concentric circle surface areas on the wafer with the rotation axis of the collimator as the axis and the intervals between the collimation channels and adjacent collimation channels during the rotation process can be the same or similar, so that the coating thickness on the concentric circle surface areas on the wafer with the rotation axis of the collimator as the axis is the same or similar, thereby improving the transfer effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present disclosure, the drawings required for use in the embodiments of the present disclosure or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this specification. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0026] Figure 1 A schematic structural diagram of a coating device is shown; Figure 2 A schematic diagram of the cross-sectional structure of a collimator is shown; Figure 3 A schematic diagram showing a scenario in which a transfer effect occurs on a coated surface of a wafer; Figure 4 A schematic cross-sectional structure diagram of a coating device in an embodiment of the present disclosure is shown; Figure 5 A schematic cross-sectional structure diagram of a collimator in an embodiment of the present disclosure is shown; Figure 6A schematic diagram of the cross-sectional structure of a collimator in an embodiment of the present disclosure is shown; Figure 7 A schematic cross-sectional structure diagram of another coating device in an embodiment of the present disclosure is shown; Figure 8 A schematic cross-sectional structure diagram of another collimator in an embodiment of the present disclosure is shown; Fig. 9 A schematic cross-sectional structure diagram of a transmission device in an embodiment of the present disclosure is shown; Fig.10 A schematic diagram of transmission cooperation between a transmission member and a collimator in an embodiment of the present disclosure is shown; Fig.11 A schematic diagram of transmission coordination between a transmission device and a first drive device in an embodiment of the present disclosure is shown.

[0027] Reference numerals: Target 110, electrostatic chuck 120, wafer 130; Collimator 200, collimation channel 210, spacer 220, gear ring 230, protrusion 240; The first chamber 300, the insulating ring 310, the alignment bearing 320, the electric lead 330, the receiving groove 340, and the annular bearing portion 350; A second chamber 400; Transmission device 500, cover plate 510, inner housing 520, inner shaft bearing 530, first transmission shaft 540, transmission member 550, first magnet 560, outer housing 570, third pulley 571, outer inner bearing 580, second magnet 590; A first motor bracket 610, a first driving motor 620, a first reducer 630, a second transmission shaft 640, a second pulley 650, and a second belt 660; A second motor bracket 710 , a second driving motor 720 , a second reducer 730 , and a third transmission shaft 740 .

[0028] Magnetron 800; First axis L, center of rotation O. DETAILED DESCRIPTION

[0029] According to the background technology, the most important copper seed layer (Cu Seed) in the back-end metallization process of chip manufacturing is formed by PVD coating. The process focus at advanced nodes is to maximize the bottom coverage of the coating corresponding to the copper seed layer on the wafer surface structure, such as the bottom coverage of the coating corresponding to the copper seed layer on the holes or grooves on the wafer surface.

[0030] Figure 1 A schematic structural diagram of a coating device is shown. Figure 2A schematic diagram of the cross-sectional structure of a collimator is shown; Figure 3 A schematic diagram showing a scenario in which a transfer effect occurs on a coated surface of a wafer.

[0031] In some embodiments, in conjunction with reference Figure 1 to Figure 2 The coating device may include a target 110, an electrostatic chuck 120, and a collimator 200. The collimator 200 is located between the target 110 and the electrostatic chuck 120 and has a plurality of collimation channels 210 distributed at intervals 220. The target 110 sputters particles such as metal atoms or ions under the bombardment of plasma. The particles pass through the collimation channels 210 on the collimator 200 and are deposited on the wafer carried on the electrostatic chuck 120 to form a coating. Among them, the collimator 200 can filter out particles with poor straightness, thereby improving the bottom coverage of the surface structure of the wafer 130.

[0032] However, there is a gap 220 between adjacent collimating channels 210, which may cause Figure 3 The transfer effect is shown.

[0033] Specifically, the transfer effect refers to the phenomenon that the shape of the collimator 200 is transferred to the coating of the wafer 130 because the amount of metal ions in the surface area of ​​the wafer 130 corresponding to the collimation channel 210 is higher than the amount of metal ions scattered to the surface area of ​​the wafer 130 corresponding to the gap 220, wherein the shape of the collimator 200 refers to the pattern of the cross section of the collimator 200.

[0034] In order to further improve the coating performance of the wafer 130 , a bias voltage may be applied to the collimator 200 to generate an electric field inside the collimator 200 . The electric field can guide the movement direction of the metal ions, thereby further improving the straightness of the metal ions and further improving the bottom coverage of the surface structure of the wafer 130 .

[0035] However, the greater the bias voltage, the better the straightness between the collimator 200 and the metal ions, and the greater the difference between the amount of metal ions in the surface area of ​​the wafer 130 corresponding to the collimation channel 210 and the amount of metal ions scattered to the surface area of ​​the wafer 130 corresponding to the gap 220, which will lead to a more obvious transfer effect, that is, increasing the bias voltage applied to the collimator 200 will lead to an intensification of the transfer effect.

[0036] Therefore, how to improve the transfer effect is a technical problem to be solved urgently in this field.

[0037] In order to solve the above technical problems, an embodiment of the present disclosure provides a coating device.

[0038] In the disclosed embodiment, the coating equipment includes a first chamber, an electrostatic chuck, a collimator, a second chamber and a transmission device, wherein the electrostatic chuck and the collimator are both located in the first chamber, the collimator has a plurality of spaced-apart collimation channels, the second chamber is adjacent to the first chamber, a connecting channel is provided on the cavity wall adjacent to the first chamber, the second chamber is connected to the first chamber through the connecting channel, the transmission device is assembled in the second chamber, and is configured to cooperate with the collimator through the connecting channel to drive the collimator to rotate relative to the electrostatic chuck.

[0039] By adopting the above technical solution, the collimator is driven to rotate relative to the electrostatic chuck, and the intervals between the collimation channels also rotate accordingly. By controlling the rotation speed, the corresponding time lengths between the concentric circular surface areas on the wafer with the rotation axis of the collimator as the axis and the intervals between the collimation channels and adjacent collimation channels during the rotation process can be the same or similar, so that the deposition conditions on the concentric circular surface areas on the wafer with the rotation axis of the collimator as the axis are the same or similar, thereby improving the transfer effect.

[0040] In order to make the above-mentioned objects, features and beneficial effects of the present disclosure more obvious and easy to understand, the specific embodiments of the present disclosure are described in detail below with reference to the accompanying drawings.

[0041] Figure 4 A schematic cross-sectional structure diagram of a coating device in an embodiment of the present disclosure is shown. Figure 5 A schematic cross-sectional structure diagram of a collimator in an embodiment of the present disclosure is shown.

[0042] In this embodiment, combined with reference Figures 4 to 5 The coating equipment may include: a target 110 , an electrostatic chuck 120 , a collimator 200 , a first chamber 300 , a second chamber 400 and a transmission device 500 .

[0043] The target material 110 refers to the target material bombarded by high-speed energetic particles, and the target material 110 may include metal materials such as copper, aluminum, titanium, tantalum, or alloy materials such as nickel-chromium alloy, nickel-cobalt alloy, etc. It is understandable that the type of particles to be deposited provided by the target material 110 is compatible with the type of the target material 110. For example, when the type of the target material 110 is copper, the particles to be deposited provided by the target material 110 are copper atoms or copper ions.

[0044] In the following description, the target material 110 may be described using copper as an example, but this does not constitute a limitation on the specific material used for the target material 110 .

[0045] The electrostatic chuck 120 as a carrier platform of the wafer 130 can be set as a fixed electrostatic chuck 120. The electrostatic chuck 120 can also be set as a liftable electrostatic chuck 120, so that the distance between the electrostatic chuck 120 and the collimator 200 can be adaptively adjusted according to the collimation performance of the collimator 200.

[0046] The collimator 200 has a plurality of collimation channels 210 distributed at intervals, with intervals 220 between adjacent collimation channels 210, and the extension direction of each collimation channel 210 is the collimation direction of the particles, and the extension direction of each collimation channel 210 is consistent. As a specific example, the extension direction of each collimation channel 210 is perpendicular to the surface of the electrostatic chuck 120 carrying the wafer 130, so that the particles can be vertically deposited on the surface of the wafer 130 on the electrostatic chuck 120 to form a coating after being collimated by each collimation channel 210.

[0047] It should be noted that the extension direction of the alignment channel 210 is perpendicular to the surface of the electrostatic chuck 120 carrying the wafer 130 and is not limited to 90 degrees absolutely perpendicular, but can also be approximately perpendicular, such as the angle between the two is 80 degrees. In actual use, it can be adjusted according to actual needs.

[0048] The first chamber 300 is a cavity structure with an opening at the top, which is used to provide a process environment for the coating process. In order to improve the high temperature resistance, corrosion resistance, easy cleaning, low outgassing rate and other characteristics of the first chamber 300, in some embodiments, the main body of the first chamber 300 can be made of stainless steel, aluminum alloy and other materials.

[0049] The target 110 is located at the top of the first chamber 300 and blocks the top opening of the first chamber 300 . The electrostatic chuck 120 and the collimator 200 are both located in the first chamber 300 .

[0050] The second chamber 400 is used to assemble the transmission device 500 and is arranged adjacent to the first chamber 300. A connecting channel (not shown in the figure) is provided on the cavity wall adjacent to the first chamber 300. The second chamber 400 is connected to the first chamber 300 through the connecting channel. In order to improve the high temperature resistance, corrosion resistance, easy cleaning, low outgassing rate and other characteristics of the second chamber, in some embodiments, the main body of the second chamber 400 can be made of stainless steel, aluminum alloy and other materials.

[0051] The transmission device 500 is configured to cooperate with the collimator 200 through the communication channel to drive the collimator 200 to rotate relative to the electrostatic chuck 120 .

[0052] In actual use, the collimator 200 is driven to rotate relative to the electrostatic chuck 120, and the intervals 220 between adjacent collimation channels 210 also rotate accordingly. By controlling the rotation speed, the concentric surface areas on the wafer 130 with the rotation axis of the collimator 200 as the axis can be made the same or similar in corresponding time length with each collimation channel 210 and the intervals 220 between adjacent collimation channels 210 during the rotation process, so that the deposition conditions on the concentric surface areas of the wafer 130 with the rotation axis as the axis are the same or similar, thereby improving the transfer effect.

[0053] The rotation axis of the collimator 200 is the first axis L, and the first axis L is parallel to the extension direction of the collimation channel 210. In some embodiments, the first axis L can be the central axis of the collimator 200 itself, which can improve the stability of the collimator 200 during rotation and reduce the space required for the collimator 200 during rotation. In some embodiments, the collimator 200 is coaxially arranged with the electrostatic chuck 120.

[0054] The rotation speed of the collimator 200 relative to the electrostatic chuck 120 is adjustable, and the rotation speed range can be 30~240RPM (revolutions per minute). The collimator 200 can rotate at a constant speed relative to the electrostatic chuck 120, and the collimator 200 can also rotate at a variable speed relative to the electrostatic chuck 120. As a specific example, the collimator 200 can rotate at a constant speed of 50RPM relative to the electrostatic chuck 120.

[0055] In some embodiments, the pattern of each collimating channel 210 on the collimator 200 on the cross section of the collimator 200 may be selected from one or more of a circle, a polygon, and an irregular pattern. For example, the patterns of each collimating channel 210 on the cross section of the collimator 200 are all regular hexagons of the same size, and for another example, the patterns of each collimating channel 210 on the cross section of the collimator 200 are triangles of different sizes, and for another example, the patterns of each collimating channel 210 on the cross section of the collimator 200 are a combination of a circle and a hexagon.

[0056] It should be noted that the cross section of the collimator 200 is perpendicular to the first axis L.

[0057] In some embodiments, the pattern on the cross section of the collimator 200 may be a rotationally symmetric array pattern or a non-rotationally symmetric pattern.

[0058] It should be pointed out that in the present disclosure, the figure on the cross section of the collimator 200 can be a rotationally symmetric figure, which means that the figure on the cross section of the collimator 200 can coincide with itself after rotating a certain angle with the rotation center as the rotation point; the figure on the cross section of the collimator 200 can be a non-rotationally symmetric figure, which means that the figure on the cross section of the collimator 200 cannot coincide with itself after rotating a certain angle with the rotation center O as the rotation point, wherein the rotation center O is the intersection of the first axis L and the cross section of the collimator 200.

[0059] Figure 6 A cross-sectional structure diagram of a collimator in an embodiment of the present disclosure is shown as a specific example, in combination with reference to Figure 4 and Figure 6 , the pattern on the cross section of the collimator is a honeycomb structure with uniform arrays of the same size, wherein the regular hexagonal holes correspond to the cross-sectional shape of the collimation channel 210, the side walls of adjacent regular hexagonal holes are the intervals 220 between adjacent collimation channels 210, and the rotation center O is located in a regular hexagonal hole at the center area of ​​the cross section and does not overlap with the center of the regular hexagonal hole. It can be understood that when the rotation center O is used as the rotation point, the pattern on the cross section of the collimator 200 is a non-rotationally symmetrical pattern.

[0060] During the rotation of the collimator 200, compared with the rotationally symmetrical figure, the figure on the cross section of the collimator 200 is a non-rotationally symmetrical figure, which can reduce the area of ​​the surface area on the wafer 130 that is always blocked by the spacer 220, thereby improving the uniformity of the coating thickness on the wafer 130 along its radial direction, thereby further weakening the transfer effect, and further improving the coating performance.

[0061] It should be noted that different bias voltages are usually applied to the target 110 and the collimator 200, so it is necessary to avoid electrical connection between the target 110 and the collimator 200. In some embodiments, an insulating ring 310 may be provided between the target 110 and the first chamber 300, wherein the insulating ring 310 is made of an insulating material with a low conductivity coefficient such as ceramics or rubber, and can cut off the conductive path between the target 110 and the first chamber 300, thereby achieving electrical isolation between the target 110 and the first chamber 300.

[0062] In some embodiments, the coating device may further include: a gear ring 230. The gear ring 230 is coaxially arranged with the collimator 200, and the gear ring 230 protrudes from the outer side wall of the collimator 200. The outer side of the gear ring 230 has a plurality of gear teeth distributed along the circumference of the collimator 200. The gear ring 230 is configured to cooperate with the transmission device 500 in transmission, and drives the collimator 200 to rotate synchronously when driven by the transmission device 500.

[0063] In order to achieve synchronous rotation of the collimator 200 driven by the gear ring 230, the gear ring 230 can be integrally formed with the collimator 200, or can be fixedly connected to the collimator 200, wherein the fixed connection includes a non-detachable connection or a detachable connection.

[0064] In some embodiments, reference Figure 6 The gear ring 230 and the collimator 200 can be integrally formed or non-detachably connected, such as by welding, which can reduce the number of assembly steps and avoid tolerance problems when the two are separately arranged.

[0065] In some embodiments, the toothed ring 230 and the collimator 200 are detachably connected, which can reduce the difficulty of preparation and also reduce the scrapping cost. Figure 7 and Figure 8 , Figure 7 FIG. 2 shows a schematic cross-sectional structure diagram of another coating device in an embodiment of the present disclosure. Figure 8 A schematic diagram of the cross-sectional structure of another collimator in an embodiment of the present disclosure is shown. The top surface of the gear ring 230 may have a first annular groove (not shown in the figure), and the collimator 200 has a protrusion 240. The protrusion 240 is arranged in a ring and protrudes from the outer wall of the collimator 200. The collimator 200 is overlapped on the first annular groove through the protrusion 240. The protrusion 240 and the first annular groove are positioned by a positioning pin and then fixed by screws.

[0066] In some embodiments, the coating device may further include a rotating member, wherein the rotating member is located between the inner wall of the first chamber 300 and the gear ring 230 , and the collimator 200 rotates relative to the electrostatic chuck 120 via the rotating member.

[0067] In some examples, in conjunction with reference Figure 4 and Figure 6 The rotating member may be a collimating bearing 320. The outer ring (i.e., the bearing seat) of the collimating bearing 320 is fixedly connected to the inner wall of the first chamber 300, the inner ring of the collimating bearing 320 is fixedly connected to the outer side surface of the collimator 200, and the collimator 200 is coaxial with the collimating bearing 320.

[0068] It should be noted that the collimating bearing 320 in this example refers to a bearing that has a matching relationship with the gear ring 230 .

[0069] The collimation bearing 320 may be fixedly connected to the first chamber 300 and the collimator 200 by a detachable connection such as flange fixing or bolt fixing.

[0070] The number of the collimation bearings 320 may be one or more. As a specific example, the number of the collimation bearings 320 is two, the two collimation bearings 320 are coaxial and spaced apart along the extension direction of the collimation channel 210, and the plurality of collimation bearings 320 can improve the stability of the collimator 200 during rotation.

[0071] The alignment bearing 320 may be selected from a ball bearing, a cylindrical roller bearing, a tapered roller bearing, or the like.

[0072] It should be pointed out that the collimation bearing 320 in this embodiment needs to bear the weight of the collimator 200 while realizing the rotation of the collimator 200 relative to the electrostatic chuck 120, that is, it is subjected to the axial force of the collimation bearing 320. The collimation bearing 320 can preferably be a tapered roller bearing. The tapered roller bearing is a bearing with high axial load and can reduce the probability of damage in the process of bearing the collimator 200.

[0073] In other examples, combined with reference Figure 7 and Figure 8 The inner wall of the first chamber 300 may have an annular bearing portion 350, and the top of the annular bearing portion 350 has a second annular groove (not shown in the figure), wherein the gear ring 230 is arranged in the second annular groove, and the number of rotating parts is multiple, which is arranged on at least one of the second annular groove and the gear ring 230.

[0074] In some embodiments, reference Figure 7 The annular bearing portion 350 may be integrally formed with the first chamber 300. In other examples, the annular bearing portion 350 may also be fixedly connected to the first chamber 300. The fixed connection may be a detachable connection such as bolt fixation, or a non-detachable connection such as welding fixation.

[0075] In order to reduce the friction between the bottom of the gear ring 230 and the bottom of the second annular groove, in some embodiments, in combination with reference Figure 7 and Figure 8 The rotating member is disposed between the bottom of the gear ring 230 and the bottom of the second annular groove. For example, the rotating members are distributed at intervals along the circumference of the second annular groove at the bottom of the second annular groove. For another example, the rotating members are distributed at intervals along the circumference of the collimator 200 at the bottom of the gear ring 230.

[0076] In order to reduce the friction between the outer wall of the gear ring 230 and the groove side wall of the second annular groove, in some embodiments, the rotating member is disposed between the outer wall of the gear ring 230 and the groove side wall of the second annular groove. For example, the rotating members are distributed at intervals along the circumference of the second annular groove on the groove side wall of the second annular groove; for another example, the rotating members are distributed at intervals along the circumference of the collimator 200 on the outer wall of the gear ring 230.

[0077] It should be pointed out that in other examples, each rotating member may also be partially distributed on the side wall of the second annular groove along the circumferential intervals of the second annular groove, and the other part may be distributed on the bottom of the second annular groove along the circumferential intervals of the second annular groove; or, each rotating member may also be partially distributed on the outer side wall of the gear ring 230 along the circumferential intervals of the collimator 200; as another specific example, some rotating members are distributed on the outer side wall of the gear ring 230 along the circumferential intervals of the collimator 200, and the other part may be distributed on the bottom of the gear ring 230 along the circumferential intervals of the collimator 200.

[0078] In some embodiments, the rotating member may be an alignment bearing 320, an alignment roller, or an alignment roller.

[0079] It should be pointed out that the alignment bearing appearing in this example refers to a bearing having a matching relationship with the gear ring, the alignment roller refers to a roller having a matching relationship with the gear ring, and the alignment roller refers to a roller having a matching relationship with the gear ring.

[0080] In some examples, the rotating member can be made of ceramic material, for example, the rotating member can be a ceramic bearing, and another example is that the rotating member can be a ceramic roller. On the one hand, ceramic materials have insulating and non-magnetic characteristics. Compared with stainless steel materials, they can naturally achieve electrical isolation between the collimator and the first chamber, avoiding electrical conduction between the collimator and the first chamber, causing high voltage breakdown or short circuit and damaging the equipment; on the other hand, ceramic materials have good self-lubricity, and the friction coefficient is 30% to 50% lower than that of stainless steel materials, which can reduce the rotational resistance of the collimator when it rotates relative to the electrostatic chuck and the amount of particulate matter generated.

[0081] In other examples, the rotating member may be made of a metal material, and in this case, an insulating layer (not shown in the figure) is provided between the rotating member and the inner wall of the first chamber, and the insulating layer can electrically isolate the rotating member from the first chamber.

[0082] In order to further improve the coating performance of the wafer structure, a bias voltage can be applied to the collimator to generate an electric field inside the collimator. The electric field can guide the movement direction of the metal ions, thereby further improving the straightness of the metal ions and further improving the coating performance of the wafer structure.

[0083] In some embodiments, in conjunction with reference Figure 4 and Figure 7 The coating device may further include an electric lead 330. The electric lead 330 is disposed on the first chamber 300, one end of the electric lead 330 is electrically connected to the gear ring 230, and the other end of the electric lead 330 passes through the first chamber 300 and is connected to a power source (not shown in the figure) outside the first chamber 300, wherein the gear ring 230 is electrically connected to the collimator 200, and the power source applies a bias voltage to the gear ring 230 and the collimator 200 through the electric lead 330.

[0084] It should be pointed out that in the embodiment of the present disclosure, by setting the collimator to rotate relative to the electrostatic chuck, the correlation between the bias voltage and the transfer effect can be reduced. Compared with the aforementioned example in which the collimator and the electrostatic chuck are relatively stationary, the collimator in the embodiment of the present disclosure is applied with a higher bias voltage to obtain better collimation performance. At the same time, the degree of transfer effect induced by the rotation relative to the electrostatic chuck can be lower, which means that the collimator in the embodiment of the present disclosure is allowed to be applied with a higher bias voltage.

[0085] In some embodiments, the bias voltage applied by the power supply to the collimator 200 through the electrical lead 330 may be in the range of 0 to 500 volts (V). As a specific example, the bias voltage applied by the power supply to the collimator 200 through the electrical lead 330 may be 450 volts.

[0086] In a specific implementation, the electrical lead 330 can be electrically connected to the gear ring 230 in a variety of ways.

[0087] In some embodiments, in conjunction with reference Figure 4 and Figure 7 One end of the electric lead 330 can penetrate through the wall of the first chamber 300 and directly contact the gear ring 230 .

[0088] It should be pointed out that the electric lead 330 is arranged on the first chamber 300, and the gear ring 230 rotates relative to the first chamber 300, so the gear ring 230 will also rotate relative to the electric lead 330. That is, in the example where one end of the electric lead 330 directly contacts the gear ring 230, the gear ring 230 and one end of the electric lead 330 are actually in sliding contact. The sliding contact will cause loss at the position where the electric lead 330 and the gear ring 230 contact each other, thereby resulting in a gap between the electric lead 330 and the gear ring 230, and then resulting in poor contact between the electric lead 330 and the gear ring 230.

[0089] In order to improve the contact performance between the electric lead 330 and the gear ring 230, in some examples, the electric lead 330 and the gear ring 230 can be set to be in elastic contact. During the initial assembly, the electric lead 330 can be configured to elastically contact the gear ring 230 in an elastically deformed state, so that even if the position where the electric lead 330 and the gear ring 230 contact each other subsequently causes loss, the electric lead 330 can compensate for the loss by restoring its original shape, so that the electric lead 330 always contacts the gear ring 230, ensuring good contact between the electric lead 330 and the gear ring 230.

[0090] As a specific example, an elastic spring sheet may be provided at the end of the electric lead 330 that contacts the gear ring 230 . During initial assembly, the elastic spring sheet is configured to be in an elastically deformed bent state and to be in elastic contact with the gear ring 230 .

[0091] As another specific example, the end of the electric lead 330 that contacts the gear ring 230 may be provided with a press-in ball head plunger (also known as a spring plunger). The ball head plunger has a shell, a spring and a ball head located inside the shell. The spring squeezes the ball head to elastically contact the gear ring 230. During initial assembly, the spring is configured to be in a compressed state of elastic deformation and in contact with the gear ring 230.

[0092] It should be pointed out that compared with the elastic spring sheet, the spring ball head plunger can not only restore its original shape through the spring to compensate for the loss, so that the ball head always contacts the gear ring 230 to ensure good contact between the electric lead 330 and the gear ring 230, but also can convert the sliding friction into rolling friction when the ball head in the spring ball head plunger and the gear ring 230 move relative to each other, thereby reducing the loss caused by the contact position between the electric lead 330 and the gear ring 230 and extending the service life of the gear ring 230. Therefore, in the specific implementation, a spring ball head plunger can be preferably provided at the end where the electric lead 330 contacts the gear ring 230.

[0093] In some embodiments, when the rotating member is made of metal, one end of the electrical lead 330 can pass through the cavity wall of the first chamber 300 and the insulating layer (not shown in the figure) and connect with the rotating member, for example Figure 6 The other end directly contacts the collimation bearing in the first chamber 300, and the other end is connected to the power supply outside the first chamber 300.

[0094] In this way, when the gear ring 230 rotates relative to the electrostatic chuck 120, the relative position of the power lead 330 and the rotating part remains unchanged, and there is no friction loss between the power lead 330 and the rotating part, so a conventional power lead 330 such as power feedthrough can be used to directly contact the rotating part. It should be pointed out that "power feedthrough" here is the name of a device that can introduce bias voltage, rather than the operation of "introducing electricity".

[0095] The transmission device can be a magnetic coupling transmission structure or a magnetic fluid vacuum sealing structure.

[0096] Taking the magnetic coupling transmission structure as an example, in some embodiments, in combination with reference Figure 4 and Fig. 9 , Fig. 9 A schematic cross-sectional structure diagram of a transmission device in an embodiment of the present disclosure is shown, and the transmission device may include a cover plate 510, an inner shell 520, an inner shaft bearing 530, a first transmission shaft 540, a transmission member 550, a first magnet 560, an outer shell 570, an outer inner bearing 580 and a second magnet 590.

[0097] Among them, the cover plate 510 is located at the top of the second chamber 400, and is used to seal the top opening of the second chamber 400 so that the second chamber 400 can form a vacuum environment. The inner shell 520 is located outside the second chamber 400 and is sealed and connected to the end face of the cover plate 510 away from the second chamber 400.

[0098] The inner shaft bearing 530 is located in the inner housing 520 , and the first transmission shaft 540 is rotatably connected to the inner wall of the inner housing 520 via the inner shaft bearing 530 .

[0099] The inner shaft bearing 530 can be connected to the first transmission shaft 540 and the inner housing 520 by a detachable connection such as flange fixing, bolt fixing, or a non-detachable connection such as welding fixing.

[0100] The number of inner shaft bearings 530 may be one or more. As a specific example, the number of inner shaft bearings 530 is two, the two inner shaft bearings 530 are coaxial and spaced apart along the extension direction of the first transmission shaft, and the plurality of outer inner bearings 580 can improve the stability of the first transmission shaft 540 during rotation.

[0101] The outer shell 570 is sleeved outside the inner shell 520 , the outer inner bearing 580 is located inside the outer shell 570 , and the outer shell 570 can be rotatably connected to the inner shell 520 via the outer inner bearing 580 .

[0102] The outer inner bearing 580 may be connected to the outer shell 570 and the inner shell 520 by a detachable connection such as flange fixing, bolt fixing, or a non-detachable connection such as welding fixing.

[0103] The number of the outer inner bearing 580 can be one or more. As a specific example, the number of the outer inner bearing 580 is two, and the two outer inner bearings 580 are coaxial and spaced apart along the extension direction of the first transmission shaft. The plurality of outer inner bearings 580 can improve the stability of the outer shell 570 during rotation.

[0104] The outer and inner bearings 580 may be selected from ball bearings, cylindrical roller bearings, tapered roller bearings and the like.

[0105] Among them, the first magnet 560 is located in the inner shell 520 and fixed on the first transmission shaft 540. The transmission member 550 is located in the second chamber 400 and fixed on the first transmission shaft 540. It can be transmitted and cooperated with the collimator 200 through the connecting channel. The second magnet 590 is fixed on the inner wall of the outer shell 570 and is arranged around the first magnet 560.

[0106] The transmission device is configured such that when the outer shell 570 rotates relative to the inner shell 520, the first transmission shaft 540 and the transmission member 550 rotate with the first magnet 560 under the action of the second magnet 590, so that the transmission member drives the collimator 200 and the electrostatic suction cup 120 to rotate relative to each other.

[0107] Specifically, when the outer shell 570 rotates relative to the inner shell 520, the second magnet 590 fixed on the outer shell rotates synchronously. Under the action of magnetic force, the first magnet 560 fixed on the first transmission shaft 540 rotates synchronously with the first transmission shaft 540 and the transmission member 550 fixed on the first transmission shaft 540. Based on the transmission cooperation between the transmission member 550 and the collimator 200, the transmission member 550 drives the collimator 200 and the electrostatic suction cup 120 to rotate relative to each other.

[0108] It should be noted that transmission between the transmission member 550 and the collimator 200 can be achieved in a variety of ways.

[0109] In some embodiments, in conjunction with reference Figure 4 and Fig.10 , Fig.10 The figure shows a transmission cooperation diagram of a transmission member and a collimator in an embodiment of the present disclosure. The transmission member 550 is a gear, and the transmission member 550 is meshed with the gear ring 230 for transmission. The first chamber 300 has a receiving groove 340, which is arranged on the inner side wall of the first chamber 300 for receiving the gear ring 230.

[0110] In some examples, the gear ring 230 is suspended in the receiving groove 340 to reduce the friction resistance between the gear ring 230 and the bottom and side walls of the receiving groove 340. The portion of the receiving groove 340 located at the common cavity wall of the first chamber 300 and the second chamber 400 connects the first chamber 300 and the second chamber 400 and is used as a connecting channel.

[0111] In other embodiments, the transmission member includes a first pulley and a first belt, and the transmission member is belt-driven with the gear ring 230. Specifically, the first pulley is located in the second chamber and fixed on the first transmission shaft, and the first belt passes through the communication channel and is sleeved on the first pulley outside the gear ring 230.

[0112] In some embodiments, reference Figure 4 and Fig.11 , Fig.11 The schematic diagram of the transmission cooperation between a transmission device and a first driving device in an embodiment of the present disclosure is shown. The coating device may further include: a first driving device. The first driving device is configured to cooperate with the outer shell 570 to drive the outer shell 570 to rotate relative to the inner shell 520.

[0113] In some embodiments, the first driving device may include: a first motor bracket 610, a first driving motor 620, a first reducer 630, a second transmission shaft 640, a second pulley 650, and a second belt 660. The first motor bracket 610 is fixed on the first chamber 300 or the second chamber 400, the first driving motor 620, the first reducer 630, the second transmission shaft 640, and the second pulley 650 are coaxially connected in sequence, and the first reducer 630 is fixed on the first motor bracket 610, and the second belt 660 is sleeved outside the second pulley 650 and the third pulley 571 fixed on the outer shell 570, wherein the third pulley 571 is coaxially arranged with the outer shell 570.

[0114] Specifically, the first drive motor 620 is started, and the first drive motor 620 drives the second transmission shaft 640 to rotate, and the second pulley 650 fixed on the second transmission shaft 640 rotates synchronously, and the third pulley 571 on the outer shell 570 drives the outer shell 570 to rotate relative to the inner shell 520 under the transmission of the second belt 660.

[0115] In some embodiments, reference Figure 4 The coating device may further include: a magnetron 800 and a second driving device, wherein the second driving device is used to drive the magnetron 800 to rotate.

[0116] In some embodiments, the second driving device may include: a second motor bracket 710, a second driving motor 720, a second reducer 730 and a third transmission shaft 740. The second motor bracket 710 is fixed on the target material 110, the second driving motor 720, the second reducer 730 and the third transmission shaft 740 are coaxially connected in sequence, the magnetron 800 is fixed on the end of the second transmission shaft 640 away from the second driving motor 720, and the second reducer 730 is fixed on the second motor bracket 710.

[0117] Specifically, the second driving motor 720 is started, and the second driving motor 720 drives the third transmission shaft 740 to rotate, and the magnetron 800 fixed on the third transmission shaft 740 rotates synchronously. It should be noted that the third transmission shaft 740 is coaxially arranged with the collimator 200 .

[0118] It is understandable that the above-mentioned embodiments provide a variety of implementation schemes, and the various implementation schemes can be combined and cross-referenced with each other without conflict, thereby extending a variety of possible implementation schemes, which can all be considered as embodiment schemes disclosed and open in the embodiments of this application.

[0119] It will be understood that, in the description of the present application, the terms “upper”, “lower”, “top”, “bottom”, “inside”, “outside”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “center”, “longitudinal”, “lateral”, “length”, “width”, “thickness”, “clockwise”, “counterclockwise”, “axial”, “radial”, “circumferential”, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0120] It is understandable that the term "and / or" in this article is only a description of the association relationship of the associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article indicates that the associated objects before and after are in an "or" relationship.

[0121] It is understood that the "multiple" mentioned herein refers to two or more than two. The first, second, third, fourth, etc. descriptions in the embodiments of the present application are only used for illustration and distinction of the described objects, and have no order, nor do they represent any special limitation on the number of devices in the embodiments of the present application, and cannot constitute any limitation on the embodiments of the present application.

[0122] It should be noted that the “examples” or “embodiments” referred to in this specification refer to specific features, structures or characteristics that may be included in at least one implementation of the embodiments of the present disclosure.

[0123] Although the embodiments of the present disclosure are disclosed as above, the present disclosure is not limited thereto. Any person skilled in the art may make various changes and modifications without departing from the spirit and scope of the present disclosure. Therefore, the scope of protection of this specification shall be subject to the scope defined by the claims.

Claims

1. A coating device, characterized in that: include: First chamber; an electrostatic chuck, located in the first chamber; A collimator, located in the first chamber, having a plurality of collimation channels distributed at intervals; A second chamber is disposed adjacent to the first chamber, wherein a connecting passage is provided on a chamber wall of the second chamber adjacent to the first chamber, and the second chamber is connected to the first chamber through the connecting passage; The transmission device is assembled in the second chamber and is configured to cooperate with the collimator through the communication channel to drive the collimator to rotate relative to the electrostatic chuck.

2. The device according to claim 1, characterized in that Also includes: A gear ring, coaxially arranged with the collimator, having a plurality of gear teeth distributed along the circumference of the collimator; Wherein, the gear ring is configured to cooperate with the transmission device in transmission, and drives the collimator to rotate synchronously when driven by the transmission device.

3. The device according to claim 2, characterized in that The gear ring and the collimator satisfy one of the following conditions: The gear ring is detachably connected to the collimator; Alternatively, the gear ring is integrally arranged with the collimator.

4. The device according to claim 2, characterized in that Also includes: A rotating member is located between the inner wall of the first chamber and the gear ring, wherein the gear ring and the first chamber are rotationally matched through the rotating member.

5. The device according to claim 4, characterized in that The rotating member is a collimating bearing, the outer ring of the collimating bearing is connected to the inner wall of the first chamber, and the inner ring of the collimating bearing is connected to the gear ring.

6. The device according to claim 5, characterized in that The number of the collimation bearing is one; Alternatively, there are multiple collimation bearings, and the collimation bearings are arranged at intervals along the extension direction of the collimation channel.

7. The device according to claim 4, characterized in that The inner wall of the first chamber has: An annular bearing portion, wherein the top of the annular bearing portion has an annular groove; Wherein, the gear ring is arranged in the annular groove, and the rotating member is arranged on the annular groove or the gear ring.

8. The device according to claim 7, characterized in that There are multiple rotating parts, and each rotating part satisfies one of the following conditions: The rotating members are distributed at intervals along the circumference of the annular groove at the groove bottom and / or groove sidewall of the annular groove; The rotating parts are distributed at intervals on the bottom and / or side wall of the gear ring along the circumference of the collimator.

9. The device according to claim 7, characterized in that The rotating member comprises: Collimation bearings; Or, alignment rollers.

10. The device according to claim 2, characterized in that The first chamber has: An accommodating groove is arranged on the inner wall of the first chamber, and a portion of the gear ring away from the collimator along its radial direction is suspended in the accommodating groove; Part of the accommodating grooves located at the adjacent cavity walls of the first cavity and the second cavity are used as the communicating channel.

11. The device according to claim 2, characterized in that Also includes: An electric lead, one end of which is electrically connected to the gear ring, and the other end of which passes through the first chamber and is connected to a power source outside the first chamber; The gear ring is electrically connected to the collimator, and the power supply applies a bias voltage to the gear ring and the collimator through the electrical lead.

12. The device according to claim 11, characterized in that One end of the electrical lead is electrically connected to the gear ring to satisfy one of the following conditions: One end of the electric lead penetrates the first chamber and contacts the gear ring; The rotating member is made of metal, the rotating member is electrically connected to the gear ring, and one end of the electrical lead penetrates the first chamber and then contacts the rotating member.

13. The device according to claim 11, characterized in that The electrical lead elastically conflicts with the collimator, and the electrical lead comprises at least one of the following: Elastic reed; Press-in ball plunger.

14. The device according to claim 2, characterized in that The transmission device comprises: Inner housing, inner shaft bearing, first transmission shaft, transmission member, first magnet, outer housing, outer inner bearing and second magnet; The inner housing is located outside the second chamber and is sealed to the second chamber, the inner shaft bearing is located inside the inner housing, and the first transmission shaft can be rotatably connected to the inner wall of the inner housing through the inner shaft bearing, the first magnet is located inside the inner housing and fixed on the first transmission shaft, and the transmission member is arranged on the first transmission shaft and is located inside the second chamber; The outer shell is sleeved outside the inner shell, the outer inner bearing is located inside the outer shell, and the outer shell can be rotatably connected to the inner shell through the outer inner bearing, and the second magnet is fixed on the outer shell; Wherein, the transmission device is configured so that when the outer shell rotates relative to the inner shell, the first transmission shaft and the transmission member rotate along with the first magnet under the action of the second magnet, so that the transmission member and the gear ring are in transmission cooperation.

15. The device according to claim 14, characterized in that The transmission member is a gear which meshes with the gear ring for transmission.

16. The device according to claim 14, characterized in that The transmission member includes a first pulley and a first belt. The first pulley is located in the second chamber and is fixed on the first transmission shaft. The first belt is sleeved outside the first pulley and the gear ring.

17. The device according to claim 14, characterized in that Also includes: A first driving device is configured to drive the outer shell to rotate relative to the inner shell, the first driving device comprising a first motor bracket, a first driving motor, a first reducer, a second transmission shaft, a second pulley and a second belt; Among them, the first motor bracket is fixed on the first chamber or the second chamber, the first drive motor, the first reducer, the second transmission shaft and the second pulley are coaxially connected in sequence, and the first reducer is fixed on the first motor bracket, and the second belt is sleeved outside the second pulley and the outer shell.

18. The device according to claim 1, characterized in that The rotation axis of the collimator is a first axis, and the pattern on the cross section of the collimator is a non-rotationally symmetrical array pattern, wherein the cross section of the collimator is perpendicular to the first axis.

19. The device according to claim 1, characterized in that The pattern of each collimating channel on the cross section of the collimator satisfies one or more of the following: Round; Polygon; Irregular shapes.

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