Integral structure of tubular vacuum equipment furnace body cabinet

Abstract

The invention relates to the technical field of photovoltaic and tubular equipment, and discloses a tubular vacuum equipment furnace body cabinet integral structure, which comprises a furnace body cabinet, a plurality of groups of furnace body assemblies are vertically and uniformly arranged on two sides of the furnace body cabinet, a mounting area is arranged between the furnace body assemblies, and each furnace body assembly comprises a mounting frame, the mounting frame is arranged on the furnace body cabinet through an adjusting assembly; the furnace body is fixedly arranged on the mounting frame; and a quartz tube. According to the integral structure of the furnace body cabinet of the tubular vacuum equipment, one end of the furnace body assembly is unfixed from the furnace body cabinet by removing the connection between the first fixing piece and the second fixing piece, and then the mounting frame drives the furnace body to be axially and stably screwed out around the side edge by virtue of the rotary connection formed by the third fixing piece in the second adjusting piece and the fixing bolt; the furnace body is controlled to be opened and closed through the control piece, one end of the quartz tube is exposed, an operator pulls out the quartz tube in the radial direction to clean or replace the quartz tube, and the effect of facilitating maintenance and replacement is achieved.

Description

Technical Field

[0001] The invention relates to the technical field of photovoltaic and tubular equipment, and in particular to an integral structure of a furnace cabinet of a tubular vacuum equipment. Background Art

[0002] In the prior art, the furnace body of the tubular vacuum equipment is usually installed inside a frame, the quartz tube is installed from the inside of the clean bench, and the furnace body is installed from the side of the equipment.

[0003] Since the quartz tube and the furnace body are of large mass, the operating space is small during the installation process, and high manual operation precision is required, which makes the entire assembly process difficult, the installation efficiency is low, and the maintenance operation is cumbersome. In actual use, since the equipment is in a high-temperature operation state for a long time, the furnace wire is easy to burn out or age, and the inner wall of the quartz tube will also affect the product purity due to the accumulation of sediment. Therefore, the quartz tube needs to be disassembled, cleaned or replaced regularly, or the furnace body structure needs to be replaced when the furnace wire burns out. The current structural design requires a lot of manpower to cooperate when performing the above operations. The operator moves up and down or plugs in and out sideways in a limited space, which is prone to equipment collision, workpiece damage and personal safety risks, which is not conducive to ensuring the long-term stable operation of the equipment. From the perspective of equipment maintainability and ergonomics, the structure is significantly irrational and does not meet the use requirements of modern vacuum equipment in terms of convenience, maintainability and safety. Summary of the invention

[0004] 1. Technical issues to be resolved In view of the deficiencies in the prior art, the present invention provides an overall structure of a furnace cabinet for a tubular vacuum equipment, which solves the problem that the prior tubular vacuum equipment is difficult to disassemble, assemble and maintain, and affects efficiency and safety.

[0005] (II) Technical solution To achieve the above-mentioned purpose, the present invention provides the following technical solutions: an overall structure of a furnace cabinet of a tubular vacuum equipment, comprising: a furnace cabinet, a plurality of groups of furnace assemblies are vertically and evenly arranged on both sides of the furnace cabinet, an installation area is set between the furnace assemblies, and the furnace assemblies include: a mounting frame, the mounting frame is set on the furnace cabinet through an adjustment assembly; a furnace body, the furnace body is fixedly set on the mounting frame; a quartz tube, the quartz tube is set inside the furnace body; an annular support mechanism, the bottom of the mounting frame is provided with an annular support mechanism; a vertical support mechanism, the side of the mounting frame is provided with a vertical support mechanism.

[0006] Preferably, the adjustment assembly includes a first adjustment member and a second adjustment member, the first adjustment member includes a first fixing member and a second fixing member, and the second adjustment member includes a third fixing member and a fixing bolt.

[0007] Preferably, the first fixing member is fixedly arranged on the furnace cabinet, and the second fixing member is arranged at one end of the mounting frame in cooperation with the first fixing member; the fixing bolt is arranged on the furnace cabinet, and the third fixing member is arranged at the other end of the mounting frame corresponding to the fixing bolt.

[0008] Preferably, an annular gear ring is provided on the top of the third fixing member, a protruding plate is fixedly connected to the top of the fixing bolt, a return spring is provided on the outer wall of the protruding plate, one end of the return spring is fixedly connected to the bottom of the protruding plate, and the other end of the return spring is fixedly connected to a positioning block.

[0009] Preferably, a guide bar is fixedly connected to the top of the positioning block, and the outer wall of the guide bar is slidably connected to the inner wall of the protruding plate.

[0010] Preferably, a support rod is provided on the mounting frame below the furnace body.

[0011] Preferably, a control component is provided on the furnace cabinet, and the control component is used to connect and control the opening and closing of the furnace.

[0012] Preferably, the annular support mechanism includes a connecting disc and a main support block, the connecting disc is fixedly connected to the bottom of the mounting frame, the main support block is fixedly connected to the furnace cabinet, the bottom of the connecting disc is fixedly connected to a connecting block, an annular telescopic support frame is fixedly connected between the connecting block and the main support block, and a damping air spring is fixedly connected between the connecting block and the main support block.

[0013] Preferably, the vertical support mechanism includes a hollow connecting block, which is fixedly connected to the side of the mounting frame, a cylindrical support block is slidably connected to the inner wall of the mounting frame, a trapezoidal block is fixedly connected to the top of the cylindrical support block, a supporting foot is fixedly connected to the bottom of the cylindrical support block, and bolt fasteners are threadedly connected to the inner wall of the hollow connecting block.

[0014] (III) Beneficial effects Compared with the prior art, the present invention provides an overall structure of a furnace cabinet for a tubular vacuum equipment, which has the following beneficial effects: 1. The overall structure of the furnace cabinet of the tubular vacuum equipment is that one end of the furnace body assembly is released from the furnace cabinet by removing the connection between the first fixing member and the second fixing member, and then the mounting frame drives the furnace body to rotate out smoothly around the side axis by relying on the rotation connection formed by the third fixing member and the fixing bolt in the second adjusting member. The furnace body is opened and closed by the control member to expose one end of the quartz tube. The operator then pulls out the quartz tube in the radial direction for cleaning or replacement, which facilitates maintenance and replacement.

[0015] 2. The overall structure of the furnace cabinet of the tubular vacuum equipment, the annular gear ring will continuously resist the positioning block to move up and down during the rotation process, until the annular gear ring stops rotating, the resistance force between the lower positioning block and the annular gear ring can form a limit stop to avoid shaking after the rotation is completed.

[0016] 3. The overall structure of the furnace cabinet of the tubular vacuum equipment is set up with a ring-shaped support mechanism. The connecting disc and the mounting frame move synchronously. The connecting block and the main support block fixed on the furnace cabinet are adjustable through a ring-shaped telescopic support frame, so that the weight of the mounting frame can be stably carried at different angles. At the same time, the damping air spring further absorbs the impact force during operation, improves the smoothness and safety during rotation, and effectively avoids structural shaking or deformation caused by excessive weight of the furnace body.

[0017] 4. The overall structure of the furnace cabinet of the tubular vacuum equipment is arranged by means of a vertical support mechanism. When the furnace body is moved to a suitable position, the bottom support feet are pulled out into place to contact the ground to bear the pressure. At this time, the bottom support feet drive the hollow connecting blocks and the trapezoidal blocks to move downward, and then the bolt fasteners are rotated to resist the inclined surface of the trapezoidal blocks, so that the bottom support feet are in contact with the ground, thereby forming a stable three-point support structure. The vertical support mechanism at the top can resist the top of the hollow connecting block of the vertical support mechanism at the bottom, effectively avoiding the shaking, sagging or deformation caused by the excessive cantilever of the rotating structure and the gravity offset, and further improving the reliability and safety of the overall equipment operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 It is a schematic diagram of the rotating structure of the mounting frame of the present invention; Figure 3 It is a structural schematic diagram of a side view of the overall structure of the present invention; Figure 4 It is a specific schematic diagram of the furnace assembly of the present invention; Figure 5 It is a structural schematic diagram of the mounting frame of the present invention; Figure 6 It is a structural schematic diagram of the annular support mechanism of the present invention; Figure 7 It is a structural schematic diagram of the ring-type telescopic support frame of the present invention; Figure 8 is a schematic structural diagram of the second adjusting member of the present invention; Fig. 9 It is a structural schematic diagram of the cross section of the hollow connecting block of the present invention.

[0019] In the figure: 110, furnace cabinet; 120, installation area; 130, furnace assembly; 131, mounting frame; 132, furnace; 133, quartz tube; 140, adjustment assembly; 141, first adjustment member; 142, second adjustment member; 1411, first fixing member; 1412, second fixing member; 1421, third fixing member; 1422, fixing bolt; 1423, annular gear ring; 1424, protruding plate; 1425, return spring; 1426, positioning block; 1427, guide bar; 150, support rod; 160, control member; 200, annular support mechanism; 201, connecting disc; 202, connecting block; 203, annular telescopic support frame; 204, main support block; 205, damping air spring; 300, vertical support mechanism; 301, hollow connecting block; 302, cylindrical support block; 303, trapezoidal block; 304, support foot; 305, bolt fasteners. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0021] See also Figure 1-Figure 9 The overall structure of a furnace cabinet of a tubular vacuum equipment includes: a furnace cabinet 110, a plurality of furnace assemblies 130 are vertically and evenly arranged on both sides of the furnace cabinet 110, and an installation area 120 is set between the furnace assemblies 130. The furnace assemblies 130 include: a mounting frame 131, which is set on the furnace cabinet 110 through an adjustment assembly 140; a furnace 132, which is fixedly set on the mounting frame 131; a quartz tube 133, which is set on the furnace 1 32 interior; the furnace body 132 can be withdrawn from the side of the furnace cabinet 110 through the adjustment component 140, and then the quartz tube 133 is withdrawn, which is conducive to cleaning the quartz tube 133. There is no need to remove and replace the quartz tube 133 and the furnace body 132 respectively, the maintenance space is increased and the operation is easy for personnel; the annular support mechanism 200 is provided at the bottom of the mounting frame 131; the vertical support mechanism 300 is provided on the side of the mounting frame 131.

[0022] The structure is designed with full consideration of the maintainability and structural stability of the vacuum equipment in actual operation. The internal space layout of the furnace cabinet 110 is reasonable and can accommodate furnace assemblies 130 of different sizes and specifications, facilitating modular expansion and flexible replacement, thereby improving the overall adaptability and production efficiency of the equipment.

[0023] The adjustment assembly 140 includes a first adjustment member 141 and a second adjustment member 142 . The first adjustment member 141 includes a first fixing member 1411 and a second fixing member 1412 . The second adjustment member 142 includes a third fixing member 1421 and a fixing bolt 1422 .

[0024] The adjustment component 140 adopts a double-end controllable connection structure, which can achieve local loosening and rotation without disassembling the main structure. It is particularly suitable for application scenarios with high requirements on equipment precision, ensuring stability and repeatable positioning accuracy during the adjustment process.

[0025] The first fixing member 1411 is fixedly disposed on the furnace cabinet 110 , and the second fixing member 1412 is arranged at one end of the mounting frame 131 in cooperation with the first fixing member 1411 ; the fixing bolt 1422 is arranged on the furnace cabinet 110 , and the third fixing member 1421 is arranged at the other end of the mounting frame 131 corresponding to the fixing bolt 1422 .

[0026] A ring gear 1423 is provided at the top of the third fixing member 1421, a protruding plate 1424 is fixedly connected to the top of the fixing bolt 1422, a return spring 1425 is provided on the outer wall of the protruding plate 1424, one end of the return spring 1425 is fixedly connected to the bottom of the protruding plate 1424, and the other end of the return spring 1425 is fixedly connected to a positioning block 1426.

[0027] The structure of the annular gear ring 1423 and the positioning block 1426 has automatic buffering and automatic positioning functions, which can provide reliable braking and locking when the equipment is in operation or maintenance state, and effectively reduce positioning deviations caused by misoperation or mechanical impact.

[0028] A guide bar 1427 is fixedly connected to the top of the positioning block 1426, and the outer wall of the guide bar 1427 is slidably connected to the inner wall of the protruding plate 1424. Since this rotating structure has only one side as a rotating axis, it lacks balance and is prone to shaking after the rotation is completed due to the furnace body 132 being too heavy or the operating force being uneven. Therefore, when the third fixing member 1421 rotates with the mounting frame 131, the third fixing member 1421 drives the annular gear ring 1423 to rotate. At this time, the positioning block 1426 and the annular gear ring 1423 are in conflict under the action of the return spring 1425. During the rotation of the annular gear ring 1423, it will continuously conflict with the positioning block 1426 to move up and down. Until the annular gear ring 1423 stops rotating, the resistance force between the lower positioning block 1426 and the annular gear ring 1423 can form a limit stop to avoid shaking after the rotation is completed.

[0029] This limit locking mechanism can achieve a multi-speed "ratchet-like" positioning method through the interaction of a flexible spring and a hard gear ring, combining flexibility and stability, and is particularly suitable for structures that require frequent opening and closing for maintenance.

[0030] A support rod 150 is disposed on the mounting frame 131 below the furnace body 132 , and a control component 160 is disposed on the furnace body cabinet 110 . The control component 160 is used to connect and control the opening and closing of the furnace body 132 .

[0031] Since the furnace body 132 has a large overall mass, and the mounting frame 131 is only fixed by lateral connection during the rotation and pulling process, it is very easy to cause rotation shaking or sagging due to gravity or external force operation, affecting the service life and operational safety. Therefore, a ring-shaped support mechanism 200 is provided, and the ring-shaped support mechanism 200 includes a connecting disc 201 and a main body support block 204. The connecting disc 201 is fixedly connected to the bottom of the mounting frame 131, and the main body support block 204 is fixedly connected to the furnace body cabinet 110. The bottom of the connecting disc 201 is fixedly connected to a connecting block 202, and the connecting block 202 and the main body support block 204 are fixedly connected. There is a ring-shaped telescopic support frame 203, and a damping air spring 205 is fixedly connected between the connecting block 202 and the main support block 204. The connecting disc 201 moves synchronously with the mounting frame 131. The connecting block 202 and the main support block 204 fixed on the furnace cabinet 110 are adjustably supported by the ring-shaped telescopic support frame 203, so that the weight of the mounting frame 131 can be stably carried at different angles. At the same time, the damping air spring 205 further absorbs the impact force during operation, improves the smoothness and safety during rotation, and effectively avoids structural shaking or deformation caused by the excessive weight of the furnace body 132.

[0032] The setting of the annular support mechanism 200 not only improves the load-bearing performance, but also optimizes the operating comfort. The damping air spring 205 has an automatic return buffer function, which can extend the life of the mechanism and reduce the maintenance frequency under repeated operations. It is an important stabilizing component in high-frequency usage scenarios.

[0033] The vertical support mechanism 300 includes a hollow connection block 301, which is fixedly connected to the side of the mounting frame 131. A cylindrical support block 302 is slidably connected to the inner wall of the mounting frame 131. A trapezoidal block 303 is fixedly connected to the top of the cylindrical support block 302. A support foot 304 is fixedly connected to the bottom of the cylindrical support block 302. A bolt fastener 305 is threadedly connected to the inner wall of the hollow connection block 301. The bottom support foot 304 contacts the ground to bear the pressure after the furnace body 132 is pulled out into place. At this time, the bottom support foot 304 is in contact with the ground and bears the pressure. The foot 304 drives the hollow connecting block 301 and the trapezoidal block 303 to move downward, and then the bolt fastener 305 is rotated to contact the inclined surface of the trapezoidal block 303, so that the bottom supporting foot 304 contacts the ground, thereby forming a stable three-point support structure, and the top vertical support mechanism 300 can contact the top of the hollow connecting block 301 of the bottom vertical support mechanism 300, effectively avoiding the shaking, sagging or deformation caused by the excessive cantilever of the rotating structure and gravity offset, thereby improving the reliability and safety of the overall equipment operation.

[0034] To sum up, for the overall structure of the furnace cabinet of the tubular vacuum equipment, when cleaning the quartz tube 133, the operator first removes the connection between the first fixing member 1411 and the second fixing member 1412 to release one end of the furnace assembly 130 from the furnace cabinet 110, and then relies on the rotational connection formed by the third fixing member 1421 and the fixing bolt 1422 in the second adjusting member 142 to make the mounting frame 131 drive the furnace body 132 to rotate smoothly around the side axis, and controls the furnace body 132 to open and close through the control member 160 to expose one end of the quartz tube 133, and then the operator pulls out the quartz tube 133 in the radial direction for cleaning or replacement.

[0035] Since this rotating structure has only one side as the rotating axis and lacks balance, it is easy to cause shaking after the rotation is completed due to the furnace body 132 being too heavy or the operating force being uneven. Therefore, when the third fixing member 1421 rotates with the mounting frame 131, the third fixing member 1421 drives the annular ring gear 1423 to rotate. At this time, the positioning block 1426 and the annular ring gear 1423 are in conflict with each other under the action of the return spring 1425. During the rotation of the annular ring gear 1423, the positioning block 1426 will continuously conflict with the up and down movement of the positioning block 1426 until the annular ring gear 1423 stops rotating. The contact force between the lower positioning block 1426 and the annular ring gear 1423 can form a limit stop to avoid shaking after the rotation is completed.

[0036] The connecting disc 201 moves synchronously with the mounting frame 131, and the connecting block 202 and the main support block 204 fixed on the furnace cabinet 110 are adjustably supported by the annular telescopic support frame 203, so that the weight of the mounting frame 131 can be stably supported at different angles. At the same time, the damping air spring 205 further absorbs the impact force during operation, improves the smoothness and safety during rotation, and effectively avoids structural shaking or deformation caused by the excessive weight of the furnace body 132.

[0037] When the furnace body 132 moves to a suitable position, the bottom support foot 304 contacts the ground to bear the pressure after the furnace body 132 is pulled into place. At this time, the bottom support foot 304 drives the hollow connecting block 301 and the trapezoidal block 303 to move downward, and then the bolt fastener 305 is rotated to resist the inclined surface of the trapezoidal block 303, so that the bottom support foot 304 contacts the ground, thereby forming a stable three-point support structure. The vertical support mechanism 300 at the top can resist the top of the hollow connecting block 301 of the bottom vertical support mechanism 300, effectively avoiding the shaking, sagging or deformation caused by the excessive cantilever of the rotating structure and gravity offset, and further improving the reliability and safety of the overall equipment operation.

[0038] The three-point structure has the best mechanical stability, which can keep the furnace body 132 within a controllable stable range in any state, and is particularly suitable for the strict requirements on equipment position deviation in high-precision heat treatment processes. It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

Claims

1. A tubular vacuum equipment furnace cabinet overall structure, characterized in that: include: A furnace cabinet (110), wherein a plurality of groups of furnace assemblies (130) are arranged vertically and evenly on both sides of the furnace cabinet (110), and an installation area (120) is provided between the furnace assemblies (130). The furnace assemblies (130) include: A mounting frame (131), the mounting frame (131) being arranged on the furnace cabinet (110) via an adjustment component (140); A furnace body (132), wherein the furnace body (132) is fixedly mounted on the mounting frame (131); A quartz tube (133), wherein the quartz tube (133) is arranged inside the furnace body (132); An annular support mechanism (200), wherein the bottom of the mounting frame (131) is provided with an annular support mechanism (200); A vertical support mechanism (300), wherein a side surface of the mounting frame (131) is provided with a vertical support mechanism (300).

2. The overall structure of a furnace cabinet of a tubular vacuum equipment according to claim 1, characterized in that: The adjustment assembly (140) comprises a first adjustment member (141) and a second adjustment member (142); the first adjustment member (141) comprises a first fixing member (1411) and a second fixing member (1412); and the second adjustment member (142) comprises a third fixing member (1421) and a fixing bolt (1422).

3. The overall structure of a furnace cabinet of a tubular vacuum equipment according to claim 2, characterized in that: The first fixing member (1411) is fixedly arranged on the furnace cabinet (110), and the second fixing member (1412) is arranged on one end of the mounting frame (131) in cooperation with the first fixing member (1411); the fixing bolt (1422) is arranged on the furnace cabinet (110), and the third fixing member (1421) is arranged on the other end of the mounting frame (131) corresponding to the fixing bolt (1422).

4. The overall structure of a furnace cabinet of a tubular vacuum equipment according to claim 3, characterized in that: An annular gear ring (1423) is arranged at the top of the third fixing member (1421), a protruding plate (1424) is fixedly connected to the top of the fixing bolt (1422), a return spring (1425) is arranged on the outer wall of the protruding plate (1424), one end of the return spring (1425) is fixedly connected to the bottom of the protruding plate (1424), and the other end of the return spring (1425) is fixedly connected to a positioning block (1426).

5. The overall structure of a furnace cabinet for a tubular vacuum equipment according to claim 4, characterized in that: A guide bar (1427) is fixedly connected to the top of the positioning block (1426), and an outer wall of the guide bar (1427) is slidably connected to an inner wall of the protruding plate (1424).

6. The overall structure of a furnace cabinet for a tubular vacuum equipment according to claim 5, characterized in that: A support rod (150) is arranged below the furnace body (132) on the mounting frame (131).

7. The overall structure of a furnace cabinet for a tubular vacuum equipment according to claim 6, characterized in that: The furnace body cabinet (110) is provided with a control component (160), and the control component (160) is used to connect and control the opening and closing of the furnace body (132).

8. The overall structure of a furnace cabinet for a tubular vacuum equipment according to claim 7, characterized in that: The annular support mechanism (200) comprises a connecting disc (201) and a main body support block (204); the connecting disc (201) is fixedly connected to the bottom of the mounting frame (131); the main body support block (204) is fixedly connected to the furnace cabinet (110); a connecting block (202) is fixedly connected to the bottom of the connecting disc (201); an annular telescopic support frame (203) is fixedly connected between the connecting block (202) and the main body support block (204); and a damping air spring (205) is fixedly connected between the connecting block (202) and the main body support block (204).

9. The overall structure of a furnace cabinet for a tubular vacuum equipment according to claim 8, characterized in that: The vertical support mechanism (300) comprises a hollow connection block (301), wherein the hollow connection block (301) is fixedly connected to a side surface of a mounting frame (131), a cylindrical support block (302) is slidably connected to the inner wall of the mounting frame (131), a trapezoidal block (303) is fixedly connected to the top of the cylindrical support block (302), a support foot (304) is fixedly connected to the bottom of the cylindrical support block (302), and a bolt fastener (305) is threadedly connected to the inner wall of the hollow connection block (301).

Images