Multi-axis sports equipment

Abstract

The invention discloses multi-axis movement equipment, and relates to the technical field of conveying devices.The multi-axis movement equipment comprises a base, two first components arranged at intervals are arranged on the base, a second component extends in the transverse direction, and the two ends of the second component are movably arranged on the first components in the longitudinal direction through first driving assemblies correspondingly; the third component is movably arranged on the second component in the transverse direction through the second driving assembly, the supporting component and the second component are arranged at intervals, the supporting component can keep the state of the measuring reference on the multi-axis movement equipment, and the two opposite ends of the supporting component are connected to the first driving assembly respectively. And the first acquisition assembly is arranged between the supporting component and the third component, and the first acquisition assembly is configured to acquire the deformation quantity of the second component, so that possible deflection or distortion of the second component when the second component is heated or stressed can be identified, and the measurement precision of the equipment is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of conveying devices, and particularly to a multi-axis motion device. Background Art

[0002] With the development of the semiconductor industry, the miniaturization and high-density packaging forms of packaged devices are increasing day by day, which puts more stringent requirements on the speed and accuracy of the assembly process, and the accuracy standards of related production equipment have also been improved accordingly.

[0003] During the use of traditional equipment, an undeniable problem is that the equipment will experience different temperature state changes during the production cycle. Generally speaking, the equipment starts in a cold state, and then the induced heat generated by the motor will gradually heat the corresponding motion system (such as the gantry system) until it theoretically reaches a thermal stable state. However, in actual operation, the thermal steady state is not constant, but will enter a cooling stage due to factors such as operator intervention and material loading, and then enter the heating stage again. This thermal change will cause deformation of the motion system, especially in large motion systems, and the deformation problem is particularly prominent.

[0004] The motion system usually uses acquisition components such as encoders and grating scales to position and measure the displacement of corresponding motion components. These components are directly installed on the motion components (such as the gantry beam), so they will inevitably be affected by the heat generated by the motor. More importantly, these components cannot detect the mechanical deformation induced by heat, resulting in a significant decline in the accuracy performance of the equipment.

[0005] In addition, in order to meet the high-efficiency requirements of the equipment, it must adopt high acceleration and speed settings. However, the dynamic effects (such as bending and torsion deformations, cross effects between left and right motion components, etc.) caused by this high-speed and high-acceleration motion state are invisible to traditional acquisition components, so this has also become the second main reason for the decline in measurement accuracy. Summary of the Invention

[0006] The purpose of the embodiments of the present invention is to provide a multi-axis motion device that can solve the above problems existing in the prior art.

[0007] To achieve the above object, the present invention adopts the following technical solutions:

[0008] Provide a multi-axis motion device, including:

[0009] A base, on which two spaced-apart first components are provided, and both of the two first components extend longitudinally;

[0010] A second component, which extends transversely and is respectively arranged at both ends on the first component through a first driving assembly so as to be movable longitudinally;

[0011] A third component, which is arranged on the second component through a second driving assembly so as to be movable transversely;

[0012] A supporting component, which is arranged at an interval from the second component, and opposite ends of the supporting component are respectively connected to the first driving assembly. A first acquisition assembly is arranged between the supporting component and the third component, and the first acquisition assembly is configured to acquire the deformation amount of the second component.

[0013] As an optional implementation manner, the third component is sleeved on the supporting component through a movable component so as to be movable transversely;

[0014] The first acquisition assembly includes a first sensing element and a first signal processing unit. The first sensing element is arranged transversely on the supporting component. The first signal processing unit is provided with at least two, and each first signal processing unit is arranged on the movable component and is spaced apart from each other transversely. The first signal processing unit is configured to acquire the signal of the first sensing element and convert it into a longitudinal displacement amount.

[0015] As an optional implementation manner, a second acquisition assembly is further arranged between the movable component and the supporting component, and the second acquisition assembly includes a second sensing element and a second signal processing unit;

[0016] The second sensing element is arranged transversely adjacent to the first sensing element. The second signal processing unit is arranged on the movable component, and the second signal processing unit is configured to acquire the signal of the second sensing element and convert it into a transverse displacement amount.

[0017] As an optional implementation manner, a sixth acquisition assembly for acquiring the transverse displacement amount of the third component is further arranged between the second component and the third component.

[0018] As an optional implementation manner, at least one end of the second component is connected to the first driving assembly through a first flexible member; and

[0019] At least one end of the supporting component is connected to the first driving assembly through a second flexible member.

[0020] As an optional implementation manner, it further includes:

[0021] A fourth component, which is arranged on the third component through a third driving assembly so as to be movable vertically, and an actuator is arranged on the fourth component;

[0022] A third acquisition component is provided between the actuator and the movable component, and the third acquisition component is configured to acquire the displacement amounts of the actuator in the longitudinal and transverse directions.

[0023] As an alternative implementation, the third acquisition component includes:

[0024] A first mounting member fixedly provided on one side of the actuator, with a transverse sensing element and a longitudinal sensing element respectively provided on two adjacent side surfaces of the first mounting member;

[0025] A second mounting member fixedly provided on the movable component and protruding longitudinally from the movable component, so that the second mounting member is spaced and oppositely arranged with the side of the first mounting member provided with the longitudinal sensing element, and the side of the movable component close to the actuator is spaced and oppositely arranged with the side of the first mounting member provided with the transverse sensing element;

[0026] The second mounting member is further provided with a longitudinal signal processing unit corresponding to the longitudinal sensing element, and the side of the movable component close to the actuator is provided with a transverse signal processing unit corresponding to the transverse sensing element.

[0027] As an alternative implementation, a fourth acquisition component is provided between each of the two first members and each of the two first drive components, and the fourth acquisition component is configured to acquire the displacement amounts of the opposite ends of the second member in the longitudinal direction.

[0028] As an alternative implementation, a fifth acquisition component is provided between the opposite ends of each of the two first members and the support member, and the fifth acquisition component is configured to acquire the displacement amounts of the opposite ends of the support member in the longitudinal direction; and

[0029] One of the fifth acquisition components is further configured to acquire the displacement amount of the support member in the transverse direction.

[0030] As an alternative implementation, the first member includes a member body and a fixed seat, and at least part of the first drive component and at least part of the fourth acquisition component are both provided on the member body;

[0031] The two fixed seats are respectively provided on the sides of the two member bodies close to each other, and the fifth acquisition component is provided between the fixed seat and the end of the support member.

[0032] The beneficial effects of the present invention are as follows: By providing a support member spaced from the second member, the support member can move synchronously with the second member, and the vibration generated during the movement of the second member cannot be directly transmitted to the support member, enabling the support member to maintain the measurement reference state of the multi-axis motion device. The third member can directly feedback the deformation state of the second member, so as to eliminate the influence of the second member on the first acquisition component. On this basis, the first acquisition component directly acquires the deformation amount of the second member (fed back by the third member), avoiding measurement errors caused by the influence of heat on the second member or the inability to detect mechanical deformation when the acquisition component is directly provided on the second member, which helps to identify possible deflection or distortion of the second member when heated or stressed, thereby improving the measurement accuracy of the device.

[0033] After the first acquisition component acquires the deformation amount of the second member, the further movement of the first drive component in the longitudinal direction is used to compensate for the error caused by the deformation of the second member, thereby improving the compensation accuracy, enhancing the positioning accuracy of the second member in the longitudinal direction, strengthening the stability and rigidity of the mechanical system, and reducing system fluctuations caused by thermal deformation or external force interference.

[0034] Also, due to the improvement of the measurement accuracy and motion stability of the device, during complex motion processes, the accuracy and stability of the device are highly maintained, meeting the production processes with high-precision requirements such as semiconductor packaging, and greatly improving production efficiency and product quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] The present invention will be further described in detail below with reference to the drawings and embodiments.

[0036] Figure 1 Schematic diagram of the overall structure of the multi-axis motion device according to an embodiment of the present invention;

[0037] Figure 2 Schematic diagram of the cooperation state between the second member and the third member according to an embodiment of the present invention;

[0038] Figure 3 Schematic diagram of the cooperation state between the actuator and the movable part according to an embodiment of the present invention;

[0039] Figure 4 Schematic diagram of the structure of the support member according to an embodiment of the present invention;

[0040] Figure 5 Schematic diagram of the cooperation state between the third member and the fourth mechanism according to an embodiment of the present invention;

[0041] Figure 6 One of the schematic diagrams of the structure of the first member according to an embodiment of the present invention;

[0042] Figure 7 The second schematic structural view of the first component according to the embodiment of the present invention;

[0043] Figure 8 The first schematic view of the mating state of the first component and the second component according to the embodiment of the present invention;

[0044] Figure 9 The second schematic view of the mating state of the first component and the second component according to the embodiment of the present invention;

[0045] Figure 10 The partial schematic structural view of the fifth acquisition component according to the embodiment of the present invention.

[0046] In the figure: 10, the first component; 11, the component body; 12, the fixed seat; 121, the reference platform; 20, the second component; 21, the first flexible member; 22, the first bracket; 30, the third component; 40, the supporting member; 41, the second flexible member; 50, the first acquisition component; 51, the first sensing element; 52, the first signal processing unit; 60, the movable member; 61, the movable hole; 70, the second acquisition component; 71, the second sensing element; 72, the second signal processing unit; 80, the first driving component; 90, the second driving component; 100, the base; 200, the fourth component; 300, the third driving component; 400, the actuator; 500, the third acquisition component; 501, the first mounting member; 502, the lateral sensing element; 503, the longitudinal sensing element; 504, the second mounting member; 505, the longitudinal signal processing unit; 506, the lateral signal processing unit; 600, the fourth acquisition component; 601, the fourth sensing element; 602, the fourth signal processing unit; 700, the fifth acquisition component; 701, the fifth sensing element; 702, the fifth signal processing unit; 800, the sixth acquisition component. Detailed implementation manners

[0047] To make the technical problems solved by the present invention, the technical solutions adopted and the achieved technical effects clearer, the technical solutions of the embodiments of the present invention will be further described in detail below. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative efforts shall fall within the protection scope of the present invention.

[0048] In the description of the present invention, unless otherwise clearly defined or limited, the terms "connected", "connected to", and "fixed" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral body; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0049] In the present invention, unless otherwise clearly defined or limited, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features therebetween. Moreover, the first feature being "above", "over", and "on top of" the second feature includes that the first feature is directly above and obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "below", "beneath", and "underneath" the second feature includes that the first feature is directly below and obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0050] It is understood from the background art that with the booming development of the semiconductor industry, the miniaturization and high-density packaging forms of packaging devices are increasing day by day, which puts more stringent requirements on the speed and accuracy of the assembly process. In this context, the accuracy standards of related equipment have also been improved. At the same time, the rise of the micro-display industry, especially the wide application of LED (light-emitting diode) technology, poses higher challenges to the accuracy and efficiency of LED transfer. The development trends of these industries not only drive technological innovation but also pose unprecedented requirements on equipment manufacturers.

[0051] During the use of traditional equipment, an issue that cannot be ignored is that the equipment will experience different temperature state changes during the production cycle. Generally speaking, the equipment starts in a cold state, and then the induced heat generated by the motor will gradually heat the gantry system until it theoretically reaches a thermally stable state. However, this thermally stable state is not constant and will be affected by factors such as operator intervention and material loading, resulting in cooling and reheating stages. Such thermal changes will cause mechanical deformation of the gantry system, especially in the large gantry system with a large substrate size in the LED transfer equipment, this deformation is particularly significant.

[0052] Traditional gantry systems usually use encoders and grating scales for position feedback. These sensors are placed on the gantry beam and are thus inevitably affected by the thermal effects of the motor. More critically, these encoders cannot detect mechanical deformations induced by heat, resulting in a significant decline in precision performance. In addition, under high-speed and high-acceleration motion states, the dynamic effects of the gantry beam (such as deformations like bending and torsion, and the cross effects between the left and right frames) also pose severe challenges to traditional encoder systems. These dynamic factors cannot be accurately captured by traditional encoder systems either, further affecting the accuracy and stability of the system.

[0053] To overcome these effects and improve the accuracy and stability of the device, this embodiment provides a multi-axis motion device. By setting a support component that is synchronized and spaced from the second component (gantry beam), and arranging a first acquisition component on this support component, the deformation amount of the second component is collected, thus effectively solving the error problem caused by the influence of mechanical and thermal effects on the second component.

[0054] Please refer to the attached drawings of the specification Figures 1 - 5 The multi-axis motion device includes a base 100. This base 100 serves as the core support structure of the multi-axis motion device, bearing the weight and motion loads of all motion components (including but not limited to the first component 10, the second component 20, the third component 30, etc. described in this embodiment), ensuring the overall stability of the device.

[0055] Two first components 10 are arranged on the base 100 at intervals in the transverse direction, and both first components 10 extend longitudinally. A second component 20 extending in the transverse direction is arranged on the two first components 10. The first component 10 serves as the reference component of the multi-axis motion device, providing support and guidance for the second component 20 to ensure that the second component 20 can move stably on it. On this basis, both ends of the second component 20 in the transverse direction are respectively arranged on the first component 10 in a longitudinally movable manner through a first drive assembly 80. The first drive assembly 80 mainly functions to transmit power to the second component 20 in the multi-axis motion device. Moreover, a guiding structure (such as a guiding assembly formed by the cooperation of a guide rail and a slider) can be further arranged between the first component 10 and the second component 20 to further improve the stability during their reciprocating relative motion in the longitudinal direction.

[0056] Specifically, the first driving component 80 can, but is not limited to, adopt an electric drive (converting electrical energy into mechanical energy through an electric motor, which can be, but is not limited to, a DC motor, an AC motor, a stepper motor, or a servo motor, etc. In a multi-axis motion device, the electric drive is usually used in cooperation with transmission components such as a lead screw and a timing belt), a hydraulic drive (converting the pressure energy of a liquid into mechanical energy through a hydraulic pump), a pneumatic drive (converting the pressure energy of a gas into mechanical energy through a pneumatic component), or a linear motor drive (based on electromagnetic induction, flattening a rotary motor along the radial direction to achieve linear motion). The first driving component 80 generally consists of a power source, a transmission component, and a control component. The power source is arranged on the first component 10 to provide energy. The transmission component is arranged between the power source and the second component 20 to transfer the energy to the second component 20. The control component is used to adjust and control the motion speed and direction output by the power source, so as to control the specific motion direction and speed of the second component 20 along the longitudinal direction.

[0057] It is worth mentioning that the first component 10 is usually made of high-strength and high-rigidity materials (such as marble, aluminum alloy, etc.) to ensure that it will not deform or vibrate when bearing the weights and moving forces of the second component 20 and the actuator 400.

[0058] On the basis of the above structure, the multi-axis motion device further includes a third component 30. The third component 30 is arranged on the second component 20 through a second driving component 90. In actual application scenarios, the third component 30 is used to provide an installation position for the actuator 400 (such as a die bonder head, a laser cutting head, a wafer gripper, etc.). The third component 30 is configured to allow relative movement along the transverse direction with respect to the second component 20 through the second driving component 90, so as to form a stable motion chain between the first component 10 and the second component 20, and between the second component 20 and the third component 30 (the actuator 400). The multi-axis motion device refers to a device that can simultaneously and precisely control two or more motion axes. On the basis of the multi-axis motion device adopting the multi-axis motion device described in any of the above embodiments, these axes in the multi-axis motion device can be set as linear axes (such as the X, Y, and Z axes, corresponding to the transverse, longitudinal, and vertical directions described in this embodiment respectively, controlling the linear movement of an object in three-dimensional space). Of course, on this basis, the multi-axis motion device does not exclude the use of rotary axes (such as the A, B, and C axes, controlling the rotation of an object around a specific axis).

[0059] It should be noted that the third component 30 is configured to allow (drive the actuator 400) relative movement along the transverse direction with respect to the second component 20, which means that there also needs to be a certain guiding function between the third component 30 and the second component 20 to ensure that the actuator 400 can move along a predetermined trajectory. This embodiment will not elaborate further on this.

[0060] Moreover, the second driving component 90 can adopt the same technical solution as the first driving component 80. In view of the relatively similar description of the first driving component 80 in the above embodiments, that is, no further elaboration will be made on the second driving component 90 in this embodiment.

[0061] To achieve the above technical effects, the multi-axis motion device of this embodiment further includes a supporting component 40. In this embodiment, the supporting component 40 is arranged at intervals on the lower side of the second component 20. And to ensure that the supporting component 40 can move synchronously with the second component 20 in the longitudinal direction, the opposite ends of the supporting component 40 are respectively connected to the first driving component 80. Since the supporting component 40 is arranged at intervals with the second component 20, therefore, the vibration generated during the movement of the second component 20 cannot be directly transmitted to the supporting component 40. The supporting component 40 is only used to feedback the deformation amount of the second component 20, so that the deformation amount data collected by the first acquisition component 50 is more accurate.

[0062] A first acquisition component 50 is arranged between the supporting component and the third component 30. The first acquisition component 50 is configured to acquire the deformation amount of the second component 20. On the basis of filtering the vibration and other conditions of the second component 20 by using the supporting component 40 as described above, when the second component 20 deforms for different reasons, the error of the second component 20 will be directly transmitted to the third component 30. That is to say, the third component 30 can well feedback the error caused by the deformation and other aspects of the second component 20. At this time, due to the relationship that the supporting component is not affected by the second component 20, it always maintains a reference state on the multi-axis motion device. Therefore, setting the first acquisition component 50 between the third component 30 and the supporting component 40 can well utilize the feedback of the first acquisition component 50 through the third component 30 to acquire the deformation amount of the second component 20, so that the displacement deviation of the second component 20 in other aspects cannot affect the first acquisition component 50, avoiding the measurement error caused by the second component 20 being affected by heat or unable to detect mechanical deformation when the acquisition component is directly arranged on the second component 20, which helps to identify the possible deflection or distortion of the second component 20 when it is heated or stressed, thereby improving the measurement accuracy of the device.

[0063] In an actual application scenario, after the first acquisition component 50 acquires the deformation amount of the second component 20 by detecting whether the third component 30 is in a parallel state with the support component 40 and other methods, the multi-axis motion device can further utilize the further movement of the first drive component 80 in the longitudinal direction to enable the second component 20 to remain parallel to the transverse direction, realizing the compensation for the error caused by the deformation of the second component 20, thereby improving the compensation accuracy, enhancing the positioning accuracy of the second component 20 in the longitudinal direction, strengthening the stability and rigidity of the mechanical system, and reducing the system fluctuations caused by thermal deformation or external force interference.

[0064] By adopting the above technical solution, since the measurement accuracy and motion stability of the device are improved, during the complex motion process, the accuracy and stability of the device are also highly maintained, meeting the production processes with high-precision requirements such as semiconductor packaging, and greatly improving the production efficiency and product quality.

[0065] Please continue to refer to the attached instructions Figures 1 - 5 In order to enable the deformation amount of the second component 20 to be more accurately feedback through the third component 30, a movable component 60 is further provided on the side of the third component 30 close to the support component 40. The third component 30 is sleeved on the support component 40 through the movable component 60 and can move transversely. It should be noted that in order for the deformation of the second component 20 feedback by the third component 30 to be acquired by the first acquisition component 50, in the longitudinal direction, there should be enough relative motion space between the movable component 60 and the support component 40. In this way, the dynamics of the third component 30 on the second component 20 can be directly feedback through the movable component. When the second component 20 undergoes deformation offset, the dynamics of the third component 30 will also change accordingly. This displacement deviation can be directly transmitted to the movable component 60, causing the movable component 60 to have a relative motion in the longitudinal direction with the support component 40 in the longitudinal direction, thereby generating a longitudinal or rotational offset in the horizontal direction, enabling these position deviations to be acquired by the first acquisition component 50.

[0066] Specifically, please refer to the attached instructions Figure 4, the first acquisition component 50 includes a first sensing element 51 and at least two first signal processing units 52. Among them, the first sensing element 51 is arranged horizontally on the support member 40, and each first signal processing unit 52 is arranged on the movable member 60 and spaced apart from each other in the horizontal direction. The first signal processing unit 52 is configured to collect the signal of the first sensing element 51 and convert it into a longitudinal displacement amount. During the actual operation of the multi-axis motion device, each first signal processing unit 52 can respectively collect the displacement amount data of the first sensing element 51 in the longitudinal direction, and through the difference between the displacement amount data, it can effectively determine whether the movable member (the second member 20) is precisely in a state parallel to the horizontal direction. Then, according to the judgment result of the first acquisition component 50, each first driving component 80 is controlled to compensate for the displacement error of the second member 20.

[0067] Exemplarily, when the first signal processing unit 52 is set to two, if the difference between the displacement amount data obtained by the two first signal processing units 52 respectively collecting the signal of the first sensing element 51 is not 0, it indicates that the specific positions at both ends of the third member 30 (and the second member 20) are offset longitudinally, and the second member 20 is not in a state parallel to the horizontal direction. At this time, the position of at least one end of the second member 20 in the longitudinal direction can be further compensated by driving at least one first driving component 80, so as to ensure that the angle of the actuator 400 provided on the third member 30 on the vertical axis meets the relevant process requirements.

[0068] By arranging the first sensing element 51 horizontally and multiple first signal processing units 52 spaced apart horizontally, the first acquisition component 50 directly collects the deformation amount of the second member 20 by using the difference in the displacement amounts collected by each first signal processing unit 52, effectively avoiding the measurement errors caused by the traditional acquisition component being affected by heat or unable to detect mechanical deformation, significantly improving the measurement accuracy of the device, meeting the production processes with high-precision requirements such as semiconductor packaging, and greatly improving the production efficiency and product quality.

[0069] Please continue to refer to the attached drawings of the specification Figures 1 - 5 , on the basis that the movable member 60 is further arranged between the third member 30 and the support member 40, a second acquisition component 70 is also arranged between the movable member 60 and the support member 40, and the second acquisition component 70 is configured to collect the displacement amount of the third member 30 in the horizontal direction.

[0070] The third component 30 and the movable component 60 of this embodiment adopt a modular design concept, which is conducive to the separate design and processing of the third component 30 and the movable component 60. While effectively reducing the processing difficulty of the third component 30 and the movable component 60, it also makes the further assembly of the third component 30 and the supporting component 40 simpler, and enables the movable gap between the third component 30 and the supporting component 40 to be better controlled, so as to ensure that the first acquisition component 50 can more accurately collect the deformation amount of the second component 20 by using the relative displacement between the movable component 60 and the supporting component 40.

[0071] As can be understood from the above content, the supporting component 40 arranged at an interval from the second component 20 can be used as a positioning reference for the second component 20. Based on the above embodiment of using the first acquisition component 50 to collect the displacement amount of the third component 30 and the supporting component 40 in the longitudinal direction to obtain the deformation amount of the second component 20, in this embodiment, a second acquisition component 70 is further arranged between the movable component 60 and the supporting component 40. During the process that the third component 30 moves relative to the second component 20 in the transverse direction through the second driving component 90, the second acquisition component 70 can collect the displacement amount of the movable component 60 in the transverse direction. Due to the relatively stable state of the supporting component 40, therefore, the second acquisition component 70 can also more accurately detect the position of the third component 30 in the transverse direction, thereby improving the positioning accuracy of the third component 30 in the transverse direction.

[0072] In addition, by arranging the second acquisition component 70 between the movable component 60 and the supporting component 40, rather than directly arranging it between the third component 30 and the supporting component 40 or other components, the space between the movable component 60 and the supporting component 40 can be fully utilized, making the layout of the acquisition components between the third component 30 and the supporting component 40 more reasonable and compact, avoiding the problem of complex structure caused by further adding the second acquisition component 70, and also reducing the risk of mutual interference between components.

[0073] Specifically, the second acquisition component 70 includes a second sensing element 71 and a second signal processing unit 72. Among them, the second sensing element 71 is arranged laterally adjacent to the first sensing element 51, and the second signal processing unit 72 is arranged on the movable component 60. The second signal processing unit 72 is configured to collect the signal of the second sensing element 71 and convert it into a lateral displacement amount. It should be particularly noted that the second signal processing unit 72 can be arranged between any two adjacent first signal processing units 52 to make full use of the space reserved between the first signal processing units 52, so that the layout of the second acquisition component 70 between the movable component 60 and the supporting component 40 is more reasonable, avoiding the situation that the volume needs to be further expanded for the installation of the second acquisition component 70 between the two, keeping the overall structure of the multi-axis motion device compact, and thus ensuring that sufficient positioning space and processing space can be reserved for the workpiece and the actuator 400 in the actual application scenario.

[0074] It is worth mentioning that, from the above content, it can be learned that the movable component 60 is movably sleeved on the supporting component 40. Therefore, the movable component 60 is provided with a movable hole 61 penetrating through its opposite ends laterally. The movable component 60 is sleeved on the outer periphery of the supporting component 40 through the movable hole 61. The above-mentioned first acquisition component 50 and second acquisition component 70 can be arranged between the movable hole 61 and the supporting component 40. In this way, the first signal processing unit 52 and the second signal processing unit 72 can be well protected by the movable component 60. Furthermore, while extending the service life of the first acquisition component 50 and the second acquisition component 70, the acquisition accuracy of the two is also guaranteed.

[0075] It should be understood that each sensing element (including but not limited to the first sensing element 51, the second sensing element 71, etc.) and each signal processing unit (including but not limited to the first signal processing unit 52, the second signal processing unit 72, etc.) described in this embodiment can, but are not limited to, adopt the following combination methods to provide the acquisition function of displacement data:

[0076] First, linear encoder and reading head. Fine scale lines are engraved on the linear encoder (a type of grating scale). When the reading head moves along the linear encoder, it will read the change of the scale lines and convert it into an electrical signal. By processing these electrical signals, accurate displacement information can be obtained;

[0077] Second, magnetic scale and magnetic head. Magnetic stripes are engraved on the magnetic scale. When the magnetic head moves along the magnetic scale, it will sense the change of the magnetic field and convert it into an electrical signal. By processing these electrical signals, displacement information can be obtained.

[0078] Please refer to the attached instruction Figure 1On the basis of the above-mentioned implementation, a sixth acquisition component 800 for collecting the lateral displacement of the third component 30 is further arranged between the second component 20 and the third component 30. The structure of the sixth acquisition component 800 can refer to the above-mentioned first acquisition component 50 and the second acquisition component 70. By arranging the sixth acquisition component 800 between the second component 20 and the third component 30, the sixth acquisition component 800 can collect the lateral dynamics of the third component 30 on the second component 20. According to the implementation of the second acquisition component 70 being arranged between the above-mentioned movable component 60 and the supporting component 40, in the actual application scenario, the difference between the displacements collected by the sixth acquisition component 800 and the second acquisition component 70 can be used to feedback whether there is a displacement deviation in the actual position of the third component 30 on the second component 20, and then the error of the third component 30 can be compensated by controlling the second driving component 90 to drive the third component 30 to further adjust its displacement in the lateral direction. The problem of lateral displacement of the third component 30 due to the deformation of the second component 20 is avoided, the positioning accuracy of the actuator 400 in the lateral direction is ensured, and the accuracy requirements of the multi-axis motion equipment in the processing scenario are met.

[0079] In one embodiment, please refer to the attached specification Figures 1 - 2 At least one end of the second member 20 is connected to the first drive assembly 80 through a first flexible member 21. The first flexible member 21 is a connector with low structural stiffness, which can be deformed when subjected to force. In the application of the multi-axis motion device, the first flexible member 21 is used to connect the second member 20 and the first drive assembly 80 to absorb and compensate for displacement errors caused by various reasons (such as processing accuracy, assembly error, temperature change, etc.). In addition, when the two ends of the second member 20 have displacement errors due to asynchronous movement or other factors, the first flexible member 21 can adapt to these errors through its deformation characteristics. For example, the deformation of the first flexible member 21 can be translation (i.e. linear displacement) or torsion (i.e. rotational displacement), depending on the force conditions and the design of the flexible member. Through the deformation of the first flexible member 21, the first drive assembly 80 at the corresponding position can maintain the relative position relationship between the two ends of the second member 20, thereby decoupling the displacement error, improving the overall accuracy of the multi-axis motion device, and reducing the direct wear between the first drive assembly 80 and the second member 20 or the first member 10 on both sides, which helps to extend the service life of the mechanism and reduce maintenance costs.

[0080] Furthermore, 1. Figure 7 A second flexible member 41 is further provided between at least one end of the support member 40 and the first drive assembly 80 to decouple the errors at both ends of the support member 40 caused by the asynchronous movement of the two first drive assemblies 80 with reference to the above effect.

[0081] In one embodiment, please refer to the attached specificationFigure 5 To meet the multi-axis motion requirements in actual use scenarios, the multi-axis motion device further includes a fourth component 200. In this embodiment, the actuating component is disposed on the fourth component 200, and the fourth component 200 is movably disposed on the third component 30 along the vertical direction through a third driving assembly 300, so that the actuating mechanism 400 can reciprocate relative to the third component 30 in the vertical direction through the fourth component 200.

[0082] It should be understood that a collection assembly for collecting the displacement amount of the fourth component 200 in the vertical direction should be provided between the third component 30 and the fourth component 200. The setting method and collection method thereof can refer to the relevant descriptions of the first collection assembly 50 and the second collection assembly 70 above, so this embodiment will not be further elaborated herein.

[0083] According to the structural form provided above, it can be understood that the movable component 60 can provide feedback on the displacement amount of the third component 30 on the second component 20, and the movable component 60 can provide more installation space and positions for the relevant collection assemblies relative to the third component 30. In view of this, in order to detect the dynamic offset of the actuating mechanism 400 on the third component 30, a third collection assembly 500 is further provided between the actuating mechanism 400 and the movable component 60. The third collection assembly 500 is configured to collect the displacement amounts of the actuating mechanism 400 in the longitudinal and transverse directions.

[0084] It can be understood that the actuating mechanism 400 can only displace relative to the third component 30 in the vertical direction through the fourth component 200. However, considering factors such as assembly errors in the transverse and longitudinal directions between the fourth component 200 and the third component 30, the displacement deviation of the actuating mechanism 400 relative to the third component 30 in the transverse and longitudinal directions is collected by providing the third collection assembly 500 between the actuating mechanism 400 and the movable component 60, so as to further compensate for this displacement deviation through the movements of the first driving assembly 80 and the second driving assembly 90, thereby achieving the purpose of further ensuring the accuracy of the actual motion coordinates of the actuating mechanism 400 on the multi-axis motion device and improving the positioning accuracy of the multi-axis motion device.

[0085] Please further refer to the attached drawings in the specification Figure 5, the third acquisition component 500 specifically includes a first mounting member 501 and a second mounting member 504. Among them, the first mounting member 501 is fixedly arranged on one side of the actuator 400. While using the first mounting member 501 to make real-time feedback on the dynamics of the actuator 400 on the fourth component 200, the first mounting member 501 is also used to provide sufficient installation space and position for relevant sensing elements. In this embodiment, a lateral sensing element 502 and a longitudinal sensing element 503 are respectively arranged on two adjacent side surfaces of the first mounting member 501. The second mounting member 504 is fixedly arranged on the movable member 60 and protrudes longitudinally from the movable member 60, so as to form a structural design of the included angle of the stroke between the second mounting member 504 and the movable member 60. In this way, the second mounting member 504 and the first mounting member 501 are arranged at an interval and oppositely on the side where the longitudinal sensing element 503 is arranged, and the side of the movable member 60 close to the actuator 400 and the first mounting member 501 are arranged at an interval and oppositely on the side where the lateral sensing element 502 is arranged. When the actuator 400 has a longitudinal and / or lateral displacement deviation relative to the third component 30, the sides of the first mounting member 501 where the longitudinal sensing element 503 and the lateral sensing element 502 are respectively arranged can move relative to the second mounting member 504 and the movable member 60 respectively.

[0086] Based on this, by arranging a longitudinal signal processing unit 505 corresponding to the longitudinal sensing element 503 on the second mounting member 504, and a lateral signal processing unit 506 corresponding to the lateral sensing element 502 on the side of the movable member 60 close to the actuator 400, the purpose of collecting the lateral and longitudinal displacement amounts of the actuator 400 on the third component 30 is realized. Furthermore, the first driving component 80 and the second driving component 90 can drive the second component 20 to displace longitudinally and drive the third component 30 to displace laterally according to the corresponding displacement data, so as to compensate for the displacement error of the actuator 400, ensure that the actual positioning coordinates of the actuator 400 match the actual processing coordinates of the multi-axis motion device, and improve the processing accuracy of the device.

[0087] It should be noted that the driving components provided in this embodiment (including but not limited to the first driving component 80, the second driving component 90, the third driving component 300, etc.) can but are not limited to using electric drivers (converting electrical energy into mechanical energy through an electric motor, and the electric motor can but is not limited to a DC motor, an AC motor, a stepping motor or a servo motor, etc. In a multi-axis motion device, the electric driver is usually used in cooperation with transmission components such as a lead screw and a timing belt), hydraulic drivers (converting the pressure energy of a liquid into mechanical energy through a hydraulic pump), pneumatic drivers (converting the pressure energy of a gas into mechanical energy through a pneumatic component), and linear motor drives (based on electromagnetic induction, flattening a rotary motor along the radial direction to achieve linear motion).

[0088] Taking the first driving component 80 as an example, the first driving component 80 generally consists of a power source (stator), a transmission component (rotor), and a control component. The power source is arranged on the first component 10 and provides energy. The transmission component is arranged between the power source and the second component 20 to transmit the energy to the second component 20. The control component is used to adjust and control the movement speed and direction output by the power source, so as to control the specific movement direction and movement speed of the second component 20 in the longitudinal direction.

[0089] In some embodiments, please refer to the accompanying drawings of the specification Figures 6 - 10 , fourth acquisition components 600 are arranged between the two ends of the two first components 10 and the second component 20. The two fourth acquisition components 600 are used to collect the longitudinal displacement data of the two ends of the second component 20 on the two first components 10 respectively in real time.

[0090] In the actual application scenario, the fourth acquisition component 600 can collect the displacement of the second component 20 in the longitudinal direction, ensuring that the displacement of the actuator 400 in the longitudinal direction can generally meet the actual processing requirements of the multi-axis motion device. By arranging the first acquisition component 50 between the support component 40 and the third component 30, the actuator 400 can further compensate for the longitudinal displacement deviation caused by the deformation of the second component 20 on the basis of the above positioning, which is beneficial to verifying whether the actuator 400 accurately reaches the predetermined position and ensuring that the positioning accuracy of the actuator 400 can meet higher processing requirements.

[0091] On the basis of the above structure, fifth acquisition components 700 are further arranged between the opposite ends of the two first components 10 and the support component 40. The fifth acquisition component 700 is configured to collect the displacement of the opposite ends of the support component 40 in the longitudinal direction. According to the above embodiments, it can be understood that the support component 40 is arranged at intervals on the lower side of the second component 20. Therefore, in the actual application scenario, the installation position of the fourth acquisition component 600 is closer to the driving end and the guiding end of the first component 10 and the second component 20, playing the role of system speed loop feedback; while the fifth acquisition component 700 is directly installed on the support component 40. On the basis that the support component 40 is closer to the working surface and the working position of the equipment, the fifth acquisition component 700 can perform the actual position loop feedback of the second component 20, thereby reducing the Abbe error of the measurement system, increasing the bandwidth of the motion axis system, and improving the positioning accuracy of the second component 20.

[0092] Similarly, due to the relationship that the first acquisition component 50 (and the related second acquisition component 70 and third acquisition component 500) are arranged between the support component 40 and the movable component 60, the positions of the above series of acquisition components are also closer to the working surface and working position of the device. At the same time, by comparing and analyzing the displacement amounts collected by the first acquisition component 50 and the second acquisition component 70, the related acquisition components can more accurately identify the error problems caused by the uneven expansion or contraction of the second component 20 due to thermal deformation or other factors, provide more comprehensive displacement information for the actuator 400 at the corresponding position in the corresponding direction, help to identify the deflection or distortion that the second component 20 may occur when heated or stressed, thereby improving the compensation accuracy, enhancing the stability and rigidity of the mechanical system, and reducing the system fluctuations caused by thermal deformation or external force interference.

[0093] As an optional implementation manner, one of the fifth acquisition components 700 can also be configured to acquire the lateral displacement amount of the support component 40. Exemplarily, taking the combination of the grating scale and the reading head mentioned above as an example for the fifth acquisition component 700, the grating scales of the fifth acquisition component 700 are arranged longitudinally and laterally respectively, so that the reading heads corresponding to the two grating scales can acquire the displacement amounts in the corresponding directions when the support component 40 undergoes displacement deformation longitudinally and laterally.

[0094] It should be noted that in the above implementation manner, the reading heads in the fifth acquisition component 700 need to be orthogonally arranged to ensure that the measurement reference is strictly aligned with the movement direction, eliminate the orthogonal coupling error, and improve the multi-dimensional positioning accuracy. In the implementation manner where the fifth acquisition component 700 can further acquire the lateral displacement amount of the support component 40, the multi-axis motion device can more accurately acquire the dynamics of the actuator 400 in the lateral direction. In the actual application scenario, the control unit can further calculate the compensation amount of the third component 30 in the lateral direction according to the relationship between the lateral displacement amount collected by the fifth acquisition component 700 and the lateral displacement amounts collected by the second acquisition component 70 and the sixth acquisition component 800, ensure that the second component 20 and the actuator 400 work according to the predetermined trajectory and motion state, and more accurately identify the displacement deviation caused by thermal deformation or other factors, thereby improving the compensation accuracy.

[0095] Further, the fourth acquisition component 600 includes a fourth sensing element 601 and a fourth signal processing unit 602. Each fourth sensing element 601 is respectively disposed on one side (inner side) of the corresponding first member 10 close to another first member 10. A first bracket 22 extending toward the fourth sensing element 601 is provided on the second member 20 (or the mover of the first drive assembly 80 corresponding to the second member 20). The first bracket 22 is provided with a fourth signal processing unit 602 corresponding to the fourth sensing element 601. The fourth signal processing unit 602 is configured to collect the signal on the fourth sensing element 601 and convert it into a longitudinal displacement amount.

[0096] In one embodiment, as Figures 6 - 10 shown, in order to enable the fifth acquisition component 700 to be stably supported by the multi-axis motion device and facilitate its assembly and maintenance on the first member 10, the first member 10 of this embodiment includes a member body 11 and a fixed seat 12. The first drive assembly 80 (stator) and the fourth acquisition component 600 (fourth sensing element 601) are both disposed on the member body 11. The two fixed seats 12 are respectively disposed on one side (inner side) of the two member bodies 11 close to each other. The fifth acquisition component 700 is disposed between the fixed seat 12 and the end of the supporting member 40.

[0097] Specifically, as Figures 6 - 10 shown, a reference platform 121 extending longitudinally is provided on the fixed seat 12. The reference platform 121 is recessed in the fixed seat 12 to form a groove structure on the inner side of the fixed seat 12. The fifth acquisition component 700 includes a fifth sensing element 701 and a fifth signal processing unit 702. Among them, the fifth sensing element 701 is disposed on the reference platform 121 to improve the protection of the fifth acquisition component 700 to a certain extent. The fifth signal processing unit 702 is disposed at the end of the supporting member 40. It is worth mentioning that in the above embodiment where one of the fifth acquisition components 700 can collect the lateral displacement amount of the supporting member 40, two fifth signal processing units 702 are provided for one of the fifth acquisition components 700. Thus, one fifth signal processing unit 702 is disposed at one end of the supporting member 40, and two fifth signal processing units 702 are disposed at the other end of the supporting member 40, for collecting the longitudinal and lateral displacement amounts of the supporting member 40 through the corresponding fifth sensing elements 701.

[0098] To sum up, the multi-axis motion equipment provided in this embodiment reasonably arranges and allocates the acquisition components between the various motion axis system components to ensure that the positioning between the various motion axis system components can meet the basic accuracy requirements, and further compensates for the offset error caused by the deformation of the second component 20, thereby avoiding the positioning accuracy of the actuator 400 being reduced due to factors such as heating and vibration of the second component 20, so that the multi-axis motion equipment can meet higher precision processing requirements, so that it can be used in more precise semiconductor processing fields.

[0099] In the description herein, it should be understood that the terms "upper", "lower", "left", "right", etc., and other directions or positional relationships are only for the convenience of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0100] In the description of this specification, the description with reference to the terms "an embodiment", "example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example.

[0101] In addition, it should be understood that although this specification is described according to implementation methods, not every implementation method contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation methods that can be understood by those skilled in the art.

[0102] The technical principle of the present invention is described above in conjunction with specific embodiments. These descriptions are only for explaining the principle of the present invention and cannot be interpreted as limiting the scope of protection of the present invention in any way. Based on the explanations herein, those skilled in the art can associate other specific implementations of the present invention without paying creative labor, and these methods will fall within the scope of protection of the present invention.

Claims

1. A multi-axis motion device, characterized in that: include: A base (100), wherein two first components (10) are arranged at intervals on the base (100), and the two first components (10) are both extended in the longitudinal direction; a second member (20), the second member (20) extending in a transverse direction and having two ends thereof respectively disposed on the first member (10) in a longitudinal direction and movable manner through first drive assemblies (80); a third member (30), the third member (30) being movably disposed on the second member (20) in a transverse direction via a second driving assembly (90); A supporting component (40) is arranged at a distance from the second member (20), and opposite ends of the supporting component (40) are respectively connected to the first driving component (80), and a first collecting component (50) is arranged between the supporting component (40) and the third member (30), and the first collecting component is configured to collect the deformation of the second member (20).

2. The multi-axis motion device according to claim 1, characterized in that: The third component (30) can be movably sleeved on the supporting component (40) in the transverse direction via a movable component (60); The first acquisition component (50) comprises a first sensing element (51) and a first signal processing unit (52), wherein the first sensing element (51) is arranged on the supporting component (40) in a transverse direction, and the first signal processing units (52) are provided in a number of at least two, each of which is arranged on the movable component (60) and is spaced apart from each other in a transverse direction, and the first signal processing unit (52) is configured to acquire a signal of the first sensing element (51) and convert it into a longitudinal displacement.

3. The multi-axis motion device according to claim 2, characterized in that: A second acquisition component (70) is also provided between the movable component (60) and the supporting component (40), and the second acquisition component (70) comprises a second sensing element (71) and a second signal processing unit (72); The second sensing element (71) is arranged on an adjacent side of the first sensing element (51) in the lateral direction, the second signal processing unit (72) is arranged on the movable component (60), and the second signal processing unit (72) is configured to collect the signal of the second sensing element (71) and convert it into a lateral displacement.

4. The multi-axis motion device according to claim 3, characterized in that: A sixth collecting component (800) for collecting the lateral displacement of the third component (30) is also provided between the second component (20) and the third component (30).

5. The multi-axis motion device according to claim 1, characterized in that: At least one end of the second member (20) is connected to the first driving assembly (80) via a first flexible member (21); and At least one end of the supporting component (40) is connected to the first driving assembly (80) via a second flexible member (41).

6. The multi-axis motion device according to claim 2, characterized in that: Also includes: a fourth component (200), the fourth component (200) being movably disposed on the third component (30) along a vertical direction via a third driving assembly (300), and an actuator (400) being disposed on the fourth component (200); A third acquisition component (500) is provided between the actuator (400) and the movable component (60), and the third acquisition component (500) is configured to acquire the displacement of the actuator (400) in the longitudinal direction and the transverse direction.

7. The multi-axis motion device according to claim 6, characterized in that: The third acquisition component (500) comprises: A first mounting member (501) is fixedly mounted on one side of the actuator (400), and two adjacent side surfaces of the first mounting member (501) are respectively provided with a transverse sensing element (502) and a longitudinal sensing element (503); a second mounting member (504) fixedly mounted on the movable member (60) and protruding longitudinally from the movable member (60), so that the second mounting member (504) is spaced apart from and arranged opposite to a side of the first mounting member (501) on which the longitudinal sensing element (503) is provided, and a side of the movable member (60) close to the actuator (400) is spaced apart from and arranged opposite to a side of the first mounting member (501) on which the transverse sensing element (502) is provided; The second mounting member (504) is further provided with a longitudinal signal processing unit (505) corresponding to the longitudinal sensing element (503), and a lateral signal processing unit (506) corresponding to the lateral sensing element (502) is provided on a side of the movable component (60) close to the actuator (400).

8. The multi-axis motion device according to claim 1, characterized in that: A fourth collecting assembly (600) is disposed between each of the two first components (10) and the two first driving components (80), and the fourth collecting assembly (600) is configured to collect the longitudinal displacement of the two opposite ends of the second component (20).

9. The multi-axis motion device according to claim 8, characterized in that: A fifth collecting assembly (700) is disposed between the two first members (10) and the opposite ends of the supporting component (40), and the fifth collecting assembly (700) is configured to collect the displacement of the opposite ends of the supporting component (40) in the longitudinal direction; and One of the fifth collecting components (700) is further configured to collect the displacement of the supporting component (40) in the lateral direction.

10. The multi-axis motion device according to claim 9, characterized in that: The first component (10) comprises a component body (11) and a fixing seat (12), and at least part of the first driving component (80) and at least part of the fourth collecting component (600) are both arranged on the component body (11); The two fixing seats (12) are respectively arranged on one side of the two component bodies (11) close to each other, and the fifth collecting assembly (700) is arranged between the fixing seats (12) and the end of the supporting component (40).

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