Piezoelectric ceramic piece embedded ultrasonic cutting acoustic system

Abstract

The invention relates to the technical field of ultrasonic cutting, in particular to a piezoelectric ceramic piece embedded ultrasonic cutting acoustic system which comprises a cutter, a piezoelectric ceramic piece and an electroplated diamond layer, the section of the cutter is conical, the change trend of the cutter is gradually reduced in the first direction, the piezoelectric ceramic piece is embedded into the cutter, and the electroplated diamond layer is arranged on the piezoelectric ceramic piece. And the electroplated diamond layer is positioned on the peripheral surface of the cutter. The piezoelectric ceramic piece is embedded into the tool and integrally formed with the tool, during ultrasonic cutting, the ultrasonic transmission path can be shortened, ultrasonic energy loss can be reduced, the overhanging length of the tool is small, deflection caused by bending deformation of the tool is small, the bounce amount of the tool is low, the ultrasonic cutting efficiency and the machining quality of a workpiece can be improved, and meanwhile the machining efficiency of the workpiece is improved. Components needed by the whole ultrasonic cutting acoustic system can be reduced, the size of the ultrasonic cutting acoustic system is reduced, and fault repair processing of the ultrasonic cutting acoustic system is facilitated.

Description

Technical Field

[0001] The present invention relates to the technical field of ultrasonic cutting, and in particular to a piezoelectric ceramic sheet embedded ultrasonic cutting acoustic system. Background Art

[0002] Ultrasonic cutting refers to a processing method in which ultrasonic vibration is applied in the radial direction of a tool (such as a scribing tool) to perform pulsed cutting on a workpiece (such as a wafer). Because of its advantages such as small cutting force, low cutting temperature, good processing quality, and high processing efficiency, it is widely used in fields such as aerospace, electronics, and photovoltaic. The ultrasonic cutting acoustic system includes: a piezoelectric ceramic sheet, a tool, and a diamond electroplated layer. The piezoelectric ceramic sheet converts the ultrasonic frequency electrical oscillation signal generated by an ultrasonic generator into ultrasonic frequency mechanical vibration. The tool can amplify the ultrasonic frequency mechanical vibration generated by the piezoelectric ceramic sheet and transmit it to the diamond electroplated layer, so that the diamond electroplated layer generates radial vibration, and the diamond electroplated layer performs pulsed cutting on the workpiece.

[0003] Currently, components such as piezoelectric ceramic sheets, horn, and tools are assembled to form an ultrasonic cutting acoustic system. Such a design has the following disadvantages: 1. During ultrasonic cutting, the tool will generate strong ultrasonic frequency bending vibration and generate large stress, which inhibits the radial vibration and ultimately limits the amplitude of the radial vibration; 2. The ultrasonic cutting acoustic system formed by assembly has a large volume and many components. If a failure occurs, the repair time is long and the replacement is inconvenient; In summary, it will affect the ultrasonic cutting efficiency and processing quality of the workpiece. Summary of the Invention

[0004] The applicant of the present invention aims at the above-mentioned disadvantages in the existing production technology, and provides a piezoelectric ceramic sheet embedded ultrasonic cutting acoustic system. Through the improvement of the structure of the ultrasonic cutting acoustic system, the piezoelectric ceramic sheet and the tool are integrally formed, which can increase the amplitude of the radial vibration of the tool and reduce the volume of the entire ultrasonic cutting acoustic system, so as to improve the ultrasonic cutting efficiency and processing quality of the workpiece.

[0005] The technical solution adopted by the present invention is as follows: A piezoelectric ceramic sheet embedded ultrasonic cutting acoustic system, comprising: a tool, a piezoelectric ceramic sheet and a electroplated diamond layer. The cross-sectional shape of the tool is conical, and the variation trend of the tool gradually decreases along the first direction. The piezoelectric ceramic sheet is embedded into the tool and integrally formed with the tool. The electroplated diamond layer is located on the outer peripheral surface of the tool and on the side of the tool away from the piezoelectric ceramic sheet. The piezoelectric ceramic sheet is used to convert the ultrasonic frequency signal generated by the ultrasonic generator into ultrasonic frequency mechanical vibration. The tool is used to amplify and transmit the ultrasonic frequency mechanical vibration generated by the piezoelectric ceramic sheet to the electroplated diamond layer, so that the electroplated diamond layer generates radial vibration. The electroplated diamond layer is used to perform high-intensity and pulsed cutting on the workpiece.

[0006] Thus, the piezoelectric ceramic sheet is embedded into the tool and integrally formed with the tool. Compared with the existing assembly and forming method, this method has a simple structure and is easy to operate. During ultrasonic cutting, it can shorten the ultrasonic transmission path, reduce the loss of ultrasonic energy, has a small tool overhang length, a small deflection caused by tool bending deformation, and a low tool runout, which can improve the ultrasonic cutting efficiency and processing quality of the workpiece. At the same time, the conical tool enables the tool to have the sound amplification function of a horn, thereby reducing the components required for the entire ultrasonic cutting acoustic system and reducing the volume of the ultrasonic cutting acoustic system, which is convenient for the fault repair of the ultrasonic cutting acoustic system. In addition, the electroplated diamond layer is installed on the side of the tool away from the piezoelectric ceramic sheet. During ultrasonic cutting, it can ensure that the electroplated diamond layer directly acts on the workpiece and avoid the tool interfering with the processing of the workpiece.

[0007] Further, the tool is provided with an installation groove. The piezoelectric ceramic sheet is located in the installation groove. The piezoelectric ceramic sheet is in interference fit with the side of the installation groove close to the electroplated diamond layer, and the piezoelectric ceramic sheet is in clearance fit with the side of the installation groove away from the electroplated diamond layer. Thus, the purpose of the interference fit: it can ensure that the piezoelectric ceramic sheet is integrally formed with the tool, and the piezoelectric ceramic sheet will not fall off the tool. At the same time, it can ensure that the ultrasonic energy is efficiently transmitted (i.e., reduce the loss of ultrasonic energy) from the piezoelectric ceramic sheet to the tool and the electroplated diamond coating. In addition, the interference fit can also improve the structural strength of the entire ultrasonic cutting acoustic system, enable the tool to have the function of a sound amplifier, and have good rigidity. The influence of the cutting load on the resonance frequency of the ultrasonic cutting acoustic system is small, and the stability is high. The purpose of the clearance fit: ensure that the side of the piezoelectric ceramic sheet away from the installation groove (i.e., the outer peripheral surface of the installation part) does not contact to achieve the ultrasonic vibration mode.

[0008] Furthermore, the height between the end face of the piezoelectric ceramic sheet close to the machine tool and the end face of the tool close to the machine tool and away from the electroplated diamond layer is H1, and the height between the end face of the piezoelectric ceramic sheet close to the machine tool and the end face of the tool close to the machine tool and close to the electroplated diamond layer is H2; H1 > H2. Thus, the purpose of H1 is: on the one hand, to ensure that the piezoelectric ceramic sheet does not come into contact with the spindle to avoid short - circuiting of the entire ultrasonic cutting acoustic system; on the other hand, the installation position of the tool and the spindle bears a large pressure, and if they come into contact, it will cause the pressure ceramic sheet to break, thereby increasing the service life of the piezoelectric ceramic sheet. The purpose of H2 is: to provide a certain accommodation space for the piezoelectric ceramic sheet to install the insulating diaphragm, so as to avoid electric shock when workers touch the piezoelectric ceramic sheet during ultrasonic cutting, thereby improving the safety performance of the entire ultrasonic cutting acoustic system.

[0009] Furthermore, the tool is provided with a plurality of through - holes along the axial direction, and the plurality of through - holes are distributed in an equally - spaced annular pattern. The cross - sectional shape of the through - hole is conical, and the change trend of the through - hole gradually decreases along the first direction. Thus, by designing the tool with through - holes, the tool has the function of a sound amplifier (i.e., the function of a horn), which can amplify the output amplitude of the piezoelectric ceramic sheet and then transmit it to the tool (that is, there is no need to design an additional horn, shortening the ultrasonic transmission path and reducing the components required for the entire ultrasonic cutting acoustic system). In addition, it can also reduce the weight of the entire tool, thereby reducing the weight of the entire ultrasonic cutting acoustic system and reducing the energy consumption required for the entire ultrasonic cutting.

[0010] Furthermore, a plurality of blind holes are provided on the outer peripheral surface of the tool along the radial direction. The blind holes are provided on the outer peripheral surface of the tool, and the plurality of blind holes are distributed in an equally - spaced annular pattern. The cross - sectional shape of the blind hole is cylindrical. Thus, by designing the tool with through - holes, the stress generated by the radial vibration of the tool can be reduced, preventing the tool from breaking and increasing the service life of the tool.

[0011] Furthermore, the diameter of the end face of the tool close to the piezoelectric ceramic sheet is d1, the diameter of the end face of the tool away from the piezoelectric ceramic sheet is d2, the thickness of the tool is H, and the inclination angle of the outer peripheral surface of the tool is α; The calculation formula for the inclination angle α of the outer peripheral surface of the tool is: 。

[0012] Furthermore, the inner diameter of the piezoelectric ceramic sheet is d3, the inner diameter of the installation groove is d4, and the gap between the tool and the piezoelectric ceramic sheet is D; The calculation formula for the gap D between the tool and the piezoelectric ceramic sheet is: 。

[0013] Furthermore, when the inclination angle of the outer peripheral surface of the tool is α = 90°, the resonant frequency of the ultrasonic cutting acoustic system is expressed as:

[0014] The function is calculated as: The function is calculated as:

[0015] The function is calculated as:

[0016] The function is calculated as: The function is calculated as:

[0017] The function is calculated as:

[0018] is the first-kind Bessel function of the first order, is the second-kind Bessel function of the first order, represents the distance from any point of the piezoelectric ceramic sheet to the axis line of the piezoelectric ceramic sheet, , is the mechanical impedance of the tool, is the mechanical impedance of the piezoelectric ceramic sheet, is the Poisson's ratio of the piezoelectric ceramic sheet, represents the radial vibration wave number of the piezoelectric ceramic sheet; The radial vibration wave number of the tool is calculated as:

[0019] represents the circular frequency of the tool, represents the elastic modulus of the tool, represents the mass density of the tool, represents the Poisson's ratio of the tool.

[0020] Further, it further includes: a main shaft, one end of the main shaft penetrates through the tool and is connected to the tool, and the other end of the main shaft is installed on a machine tool; the radius of the main shaft is R3, and R2 > R3. Thus, the purpose that the tool radius R2 is greater than the main shaft radius R3 is to ensure that during the workpiece machining process, the main shaft does not interfere with the tool for machining the workpiece.

[0021] Further, it further includes: a wireless transmission part and an electrode plate. The wireless transmission part and the electrode plate are both sleeved on the main shaft, and the electrode plate is located between the piezoelectric ceramic sheet and the wireless transmission part. The piezoelectric ceramic sheet and the ultrasonic generator are electrically connected through the wireless transmission part and the electrode plate.

[0022] The beneficial effects of the present invention are as follows: The piezoelectric ceramic sheet is embedded in the tool and integrally formed with the tool. Compared with the existing assembled forming method, this method has a simple structure and is easy to operate. During ultrasonic cutting, it can shorten the ultrasonic transmission path and reduce the loss of ultrasonic energy. The tool overhang length is small, the deflection caused by the bending deformation of the tool is small, and the tool runout is low, which can improve the ultrasonic cutting efficiency and machining quality of the workpiece. At the same time, the conical tool enables the tool to have the sound amplification function of a horn, thereby reducing the components required for the entire ultrasonic cutting acoustic system and reducing the volume of the ultrasonic cutting acoustic system, facilitating the fault repair of the ultrasonic cutting acoustic system; in addition, the electroplated diamond layer is installed on the side of the tool away from the piezoelectric ceramic sheet, and during ultrasonic cutting, it can ensure that the electroplated diamond layer directly acts on the workpiece, avoiding the tool interfering with the machining of the workpiece.

[0023] The present invention also has the following advantages: 1. The purpose of the interference fit of the present invention: It can ensure that the piezoelectric ceramic sheet and the tool are integrally formed, and the piezoelectric ceramic sheet will not fall off the tool. At the same time, it can ensure that ultrasonic energy is efficiently transmitted (that is, the loss of ultrasonic energy can be reduced) from the piezoelectric ceramic sheet to the tool and the electroplated diamond coating; the purpose of the clearance fit: To ensure that the side of the piezoelectric ceramic sheet away from the installation groove (i.e., the outer peripheral surface of the installation part) does not contact, so as to realize the ultrasonic vibration mode.

[0024] 2. The purpose of H1 in the present invention is: On the one hand, to ensure that the piezoelectric ceramic sheet does not contact the main shaft to avoid short - circuit of the entire ultrasonic cutting acoustic system. On the other hand, the pressure borne by the installation position of the tool and the main shaft is relatively large. If they contact, it will cause the pressure ceramic sheet to break, so as to improve the service life of the piezoelectric ceramic sheet; the purpose of H2 is: To enable the piezoelectric ceramic sheet to have a certain accommodation space to install an insulating diaphragm to avoid electric shock when workers touch the piezoelectric ceramic sheet during ultrasonic cutting, thereby providing the safety performance of the entire ultrasonic cutting acoustic system.

[0025] 3. In the present invention, through the design method of providing through holes on the tool, the tool is enabled to have the function of a sound amplifier (i.e., the function of a horn), which can amplify the output amplitude of the piezoelectric ceramic sheet and transmit it to the tool (that is, there is no need to design an additional horn, shortening the ultrasonic transmission path and reducing the components required for the entire ultrasonic cutting acoustic system). In addition, it can also reduce the weight of the entire tool, thereby reducing the weight of the entire ultrasonic cutting acoustic system and reducing the energy consumption required for the entire ultrasonic cutting. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 is a schematic structural diagram of the piezoelectric ceramic sheet embedded ultrasonic cutting acoustic system of the present invention; Figure 2 is an installation effect diagram of the piezoelectric ceramic sheet embedded ultrasonic cutting acoustic system of the present invention; Figure 3 is a schematic structural diagram of the installation of the tool, piezoelectric ceramic sheet and electroplated diamond layer of the present invention; Figure 4 is a cross-sectional view of the installation of the tool, piezoelectric ceramic sheet and electroplated diamond layer of the present invention; Figure 5 For the present invention Figure 4 is a partially enlarged schematic diagram of the local structure at A in; Figure 6 For the present invention Figure 4 is a partially enlarged schematic diagram of the local structure at B in; Figure 7 is a cross-sectional view of the piezoelectric ceramic sheet of the present invention.

[0027] Wherein: 1. Tool; 101. Installation groove; 102. Through hole; 103. Blind hole; 2. Piezoelectric ceramic sheet; 3. Electroplated diamond layer; 4. Ultrasonic generator; 5. Spindle; 6. Wireless transmission part; 7. Electrode plate. DETAILED DESCRIPTION OF THE INVENTION

[0028] The following will describe the specific embodiments of the present invention with reference to the drawings.

[0029] As Figures 1 to 7As shown, it is the optimal embodiment of the present invention. The piezoelectric ceramic piece embedded ultrasonic cutting acoustic system of this embodiment includes: a tool 1, a piezoelectric ceramic piece 2 and an electroplated diamond layer 3. The cross-sectional shape of the tool 1 is conical, and the change trend of the tool 1 gradually decreases along the first direction. The piezoelectric ceramic piece 2 is embedded in the tool 1 and is integrally formed with the tool 1. The electroplated diamond layer 3 is located on the outer peripheral surface of the tool 1, and the electroplated diamond layer 3 is located on the side of the tool 1 away from the piezoelectric ceramic piece 2; the piezoelectric ceramic piece 2 is used to convert the ultrasonic frequency signal generated by the ultrasonic generator 4 into an ultrasonic frequency mechanical vibration, and the tool 1 is used to amplify the ultrasonic frequency mechanical vibration generated by the piezoelectric ceramic piece 2 and transmit it to the electroplated diamond layer 3, so that the electroplated diamond layer 3 generates radial vibration, and the electroplated diamond layer 3 is used to perform high sound intensity (i.e., large amplitude, high power) and pulse cutting on the workpiece. Thus, the piezoelectric ceramic sheet 2 is embedded in the tool 1 and is integrally formed with the tool 1. Compared with the existing assembly forming method, this method has a simple structure and is easy to operate. During ultrasonic cutting, it can shorten the ultrasonic transmission path and reduce the loss of ultrasonic energy. The tool 1 has a small overhang length, and the deflection caused by the bending deformation of the tool 1 is small. The tool 1 has a low runout, which can improve the ultrasonic cutting efficiency and processing quality of the workpiece. At the same time, the conical tool 1 enables the tool 1 to have the sound amplification function of the amplitude transformer, thereby reducing the components required for the entire ultrasonic cutting acoustic system and reducing the volume of the ultrasonic cutting acoustic system, so as to facilitate the fault repair of the ultrasonic cutting acoustic system. In addition, the electroplated diamond layer 3 is installed on the side of the tool 1 away from the piezoelectric ceramic sheet 2. During ultrasonic cutting, it can ensure that the electroplated diamond layer 3 acts directly on the workpiece to avoid the tool 1 interfering with the processing of the workpiece.

[0030] In other words, the embedded installation of the piezoelectric ceramic piece 2 into the tool 1 has overturned the traditional ultrasonic tool handle technology. On the one hand, the amplitude transformer in the traditional ultrasonic method has been eliminated, and the amplitude amplification and impedance transformation functions of the amplitude transformer have been integrated into the tool 1, so that the tool 1 has multiple functions such as amplitude amplification, impedance transformation, and a flange set at the node of the ultrasonic cutting acoustic system for easy fixation on the output end of the spindle 5. While meeting the amplitude requirements of the tool 1, the number of components of the ultrasonic cutting acoustic system is reduced, and the energy transfer path of the ultrasonic cutting acoustic system is shortened. On the other hand, the volume of the ultrasonic cutting acoustic system is greatly reduced, the energy consumption is reduced, and the production cost is significantly reduced, so that the entire piezoelectric ceramic piece embedded ultrasonic cutting acoustic system has a strong competitiveness.

[0031] It should be noted that the hardness of the electroplated diamond layer 3 is relatively large, far exceeding that of high-speed steel and alloy steel. The purpose of using the electroplated diamond layer 3 for ultrasonic cutting is to achieve high-efficiency and high-quality ultrasonic cutting of hard and brittle materials.

[0032] In this embodiment, the tool 1 is provided with a mounting groove 101. The piezoelectric ceramic sheet 2 is located in the mounting groove 101. The piezoelectric ceramic sheet 2 and the side surface of the mounting groove 101 close to the electroplated diamond layer 3 are in interference fit, and the piezoelectric ceramic sheet 2 and the side surface of the mounting groove 101 away from the electroplated diamond layer 3 are in clearance fit. Thus, the purpose of the interference fit is as follows: it can ensure that the piezoelectric ceramic sheet 2 and the tool 1 are integrally formed, and the piezoelectric ceramic sheet 2 will not fall off from the tool 1. At the same time, it can ensure that ultrasonic energy is efficiently transferred (i.e., reduce the loss of ultrasonic energy) from the piezoelectric ceramic sheet 2 to the tool 1 and the electroplated diamond coating. In addition, the interference fit can also improve the structural strength of the entire ultrasonic cutting acoustic system, enable the tool 1 to have the function of a sound amplifier, and have good rigidity. The influence of the cutting load on the resonant frequency of the ultrasonic cutting acoustic system is small, and the stability is high. The purpose of the clearance fit is to ensure that the side surface of the piezoelectric ceramic sheet 2 away from the mounting groove 101 (i.e., the outer peripheral surface of the mounting part) does not contact, so as to realize the ultrasonic vibration mode.

[0033] In this embodiment, the height between the end face of the piezoelectric ceramic sheet 2 close to the machine tool and the end face of the tool 1 close to the machine tool and away from the electroplated diamond layer 3 is H1, and the height between the end face of the piezoelectric ceramic sheet 2 close to the machine tool and the end face of the tool 1 close to the machine tool and close to the electroplated diamond layer 3 is H2; H1 > H2. Thus, the purpose of H1 is as follows: on the one hand, it ensures that the piezoelectric ceramic sheet 2 does not contact the spindle 5 to avoid short circuit of the entire ultrasonic cutting acoustic system. On the other hand, the pressure borne by the installation position of the tool 1 and the spindle 5 is relatively large. If they contact, it will cause the pressure ceramic sheet to break, so as to improve the service life of the piezoelectric ceramic sheet 2. The purpose of H2 is to provide a certain accommodation space for the piezoelectric ceramic sheet 2 to install the insulating diaphragm, so as to avoid electric shock when workers touch the piezoelectric ceramic sheet 2 during the ultrasonic cutting process, thereby providing the safety performance for the use of the entire ultrasonic cutting acoustic system.

[0034] In this embodiment, the tool 1 is provided with a plurality of through holes 102 along the axial direction. The plurality of through holes 102 are distributed in an equidistant annular shape. The cross-sectional shape of the through hole 102 is conical, and the change trend of the through hole 102 gradually decreases along the first direction. Thus, the purpose of H1 is as follows: on the one hand, it ensures that the piezoelectric ceramic sheet 2 does not contact the spindle 5 to avoid short circuit of the entire ultrasonic cutting acoustic system. On the other hand, the pressure borne by the installation position of the tool 1 and the spindle 5 is relatively large. If they contact, it will cause the pressure ceramic sheet to break, so as to improve the service life of the piezoelectric ceramic sheet 2. The purpose of H2 is to provide a certain accommodation space for the piezoelectric ceramic sheet 2 to install the insulating diaphragm, so as to avoid electric shock when workers touch the piezoelectric ceramic sheet 2 during the ultrasonic cutting process, thereby providing the safety performance for the use of the entire ultrasonic cutting acoustic system.

[0035] In this embodiment, a plurality of blind holes 103 are formed in the outer peripheral surface of the tool 1 along the radial direction. The blind holes 103 are formed in the outer peripheral surface of the tool 1, and the plurality of blind holes 103 are distributed in an equidistant annular shape. The cross-sectional shape of the blind holes 103 is cylindrical. Thus, by the design method of providing through holes 102 in the tool 1, the stress generated by the radial vibration of the tool 1 can be reduced, the fracture of the tool 1 can be prevented, and the service life of the tool 1 can be improved.

[0036] Specifically, the blind holes 103 are not communicated with the mounting grooves 101.

[0037] It should be noted that: the conical tool 1, the conical through hole 102, the cylindrical blind hole 103, and the interference fit manner between the piezoelectric ceramic sheet 2 and the tool 1 can achieve a large magnification of the amplitude of the entire ultrasonic cutting acoustic system, and the amplitude can reach , for brittle materials, ultrasonic cutting with high sound intensity, large allowance, and high efficiency can be realized, and it is widely used in precision cutting of various industries and products such as semiconductor wafers, sapphires, rubies, quartz, and glass ceramics.

[0038] In this embodiment, the diameter of the end face of the tool 1 close to the piezoelectric ceramic sheet 2 is d1, the diameter of the end face of the tool 1 far from the piezoelectric ceramic sheet 2 is d2, the thickness of the tool 1 is H, and the inclination angle of the outer peripheral surface of the tool 1 is α; The calculation formula for the inclination angle α of the outer peripheral surface of the tool 1 is: .

[0039] In this embodiment, the inner diameter of the piezoelectric ceramic sheet 2 is d3, the inner diameter of the mounting groove 101 is d4, and the gap between the tool 1 and the piezoelectric ceramic sheet 2 is D; The calculation formula for the gap D between the tool 1 and the piezoelectric ceramic sheet 2 is: .

[0040] In this embodiment, when the inclination angle α of the outer peripheral surface of the tool 1 is 90°, the resonance frequency of the ultrasonic cutting acoustic system is expressed as:

[0041] The function is calculated as: The function is calculated as:

[0042] The function is calculated as:

[0043] function The calculation formula of function is:

[0044] function The calculation formula of

[0045] is the first-kind Bessel function of the first order, is the second-kind Bessel function of the first order, represents the distance from any point on the piezoelectric ceramic sheet 2 to the axis of the piezoelectric ceramic sheet 2, , is the mechanical impedance of the cutting tool 1, is the mechanical impedance of the piezoelectric ceramic sheet 2, is the Poisson's ratio of the piezoelectric ceramic sheet 2, represents the radial vibration wave number of the piezoelectric ceramic sheet 2; The radial vibration wave number of the cutting tool 1 The calculation formula of

[0046] represents the circular frequency of the cutting tool 1, represents the elastic modulus of the cutting tool 1, represents the mass density of the cutting tool 1, represents the Poisson's ratio of the cutting tool 1.

[0047] In this embodiment, it further includes: a main shaft 5. One end of the main shaft 5 penetrates through the cutting tool 1 and is connected to the cutting tool 1. The other end of the main shaft 5 is installed on the machine tool; the radius of the main shaft 5 is R3, and R2 > R3. Thus, the purpose that the radius R2 of the cutting tool 1 is greater than the radius R3 of the main shaft 5 is to ensure that during the workpiece machining process, the main shaft 5 will not interfere with the cutting tool 1 for machining the workpiece.

[0048] In this embodiment, it further includes: a wireless transmission part 6 and an electrode plate 7. The wireless transmission part 6 and the electrode plate 7 are both sleeved on the main shaft 5, and the electrode plate 7 is located between the piezoelectric ceramic sheet 2 and the wireless transmission part 6. The piezoelectric ceramic sheet 2 and the ultrasonic generator 4 are electrically connected through the wireless transmission part 6 and the electrode plate 7.

[0049] The working process of the piezoelectric ceramic sheet embedded ultrasonic cutting acoustic system of the present invention is as follows: First, the entire ultrasonic cutting acoustic system is installed on the machine tool through the main shaft 5; Finally, the ultrasonic generator 4 is started. The piezoelectric ceramic sheet 2 is used to convert the ultrasonic frequency signal generated by the ultrasonic generator 4 into ultrasonic frequency mechanical vibration. The tool 1 is used to amplify and transmit the ultrasonic frequency mechanical vibration generated by the piezoelectric ceramic sheet 2 to the electroplated diamond layer 3, so that the electroplated diamond layer 3 generates radial vibration, and the electroplated diamond layer 3 is used to perform pulsed cutting on the workpiece.

[0050] In summary, the piezoelectric ceramic sheet 2 of the present invention is embedded in the tool 1 and integrally formed with the tool 1. Compared with the existing assembly and forming method, this method has a simple structure and is easy to operate. During ultrasonic cutting, it can shorten the ultrasonic transmission path and reduce the loss of ultrasonic energy. The tool 1 has a small overhang length, a small deflection caused by bending deformation of the tool 1, and a low runout of the tool 1, which can improve the ultrasonic cutting efficiency and machining quality of the workpiece. At the same time, the conical tool 1 enables the tool 1 to have the sound amplification function of a horn, thereby reducing the components required for the entire ultrasonic cutting acoustic system and reducing the volume of the ultrasonic cutting acoustic system, which is convenient for the fault repair of the ultrasonic cutting acoustic system; In addition, the electroplated diamond layer 3 is installed on the side of the tool 1 away from the piezoelectric ceramic sheet 2. During ultrasonic cutting, it can ensure that the electroplated diamond layer 3 directly acts on the workpiece and avoid the tool 1 interfering with the machining of the workpiece.

[0051] The above description is an explanation of the present invention, not a limitation of the invention. The scope defined by the present invention is referred to the claims. Any form of modification can be made within the protection scope of the present invention.

Claims

1. A piezoelectric ceramic embedded ultrasonic cutting acoustic system, characterized in that: include: A tool (1), wherein the cross-sectional shape of the tool (1) is conical, and the change trend of the tool (1) gradually decreases along a first direction; A piezoelectric ceramic sheet (2), the piezoelectric ceramic sheet (2) being embedded in the tool (1) and formed integrally with the tool (1); An electroplated diamond layer (3), the electroplated diamond layer (3) being located on the outer peripheral surface of the tool (1), and the electroplated diamond layer (3) being located on a side of the tool (1) away from the piezoelectric ceramic sheet (2); The piezoelectric ceramic sheet (2) is used to convert the ultrasonic frequency signal generated by the ultrasonic generator (4) into ultrasonic frequency mechanical vibration. The tool (1) is used to amplify the ultrasonic frequency mechanical vibration generated by the piezoelectric ceramic sheet (2) and transmit it to the electroplated diamond layer (3), so that the electroplated diamond layer (3) generates radial vibration. The electroplated diamond layer (3) is used to perform high-intensity, pulsed cutting on a workpiece.

2. The piezoelectric ceramic embedded ultrasonic cutting acoustic system according to claim 1, characterized in that: The tool (1) is provided with a mounting groove (101), the piezoelectric ceramic piece (2) is located in the mounting groove (101), and the piezoelectric ceramic piece (2) and the side surface of the mounting groove (101) close to the electroplated diamond layer (3) are in an interference fit, and the piezoelectric ceramic piece (2) and the side surface of the mounting groove (101) away from the electroplated diamond layer (3) are in a clearance fit.

3. The piezoelectric ceramic embedded ultrasonic cutting acoustic system according to claim 1, characterized in that: The height between the end surface of the piezoelectric ceramic sheet (2) close to the machine tool side and the end surface of the tool (1) close to the machine tool side and away from the electroplated diamond layer (3) is H1, and the height between the end surface of the piezoelectric ceramic sheet (2) close to the machine tool side and the end surface of the tool (1) close to the machine tool side and close to the electroplated diamond layer (3) is H2; H1>H2.

4. The piezoelectric ceramic embedded ultrasonic cutting acoustic system according to claim 1, characterized in that: The tool (1) is provided with a plurality of through holes (102) along the axial direction, the plurality of through holes (102) are distributed in an annular shape at equal intervals, the cross-sectional shape of the through holes (102) is conical, and the variation trend of the through holes (102) gradually decreases along the first direction.

5. The piezoelectric ceramic embedded ultrasonic cutting acoustic system according to claim 1, characterized in that: The outer circumferential surface of the tool (1) is provided with a plurality of blind holes (103) along a radial direction. The blind holes (103) are provided on the outer circumferential surface of the tool (1). The plurality of blind holes (103) are distributed in a ring shape at equal intervals. The cross-sectional shape of the blind holes (103) is cylindrical.

6. The piezoelectric ceramic embedded ultrasonic cutting acoustic system according to claim 1, characterized in that: The diameter of the end surface of the tool (1) close to the piezoelectric ceramic sheet (2) is d1, the diameter of the end surface of the tool (1) away from the piezoelectric ceramic sheet (2) is d2, the thickness of the tool (1) is H, and the inclination angle of the outer peripheral surface of the tool (1) is α; The calculation formula for the inclination angle α of the outer peripheral surface of the tool (1) is: 。 7. The piezoelectric ceramic embedded ultrasonic cutting acoustic system according to claim 2, characterized in that: The inner diameter of the piezoelectric ceramic sheet (2) is d3, the inner diameter of the mounting groove (101) is d4, and the gap between the tool (1) and the piezoelectric ceramic sheet (2) is D; The calculation formula for the gap D between the tool (1) and the piezoelectric ceramic sheet (2) is: 。 8. The piezoelectric ceramic embedded ultrasonic cutting acoustic system according to claim 7, characterized in that: When the inclination angle of the outer peripheral surface of the tool (1) is α=90°, the resonant frequency of the ultrasonic cutting acoustic system The expression is: function The calculation formula is: function The calculation formula is: function The calculation formula is: function The calculation formula is: function The calculation formula is: function The calculation formula is: is a first-order Bessel function of the first kind, is a first-order second-kind Bessel function, represents the distance from any point of the piezoelectric ceramic sheet (2) to the axis center line of the piezoelectric ceramic sheet (2), , is the mechanical impedance of the tool (1), is the mechanical impedance of the piezoelectric ceramic sheet (2), is the Poisson's ratio of the piezoelectric ceramic sheet (2), Indicates the radial vibration wave number of the piezoelectric ceramic piece (2); The radial vibration wave number of the tool (1) The calculation formula is: represents the circular frequency of the tool (1), represents the elastic modulus of the tool (1), represents the mass density of the tool (1), represents the Poisson's ratio of the tool (1).

9. The piezoelectric ceramic embedded ultrasonic cutting acoustic system according to claim 8, characterized in that: Also includes: A main shaft (5), one end of the main shaft (5) passes through the tool (1) and is connected to the tool (1), and the other end of the main shaft (5) is mounted on the machine tool; The radius of the main axis (5) is R3, R2>R3.

10. The piezoelectric ceramic embedded ultrasonic cutting acoustic system according to claim 9, characterized in that: Also includes: A wireless transmission part (6) and an electrode plate (7), wherein the wireless transmission part (6) and the electrode plate (7) are both sleeved on the main shaft (5), and the electrode plate (7) is located between the piezoelectric ceramic sheet (2) and the wireless transmission part (6), and the piezoelectric ceramic sheet (2) and the ultrasonic generator (4) are electrically connected to the electrode plate (7) via the wireless transmission part (6).

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