Multi-channel microscopic imaging visual field expansion detection system and method

Abstract

The invention belongs to the technical field of image detection, and relates to a multichannel microscopic imaging visual field expansion detection system and method.The system comprises an object carrying platform, an infinite correction microscope objective, a beam splitter, a diaphragm, a tube lens and a camera sensor, the infinite correction microscope objective is used for carrying out microscopic imaging on a sample carried by the object carrying platform, and the beam splitter is used for splitting the beam splitter; the beam splitter is used for segmenting parallel beams from the infinity correction microscope objective, the diaphragm is used for carrying out regional division on an imaging view field of the infinity correction microscope objective, and the camera sensor is used for capturing light rays, focused by the tube lens, of each light path channel to generate sub-regional images; and the sub-view area images acquired by the camera sensors are spliced to form microscopic imaging view expansion. According to the multi-channel microscopic imaging visual field expansion detection system and method, multiple scanning requirements are reduced, the efficiency is improved by multiple times, and the system and method are suitable for large-visual-field detection scenes such as microscopic imaging and white light interferometers and have wide economic and social benefits.

Description

Technical Field

[0001] The present invention belongs to the technical field of image detection, and particularly relates to a multi-channel microscopic imaging field-of-view expansion detection system and method. Background Art

[0002] Microscopic imaging technology is widely used in fields such as biomedicine, industrial inspection, and materials science. With the deepening of its application, the demand for high-resolution and large-field microscopic imaging is increasing day by day. However, there is a contradiction between the field-of-view size and the detection efficiency in traditional microscopic imaging systems. The imaging field-of-view of the objective lens is usually fixed by optical design, while the detection area of the actual sample often exceeds the field-of-view range, resulting in the need to move or scan the sample multiple times to complete the detection. This not only takes time but may also introduce stitching errors and affect the imaging accuracy.

[0003] To improve the detection efficiency, high-frame-rate cameras have gradually become an important component of microscopic imaging. However, the target surface of high-frame-rate cameras is small and cannot fully cover the imaging field-of-view of the objective lens; although large-target-surface cameras can cover a larger range, they are costly and not suitable for multi-channel or large-scale applications.

[0004] For example, in fields such as white-light interferometers, it is often necessary to perform high-precision surface measurements on large-area samples. The currently adopted technologies mostly rely on multiple scans to cover the entire detection area, which is time-consuming and prone to introducing errors. In addition, existing technologies such as CN114384020B adopt polarization beam splitting to achieve multi-channel imaging, which is suitable for application scenarios with special requirements for polarization characteristics and has limited effect on expanding the sample imaging range.

[0005] Therefore, there is an urgent need for a multi-channel microscopic imaging field-of-view expansion detection system and method that can make full use of the imaging range of the objective lens through multi-channel beam splitting and camera field-of-view division to achieve single-shot imaging covering a large field-of-view. The multi-channel microscopic imaging field-of-view expansion detection system and method have broad application potential and are applicable to multiple fields such as white-light interferometers, fluorescence microscopes, and industrial inspections. Summary of the Invention

[0006] Aiming at the technical problems in the existing microscopic imaging system that the imaging field-of-view is too small to cover the area to be detected of the actual sample, resulting in the need to move or scan the sample multiple times to complete the detection, which is not only time-consuming but also prone to introducing stitching errors; and the target surface of high-frame-rate cameras is small and cannot fully utilize the imaging field-of-view of the objective lens; large-target-surface cameras are costly and not suitable for multi-channel or large-scale use; and the polarization beam splitting method can only obtain different polarization information in the same area, the present invention proposes a multi-channel microscopic imaging field-of-view expansion detection system and method to solve at least one of the above technical problems.

[0007] In a preferred embodiment of the present invention, a multi-channel microscopic imaging field-of-view expansion detection system is provided, including:

[0008] A stage for carrying a sample.

[0009] An infinity-corrected microscope objective for microscopically imaging the sample carried on the stage.

[0010] A beam splitter for splitting the parallel light beam from the infinity-corrected microscope objective to form a plurality of independent optical path channels.

[0011] A plurality of diaphragms, each diaphragm being respectively disposed on each independent optical path channel to divide the imaging field of view of the infinity-corrected microscope objective into regions.

[0012] A plurality of tube lenses, each tube lens being respectively disposed downstream of the diaphragm on each independent optical path channel.

[0013] A camera sensor for capturing the light rays of each optical path channel focused by the tube lens to generate sub-region images.

[0014] Preferably, the infinity-corrected microscope objective is divided into an interference objective and a non-interference objective; the beam splitting ratio of the beam splitter is 50:50.

[0015] Preferably, the beam splitter includes a first beam splitter, a second beam splitter, and a third beam splitter. The first beam splitter is located downstream of the infinity-corrected microscope objective to split the parallel light beam from the infinity-corrected microscope objective to form a first optical path channel and a second optical path channel; the second beam splitter is located on the first optical path channel to split the parallel light beam of the first optical path channel to form a third optical path channel and a fourth optical path channel; the third beam splitter is located on the second optical path channel to split the parallel light beam of the second optical path channel to form a fifth optical path channel and a sixth optical path channel.

[0016] Preferably, the diaphragm is a mechanical diaphragm or a liquid crystal diaphragm.

[0017] Preferably, the diaphragm includes a first diaphragm, a second diaphragm, a third diaphragm, and a fourth diaphragm with different opening positions; the first diaphragm, the second diaphragm, the third diaphragm, and the fourth diaphragm are respectively disposed on the third optical path channel, the fourth optical path channel, the fifth optical path channel, and the sixth optical path channel to divide the imaging field of view of the infinity-corrected microscope objective into four regions: upper left, lower left, upper right, and lower right.

[0018] Preferably, the tube lens includes: a first tube lens, a second tube lens, a third tube lens, and a fourth tube lens; the first tube lens, the second tube lens, the third tube lens, and the fourth tube lens are respectively arranged downstream of the first diaphragm, the second diaphragm, the third diaphragm, and the fourth diaphragm, and are used to focus the light rays of each optical path channel onto the camera sensor.

[0019] Preferably, the camera sensor includes: a first camera sensor, a second camera sensor, a third camera sensor, and a fourth camera sensor, and the first camera sensor, the second camera sensor, the third camera sensor, and the fourth camera sensor are respectively arranged downstream of the first tube lens, the second tube lens, the third tube lens, and the fourth tube lens.

[0020] Preferably, the sub-field region images collected by each camera sensor are stitched to form an extended microscopic imaging field of view, and there is a 10%-20% overlap between the opening regions of each diaphragm and its adjacent diaphragm.

[0021] In another preferred embodiment of the present invention, a multi-channel microscopic imaging field of view extension detection method is provided, including:

[0022] Step S1: The infinity-corrected microscope objective lens focuses on the sample carried on the stage, and transmits the light rays of the sample to the beam splitter in the form of parallel light beams;

[0023] Step S2: The beam splitter divides the parallel light beams to form a plurality of independent optical path channels, and each optical path channel corresponds to a different region of the infinity-corrected microscope objective lens;

[0024] Step S3: The diaphragms arranged on each independent optical path channel divide the imaging field of view of the infinity-corrected microscope objective lens;

[0025] Step S4: The tube lenses arranged downstream of the diaphragms on each independent optical path channel focus the light rays of each optical path channel onto the corresponding camera sensors;

[0026] Step S5: The camera sensors corresponding to each optical path channel simultaneously collect the sub-field region images of the corresponding channels;

[0027] Step S6: The sub-field region images collected by each camera sensor are subjected to image stitching processing to form a complete large-field image.

[0028] Compared with the prior art, the present invention can bring at least one of the following beneficial effects:

[0029] (1) A multi-channel microscopic imaging field-of-view expansion detection system of the present application physically expands the imaging field-of-view of an infinity-corrected microscopic objective through optical path channel division and the cooperation of a multi-beam splitter, multi-apertures, multi-tube lenses, and multi-camera sensors; and, after stitching the sub-field region images collected by each of the camera sensors, a microscopic imaging field-of-view expansion is formed. There is a 10%-20% overlap between the opening regions of each aperture and its adjacent aperture, ensuring seamless connection of the stitching region. The light in the overlapping region can be jointly collected by multiple cameras for subsequent calibration of image stitching; in addition, the camera sensor can use a high-frame-rate camera with a small target surface, reducing the system cost, achieving single-shot imaging covering a large sample area, and significantly improving the detection efficiency.

[0030] (2) Compared with traditional methods, a multi-channel microscopic imaging field-of-view expansion detection method of the present application reduces the need for multiple scans, and the efficiency is increased by dozens of times. It is applicable to large-field detection scenarios such as microscopic imaging and white light interferometers, and has broad economic and social benefits. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] The following will further illustrate the above characteristics, technical features, advantages and their implementation manners in a clear and understandable manner in combination with the drawings and the preferred embodiments.

[0032] Figure 1 is a schematic structural diagram of a multi-channel microscopic imaging field-of-view expansion detection system according to a specific embodiment of the present invention;

[0033] Figure 2 is a schematic structural diagram of the upper left opening position of an aperture in a multi-channel microscopic imaging field-of-view expansion detection system according to a specific embodiment of the present invention;

[0034] Figure 3 is a schematic structural diagram of the lower left opening position of an aperture in a multi-channel microscopic imaging field-of-view expansion detection system according to a specific embodiment of the present invention;

[0035] Figure 4 is a schematic structural diagram of the upper right opening position of an aperture in a multi-channel microscopic imaging field-of-view expansion detection system according to a specific embodiment of the present invention;

[0036] Figure 5 is a schematic structural diagram of the lower right opening position of an aperture in a multi-channel microscopic imaging field-of-view expansion detection system according to a specific embodiment of the present invention;

[0037] Figure 6 is a schematic diagram of an image collected by a camera sensor in an optical path channel of a multi-channel microscopic imaging field-of-view expansion detection system according to a specific embodiment of the present invention;

[0038] Figure 7It is a schematic diagram of an image collected by a camera sensor in another optical path channel of a multi-channel microscopic imaging field-of-view expansion detection system according to a specific embodiment of the present invention;

[0039] Figure 8 It is a schematic diagram of an image collected by a camera sensor in another optical path channel of a multi-channel microscopic imaging field-of-view expansion detection system according to a specific embodiment of the present invention;

[0040] Figure 9 It is a schematic diagram of an image collected by a camera sensor in another optical path channel of a multi-channel microscopic imaging field-of-view expansion detection system according to a specific embodiment of the present invention;

[0041] Figure 10 It is a schematic diagram of the stitched images collected by camera sensors in different optical path channels of a multi-channel microscopic imaging field-of-view expansion detection system according to a specific embodiment of the present invention; Specific Embodiment

[0042] The following further details each aspect of the present invention.

[0043] Unless otherwise defined or described, all professional and scientific terms used herein have the same meaning as those familiar to those skilled in the art. In addition, any methods and materials similar or equivalent to the described content can be applied to the method of the present invention.

[0044] Unless otherwise clearly specified and limited, the "or" described in the present invention includes the relationship of "and". The "and" is equivalent to the Boolean logic operator "AND", the "or" is equivalent to the Boolean logic operator "OR", and "AND" is a subset of "OR".

[0045] It can be understood that although terms such as "first", "second", etc. can be used herein to describe different elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. Therefore, the first element can be called the second element without departing from the teachings of the inventive concept.

[0046] In the present invention, the terms "consisting essentially of..." and "consisting of" are included in the terms "containing", "comprising" or "including".

[0047] Unless otherwise clearly specified and limited, the terms "connected", "communicated", "connected" in the present invention should be understood in a broad sense. For example, it can be a fixed connection, or can be connected through an intermediate medium, and can be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific situations.

[0048] For example, if an element (or component) is referred to as being on another element, coupled to another element, or connected to another element, then the one element can be formed directly on, coupled to, or connected to the other element, or there can be one or more intervening elements therebetween. Conversely, if the expressions "directly on...", "directly coupled to...", and "directly connected to..." are used herein, then it means there are no intervening elements. Other words used to describe the relationship between elements should be interpreted similarly, such as "between..." and "directly between...", "attached" and "directly attached", "adjacent" and "directly adjacent", etc.

[0049] In addition, it should be noted that the terms "front", "rear", "left", "right", "upper", and "lower" used in the following description refer to the directions in the drawings. The terms "inner" and "outer" respectively refer to the directions towards or away from the geometric center of a specific component. It can be understood that herein, these terms are used to describe the relationship of one element, layer, or region relative to another element, layer, or region as shown in the drawings. Except for the orientations described in the drawings, these terms should also include other orientations of the device.

[0050] Other aspects of the present invention will be apparent to those skilled in the art from the present disclosure.

[0051] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the specific embodiments of the present invention will be described below with reference to the accompanying drawings. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings, and other embodiments can also be obtained.

[0052] It should also be noted that the diagrams provided in the following embodiments only schematically illustrate the basic concept of the present application. The diagrams only show the components related to the present application, rather than being drawn according to the number, shape, and size of the components in actual implementation. The types, quantities, and proportions of the components in actual implementation can be arbitrarily changed, and the component layout pattern may also be more complex. For example, the thickness of the elements in the drawings can be exaggerated for clarity.

[0053] Embodiment 1

[0054] See the attached Figures 1-10 , in a preferred embodiment of the present invention, a multi-channel microscopic imaging field-of-view expansion detection system is provided, including:

[0055] A sample stage 12 for carrying a sample;

[0056] Infinity-corrected microscope objective 1, which is used for microscopic imaging of the sample carried by the stage 12;

[0057] Beam splitter 2, which is used to split the parallel light beam from the infinity-corrected microscope objective 1 to form a plurality of independent optical path channels;

[0058] Apertures, there are a plurality of apertures, and the plurality of apertures are respectively arranged on each independent optical path channel to divide the imaging field of view of the infinity-corrected microscope objective 1 into regions;

[0059] Tube lenses 7, there are a plurality of tube lenses 7, and the plurality of tube lenses 7 are respectively arranged downstream of the apertures on each independent optical path channel;

[0060] Camera sensor, which is used to capture the light rays of each optical path channel focused by the tube lens 7 to generate sub-region images.

[0061] Preferably, the infinity-corrected microscope objective 1 is divided into an interference objective and a non-interference objective; the beam splitting ratio of the beam splitter 2 is 50:50.

[0062] It should be noted that the infinity-corrected microscope objective is based on an infinity-corrected optical system and has excellent optical performance and flexibility. The characteristic of the infinity-corrected optical system is that the objective transmits the light rays emitted by the sample in the form of a parallel light beam to the tube lens, and then the tube lens focuses it on the imaging plane, which is convenient for realizing modular design, long working distance, and aberration correction. The interference objective included in the infinity-corrected microscope objective is mainly used for interference measurement and surface topography analysis, and the non-interference objective is mainly used for conventional microscopic imaging and observation, and to provide high-resolution and high-contrast images.

[0063] As a preferred embodiment, the beam splitter 2 is composed of a first beam splitter, a second beam splitter, and a third beam splitter. The first beam splitter is located downstream of the infinity-corrected microscope objective 1 to split the parallel light beam from the infinity-corrected microscope objective 1 to form a first optical path channel and a second optical path channel; the second beam splitter is located on the first optical path channel to split the parallel light beam of the first optical path channel to form a third optical path channel and a fourth optical path channel; the third beam splitter is located on the second optical path channel to split the parallel light beam of the second optical path channel to form a fifth optical path channel and a sixth optical path channel.

[0064] It should be noted that the first beam splitter, the second beam splitter, and the third beam splitter divide the parallel light beam from the infinity-corrected microscope objective 1 to form a plurality of independent optical path channels, ensuring that each optical path channel covers different parts of the imaging field of view of the infinity-corrected microscope objective 1. Moreover, in practical applications, the number of the beam splitters 2 can be adjusted according to actual needs.

[0065] As a preferred embodiment, the aperture is a mechanical aperture, a liquid crystal aperture, or an adjustable aperture.

[0066] It should be noted that the mechanical aperture is a device that adjusts the light flux through a physical structure (such as blades or apertures); the liquid crystal aperture can control the arrangement of liquid crystal molecules through an electric field, dynamically adjust the light flux and beam shape, has programmable properties, and can cooperate with the usage scenario of the present invention for dynamic field of view adjustment.

[0067] As a preferred embodiment, the aperture is composed of a first aperture 3, a second aperture 4, a third aperture 5, and a fourth aperture 6 with different opening positions; the first aperture 3, the second aperture 4, the third aperture 5, and the fourth aperture 6 are respectively arranged on the third optical path channel, the fourth optical path channel, the fifth optical path channel, and the sixth optical path channel, dividing the imaging field of view of the infinity-corrected microscope objective 1 into four regions: upper left, lower left, upper right, and lower right.

[0068] It should be noted that the first aperture 3, the second aperture 4, the third aperture 5, and the fourth aperture 6 with different opening positions included in the aperture are used to divide the imaging field of view of the infinity-corrected microscope objective 1. The aperture is placed at an appropriate position in the optical path channel between the infinity-corrected microscope objective 1 and the tube lens. Only a specific opening range can pass the light beam, so that a specific part of the objective field of view is imaged on the camera sensor. The size of the aperture opening needs to be calculated according to the magnification of the objective and the size of the camera sensor to ensure that the light beam passing through it just covers the camera sensor. The center of each camera sensor needs to be accurately aligned with the opening center of the corresponding aperture to ensure that the light received by the camera sensor is consistent with the field of view defined by the aperture. Moreover, in practical applications, the number of the apertures can be adjusted according to actual needs.

[0069] As a preferred embodiment, the tube lens 7 is composed of a first tube lens, a second tube lens, a third tube lens, and a fourth tube lens; the first tube lens, the second tube lens, the third tube lens, and the fourth tube lens are respectively arranged downstream of the first aperture 3, the second aperture 4, the third aperture 5, and the fourth aperture 6, and are used to focus the light rays of each optical path channel onto the camera sensor.

[0070] It should be noted that in practical applications, the number of the tube lenses can be adjusted according to actual needs.

[0071] As a preferred embodiment, the camera sensor is composed of a first camera sensor 8, a second camera sensor 9, a third camera sensor 10, and a fourth camera sensor 11, and the first camera sensor 8, the second camera sensor 9, the third camera sensor 10, and the fourth camera sensor 11 are respectively arranged downstream of the first tube lens, the second tube lens, the third tube lens, and the fourth tube lens.

[0072] It should be noted that in practical applications, the number of the camera sensors can be adjusted according to actual needs.

[0073] As a preferred embodiment, the sub-field region images collected by each camera sensor are stitched to form an extended microscopic imaging field of view, and there is a 10%-20% overlap between the opening regions of each diaphragm and its adjacent diaphragm.

[0074] Embodiment 2

[0075] In another preferred embodiment of the present invention, a multi-channel microscopic imaging field of view expansion detection system is provided. The multi-channel microscopic imaging field of view expansion detection system is similar to that of Embodiment 1, and the only difference is that: the beam splitter is replaced by a multi-faceted beam splitting prism or a mirror array.

[0076] Embodiment 3

[0077] In another preferred embodiment of the present invention, a multi-channel microscopic imaging field of view expansion detection system is provided. The multi-channel microscopic imaging field of view expansion detection system is similar to that of Embodiment 1, and the only difference is that: the infinity-corrected microscopic objective lens 1 is replaced by a common imaging objective lens for detecting biological tissues, industrial samples, etc.

[0078] Embodiment 4

[0079] In another preferred embodiment of the present invention, a multi-channel microscopic imaging field of view expansion detection system is provided. The multi-channel microscopic imaging field of view expansion detection system is similar to that of Embodiment 1, and the only difference is that: the infinity-corrected microscopic objective lens 1 is replaced by an interference objective lens for measuring the surface roughness of samples, semiconductor topography measurement, etc.

[0080] Embodiment 5

[0081] In another preferred embodiment of the present invention, a multi-channel microscopic imaging field of view expansion detection method is provided, including:

[0082] Step S1: The infinity-corrected microscopic objective lens 1 focuses on the sample carried on the stage 12, and transmits the light of the sample to the beam splitter 2 in the form of a parallel light beam;

[0083] Step S2: The beam splitter 2 splits the parallel light beam to form a plurality of independent optical path channels, and each optical path channel corresponds to a different area of the infinity-corrected microscope objective 1;

[0084] Step S3: The diaphragms disposed on each independent optical path channel divide the imaging field of view of the infinity-corrected microscope objective 1 into regions;

[0085] Step S4: The tube lens 7 downstream of the diaphragm disposed on each independent optical path channel focuses the light rays of each optical path channel onto the corresponding camera sensors;

[0086] Step S5: The camera sensors corresponding to each optical path channel simultaneously collect the sub-field area images of the corresponding channels;

[0087] Step S6: Perform image stitching processing on the sub-field area images collected by each camera sensor to form a complete large-field image.

[0088] Based on the present application, those skilled in the art should understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspects described herein can be used to implement the device and / or practice the method. In addition, this device can be implemented and this method can be practiced using other structures and / or functions in addition to one or more of the aspects described herein.

[0089] It should be noted that the above embodiments can be freely combined according to needs. The above are only the preferred embodiments of the present invention. It should be pointed out that for those of ordinary skill in the art, without departing from the principle of the present invention, several improvements and refinements can be made, and these improvements and refinements should also be regarded as the protection scope of the present invention.

[0090] All documents mentioned in the present invention are cited herein as references, just as if each document is cited separately as a reference. In addition, it should be understood that after reading the above content of the present invention, those skilled in the art can make various changes or modifications to the present invention, and these equivalent forms also fall within the scope defined by the appended claims of the present application.

Claims

1. A multi-channel microscopic imaging field of view expansion detection system, characterized in that: include: A loading platform, the loading platform is used to load the sample; An infinity-corrected microscope objective lens, wherein the infinity-corrected microscope objective lens is used for microscopic imaging of the sample carried by the loading platform; A beam splitter, which is used to split the parallel light beam from the infinity-corrected microscope objective to form a plurality of independent light path channels; A diaphragm, wherein the diaphragms are plural in number and the diaphragms are respectively arranged on each independent optical path channel to divide the imaging field of the infinity-corrected microscope objective into regions; Tube lenses, the tube lenses are plural in number, and the plural tube lenses are respectively and correspondingly arranged downstream of the aperture on each independent optical path channel; A camera sensor is used to capture the light of each optical path channel focused by the tube lens to generate a sub-area image.

2. A multi-channel microscopic imaging field of view expansion detection system according to claim 1, characterized in that: The infinity-corrected microscope objective lens is divided into an interference objective lens and a non-interference objective lens.

3. A multi-channel microscopic imaging field of view expansion detection system according to claim 1, characterized in that: The beam splitter has a beam splitting ratio of 50:

50.

4. A multi-channel microscopic imaging field of view expansion detection system according to claim 2 or 3, characterized in that: The beam splitter includes: a first beam splitter, a second beam splitter, and a third beam splitter. The first beam splitter is located downstream of the infinity-corrected microscope objective to split the parallel light beam from the infinity-corrected microscope objective to form a first optical path channel and a second optical path channel; the second beam splitter is located on the first optical path channel to split the parallel light beam of the first optical path channel to form a third optical path channel and a fourth optical path channel; the third beam splitter is located on the second optical path channel to split the parallel light beam of the second optical path channel to form a fifth optical path channel and a sixth optical path channel.

5. A multi-channel microscopic imaging field of view expansion detection system according to claim 4, characterized in that: The aperture is a mechanical aperture or a liquid crystal aperture.

6. A multi-channel microscopic imaging field of view expansion detection system according to claim 5, characterized in that: The aperture comprises: a first aperture, a second aperture, a third aperture, and a fourth aperture with different opening positions; the first aperture, the second aperture, the third aperture, and the fourth aperture are respectively arranged on the third optical path channel, the fourth optical path channel, the fifth optical path channel, and the sixth optical path channel, so as to divide the imaging field of the infinity-corrected microscope objective into four areas: the upper left area, the lower left area, the upper right area, and the lower right area.

7. A multi-channel microscopic imaging field of view expansion detection system according to claim 6, characterized in that: The tube lens includes: a first tube lens, a second tube lens, a third tube lens, and a fourth tube lens; the first tube lens, the second tube lens, the third tube lens, and the fourth tube lens are respectively arranged downstream of the first aperture, the second aperture, the third aperture, and the fourth aperture, and are used to focus the light of each optical path channel onto the camera sensor.

8. A multi-channel microscopic imaging field of view expansion detection system according to claim 7, characterized in that: The camera sensor includes: a first camera sensor, a second camera sensor, a third camera sensor, and a fourth camera sensor, wherein the first camera sensor, the second camera sensor, the third camera sensor, and the fourth camera sensor are respectively arranged downstream of the first tube lens, the second tube lens, the third tube lens, and the fourth tube lens.

9. A multi-channel microscopic imaging field of view expansion detection system according to claim 8, characterized in that: The sub-field of view images collected by the camera sensors are stitched to form a microscopic imaging field of view expansion, and the opening area of ​​each aperture and its adjacent aperture is set to overlap by 10%-20%.

10. A multi-channel microscopic imaging field of view expansion detection method using the system of any one of claims 1 to 9, characterized in that: include: Step S1: The infinity-corrected microscope objective focuses the sample on the stage and transmits the light of the sample to the beam splitter in the form of a parallel beam; Step S2: a beam splitter splits the parallel light beam to form a plurality of independent light paths, each of which corresponds to a different region of the infinity-corrected microscope objective lens; Step S3: The apertures arranged on each independent optical path channel divide the imaging field of the infinity-corrected microscope objective into regions; Step S4, a tube lens arranged downstream of the aperture on each independent optical path channel focuses the light of each optical path channel onto the corresponding camera sensors; Step S5: the camera sensor corresponding to each optical path channel simultaneously collects the sub-field area image of the corresponding channel; Step S6: performing image stitching processing on the sub-viewing area images collected by each camera sensor to form a complete large-viewing area image.

Images