Clamping device and motion system

Abstract

The invention provides a clamping device and a motion system. The clamping device comprises a base provided with a first face and a second face, and the first face is used for supporting a workpiece; the fixing assembly is arranged on the first face or the second face and used for fixing a workpiece; the failure protection assemblies are sequentially arranged on the second face in the circumferential direction of the first face, each failure protection assembly comprises a deformable component and a clamping component, each clamping component is connected with the second face through the corresponding deformable component, and each deformable component comprises a piezoelectric part capable of generating deformation in response to an electrical signal; the clamping component can abut against or be separated from the workpiece under driving of the deformable component, when the deformable component is powered off, the clamping component is located at the power-off protection position abutting against the workpiece, and when the deformable component is powered on, the clamping component is located at the release position separated from the workpiece. According to the technical scheme, the problem that in the prior art, when a clamping device encounters an unexpected condition of gas interruption or power failure, clamping failure is prone to occurring is solved.

Description

Technical Field

[0001] The present invention relates to the technical field of precision measurement, and in particular, to a clamping device and a motion system. Background Art

[0002] In the field of integrated circuit manufacturing technology, precision measurement technology is an extremely important link. Through an image recognition system, patterns and marks processed on substrates such as wafers or plates are accurately recognized and judged, providing a necessary basis for controlling quality and yield. With the improvement of process requirements, the requirements for clamping substrates by equipment manufacturing systems are also getting higher and higher. Therefore, the design of the substrate clamping system becomes increasingly important.

[0003] There are generally two existing substrate clamping methods. One is the vacuum adsorption clamping method, which relies on the structural design of vacuum adsorption, that is, the form of contacting and adsorbing the bottom area of the substrate through vacuum channels to perform the adsorption and clamping operation on the substrate. The adsorption force distribution of vacuum adsorption is relatively uniform, not easily causing surface bending deformation of the substrate, and having good protection. It is usually applied to motion systems with high-precision requirements. The other is the motor-driven clamping method, which drives the clamping system through a motor to clamp the substrate. Some motors have extremely strong overload protection capabilities and a certain self-locking function, meeting the high requirements for the clamping system under high process requirements.

[0004] However, in the precision measurement technology of integrated circuit manufacturing, when the above two clamping methods (such as vacuum adsorption and motor-driven clamping) encounter unexpected situations such as air cut-off or power failure, the problem of clamping failure is likely to occur (that is, in the case of power failure and air cut-off, the substrate loses the adsorption holding force, and in the case of power failure for the motor-driven clamping method, the clamping becomes loose). In this way, phenomena such as slippage or flipping leading to damage are likely to occur, resulting in the problem that the substrate is likely to fly out or slide, and further causing damage to the substrate. Summary of the Invention

[0005] The main object of the present invention is to provide a clamping device and a motion system to solve the problem that the clamping device in the prior art is likely to have clamping failure when encountering unexpected situations such as air cut-off or power failure.

[0006] To achieve the above object, the present invention provides a clamping device, comprising: a base having a first surface and a second surface, the first surface being used to support a workpiece; the first surface is disposed parallel or overlapping on the second surface; a fixing component disposed on the first surface or the second surface, the fixing component being used to fix the workpiece; a plurality of fail-safe components sequentially disposed along the circumference of the first surface on the second surface, the fail-safe component comprising a deformable member and a clamping member, the clamping member being connected to the second surface through the deformable member, the deformable member comprising a piezoelectric member capable of deforming in response to an electrical signal, the clamping member being capable of abutting against or separating from the workpiece under the drive of the deformable member, wherein when the deformable member is powered off, the clamping member is in a power-off protection position abutting against the workpiece, and when the deformable member is powered on, the clamping member is in a release position separated from the workpiece.

[0007] Further, the deformable member further comprises a flexible member, one end of the flexible member is connected to the second surface, the other end of the flexible member is connected to the clamping member, the piezoelectric member is connected to the flexible member and is located between the two ends of the flexible member, and the piezoelectric member can drive the flexible member to generate corresponding deformation.

[0008] Further, the flexible member comprises a support portion, a connecting portion, and at least one bending portion connected between the support portion and the connecting portion, the support portion is connected to the base, the connecting portion is connected to the clamping member, the piezoelectric member comprises at least one piezoelectric diaphragm, and the piezoelectric diaphragm is disposed on the surface of the bending portion.

[0009] Further, there are two bending portions and two piezoelectric diaphragms, the two piezoelectric diaphragms are respectively attached to the two bending portions, one ends of the two bending portions are both connected to the support portion, the other ends of the two bending portions are both connected to the connecting portion, and the openings of the two bending portions are arranged facing each other.

[0010] Further, the two bending portions are arranged vertically above and below perpendicular to the second surface, the bending portion located below abuts against the second surface, when the piezoelectric diaphragm is switched from the power-off state to the power-on state, the bending curvatures of the two bending portions both increase, so as to drive the clamping member away from the base and the workpiece; or, the two bending portions are arranged horizontally in a direction parallel to the second surface, when the piezoelectric diaphragm is switched from the power-off state to the power-on state, the bending curvatures of the two bending portions both increase, so as to drive the clamping member away from the workpiece.

[0011] Further, there are two bending portions and two piezoelectric diaphragms, the two piezoelectric diaphragms are respectively attached to the two bending portions, the openings of the two bending portions are arranged facing away from each other; the two bending portions are arranged vertically above and below perpendicular to the second surface, one end of the bending portion located above is connected to the support portion, the other end of the bending portion located above is connected to the connecting portion, one end of the bending portion located below is supported on the second surface, and the other end of the bending portion located below is connected to the connecting portion.

[0012] Furthermore, when the piezoelectric diaphragm is switched from a power-off state to a power-on state, the bending curvatures of the two bent portions increase to drive the clamping member away from the workpiece; or, when the piezoelectric diaphragm is switched from a power-off state to a power-on state, the bending curvature of the bent portion located at the upper side increases, while the bending curvature of the bent portion located at the lower side decreases to drive the clamping member away from the workpiece and the base.

[0013] Furthermore, the clamping member includes: a clamping frame connected to the deformable member; a clamping sheet connected to the clamping frame, the clamping sheet is located on a side of the clamping frame away from the deformable member, and the clamping sheet is detachably connected to the clamping frame.

[0014] Furthermore, the clamping piece is in the shape of a flat plate; or, the clamping piece includes a first segment and a second segment connected and arranged at an angle, the first segment is connected to the clamping frame, the second segment is located on the side of the first segment away from the deformable component, and the second segment is located above the first segment.

[0015] Further, the failure protection component includes a plurality of deformable components and a clamping component, and the plurality of deformable components are all connected to the clamping component; or, the failure protection component includes a deformable component and a clamping component.

[0016] Further, there are four failure protection components, and the four failure protection components are respectively a first failure protection component, a second failure protection component, a third failure protection component and a fourth failure protection component; wherein, the first failure protection component and the second failure protection component are respectively located on both sides of the first surface and are mirror-symmetrical in the first direction, and the third failure protection component and the fourth failure protection component are respectively located on both sides of the first surface and are mirror-symmetrical in the second direction; or, the first failure protection component and the second failure protection component are respectively located on both sides of the first surface and are mirror-symmetrical in the first direction, the third failure protection component and the fourth failure protection component are respectively located on both sides of the first surface and are mirror-symmetrical in the first direction, the first failure protection component and the third failure protection component are respectively arranged at intervals in the second direction, and the second failure protection component and the fourth failure protection component are arranged at intervals in the second direction.

[0017] According to another aspect of the present invention, the present invention provides a motion system, comprising: the above-mentioned clamping device; a lifting device, located below the clamping device, the lifting device having a lifting end for lifting the workpiece; a handover device, the handover device is located above the clamping device, the handover device has a clamping portion movably arranged along a first direction and / or a second direction, the clamping portion having a clamping cavity for clamping the workpiece.

[0018] Applying the technical solution of the present invention, the failure protection component has the ability of pre-deformation. When not powered on, the clamping member can abut against the workpiece. In the case where the fixing component fixes the workpiece, that is, when powered on or ventilated, the clamping member is always in the position of abutting against the workpiece. At this time, the clamping device fixes the workpiece through the fixing component; by arranging a plurality of failure protection components on the second surface of the base, an effective protection circle surrounding the first surface can be formed. Once the situation of power failure of the motor-driven clamping or air cut-off of the vacuum adsorption occurs, the clamping member can still abut against the workpiece under the drive of the deformable member, so that the clamping member is in the power-off protection position, that is, the limit protection mechanism is started. At this time, the clamping member relies on the preset mechanical pre-tightening force to closely abut against the edge of the workpiece, so as to play a certain role in limit protection, effectively avoiding the risk of the workpiece flying out or sliding due to adsorption failure or clamping loosening, thereby greatly reducing the damage of the workpiece caused by power failure and air cut-off; when the workpiece needs to be transferred, the fixing component is not powered on or ventilated, and the failure protection component is powered on, so that the clamping member disengages and moves away from the workpiece, and then the transfer is completed. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The accompanying drawings forming a part of this application are used to provide a further understanding of the present invention. The schematic embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation to the present invention. In the drawings:

[0020] Figure 1 FIG. 1 shows a schematic structural diagram of a first embodiment of the clamping device of the present invention;

[0021] Figure 2 FIG. 2 shows Figure 1 a schematic structural diagram of the failure protection component of the clamping device;

[0022] Figure 3 FIG. 3 shows Figure 1 a schematic structural diagram of the clamping device;

[0023] Figure 4 FIG. 4 shows Figure 1 a schematic structural diagram of the clamping device in the clamping state and the transfer state;

[0024] Figure 5 FIG. 5 shows Figure 1 a schematic structural diagram of the clamping device in another clamping state;

[0025] Figure 6 FIG. 6 shows Figure 1 a schematic structural diagram of two piezoelectric diaphragms in series of the failure protection component of the clamping device;

[0026] Figure 7 FIG. 7 shows Figure 1 a schematic structural diagram of two piezoelectric diaphragms in parallel of the failure protection component of the clamping device;

[0027] Figure 8 Fig. shows a schematic structural diagram of the second embodiment of the clamping device of the present invention;

[0028] Figure 9 shows Figure 8 a schematic structural diagram of the failure protection component of the clamping device of;

[0029] Figure 10 Fig. shows a schematic structural diagram of the third embodiment of the clamping device of the present invention;

[0030] Figure 11 shows Figure 10 a schematic structural diagram of the failure protection component of the clamping device of;

[0031] Figure 12 shows Figure 10 schematic structural diagrams of the clamping device of in the clamping state and the handover state;

[0032] Figure 13 Fig. shows a schematic structural diagram of an embodiment of the clamping device of the present invention;

[0033] Figure 14 Fig. shows a schematic structural diagram of an embodiment of the clamping device of the present invention;

[0034] Figure 15 Fig. shows a schematic structural diagram of an embodiment of the clamping device of the present invention;

[0035] Figure 16 Fig. shows a schematic structural diagram of an embodiment of the clamping device of the present invention;

[0036] Figure 17 Fig. shows a schematic structural diagram of the fourth embodiment of the clamping device of the present invention;

[0037] Figure 18 shows Figure 17 a schematic structural diagram of the failure protection component of the clamping device of;

[0038] Figure 19 Fig. shows a schematic structural diagram of an embodiment when the workpiece of the motion system of the present invention is fixed;

[0039] Figure 20 Fig. shows a schematic structural diagram of an embodiment when the workpiece of the motion system of the present invention is handed over.

[0040] Among them, the above-mentioned drawings include the following reference numerals:

[0041] 1. Workpiece; 100. Clamping device; 101. Base; 21. First surface; 22. Second surface; 10. Fail-safe component; 110. Deformable member; 111. Piezoelectric element; 1111. Piezoelectric diaphragm; 112. Flexible member; 1124. Support portion; 1123. Connection portion; 1121. Bending portion; 120. Clamping member; 121. Clamping frame; 122. Clamping piece; 1221. First segment; 1222. Second segment; 10a. First fail-safe component; 10b. Second fail-safe component; 10c. Third fail-safe component; 10d. Fourth fail-safe component; 200. Lifting device; 300. Transfer device; 400. Fixing component. Detailed implementation manners

[0042] It should be noted that, without conflict, the embodiments in the present application and the features in the embodiments may be combined with each other. The present invention will be described in detail below with reference to the drawings and in combination with the embodiments.

[0043] It should be noted that, in the embodiments of the present invention, the workpiece 1 is generally a substrate such as a wafer or a plate, and the shape of the substrate is a square sheet. Specifically, the substrate is a silicon wafer. Of course, the substrate may also be circular.

[0044] It should be noted that, in the embodiments of the present invention, the first direction X, the second direction Y, and the third direction Z are perpendicular to each other pairwise. Among them, the third direction Z is the vertical direction, that is, the up and down direction.

[0045] As Figures 1 to 18 shown, the embodiments of the present invention provide a clamping device. The clamping device 100 includes: a base 101 having a first surface 21 and a second surface 22, the first surface 21 being used to support the workpiece 1; the first surface 21 is disposed parallel or overlapping on the second surface 22; a fixing component 400 disposed on the first surface 21 or the second surface 22, the fixing component 400 being used to fix the workpiece 1; a plurality of fail-safe components 10 sequentially disposed along the circumference of the first surface 21 on the second surface 22, the fail-safe component 10 including a deformable member 110 and a clamping member 120, the clamping member 120 being connected to the second surface 22 through the deformable member 110, the deformable member 110 including a piezoelectric element 111 capable of deforming in response to an electrical signal, the clamping member 120 being capable of abutting against or separating from the workpiece 1 under the drive of the deformable member 110. Among them, when the deformable member 110 is powered off, the clamping member 120 is in the power-off protection position abutting against the workpiece 1, and when the deformable member 110 is powered on, the clamping member 120 is in the release position separated from the workpiece 1.

[0046] In the above technical solution, the fail-safe component 10 has the ability of pre-deformation. When not powered on, the clamping member 120 can be abutted against the workpiece 1. When the fixing component 400 fixes the workpiece 1, that is, when powered on or ventilated, the clamping member 120 is always in the position of abutting against the workpiece 1. At this time, the clamping device 100 fixes the workpiece 1 through the fixing component 400; by arranging a plurality of fail-safe components 10 on the second surface 22 of the base 101, an effective protection circle surrounding the first surface 21 can be formed. Once the situation of power failure of the motor-driven clamping or gas cut-off of the vacuum adsorption occurs, the clamping member 120 can still be abutted against the workpiece 1 under the drive of the deformable member 110, so that the clamping member 120 is in the power-off protection position, that is, the limit protection mechanism is started. At this time, the clamping member 120 relies on the preset mechanical pre-tightening force and tightly abuts against the edge of the workpiece 1 to play a certain role of limit protection, effectively avoiding the risk of the workpiece 1 flying out or sliding due to adsorption failure or clamping loosening, thereby greatly reducing the damage of the workpiece 1 caused by power-off and gas cut-off; when the workpiece 1 needs to be transferred, the fixing component 400 is not powered on or ventilated, and the fail-safe component 10 is powered on, so that the clamping member 120 is disengaged from and away from the workpiece 1, and then the transfer is completed.

[0047] It should be noted that in the embodiments of the present invention, the first surface 21 and the second surface 22 are parallel to each other, and can be coplanar or non-coplanar. Among them, as Figure 1 shown, the fixing component 400 is arranged on the first surface 21. The fixing component 400 is an adsorption component, which provides an adsorption force to the workpiece 1 through the first surface 21. The first surface 21 is an adsorption surface and has the function of adsorbing the workpiece 1. An adsorption groove is arranged on the adsorption surface. The fixing component 400 is used to introduce vacuum into the adsorption groove to adsorb and clamp the workpiece 1; the second surface 22 is an installation surface and is the installation reference surface of the deformable member 110.

[0048] As Figure 15 shown, in one embodiment, the fixing component 400 can also be a motor drive module, such as a piezoelectric motor drive module. The piezoelectric motor drive module is arranged on the second surface 22, and the first surface 21 provides the supporting force for the workpiece 1.

[0049] As Figure 1 and Figure 2 shown, in the embodiments of the present invention, the deformable member 110 further includes a flexible member 112. One end of the flexible member 112 is connected to the second surface 22, the other end of the flexible member 112 is connected to the clamping member 120, and the piezoelectric member 111 is connected to the flexible member 112 and is located between the two ends of the flexible member 112. The piezoelectric member 111 can drive the flexible member 112 to generate corresponding deformation.

[0050] With the above settings, the flexible member 112 serves as a bridge connecting the second surface 22 and the clamping member 120. It maintains a pre-tightened state under normal conditions (when the piezoelectric member 111 is powered off), ensuring that the clamping member 120 is in close contact with the edge of the workpiece 1, forming a stable power-off protection effect. In this way, the emergency protection ability of the clamping device 100 in the face of sudden power failure can be improved, and problems such as flying chips or sliding of the workpiece 1 due to the sudden loss of adsorption force or clamping force can be avoided; when the piezoelectric member 111 is powered on, it can drive the flexible member 112 to generate deformation in a specific direction, prompting the clamping member 120 to quickly move to the release position and separate from the workpiece 1, thus not hindering the loading, unloading, and handover of the workpiece 1, ensuring the continuity and high efficiency of the production process.

[0051] As Figure 2 shown, in the embodiment of the present invention, the flexible member 112 includes a support portion 1124, a connecting portion 1123, and at least one bending portion 1121 connected between the support portion 1124 and the connecting portion 1123. The support portion 1124 is connected to the base 101, the connecting portion 1123 is connected to the clamping member 120, and the piezoelectric member 111 includes at least one piezoelectric diaphragm 1111, and the piezoelectric diaphragm 1111 is disposed on the surface of the bending portion 1121.

[0052] In the above technical solution, the support portion 1124 is stably connected to the base 101, ensuring the mechanical stability of the entire clamping system. The bending portion 1121 generates deformation under the drive of the piezoelectric diaphragm 1111, and the connecting portion 1123 is connected to the clamping member 120 and is responsible for transmitting the deformation to move the clamping member 120, realizing precise clamping or rapid release of the workpiece 1. On the one hand, when the piezoelectric member 111 is in a power-off state, the bending portion 1121 maintains a pre-tightened and bent state, and with its own pre-tightening force or elastic recovery, ensures that the clamping member 120 closely fits the edge of the workpiece 1, effectively preventing the workpiece 1 from flying out or sliding in the event of sudden air cut-off or power failure, avoiding the risk of damaging the workpiece 1, and enhancing the safety protection ability of the system in abnormal situations; on the other hand, when the piezoelectric member 111 is in a powered-on state, the piezoelectric diaphragm 1111 quickly responds to the electrical signal, prompting the shape of the bending portion 1121 to change (increase or decrease in bending curvature), realizing the rapid separation of the clamping member 120 and the workpiece 1, ensuring the smoothness of the loading and unloading process of the workpiece 1, and greatly improving the production efficiency.

[0053] Furthermore, compared with the traditional single motor drive or spring return mechanism, the combined design of the piezoelectric diaphragm 1111 and the bending portion 1121 not only provides a more precise and faster driving response, but also allows efficient energy conversion in a limited space, thereby reducing the volume and weight of the entire clamping device 100, optimizing the spatial layout, enhancing its flexibility and adaptability on the automated production line, and preventing the clamping device 100 from colliding with and interfering with other components in the processing equipment during high-precision processing.

[0054] Preferably, the piezoelectric diaphragm 1111 is arranged on a side of the bending portion 1121 with a smaller bending radius, which can effectively reduce the contact between the piezoelectric diaphragm 1111 and other components, such as the clamping member 120 and the second surface 22, and prevent the piezoelectric diaphragm 1111 from being damaged due to frequent touches.

[0055] Preferably, in an embodiment of the present invention, the flexible member 112 is a sheet structure, which not only provides the necessary deformation freedom to adapt to the clamping requirements of different sizes and shapes of workpieces 1, but also due to its light and thin characteristics, effectively reduces the overall volume and weight of the clamping device 100, improves space utilization efficiency, and facilitates deployment in small or complex production environments, further expanding its scope of application.

[0056] Specifically, in an embodiment of the present invention, the thickness range of the piezoelectric diaphragm 1111 is 0.1 to 3 mm, and the bending curvature can be achieved from 0 / m to 200 / m; in the present invention, the diaphragm thickness of the piezoelectric diaphragm 1111 is preferably 0.2 to 1 mm, and the bending curvature can be achieved from 0 / m to 100 / m.

[0057] like Figure 2 and Figure 9 As shown, in an embodiment of the present invention, the clamping member 120 includes: a clamping frame 121, connected to the deformable member 110; a clamping sheet 122, connected to the clamping frame 121, the clamping sheet 122 is located on the side of the clamping frame 121 away from the deformable member 110, and the clamping sheet 122 is detachably connected to the clamping frame 121.

[0058] In the above technical solution, the detachable connection between the clamping piece 122 and the clamping frame 121 allows the clamping piece 122 to be quickly replaced or maintained without affecting the stability of the overall structure, so that it is convenient to process workpieces 1 of different sizes and materials. For example, in the field of integrated circuit manufacturing, when it is necessary to process wafers of different diameters or different types of mask plates, the operator can simply replace the clamping piece 122 that matches the size and shape of the workpiece 1 without adjusting the structure of the entire clamping device or replacing other components, which greatly improves the flexibility and adaptability of the clamping device, reduces production costs and maintenance time, and improves the stability and production efficiency of the production line.

[0059] Specifically, in the embodiment of the present invention, the clamping piece 122 is close to and in contact with the edge of the substrate. This approach can reduce the contact area between the clamping piece 122 and the substrate, and can prevent the clamping piece 122 from directly contacting the functional area of ​​the substrate to cause scratches and other problems.

[0060] like Figure 9 As shown, in one embodiment, the clamping piece 122 is in the shape of a flat plate. In this way, the peripheral side of the workpiece 1 can be pressed. It should be noted that the clamping piece 122 can also be in an arc shape or other shapes to match the edges of workpieces 1 of different shapes.

[0061] like Figure 2 As shown, in one embodiment, the clamping piece 122 includes a first segment 1221 and a second segment 1222 connected and arranged at an angle, the first segment 1221 is connected to the clamping frame 121, the second segment 1222 is located on a side of the first segment 1221 away from the deformable member 110, and the second segment 1222 is located above the first segment 1221. In this way, the upper side and the peripheral side of the workpiece 1 can be pressed.

[0062] like Figure 8 , Figure 9 , Figure 17 and Figure 18 As shown, in one embodiment, the failure protection assembly 10 includes a plurality of deformable members 110 and a clamping member 120 , and the plurality of deformable members 110 are all connected to the clamping member 120 .

[0063] In the above technical scheme, multiple deformable components 110 are arranged, and each deformable component 110 is connected to a clamping component 120. In this way, multi-point coordinated driving can be achieved, so that in the power-off state, all deformable components 110 can rely on the preload force or elastic properties of their materials to stably maintain the clamping component 120 in a position in close contact with the workpiece 1, thereby forming a stable clamping state, effectively preventing the workpiece 1 from slipping or flying out due to failure of the clamping force when the system is abnormal or the power is interrupted; when the piezoelectric diaphragm 1111 switches from the power-off state to the power-on state, the input of the electrical signal prompts the multiple deformable components 110 to deform, and the combined force effect of this synchronous deformation enables the clamping component 120 to quickly and smoothly transition from the position in contact with the workpiece 1 to the completely separated state, that is, the coordinated action of the multiple deformable components 110 drives the clamping component 120 to move as a whole, thereby realizing the rapid and damage-free release of the workpiece.

[0064] Furthermore, by providing a clamping member 120 connected to the plurality of deformable members 110 , the contact area between the clamping member 120 and the workpiece 1 can be increased, thereby increasing the clamping stability of the clamping device 100 in a power-off state.

[0065] As Figures 13 to 16 shown, in an embodiment of the present invention, the fail-safe component 10 includes a deformable member 110 and a clamping member 120. In this way, the clamping member 120 can be brought into contact with the workpiece 1.

[0066] As Figure 1 , Figure 10 , Figure 13 and Figure 14 shown, in one embodiment, there are four fail-safe components 10, which are the first fail-safe component 10a, the second fail-safe component 10b, the third fail-safe component 10c, and the fourth fail-safe component 10d respectively; among them, the first fail-safe component 10a and the second fail-safe component 10b are respectively located on both sides of the first surface 21 and are mirror-symmetrical in the first direction X, and the third fail-safe component 10c and the fourth fail-safe component 10d are respectively located on both sides of the first surface 21 and are mirror-symmetrical in the second direction Y.

[0067] Through the above arrangement, in the case of power failure or system abnormality, the four fail-safe components 10 can act simultaneously, firmly holding the clamping member 120 in the position in contact with the workpiece 1, thereby forming a protective circle that evenly surrounds the workpiece 1, effectively preventing the problem of the workpiece 1 slipping or flying out after losing the normal clamping force, and ensuring the safety of the workpiece 1.

[0068] Furthermore, the four fail-safe components 10 can not only clamp a square substrate but also clamp a circular substrate.

[0069] Specifically, in this embodiment, the first fail-safe component 10a and the second fail-safe component 10b face each other along the first direction X, and the third fail-safe component 10c and the fourth fail-safe component 10d face each other along the second direction Y. In this way, the substrate can be clamped in the first direction and the second direction, and a force is applied to the substrate through pre-deformation to achieve auxiliary position holding of the substrate; of course, since the four fail-safe components 10 are in a mirror relationship along the first direction and the second direction, the movement operations of the four fail-safe components 10 are centering movements, and this arrangement form is also beneficial to the actual clamping operation.

[0070] As Figure 15 and Figure 16As shown, in one embodiment, there are four failure protection components 10, and the four failure protection components 10 are respectively a first failure protection component 10a, a second failure protection component 10b, a third failure protection component 10c and a fourth failure protection component 10d. The first failure protection component 10a and the second failure protection component 10b are respectively located on both sides of the first surface 21 and are mirror-symmetrical in the first direction X, the third failure protection component 10c and the fourth failure protection component 10d are respectively located on both sides of the first surface 21 and are mirror-symmetrical in the first direction X, the first failure protection component 10a and the third failure protection component 10c are spaced apart in the second direction Y, and the second failure protection component 10b and the fourth failure protection component 10d are spaced apart in the second direction Y.

[0071] Through the above arrangement, the workpiece 1 can be clamped on both sides of the first direction X, and the ability to clamp the protective substrate of the workpiece 1 in the first direction can be improved to prevent the workpiece 1 from slipping or flying out after losing the normal clamping force, thereby ensuring the safety of the workpiece 1.

[0072] like Figure 15 and Figure 16 As shown, in one embodiment, the clamping device 100 includes four fixed components 400, which are all arranged in the first direction X and are divided into two groups arranged in a mirror image in the first direction X; the fixed components 400 have the ability to adjust the displacement, and play a role in precisely adjusting the position of the substrate in the horizontal direction to achieve the clamping and positioning of the substrate; in this embodiment, the main purpose of this arrangement is to improve the clamping and protection capabilities of the substrate in the first direction X by adding a pair of failure protection components 10 in the first direction X, and to free up space in the second direction Y to avoid interference with the detection of the substrate. In this embodiment, since the fixed components 400 also have the ability to adjust the displacement, during the process of loading, unloading and handing over the substrate, the failure protection component 10 needs to wait until the fixed component 400 has adjusted the displacement before power-off protection is performed.

[0073] It should be noted that the four deformable components 110 can have the same design parameters or different design parameters, and the design parameters can be selected according to actual needs; similarly, the four clamping components 120 can have the same material and design size or different materials or design sizes, and the selection and design can be made according to actual needs.

[0074] An embodiment of the invention is Figure 13 and Figure 14 As shown, the substrate is in the shape of a circular sheet, and the four failure protection components 10 of the clamping device 100 are distributed along the circumference of the circular sheet; specifically, the substrate is a silicon sheet or a wafer; another embodiment of the invention is as follows Figure 3 and Figure 15As shown, the substrate is in the shape of a square thick plate, and the four fail-safe components 10 of the clamping device 100 are distributed along the four sides of the square plate; specifically, the substrate is a mask plate.

[0075] Embodiment 1

[0076] As Figures 1 to 5 shown, in Embodiment 1 of the present invention, there are two bending parts 1121 and two piezoelectric diaphragms 1111. The two piezoelectric diaphragms 1111 are respectively attached to the two bending parts 1121. One end of each of the two bending parts 1121 is connected to the supporting part 1124, and the other end of each of the two bending parts 1121 is connected to the connecting part 1123. The openings of the two bending parts 1121 face each other.

[0077] In the above technical solution, the two bending parts 1121 are both connected between the supporting part 1124 and the connecting part 1123, and the openings of the two bending parts 1121 face each other, which can form a dynamic structure that can rapidly deform in response to changes in electrical signals. In the power-off state, the piezoelectric diaphragm 1111 loses its driving effect, and the bending part 1121 relies on the natural elasticity of its material or the preset mechanical pre-tightening force to maintain close contact with the workpiece 1, ensuring that even in the case of the failure of the adsorption force or clamping force of the fixing component 400, the workpiece 1 can still be firmly held on the base 101, effectively avoiding the risk of the workpiece 1 flying out or slipping due to the clamping failure of the fixing component 400, thereby greatly improving the safety and reliability of the system; when the piezoelectric diaphragm 1111 is switched from the power-off state to the power-on state, the input of the electrical signal causes the piezoelectric diaphragm 1111 to deform responsively, thereby causing the curvature of the two bending parts 1121 to change, so as to drive the connecting part 1123 and the clamping member 120 as a whole to move away from the workpiece 1, realizing the rapid release of the workpiece 1, facilitating subsequent processing or loading and unloading operations, and improving production efficiency.

[0078] Specifically, compared with the structure of a single bending part 1121 and a single piezoelectric diaphragm 1111, Embodiment 1 of the present invention has a better anti-torsion effect by setting two bending parts 1121 and two piezoelectric diaphragms 1111 to avoid interfering with the workpiece 1.

[0079] As Figures 1 to 5 shown, in Embodiment 1 of the present invention, the two bending parts 1121 are arranged vertically up and down (along the third direction Z) perpendicular to the second surface 22. The bending part 1121 located below abuts against the second surface 22. When the piezoelectric diaphragm 1111 is switched from the power-off state to the power-on state, the bending curvatures of the two bending parts 1121 both increase, so as to drive the clamping member 120 away from the base 101 and the workpiece 1.

[0080] In the above technical solution, when the clamping device 100 is in a power-off state, the two bending portions 1121 are under the action of the natural elasticity of the material or a preset mechanical pre-tightening force and maintain a pre-bent state. In this state, the clamping member 120 is in close contact with the workpiece 1, so that the clamping member 120 is in a power-off protection position, ensuring that even in the event of a sudden power failure or air cut-off, the workpiece 1 can be stably fixed, avoiding problems such as flying chips or slipping due to the disappearance of the adsorption force or clamping force, thereby greatly improving the safety guarantee ability of the system under abnormal conditions; when the piezoelectric diaphragm 1111 is switched from the power-off state to the power-on state, the input of the electrical signal will cause the piezoelectric diaphragm 1111 to respond and deform, and the bending curvatures of the two bending portions 1121 will both increase accordingly. This increased curvature will cause the two ends of the bending portion 1121 to contract inward. Since the lower bending portion 1121 abuts against the second surface 22, and at the same time the second surface 22 will push the connecting portion 1123 to deflect upward through the lower bending portion 1121, the clamping member 120 is moved away from the base 101 and the workpiece 1, so that the clamping member 120 quickly moves from the contact state with the workpiece 1 to the release position where it is completely separated from the workpiece 1. The entire release process is not only fast, smooth, but also efficient, ensuring the free movement of the workpiece during loading and unloading, avoiding direct friction between the clamping member 120 and the surface of the workpiece 1, reducing potential damage to the surface of the workpiece 1, and improving the integrity rate and production efficiency of the workpiece 1.

[0081] As Figure 5 shown, in the first embodiment of the present invention, for the initial bending state of the clamping device 100, see Figure 5 the flexible member 112 located below in it. At this time, the lower part of the lower bending portion 1121 of the flexible member 112 is in a free state, and the flexible member 112 of the entire clamping device 100 presents a natural state of "hanging down"; see Figure 5 the flexible member 112 located above in it. After the lower part of the lower bending portion 1121 is pre-tightened by the abutting action of the second surface 22, the flexible member 112 presents an almost "horizontal" pre-tightened state; during this pre-tightening process, the bending state of the flexible member 112 changes. Among them, the bending curvatures of the two bending portions 1121 both become smaller, and this state is close to the pre-bent state during the normal clamping protection process; specifically, the magnitude of the abutting force between the lower bending portion 1121 and the second surface 22 is about ten-odd Newtons.

[0082] As Figure 1 、 Figure 19 and Figure 20As shown in the figure, in the first embodiment of the present invention, the motion system of the clamping device 100 is used. During the non-clamping protection process of the clamping device 100, the piezoelectric diaphragm 1111 is in the energized state, and at this time, the flexible member 112 is no longer in the initial pre-tightening and bending state; among them, after the two piezoelectric diaphragms 1111 are energized, they respectively drive the two bending portions 1121 to undergo bending deformation, and the bending curvature of the two bending portions 1121 becomes larger; the lower part of the lower bending portion 1121 abuts against the second surface 22, causing the connecting portion 1123 to contract inward and presenting an upward swing "upward warping" state. In this way, the flexible member 112 drives the clamping member 120 to swing upward, so that the clamping piece 122 is separated from the substrate; the clamping pieces 122 of the four groups of failure protection components 10 are simultaneously moved out of the vertical movement space range of the substrate. At this time, the fixing component 400 releases the substrate, and the lifting device 200 rises and drives the substrate to move upward to the transfer position. The transfer device 300 enters the transfer position from the side and takes the substrate. After the lifting device 200 moves down, the transfer device 300 takes away the substrate, thus completing a workpiece unloading operation; or, the transfer device 300 brings the substrate and enters the transfer position from the side, the lifting device 200 moves to the transfer position and takes the substrate. After the transfer device 300 withdraws, the lifting device 200 drops to the first surface 21, the fixing component 400 works, and then the failure protection component 10 is powered off to start protection, thus completing a workpiece loading operation; that is, during the non-clamping protection process of the clamping device 100, the clamping device 100 including the clamping piece 122 will not interfere with the workpiece loading and unloading operation space of the substrate.

[0083] It should be noted that in the case of power-off, the two bending portions 1121 provide a downward pressure to the clamping piece 122 of the clamping member 120 through the pre-tightening action, and the clamping piece 122 acts on the edge area of the substrate to apply a holding force.

[0084] It should be noted that the amount of change in the bending curvature of the two bending portions 1121 can be the same or different. In order to meet the operation safety requirements of the actual substrate for workpiece loading and unloading, it is preferred that the amount of curvature change of the upper bending portion 1121 is greater than that of the lower bending portion 1121.

[0085] An embodiment of the invention is as Figure 6 As shown in the figure, in the piezoelectric diaphragm 1111 of the deformable member 110, the electrodes of the two piezoelectric diaphragms 1111 are connected in series in the forward direction, that is, the positive electrode of the upper piezoelectric diaphragm 1111 is connected in series with the negative electrode of the lower piezoelectric diaphragm 1111, and then the negative electrode of the upper piezoelectric diaphragm 1111 and the positive electrode of the lower piezoelectric diaphragm 1111 are used as two poles to connect to an external power supply; of course, as Figure 7As shown, in another embodiment, the electrodes of the two piezoelectric diaphragms 1111 are connected in parallel in the forward direction, that is, the positive electrode of the upper piezoelectric diaphragm 1111 is connected to the positive electrode of the lower piezoelectric diaphragm 1111, and at the same time, the negative electrode of the upper piezoelectric diaphragm 1111 is connected to the negative electrode of the lower piezoelectric diaphragm 1111. Then, the negative electrode of the upper piezoelectric diaphragm 1111 and the positive electrode of the lower piezoelectric diaphragm 1111 are used as two poles to externally connect a power supply; it should be realized that for the above embodiments, the actual use depends on the specific situation to match the space size and functional use purpose.

[0086] Embodiment 2

[0087] As Figure 8 and Figure 9 shown, the difference between the second embodiment and the first embodiment of the present invention is that the two bending portions 1121 are arranged in the horizontal direction parallel to the second surface 22. When the piezoelectric diaphragm 1111 is switched from the power-off state to the power-on state, the bending curvatures of the two bending portions 1121 both increase to drive the clamping member 120 away from the workpiece 1.

[0088] In the above technical solution, when the piezoelectric diaphragm 1111 is in the power-off state, the two bending portions 1121 rely on the pre-tightening or elastic characteristics of the material to maintain their pre-tightening bending shapes. At this time, the clamping member 120 is in close contact with the workpiece 1 and is in the power-off protection position, ensuring that the workpiece 1 can be stably fixed in the event of a sudden power failure or system abnormality, avoiding the problem of the workpiece 1 flying out or slipping due to the failure of the clamping force or adsorption force of the fixing component 400, thereby greatly enhancing the safety guarantee ability of the system in an emergency and reducing the risks and losses in the production process; once the piezoelectric diaphragm 1111 is switched from the power-off state to the power-on state, the input of the electrical signal causes the piezoelectric diaphragm 1111 to generate a response deformation, which can make the bending curvatures of the two bending portions 1121 both increase. This increase in curvature will cause the bending portions 1121 to undergo an inward contraction deformation along the horizontal direction, prompting the clamping member 120 to quickly move from the state of contacting the workpiece 1 to the release position away from the workpiece 1. The entire release process is not only fast and smooth, but also avoids the direct friction of the workpiece 1 during the loading and unloading process, reduces the damage to the surface of the workpiece 1, improves the integrity rate and production efficiency of the workpiece 1, and at the same time can ensure the free movement of the workpiece 1 during the handover of loading and unloading operations, optimizing the production process.

[0089] In the second embodiment, through the horizontal arrangement of the two bending parts 1121, the pre-tightening force of the clamping member 120 is changed from downward pressure to flat pushing. In addition to having the power-off protection function, the flat-pushing clamping member 120 also has the ability to apply a reverse voltage to offset the deformation of the workpiece 1. Specifically, when the workpiece 1 is being processed, due to the change in the working temperature, the workpiece 1 generates deformation. Although the amplitude of this deformation is not large, in the field of nanoscale processing, even a tiny deformation will affect the processing quality and effect. When the fixing component 400 is an adsorption device, it does not have the ability to offset the deformation of the workpiece 1 in the horizontal direction. At this time, by applying a reverse voltage to the piezoelectric diaphragm 1111, the curvature of the two bending parts 1121 is reduced, so that the two bending parts 1121 expand and deform along the horizontal direction to increase the pre-tightening force of the clamping member 120 on the workpiece 1, thereby offsetting the deformation of the workpiece 1.

[0090] Other structures of the second embodiment are the same as those of the first embodiment and will not be described in detail here.

[0091] Embodiment Three

[0092] As Figures 10 to 12 shown, in the third embodiment of the present invention, there are two bending parts 1121 and two piezoelectric diaphragms 1111. The two piezoelectric diaphragms 1111 are respectively attached to the two bending parts 1121, and the openings of the two bending parts 1121 are arranged facing away from each other; the two bending parts 1121 are arranged vertically up and down perpendicular to the second surface 22. One end of the upper bending part 1121 is connected to the support part 1124, the other end of the upper bending part 1121 is connected to the connecting part 1123, one end of the lower bending part 1121 is supported on the second surface 22, and the other end of the lower bending part 1121 is connected to the connecting part 1123.

[0093] In the above technical solution, when in the power-off state, since the piezoelectric diaphragm 1111 does not respond to electrical signals, the two bending parts 1121 maintain the pre-tightening bending shape. At this time, the upper bending part 1121 and the lower bending part 1121 together make the clamping member 120 closely adhere to the workpiece 1, so that the clamping member 120 is in the power-off protection position, effectively preventing the problem that the workpiece 1 flies out or slips in the case of the failure of the adsorption force or the clamping force, and improving the ability of the entire system to cope with abnormal situations; when the piezoelectric diaphragm 1111 is switched from the power-off state to the power-on state, the electrical signal drives the two piezoelectric diaphragms 1111 to generate deformation, so that the clamping member 120 moves away from the workpiece 1, thereby realizing the release of the workpiece 1, reducing the friction between the workpiece and the clamping device 100 during the loading and unloading process, avoiding the surface damage of the workpiece 1, and improving the integrity rate and production efficiency of the workpiece 1.

[0094] As Figures 10 to 12As shown, in the third embodiment of the present invention, when the piezoelectric diaphragm 1111 switches from the power-off state to the power-on state, the bending curvature of the upper bending portion 1121 increases, and the bending curvature of the lower bending portion 1121 decreases, so as to drive the clamping member 120 away from the workpiece 1 and the base 101.

[0095] In the above technical solution, when the piezoelectric diaphragm 1111 is in the power-off state, the two bending portions 1121 maintain a certain bending curvature by relying on the natural elasticity of their materials or a preset mechanical pre-tightening force. The upper bending portion 1121 and the lower bending portion 1121 jointly act on the clamping member 120 through the connecting portion 1123 to ensure that the clamping member 120 is in close contact with the workpiece 1, so that the clamping member 120 is in the power-off protection position. This effectively avoids the accidental movement or damage of the workpiece 1 due to the failure of the adsorption force or the clamping force in the event of system abnormalities or power outages, ensuring production safety and reducing potential economic losses. Once the piezoelectric diaphragm 1111 switches from the power-off state to the power-on state, the input of the electrical signal causes the piezoelectric diaphragm 1111 to generate a responsive deformation, increasing the bending curvature of the upper bending portion 1121, which prompts it to contract inward (contract in the direction away from the workpiece 1), driving the connecting portion 1123 and the clamping member 120 to move away from the workpiece 1. At the same time, the bending curvature of the lower bending portion 1121 decreases. Since one end of it abuts against the second surface 22, the decrease in the bending curvature actually generates an upward expansion trend. This asymmetric deformation resultant force enables the clamping member 120 to swing upward. In this way, the clamping member 120 not only moves away from the workpiece 1 but also moves away from the base 101, realizing the rapid and smooth release of the workpiece 1, leaving sufficient space for subsequent workpiece 1 loading, unloading or handover operations, and significantly improving production efficiency. It should be noted that the effect of the upward swing of the clamping member 120 can be achieved by setting the arc sizes of different bending portions 1121 and adjusting the voltages of the piezoelectric diaphragms 1111 on different bending portions 1121.

[0096] Such as Figures 10 to 12 And Figure 19 And Figure 20As shown in the figure, in the third embodiment of the present invention, the motion system of the clamping device 100 is used. During the non-clamping protection process of the clamping device 100, the piezoelectric diaphragm 1111 is in the energized state, and at this time, the flexible member 112 is no longer in the initial bending state; among them, after the piezoelectric diaphragm 1111 located above is energized, it drives the bending portion 1121 located above to undergo a bending deformation, and the bending curvature of the bending portion 1121 located above becomes larger. After the piezoelectric diaphragm 1111 located below is energized, it drives the bending portion 1121 located below to undergo a bending deformation, and the bending curvature of the bending portion 1121 located below becomes smaller; above, while the bending curvature of the bending portion 1121 located above becomes larger, the bending curvature of the bending portion 1121 located below becomes smaller, causing the connecting portion 1123 to present an "upward swing" state of swinging upward. In this way, the flexible member 112 drives the clamping member 120 to swing upward, so that the clamping piece 122 is separated from the substrate; the clamping pieces 122 of the four failure protection components 10 of the motion system are simultaneously moved out of the vertical moving space range of the substrate. At this time, the fixing component 400 releases the substrate, and the lifting device 200 rises and drives the substrate to move upward to the transfer position. The transfer device 300 enters the transfer position from the side and takes the substrate. After the lifting device 200 moves down, the transfer device 300 takes away the substrate, thereby completing a workpiece unloading operation; or, the transfer device 300 brings the substrate and enters the transfer position from the side, the lifting device 200 moves to the transfer position and takes the substrate. After the transfer device 300 withdraws, the lifting device 200 drops to the first surface 21, the fixing component 400 works, and then the failure protection component 10 is powered off to start protection, thereby completing a workpiece loading operation; that is, during the non-clamping protection process of the clamping device 100, the clamping device 100 including the clamping piece 122 does not interfere with the workpiece loading and unloading operation space of the substrate.

[0097] In the third embodiment, the two bending portions 1121 are arranged back to back, further reducing the volume of the failure protection component 10 in the direction perpendicular to the second surface 22.

[0098] Embodiment 4

[0099] As Figures 17 to 18 shown, the difference between the fourth embodiment of the present invention and the third embodiment is that when the piezoelectric diaphragm 1111 is switched from the power-off state to the power-on state, the bending curvatures of the two bending portions 1121 both increase to drive the clamping member 120 away from the workpiece 1.

[0100] In the above technical solution, when the piezoelectric diaphragm 1111 is in the power-off state, the two bending portions 1121 rely on the elasticity of the material itself or a preset pre-tightening force to maintain close contact with the workpiece 1, forming a stable clamping state. Even in the event of a sudden power failure or system abnormality, it can effectively prevent the workpiece 1 from slipping or flying out due to the failure of the adsorption force or clamping force, ensuring the safety of the workpiece 1 and the stability of the system, and reducing the damage and economic losses caused by the accidental movement of the workpiece 1 during the production process; when the piezoelectric diaphragm 1111 changes from the power-off state to the power-on state, the bending curvatures of the two bending portions 1121 both increase. In this way, the increase in the curvature of the bending portion 1121 causes the bending portion 1121 to contract inward (contract in the horizontal direction away from the workpiece 1), thereby prompting the clamping member 120 to quickly and smoothly transition from the contact state with the workpiece 1 to the completely separated release state.

[0101] The pre-tightening force of the clamping member 120 in the fourth embodiment is also in the form of a flat push, and it also has the ability to offset the deformation of the workpiece 1 in the second embodiment, which will not be elaborated here.

[0102] The other structures of the fourth embodiment are the same as those of the third embodiment, which will not be elaborated here.

[0103] It should be noted that the present invention can solve the problem in the prior art that there is a lack of means to protect the workpiece 1 (substrate) in the case of power failure and gas cut-off in the vacuum adsorption clamping method, and the problem that there is a lack of means to protect the workpiece 1 (substrate) due to loose clamping in the case of power failure in the motor-driven clamping method. The flexible member 112 of the clamping device 100 of the present invention is pre-deformed to apply a force to the substrate to clamp and protect the substrate, and at the same time, it does not interfere with the normal loading and unloading operations of the substrate.

[0104] It should be noted that the present invention can solve the problem in the prior art that the spatial layout of the clamping method is compact and the size is limited. The clamping device 100 of the present invention has a small size, occupies a small volume of space, and is relatively flexible in layout.

[0105] It should be noted that the present invention provides a clamping device 100, which can not only improve the clamping and protection ability of the substrate, but also has the advantages of extremely small volume size, thin and light volume, easy installation and maintenance, and can also realize the feature of automatic control, with a wide range of adaptability.

[0106] Such as Figure 3 、 Figure 19 and Figure 20As shown in the figure, an embodiment of the present invention provides a motion system, including: the above-mentioned clamping device 100; a lifting device 200, located below the clamping device 100, the lifting device 200 having a lifting end for jacking up the workpiece 1; a transfer device 300, the transfer device 300 being located above the clamping device 100, the transfer device 300 having a clamping portion movably arranged along a first direction X and / or a second direction Y, the clamping portion having a clamping cavity for clamping the workpiece 1.

[0107] Specifically, the first surface 21 and the second surface 22 have coaxially arranged transfer holes, and the lifting end of the lifting device 200 can pass through the transfer holes to move the workpiece 1 to the transfer position.

[0108] As Figure 3 、 Figure 19 and Figure 20 As shown in the figure, in the motion system using the clamping device 100, during the normal clamping and protection process, the piezoelectric diaphragm 1111 is in a power-off state. At this time, the flexible member 112 is in a pre-tightened and bent state, and a force is applied to the workpiece 1 through the clamping member 120. The clamping piece 122 of the clamping member 120 closely adheres to the edge area of the workpiece 1, thereby realizing the clamping and protection of the workpiece 1. The purpose of the clamping device 100 is to protect the workpiece 1 in case of an accident, mainly for situations such as power-off triggered by the out-of-control of the motion system and air cut-off caused by power-off, such as power-off and air cut-off caused by improper operation of personnel. In these situations, the workpiece 1 is extremely likely to fly out and then cause damage.

[0109] Specifically, in the embodiment of the present invention, the magnitude of the force applied by each clamping member 120 to the substrate is approximately several Newtons.

[0110] The above motion system has all the advantages of the above-mentioned clamping device, which will not be elaborated here.

[0111] From the above description, it can be seen that the above embodiments of the present invention achieve the following technical effects: The failure protection component has the ability of pre-deformation. When not powered on, the clamping member can be brought into contact with the workpiece. In the case where the fixing component fixes the workpiece, that is, when powered on or ventilated, the clamping member is always in the position of contacting the workpiece. At this time, the clamping device fixes the workpiece through the fixing component; By providing a plurality of failure protection components on the second surface of the base, an effective protection circle surrounding the first surface can be formed. Once the situation of power failure of the motor-driven clamping or air cut-off of the vacuum adsorption occurs, the clamping member can still be in contact with the workpiece under the drive of the deformable member, so that the clamping member is in the power-off protection position, that is, the limit protection mechanism is activated. At this time, the clamping member relies on the preset mechanical pre-tightening force and closely contacts the edge of the workpiece to play a certain role in limit protection, effectively avoiding the risk of the workpiece flying out or sliding due to adsorption failure or clamping loosening, thereby greatly reducing the damage of the workpiece caused by power failure and air cut-off; When the workpiece needs to be transferred, the fixing component is not powered on or ventilated, and the failure protection component is powered on to disengage the clamping member from and away from the workpiece, and then the transfer is completed.

[0112] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention can have various changes and modifications. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A clamping device, characterized in that: include: A base (101) having a first surface (21) and a second surface (22), wherein the first surface (21) is used to support a workpiece (1); and the first surface (21) is arranged on the second surface (22) in parallel or overlapping manner; a fixing assembly (400), arranged on the first surface (21) or the second surface (22), the fixing assembly (400) being used to fix a workpiece (1); A plurality of failure protection components (10) are sequentially arranged on the second surface (22) along the circumference of the first surface (21); the failure protection components (10) include a deformable component (110) and a clamping component (120); the clamping component (120) is connected to the second surface (22) via the deformable component (110); the deformable component (110) includes a piezoelectric element (111) capable of deforming in response to an electrical signal; the clamping component (120) is capable of abutting against or separating from the workpiece (1) under the drive of the deformable component (110); wherein, when the deformable component (110) is powered off, the clamping component (120) is in a power-off protection position abutting against the workpiece (1); and when the deformable component (110) is powered on, the clamping component (120) is in a release position separated from the workpiece (1).

2. The clamping device according to claim 1, characterized in that: The deformable component (110) further comprises a flexible component (112), one end of the flexible component (112) being connected to the second surface (22), the other end of the flexible component (112) being connected to the clamping component (120), the piezoelectric component (111) being connected to the flexible component (112) and being located between the two ends of the flexible component (112), and the piezoelectric component (111) being capable of driving the flexible component (112) to produce corresponding deformation.

3. The clamping device according to claim 2, characterized in that: The flexible component (112) comprises a supporting portion (1124), a connecting portion (1123), and at least one bending portion (1121) connected between the supporting portion (1124) and the connecting portion (1123), wherein the supporting portion (1124) is connected to the base (101), and the connecting portion (1123) is connected to the clamping member (120). The piezoelectric component (111) comprises at least one piezoelectric diaphragm (1111), and the piezoelectric diaphragm (1111) is arranged on the surface of the bending portion (1121).

4. The clamping device according to claim 3, characterized in that: There are two bending parts (1121), and there are two piezoelectric diaphragms (1111). The two piezoelectric diaphragms (1111) are respectively attached to the two bending parts (1121), one end of the two bending parts (1121) is connected to the supporting part (1124), and the other end of the two bending parts (1121) is connected to the connecting part (1123), and the openings of the two bending parts (1121) are arranged to face each other.

5. The clamping device according to claim 4, characterized in that: The two curved portions (1121) are arranged vertically with respect to the second surface (22), the curved portion (1121) located at the bottom abuts against the second surface (22), and when the piezoelectric diaphragm (1111) is switched from a power-off state to a power-on state, the curvatures of the two curved portions (1121) are increased to drive the clamping member (120) away from the base (101) and the workpiece (1); or, The two bending portions (1121) are arranged in a horizontal direction parallel to the second surface (22), and when the piezoelectric diaphragm (1111) is switched from a power-off state to a power-on state, the bending curvatures of the two bending portions (1121) are increased to drive the clamping member (120) away from the workpiece (1).

6. The clamping device according to claim 3, characterized in that: There are two bending portions (1121), there are two piezoelectric diaphragms (1111), the two piezoelectric diaphragms (1111) are respectively and correspondingly attached to the two bending portions (1121), and the openings of the two bending portions (1121) are arranged in opposition to each other; The two bent portions (1121) are arranged vertically to the second surface (22); one end of the bent portion (1121) located at the upper position is connected to the supporting portion (1124), and the other end of the bent portion (1121) located at the upper position is connected to the connecting portion (1123); one end of the bent portion (1121) located at the lower position is supported on the second surface (22), and the other end of the bent portion (1121) located at the lower position is connected to the connecting portion (1123).

7. The clamping device according to claim 6, characterized in that: When the piezoelectric diaphragm (1111) is switched from a power-off state to a power-on state, the bending curvatures of the two bending portions (1121) are increased to drive the clamping member (120) away from the workpiece (1); or, When the piezoelectric diaphragm (1111) switches from a power-off state to a power-on state, the bending curvature of the upper curved portion (1121) increases, while the bending curvature of the lower curved portion (1121) decreases, thereby driving the clamping member (120) to move away from the workpiece (1) and the base (101).

8. The clamping device according to any one of claims 1 to 7, characterized in that: The clamping member (120) comprises: A clamping frame (121) connected to the deformable member (110); A clamping sheet (122) is connected to the clamping frame (121); the clamping sheet (122) is located on a side of the clamping frame (121) away from the deformable component (110); and the clamping sheet (122) is detachably connected to the clamping frame (121).

9. The clamping device according to claim 8, characterized in that: The clamping piece (122) is in the shape of a flat plate; or, The clamping sheet (122) comprises a first segment (1221) and a second segment (1222) which are connected and arranged at an angle, the first segment (1221) being connected to the clamping frame (121), the second segment (1222) being located on a side of the first segment (1221) facing away from the deformable member (110), and the second segment (1222) being located above the first segment (1221).

10. The clamping device according to any one of claims 1 to 7, characterized in that: The failure protection component (10) comprises a plurality of the deformable components (110) and a clamping component (120), wherein the plurality of the deformable components (110) are all connected to the clamping component (120); or, The failure protection component (10) comprises a deformable component (110) and a clamping component (120).

11. The clamping device according to any one of claims 1 to 7, characterized in that: The plurality of failure protection components (10) is four, and the four failure protection components (10) are respectively a first failure protection component (10a), a second failure protection component (10b), a third failure protection component (10c) and a fourth failure protection component (10d); The first failure protection component (10a) and the second failure protection component (10b) are respectively located on both sides of the first surface (21) and are mirror-symmetrical in a first direction (X), and the third failure protection component (10c) and the fourth failure protection component (10d) are respectively located on both sides of the first surface (21) and are mirror-symmetrical in a second direction (Y); or the first failure protection component (10a) and the second failure protection component (10b) are respectively located on both sides of the first surface (21) and are mirror-symmetrical in the first direction (X), the third failure protection component (10c) and the fourth failure protection component (10d) are respectively located on both sides of the first surface (21) and are mirror-symmetrical in the first direction (X), the first failure protection component (10a) and the third failure protection component (10c) are arranged at intervals in the second direction (Y), and the second failure protection component (10b) and the fourth failure protection component (10d) are arranged at intervals in the second direction (Y).

12. A motion system, characterized in that: include: The clamping device (100) according to any one of claims 1 to 11; A lifting device (200) is located below the clamping device (100), and the lifting device (200) has a lifting end for lifting the workpiece (1); A handover device (300), the handover device (300) being located above the clamping device (100), the handover device (300) having a clamping portion movably arranged along a first direction (X) and / or a second direction (Y), the clamping portion having a clamping cavity for clamping the workpiece (1).

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