Device and method for measuring bending rate of pressure film without damage

Abstract

The invention discloses a device and a method for nondestructively measuring the bending rate of a pressure film, and belongs to the technical field of bending rate measurement. The device for measuring the bending rate of the pressure film without damage comprises a frame, a distance sensor, a control assembly and a jacking assembly, the distance sensor is installed on the frame, the control assembly and the jacking assembly are connected in the frame, the pressure film is limited at the top of the frame, and the control assembly controls the jacking assembly to jack up or put down the pressure film. According to the method, the quality difference of the pressure film can be effectively identified, so that the alarm frequency of a machine table is remarkably reduced, the yield of wafers is improved, and the requirement of high-precision chip processing is met.

Description

Technical Field

[0001] The present invention relates to the technical field of curvature measurement, and in particular to a device and method for non-destructively measuring the curvature of a pressure membrane. Background Art

[0002] The pressure membrane plays a vital role in the chip processing process. It can evenly distribute the mechanical pressure on the chip surface, thereby ensuring that the flatness and finish of the chip surface meet the extremely high process requirements during the grinding and polishing process. At the same time, the pressure membrane can effectively buffer mechanical shock and reduce surface scratches and defects. The use of pressure membrane plays a key role in improving the processing accuracy and yield rate of chips, while also reducing production costs and improving production efficiency.

[0003] The pressure membrane has some notable characteristics: the structure is an integral whole, the texture is relatively soft, the Shore A hardness is between 25-80HA, the membrane thickness is relatively thin, usually in the range of 0.3-1.5mm, and the diameter is relatively large, generally 140-800mm. These characteristics make the product prone to unstable quality and difficult to control during the processing and manufacturing process, especially in clients with extremely high process requirements, the problem is more prominent. For example, there may be differences in hardness at different locations, with an error of about 0.01%-1%; differences in membrane thickness, with an error of about 0.01%-5%; differences in diameter, with an error of about 0.01%-0.3%; and differences in weight of the same product, with an error of about 0.005%-0.01%. These problems may cause uneven use of the pressure membrane in a high-precision process environment, and abnormal conditions of uneven heights on the wafer surface, which may eventually lead to machine alarms and product defects, fail to meet customer expectations, and thus reduce the wafer yield.

[0004] Therefore, those skilled in the art urgently need to provide a device and method for non-destructively measuring the curvature of pressure membranes. By accurately measuring and screening the pressure membranes, the quality differences of the pressure membranes can be effectively identified, thereby significantly reducing the alarm frequency of the machine, improving the yield rate of the wafer, and meeting the needs of high-precision chip processing. Summary of the invention

[0005] The purpose of the present invention is to provide a device and method for non-destructively measuring the curvature of a pressure membrane. By accurately measuring and screening the pressure membrane, the quality differences of the pressure membrane can be effectively identified, thereby significantly reducing the alarm frequency of the machine, improving the yield rate of the wafer, and meeting the needs of high-precision chip processing.

[0006] To achieve the above-mentioned purpose, the present invention provides a device for non-destructively measuring the curvature of a pressure membrane, comprising a frame, a distance sensor, a control component and a lifting component, wherein the frame is mounted with a distance sensor, the interior of the frame is connected with a control component and a lifting component, the top of the frame is limited by a pressure membrane, and the control component controls the lifting component to lift the pressure membrane.

[0007] Preferably, the frame includes a test platform, columns, panels, feet and a base plate, the four corners of the bottom of the test platform are connected to four columns, panels are connected between the columns, the bottom of the columns are connected to feet, and the base plate is connected between the inner walls of the four columns.

[0008] Preferably, the test platform is square, a plurality of limiting grooves are arranged at the center of the test platform, the limiting grooves are annular, and a plurality of limiting grooves of different diameters are arranged concentrically, the pressure membrane is limited in the limiting grooves, and a through hole is opened at the center of the test platform.

[0009] Preferably, a distance sensor is installed on the outer wall of the test platform, the distance sensor includes a main sensor and a sub-sensor, the main sensor includes main sensor No. 1, main sensor No. 2, main sensor No. 3 and main sensor No. 4, the main sensor No. 1, main sensor No. 2, main sensor No. 3 and main sensor No. 4 are respectively located on the four outer walls of the test platform, and the main sensor No. 1, main sensor No. 2, main sensor No. 3 and main sensor No. 4 are located on two mutually perpendicular center lines of the test platform; a number of sub-sensors are respectively located on both sides of the main sensor.

[0010] Preferably, the control component includes a PLC controller, a driver, a touch screen, a transformer and a power socket, the PLC controller, the driver and the transformer are installed on the base plate, the touch screen is installed on one of the panels, and the power socket is installed on the other panel, and the driver, the touch screen, the transformer and the power socket are all electrically connected to the PLC controller.

[0011] Preferably, the bottom plate and the bottom of the test platform are connected with a lifting assembly, and the lifting assembly includes a servo motor, a screw, a movable seat, a slider, a slide rail, a polished rod, a lifting block and a fixed seat, the servo motor is installed on the bottom plate, the fixed seat is installed at the bottom of the test platform, the end of the transmission shaft of the servo motor is fixedly connected to one end of the screw, the other end of the screw is rotatably connected to the fixed seat, the movable seat is sleeved on the screw, and the movable seat is threadedly connected to the screw; A slider is fixedly connected to one side wall of the movable seat, the slider is slidably connected to the slide rail, the slide rail is vertically mounted on the fixed seat, and the fixed seat is vertically mounted on the bottom of the test platform; A connecting block is fixedly connected to the other side of the movable seat, a polished rod is fixedly connected to the top of the connecting block, the polished rod is vertically arranged, a lifting block is fixedly connected to the top of the polished rod, and the lifting block contacts the pressure membrane after passing through the through hole; the servo motor is electrically connected to the PLC controller.

[0012] Preferably, the lifting block is hemispherical.

[0013] A method for testing a device for non-destructively measuring the curvature of a pressure membrane comprises the following steps: S1: Plug the external power supply into the power socket to power the device, and the display interface of the touch screen will light up to remind you to start working; S2: Click the reset button to make the lifting block located below the test platform; place the pressure film whose hardness H, weight G and film thickness m have been measured in advance into one of the limit grooves of the test platform, and input the values ​​of H, G and m on the touch screen; S3: Place the pressure membrane on the limit slot of the test platform. The touch screen displays the values ​​of d1, d2, d3, and d4 measured by the No. 1 main sensor, the No. 2 main sensor, the No. 3 main sensor, and the No. 4 main sensor. The auxiliary sensors display different colors according to the measured values. The position of the pressure membrane is manually fine-tuned until the colors displayed on the touch screen by the auxiliary sensors are all green, indicating that the pressure membrane is placed in the center of the test platform. S4: The PLC controller directly calculates the value of the diameter D of the pressure membrane and displays it on the touch screen. Then click the lift block up button on the touch screen. The PLC controller controls the servo motor to start working and drive the lift block to rise, thereby slowly lifting the pressure membrane until the pressure membrane is completely separated from the test platform. At this time, the detections of main sensor No. 1, main sensor No. 2, main sensor No. 3 and main sensor No. 4 are all out of range and start red light alarm, which is fed back to the PLC controller. The PLC controller controls to stop driving the lift block to rise. At this time, the value of the lift height y is displayed on the touch screen, and the PLC controller calculates the curvature W.

[0014] Preferably, the calculation formula of the diameter D of the pressure membrane is: ; Where, L is the side length of the test platform, , , , They are the values ​​measured from the main sensor to the outer edge of the pressure membrane; The calculation formula of the curvature W is: ; Among them, D is the diameter of the pressure membrane, y is the lifting height, G is the weight, H is the hardness, and m is the membrane thickness.

[0015] Preferably, the ranges of the first main sensor, the second main sensor, the third main sensor and the fourth main sensor are all .

[0016] The advantages and positive effects of the device for non-destructively measuring the curvature of a pressure membrane described in the present invention are: 1. The present invention adopts a method of slowly lifting the pressure membrane with a lifting block. The hemispherical design of the lifting block and the slow lifting process minimize the damage to the pressure membrane and increase the service life of the pressure membrane.

[0017] 2. The present invention adopts advanced distance sensor technology and precise lifting component design to accurately measure the curvature of the pressure membrane. Through the PLC controller and a specific calculation formula, the curvature value of the pressure membrane can be quickly obtained. The result is amplified by algorithm calculation and reflected in the curvature value. If the calculated curvature value of the pressure membrane is within the specified range, the pressure membrane meets the quality requirements. If the curvature value is not within the specified range, the pressure membrane does not meet the quality requirements, thereby effectively identifying the quality difference of the pressure membrane.

[0018] 3. The operation process of the present invention is simple and intuitive, and the human-computer interaction is carried out through the touch screen, which is convenient for the operator to input parameters, start and stop operations. The PLC controller in the control component can automatically control the action of the jacking component, and make real-time adjustments and precise controls according to the feedback signal of the sensor, realizing the automation of the entire measurement process. This not only improves the measurement efficiency and reduces the human operation error, but also reduces the requirements for the professional skills of the operator, making the device easier to promote and apply in the actual production environment.

[0019] 4. The test platform of the present invention is provided with limiting grooves of different diameters, which can adapt to pressure membranes of various sizes, such as six inches, eight inches, twelve inches, etc., to meet the requirements of different chip processing technologies for pressure membrane sizes.

[0020] The technical solution of the present invention is further described in detail below through the accompanying drawings and embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A three-dimensional structural diagram of a device for non-destructively measuring the curvature of a pressure membrane according to the present invention; Figure 2 A structural diagram of another perspective of a device for non-destructively measuring the curvature of a pressure membrane according to the present invention; Figure 3 A top view of a device for non-destructively measuring the curvature of a pressure membrane according to the present invention; Figure 4 It is a schematic diagram of the initial state of the pressure membrane in the device for non-destructively measuring the curvature of the pressure membrane of the present invention; Figure 5 It is a schematic diagram of the use state of the pressure membrane in the device for non-destructively measuring the curvature of the pressure membrane of the present invention; Figure 6 A schematic diagram of the internal structure of a frame of a device for non-destructively measuring the curvature of a pressure membrane according to the present invention; Figure 7 A top view of the internal structure of a frame of a device for non-destructively measuring the curvature of a pressure membrane according to the present invention; Figure 8 It is a schematic diagram of the jacking assembly of the present invention; Fig. 9 A cross-sectional view of an initial state of a pressure membrane in a device for non-destructively measuring the curvature of a pressure membrane according to the present invention; Fig.10 A cross-sectional view of a pressure membrane in a device for non-destructively measuring the curvature of a pressure membrane according to the present invention in a state of use; Fig.11 It is a flow chart of a method for using a device for non-destructively measuring the curvature of a pressure membrane according to the present invention; Fig.12 It is a schematic diagram of the connection between the control components of the present invention.

[0022] Reference numerals 1. Frame; 101. Test platform; 102. Column; 103. Panel; 104. Foot pad; 105. Bottom plate; 2. Distance sensor; 201. Main sensor No. 1; 202. Main sensor No. 2; 203. Main sensor No. 3; 204. Main sensor No. 4; 205. Auxiliary sensor; 3. Control components; 301. PLC controller; 302. Driver; 303. Touch screen; 304. Transformer; 305. Power socket; 4. Lifting assembly; 401. servo motor; 402. screw; 403. moving seat; 404. slider; 405. slide rail; 406. connecting block; 407. polished rod; 408. lifting block; 409. fixed seat; 5. pressure membrane. DETAILED DESCRIPTION

[0023] In the description of the present invention, it should be noted that the terms "upper", "lower", "inside", "outside", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the invented product is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In the description of the present invention, it should also be noted that, unless otherwise clearly specified and limited, the terms "setting", "installation", and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be a connection between the two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0024] In this application, unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the technical field of this application. In case of any inconsistency, the meaning described in this specification or the meaning derived from the contents recorded in this specification shall prevail. In addition, the terms used herein are only for the purpose of describing the embodiments of the present application and are not intended to limit the present application.

[0025] The embodiments of the present invention are described in detail below in conjunction with the accompanying drawings.

[0026] like Figure 1-Figure 12 As shown, a device for non-destructively measuring the curvature of a pressure membrane comprises a frame 1, a distance sensor 2, a control component 3 and a lifting component 4. The distance sensor 2 is mounted on the frame 1. The control component 3 and the lifting component 4 are connected inside the frame 1. A pressure membrane 5 is limited at the top of the frame 1. The control component 3 controls the lifting component 4 to lift the pressure membrane 5.

[0027] The frame 1 includes a test platform 101, columns 102, panels 103, feet 104 and a bottom plate 105. Four columns 102 are connected to the four corners of the bottom of the test platform 101. Panels 103 are connected between the columns 102. The bottom of the columns 102 is connected to the feet 104. The bottom plate 105 is connected between the inner walls of the four columns 102.

[0028] Specifically, the test platform 101 is screwed to the top of the column 102. The distance sensor 2 is screwed to the side wall of the test platform 101. The lifting block 408 is screwed to the top of the polished rod 407.

[0029] The power socket 305 is locked on the panel 103 by screws and nuts. The foot 104 is fixed to the bottom of the column 102 by screws.

[0030] The test platform 101 is square. A plurality of limiting grooves are arranged at the center of the test platform 101. The limiting grooves are annular. A plurality of limiting grooves of different diameters are arranged concentrically. The pressure membrane 5 is limited in the limiting grooves. A through hole is opened at the center of the test platform 101 for the light rod 407 to pass through.

[0031] Specifically, the test platform is provided with three circles of limiting grooves, which respectively correspond to the placement positions of the existing six-inch pressure membrane 5, eight-inch pressure membrane 5, and twelve-inch pressure membrane 5, so as to place the pressure membrane 5 into the corresponding limiting grooves for convenience in use.

[0032] A distance sensor 2 is installed on the outer wall of the test platform 101. The distance sensor 2 includes a main sensor and a sub-sensor 205. The main sensor includes a No. 1 main sensor 201, a No. 2 main sensor 202, a No. 3 main sensor 203 and a No. 4 main sensor 204. The No. 1 main sensor 201, the No. 2 main sensor 202, the No. 3 main sensor 203 and the No. 4 main sensor 204 are respectively located on the four outer walls of the test platform 101. And the No. 1 main sensor 201, the No. 2 main sensor 202, the No. 3 main sensor 203 and the No. 4 main sensor 204 are located on two mutually perpendicular center lines of the test platform 101. A number of sub-sensors 205 are respectively located on both sides of the main sensor.

[0033] Specifically, two sub-sensors 205 are respectively disposed on both sides of the first main sensor 201 , the second main sensor 202 , the third main sensor 203 , and the fourth main sensor 204 .

[0034] The control component 3 includes a PLC controller 301, a driver 302, a touch screen 303, a transformer 304, and a power socket 305. The PLC controller 301, the driver 302, and the transformer 304 are installed on the bottom plate 105. The touch screen 303 is installed on one of the panels 103. The power socket 305 is installed on the other panel 103. The driver 302, the touch screen 303, the transformer 304, and the power socket 305 are all electrically connected to the PLC controller 301.

[0035] Specifically, the PLC controller 301 , the servo motor 401 , the driver 302 , and the transformer 304 are all fixed on the bottom plate 105 by screws.

[0036] Specifically, the external power supply is directly inserted into the power socket 305, so that the control box can be powered. The transformer 304 is connected to the power socket 305 with wires. The transformer 304 and the touch screen 303, the PLC controller 301, and the driver 302 are connected with wires for power supply. The servo motor 401 terminal is connected to the driver 302 terminal. The driver 302 and the PLC controller 301 are connected through a communication line. The touch screen 303 is connected to the PLC controller 301 with a network cable. The distance sensor terminal is connected to the PLC controller terminal.

[0037] The bottom of the base plate 105 and the test platform 101 are connected with a lifting assembly 4. The lifting assembly 4 includes a servo motor 401, a screw rod 402, a movable seat 403, a slider 404, a slide rail 405, a light rod 407, a lifting block 408 and a fixed seat 409. The servo motor 401 is installed on the base plate 105. The fixed seat 409 is installed at the bottom of the test platform 101. The end of the transmission shaft of the servo motor 401 is fixedly connected to one end of the screw rod 402. The other end of the screw rod 402 is rotatably connected to the fixed seat 409. The movable seat 403 is sleeved on the screw rod 402, and the movable seat 403 is threadedly connected to the screw rod 402.

[0038] A slider 404 is fixedly connected to one side wall of the movable seat 403. The slider 404 is slidably connected to a slide rail 405. The slide rail 405 is vertically mounted on a fixed seat 409. The fixed seat 409 is vertically mounted at the bottom of the test platform 101.

[0039] The other side of the moving seat 403 is fixedly connected with a connecting block 406. The top of the connecting block 406 is fixedly connected with a polished rod 407. The polished rod 407 is vertically arranged. The top of the polished rod 407 is fixedly connected with a jacking block 408. The jacking block 408 passes through the through hole and contacts with the pressure membrane 5. The servo motor 401 is electrically connected to the PLC controller 301.

[0040] Specifically, the transmission shaft of the servo motor 401 rotates to drive the screw 402 to rotate. The screw 402 rotates to drive the slider 404 on the moving seat 403 to move vertically along the slide rail 405 to play a guiding role. The screw 402 rotates to drive the moving seat 403 to move vertically, and then drives the light rod 407 to move vertically, so that the lifting block 408 on the top of the light rod 407 can lift the pressure membrane 5 or put down the pressure membrane 5.

[0041] The lifting block 408 is hemispherical. Specifically, the arc surface of the lifting block contacts the bottom of the pressure membrane, which can reduce damage to the pressure membrane.

[0042] The testing method of the present invention comprises the following steps: S1: Plug the external power supply into the power socket 305 to power the device, and the display interface of the touch screen 303 is always on to remind you to start working.

[0043] S2: Click the reset button to make the lifting block 408 located below the test platform 101. Place the pressure membrane 5 whose hardness H, weight G and membrane thickness m have been measured in advance into one of the limit grooves of the test platform 101, and input the values ​​of H, G and m on the touch screen 303.

[0044] Specifically, the hardness H is measured with a common Shore durometer A. The weight G is measured with a common electronic scale. The film thickness m is measured with a common digital caliper.

[0045] S3: Place the pressure membrane 5 on the limit groove of the test platform 101. The touch screen 303 displays the values ​​of d1, d2, d3, and d4 measured by the No. 1 main sensor 201, the No. 2 main sensor 202, the No. 3 main sensor 203, and the No. 4 main sensor 204. The auxiliary sensor 205 displays different colors according to the measured values. Manually fine-tune the position of the pressure membrane 5 until the colors displayed by the auxiliary sensors 205 on the touch screen 303 are all green, which means that the pressure membrane 5 is placed in the center of the test platform 101.

[0046] Specifically, the differences in different positions measured by the auxiliary sensors 205 are controlled within 0.01 mm, and the colors displayed by the auxiliary sensors 205 on the touch screen 303 are all green.

[0047] S4: The PLC controller 301 directly calculates the value of the diameter D of the pressure membrane 5 through formula 1 and displays it on the touch screen 303, and then clicks the lifting block 408 rising button on the touch screen 303. The PLC controller 301 controls the servo motor 401 to start working, driving the lifting block 408 to rise, thereby slowly lifting the pressure membrane 5 until the pressure membrane 5 reaches a state of being completely separated from the test platform 101. At this time, the detections of the No. 1 main sensor 201, the No. 2 main sensor 202, the No. 3 main sensor 203 and the No. 4 main sensor 204 are all out of range and start red light alarms, and are fed back to the PLC controller 301 at the same time. The PLC controller 301 controls the behavior of stopping the driving of the lifting block 408 to rise. At this time, the value of the lifting height y is displayed on the touch screen 303. The PLC controller 301 calculates the curvature W through formula 2.

[0048] The calculation formula of the diameter D of the pressure membrane 5 is: ; Where, L is the side length of the test platform, , , , They are the values ​​measured from the main sensor to the outer edge of the pressure membrane.

[0049] The calculation formula of curvature W is: ; Among them, D is the diameter of the pressure membrane, y is the lifting height, G is the weight, H is the hardness, and m is the membrane thickness.

[0050] The ranges of the first main sensor 201, the second main sensor 202, the third main sensor 203 and the fourth main sensor 204 are all .

[0051] Embodiment 1 Sample 1 diameter D 1 200mm, top height y 1 100mm, weight G 1 100g, hardness H 1 40HA, film thickness m 1 is 1 mm, and W is obtained 1 =50000.

[0052] Sample 2 diameter D 2 199mm, top height y 1 105mm, weight G 1 99g, hardness H 1 45HA, film thickness m 1 is 1.5 mm, and W 2 =30646. According to the curvature value of the sample, as long as the curvature value of the pressure membrane sample is within the specified range, it means that the produced pressure membrane sample meets the quality standard. Specifically, the specified range provides customers with a curvature value of 100 above and below.

[0053] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that they can still modify or replace the technical solution of the present invention with equivalents, and these modifications or equivalent replacements cannot cause the modified technical solution to deviate from the spirit and scope of the technical solution of the present invention.

Claims

1. A device for non-destructively measuring the curvature of a pressure membrane, characterized in that: It includes a frame, a distance sensor, a control component and a lifting component. The distance sensor is installed on the frame. The control component and the lifting component are connected inside the frame. The top of the frame is limited by a pressure membrane. The control component controls the lifting component to lift the pressure membrane.

2. The device for non-destructively measuring the curvature of a pressure membrane according to claim 1, characterized in that: The frame includes a test platform, columns, panels, feet and a base plate. The four corners of the bottom of the test platform are connected to four columns, panels are connected between the columns, feet are connected to the bottom of the columns, and the base plate is connected between the inner walls of the four columns.

3. The device for non-destructively measuring the curvature of a pressure membrane according to claim 2, characterized in that: The test platform is square, and a plurality of limiting grooves are arranged at the center of the test platform. The limiting grooves are annular, and a plurality of limiting grooves of different diameters are arranged concentrically. The pressure membrane is limited in the limiting grooves, and a through hole is opened at the center of the test platform.

4. The device for non-destructively measuring the curvature of a pressure membrane according to claim 3, characterized in that: A distance sensor is installed on the outer wall of the test platform, and the distance sensor includes a main sensor and a sub-sensor. The main sensor includes main sensor No. 1, main sensor No. 2, main sensor No. 3 and main sensor No.

4. The main sensor No. 1, main sensor No. 2, main sensor No. 3 and main sensor No. 4 are respectively located on the four outer walls of the test platform, and the main sensor No. 1, main sensor No. 2, main sensor No. 3 and main sensor No. 4 are located on two mutually perpendicular center lines of the test platform; a number of sub-sensors are respectively located on both sides of the main sensor.

5. The device for non-destructively measuring the curvature of a pressure membrane according to claim 3, characterized in that: The control component includes a PLC controller, a driver, a touch screen, a transformer and a power socket. The PLC controller, the driver and the transformer are installed on the base plate, the touch screen is installed on one of the panels, and the power socket is installed on the other panel. The driver, the touch screen, the transformer and the power socket are all electrically connected to the PLC controller.

6. The device for non-destructively measuring the curvature of a pressure membrane according to claim 5, characterized in that: The bottom plate and the bottom of the test platform are connected with a lifting assembly, and the lifting assembly includes a servo motor, a screw, a movable seat, a slider, a slide rail, a polished rod, a lifting block and a fixed seat. The servo motor is installed on the bottom plate, and the fixed seat is installed at the bottom of the test platform. The end of the transmission shaft of the servo motor is fixedly connected to one end of the screw, and the other end of the screw is rotatably connected to the fixed seat. The movable seat is sleeved on the screw, and the movable seat is threadedly connected to the screw. A slider is fixedly connected to one side wall of the movable seat, the slider is slidably connected to the slide rail, the slide rail is vertically mounted on the fixed seat, and the fixed seat is vertically mounted on the bottom of the test platform; A connecting block is fixedly connected to the other side of the movable seat, a polished rod is fixedly connected to the top of the connecting block, the polished rod is vertically arranged, a lifting block is fixedly connected to the top of the polished rod, and the lifting block contacts the pressure membrane after passing through the through hole; the servo motor is electrically connected to the PLC controller.

7. The device for non-destructively measuring the curvature of a pressure membrane according to claim 6, characterized in that: The lifting block is hemispherical.

8. A method for testing a device for non-destructively measuring the curvature of a pressure membrane according to any one of claims 1 to 7, characterized in that: The following steps are included: S1: Plug the external power supply into the power socket to power the device, and the display interface of the touch screen will light up to remind you to start working; S2: Click the reset button to make the lifting block located below the test platform; place the pressure film whose hardness H, weight G and film thickness m have been measured in advance into one of the limit grooves of the test platform, and input the values ​​of H, G and m on the touch screen; S3: Place the pressure membrane on the limit slot of the test platform. The touch screen displays the values ​​of d1, d2, d3, and d4 measured by the No. 1 main sensor, the No. 2 main sensor, the No. 3 main sensor, and the No. 4 main sensor. The auxiliary sensors display different colors according to the measured values. The position of the pressure membrane is manually fine-tuned until the colors displayed on the touch screen by the auxiliary sensors are all green, indicating that the pressure membrane is placed in the center of the test platform. S4: The PLC controller directly calculates the value of the diameter D of the pressure membrane and displays it on the touch screen. Then click the lift block up button on the touch screen. The PLC controller controls the servo motor to start working and drive the lift block to rise, thereby slowly lifting the pressure membrane until the pressure membrane is completely separated from the test platform. At this time, the detections of main sensor No. 1, main sensor No. 2, main sensor No. 3 and main sensor No. 4 are all out of range and start red light alarm, which is fed back to the PLC controller. The PLC controller controls to stop driving the lift block to rise. At this time, the value of the lift height y is displayed on the touch screen, and the PLC controller calculates the curvature W.

9. The method for testing a device for non-destructively measuring the curvature of a pressure membrane according to claim 8, characterized in that: The calculation formula of the diameter D of the pressure membrane is: ； Where, L is the side length of the test platform, , , , They are the values ​​measured from the main sensor to the outer edge of the pressure membrane; The calculation formula of the curvature W is: ； Among them, D is the diameter of the pressure membrane, y is the lifting height, G is the weight, H is the hardness, and m is the membrane thickness.

10. The method for testing a device for non-destructively measuring the curvature of a pressure membrane according to claim 8, characterized in that: The measuring ranges of the first main sensor, the second main sensor, the third main sensor and the fourth main sensor are all .

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