High-frequency laser scanning device and control method

Abstract

The invention relates to the technical field of optical scanning, and provides a high-power high-frequency laser scanning device and a control method. The laser scanning device comprises a machine body, a rotating mirror assembly, a laser collimator, an f-theta field lens and a temperature control assembly. The machine body is provided with a first chamber, a first opening and a second opening, the rotating mirror assembly comprises a driving motor and a rotating mirror, the driving motor is connected with the rotating mirror, the rotating mirror is configured to be rotatably arranged in the first chamber around the vertical axis, the rotating mirror comprises a plurality of reflecting surfaces arranged around the vertical axis, and the reflecting surfaces are obliquely arranged relative to the vertical axis at the same inclination angle; the laser collimator is arranged at the first opening, and the f-theta field lens is arranged at the second opening; the temperature control assembly is arranged on the machine body so as to adjust the temperature in the first chamber. The laser scanning device disclosed by the invention can output high-frequency linear scanning light beams, can realize long-time continuous high-power use, and ensures the uniformity of light spot energy density distribution on a scanning track.

Description

Technical Field

[0001] The present invention relates to the technical field of optical scanning, and in particular, to a high-power high-frequency laser scanning device and a control method thereof. Background Art

[0002] Laser processing has the characteristics of good consistency, concentrated energy, high degree of automation, and convenience for large-scale production, and plays an irreplaceable role in the field of high-energy beam processing. Laser scanning is a key technology in the laser processing process. Existing laser scanning mainly includes galvanometer scanning and polygon mirror scanning. Compared with galvanometer scanning, polygon mirror scanning has a faster scanning speed and scanning frequency, and is suitable for processing fields such as laser cleaning, laser cutting, and laser printing.

[0003] Currently, the common problem existing in laser scanning technology is that it cannot meet the requirements of long-term continuous high-power use. For galvanometer scanning, continuous high-power working conditions will cause the temperature of the lens and the motor to rise, resulting in temperature drift and reduced processing accuracy. On the other hand, since the galvanometer is based on the reciprocating swing of the motor within a specific angle, its highest frequency is limited. Especially for high-power usage scenarios, the galvanometer lens is large, heavy, and has a large inertia, and the actual scanning frequency is lower, which cannot meet the high-frequency scanning usage requirements. Therefore, currently, polygon mirror scanning is mainly used for high-frequency scanning requirements.

[0004] However, it is found in practical applications that most polygon mirror scans are realized based on a multi-faceted prism polygon mirror. This scanning structure design is unreasonable, has poor reliability, cannot work at high power for a long time, and due to its specific structure, there are inherent defects in the optical path. Within one scanning cycle, the energy density distribution of the light beam on the scanning trajectory is uneven, thus affecting the product processing quality. Summary of the Invention

[0005] The present invention provides a high-power high-frequency laser scanning device and a control method thereof, which are used to at least solve or improve the problem that the existing polygon mirror scanning cannot meet the long-term continuous high-power use and there is uneven energy density distribution of the light spot on the scanning trajectory.

[0006] In a first aspect, the present invention provides a high-power high-frequency laser scanning device, including: A body having a first chamber and a first opening and a second opening communicating with the first chamber; A polygon mirror assembly including a driving motor and a polygon mirror, the driving motor being connected to the polygon mirror, the polygon mirror being configured to be rotatably disposed in the first chamber around a vertical axis, the polygon mirror including a plurality of reflecting surfaces disposed around the vertical axis, and each of the reflecting surfaces being inclined with respect to the vertical axis at the same inclination angle; A laser collimator and an f-θ field lens, the laser collimator is disposed at the first opening, the f-θ field lens is disposed at the second opening, the laser collimator emits a laser beam in the vertical direction towards the reflecting surface, and the laser beam can reach the f-θ field lens after being reflected by the reflecting surface and then be output through the f-θ field lens; A temperature control component is disposed on the body to adjust the temperature in the first chamber.

[0007] According to a high-power high-frequency laser scanning device provided by the present invention, the body further includes a second chamber, the second chamber is located below the first chamber, and the driving motor is disposed in the second chamber.

[0008] According to a high-power high-frequency laser scanning device provided by the present invention, a plurality of the reflecting surfaces are arranged in sequence along the circumference of the rotating mirror, and the laser beam reflected by each reflecting surface is vertically incident on the mirror surface of the f-θ field lens.

[0009] According to a high-power high-frequency laser scanning device provided by the present invention, the inclination angle of each reflecting surface with respect to the horizontal plane is 45°, and the optical axis of the f-θ field lens is horizontally arranged.

[0010] According to a high-power high-frequency laser scanning device provided by the present invention, the temperature control component includes: A temperature sensor for detecting the temperature information in the first chamber; A blade structure is disposed at the top end and / or the bottom end of the rotating mirror; A cooling member, at least a part of the cooling member is disposed in the first chamber; A controller is electrically connected to the temperature sensor and the cooling member respectively, and the controller is used to control the working state of the cooling member according to the temperature information fed back by the temperature sensor so that the temperature in the first chamber is within a preset temperature range.

[0011] According to a high-power high-frequency laser scanning device provided by the present invention, the cooling member includes a liquid cooling plate and a control valve, the liquid cooling plate is disposed on the bottom wall of the first chamber, a coolant flow channel is formed in the liquid cooling plate, and the control valve is disposed at the inlet of the coolant flow channel; The blade structure is disposed at the top end of the rotating mirror, and the controller is used to control the opening degree of the control valve according to the temperature information fed back by the temperature sensor.

[0012] According to a high-power high-frequency laser scanning device provided by the present invention, it further includes: a first heat dissipation structure, the first heat dissipation structure is disposed on the laser collimator to perform heat dissipation treatment on the laser collimator; And / or, further comprising: a second heat dissipation structure disposed on the f-θ field lens to dissipate heat from the f-θ field lens.

[0013] In a second aspect, the present invention further provides a control method for a high-power high-frequency laser scanning device as described above, comprising: Determining a target rotational speed of the drive motor of the rotating mirror assembly according to the scanning frequency of the laser beam to be obtained; When the laser is started, controlling the drive motor to rotate at the target rotational speed so that the laser beam emitted by the laser reaches the reflecting surface through the laser collimator, and then passes through the f-θ field lens after being reflected by the reflecting surface to obtain a laser beam capable of performing linear scanning.

[0014] According to a control method provided by the present invention, further comprising: Obtaining temperature information in the first chamber; Controlling the working state of the temperature control component according to the temperature information so that the temperature in the first chamber is within a preset temperature range.

[0015] According to a control method provided by the present invention, further comprising: When the temperature in the first chamber is higher than the maximum value of the preset temperature range and the duration exceeds a first duration, controlling the warning module to give a high-temperature warning prompt; When the temperature in the first chamber is lower than the minimum value of the preset temperature range and the duration exceeds a second duration, controlling the warning module to give a fault warning prompt.

[0016] The high-power high-frequency laser scanning device and control method provided by the present invention, by providing a rotating mirror assembly, a laser collimator, an f-θ field lens and a temperature control component based on the body, when the drive motor of the rotating mirror assembly drives the rotating mirror to rotate around the vertical axis, the laser beam emitted by the laser collimator will be sequentially reflected by the respective reflecting surfaces of the rotating mirror to the f-θ field lens. Since as the rotating mirror rotates, the incident point on the reflecting surface of the rotating mirror will periodically change relative to the position of the vertical axis, the laser beam incident on the f-θ field lens will periodically move up and down along the central plane. After being corrected by the f-θ field lens, a high-frequency linear scanning beam can be output; during this process, since the laser beam emitted by the laser collimator is incident on each reflecting surface at the same incident angle, and the corresponding reflecting surface reflects the laser beam to the f-θ field lens at the same exit angle, the spot size and optical path length of the laser beam reaching the f-θ field lens are both kept consistent, ensuring the uniformity of the spot energy density of the scanning beam on the scanning trajectory.

[0017] Meanwhile, since the temperature control component controls the temperature in the first chamber in real time during the operation of the entire laser scanning device, it can dissipate heat from the first chamber and the galvanometer inside it, preventing the galvanometer from deforming due to temperature rise and resulting in optical path distortion, ensuring that the entire laser scanning device can operate at high power for a long time, thereby ensuring the quality of laser processing and enabling wide applications in industrial fields such as laser cleaning, laser cutting, and laser printing. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0019] Figure 1 is a schematic structural diagram of a high-power high-frequency laser scanning device provided by the present invention.

[0020] Figure 2 is a top-view structural diagram of the galvanometer provided by the present invention.

[0021] Figure 3 is one of the control flowcharts of the control method based on the high-power high-frequency laser scanning device provided by the present invention.

[0022] Figure 4 is the second control flowchart of the control method based on the high-power high-frequency laser scanning device provided by the present invention.

[0023] Reference Signs: 1, body; 101, first chamber; 102, second chamber; 2, galvanometer assembly; 21, drive motor; 22, galvanometer; 220, reflecting surface; 3, laser collimator; 4, f-θ field lens; 5, temperature control component; 51, temperature sensor; 52, blade structure; 53, cooling member. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0024] To make the objectives, technical solutions, and advantages of the present invention clearer, the following will clearly and completely describe the technical solutions in the present invention with reference to the accompanying drawings in the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art without creative efforts based on the embodiments in the present invention belong to the scope of protection of the present invention.

[0025] The following will be combined with Figures 1-4, the high-power high-frequency laser scanning device and control method provided by the embodiments of the invention are described in detail through specific embodiments and their application scenarios.

[0026] In the first aspect, as Figure 1 and Figure 2 shown, the embodiments of the present invention provide a high-power high-frequency laser scanning device, including: a body 1, a galvanometer assembly 2, a laser collimator 3, an f-θ field lens 4, and a temperature control assembly 5; the body 1 has a first chamber 101 and a first opening and a second opening communicating with the first chamber 101; the galvanometer assembly 2 includes a driving motor 21 and a galvanometer mirror 22, the driving motor 21 is connected to the galvanometer mirror 22, the galvanometer mirror 22 is configured to be rotatably disposed in the first chamber 101 around a vertical axis, the galvanometer mirror 22 includes a plurality of reflecting surfaces 220 arranged around the vertical axis, and each of the reflecting surfaces 220 is inclined with respect to the vertical axis at the same inclination angle; wherein, each reflecting surface 220 is a smooth plane.

[0027] Furthermore, as Figure 1 shown, Figure 1 the arrow is used to indicate the transmission direction of the laser beam. The laser collimator 3 is disposed at the first opening, the f-θ field lens 4 is disposed at the second opening, the laser collimator 3 emits a laser beam vertically towards the reflecting surface 220, the laser beam can reach the f-θ field lens 4 after being reflected by the reflecting surface 220, and then is output through the f-θ field lens 4; the temperature control assembly 5 is disposed on the body 1 to adjust the temperature in the first chamber 101.

[0028] It can be understood that the laser collimator 3 can be disposed on the upper side of the body 1, the f-θ field lens 4 can be disposed on the side of the body 1, and the laser collimator 3 emits a laser vertically downward towards the reflecting surface 220 of the galvanometer mirror 22; when the driving motor 21 drives the galvanometer mirror 22 to rotate, each of the reflecting surfaces 220 of the galvanometer mirror 22 reflects the laser emitted by the laser collimator 3 in sequence.

[0029] Exemplarily, the optical axis of the laser collimator 3 is vertically distributed, the light outlet of the laser collimator 3 is downward and extends towards the reflecting surface 220 of the galvanometer mirror 22; each of the reflecting surfaces 220 of the galvanometer mirror 22 is inclined from bottom to top towards the vertical axis at the same inclination angle, and the inclination angle of the reflecting surface 220 relative to the horizontal plane can be 30° - 60°, and no specific limitation is made on this, as long as it is ensured that the laser beam reflected by each reflecting surface 220 is perpendicularly incident on the mirror surface of the f-θ field lens 4.

[0030] Meanwhile, the f-θ field lens 4 is a flat-field focusing lens that changes the position of the imaging beam without changing the optical characteristics of the optical system. Its core design goal is to solve problems such as uneven scanning speed and image plane curvature distortion caused by the non-linear relationship in traditional lenses during laser scanning. That is, by introducing barrel distortion, the non-linear relationship between the beam deflection angle and the trajectory position is corrected to achieve linear scanning of the laser beam.

[0031] In addition, the temperature control component 5 can be arranged on the peripheral wall of the first chamber 101. For example, the temperature control component 5 adopts a sandwich structure arranged inside the peripheral wall of the first chamber 101, and cooling water is passed through the sandwich structure to dissipate heat from the first chamber 101 and the rotating mirror 22 inside it, preventing optical path distortion caused by deformation of the rotating mirror 22 due to temperature rise.

[0032] Of course, the temperature control component 5 can also adopt cooling devices such as a plate heat exchanger or a semiconductor refrigeration sheet built into the first chamber 101, or the temperature control component 5 can also adjust the temperature inside the first chamber 101 based on the evaporator in the refrigeration system.

[0033] As can be seen from the above, in the high-power high-frequency laser scanning device shown in the present invention, by arranging the rotating mirror assembly 2, the laser collimator 3, the f-θ field lens 4, and the temperature control component 5 based on the machine body 1, when the driving motor 21 of the rotating mirror assembly 2 drives the rotating mirror 22 to rotate around the vertical axis, the laser beam emitted by the laser collimator 3 will be reflected by each reflecting surface 220 of the rotating mirror 22 to the f-θ field lens 4 in sequence. Since as the rotating mirror 22 rotates, the incident point on the reflecting surface 220 of the rotating mirror 22 will change periodically relative to the position of the vertical axis, the laser beam incident on the f-θ field lens 4 will move up and down periodically along the central plane. After being corrected by the f-θ field lens 4, a high-frequency linear scanning beam can be output; during this process, since the laser beam emitted by the laser collimator 3 is incident on each reflecting surface 220 at the same incident angle, and then the corresponding reflecting surface 220 reflects the laser beam to the f-θ field lens 4 at the same exit angle, the spot size and optical path length of the laser beam reaching the f-θ field lens 4 are both kept consistent, ensuring the uniformity of the spot energy density of the scanning beam on the scanning trajectory.

[0034] Meanwhile, since the temperature control component 5 controls the temperature inside the first chamber 101 in real time during the operation of the entire laser scanning device, it can dissipate heat from the first chamber 101 and the rotating mirror 22 inside it, preventing optical path distortion caused by deformation of the rotating mirror 22 due to temperature rise, ensuring that the entire laser scanning device can perform high-power work for a long time, and thus ensuring the laser processing quality and enabling wide application in industrial fields such as laser cleaning, laser cutting, and laser printing.

[0035] In some embodiments, such asFigure 1 As shown, the body 1 further includes a second chamber 102, the second chamber 102 is located below the first chamber 101, and the drive motor 21 is arranged in the second chamber 102. This design separates the drive motor 21 and the deflecting mirror 22 into different chambers, which not only facilitates the temperature control of the deflecting mirror 22 but also ensures the long-term stable operation of the drive motor 21.

[0036] Among them, the drive motor 21 can be a variable-frequency motor, and the drive motor 21 can drive the deflecting mirror 22 to rotate at the expected target speed by frequency modulation.

[0037] In practical applications, the power of the drive motor 21 can be set to 200W, the rated torque is 2.9 N·m, the peak torque is 10.1 N·m, the rated speed is 600 r / min, and the maximum speed is 900 r / min. The scanning frequency of the scanning beam formed based on the rotation of the deflecting mirror 22 by the laser scanning device is greater than 100 Hz. This laser scanning device is applicable to lasers with a rated power greater than 6 kW. For example, the power of the laser is 8 kW - 10 kW, which can convert the laser beam emitted by the laser into a linear scanning beam to perform linear scanning with uniform energy density, high speed, and high frequency based on this linear scanning beam, and maintain long-term stable operation.

[0038] In some embodiments, as Figure 1 and Figure 2 shown, a plurality of reflecting surfaces 220 are arranged in sequence along the circumferential direction of the deflecting mirror 22, and the laser beam reflected by each reflecting surface 220 is vertically incident on the mirror surface of the f-θ field lens 4.

[0039] As Figure 2 shown, the deflecting mirror 22 can be provided with twelve reflecting surfaces 220 along the circumferential direction. Figure 2 The circular dotted-line trajectory S is used to schematically show the moving trajectory of the light spot formed by the laser beam on each reflecting surface 220 of the deflecting mirror 22.

[0040] In some embodiments, the inclination angle of each reflecting surface 220 with respect to the horizontal plane is 45°, and the optical axis of the f-θ field lens 4 is horizontally arranged. This design can ensure that after the laser beam emitted by the laser collimator 3 is vertically incident on each reflecting surface 220, each reflecting surface 220 reflects the incident laser beam into a laser beam that is vertically incident on the f-θ field lens 4 in the horizontal direction.

[0041] In some embodiments, as Figure 1 shown, in order to facilitate the precise control of the temperature in the first chamber 101, the temperature control assembly 5 includes: a temperature sensor 51, a vane structure 52, a cooling member 53, and a controller; The temperature sensor 51 is used to detect the temperature information in the first chamber 101; the blade structure 52 is provided at the top end and / or the bottom end of the rotating mirror 22; at least part of the cooling member 53 is provided in the first chamber 101; the controller is electrically connected to the temperature sensor 51 and the cooling member 53 respectively, and the controller is used to control the working state of the cooling member 53 according to the temperature information fed back by the temperature sensor 51, so that the temperature in the first chamber 101 is within a preset temperature range.

[0042] It can be understood that the temperature sensor 51 can be arranged on the inner wall of the first chamber 101, and the temperature sensor 51 can adopt a thermistor. The controller can adopt a single-chip microcomputer or a PLC controller. The controller can ensure that the temperature in the first chamber 101 is maintained within the preset temperature range (a, b) by controlling the working state of the cooling member 53, where b is greater than a.

[0043] Since the blade structure 52 is arranged on the rotating mirror 22, the blade structure 52 will rotate under the drive of the rotating mirror 22 to drive the air flow in the first chamber 101, and the flowing air will have convective heat transfer with the cooling member 53, so as to achieve the purpose of adjusting the temperature in the first chamber 101.

[0044] Among them, the blade structure 52 can include a plurality of blades, and the plurality of blades are arranged along the circumferential direction of the rotating mirror 22.

[0045] In some embodiments, as Figure 1 shown, the cooling member 53 includes a liquid cooling plate and a control valve. The liquid cooling plate is arranged on the bottom wall of the first chamber 101, a coolant flow channel is formed in the liquid cooling plate, and the control valve is arranged at the inlet of the coolant flow channel; the blade structure 52 is arranged at the top end of the rotating mirror 22, and the controller is used to control the opening degree of the control valve according to the temperature information fed back by the temperature sensor 51. Among them, the control valve can be an electromagnetic flow valve.

[0046] It can be understood that when the temperature sensor 51 detects that the temperature in the first chamber 101 is higher than the maximum value b of the preset temperature range, the opening degree of the control valve is increased to increase the flow rate of the coolant flowing into the liquid cooling plate through the control valve until the temperature in the first chamber 101 drops below the maximum value b of the preset temperature range, otherwise the opening degree of the control valve is continuously increased until the opening degree of the control valve reaches the maximum.

[0047] When the temperature sensor 51 detects that the temperature in the first chamber 101 is lower than the minimum value a of the preset temperature range, the opening degree of the control valve is decreased to reduce the flow rate of the coolant flowing into the liquid cooling plate through the control valve and reduce the heat dissipation capacity of the liquid cooling plate until the temperature in the first chamber 101 rises above the minimum value a of the preset temperature range, otherwise the opening degree of the control valve is continuously decreased until the control valve is closed. In some embodiments, the high-power high-frequency laser scanning device further includes: a first heat dissipation structure disposed on the laser collimator 3 to dissipate heat from the laser collimator 3. Wherein, the first heat dissipation structure can be an interlayer space formed on the shell wall of the laser collimator 3, and a coolant is used to be introduced into the interlayer space.

[0048] In some embodiments, the high-power high-frequency laser scanning device further includes: a second heat dissipation structure disposed on the f-θ field lens 4 to dissipate heat from the f-θ field lens 4. Wherein, the second heat dissipation structure can be an interlayer space formed on the shell wall of the f-θ field lens 4, and a coolant is used to be introduced into the interlayer space.

[0049] In a second aspect, as Figure 3 shown, the embodiment of the present invention further provides a control method for the high-power high-frequency laser scanning device as described above, including the following steps: Step 310, determining the target rotation speed of the driving motor of the rotating mirror assembly according to the scanning frequency of the laser beam to be acquired; Step 320, when the laser is started, controlling the driving motor to rotate at the target rotation speed, so that the laser beam emitted by the laser passes through the laser collimator to reach the reflecting surface, and then after being reflected by the reflecting surface, it is output through the f-θ field lens to obtain a laser beam capable of performing linear scanning.

[0050] It can be understood that since the laser, the laser collimator, the rotating mirror, and the f-θ field lens are arranged in sequence along the optical path direction, when the driving motor drives the rotating mirror to rotate, a linear scanning beam can be output through the f-θ field lens. Then, the rotation speed of the driving motor determines the scanning frequency of the laser beam output by the f-θ field lens and the moving speed of the light spot. Therefore, before the entire laser scanning device works, it is necessary to determine the target rotation speed of the driving motor of the rotating mirror assembly according to the scanning frequency of the laser beam to be acquired.

[0051] Since the control method is implemented based on the above high-power high-frequency laser scanning device, and the specific structure of the high-power high-frequency laser scanning device refers to the above embodiments, the control method of this embodiment includes all the technical solutions of the above embodiments. Therefore, it has at least all the beneficial effects obtained by all the technical solutions of the above embodiments, and details thereof will not be described one by one herein.

[0052] In some embodiments, in order to accurately control the temperature in the first chamber within a preset temperature range, the control method of the embodiment of the present invention further includes the following steps: Step 410, acquiring the temperature information in the first chamber; Step 420, controlling the working state of the temperature control component according to the temperature information, so that the temperature in the first chamber is within the preset temperature range.

[0053] Among them, the temperature control component includes: a temperature sensor, a blade structure, a cooling member, and a controller; the temperature sensor is used to detect the temperature information in the first chamber; the blade structure is arranged at the top end and / or the bottom end of the rotating mirror; at least part of the cooling member is arranged in the first chamber; the controller is electrically connected to the temperature sensor and the cooling member respectively, and the controller is used to control the working state of the cooling member according to the temperature information fed back by the temperature sensor, so that the temperature in the first chamber is within a preset temperature range.

[0054] In some embodiments, the control method of the embodiment of the present invention further includes the following steps: When the temperature in the first chamber is higher than the maximum value of the preset temperature range and the duration exceeds the first duration, control the warning module to give a high-temperature warning prompt; When the temperature in the first chamber is lower than the minimum value of the preset temperature range and the duration exceeds the second duration, control the warning module to give a fault warning prompt.

[0055] Among them, the warning module is configured to be electrically connected to the controller, and the warning module can be a speaker, a buzzer, an audible and visual alarm, etc., and no specific limitation is made thereto.

[0056] When giving a high-temperature warning prompt, by setting the trigger condition of the first duration, it is possible to prevent the high-temperature warning prompt from being triggered by short-term temperature fluctuations, thereby ensuring the accuracy of the high-temperature warning prompt. Correspondingly, when giving a fault warning prompt, by setting the trigger condition of the second duration, it is also possible to prevent the fault warning prompt from being triggered by short-term temperature fluctuations, thereby ensuring the accuracy of the fault warning prompt.

[0057] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A high-power high-frequency laser scanning device, characterized in that: include: A body having a first chamber and a first opening and a second opening communicating with the first chamber; A rotating mirror assembly, comprising a driving motor and a rotating mirror, wherein the driving motor is connected to the rotating mirror, the rotating mirror is configured to be rotatably arranged in the first chamber around a vertical axis, and the rotating mirror comprises a plurality of reflecting surfaces arranged around the vertical axis, and each of the reflecting surfaces is inclined relative to the vertical axis at the same inclination angle; A laser collimator and an f-θ field mirror, wherein the laser collimator is disposed at the first opening, and the f-θ field mirror is disposed at the second opening, the laser collimator emits a laser beam toward the reflection surface in a vertical direction, and the laser beam can be reflected by the reflection surface to reach the f-θ field mirror, and then output through the f-θ field mirror; The temperature control component is arranged in the machine body to adjust the temperature in the first room.

2. The high-power high-frequency laser scanning device according to claim 1, characterized in that: The machine body further comprises a second chamber, the second chamber is located at the lower side of the first chamber, and the driving motor is arranged in the second chamber.

3. The high-power high-frequency laser scanning device according to claim 1, characterized in that: The plurality of reflection surfaces are sequentially arranged along the circumference of the rotating mirror, and the laser light beam reflected by each reflection surface is vertically incident on the mirror surface of the f-θ field mirror.

4. The high-power high-frequency laser scanning device according to claim 1, characterized in that: The inclination angle of each of the reflection surfaces relative to the horizontal plane is 45°, and the optical axis of the f-θ field mirror is arranged horizontally.

5. The high-power high-frequency laser scanning device according to any one of claims 1 to 4, characterized in that: The temperature control component comprises: A temperature sensor, used for detecting temperature information in the first room; A blade structure, provided at the top end of the rotating mirror and / or the bottom end of the rotating mirror; a cooling element, at least part of which is disposed in the first chamber; A controller is electrically connected to the temperature sensor and the cooling element, respectively, and is used to control the working state of the cooling element according to the temperature information fed back by the temperature sensor, so that the temperature in the first chamber is within a preset temperature range.

6. The high-power high-frequency laser scanning device according to claim 5, characterized in that: The cooling element comprises a liquid cooling plate and a control valve, wherein the liquid cooling plate is arranged on the bottom wall of the first chamber, a cooling liquid flow channel is formed in the liquid cooling plate, and the control valve is arranged at the inlet of the cooling liquid flow channel; The blade structure is arranged at the top end of the rotating mirror, and the controller is used to control the opening degree of the control valve according to the temperature information fed back by the temperature sensor.

7. The high-power high-frequency laser scanning device according to any one of claims 1 to 4, characterized in that: Also includes: A first heat dissipation structure, wherein the first heat dissipation structure is provided on the laser collimator to perform heat dissipation treatment on the laser collimator; And / or, it also includes: a second heat dissipation structure, which is arranged on the f-θ field mirror to dissipate heat for the f-θ field mirror.

8. A control method for a high-power high-frequency laser scanning device according to any one of claims 1 to 7, characterized in that: include: Determining a target rotation speed of a driving motor of the rotating mirror assembly according to a scanning frequency of the laser beam to be acquired; When the laser is started, the drive motor is controlled to rotate according to the target speed so that the laser beam emitted by the laser reaches the reflecting surface through the laser collimator, and then is output through the f-θ field mirror after being reflected by the reflecting surface, so as to obtain a laser beam capable of linear scanning.

9. The control method according to claim 8, characterized in that: Also includes: Acquire temperature information of the first room; According to the temperature information, the working state of the temperature control component is controlled so that the temperature in the first room is within a preset temperature range.

10. The control method according to claim 9, characterized in that: Also includes: When the temperature in the first room is higher than the maximum value of the preset temperature range and lasts for more than a first time period, controlling the early warning module to issue a high temperature early warning prompt; When the temperature in the first room is lower than the minimum value of the preset temperature range and lasts for more than a second time period, the control warning module issues a fault warning prompt.

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