Inverter control galvanometer driving circuit and control driving system

Abstract

The embodiment of the invention belongs to the technical field of electronic control systems, and relates to an inversion control galvanometer driving circuit and a control driving system.The inversion control galvanometer driving circuit comprises a first driving module, a second driving module, a first half-bridge module, a second half-bridge module and a galvanometer unit; the first driving module drives the first half-bridge module according to the first pulse width modulation signal, the second driving module drives the second half-bridge module according to the second pulse width modulation signal, the first half-bridge module and the second half-bridge module are combined to form the full-bridge circuit, the galvanometer unit is driven in a full-bridge inversion mode, the whole driving circuit is clear and simple in connection, and the driving efficiency is improved. The system complexity can be reduced, the circuit control precision can be improved, the signal bandwidth can be increased, the signal bandwidth compatibility can be realized, the galvanometer response speed can be improved, and the production efficiency can be greatly improved.

Description

Technical Field

[0001] The present application relates to the technical field of electronic control systems, and more particularly, to an inverter control galvanometer drive circuit and a control drive system. Background Art

[0002] In the current domestic market, laser galvanometer drivers mainly present two technical forms: analog and semi-digital analog. These drivers mainly rely on analog devices in design and implementation to complete the PID (Proportional-Integral-Derivative) control of the entire control loop to drive the galvanometer to perform precise movements. However, such drivers have a significant problem, that is, the lack of in-depth control at the software level. Due to mainly relying on analog circuits, they generally exhibit disadvantages such as poor galvanometer control accuracy, slow response speed, and low signal bandwidth.

[0003] Compared with pure analog galvanometer drivers, semi-digital galvanometer drivers have improved performance. Such drivers have achieved closed-loop operation in position control, thereby improving the control accuracy to a certain extent. However, the control of its current loop is still self-closed at the hardware level, which limits the further improvement of its performance. Although semi-digital galvanometer drivers have improved in accuracy compared with analog drivers, they still show slow speed and also face the problem of low signal bandwidth.

[0004] The above two types of galvanometer drivers are commonly used in the current domestic market. Although they can meet the basic laser processing requirements to a certain extent, due to the lack of control accuracy and response speed, they seriously restrict the improvement of production efficiency and processing accuracy. With the increasing demand for high precision and high efficiency in the industrial processing field, the existing galvanometer driver technology has been difficult to meet the urgent needs of the market. Summary of the Invention

[0005] The technical problem to be solved by the present application is the technical problem of poor control accuracy, slow response speed, and low signal bandwidth of existing galvanometer drivers.

[0006] In order to solve the above technical problem, an embodiment of the present application provides an inverter control galvanometer drive circuit, which adopts the following technical solution:

[0007] The inverter control galvanometer drive circuit includes a first drive module, a second drive module, a first half-bridge module, a second half-bridge module, and a galvanometer unit, wherein:

[0008] The first drive module is connected to the first half-bridge module, and is used to receive the first pulse width modulation signal sent by the pulse generation unit, and convert the first pulse width modulation signal into a first drive voltage to drive the first half-bridge module;

[0009] The second driving module is connected to the second half-bridge module, and is configured to receive the second pulse width modulation signal sent by the pulse generation unit, and convert the second pulse width modulation signal into a second driving voltage to drive the second half-bridge module;

[0010] The first half-bridge module and the second half-bridge module are connected to the bus voltage and are respectively connected to the galvanometer unit, and are configured to jointly drive the galvanometer unit.

[0011] To solve the above technical problems, an embodiment of the present application further provides a control driving system, and the control driving system includes the inverter control galvanometer driving circuit as described above.

[0012] Compared with the prior art, the present application mainly has the following beneficial effects:

[0013] The present application provides an inverter control galvanometer driving circuit, which includes a first driving module, a second driving module, a first half-bridge module, a second half-bridge module and a galvanometer unit. The first driving module drives the first half-bridge module according to the first pulse width modulation signal, and the second driving module drives the second half-bridge module according to the second pulse width modulation signal. The first half-bridge module and the second half-bridge module jointly form a full-bridge inverter circuit to drive the galvanometer unit in the way of full-bridge inversion. The overall driving circuit has a clear and simple connection, can reduce the complexity of the system, has a low cost of using components, improves the circuit control accuracy, increases the signal bandwidth, realizes signal bandwidth compatibility, and at the same time improves the galvanometer response speed, thereby greatly improving the production efficiency. Description of the Drawings

[0014] In order to more clearly illustrate the solutions in the present application or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0015] Figure 1 is a schematic structural diagram of a galvanometer driving circuit in the prior art;

[0016] Figure 2 is a schematic structural diagram of an embodiment of the inverter control galvanometer driving circuit provided by the present application;

[0017] Figure 3 is a schematic structural diagram of a specific embodiment of the inverter control galvanometer driving circuit provided by the present application. Detailed Embodiments

[0018] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field to which this application belongs; the terms used in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" and any variations thereof in the specification and claims of this application and the above drawings are intended to cover non-exclusive inclusion. The terms "first", "second", etc. in the specification and claims of this application or the above drawings are used to distinguish different objects and not to describe a specific order.

[0019] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in connection with the embodiments can be included in at least one embodiment of this application. The phrase appears in various places in the specification and does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment mutually exclusive with other embodiments. Those skilled in the art will explicitly and implicitly understand that the embodiments described herein can be combined with other embodiments.

[0020] The currently widely used galvanometer driving scheme is linear device driving. See Figure 1 as shown Figure 1 This is a semi-digital galvanometer driving scheme. Specifically, an analog voltage is generated by the driving chip U9 and given to the adder U10, and then transmitted to the power amplifier U11 for power amplification. After high-frequency filtering through the resistor R50 and capacitor C51, the H2 galvanometer is then driven.

[0021] Among them, the resistor R52 is the galvanometer current sampling resistor, forming a current closed-loop in hardware. It mainly has the following disadvantages in performance: 1) Since the power amplifier U11 is a linear device, the efficiency is extremely low and it is always generating a large amount of heat; 2) The loop bandwidth is low, only a few KHZ. If the loop bandwidth is to be increased, the speed will drop very low, and the rise time of the driving pulse with a heavy-load galvanometer can reach the MS level.

[0022] In view of the technical problems existing in the above galvanometer driving scheme, this application proposes an inverter control galvanometer driving circuit, which uses discrete components to build a full-bridge inverter control galvanometer driving circuit. The working frequency can be as high as several hundred KHZ, the signal bandwidth can reach more than ten KHZ, and the output current can reach dozens of amperes. It has the characteristics of high output power. While driving galvanometers with a series of loads from small to large, the response speed of the galvanometer is improved.

[0023] In order to enable those skilled in the art to better understand the solution of this application, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the drawings.

[0024] The embodiments of this application provide an inverter control galvanometer driving circuit. See Figure 2As shown, the inverter control galvanometer drive circuit includes a first drive module 10, a second drive module 20, a first half-bridge module 30, a second half-bridge module 40, and a galvanometer unit 50, where:

[0025] The first drive module 10 is connected to the first half-bridge module 30, and is used to receive a first pulse width modulation signal PWMA sent by a pulse generation unit (not shown in the figure), and convert the first pulse width modulation signal PWMA into a first drive voltage to drive the first half-bridge module 30; the second drive module 20 is connected to the second half-bridge module 40, and is used to receive a second pulse width modulation signal PWMB sent by the pulse generation unit, and convert the second pulse width modulation signal PWMB into a second drive voltage to drive the second half-bridge module 40; the first half-bridge module 30 and the second half-bridge module 40 are connected to the bus voltage PVDD and are respectively connected to the galvanometer unit 50, and are used to jointly drive the galvanometer unit 50.

[0026] In this embodiment, in order to improve efficiency and reduce output harmonics, a single power supply is used to supply power to the inverter control galvanometer drive circuit. Among them, the first drive module 10 drives the first half-bridge module 30, and the second drive module 20 drives the second half-bridge module 40. When the first drive module 10 receives the first pulse width modulation signal PWMA, it will be correspondingly converted into a pulse width modulation signal with a higher amplitude for output to drive the first half-bridge module 30. Similarly, when the second drive module 20 receives the second pulse width modulation signal PWMB, it will be correspondingly converted into a pulse width modulation signal with a higher amplitude for output to drive the second half-bridge module 40. The first half-bridge module 30 and the second half-bridge module 40 jointly form a full bridge to drive the galvanometer unit 50.

[0027] In some embodiments, refer to Figure 3 As shown, the first half-bridge module 30 includes a first switch unit 31 and a second switch unit 32, where:

[0028] The first end of the first switch unit 31 is connected to the bus voltage PVDD, the second end of the first switch unit 31 is respectively connected to the first drive module 10 and the first end of the second switch unit 32, and the third end of the first switch unit 31 is connected to the first drive module 10 through a first current limiting resistor R1;

[0029] The first end of the second switch unit 32 is also connected to the first drive module 10, the second end of the second switch unit 32 is connected to the first control signal AIN+, and the third end of the second switch unit 32 is connected to the first drive module 10 through a second current limiting resistor R2.

[0030] In some embodiments, the first half-bridge module 30 further includes a first sampling resistor FF1. The first end of the first sampling resistor FF1 is connected to the second end of the second switch unit 32, and the second end of the first sampling resistor FF1 is grounded.

[0031] In some embodiments, the second half-bridge module 40 includes a third switching unit 41 and a fourth switching unit 42, where:

[0032] The first end of the third switching unit 41 is connected to the bus voltage PVDD. The second end of the third switching unit 41 is respectively connected to the second driving module 20 and the first end of the fourth switching unit 42. The third end of the third switching unit 41 is connected to the second driving module 20 through a third current-limiting resistor R3.

[0033] The first end of the fourth switching unit 42 is further connected to the second driving module 20. The second end of the fourth switching unit 42 is connected to the second control signal BIN+. The third end of the fourth switching unit 42 is connected to the second driving module 20 through a fourth current-limiting resistor R4.

[0034] In some embodiments, the second half-bridge module 40 further includes a second sampling resistor FF2. The first end of the second sampling resistor FF2 is connected to the second end of the fourth switching unit 42, and the second end of the second sampling resistor FF2 is grounded.

[0035] Among them, the first sampling resistor FF1 and the second sampling resistor FF2 are sampling resistors for the galvanometer current. The voltage signals collected by the sampling resistors are transmitted to the inside of the MCU for calculation to obtain the sampling current, and the pulse width of the pulse width modulation signal is controlled according to the sampling current, thereby adjusting the switching time of the switching unit.

[0036] In this embodiment, the first half-bridge module 30 and the second half-bridge module 40 form a full-bridge circuit. Among them, the first switching unit 31 is the upper transistor of the first half-bridge module 30, the second switching unit 32 is the lower transistor of the first half-bridge module 30, the third switching unit 41 is the upper transistor of the second half-bridge module 40, and the fourth switching unit 42 is the lower transistor of the second half-bridge module 40. During the process of driving the galvanometer unit 50, the upper transistor of the first half-bridge module 30 and the lower transistor of the second half-bridge module 40 cooperate to drive the galvanometer unit 50 to deflect in the first direction, and the lower transistor of the first half-bridge module 30 and the upper transistor of the second half-bridge module 40 cooperate to drive the galvanometer unit 50 to deflect in the second direction.

[0037] In some specific examples, the first switching unit 31, the second switching unit 32, the third switching unit 41, and the fourth switching unit 42 each adopt an N-type MOS transistor. Among them, the first end of each switching unit is the drain (D), the second end is the source (S), and the third end is the gate (G). The model of each N-type MOS transistor can be selected according to the actual situation.

[0038] In some embodiments, the first half-bridge module 30 further includes a resistor R5. The first end of the resistor R5 is connected to the first control signal AIN+. The second end of the resistor R5 is respectively connected to the first end of the first sampling resistor FF1 and the second end of the second switch unit 32. The second half-bridge module 40 further includes a resistor R6. The first end of the resistor R6 is connected to the second control signal BIN+. The second end of the resistor R6 is respectively connected to the first end of the second sampling resistor FF2 and the second end of the fourth switch unit 42.

[0039] Wherein, the first control signal AIN+ and the second control signal BIN+ are generated by the MCU control unit and are used for closed-loop control of the entire circuit.

[0040] In some embodiments, the first driving module 10 includes a first driving chip U1. The first driving chip U1 includes a first power input terminal VDD1, a first high-side driving power terminal HB1, a first high-side driving output terminal HO1, a first high-side driving voltage bias terminal HS1, a first low-side driving output terminal LO1, a first ground terminal VSS1, a first low-side driving input terminal LI1, and a first high-side driving input terminal HI1, wherein:

[0041] The first power input terminal VDD1 is connected to a power supply (not shown in the figure) for receiving the supply voltage VCC provided by the power supply. The first high-side driving power terminal HB1 is respectively connected to the first end of the first switch unit 31 and the second end of the second switch unit 32. The first high-side driving output terminal HO1 is connected to the third end of the second switch unit 32 through a second current-limiting resistor R2. The first high-side driving voltage bias terminal HS1 is respectively connected to the galvanometer unit 50, the first end of the first switch unit 31, and the second end of the second switch unit 32. The first low-side driving output terminal LO1 is connected to the third end of the first switch unit 31 through a first current-limiting resistor R1. The first ground terminal VSS1 is grounded. The first low-side driving input terminal LI1 is connected to the first pulse generating unit for receiving the low-level signal of the first pulse width modulation signal PWMA. The first high-side driving input terminal HI1 is connected to the first pulse generating unit for receiving the high-level signal of the first pulse width modulation signal PWMA.

[0042] In some embodiments, the second driving module 20 includes a second driving chip U2. The second driving chip U2 includes a second power input terminal VDD2, a second high-side driving power terminal HB2, a second high-side driving output terminal HO2, a second high-side driving voltage bias terminal HS2, a second low-side driving output terminal LO2, a second ground terminal VSS2, a second low-side driving input terminal LI2, and a second high-side driving input terminal HI2, wherein:

[0043] The second power input terminal VDD2 is connected to a power supply for receiving the supply voltage VCC provided by the power supply; the second high-side drive power terminal HB2 is respectively connected to the first end of the third switch unit 41 and the second end of the fourth switch unit 42; the second high-side drive output terminal HO2 is connected to the third end of the fourth switch unit 42 through the fourth current-limiting resistor R4; the second high-side drive voltage bias terminal HS2 is respectively connected to the galvanometer unit 50, the first end of the third switch unit 41, and the second end of the fourth switch unit 42; the second low-side drive output terminal LO2 is connected to the third end of the third switch unit through the third current-limiting resistor; the second ground terminal VSS2 is grounded; the second low-side drive input terminal LI2 is connected to the second pulse generation unit for receiving the low-level signal of the second pulse width modulation signal PWMB; the second high-side drive input terminal HI2 is connected to the second pulse generation unit for receiving the high-level signal of the second pulse width modulation signal PWMB.

[0044] In some embodiments, the inverter control galvanometer drive circuit further includes a first capacitor C1 and a second capacitor C2, where:

[0045] The first end of the first capacitor C1 is connected to the first drive module 10, and the second end of the first capacitor C1 is grounded for filtering the supply voltage VCC of the power supply.

[0046] The first end of the second capacitor C2 is connected to the second drive module 20, and the second end of the second capacitor C2 is grounded for filtering the supply voltage VCC of the power supply.

[0047] Specifically, the first end of the first capacitor C1 is respectively connected to the first power input terminal VDD1 of the first drive chip U1 and the supply voltage VCC; the first end of the second capacitor C2 is respectively connected to the first power input terminal VDD2 of the second drive chip U2 and the supply voltage VCC. The supply voltage VCC provides stable supply voltages for the drive chips U1 and U2 through the first capacitor C1 and the second capacitor C2 respectively.

[0048] In some embodiments, the galvanometer unit 50 includes a galvanometer H2, a first inductor L1, a second inductor L2, a third capacitor C3, and a fourth capacitor C4;

[0049] The open connection points of the first interface and the second interface of the galvanometer H2 are respectively connected to the first end of the first inductor L1, the first end of the third capacitor C3, the first end of the second inductor L2, and the first end of the fourth capacitor C4; the second end of the first inductor L1 is respectively connected to the first drive module 10 and the first half-bridge module 30; the second end of the second inductor L2 is respectively connected to the second drive module 20 and the second half-bridge module 40; the second ends of the third capacitor C3 and the fourth capacitor C4 are respectively grounded.

[0050] Specifically, the second end of the first inductor L1 is respectively connected to the first high-side drive power supply terminal HB1 of the first drive chip U1, the first high-side drive voltage bias terminal HS1, the second end of the first switch unit 31, and the first end of the second switch unit 32; the second end of the second inductor L2 is respectively connected to the second high-side drive power supply terminal HB2 of the second drive chip U2, the second high-side drive voltage bias terminal HS2, the second end of the third switch unit 41, and the first end of the fourth switch unit 42.

[0051] Among them, the first inductor L1, the second inductor L2, the third capacitor C3, and the fourth capacitor C4 form a galvanometer LC filter for filtering ripple voltage and current. Specifically, the first inductor L1 and the second inductor L2 are filter inductors for suppressing the ripple current generated during the switching process; the third capacitor C3 and the fourth capacitor C4 are filter capacitors for filtering the ripple voltage generated during the switching process.

[0052] In some embodiments, the inverter control galvanometer drive circuit further includes a first energy storage unit and a second energy storage unit. Among them, the first energy storage unit is respectively connected to the first drive module 10 and the galvanometer unit 50, and the second energy storage unit is respectively connected to the second drive module 20 and the galvanometer unit 50. The first energy storage unit and the second energy storage unit are respectively used to provide a high transient current for the galvanometer unit 50.

[0053] In this embodiment, the first energy storage unit is the fifth capacitor C5, and the second energy storage unit is the sixth capacitor C6, that is, the inverter control galvanometer drive circuit further includes the fifth capacitor C5 and the sixth capacitor C6;

[0054] The first end of the fifth capacitor C5 is connected to the first drive module 10, and the second end of the fifth capacitor C5 is respectively connected to the first half-bridge module 30 and the second end of the first inductor L1; the first end of the sixth capacitor C6 is connected to the second drive module 20, and the second end of the sixth capacitor C6 is respectively connected to the second half-bridge module 40 and the second end of the second inductor L2.

[0055] Specifically, the first end of the fifth capacitor C5 is connected to the first high-side drive power supply terminal HB1 of the first drive chip U1, and the second end of the fifth capacitor C5 is respectively connected to the second end of the first switch unit 31, the first end of the second switch unit 32, and the second end of the first inductor L1; the first end of the sixth capacitor C6 is connected to the second high-side drive power supply terminal HB2 of the second drive chip U2, and the second end of the sixth capacitor C6 is respectively connected to the second end of the third switch unit 41, the first end of the fourth switch unit 42, and the second end of the second inductor L2.

[0056] Among them, the fifth capacitor C5 and the sixth capacitor C6 are used as proximal capacitors for energy storage and providing a high transient current for the galvanometer H2 to improve the response speed of the galvanometer.

[0057] In some embodiments, the inverter control galvanometer drive circuit further includes a seventh capacitor C7. The first end of the seventh capacitor C7 is connected to the common connection point of the first half-bridge module 30, the second half-bridge module 40, and the bus voltage PVDD. The second end of the seventh capacitor C7 is grounded and is used to filter out the interference signals of the bus voltage PVDD.

[0058] The present application also provides a control drive system, which includes the inverter control galvanometer drive circuit as described above.

[0059] Compared with the current solution that uses linear devices for power boosting, the main advantages of the control drive system of the present application are that the efficiency is increased from the original 60% to over 90%. It solves the problem of large heat generation caused by the use of linear devices. In addition, it also solves the problem that the speed, precision, and bandwidth of laser marking and cutting cannot be compatible at the same time.

[0060] Obviously, the embodiments described above are only a part of the embodiments of the present application, rather than all of them. The accompanying drawings show the preferred embodiments of the present application, but do not limit the patent scope of the present application. The present application can be implemented in many different forms. On the contrary, the purpose of providing these embodiments is to make the understanding of the disclosure of the present application more thorough and comprehensive. Although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing specific embodiments, or perform equivalent replacements for some of the technical features. Any equivalent structure directly or indirectly using the content of the specification and drawings of the present application in other related technical fields is similarly within the scope of the patent protection of the present application.

Claims

1. An inverter controlled galvanometer drive circuit, characterized in that: include: A first driving module, a second driving module, a first half-bridge module, a second half-bridge module and a galvanometer unit, wherein: The first driving module is connected to the first half-bridge module, and is used to receive a first pulse width modulation signal sent by a pulse generating unit, and convert the first pulse width modulation signal into a first driving voltage to drive the first half-bridge module; The second driving module is connected to the second half-bridge module, and is used to receive the second pulse width modulation signal sent by the pulse generating unit, and convert the second pulse width modulation signal into a second driving voltage to drive the second half-bridge module; The first half-bridge module and the second half-bridge module are connected to the bus voltage and are respectively connected to the galvanometer unit for jointly driving the galvanometer unit.

2. The inverter control galvanometer drive circuit according to claim 1, characterized in that: The first half-bridge module comprises a first switch unit and a second switch unit, wherein: A first end of the first switch unit is connected to the bus voltage, a second end of the first switch unit is connected to the first drive module and the first end of the second switch unit respectively, and a third end of the first switch unit is connected to the first drive module through a first current limiting resistor; The first end of the second switch unit is also connected to the first driving module, the second end of the second switch unit is connected to the first control signal, and the third end of the second switch unit is connected to the first driving module through a second current limiting resistor; and / or, The first half-bridge module further includes a first sampling resistor, a first end of the first sampling resistor is connected to a second end of the second switch unit, and a second end of the first sampling resistor is grounded.

3. The inverter control galvanometer drive circuit according to claim 1, characterized in that: The second half-bridge module includes a third switch unit and a fourth switch unit, wherein: The first end of the third switch unit is connected to the bus voltage, the second end of the third switch unit is connected to the second drive module and the first end of the fourth switch unit respectively, and the third end of the third switch unit is connected to the second drive module through a third current limiting resistor; The first end of the fourth switch unit is also connected to the second driving module, the second end of the fourth switch unit is connected to the second control signal, and the third end of the fourth switch unit is connected to the second driving module through a fourth current limiting resistor; and / or, The second half-bridge module further includes a second sampling resistor, a first end of the second sampling resistor is connected to the second end of the fourth switch unit, and a second end of the second sampling resistor is grounded.

4. The inverter control galvanometer drive circuit according to claim 2, characterized in that: The first driving module includes a first driving chip, the first driving chip includes a first power input terminal, a first high-side driving power terminal, a first high-side driving output terminal, a first high-side driving voltage bias terminal, a first low-side driving output terminal, a first ground terminal, a first low-side driving input terminal and a first high-side driving input terminal, wherein: The first power input terminal is connected to the power supply and is used to receive the power supply voltage provided by the power supply; the first high-side drive power terminal is respectively connected to the first end of the first switch unit and the second end of the second switch unit; the first high-side drive output terminal is connected to the third end of the second switch unit through the second current limiting resistor; the first high-side drive voltage bias terminal is respectively connected to the galvanometer unit, the first end of the first switch unit and the second end of the second switch unit; the first low-side drive output terminal is connected to the third end of the first switch unit through the first current limiting resistor; the first ground terminal is grounded; the first low-side drive input terminal is connected to the first pulse generating unit and is used to receive the low-level signal of the first pulse width modulation signal; the first high-side drive input terminal is connected to the first pulse generating unit and is used to receive the high-level signal of the first pulse width modulation signal.

5. The inverter control galvanometer drive circuit according to claim 3, characterized in that: The second driving module includes a second driving chip, and the second driving chip includes a second power input terminal, a second high-side driving power terminal, a second high-side driving output terminal, a second high-side driving voltage bias terminal, a second low-side driving output terminal, a second ground terminal, a second low-side driving input terminal and a second high-side driving input terminal, wherein: The second power input terminal is connected to the power supply and is used to receive the power supply voltage provided by the power supply; the second high-side drive power supply terminal is respectively connected to the first end of the third switch unit and the second end of the fourth switch unit; the second high-side drive output terminal is connected to the third end of the fourth switch unit through the fourth current limiting resistor; the second high-side drive voltage bias terminal is respectively connected to the galvanometer unit, the first end of the third switch unit and the second end of the fourth switch unit; the second low-side drive output terminal is connected to the third end of the third switch unit through the third current limiting resistor; the second ground terminal is grounded; the second low-side drive input terminal is connected to the second pulse generating unit and is used to receive the low-level signal of the second pulse width modulation signal; the second high-side drive input terminal is connected to the second pulse generating unit and is used to receive the high-level signal of the second pulse width modulation signal.

6. The inverter control galvanometer drive circuit according to any one of claims 1 to 5, characterized in that: The inverter control galvanometer driving circuit further includes a first capacitor and a second capacitor, wherein: A first end of the first capacitor is connected to the first driving module, and a second end of the first capacitor is grounded, and is used to filter the power supply voltage of the power supply; A first end of the second capacitor is connected to the second driving module, and a second end of the second capacitor is grounded, and is used to filter the power supply voltage of the power supply.

7. The inverter control galvanometer drive circuit according to claim 6, characterized in that: The galvanometer unit includes a galvanometer, a first inductor, a second inductor, a third capacitor and a fourth capacitor; The public connection points of the first interface and the second interface of the galvanometer are respectively connected to the first end of the first inductor, the first end of the third capacitor, the first end of the second inductor and the first end of the fourth capacitor; the second end of the first inductor is respectively connected to the first driving module and the first half-bridge module; the second end of the second inductor is respectively connected to the second driving module and the second half-bridge module; the second ends of the third capacitor and the fourth capacitor are respectively grounded.

8. The inverter control galvanometer drive circuit according to claim 7, characterized in that: The inverter control galvanometer driving circuit also includes a fifth capacitor and a sixth capacitor; A first end of the fifth capacitor is connected to the first driving module, and a second end of the fifth capacitor is connected to the first half-bridge module and the second end of the first inductor respectively; A first end of the sixth capacitor is connected to the second driving module, and a second end of the sixth capacitor is connected to the second half-bridge module and the second end of the second inductor respectively.

9. The inverter control galvanometer drive circuit according to claim 1, characterized in that: The inverter-controlled galvanometer drive circuit also includes a seventh capacitor, a first end of the seventh capacitor is connected to a common connection point of the first half-bridge module, the second half-bridge module and the bus voltage, and a second end of the seventh capacitor is grounded for filtering out interference signals of the bus voltage.

10. A control drive system, characterized in that: The control drive system includes the inverter control galvanometer drive circuit according to any one of claims 1 to 9.

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