Probe tip deviation compensation method, system and equipment

Abstract

The invention belongs to the technical field of PCB detection, and particularly relates to a probe tip deviation compensation method, system and equipment, and the method comprises the steps: building a reference coordinate system, controlling a probe swing arm to rotate to a vertical position and a horizontal position respectively, and employing a bonding pad combination on a special calibration plate to calibrate the probe tip deviation. An electric signal detection mode is adopted to accurately measure the deviation value of the needle point in the X-axis direction and the Y-axis direction, and the position of the probe is automatically compensated according to the deviation value. The system comprises a high-precision driving module, a visual positioning module and a signal acquisition module, and realizes a full-automatic calibration process. According to the method, a horizontal and vertical double-position detection mode is innovatively adopted, complex angle calculation is avoided, the calibration efficiency and precision are greatly improved, the problem of needle point position deviation caused by mechanical errors and long-term use in a traditional method is effectively solved, the measurement precision of PCB detection equipment is remarkably improved, and the detection precision of the PCB detection equipment is greatly improved. Meanwhile, the maintenance cost and the operation difficulty are reduced, and the method is suitable for the field of high-precision PCB detection.

Description

Technical Field

[0001] The present invention belongs to the technical field of PCB detection, and particularly relates to a method, system and device for compensating the deviation of the probe tip. Background Art

[0002] In the prior art, PCB detection equipment usually adopts probe contact measurement, and the precise positioning of the tip is achieved by driving the swing arm to rotate through a DD motor and combining with a linear motor. Ideally, the initial position of the tip should be consistent with the theoretical coordinates. However, in practical applications, due to machining errors, assembly deviations, and tip wear caused by long-term use, the actual position of the tip often deviates from the theoretical position. Traditional calibration methods rely on manual visual adjustment or multiple trial-and-error measurements, with low efficiency and limited accuracy. Some automated solutions detect the tip position through laser sensors or high-precision cameras, but such systems are costly, and the complex optical calibration process increases the difficulty of equipment maintenance and is difficult to be quickly deployed in industrial sites.

[0003] The main defects of the prior art are as follows: First, the calibration method relying on manual intervention cannot meet the high-precision and high-efficiency detection requirements. Especially in the mass production scenario, frequent calibration increases the downtime. Second, existing automated compensation algorithms are mostly based on angle variable calculations, which require the introduction of complex trigonometric operations, not only increasing the computational burden but also easily causing compensation failure due to cumulative errors. In addition, the traditional calibration plate design does not consider the collaborative alignment requirements of the tip and the camera, resulting in repeated adjustments during the deviation detection process and making it difficult to achieve fast and stable tip position compensation. These problems seriously restrict the measurement accuracy and production efficiency of PCB detection equipment. Summary of the Invention

[0004] The object of the present invention is to provide a method, system and device for compensating the deviation of the probe tip, so as to solve the problems in the prior art that the tip calibration relies on manual calibration with low efficiency, the automated solutions are computationally complex and costly, and there is a lack of a dedicated calibration design for the collaborative alignment of the tip and the camera.

[0005] The present invention realizes the above object through the following technical solutions:

[0006] In the first aspect, the present invention proposes a method for compensating the deviation of the probe tip, and the method includes:

[0007] Taking the rotation center of the probe driving end as the origin, and taking the theoretical initial horizontal direction of the probe swing arm as the X-axis and the vertical direction as the Y-axis to establish a reference coordinate system;

[0008] In the reference coordinate system, controlling the probe driving end to rotate the probe swing arm to the vertical position and the horizontal position; wherein, the vertical position is the position where the swing arm points to the positive direction of the Y-axis; the horizontal position is the position where the swing arm points to the positive direction of the X-axis;

[0009] Use a PCB board with at least one set of reference alignment units as a calibration board;

[0010] Under the vertical position, detect the first deviation value of the probe tip in the Y-axis direction on the reference alignment unit based on the pin-edge method;

[0011] Under the horizontal position, detect the second deviation value of the probe tip in the Y-axis direction on the reference alignment unit based on the pin-edge method;

[0012] Compensate and calibrate the position coordinates of the probe tip according to the first deviation value and the second deviation value.

[0013] Further, after establishing a reference coordinate system with the rotation center of the probe driving end as the origin, the theoretical initial horizontal direction of the probe swing arm as the X-axis, and the vertical direction as the Y-axis, the method further includes: resetting and calibrating the mechanical zero point of the probe driving end, so that the probe swing arm is in a horizontal position and the initial alignment error with the X-axis in the reference coordinate system is less than 0.1°.

[0014] Further, the reference alignment unit includes:

[0015] A large pad, whose diameter is adapted to the pinning operation area of the tip, is used to receive the contact of the tip and generate an electrical signal;

[0016] A small pad, whose diameter is adapted to the optical recognition field of view of the camera, is used to provide a visual alignment reference; the linear distance between the center of the large pad and the center of the small pad is equal to the theoretical design spacing between the probe tip and the optical center of the camera in the reference coordinate system.

[0017] Further, detecting the first deviation value and the second deviation value based on the pin-edge method includes:

[0018] Control the tip to reciprocate on the edge of the large pad, and detect the boundary position of the large pad through the jump of the electrical signal;

[0019] Record the coordinate value when the tip touches the edge of the large pad, and calculate the linear deviation from the theoretical position of the large pad;

[0020] The first deviation value is the difference between the midpoint of the left and right edge coordinates in the Y-axis direction and the theoretical center of the large pad; the second deviation value is the difference between the midpoint of the upper and lower edge coordinates in the Y-axis direction and the theoretical center of the large pad.

[0021] Further, the compensation calibration includes:

[0022] Calibrate the length of the probe swing arm based on the length R of the probe swing arm and the first deviation value Δx, and the expression is L1 = R + Δx, where L1 is the calibrated swing arm length;

[0023] Determine the initial angle compensation amount θ of the probe driving end based on the second deviation value Δy and the calibrated swing arm length L1, and the expression is sinθ = Δy / L1;

[0024] Update the motion control parameters of the probe driving end based on the initial angle compensation amount θ.

[0025] In a second aspect, the present invention proposes a probe tip deviation compensation system, which is applied to execute the method described in any one of the above, and the system includes:

[0026] A calibration plate, specifically a PCB board with at least one set of reference alignment units;

[0027] A probe driving module, configured to control the swing arm to rotate to a vertical position and a horizontal position;

[0028] A vision positioning module, configured to identify the center position of the small pad through a camera;

[0029] A signal detection module, configured to collect the electrical signal when the probe tip contacts the pad;

[0030] A coordinate system establishment module, configured to establish a reference coordinate system with the rotation center of the probe driving module as the origin;

[0031] A control module, configured to control the probe driving module to rotate the probe swing arm to a vertical position and a horizontal position; wherein, the vertical position is the position where the swing arm points to the positive direction of the Y axis; the horizontal position is the position where the swing arm points to the positive direction of the X axis; in the vertical position, based on the pin edge method, detect the first deviation value of the probe tip in the Y-axis direction on the reference alignment unit; in the horizontal position, based on the pin edge method, detect the second deviation value of the probe tip in the Y-axis direction on the reference alignment unit;

[0032] A deviation calibration module, configured to compensate and calibrate the position coordinates of the probe tip according to the first deviation value and the second deviation value.

[0033] Further, the probe driving module includes: a DD motor, configured to drive the probe swing arm to rotate;

[0034] A linear motor, configured to control the fine adjustment movement of the probe tip in the X / Y axis direction;

[0035] An encoder, configured to feedback the actual rotation angle of the probe swing arm.

[0036] In a third aspect, the present invention proposes a PCB detection device, which integrates the probe tip deviation compensation system as described above.

[0037] The beneficial effects of the present invention are as follows:

[0038] 1. The present invention realizes high-precision compensation for the deviation of the probe tip by establishing a reference coordinate system and combining vertical / horizontal dual-position detection. By using a pre-designed calibration plate and the pin-edge method, it can quickly and accurately detect the linear deviations (Δx and Δy) in the Y-axis direction, avoiding the complex calculation of angular variables in traditional methods. By converting the deviation values into the initial angle compensation amounts at the driving end and updating the motion control parameters, it effectively solves the problem of the tip position deviation caused by manufacturing errors, installation deviations, or long-term use.

[0039] 2. The present invention realizes full-process automatic compensation through the co-design of hardware and software. The system integrates vision positioning, electrical signal detection, and high-precision motion control modules, and can complete the calibration of the tip position without manual intervention. The unique design of the reference alignment unit (combination of large / small pads) ensures the coordinated alignment of the camera and the tip. In addition, this method is compatible with existing PCB detection equipment and can be deployed only by upgrading the control software and the calibration plate, with the advantages of low cost and easy promotion, and is suitable for high-precision PCB batch detection scenarios. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] Figure 1 It is a schematic flow chart of a method for compensating the deviation of the probe tip in the present invention.

[0041] Figure 2 It is a system block diagram of a system for compensating the deviation of the probe tip in the present invention.

[0042] Figure 3 It is a schematic diagram of the probe position and the PCB board position in the PCB detection equipment under the ideal state of the present invention.

[0043] Figure 4 It is a schematic diagram of the deviation of the probe position in the PCB detection equipment under the actual state of the present invention.

[0044] Figure 5 It is a schematic diagram of the calibration of the calibration plate when the probe is in the vertical direction in the present invention.

[0045] Figure 3-5 In it, 1. Probe mover; 2. Probe swing arm; 3. Tip; 4. Calibration plate; 5. Position to be pinned; 21. Actual position; 22. Theoretical position; 41. Small pad; 42. Large pad DETAILED DESCRIPTION OF THE EMBODIMENTS

[0046] The following further describes the present application in detail with reference to the drawings. It is necessary to point out here that the following specific embodiments are only used to further illustrate the present application and should not be construed as limiting the protection scope of the present application. Those skilled in the art can make some non-essential improvements and adjustments to the present application according to the above application content.

[0047] In the prior art, the probe uses a combination of rotation and linear motion (such as the probe mover 1 in Figure 3 ) for positioning motion control, including a DD motor and a linear motor. The DD motor is used to drive the probe swing arm to rotate; the linear motor is used to control the fine adjustment motion of the probe tip in the X / Y axis directions; L is the distance that the probe mover 1 moves during the alignment process, and R is the actual length of the swing arm; during actual motion control, it is necessary to convert the xy coordinates on the PCB board into the distance that the linear motor runs and the rotation angle required by the DD motor. The calculation reference is that the swing arm 2 of the DD motor is in the horizontal position in the initial state. Combining Figure 4 , during actual calculation, it is considered that the probe tip 3 is ideally in the x-axis of the mechanical coordinate system in the initial state, but due to manufacturing and installation deviations, the tip is not in the position on the x-axis in the initial state. Therefore, it is necessary to calibrate the tip position to accurately perform measurements. Combining Figure 4 , it shows the deviation between the theoretical and actual positions of the tip (such as the theoretical position 21 and the actual position 22 in the figure). By obtaining Δx (the deviation value along the X axis) and Δy (the deviation value along the Y axis) in the above figure, the tip position can be calibrated. Therefore, some action controls are required in the upper computer of the flying probe tester to complete the process of finding Δx and Δy.

[0048] Embodiment 1

[0049] As shown in Figure 1 , 3 , 4, and 5, this embodiment proposes a method for compensating the deviation of the probe tip. The method includes: taking the rotation center of the probe driving end (a driving member with rotational and horizontal linear motions) as the origin, and establishing a reference coordinate system with the theoretical initial horizontal direction of the probe swing arm 2 as the X axis and the vertical direction as the Y axis; in the reference coordinate system, controlling the probe driving end to rotate the probe swing arm 2 to the vertical position and the horizontal position; wherein, the vertical position is the position where the swing arm points to the positive direction of the Y axis; the horizontal position is the position where the swing arm points to the positive direction of the X axis; using the PCB board with at least one set of reference alignment units as the calibration board 4; in the vertical position, detecting the first deviation value of the probe tip in the Y axis direction on the reference alignment unit based on the pinning edge method; in the horizontal position, detecting the second deviation value of the probe tip in the Y axis direction on the reference alignment unit based on the pinning edge method; compensating and calibrating the position coordinates of the probe tip according to the first deviation value and the second deviation value.

[0050] Combining Figure 5, Further, the reference alignment unit includes a large pad 42 and a small pad 41 provided on the calibration plate 4: the diameter of the large pad 42 is adapted to the needle insertion operation area of the needle tip, and is used to receive the contact of the needle tip and generate an electrical signal; the diameter of the small pad 41 is adapted to the optical recognition field of view of the camera, and is used to provide a visual alignment reference; the linear distance between the center of the large pad 42 and the center of the small pad 41 is equal to the theoretical design distance between the probe needle tip and the optical center of the camera in the reference coordinate system.

[0051] Preferably, detecting the first deviation value Δx and the second deviation value Δy based on the needle insertion edge method includes: controlling the needle tip to reciprocate at the edge of the large pad 42, and detecting the boundary position of the large pad through the jump of the electrical signal; recording the coordinate value when the needle tip contacts the edge of the large pad 42, and calculating the linear deviation from the theoretical position of the large pad 42; the first deviation value Δx is the difference between the midpoint of the left and right edge coordinates in the Y-axis direction and the theoretical center of the large pad 42; the second deviation value Δy is the difference between the midpoint of the upper and lower edge coordinates in the Y-axis direction and the theoretical center of the large pad 42.

[0052] Preferably, the compensation calibration includes: calibrating the length of the probe swing arm based on the length R of the probe swing arm and the first deviation value Δx, and the expression is L1 = R + Δx, where L1 is the calibrated swing arm length; determining the initial angle compensation amount θ of the probe drive end based on the second deviation value Δy and the calibrated swing arm length L1, and the expression is sinθ = Δy / L1; updating the motion control parameters of the probe drive end based on the initial angle compensation amount θ.

[0053] Based on the above compensation method, when the scheme is specifically implemented, it includes the following steps:

[0054] Step 1: Establish a reference coordinate system

[0055] Determination of the origin: First, determine the rotation center of the probe drive end as the origin of the reference coordinate system.

[0056] Setting of the coordinate axes: Then, with the theoretical initial horizontal direction of the probe swing arm as the X-axis and the vertical direction as the Y-axis, establish a reference coordinate system. This step ensures the consistency of the subsequent measurement reference.

[0057] Step 2: Reset calibration

[0058] Before performing deviation compensation, it is necessary to reset and calibrate the mechanical zero point of the probe drive end. Through adjustment, ensure that the probe swing arm is in a horizontal position and the initial alignment error with the X-axis in the reference coordinate system is less than 0.1°. This step effectively reduces the initial error and improves the accuracy of subsequent measurements.

[0059] Step 3: Control the probe swing arm to a specific position

[0060] Vertical position: Control the probe drive end to rotate the probe swing arm to the vertical position, that is, the position where the swing arm coincides with the Y-axis after rotating 90°, and at this time the tip points to the positive direction of the Y-axis.

[0061] Horizontal position: Then, rotate the probe swing arm to the horizontal position, that is, the initial theoretical position where the swing arm coincides with the X-axis, and at this time the tip points to the positive direction of the X-axis.

[0062] Step 4: Detect the deviation value using the calibration board

[0063] Calibration board: Use a PCB board with at least one set of reference alignment units as the calibration board. The reference alignment units include large pads and small pads. The large pads are used to receive the contact of the tip and generate electrical signals, and the small pads are used to provide visual alignment references.

[0064] Detection of the deviation value in the X-axis direction (Δx): In the vertical position, based on the pin-edge method, detect the first deviation value of the probe tip in the Y-axis direction on the large pad. The specific operation is as follows: Control the tip to reciprocate on the edge of the large pad (control the linear motor to pierce the needles on both sides of the large pad), detect the boundary position of the large pad through the jump of the electrical signal, record the coordinate values when the tip contacts the edge of the large pad (the coordinate values in the Y-axis direction in the coordinate system), and calculate the linear deviation from the theoretical position of the large pad. The first deviation value Δx is the difference between the midpoint of the left and right edge coordinates in the Y-axis direction and the theoretical center of the large pad; it should be noted that this deviation value in the X-axis direction refers to Figure 4 the Δx when the probe is not rotated, and when rotated to the vertical position, it needs to be calculated by reading the coordinate values in the Y-axis direction.

[0065] Detection of the deviation value in the Y-axis direction (Δy): In the horizontal position, also based on the pin-edge method, detect the second deviation value Δy of the probe tip in the Y-axis direction on the large pad. Record the coordinate values when the tip contacts the left and right edges of the large pad, and calculate the linear deviation from the theoretical position of the large pad. The second deviation value Δy is the difference between the midpoint of the upper and lower edge coordinates in the Y-axis direction and the theoretical center of the large pad.

[0066] Step 5: Compensation and calibration

[0067] Deviation value conversion: Convert the first deviation value Δx and the second deviation value Δy into the initial angle compensation amount θ of the probe drive end.

[0068] Combine Figure 5, during specific implementation, for example, when the swing arm is rotated to the above vertical position, the first deviation value Δx of the tip in the X-axis direction is obtained, and the length of the probe swing arm is calibrated based on the length R (the theoretical length of the swing arm) of the probe swing arm and the first deviation value Δx. The expression is L1 = R + Δx, where L1 is the calibrated length of the swing arm; when the swing arm is rotated to the above horizontal position, the second deviation value Δy of the tip in the Y-axis direction is obtained, and the initial angle compensation amount θ of the probe drive end is determined based on the second deviation value Δy and the calibrated swing arm length L1. The expression is sinθ = Δy / L1. Update the motion control parameters: Based on the initial angle compensation amount θ, update the motion control parameters of the probe drive end.

[0069] Embodiment 2

[0070] Combined with Figure 2 , this embodiment proposes a probe tip deviation compensation system, which is applied to execute the probe tip deviation compensation method in Embodiment 1. The system includes:

[0071] A calibration board, specifically a PCB board with at least one set of reference alignment units;

[0072] A probe drive module for controlling the swing arm to rotate to the vertical position and the horizontal position;

[0073] A vision positioning module for identifying the center position of the small pad through a camera;

[0074] A signal detection module for collecting the electrical signal when the tip contacts the pad;

[0075] A coordinate system establishment module for establishing a reference coordinate system with the rotation center of the probe drive module as the origin;

[0076] A control module for controlling the probe drive module to rotate the probe swing arm to the vertical position and the horizontal position; wherein, the vertical position is the position where the swing arm points to the positive direction of the Y-axis; the horizontal position is the position where the swing arm points to the positive direction of the X-axis and the tip points to the positive direction of the X-axis; in the vertical position, the first deviation value of the probe tip in the X-axis direction is detected on the reference alignment unit based on the pinning edge method; in the horizontal position, the second deviation value of the probe tip in the Y-axis direction is detected on the reference alignment unit based on the pinning edge method;

[0077] A deviation calibration module for compensating and calibrating the position coordinates of the probe tip according to the first deviation value and the second deviation value.

[0078] Preferably, the probe drive module includes: a DD motor for driving the probe swing arm to rotate;

[0079] A linear motor for controlling the fine adjustment movement of the probe tip in the X / Y-axis direction;

[0080] An encoder for feeding back the actual rotation angle of the probe swing arm.

[0081] Based on the above compensation system, the workflow includes: after the system is started, a reset calibration is first performed. Then, the probe swing arm is controlled to rotate to the vertical and horizontal positions. At each position, the deviation value of the probe tip is detected by using the vision positioning module and the signal detection module. The initial angle compensation amount is calculated according to the deviation value, and the motion control parameters are updated.

[0082] After the compensation calibration is completed, the system can perform high-precision PCB detection tasks.

[0083] Embodiment 3

[0084] This embodiment provides a PCB detection device integrated with a probe tip deviation compensation system as in Embodiment 2. When the device works, the position of the probe tip is automatically calibrated by the probe tip deviation compensation system to ensure the detection accuracy.

[0085] Those of ordinary skill in the art can realize that the units and algorithm steps of each example described in combination with the embodiments disclosed herein can be implemented by electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are executed in a hardware or software manner depends on the specific application and design constraints of the technical solution. Professional technicians can use different methods to implement the described functions for each specific application, but such implementation should not be considered to exceed the scope of this application.

[0086] In addition, the functional modules in each embodiment of this application can be integrated in a processing unit, or each unit can exist physically alone, or two or more units can be integrated in one unit.

[0087] The above embodiments are only used to illustrate the technical solutions of this application, rather than to limit it; although this application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of each embodiment of this application.

Claims

1. A probe tip deviation compensation method, characterized in that: The method comprises: A reference coordinate system is established with the rotation center of the probe driving end as the origin, the theoretical initial horizontal direction of the probe swing arm as the X-axis, and the vertical direction as the Y-axis; In the reference coordinate system, the probe driving end is controlled to rotate the probe swing arm to a vertical position and a horizontal position; wherein the vertical position is a position where the swing arm points to the positive direction of the Y axis; and the horizontal position is a position where the swing arm points to the positive direction of the X axis; A PCB board having at least one set of reference alignment units is used as a calibration board; In the vertical position, detecting a first deviation value of the probe tip in the Y-axis direction on the reference alignment unit based on a needle edge method; In a horizontal position, detecting a second deviation value of the probe tip in the Y-axis direction on the reference alignment unit based on a needle edge method; The probe tip position coordinates are compensated and calibrated according to the first deviation value and the second deviation value.

2. A probe tip deviation compensation method according to claim 1, characterized in that: After establishing a reference coordinate system with the rotation center of the probe driving end as the origin, the theoretical initial horizontal direction of the probe swing arm as the X-axis, and the vertical direction as the Y-axis, the method further includes: resetting and calibrating the mechanical zero point of the probe driving end so that the probe swing arm is in a horizontal position and the initial alignment error with the X-axis in the reference coordinate system is less than 0.1°.

3. A probe tip deviation compensation method according to claim 2, characterized in that: The reference alignment unit includes: A large pad, whose diameter is adapted to the needle tip's needle-piercing operation area, is used to receive the needle tip contact and generate an electrical signal; The diameter of the small pad is adapted to the optical recognition field of view of the camera and is used to provide a visual alignment reference; the straight-line distance between the center of the large pad and the center of the small pad is equal to the theoretical design spacing between the probe tip and the optical center of the camera in the reference coordinate system.

4. A probe tip deviation compensation method according to claim 3, characterized in that: Detecting a first deviation value and a second deviation value based on the needle edge method includes: Control the needle tip to reciprocate at the edge of the large pad, and detect the boundary position of the large pad through the electrical signal jump; Record the coordinate value when the needle tip touches the edge of the large pad, and calculate the linear deviation from the theoretical position of the large pad; The first deviation value is the difference between the midpoint of the left and right edge coordinates in the Y-axis direction and the theoretical center of the large pad; the second deviation value is the difference between the midpoint of the upper and lower edge coordinates in the Y-axis direction and the theoretical center of the large pad.

5. A probe tip deviation compensation method according to claim 4, characterized in that: The compensation calibration includes: Calibrate the length of the probe swing arm based on the length R of the probe swing arm and the first deviation value Δx, the expression is L1=R+Δx, L1 is the length of the swing arm after calibration; The initial angle compensation amount θ of the probe driving end is determined based on the second deviation value Δy and the calibrated swing arm length L1, and the expression is sinθ=Δy / L1; The motion control parameters of the probe driving end are updated based on the initial angle compensation amount θ.

6. A probe tip deviation compensation system, characterized in that: Applied to perform the method according to any one of claims 1 to 5, the system comprising: A calibration board, specifically a PCB board having at least one set of reference alignment units; A probe driving module, used to control the swing arm to rotate to a vertical position and a horizontal position; The visual positioning module is used to identify the center position of the small pad through the camera; A signal detection module is used to collect the electrical signal when the needle tip contacts the pad; A coordinate system establishment module is used to establish a reference coordinate system with the rotation center of the probe driving module as the origin; A control module, used to control the probe driving module to rotate the probe swing arm to a vertical position and a horizontal position; wherein the vertical position is a position where the swing arm points to the positive direction of the Y axis; and the horizontal position is a position where the swing arm points to the positive direction of the X axis; in the vertical position, a first deviation value of the probe needle tip in the Y axis direction is detected on the reference alignment unit based on the needle edge method; in the horizontal position, a second deviation value of the probe needle tip in the Y axis direction is detected on the reference alignment unit based on the needle edge method; The deviation calibration module is used to perform compensation calibration on the probe tip position coordinates according to the first deviation value and the second deviation value.

7. The system according to claim 6, characterized in that The probe driving module comprises: DD motor, used to drive the probe swing arm to rotate; Linear motor, used to control the fine-tuning movement of the probe tip in the X / Y axis direction; Encoder, used to feedback the actual rotation angle of the probe swing arm.

8. A PCB testing device, characterized in that: The probe tip deviation compensation system as claimed in claim 6 or 7 is integrated.

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