Surface cleaning equipment for ceramic electrostatic chucks

Abstract

The present application discloses a surface cleaning device for a ceramic electrostatic chuck. The surface cleaning device for a ceramic electrostatic chuck includes: a fixed base, a rotation driving unit, an auxiliary constant temperature unit, and a cleaning agent delivery unit. In order to solve the problem in the prior art that during scrubbing of an irregular curved surface chuck of a common ceramic electrostatic chuck, the scrubbing is uneven, the present application designs a deformable scrubbing tool. Through the scrubbing tool, the surface of the chuck with different structures can be scrubbed, and it can fully fit and contact the surface of the chuck for scrubbing, achieving a uniform and sufficient scrubbing effect, which is especially suitable for a curved surface electrostatic chuck. Further, in order to solve the problem of poor cleaning effect caused by long-term frictional heating or too low environmental temperature, the auxiliary constant temperature unit can automatically carry out water circulation during scrubbing, ensuring a constant temperature effect during scrubbing and keeping the temperature within a fixed range during scrubbing.

Description

Technical Field

[0001] This application relates to the technical field of electrostatic ceramic chuck cleaning, especially the surface cleaning equipment for ceramic electrostatic chucks. Background Art

[0002] A ceramic electrostatic chuck is a device that uses the principle of electrostatic adsorption to fix objects, commonly used in fields such as semiconductor manufacturing and precision machining. By using electrostatic force to adsorb wafers or other thin sheet materials, it ensures stability during the processing. When cleaning the surface of a ceramic electrostatic chuck, corresponding cleaning equipment is required.

[0003] In the existing patent document "CN209077228U A Tool for Cleaning Electrostatic Chucks", an electrostatic chuck cleaning tool is disclosed. Although the cleaning tool in the above technical problems can clean the surface of the electrostatic chuck, it adopts a rigid structure. When cleaning an irregular curved surface electrostatic chuck, it cannot flexibly adjust its shape according to the irregular curved surface of the chuck (such as arc-shaped, concave-convex structures), resulting in insufficient contact area or uneven pressure distribution during the scrubbing process; the cleaning agent and friction force cannot evenly cover the surface of the chuck, and stains or particles are likely to remain, affecting the electrostatic adsorption performance; at the same time, local excessive friction may damage the ceramic surface and shorten the service life of the chuck;

[0004] At the same time, during long-term friction heating or in a low-temperature environment, the temperature of the cleaning liquid fluctuates significantly. The temperature instability makes the cleaning effect uncontrollable, and the process parameters need to be frequently adjusted, increasing the operation complexity; extreme temperatures may also cause thermal stress deformation of the ceramic material or freezing of the cleaning liquid, further affecting the reliability of the equipment.

[0005] That is, the existing technology has the following technical problems: ordinary electrostatic chuck cleaning tools are difficult to adapt to clean irregular curved surface electrostatic chucks. Therefore, a surface cleaning equipment for ceramic electrostatic chucks is proposed to address the above problems. Summary of the Invention

[0006] In this embodiment, a surface cleaning equipment for ceramic electrostatic chucks is provided to solve the problem that ordinary electrostatic chuck cleaning tools in the existing technology are difficult to adapt to clean irregular curved surface electrostatic chucks.

[0007] According to one aspect of the present application, a surface cleaning equipment for ceramic electrostatic chucks is provided, and the surface cleaning equipment for ceramic electrostatic chucks includes:

[0008] A fixed base, and a frame housing is fixedly connected to the upper surface of the fixed base;

[0009] A rotation drive unit is provided at the frame housing. A scrubbing tool is fixedly connected to one end of the rotation drive unit. The scrubbing tool is used to scrub the surface of the ceramic electrostatic chuck, and the scrubbing tool can adaptively bend according to the curved surface of the electrostatic chuck.

[0010] An auxiliary constant temperature unit is fixedly provided at the side wall position of the frame housing. The auxiliary constant temperature unit is connected to the scrubbing tool. The auxiliary constant temperature unit is used to perform automatic constant temperature water circulation when the scrubbing tool rotates and scrubs.

[0011] A cleaning agent delivery unit is fixedly provided at the side wall position of the frame housing. The cleaning agent delivery unit is used to automatically spray the cleaning agent when the scrubbing tool rotates and scrubs.

[0012] Further, the rotation drive unit includes a servo motor, a rotating disk, fixed guide rods, a moving slider, a moving plate, a rack, a fixed bracket, a rotating rod, and a rotating lever. The servo motor is fixedly provided at the outer wall position of the frame housing. A moving slider is slidably connected in the inner cavity of the frame housing. Two fixed guide rods are fixedly connected to the upper wall of the inner cavity of the frame housing. The fixed guide rods penetrate through the moving slider and are slidably matched with the moving slider. A fixed rod is fixedly connected to the bottom surface of the moving slider. A rotating disk is rotatably connected in the inner cavity of the frame housing. The end of the output shaft of the servo motor extends to the center of the rotating disk and is fixedly connected to the rotating disk. One end of a connecting rod is rotatably connected to the side wall of the rotating disk. The other end of the connecting rod extends to the bottom end of the fixed rod and is rotatably connected to the fixed rod.

[0013] Further, the moving plate is provided at the side wall of the frame housing and is slidably matched with the frame housing. The moving plate is fixedly connected to the moving slider. A rack is fixedly connected to the side wall of the moving plate. A fixed bracket is fixedly connected to the side wall of the frame housing. A rotating rod is rotatably connected to the fixed bracket. A bevel gear A is fixedly connected to the arc-shaped wall of the rotating rod. A rotating lever is rotatably connected to the side wall of the frame housing. A bevel gear B is fixedly connected to one end of the rotating lever. The bevel gear B meshes with the bevel gear A. A gear is fixedly connected to the arc-shaped wall of the rotating lever. The gear meshes with the rack.

[0014] Further, the scrubbing tool includes a main scrubbing plate, a secondary scrubbing plate, a rectangular rod, a rectangular sleeve rod, spring A, a footrest, a rectangular side rod A, spring B, and a bladder. A rectangular rod is fixedly connected to the upper surface of the main scrubbing plate. A rectangular sleeve rod is slidably connected to the rectangular rod. One end of spring A is fixedly connected to the upper wall of the inner cavity of the rectangular sleeve rod. The other end of spring A is fixedly connected to the upper end of the rectangular rod. The upper end of the rectangular sleeve rod is fixedly connected to the bottom end of the rotating rod.

[0015] Furthermore, a plurality of auxiliary scrubbing plates are provided. The plurality of auxiliary scrubbing plates are hinged to each other. The plurality of auxiliary scrubbing plates are symmetrically arranged on both sides of the main scrubbing plate and are hinged to the main scrubbing plate. A plurality of rectangular side rods A are provided. A rectangular side rod B is slidably connected in the inner cavity of each of the plurality of rectangular side rods A. One end of a spring B is fixedly connected to the upper end of the rectangular side rod B. The other end of the spring B is fixedly connected to the inner wall of the rectangular side rod A. Tripods are rotatably connected to the upper end of the rectangular side rod A and the lower end of the rectangular side rod B. The tripods are fixedly connected to the auxiliary scrubbing plate and the rectangular sleeve rod respectively. A bladder is fixedly connected to the bottom surfaces of the main scrubbing plate and the auxiliary scrubbing plate. A non-woven fabric layer is fixedly connected to the bottom surface of the bladder.

[0016] Furthermore, the electrostatic chuck support unit includes a fixed track, a sliding seat, a support table, and an electric push rod. The fixed track is fixedly arranged at the side wall position of the frame housing. A sliding seat is slidably connected to the fixed track. A support table is fixedly connected to the side wall of the sliding seat. One end of the electric push rod is fixedly connected to the bottom surface of the support table. The other end of the electric push rod is fixedly connected to the upper surface of the fixed base. A clamping member for fixing the ceramic electrostatic chuck is arranged on the upper surface of the support table.

[0017] Furthermore, the auxiliary constant temperature unit includes a fixed chamber, a constant temperature heating rod, a fixed cylinder, and a moving piston. The fixed chamber is fixedly arranged at the side wall position of the frame housing. The inner cavity of the fixed chamber is filled with circulating water. A constant temperature heating rod is fixedly connected in the inner cavity of the fixed chamber.

[0018] Furthermore, a fixed cylinder is fixedly connected to the upper surface of the fixed chamber. A moving piston is slidably connected in the inner cavity of the fixed cylinder. One end of a guide rod is fixedly connected to the upper surface of the moving piston. The other end of the guide rod penetrates through the upper wall of the inner cavity of the fixed cylinder and extends outside the wall. A connecting plate is fixedly connected to the upper end of the guide rod. The connecting plate is arranged at the side wall of the frame housing and is slidably matched with the frame housing. The connecting plate is fixedly connected to the side wall of the moving slider. One end of an input pipe is fixedly connected to the bottom side of the inner cavity of the fixed cylinder. The other end of the input pipe extends to the bottom side of the inner cavity of the fixed chamber and is fixedly connected to the fixed chamber. An input one-way valve is installed on the input pipe. One end of an output hose is fixedly connected to the bottom wall of the inner cavity of the fixed cylinder. The other end of the output hose extends into the inner cavity of the bladder and is fixedly connected to the bladder. An output one-way valve is installed on the output hose. One end of a return hose is fixedly connected to the inner cavity of the bladder. The other end of the return hose extends into the inner cavity of the fixed chamber and is fixedly connected to the fixed chamber.

[0019] Further, the cleaning agent delivery unit includes a fixed plate frame, a nozzle, a connecting cylinder, and a cleaning agent storage bin. The fixed plate frame is fixedly arranged at the side position of the support table, and the nozzle is fixedly connected to the fixed plate frame.

[0020] Further, the connecting cylinder is fixedly arranged on the upper surface of the fixed bin. A connecting piston is slidably connected in the inner cavity of the connecting cylinder. One end of a connecting guide rod is fixedly connected to the upper surface of the connecting piston. The other end of the connecting guide rod penetrates the upper wall of the inner cavity of the connecting cylinder and extends outside the wall. The top end of the connecting guide rod is fixedly connected to the bottom surface of the connecting plate. One end of a discharge hose is fixedly connected in the inner cavity of the connecting cylinder. The other end of the discharge hose is connected to the nozzle. A one-way valve is installed on the discharge hose. One end of an inhalation hose is fixedly connected to the bottom side of the inner cavity of the connecting cylinder. The other end of the inhalation hose is connected to the cleaning agent storage bin. A one-way valve is installed on the inhalation hose. The inner cavity of the cleaning agent storage bin is filled with a cleaning agent.

[0021] Through the above technical solutions of the present application, in order to solve the problem in the prior art that in an ordinary ceramic electrostatic chuck scrubbing device, when scrubbing the surface of a special-shaped curved chuck, the scrubbing is uneven. The present application designs a deformable scrubbing tool, which can scrub the surface of chucks with different structures through the scrubbing tool, can fully fit and contact the surface of the chuck for scrubbing, and realizes a uniform and sufficient scrubbing effect, especially suitable for curved electrostatic chucks. Further, in order to solve the problem of poor cleaning effect caused by long-term frictional heating or too low ambient temperature, an auxiliary constant temperature unit is designed. Through the auxiliary constant temperature unit, automatic water circulation can be carried out during scrubbing, ensuring the constant temperature effect during scrubbing, so that the temperature during scrubbing always remains within a fixed range, avoiding the problem of poor scrubbing effect caused by too high or too low temperature. At the same time, the constant temperature water circulation does not require an additional power source and can automatically circulate during the scrubbing operation, which is convenient to use. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0023] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the present application;

[0024] Figure 2 It is a schematic diagram of the overall side structure of an embodiment of the present application;

[0025] Figure 3Schematic diagram of the internal structure of a rotary drive unit according to an embodiment of the present application;

[0026] Figure 4 Schematic diagram of the connection structure of a rotary rod according to an embodiment of the present application;

[0027] Figure 5 Schematic diagram of the overall structure of a scrubbing tool according to an embodiment of the present application;

[0028] Figure 6 Schematic diagram of the internal structure of a scrubbing tool according to an embodiment of the present application;

[0029] Figure 7 Schematic diagram of the connection of an auxiliary constant temperature unit according to an embodiment of the present application;

[0030] Figure 8 Internal schematic diagram of an auxiliary constant temperature unit according to an embodiment of the present application;

[0031] Figure 9 Schematic diagram of the internal structure of a cleaning agent delivery unit according to an embodiment of the present application;

[0032] Figure 10 Schematic diagram of the structure of a cleaning agent storage bin according to an embodiment of the present application;

[0033] Figure 11 Schematic diagram of the connection structure of a nozzle according to an embodiment of the present application.

[0034] Explanation of reference numerals

[0035] In the figure: 1. Fixed base; 2. Frame shell; 3. Rotation drive unit; 301. Servo motor; 302. Rotating disk; 303. Fixed guide rod; 304. Moving slider; 305. Fixed rod; 306. Rod; 307. Moving plate; 308. Rack; 309. Fixed bracket; 310. Rotating rod; 311. Bevel gear A; 312. Rotating rod; 313. Gear; 314. Bevel gear B; 4. Scrubbing tool; 401. Main scrubbing plate; 402. Sub-scrubbing plate; 403. Rectangular rod; 404. Rectangular sleeve rod; 405. Spring A; 406. Footrest; 407. Rectangular side rod A; 408. Rectangular side rod B; 409. Spring B; 410. Bladder; 411. Non-woven fabric layer; 5. Electrostatic chuck support unit; 501. Fixed track; 502. Sliding seat; 503. Support platform; 504. Electric push rod; 6. Auxiliary constant temperature unit; 601. Fixed bin; 602. Constant temperature heating rod; 603. Fixed cylinder; 604. Moving piston; 605. Guide rod; 606. Connecting plate; 607. Output hose; 608. Input pipe; 609. Return hose; 7. Cleaning agent delivery unit; 701. Fixed plate frame; 702. Nozzle; 703. Connecting cylinder; 704. Connecting piston; 705. Connecting guide rod; 706. Discharge hose; 707. Suction hose; 708. Cleaning agent storage bin. Detailed implementation manners

[0036] In order to enable those skilled in the art of this technology to better understand the solution of this application, the technical solutions in the embodiments of this application will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of this application. Obviously, the described embodiments are only a part of the embodiments of this application, rather than all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of this application.

[0037] It should be noted that the terms "first", "second", etc. in the specification, claims and the above drawings of this application are used to distinguish similar objects, and do not necessarily need to describe a specific order or sequence. It should be understood that such data can be interchanged under appropriate circumstances so as to describe the embodiments of this application here. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device including a series of steps or units does not necessarily have to be limited to those steps or units clearly listed, but may include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0038] In this application, the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. These terms are mainly used to better describe this application and its embodiments, and are not used to limit that the indicated devices, elements, or components must have a specific orientation, or be constructed and operated in a specific orientation.

[0039] Moreover, in addition to being used to represent the orientation or positional relationship, some of the above terms may also be used to represent other meanings. For example, the term "upper" may also be used to represent a certain attachment relationship or connection relationship in some cases. For those of ordinary skill in the art, the specific meanings of these terms in this application can be understood according to the specific circumstances.

[0040] In addition, the terms "mounted", "set", "provided with", "connected", "connected to", "socketed" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, or there is an internal connection between two devices, elements, or components. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0041] Please refer to Figure 1-2 as shown, a surface cleaning device for a ceramic electrostatic chuck, the surface cleaning device for a ceramic electrostatic chuck includes:

[0042] A fixed base 1, and a frame housing 2 is fixedly connected to the upper surface of the fixed base 1;

[0043] A rotary drive unit 3, the rotary drive unit 3 is arranged at the frame housing 2, and a scrubbing tool 4 is fixedly connected to one end of the rotary drive unit 3. The scrubbing tool 4 is used to scrub the surface of the ceramic electrostatic chuck, and the scrubbing tool 4 can be adaptively bent according to the curved surface of the electrostatic chuck;

[0044] An auxiliary constant temperature unit 6, the auxiliary constant temperature unit 6 is fixedly arranged at the side wall position of the frame housing 2, and is connected between the auxiliary constant temperature unit 6 and the scrubbing tool 4. The auxiliary constant temperature unit 6 is used to perform automatic constant temperature water circulation when the scrubbing tool 4 rotates and scrubs;

[0045] A cleaning agent delivery unit 7, the cleaning agent delivery unit 7 is fixedly arranged at the side wall position of the frame housing 2. The cleaning agent delivery unit 7 is used to automatically spray the cleaning agent when the scrubbing tool 4 rotates and scrubs;

[0046] Through the above technical solution, the scrubbing tool 4 is used to scrub the surfaces of suction cups with different structures, fully contacting and fitting with the surfaces of the suction cups for scrubbing, achieving a uniform and sufficient scrubbing effect, which is particularly suitable for curved electrostatic suction cups. Further, in order to solve the problem of poor cleaning effect caused by friction heating for a long time or too low ambient temperature, an auxiliary constant temperature unit 6 is designed. Through the auxiliary constant temperature unit 6, automatic water circulation can be carried out during scrubbing, ensuring the constant temperature effect during scrubbing, so that the temperature during scrubbing always remains within a fixed range, avoiding the problem of poor scrubbing effect caused by too high or too low temperature. At the same time, the constant temperature water circulation does not require an additional power source and can automatically circulate during scrubbing operations, which is convenient to use.

[0047] As a further technical solution, please refer to Figure 3 and Figure 4 As shown, the rotary drive unit 3 includes a servo motor 301, a rotary disk 302, fixed guide rods 303, a moving slider 304, a moving plate 307, a rack 308, a fixed bracket 309, a rotary rod 310 and a rotating rod 312. The servo motor 301 is fixedly arranged at the outer wall position of the frame housing 2. The moving slider 304 is slidably connected in the inner cavity of the frame housing 2. Two fixed guide rods 303 are fixedly connected to the upper wall of the inner cavity of the frame housing 2. The fixed guide rods 303 penetrate through the moving slider 304 and are slidably matched with the moving slider 304. A fixed rod 305 is fixedly connected to the bottom surface of the moving slider 304. The rotary disk 302 is rotatably connected in the inner cavity of the frame housing 2. The end of the output shaft of the servo motor 301 extends to the center of the rotary disk 302 and is fixedly connected to the rotary disk 302. One end of a connecting rod 306 is rotatably connected to the side wall of the rotary disk 302. The other end of the connecting rod 306 extends to the bottom end of the fixed rod 305 and is rotatably connected to the fixed rod 305. In this technical solution, the rotation of the servo motor 301 can drive the rotary disk 302 to rotate. Thus, the rotation of the rotary disk 302 can drive one end of the connecting rod 306 to move in a circular motion, and further drive the moving slider 304 to move up and down reciprocally;

[0048] The moving plate 307 is arranged at the side wall of the frame housing 2 and is in sliding fit with the frame housing 2. The moving plate 307 is fixedly connected to the moving slider 304. A rack 308 is fixedly connected to the side wall of the moving plate 307. A fixed bracket 309 is fixedly connected to the side wall of the frame housing 2. A rotating rod 310 is rotatably connected to the fixed bracket 309. A bevel gear A 311 is fixedly connected to the arc-shaped wall of the rotating rod 310. A rotating rod 312 is rotatably connected to the side wall of the frame housing 2. A bevel gear B 314 is fixedly connected to one end of the rotating rod 312. The bevel gear B 314 meshes with the bevel gear A 311. A gear 313 is fixedly connected to the arc-shaped wall of the rotating rod 312. The gear 313 meshes with the rack 308. In this technical solution, the reciprocating movement of the moving slider 304 can drive the moving plate 307 to perform reciprocating movement. The reciprocating movement of the moving plate 307 drives the rack 308 to perform reciprocating movement, thereby driving the gear 313 to perform reciprocating rotation, further driving the rotating rod 312 to rotate, driving the bevel gear B 314 to rotate, driving the bevel gear A 311 to rotate, and causing the rotating rod 310 to perform reciprocating rotation.

[0049] As a specific technical solution, please refer to Figure 5 and Figure 6 As shown, the scrubbing tool 4 includes a main scrubbing plate 401, a secondary scrubbing plate 402, a rectangular rod 403, a rectangular sleeve rod 404, a spring A 405, a footrest 406, a rectangular side rod A 407, a spring B 409, and a bladder 410. A rectangular rod 403 is fixedly connected to the upper surface of the main scrubbing plate 401. A rectangular sleeve rod 404 is slidably connected to the rectangular rod 403. One end of a spring A 405 is fixedly connected to the upper wall of the inner cavity of the rectangular sleeve rod 404. The other end of the spring A 405 is fixedly connected to the upper end of the rectangular rod 403. The upper end of the rectangular sleeve rod 404 is fixedly connected to the bottom end of the rotating rod 310. In this technical solution, the rotation of the rotating rod 310 can drive the scrubbing tool 4 to rotate, so that the surface of the electrostatic chuck can be scrubbed and cleaned by the reciprocating rotation of the scrubbing tool 4;

[0050] A plurality of auxiliary scrubbing plates 402 are provided. The plurality of auxiliary scrubbing plates 402 are hinged to each other. The plurality of auxiliary scrubbing plates 402 are symmetrically arranged on both sides of the main scrubbing plate 401 and are hinged to the main scrubbing plate 401. A plurality of rectangular side rods A 407 are provided. A rectangular side rod B 408 is slidably connected to the inner cavity of each of the plurality of rectangular side rods A 407. One end of a spring B 409 is fixedly connected to the upper end of the rectangular side rod B 408. The other end of the spring B 409 is fixedly connected to the inner wall of the rectangular side rod A 407. Tripods 406 are rotatably connected to the upper end of the rectangular side rod A 407 and the lower end of the rectangular side rod B 408. The tripods 406 are fixedly connected to the auxiliary scrubbing plate 402 and the rectangular sleeve rod 404 respectively. A bladder 410 is fixedly connected to the bottom surfaces of the main scrubbing plate 401 and the auxiliary scrubbing plate 402. A non-woven fabric layer 411 is fixedly connected to the bottom surface of the bladder 410. By providing the auxiliary scrubbing plate 402, a certain angle can be adjusted. When the main scrubbing plate 401 and the auxiliary scrubbing plate 402 come into contact with the surface of the electrostatic chuck, when the surface of the electrostatic chuck is a common flat surface, the main scrubbing plate 401 and the auxiliary scrubbing plate 402 are kept horizontal for scrubbing. When the surface of the electrostatic chuck is an arc-shaped curved surface, through the setting of the spring B 409, the auxiliary scrubbing plate 402 can be bent by a certain angle to adapt to the surface of the electrostatic chuck, so as to fit the surface of the electrostatic chuck more fully, making the scrubbing more thorough and uniform. At the same time, the bladder 410 is also provided. Due to the flexible characteristics of the bladder 410, when it fits the surface of the electrostatic chuck, it can further achieve a deformation effect and fit better, thereby further improving the scrubbing effect, which is especially suitable for use with curved electrostatic chucks.

[0051] The electrostatic chuck support unit 5 includes a fixed track 501, a sliding seat 502, a support platform 503, and an electric push rod 504. The fixed track 501 is fixedly arranged at the side wall position of the frame housing 2. The sliding seat 502 is slidably connected to the fixed track 501. A support platform 503 is fixedly connected to the side wall of the sliding seat 502. One end of the electric push rod 504 is fixedly connected to the bottom surface of the support platform 503. The other end of the electric push rod 504 is fixedly connected to the upper surface of the fixed base 1. A clamping member for fixing the ceramic electrostatic chuck is arranged on the upper surface of the support platform 503. The ceramic electrostatic chuck can be fixed by the clamping member. After being fixed, the electric push rod 504 can drive the support platform 503 to move by extending, thereby driving the electrostatic chuck to move, so that the surface of the electrostatic chuck moves to the scrubbing tool 4 and comes into contact with the scrubbing tool 4. After that, the scrubbing tool 4 rotates reciprocally for scrubbing and cleaning.

[0052] As a preferred technical solution, please refer to Figure 7 and Figure 8As shown, the auxiliary constant temperature unit 6 includes a fixed bin 601, a constant temperature heating rod 602, a fixed cylinder 603, and a moving piston 604. The fixed bin 601 is fixedly arranged at the side wall position of the frame housing 2. The inner cavity of the fixed bin 601 is filled with circulating water. A constant temperature heating rod 602 is fixedly connected in the inner cavity of the fixed bin 601. Through the operation of the constant temperature heating rod 602 in this technical solution, the circulating water in the inner cavity of the fixed bin 601 can be heated and maintained at a constant temperature;

[0053] A fixed cylinder 603 is fixedly connected to the upper surface of the fixed bin 601. A moving piston 604 is slidably connected in the inner cavity of the fixed cylinder 603. One end of a guide rod 605 is fixedly connected to the upper surface of the moving piston 604. The other end of the guide rod 605 penetrates the upper wall of the inner cavity of the fixed cylinder 603 and extends outside the wall. A connecting plate 606 is fixedly connected to the upper end of the guide rod 605. The connecting plate 606 is arranged at the side wall of the frame housing 2 and is slidably matched with the frame housing 2. The connecting plate 606 is fixedly connected to the side wall of the moving slider 304. One end of an input pipe 608 is fixedly connected to the bottom side of the inner cavity of the fixed cylinder 603. The other end of the input pipe 608 extends to the bottom side of the inner cavity of the fixed bin 601 and is fixedly connected to the fixed bin 601. An input one-way valve is installed on the input pipe 608. One end of an output hose 607 is fixedly connected to the bottom wall of the inner cavity of the fixed cylinder 603. The other end of the output hose 607 extends into the inner cavity of the bladder 410 and is fixedly connected to the bladder 410. An output one-way valve is installed on the output hose 607. One end of a return hose 609 is fixedly connected in the inner cavity of the bladder 410. The other end of the return hose 609 extends into the inner cavity of the fixed bin 601 and is fixedly connected to the fixed bin 601. Through this technical solution, when the scrubbing tool 4 rotates for scrubbing, the reciprocating movement of the moving slider 304 drives the connecting plate 606 to reciprocate, thereby driving the guide rod 605 to reciprocate, driving the moving piston 604 to reciprocate in the inner cavity of the fixed cylinder 603, and then continuously conveying the circulating water in the inner cavity of the fixed bin 601 into the inner cavity of the bladder 410, and then flowing back to the inner cavity of the fixed bin 601 through the return hose 609, realizing the function of constant temperature water circulation. Through the constant temperature water circulation, during the scrubbing operation of the scrubbing tool 4, due to the constant temperature water in the inner cavity of the bladder 410, the temperature during scrubbing is guaranteed. That is, it can play a heating role at low temperatures to improve the cleaning effect, and can also play a role in absorbing heat and cooling through the circulating constant temperature water when the temperature rises due to friction, avoiding the rapid evaporation of the cleaning agent and affecting the cleaning effect; at the same time, as described above, during scrubbing, constant temperature water circulation can be automatically carried out without an additional power source, which is convenient to use.

[0054] As a further technical solution, please refer to Figure 9 、 Figure 10and Figure 11 As shown in Figure 11 , the cleaning agent delivery unit 7 includes a fixed plate frame 701, a nozzle 702, a connecting cylinder 703, and a cleaning agent storage bin 708. The fixed plate frame 701 is fixedly arranged at the side position of the support table 503, and the nozzle 702 is fixedly connected to the fixed plate frame 701;

[0055] The connecting cylinder 703 is fixedly arranged on the upper surface of the fixed bin 601. A connecting piston 704 is slidably connected in the inner cavity of the connecting cylinder 703. One end of a connecting guide rod 705 is fixedly connected to the upper surface of the connecting piston 704. The other end of the connecting guide rod 705 penetrates the upper wall of the inner cavity of the connecting cylinder 703 and extends outside the wall. The top end of the connecting guide rod 705 is fixedly connected to the bottom surface of the connecting plate 606. One end of a discharge hose 706 is fixedly connected in the inner cavity of the connecting cylinder 703. The other end of the discharge hose 706 is connected to the nozzle 702. A one-way valve is installed on the discharge hose 706. One end of a suction hose 707 is fixedly connected to the bottom side of the inner cavity of the connecting cylinder 703. The other end of the suction hose 707 is connected to the cleaning agent storage bin 708. A one-way valve is installed on the suction hose 707. The inner cavity of the cleaning agent storage bin 708 is filled with a cleaning agent. In this technical solution, the reciprocating movement of the connecting plate 606 drives the connecting guide rod 705 to perform a reciprocating movement, thereby driving the connecting piston 704 to reciprocally move in the inner cavity of the connecting cylinder 703, and then sucking the cleaning agent in the inner cavity of the cleaning agent storage bin 708 and delivering it to the nozzle 702, and spraying it on the surface of the ceramic electrostatic chuck through the nozzle 702, so as to cooperate with the rotation of the scrubbing tool 4 for scrubbing and cleaning;

[0056] After the cleaning with the cleaning agent is completed, the surface of the electrostatic chuck should be rinsed with pure water to clean the residual cleaning agent, and then the electrostatic chuck should be dried with a drying device after the rinsing is completed.

[0057] The circuits, electronic components, and modules involved are all prior arts, which can be fully realized by those skilled in the art without further elaboration. The content protected by this application does not involve improvements to software and methods either.

[0058] The above are only the preferred embodiments of the present application and are not used to limit the present application. For those skilled in the art, various changes and modifications can be made to the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included within the protection scope of the present application.

Claims

1. A surface cleaning device for a ceramic electrostatic chuck, characterized in that: The surface cleaning device for a ceramic electrostatic chuck includes: A fixed base (1), and a frame housing (2) is fixedly connected to the upper surface of the fixed base (1); An electrostatic chuck support unit (5); A rotary drive unit (3), the rotary drive unit (3) is arranged at the frame housing (2), one end of the rotary drive unit (3) is fixedly connected with a scrubbing tool (4), the scrubbing tool (4) is used for scrubbing the surface of the ceramic electrostatic chuck, and the scrubbing tool (4) can be adaptively bent according to the curved surface of the electrostatic chuck; An auxiliary constant temperature unit (6), the auxiliary constant temperature unit (6) is fixedly arranged at the side wall position of the frame housing (2), the auxiliary constant temperature unit (6) is connected to the scrubbing tool (4), and the auxiliary constant temperature unit (6) is used for automatically circulating constant temperature water when the scrubbing tool (4) rotates and scrubs; A cleaning agent delivery unit (7), the cleaning agent delivery unit (7) is fixedly arranged at the side wall position of the frame housing (2), and the cleaning agent delivery unit (7) is used for automatically spraying the cleaning agent when the scrubbing tool (4) rotates and scrubs; The rotary drive unit (3) includes a servo motor (301), a rotary disk (302), a fixed guide rod (303), a moving slider (304), a moving plate (307), a rack (308), a fixed bracket (309), a rotary rod (310) and a rotating rod (312). The servo motor (301) is fixedly arranged at the outer wall position of the frame housing (2), a moving slider (304) is slidably connected in the inner cavity of the frame housing (2), two fixed guide rods (303) are fixedly connected to the upper wall of the inner cavity of the frame housing (2), the fixed guide rod (303) penetrates through the moving slider (304) and is slidably matched with the moving slider (304), a fixed rod (305) is fixedly connected to the bottom surface of the moving slider (304), a rotary disk (302) is rotatably connected in the inner cavity of the frame housing (2), the end of the output shaft of the servo motor (301) extends to the center of the rotary disk (302) and is fixedly connected to the rotary disk (302), one end of a connecting rod (306) is rotatably connected to the side wall of the rotary disk (302), and the other end of the connecting rod (306) extends to the bottom end of the fixed rod (305) and is rotatably connected to the fixed rod (305); The scrubbing tool (4) includes a main scrubbing plate (401), a secondary scrubbing plate (402), a rectangular rod (403), a rectangular sleeve rod (404), a spring A (405), a footrest (406), a rectangular side rod A (407), a spring B (409) and a bladder (410). A rectangular rod (403) is fixedly connected to the upper surface of the main scrubbing plate (401), a rectangular sleeve rod (404) is slidably connected to the rectangular rod (403), one end of a spring A (405) is fixedly connected to the upper wall of the inner cavity of the rectangular sleeve rod (404), the other end of the spring A (405) is fixedly connected to the upper end of the rectangular rod (403), and the upper end of the rectangular sleeve rod (404) is fixedly connected to the bottom end of the rotary rod (310).

2. The surface cleaning device for a ceramic electrostatic chuck according to claim 1, characterized in that: The moving plate (307) is arranged at the side wall of the frame housing (2) and is in sliding fit with the frame housing (2). The moving plate (307) is fixedly connected to the moving slider (304). A rack (308) is fixedly connected to the side wall of the moving plate (307). A fixed bracket (309) is fixedly connected to the side wall of the frame housing (2). A rotating rod (310) is rotatably connected to the fixed bracket (309). A bevel gear A (311) is fixedly connected to the arc-shaped wall of the rotating rod (310). A rotating rod (312) is rotatably connected to the side wall of the frame housing (2). A bevel gear B (314) is fixedly connected to one end of the rotating rod (312). The bevel gear B (314) meshes with the bevel gear A (311). A gear (313) is fixedly connected to the arc-shaped wall of the rotating rod (312). The gear (313) meshes with the rack (308).

3. The surface cleaning device for a ceramic electrostatic chuck according to claim 2, characterized in that: A plurality of auxiliary wiping plates (402) are provided. The plurality of auxiliary wiping plates (402) are hinged to each other. The plurality of auxiliary wiping plates (402) are symmetrically arranged on both sides of the main wiping plate (401) and are hinged to the main wiping plate (401). A plurality of rectangular side rods A (407) are provided. A rectangular side rod B (408) is slidably connected to the inner cavity of each of the plurality of rectangular side rods A (407). One end of a spring B (409) is fixedly connected to the upper end of the rectangular side rod B (408). The other end of the spring B (409) is fixedly connected to the inner wall of the rectangular side rod A (407). Tripods (406) are rotatably connected to the upper end of the rectangular side rod A (407) and the lower end of the rectangular side rod B (408). The tripods (406) are fixedly connected to the auxiliary wiping plate (402) and the rectangular sleeve rod (404) respectively. A bladder (410) is fixedly connected to the bottom surfaces of the main wiping plate (401) and the auxiliary wiping plate (402). A non-woven fabric layer (411) is fixedly connected to the bottom surface of the bladder (410).

4. The surface cleaning device for a ceramic electrostatic chuck according to claim 1, characterized in that: The electrostatic chuck support unit (5) includes a fixed track (501), a sliding seat (502), a support platform (503) and an electric push rod (504). The fixed track (501) is fixedly arranged at the side wall position of the frame housing (2). A sliding seat (502) is slidably connected to the fixed track (501). A support platform (503) is fixedly connected to the side wall of the sliding seat (502). One end of an electric push rod (504) is fixedly connected to the bottom surface of the support platform (503). The other end of the electric push rod (504) is fixedly connected to the upper surface of the fixed base (1).

5. The surface cleaning device for a ceramic electrostatic chuck according to claim 1, characterized in that: The auxiliary constant temperature unit (6) includes a fixed bin (601), a constant temperature heating rod (602), a fixed cylinder (603) and a moving piston (604). The fixed bin (601) is fixedly arranged at the side wall position of the frame housing (2). The inner cavity of the fixed bin (601) is filled with circulating water. A constant temperature heating rod (602) is fixedly connected to the inner cavity of the fixed bin (601).

6. The surface cleaning device for a ceramic electrostatic chuck according to claim 5, characterized in that: A fixed cylinder (603) is fixedly connected to the upper surface of the fixed bin (601). A movable piston (604) is slidably connected in the inner cavity of the fixed cylinder (603). One end of a guide rod (605) is fixedly connected to the upper surface of the movable piston (604). The other end of the guide rod (605) penetrates through the upper wall of the inner cavity of the fixed cylinder (603) and extends outside the wall. A connecting plate (606) is fixedly connected to the upper end of the guide rod (605). The connecting plate (606) is arranged on the side wall of the frame housing (2) and is slidably matched with the frame housing (2). The connecting plate (606) is fixedly connected to the side wall of the movable slider (304). One end of an input pipe (608) is fixedly connected to the bottom side of the inner cavity of the fixed cylinder (603). The other end of the input pipe (608) extends to the bottom side of the inner cavity of the fixed bin (601) and is fixedly connected to the fixed bin (601). An input one-way valve is installed on the input pipe (608). One end of an output hose (607) is fixedly connected to the bottom wall of the inner cavity of the fixed cylinder (603). The other end of the output hose (607) extends into the inner cavity of the bladder (410) and is fixedly connected to the bladder (410). An output one-way valve is installed on the output hose (607). One end of a return hose (609) is fixedly connected in the inner cavity of the bladder (410). The other end of the return hose (609) extends into the inner cavity of the fixed bin (601) and is fixedly connected to the fixed bin (601).

7. The surface cleaning device for a ceramic electrostatic chuck according to claim 1, characterized in that: The cleaning agent delivery unit (7) includes a fixed plate frame (701), a nozzle (702), a connecting cylinder (703), and a cleaning agent storage bin (708). The fixed plate frame (701) is fixedly arranged at the side position of the support table (503). The nozzle (702) is fixedly connected to the fixed plate frame (701).

8. The surface cleaning device for a ceramic electrostatic chuck according to claim 7, characterized in that: The connecting cylinder (703) is fixedly arranged on the upper surface of the fixed bin (601). A connecting piston (704) is slidably connected in the inner cavity of the connecting cylinder (703). One end of a connecting guide rod (705) is fixedly connected to the upper surface of the connecting piston (704). The other end of the connecting guide rod (705) penetrates through the upper wall of the inner cavity of the connecting cylinder (703) and extends outside the wall. The top end of the connecting guide rod (705) is fixedly connected to the bottom surface of the connecting plate (606). One end of a discharge hose (706) is fixedly connected in the inner cavity of the connecting cylinder (703). The other end of the discharge hose (706) is connected to the nozzle (702). A one-way valve is installed on the discharge hose (706). One end of a suction hose (707) is fixedly connected to the bottom side of the inner cavity of the connecting cylinder (703). The other end of the suction hose (707) is connected to the cleaning agent storage bin (708). A one-way valve is installed on the suction hose (707). The inner cavity of the cleaning agent storage bin (708) is filled with cleaning agent.

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