High-precision filtering device for electronic-grade sulfuric acid

Abstract

The invention belongs to the technical field of corollary equipment for preparing electronic-grade sulfuric acid, particularly relates to a high-precision filtering device for electronic-grade sulfuric acid, and provides the following scheme aiming at the problem that the existing high-precision filtering device for electronic-grade sulfuric acid cannot give consideration to the filtering precision and filtering speed of sulfuric acid: the high-precision filtering device for electronic-grade sulfuric acid comprises a tank body, a top cover is fixedly connected to the upper side of the tank body, a feeding pipe is arranged on the top cover, a discharging opening is formed in the bottom of the tank body, a supporting frame is fixedly connected to the outer portion of the tank body, an isolation cylinder is arranged in the tank body, and sealing rings are fixedly connected to the upper side and the bottom of the isolation cylinder. The upper sides and the bottoms of the two sealing rings are attached to the bottom of the top cover and the inner wall of the bottom of the tank body respectively. According to the high-precision filtering device for the electronic-grade sulfuric acid, a multi-stage filtering mode can be adopted, and filtering difficulty is reduced stage by stage, so that the filtering speed is considered while the filtering precision is ensured, and the device can ensure the filtering quality and improve the filtering efficiency.

Description

Technical Field

[0001] The present invention relates to the technical field of auxiliary equipment for the preparation of electronic-grade sulfuric acid, and particularly to a high-precision filtering device for electronic-grade sulfuric acid. Background Art

[0002] In the process of producing electronic-grade sulfuric acid, liquid sulfur trioxide needs to be stored in an intermediate tank first. The liquid sulfuric acid is converted into a gas phase by an evaporator. Before the gaseous sulfuric acid is transported into the absorption tower, a demister is required to remove impurities. Sulfur trioxide is absorbed by sulfuric acid in the absorption tower to increase the concentration. After cooling and temperature reduction by a cooler, it is introduced into an aeration tower. Through the temperature increase and degassing of the aeration tower, insoluble gases are absorbed and removed. The obtained sulfuric acid is stored in a finished product tank, and after being processed by a high-precision filtering device, electronic-grade sulfuric acid is obtained, and finally it is filled and loaded onto a vehicle.

[0003] In order to improve the filtering accuracy of impurities in sulfuric acid, the existing high-precision filtering devices for electronic-grade sulfuric acid often filter sulfuric acid repeatedly, which will reduce the filtering speed of the device, thereby increasing the production time cost and also reducing the output of electronic-grade sulfuric acid. Summary of the Invention

[0004] The present invention discloses a high-precision filtering device for electronic-grade sulfuric acid, aiming to solve the technical problem that the existing high-precision filtering devices for electronic-grade sulfuric acid in the background art cannot take into account both the filtering accuracy and the filtering speed of sulfuric acid.

[0005] A high-precision filtering device for electronic-grade sulfuric acid proposed by the present invention includes a tank body. A top cover is fixedly connected to the upper side of the tank body. A feed pipe is arranged on the top cover, and a discharge port is opened at the bottom of the tank body. A support frame is fixedly connected to the outside of the tank body. An isolation cylinder is arranged inside the tank body. Sealing rings are fixedly connected to the upper side and the bottom of the isolation cylinder respectively. The upper side and the bottom of the two sealing rings are respectively attached to the bottom of the top cover and the inner wall of the bottom of the tank body. A multi-stage filtering module is arranged inside the isolation cylinder. A closed tank is arranged on the multi-stage filtering module. A quick-disassembly module is arranged outside the closed tank; The multi-stage filtering module includes a filter plate, a high-precision filter membrane and a high-precision filter element. A guide cylinder is arranged above the high-precision filter element, and a piston is slidably connected inside the guide cylinder; The quick-disassembly module includes two symmetrically arranged pins, and annular grooves are arranged on the outer parts of the pins.

[0006] In a preferred embodiment, a ring-shaped base is fixedly connected to the inner wall of the isolation cylinder. Four vertically arranged rods evenly distributed in a circumferential manner are fixedly connected to the upper side of the ring-shaped base. Two equidistantly distributed mounting rings are slidably connected to the outer sides of the vertical rods. The inner walls of the two mounting rings are respectively fixedly connected to the outer sides of a high-precision filter membrane and a filter plate. The filter plate is located above the high-precision filter membrane. Moreover, heightening sleeves are slidably connected to the outer sides of the four vertical rods, and the heightening sleeves are all located between the two mounting rings. The outer sides of the four vertical rods are slidably connected to the same ballast ring. The bottom of the ballast ring is in contact with the upper side of the mounting ring provided with the filter plate. Four fixing plates evenly distributed in a circumferential manner are fixedly connected to the outer side of the isolation cylinder. Notches are formed in the fixing plates, and synchronous motors are fixedly connected in the notches. The output ends of the synchronous motors are all connected to cams through couplings. The outer sides of the cams are slidably connected to the inner walls of the notches. Moreover, rectangular openings are formed in the fixing plates, and movable rods are slidably connected in the rectangular openings. Contact blocks are fixedly connected to one sides of the four movable rods close to the synchronous motors. The bottoms of the contact blocks are all in contact with the outer sides of the cams. Counterweights are fixedly connected to the bottoms of the movable rods. Springs are fixedly connected to the upper sides of the fixing plates. The ends of the springs far from the fixing plates are fixedly connected to the outer sides of the movable rods on the same side. Moreover, four baffles evenly distributed in a circumferential manner are slidably connected to the outer side of the isolation cylinder. The bottoms of the baffles are fixedly connected to the inner bottom wall of the tank body. A collecting hopper is slidably connected to the inner wall of the isolation cylinder. The upper side of the collecting hopper is fixedly connected to the bottom of the ring-shaped base. A receiving frame is fixedly connected to the inner wall of the collecting hopper. A driving motor is fixedly connected to the inner wall of the receiving frame. The output end of the driving motor is connected to a bidirectional lead screw through a coupling. The end of the bidirectional lead screw far from the driving motor is movably connected to the inner wall of the receiving frame. Moreover, two symmetrical movable blocks are arranged on the outer side of the bidirectional lead screw. Push rods are movably connected to the outer sides of the movable blocks. The ends of the push rods far from the movable blocks are movably connected to the upper sides of pistons. The bottom of the guiding cylinder is fixedly connected to the inner wall of the collecting hopper. Two liquid inlet grooves evenly distributed in a circumferential manner are formed in the outer side of the guiding cylinder. A diffuser pipe is fixedly connected to the inner wall of the collecting hopper. The diffuser pipe is located below the guiding cylinder. A closed tank is slidably connected to the outer side of the diffuser pipe. A porous plate is fixedly connected to the inner wall of the closed tank. The upper side of the porous plate is fixedly connected to the bottom of a high-precision filter element. Moreover, the upper side of the high-precision filter element is fixedly connected to the inner top wall of the closed tank. The high-precision filter element is located outside the diffuser pipe. A mounting plate is fixedly connected to the outer side of the collecting hopper. A sealing gasket is fixedly connected to the bottom of the mounting plate. The bottom of the sealing gasket is in contact with the upper side of the closed tank. Moreover, an outlet is formed in the bottom of the closed tank.

[0007] In a preferred embodiment, two symmetrical circular holes are provided on the gasket. The inner walls of the circular holes are both slidably connected to the pins, and the pins are fixedly connected to the side opposite to the upper side of the closed tank. Two symmetrical circular grooves are provided on the mounting plate. The outer parts of the pins are both inserted with stabilizing seats, and three circumferentially equally spaced cutting grooves are provided on the upper sides of the stabilizing seats; A locking rod is slidably connected in each of the plurality of cutting grooves, and the opposite ends of the three locking rods on the same side are both clamped with the inner wall of the annular groove on the same side, and a short shaft is fixedly connected to the upper side of each locking rod; The outer parts of the two pins are both slidably connected with a rotating frame. The bottoms of the rotating frames are both movably connected to the upper sides of the stabilizing seats on the same side. Three circumferentially equally spaced curved grooves are provided on each rotating frame. The inner walls of the curved grooves are both slidably connected to the outer parts of the short shafts on the same side, and a coil spring is fixedly connected to the inner wall of each rotating frame. One end of the coil spring away from the rotating frame is fixedly connected to the upper side of the stabilizing seat on the same side.

[0008] As can be seen from the above, a high-precision filtration device for electronic-grade sulfuric acid provided by the present invention can adopt a multi-stage filtration method to disassemble the filtration difficulty step by step, so as to achieve both ensuring the filtration accuracy and taking into account the filtration speed, so that the device can not only ensure the filtration quality but also improve the filtration efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 is a schematic diagram of the overall structure of a high-precision filtration device for electronic-grade sulfuric acid proposed by the present invention; Figure 2 is a schematic cross-sectional structure diagram of a high-precision filtration device for electronic-grade sulfuric acid proposed by the present invention; Figure 3 is a schematic diagram of the structure of the annular base of a high-precision filtration device for electronic-grade sulfuric acid proposed by the present invention; Figure 4 is a schematic diagram of the structure of the fixing plate of a high-precision filtration device for electronic-grade sulfuric acid proposed by the present invention; Figure 5 is a schematic cross-sectional view of the collecting hopper of a high-precision filtration device for electronic-grade sulfuric acid proposed by the present invention; Figure 6 is a schematic diagram of the structure of the closed tank of a high-precision filtration device for electronic-grade sulfuric acid proposed by the present invention; Figure 7 is a schematic diagram of the structure of the quick-disassembly module of a high-precision filtration device for electronic-grade sulfuric acid proposed by the present invention; Figure 8 is a schematic diagram of the structure of the stabilizing seat of a high-precision filtration device for electronic-grade sulfuric acid proposed by the present invention.

[0010] In the figure: 1, tank body; 2, top cover; 3, feed pipe; 4, support frame; 5, discharge port; 6, isolation cylinder; 7, sealing ring; 8, multi-stage filtration module; 801, annular base; 802, vertical rod; 803, mounting ring; 804, high-precision filter membrane; 805, filter plate; 806, heightening sleeve; 807, ballast ring; 808, fixing plate; 809, synchronous motor; 810, cam; 811, movable rod; 812, counterweight block; 813, contact block; 814, spring; 815, collecting hopper; 816, accommodating frame; 817, driving motor; 818, bidirectional lead screw; 819, movable block; 820, push-pull rod; 821, piston; 822, guide cylinder; 823, liquid inlet groove; 824, diffuser pipe; 825, gasket; 826, perforated plate; 827, high-precision filter element; 828, mounting plate; 9, quick-disassembly module; 901, bolt pin; 902, stable seat; 903, locking rod; 904, short shaft; 905, annular groove; 906, rotating frame; 907, curved surface groove; 908, coil spring; 10, closed tank; 11, baffle plate. Detailed implementation mode

[0011] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments.

[0012] A high-precision filtration device for electronic-grade sulfuric acid disclosed by the present invention is mainly applied to the scenario where the existing high-precision filtration device for electronic-grade sulfuric acid cannot take into account both the filtration accuracy and filtration speed of sulfuric acid.

[0013] Refer to Figures 1 - 8 , a high-precision filtration device for electronic-grade sulfuric acid, includes a tank body 1. The upper side of the tank body 1 is connected with a top cover 2 by bolts. A feed pipe 3 is arranged on the top cover 2, and a discharge port 5 is opened at the bottom of the tank body 1. The outside of the tank body 1 is connected with a support frame 4 by bolts. An isolation cylinder 6 is arranged inside the tank body 1. Sealing rings 7 are connected to the upper side and the bottom of the isolation cylinder 6 by bolts respectively. The upper side and the bottom of the two sealing rings 7 are respectively attached to the bottom of the top cover 2 and the inner wall of the bottom of the tank body 1. And a multi-stage filtration module 8 is arranged inside the isolation cylinder 6. A closed tank 10 is arranged on the multi-stage filtration module 8. A quick-disassembly module 9 is arranged outside the closed tank 10; The multi-stage filtration module 8 includes a filter plate 805, a high-precision filter membrane 804 and a high-precision filter element 827. A guide cylinder 822 is arranged above the high-precision filter element 827, and a piston 821 is slidably connected inside the guide cylinder 822; The quick-disassembly module 9 includes two symmetric bolt pins 901, and annular grooves 905 are arranged outside the bolt pins 901.

[0014] Specifically, the sulfuric acid solution is injected into the isolation cylinder 6 through the feed pipe 3, and the sulfuric acid solution is subjected to multi-stage filtration using the multi-stage filtration module 8. After the solution passes through the filter plate 805, the high-precision filter membrane 804 and the high-precision filter element 827 in the pressurized closed tank 10 for multi-stage filtration, it flows out from the discharge port 5, thereby obtaining an electronic grade sulfuric acid solution with high filtration accuracy. During long-term use, there will be more impurities on the high-precision filter element 827 in the closed tank 10. The closed tank 10 is removed using the quick disassembly module 9, and then a new closed tank 10 is installed to replace the high-precision filter element 827. The device utilizes the multi-stage filtration module 8 to enable the device to adopt a multi-stage filtration method to disassemble the filtration difficulty step by step, thereby achieving the goal of taking into account the filtration speed while ensuring the filtration accuracy, so that the device can both ensure the filtration quality and improve the filtration efficiency.

[0015] Reference Figure 3 , Figure 4 , Figure 5 and Figure 6, in a preferred embodiment, a ring-shaped base 801 is connected to the inner wall of the isolation cylinder 6 by bolts. Four vertically arranged rods 802 evenly distributed in a circumferential manner are connected to the upper side of the ring-shaped base 801 by bolts. Two evenly distributed mounting rings 803 are slidably connected to the outside of the vertically arranged rods 802. The inner walls of the two mounting rings 803 are respectively connected to the outside of a high-precision filter membrane 804 and a filter plate 805 by bolts. The filter plate 805 is located above the high-precision filter membrane 804. Moreover, heightening sleeves 806 are slidably connected to the outside of the four vertically arranged rods 802, and the heightening sleeves 806 are all located between the two mounting rings 803. A same ballast ring 807 is slidably connected to the outside of the four vertically arranged rods 802. The bottom of the ballast ring 807 is in contact with the upper side of the mounting ring 803 provided with the filter plate 805. Four fixing plates 808 evenly distributed in a circumferential manner are connected to the outside of the isolation cylinder 6 by bolts. Notches are formed in the fixing plates 808, and synchronous motors 809 are connected to the notches by bolts. The output ends of the synchronous motors 809 are respectively connected to cams 810 by couplings. The outside of the cams 810 are slidably connected to the inner walls of the notches. Moreover, rectangular openings are formed in the fixing plates 808, and movable rods 811 are slidably connected to the rectangular openings. Contact blocks 813 are connected to one side of the four movable rods 811 close to the synchronous motors 809 by bolts. The bottoms of the contact blocks 813 are in contact with the outside of the cams 810. Counterweight blocks 812 are connected to the bottoms of the movable rods 811 by bolts. Springs 814 are connected to the upper sides of the fixing plates 808 by bolts. The ends of the springs 814 away from the fixing plates 808 are connected to the outside of the movable rods 811 on the same side by bolts. Moreover, four baffles 11 evenly distributed in a circumferential manner are slidably connected to the outside of the isolation cylinder 6. The bottoms of the baffles 11 are connected to the bottom inner wall of the tank body 1 by bolts. A collecting hopper 815 is slidably connected to the inner wall of the isolation cylinder 6. The upper side of the collecting hopper 815 is connected to the bottom of the ring-shaped base 801 by bolts. A receiving frame 816 is connected to the inner wall of the collecting hopper 815 by bolts. A driving motor 817 is connected to the inner wall of the receiving frame 816 by bolts. The output end of the driving motor 817 is connected to a bidirectional lead screw 818 by a coupling. The end of the bidirectional lead screw 818 away from the driving motor 817 is rotatably connected to the inner wall of the receiving frame 816 by a bearing. Two symmetrical movable blocks 819 are arranged on the outside of the bidirectional lead screw 818. Push-pull rods 820 are rotatably connected to the outside of the movable blocks 819 by bearings. The ends of the push-pull rods 820 away from the movable blocks 819 are rotatably connected to the upper side of a piston 821 by bearings. The bottom of a guide cylinder 822 is connected to the inner wall of the collecting hopper 815 by bolts;Two liquid inlet grooves 823 are equidistantly distributed in the circumferential direction on the outside of the guide cylinder 822. A diffuser pipe 824 is connected to the inner wall of the collecting hopper 815 by bolts. The diffuser pipe 824 is located below the guide cylinder 822. A closed tank 10 is slidably connected to the outside of the diffuser pipe 824. A perforated plate 826 is connected to the inner wall of the closed tank 10 by bolts. The upper side of the perforated plate 826 is connected to the bottom of the high-precision filter element 827 by bolts, and the upper side of the high-precision filter element 827 is connected to the inner wall of the top of the closed tank 10 by bolts. The high-precision filter element 827 is located outside the diffuser pipe 824. An installation plate 828 is connected to the outside of the collecting hopper 815 by bolts. A sealing gasket 825 is connected to the bottom of the installation plate 828 by bolts. The bottom of the sealing gasket 825 is attached to the upper side of the closed tank 10, and an outlet is provided at the bottom of the closed tank 10.

[0016] Specifically, after the sulfuric acid solution falls from the feed pipe 3 onto the filter plate 805, the synchronous motor 809 is started. The synchronous motor 809 drives the cam 810 to rotate, so that the cam 810 continuously drives the movable rod 811 to move up and down. Under the action of the counterweight 812, fine vibrations are generated and transmitted to the filter plate 805. The filter plate 805 filters out large particle impurities in the sulfuric acid. After the sulfuric acid passes through the filter plate 805 and falls onto the high-precision filter membrane 804, under the action of the vibration, the high-precision filter membrane 804 filters out fine particle impurities in the solution. The filtered sulfuric acid solution will collect on the collecting hopper 815 and diffuse through the diffuser pipe 824 to the space between the diffuser pipe 824 and the high-precision filter element 827. The driving motor 817 is started. The driving motor 817 drives the bidirectional lead screw 818 to rotate reciprocally, so that the movable block 819 drives the push-pull rod 820 to continuously push and pull the piston 821, so that the piston 821 enters the collecting hopper 815 from the guide cylinder 822 and then returns to the guide cylinder 822, thereby pressing the solution in the collecting hopper 815 into the closed tank 10. The high-precision filter element 827 filters out nano-scale impurities in the solution, so that the electronic-grade sulfuric acid can flow out of the opening on the closed tank 10 and flow to the outside of the tank body 1 through the discharge port 5.

[0017] In a specific application scenario, the multi-stage filtration module 8 is mainly applicable to the multi-stage filtration link in the multi-stage filtration process. That is, the multi-stage filtration module 8 can gradually classify and filter the impurities in the sulfuric acid solution by using the filter plate 805, the high-precision filter membrane 804, and the high-precision filter element 827. Thus, it effectively reduces the influence of the accumulation of impurities with different particle sizes on the filtration efficiency in single-stage filtration, enabling the filtration process to proceed smoothly. By using the cam 810 and the movable rod 811, the counterweight 812 can generate fine vibrations, effectively promoting the speed of the solution passing through the filter plate 805 and the high-precision filter membrane 804, and shortening the filtration time. By using the piston 821 sliding in the guide cylinder 822, the piston 821 can press the sulfuric acid solution in the guide cylinder 822 into the diffusion tube 824, and adopt a pressurized method to accelerate the filtration speed of the high-precision filter element 827, further shortening the filtration time of the device.

[0018] Refer to Figure 7 and Figure 8 , in a preferred embodiment, two symmetric round holes are provided on the sealing gasket 825, and the inner walls of the round holes are both slidably connected to the plug pins 901. One side of the plug pins 901 opposite to the upper side of the closed tank 10 is connected by bolts. Two symmetric round grooves are provided on the mounting plate 828. The outer parts of the plug pins 901 are both inserted with stabilizing seats 902, and three circumferentially equally spaced cutting grooves are provided on the upper sides of the stabilizing seats 902; A locking rod 903 is slidably connected in each of the plurality of cutting grooves, and one end of the three locking rods 903 on the same side opposite to each other is clamped with the inner wall of the annular groove 905 on the same side, and a short shaft 904 is connected to the upper side of each of the locking rods 903 by bolts; The outer parts of the two plug pins 901 are both slidably connected with a rotating frame 906. The bottom of the rotating frame 906 is rotatably connected to the upper side of the stabilizing seat 902 on the same side through a bearing. Three circumferentially equally spaced curved surface grooves 907 are provided on each of the rotating frames 906. The inner walls of the curved surface grooves 907 are both slidably connected to the outer parts of the short shafts 904 on the same side, and a coil spring 908 is connected to the inner wall of each of the rotating frames 906 by bolts. One end of the coil spring 908 away from the rotating frame 906 is connected to the upper side of the stabilizing seat 902 on the same side by bolts.

[0019] Specifically, when it is necessary to replace the high-precision filter element 827, rotate the rotating frame 906. The rotating frame 906 rotates against the torsion of the coil spring 908, so that the curved surface groove 907 pushes the short shaft 904 to move the locking rod 903 out of the cutting groove, thereby unlocking the locking of the annular groove 905 by the locking rod 903. Thus, the closed tank 10 containing the high-precision filter element 827 can be removed from the mounting plate 828, and the closed tank 10 containing the new high-precision filter element 827 can be reinstalled on the mounting plate 828 according to the above steps.

[0020] In a specific application scenario, the quick-disassembly module 9 is mainly applicable to the quick-disassembly link during the quick-disassembly process. That is, the quick-disassembly module 9 can achieve the quick installation and disassembly of the closed tank 10 by using the locking rod 903, the coil spring 908, and the curved surface groove 907, thereby shortening the downtime of the device, ensuring the continuous operation of the device, and improving the working efficiency of the device.

[0021] Working principle: After the sulfuric acid solution falls from the feed pipe 3 onto the filter plate 805, start the synchronous motor 809. The synchronous motor 809 drives the cam 810 to rotate, so that the cam 810 continuously drives the movable rod 811 to move up and down. Under the action of the counterweight 812, fine vibrations are generated and transmitted to the filter plate 805. The filter plate 805 filters out the large-particle impurities in the sulfuric acid. After the sulfuric acid passes through the filter plate 805 and falls onto the high-precision filter membrane 804, under the action of the vibration, the high-precision filter membrane 804 filters out the fine-particle impurities in the solution. The filtered sulfuric acid solution will collect on the collecting hopper 815 and diffuse through the diffusion pipe 824 to the space between the diffusion pipe 824 and the high-precision filter element 827. Start the drive motor 817. The drive motor 817 drives the bidirectional lead screw 818 to rotate reciprocally, so that the movable block 819 drives the push-pull rod 820 to continuously push and pull the piston 821, causing the piston 821 to enter the collecting hopper 815 from the guide cylinder 822 and then return to the guide cylinder 822, thereby pressing the solution in the collecting hopper 815 into the closed tank 10. The high-precision filter element 827 filters out the nano-level impurities in the solution, so that the electronic-grade sulfuric acid can flow out from the opening on the closed tank 10 and through the discharge port 5 to the outside of the tank body 1. When it is necessary to replace the high-precision filter element 827, rotate the rotating frame 906. The rotating frame 906 rotates against the torsion of the coil spring 908, so that the curved surface groove 907 pushes the short shaft 904 to move the locking rod 903 outwards from the cutting groove, thereby unlocking the locking rod 903 from the annular groove 905, and then the closed tank 10 equipped with the high-precision filter element 827 can be removed from the mounting plate 828. The closed tank 10 equipped with the new high-precision filter element 827 is reinstalled on the mounting plate 828 according to the above steps.

[0022] The above is only a preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution and inventive concept of the present invention, makes equivalent substitutions or changes, and should be covered by the protection scope of the present invention.

Claims

1. A high-precision filtering device for electronic grade sulfuric acid, comprising a tank body (1), characterized in that: The upper side of the tank body (1) is fixedly connected to a top cover (2), a feed pipe (3) is provided on the top cover (2), and a discharge port (5) is provided at the bottom of the tank body (1). The outside of the tank body (1) is fixedly connected to a support frame (4), an isolation cylinder (6) is provided inside the tank body (1), the upper side and the bottom of the isolation cylinder (6) are fixedly connected to a sealing ring (7), the upper sides and the bottoms of the two sealing rings (7) are respectively in contact with the bottom of the top cover (2) and the inner wall of the bottom of the tank body (1), and a multi-stage filtering module (8) is provided inside the isolation cylinder (6), a closed tank (10) is provided on the multi-stage filtering module (8), and a quick disassembly module (9) is provided outside the closed tank (10); The multi-stage filtering module (8) comprises a filter plate (805), a high-precision filter membrane (804) and a high-precision filter element (827); a guide cylinder (822) is arranged above the high-precision filter element (827), and a piston (821) is slidably connected inside the guide cylinder (822); The quick-detachable module (9) comprises two symmetrical latches (901), and an annular groove (905) is provided on the outside of each latch (901).

2. A high-precision filtering device for electronic-grade sulfuric acid according to claim 1, characterized in that: The inner wall of the isolation cylinder (6) is fixedly connected to an annular base (801), the upper side of the annular base (801) is fixedly connected to four circumferentially equidistantly distributed vertical rods (802), the exterior of the vertical rods (802) is slidably connected to two equidistantly distributed mounting rings (803), the inner walls of the two mounting rings (803) are respectively fixedly connected to the exterior of a high-precision filter membrane (804) and a filter plate (805), the filter plate (805) is located above the high-precision filter membrane (804), and the exteriors of the four vertical rods (802) are all slidably connected to heightening sleeves (806), the heightening sleeves (806) are all located between the two mounting rings (803).

3. A high-precision filtering device for electronic-grade sulfuric acid according to claim 2, characterized in that: The four vertical rods (802) are externally slidably connected to a common ballast ring (807), the bottom of the ballast ring (807) is fitted with the upper side of a mounting ring (803) provided with a filter plate (805), the isolation cylinder (6) is externally fixedly connected to four circumferentially equidistantly distributed fixing plates (808), each fixing plate (808) is provided with a notch, each fixing plate (808) is fixedly connected to the notch, the output end of each synchronous motor (809) is connected to a cam (810) via a coupling, the outside of each cam (810) is slidably connected to the inner wall of the notch, and each fixing plate (808) is provided with a rectangular opening, each fixing plate (808) is slidably connected to a movable rod (811) in the rectangular opening.

4. A high-precision filtering device for electronic-grade sulfuric acid according to claim 3, characterized in that: The four movable rods (811) are fixedly connected to a contact block (813) on one side close to the synchronous motor (809), the bottom of the contact block (813) is in contact with the outside of the cam (810), the bottom of the movable rod (811) is fixedly connected to a counterweight block (812), the upper side of the fixed plate (808) is fixedly connected to a spring (814), the end of the spring (814) away from the fixed plate (808) is fixedly connected to the outside of the movable rod (811) on the same side, and the outside of the isolation cylinder (6) is slidably connected to four circumferentially equidistantly distributed baffles (11), the bottom of the baffles (11) is fixedly connected to the bottom inner wall of the tank body (1).

5. A high-precision filtering device for electronic-grade sulfuric acid according to claim 1, characterized in that: The inner wall of the isolation cylinder (6) is slidably connected to a collecting bucket (815), the upper side of the collecting bucket (815) is fixedly connected to the bottom of the annular base (801), the inner wall of the collecting bucket (815) is fixedly connected to a containing frame (816), the inner wall of the containing frame (816) is fixedly connected to a driving motor (817), the output end of the driving motor (817) is connected to a bidirectional screw rod (818) via a coupling, the end of the bidirectional screw rod (818) away from the driving motor (817) is movably connected to the inner wall of the containing frame (816), and two symmetrical movable blocks (819) are arranged outside the bidirectional screw rod (818), the outer sides of the movable blocks (819) are both movably connected to push-pull rods (820), the ends of the push-pull rods (820) away from the movable blocks (819) are both movably connected to the upper side of the piston (821), and the bottom of the guide cylinder (822) is fixedly connected to the inner wall of the collecting bucket (815).

6. A high-precision filtering device for electronic grade sulfuric acid according to claim 1, characterized in that: The guide cylinder (822) is provided with two liquid inlet grooves (823) which are equidistantly distributed around the circumference. A diffusion tube (824) is fixedly connected to the inner wall of the collecting bucket (815). The diffusion tube (824) is located below the guide cylinder (822). The diffusion tube (824) is slidably connected to the outside of a closed tank (10). A porous plate (826) is fixedly connected to the inner wall of the closed tank (10). The upper side of the porous plate (826) is fixedly connected to the bottom of a high-precision filter element (827), and the upper side of the high-precision filter element (827) is fixedly connected to the top inner wall of the closed tank (10). The high-precision filter element (827) is located outside the diffusion tube (824).

7. A high-precision filtering device for electronic-grade sulfuric acid according to claim 5, characterized in that: The outside of the collecting hopper (815) is fixedly connected to a mounting plate (828), the bottom of the mounting plate (828) is fixedly connected to a sealing gasket (825), the bottom of the sealing gasket (825) is in contact with the upper side of the closed tank (10), and an outlet is provided at the bottom of the closed tank (10).

8. A high-precision filtering device for electronic-grade sulfuric acid according to claim 7, characterized in that: The sealing gasket (825) is provided with two symmetrical circular holes, the inner walls of the circular holes are slidably connected to the latch (901), the latch (901) is fixedly connected to the side opposite to the upper side of the sealing tank (10), the mounting plate (828) is provided with two symmetrical circular grooves, the outside of the latch (901) is plugged with a stabilizing seat (902), and the upper side of the stabilizing seat (902) is provided with three circumferentially equidistantly distributed grooves.

9. A high-precision filtering device for electronic-grade sulfuric acid according to claim 8, characterized in that: A locking rod (903) is slidably connected in each of the plurality of cutting grooves, and opposite ends of the three locking rods (903) on the same side are clamped with the inner wall of the annular groove (905) on the same side, and a short shaft (904) is fixedly connected to the upper side of each of the locking rods (903).

10. A high-precision filtering device for electronic-grade sulfuric acid according to claim 8, characterized in that: The outsides of the two latches (901) are slidably connected to a rotating frame (906), the bottoms of the rotating frames (906) are movably connected to the upper side of the stable seat (902) on the same side, the rotating frames (906) are provided with three circumferentially equidistantly distributed curved grooves (907), the inner walls of the curved grooves (907) are slidably connected to the outsides of the short shaft (904) on the same side, and the inner walls of the rotating frames (906) are fixedly connected to a coil spring (908), and one end of the coil spring (908) away from the rotating frame (906) is fixedly connected to the upper side of the stable seat (902) on the same side.

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