Semiconductor precursor stirring reaction kettle device

Abstract

The invention discloses a semiconductor precursor stirring reaction kettle device, and belongs to the technical field of semiconductor manufacturing. The stirring reaction kettle device comprises a kettle body, the stirring device comprises a driving part, a transmission part and a stirring part, one end of the driving part is fixedly connected with the transmission part, and one end, far away from the driving part, of the transmission part extends into the kettle body to be connected with the stirring part; wherein the stirring part comprises an upper stirring part, a connecting part and a lower stirring part, the upper stirring part, the connecting part and the lower stirring part are spliced together to form the whole stirring part, the upper stirring part is arranged above the connecting part, the lower stirring part is arranged below the connecting part, and the outer surfaces of the upper stirring part and the lower stirring part are curved surfaces; the curved surface is a concave curved surface facing the geometric center (P) of the stirring piece and is tangent to the surface of the connecting part. The stirring part can generate turbulent flow in the kettle body when the stirring part rotates in the kettle body under the action of the driving part, so that inorganic salt generated by precursor reaction is prevented from being deposited at the bottom of the reaction kettle.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing, and more particularly, to a semiconductor precursor stirring reaction kettle device. Background Art

[0002] Precursors are important intermediate products in the semiconductor production process, and the quality of precursors largely determines the performance of semiconductor materials. Currently, the co-precipitation method is usually used to prepare electrode material precursors, that is, by mixing and reacting a mixed salt solution, a complexing agent, a precipitating agent, etc. under suitable conditions, and then obtaining the corresponding precursors through co-precipitation treatment. Reactors are required for the production and preparation of precursors to carry out relevant physical or chemical reactions.

[0003] When precursors such as zirconium dimethylamide or titanium dimethylamide react in a reaction kettle, inorganic salts such as lithium chloride will sink to the bottom. After the inorganic salts sink to the bottom, it may cause blockage of the discharge port. At the same time, when a large amount of inorganic salts accumulate at the bottom of the reaction kettle, they will agglomerate and may also cause blockage of subsequent filtration equipment in the subsequent process. Therefore, how to prevent the inorganic salts generated during the production process of precursor materials from sinking to the bottom in the reaction kettle is an urgent problem to be solved. Summary of the Invention

[0004] This section of the application is used to briefly introduce concepts, which will be described in detail in the subsequent detailed implementation section. This section of the application is not intended to identify the key features or essential features of the claimed technical solution, nor is it intended to limit the scope of the claimed technical solution.

[0005] Some embodiments of the present application propose a stirring reaction kettle device to solve the technical problems mentioned in the above background art section.

[0006] As a first aspect of the present application, some embodiments of the present application provide a stirring reaction kettle device, including: a kettle body having an accommodation space required for the reaction of precursor materials; a stirring device including a driving member, a transmission member, and a stirring member, one end of the driving member is fixedly connected to the transmission member, and the end of the transmission member away from the driving member extends into the interior of the kettle body to connect the stirring member; wherein, the stirring member includes an upper stirring portion, a connecting portion, and a lower stirring portion, the upper stirring portion, the connecting portion, and the lower stirring portion are combined together to form the whole of the stirring member, the upper stirring portion is arranged above the connecting portion, the lower stirring portion is arranged below the connecting portion, the outer surfaces of the upper stirring portion and the lower stirring portion are curved surfaces, the curved surfaces are concave curved surfaces facing the geometric center (P) of the stirring member, and the curved surfaces are tangent to the surface of the connecting portion.

[0007] Further, define the plane passing through the axis of the transmission member as the S plane. For any straight line G parallel to the axis of the transmission member on the S plane, the intersection points of the projections of the upper stirring part and the connecting part on the S plane are point A and point B respectively. Define the bisector perpendicular to the axis of the transmission member on the projection of the connecting part on the S plane as the F line. The distance from point A to the F line is greater than the distance from point B to the F line.

[0008] Further, the ratio range of the height of the lower stirring part to the height of the upper stirring part is: 0.7 to 0.9.

[0009] Further, the ratio range of the height of the upper stirring part to the height of the connecting part is: 1.2 to 1.5.

[0010] Further, the upper stirring part, the connecting part and the lower stirring part are constructed as a whole and have a hollow structure inside.

[0011] Further, a number of first through holes are provided on the surfaces of the upper stirring part, the connecting part and the lower stirring part, and the number of the first through holes are arranged at equal intervals.

[0012] Further, a number of second through holes are provided on the surfaces of the upper stirring part and the lower stirring part, and a number of third through holes are provided on the surface of the connecting part. The second through holes are circular holes, and the third through holes are oval holes.

[0013] Further, define the plane passing through the cross-section of the connecting part and perpendicular to the axis of the transmission member as the N plane. The projections of the second through holes on the surface of the upper stirring part and the second through holes on the lower stirring part on the N plane are staggered.

[0014] Further, the projection of the stirring member on the N plane is circular, and the ratio of the diameter of the connecting part to the inner diameter of the kettle body is less than or equal to 1 / 2.

[0015] Further, the end of the lower stirring part far from the connecting part is a tip.

[0016] Further, the distance from the farthest point of the lower stirring part far from the connecting part to the bottom of the kettle body is L.

[0017] Further, a heating mechanism is also provided inside the kettle body, and the heating mechanism is arranged in a spiral shape.

[0018] Adopting the technical solution provided by the present invention, compared with the prior art, it has the following beneficial effects:

[0019] (1) The stirred reactor device of the present invention is provided with a stirring device comprising an upper stirring part, a connecting part and a lower stirring part inside the reactor body, wherein the upper stirring part, the connecting part and the lower stirring part are arranged in sequence along the length direction of the transmission member, and the upper stirring part and the lower stirring part each have a curved surface, and the curved surfaces are tangent to the surface of the connecting part, so that when the stirring member rotates in the reactor body under the action of the driving member, turbulence can be generated inside the reactor body, thereby preventing the inorganic salts generated by the precursor reaction from being deposited at the bottom of the reactor.

[0020] (2) The present invention sets the distance from any point on the curved surface of the lower stirring portion to the bisector of the connecting portion to be smaller than the distance from the same point on the curved surface of the upper stirring portion to the bisector of the connecting portion, thereby making the upward turbulence effect generated by the stirring member inside the kettle body greater than the downward turbulence effect generated by the upper stirring portion, thereby making the overall turbulence degree of the liquid inside the kettle body greater, effectively accelerating the mixing of the liquid in the kettle body, and improving the production efficiency of the precursor material.

[0021] (3) The present invention arranges a connecting portion and an upper stirring portion above the lower stirring portion and makes the height of the upper stirring portion greater than that of the lower stirring portion. Therefore, when the stirring member rotates under the drive of the driving member, the position deviation of the lower stirring portion is constrained by the upper stirring portion, which effectively reduces the shaking and eccentricity of the stirring member during rotation, thereby increasing the production efficiency of the precursor material and the stability of the equipment.

[0022] (4) In the present invention, the upper stirring part, the connecting part and the lower stirring part are constructed as a whole and the interior thereof is a hollow structure, thereby reducing the overall weight of the stirring member. At the same time, a plurality of through holes are provided on the surfaces of the upper stirring part, the connecting part and the lower stirring part. The plurality of through holes are arranged at equal intervals. Liquid enters the through holes, which reduces the resistance of the stirring member and further increases the intensity of turbulence generated by the liquid in the reactor under the action of centrifugal force, thereby further avoiding the sinking of inorganic salts to the bottom. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The drawings constituting a part of this application are used to provide a further understanding of this application, so that other features, purposes and advantages of this application become more obvious. The illustrative embodiment drawings and their descriptions of this application are used to explain this application and do not constitute an improper limitation on this application.

[0024] In addition, throughout the drawings, the same or similar reference numerals represent the same or similar elements. It should be understood that the drawings are schematic and that the components and elements are not necessarily drawn to scale.

[0025] Figure 1 This is a schematic diagram of the overall structure of a stirred reactor device according to an embodiment of the present application;

[0026] Figure 2It is a schematic cross-sectional structure diagram of an overall stirring reaction kettle device according to an embodiment of the present application;

[0027] Figure 3 It is a schematic structure diagram of a stirring member of a stirring reaction kettle device according to an embodiment of the present application;

[0028] Figure 4 It is a schematic structure diagram of the stirring member of the stirring reaction kettle device from another angle according to an embodiment of the present application;

[0029] Figure 5 It is a schematic diagram of the curved surfaces of the upper stirring part and the lower stirring part of the stirring reaction kettle device according to an embodiment of the present application;

[0030] Explanation of the reference numerals in the schematic diagram:

[0031] 100, kettle body; 110, kettle cover; 120, kettle body;

[0032] 200, stirring device; 210, driving member; 220, transmission member; 230, stirring member; 231, upper stirring part; 232, connecting part; 232’, edge of the connecting part; 233, lower stirring part; 240, first through hole; 250, second through hole; 260, third through hole; 270, tip;

[0033] 300, heating mechanism;

[0034] P, geometric center;

[0035] K, accommodation space; Detailed implementation manners

[0036] Hereinafter, embodiments of the present disclosure will be described in more detail with reference to the accompanying drawings. Although some embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure can be implemented in various forms and should not be construed as limited to the embodiments set forth herein. On the contrary, these embodiments are provided to more thoroughly and completely understand the present disclosure. It should be understood that the drawings and embodiments of the present disclosure are only for exemplary purposes and are not used to limit the protection scope of the present disclosure.

[0037] In addition, it should be noted that for the sake of convenience of description, only parts related to the relevant invention are shown in the drawings. Without conflict, the embodiments in the present disclosure and the features in the embodiments can be combined with each other.

[0038] It should be noted that the concepts such as "first" and "second" mentioned in the present disclosure are only used to distinguish different devices, modules or units, and are not used to limit the order of the functions performed by these devices, modules or units or the interdependent relationship therebetween.

[0039] It should be noted that the modifications of "one" and "multiple" mentioned in this disclosure are illustrative rather than restrictive. Those skilled in the art should understand that unless otherwise clearly specified in the context, it should be understood as "one or more".

[0040] The names of the messages or information exchanged between multiple devices in the embodiments of this disclosure are only for illustrative purposes and do not limit the scope of these messages or information.

[0041] The present disclosure will be described in detail below with reference to the accompanying drawings and in conjunction with embodiments.

[0042] As Figures 1 to 5 shown, a stirring reactor device according to an embodiment of the present application includes: a kettle body 100 having a accommodation space required for the reaction of precursor materials; a stirring device 200 including a driving member 210, a transmission member 220, and a stirring member 230. One end of the driving member 210 is fixedly connected to the transmission member 220, and the end of the transmission member 220 away from the driving member 210 extends into the kettle body 100 to connect the stirring member 230; the stirring member 230 includes an upper stirring portion 231, a connecting portion 232, and a lower stirring portion 233. The upper stirring portion 231, the connecting portion 232, and the third stirring portion 233 are assembled together to form the whole of the stirring member 230. The upper stirring portion 231 is disposed above the connecting portion 232, and the lower stirring portion 233 is disposed below the connecting portion 232. The outer surfaces of the upper stirring portion 231 and the lower stirring portion 233 are curved surfaces, and the curved surfaces are concave curved surfaces facing the geometric center (P) of the stirring member, and the curved surfaces are tangent to the surface of the connecting portion 232.

[0043] Specifically, the upper stirring portion 231, the connecting portion 232, and the lower stirring portion 233 are arranged in sequence along the length direction of the transmission member 220. The upper stirring portion 231 and the lower stirring portion 233 both have a curved surface, and the curved surfaces are tangent to the surface of the connecting portion 232. The kettle body 100 is composed of a kettle body 120 and a kettle lid 110. The kettle lid 110 is sealingly connected to the kettle body 120. An accommodation space K is formed inside the kettle lid 110 and the kettle body 120. A feed inlet is provided on the kettle lid 110, and the feed inlet is communicated with the accommodation space K. The precursor material is introduced into the accommodation space K inside the kettle body 100 from the feed inlet. A discharge port is provided at the bottom of the kettle body 120, and the precursor material after the reaction is discharged from the kettle body 100 through the discharge port.

[0044] During the reaction process, the precursor material will generate inorganic salts. For example, during the reaction of dimethylaminozirconium or dimethylaminotitanium materials, inorganic salt lithium chloride will be generated. The particle size of lithium chloride is small and its density is large. Under the action of gravity, it will deposit at the bottom of the reaction kettle body 120. When a certain amount accumulates, it will cause blockage of the discharge port. After each reaction of the precursor material, it is necessary to separately treat the inorganic salts at the bottom of the reaction kettle, such as flushing with a high-pressure water gun, etc., resulting in low overall production efficiency.

[0045] During the production process, when the generation efficiency of inorganic salts is fast, the inorganic salts will also agglomerate when they are layered with the liquid in the reaction kettle. The agglomerated inorganic salts are very likely to cause blockage of the filtration equipment when they enter the next production step together with the precursor material, which also results in low production efficiency. Therefore, a stirring device 200 is provided in the kettle body 100. The stirring device 200 stirs the precursor material in the kettle body 100 to make it mix more evenly. At the same time, when the stirring device 200 rotates, the inorganic salts generated by the reaction are more evenly mixed in the liquid of the precursor material. Finally, after the reaction ends, it is discharged from the discharge port of the kettle body 100 together with the precursor material and enters the next production link, avoiding the sinking of inorganic salts at the bottom of the reaction kettle and also avoiding the agglomeration of inorganic salts at the bottom of the reaction kettle and thus blocking the filtration equipment in the next production step.

[0046] In a specific embodiment, the stirring device 200 includes a driving member 210, a transmission member 220, and a stirring member 230. The driving member 210 provides power to make the stirring member 230 rotate through the transmission member 220. The driving member 210 is a servo motor, which can provide different powers according to the volume of the accommodation space K in the kettle body 100. The driving member 210 is fixedly arranged on the kettle cover 110. The output shaft of the driving member 210 is connected to the transmission member 220 through a coupling. The transmission member 220 passes through the kettle cover 110 and extends into the interior of the kettle body 100 to connect the stirring member 230. The transmission member 220 is a transmission shaft, one end of which is connected to the servo motor through a coupling, and the other end is fixedly connected to the stirring member 230.

[0047] The stirring member 230 includes an upper stirring portion 231, a connecting portion 232, and a lower stirring portion 233. The upper stirring portion 231 is closer to the driving member 210 relative to the connecting portion 232 and the lower stirring portion 233. The connecting portion 232 is disposed between the upper stirring portion 231 and the lower stirring portion 233. The connecting portion 232 is integrally in the shape of a disc with a certain thickness. When the driving member 210 drives the transmission member 220 and the stirring member 230 to rotate, the connecting portion 232 can play a role in stirring the liquid in the kettle body 100, that is, the connecting portion 232 rotates about the axis of the transmission member 220. The viscous force between the edge 232' of the connecting portion and the liquid drives the liquid to perform a rotational motion. The liquid layer near the edge 232' of the connecting portion will obtain the same speed as the edge 232' of the connecting portion due to viscosity, while the liquid layer far from the edge 232' of the connecting portion will have a reduced speed due to inertia or internal viscous shear, forming a velocity gradient, thereby enabling the liquid inside the reaction kettle to be more fully mixed and effectively promoting the reaction efficiency of the precursor material inside the reaction kettle.

[0048] Both the upper stirring portion 231 and the lower stirring portion 233 have a curved surface. Define the curved surface of the upper stirring portion 231 as the upper curved surface, and the curved surface of the connecting portion 232 as the lower curved surface. The upper curved surface is tangent to the upper surface of the connecting portion 232, and the lower curved surface is tangent to the lower surface of the connecting portion 232. Both the upper curved surface and the lower curved surface are concave curved surfaces facing the geometric center P of the stirring member. Since the upper stirring portion 231 has an upper curved surface, the upper curved surface forms the outer surface of the upper stirring portion 231. In the length direction of the transmission member 220, when the driving member 210 drives the stirring member 230 to rotate, the linear velocities at various positions of the upper stirring portion 231 are inconsistent and gradually increase. Therefore, when the upper stirring portion 231 rotates, if the upper stirring portion 231 rotates clockwise, then the tangential velocity direction of the liquid near the surface of the upper stirring portion 231 is also clockwise, while the liquid far from the surface of the upper stirring portion 231 has a velocity gradient due to inertia or viscous shear, and its velocity is less than the tangential velocity of the liquid near the surface of the upper stirring portion 231. In the rotation system formed by the upper stirring portion 231, the centrifugal force formed by the upper stirring portion 231 will cause a radial pressure gradient, that is, the pressure increases as the radius increases. On the surface of the upper stirring portion 231, the liquid tends to move outward due to centrifugal force, but since the curved surface of the upper stirring portion 231 is a concave curved surface facing the geometric center P of the stirring member, the outward movement will correspond to moving along the surface towards the bottom end (the position with a larger radius). Therefore, the liquid near the surface of the upper stirring portion 231 may flow along the surface of the upper stirring portion 231 from the tip towards the bottom end direction, while being driven by the upper stirring portion 231 to perform tangential rotation at the same time.

[0049] In other words, the liquid near the top position of the upper stirring part 231 will be stirred in the direction from the upper stirring part 231 towards the bottom under the drive of the upper stirring part 231. Similarly, the lower stirring part 233 is symmetrically arranged with respect to the connecting part 232 with the upper stirring part 231. The lower stirring part 233 will turn the liquid at its bottom towards the top direction of the lower stirring part 233, thereby driving the inorganic salts at the bottom of the reaction kettle to turn up, avoiding the blockage of the discharge port caused by the deposition of inorganic salts.

[0050] As Figure 5 shown, in a specific embodiment, the plane passing through the axis of the transmission member 220 is defined as the S plane. The intersection points of any straight line G parallel to the axis of the transmission member 220 on the S plane with the projections of the upper stirring part 231 and the connecting part 232 on the S plane are respectively point A and point B; the bisector perpendicular to the axis of the transmission member 220 on the projection of the connecting part 232 on the S plane is defined as the F line; the distance from point A to the F line is greater than the distance from point B to the F line.

[0051] In other words, the distance from any point on the surface of the lower stirring part 233 to the bisector of the connecting part 232 is less than the distance from the same point on the surface of the upper stirring part 231 to the bisector of the connecting part 232. Thus, the upward turbulent flow effect generated by the stirring member 230 inside the kettle body 100 is greater than the downward turbulent flow effect generated by the upper stirring part 231. The force of the "turning" of the liquid below the lower stirring part 233 formed by the lower stirring part 233 is greater than the force of the "turning" of the liquid above the upper stirring part 231. The turbulent flow formed by the lower stirring part 233 is upward, and the turbulent flow formed by the upper stirring part 231 is downward. The two turbulent flows collide at the position near the connecting part 232, and the inorganic salts move upward along with the turbulent flow formed by the lower stirring part 233. Therefore, the overall degree of turbulent flow generated by the liquid inside the kettle body 100 is relatively large, effectively accelerating the mixing of the liquid inside the kettle body 100 and improving the production efficiency of the precursor material.

[0052] In a specific embodiment, the ratio range of the height of the lower stirring part 233 to the height of the upper stirring part 231 is: 0.7 to 0.9, specifically it can be 0.7, 0.8, 0.9. The height of the lower stirring part 233 is less than the height of the upper stirring part 231, and the height of the lower stirring part 233 is 0.7 times or 0.8 times or 0.9 times the height of the upper stirring part 231.

[0053] Since the height of the lower stirring part 233 is small and the amplitude of the curved surface transformation per unit length is large, the force that causes the "turning" of the liquid below the lower stirring part 233 is greater than the force that causes the "turning" of the liquid above the upper stirring part 231. The turbulence formed by the lower stirring part 233 is upward, and the turbulence formed by the upper stirring part 231 is downward. The two turbulences collide at a position near the connecting part 232, and the inorganic salt moves upward with the turbulence formed by the lower stirring part 233. At the same time, since the height of the lower stirring part 233 is small and the height of the upper stirring part 231 is large, compared with the case where the heights of the upper stirring part 231 and the lower stirring part 233 are the same, the overall center of gravity of the stirring member 230 in this embodiment is closer to the driving member 210. Therefore, when the driving member 210 drives the stirring member 230 to rotate, the closer the center of gravity is to the driving member 210, the less likely it is to deviate or shake.

[0054] Furthermore, an upper stirring part 231 is provided above the lower stirring part 233. In addition to making the turbulence formed by the liquid in the reaction kettle stronger, it also makes the center of gravity of the stirring member 230 move up a certain distance compared with the case where there is only the lower stirring part 233. This makes the position deviation of the lower stirring part 233 restricted by the upper stirring part 231 when the stirring member 230 rotates driven by the driving member 210, effectively reducing the shaking and eccentricity of the stirring member 230 during rotation, and increasing the production efficiency of the precursor material and the stability of the equipment.

[0055] In a specific embodiment, the ratio range of the height of the upper stirring part to the height of the connecting part is: 1.2 to 1.5, specifically 1.2, 1.3, 1.4, 1.5. The connecting part 232 has a certain height. When the driving member 210 drives the transmission member 220 and the stirring member 230 to rotate, the connecting part 232 can play a role in stirring the liquid in the kettle body 100, that is, the connecting part 232 rotates around the axis of the transmission member 220, and the viscous force between the edge 232' of the connecting part and the liquid drives the liquid to make a rotational motion. The liquid layer close to the edge 232' of the connecting part will obtain the same speed as the edge 232' of the connecting part due to viscosity, while the liquid layer far from the edge 232' of the connecting part will have a reduced speed due to inertia or internal viscous shear, forming a speed gradient, thereby enabling the liquid inside the reaction kettle to be more fully mixed and effectively promoting the reaction efficiency of the precursor material inside the reaction kettle.

[0056] In a specific embodiment, the upper stirring part 231, the connecting part 232, and the lower stirring part 233 are constructed as a whole and have a hollow structure inside. The setting of the hollow structure reduces the overall weight of the stirring member 230, enabling it to adapt to the stirring of more viscous materials. Compared with a solid stirring member, the stirring member of the present application can adapt to the stirring of more different materials and also reduces the load on the driving member 210, reducing production costs.

[0057] Furthermore, the upper stirring part 231, the connecting part 232, and the lower stirring part 233 are configured as a whole and have a hollow structure inside. A number of first through holes 240 are provided on the surfaces of the upper stirring part 231, the connecting part 232, and the lower stirring part 233, and the number of first through holes 240 are arranged at equal intervals. In the hollow structure formed by the upper stirring part 231, the connecting part 232, and the lower stirring part 233, the liquid in the reaction kettle will enter the hollow structure from the first through holes 240. When the driving member 210 drives the stirring member 230 to rotate, the liquid inside it is discharged from the first through holes 240 under the action of centrifugal force. At the same time, the liquid also flows into the inside of the driving member 210 through some of the first through holes 240 from the inside of the kettle body 100. On the one hand, the liquid discharged by centrifugal force from the first through holes 240 further enhances the turbulent phenomenon inside the kettle body 100. On the other hand, the provision of the first through holes 240 further reduces the resistance of the stirring member 230 during rotation.

[0058] In a specific embodiment, when the stirring member 230 has a hollow structure but no first through holes 240 are provided on its surface, the stirring member 230 can be placed in a reaction kettle with a volume of at most 160 liters. When the volume is greater than 160 liters, the pressure on the surface of the stirring member 230 by the liquid is relatively large, and the service life of the stirring member 230 is reduced. At the same time, due to the relatively large rotational resistance of the stirring member 230, it cannot play the role of stirring and forming turbulence. When a large number of first through holes 240 are provided on the stirring member 230, the pressure on its outer surface is equal to the pressure inside it. Secondly, under the action of the first through holes 240, when the volume exceeds 160 liters, the rotational resistance does not reach the upper limit. According to a large number of experiments, when the precursor material is dimethylamino zirconium, in the case where other conditions are the same, when the volume of the inside of the kettle body 100 is not greater than 195 liters, the probability of clogging the filter screen in the next filtration step is greatly reduced, and it has a good stirring effect and forms turbulence.

[0059] As Figure 4 shown, in a specific embodiment, a number of second through holes 250 are provided on the surfaces of the upper stirring part 231 and the lower stirring part 233, and a number of third through holes 260 are provided on the surface of the connecting part 232. The second through holes 250 are circular holes, and the third through holes 260 are oval holes.

[0060] Specifically, the through holes on the upper stirring part 231 and the lower stirring part 233 are different from the through holes on the side surface of the connecting part 232. For the sake of clear description, the through holes on the upper stirring part 231 and the lower stirring part 233 are defined as the second through holes 250. The second through holes 250 are evenly arranged on the surfaces of the upper stirring part 231 and the lower stirring part 233, and the axes of the second through holes 250 all intersect at the geometric center P of the stirring member. The liquid in the reaction kettle will enter its hollow structure from the second through holes 250. When the driving member 210 drives the stirring member 230 to rotate, the liquid inside it is discharged from the second through holes 250 under the action of centrifugal force, and at the same time, the liquid also flows into the inside of the driving member 210 through some of the second through holes 250 from inside the kettle body 100. This effectively reduces the resistance when the stirring member 230 stirs the precursor material.

[0061] More specifically, the second through holes 250 are set to be circular while the third through holes 260 are set to be elliptical. When the liquid collides inside the stirring member 230, it can be discharged from the third through holes 260 of the stirring member 260. The elliptical setting can make the impact force generated when the liquid is discharged larger, increasing the turbulence effect inside the reaction kettle.

[0062] Define the plane passing through the cross-section of the connecting part 232 and perpendicular to the axis of the transmission member 220 as the N plane. The projections of the second through holes 250 on the surface of the upper stirring part 231 and the second through holes 250 on the lower stirring part 233 on the N plane are staggered. There is a certain dislocation between the liquid entering the inside of the stirring member 230 from the second through holes 250 on the upper stirring part 231 and the liquid entering the inside of the stirring member 230 from the second through holes 250 on the lower stirring part 233, effectively making the liquid inside the stirring member 230 more "chaotic". Furthermore, the turbulence formed by the liquid entering and discharging from the stirring member 230 inside the kettle body becomes more intense, enabling the inorganic salts to be better distributed in the solution without sedimentation.

[0063] In a specific embodiment, the projection of the stirring member 230 on the N surface is circular, and the ratio of the diameter of the connecting portion 232 to the inner diameter of the kettle body 100 is less than or equal to 1 / 2. One end of the lower stirring portion 233 away from the connecting portion 232 is a tip 270. The distance from the farthest point of the lower stirring portion 233 away from the connecting portion 232 to the bottom of the kettle body 100 is L. The ratio of the diameter of the connecting portion 232 to the inner diameter of the kettle body 100 is not greater than 1 / 2. When the stirring member 230 is too large, it will interfere with the turbulence formed at the bottom of the lower stirring portion 233. Although the stirring effect is increased to a certain extent, the effect of the turbulence formed by the stirring member 230 is reduced. The structure of the lower stirring portion 233 with one end away from the connecting portion 232 being a tip 270 is adopted. When the stirring member 230 rotates, the tip 270 at its bottom can minimize the dead angle area where inorganic salts settle at the bottom of the kettle body to the greatest extent, and the projection of the stirring member is circular, which can cooperate with the tip at the bottom to make the overall stirring device more stable during rotation.

[0064] In a specific embodiment, a heating mechanism 300 is further provided inside the kettle body 100, and the heating mechanism 300 is arranged in a spiral shape. The heating mechanism 300 is a pipeline. A heat medium inlet and an outlet are provided on the kettle cover. The pipeline of the heating mechanism 300 extends into the kettle body 100 and is arranged in a spiral shape, increasing the heat exchange area between the pipeline and the liquid inside the kettle body 100 and increasing the efficiency of the precursor reaction.

[0065] The above description is only some preferred embodiments of the present disclosure and an explanation of the applied technical principles. Those skilled in the art should understand that the scope of the invention involved in the embodiments of the present disclosure is not limited to the technical solutions formed by the specific combination of the above technical features, but should also cover other technical solutions formed by any combination of the above technical features or their equivalent features without departing from the above inventive concept. For example, the technical solutions formed by mutually replacing the above features with the (but not limited to) technical features with similar functions disclosed in the embodiments of the present disclosure.

Claims

1. A semiconductor precursor stirred reactor device, comprising: A kettle body, having a containing space required for the reaction of the precursor material; The stirring device comprises a driving member, a transmission member and a stirring member, wherein one end of the driving member is fixedly connected to the transmission member, and one end of the transmission member away from the driving member extends into the kettle body and is connected to the stirring member; Features: The stirring member comprises an upper stirring portion, a connecting portion and a lower stirring portion, which are assembled together to form the whole of the stirring member, the upper stirring portion is arranged above the connecting portion, and the lower stirring portion is arranged below the connecting portion, and the outer surfaces of the upper stirring portion and the lower stirring portion are curved surfaces, which are concave surfaces facing the geometric center (P) of the stirring member, and the curved surfaces are tangent to the surface of the connecting portion.

2. The semiconductor precursor stirred reactor device according to claim 1, characterized in that: The plane passing through the axis of the transmission part is defined as the S plane, and the intersection points of any straight line G parallel to the axis of the transmission part on the S plane and the projections of the upper stirring part and the connecting part on the S plane are point A and point B respectively; Define the bisector of the connecting part perpendicular to the axis of the transmission part on the projection of the connecting part on the S surface as line F; The distance from point A to line F is greater than the distance from point B to line F.

3. The semiconductor precursor stirred reactor device according to claim 2, characterized in that: The ratio of the height of the lower stirring part to the height of the upper stirring part ranges from 0.7 to 0.

9.

4. The semiconductor precursor stirred reactor device according to claim 3, characterized in that: The ratio of the height of the upper stirring portion to the height of the connecting portion is in the range of 1.2 to 1.

5.

5. The semiconductor precursor stirred reactor device according to any one of claims 1 to 4, characterized in that: The upper stirring part, the connecting part and the lower stirring part are constructed as a whole and the interior thereof is a hollow structure.

6. The semiconductor precursor stirred reactor device according to claim 5, characterized in that: A plurality of first through holes are arranged on the surfaces of the upper stirring portion, the connecting portion and the lower stirring portion, and the plurality of first through holes are arranged at equal distances.

7. The semiconductor precursor stirred reactor device according to claim 5, characterized in that: A plurality of second through holes are arranged on the surfaces of the upper stirring part and the lower stirring part, and a plurality of third through holes are arranged on the surface of the connecting part. The second through holes are perfect circular holes, and the third through holes are elliptical holes.

8. The semiconductor precursor stirred reactor device according to claim 7, characterized in that: A plane passing through the cross section of the connecting portion and perpendicular to the axis of the transmission member is defined as the N plane, and the projections of the second through holes on the surface of the upper stirring portion and the second through holes on the lower stirring portion on the N plane are arranged alternately.

9. The semiconductor precursor stirred reactor device according to claim 8, characterized in that: The projection of the stirring member on the N plane is circular, and the ratio of the diameter of the connecting portion to the inner diameter of the kettle body is less than or equal to 1 / 2.

10. The semiconductor precursor stirred reactor device according to claim 7, characterized in that: The end of the lower stirring portion away from the connecting portion is a pointed end.

11. The semiconductor precursor stirred reactor device according to claim 10, characterized in that: The distance from the farthest point of the lower stirring part away from the connecting part to the bottom of the kettle body is L.

12. The semiconductor precursor stirred reactor device according to claim 7, characterized in that: A heating mechanism is also provided inside the kettle body, and the heating mechanism is arranged in a spiral shape.

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