Monocrystal resistivity control equipment for furnace cover doping
By designing a single crystal resistivity control device for furnace cover doping, the problem of difficult to achieve stroke, sealing and clamping requirements during the doping process of the master alloy rod is solved, and uniform control of the resistivity of the crystal rod is achieved.
Patent Information
- Application Number
- CN202510178317.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-18
- Publication Date
- 2025-06-13
AI Technical Summary
In the prior art, the stroke, sealing and clamping requirements required for doping of the parent alloy rod are difficult to achieve, resulting in uneven increase in the resistivity of the crystal rod.
A single crystal resistivity control device for furnace cover doping is designed. By rationally designing the master alloy rod clamping lifting mechanism, it assists in the effective control of the crystal rod resistivity in the master alloy rod doping process. The specific structure includes a furnace cover doping module, a bottom seal assembly, a top seal assembly, a seed chuck extension rod, a seed chuck assembly, a lifting carrier plate and a guide assembly to ensure stable clamping of the master alloy rod and regular drop in the silicon liquid to melt.
Through reasonable design, the stroke control and sealing guarantee during the doping process of the master alloy rod are achieved, ensuring uniform control of the resistivity of the crystal rod, and solving the problem of uneven resistivity increase in the prior art.
Smart Images
Figure CN120138795A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to a single crystal resistivity control device for lid doping, belonging to the technical field of single crystal furnaces. Background Art
[0002] In the existing single crystal growth industry, including single crystal growth in semiconductors and photovoltaics, there has always been a problem of uneven increase in the resistivity of doped crystal bars. Powdered master alloys cannot accurately control the resistivity of crystal bars. Using rod-shaped doped master alloys for doping makes it easier to control the resistivity of crystal bars. However, in the prior art, it is difficult to achieve the requirements for the travel, sealing, and clamping of the master alloy rod for doping. Summary of the Invention
[0003] The present invention provides a single crystal resistivity control device for lid doping, aiming to overcome the above-mentioned deficiencies in the prior art. By rationally designing the clamping and lifting mechanism of the master alloy rod, it helps to effectively control the resistivity of the crystal bar during the doping process of the master alloy rod.
[0004] The technical solution of the present invention: A single crystal resistivity control device for lid doping, whose structure includes a lid doping module, a bottom sealing component, a top sealing component, a seed crystal chuck extension rod, a seed crystal clamping component, a lifting carrier plate, and a guiding component. The upper part of the lid doping module is fixed on the frame above the lid. The bottom end of the lid doping module is connected to the bottom sealing component located on the lid. The mobile end of the lid doping module is connected to the top sealing component through the lifting carrier plate. There is a guiding component between the upper and lower parts of the lid doping module. The top sealing component is slidably connected to the guiding component. The top sealing component is also connected to a drag chain, and the drag chain is connected to the frame through a drag chain fixing sheet metal. The upper part of the seed crystal chuck extension rod is sealed inside the top sealing component and the bottom sealing component. The bottom end of the seed crystal chuck extension rod extends below the lid and is connected to the seed crystal clamping component. The seed crystal clamping component clamps the master alloy rod. During operation, the master alloy rod is clamped by the seed crystal clamping component and is lifted and lowered under the drive of the lid doping module. The top sealing component and the bottom sealing component ensure the sealing performance. The guiding component provides guidance. The master alloy rod regularly descends into the silicon melt and melts. By controlling the descending distance of the master alloy rod, the weight of the melted master alloy rod is further controlled to control the resistivity of the crystal bar.
[0005] Preferably, the crucible cover doping module includes a lifting side plate, a module bottom plate, and a lifting module. The top of the lifting module is connected to the frame through the lifting side plate, and the bottom end of the lifting module is connected to the bottom sealing component through the module bottom plate; the bottom sealing component includes a short bellows, a vacuum gate valve, and a connecting flange connected in sequence from top to bottom, and the connecting flange is installed on the crucible cover; the top sealing component includes a top sealing cap, a module loading plate, a lifting plate sealing member, a bellows upper flange plate, and a long bellows connected in sequence from top to bottom. The module loading plate and the bellows upper flange plate are slidably connected to the guiding component, and the bellows upper flange plate is connected to a drag chain; the guiding component includes a bellows fixing plate, a guiding shaft, a bellows spacer ring, and a lifting tube guiding sleeve. The bellows fixing plate is fixed to the top of the lifting side plate. The bottom surface of the bellows fixing plate is connected to the top ends of a pair of guiding shafts. A plurality of bellows spacer rings are connected between the lower parts of the two guiding shafts. The upper part of the seed chuck extension rod is connected to the bellows spacer ring. The top end of the seed chuck extension rod is provided with a lifting tube guiding sleeve connected to the top end of the long bellows, and the bellows spacer ring is also connected to the outer wall of the long bellows.
[0006] Preferably, the seed clamping component includes an opening pin, a sleeve, and a ball. The center of the lower end of the opening pin is provided with an opening for inserting a master alloy rod. The outside of the lower end of the opening pin is sleeved with the sleeve. A track for the ball to roll is provided between the opening pin and the sleeve. When the sleeve moves down to the position, the ball clamps the master alloy rod to fix the master alloy rod in the opening of the opening pin. When the sleeve is lifted, the ball does not contact the master alloy rod, so that the master alloy rod disengages from the opening of the opening pin.
[0007] Advantages of the present invention: The structure is reasonably designed, the travel during the doping process of the master alloy rod can be effectively controlled, a long travel can be achieved, the sealing performance of the long-travel device can be effectively guaranteed, the clamping stability of the master alloy rod can be ensured, the master alloy rod can be regularly lowered into the silicon melt and melted, and by controlling the descending distance of the master alloy rod, the weight of the melted master alloy rod can be controlled, so as to control the resistivity of the crystal bar. BRIEF DESCRIPTION OF THE DRAWINGS
[0008] Figure 1 is a schematic structural diagram of the single crystal resistivity control device for crucible cover doping of the present invention.
[0009] Figure 2 is Figure 1 a schematic structural diagram of the crucible cover doping module in
[0010] Figure 3 is Figure 1 a schematic structural diagram of the bottom sealing component in
[0011] Figure 4 is Figure 1 a schematic structural diagram of the top sealing component in
[0012] Figure 5 is Figure 1Schematic diagram of the structure of the middle seed crystal clamping assembly.
[0013] Figure 6 is Figure 5 lower sectional view of.
[0014] Figure 7 is Figure 1 Schematic diagram of the structure of the middle guiding assembly.
[0015] In the figure, 1 is the frame, 2 is the lid doping module, 21 is the lifting side plate, 22 is the module bottom plate, 23 is the lifting module, 3 is the bottom sealing assembly, 31 is the short bellows, 32 is the vacuum gate valve, 33 is the connecting flange, 4 is the top sealing assembly, 41 is the long bellows, 42 is the upper flange carrier plate of the bellows, 43 is the lifting carrier plate seal, 44 is the upper carrier plate of the module, 45 is the top sealing cap, 5 is the seed crystal chuck extension rod, 6 is the middle seed crystal clamping assembly, 61 is the split pin, 62 is the sleeve, 63 is the ball, 7 is the lifting carrier plate, 8 is the guiding assembly, 81 is the bellows fixing plate, 82 is the guiding shaft, 83 is the bellows spacer ring, 84 is the lifting tube guiding sleeve, 9 is the drag chain, 10 is the drag chain fixing sheet metal, 11 is the master alloy rod. Detailed implementation manners
[0016] The present invention will be further described in detail below in conjunction with the embodiments and the detailed implementation manners.
[0017] As Figure 1-6 shown, a single crystal resistivity control device for lid doping, its structure includes a lid doping module 2, a bottom sealing assembly 3, a top sealing assembly 4, a seed crystal chuck extension rod 5, a middle seed crystal clamping assembly 6, a lifting carrier plate 7 and a guiding assembly 8. Among them, the upper part of the lid doping module 2 is fixed on the frame 1 above the lid, the bottom end of the lid doping module 2 is connected to the bottom sealing assembly 3 located on the lid, the mobile end of the lid doping module 2 is connected to the top sealing assembly 4 through the lifting carrier plate 7, a guiding assembly 8 is arranged between the upper part and the bottom end of the lid doping module 2, the top sealing assembly 4 is slidably connected to the guiding assembly 8, the top sealing assembly 4 is also connected to the drag chain 9, the drag chain 9 is connected to the frame 1 through the drag chain fixing sheet metal 10, the upper part of the seed crystal chuck extension rod 5 is sealed in the top sealing assembly 4 and the bottom sealing assembly 3, the bottom end of the seed crystal chuck extension rod 5 extends below the lid and is connected to the middle seed crystal clamping assembly 6, and the middle seed crystal clamping assembly 6 clamps the master alloy rod 11.
[0018] During operation, the master alloy rod 11 is clamped by the middle seed crystal clamping assembly 6, driven by the seed crystal chuck extension rod 5, and lifted and lowered under the drive of the lid doping module 2. During the lifting and lowering, the top sealing assembly 4 and the bottom sealing assembly 3 ensure the sealing performance, guided by the guiding assembly 8, the master alloy rod 11 regularly descends into the silicon melt and melts, and by controlling the descending distance of the master alloy rod 11, the weight of the melted master alloy rod 11 is further controlled to control the resistivity of the crystal bar.
[0019] The lid doping module 2 includes a lifting side plate 21, a module bottom plate 22, and a lifting module 23. The top of the lifting module 23 is connected to the frame 1 through the lifting side plate 21, and the bottom end of the lifting module 23 is connected to the bottom sealing assembly 3 through the module bottom plate 22.
[0020] The bottom sealing assembly 3 includes a short bellows 31, a vacuum gate valve 32, and a connecting flange 33 connected in sequence from top to bottom. The connecting flange 33 is installed on the furnace lid.
[0021] The top sealing assembly 4 includes a top sealing cap 45, a module upper loading plate 44, a lifting loading plate seal 43, a bellows upper flange plate 42, and a long bellows 41 connected in sequence from top to bottom. The module upper loading plate 44 and the bellows upper flange plate 42 are slidably connected to the guiding assembly 8, and the bellows upper flange plate 42 is connected to a drag chain.
[0022] The seed crystal clamping assembly 6 includes a split pin 61, a sleeve 62, and a ball 63. The center of the lower end of the split pin 61 is provided with an opening for inserting the mother alloy rod 11. The lower end of the split pin 61 is sleeved with the sleeve 62, and a track for the ball 63 to roll is provided between the split pin 61 and the sleeve 62. When the sleeve 62 moves down to the position, the ball 63 clamps the mother alloy rod 11 to fix the mother alloy rod 11 in the opening of the split pin 61. When the sleeve 62 is lifted, the ball 63 does not contact the mother alloy rod 11, so that the mother alloy rod 11 is disengaged from the opening of the split pin 61.
[0023] Specifically, the inner diameter of the sleeve 62 is changed to make the ball 63 clamp between the mother alloy rod 11 and the split pin 61. The diameter of the sleeve 62 becomes smaller when it moves downwards, and the ball 63 enters the split pin 61, thereby fixing the mother alloy rod 11. When the sleeve 62 moves upwards, the ball 63 rolls out of the split pin 61, thereby taking out the mother alloy rod 11.
[0024] The guiding assembly 8 includes a bellows fixing plate 81, a guiding shaft 82, a bellows spacer 83, and a lifting tube guiding sleeve 84. The bellows fixing plate 81 is fixed to the top of the lifting side plate 21. The bottom surface of the bellows fixing plate 81 is connected to the top ends of a pair of guiding shafts 82. A plurality of bellows spacers 83 are connected between the lower parts of the two guiding shafts 82. The upper part of the seed crystal chuck extension rod 5 is connected to the bellows spacer 83. The top end of the seed crystal chuck extension rod 5 is provided with a lifting tube guiding sleeve 84 connected to the top end of the long bellows 41. The bellows spacer 83 is also connected to the outer wall of the long bellows 41.
[0025] The bottom sealing assembly 3 and the top sealing assembly 4 act together through the long bellows 41, the short bellows 31, and the vacuum gate valve 32 to seal the seed crystal chuck extension rod 5. The long bellows 41 is fixed periodically through the bellows spacer 61. While ensuring the sealing effect of the long bellows 41, it will not bend to affect the movement of the seed crystal chuck extension rod 5.
[0026] The lifting module 23 drives the seed crystal chuck extension rod 5 to move up and down through a ball screw mechanism. The seed crystal chuck extension rod 5 is guided in a linear motion through the guiding component 8. The wiring harness of the furnace lid doping module 2 is routed through the drag chain 9 to ensure that the wiring harness can move together with the vacuum gate valve 32 without affecting the movement of the furnace lid doping device.
[0027] The above-mentioned components are all prior arts, and those skilled in the art can use any models and existing designs that can achieve their corresponding functions.
[0028] The above are only the preferred embodiments of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the inventive concept of the present invention, several modifications and improvements can still be made, and these all belong to the protection scope of the present invention.
Claims
1. A single crystal resistivity control device for furnace cover doping, characterized in that: The invention comprises a furnace cover doping module (2), a bottom sealing component (3), a top sealing component (4), a seed crystal chuck extension rod (5), a seed crystal clamping component (6), a lifting carrier plate (7) and a guide component (8), wherein the upper part of the furnace cover doping module (2) is fixed on a frame (1) above the furnace cover, the bottom end of the furnace cover doping module (2) is connected to the bottom sealing component (3) located on the furnace cover, the movable end of the furnace cover doping module (2) is connected to the top sealing component (4) via the lifting carrier plate (7), and the furnace cover doping module (2) is fixed to the ... and the bottom end of the furnace cover doping module (2) is connected to the bottom sealing component (3) located on the furnace cover, and the movable end of the furnace cover doping module (2) is connected to the top sealing component (4) via the lifting carrier plate (7). A guide assembly (8) is provided between the upper part and the bottom end, the top sealing assembly (4) is slidably connected to the guide assembly (8), the top sealing assembly (4) is also connected to a drag chain (9), the drag chain (9) is connected to the frame (1) via a drag chain fixing sheet metal (10), the upper part of the seed crystal chuck extension rod (5) is sealed in the top sealing assembly (4) and the bottom sealing assembly (3), the bottom end of the seed crystal chuck extension rod (5) extends to the bottom of the furnace cover and is connected to the seed crystal clamping assembly (6), and the seed crystal clamping assembly (6) clamps the mother alloy rod (11).
2. A single crystal resistivity control device for furnace cover doping according to claim 1, characterized in that: The furnace cover doping module (2) comprises a lifting side plate (21), a module bottom plate (22) and a lifting module (23); the top of the lifting module (23) is connected to the frame (1) through the lifting side plate (21); the bottom of the lifting module (23) is connected to the bottom sealing component (3) through the module bottom plate (22); the bottom sealing component (3) comprises a short bellows (31), a vacuum plug valve (32) and a connecting flange (33) connected in sequence from top to bottom; the connecting flange (33) is mounted on the furnace cover; the top sealing component (4) comprises a top sealing cap (45), a module upper carrier plate (44), a lifting carrier plate seal (43), a bellows upper flange carrier plate (42) and a long bellows (41) connected in sequence from top to bottom; the module upper carrier plate (44) and the bellows The flange carrier plate (42) on the tube is slidably connected to the guide assembly (8), and the flange carrier plate (42) on the bellows is connected to the drag chain; the guide assembly (8) comprises a bellows fixing plate (81), a guide shaft (82), a bellows spacer ring (83) and a lifting tube guide sleeve (84); the bellows fixing plate (81) is fixed to the top of the lifting side plate (21); the bottom surface of the bellows fixing plate (81) is connected to the top of a pair of guide shafts (82); a plurality of bellows spacer rings (83) are connected between the lower parts of the two guide shafts (82); the upper part of the seed crystal chuck extension rod (5) is connected to the bellows spacer ring (83); the top of the seed crystal chuck extension rod (5) is provided with a lifting tube guide sleeve (84) connected to the top of the long bellows (41); and the bellows spacer ring (83) is also connected to the outer wall of the long bellows (41).
3. The single crystal resistivity control device for furnace cover doping according to claim 1, characterized in that: The seed crystal clamping assembly (6) comprises a cotter pin (61), a sleeve (62) and a ball (63); an opening for inserting a mother alloy rod (11) is provided at the center of the lower end of the cotter pin (61); the sleeve (62) is sleeved on the outer side of the lower end of the cotter pin (61); a track for rolling of the ball (63) is provided between the cotter pin (61) and the sleeve (62); when the sleeve (62) moves down to a position, the ball (63) clamps the mother alloy rod (11) so that the mother alloy rod (11) is fixed in the opening of the cotter pin (61); when the sleeve (62) is lifted up, the ball (63) does not contact the mother alloy rod (11) so that the mother alloy rod (11) is disengaged from the opening of the cotter pin (61).