Temporary storage maintenance method and system for mask plate

Abstract

The invention relates to the technical field of mask plate processing equipment, in particular to a mask plate temporary storage maintenance method and system. Comprising a constant-temperature cooling device for performing constant-temperature treatment on mask plate bodies, a manipulator for grabbing or placing the mask plate bodies, a temporary storage mechanism for storing the mask plate bodies and detecting the temperature of each mask plate body in real time, and a detection device for performing film detection on the mask plate bodies, when the mechanical arm places the mask plate body on the temporary storage mechanism, the mask plate body is marked as a first working procedure, a second working procedure or a third working procedure; the mechanical arm recognizes the mask plate body in the first working procedure, the second working procedure or the third working procedure and then grabs the corresponding mask plate body; the mask plate body can be conveniently and accurately transferred, so that the mask plate body can keep stable precision during thin film detection, the influence on the mask plate body during thin film detection is effectively reduced, and the detection accuracy and reliability are improved.

Description

Technical Field

[0001] The present invention relates to the technical field of mask plate processing equipment, and in particular to a mask plate temporary storage and maintenance method and system. Background Art

[0002] A mask is a high-precision metal plate used in processes such as photolithography or evaporation, on which tiny patterns or circuits can be made. Mask inspection refers to the process of inspecting the quality and performance of a mask, mainly including inspections of the pattern, size, defects, alignment, etc. of the mask. The purpose of mask inspection is to ensure the accuracy and reliability of the mask and avoid defects or errors in processes such as photolithography or evaporation.

[0003] The mask plate is usually subjected to constant temperature control before thin film detection. The mask plate needs to achieve a certain temperature stability in a constant temperature control environment. The mask plate will produce thermal stress due to temperature changes in a constant temperature environment. If thin film detection is performed immediately, these thermal stresses may cause the mask plate to undergo slight deformation during the detection process, resulting in misjudgment of the mask plate during detection, thereby affecting the accuracy of the detection results. Summary of the invention

[0004] In view of the deficiencies in the prior art, the present invention provides a mask plate temporary storage and maintenance method, which is convenient for accurately transferring the mask plate body so that the mask plate body can maintain stable accuracy during thin film detection, effectively reducing the impact on the mask plate body during thin film detection, and improving detection accuracy and reliability.

[0005] In order to solve the above technical problems, the present invention adopts the following technical solutions:

[0006] The present invention provides a mask plate temporary storage and maintenance method, comprising a constant temperature cooling device for performing constant temperature treatment on a mask plate body, a manipulator for grabbing or placing the mask plate body, a temporary storage mechanism for storing the mask plate body and detecting the temperature of each mask plate body in real time, and a detection device for performing thin film detection on the mask plate body. When the manipulator places the mask plate body in the temporary storage mechanism, the mask plate body is marked as a first process, a second process, or a third process; the manipulator first identifies the mask plate body in the first process, the second process, or the third process, and then grabs the corresponding mask plate body. The steps of the mask plate temporary storage and maintenance method are as follows:

[0007] S01, the robot places the mask plate body that needs to be subjected to constant temperature treatment in a temporary storage mechanism and marks the mask plate body as the first process;

[0008] S02, the robot arm loads the mask plate body marked as the first process into the constant temperature cooling device, and the constant temperature cooling device performs a constant temperature treatment on the mask plate body marked as the first process;

[0009] S03, the robot arm identifies and takes out the mask plate body marked as the first process and after the constant temperature treatment from the constant temperature cooling device, marks the corresponding mask plate body as the second process, and the robot arm places the mask plate body marked as the second process in the temporary storage mechanism;

[0010] S04, the temporary storage mechanism performs temperature detection on the mask plate body marked as the second process to determine whether its temperature is within a specified range;

[0011] S05, the robot grabs the mask body whose temperature meets the specified range among the mask bodies marked as the second process, and puts it into the detection device, and the detection device performs a thin film detection on the mask body marked as the second process;

[0012] S06, the robot arm identifies and takes out the mask plate body marked as the second process and after the thin film detection from the detection device, marks the corresponding mask plate body as the third process, and the robot arm places the mask plate body marked as the third process in the temporary storage mechanism;

[0013] S07. When it is necessary to take the mask plate body marked as the third process, the robot arm identifies and takes out the mask plate body marked as the third process from the temporary storage mechanism, and transfers it to an external device.

[0014] The present invention also provides a mask plate temporary storage and maintenance system for implementing the above-mentioned mask plate temporary storage and maintenance method, including a constant temperature cooling device for performing constant temperature treatment on the mask plate body, a manipulator for grabbing or placing the mask plate body, a temporary storage mechanism for storing the mask plate body and detecting the temperature of each mask plate body in real time, and a detection device for performing thin film detection on the mask plate body, when the manipulator places the mask plate body in the temporary storage mechanism, the mask plate body is marked as the first process, the second process or the third process; the manipulator first identifies the mask plate body in the first process, the second process or the third process, and then grabs the corresponding mask plate body.

[0015] Beneficial effects of the present invention:

[0016] The robot can quickly grasp the mask plate body that accurately corresponds to the processing procedure, improve the efficiency of picking and placing the mask plate body, facilitate the accurate transfer of the mask plate body, and enable the robot to smoothly grasp the mask plate body that has eliminated thermal stress. The mask plate body can maintain stable accuracy during thin film detection, effectively reduce the impact on the mask plate body during thin film detection, improve detection accuracy, and smoothly realize constant temperature treatment and thin film detection of the mask plate. The mask plate body can reach a more stable state before detection, thereby improving detection accuracy and reliability. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1This is a structural schematic diagram of the mask plate temporary storage and maintenance system.

[0018] Figure 2 It is a schematic diagram of the three-dimensional structure of the detection device.

[0019] Figure 3 It is a schematic diagram of a three-dimensional structure with a detection component and a capture camera.

[0020] Figure 4 It is an exploded view of the load-bearing components, film detection parts, reflectors and backlight sources.

[0021] Figure 5 It is a schematic diagram of the three-dimensional structure of the turning mechanism.

[0022] Figure 6 It is a schematic diagram of the connection structure between the rotating unit and the gripper cylinder.

[0023] Figure 7 It is a schematic diagram of the three-dimensional structure of the temporary storage mechanism.

[0024] Figure 8 It is a schematic diagram of the three-dimensional structure of the constant temperature cooling device.

[0025] Fig. 9 It is a structural cross-sectional view of the sealing plate.

[0026] Fig.10 It is a schematic diagram of the three-dimensional structure of the box.

[0027] Fig.11 It is a structural cross-sectional view of the first splicing plate.

[0028] Fig.12 It is a structural cross-sectional view of the second splicing plate.

[0029] Fig.13 It is a structural cross-sectional view of the third splicing plate.

[0030] Fig.14 Schematic diagram of the exploded structure of the second splicing plate.

[0031] Fig.15 Schematic diagram of the exploded structure of the first splicing plate.

[0032] Fig.16 Schematic diagram of the exploded structure of the third splicing plate.

[0033] Fig.17 It is an exploded view of the box and the constant temperature drive mechanism.

[0034] Fig.18 It is a schematic diagram of the explosion structure of the constant temperature opening and closing module.

[0035] Fig.19It is a structural schematic diagram of the constant temperature opening and closing frame, the constant temperature driving unit and the sealing plate when they are located in the constant temperature cover.

[0036] Fig. 20 It is a schematic diagram of an explosion structure having a sealing plate, a constant temperature opening and closing frame, a constant temperature driving unit and a constant temperature cover. DETAILED DESCRIPTION

[0037] To facilitate understanding by those skilled in the art, the present invention is further described below in conjunction with examples and drawings. Specific implementation methods of the present invention will be described below. It should be pointed out that in the specific description of these implementation methods, in order to provide a concise description, this specification cannot provide a detailed description of all features of the actual implementation methods.

[0038] refer to Figures 1 to 20 As shown, the present invention provides a mask plate temporary storage and maintenance method, comprising a constant temperature cooling device 010 for performing constant temperature treatment on a mask plate body 01, a manipulator 020 for grabbing or placing the mask plate body 01, a temporary storage mechanism 030 for storing the mask plate body 01 and detecting the temperature of each mask plate body 01 in real time, and a detection device 040 for performing thin film detection on the mask plate body 01. When the manipulator 020 places the mask plate body 01 in the temporary storage mechanism 030, the mask plate body 01 is marked as the first process, the second process or the third process; the manipulator 020 first identifies the mask plate body 01 in the first process, the second process or the third process, and then grabs the corresponding mask plate body 01. The steps of the mask plate temporary storage and maintenance method are as follows:

[0039] S01, the robot 020 places the mask plate body 01 that needs to be subjected to constant temperature treatment in the temporary storage mechanism 030 and marks the mask plate body 01 as the first process;

[0040] S02, the robot 020 loads the mask plate body 01 marked as the first process into the constant temperature cooling device 010, and the constant temperature cooling device 010 performs a constant temperature treatment on the mask plate body 01 marked as the first process;

[0041] S03, the robot 020 identifies and takes out the mask plate body 01 marked as the first process and after the constant temperature treatment from the constant temperature cooling device 010, marks the corresponding mask plate body 01 as the second process, and the robot 020 places the mask plate body 01 marked as the second process in the temporary storage mechanism 030;

[0042] S04, the temporary storage mechanism 030 performs temperature detection on the mask body 01 marked as the second process to determine whether its temperature is within a specified range;

[0043] S05, the robot 020 grabs the mask body 01 whose temperature meets the specified range among the mask bodies 01 marked as the second process, and puts it into the detection device 040, and the detection device 040 performs a thin film detection on the mask body 01 marked as the second process;

[0044] S06, the robot 020 identifies and takes out the mask body 01 marked as the second process and after the thin film inspection from the inspection device 040, marks the corresponding mask body 01 as the third process, and the robot 020 places the mask body 01 marked as the third process in the temporary storage mechanism 030;

[0045] S07 , when it is necessary to take the mask body 01 marked as the third process, the robot 020 identifies and takes out the mask body 01 marked as the third process from the temporary storage mechanism 030 , and transfers it to an external device.

[0046] refer to Figure 1 As shown, through the present mask plate temporary storage and maintenance method, in actual application, the temporary storage mechanism 030 can smoothly place the mask plate body 01 before constant temperature treatment, after constant temperature treatment and after thin film detection, and the manipulator 020 is provided with a visual recognition system, which captures the image of the mask plate body 01 through a lens adapted to the visual recognition system, and marks the mask plate body 01 through an image processing algorithm to distinguish the mask plate body 01 in the first process, the second process or the third process. The use of the visual recognition system to mark the mask plate body 01 is a relatively conventional prior art, so it is not repeated; the manipulator 020 can quickly grab the mask plate body 01 that accurately corresponds to the processing process, thereby improving the efficiency of taking and placing the mask plate body 01, and the mask plate body 01 before constant temperature treatment, after constant temperature treatment and after thin film detection has a corresponding Marking, the robot 020 will not confuse the mask plate body 01 of different processes when grabbing or placing, so as to facilitate the accurate transfer of the mask plate body 01; the robot 020 can first place the mask plate body 01 that has been treated with constant temperature in the temporary storage mechanism 030, and the temporary storage mechanism 030 detects the temperature of the mask plate body 01 in real time. When the temperature of the mask plate body 01 reaches the specified temperature, the thermal stress of the mask plate body 01 is eliminated, and the robot 020 can smoothly grab the mask plate body 01 that has eliminated the thermal stress, so that the mask plate body 01 can maintain stable accuracy during thin film detection, effectively reduce the impact on the mask plate body 01 during thin film detection, improve the detection accuracy, and smoothly realize the constant temperature treatment and thin film detection of the mask plate. The mask plate body 01 can reach a more stable state before detection, thereby improving the accuracy and reliability of detection.

[0047] refer to Figure 2As shown, in this embodiment, the detection device 040 includes a detection frame 51, an adjustment platform 52 installed on the detection frame 51, a bearing assembly 53 and a detection assembly 54 driven and connected to the adjustment platform 52, the adjustment platform 52 is used to drive the bearing assembly 53 to rotate and move along the X-axis or Y-axis, the bearing assembly 53 is used to position the mask plate body 01, and the detection assembly 54 is used to perform thin film detection on the mask plate body 01; in actual application, the adjustment platform 52 includes an XY-axis slide and a rotating platform, the rotating platform is driven and connected to the XY-axis slide, and the bearing assembly 53 is smoothly rotated and moved along the X-axis or Y-axis. Move along the X-axis or Y-axis. When it is necessary to perform thin film inspection on the mask body 01, the adjustment platform 52 adjusts the position and angle of the supporting component 53 so that the placement position of the mask body 01 accurately corresponds to the position of the supporting component 53. The manipulator 020 places the mask body 01 marked as the second process on the temporary storage mechanism 030 on the supporting component 53. The adjustment platform 52 drives the supporting component 53 and the mask body 01 to rotate, so that the inspection component 54 can perform thin film inspection on the mask body 01 at any angle. The thin film inspection can be completely performed on the mask body 01, thereby improving the inspection reliability.

[0048] refer to Figure 2 As shown, in this embodiment, the supporting assembly 53 includes a supporting frame 531 drivingly connected to the adjustment platform 52 and a plurality of supporting members 532 installed on the supporting frame 531, the supporting member 532 is provided with a first fitting portion 5321 and a second fitting portion 5322, a notch is formed between the first fitting portion 5321 and the second fitting portion 5322 to match the circumferential corner of the mask plate body 01, the first fitting portion 5321 and the second fitting portion 5322 respectively abut against two adjacent sides of the mask plate body 01; the detection device 040 also includes a plurality of capture cameras 55, the capture cameras 55 correspond one-to-one to the supporting members 532, and the capture cameras 55 are used to obtain the position and angle information of the notch.

[0049] refer to Figure 2 As shown, in actual application, when the supporting component 53 needs to position the mask plate body 01, the adjustment platform 52 adjusts the position and angle of the supporting component 53 according to the information obtained by the capture camera 55, so that the placement position of the mask plate body 01 accurately corresponds to the position of the supporting component 53, and the manipulator 020 places the mask plate body 01 marked as the second process on the temporary storage mechanism 030 on the supporting component 53, so that the first bonding part 5321 and the second bonding part 5322 stably support the mask plate body 01; specifically, the gap between the first bonding part 5321 and the second bonding part 5322 and the mask plate body 01 gradually decreases from top to bottom, which is conducive to smoothly guiding the mask plate body 01 to be loaded into the supporting part 532, and is convenient for quickly positioning the mask plate body 01.

[0050] refer to Figure 3, 4 As shown, in this embodiment, the detection assembly 54 includes a first support rod 541 and a second support rod 542 connected to the detection frame 51, a film detection member 543 and a reflector 544 respectively installed on the first support rod 541 and the second support rod 542, and a backlight source 545 installed on the support frame 531. The film detection member 543 corresponds to the reflector 544. When the mask body 01 is positioned on the support assembly 53, it is located above the backlight source, so that the backlight source can smoothly fill in the light for the mask body 01. In actual application, when the mask body 01 needs to be inspected, The mask body 01 is used for thin film inspection. The mask body 01 is positioned on the supporting component 53. The backlight source allows the pattern, defects and deviations on the mask to be smoothly imaged on the reflector 544. The thin film detection component 543 illuminates the reflector 544 to directly observe the pattern, defects and deviations on the mask body 01. The adjustment platform 52 drives the supporting component 53 and the mask body 01 to rotate, changing the observation angle of the mask body 01, thereby completely observing the pattern, defects and deviations on the mask body 01, ensuring the accuracy of the detection results and improving the detection reliability.

[0051] refer to Figure 5 , 6 As shown, in this embodiment, the detection device 040 also includes a flipping mechanism 6, which includes a lifting module 61, a rotating unit 62 driven and connected to the lifting module 61, and a clamping cylinder 63 driven and connected to the rotating unit 62, and the two output ends of the clamping cylinder 63 are respectively connected to a first clamping jaw 631 and a second clamping jaw 632 parallel to each other; in actual application, the lifting module 61 adopts a screw motor module, a cylinder or an electric cylinder to smoothly drive the rotating unit 62 to move up and down, and the rotating unit 62 adopts a motor synchronous belt combined rotating mechanism, which is composed of a motor, a reducer, a synchronous wheel, a synchronous belt and other components. The motor drives the synchronous wheel through the reducer, and the synchronous belt is connected to the synchronous wheel. The output end of the synchronous belt is connected to the clamping cylinder 63 The connection is realized through the transmission action of the synchronous belt to realize the rotation movement of the clamping cylinder 63. When it is necessary to change the surface to be detected of the mask plate body 01, the lifting module 61 drives the rotating unit 62 to move to the required position in the up and down directions. The clamping cylinder 63 contracts so that the first clamping jaw 631 and the second clamping jaw 632 clamp the two opposite ends of the mask plate body 01. The lifting module 61 drives the clamped mask plate body 01 away from the bearing assembly 53. The rotating unit 62 drives the clamped mask plate body 01 to rotate 180°. The lifting module 61 drives the clamped mask plate body 01 to move closer to the bearing assembly 53, so that the clamped mask plate body 01 is positioned on the bearing assembly 53, which is convenient for meeting the double-sided film detection of the mask plate body 01 and improving the detection efficiency.

[0052] refer to Figure 7As shown, in this embodiment, the temporary storage mechanism 030 includes a temporary storage rack 71, a plurality of temporary storage boards 72 installed in parallel on the temporary storage rack 71, and four temporary storage support parts 73 connected to the temporary storage boards 72. The temporary storage support parts 73 correspond to the bottom corners of the mask plate body 01 one by one, and the temporary storage support parts 73 cooperate with the bottom of the mask plate body 01. The temporary storage board 72 is installed with an optical fiber sensor 701, and the optical fiber sensor 701 is used to detect whether the mask plate body 01 is placed on the temporary storage rack 71. The temporary storage board 72 is provided with a thermistor 702, and the thermistor 702 is used to detect the temperature of the mask body 01 placed on the corresponding temporary storage board 72 in real time to ensure whether the temperature of the mask body 01 is within the specified range; in actual application, the manipulator 020 places the mask on the temporary storage support part 73, so that the temporary storage support part 73 corresponds to the bottom four sides of the support of the mask body 01, and detects whether the mask body 01 is placed on the temporary storage board 72 through the optical fiber sensor 701. It is placed on the temporary storage plate 72 to facilitate the smooth placement of the mask plate body 01; the thermistor 702 is a thermistor, and when the temperature of the mask plate body 01 reaches the specified range, the thermal stress of the mask plate body 01 is eliminated, and the manipulator 020 can smoothly grab the mask plate body 01 from which the thermal stress has been eliminated, and the manipulator 020 can put it into the detection device 040; the mask plate body 01 placed in the temporary storage mechanism 030 can be the mask plate body 01 treated by the constant temperature cooling device 010, or the mask plate body 01 not treated by the constant temperature cooling device 010; it can be the mask plate body 01 after the thin film detection, or the mask plate body 01 not after the thin film detection, so that the loading and unloading processes of the constant temperature cooling device 010 and the detection device 040 need to be completed by the combination of the manipulator 020 and the temporary storage mechanism 030, and the mask plate body 01 under various working conditions can be temporarily stored, simplifying the placement process of the mask plate body 01, and facilitating the placement of the manipulator 020.

[0053] refer to Figure 8 , 14As shown, in this embodiment, the constant temperature cooling device 010 includes a box body 1 with an installation cavity 101, a sealing plate 2, a temperature sensor 3, and a constant temperature driving mechanism 4 for driving the sealing plate 2 to close the opening of the installation cavity 101. The installation cavity 101 is used to place the mask plate body 01. The box body 1 is provided with a first channel arranged around the installation cavity 101. The box body 1 is provided with a first inlet 110 and a first outlet 120 connected to the first channel. The temperature sensor 3 is used to detect the temperature of the installation cavity 101. In actual application, a bracket for storing the mask plate body 01 is installed in the installation cavity 101, and the robot 020 places the mask plate body 01 on the bracket. When the mask plate body 01 needs to be treated at a constant temperature, the robot 020 places the mask plate body 01 on the temporary storage mechanism 030. The mask plate body 01 marked as the first process is placed in the installation cavity 101, and the constant temperature driving mechanism 4 drives the sealing plate 2 to close the opening of the installation cavity 101, and the fluid is introduced through the first inlet 110. The fluid flows in the first channel and flows out along the first outlet 120. Since the first channel is arranged around the installation cavity 101, the contact area of ​​the fluid is effectively increased, the heat exchange efficiency is improved, and uneven cooling is prevented; when the temperature of the installation cavity 101 reaches a predetermined value, the mask plate body 01 is placed at a constant temperature, which can smoothly control the ambient temperature in the installation cavity 101, and is conducive to stabilizing the quality of the mask plate body 01; when the constant temperature treatment is completed, the constant temperature driving mechanism 4 drives the sealing plate 2 away from the opening of the installation cavity 101, and the robot 020 takes the mask plate body 01 marked as the first process out of the installation cavity 101.

[0054] refer to Fig. 9 As shown, in this embodiment, the sealing plate 2 is provided with a second channel 200 corresponding to the opening of the installation cavity 101, and a second inlet 210 and a second outlet 220 are respectively provided at both ends of the second channel 200, and the second outlet 220 is connected to the first inlet 110 by pipeline; in actual application, when the mask plate body 01 needs to be treated with a constant temperature, the mask plate body 01 is placed in the installation cavity 101, and the constant temperature driving mechanism 4 drives the sealing plate 2 to close the opening of the installation cavity 101, so that the second channel 200 covers the opening of the installation cavity 101; refer to Fig. 9As shown, the fluid is introduced into the second channel 200 along the second inlet 210, and flows out along the first outlet 120 after passing through the second outlet 220, the first inlet 110, and the first channel in sequence. When the temperature of the installation cavity 101 reaches a predetermined value, the mask plate body 01 is placed at a constant temperature, and the fluid is introduced along the same position and flows smoothly between the first channel and the second channel 200, so as to make full use of the fluid, save resources, and avoid waste of the fluid; through the first channel and the second channel 200, the mask plate body 01 is temperature-controlled in all directions, so as to evenly cool the installation cavity 101; specifically, the second outlet 220 and the first inlet 110 are connected by a telescopic tube, and the telescopic tube is synchronously extended and retracted when the sealing plate 2 is raised or lowered, so as to meet the smooth flow of the fluid between the second outlet 220 and the first inlet 110.

[0055] refer to Fig. 9 As shown, the sealing plate 2 includes a sealing main board 201 and at least two sealing mounting plates 202 sealingly connected to both ends of the sealing main board 201, the second channel 200 includes a sealing flow portion 2001 and a sealing guide portion 2002, the sealing flow portion 2001 is arranged in parallel to the sealing main board 201 and penetrates at both ends, the sealing guide portion 2002 is arranged on the sealing mounting plate 202, the sealing guide portion 2002 alternately connects the same end of two adjacent sealing flow portions 2001, the second inlet 210 and the second outlet 220 are respectively provided with the sealing flow portions 2001 located at both ends; in actual application, the fluid alternately flows along the sealing flow portion 2001 and the sealing guide portion 2002, and the sealing mounting plate 202 is installed with a fourth sealing The sealing ring, the fourth sealing ring seals the connection between the sealing flow part 2001 and the sealing guide part 2002 to prevent the fluid from leaking along the gap between the sealing flow part 2001 and the sealing guide part 2002. Specifically, the sealing main board 201 and the sealing mounting plate 202 are detachably connected. When the fluid leaks inside the second channel 200, the second inlet 210 and the second outlet 220 are closed, and the passage of the fluid in the second channel 200 is isolated, which is convenient for independent maintenance of the second channel 200. The sealing main board 201 is separated from the sealing mounting plate 202, and the fourth sealing ring, the sealing flow part 2001 or the sealing guide part 2002 at the corresponding position can be smoothly replaced or repaired, which is beneficial to ensure the internal sealing performance of the second channel 200 and improve the service life of the sealing plate 2.

[0056] refer to Fig.10As shown, in this embodiment, the box body 1 includes a first splicing plate 11, a second splicing plate 12, a third splicing plate 13 and a multi-way reversing valve 14, both ends of the first splicing plate 11 are connected to the second splicing plate 12, the upper and lower ends of the first splicing plate 11 and the second splicing plate 12 are connected to the third splicing plate 13, the inner sides of the first splicing plate 11, the second splicing plate 12 and the third splicing plate 13 form an installation cavity 101, the first splicing plate 11, the second splicing plate 12 and the third splicing plate 13 are respectively provided with a first splicing channel 111, a second splicing channel 121 and a third splicing channel 131, the first splicing channel 111, the second splicing channel 121 and the third splicing channel 131 are both connected to the multi-way reversing valve 14 at both ends, the first inlet 110 is provided in the multi-way reversing valve 14, the first outlet 120 is provided in the second splicing channel 121, and the first outlet 120 is installed with a one-way valve.

[0057] In actual application, the fluid is introduced into the multi-way reversing valve 14 along the first inlet 110. When the one-way valve is closed, the fluid actually passes through the first splicing channel 111, the second splicing channel 121 and the third splicing channel 131 in sequence, flows out of the third splicing channel 131 and then flows into the first splicing channel 111 again, thereby realizing the recycling of the fluid; when the one-way valve is opened, the fluid is discharged along the first outlet 120.

[0058] refer to Fig.11 As shown, the first splicing plate 11 includes a first main board 1101 and at least two first mounting plates 1102 sealed and connected to both ends of the first main board 1101, the first splicing channel 111 includes a first flow portion 1111 and a first guide portion 1112, the first flow portion 1111 is arranged in parallel to the first main board 1101 and penetrates at both ends, the first guide portion 1112 is arranged on the first mounting plate 1102, and the first guide portion 1112 alternately connects the same end of two adjacent first flow portions 1111; in actual application, the fluid alternately flows along the first flow portion 1111 and the first guide portion 1112, the first mounting plate 1102 is installed with a first sealing ring, the first sealing ring seals the connection between the first flow portion 1111 and the first guide portion 1112 to prevent the fluid from leaking along the gap between the first flow portion 1111 and the first guide portion 1112, refer to Fig.15As shown, specifically, the first main board 1101 and the first mounting plate 1102 are detachably connected. When the internal fluid of the first splicing channel 111 leaks, the two ends of the first splicing channel 111 are closed by the multi-way reversing valve 14, and the passage of the fluid in the first splicing channel 111 is isolated, which is convenient for independent inspection of the first splicing channel 111. The first main board 1101 is separated from the first mounting plate 1102, so that the first sealing ring, the first flow portion 1111 or the first guide portion 1112 at the corresponding position can be smoothly replaced or repaired, which is beneficial to ensure the internal sealing performance of the first splicing channel 111 and improve the service life of the first splicing plate 11.

[0059] refer to Fig.12 As shown, the second splicing plate 12 includes a second main board 1201 and at least two second mounting plates 1202 sealed and connected at both ends of the second main board 1201, the second splicing channel 121 includes a second flow portion 1211 and a second guide portion 1212, the second flow portion 1211 is arranged in parallel to the second main board 1201 and penetrates at both ends, the second guide portion 1212 is arranged on the second mounting plate 1202, and the second guide portion 1212 alternately connects the same end of two adjacent second flow portions 1211; in actual application, the fluid flows alternately along the second flow portion 1211 and the second guide portion 1212, the second mounting plate 1202 is installed with a second sealing ring, and the second sealing ring seals the connection between the second flow portion 1211 and the second guide portion 1212 to prevent the fluid from leaking along the gap between the second flow portion 1211 and the second guide portion 1212. For details, refer to Fig.14 As shown, the second main board 1201 and the second mounting plate 1202 are detachably connected. When the internal fluid of the second splicing channel 121 leaks, the two ends of the second splicing channel 121 are closed by the multi-way reversing valve 14, and the passage of the fluid in the second splicing channel 121 is isolated, which is convenient for independent inspection of the second splicing channel 121. The second main board 1201 and the second mounting plate 1202 can be separated to smoothly replace or repair the second sealing ring, the second flow part 1211 or the second guide part 1212 at the corresponding position, which is beneficial to ensure the internal sealing performance of the second splicing channel 121 and improve the service life of the second splicing plate 12.

[0060] refer to Fig.16As shown, the third splicing plate 13 includes a third main board 1301 and at least two third mounting plates 1302 sealed and connected to both ends of the third main board 1301, the third splicing channel 131 includes a third flow portion 1311 and a third guide portion 1312, the third flow portion 1311 is arranged in parallel to the third main board 1301 and penetrates at both ends, the third guide portion 1312 is arranged on the third mounting plate 1302, and the third guide portion 1312 alternately connects the same end of two adjacent third flow portions 1311; in actual application, the fluid alternately flows along the third flow portion 1311 and the third guide portion 1312, the third mounting plate 1302 is installed with a third sealing ring, and the third sealing ring seals the third flow portion 1311 and the third The connection of the guide part 1312 prevents the fluid from leaking along the gap between the third flow part 1311 and the third guide part 1312. Specifically, the third main board 1301 and the third mounting plate 1302 are detachably connected. When the internal fluid of the third splicing channel 131 leaks, the two ends of the third splicing channel 131 are closed by the multi-way reversing valve 14, and the passage of the fluid in the third splicing channel 131 is isolated, which is convenient for independent inspection of the third splicing channel 131. The third main board 1301 is separated from the third mounting plate 1302, and the third sealing ring, the third flow part 1311 or the third guide part 1312 at the corresponding position can be smoothly replaced or repaired, which is beneficial to ensure the internal sealing performance of the third splicing channel 131 and improve the service life of the third splicing plate 13.

[0061] refer to Fig.17 As shown, in this embodiment, the constant temperature driving mechanism 4 includes a constant temperature lifting unit 41 and a constant temperature opening and closing module 42, the constant temperature lifting unit 41 is drivingly connected to the constant temperature opening and closing module 42, the constant temperature opening and closing module 42 is drivingly connected to the sealing plate 2, and a sealing ring 21 is provided on the side of the sealing plate 2 close to the installation cavity 101; in actual application, the constant temperature lifting unit 41 is installed on the box body 1, and the constant temperature lifting unit 41 adopts a screw motor module, a cylinder or an electric cylinder. When it is necessary to seal the opening of the installation cavity 101, the constant temperature lifting unit 41 drives the constant temperature opening and closing module 42 to move upward, and the constant temperature opening and closing module 42 drives the sealing plate 2 to move toward the installation cavity 101, so that the sealing plate 2 covers the opening of the installation cavity 101, and the sealing ring 21 abuts against the outer peripheral edge of the opening end of the installation cavity 101, and the gap between the installation cavity 101 and the sealing plate 2 is smoothly closed by the sealing ring 21, thereby enhancing the sealing performance and facilitating the stable adjustment of the temperature change in the installation cavity 101.

[0062] refer to Fig.18 , 20As shown, the thermostatic opening and closing module 42 includes a thermostatic opening and closing frame 421 and a thermostatic driving unit 422 connected to the thermostatic opening and closing frame 421, the thermostatic opening and closing frame 421 is connected to the thermostatic lifting unit 41, the sealing plate 2 is slidably connected to the thermostatic opening and closing frame 421, the thermostatic driving unit 422 is connected to the sealing plate 2, and the thermostatic driving unit 422 drives the sealing plate 2 to move closer to or away from the installation cavity 101; in actual application, the thermostatic driving unit 422 adopts a cylinder, an electric cylinder or an oil cylinder, and the thermostatic lifting unit 41 drives the thermostatic opening and closing module 42 downward. Move, and drive the sealing plate 2 to be at the end away from the installation cavity 101 through the constant temperature opening and closing module 42, and then place the mask plate body 01 into the installation cavity 101. After the mask plate body 01 is placed, the constant temperature lifting unit 41 drives the constant temperature opening and closing module 42 to move upward to the required position, and the constant temperature opening and closing module 42 drives the sealing plate 2 to move toward the installation cavity 101, so that the sealing ring 21 abuts against the outer peripheral edge of the opening end of the installation cavity 101, so that the sealing ring 21 can smoothly close the gap between the installation cavity 101 and the sealing plate 2, thereby ensuring the sealing performance between the sealing plate 2 and the box body 1.

[0063] refer to Fig.18 , 19 20, the constant temperature opening and closing module 42 also includes a constant temperature cover 423 connected to the constant temperature opening and closing frame 421, the constant temperature opening and closing frame 421, the constant temperature drive unit 422 and the sealing plate 2 are located in the constant temperature cover 423, and at least two sealing fans 4211 are installed on the side of the constant temperature opening and closing frame 421 away from the sealing plate 2, and the bottom pipeline of the constant temperature cover 423 is connected to a sealed dust exhaust pipe 4231; the sealed fan 4211 is used for negative pressure adsorption between the constant temperature cover 423, the constant temperature opening and closing frame 421 and the sealing plate 2 Dust is discharged along the sealed dust exhaust pipe 4231; in actual application, when the sealing plate 2 is separated from the installation cavity 101, the sealing fan 4211 is started, and the sealing fan 4211 absorbs the dust between the constant temperature cover 423, the constant temperature opening and closing frame 421 and the sealing plate 2 through negative pressure and discharges it along the sealed dust exhaust pipe 4231, which is convenient for cleaning the dust between the constant temperature cover 423, the constant temperature opening and closing frame 421 and the sealing plate 2, and is convenient for the sealing plate 2 and the installation cavity 101 to be in a clean and tidy use environment, thereby improving the processing quality of the mask plate body 01.

[0064] refer to Figure 1As shown, the present invention further provides a mask plate temporary storage and maintenance system for implementing a mask plate temporary storage and maintenance method, comprising a constant temperature cooling device 010 for performing constant temperature treatment on a mask plate body 01, a manipulator 020 for grabbing or placing the mask plate body 01, a temporary storage mechanism 030 for storing the mask plate body 01 and detecting the temperature of each mask plate body 01 in real time, and a detection device 040 for performing thin film detection on the mask plate body 01, when the manipulator 020 places the mask plate body 01 on the temporary storage mechanism 030, the mask plate body 01 is marked as the first process, the second process or the third process; the manipulator 020 first identifies the mask plate body 01 in the first process, the second process or the third process, and then grabs the corresponding mask plate body 01.

[0065] In actual application, the robot 020 places the mask plate body 01 that needs to be treated with a constant temperature in the temporary storage mechanism 030 and marks the mask plate body 01 as the first process; the robot 020 loads the mask plate body 01 marked as the first process into the constant temperature cooling device 010, and the constant temperature cooling device 010 performs a constant temperature treatment on the mask plate body 01 marked as the first process; the robot 020 identifies and takes out the mask plate body 01 marked as the first process and treated with a constant temperature from the constant temperature cooling device 010, marks the corresponding mask plate body 01 as the second process, and the robot 020 places the mask plate body 01 marked as the second process in the temporary storage mechanism 030; the temporary storage mechanism 030 performs a temperature detection on the mask plate body 01 marked as the second process to determine its temperature Whether it is within the specified range; the robot 020 grabs the mask plate body 01 marked as the second process whose temperature meets the specified range, and puts it into the detection device 040, and the detection device 040 performs thin film detection on the mask plate body 01 marked as the second process; the robot 020 identifies and takes out the mask plate body 01 marked as the second process and after the thin film detection from the detection device 040, and marks the corresponding mask plate body 01 as the third process. The robot 020 places the mask plate body 01 marked as the third process in the temporary storage mechanism 030; when it is necessary to take the mask plate body 01 marked as the third process, the robot 020 identifies and takes out the mask plate body 01 marked as the third process from the temporary storage mechanism 030, and transfers it to the external equipment.

[0066] refer to Figure 1As shown, through the temporary storage and maintenance method of the mask plate, the temporary storage mechanism 030 can smoothly place the mask plate body 01 before constant temperature treatment, after constant temperature treatment and after thin film detection, and the robot 020 can quickly grab the mask plate body 01 that accurately corresponds to the processing process, thereby improving the efficiency of taking and placing the mask plate body 01. In addition, the mask plate body 01 before constant temperature treatment, after constant temperature treatment and after thin film detection has corresponding marks, and the robot 020 will not confuse the mask plate body 01 of different processes when grabbing or placing, which is convenient for accurately transferring the mask plate body 01; the robot 020 can first place the mask plate body that has been subjected to constant temperature treatment 01 is placed in a temporary storage mechanism 030, which detects the temperature of the mask plate body 01 in real time. When the temperature of the mask plate body 01 reaches the specified temperature, the thermal stress of the mask plate body 01 is eliminated. The manipulator 020 can smoothly grab the mask plate body 01 from which the thermal stress has been eliminated, so that the mask plate body 01 can maintain stable accuracy during thin film detection, effectively reduce the impact on the mask plate body 01 during thin film detection, improve detection accuracy, and smoothly realize constant temperature treatment of the mask plate and thin film detection. The mask plate body 01 can reach a more stable state before detection, thereby improving detection accuracy and reliability.

[0067] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Although the present invention is disclosed as a preferred embodiment as above, it is not used to limit the present invention. Any technician familiar with the profession can make some changes or modifications to equivalent embodiments of equivalent changes by using the technical contents disclosed above without departing from the scope of the technical solution of the present invention. However, any simple modification, equivalent changes and modifications made to the above embodiments according to the technology of the present invention are within the scope of the technical solution of the present invention without departing from the content of the technical solution of the present invention.

Claims

1. A mask plate temporary storage and maintenance method, characterized in that: The invention comprises a constant temperature cooling device (010) for performing constant temperature treatment on a mask plate body (01), a manipulator (020) for grabbing or placing the mask plate body (01), a temporary storage mechanism (030) for storing the mask plate body (01) and detecting the temperature of each mask plate body (01) in real time, and a detection device (040) for performing thin film detection on the mask plate body (01). When placing the mask plate body (01) in the temporary storage mechanism (030), the manipulator (020) marks the mask plate body (01) as the first process, the second process or the third process; the manipulator (020) first identifies the mask plate body (01) in the first process, the second process or the third process, and then grabs the corresponding mask plate body (01). The steps of the mask plate temporary storage maintenance method are as follows: S01, the robot (020) places the mask plate body (01) that needs to be subjected to constant temperature treatment in a temporary storage mechanism (030) and marks the mask plate body (01) as the first process; S02, the robot (020) loads the mask plate body (01) marked as the first process into the constant temperature cooling device (010), and the constant temperature cooling device (010) performs a constant temperature treatment on the mask plate body (01) marked as the first process; S03, the robot (020) identifies and takes out the mask plate body (01) marked as the first process and after the constant temperature treatment from the constant temperature cooling device (010), marks the corresponding mask plate body (01) as the second process, and the robot (020) places the mask plate body (01) marked as the second process in the temporary storage mechanism (030); S04, the temporary storage mechanism (030) performs temperature detection on the mask plate body (01) marked as the second process to determine whether its temperature is within a specified range; S05, the robot (020) grabs the mask plate body (01) whose temperature meets the specified range among the mask plate bodies (01) marked as the second process, and puts it into the detection device (040), and the detection device (040) performs a thin film detection on the mask plate body (01) marked as the second process; S06, the robot (020) identifies and takes out the mask plate body (01) marked as the second process and after the thin film detection from the detection device (040), marks the corresponding mask plate body (01) as the third process, and the robot (020) places the mask plate body (01) marked as the third process in the temporary storage mechanism (030); S07, when it is necessary to take the mask plate body (01) marked as the third process, the robot arm (020) identifies and takes out the mask plate body (01) marked as the third process from the temporary storage mechanism (030), and transfers it to an external device.

2. The mask plate temporary storage and maintenance method according to claim 1, characterized in that: The detection device (040) comprises a detection frame (51), an adjustment platform (52) mounted on the detection frame (51), a bearing assembly (53) and a detection assembly (54) drivingly connected to the adjustment platform (52), the adjustment platform (52) being used to drive the bearing assembly (53) to rotate and move along the X-axis or the Y-axis, the bearing assembly (53) being used to position the mask plate body (01), and the detection assembly (54) being used to perform thin film detection on the mask plate body (01); When it is necessary to perform thin film inspection on the mask plate body (01), the adjustment platform (52) adjusts the position and angle of the bearing component (53) so that the placement position of the mask plate body (01) accurately corresponds to the position of the bearing component (53), the robot (020) places the mask plate body (01) marked as the second process on the temporary storage mechanism (030) on the bearing component (53), and the adjustment platform (52) drives the bearing component (53) and the mask plate body (01) to rotate, so that the inspection component (54) can perform thin film inspection on the mask plate body (01) at any angle.

3. The mask plate temporary storage and maintenance method according to claim 2, characterized in that: The bearing assembly (53) comprises a bearing frame (531) drivingly connected to the adjustment platform (52) and a plurality of bearing members (532) mounted on the bearing frame (531); the bearing member (532) is provided with a first fitting portion (5321) and a second fitting portion (5322); a notch is formed between the first fitting portion (5321) and the second fitting portion (5322) to match the circumferential corner of the mask plate body (01); the first fitting portion (5321) and the second fitting portion (5322) respectively abut against two adjacent side edges of the mask plate body (01); The detection device (040) further comprises a plurality of capture cameras (55), wherein the capture cameras (55) correspond one-to-one to the carrier (532), and the capture cameras (55) are used to obtain position and angle information of the notch; When the carrier component (53) needs to position the mask plate body (01), the adjustment platform (52) adjusts the position and angle of the carrier component (53) according to the information obtained by the capture camera (55), so that the placement position of the mask plate body (01) accurately corresponds to the position of the carrier component (53), and the robot (020) places the mask plate body (01) marked as the second process on the temporary storage mechanism (030) on the carrier component (53).

4. The mask plate temporary storage and maintenance method according to claim 2, characterized in that: The detection assembly (54) comprises a first support rod (541) and a second support rod (542) connected to the detection frame (51), a thin film detection component (543) and a reflector (544) respectively mounted on the first support rod (541) and the second support rod (542), and a backlight source (545) mounted on the support frame (531), wherein the thin film detection component (543) corresponds to the reflector (544), and when the mask plate body (01) is positioned on the support assembly (53), it is located above the backlight source, so that the backlight source can smoothly supplement the mask plate body (01) with light; When it is necessary to perform thin film inspection on the mask plate body (01), the mask plate body (01) is positioned on the bearing assembly (53), the backlight source allows the pattern, defect and deviation on the mask plate to be smoothly imaged on the reflector (544), the thin film inspection component (543) illuminates the reflector (544) so ​​as to directly observe the pattern, defect and deviation on the mask plate body (01), and the adjustment platform (52) drives the bearing assembly (53) and the mask plate body (01) to rotate, changing the observation angle of the mask plate body (01), so as to completely observe the pattern, defect and deviation on the mask plate body (01).

5. The mask plate temporary storage and maintenance method according to claim 1, characterized in that: The detection device (040) further comprises a flipping mechanism (6), wherein the flipping mechanism (6) comprises a lifting module (61), a rotating unit (62) drivingly connected to the lifting module (61), and a clamping claw cylinder (63) drivingly connected to the rotating unit (62), wherein two output ends of the clamping claw cylinder (63) are respectively connected to a first clamping claw (631) and a second clamping claw (632) which are parallel to each other; When the surface to be detected of the mask plate body (01) needs to be changed, the lifting module (61) drives the rotating unit (62) to move to a desired position in the up-down direction, the clamping claw cylinder (63) contracts so that the first clamping claw (631) and the second clamping claw (632) clamp the two opposite ends of the mask plate body (01), the lifting module (61) drives the clamped mask plate body (01) away from the bearing assembly (53), the rotating unit (62) drives the clamped mask plate body (01) to rotate 180°, and the lifting module (61) drives the clamped mask plate body (01) to move closer to the bearing assembly (53), so that the clamped mask plate body (01) is positioned on the bearing assembly (53); The temporary storage mechanism (030) comprises a temporary storage rack (71), a plurality of temporary storage plates (72) installed in parallel on the temporary storage rack (71), and a plurality of temporary storage support parts (73) connected to the temporary storage plates (72); the temporary storage support parts (73) correspond one by one to the bottom corners of the mask plate body (01); the temporary storage support parts (73) cooperate with the bottom of the mask plate body (01); the temporary storage plate (72) is installed with an optical fiber sensor (701); the optical fiber sensor (701) is used to detect whether the mask plate body (01) is placed on the temporary storage plate (72); the temporary storage plate (72) is installed with a thermistor (702); the thermistor (702) is used to detect the temperature of the mask plate body (01) placed on the corresponding temporary storage plate (72) in real time, so as to ensure whether the temperature of the mask plate body (01) is within a specified range.

6. The mask plate temporary storage and maintenance method according to claim 1, characterized in that: The constant temperature cooling device (010) comprises a box (1) having an installation cavity (101), a sealing plate (2), a temperature sensor (3), and a constant temperature driving mechanism (4) for driving the sealing plate (2) to seal the opening of the installation cavity (101); the installation cavity (101) is used to place the mask plate body (01); a first channel arranged around the installation cavity (101) is arranged in the box (1); the box (1) is provided with a first inlet (110) and a first outlet (120) communicated with the first channel; and the temperature sensor (3) is used to detect the temperature of the installation cavity (101); When the mask plate body (01) needs to be treated at a constant temperature, the robot (020) places the mask plate body (01) marked as the first process on the temporary storage mechanism (030) in the installation cavity (101), the constant temperature drive mechanism (4) drives the sealing plate (2) to seal the opening of the installation cavity (101), and the fluid is introduced through the first inlet (110), the fluid flows in the first channel and flows out along the first outlet (120), and the mask plate body (01) is placed at a constant temperature when the temperature of the installation cavity (101) reaches a predetermined value; When the constant temperature treatment is completed, the constant temperature driving mechanism (4) drives the sealing plate (2) away from the opening of the installation cavity (101), and the robot (020) takes the mask plate body (01) marked as the first process out of the installation cavity (101).

7. The mask plate temporary storage and maintenance method according to claim 6, characterized in that: The sealing plate (2) is provided with a second channel (200) corresponding to the opening of the installation cavity (101), and a second inlet (210) and a second outlet (220) are respectively provided at both ends of the second channel (200), and the second outlet (220) is connected to the first inlet (110) pipeline; When the mask plate body (01) needs to be treated at a constant temperature, the mask plate body (01) is placed in the installation cavity (101), and the constant temperature driving mechanism (4) drives the sealing plate (2) to seal the opening of the installation cavity (101), so that the second channel (200) covers the opening of the installation cavity (101); the fluid is introduced into the second channel (200) along the second inlet (210), and sequentially passes through the second outlet (220), the first inlet (110), and the first channel before flowing out along the first outlet (120); when the temperature of the installation cavity (101) reaches a predetermined value, the mask plate body (01) is placed at a constant temperature; The sealing plate (2) comprises a sealing main plate (201) and at least two sealing mounting plates (202) sealingly connected to both ends of the sealing main plate (201); the second channel (200) comprises a sealing flow portion (2001) and a sealing flow guide portion (2002); the sealing flow portion (2001) is arranged in parallel with the sealing main plate (201) and penetrates through both ends; the sealing flow guide portion (2002) is arranged on the sealing mounting plate (202); the sealing flow guide portion (2002) alternately connects to the same end of two adjacent sealing flow portions (2001); the second inlet (210) and the second outlet (220) are respectively arranged at the sealing flow portion (2001) at both ends.

8. The mask plate temporary storage and maintenance method according to claim 6, characterized in that: The box body (1) comprises a first splicing plate (11), a second splicing plate (12), a third splicing plate (13) and a multi-way reversing valve (14); both ends of the first splicing plate (11) are connected to the second splicing plate (12); the upper and lower ends of the first splicing plate (11) and the second splicing plate (12) are connected to the third splicing plate (13); the inner sides of the first splicing plate (11), the second splicing plate (12) and the third splicing plate (13) form an installation cavity (101); the first splicing plate (11), the second splicing plate (12) and the third splicing plate (13) are connected to the second splicing plate (13); The plate (12) and the third splicing plate (13) are respectively provided with a first splicing channel (111), a second splicing channel (121) and a third splicing channel (131); both ends of the first splicing channel (111), the second splicing channel (121) and the third splicing channel (131) are connected to the multi-way reversing valve (14); the first inlet (110) is provided in the multi-way reversing valve (14); the first outlet (120) is provided in the second splicing channel (121); and the first outlet (120) is installed with a one-way valve; When the one-way valve is closed, the fluid flows into the multi-way reversing valve (14) along the first inlet (110) and circulates in sequence between the first splicing channel (111), the second splicing channel (121) and the third splicing channel (131); when the one-way valve is opened, the fluid is discharged along the first outlet (120); The first splicing plate (11) comprises a first main plate (1101) and at least two first mounting plates (1102) sealedly connected to two ends of the first main plate (1101); the first splicing channel (111) comprises a first flow portion (1111) and a first flow guide portion (1112); the first flow portion (1111) is arranged in parallel with the first main plate (1101) and penetrates through both ends; the first flow guide portion (1112) is arranged on the first mounting plate (1102); the first flow guide portion (1112) alternately connects the same end of two adjacent first flow portions (1111); The second splicing plate (12) comprises a second main plate (1201) and at least two second mounting plates (1202) sealed and connected to two ends of the second main plate (1201); the second splicing channel (121) comprises a second flow portion (1211) and a second flow guide portion (1212); the second flow portion (1211) is arranged in parallel with the second main plate (1201) and penetrates through both ends; the second flow guide portion (1212) is arranged on the second mounting plate (1202); the second flow guide portion (1212) alternately connects to the same end of two adjacent second flow portions (1211); The third splicing plate (13) comprises a third main plate (1301) and at least two third mounting plates (1302) sealed and connected to both ends of the third main plate (1301); the third splicing channel (131) comprises a third flow portion (1311) and a third flow guide portion (1312); the third flow portion (1311) is arranged in parallel with the third main plate (1301) and penetrates at both ends; the third flow guide portion (1312) is arranged on the third mounting plate (1302); the third flow guide portion (1312) alternately connects the same end of two adjacent third flow portions (1311).

9. The mask plate temporary storage and maintenance method according to claim 8, characterized in that: The constant temperature driving mechanism (4) comprises a constant temperature lifting unit (41) and a constant temperature opening and closing module (42), the constant temperature lifting unit (41) is drivingly connected to the constant temperature opening and closing module (42), the constant temperature opening and closing module (42) is drivingly connected to the sealing plate (2), and a sealing ring (21) is provided on one side of the sealing plate (2) close to the installation cavity (101); When it is necessary to seal the opening of the installation cavity (101), the constant temperature lifting unit (41) drives the constant temperature opening and closing module (42) to move upward, and the constant temperature opening and closing module (42) drives the sealing plate (2) to move toward the installation cavity (101), so that the sealing plate (2) covers the opening of the installation cavity (101), and the sealing ring (21) abuts against the outer peripheral edge of the opening end of the installation cavity (101); The constant temperature opening and closing module (42) comprises a constant temperature opening and closing frame (421) and a constant temperature driving unit (422) connected to the constant temperature opening and closing frame (421); the constant temperature opening and closing frame (421) is drivingly connected to the constant temperature lifting unit (41); the sealing plate (2) is slidably connected to the constant temperature opening and closing frame (421); the constant temperature driving unit (422) is drivingly connected to the sealing plate (2); the constant temperature driving unit (422) drives the sealing plate (2) to approach or move away from the installation cavity (101); The constant temperature opening and closing module (42) further comprises a constant temperature cover (423) connected to the constant temperature opening and closing frame (421); the constant temperature opening and closing frame (421), the constant temperature driving unit (422) and the sealing plate (2) are located in the constant temperature cover (423); at least two sealing fans (4211) are installed on a side of the constant temperature opening and closing frame (421) facing away from the sealing plate (2); and a sealed dust exhaust pipe (4231) is connected to the bottom pipeline of the constant temperature cover (423); The sealing fan (4211) is used to absorb dust between the constant temperature cover (423), the constant temperature opening and closing frame (421) and the sealing plate (2) under negative pressure and discharge the dust along the sealing dust exhaust pipe (4231).

10. A mask plate temporary storage and maintenance system, characterized in that: A method for temporarily storing and maintaining a mask plate according to any one of claims 1 to 9, comprising a constant temperature cooling device (010) for performing constant temperature treatment on a mask plate body (01), a manipulator (020) for grabbing or placing the mask plate body (01), a temporary storage mechanism (030) for storing the mask plate body (01) and detecting the temperature of each mask plate body (01) in real time, and a detection device (040) for performing thin film detection on the mask plate body (01), wherein the manipulator (020) marks the mask plate body (01) as a first process, a second process, or a third process when placing the mask plate body (01) in the temporary storage mechanism (030); the manipulator (020) first identifies the mask plate body (01) in the first process, the second process, or the third process, and then grabs the corresponding mask plate body (01). 。

Images