Height and inclination adjustment device

Abstract

The present application relates to the field of precision machinery, and more specifically, to a height and tilt adjustment device, comprising a lifting module and a tilt adjustment module, wherein the lifting module comprises: a first drive mechanism; a lifting member; a base; and the tilt adjustment module comprises: a second drive mechanism; a translation member; a connecting rod; and a slide. The height and tilt adjustment device of the present application can solve the problem that the operating space available for adjusting the posture under the module of existing ultra-precision equipment is limited, and the operator is often required to lie down under the module to adjust the module posture, which is time-consuming and labor-intensive, and there is a high risk of accidents occurring to the operator during the module posture adjustment process. The device can accurately adjust the height and tilt of the precision module and avoid accidents occurring to the operator. In addition, the present application can ensure that the base and the lifting member always maintain surface contact during the tilt adjustment process, without introducing new stress.

Description

Technical Field

[0001] The present application relates to the field of precision machinery, and in particular to a height and tilt adjustment device. Background Art

[0002] The existing method for adjusting the posture of modules of ultra-precision equipment is generally to place the module on a substrate and manually adjust the height of the module's support legs on the substrate to adjust the height and inclination of the module. However, the height of the module's support legs is generally low, so the distance between the bottom surface of the module and the top surface of the substrate is small, resulting in limited operating space under the module that can be used to adjust the posture. The operator is often required to lie down under the module to adjust the module's posture. The adjustment process is time-consuming and labor-intensive, and there is a high risk of accidents occurring to the operator during the module's posture adjustment process.

[0003] Therefore, the existing technology needs to be improved and developed. Summary of the Invention

[0004] The purpose of this application is to provide a height and tilt adjustment device, which aims to solve the problem that the operating space under the module of existing ultra-precision equipment that can be used for adjusting the posture is limited, and the operator is often required to lie down under the module to adjust the module posture. The adjustment process is time-consuming and labor-intensive, and there is a high risk of accidents for the operator during the module posture adjustment process.

[0005] The present application provides a height and tilt adjustment device for adjusting the height and tilt of a precision module above a substrate, including a lifting module and a tilt adjustment module. The lifting module includes:

[0006] a first driving mechanism;

[0007] The lifting member is installed on the base plate, and its top surface is a spherical curved surface;

[0008] The base is fixedly mounted in the middle of the bottom surface of the precision module, and the bottom surface has a groove adapted to and fitted with the top surface of the lifting member. The first driving mechanism is used to drive the lifting member to move up and down to drive the base and the precision module to move up and down;

[0009] The tilt adjustment module includes:

[0010] A translation member is mounted on the base plate;

[0011] a connecting rod, one end of which is hinged to one end of the translation member;

[0012] The slide is fixedly installed on one side of the bottom surface of the precision module, with one end hinged to the other end of the connecting rod;

[0013] The second driving mechanism is used to drive the translation member to move horizontally so as to drive the slide to swing through the connecting rod to adjust the inclination angle of the precision module.

[0014] The height and inclination adjustment device proposed in this application can conveniently and precisely adjust the height and inclination of the precision module, and does not require the operator to manually adjust the mechanism at the bottom of the module, which can avoid accidents for the operator. In addition, this application can ensure that the base and the lifting member always maintain surface contact during the inclination adjustment process, and will not introduce new stress, so that the precision module can continue to have high rigidity during the inclination adjustment process, and can keep the height of the precision module unchanged during the inclination adjustment process.

[0015] Optionally, the tilt adjustment module further includes:

[0016] The first tensioning member is fixedly mounted on the precision module, and has a downwardly concave movable groove in the middle thereof, and a through hole is provided at the bottom of the movable groove, and the through hole shrinks inward from top to bottom;

[0017] The second tensioning member is arranged through the through hole and is mounted on the base plate in an adjustable height. The top of the second tensioning member is provided with a ball head end, which is used for snapping into the through hole to tighten the precision module and the base plate.

[0018] In this embodiment, the height and inclination adjustment device of the present application is provided with a first tensioning member and a second tensioning member, which can firmly tighten the precision module and the substrate so that the inclination angle of the precision module remains unchanged, and can avoid the inclination angle deviation of the precision module due to vibration or other factors, thereby improving the stability and accuracy of the posture adjustment of the precision module, and the operator can easily adjust the height of the second tensioning member without having to lie down, so the present application also has the effect of saving time and effort.

[0019] Optionally, the middle portion of the second tensioning member is columnar, and the ratio of the radius of the second tensioning member to the radius of the bottom end of the through hole is 1:1.5.

[0020] In this embodiment, the present application sets the ratio of the radius of the middle part of the second tensioning member to the radius of the through hole to 1:1.5, which can leave sufficient margin between the second tensioning member and the through hole, so that the second tensioning member can smoothly pass through the through hole when the through hole has a certain degree of inclination, and the middle part of the second tensioning member will not come into contact with the through hole, thereby ensuring that the tensioning process proceeds smoothly and no new stress is introduced, and the precision module can maintain high rigidity during the tensioning process.

[0021] Optionally, the through hole is adapted to and fits with the lower side of the ball head end when the ball head end is buckled.

[0022] Optionally, the lifting module further includes:

[0023] The first base is fixedly mounted on the base plate, and has a vertically arranged through slot in the center thereof, and the lifting member is lifted and slidably mounted in the through slot.

[0024] Optionally, the first driving mechanism includes:

[0025] Drive components;

[0026] A first driving rod is inserted into the through slot, one end of which is connected to the driving end of the driving assembly, and the other end is threadedly connected to the lifting member;

[0027] A vertical guide groove is provided on the side wall of the through groove, and a vertical first guide column is provided on the periphery of the lifting member to cooperate with the guide groove. The driving assembly is used to drive the first driving rod to rotate to drive the lifting member to lift and slide.

[0028] Optionally, the lifting module further includes:

[0029] A plurality of electric clamping members are mounted on the first base with adjustable horizontal positions and are arranged through the first base. One end of the electric clamping members contacts the lifting member in the through slot and is used to clamp the lifting member to fix it on the first base.

[0030] Optionally, a second base fixedly connected to the base plate is provided on the base plate, and the translation member is horizontally slidably mounted on the second base.

[0031] Optionally, the second driving mechanism includes:

[0032] Drive device;

[0033] A second driving rod is rotatably mounted on the second base, one end of which is connected to the driving device and the other end of which is threadedly connected to the translation member;

[0034] A horizontally arranged second guide column is installed on the second base, and a horizontally arranged guide hole is opened on the translation member. The translation member is horizontally slidably installed on the second guide column through the guide hole to be installed on the second base. The driving device is used to drive the second driving rod to rotate to drive the translation member to move horizontally.

[0035] Optionally, the inclination adjustment module includes multiple slides of the multiple inclination adjustment modules arranged on the bottom surface of the precision module in a rectangular array with the middle of the bottom surface of the precision module as the center. The second driving mechanism of the multiple inclination adjustment modules is used to drive the corresponding translation member to move horizontally when the first driving mechanism drives the lifting member to move up and down to drive the base and the precision module to move up and down, so as to drive the corresponding slide to swing relative to the connecting rod through the corresponding connecting rod, so that the corresponding slide is lifted and lowered with the precision module to keep the inclination angle of the precision module unchanged.

[0036] From the above, it can be seen that the present application provides a height and inclination adjustment device that can conveniently and accurately adjust the height and inclination of the precision module, and does not require the operator to manually adjust the mechanism at the bottom of the module, which can avoid accidents for the operator. In addition, the present application can ensure that the base and the lifting member always maintain surface contact during the inclination adjustment process, and will not introduce new stress, so that the precision module can continue to have high rigidity during the inclination adjustment process, and can keep the height of the precision module unchanged during the inclination adjustment process.

[0037] Other features and advantages of the present application will be described in the following description, and in part will become apparent from the description, or understood by practicing the present application. The purpose and other advantages of the present application can be realized and obtained by the structures particularly pointed out in the written description and the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Figure 1 A schematic structural diagram of a height and tilt adjustment device provided in an embodiment of the present application.

[0039] Figure 2 For this application Figure 1 Enlarged view of point A in the middle.

[0040] Figure 3 This is a schematic structural diagram of the lifting module provided in an embodiment of the present application.

[0041] Figure 4 This is a schematic structural diagram of the tilt adjustment module provided in an embodiment of the present application at one angle.

[0042] Figure 5 This is a structural schematic diagram of the tilt adjustment module provided in an embodiment of the present application at another angle.

[0043] Figure 6 A cross-sectional view of the tilt adjustment module provided in an embodiment of the present application.

[0044] Figure 7 A bottom view of a precision module provided in an embodiment of the present application.

[0045] Figure 8 A top view of a substrate provided in an embodiment of the present application.

[0046] Explanation of reference numerals: 10. Base plate; 20. Precision module; 1. Lifting module; 11. First driving mechanism; 111. Driving assembly; 1111. Motor; 1112. Speed ​​reduction device; 112. First driving rod; 12. Lifting member; 121. First guide column; 13. Base; 14. First base; 141. Through slot; 15. Electric clamping member; 2. Tilt adjustment module; 21. Second driving mechanism; 211. Driving device; 212. Second driving rod; 22. Translation member; 23. Connecting rod; 24. Slide; 25. First tensioning member; 251. Movable slot; 252. Through hole; 26. Second tensioning member; 27. Second base; 271. Second guide column. DETAILED DESCRIPTION

[0047] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all of the embodiments. The components of the embodiments of the present application generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the application for protection, but merely represents the selected embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without making creative work fall within the scope of protection of the present application.

[0048] It should be noted that similar reference numerals and letters represent similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings. At the same time, in the description of this application, the terms "first", "second", etc. are only used to distinguish the description and should not be understood as indicating or implying relative importance.

[0049] like Figure 1 、 Figure 2 and Figure 4 As shown, the present application provides a height and tilt adjustment device for adjusting the height and tilt of a precision module 20 above a substrate 10, including a lifting module 1 and a tilt adjustment module 2. The lifting module 1 includes:

[0050] A first driving mechanism 11;

[0051] The lifting member 12 is mounted on the base plate 10 and has a spherical top surface;

[0052] The base 13 is fixedly mounted in the middle of the bottom surface of the precision module 20. The bottom surface has a groove adapted to and fits with the top surface of the lifting member 12. The first driving mechanism 11 is used to drive the lifting member 12 to move up and down, thereby driving the base 13 and the precision module 20 to move up and down.

[0053] The tilt adjustment module 2 includes:

[0054] The translation member 22 is mounted on the substrate 10;

[0055] A connecting rod 23, one end of which is hinged to one end of the translation member 22;

[0056] The slide 24 is fixedly mounted on one side of the bottom surface of the precision module 20, and one end is hinged to the other end of the connecting rod 23;

[0057] The second driving mechanism 21 is used to drive the translation member 22 to move horizontally so as to drive the slide 24 to swing through the connecting rod 23 to adjust the inclination angle of the precision module 20 .

[0058] Specifically, in this application, the precision module 20 is a module of an ultra-precision device whose posture needs to be adjusted. When the posture of the precision module 20 needs to be adjusted, the height of the precision module 20 is first adjusted based on the lifting module 1, and then the inclination of the precision module 20 is adjusted based on the inclination adjustment module 2.

[0059] More specifically, since the groove fits in with the top surface of the lifting member 12, when the height of the precision module 20 needs to be adjusted, the first driving mechanism 11 is controlled to drive the lifting member 12 to move up and down, thereby driving the base 13 and the precision module 20 to move up and down; and since one end of the translation member 22 is hinged to one end of the slide 24 through the connecting rod 23, when the inclination angle of the precision module 20 needs to be adjusted, the second driving mechanism 21 is controlled to drive the translation member 22 to move horizontally to drive the slide 24 to swing through the connecting rod 23, thereby adjusting the inclination angle of the precision module 20.

[0060] More specifically, during the height adjustment process, the inclination adjustment module 2 does not need to be operated. At this time, the distance between the substrate 10 and one end of the slide 24 remains unchanged, the precision module 20 is tilted, and the slide 24 is tilted along with the precision module 20 so that the height adjustment process can proceed smoothly. It is also possible to control the second drive mechanism 21 to drive the horizontal displacement of the translation member 22 during the height adjustment process to drive the connecting rod 23 to swing and drive the slide 24 to rise and fall, so that the slide 24 can rise and fall along with the precision module 20, thereby ensuring that the inclination of the precision module 20 remains unchanged while ensuring that the height adjustment process proceeds smoothly.

[0061] More specifically, the present application controls the first driving mechanism 11 and the second driving mechanism 21 by means of a controller or a control panel to adjust the height and the inclination angle of the precision module 20 .

[0062] More specifically, the height adjustment process and the inclination adjustment process of the present application are based on the first drive mechanism 11 and the second drive mechanism 21, which can accurately adjust the height and inclination of the precision module 20. Compared with the existing method of manually adjusting the support legs of the precision module 20, the present application does not require the operator to manually adjust the mechanism at the bottom of the module, thereby avoiding accidents to the operator.

[0063] In addition, during the inclination adjustment process, the inclination angle of the base 13 will change with the inclination angle of the precision module 20, so the contact surface between the groove and the top surface of the lifting member 12 may change in area, and may even be transformed into a contact line or contact point, which may introduce new stress and may cause the height of the precision module 20 to change. In the present application, since the top surface of the lifting member 12 is a spherical surface, the groove is adapted and fits the top surface of the lifting member 12. Therefore, the present application can make the base 13 and the lifting member 12 always maintain surface contact during the inclination adjustment process, and the area of ​​the contact surface remains basically unchanged, and no new stress will be introduced, so that the precision module 20 can continue to have high rigidity during the inclination adjustment process, and can keep the height of the precision module 20 unchanged during the inclination adjustment process.

[0064] A height and inclination adjustment device of the present application can conveniently and precisely adjust the height and inclination of the precision module 20, and does not require the operator to manually adjust the mechanism at the bottom of the module, which can avoid accidents to the operator. In addition, the present application can ensure that the base 13 and the lifting member 12 always maintain surface contact during the inclination adjustment process, and will not introduce new stress, so that the precision module 20 can continue to have high rigidity during the inclination adjustment process, and can keep the height of the precision module 20 unchanged during the inclination adjustment process.

[0065] like Figure 5 As shown, in some preferred embodiments, the tilt adjustment module 2 further includes:

[0066] The first tensioning member 25 is fixedly mounted on the precision module 20 and has a downwardly concave movable groove 251 in the middle thereof. The bottom of the movable groove 251 has a through hole 252, and the through hole 252 shrinks inward from top to bottom.

[0067] The second tensioning member 26 is disposed through the through hole 252 and is mounted on the substrate 10 in an adjustable height. The top of the second tensioning member 26 has a ball head end, which is used to snap into the through hole 252 to tighten the precision module 20 and the substrate 10 .

[0068] Specifically, the second tensioning member 26 can be directly mounted on the substrate 10, or can be mounted on a connecting member (such as a Figure 6 The second base 27) is installed.

[0069] More specifically, when the inclination angle of the precision module 20 needs to be adjusted, the height of the second tensioning member 26 is adjusted so that the ball end of the second tensioning member 26 does not contact the through hole 252. After the inclination angle of the precision module 20 is adjusted, the height of the second tensioning member 26 is adjusted again so that the ball end of the second tensioning member 26 engages with the through hole 252. This allows the first tensioning member 25 and the second tensioning member 26 to be mutually tightened, thereby firmly tightening the precision module 20 and the substrate 10. It is worth noting that the height adjustment process of the second tensioning member 26 is performed manually by the operator. However, the operator's manual adjustment of the height of the second tensioning member 26 is simple and convenient. The operator only needs to manually confirm whether the ball end of the second tensioning member 26 engages with the through hole 252 or whether the ball end of the second tensioning member 26 contacts the through hole 252 to determine whether the height of the second tensioning member 26 is adjusted properly. There is no need to lie down to operate. Therefore, the operator can easily adjust the height of the second tensioning member 26, and the present application also saves time and effort.

[0070] In this embodiment, the height and inclination adjustment device of the present application is provided with a first tensioning member 25 and a second tensioning member 26, which can firmly tighten the precision module 20 and the substrate 10, so that the inclination angle of the precision module 20 remains unchanged, and can avoid the inclination angle deviation of the precision module 20 due to vibration or other factors, thereby improving the stability and accuracy of the posture adjustment of the precision module 20, and the operator can easily adjust the height of the second tensioning member 26 without having to lie down, so the present application also has the effect of saving time and effort.

[0071] In some preferred embodiments, the middle portion of the second tensioning member 26 is cylindrical, and the ratio of the radius of the second tensioning member 26 to the radius of the bottom end of the through hole 252 is 1:1.5.

[0072] More specifically, when the bottom surface of the precision module 20 is tilted, the through hole 252 of the first tensioning member 25 fixed thereon will also tilt accordingly. In this case, if the radius of the second tensioning member 26 is too small in ratio to the bottom radius of the through hole 252, then when the height of the second tensioning member 26 is adjusted for tightening operation, the middle part of the second tensioning member 26 is likely to interfere with the inclined through hole 252, thereby introducing new stress, and the first tensioning member 25 and the second tensioning member 26 may not be tightened smoothly. Therefore, in this embodiment, the present application sets the ratio of the radius of the middle part of the second tensioning member 26 to the bottom radius of the through hole 252 to 1:1.5, which can leave sufficient margin between the second tensioning member 26 and the through hole 252, so that the second tensioning member 26 can smoothly pass through the through hole 252 when the through hole 252 has a certain degree of inclination, and the middle part of the second tensioning member 26 will not come into contact with the through hole 252, thereby ensuring that the tensioning process is smooth and no new stress is introduced, so that the precision module 20 can maintain high rigidity during the tensioning process.

[0073] In some preferred embodiments, the through hole 252 is adapted to and fits with the lower side of the ball end when the ball end is snapped in place.

[0074] Specifically, because the through hole 252 of the present application is adapted and fits with the lower side of the ball end when the ball end is engaged, even when the first tensioning member 25 is tilted to a certain extent, the ball end can maintain surface contact with the through hole 252. Therefore, in this embodiment, the present application can ensure that the through hole 252 and the lower side of the ball end always maintain surface contact when the first tensioning member 25 and the second tensioning member 26 are tightened, which can disperse the tension applied to the through hole 252 and the ball end, improve the stability and reliability of the tightening connection between the first tensioning member 25 and the second tensioning member 26, and will not introduce new stress, so that the precision module 20 can maintain high rigidity during the tightening process.

[0075] In some preferred embodiments, the lifting module 1 further comprises:

[0076] The first base 14 is fixedly mounted on the base plate 10 , and has a vertical through slot 141 in the center thereof. The lifting member 12 is mounted in the through slot 141 for lifting and sliding.

[0077] In this embodiment, the present application provides a first base 14 and a through slot 141 to guide the lifting movement of the lifting member 12 .

[0078] like Figure 3 As shown, in some preferred embodiments, the first driving mechanism 11 includes:

[0079] Drive assembly 111;

[0080] The first driving rod 112 is inserted into the through slot 141 , one end of which is connected to the driving end of the driving assembly 111 , and the other end of which is threadedly connected to the lifting member 12 ;

[0081] A vertical guide groove is provided on the side wall of the through groove 141. The outer periphery of the lifting member 12 has a vertical first guide column 121 that cooperates with the guide groove. The driving assembly 111 is used to drive the first driving rod 112 to rotate to drive the lifting member 12 to rise and fall and slide.

[0082] In this embodiment, the height and inclination adjustment device of the present application is provided with a drive assembly 111, a first drive rod 112, a first guide column 121 and a guide groove, which can convert the rotational motion of the first drive rod 112 into the lifting motion of the lifting member 12, and can guide the lifting motion of the lifting member 12 based on the first guide column 121 and the guide groove, to prevent the lifting member 12 from rotating with the first drive rod 112 without performing the lifting motion.

[0083] Preferably, the drive assembly 111 includes:

[0084] Motor 1111;

[0085] The speed reducer 1112 has one end connected to the motor 1111 and the other end connected to the first driving rod 112 .

[0086] Specifically, the speed reduction device 1112 may be a device such as a harmonic speed reducer that can reduce speed and increase torque.

[0087] In some preferred embodiments, the lifting module 1 further comprises:

[0088] A plurality of electric clamping members 15 are horizontally adjustable mounted on the first base 14 and pass through the first base 14 , with one end thereof contacting the lifting member 12 in the through slot 141 to clamp the lifting member 12 to fix it on the first base 14 .

[0089] Specifically, in this embodiment, the present application controls the device that can adjust the horizontal position of the electric clamping member 15 by means of a controller or a control panel to adjust the horizontal position of the electric clamping member 15 so that the electric clamping member 15 clamps the lifting member 12.

[0090] In this embodiment, the height and inclination adjustment device of the present application is provided with a plurality of electric clamping members 15, which can adjust the horizontal positions of the plurality of electric clamping members 15 after completing the height adjustment of the precision module 20, so that the plurality of electric clamping members 15 clamp the lifting member 12 from different directions to keep its height unchanged, thereby preventing the lifting member 12 from rising and falling during the subsequent inclination adjustment process and the locking process, causing the height of the precision module 20 to deviate, and the clamping process of the lifting member 12 of the present application does not need to be performed manually, which has the advantages of saving time and effort.

[0091] like Figure 3 As shown, preferably, the electric clamping member 15 is a hydraulic cylinder.

[0092] Preferably, one end of the electric holding member 15 abuts against the lifting member 12 in the guide groove.

[0093] Specifically, in this embodiment, the present application is based on a hydraulic drive device to drive the rod of the electric clamping member 15 to be ejected to achieve the clamping of the lifting member 12.

[0094] In some preferred embodiments, the substrate 10 is provided with a second base 27 fixedly connected thereto, and the translation member 22 is horizontally slidably mounted on the second base 27 .

[0095] In this embodiment, the height and inclination adjustment device of the present application is provided with a second base 27 , which can guide the horizontal displacement of the translation member 22 .

[0096] Preferably, the second tensioning member 26 is mounted on the second base 27 in a height-adjustable manner so as to be mounted on the substrate 10 .

[0097] More preferably, the second tensioning member 26 is threadedly connected to the second base 27 so as to be mounted on the second base 27 in a height-adjustable manner.

[0098] like Figure 7 As shown, it is worth noting that since the distance between the bottom surface of different precision modules 20 and the top surface of the substrate 10 may be different, in order to smoothly install the tilt adjustment module 2, the process of installing the tilt adjustment module 2 can be to first fix the second base 27 on the substrate 10, and control the second driving mechanism 21 to drive the translation member 22 to move horizontally to drive the slide 24 to swing through the connecting rod 23 so that the top surface of the slide 24 is close to the bottom surface of the precision module 20, and then fix the slide 24 to the bottom surface of the precision module 20 based on fasteners such as bolts and long holes opened on the bottom surface of the precision module 20.

[0099] In some preferred embodiments, the second driving mechanism 21 includes:

[0100] Driving device 211;

[0101] The second driving rod 212 is rotatably mounted on the second base 27, one end of which is connected to the driving device 211, and the other end is threadedly connected to the translation member 22;

[0102] A horizontally arranged second guide column 271 is installed on the second base 27, and a horizontally arranged guide hole is opened on the translation member 22. The translation member 22 is horizontally slidably installed on the second guide column 271 through the guide hole to be installed on the second base 27. The driving device 211 is used to drive the second driving rod 212 to rotate to drive the translation member 22 to move horizontally, and drive the slide 24 to swing through the connecting rod 23 to adjust the inclination angle of the precision module 20.

[0103] Specifically, the driving device 211 may be a device such as a servo motor that can drive the second driving rod 212 to rotate.

[0104] In this embodiment, the height and inclination adjustment device of the present application is provided with a driving device 211, a second driving rod 212, a second guide column 271 and a guide hole, which can convert the rotational motion of the second driving rod 212 into the horizontal displacement of the translation member 22, and can guide the horizontal displacement of the lifting member 12 based on the second guide column 271 and the guide hole, to prevent the translation member 22 from rotating with the second driving rod 212 without horizontal displacement.

[0105] like Figure 8As shown, in some preferred embodiments, the inclination adjustment module 2 includes multiple slides 24 of the multiple inclination adjustment modules 2, which are arranged on the bottom surface of the precision module 20 in a rectangular array with the middle of the bottom surface of the precision module 20 as the center. The second driving mechanism 21 of the multiple inclination adjustment modules 2 is used to drive the corresponding translation member 22 to move horizontally when the first driving mechanism 11 drives the lifting member 12 to move up and down to drive the base 13 and the precision module 20 to move up and down, so as to drive the corresponding slide 24 to swing relative to the connecting rod 23 through the corresponding connecting rod 23, so that the corresponding slide 24 is lifted and lowered with the precision module 20 to keep the inclination angle of the precision module 20 unchanged.

[0106] Specifically, in this embodiment, during the height adjustment process, it is necessary to control the second driving mechanism 21 to drive the horizontal displacement of the translation member 22 to drive the connecting rod 23 to swing and drive the slide 24 to move up and down relative to the connecting rod 23, so that the slide 24 can move up and down as the precision module 20 moves up and down, thereby keeping the inclination angle of the precision module 20 unchanged; during the inclination adjustment process, it is necessary to simultaneously control the second driving mechanisms 21 of all inclination adjustment modules 2 to drive their respective corresponding translation members 22 to move horizontally, so as to drive the corresponding slide 24 to swing based on the corresponding connecting rod 23, so that when the inclination angle of the precision module 20 changes and the distance between different areas of the bottom of the precision module 20 and the top surface of the substrate 10 changes, the distance between the slide 24 of each inclination adjustment module 2 and the top surface of the substrate 10 can change simultaneously so that the inclination adjustment process can proceed smoothly.

[0107] More specifically, since the rectangular array of multiple tilt adjustment modules 2 of the present application is arranged on the bottom surface of the precision module 20, in this embodiment, the present application can jointly apply force to different areas of the bottom of the precision module 20 based on multiple tilt adjustment modules 2 to adjust the tilt angle of the precision module 20, thereby being able to more flexibly and accurately adjust the tilt angle of the precision module 20, and ensure that the bottom surface of the precision module 20 is evenly stressed so that the precision module 20 maintains high rigidity during the tilt adjustment process.

[0108] From the above, it can be seen that the present application provides a height and inclination adjustment device, which can conveniently and accurately adjust the height and inclination of the precision module 20, and does not require the operator to manually adjust the mechanism at the bottom of the module, which can avoid accidents for the operator. In addition, the present application can keep the base 13 and the lifting member 12 in surface contact at all times during the inclination adjustment process, and will not introduce new stress, so that the precision module 20 can continue to have high rigidity during the inclination adjustment process, and can keep the height of the precision module 20 unchanged during the inclination adjustment process.

[0109] In the embodiments provided in this application, it should be understood that the disclosed devices can be implemented in other ways. The device embodiments described above are merely schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some communication interface, the indirect coupling or communication connection of the device or unit can be electrical, mechanical or other forms.

[0110] In addition, the units described as separate components may or may not be physically separate, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed across multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0111] Furthermore, the functional modules in each embodiment of the present application can be integrated together to form an independent part, or each module can exist independently, or two or more modules can be integrated to form an independent part.

[0112] In this document, relational terms such as first and second, etc. are used merely to distinguish one entity or operation from another entity or operation, but do not necessarily require or imply any actual relationship or order between these entities or operations.

[0113] The above description is merely an embodiment of the present application and is not intended to limit the scope of protection of the present application. For those skilled in the art, various modifications and variations of the present application are possible. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application shall be included in the scope of protection of the present application.

Claims

1. A height and tilt adjustment device for adjusting the height and tilt of a precision module (20) above a substrate (10), characterized in that: It comprises a lifting module (1) and an inclination adjustment module (2), wherein the lifting module (1) comprises: A first driving mechanism (11); A lifting member (12) is mounted on the base plate (10), and its top surface is a spherical curved surface; The base (13) is fixedly mounted on the middle portion of the bottom surface of the precision module (20), and the bottom surface has a groove adapted to and fitted with the top surface of the lifting member (12). The first driving mechanism (11) is used to drive the lifting member (12) to move up and down, thereby driving the base (13) and the precision module (20) to move up and down. The tilt adjustment module (2) comprises: A translation member (22) mounted on the substrate (10); A connecting rod (23), one end of which is hinged to one end of the translation member (22); A slide (24) is fixedly mounted on one side of the bottom surface of the precision module (20), with one end hinged to the other end of the connecting rod (23); A second driving mechanism (21) is used for driving the translation member (22) to move horizontally so as to drive the slide (24) to swing via the connecting rod (23) to adjust the inclination angle of the precision module (20); A first tensioning member (25) is fixedly mounted on the precision module (20), wherein the center thereof has a downwardly concave movable groove (251), the bottom of the movable groove (251) has a through hole (252), and the through hole (252) shrinks inward from top to bottom; A second tensioning member (26) is provided through the through hole (252) and is mounted on the substrate (10) in an adjustable height. The top of the second tensioning member has a ball end, and the ball end is used to snap into the through hole (252) to tighten the precision module (20) and the substrate (10). The lifting module (1) further comprises: A first base (14) is fixedly mounted on the base plate (10), wherein a vertically arranged through slot (141) is provided in the center thereof, and the lifting member (12) is lifted and slidably mounted in the through slot (141); The first driving mechanism (11) comprises: Drive assembly (111); A first driving rod (112) is inserted into the through slot (141), one end of which is connected to the driving end of the driving assembly (111), and the other end of which is threadedly connected to the lifting member (12); A vertical guide groove is provided on the side wall of the through groove (141); a vertical first guide column (121) is provided on the outer periphery of the lifting member (12) and cooperates with the guide groove; the driving assembly (111) is used to drive the first driving rod (112) to rotate so as to drive the lifting member (12) to move up and down and slide; The lifting module (1) further comprises: A plurality of electric clamping members (15) are mounted on the first base (14) in an adjustable horizontal position and are disposed through the first base (14), one end of which contacts the lifting member (12) in the through slot (141) and is used to clamp the lifting member (12) to fix it on the first base (14).

2. The height and inclination adjustment device according to claim 1, characterized in that: The middle portion of the second tensioning member (26) is columnar, and the ratio of its radius to the bottom radius of the through hole (252) is 1:1.

5.

3. The height and inclination adjustment device according to claim 1, characterized in that: The through hole (252) is adapted to and fits with the lower side of the ball head end when the ball head end is buckled.

4. The height and inclination adjustment device according to claim 1, characterized in that: The base plate (10) is provided with a second base (27) fixedly connected thereto, and the translation member (22) is horizontally slidably mounted on the second base (27).

5. The height and inclination adjustment device according to claim 4, characterized in that: The second driving mechanism (21) comprises: Drive device (211); A second driving rod (212) is rotatably mounted on the second base (27), one end of which is connected to the driving device (211) and the other end of which is threadedly connected to the translation member (22); A second guide column (271) is mounted on the second base (27) and a guide hole is provided on the translation member (22). The translation member (22) is mounted on the second guide column (271) through the guide hole to slide horizontally and to be mounted on the second base (27). The driving device (211) is used to drive the second driving rod (212) to rotate so as to drive the translation member (22) to move horizontally.

6. The height and tilt adjustment device according to claim 1, characterized in that: The tilt adjustment module (2) includes a plurality of slides (24) of the plurality of tilt adjustment modules (2) arranged on the bottom surface of the precision module (20) in a rectangular array with the middle of the bottom surface of the precision module (20) as the center. The second driving mechanism (21) of the plurality of tilt adjustment modules (2) is used to drive the corresponding translation member (22) to move horizontally when the first driving mechanism (11) drives the lifting member (12) to move up and down to drive the base (13) and the precision module (20) to move up and down, so as to drive the corresponding slide (24) to swing relative to the connecting rod (23) through the corresponding connecting rod (23), so that the corresponding slide (24) moves up and down with the precision module (20) so that the tilt angle of the precision module (20) remains unchanged.

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