System and method for testing service life of corrosion-resistant flow control device

Abstract

The invention provides a corrosion-resistant flow control device service life test system and test method, and belongs to the field of semiconductor testing, the corrosion-resistant flow control device service life test system is provided with a shell and a test control unit arranged on the shell, the shell is internally provided with a corrosion area and a non-corrosion area which are mutually independent, and the corrosion area is internally provided with a corrosion-resistant liquid medium storage tank and a polymer liquid pump; the non-corrosion area comprises a controller pipeline, a corrosion-resistant pipeline, a pressure regulating device and a to-be-tested device, the polymer liquid pump sucks a corrosive liquid medium from the corrosion-resistant liquid medium storage tank and provides the corrosive liquid medium to the corrosion-resistant pipeline, and the corrosive liquid medium sequentially passes through the pressure regulating device and the to-be-tested device and flows back to the corrosion-resistant liquid medium storage tank through the corrosion-resistant pipeline; the corrosion-resistant liquid medium storage tank is further communicated with a sampling device arranged on the outer side of the shell, and an observation area for observing the device to be detected is arranged on the side face of the shell. By means of the treatment scheme, corrosion-resistant devices and non-corrosion-resistant devices are isolated, the leakage range of corrosive liquid is fully controlled, and safety detection of the to-be-detected device is achieved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor testing, and in particular to a corrosion-resistant fluid control device life testing system and testing method. Background Art

[0002] In order to meet the cleaning and etching process requirements in the semiconductor processing, highly corrosive liquids are often used, which requires corrosion-resistant fluidic devices. However, there is currently no dedicated life test system for corrosion-resistant fluidic devices that pass through corrosive liquids. Common fluidic device life test systems mostly use non-corrosive liquids such as pure water for testing, which cannot meet the testing requirements for passing through highly corrosive liquids.

[0003] Even if an ordinary fluid control device life test system is used to test the fluid control device, during the actual operation and testing of the fluid control device that needs to pass through corrosive liquids (such as HF), the fluid control device will leak, burst, and other abnormal conditions due to corrosion, which will cause serious personal injury and environmental pollution. Therefore, in order to test the corrosion resistance of the corrosion-resistant fluid control device and its performance and operating life under the condition of passing through highly corrosive liquids, it is necessary to establish a life test system for fluid control devices passing through corrosive liquids. Summary of the invention

[0004] Therefore, in order to overcome the shortcomings of the above-mentioned prior art, the present invention provides a corrosion-resistant fluid control device life test system and test method, which isolates corrosion-resistant and non-corrosion-resistant devices and fully controls the leakage range of corrosive liquids to achieve safe detection of the device to be tested.

[0005] In order to achieve the above-mentioned purpose, the present invention provides a corrosion-resistant fluid control device life test system, which has a shell, and the inside of the shell is provided with mutually independent corrosion zone and non-corrosion zone: the corrosion zone is provided with a corrosion-resistant liquid medium storage tank and a polymer liquid pump; the non-corrosion zone includes a controller pipeline, a corrosion-resistant pipeline, and a pressure regulating device and a device to be tested arranged on the corrosion-resistant pipeline. The polymer liquid pump draws the corrosive liquid medium from the corrosion-resistant liquid medium storage tank and provides it to the corrosion-resistant pipeline. The corrosive liquid medium passes through the pressure regulating device and the device to be tested in turn, and is returned to the corrosion-resistant liquid medium storage tank by the corrosion-resistant pipeline. The corrosion-resistant liquid medium storage tank is also connected to a sampling device arranged on the outside of the shell, and an observation area for observing the device to be tested is arranged on the side of the shell.

[0006] In one embodiment, the corrosion zone and the non-corrosion zone are separated by a partition.

[0007] In one of the embodiments, a window is provided at the observation area, and corrosion-resistant plastic is installed in the window.

[0008] In one of the embodiments, an operating door is provided on a side wall of the housing away from the corrosion-resistant liquid medium storage tank.

[0009] In one of the embodiments, a heat dissipation opening is provided above the housing.

[0010] In one embodiment, the test control unit is a compressed air switch electrical control cabinet.

[0011] A corrosion-resistant fluid control device life test method, applied in the above-mentioned corrosion-resistant fluid control device life test system, comprises: S1, use cleaning liquid to clean the corrosion-resistant liquid medium storage tank and corrosion-resistant pipeline, let the cleaning liquid circulate in the pipeline, clean the entire test system pipeline, and after the cleaning is completed, discharge the cleaning liquid; S2, adding the liquid to be tested into the corrosion-resistant liquid medium storage tank; S3, check the pipeline connection and install the device to be tested; S4, setting the pressure value of the pressure regulating device according to the characteristics of the liquid to be tested and the device to be tested; S5, starting the polymer liquid pump through the test control unit, and the compressed gas enters the device under test from the controller pipeline. At the same time, the test control unit counts the total number of times the device under test is opened and closed; S6, observing the operation of the test system from the observation area at a first predetermined time interval to determine whether there is leakage; S7, when it is determined that there is no leakage, sampling is performed from the sampling device every second predetermined time period; S8, when it is determined that there is a leak, the number of operations is recorded, the test control unit is turned off, and the life test stops; S9, when it is determined that there is no leakage, and when the total number of opening and closing times of the device under test counted by the test control unit reaches a predetermined total number, the test control unit is turned off and the life test stops.

[0012] In one embodiment, the cleaning liquid is pure water or detergent.

[0013] In one of the embodiments, the method further includes: S10, draining the liquid in the corrosion-resistant liquid medium storage tank and inspecting the device to be tested.

[0014] Compared with the prior art, the advantages of the present invention are: it isolates corrosion-resistant and non-corrosion-resistant devices, and can control the leakage range of leaked corrosive liquids; the entire system is easy for testers to install and debug, and meets the environmental requirements of the test. It can be automatically operated through the test control unit. The chemical liquid can be sampled and analyzed at any time through the sampling device arranged on the outside of the shell. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0016] Figure 1 is a front view of a corrosion-resistant fluid control device life test system in an embodiment of the present invention; Figure 2 1 is a top view of a corrosion-resistant fluid control device life test system in an embodiment of the present invention. DETAILED DESCRIPTION

[0017] The embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0018] The following describes the implementation methods of the present application through specific examples, and those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The present application can also be implemented or applied through other different specific implementation methods, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that, in the absence of conflict, the following embodiments and the features in the embodiments can be combined with each other. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work belong to the scope of protection of the present application.

[0019] It should be noted that various aspects of the embodiments within the scope of protection of the present invention are described below. It should be apparent that the aspects described herein can be embodied in a wide variety of forms, and any specific structure and / or function described herein is merely illustrative. Based on the present application, it should be understood by those skilled in the art that an aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspect described herein can be used to implement the device and / or practice the method. In addition, other structures and / or functionalities other than one or more of the aspects described herein can be used to implement this device and / or practice this method.

[0020] It should also be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the present application. The drawings only show components related to the present application rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0021] Additionally, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, it will be understood by those skilled in the art that the aspects described may be practiced without these specific details.

[0022] like Figure 1 and Figure 2 As shown, the embodiment of the present application provides a corrosion-resistant fluid control device life test system, which has a housing 3, a test control unit 1, a controller pipeline 2, a polymer liquid pump 5, a corrosion-resistant pipeline 8, a pressure regulating device 6, a device to be tested 7, a corrosion-resistant liquid medium storage tank 9 and a sampling device 4. Among them, the test control unit 1 and the sampling device 4 are arranged outside the housing 3. The controller pipeline 2, the polymer liquid pump 5, the corrosion-resistant pipeline 8, the pressure regulating device 6, the device to be tested 7 and the corrosion-resistant liquid medium storage tank 9 are arranged inside the housing 3.

[0023] like Figure 1 As shown, the shell 3 is provided with mutually independent corrosion zones and non-corrosion zones. The corrosion zone and the non-corrosion zone can be separated by a partition 13, and a plurality of through holes can be provided on the partition 13. The material of the partition can be metal or plastic. The composition of the plastic can be PVDF (polyvinylidene fluoride). The shell 3 can also be a shell with layers inside. The side of the shell 3 is provided with an observation area for observing the device to be tested 7. The observation area can be set to a transparent and corrosion-resistant material.

[0024] A corrosion-resistant liquid medium storage tank 9 and a polymer liquid pump 5 are arranged in the corrosion zone.

[0025] The corrosion-resistant liquid medium storage tank 9 is used to temporarily contain the corrosive liquid medium. The corrosive liquid medium can be HF liquid or other corrosive liquids.

[0026] The polymer liquid pump 5 is used to extract the corrosive liquid medium from the corrosion-resistant liquid medium storage tank 9 .

[0027] The non-corrosion area includes a controller pipeline 2, a corrosion-resistant pipeline 8, a pressure regulating device 6 arranged on the corrosion-resistant pipeline, and a device to be tested 7. The pressure regulating device 6 is used to adjust the hydraulic pressure and can be a pressure regulating valve. The device to be tested 7 can be a diaphragm valve, a pressure reducing valve, etc.

[0028] The flow channels of the polymer liquid pump 5, the corrosion-resistant pipeline 8, the pressure regulating device 6, and the device to be tested 7 form a pipeline for the return of the corrosive liquid medium. The controller pipeline 2 provides compressed air to the device to be tested 7 to control the switch or closure of the device to be tested 7. The controller pipeline 2 can pass through the housing 3. In one embodiment, multiple parallel connection passages of the pressure regulating device 6 and the device to be tested 7 can be set on the corrosion-resistant pipeline to achieve simultaneous testing of multiple devices.

[0029] The polymer liquid pump 5 draws the corrosive liquid medium from the corrosion-resistant liquid medium storage tank 9 and supplies it to the corrosion-resistant pipeline 8. The corrosive liquid medium passes through the pressure regulating device 6 and the device to be tested 7 in sequence and flows back to the corrosion-resistant liquid medium storage tank 9 through the corrosion-resistant pipeline 8.

[0030] The corrosion-resistant liquid medium storage tank 9 is also communicated with the sampling device 4 arranged outside the shell.

[0031] The process of implementing the corrosion-resistant fluid control device life test by the corrosion-resistant fluid control device life test system is as follows: S1, use cleaning liquid to clean the corrosion-resistant liquid medium storage tank and corrosion-resistant pipeline, let the cleaning liquid circulate in the pipeline, clean the entire test system pipeline, and after the cleaning is completed, discharge the cleaning liquid; S2, adding the liquid to be tested into the corrosion-resistant liquid medium storage tank; S3, check the pipeline connection and install the device to be tested; S4, setting the pressure value of the pressure regulating device according to the characteristics of the liquid to be tested and the device to be tested; S5, starting the polymer liquid pump through the test control unit, and the compressed gas enters the device under test from the controller pipeline. At the same time, the test control unit counts the total number of times the device under test is opened and closed; S6, observing the operation of the test system from the observation area at a first predetermined time interval to determine whether there is leakage; S7, when it is determined that there is no leakage, sampling is performed from the sampling device at intervals of a second predetermined time; the second predetermined time is longer than the first predetermined time; preferably, the second predetermined time is a multiple of the first predetermined time; S8, when it is determined that there is a leak, the number of operations is recorded, the test control unit is turned off, and the life test stops; S9, when it is determined that there is no leakage, and when the total number of opening and closing times of the device under test counted by the test control unit reaches a predetermined total number, the test control unit is turned off and the life test stops.

[0032] In one embodiment, the cleaning liquid is pure water or detergent.

[0033] The above device isolates corrosion-resistant and non-corrosion-resistant components and can control the leakage range of leaked corrosive liquids; the entire system is easy for testers to install and debug, and meets the environmental requirements of the test. It can be automatically operated through the test control unit. The chemical liquid can be sampled and analyzed at any time through the sampling device set on the outside of the shell.

[0034] In one embodiment, the corrosion zone and the non-corrosion zone are separated by a perforated steel plate, which is conducive to heat dissipation and allows the corrosive liquid to drip onto the bottom layer in case of leakage.

[0035] In one embodiment, a window 10 is provided at the observation area, and corrosion-resistant plastic is installed in the window.

[0036] In one embodiment, an operating door is provided on the side wall of the housing 3 away from the corrosion-resistant liquid medium storage tank 9, and the operating door can be opened as needed. The housing 3 and the operating door 11 can both be made of stainless steel, which will be passivated under the action of strong acid and thus have corrosion resistance. Such a setting is convenient for operation, and the device to be tested 7 is close to the operating door and is easy to disassemble and assemble.

[0037] In one embodiment, a heat dissipation port 12 is provided above the housing 3. The heat dissipation port 12 adopts a lateral exhaust structure with a cover, which can prevent splashing of corrosive liquid while ensuring sufficient heat dissipation and preventing heat accumulation inside.

[0038] In one embodiment, the test control unit is a compressed air switch electrical control cabinet. The test control unit 1 mainly controls the switch of compressed gas: when the test control unit 1 is turned on, compressed air enters the controller pipeline 2; when the test control unit 1 is turned off, compressed air does not enter the controller pipeline 2. The test control unit can count the total number of times the device under test 7 is opened and closed.

[0039] Embodiment 1 A corrosion-resistant fluid control device life test system comprises a housing 3, a test control unit 1, a controller pipeline 2, a polymer liquid pump 5, a corrosion-resistant pipeline 8, a pressure regulating device 6, a device to be tested 7, a corrosion-resistant liquid medium storage tank 9 and a sampling device 4. The test control unit 1 and the sampling device 4 are arranged outside the housing 3 for safer operation. The controller pipeline 2 passes through the housing 3 and connects the test control unit 1 and the device to be tested 7. The housing 3 is provided with a polymer liquid pump 5, a corrosion-resistant pipeline 8, a pressure regulating device 6, a device to be tested 7 and a corrosion-resistant liquid medium storage tank 9.

[0040] The test control unit 1 is a compressed air switch electrical control cabinet or the like.

[0041] The inside of the housing 3 is provided with mutually independent corrosion zones and non-corrosion zones. The corrosion zone and the non-corrosion zone can be separated by a perforated steel plate 13, and a plurality of through holes are provided on the perforated steel plate 13. A heat dissipation port 12 is provided above the housing 3. An operating door 11 is provided on the side wall of the housing away from the corrosion-resistant liquid medium storage tank 9. An observation area 10 for observing the device to be tested 7 is provided on the side of the housing 3. The observation area can be set to transparent and corrosion-resistant plastic.

[0042] A corrosion-resistant liquid medium storage tank 9 and a polymer liquid pump 5 are arranged in the corrosion zone.

[0043] The corrosion-resistant liquid medium storage tank 9 is used to temporarily contain HF liquid.

[0044] The polymer liquid pump 5 is used to extract the corrosive liquid medium from the corrosion-resistant liquid medium storage tank 9 .

[0045] The non-corrosion area includes a controller pipeline 2, a corrosion-resistant pipeline 8, a pressure regulating device 6 arranged on the corrosion-resistant pipeline, and a device to be tested 7. The pressure regulating device 6 is used to adjust the hydraulic pressure and can be a pressure regulating valve. The device to be tested 7 can be a diaphragm valve.

[0046] The polymer liquid pump 5, the corrosion-resistant pipeline 8, the flow channel in the pressure regulating device 6, the device to be tested 7, and the flow channel of the corrosion-resistant pipeline 8 form a pipeline for the return of the corrosive liquid medium. The controller pipeline 2 monitors the diaphragm movement of the device to be tested 7. The controller pipeline 2 is arranged on the housing 3.

[0047] The polymer liquid pump 5 draws the corrosive liquid medium from the corrosion-resistant liquid medium storage tank 9 and supplies it to the corrosion-resistant pipeline 8. The corrosive liquid medium passes through the pressure regulating device 6 and the device to be tested 7 in sequence and is returned to the corrosion-resistant liquid medium storage tank through the corrosion-resistant pipeline.

[0048] The corrosion-resistant liquid medium storage tank 9 is also connected to a sampling device 4 arranged outside the housing. The sampling device 4 may be a sampling valve.

[0049] The operation process of the test device is as follows: S1: Close the sampling valve 4, use a cleaning liquid (water in this embodiment) to clean the corrosion-resistant liquid medium storage tank 9 and the corrosion-resistant pipeline 8, let the cleaning liquid circulate in the pipeline, and clean the entire test system pipeline. After the cleaning is completed, open the sampling valve 4 to discharge the cleaning liquid; S2 Close the sampling valve 4 and add the liquid to be tested into the corrosion-resistant liquid medium storage tank 9; S3 Check the pipeline connection and install the device to be tested 7; S4 sets the pressure value of the pressure regulating device 6 according to the characteristics of the liquid to be tested and the device to be tested 7; S5 closes and locks the operating door 11.

[0050] S6 The test control unit 1 starts the polymer liquid pump 5 and the gas control switch of the device under test 7, and the compressed gas enters the device under test 7 from the controller pipeline 2. At the same time, the test control unit 1 starts working. The gas control switch is preset to switch on and off 20 times per minute, and the test control unit 1 counts the total number of times the gas control switch of the device under test 7 is opened and closed.

[0051] S7 observes the operation of the test system from the observation window 10 every 12 / 24 hours to check for leakage; S8: When it is determined that there is no leakage, every 120 hours, open the sampling valve 4, take a sample with a measuring cup, and then close the sampling valve 4; During S9S7~S8, when it is determined that there is a leak, the number of operations is recorded, the test control unit 1 is turned off, and the life test stops; S10 During the process of S7-S8, when it is determined that there is no leakage and the total number of opening and closing times of the device under test counted by the test control unit 1 reaches a predetermined total number (such as 1 million times), the test control unit 1 is turned off and the life test stops.

[0052] S11: Open the sampling valve 4, discharge the liquid in the corrosion-resistant liquid medium storage tank 9, and check the device to be tested 7.

[0053] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily conceived by any technician familiar with the technical field within the technical scope disclosed in the present application should be included in the protection scope of the present application.

Claims

1. A corrosion-resistant fluid control device life test system, characterized in that: The invention has a shell and a test control unit arranged on the shell, wherein the inside of the shell is provided with mutually independent corrosion areas and non-corrosion areas: A corrosion-resistant liquid medium storage tank and a polymer liquid pump are provided in the corrosion zone; The non-corrosion area includes a controller pipeline, a corrosion-resistant pipeline, a pressure regulating device and a device to be tested arranged on the corrosion-resistant pipeline, and the corrosion area and the non-corrosion area are separated by a partition. The polymer liquid pump draws the corrosive liquid medium from the corrosion-resistant liquid medium storage tank and supplies it to the corrosion-resistant pipeline. The corrosive liquid medium passes through the pressure regulating device and the device to be tested in sequence, and flows back to the corrosion-resistant liquid medium storage tank through the corrosion-resistant pipeline. The corrosion-resistant liquid medium storage tank is also connected to a sampling device arranged outside the shell. An observation area for observing the device to be tested is arranged on the side of the shell, and a heat dissipation port is arranged on the top of the shell.

2. The corrosion-resistant fluid control device life test system according to claim 1, characterized in that: The partition is a perforated steel plate or a perforated plastic plate.

3. The corrosion-resistant fluid control device life test system according to claim 1, characterized in that: A window is provided at the observation area, and corrosion-resistant plastic is installed in the window.

4. The corrosion-resistant fluid control device life test system according to claim 1, characterized in that: An operating door is arranged on a side wall of the shell away from the corrosion-resistant liquid medium storage tank.

5. The corrosion-resistant fluid control device life test system according to claim 1, characterized in that: The test control unit is a compressed air switch electrical control cabinet.

6. A method for testing the life of a corrosion-resistant fluid control device, characterized in that: The system for testing the life of a corrosion-resistant fluid control device as claimed in any one of claims 1 to 5 comprises: S1, use cleaning liquid to clean the corrosion-resistant liquid medium storage tank and corrosion-resistant pipeline, let the cleaning liquid circulate in the pipeline, clean the entire test system pipeline, and after the cleaning is completed, discharge the cleaning liquid; S2, adding the liquid to be tested into the corrosion-resistant liquid medium storage tank; S3, check the pipeline connection and install the device to be tested; S4, setting the pressure value of the pressure regulating device according to the characteristics of the liquid to be tested and the device to be tested; S5, starting the polymer liquid pump through the test control unit, and the compressed gas enters the device under test from the controller pipeline. At the same time, the test control unit counts the total number of times the device under test is opened and closed; S6, observing the operation of the test system from the observation area at a first predetermined time interval to determine whether there is leakage; S7, when it is determined that there is no leakage, sampling is performed from the sampling device every second predetermined time period; S8, when it is determined that there is a leak, the number of operations is recorded, the test control unit is turned off, and the life test stops; S9, when it is determined that there is no leakage, and when the total number of opening and closing times of the device under test counted by the test control unit reaches a predetermined total number, the test control unit is turned off and the life test stops.

7. The corrosion-resistant fluid control device life test method according to claim 6, characterized in that: The cleaning liquid is pure water or detergent.

8. The method for testing the life of a corrosion-resistant fluid control device according to claim 6, characterized in that: Also includes: S10, draining the liquid in the corrosion-resistant liquid medium storage tank and checking the device to be tested.

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