Nitrogen continuous purification equipment
By designing a continuous nitrogen purification equipment including monitoring and detection of fixing mechanisms, the moisture detection and purification effect is achieved using heated copper sheets and thermistors, the problem that existing equipment cannot effectively eliminate moisture and detect moisture content is solved, ensuring nitrogen purification effect and process quality, and achieving continuous and efficient gas supply.
Patent Information
- Application Number
- CN202510607341.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-05-13
- Publication Date
- 2025-06-10
- Estimated Expiration
- 2045-05-13
AI Technical Summary
Existing nitrogen purification equipment cannot effectively remove moisture, affecting the purification effect of nitrogen, and cannot detect the moisture content in nitrogen in real time, resulting in unqualified process quality.
A continuous nitrogen purification equipment was designed, using a monitoring fixing mechanism and a detection fixing mechanism, drying by heating the copper sheet, detecting the moisture content, and calculating the nitrogen purity using the thermistor to ensure the purification effect. At the same time, a wind pressure measuring device is used to detect whether the purification tank is blocked and a backup tank is activated for continuous air supply.
It effectively avoids the impact of moisture on nitrogen purification, realizes real-time detection of nitrogen moisture content and guarantees the purification effect, ensures the quality of the process, and solves the problem of gas supply interruption when the purification tank is blocked, and improves the working time and production efficiency of the process equipment.
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Figure CN120114965A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of nitrogen purification, and particularly relates to a nitrogen continuous purification device. Background Art
[0002] In modern industrial production and scientific research activities, nitrogen, as an important industrial gas, has extremely wide application fields. In industries such as chemical engineering, metallurgy, and electronics, the purity of nitrogen plays a decisive role in the quality of the final product. In the manufacturing process of solar cells, an atomic layer deposition process is required to manufacture thin films. To ensure the process quality, high-purity nitrogen is required for purging work. In order to obtain high-purity nitrogen, it needs to be purified. For example, a nitrogen purification device disclosed in Publication No. CN109179346B can purify nitrogen.
[0003] Most process equipment that requires high-purity nitrogen purifies the nitrogen in high-purity nitrogen cylinders to meet the purity requirements of the process equipment. However, due to the excessive moisture in the raw material gas of high-purity nitrogen cylinders, improper handling of the cylinders, or even being in a humid environment for a long time during transportation and storage, even if the cylinder itself has good sealing performance, due to the certain air permeability of the cylinder wall, external moisture may slowly penetrate into the cylinder through the cylinder wall, increasing the moisture content in the nitrogen, and the moisture therein will affect the purification effect of the device; In actual scenarios, in a device that processes nitrogen through room-temperature purification technology, since there is no drying process, during the adsorption process, moisture will be preferentially adsorbed by the adsorbent, reducing the adsorption capacity of the adsorbent for other impurities, thereby affecting the purification effect of the device, making the nitrogen unable to meet the process requirements, and unable to detect the moisture in the nitrogen before purification, resulting in the problem of unqualified process quality. Summary of the Invention
[0004] Aiming at the above-mentioned shortcomings of the prior art, the present invention provides a nitrogen continuous purification device, which can effectively solve the problem that the prior art cannot eliminate the influence of moisture on the nitrogen purification effect.
[0005] To achieve the above object, the present invention is realized through the following technical solutions: The present invention provides a nitrogen continuous purification device, including: a controller main body, a monitoring and fixing mechanism is fixed on the controller main body, a detection and fixing mechanism is fixed on the monitoring and fixing mechanism, and two purification tanks are arranged between the monitoring and fixing mechanism and the detection and fixing mechanism; The monitoring and fixing mechanism includes a first fixing housing fixed to the main body of the controller. A first partition is fixed inside the first fixing housing. Two airbag rings are embedded at the upper end of the first partition. Second partitions are fixed at both ends of the first fixing housing. The two second partitions divide the first fixing housing into two sealed chambers. Above the airbag rings, there is a plugging assembly fixed to the upper end of the first fixing housing. In the middle of the upper end of the first fixing housing, a sealed housing is fixed. A plurality of heating copper sheets are arrayed and fixed inside the sealed housing. Z-shaped tubes are fixed at both ends of the sealed housing and are connected to the sealed chambers. Two rectangular slots are symmetrically opened at the upper end of the sealed housing. A baffle is slidably connected inside the rectangular slots. An arc-shaped hole is opened at one end of the baffle close to the Z-shaped tube. The sealed housing and the Z-shaped tube need to be connected through the arc-shaped hole. In the middle of the lower end of the first fixing housing, a monitoring assembly is fixed.
[0006] Preferably, the two sealed chambers are respectively connected to two purification tanks.
[0007] Preferably, the plugging assembly includes a sealed tube fixed to the upper end of the first fixing housing. An electromagnetic ring is fixed inside the sealed tube. Above the electromagnetic ring, a permanent magnetic ring is movably connected inside the sealed tube. The electromagnetic ring and the permanent magnetic ring repel each other magnetically. Below the electromagnetic ring, there is a plugging ball. The plugging ball is fixedly connected to the permanent magnetic ring. The upper end of the permanent magnetic ring is fixedly connected to a sealed cover tube. The upper end of the sealed cover tube is fixedly connected to the baffle. A plurality of opening slots are arrayed on the outer surface of the sealed cover tube. A connecting ring is communicated with the outer surface of the sealed tube. An air outlet hole is opened on the outer surface of the sealed tube. The air outlet hole is connected to the sealed chamber on the same side.
[0008] Preferably, the connecting ring is communicated with the sealed housing, and a one-way valve is provided at the connection between the connecting ring and the sealed housing.
[0009] Preferably, the monitoring assembly includes a monitoring tube fixed to the lower end of the first fixing housing. A wind pressure measuring device is fixed inside the monitoring tube. A semiconductor cooling sheet is embedded inside the monitoring tube. Above the wind pressure measuring device, pressure sensors are symmetrically fixed inside the monitoring tube. A metal sheet is slidably connected inside the monitoring tube. The metal sheet is in contact with the semiconductor cooling sheet.
[0010] Preferably, the wind pressure measuring device, the pressure sensors and the main body of the controller are electrically connected to form a detection circuit, and the electromagnetic ring, the heating copper sheets and the main body of the controller are electrically connected to form an operation circuit.
[0011] Preferably, the detection and fixing mechanism includes an upper fixing frame fixed to the upper end of the sealed housing. The upper fixing frame is communicated with two purification tanks. One end of the upper fixing frame away from the controller body is communicated with two connectors. A rectangular shell is fixed to the lower end of the connector. A one-way valve is provided at the connection between the two connectors and the rectangular shell. An air outlet pipe is communicated with the lower end of the rectangular shell. The middle of one end of the rectangular shell close to the controller body is communicated with an L-shaped pipe. A detection component is fixed to the lower end of the L-shaped pipe.
[0012] Preferably, the detection component includes a detection housing fixed to the first fixed housing. A fixing plate is fixed inside the detection housing. The fixing plate divides the detection housing into two detection chambers. Heating resistance wires are fixed in both of the two detection chambers. Thermistors are fixed to both the upper and lower end faces of the fixing plate. The upper detection chamber is communicated with the L-shaped pipe.
[0013] The technical solution provided by the present invention has the following beneficial effects compared with the known prior art: By cooling the metal sheet therein, the water molecules in the nitrogen can be solidified and adsorbed on its surface, and the weight of the metal sheet can be measured by a pressure sensor. The water content in the nitrogen can be converted into the weight gain degree of the metal sheet, so as to detect the water content of the nitrogen entering the device. If it is detected that the water content is relatively high, the nitrogen will first enter the sealed housing provided with a heating copper sheet for drying, effectively avoiding the influence of moisture on the purification effect of the purification tank. Moreover, by using the balanced bridge between the two thermistors, the impurity concentration can be deduced from the change in thermal conductivity, so as to calculate the nitrogen purity, and it can be detected whether the nitrogen purified by the purification tank is qualified, effectively avoiding the occurrence of unqualified process quality due to unqualified nitrogen purity.
[0014] The air pressure measuring device can detect the pressure of nitrogen in the inlet and outlet. By using the nitrogen pressures of both, it can be judged whether the purification tank is blocked. When it is detected that the in-use purification tank is blocked, the standby purification tank can be enabled, which will not affect the supply of gas to the process equipment, solving the problem that the supply of gas to the process equipment must be stopped when replacing the purification tank, ensuring the continuous and uninterrupted supply of purified nitrogen delivered to the process equipment, and greatly improving the working time and production efficiency of the process equipment. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.
[0016] Figure 1Schematic diagram of the overall structure of the present invention; Figure 2 Schematic diagram of a partial structure of the present invention; Figure 3 Schematic diagram of the internal structure of the monitoring and fixing mechanism of the present invention; Figure 4 is Figure 3 enlarged view of part A in Figure 5 Schematic diagram of the internal structure of the plugging component of the present invention; Figure 6 Schematic diagram of the internal structure of the monitoring component of the present invention; Figure 7 Schematic diagram of the internal structure of the detection and fixing mechanism of the present invention; Figure 8 Schematic diagram of the internal structure of the detection component of the present invention; Figure 9 Schematic diagram of the position of the sealing cover tube when the device of the present invention is working.
[0017] Reference numerals: 1, main controller body; 2, monitoring and fixing mechanism; 3, detection and fixing mechanism; 4, purification tank; 20, baffle; 21, first fixed housing; 22, first partition; 23, airbag ring; 24, second partition; 25, plugging component; 26, sealing housing; 27, heating copper sheet; 28, Z-shaped tube; 29, monitoring component; 251, sealing tube; 252, electromagnetic ring; 253, permanent magnet ring; 254, plugging ball; 255, sealing cover tube; 256, opening groove; 257, connecting ring; 258, air outlet hole; 291, monitoring tube; 292, wind pressure measuring device; 293, semiconductor cooling sheet; 294, pressure sensor; 295, metal sheet; 31, upper fixing frame; 32, connecting head; 33, rectangular shell; 34, air outlet pipe; 35, L-shaped tube; 36, detection component; 361, detection housing; 362, fixing plate; 363, heating resistance wire; 364, thermistor. Detailed implementation manners
[0018] To make the objectives, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.
[0019] The present invention will be further described below with reference to the embodiments.
[0020] Embodiment: Refer to Figures 1 to 9, A nitrogen continuous purification device, comprising: a controller main body 1, a PLC controller is provided inside the controller main body 1, a monitoring and fixing mechanism 2 is fixed on the controller main body 1, a detection and fixing mechanism 3 is fixed on the monitoring and fixing mechanism 2, and two purification tanks 4 are arranged between the monitoring and fixing mechanism 2 and the detection and fixing mechanism 3; Specifically, the purification tank 4 can purify the nitrogen in the high-purity gas cylinder to meet the process requirements for manufacturing the film. Since the purification tank 4 in this device uses normal-temperature purification technology and cannot dry the moisture in it, the components in the monitoring and fixing mechanism 2 can detect the nitrogen content in the gas cylinder and dry the nitrogen with more water content so as not to reduce the purification effect of the purification tank 4. And two purification tanks 4 are provided. When it is detected that the purification tank 4 is blocked, the standby purification tank 4 can be enabled so that the device can continuously supply high-purity nitrogen to the process equipment.
[0021] Further explanation, the following settings are made to be able to handle nitrogen with different water contents, such as Figure 3 and Figure 4 As shown, the monitoring and fixing mechanism 2 includes a first fixing housing 21 fixed on the controller main body 1. A first partition 22 is fixed inside the first fixing housing 21. Two airbag rings 23 are embedded at the upper end of the first partition 22. Second partitions 24 are fixed at both ends of the first fixing housing 21. The two second partitions 24 divide the first fixing housing 21 into two sealed chambers, and the two sealed chambers are respectively communicated with the two purification tanks 4. Above the airbag rings 23, there is a plugging component 25 fixed at the upper end of the first fixing housing 21. In the middle of the upper end of the first fixing housing 21, a sealed housing 26 is fixed. A plurality of heating copper sheets 27 are arrayed and fixed inside the sealed housing 26. Z-shaped pipes 28 are fixed at both ends of the sealed housing 26 and are communicated with the sealed chambers. Two rectangular grooves are symmetrically opened at the upper end of the sealed housing 26. A baffle 20 is slidably connected in the rectangular grooves. An arc-shaped hole is opened at one end of the baffle 20 close to the Z-shaped pipe 28. The sealed housing 26 and the Z-shaped pipe 28 need to be communicated through the arc-shaped hole. In the middle of the lower end of the first fixing housing 21, a monitoring component 29 is fixed.
[0022] Still further explanation, the following settings are made to separately handle nitrogen with different contents, such as Figure 5As shown, the plugging assembly 25 includes a sealing tube 251 fixed to the upper end of the fixed housing 21. An electromagnetic ring 252 is fixed inside the sealing tube 251. Above the electromagnetic ring 252, a permanent magnet ring 253 is movably connected inside the sealing tube 251. The electromagnetic ring 252 and the permanent magnet ring 253 repel each other magnetically. Below the electromagnetic ring 252, there is a plugging ball 254. The plugging ball 254 is fixedly connected to the permanent magnet ring 253. The upper end of the permanent magnet ring 253 is fixedly connected to a sealing cover tube 255. The upper end of the sealing cover tube 255 is fixedly connected to the baffle 20. A plurality of opening grooves 256 are arrayed on the outer surface of the sealing cover tube 255. A connecting ring 257 is communicated with the outer surface of the sealing tube 251. The connecting ring 257 is communicated with the sealing housing 26. A one-way valve is provided at the connection between the connecting ring 257 and the sealing housing 26. An air outlet hole 258 is opened on the outer surface of the sealing tube 251. The air outlet hole 258 is communicated with the sealing cavity on the same side.
[0023] For further illustration, the following settings are made to detect the water content of the nitrogen entering the device. As Figure 6 shown, the monitoring assembly 29 includes a monitoring tube 291 fixed to the lower end of the fixed housing 21. A wind pressure measurer 292 is fixed inside the monitoring tube 291. A semiconductor cooling fin 293 is embedded in the monitoring tube 291. Above the wind pressure measurer 292, pressure sensors 294 fixed inside the monitoring tube 291 are symmetrically arranged. A metal sheet 295 is slidably connected inside the monitoring tube 291. The metal sheet 295 is in contact with the semiconductor cooling fin 293. The wind pressure measurer 292 and the pressure sensors 294 are electrically connected to the controller main body 1 to form a detection circuit. The electromagnetic ring 252 and the heating copper sheet 27 are electrically connected to the controller main body 1 to form an operation circuit; The nitrogen in the gas cylinder will enter the monitoring tube 291. The PLC controller therein will energize the semiconductor cooling fin 293. The cooling surface of the semiconductor cooling fin 293 is located inside the monitoring tube 291, enabling it to cool the metal sheet 295 in contact with it. At this time, the nitrogen entering the monitoring tube 291 will stay in part of the area inside the monitoring tube 291 and the fixed housing 21 and cannot flow. The semiconductor cooling fin 293 inside will cool the metal sheet 295 to below zero. When the nitrogen in the gas cylinder contains moisture, it will solidify on the surface of the metal sheet 295. By detecting the weight of the metal sheet 295 through the two pressure sensors 294, it is possible to determine whether the moisture content affects the purification effect of the purification tank 4.
[0024] For further illustration, the following settings are made to detect the nitrogen content after replacing the purification tank 4. As Figure 7As shown, the detection and fixation mechanism 3 includes an upper fixing frame 31 fixed to the upper end of the sealed housing 26. The upper fixing frame 31 is connected to two purification tanks 4. One end of the upper fixing frame 31 away from the controller main body 1 is communicated with two connectors 32. A rectangular housing 33 is fixed to the lower end of the connector 32. One-way valves are provided at the connection between the two connectors 32 and the rectangular housing 33. The lower end of the rectangular housing 33 is communicated with an air outlet pipe 34. A wind pressure measurer 292 is provided in the air outlet pipe 34, which can detect the nitrogen pressure in the air outlet pipe 34. The middle of one end of the rectangular housing 33 close to the controller main body 1 is communicated with an L-shaped pipe 35. A detection assembly 36 is fixed to the lower end of the L-shaped pipe 35.
[0025] For further explanation, the following settings are made to detect whether the nitrogen purified by the purification tank 4 is qualified. As Figure 8 shown, the detection assembly 36 includes a detection housing 361 fixed to the first fixed housing 21. A fixing plate 362 is fixed in the detection housing 361. The fixing plate 362 divides the detection housing 361 into two detection chambers. Heating resistance wires 363 are fixed in both detection chambers. Thermistors 364 are fixed to both the upper and lower end faces of the fixing plate 362. The detection chamber on the upper side is communicated with the L-shaped pipe 35. The nitrogen purified by the purification tank 4 will enter the detection housing 361 from the L-shaped pipe 35. The nitrogen purified by the purification tank 4 will enter the detection chamber on the upper side. At this time, pure nitrogen for comparison is introduced into the detection chamber on the lower side. Then, the nitrogen in both detection chambers is heated simultaneously by the heating resistance wires 363, which can compensate the temperature of the nitrogen in both detection chambers. Whether the nitrogen purified by the purification tank 4 is qualified can be detected through the balanced bridge between two of the thermistors 364.
[0026] The working principle of the present invention is as follows: In the manufacturing process of solar cells, atomic layer deposition process is required to manufacture thin films. To ensure the process quality, when performing the atomic layer deposition process, the purity of nitrogen needs to reach 9.0. The purity of nitrogen in the high-purity nitrogen gas cylinders supplied on the market is 6.0. Usually, a purification tank 4 is used to purify the cylinder nitrogen with a purity of 6.0. The high-purity nitrogen gas cylinder is connected to the monitoring tube 291, and the valve between them is opened. The nitrogen in the cylinder will enter the monitoring tube 291. The PLC controller therein will energize the semiconductor cooling sheet 293. The refrigerating surface of the semiconductor cooling sheet 293 is located in the monitoring tube 291, enabling it to cool the metal sheet 295 in contact with it (when an electric current passes through a circuit composed of two different semiconductor materials, heat absorption or release phenomenon will occur at the joints of the two materials. When a DC voltage is applied to the refrigerating sheet, the current flows in a specific direction in the P-type and N-type semiconductor elements, causing one end to continuously absorb heat and become the refrigerating end). At this time, the nitrogen entering the monitoring tube 291 will stay in some areas of the monitoring tube 291 and the fixed housing 1-21 and cannot flow. The semiconductor cooling sheet 293 therein will cool the metal sheet 295 to below zero. When the nitrogen in the cylinder contains moisture, it will solidify on the surface of the metal sheet 295. By detecting the weight of the metal sheet 295 through two pressure sensors 294, it can be judged whether the moisture content affects the purification effect of the purification tank 4 (in the process of nitrogen purification, adsorbents are often used to remove impurities. Moisture will be preferentially adsorbed by the adsorbent, occupying the adsorption sites and reducing the adsorption capacity of the adsorbent for other impurities); When the moisture content in the gas cylinder is low and does not affect the purification effect of the purification tank 4, the PLC controller will energize one of the electromagnetic rings 252 to make it magnetic. Under the action of the magnetic force, the permanent magnet ring 253 and the sealing cover tube 255, which are repelled by its magnetism, will move upward, so that the opening groove 256 formed on the outer surface of the sealing cover tube 255 coincides with the air outlet hole 258. At this time, the nitrogen in the monitoring tube 291 can enter the sealing tube 251 through the airbag ring 23, and then flow into the sealing cavity through the opening groove 256 and the air outlet hole 258, continue to flow upward and be purified by the purification tank 4, and finally flow into the outlet pipe 34 from the connector 32 and the rectangular shell 33, so that the nitrogen can flow into the device that requires high-purity nitrogen. When the pressure received by the pressure sensor 294 exceeds the set value, the PLC controller will pass a larger current through the electromagnetic ring 252, so that it can push the permanent magnet ring 253 and the sealing cover tube 255 to move upward a larger distance, so that the opening groove 256 formed on the outer surface of the sealing cover tube 255 communicates with the connecting ring 257. Before the nitrogen in the monitoring tube 291 enters the sealing cavity, it will enter the sealing housing 26, and then the nitrogen will be dried by the heating copper sheet 27 in the sealing housing 26. There is a water-absorbing sponge in the sealing housing 26, which is located below the Z-shaped tube 28 and can absorb the water vapor generated during drying, that is, remove the water content in the nitrogen. At the same time, it can also remove the oxygen content in the nitrogen (copper has a certain reducibility. Under the condition of heating, copper atoms can undergo an oxidation-reduction reaction with oxygen molecules. In this reaction, copper is oxidized to copper oxide, and oxygen is consumed, so as to achieve the purpose of removing oxygen in high-purity nitrogen). During the upward movement of the sealing cover tube 255, it will also drive the baffle 20 to move upward, so that the arc-shaped hole in it contacts the port of the Z-shaped tube 28. After the nitrogen entering the sealing housing 26 is deoxidized and dried, it can enter the sealing cavity through the Z-shaped tube 28, and then continue the purification work; After being used for a period of time, the purification tank 4 will become blocked, affecting the flow rate of the purified nitrogen. A wind pressure measurer 292 is also provided in the air outlet pipe 34. Through the two wind pressure measurers 292, the nitrogen pressure in the monitoring pipe 291 and the air outlet pipe 34 can be detected. Under normal conditions, the pressure in the monitoring pipe 291 is set to 100 psig. When the purification tank 4 is newly put into use, the pressure displayed in the air outlet pipe 34 is also 100 psig. As the purification tank 4 is used and consumed, blockages gradually occur inside, and the wind pressure measurer 292 in the air outlet pipe 34 shows that the pressure gradually decreases. When the pressure value in the air outlet pipe 34 is 90 psig, it indicates that the pressure difference between the two ends of the purification tank 4 has reached the 10 psig alarm value. At this time, the flow rate of the purified nitrogen can no longer meet the usage requirements of the process equipment, and the purification tank 4 in use needs to be replaced. The PLC controller stops supplying power to the electromagnetic ring 252, causing the permanent magnet ring 253 and the sealing cover pipe 255 to move downward under the gravity of the plug ball 254, so that the plug ball 254 contacts the airbag ring 23 to block it, preventing the nitrogen in the monitoring pipe 291 from entering the sealing pipe 251. Then, the PLC controller passes the same intensity of current into another permanent magnet ring 253. The nitrogen entering the monitoring pipe 291 will enter another permanent magnet ring 253. Then, the valve in the air outlet pipe 34 is closed and the valve in the L-shaped pipe 35 is opened. The nitrogen purified by the purification tank 4 will enter the detection housing 361 from the L-shaped pipe 35. The nitrogen purified by the purification tank 4 will enter the upper detection cavity. At this time, pure nitrogen for comparison (the pure nitrogen is nitrogen that meets the process requirements) is introduced into the lower detection cavity; Then, the heating resistance wire 363 heats the nitrogen entering the two detection cavities simultaneously, which can compensate for the temperature of the nitrogen in the two detection cavities. Through the balanced bridge between two of the thermistors 364, it can be detected whether the nitrogen purified by the purification tank 4 is qualified (the nitrogen is heated by the thermistor 364, and the heating resistance wire 363 is to ensure that the nitrogen entering the two detection cavities has the same temperature. If the nitrogen contains impurities with a significantly higher or lower thermal conductivity than nitrogen, the overall thermal conductivity of the mixed gas will deviate from the reference value of pure nitrogen. By measuring the change in thermal conductivity, the impurity concentration can be deduced inversely, and thus the nitrogen purity can be calculated). This process takes some time. The purification tank 4 is purged with the nitrogen in the gas cylinder until the purified nitrogen is qualified, and then the valve in the air outlet pipe 34 is opened. At the same time, the valve in the L-shaped pipe 35 needs to be closed, so that the qualified nitrogen can enter the process equipment, thereby solving the problem that the supply of gas to the process equipment must be stopped when replacing the purification tank 4, ensuring the sustainable and uninterrupted supply of the purified nitrogen delivered to the process equipment, greatly improving the working time and production efficiency of the process equipment, and also avoiding the occurrence of unqualified process quality due to unqualified nitrogen purity.
[0027] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some of the technical features; and these modifications or replacements will not cause the essence of the corresponding technical solutions to deviate from the protection scope of the technical solutions of the embodiments of the present invention.
Claims
1. A nitrogen continuous purification device, characterized in that: include: A controller body (1), a monitoring fixing mechanism (2) being fixed on the controller body (1), a detection fixing mechanism (3) being fixed on the monitoring fixing mechanism (2), and two purification tanks (4) being arranged between the monitoring fixing mechanism (2) and the detection fixing mechanism (3); The monitoring fixing mechanism (2) comprises a fixed shell (21) fixed on the controller body (1), a partition (22) fixed inside the fixed shell (21), two airbag rings (23) embedded in the upper end of the partition (22), partitions (24) fixed at both ends of the fixed shell (21), the two partitions (24) separating the fixed shell (21) into two sealed cavities, a blocking component (25) fixed to the upper end of the fixed shell (21) is provided above the airbag ring (23), and a sealing component (25) fixed to the upper end of the fixed shell (21) is fixed in the middle of the upper end of the fixed shell (21). A sealed shell (26) is provided, wherein a plurality of heating copper sheets (27) are fixed in an array in the sealed shell (26), and Z-shaped tubes (28) are fixed at both ends of the sealed shell (26) and are connected to the sealed cavity, and two rectangular grooves are symmetrically provided at the upper end of the sealed shell (26), and a baffle (20) is slidably connected in the rectangular groove, and an arc-shaped hole is provided at one end of the baffle (20) close to the Z-shaped tube (28), and the sealed shell (26) and the Z-shaped tube (28) need to be connected by the arc-shaped hole, and a monitoring component (29) is fixed in the middle of the lower end of the fixed shell (21).
2. A nitrogen continuous purification device according to claim 1, characterized in that: The two sealed chambers are respectively connected to the two purification tanks (4).
3. A nitrogen continuous purification equipment according to claim 1, characterized in that: The blocking assembly (25) comprises a sealing tube (251) fixed to the upper end of a fixed housing (21); an electromagnetic ring (252) is fixed in the sealing tube (251); a permanent magnetic ring (253) movably connected to the sealing tube (251) is provided above the electromagnetic ring (252); the electromagnetic ring (252) and the permanent magnetic ring (253) repel each other magnetically; a blocking ball (254) is provided below the electromagnetic ring (252); the blocking ball (254) and the permanent magnetic ring (253) are in contact with each other. The upper end of the permanent magnet ring (253) is fixedly connected to a sealing cover tube (255), the upper end of the sealing cover tube (255) is fixedly connected to the baffle (20), the outer surface of the sealing cover tube (255) is provided with a plurality of open grooves (256) in an array, the outer surface of the sealing tube (251) is connected to a connecting ring (257), the outer surface of the sealing tube (251) is provided with an air outlet hole (258), and the air outlet hole (258) is connected to a sealing cavity located on the same side.
4. A nitrogen continuous purification device according to claim 3, characterized in that: The connecting ring (257) is in communication with the sealing housing (26), and a one-way valve is provided at the connection between the connecting ring (257) and the sealing housing (26).
5. A nitrogen continuous purification device according to claim 3, characterized in that: The monitoring assembly (29) comprises a monitoring tube (291) fixed to the lower end of a fixed shell (21), a wind pressure measuring device (292) being fixed in the monitoring tube (291), a semiconductor cooling plate (293) being embedded in the monitoring tube (291), a pressure sensor (294) being symmetrically arranged above the wind pressure measuring device (292) and fixed in the monitoring tube (291), a metal plate (295) being slidably connected in the monitoring tube (291), and the metal plate (295) being in contact with the semiconductor cooling plate (293).
6. A nitrogen continuous purification device according to claim 5, characterized in that: The wind pressure measuring device (292), the pressure sensor (294) and the controller body (1) are connected by electrical signals to form a detection circuit, and the electromagnetic ring (252), the heating copper sheet (27) and the controller body (1) are connected by electrical signals to form an operation circuit.
7. The nitrogen continuous purification equipment according to claim 1, characterized in that: The detection fixing mechanism (3) comprises an upper fixing frame (31) fixed to the upper end of the sealing shell (26), the upper fixing frame (31) being connected to two purification tanks (4), one end of the upper fixing frame (31) away from the controller body (1) being connected to two connectors (32), a rectangular shell (33) being fixed to the lower end of the connector (32), a one-way valve being provided at the connection between the two connectors (32) and the rectangular shell (33), the lower end of the rectangular shell (33) being connected to an air outlet pipe (34), the middle part of one end of the rectangular shell (33) close to the controller body (1) being connected to an L-shaped tube (35), the lower end of the L-shaped tube (35) being fixed to a detection assembly (36).
8. The nitrogen continuous purification equipment according to claim 7, characterized in that: The detection assembly (36) comprises a detection housing (361) fixed on a fixed housing (21); a fixing plate (362) is fixed inside the detection housing (361); the fixing plate (362) divides the detection housing (361) into two detection cavities; heating resistance wires (363) are fixed inside the two detection cavities; thermistors (364) are fixed on the upper and lower end surfaces of the fixing plate (362); the detection cavity located on the upper side is connected to the L-shaped tube (35).
Citation Information
Patent Citations
A nitrogen purification device
CN109179346B
Nitrogen quality control device at outlet end of nitrogen making machine
CN117129418A
Oxygen generator by pressure swing adsorption
KR101996049B1