Temperature control system for vacuum cavity

Abstract

The invention relates to the technical field of temperature adjustment in a vacuum environment, and discloses a temperature control system for a vacuum cavity, and the system comprises a heating part which is installed in the vacuum cavity and is used for heating the vacuum cavity; the cooling part is used for cooling the vacuum cavity, the cooling part is provided with a cooling cavity, and the cooling cavity is filled with a cooling medium; the first lead wire is connected between the heating part and the cooling part and is used for transmitting temperature and a power supply, and at least part of the first lead wire is immersed in the cooling medium; and the temperature controller is connected with the heating part and is used for adjusting the temperature of the heating part. According to the invention, precise temperature control of the vacuum cavity can be realized, and the heating part located in the vacuum cavity can be protected.

Description

Technical Field

[0001] The present application relates to the technical field of temperature regulation in a vacuum environment, and in particular to a temperature control system for a vacuum cavity. Background Art

[0002] The common method of heating in a vacuum chamber is to install a heater in the vacuum chamber. The heater is powered on to heat the vacuum chamber. When cooling, the cooling speed is increased while the basic cross-section of the vacuum chamber remains unchanged. The existing cooling idea is to fill the vacuum chamber with inert gas, reduce the vacuum degree, improve heat exchange, and thus speed up cooling.

[0003] With respect to the above-mentioned related technologies, it is found that the inert gas will be adsorbed on the surface of the heater, thereby affecting the subsequent thermal conductivity performance of the heater. Summary of the invention

[0004] In order to solve the above problems, the present application provides a temperature control system for a vacuum chamber.

[0005] The present application provides a temperature control system for a vacuum chamber, which adopts the following technical solution: A temperature control system for a vacuum chamber, comprising: A heating unit, installed in the vacuum chamber, for heating the vacuum chamber; A cooling part, used to cool the vacuum chamber, the cooling part is provided with a cooling cavity, and the cooling cavity is filled with a cooling medium; a first lead, connected between the heating part and the cooling part, used to transfer temperature and power, and the first lead is at least partially immersed in the cooling medium; A temperature controller is connected to the heating part and is used to adjust the temperature of the heating part.

[0006] By adopting the above technical scheme, the heating part realizes heating of the vacuum cavity, and the cooling part realizes cooling through the cooling medium, and the combination of the two realizes precise temperature control of the vacuum cavity; the first lead has both thermal and electrical conductivity functions, which transmits both power and temperature, simplifies the system structure, and does not damage the heating part; the temperature controller is used to adjust the temperature of the heating part to ensure that the system operates stably within the set temperature range.

[0007] Optionally, the heating unit includes: A support frame is fixed in the vacuum chamber; a heating net is installed on the support frame to generate heat; a positive gasket and a negative gasket are installed in the support frame, one end of the heating net contacts the positive gasket, and the other end contacts the negative gasket to form an electrical connection.

[0008] By adopting the above technical solution, the supporting frame provides a stable installation foundation for the heating network, ensuring that the position of the heating network in the vacuum chamber is fixed; the heating network is electrically connected through the positive gasket and the negative gasket, generates heat when powered on, and has a simple structure and is easy to maintain.

[0009] Optionally, the temperature controller includes A thermocouple wire is connected to the heating network and is used to detect the temperature of the heating network; a second lead wire is connected to the thermocouple wire; and a temperature control meter is connected to the thermocouple wire through the second lead wire and is used to receive a temperature signal and control the temperature of the heating part.

[0010] By adopting the above technical solution, the thermocouple wire directly detects the temperature of the heating network to ensure the accuracy of temperature detection; the temperature controller receives the temperature signal through the second lead and controls the heating part to achieve automatic temperature control.

[0011] Optionally, the cooling unit comprises: A cooling tube, wherein the cooling cavity is located in the cooling tube; The vacuum layer is arranged outside the cooling tube and is used to isolate external heat.

[0012] By adopting the above technical solution, the cooling cavity in the cooling tube is used to accommodate the cooling medium to achieve efficient cooling; the vacuum layer isolates the external heat, reduces the evaporation of the cooling medium, and maintains the cooling effect.

[0013] Optionally, the vacuum chamber is connected to an extension tube, the cooling tube is installed in the extension tube, and a sealed connection is formed between the cooling tube and the extension tube.

[0014] By adopting the above technical solution, the extension tube connects the cooling part with the vacuum chamber to ensure the heat exchange efficiency of the cooling medium; the sealed connection maintains a vacuum environment in the extension tube, which helps to ensure the stability and safety of the system.

[0015] Optionally, an end of the cooling tube close to the vacuum chamber is connected to an insulating mounting seat, the insulating mounting seat is located in the extension tube, and the first lead passes through the insulating mounting seat and is connected to the heating part.

[0016] By adopting the above technical solution, the insulating mounting seat prevents a short circuit between the first lead and the cooling tube, and the installation of the insulating mounting seat can also ensure a stable connection of the first lead.

[0017] Optionally, the cooling medium is liquid nitrogen.

[0018] By adopting the above technical solution, liquid nitrogen has an extremely low boiling point, can achieve rapid cooling, and is suitable for high temperature environments; there is no residue after the liquid nitrogen evaporates and will not pollute the system.

[0019] Optionally, a liquid level sensor is installed in the cooling pipe, and the liquid level sensor is used to detect the liquid level of the cooling medium. The liquid level sensor is electrically connected to a switch, and the switch is used to control the supply of the cooling medium according to the signal of the liquid level sensor.

[0020] By adopting the above technical solution, the liquid level sensor monitors the liquid level of the cooling medium in real time to ensure a stable cooling effect; the switch automatically controls the supply of the cooling medium according to the liquid level signal to achieve automated operation.

[0021] In summary, the present application includes at least one of the following beneficial effects: 1. The temperature control system realizes precise temperature control of the vacuum chamber through the coordinated work of the heating part and the cooling part; 2. The design of the first lead and the temperature controller simplifies the system structure and improves the temperature control efficiency and stability; 3. The vacuum layer and liquid nitrogen cooling medium of the cooling unit further enhance the cooling performance of the system. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the overall structure of the temperature control system and the vacuum chamber of an embodiment of the present application; Figure 2 This is a cross-sectional view of the overall structure of the temperature control system and the vacuum chamber of an embodiment of the present application; Figure 3 It is a schematic diagram of the overall structure of the heating part of an embodiment of the present application; Figure 4 It is an exploded schematic diagram of the overall structure of the heating part of an embodiment of the present application; Figure 5 It is a schematic diagram of the structure of an embodiment of the present application showing that a thermocouple wire is installed on a heating net.

[0023] Explanation of the reference numerals: 100, heating part; 110, supporting frame; 111, fixing plate; 112, upper pad; 113, lower pad; 114, stopper; 120, positive electrode gasket; 130, negative electrode gasket; 140, heating net; 200, cooling part; 210, cooling chamber; 220, cooling tube; 300, first lead; 400, insulating mounting seat; 500, extension tube; 600, positioning ring; 700, temperature controller; 710, thermocouple wire; 720, second lead; 10, vacuum chamber; 11, connecting hole. DETAILED DESCRIPTION

[0024] The following is combined with Figure 1-5 This application is described in further detail.

[0025] An embodiment of the present application discloses a temperature control system for a vacuum chamber.

[0026] Reference Figure 1and Figure 2 A temperature control system for a vacuum cavity includes a heating part 100 and a cooling part 200, wherein a first lead 300 for transmitting temperature and power is connected between the heating part 100 and the cooling part 200, and the first lead 300 is made of copper material, which can conduct both heat and electricity. The vacuum cavity 10 used in the embodiment of the present application is a hollow hexahedral structure, and a perforation is provided on any side of the vacuum cavity 10 for the heating part 100 to penetrate. The heating part 100 is fixedly installed at the center of the vacuum cavity 10 through the first lead 300, and a distance is left between the heating part 100 and the inner wall of the vacuum cavity 10. The heating part 100 is heated after being energized by the first lead 300, thereby increasing the temperature inside the vacuum cavity 10. The cooling part 200 is provided with a cooling cavity 210, and the cooling cavity 210 is filled with a cooling medium. The first lead 300 extends into the cooling cavity 210 and is immersed in the cooling medium. When the heating part 100 stops heating, the cooling medium contacts the first lead 300, and the heating part 100 is quickly cooled down through heat exchange. The temperature control system also includes a temperature controller 700, which is used to detect the temperature of the heating part 100 and promptly cut off the power when the temperature of the heating part 100 is too high to ensure safe operation of the system.

[0027] Reference Figure 1 The other surfaces of the hexahedral vacuum chamber 10 are provided with connecting holes 11, and are sealed with vacuum pipes (not shown in the figure) through flanges, so that the temperature control system can heat and cool multiple vacuum pipes.

[0028] Reference Figure 2 The cooling part 200 is located outside the vacuum chamber 10 and includes a cooling tube 220. The cooling chamber 210 is located inside the cooling tube 220. The first lead 300 passes through the cooling tube 220 and is connected to a power source. An insulating mounting seat 400 is connected to one end of the cooling tube 220 close to the vacuum chamber 10. The insulating mounting seat 400 is made of ceramic material and is fixedly connected to the end of the cooling tube 220 by a flange and bolts. A metal sealing ring is installed between the flange of the insulating mounting seat 400 and the flange of the cooling tube 220. The cross section of the metal sealing ring is dovetail-shaped to ensure sealing performance.

[0029] The cooling medium is preferably liquid nitrogen, and the pressure in the cooling tube 220 is the same as the atmospheric pressure. The cooling tube 220 has an air outlet, and the liquid nitrogen slowly flows into the cooling tube 220 and gradually evaporates, and the nitrogen is discharged from the air outlet. When the heating part 100 is not powered on, the liquid nitrogen contacts the first lead 300, and the heating part 100 is quickly cooled down through heat exchange, thereby achieving rapid cooling without damaging the heating part 100 and without changing the cross-sectional area of ​​the vacuum chamber 10.

[0030] Further, see Figure 2The outer wall of the vacuum chamber 10 is sealed with an extension tube 500 through a flange, and a metal sealing ring (not shown in the figure) is installed at the flange connection between the vacuum chamber 10 and the extension tube 500. The cooling tube 220 and the extension tube 500 are sleeved and there is a gap between the cooling tube 220 and the extension tube 500. The end of the extension tube 500 away from the vacuum chamber 10 is sealed and connected to the cooling tube 220. Since the extension tube 500 is a hollow environment, the outer wall of the cooling tube 220 has a vacuum layer. The vacuum layer outside the cooling tube 220 can isolate the external heat source, slow down the evaporation of liquid nitrogen, and maintain the low temperature environment inside the cooling tube 220.

[0031] The extension pipe 500 is formed by connecting multiple branch pipes. In the embodiment of the present application, the extension pipe 500 includes two branch pipes, which are fixedly connected by flanges, and a metal sealing ring is installed between the flanges. The inner wall of some branch pipes is connected with a positioning ring 600, and the inner ring wall of the positioning ring 600 contacts the outer wall of the cooling pipe 220 to ensure that the cooling pipe 220 is installed in the center of the extension pipe 500.

[0032] Specifically, refer to Figure 3 and Figure 4 The heating part 100 includes a support frame 110, a positive gasket 120, a negative gasket 130 and a heating net 140 installed on the support frame 110. The heating net 140 is specifically a tungsten heating net 140. The first lead 300 includes two leads, which are respectively connected to the positive power supply and the negative power supply. The first lead 300 connected to the positive power supply is connected to the positive gasket 120, and the second lead 720 connected to the negative power supply is connected to the negative gasket 130. One end of the heating net 140 contacts the positive gasket 120, and the other end of the heating net 140 contacts the negative gasket 130. After the two first leads 300 are energized, the heating net 140 generates heat.

[0033] More specifically, see Figure 4 The support frame 110 includes a fixing plate 111, an upper pad 112 and a lower pad 113. The lower pad 113 has two pieces, and the fixing plate 111 corresponds to the lower pad 113 one by one. The lower pad 113 is provided with an embedding groove, and the two lower pads 113 are arranged at intervals. The heating net 140 is installed between the two lower pads 113 and embedded in the embedding groove. The positive gasket 120 and the negative gasket 130 are respectively installed in the embedding grooves of the two lower pads 113 and press the heating net 140 downward. The negative pad and the positive pad are both penetrated with bolts, and the bolts are threadedly connected with the fixing plate 111, so that the heating net 140 is flatly fixedly installed between the two lower pads 113. When the upper pad 112 and the fixing plate 111 are fixedly connected by bolts, the lower pad 113 is installed between the upper pad 112 and the fixing block. A stopper 114 extends from the upper pad 112 , and the stopper 114 is located between the two lower pads 113 .

[0034] Reference Figure 5The temperature controller 700 includes a thermocouple wire 710, a second lead wire 720 and a temperature control meter (not shown in the figure). The thermocouple wire 710 and the heating net 140 are fixedly connected by electric welding, and are connected to the temperature control meter through the second lead wire 720 after passing through the support frame 110. The second lead wire 720 passes through the cooling tube 220 and is connected to the temperature control meter. The second lead wire 720 and the first lead wire 300 are both located in the cooling chamber 210. The implementation principle of the temperature controller 700 is the existing technology, and this application will not elaborate on it.

[0035] A liquid level sensor (not shown) may be installed in the cooling tube 220. The liquid level sensor is electrically connected to a switch, which is installed on the liquid nitrogen delivery tube. The liquid level information fed back by the liquid level sensor is used to control whether liquid nitrogen is filled into the cooling tube 220, thereby realizing automatic addition of liquid nitrogen.

[0036] The implementation principle of a temperature control system for a vacuum chamber in an embodiment of the present application is as follows: When the vacuum chamber 10 needs to be heated, the first lead 300 is connected to the power supply, the positive gasket 120 and the negative gasket 130 are connected to the power supply, and the heating network 140 starts to heat. Since the vacuum environment has good insulation performance, the system can achieve a rapid heating effect with low power, and the temperature of the heating network 140 is stably controlled within 1200°C through the temperature controller 700 to achieve precise temperature control; within one minute after the heating part 100 stops heating, liquid nitrogen is continuously filled into the cooling chamber 210 and contacts the first lead 300, and the temperature of the heating part 100 is rapidly reduced to below 100°C through heat exchange, thereby achieving rapid cooling.

[0037] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A temperature control system for a vacuum chamber, characterized in that: include: A heating unit (100) is installed in the vacuum cavity (10) and is used to heat the vacuum cavity (10); A cooling part (200) for cooling the vacuum chamber (10), the cooling part (200) being provided with a cooling chamber (210), the cooling chamber (210) being filled with a cooling medium; a first lead (300) connected between the heating part (100) and the cooling part (200) for transmitting temperature and power, and the first lead (300) being at least partially immersed in the cooling medium; A temperature controller (700) is connected to the heating portion (100) and is used to adjust the temperature of the heating portion (100).

2. A temperature control system for a vacuum chamber according to claim 1, characterized in that: The heating unit (100) comprises: A support frame (110) is fixed in the vacuum chamber (10); a heating net (140) is installed on the support frame (110) and is used to generate heat; a positive electrode gasket (120) and a negative electrode gasket (130) are installed in the support frame (110), one end of the heating net (140) is in contact with the positive electrode gasket (120), and the other end is in contact with the negative electrode gasket (130) to form an electrical connection.

3. A temperature control system for a vacuum chamber according to claim 2, characterized in that: The temperature controller (700) comprises A thermocouple wire (710) is connected to the heating net (140) and is used to detect the temperature of the heating net (140); a second lead wire (720) is connected to the thermocouple wire (710); and a temperature control meter is connected to the thermocouple wire (710) via the second lead wire (720) and is used to receive a temperature signal and control the temperature of the heating portion (100).

4. The temperature control system for a vacuum chamber according to claim 1, characterized in that: The cooling unit (200) comprises: A cooling pipe (220), wherein the cooling cavity (210) is located inside the cooling pipe (220); A vacuum layer is arranged outside the cooling pipe (220) and is used to isolate external heat.

5. The temperature control system for a vacuum chamber according to claim 4, characterized in that: The vacuum chamber (10) is connected to an extension tube (500), the cooling tube (220) is installed in the extension tube (500), and a sealed connection is formed between the cooling tube (220) and the extension tube (500).

6. A temperature control system for a vacuum chamber according to claim 5, characterized in that: An end of the cooling tube (220) close to the vacuum chamber (10) is connected to an insulating mounting seat (400), the insulating mounting seat (400) is located in the extension tube (500), and the first lead (300) passes through the insulating mounting seat (400) and is connected to the heating part (100).

7. The temperature control system for a vacuum chamber according to claim 5, characterized in that: The cooling medium is liquid nitrogen.

8. The temperature control system for a vacuum chamber according to claim 7, characterized in that: A liquid level sensor is installed in the cooling pipe (220), the liquid level sensor is used to detect the liquid level of the cooling medium, and the liquid level sensor is electrically connected to a switch, the switch is used to control the supply of the cooling medium according to a signal from the liquid level sensor.

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