Ceramic electrostatic chuck for etching processing

Abstract

The present application discloses a ceramic electrostatic chuck for etching processing, wherein the ceramic electrostatic chuck for etching processing comprises: a ceramic electrostatic chuck body, a substrate of the ceramic electrostatic chuck body being internally provided with a double-vortex pipeline assembly and a cold water circulation system; in order to solve the problem of uneven cooling when the ordinary circulating water cooling system in the prior art cools the electrostatic chuck, the present application adopts a double-vortex structure of a double-vortex pipeline assembly, in which cooling water flows from the periphery to the center in one vortex pipeline and cooling water flows from the center to the periphery in the other vortex pipeline. The double-vortex pipeline convection setting ensures more uniform cooling of the electrostatic chuck, avoids the problem of uneven cooling caused by the gradual heating of the cooling water in a single flow channel, and further solves the problem of changes in the cooling of the electrostatic chuck caused by changes in the cooling water temperature after long-term operation of the ordinary circulating water cooling structure.

Description

Technical Field

[0001] The present application relates to the technical field of electrostatic chucks, and in particular to a ceramic electrostatic chuck for etching processing. Background Art

[0002] An electrostatic chuck uses the suction force generated by static charge to hold a workpiece in place. Its operating principle is based on Coulomb's law, which states that two stationary charged particles experience an interaction force. The magnitude of this force is proportional to the product of their charges and inversely proportional to the square of the distance between them. Electrostatic chucks are used during etching processes and require cooling mechanisms to prevent temperature fluctuations.

[0003] Patent document CN215299214U, "Electrostatic Chuck and Temperature Control System for Electrostatic Chuck," discloses an electrostatic chuck. While the electrostatic chuck in the aforementioned technical solution can be cooled using a coolant, the coolant in the flow channel gradually heats up during cooling. This heated cooling water can lead to uneven cooling. Furthermore, after prolonged operation, the circulating liquid cooling structure can cause variations in the cooling effect on the electrostatic chuck due to changes in the coolant temperature.

[0004] That is, the prior art has the following technical problem: the liquid cooling of the conventional electrostatic chuck leads to uneven cooling. Therefore, to address the above problem, a ceramic electrostatic chuck for etching processing is proposed. Summary of the Invention

[0005] In this embodiment, a ceramic electrostatic chuck for etching processing is provided to solve the problem of uneven cooling caused by liquid cooling of ordinary electrostatic chucks in the prior art.

[0006] According to one aspect of the present application, a ceramic electrostatic chuck for etching is provided, wherein the ceramic electrostatic chuck for etching comprises:

[0007] A ceramic electrostatic chuck body, wherein a double-vortex pipeline assembly is provided inside a substrate of the ceramic electrostatic chuck body;

[0008] A cold water circulation system connected to the double-vortex piping assembly, the cold water circulation system being used to cool the ceramic electrostatic chuck body;

[0009] The cold water circulation system includes a pipeline structure, a filter unit, a cooling unit and a constant temperature control unit, wherein the filter unit is used to filter the circulating water;

[0010] The cooling unit is used to cool the circulating water;

[0011] The constant temperature control unit is used to reheat the cooled circulating water to a constant temperature.

[0012] Furthermore, the double-scroll pipe assembly includes a scroll tube A, a scroll tube B, a heat conduction plate and a mixing component. The scroll tube A and the scroll tube B are both fixedly arranged inside the substrate of the ceramic electrostatic suction cup body. One end of the scroll tube A is provided with an inlet A, and the other end of the scroll tube A is provided with an outlet A. One end of the scroll tube B is provided with an inlet B, and the other end of the scroll tube B is provided with an outlet B.

[0013] Furthermore, the pipeline structure includes an output pipeline, a connecting pipe A, a connecting pipe B, a connecting pipe C, a connecting pipe D and an input pipeline, the two ends of the output pipeline are respectively connected to the inlet A and the inlet B, and the two ends of the input pipeline are respectively connected to the outlet A and the outlet B.

[0014] Furthermore, the scroll tube A and the scroll tube B are fixedly connected with heat conducting plates, and a plurality of heat conducting plates are provided, and the plurality of heat conducting plates are radially arranged.

[0015] Furthermore, a number of mixing components are fixedly arranged between the scroll tube A and the scroll tube B, and the mixing components include a circular fixed shell, a central axis, an outer roller and arc-shaped blades. The circular fixed shell is fixed to the scroll tube A and the scroll tube B and is connected to each other. The central axis is fixedly connected to the center position of the inner cavity of the circular fixed shell, and the outer roller is rotatably connected to the central axis. The arc-shaped blades are fixedly connected to the arc-shaped wall of the outer roller. There are several arc-shaped blades, and the several arc-shaped blades are equidistantly fixed to the arc-shaped wall of the outer roller.

[0016] Furthermore, the filter unit includes a connecting tube, a fixed base, a filter screen, a fixed bracket, a rotating column, a spiral blade, a connecting rod and a scraper. The upper end of the connecting tube is fixedly connected to a connecting pipe A, the upper end of the connecting pipe A is fixedly connected to the output pipe, and the lower end of the connecting tube is fixedly connected to one end of a connecting pipe B, and the other end of the connecting pipe B is connected to the cooling unit.

[0017] Furthermore, a fixed base is fixedly connected to the inner cavity of the connecting cylinder, an opening is provided in the middle of the fixed base, a filter screen is fixedly connected to the opening of the fixed base, a fixed bracket is fixedly connected to the side wall of the inner cavity of the connecting cylinder, a rotating column is rotatably connected to the fixed bracket, a spiral blade is fixedly connected to the arc-shaped wall of the rotating column, a plurality of spiral blades are provided, and a plurality of the spiral blades are equidistantly fixed to the arc-shaped wall of the rotating column, one end of a connecting rod is fixedly connected to the bottom end of the connecting rod, a scraper is fixedly connected to the bottom end of the connecting rod, and the scraper is provided on the upper surface of the filter screen and in contact with the filter screen.

[0018] Furthermore, the cooling unit includes a cold water tank, heat-conducting fins, a cooling fan and a submersible pump. Several heat-conducting fins are fixedly connected to the inner cavity of the cold water tank, one end of the heat-conducting fins extends to the outside of the wall of the cold water tank, a submersible pump is provided in the inner cavity of the cold water tank, the output end of the submersible pump is fixedly connected to one end of a connecting pipe C, the other end of the connecting pipe C extends to the outside of the wall of the cold water tank, and a cooling fan is fixedly connected to the side wall of the cold water tank.

[0019] Furthermore, the heat conducting fins are provided with a plurality of guide holes, which can facilitate the cooling water entering the inner cavity of the cold water tank to flow through the guide holes and contact the heat conducting fins, thereby achieving the effect of heat conduction and cooling.

[0020] Furthermore, the constant temperature control unit includes a heat preservation chamber, a coil and a constant temperature heating rod. The coil is fixedly connected to the inner cavity of the heat preservation chamber, the bottom end of the coil is connected to one end of the connecting pipe C, the upper end of the coil is connected to one end of the connecting pipe D, and the other end of the connecting pipe D extends to the input pipe and is connected to the input pipe. The inner cavity of the heat preservation chamber is filled with water, and a constant temperature heating rod is fixedly arranged in the inner cavity of the heat preservation chamber.

[0021] Through the above-mentioned technical solution of the present application, in order to solve the problem of uneven cooling when the ordinary circulating water cooling system in the prior art cools the electrostatic suction cup, the present application designs a double-vortex pipe assembly. Through the double-vortex structure of the double-vortex pipe assembly, the cooling water in one vortex pipe flows from the periphery to the center, and the cooling water in the other vortex pipe flows from the center to the periphery. The convection setting of the double-vortex pipe ensures that the cooling of the electrostatic suction cup is more uniform, avoiding the problem of uneven cooling caused by the gradual heating of the cooling water in a single flow channel. Furthermore, in order to solve the problem of the change in cooling of the electrostatic suction cup due to the change in cooling water temperature after a long period of work of the ordinary circulating water cooling structure, a constant temperature control unit is provided, so that the cooling water is maintained at a fixed temperature each time it enters the ceramic electrostatic suction cup body for cooling, avoiding the problem of inconsistent cooling temperature caused by cooling water temperature fluctuations. At the same time, when the cooling water is circulated, the scale particle impurities generated inside the cooling water can be automatically filtered, ensuring long-term use effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0023] Figure 1This is a schematic diagram of the overall structure of an embodiment of the present application;

[0024] Figure 2 This is a schematic diagram of the overall structure of a double-scroll pipeline assembly according to an embodiment of the present application;

[0025] Figure 3 This is a schematic diagram of the overall bottom structure of an embodiment of the present application;

[0026] Figure 4 This is a schematic structural diagram of a double-scroll pipeline assembly according to an embodiment of the present application;

[0027] Figure 5 This is a schematic structural diagram of a flow mixing component according to an embodiment of the present application;

[0028] Figure 6 This is a schematic structural diagram of a cooling unit according to an embodiment of the present application;

[0029] Figure 7 For an embodiment of this application Figure 6 A schematic diagram of the partially enlarged structure of the part A;

[0030] Figure 8 This is a schematic side structural diagram of a cooling unit according to an embodiment of the present application;

[0031] Figure 9 This is a schematic diagram of the internal structure of a cooling unit according to an embodiment of the present application;

[0032] Figure 10 This is a structural diagram of a constant temperature control unit according to an embodiment of the present application.

[0033] Description of Reference Numerals

[0034] Figure: 1. Ceramic electrostatic chuck body; 2. Dual-scroll piping assembly; 201. Scroll A; 202. Scroll B; 203. Inlet A; 204. Outlet A; 205. Outlet B; 206. Inlet B; 207. Heat conducting plate; 208. Flow mixing element; 2081. Circular fixed shell; 2082. Center shaft; 2083. Outer roller; 2084. Curved blades; 3. Pipe structure; 301. Output pipe; 302. Connecting pipe A; 303. Connecting pipe B; 304. Connecting pipe C; 305. Connecting pipe D; 306. Input pipe; 4. Filter unit; 401. Connecting tube; 402. Fixed base; 403. Filter screen; 404. Fixed bracket; 405. Rotating column; 406. Spiral blade; 407. Connecting rod; 408. Scraper; 5. Cooling unit; 501. Cold water tank; 502. Heat conducting fin; 5021. Diversion hole; 503. Cooling fan; 504. Submersible pump; 6. Constant temperature control unit; 601. Insulation tank; 602. Coil; 603. Constant temperature heating rod. DETAILED DESCRIPTION

[0035] In order to enable those skilled in the art to better understand the present invention, the following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of this application.

[0036] It should be noted that the terms "first", "second", etc. in the specification and the above-mentioned drawings of the present application are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequential order. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present application described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device comprising a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0037] In this application, terms such as "upper," "lower," "left," "right," "front," "back," "top," "bottom," "inner," "outer," "center," "vertical," "horizontal," "transverse," and "longitudinal" indicate positions or locations based on the positions or locations shown in the accompanying drawings. These terms are primarily intended to better describe this application and its embodiments and are not intended to limit the devices, elements, or components indicated to having a specific orientation, or to being constructed or operated in a specific orientation.

[0038] Furthermore, some of the above terms may be used to express other meanings besides indicating a position or location. For example, the term "on" may also be used to indicate a dependency or connection in certain circumstances. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0039] Furthermore, the terms "installed," "disposed," "provided with," "connected," "connected," and "socketed" should be interpreted broadly. For example, they can refer to fixed connections, removable connections, or integral structures; mechanical connections or electrical connections; direct connections, indirect connections through an intermediary, or internal communication between two devices, elements, or components. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0040] See also Figures 1 to 3As shown, a ceramic electrostatic chuck for etching processing includes:

[0041] A ceramic electrostatic chuck body 1, wherein a double-vortex pipeline assembly 2 is provided inside a substrate of the ceramic electrostatic chuck body 1;

[0042] A cold water circulation system, connected to the double-volute pipe assembly 2, for cooling the ceramic electrostatic chuck body 1;

[0043] The cold water circulation system includes a pipeline structure 3, a filter unit 4, a cooling unit 5 and a constant temperature control unit 6. The filter unit 4 is used to filter the circulating water;

[0044] The cooling unit 5 is used to cool the circulating water;

[0045] The constant temperature control unit 6 is used to reheat the cooled circulating water to a constant temperature;

[0046] Through the double vortex structure of the double vortex pipe assembly 2, the cooling water in one vortex pipe flows from the periphery to the center, and the cooling water in the other vortex pipe flows from the center to the periphery. The double vortex pipe convection setting ensures that the cooling of the electrostatic suction cup is more uniform, avoiding the problem of uneven cooling caused by the gradual heating of the cooling water in a single flow channel. Furthermore, in order to solve the problem of the ordinary circulating water cooling structure causing the electrostatic suction cup to cool down due to the change in cooling water temperature after a long period of work, a constant temperature control unit 6 is provided, so that the cooling water is kept at a fixed temperature each time it enters the ceramic electrostatic suction cup body 1 for cooling, avoiding the problem of inconsistent cooling temperature caused by cooling water temperature fluctuations. At the same time, when the cooling water is circulated, the scale particle impurities generated inside the cooling water can be automatically filtered, ensuring long-term use effect.

[0047] For further technical solutions, see Figure 4 and Figure 5 As shown, the double scroll pipe assembly 2 includes a scroll A201, a scroll B202, a heat conducting plate 207 and a flow mixing component 208. The scroll A201 and the scroll B202 are both fixedly arranged inside the substrate of the ceramic electrostatic chuck body 1. One end of the scroll A201 is provided with an inlet A203, and the other end of the scroll A201 is provided with an outlet A204. One end of the scroll B202 is provided with an inlet B206, and the other end of the scroll B202 is provided with an outlet B205.

[0048] The pipeline structure 3 includes an output pipeline 301, a connecting pipe A302, a connecting pipe B303, a connecting pipe C304, a connecting pipe D305 and an input pipeline 306. The two ends of the output pipeline 301 are respectively connected to the inlet A203 and the inlet B206, and the two ends of the input pipeline 306 are respectively connected to the outlet A204 and the outlet B205. According to the present technical solution, the cooling water enters the scroll tube A201 and the scroll tube B202 through the input pipeline 306, and flows through the scroll tube A201 and the scroll tube B203. 202, respectively output through outlet A204 and outlet B205, thereby realizing the function of cooling water circulation and auxiliary cooling. From the above description, it can be seen that the cold water in the scroll tube A201 flows from the periphery to the center, and the cold water in the scroll tube B202 flows from the center to the periphery. The cold water convection arrangement in the two scroll tubes can effectively and evenly cool the entire ceramic electrostatic chuck body 1, thereby avoiding the problem of uneven cooling caused by the coolant in a single flow channel gradually increasing in temperature as it flows;

[0049] The scroll tube A201 and the scroll tube B202 are fixedly connected with a heat conducting plate 207. A plurality of heat conducting plates 207 are provided, and the plurality of heat conducting plates 207 are radially arranged. The plurality of radially arranged heat conducting plates 207 can improve the heat conduction effect between the two scroll tubes, and at the same time improve the heat conduction effect between the periphery and the center of the scroll tube, thereby promoting the uniform temperature of the entire scroll tube, further achieving a uniform cooling effect.

[0050] A number of mixing components 208 are fixedly arranged between the scroll A201 and the scroll B202. The mixing components 208 include a circular fixed shell 2081, a central axis 2082, an outer roller 2083 and arc-shaped blades 2084. The circular fixed shell 2081 is fixed to the scroll A201 and the scroll B202 and is communicated with each other. The central axis 2082 is fixedly connected to the center of the inner cavity of the circular fixed shell 2081. The outer roller 2083 is rotatably connected to the central axis 2082. The arc-shaped blades 2084 are fixedly connected to the arc wall of the outer roller 2083. There are several arc-shaped blades 2084, and the several arc-shaped blades 2084 are equidistantly fixed to the outer roller 2083. At the curved wall, through the setting of the mixing component 208, the water flowing relatively in the vortex tube A201 and the vortex tube B202 enters the inner cavity of the circular fixed shell 2081, causing the curved blade 2084 to rotate. The rotating curved blade 2084 causes the water flowing in the vortex tube A201 and the vortex tube B202 to mix, and then flow to the vortex tube A201 and the vortex tube B202 respectively. It can be seen from the above description that through the setting of the mixing component 208, the cooling water in the two vortex tubes can be mixed during the flow of the cooling water, thereby ensuring that the temperature of the cooling water in the two vortex tubes is average, thereby further improving the uniform cooling effect, and ensuring that the overall temperature of the center and periphery of the ceramic electrostatic suction cup body 1 is uniform.

[0051] For specific technical solutions, please refer to Figure 6 and Figure 7 As shown, the filter unit 4 includes a connecting tube 401, a fixed base 402, a filter screen 403, a fixed bracket 404, a rotating column 405, a spiral blade 406, a connecting rod 407 and a scraper 408. The upper end of the connecting tube 401 is fixedly connected to the connecting pipe A302, and the upper end of the connecting pipe A302 is fixedly connected to the output pipe 301. The lower end of the connecting tube 401 is fixedly connected to one end of the connecting pipe B303, and the other end of the connecting pipe B303 is connected to the cooling unit 5. Through this technical solution, the cooling water flowing through the double-scroll pipeline assembly 2 is output through the output pipe 301, and the cooling water flows through the connecting tube 401 into the cooling unit 5 for cooling;

[0052] A fixed base 402 is fixedly connected to the inner cavity of the connecting cylinder 401, an opening is provided in the middle of the fixed base 402, a filter screen 403 is fixedly connected to the opening of the fixed base 402, a fixed bracket 404 is fixedly connected to the inner cavity side wall of the connecting cylinder 401, a rotating column 405 is rotatably connected to the fixed bracket 404, a spiral blade 406 is fixedly connected to the arc-shaped wall of the rotating column 405, a plurality of spiral blades 406 are provided, and a plurality of the spiral blades 406 are equidistantly fixed to the arc-shaped wall of the rotating column 405, one end of the connecting rod 407 is fixedly connected to the bottom end of the connecting rod 407, a scraper 408 is fixedly connected to the bottom end of the connecting rod 407, and the scraper 408 is provided on the upper surface of the filter screen 403 and is connected to the filter screen 403 The contact between them is that through the present technical solution, the reflux cooling water enters the inner cavity of the connecting tube 401, and the setting of the filter screen 403 can filter and clean the cooling water, avoiding blockage caused by particles such as scale. At the same time, the action of the water flow can drive the spiral blade 406 to rotate, thereby driving the rotating column 405 to rotate through the rotation of the spiral blade 406, and driving the connecting rod 407 to rotate through the rotation of the rotating column 405, and then driving the scraper 408 to rotate. The rotation of the scraper 408 can scrape the particles filtered on the surface of the filter screen 403, which plays a self-cleaning role. It can be seen from the above description that while filtering the cooling water, the filter screen 403 is automatically cleaned, avoiding blockage, does not require an additional power source, and is easy to use.

[0053] As a preferred technical solution, please refer to Figure 8 and Figure 9 As shown, the cooling unit 5 includes a cold water tank 501, heat-conducting fins 502, a cooling fan 503 and a submersible pump 504. A plurality of heat-conducting fins 502 are fixedly connected to the inner cavity of the cold water tank 501, one end of the heat-conducting fins 502 extends to the outside of the wall of the cold water tank 501, and a submersible pump 504 is provided in the inner cavity of the cold water tank 501. The output end of the submersible pump 504 is fixedly connected to one end of a connecting pipe C304, and the other end of the connecting pipe C304 extends to the outside of the wall of the cold water tank 501. A cooling fan 503 is fixedly connected to the side wall of the cold water tank 501. Through the present technical solution, the heated cooling water enters the inner cavity of the cold water tank 501, and the cooling water contacts the heat-conducting fins 502. The heat is conducted by the action of the heat-conducting fins 502, and the heat is dissipated by blowing air through the cooling fan 503, so that the heat is dissipated, thereby causing the heated cooling water to cool down again.

[0054] The heat conducting fins 502 are provided with a plurality of guide holes 5021 , which facilitate the cooling water entering the inner cavity of the cold water tank 501 to flow through the guide holes 5021 and contact the heat conducting fins 502 , thereby achieving the effect of heat conduction and cooling.

[0055] For further technical solutions, see Figure 10 As shown, the constant temperature control unit 6 includes a heat preservation chamber 601, a coil 602 and a constant temperature heating rod 603. The inner cavity of the heat preservation chamber 601 is fixedly connected with the coil 602. The bottom end of the coil 602 is connected to one end of the connecting pipe C304, and the upper end of the coil 602 is connected to one end of the connecting pipe D305. The other end of the connecting pipe D305 extends to the input pipe 306 and is connected to the input pipe 306. The inner cavity of the heat preservation chamber 601 is filled with water. The constant temperature heating rod 603 is fixedly set in the inner cavity of the heat preservation chamber 601. Through the action of the constant temperature heating rod 603, the The water in the inner cavity of the heat preservation chamber 601 is heated to a fixed temperature and maintained at a constant temperature. When the cooling water is transported to the inner cavity of the coil 602 through the connecting pipe C304, the cooling water can be heated to a fixed temperature through heat exchange, and then output through the connecting pipe D305. From the above description, it can be seen that through the setting of the constant temperature control unit 6, the cooling water of each cycle can be reheated to a fixed temperature in a water bath, thereby ensuring that the cooling water is at the same temperature each time it enters the interior of the ceramic electrostatic suction cup body 1 for heat dissipation, avoiding the problem of inconsistent cooling temperature caused by fluctuations in the cooling water temperature.

[0056] The circuits, electronic components and modules involved are all existing technologies and can be fully implemented by those skilled in the art. Needless to say, the content protected by this application does not involve improvements to software and methods.

[0057] The above description is merely a preferred embodiment of the present application and is not intended to limit the present application. Various modifications and variations are possible for those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present application shall be included within the scope of protection of the present application.

Claims

1. A ceramic electrostatic chuck for etching processing, characterized by: The ceramic electrostatic chuck for etching processing includes: A ceramic electrostatic chuck body (1), wherein a double-vortex pipeline assembly (2) is provided inside a substrate of the ceramic electrostatic chuck body (1); A cold water circulation system, the cold water circulation system being connected to the double-vortex pipe assembly (2), the cold water circulation system being used to cool the ceramic electrostatic chuck body (1); The cold water circulation system comprises a pipeline structure (3), a filter unit (4), a cooling unit (5) and a constant temperature control unit (6), wherein the filter unit (4) is used to filter the circulating water; The cooling unit (5) is used to cool the circulating water; The constant temperature control unit (6) is used to reheat the cooled circulating water to a constant temperature; The double-vortex pipeline assembly (2) includes a vortex tube A (201), a vortex tube B (202), a heat conducting plate (207) and a flow mixing component (208), wherein the vortex tube A (201) and the vortex tube B (202) are both fixedly arranged inside the substrate of the ceramic electrostatic chuck body (1), an inlet A (203) is arranged at one end of the vortex tube A (201), and an outlet A (204) is arranged at the other end of the vortex tube A (201), an inlet B (206) is arranged at one end of the vortex tube B (202), and an outlet B (205) is arranged at the other end of the vortex tube B (202); The scroll tube A (201) and the scroll tube B (202) are fixedly connected with a heat conducting plate (207), and a plurality of the heat conducting plates (207) are provided, and the plurality of the heat conducting plates (207) are arranged in a radial pattern; A plurality of flow mixing components (208) are fixedly arranged between the scroll tube A (201) and the scroll tube B (202), and the flow mixing components (208) include a circular fixed shell (2081), a central shaft (2082), an outer roller (2083), and arc-shaped blades (2084). The circular fixed shell (2081) is fixed to and communicates with the scroll tube A (201) and the scroll tube B (202). The central shaft (2082) is fixedly connected to the center position of the inner cavity of the circular fixed shell (2081), and the outer roller (2083) is rotatably connected to the central shaft (2082). The arc-shaped blades (2084) are fixedly connected to the arc-shaped wall of the outer roller (2083). A plurality of the arc-shaped blades (2084) are provided, and the plurality of the arc-shaped blades (2084) are fixed to the arc-shaped wall of the outer roller (2083) at equal intervals.

2. The ceramic electrostatic chuck for etching processing according to claim 1, characterized in that: The pipeline structure (3) comprises an output pipeline (301), a connecting pipe A (302), a connecting pipe B (303), a connecting pipe C (304), a connecting pipe D (305) and an input pipeline (306). The two ends of the output pipeline (301) are respectively connected to the inlet A (203) and the inlet B (206), and the two ends of the input pipeline (306) are respectively connected to the outlet A (204) and the outlet B (205).

3. The ceramic electrostatic chuck for etching according to claim 1, wherein: The filter unit (4) comprises a connecting tube (401), a fixed base (402), a filter screen (403), a fixed bracket (404), a rotating column (405), a spiral blade (406), a connecting rod (407) and a scraper (408); the upper end of the connecting tube (401) is fixedly connected to a connecting tube A (302); the upper end of the connecting tube A (302) is fixedly connected to the output pipe (301); the lower end of the connecting tube (401) is fixedly connected to one end of a connecting tube B (303); the other end of the connecting tube B (303) is connected to the cooling unit (5).

4. The ceramic electrostatic chuck for etching according to claim 3, wherein: A fixed base (402) is fixedly connected to the inner cavity of the connecting cylinder (401), an opening is provided in the middle of the fixed base (402), and a filter screen (403) is fixedly connected to the opening of the fixed base (402). A fixed bracket (404) is fixedly connected to the side wall of the inner cavity of the connecting cylinder (401), and a rotating column (405) is rotatably connected to the fixed bracket (404). A spiral blade (406) is fixedly connected to the arc-shaped wall of the rotating column (405), and a plurality of spiral blades (406) are provided, and the plurality of spiral blades (406) are equidistantly fixed to the arc-shaped wall of the rotating column (405). One end of a connecting rod (407) is fixedly connected to the bottom end of the rotating column (405), and a scraper (408) is fixedly connected to the bottom end of the connecting rod (407). The scraper (408) is provided on the upper surface of the filter screen (403) and is in contact with the filter screen (403).

5. The ceramic electrostatic chuck for etching according to claim 1, characterized in that: The cooling unit (5) comprises a cold water tank (501), heat-conducting fins (502), a cooling fan (503) and a submersible pump (504); a plurality of heat-conducting fins (502) are fixedly connected to the inner cavity of the cold water tank (501); one end of the heat-conducting fins (502) extends to the outside of the wall of the cold water tank (501); a submersible pump (504) is provided in the inner cavity of the cold water tank (501); an output end of the submersible pump (504) is fixedly connected to one end of a connecting pipe C (304); the other end of the connecting pipe C (304) extends to the outside of the wall of the cold water tank (501); and a cooling fan (503) is fixedly connected to the side wall of the cold water tank (501).

6. The ceramic electrostatic chuck for etching according to claim 5, characterized in that: The heat-conducting fins (502) are provided with a plurality of guide holes (5021). According to the present technical solution, the setting of the guide holes (5021) can facilitate the cooling water entering the inner cavity of the cold water tank (501) to flow through the guide holes (5021) and come into contact with the heat-conducting fins (502), thereby achieving the effect of heat conduction and cooling.

7. The ceramic electrostatic chuck for etching according to claim 1, wherein: The constant temperature control unit (6) comprises a heat preservation chamber (601), a coil (602) and a constant temperature heating rod (603). The coil (602) is fixedly connected to the inner cavity of the heat preservation chamber (601). The bottom end of the coil (602) is connected to one end of the connecting pipe C (304). The upper end of the coil (602) is connected to one end of the connecting pipe D (305). The other end of the connecting pipe D (305) extends to the input pipe (306) and is connected to the input pipe (306). The inner cavity of the heat preservation chamber (601) is filled with water. The constant temperature heating rod (603) is fixedly arranged in the inner cavity of the heat preservation chamber (601).

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