Chemical heating equipment for semiconductor processing

Abstract

The invention relates to the field of semiconductor production, and discloses semiconductor processing chemical heating equipment which comprises a base, a pedestal is fixedly mounted on the left side of the upper surface of the base, heating shells are fixedly mounted on the right side of the upper surface of the base and the upper surface of the pedestal, and container mechanisms are arranged in the middles of the two heating shells. A first guide pipe fixedly sleeves the middle of the front side of the curved surface of the left heating shell, a reversing mechanism is arranged at the right end of the first guide pipe and arranged on the front side of the middle of the upper surface of the base, and a second guide pipe fixedly sleeves the left side of the back of the reversing mechanism. A chemical agent for exothermic reaction is poured into an inner cavity of a left container mechanism, so that the temperature of heat conduction liquid between a left heating shell and the left container mechanism is increased, and meanwhile, a chemical agent for endothermic reaction is poured into an inner cavity of a right container mechanism, so that the temperature of heat conduction liquid between a right heating shell and the right container mechanism is reduced; therefore, the problem that existing chemical heating, refrigerating and mixing equipment is high in energy consumption is solved.

Description

Technical Field

[0001] This application relates to the field of semiconductor production technology, and particularly to a chemical heating device for semiconductor processing. Background Art

[0002] In the semiconductor manufacturing process, many process steps require chemical processing with precise temperature control, such as lithography, etching, and deposition. To ensure that these chemical processes can be carried out under optimal conditions, specially designed chemical heating and equipment are usually required. The main function of such equipment is to maintain the optimal reaction conditions of chemicals by precisely controlling the temperature, thereby improving production efficiency and product quality.

[0003] The chemical heating equipment used in the existing semiconductor processing usually relies on electric heating, infrared heating, or microwave heating technology when dealing with the endothermic reaction of chemical agents, and uses a refrigeration device or a method of endothermic chemical reaction to cool down when dealing with the exothermic reaction. These methods all consume a large amount of energy. In addition, to ensure that the chemical agent reaction liquid can be evenly mixed to promote the reaction efficiency and effect, the existing technology generally uses a motor-driven stirring device to achieve the mixing process, which also requires an additional significant energy consumption. In view of the above background, the main challenge faced by the current technology is how to reduce energy consumption while ensuring the high efficiency and uniformity of the chemical agent reaction. Especially in the heating and cooling stages and the mixing operation, finding a more energy-efficient and efficient solution has become an urgent problem in this field. Summary of the Invention

[0004] This application proposes a chemical heating device for semiconductor processing, which has the advantages of high efficiency and energy saving, and is used to solve the problem of large energy consumption of existing chemical heating, refrigeration, and mixing equipment.

[0005] To achieve the above object, the present application adopts the following technical solutions: A chemical heating device for semiconductor processing, including a base, on the upper surface of the left side of the base is fixedly installed a pedestal, on the upper surface of the right side of the base and on the upper surface of the pedestal are fixedly installed heating shells, in the middle of both of the heating shells is provided a container mechanism, in the middle of the front side of the curved surface of the left heating shell is fixedly sleeved a first conduit, at the right end of the first conduit is provided a commutation mechanism, the commutation mechanism is arranged on the front side of the middle of the upper surface of the base, on the left side behind the commutation mechanism is fixedly sleeved a second conduit, the right side of the second conduit is fixedly sleeved at the bottom of the front side of the curved surface of the right heating shell, on the right side behind the commutation mechanism is fixedly sleeved a third conduit, at the rear end of the third conduit is provided an exchange mechanism, on the upper part of the left side of the curved surface of the right heating shell is fixedly sleeved a second discharge pipe, the left side of the second discharge pipe is arranged in the middle of the right side of the exchange mechanism, at the bottom behind the exchange mechanism is provided a fourth conduit, at the top of the fourth conduit is provided a valve mechanism, on the left side of the valve mechanism is provided a fifth conduit, the front end of the fifth conduit is fixedly sleeved on the upper part of the front heating shell.

[0006] Preferably, the heating shell includes an electric heating ring, the electric heating ring is fixedly connected to the bottom of the inner cavity of the heating shell, in the middle of the bottom surface of the inner cavity of the heating shell is fixedly installed a partition block, on the inner curved surface of the heating shell are fixedly installed a plurality of partition plates at equal circumferential intervals, and a heat-conducting liquid is filled between the inner cavity of the heating shell and the outer side surface of the container mechanism.

[0007] Preferably, the container mechanism includes a reaction shell, the reaction shell is sleeved in the middle of a plurality of partition plates, the bottom surface of the reaction shell is in contact with the top surface of the partition block, on the upper part of the inner curved surface of the reaction shell is provided a threaded groove, on the bottom surface of the threaded cover are fixedly installed a plurality of stirring blades at equal circumferential intervals, at the top of the left reaction shell is provided a first limiting ring, in the middle of the curved surface of the right first limiting ring is fixedly sleeved a second limiting ring, and the right threaded cover is made of a magnetic material.

[0008] Preferably, the commutation mechanism includes a first valve housing, the right side of the first conduit is fixedly sleeved on the left side of the first valve housing, the second conduit is fixedly sleeved on the left side behind the first valve housing, the front side of the third conduit is fixedly sleeved on the right side behind the first valve housing, in the middle of the inner cavity of the commutation mechanism is slidably sleeved a first valve plug, in the middle of the first valve plug is provided a through hole, at the top of the first valve plug is fixedly installed a sealing plate, the sealing plate is slidably sleeved on the upper part of the first valve housing, on the upper surface of the sealing plate is fixedly installed a connecting block, on the right side of the connecting block is fixedly installed a first telescopic rod, on the curved surface of the first telescopic rod is slidably sleeved a first telescopic sleeve, on the outer curved surface of the first telescopic sleeve on the right side is fixedly sleeved a first connecting sleeve, the right side of the first connecting sleeve is fixedly sleeved on the upper part of the curved surface of the right heating shell, and on the right side of the inner curved surface of the first telescopic sleeve is fixedly sleeved a first heat-conducting rod.

[0009] Preferably, the switching mechanism includes a liquid mixing shell. The rear end of the third conduit is fixedly sleeved at the bottom in front of the liquid mixing shell. The bottom end of the fourth conduit is fixedly sleeved at the bottom behind the liquid mixing shell. The left side of the second discharge pipe is fixedly sleeved in the middle of the right side surface of the liquid mixing shell. The middle of the rear side of the liquid mixing shell is fixedly sleeved with a first discharge pipe. The upper part of the inner cavity of the liquid mixing shell is fixedly sleeved with a first mounting block. The upper part of the inner cavity of the liquid mixing shell is fixedly sleeved with a second mounting block. The second mounting block is located above the first mounting block. A sleeve is fixedly sleeved in the middle of the first mounting block and the second mounting block. The middle of the bottom surface of the inner cavity of the liquid mixing shell is fixedly installed with a sleeve. A sleeve rod is fixedly installed in the middle of the sleeve. The top end of the sleeve rod is fixedly installed with a piston. The bottom of the piston is designed in a conical shape. The piston is slidably sleeved on the inner curved surface of the sleeve.

[0010] Preferably, the valve mechanism includes a second valve shell. The left end of the fifth conduit is fixedly sleeved on the left side of the second valve shell. A second valve plug is slidably sleeved in the middle of the inner cavity of the second valve shell. A diversion hole is opened at the rear side of the second valve plug. A second telescopic rod is fixedly installed at the rear side of the second valve plug. The second telescopic rod is slidably sleeved with the second valve shell. A second telescopic sleeve is slidably sleeved on the rear side of the curved surface of the second telescopic rod. A second connecting sleeve is fixedly sleeved on the rear side of the outer curved surface of the second telescopic sleeve. The left side of the second connecting sleeve is fixedly sleeved on the upper part of the left heating shell. A second heat conducting rod is fixedly sleeved in the middle of the inner curved surface of the second connecting sleeve. The right side of the second valve shell is fixedly connected with a hydraulic pump. The input end of the hydraulic pump is fixedly connected with the top end of the fourth conduit. Mercury is filled between the second telescopic rod and the second heat conducting rod in the inner cavity of the second telescopic sleeve. The second heat conducting rod is made of a heat conducting material.

[0011] Preferably, the height of the bottom end of the left heating shell is greater than the height of the bottom end of the right heating shell. The left heating shell is made of a heat conducting material. The right heating shell is made of a heat insulating material.

[0012] Preferably, the first conduit, the second conduit, the third conduit, the fourth conduit and the fifth conduit are all made of a heat insulating material.

[0013] Preferably, the reaction shell is made of a heat conducting material. The bottom of the threaded cover is designed in a conical shape.

[0014] Preferably, mercury is filled between the first telescopic rod and the first heat conducting rod in the inner cavity of the first telescopic sleeve. The first heat conducting rod is made of a heat conducting material.

[0015] The beneficial effects of the present invention are as follows:

[0016] 1. Pour the chemical agent for exothermic reaction into the inner cavity of the left container mechanism, so that the temperature of the heat-conducting liquid between the left heating shell and the left container mechanism increases. At the same time, pour the chemical agent for endothermic reaction into the inner cavity of the right container mechanism, so that the temperature of the heat-conducting liquid between the right heating shell and the right container mechanism decreases. Then, through the reversing mechanism, the exchanging mechanism and the valve mechanism, precisely adjust the heat-conducting liquid in the inner cavities of the left and right heating shells, so that the high-temperature heat-conducting liquid in the inner cavity of the left heating shell flows to the low-temperature heat-conducting liquid in the inner cavity of the right heating shell. At the same time, the low-temperature heat-conducting liquid in the inner cavity of the right heating shell flows to the high-temperature heat-conducting liquid in the inner cavity of the left heating shell, and the chemical agents in the inner cavities of the left and right container mechanisms are always within the optimal reaction temperature range.

[0017] 2. When an exothermic reaction occurs in the inner cavity of the reaction shell, the temperature in the inner cavity of the reaction shell rises, the air pressure increases, and the threaded cover is pushed to move upward. The upward-moving threaded cover rotates along the threaded surface of the reaction shell, and the threaded cover drives the stirring blade to move upward and rotate. The stirring blade stirs the chemical agent. When the device introduces the low-temperature heat-conducting liquid at the bottom of the inner cavity of the mixing liquid shell into the inner cavity of the heating shell, the temperature in the inner cavity of the reaction shell decreases and the air pressure drops, attracting the threaded cover to rotate downward. The threaded cover drives the stirring blade to rotate downward, and the stirring blade stirs the chemical agent. Vice versa, when an endothermic reaction occurs in the inner cavity of the reaction shell, the threaded cover drives the stirring blade to stir the chemical agent. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The drawings forming a part of the specification depict the embodiments disclosed in the present application and, together with the specification, are used to explain the principles of the present application in a clear and understandable manner.

[0019] Referring to the drawings, the present disclosure can be more clearly understood from the following detailed description, wherein:

[0020] Figure 1 is a schematic diagram of the overall external structure of the present invention;

[0021] Figure 2 is a schematic diagram of the overall rear structure of the present invention;

[0022] Figure 3 is a schematic diagram of the container mechanism of the present invention;

[0023] Figure 4 is a schematic diagram of the reversing mechanism of the present invention;

[0024] Figure 5 is a schematic diagram of the exchanging mechanism of the present invention;

[0025] Figure 6 is a schematic diagram of the valve mechanism of the present invention.

[0026] Wherein: 1. Base; 2. Pedestal; 3. Heating shell; 301. Electric heating ring; 302. Isolation block; 303. Isolation plate; 4. Container mechanism; 401. Reaction shell; 402. Threaded cover; 403. Stirring blade; 404. First limiting ring; 405. Second limiting ring; 5. First conduit; 6. Commutation mechanism; 601. First valve housing; 602. First valve plug; 603. Sealing plate; 604. Connecting block; 605. First telescopic rod; 606. First telescopic sleeve; 607. First connecting sleeve; 608. First heat conducting rod; 7. Second conduit; 8. Third conduit; 9. Exchange mechanism; 901. Liquid mixing shell; 902. First discharge pipe; 903. First mounting block; 904. Second mounting block; 905. Sheath; 906. Sleeve; 907. Sleeve rod; 908. Piston; 10. Second discharge pipe; 11. Fourth conduit; 12. Valve mechanism; 1201. Second valve housing; 1202. Second valve plug; 1203. Second telescopic rod; 1204. Second telescopic sleeve; 1205. Second connecting sleeve; 1206. Second heat conducting rod; 1207. Hydraulic pump; 13. Fifth conduit. Detailed implementation manners

[0027] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts shall fall within the protection scope of the present application.

[0028] Please refer to Figures 1 to 6, A chemical heating device for semiconductor processing, comprising a base 1. On the left side of the upper surface of the base 1, a pedestal 2 is fixedly installed. On the right side of the upper surface of the base 1 and the upper surface of the pedestal 2, heating shells 3 are fixedly installed. The height of the bottom end of the left heating shell 3 is greater than that of the bottom end of the right heating shell 3. Thus, under the action of gravity, the heat-conducting liquid in the inner cavity of the left heating shell 3 actively flows through the first conduit 5, the commutation mechanism 6, and the second conduit 7 into the inner cavity of the right heating shell 3. The left heating shell 3 is made of a heat-conducting material, and the left heating shell 3 is made of copper alloy, which is convenient for cooling the chemical agent that generates heat in the inner cavity of the container mechanism 4 in the middle of the left heating shell 3. The right heating shell 3 is made of a heat-insulating material, and the right heating shell 3 is made of heat-insulating ceramics, which is convenient for keeping warm the chemical agent that absorbs heat in the inner cavity of the container mechanism 4 in the middle of the right heating shell 3. In the middle of both heating shells 3, a container mechanism 4 is provided. In the middle of the front side of the curved surface of the left heating shell 3, a first conduit 5 is fixedly sleeved. At the right end of the first conduit 5, a commutation mechanism 6 is provided. The commutation mechanism 6 is arranged on the front side of the middle of the upper surface of the base 1. On the left side behind the commutation mechanism 6, a second conduit 7 is fixedly sleeved. The right side of the second conduit 7 is fixedly sleeved at the bottom of the front side of the curved surface of the right heating shell 3. On the right side behind the commutation mechanism 6, a third conduit 8 is fixedly sleeved. At the rear end of the third conduit 8, an exchange mechanism 9 is provided. At the upper part of the left side of the curved surface of the right heating shell 3, a second discharge pipe 10 is fixedly sleeved. The left side of the second discharge pipe 10 is arranged in the middle of the right side of the exchange mechanism 9. At the bottom of the rear side of the exchange mechanism 9, a fourth conduit 11 is provided. At the top of the fourth conduit 11, a valve mechanism 12 is provided. On the left side of the valve mechanism 12, a fifth conduit 13 is provided. The front end of the fifth conduit 13 is fixedly sleeved on the upper part of the front heating shell 3. The first conduit 5, the second conduit 7, the third conduit 8, the fourth conduit 11, and the fifth conduit 13 are all made of heat-insulating materials. The first conduit 5, the second conduit 7, the third conduit 8, the fourth conduit 11, and the fifth conduit 13 are all made of PVE plastic, so as to prevent the temperature of the heat-conducting liquid flowing through the first conduit 5, the second conduit 7, the third conduit 8, the fourth conduit 11, and the fifth conduit 13 from decreasing or increasing, resulting in a reduction in the heat conduction efficiency of the device.

[0029] Please refer to Figures 1 to 3 , The heating shell 3 includes an electric heating ring 301. The electric heating ring 301 is fixedly connected to the bottom of the inner cavity of the heating shell 3 to heat up the heat conduction in the inner cavity of the heating shell 3 when the temperature of the heat-conducting liquid in the inner cavity of the heating shell 3 is seriously insufficient. In the middle of the bottom surface of the inner cavity of the heating shell 3, an isolation block 302 is fixedly installed. A plurality of isolation plates 303 are fixedly installed equidistantly on the inner curved surface circumference of the heating shell 3. A heat-conducting liquid is filled between the inner cavity of the heating shell 3 and the outer side surface of the container mechanism 4.

[0030] Please refer to Figures 1 to 3, the container mechanism 4 includes a reaction shell 401. The reaction shell 401 is sleeved in the middle of a plurality of partition plates 303. The bottom surface of the reaction shell 401 contacts the top surface of the isolation block 302. By setting the isolation block 302, it is avoided that the bottom surface of the reaction shell 401 contacts the bottom surface of the inner cavity of the electric heating ring 301, resulting in the bottom surface of the reaction shell 401 being unable to contact the heat-conducting liquid on the inner curved surface of the heating shell 3 for efficient heat conduction, and the reaction rate of the chemical agent at the bottom of the inner cavity of the reaction shell 401 is reduced. The reaction shell 401 is made of a heat-conducting material, and the reaction shell 401 is made of copper alloy, so as to improve the heat conduction efficiency between the outside and the inside of the reaction shell 401 and reduce the reaction rate of the chemical agent in the inner cavity of the reaction shell 401. Thread grooves are opened in the upper part of the inner curved surface of the reaction shell 401, and a threaded cover 402 is threadedly connected to the upper part of the inner curved surface of the reaction shell 401. The bottom of the threaded cover 402 is designed in a conical shape, so that the chemical agent evaporated and attached to the bottom surface of the threaded cover 402 is concentrated towards the middle of the threaded cover 402 and drips back into the inner cavity of the reaction shell 401. A plurality of stirring blades 403 are fixedly installed at equal intervals on the circumferential surface of the bottom surface of the threaded cover 402. A first limiting ring 404 is provided at the top end of the left reaction shell 401, and a second limiting ring 405 is fixedly sleeved in the middle of the curved surface of the right first limiting ring 404. The right threaded cover 402 is made of a magnetic material.

[0031] Please refer to Figure 1 and Figure 4 , the commutation mechanism 6 includes a first valve housing 601. The right side of the first conduit 5 is fixedly sleeved on the left side of the first valve housing 601. The second conduit 7 is fixedly sleeved on the left side behind the first valve housing 601. The front side of the third conduit 8 is fixedly sleeved on the right side behind the first valve housing 601. A first valve plug 602 is slidably sleeved in the middle of the inner cavity of the commutation mechanism 6. A through hole is opened in the middle of the first valve plug 602. A sealing plate 603 is fixedly installed at the top end of the first valve plug 602. The sealing plate 603 is slidably sleeved on the upper part of the first valve housing 601. A connecting block 604 is fixedly installed on the upper surface of the sealing plate 603. A first telescopic rod 605 is fixedly installed on the right side of the connecting block 604. The first telescopic rod 605 is slidably sleeved on the curved surface of a first telescopic sleeve 606. A first connecting sleeve 607 is fixedly sleeved on the right outer curved surface of the first telescopic sleeve 606. The right side of the first connecting sleeve 607 is fixedly sleeved on the upper part of the curved surface of the right heating shell 3. A first heat-conducting rod 608 is fixedly sleeved on the right inner curved surface of the first telescopic sleeve 606. Mercury is filled between the first telescopic rod 605 and the first heat-conducting rod 608 in the inner cavity of the first telescopic sleeve 606. The first heat-conducting rod 608 is made of a heat-conducting material, and the first heat-conducting rod 608 is made of copper alloy, so as to realize the transfer of the temperature of the heat-conducting liquid in the inner cavity of the right heating shell 3 through the first heat-conducting rod 608, control the expansion and contraction of the mercury between the first telescopic rod 605 and the first heat-conducting rod 608 in the inner cavity of the first telescopic sleeve 606, so as to realize the control of the left and right movement of the first valve plug 602, and further adjust the flow direction of the heat-conducting liquid in the inner cavity of the commutation mechanism 6.

[0032] Please refer to Figure 1 、 Figure 2 and Figure 5 As shown in Figure 1 , Figure 2 and Figure 5 , the mixing mechanism 9 includes a mixing liquid housing 901. The rear end of the third conduit 8 is fixedly sleeved at the bottom in front of the mixing liquid housing 901. The bottom end of the fourth conduit 11 is fixedly sleeved at the bottom behind the mixing liquid housing 901. The left side of the second discharge pipe 10 is fixedly sleeved in the middle of the right side surface of the mixing liquid housing 901. A first discharge pipe 902 is fixedly sleeved in the middle at the rear side of the mixing liquid housing 901. A first mounting block 903 is fixedly sleeved in the upper part of the inner cavity of the mixing liquid housing 901. A second mounting block 904 is fixedly sleeved in the upper part of the inner cavity of the mixing liquid housing 901. The second mounting block 904 is located above the first mounting block 903. A sleeve housing 905 is fixedly sleeved in the middle of the first mounting block 903 and the second mounting block 904. A sleeve 906 is fixedly installed in the middle of the bottom surface of the inner cavity of the mixing liquid housing 901. A sleeve rod 907 is fixedly installed in the middle of the sleeve 906. The top end of the sleeve rod 907 is fixedly installed with a piston 908. The bottom of the piston 908 is designed in a conical shape. Thus, when the piston 908 moves upward, the gap between the piston 908 and the sleeve housing 905 gradually increases, thereby adjusting the rate at which the low-temperature heat-conducting liquid above the second mounting block 904 in the inner cavity of the mixing liquid housing 901 flows to the bottom of the inner cavity of the mixing liquid housing 901 through the sleeve housing 905. The piston 908 is slidably sleeved on the inner curved surface of the sleeve housing 905.

[0033] Please refer to Figure 1 、 Figure 2 and Figure 6, the valve mechanism 12 includes a second valve housing 1201. The left end of the fifth conduit 13 is fixedly sleeved on the left side of the second valve housing 1201. A second valve plug 1202 is slidably sleeved in the middle of the inner cavity of the second valve housing 1201. A diversion hole is formed at the rear side of the second valve plug 1202. A second telescopic rod 1203 is fixedly installed at the rear side of the second valve plug 1202. The second telescopic rod 1203 is slidably sleeved with the second valve housing 1201. A second telescopic sleeve 1204 is slidably sleeved at the rear side of the curved surface of the second telescopic rod 1203. A second connecting sleeve 1205 is fixedly sleeved at the rear side of the outer curved surface of the second telescopic sleeve 1204. The left side of the second connecting sleeve 1205 is fixedly sleeved on the upper part of the left heating shell 3. A second heat conducting rod 1206 is fixedly sleeved in the middle of the inner curved surface of the second connecting sleeve 1205. The right side of the second valve housing 1201 is fixedly connected with a hydraulic pump 1207. The input end of the hydraulic pump 1207 is fixedly connected with the top end of the fourth conduit 11. Mercury is filled between the inner cavity of the second telescopic sleeve 1204, the second telescopic rod 1203 and the second heat conducting rod 1206. The second heat conducting rod 1206 is made of a heat conducting material, and the second heat conducting rod 1206 is made of copper alloy. Thus, the heat of the heat conducting liquid in the inner cavity of the left heating shell 3 is conducted through the second heat conducting rod 1206, controlling the expansion and contraction of the mercury between the second telescopic rod 1203 and the second heat conducting rod 1206 in the inner cavity of the second telescopic sleeve 1204. Thereby, the forward and backward movement of the second valve plug 1202 is controlled, and further the volume of the heat conducting liquid flowing into the inner cavity of the left heating shell 3 is adjusted.

[0034] Working principle:

[0035] When the present invention is in use, first pour the heat conducting liquid into the middle between the inner cavities of the left and right heating shells 3 and the outer side of the container mechanism 4. At the same time, pour the low-temperature heat conducting liquid into the upper part of the second mounting block 904 in the inner cavity of the mixing liquid shell 901. Then pour the chemical medicine that generates an exothermic reaction into the inner cavity of the left container mechanism 4. At this time, the chemical agent in the inner cavity of the left container mechanism 4 generates a heat generation reaction. The left container mechanism 4 heats the heat conducting liquid between it and the left heating shell 3, raising the temperature of the heat conducting liquid between the left heating shell 3 and the left container mechanism 4. Pour the chemical medicine that generates an endothermic reaction into the inner cavity of the right container mechanism 4. The chemical agent in the inner cavity of the right container mechanism 4 generates an endothermic reaction. The right container mechanism 4 absorbs the heat conducting liquid between it and the right heating shell 3, lowering the temperature of the heat conducting liquid between the right heating shell 3 and the right container mechanism 4. At this time, as the chemical agents in the inner cavities of the left container mechanism 4 and the right container mechanism 4 continue to react, the temperature of the heat conducting liquid between the left heating shell 3 and the left container mechanism 4 is higher than the optimal reaction temperature range of the chemical agent in the inner cavity of the left container mechanism 4, and the temperature of the heat conducting liquid between the right heating shell 3 and the container mechanism 4 is lower than the optimal reaction temperature range of the chemical agent in the inner cavity of the right container mechanism 4;

[0036] At this time, the temperature of the first heat conduction rod 608 inside the reversing mechanism 6 connected to the right heating shell 3 and in contact with the heat conduction liquid in the inner cavity of the right heating shell 3 decreases. The mercury between the inner cavity of the first telescopic sleeve 606, the first heat conduction rod 608 and the first telescopic rod 605 contracts when cooled, pulling the first telescopic rod 605 to move to the right. At this time, under the action of gravity, the high-temperature heat conduction liquid in the inner cavity of the left heating shell 3 sequentially passes through the first conduit 5, the first valve housing 601, and the second conduit 7 and flows to the bottom of the inner cavity of the right heating shell 3, causing the temperature of the heat conduction liquid in the inner cavity of the right heating shell 3 to rise and the liquid level of the heat conduction liquid to move upward, so that the low-temperature heat conduction liquid with a liquid level exceeding the height of the second discharge pipe 10 flows through the second discharge pipe 10 to the bottom of the inner cavity of the mixing liquid shell 901 until the heat conduction liquid in the inner cavity of the right heating shell 3 returns to the optimal reaction temperature range of the chemical agent in the inner cavity of the right container mechanism 4. At this time, the mercury between the inner cavity of the first telescopic sleeve 606, the first heat conduction rod 608 and the first telescopic rod 605 collides when heated, pulling the first telescopic rod 605 to move to the left. At this time, the high-temperature heat conduction liquid in the inner cavity of the left heating shell 3 passes through the first conduit 5, the first valve housing 601, the first valve plug 602 and the third conduit 8 and flows to the bottom of the inner cavity of the mixing liquid shell 901 to contact and mix with the low-temperature heat conduction liquid flowing into the inner cavity of the mixing liquid shell 901 from the inner cavity of the right heating shell 3;

[0037] When the temperature of the high and low temperature mixed heat conduction liquid in the inner cavity of the mixing liquid shell 901 is higher than the optimal reaction temperature range of the chemical agent in the inner cavity of the left container mechanism 4, the mercury between the inner cavity of the sleeve 906 and the rod 907 expands, pushing the rod 907 to move upward. The rod 907 pushes the piston 908 to move upward, creating a gap between the piston 908 and the sleeve housing 905. At this time, the low-temperature heat conduction liquid above the second mounting block 904 in the inner cavity of the mixing liquid shell 901 flows through the sleeve housing 905 into the bottom of the inner cavity of the mixing liquid shell 901 until the temperature of the heat conduction liquid at the bottom of the inner cavity of the mixing liquid shell 901 is within the optimal reaction temperature range of the chemical agent in the inner cavity of the left container mechanism 4, and the heat conduction liquid with a liquid level higher than the first discharge pipe 902 flows out of the device through the first discharge pipe 902. When the temperature of the heat conduction liquid in the inner cavity of the left heating shell 3 is higher than the optimal reaction temperature range of the chemical agent in the inner cavity of the left container mechanism 4, the temperature of the second heat conduction rod 1206 in the middle of the valve mechanism 12 connected to the upper part of the left heating shell 3 decreases, and the heat conduction liquid between the second telescopic rod 1203 and the second heat conduction rod 1206 in the inner cavity of the second telescopic sleeve 1204 rises in temperature, pushing the second telescopic rod 1203 to move forward. At this time, the hydraulic pump 1207 is powered on and rotates, and the heat conduction liquid in the inner cavity of the mixing liquid shell 901 flows through the fourth conduit 11, the hydraulic pump 1207, the diversion hole opened in the middle of the second valve plug 1202 and the fifth conduit 13 into the inner cavity of the heating shell 3, causing the temperature of the heat conduction liquid in the inner cavity of the heating shell 3 to decrease, so that the chemical agent in the inner cavity of the left container mechanism 4 is always within the optimal reaction temperature range;

[0038] When an exothermic reaction occurs in the inner cavity of the reaction shell 401, the temperature in the inner cavity of the reaction shell 401 rises, the air pressure increases, and the threaded cover 402 is pushed upward. The upward-moving threaded cover 402 rotates along the threaded surface of the reaction shell 401. The threaded cover 402 drives the stirring blade 403 to move upward and rotate, and the stirring blade 403 stirs the chemical agent. When the device introduces the low-temperature heat-conducting liquid at the bottom of the inner cavity of the mixing liquid shell 901 into the inner cavity of the heating shell 3, the temperature in the inner cavity of the reaction shell 401 decreases and the air pressure drops, attracting the threaded cover 402 to rotate downward. The threaded cover 402 drives the stirring blade 403 to rotate downward, and the stirring blade 403 stirs the chemical agent. Vice versa, when an endothermic reaction occurs in the inner cavity of the reaction shell 401, the threaded cover 402 drives the stirring blade 403 to stir the chemical agent.

[0039] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit them. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that the technical solutions of the present invention can be modified or equivalently replaced without departing from the spirit and scope of the technical solutions of the present invention, and they should all be covered by the scope of the claims of the present invention.

Claims

1. A chemical heating device for semiconductor processing, comprising a base (1), characterized in that: A pedestal (2) is fixedly mounted on the left side of the upper surface of the base (1), a heating shell (3) is fixedly mounted on the right side of the upper surface of the base (1) and the upper surface of the pedestal (2), a container mechanism (4) is provided in the middle of the two heating shells (3), a first conduit (5) is fixedly sleeved in the middle of the front side of the curved surface of the left heating shell (3), a reversing mechanism (6) is provided at the right end of the first conduit (5), the reversing mechanism (6) is arranged at the front side of the middle of the upper surface of the base (1), a second conduit (7) is fixedly sleeved on the left side behind the reversing mechanism (6), and the right side of the second conduit (7) is fixedly sleeved on the front side of the curved surface of the right heating shell (3) The bottom of the reversing mechanism (6) is fixedly sleeved with a third conduit (8) on the right side behind the reversing mechanism (6), and a rear end of the third conduit (8) is provided with an exchange mechanism (9). A second discharge pipe (10) is fixedly sleeved with the upper part of the left side of the curved surface of the right heating shell (3), and the left side of the second discharge pipe (10) is arranged in the middle part of the right side of the exchange mechanism (9). A fourth conduit (11) is provided at the bottom of the rear side of the exchange mechanism (9), and a valve mechanism (12) is provided at the top of the fourth conduit (11). A fifth conduit (13) is provided on the left side of the valve mechanism (12), and the front end of the fifth conduit (13) is fixedly sleeved with the upper part of the front heating shell (3).

2. A semiconductor processing chemical heating device according to claim 1, characterized in that: The heating shell (3) comprises an electric heating ring (301), the electric heating ring (301) being fixedly connected to the bottom of the inner cavity of the heating shell (3), an isolation block (302) being fixedly mounted in the middle of the bottom surface of the inner cavity of the heating shell (3), a plurality of isolation plates (303) being fixedly mounted at equal intervals on the circumference of the inner curved surface of the heating shell (3), and a heat transfer liquid being filled between the inner cavity of the heating shell (3) and the outer side surface of the container mechanism (4).

3. A semiconductor processing chemical heating device according to claim 2, characterized in that: The container mechanism (4) comprises a reaction shell (401), the reaction shell (401) is sleeved in the middle of a plurality of isolation plates (303), the bottom surface of the reaction shell (401) contacts the top surface of the isolation block (302), a thread groove is formed on the upper part of the inner curved surface of the reaction shell (401), a threaded cover (402) is threadedly connected to the upper part of the inner curved surface of the reaction shell (401), a plurality of stirring blades (403) are fixedly mounted at equal intervals on the bottom surface of the threaded cover (402), a first limiting ring (404) is provided at the top end of the reaction shell (401) on the left side, a second limiting ring (405) is fixedly sleeved in the middle of the curved surface of the first limiting ring (404) on the right side, the first limiting ring (404) and the second limiting ring (405) are both made of magnetic material, and the threaded cover (402) on the right side is made of magnetic material.

4. A semiconductor processing chemical heating device according to claim 1, characterized in that: The reversing mechanism (6) comprises a first valve housing (601), the right side of the first conduit (5) is fixedly sleeved on the left side of the first valve housing (601), the second conduit (7) is fixedly sleeved on the left side of the back of the first valve housing (601), the front side of the third conduit (8) is fixedly sleeved on the right side of the back of the first valve housing (601), a first valve plug (602) is slidably sleeved in the middle of the inner cavity of the reversing mechanism (6), a through hole is opened in the middle of the first valve plug (602), a sealing plate (603) is fixedly installed on the top end of the first valve plug (602), and the sealing plate (603) is slidably sleeved in A connecting block (604) is fixedly mounted on the upper surface of the sealing plate (603) at the upper part of the first valve housing (601); a first telescopic rod (605) is fixedly mounted on the right side of the connecting block (604); a first telescopic sleeve (606) is slidably sleeved on the curved surface of the first telescopic rod (605); a first connecting sleeve (607) is fixedly sleeved on the right side of the outer curved surface of the first telescopic sleeve (606); the right side of the first connecting sleeve (607) is fixedly sleeved on the upper part of the curved surface of the heating housing (3) at the right side; and a first heat-conducting rod (608) is fixedly sleeved on the right side of the inner curved surface of the first telescopic sleeve (606).

5. The semiconductor processing chemical heating device according to claim 1, characterized in that: The exchange mechanism (9) comprises a liquid mixing shell (901), the rear end of the third conduit (8) is fixedly sleeved on the bottom of the front of the liquid mixing shell (901), the bottom end of the fourth conduit (11) is fixedly sleeved on the bottom of the back of the liquid mixing shell (901), the left side of the second discharge pipe (10) is fixedly sleeved on the middle of the right side of the liquid mixing shell (901), the middle of the back side of the liquid mixing shell (901) is fixedly sleeved with a first discharge pipe (902), the upper part of the inner cavity of the liquid mixing shell (901) is fixedly sleeved with a first mounting block (903), and the upper part of the inner cavity of the liquid mixing shell (901) is fixedly sleeved with a second The second mounting block (904) is located above the first mounting block (903); a sleeve (905) is fixedly sleeved in the middle of the first mounting block (903) and the second mounting block (904); a sleeve (906) is fixedly installed in the middle of the bottom surface of the inner cavity of the mixing shell (901); a sleeve rod (907) is fixedly installed in the middle of the sleeve (906); a piston (908) is fixedly installed at the top of the sleeve rod (907); the bottom of the piston (908) is designed to be conical, and the piston (908) is slidably sleeved on the inner curved surface of the sleeve (905).

6. The semiconductor processing chemical heating device according to claim 1, characterized in that: The valve mechanism (12) comprises a second valve housing (1201), the left end of the fifth conduit (13) is fixedly sleeved on the left side of the second valve housing (1201), a second valve plug (1202) is slidably sleeved in the middle of the inner cavity of the second valve housing (1201), a guide hole is provided on the rear side of the second valve plug (1202), a second telescopic rod (1203) is fixedly installed on the rear side of the second valve plug (1202), the second telescopic rod (1203) is slidably sleeved with the second valve housing (1201), a second telescopic sleeve (1204) is slidably sleeved on the rear side of the curved surface of the second telescopic rod (1203), and the outer curved surface of the second telescopic sleeve (1204) is A second connecting sleeve (1205) is fixedly sleeved on the rear side of the surface, the left side of the second connecting sleeve (1205) is fixedly sleeved on the upper part of the left heating shell (3), the middle part of the inner curved surface of the second connecting sleeve (1205) is fixedly sleeved with a second heat-conducting rod (1206), the right side of the second valve housing (1201) is fixedly connected to a hydraulic pump (1207), the input end of the hydraulic pump (1207) is fixedly connected to the top end of the fourth conduit (11), the inner cavity of the second telescopic sleeve (1204) is filled with mercury between the second telescopic rod (1203) and the second heat-conducting rod (1206), and the second heat-conducting rod (1206) is made of heat-conducting material.

7. The semiconductor processing chemical heating device according to claim 1, characterized in that: The height of the bottom end of the left heating shell (3) is greater than the height of the bottom end of the right heating shell (3); the left heating shell (3) is made of heat-conducting material, and the right heating shell (3) is made of heat-insulating material.

8. The semiconductor processing chemical heating device according to claim 1, characterized in that: The first conduit (5), the second conduit (7), the third conduit (8), the fourth conduit (11) and the fifth conduit (13) are all made of heat-insulating materials.

9. The semiconductor processing chemical heating device according to claim 3, characterized in that: The reaction shell (401) is made of heat-conductive material, and the bottom of the threaded cover (402) is designed to be conical.

10. The semiconductor processing chemical heating device according to claim 4, characterized in that: Mercury is filled between the first telescopic rod (605) and the first heat-conducting rod (608) in the inner cavity of the first telescopic sleeve (606), and the first heat-conducting rod (608) is made of a heat-conducting material.

Images