ICO target material and preparation method thereof
By designing a honeycomb structure in the ICO target, the existing ICO targets are easily cracked and too much residue during high-temperature evaporation, and higher coating continuity and production efficiency are achieved.
Patent Information
- Application Number
- CN202510231223.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-28
- Publication Date
- 2025-06-10
AI Technical Summary
Existing ICO targets are prone to cracking during high-temperature evaporation, and too much residue leaves lead to poor equipment continuity and increase production costs.
An ICO target is designed, adopting a honeycomb structure, including a plurality of honeycomb grooves arranged along the height direction of the target. One end of the honeycomb groove is opened and the other end is closed, and the closed end is facing the same. The target material is mixed with indium oxide and cerium oxide powder, added with pure water and then pressure-formed and calcined to form a honeycomb structure.
The lateral heat dissipation of the target material is improved through the honeycomb structure, reducing the risk of cracking, and depositing sputtered slag at the closed end to improve the continuity of the coating and reduce equipment pollution.
Smart Images
Figure CN120119214A_ABST
Abstract
Description
Technical Field
[0001] The present invention belongs to the field of target materials, and relates to a target material for coating, specifically an ICO target material. Background Art
[0002] The ICO material is composed of indium oxide and cerium oxide, and has high electron mobility and good transparency. It is widely used in fields such as photovoltaic modules, solar cells, and displays. Most of the existing ICO target materials are solid cylindrical. During the high-temperature evaporation process, due to low heat dissipation, cracking is likely to occur. At the same time, due to insufficient evaporation, too much slag remains, resulting in poor equipment continuity and frequent cleaning, thereby increasing production costs.
[0003] In the prior art, the heat dissipation of the ICO material is usually improved by reducing its relative density. However, if the relative density is too low, its strength will decrease and it is easy to break, affecting the sintering performance, resulting in deformation after sintering, poor use effect, etc., and will also have varying degrees of influence on the strength and density of the coating. Summary of the Invention
[0004] In view of the defects and deficiencies existing in the prior art, on the one hand, the present invention provides an ICO target material; on the other hand, the present invention provides a preparation method for an ICO target material.
[0005] On the one hand, the present invention provides an ICO target material. The ICO target material is cylindrical, and a honeycomb structure is provided in the ICO target material. The honeycomb structure includes a plurality of honeycomb grooves arranged along the height direction of the ICO target material. One end of the honeycomb groove is open and the other end is closed, and the closed ends of the honeycomb grooves face the same direction.
[0006] Preferably, the ICO target material includes indium oxide and cerium oxide, wherein indium oxide is 80wt% - 99wt%, and the balance is cerium oxide and unavoidable impurities.
[0007] Preferably, the cross-section of the honeycomb groove is circular.
[0008] Preferably, the honeycomb structure is distributed in layers. Each layer includes a plurality of honeycomb grooves arranged at equal intervals along the center of the ICO target material, and the number of honeycomb grooves distributed in each layer is the same. The honeycomb grooves between adjacent layers are staggered.
[0009] Preferably, 4 - 10 honeycomb grooves are distributed in each layer; the centers of the multiple honeycomb grooves in the same layer are all located on the same arc, the distance between adjacent arcs is 5 - 15mm, and the diameter of the honeycomb groove is 1.0 - 2.5mm.
[0010] Preferably, the closed end of the honeycomb groove is provided with an arc surface, and the concave surface of the arc surface faces the inside of the honeycomb groove.
[0011] In a second aspect, the present invention provides a method for preparing the above-mentioned ICO target, comprising the following steps: Step 1: Mix indium oxide powder and cerium oxide powder to obtain material A, add pure water to material A to obtain material B, subject material B to pressure molding, then crush and screen it to obtain material C; Step 2: Calcinate material C in an oxygen-containing atmosphere and then screen it to obtain material D; Step 3: Add pure water to material D and then place it in a honeycomb mold for molding. After demolding, a rough blank with a honeycomb structure is obtained; Step 4: Calcinate the rough blank with a honeycomb structure in an oxygen-containing atmosphere for a certain period of time to obtain the ICO target.
[0012] Preferably, in Step 1, the mass of pure water in material B is 1 wt% - 10 wt% of material A.
[0013] Preferably, in Step 1, the pressure during pressure molding is 10 - 200 MPa, and the pressure application time is 5 - 120 s.
[0014] Preferably, in Step 2, the calcination temperature is 1230 - 1350 °C, and the calcination time is 2 - 5 h.
[0015] Preferably, in Step 3, the mass of pure water added to material D is 0.5 - 10 wt% of material D.
[0016] Preferably, in Step 4, the calcination temperature is 1000 - 1200 °C, and the calcination time is 1 - 7 h.
[0017] Preferably, when calcining the rough blank with a honeycomb structure in Step 4, the closed end of the honeycomb groove is located above.
[0018] Preferably, the sieve mesh used for screening in Step 1 and Step 2 is 10 - 80 meshes.
[0019] Compared with the prior art, the present invention has the following obvious beneficial effects: (1) By setting a honeycomb structure in the ICO target, on the one hand, the lateral heat dissipation of the target can be improved, enabling synchronous consumption of the target in the horizontal and vertical directions during coating, reducing the possibility of cracking of the target during the coating process; on the other hand, one end of the honeycomb groove is closed, and the sputtered target particles during coating can be deposited at the bottom of the honeycomb, reducing the possibility of target particles sputtering onto the inner wall of the evaporation equipment, and improving the continuity of coating.
[0020] (2) The preparation process provided by the present invention does not require the addition of a binder. On the one hand, it can make the indium oxide powder and cerium oxide powder more dispersed, improving the uniformity of the internal structure of the target; on the other hand, it omits the time-consuming and energy-consuming degreasing and debinding processes, reduces carbon residue, greatly shortens the sintering time, reduces energy consumption, and greatly reduces the deformability, and an ICO target with a stable structure can be obtained; moreover, the operation is simple, the product consistency is high, the production cycle is short, and the production efficiency is high, which is conducive to promotion and marketization. Description of the Drawings
[0021] Reference numerals: 1, ICO target; 2, honeycomb groove; 21, open end; 22, closed end; 3, first spacing; 4, second spacing; 5, arc.
[0022] Figure 1 Schematic diagram of the overall structure of the ICO target in Example 1 of the present invention Figure 1 ; Figure 2 Schematic diagram of the overall structure of the ICO target in Example 1 of the present invention Figure 2 ; Figure 3 Schematic cross-sectional structure diagram of the ICO target in Example 1 of the present invention. Detailed Embodiments
[0023] The present invention provides the following specific technical solutions.
[0024] In a first aspect, the present invention provides an ICO target. The ICO target is cylindrical, and a honeycomb structure is provided in the ICO target. The honeycomb structure includes a plurality of honeycomb grooves arranged along the height direction of the ICO target. One end of the honeycomb groove is open and the other end is closed, and the closed ends of the honeycomb grooves face the same direction.
[0025] The inventors have found through research that by setting a honeycomb structure in the ICO target, on the one hand, it can improve the lateral heat dissipation of the target, enabling synchronous consumption of the target in the horizontal and vertical directions during coating, reducing the possibility of cracking of the target during the coating process; on the other hand, one end of the honeycomb groove is closed, and the slag sputtered during coating is deposited at the closed end of the honeycomb groove without polluting the inner wall of the equipment, reducing the possibility of target particles sputtering onto the inner wall of the evaporation equipment, and improving the continuity of coating.
[0026] Preferably, the ICO target includes indium oxide and cerium oxide, wherein the indium oxide is 80 wt% - 99 wt%, and the balance is cerium oxide and unavoidable impurities.
[0027] Preferably, the cross-section of the honeycomb groove is circular.
[0028] In practical applications, the cross-section of the honeycomb groove can be triangular, polygonal or circular. The inventors have found through research that the cross-section of the honeycomb groove is preferably circular.
[0029] Preferably, the honeycomb structure is distributed in layers, each layer includes a plurality of honeycomb grooves evenly spaced along the center of the ICO target, and the number of the honeycomb grooves distributed in each layer is consistent, and the honeycomb grooves between two adjacent layers are staggered.
[0030] After research, the inventors found that the honeycomb structure in the ICO target is distributed in layers around the center of the ICO target, which, combined with the circular or quasi-circular spot during sputtering, is conducive to improving the uniformity of sputtering and thus improving the uniformity of the coating.
[0031] Preferably, 4 to 10 honeycomb grooves are distributed in each layer; the centers of the multiple honeycomb grooves in the same layer are located on the same arc, the distance between two adjacent arcs is 5 to 15 mm, and the diameter of the honeycomb groove is 1.0 to 2.5 mm.
[0032] After research, the inventors found that indium oxide and cerium oxide have different heat dissipation properties. Therefore, when the ratio of indium oxide and cerium oxide changes, in order to improve the heat dissipation performance and practical performance of the target material, the size and distribution density of the honeycomb grooves can be adjusted. Preferably, when the indium oxide content in the target material increases, the density and diameter of the honeycomb grooves can be reduced to improve the practicality of the target material while ensuring the heat dissipation performance of the target material; conversely, when the indium oxide content decreases, the cerium oxide content that improves the mobility increases relatively, and the density of the honeycomb grooves and the diameter of the honeycomb grooves can be appropriately increased.
[0033] After further research, the inventors found that the distribution of the honeycomb grooves also affects the structural stability of the ICO target. The greater the density of the honeycomb grooves, the lower the structural stability of the ICO target. By optimizing the diameter of the honeycomb grooves and the distribution (density) of the honeycomb grooves, the structural stability and heat dissipation of the ICO target can be maintained at a higher level.
[0034] Preferably, the closed end of the honeycomb groove is arranged in an arc surface, and the concave surface of the arc surface faces the inside of the honeycomb groove.
[0035] In practical applications, the closed end of the honeycomb groove can be a plane, a cone or an arc surface, and an arc surface is most preferred. If it is a plane or a cone, during the target coating process, the thermal stress is concentrated on the bottom (plane) and the side of the honeycomb groove to form a right angle or the vertex of the cone, which may cause the target to crack.
[0036] Preferably, the height of the honeycomb groove is 90% to 98% of the height of the ICO target.
[0037] In practical applications, the height of the honeycomb groove can be 90%, 92%, 94%, 96%, or 98% of the height of the ICO target.
[0038] In a second aspect, the present invention provides a method for preparing the above-mentioned ICO target, comprising the following steps: Step 1: Mix indium oxide powder and cerium oxide powder to obtain Material A, add pure water to Material A to obtain Material B, subject Material B to pressure molding, then crush and screen it to obtain Material C; Step 2: Roast Material C in an oxygen-containing atmosphere and then screen it to obtain Material D; Step 3: Add pure water to Material D and then place it in a honeycomb mold for compression molding. After demolding, a rough blank with a honeycomb structure is obtained; Step 4: Roast the rough blank with a honeycomb structure in an oxygen-containing atmosphere for a certain period of time to obtain the ICO target.
[0039] The inventors have found through research that the preparation process provided by the present invention does not require the addition of a binder. On the one hand, it can make the indium oxide powder and cerium oxide powder more dispersed, improving the uniformity of the internal structure of the target; on the other hand, it can reduce carbon residue, greatly shorten the sintering time, and significantly reduce the deformability, enabling the production of an ICO target with a stable structure; moreover, the operation is simple, the product consistency is high, which is conducive to promotion and marketization.
[0040] Preferably, in Step 1, the mass of pure water in Material B is 1 wt% - 10 wt% of Material A.
[0041] Preferably, in Step 1, the pressure during pressure molding is 10 - 200 MPa, and the pressure application time is 5 - 120 s.
[0042] Preferably, in Step 2, the roasting temperature is 1230 - 1350 °C, and the roasting time is 2 - 5 h.
[0043] The inventors have found through research that roasting before compression molding causes the powder to shrink, avoiding a large shrinkage of the powder during molding sintering, which affects the size of the product or causes the product to deform. In practical applications, the roasting temperature in Step 2 can be 1230 °C, 1270 °C, 1300 °C, and 1350 °C, and the roasting time can be 2 h, 3 h, 4 h, and 5 h.
[0044] Preferably, in Step 3, the mass of pure water added to Material D is 0.5 - 10 wt% of Material D.
[0045] Preferably, in Step 4, the roasting temperature is 1000 - 1200 °C, and the roasting time is 1 - 7 h.
[0046] It is found through research that in step 4, the roasting temperature is preferably 1000 - 1200 °C. At this temperature, the formed target blank undergoes ceramization, improving the strength of the target material. In practical applications, the roasting temperature in step 4 can be 1000 °C, 1050 °C, 1100 °C, 1150 °C, 1200 °C; the roasting time is 1 h, 3 h, 4 h, 6 h, and 7 h.
[0047] In the actual production process, both step 2 and step 4 are roasted in an air atmosphere.
[0048] Preferably, in step 4, when roasting the rough blank with a honeycomb structure, the closed end of the honeycomb groove is located above.
[0049] The inventor found through research that when roasting the rough blank with a honeycomb structure, if the closed end of the honeycomb groove is located above, the phenomenon of slag falling and corner dropping of the target material can be reduced, which is beneficial to improving the qualified rate of the product and reducing costs.
[0050] Preferably, the sieve mesh used for sieving in steps 1 and 2 is 10 - 80 mesh.
[0051] To make the technical problems, technical solutions, and technical advantages to be solved by the present invention clearer, the following will be described in detail with specific examples, but the protection scope of the present invention is not limited to the following specific embodiments.
[0052] Unless otherwise defined, all professional terms used hereinafter have the same meaning as commonly understood by those skilled in the art. The professional terms used herein are only for the purpose of describing specific embodiments and are not intended to limit the protection scope of the present invention.
[0053] Unless otherwise specifically stated, various raw materials, reagents, instruments, and equipment used in the present invention can be obtained through the market or can be prepared by existing methods.
[0054] Example 1: An ICO target 1 is made from indium oxide and cerium oxide as raw materials, and the balance is cerium oxide and unavoidable impurities. In the production preparation, the ratio of indium oxide to cerium oxide can be adjusted according to actual needs. In the specific embodiment of the present invention, indium oxide in the ICO target 1 is preferably 80 wt% - 99 wt%, and the balance is cerium oxide and unavoidable impurities.
[0055] Refer to Figure 1The ICO target 1 is cylindrical, and a honeycomb structure is arranged in the ICO target 1. The honeycomb structure includes a plurality of honeycomb grooves 2 arranged along the height direction of the ICO target 1. The honeycomb structure is layered, and each layer includes a plurality of honeycomb grooves 2 evenly spaced along the center of the ICO target 1. The number of honeycomb grooves 2 distributed in each layer is the same, and each layer is evenly distributed with 4 to 10 honeycomb grooves 2. One end of the honeycomb groove 2 is open and the other end is closed, and the closed ends 22 of the honeycomb grooves 2 face the same direction, and the diameter of the honeycomb groove 2 is 1.0 to 2.5 mm.
[0056] Reference Figure 2 In practical applications, the honeycomb groove 2 can also be opened on the outer wall surface of the ICO target material 1.
[0057] The honeycomb structure is set in the ICO target material 1. On the one hand, it can improve the heat dissipation of the target material, make the upper surface of the target material more flat and uniform during sputtering, and reduce the possibility of cracking of the target material during the coating process; on the other hand, one end of the honeycomb groove 2 is closed, and the slag splashed during coating is deposited on the closed end 22 of the honeycomb groove 2 without contaminating the inner wall of the equipment, reducing the possibility of target material particles sputtering to the inner wall of the evaporation equipment, and improving the continuity of the coating. Furthermore, by optimizing the distribution of the honeycomb groove 2, the honeycomb groove 2 in the ICO target material 1 is distributed around the center of the ICO target material 1, and the circular or quasi-circular light spot during sputtering is combined, which is conducive to improving the uniformity of sputtering, thereby improving the uniformity of coating.
[0058] The cross section of the honeycomb groove 2 is preferably circular, and the closed end 22 of the honeycomb groove 2 is arranged in an arc surface, and the concave surface of the arc surface faces the inside of the honeycomb groove 2 .
[0059] In practical applications, a honeycomb groove 2 may be provided at the center of the ICO target 1 (the center of the honeycomb groove 2 overlaps with the center of the ICO target 1), or the honeycomb groove 2 may not be provided. Figure 3 The multi-layer honeycomb grooves 2 are sequentially arranged as the zeroth layer (i.e., the honeycomb grooves 2 at the center), the first layer, the second layer, the third layer, etc. along the direction from the center of the circle of the ICO target 1 to the outer wall. The centers of the multiple honeycomb grooves 2 of the same layer are all located on the same arc 5, and the distance between the center of any honeycomb groove 2 of the first layer and the center of the ICO target 1 is the first spacing 3, preferably, the first spacing 3 is 5-15 mm; the distance between two adjacent arcs 5 is the second spacing 4, preferably, the second spacing 4 is 5-15 mm.
[0060] The heat dissipation properties of indium oxide and cerium oxide are different. Therefore, when the ratio of indium oxide to cerium oxide changes, in order to improve the heat dissipation performance and practical performance of the target, the size and distribution density of the honeycomb grooves 2 can be adjusted. Preferably, when the content of indium oxide in the target increases, the density and diameter of the honeycomb grooves 2 can be reduced to improve the practicality of the target while ensuring its heat dissipation performance. Conversely, when the content of indium oxide decreases and the content of cerium oxide that enhances the mobility relatively increases, the density of the honeycomb grooves 2 can be appropriately increased and the diameter of the honeycomb nests can be enlarged.
[0061] At the same time, the distribution of the honeycomb grooves 2 also affects the structural stability of the ICO target 1. The greater the density of the honeycomb grooves 2, the lower the structural stability of the ICO target 1. In the specific embodiment 1 of the present invention, by optimizing the diameter of the honeycomb grooves 2 and the distribution (density) of the honeycomb grooves 2, the structural stability and heat dissipation of the ICO target 1 can be at a relatively high level.
[0062] Example 2: A method for preparing an ICO target, comprising the following steps: Step 1, put 1700 g of high-purity indium oxide powder and 300 g of cerium oxide powder into a three-dimensional mixer and mix for 12 h to obtain material A.
[0063] Step 2, slowly spray 200 g of distilled water into material A and stir evenly to obtain material B.
[0064] Step 3, put material B into a mold, and then use a pressure granulator to press it into shape. The pressure is 50 MPa, and the pressing time is 15 s. After pressing, break it and sieve it through a 40-mesh sieve to obtain material C.
[0065] Step 4, place material C in a muffle furnace and calcine it in air at 1270 °C for 2 h, and cool it with the furnace to obtain material D.
[0066] Step 5, mix material D and 100 g of distilled water and stir evenly to obtain a wet material. Take 76 g of the wet material and transfer it to a honeycomb mold to press it into shape. After demolding, a rough blank with a honeycomb structure is obtained.
[0067] The size of the obtained rough blank: height 40 mm, diameter 27.5 mm. There are 25 honeycomb grooves in the rough blank. The honeycomb grooves are parallel to the height direction of the rough blank. The center of one honeycomb groove overlaps with the center of the rough blank. The remaining 24 honeycomb grooves are evenly divided into two groups. Each group of 12 honeycomb grooves is evenly spaced along the center of the rough blank. The distance between the center of the group of honeycomb grooves close to the center of the rough blank and the center of the rough blank is 6 mm; the distance between the center of any one honeycomb groove in the other group and the center of the rough blank is 11 mm; the diameter of the 25 honeycomb grooves is 1.5 mm, and the height is 38 mm.
[0068] Step 6: Place the green body with a honeycomb structure in a muffle furnace, with the open end of the honeycomb cells in the honeycomb structure facing downwards, and calcine it in air at 1200 °C for 7 h to obtain the ICO target.
[0069] Comparative Example 1: A method for preparing an ICO target, comprising the following steps: Step 1: Put 1700 g of high-purity indium oxide powder and 300 g of cerium oxide powder into a three-dimensional mixer and mix for 12 h to obtain Material A.
[0070] Step 2: Slowly spray 200 g of distilled water into Material A and stir evenly to obtain Material B.
[0071] Step 3: Load Material B into a mold, and then use a pressure granulator to press it into shape at a pressure of 50 MPa for a pressing time of 15 s. After pressing, crush it and sieve it through a 40-mesh sieve to obtain Material C.
[0072] Step 4: Place Material C in a muffle furnace and calcine it in air at 1250 °C for 2 h, and cool it with the furnace to obtain Material D.
[0073] Step 5: Mix Material D and 100 g of distilled water and stir evenly to obtain a wet material. Take 106 g of the wet material and transfer it to a cylindrical mold to press it into shape. After demolding, obtain the green body.
[0074] The dimensions of the obtained green body: height 40 mm, diameter 27.5 mm.
[0075] Step 6: Place the green body in a muffle furnace, with the open end of the honeycomb cells in the honeycomb structure facing downwards, and calcine it in air at 1200 °C for 7 h to obtain the ICO target.
[0076] Example 3: A method for preparing an ICO target, comprising the following steps: Step 1: Put 1900 g of high-purity indium oxide powder and 100 g of cerium oxide powder into a three-dimensional mixer and mix for 12 h to obtain Material A.
[0077] Step 2: Slowly spray 100 g of distilled water into Material A and stir evenly to obtain Material B.
[0078] Step 3: Load Material B into a mold, and then use a pressure granulator to press it into shape at a pressure of 10 MPa for a pressing time of 100 s. After pressing, crush it and sieve it through a 40-mesh sieve to obtain Material C.
[0079] Step 4: Place Material C in a muffle furnace and calcine it in air at 1300 °C for 3 h, and cool it with the furnace to obtain Material D.
[0080] Step 5: Mix mixture D with 150 g of distilled water and stir evenly to form a wet material. Take 119 g of the wet material and transfer it to a honeycomb mold for molding. After demolding, a green body with a honeycomb structure is obtained.
[0081] The size of the obtained green body: height 40 mm, diameter 30 mm. There are 13 honeycomb grooves in the green body. The honeycomb grooves are parallel to the height direction of the green body. The center of one honeycomb groove overlaps with the center of the green body; the remaining 12 honeycomb grooves are evenly spaced along the center of the green body, and the distance between the center of any honeycomb groove and the center of the green body is 6.5 mm; the diameter of the 13 honeycomb grooves is 2 mm, and the height is 38 mm.
[0082] Step 6: Place the green body with a honeycomb structure in a muffle furnace. Place the open end of the honeycomb groove in the green body with a honeycomb structure downward, and calcine it at 1000 °C in air for 7 h to obtain an ICO target.
[0083] Example 4: A method for preparing an ICO target, comprising the following steps: Step 1: Put 1800 g of high-purity indium oxide powder and 200 g of cerium oxide powder into a three-dimensional mixer and mix for 12 h to obtain material A.
[0084] Step 2: Slowly spray 20 g of distilled water into material A and stir evenly to obtain material B.
[0085] Step 3: Load material B into a mold, and then use a pressure granulator to mold it. The pressure is 200 MPa, and the pressure application time is 5 s. After pressing, break it and screen it through a 40-mesh sieve to obtain material C.
[0086] Step 4: Place material C in a muffle furnace and calcine it at 1350 °C in air for 5 h, and cool it with the furnace to obtain material D.
[0087] Step 5: Mix mixture D with 20 g of distilled water and stir evenly to obtain a wet material. Take 98.5 g of the wet material and transfer it to a honeycomb mold for molding. After demolding, a green body with a honeycomb structure is obtained.
[0088] The size of the obtained green body: height 40 mm, diameter 27.5 mm. There are 9 honeycomb grooves in the green body. The honeycomb grooves are parallel to the height direction of the green body. The center of one honeycomb groove overlaps with the center of the green body, and the other 8 honeycomb grooves are evenly spaced along the center of the green body, and the distance between the center of any honeycomb groove and the center of the green body is 6.5 mm; the diameter of the 9 honeycomb grooves is 2.5 mm, and the height is 38 mm.
[0089] Step 6: Place the green body with a honeycomb structure in a muffle furnace. Place the open end of the honeycomb groove in the green body with a honeycomb structure downward, and calcine it at 1100 °C in air for 4 h to obtain an ICO target.
[0090] Example 5: A method for preparing an ICO target material, comprising the following steps: Step 1: Put 1800 g of high-purity indium oxide powder and 200 g of cerium oxide powder into a three-dimensional mixer and mix for 12 h to obtain Material A.
[0091] Step 2: Slowly spray 20 g of distilled water into Material A and stir evenly to obtain Material B.
[0092] Step 3: Load Material B into a mold, and then use a pressure granulator to press it into shape. The pressure is 200 MPa, and the pressure application time is 5 s. After pressing, break it and sieve it through a 40-mesh sieve to obtain Material C.
[0093] Step 4: Place Material C in a muffle furnace and calcine it in air at 1350 °C for 5 h, and then cool it with the furnace to obtain Material D.
[0094] Step 5: Mix Material D and 20 g of distilled water and stir evenly to prepare a wet material. Take 98.5 g of the wet material and transfer it to a honeycomb mold to press it into shape. After demolding, a rough blank with a honeycomb structure is obtained.
[0095] The dimensions of the obtained rough blank are: height 40 mm, diameter 27.5 mm. There are 9 honeycomb grooves in the rough blank. The honeycomb grooves are parallel to the height direction of the rough blank. The center of one honeycomb groove overlaps with the center of the rough blank, and the other 8 honeycomb grooves are evenly spaced along the center of the rough blank, and the distance between the center of any one honeycomb groove and the center of the rough blank is 6.5 mm; the diameters of the 9 honeycomb grooves are all 2.5 mm, and the height is 38 mm.
[0096] Step 6: Place the rough blank with a honeycomb structure in a muffle furnace, with the open end of the honeycomb groove in the rough blank facing upward, and calcine it in air at 1100 °C for 4 h to obtain the ICO target material.
[0097] Example 6: A method for preparing an ICO target material, comprising the following steps: Step 1: Put 1700 g of high-purity indium oxide powder and 300 g of cerium oxide powder into a three-dimensional mixer and mix for 12 h to obtain Material A; Step 2: Slowly spray 200 g of distilled water into Material A and stir evenly to obtain Material B; Step 3: Load Material B into a mold, and then use a pressure granulator to press it into shape. The pressure is 50 MPa, and the pressure application time is 15 s. After pressing, break it and sieve it through a 40-mesh sieve to obtain Material C; Step 4: Place Material C in a muffle furnace and calcine it in air at 1230 °C for 2 h, and then cool it with the furnace to obtain Material D; Step 5: Mix mixture D with 100 g of distilled water and stir evenly to obtain wet material. Take 98 g of the wet material, transfer it to a honeycomb mold, press it into shape, and demold to obtain a rough blank with a honeycomb structure.
[0098] The dimensions of the obtained rough blank are as follows: height 40 mm, diameter 27.5 mm. There are 17 honeycomb grooves in the rough blank. The honeycomb grooves are parallel to the height direction of the rough blank. The center of one honeycomb groove overlaps with the center of the rough blank. The remaining 16 honeycomb grooves are divided into two groups. Each group of 8 honeycomb grooves is evenly spaced along the center of the rough blank. The distance between the center of the group of honeycomb grooves close to the center of the rough blank and the center of the rough blank is 6.5 mm. The diameter of the group of honeycomb grooves close to the center of the rough blank is 1.5 mm, and the height is 38 mm. The distance between the center of any one honeycomb groove in the other group of honeycomb grooves and the center of the rough blank is 13.75 mm. The diameter of the group of honeycomb grooves far from the center of the rough blank is 2.5 mm, and the height is 38 mm. Step 6: Place the rough blank with a honeycomb structure in a muffle furnace. Place the open end of the honeycomb groove in the rough blank with a honeycomb structure facing down, and bake it at 1200 °C in air for 7 h to obtain an ICO target.
[0099] Coat the targets prepared in Examples 2 - 6 and Comparative Example 1, and observe their coating conditions. Table 1 shows the appearance and coating test data of the ICO targets prepared in Examples 2 - 6 and Comparative Example 1.
[0100] Table 1 Appearance and coating test data of the ICO targets prepared in Examples 2 - 6 and Comparative Example 1 The inventors controlled the molding density of the ICO targets prepared in Examples 2 - 6 and Comparative Example 1 to be 59%. On the premise that the molding density of the ICO targets is the same, it can be seen from Table 1 that the sputtering cracking rate of the ICO targets provided by the present invention is greatly reduced, and can even be reduced to 0.
[0101] The reason for the low sintering qualification rate of the ICO target prepared in Example 5 is that placing the open end of the honeycomb groove upward creates an open environment for the honeycomb groove, which is prone to shrinkage deformation, resulting in large shrinkage at the upper end and small shrinkage at the lower end of the ICO target. Comparing the sintering qualification rates of the targets prepared in Example 4 and Example 5, it can be proved that when baking the rough blank with a honeycomb structure, placing the closed end of the honeycomb groove upward can reduce the shrinkage deformation of the target, which is beneficial to improving the qualification rate and appearance of the product and reducing costs.
[0102] When the ICO target material prepared in Example 6 is considered, 8 honeycomb grooves are formed on the outer side surface of the ICO target material. Compared with the case where the openings are inside the target material, its transverse thermal conductivity will be reduced to some extent, and there will be a small probability of cracking in the target material, which does not affect the subsequent coating. The heat dissipation performance and transverse thermal conductivity are lower compared to the solution where 17 honeycomb grooves are all formed inside the ICO, and the 8 honeycomb grooves are in an open environment, which may lead to an increase in the sputtering degree of the ICO target material.
[0103] The heat dissipation conditions of the ICO target materials prepared in Examples 2 to 6 and Comparative Example 1 can be judged through the sputtering conditions in Table 1. It can be seen that when coating with the ICO target material provided by the present invention, the sputtering conditions are good, which can prove that the ICO target material provided by the present invention has good heat dissipation performance and transverse thermal conductivity.
[0104] The above-described embodiments are only preferred specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope of the present invention, according to the technical solution and its concept of the present invention, makes equivalent substitutions or changes, and should be covered by the protection scope of the present invention.
Claims
1. An ICO target material, characterized in that: The ICO target is cylindrical and has a honeycomb structure therein. The honeycomb structure includes a plurality of honeycomb grooves arranged along the height direction of the ICO target. One end of the honeycomb groove is open and the other end is closed. The closed ends of the honeycomb grooves face the same direction.
2. The ICO target material according to claim 1, characterized in that: The ICO target material comprises indium oxide and cerium oxide, wherein the indium oxide accounts for 80wt% to 99wt% and the remainder is cerium oxide and inevitable impurities.
3. The ICO target material according to claim 1, characterized in that: The honeycomb structure is distributed in layers, and each layer includes a plurality of honeycomb grooves evenly spaced along the center of the ICO target material. The number of the honeycomb grooves distributed in each layer is consistent, and the honeycomb grooves between two adjacent layers are staggered.
4. The ICO target material according to claim 3, characterized in that Each layer is distributed with 4 to 10 honeycomb grooves; the centers of the multiple honeycomb grooves in the same layer are all located on the same arc, the distance between two adjacent arcs is 5 to 15 mm, and the diameter of the honeycomb groove is 1.0 to 2.5 mm.
5. The ICO target material according to claim 1 or 2, characterized in that: The closed end of the honeycomb groove is arranged in an arc surface, and the concave surface of the arc surface faces the inside of the honeycomb groove.
6. The ICO target material according to claim 1, characterized in that: The cross section of the honeycomb groove is circular.
7. The method for preparing an ICO target according to any one of claims 1 to 6, characterized in that: The steps include: Step 1, mixing indium oxide powder and cerium oxide powder to obtain material A, adding pure water to material A to obtain material B, and crushing and sieving material B after pressure molding to obtain material C; Step 2, calcining material C in an oxygen-containing atmosphere and then sieving to obtain material D; Step 3, adding pure water to material D and placing it in a honeycomb mold for compression molding, and after demolding, a rough blank with a honeycomb structure is obtained; Step 4, placing the rough honeycomb structure in an oxygen-containing atmosphere and calcining it for a certain period of time to obtain the ICO target material.
8. The method for preparing an ICO target material according to claim 7, characterized in that: In step 1, the pressure during pressure molding is 10-200 MPa, and the pressing time is 5-120 s.
9. The method for preparing an ICO target material according to claim 7 or 8, characterized in that: In step 2, the calcination temperature is 1230-1350° C., and the calcination time is 2-5 hours; in step 4, the calcination temperature is 1000-1200° C., and the calcination time is 1-7 hours.
10. The method for preparing an ICO target material according to claim 7 or 8, characterized in that: In step 4, when the rough embryo of the honeycomb structure is baked, the closed end of the honeycomb groove is located at the top.