Soft start vacuum baffle valve

Abstract

The invention discloses a soft start vacuum baffle valve, and relates to the technical field of baffle valves. The device comprises a broaching pipe, a soft drawing pipe, two sets of pneumatic telescopic cylinders and a coaxial pressure storage and pressurization assembly. The valve body adopts two-channel series connection for pressure relief: firstly, micro pressure equalization is performed through the soft pumping pipe, and then complete conduction is performed through the broaching pipe, so that low-impact opening and closing are realized. The telescopic cylinder is in linkage with the rotary sealing ring through the switching valve element, pushing / resetting channels are automatically switched, and synchronous exhaust is achieved. A pressurizing spring-piston plate is arranged in the pressure storage barrel, so that the turbine can be driven by the motor to compress air, and an external air source can be connected to maintain high pressure during power failure. Multi-stage sealing is matched with corrugated pipe compensation, the service life is prolonged, and overpressure slow release and one-way air inlet are ensured through a protective shell and a non-return air supplementing hole. The structure integrates the functions of soft start, dual-energy self-pressurization and self-adaptive exhaust in a coaxial space, differential pressure impact can be remarkably reduced, the sealing service life is prolonged, and the reliability under the power-off working condition is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of baffle valves, and particularly to a soft-start vacuum baffle valve. Background Art

[0002] In occasions highly sensitive to vacuum processes such as semiconductor packaging, precision coating, and aerospace engine tests, vacuum baffle valves are core components for achieving evacuation, isolation, and pressure holding. Most existing mainstream products adopt a single-stage direct-drive piston structure: the valve plate switches between two extreme positions of "fully closed" and "fully open" at once with the aid of a pneumatic (or electro-hydraulic combined) piston to pursue simple structure and fast response speed. However, this design exposes the following two key defects in actual operation: the problem of impact negative pressure and instantaneous pressure difference surge: at the moment when the valve plate is fully open, the pressure difference between the vacuum chamber and the atmospheric side can be balanced within milliseconds, forming a violent pulsed airflow; for process equipment such as lithography machines and molecular beam epitaxy furnaces with a line width of only nanometers, this pulse is sufficient to cause micro-vibration of the wafer stage or secondary suspension of contaminant particles, directly reducing the yield. The coupling of shock waves and vibrations: When the high-speed expanding gas mass propagates in the pipeline, it will be repeatedly reflected at elbows, valve seats, and sealing surfaces, causing local supersonic shock waves and pressure overshoots, which not only erode the sealing ring but also cause high-frequency torsional vibration of the valve plate, shortening the service life of the sealing parts and guiding parts. The combined effect of thermal-mechanical shock: The rapid pressure difference change is accompanied by a sudden increase in the temperature gradient, resulting in a thermal expansion mismatch between the metal valve body and the ceramic coating. After long-term cycling, micro-cracks or coating peeling are likely to occur, increasing the risk of vacuum leakage. Summary of the Invention

[0003] To overcome the defects of the above-mentioned prior art, the present invention provides the following technical solution: a soft-start vacuum baffle valve, including a hole-drilled tube, one end of the hole-drilled tube is fixedly provided with a main body sealing block, and a first connecting nozzle and a second connecting nozzle are fixedly communicated with the outer surface of the hole-drilled tube in the radial direction and the axial direction of the main body sealing block respectively; a soft extraction tube is fixedly communicated with the main body sealing block in the radial direction, a soft extraction ventilation port is fixedly arranged at the connection between the soft extraction tube and the main body sealing block, the soft extraction tube and the main body sealing block are communicated through the soft extraction ventilation port, and the soft extraction tube and the inside of the hole-drilled tube are communicated through a pressure relief port. Wherein, the end faces of the main body sealing block and the soft extraction ventilation port are respectively in contact sealingly provided with a main sealing plate and a soft extraction sealing plate, and pneumatic telescopic cylinders are fixedly provided at the ends of the hole-drilled tube and the soft extraction tube away from the main body sealing block. A piston block is slidably sealed inside the pneumatic telescopic cylinder. The piston blocks in the two pneumatic telescopic cylinders are fixedly provided with the corresponding main sealing plate or soft extraction sealing plate through a mandrel. A corrugated pipe is hermetically sleeved around the outside of the mandrel, a spring is arranged inside the corrugated pipe, and the spring is wound around the outside of the mandrel. The two springs are used to abut the main sealing plate and the soft extraction sealing plate against the corresponding main body sealing block and soft extraction ventilation port.

[0004] Preferably, a driving part is fixedly arranged on the outer side of each pneumatic telescopic cylinder. The driving part includes a reset air pressure pipe and a pushing air pressure pipe which are communicated with the inside of the pneumatic telescopic cylinder. The pushing air pressure pipe is fixedly communicated with the axial position of the pneumatic telescopic cylinder, and the reset air pressure pipe is fixedly communicated with the radial position of the outer surface of the pneumatic telescopic cylinder. The pushing air pressure pipe and the reset air pressure pipe are used for supplying gas into the pneumatic telescopic cylinder to drive the piston block to slide on the inner wall of the pneumatic telescopic cylinder.

[0005] Preferably, the pushing air pressure pipe and the reset air pressure pipe are communicated through a switching valve body. An input air pressure pipe is also communicated with the switching valve body. The pushing air pressure pipe, the reset air pressure pipe and the input air pressure pipe meet at the switching valve body, and the axes of the pushing air pressure pipe, the reset air pressure pipe and the input air pressure pipe at the intersection of the switching valve body are in a T shape; a switching valve core is rotationally sealed on the inner wall of the switching valve body, and a T-shaped flow channel is arranged inside the switching valve core. The T-shaped flow channel is used for communicating the input air pressure pipe with the inside of the pushing air pressure pipe or the reset air pressure pipe.

[0006] Preferably, the input air pressure pipes in the two driving parts are communicated through a tee pressure dividing pipeline, and electric valves are serially installed on the connection paths of the tee pressure dividing pipeline and the two input air pressure pipes. The other end of the tee pressure dividing pipeline is communicated with the bottom inside a gas storage barrel arranged outside the hole-drilling pipe through a gas storage barrel exhaust pipe, wherein the gas storage barrel is coaxially matched with the hole-drilling pipe; the driving part further includes a protective shell sleeved on the outer side of the pneumatic telescopic cylinder. A plurality of ventilation and pressure relief holes are arranged on the circumferential surface of the protective shell, and the input air pressure pipe extends to the outside of the protective shell.

[0007] Preferably, a third exhaust hole and a fourth exhaust hole are respectively arranged on the circumferential surfaces of the reset air pressure pipe and the pushing air pressure pipe. A second sealing collar and a first sealing collar are respectively rotationally sealed on the circumferential surfaces of the pushing air pressure pipe and the reset air pressure pipe. A second exhaust hole capable of being aligned with the fourth exhaust hole is arranged on the second sealing collar, and a first exhaust hole capable of being aligned with the third exhaust hole is arranged on the first sealing collar; a first gearbox and a second gearbox are also fixedly installed on the switching valve body. The output shaft of the first gearbox passes through the switching valve body and is fixedly matched with the switching valve core. A first gear is fixedly installed on the output shaft of the second gearbox. The first gear is meshed and driven with the first sealing collar. A third gear is fixedly installed on the input shaft of the second gearbox. A second gear is fixedly installed on the input shaft of the first gearbox. The second gear and the third gear are meshed and driven with the second sealing collar; a gear support is fixedly sleeved on the outer surface of the pushing air pressure pipe. The gear support is rotationally matched with the second gear, the third gear and the second sealing collar. A switching motor is fixedly installed on the gear support. The output shaft of the switching motor is fixedly matched with the input shaft of the first gearbox. The transmission directions between the output shaft and the input shaft of the second gearbox are opposite, and the transmission ratio is 1:1.

[0008] Preferably, a pneumatic pressure increasing piston plate is slidably and sealingly installed on the inner wall of the gas pressure storage barrel. A pressure increasing spring is fixedly installed between the pneumatic pressure increasing piston plate and the top of the inner wall of the gas pressure storage barrel. A plurality of air supplement holes are formed at the bottom of the gas pressure storage barrel. A check valve sealing piece is sealingly contacted and arranged at each air supplement hole. The check valve sealing piece is elastically matched with the bottom of the inner wall of the gas pressure storage barrel through a spring piece, so as to always make the check valve sealing piece seal and fit with the bottom surface of the inner wall of the gas pressure storage barrel, realizing the one-way flow of gas. Only allow gas to enter the gas pressure storage barrel from the outside of the gas pressure storage barrel.

[0009] Preferably, a pressure applying shell coaxial with the gas pressure storage barrel is fixedly installed on the outer surface of the gas pressure storage barrel. A pressure increasing turbine is rotatably installed inside the pressure applying shell. A pressure applying shell air inlet is formed on one side of the pressure applying shell away from the gas pressure storage barrel. A pull hole pipe, one of the protective shells and the gas pressure storage barrel are fixedly connected through a driving motor bracket. And a driving motor is also fixedly installed on the driving motor bracket. The output of the driving motor passes through the pressure applying shell and is fixedly matched with the pressure increasing turbine.

[0010] Preferably, an auxiliary pneumatic driving shell is fixedly installed on the pressure applying shell. The inside of the auxiliary pneumatic driving shell is communicated with the inside of the pressure applying shell through the pressure applying shell air inlet. And the pressure applying shell air inlet is arranged at the axis position of the pressure applying shell and the auxiliary pneumatic driving shell. A plurality of centrifugal driving disks arranged at equal intervals along the axial direction of the auxiliary pneumatic driving shell are rotatably installed inside the auxiliary pneumatic driving shell. All the centrifugal driving disks are fixedly installed on a rotating shaft. The rotating shaft is fixedly matched with the pressure increasing turbine. An edge air inlet channel is fixedly communicated at the tangential position of the outer surface of the auxiliary pneumatic driving shell.

[0011] Preferably, a central ventilation hole is formed at the center position of each centrifugal driving disk. All the central ventilation holes are communicated with each other. A plurality of central air inlet channel openings are formed at the axial position of the outer surface of the auxiliary pneumatic driving shell. All the central air inlet channel openings are communicated with the central ventilation holes.

[0012] The present invention has the following beneficial effects compared with the prior art: (1) Through the two-stage series pressure relief strategy of the soft extraction tube - main body tube, the valve plate transitions from micro-gap pressure equalization to full-open conduction. The process is precisely throttled and controlled by the switching valve core and the double-sealing sleeve ring, weakening the peak dynamic pressure of the pulsed air flow. At the same time, the pressure gradient decreases nearly linearly, significantly reducing the probability of shock wave reflection and particle secondary suspension, providing a stable pneumatic environment for ultra-clean processes such as lithography machines and magnetron sputtering; (2) The present invention integrates two independent pressurization paths of motor - turbocharging and external air pump drive in the coaxial space, supplemented by a spring - piston energy storage mechanism. It can still work normally for a period of time without external power input; (3) The first and second sealing sleeve rings of the present invention are mechanically synchronized with the switching valve core through a double gearbox, ensuring that one exhaust channel is aligned and the other is closed at any valve position, avoiding the remaining gas retention caused by the traditional fixed exhaust port. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0014] Figure 2 It is a schematic diagram of the structure at the central ventilation hole of the present invention.

[0015] Figure 3 It is a schematic diagram of the structure of the auxiliary pneumatic drive housing of the present invention.

[0016] Figure 4 It is a schematic diagram of the structure of the gas pressure storage barrel of the present invention.

[0017] Figure 5 It is a schematic diagram of the structure of the exhaust pipe of the gas pressure storage barrel of the present invention.

[0018] Figure 6 It is a schematic diagram of the structure at the drawing hole tube of the present invention.

[0019] Figure 7 It is a schematic diagram of the structure of the sealing sleeve ring of the present invention.

[0020] Figure 8 It is a schematic diagram of the structure of the switching valve body of the present invention.

[0021] Figure 9 It is a schematic diagram of the structure of the T-shaped flow channel of the present invention.

[0022] In the figure: 101 - pneumatic telescopic cylinder; 102 - piston block; 103 - main seal plate; 104 - hole-drilling pipe; 105 - first connecting nozzle; 106 - second connecting nozzle; 107 - main body seal block; 108 - pressure relief port; 109 - soft extraction seal plate; 110 - soft extraction ventilation port; 111 - mandrel; 112 - bellows; 113 - three-way pressure-dividing pipeline; 114 - electric valve; 115 - soft extraction pipe; 201 - protective housing; 202 - ventilation and pressure relief hole; 203 - driving air pressure pipe; 204 - switching valve body; 205 - reset air pressure pipe; 206 - input air pressure pipe; 207 - first gearbox; 208 - second gearbox; 209 - first gear; 210 - first sealing collar; 211 - first exhaust hole; 212 - second sealing collar; 213 - second exhaust hole; 214 - second gear; 215 - third gear; 216 - gear support; 217 - switching motor; 218 - third exhaust hole; 219 - switching valve core; 220 - fourth exhaust hole; 221 - T-shaped flow channel; 301 - gas pressure storage barrel; 302 - air replenishing hole; 303 - check valve seal piece; 304 - pressure-applying shell; 305 - supercharging turbine; 306 - driving motor; 307 - driving motor support; 308 - rotating shaft; 309 - supercharging spring; 310 - auxiliary pneumatic driving shell; 311 - centrifugal driving disc; 312 - central ventilation hole; 313 - edge air intake channel; 314 - gas pressure storage barrel exhaust pipe; 315 - pressure-applying shell air intake port; 316 - air pressure supercharging piston plate; 317 - central air intake channel port. Detailed implementation manners

[0023] The following is combined with the attached Figures 1-9 drawings, and the technical solutions of the present invention will be further described through specific implementation manners.

[0024] The present invention provides a soft-start vacuum baffle valve, which includes a hole-drilled tube 104. One end of the hole-drilled tube 104 is fixedly provided with a main body sealing block 107. A first connecting nozzle 105 and a second connecting nozzle 106 are fixedly and communicatively provided on the radial direction of the outer surface of the hole-drilled tube 104 and the axial direction of the main body sealing block 107 respectively; a soft extraction tube 115 is fixedly and communicatively provided in the radial direction of the main body sealing block 107. A soft extraction ventilation port 110 is fixedly provided at the connection between the soft extraction tube 115 and the main body sealing block 107. The soft extraction tube 115 and the main body sealing block 107 are communicatively provided through the soft extraction ventilation port 110. The soft extraction tube 115 and the inside of the hole-drilled tube 104 are communicatively provided through a pressure relief port 108. Wherein the end faces of the main body sealing block 107 and the soft extraction ventilation port 110 are respectively in contact sealingly provided with a main sealing plate 103 and a soft extraction sealing plate 109. One end of the hole-drilled tube 104 away from the main body sealing block 107 and one end of the soft extraction tube 115 away from the main body sealing block 107 are both fixedly provided with pneumatic telescopic cylinders 101. A piston block 102 is slidably and sealingly provided inside the pneumatic telescopic cylinders 101. The piston blocks 102 in the two pneumatic telescopic cylinders 101 are fixedly provided with the corresponding main sealing plate 103 or soft extraction sealing plate 109 through a core shaft 111. A corrugated tube 112 is sealingly sleeved around the outside of the core shaft 111. A spring is provided inside the corrugated tube 112. The spring is wound around the outside of the core shaft 111. The two springs are used to make the main sealing plate 103 and the soft extraction sealing plate 109 abut against the corresponding main body sealing block 107 and soft extraction ventilation port 110. A driving part is fixedly provided on the outside of each pneumatic telescopic cylinder 101. The driving part includes a reset air pressure tube 205 and a push air pressure tube 203 which are communicatively provided with the inside of the pneumatic telescopic cylinder 101. Wherein the push air pressure tube 203 is fixedly and communicatively provided with the axial position of the pneumatic telescopic cylinder 101, and the reset air pressure tube 205 is fixedly and communicatively provided with the radial position of the outer surface of the pneumatic telescopic cylinder 101. The push air pressure tube 203 and the reset air pressure tube 205 are used to supply gas into the pneumatic telescopic cylinder 101 for driving the piston block 102 to slide on the inner wall of the pneumatic telescopic cylinder 101.

[0025] A communication connection is provided between the push air pressure pipe 203 and the reset air pressure pipe 205 through the switching valve body 204. An input air pressure pipe 206 is also communicatively connected to the switching valve body 204. The push air pressure pipe 203, the reset air pressure pipe 205, and the input air pressure pipe 206 meet at the switching valve body 204, and the axes of the push air pressure pipe 203, the reset air pressure pipe 205, and the input air pressure pipe 206 at the junction of the switching valve body 204 form a T shape. A switching valve core 219 is rotatably and sealingly arranged on the inner wall of the switching valve body 204. A T-shaped flow channel 221 is formed inside the switching valve core 219 for communicating the input air pressure pipe 206 with the inside of the push air pressure pipe 203 or the reset air pressure pipe 205. The input air pressure pipes 206 in the two driving parts are communicatively connected through a tee pressure dividing pipe 113. Electric valves 114 are serially installed on the connection paths of the tee pressure dividing pipe 113 and the two input air pressure pipes 206. The other end of the tee pressure dividing pipe 113 is communicatively connected to the bottom inside a gas storage tank 301 arranged outside the hole punching pipe 104 through a gas storage tank exhaust pipe 314, where the gas storage tank 301 is coaxially fitted with the hole punching pipe 104. The driving part further includes a protective housing 201 sleeved outside the pneumatic telescopic cylinder 101. A plurality of ventilation and pressure relief holes 202 are formed on the circumferential surface of the protective housing 201, and the input air pressure pipe 206 extends outside the protective housing 201. Third exhaust holes 218 and fourth exhaust holes 220 are respectively formed on the circumferential surfaces of the reset air pressure pipe 205 and the push air pressure pipe 203. Second sealing collar rings 212 and first sealing collar rings 210 are respectively rotatably and sealingly sleeved on the circumferential surfaces of the push air pressure pipe 203 and the reset air pressure pipe 205. Second exhaust holes 213 capable of aligning with the fourth exhaust holes 220 are formed on the second sealing collar rings 212, and first exhaust holes 211 capable of aligning with the third exhaust holes 218 are formed on the first sealing collar rings 210. A first gearbox 207 and a second gearbox 208 are fixedly installed on the switching valve body 204. The output shaft of the first gearbox 207 passes through the switching valve body 204 and is fixedly fitted with the switching valve core 219. A first gear 209 is fixedly installed on the output shaft of the second gearbox 208, and the first gear 209 meshes and drives with the first sealing collar ring 210. A third gear 215 is fixedly installed on the input shaft of the second gearbox 208, and a second gear 214 is fixedly installed on the input shaft of the first gearbox 207. The second gear 214 and the third gear 215 are meshed and drive with the second sealing collar ring 212. A gear support 216 is fixedly sleeved on the outer surface of the push air pressure pipe 203. The gear support 216 is rotatably fitted with the second gear 214, the third gear 215, and the second sealing collar ring 212. A switching motor 217 is fixedly installed on the gear support 216, and the output shaft of the switching motor 217 is fixedly fitted with the input shaft of the first gearbox 207. The transmission direction between the output shaft and the input shaft of the second gearbox 208 is opposite, and the transmission ratio is 1:1.

[0026] A gas storage and pressure barrel 301 is slidably and sealedly installed with a pneumatic pressure boosting piston plate 316 on its inner wall. A boosting spring 309 is fixedly installed between the pneumatic pressure boosting piston plate 316 and the top of the inner wall of the gas storage and pressure barrel 301. The bottom of the gas storage and pressure barrel 301 is provided with a plurality of air supplement holes 302. A check valve sealing piece 303 is hermetically contacted and arranged at each air supplement hole 302. The check valve sealing piece 303 is elastically matched with the bottom of the inner wall of the gas storage and pressure barrel 301 through a spring piece, so as to make the check valve sealing piece 303 always be hermetically attached to the bottom surface of the inner wall of the gas storage and pressure barrel 301, realizing the one-way flow of gas. Only allow gas to enter the inside of the gas storage and pressure barrel 301 from the outside of the gas storage and pressure barrel 301. A pressure application shell 304 coaxially arranged with the gas storage and pressure barrel 301 is fixedly installed on the outer surface of the gas storage and pressure barrel 301. A boosting turbine 305 is rotatably installed inside the pressure application shell 304. A pressure application shell air inlet 315 is opened on one side of the pressure application shell 304 away from the gas storage and pressure barrel 301. A pulling hole pipe 104, one of the protective shells 201 and the gas storage and pressure barrel 301 are fixedly connected through a driving motor bracket 307, and a driving motor 306 is also fixedly installed on the driving motor bracket 307. The output of the driving motor 306 passes through the pressure application shell 304 and is fixedly matched with the boosting turbine 305. An auxiliary pneumatic driving shell 310 is fixedly installed on the pressure application shell 304. The inside of the auxiliary pneumatic driving shell 310 is communicated with the inside of the pressure application shell 304 through the pressure application shell air inlet 315, and the pressure application shell air inlet 315 is arranged at the axial position of the pressure application shell 304 and the auxiliary pneumatic driving shell 310. A plurality of centrifugal driving disks 311 arranged at equal intervals along the axial direction of the auxiliary pneumatic driving shell 310 are rotatably installed inside the auxiliary pneumatic driving shell 310. All the centrifugal driving disks 311 are fixedly installed on a rotating shaft 308. The rotating shaft 308 is fixedly matched with the boosting turbine 305. An edge air inlet channel 313 is fixedly communicated at the tangential position of the outer surface of the auxiliary pneumatic driving shell 310. A central ventilation hole 312 is opened at the center position of each centrifugal driving disk 311. All the central ventilation holes 312 are communicated through. A plurality of central air inlet channel openings 317 are opened at the axial position of the outer surface of the auxiliary pneumatic driving shell 310. All the central air inlet channel openings 317 are communicated with the central ventilation holes 312.

[0027] The working principle of a soft-start vacuum baffle valve disclosed by the present invention is as follows: The first connecting nozzle 105 and the second connecting nozzle 106 are serially installed in the vacuum pipeline to be cut off and controlled. First, control the pneumatic telescopic cylinder 101 at the soft extraction pipe 115. At this time, one electric valve 114 near the soft extraction pipe 115 is in the open state, and the other electric valve 114 is in the closed state. Then, the high-pressure gas inside the gas storage pressure barrel 301 (by squeezing the air pressure booster piston plate 316 through the booster spring 309, and the air pressure booster piston plate 316 squeezes the air inside the gas storage pressure barrel 301 to form high pressure) will pass through the gas storage pressure barrel exhaust pipe 314, the three-way pressure dividing pipeline 113, the input air pressure pipe 206, the switching valve body 204, the T-shaped flow channel 221, the reset air pressure pipe 205, and then enter the pneumatic telescopic cylinder 101 (at this time, the position of the T-shaped flow channel 221 inside the switching valve body 204 is such that the input air pressure pipe 206 and the reset air pressure pipe 205 are connected), pushing the piston block 102 to slide inside the pneumatic telescopic cylinder 101. This process overcomes the elastic force of the spring, separating the soft extraction sealing plate 109 from the soft extraction air vent 110. At this time, the pressure at the second connecting nozzle 106 will enter the hole-drilled pipe 104 through the soft extraction air vent 110 and the pressure relief port 108, and then be transmitted into the first connecting nozzle 105 to achieve a small amount of pressure release. Then, control the corresponding pneumatic telescopic cylinder 101 at the hole-drilled pipe 104 to open one electric valve 114 far from the soft extraction pipe 115 and close the electric valve 114 near the soft extraction pipe 115. At this time, the piston block 102 inside the other pneumatic telescopic cylinder 101 will also slide inside the pneumatic telescopic cylinder 101, and then pull the main sealing plate 103 away from the main body sealing block 107 through the mandrel 111, and then let the air pressure enter the first connecting nozzle 105 through the second connecting nozzle 106 and the hole-drilled pipe 104. At this time, the two electric valves 114 can also be opened simultaneously, so that the sliding states of the piston blocks 102 inside the two pneumatic telescopic cylinders 101 can be controlled simultaneously.

[0028] The sliding direction of the piston block 102 inside the pneumatic telescopic cylinder 101 needs to be controlled by switching the motor 217. The output shaft of the switching motor 217 drives the input shaft of the first transmission 207 and the second gear 214 to rotate. The output shaft of the first transmission 207 drives the T-shaped flow channel 221 inside the switching valve body 204 to rotate, thereby switching the input air pressure pipe 206 to communicate with the reset air pressure pipe 205 or the push air pressure pipe 203, and changing the transmission path of the air pressure. The rotation of the second gear 214 drives the rotation of the second sealing collar 212. The rotation of the second sealing collar 212 drives the rotation of the third gear 215. The rotation of the third gear 215 drives the rotation of the input shaft of the second transmission 208. The output shaft of the second transmission 208 drives the rotation of the first gear 209. The first gear 209 drives the rotation of the first sealing collar 210. Among them, the rotation angles of the first sealing collar 210 and the second sealing collar 212 are the same, but the rotation directions are different. For example, when the input air pressure pipe 206 is communicated with the reset air pressure pipe 205, at this time, the first exhaust hole 211 on the first sealing collar 210 and the third exhaust hole 218 on the reset air pressure pipe 205 are in a staggered state, and the second exhaust hole 213 on the second sealing collar 212 and the fourth exhaust hole 220 on the push air pressure pipe 203 are in an aligned state. In this way, the air compressed by the piston block 102 inside the pneumatic telescopic cylinder 101 will be discharged through the push air pressure pipe 203, the fourth exhaust hole 220, and the second exhaust hole 213.

[0029] The pressure inside the gas pressure storage barrel 301 is provided by starting the drive motor 306. The output shaft of the drive motor 306 drives the supercharging turbine 305 inside the pressure application shell 304 to rotate. The rotation of the supercharging turbine 305 drives the external air to enter the pressure application shell 304 through the pressure application shell air inlet 315, and then follows the rotation of the supercharging turbine 305. Under the action of centrifugal force, it is thrown to the edge of the inner wall of the pressure application shell 304, and then enters the gas pressure storage barrel 301 through the air supplement hole 302, and then squeezes the air pressure supercharging piston plate 316 to slide inside the gas pressure storage barrel 301, compressing the supercharging spring 309 to store the air energy (when there is no power, the device can still work normally for a period of time). In this process, the check valve sealing piece 303 will be pushed open by the air flow under the action of the pressure difference. Specifically, the external air enters the auxiliary pneumatic drive shell 310 through the edge air inlet channel 313 and the central air inlet channel opening 317, and then enters the pressure application shell air inlet 315 through the gaps of the multiple centrifugal drive disks 311, and then enters the pressure application shell 304.

[0030] When there is no electricity in the usage environment, pneumatic drive can also be used. Connect the air pipe to the edge air intake channel 313. The air entering the inside of the auxiliary pneumatic drive housing 310 through the edge air intake channel 313 enters along the tangential direction of the auxiliary pneumatic drive housing 310. Therefore, the air flow will drive the centrifugal drive disk 311 to rotate through viscous force. The power of the rotation of the centrifugal drive disk 311 will be transmitted to the supercharger turbine 305 through the rotating shaft 308, and then drive the supercharger turbine 305 to rotate. It will also drive the rotation of the rotor of the drive motor 306 (if a storage battery is set, the passive rotation of the rotor of the drive motor 306 can be used to charge the storage battery). At this time, through the combined action of an external air pump and the supercharger turbine 305, the gas will also be squeezed into the gas pressure storage barrel 301 to provide a gas source. During this process, a part of the air entering the inside of the auxiliary pneumatic drive housing 310 will also be discharged through the central air intake channel opening 317, and the other part will enter the pressure housing 304 through the pressure housing air intake 315. At the same time, when the gas entering the inside of the auxiliary pneumatic drive housing 310 drives the centrifugal drive disk 311 to rotate, the rotation of the centrifugal drive disk 311 will also react on the air molecules through viscous force. At this time, it will also drive the air molecules to rotate, thereby causing the air molecules to generate a centrifugal force away from the direction of the rotating shaft 308. This will cause the air path flowing from the edge air intake channel 313 to the rotating shaft 308 to be extended (assuming that the centrifugal drive disk 311 does not rotate, the gas flow path is close to a straight line, and when the centrifugal drive disk 311 rotates, due to the action of the centrifugal force, the gas flow path changes from a straight line to a spiral arc). This will result in more air molecules coming into contact with the surface of the centrifugal drive disk 311, thereby increasing the transfer efficiency of the air applied to the centrifugal drive disk 311, and further increasing the rotation speed of the centrifugal drive disk 311 (the air flow between two adjacent centrifugal drive disks 311 will eventually converge at the rotating shaft 308 and is connected through the central ventilation hole 312).

Claims

1. A soft-start vacuum baffle valve, characterized in that: The invention comprises a hole pulling tube (104), one end of which is fixedly provided with a main body sealing block (107), and a first connecting nozzle (105) and a second connecting nozzle (106) are respectively fixedly provided in communication with the radial direction of the outer surface of the hole pulling tube (104) and the axial direction of the main body sealing block (107); a soft suction tube (115) is fixedly provided in communication with the main body sealing block (107) in the radial direction, and a soft suction vent (110) is fixedly provided at the connection between the soft suction tube (115) and the main body sealing block (107); the soft suction tube (115) and the main body sealing block (107) are connected via the soft suction vent (110), and the soft suction tube (115) and the inside of the hole pulling tube (104) are connected via a pressure relief port (108), wherein the end surfaces of the main body sealing block (107) and the soft suction vent (110) are respectively contacted and sealed with a main sealing plate ( A pneumatic telescopic cylinder (101) is fixedly provided at one end of the hole pulling tube (104) away from the main body sealing block (107) and at one end of the soft pumping tube (115) away from the main body sealing block (107). A piston block (102) is provided inside the pneumatic telescopic cylinder (101) for sliding sealing. The piston blocks (102) in the two pneumatic telescopic cylinders (101) are fixedly provided with the corresponding main sealing plate (103) or the soft pumping sealing plate (109) through a mandrel (111). A bellows (112) is provided around the sealing sleeve on the outside of the mandrel (111). A spring is provided on the inside of the bellows (112). The spring is surrounded on the outside of the mandrel (111). The two springs are used to make the main sealing plate (103) and the soft pumping sealing plate (109) contact with the corresponding main body sealing block (107) and the soft pumping vent (110).

2. A soft start vacuum baffle valve according to claim 1, characterized in that: A driving unit is fixedly provided on the outside of each pneumatic telescopic cylinder (101), the driving unit comprising a reset air pressure tube (205) and a pushing air pressure tube (203) which are arranged in communication with the inside of the pneumatic telescopic cylinder (101), wherein the pushing air pressure tube (203) is fixedly connected with the axial position of the pneumatic telescopic cylinder (101), and the reset air pressure tube (205) is fixedly connected with the radial position of the outer surface of the pneumatic telescopic cylinder (101), and the pushing air pressure tube (203) and the reset air pressure tube (205) are used to supply gas into the pneumatic telescopic cylinder (101) to drive the piston block (102) to slide on the inner wall of the pneumatic telescopic cylinder (101).

3. A soft start vacuum baffle valve according to claim 2, characterized in that: The pushing air pressure tube (203) and the resetting air pressure tube (205) are connected via a switching valve body (204); an input air pressure tube (206) is also connected to the switching valve body (204); the pushing air pressure tube (203), the resetting air pressure tube (205), and the input air pressure tube (206) intersect at the switching valve body (204); and the axes of the pushing air pressure tube (203), the resetting air pressure tube (205), and the input air pressure tube (206) at the intersection of the switching valve body (204) are in a T-shape; a switching valve core (219) is provided on the inner wall of the switching valve body (204) as a rotary seal; a T-shaped flow channel (221) is provided inside the switching valve core (219); the T-shaped flow channel (221) is used to connect the input air pressure tube (206) with the inside of the pushing air pressure tube (203) or the resetting air pressure tube (205).

4. A soft-start vacuum baffle valve according to claim 3, characterized in that: The input air pressure pipes (206) in the two driving parts are connected via a three-way pressure-dividing pipe (113), and an electric valve (114) is installed in series on the connection path between the three-way pressure-dividing pipe (113) and the two input air pressure pipes (206). The other end of the three-way pressure-dividing pipe (113) is connected to the bottom of the gas pressure storage barrel (301) arranged outside the hole-pulling pipe (104) via a gas pressure storage barrel exhaust pipe (314), wherein the gas pressure storage barrel (301) and the hole-pulling pipe (104) are coaxially matched. The driving unit further comprises a protective shell (201) sleeved on the outside of the pneumatic telescopic cylinder (101), wherein a plurality of ventilation and pressure relief holes (202) are provided on the upper circumferential surface of the protective shell (201), wherein the air pressure input pipe (206) extends to the outside of the protective shell (201).

5. A soft-start vacuum baffle valve according to claim 4, characterized in that: A third exhaust hole (218) and a fourth exhaust hole (220) are respectively provided on the circumferential surfaces of the reset air pressure tube (205) and the push air pressure tube (203), wherein a second sealing ring (212) and a first sealing ring (210) are respectively provided on the circumferential surfaces of the push air pressure tube (203) and the reset air pressure tube (205), wherein the second sealing ring (212) is provided with a second exhaust hole (213) which can be aligned with the fourth exhaust hole (220), and the first sealing ring (210) is provided with a first exhaust hole (211) which can be aligned with the third exhaust hole (218); A first gearbox (207) and a second gearbox (208) are also fixedly mounted on the switching valve body (204), wherein the output shaft of the first gearbox (207) passes through the switching valve body (204) and is fixedly matched with the switching valve core (219), a first gear (209) is fixedly mounted on the output shaft of the second gearbox (208), and the first gear (209) is meshed with the first sealing ring (210) for transmission, a third gear (215) is fixedly mounted on the input shaft of the second gearbox (208), and a third gear (215) is fixedly mounted on the input shaft of the first gearbox (207). A second gear (214) is provided, and the second gear (214) and the third gear (215) are meshed with the second sealing ring (212) for transmission; a gear bracket (216) is fixedly sleeved on the outer surface of the push air pressure tube (203), and the gear bracket (216) is rotationally matched with the second gear (214), the third gear (215), and the second sealing ring (212); a switching motor (217) is fixedly installed on the gear bracket (216), and the output shaft of the switching motor (217) is fixedly matched with the input shaft of the first gearbox (207).

6. A soft-start vacuum baffle valve according to claim 5, characterized in that: An air pressure boosting piston plate (316) is installed in a sliding seal on the inner wall of the gas pressure storage barrel (301); a boosting spring (309) is fixedly installed between the air pressure boosting piston plate (316) and the top of the inner wall of the gas pressure storage barrel (301); a plurality of air replenishing holes (302) are opened at the bottom of the gas pressure storage barrel (301); each air replenishing hole (302) is provided with a non-return sealing sheet (303) in sealing contact; the non-return sealing sheet (303) is elastically matched with the bottom of the inner wall of the gas pressure storage barrel (301) through a spring sheet, so that the non-return sealing sheet (303) is always in sealing contact with the bottom surface of the inner wall of the gas pressure storage barrel (301), thereby realizing one-way flow of gas.

7. A soft-start vacuum baffle valve according to claim 6, characterized in that: A pressure shell (304) coaxially arranged with the gas pressure storage barrel (301) is fixedly mounted on the outer surface of the gas pressure storage barrel (301), a supercharging turbine (305) is rotatably mounted inside the pressure shell (304), a pressure shell air inlet (315) is provided on a side of the pressure shell (304) away from the gas pressure storage barrel (301), the hole pulling tube (104), one of the protective shells (201) and the gas pressure storage barrel (301) are fixedly connected via a driving motor bracket (307), and a driving motor (306) is also fixedly mounted on the driving motor bracket (307), and the output of the driving motor (306) passes through the pressure shell (304) and is fixedly matched with the supercharging turbine (305).

8. A soft-start vacuum baffle valve according to claim 7, characterized in that: An auxiliary pneumatic drive shell (310) is fixedly mounted on the pressure shell (304); the interior of the auxiliary pneumatic drive shell (310) is connected to the interior of the pressure shell (304) via a pressure shell air inlet (315); and the pressure shell air inlet (315) is arranged at an axial position of the pressure shell (304) and the auxiliary pneumatic drive shell (310); a plurality of centrifugal drive disks (311) arranged in an equidistant array along the axial direction of the auxiliary pneumatic drive shell (310) are rotatably mounted inside the auxiliary pneumatic drive shell (310); all the centrifugal drive disks (311) are fixedly mounted on a rotating shaft (308); the rotating shaft (308) is fixedly matched with the supercharger turbine (305); and an edge air inlet channel (313) is fixedly connected and arranged at a tangent position on the outer surface of the auxiliary pneumatic drive shell (310).

9. A soft-start vacuum baffle valve according to claim 8, characterized in that: A central vent hole (312) is provided at the center of each centrifugal drive disk (311), and all the central vent holes (312) are connected to each other. A plurality of central air inlet channel openings (317) are provided at an axial position on the outer surface of the auxiliary pneumatic drive housing (310), and all the central air inlet channel openings (317) are connected to the central vent holes (312).

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