Carrier plate transmission method and vacuum coating device

Abstract

The invention relates to a carrier plate conveying method and a vacuum coating device, and in the conveying mode, a plurality of carrier plates are sequentially conveyed from a heating cavity, a first transition cavity, a second transition cavity and a coating cavity for coating. Wherein the first carrier plate is conveyed at a first speed, and when it is detected that the rear end of the first carrier plate leaves the first detection site, the second carrier plate is conveyed to the coating cavity at a second speed, and meanwhile, the third carrier plate is conveyed from the heating cavity to the first transition cavity at a third speed for waiting. The third speed is set to be smaller than the second speed, the time of the support plate in the heating cavity is prolonged, it is guaranteed that the support plate has enough air outlet efficiency before film coating, at the moment, the speed of the third support plate entering the first transition cavity from the heating cavity is relatively small, and falling and deviation of the third support plate can be reduced. The second speed is set to be larger than the first speed, namely the acceleration process is set in the second transition cavity, and falling and deviation caused when the carrier plate enters the first transition cavity from the heating cavity are reduced.

Description

Technical Field

[0001] The present application relates to the technical field of vacuum coating, and particularly to a carrier plate transmission method and a vacuum coating device. Background Art

[0002] Currently, the carrier plate transmission system of a conventional vacuum coating equipment includes a loading chamber, a heating chamber, a transition chamber, and a coating chamber. The above-mentioned chambers are arranged linearly, and this linear arrangement is called an inline structure.

[0003] For an inline dynamic vacuum coating line, the heating chamber mainly functions to discharge gas from the carrier plate, reducing the influence of water vapor adsorbed on the carrier plate on the coating quality. With the increase in the production capacity per unit set and the shortening of the production beat, in order to ensure sufficient gas discharge efficiency of the carrier plate before coating, it is often necessary to increase the temperature of the heating chamber, which will cause the carrier plate to drop and shift during the process of entering the transition chamber at high speed from the heating chamber. In the current conventional method, in order to achieve small-gap coating between consecutive carrier plates, the speed at which the carrier plate enters the transition chamber from the heating chamber is often the fastest during the transmission process of the entire chamber. Summary of the Invention

[0004] Based on this, the present application provides a carrier plate transmission method and a vacuum coating device to reduce the dropping and shifting of the carrier plate while ensuring sufficient gas discharge efficiency before coating.

[0005] To achieve the above object, on the one hand, the present invention provides a carrier plate transmission method for sequentially transmitting a plurality of carrier plates from a heating chamber, a first transition chamber, a second transition chamber, and a coating chamber; wherein, a first detection site is provided in the second transition chamber, and the carrier plate has a front end and a rear end; the carrier plate transmission method includes:

[0006] Controlling a first carrier plate to enter the coating chamber at a first speed uniformly; and when the front end of the first carrier plate enters the coating chamber, the rear end of the first carrier plate has not reached the first detection site of the second transition chamber;

[0007] When it is detected that the rear end of the first carrier plate leaves the first detection site of the second transition chamber, transmitting a second carrier plate waiting in the first transition chamber to the coating chamber at a second speed, and when the front end of the second carrier plate reaches the first detection site of the second transition chamber, reducing the transmission speed from the second speed to the first speed, where the second speed > the first speed;

[0008] When it is detected that the rear end of the first carrier plate leaves the first detection site of the second transition chamber, controlling a third carrier plate to be transmitted from the heating chamber to the first transition chamber at a third speed to wait, where the third speed < the second speed.

[0009] In one embodiment, the third speed ≥ the first speed.

[0010] In one embodiment, during the transfer of the third carrier plate from the heating chamber to the first transition chamber, the third speed remains unchanged.

[0011] In one embodiment, during the transfer of the third carrier plate from the heating chamber to the first transition chamber, the third speed gradually increases.

[0012] In one embodiment, n second detection sites are further provided in the second transition chamber and are arranged in sequence along the transfer direction of the carrier plate. The second detection sites are located between the first detection site and the coating chamber. When it is detected that the rear end of the first carrier plate leaves the first detection site, the second carrier plate waiting in the first transition chamber is transferred to the coating chamber at the second speed. And when the front end of the second carrier plate reaches the first detection site, after the transfer speed is reduced from the second speed to the first speed, it includes:

[0013] When it is detected that the rear end of the first carrier plate leaves the i-th second detection site, the second carrier plate is accelerated and transferred to the coating chamber. And when the front end of the second carrier plate reaches the i-th second detection site, the transfer speed is reduced to the first speed, where 1 ≤ i ≤ n, and both i and n are positive integers.

[0014] In one embodiment, a third detection site is provided in the first transition chamber. When it is detected that the rear end of the first carrier plate leaves the first detection site, controlling the third carrier plate to be transferred from the heating chamber to the first transition chamber at the third speed and wait, includes:

[0015] The third carrier plate is transferred at the third speed. When it is detected that the front end of the third carrier plate reaches the third detection site of the first transition chamber, controlling the third carrier plate to stop transferring; and when the third carrier plate stops transferring, the third carrier plate is completely placed inside the first transition chamber.

[0016] On the other hand, the present application also provides a vacuum coating device, and the vacuum coating device includes:

[0017] A heating chamber, a first transition chamber, a second transition chamber, a coating chamber, and a carrier plate transfer control module. A first detection site is provided in the second transition chamber. The carrier plate transfer control module includes:

[0018] A first control unit, configured to control the first carrier plate to be transferred to the coating chamber at a uniform first speed; and when the front end of the first carrier plate enters the coating chamber, the rear end of the first carrier plate does not reach the first detection site of the second transition chamber;

[0019] A second control unit, configured to, when detecting that the rear end of the first carrier plate leaves the first detection site of the second transition chamber, transfer a second carrier plate waiting in the first transition chamber to the coating chamber at a second speed, and when the front end of the second carrier plate reaches the first detection site of the second transition chamber, reduce the transfer speed from the second speed to the first speed, where the second speed > the first speed;

[0020] A third control unit, configured to, when detecting that the rear end of the first carrier plate leaves the first detection site of the second transition chamber, control a third carrier plate to be transferred from the heating chamber to the first transition chamber at a third speed for waiting, where the third speed < the second speed.

[0021] In one embodiment, the length of the second transition chamber ≥ the length of the first transition chamber ≥ the length of the carrier plate.

[0022] In one embodiment, at least two second detection sites are included in the second transition chamber.

[0023] In one embodiment, when n second detection sites are provided, in the direction from the first transition chamber to the second transition chamber, the distance between adjacent second detection sites gradually decreases; where n > 1 and n is a positive integer.

[0024] Compared with the prior art, the above technical solution has the following advantages:

[0025] The present application provides a method for transferring a carrier plate and a vacuum coating device. Among them, a first carrier plate enters the coating chamber at a first speed. At this time, the front end of the first carrier plate enters the coating chamber, while the rear end of the first carrier plate has not reached the first detection site in the second transition chamber. Continuously transfer the carrier plate. When detecting that the rear end of the first carrier plate leaves the first detection site in the second transition chamber, transfer a second carrier plate waiting in the first transition chamber to the coating chamber at a second speed. When the front end of the second carrier plate reaches the first detection site in the second transition chamber, reduce the transfer speed of the second carrier plate from the second speed to the first speed. At the same time as detecting that the rear end of the first carrier plate leaves the first detection site in the second transition chamber, transfer a third carrier plate from the heating chamber to the first transition chamber at a third speed for waiting.

[0026] Among them, the second speed > the first speed, and the third speed < the second speed. Setting the third speed less than the second speed increases the time of the carrier plate in the heating chamber, ensuring sufficient gas outlet efficiency of the carrier plate before coating. At this time, when the third carrier plate enters the first transition chamber from the heating chamber, the speed is relatively small, which can reduce the dropping and deviation of the third carrier plate. Setting the second speed greater than the first speed, that is, setting the acceleration process in the second transition chamber, reduces the dropping and deviation caused when the carrier plate enters the first transition chamber from the heating chamber (high-temperature state). Accelerating in the second transition chamber (where the temperature of the carrier plate drops) can increase the speed to a very high level, thereby achieving large-speed pursuit, ensuring that the distance between the carrier plates is small enough, and reducing the waste of the target material. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0028] Figure 1 It is a schematic flowchart of a method for transporting a carrier plate provided by an embodiment of the present application;

[0029] Figure 2 It is a schematic structural diagram of a vacuum coating device provided by an embodiment of the present application;

[0030] Figure 3 It is a schematic structural diagram of another vacuum coating device provided by an embodiment of the present application;

[0031] Figure 4 It is a schematic structural diagram of yet another vacuum coating device provided by an embodiment of the present application;

[0032] Figure 5 It is a schematic structural diagram of yet another vacuum coating device provided by an embodiment of the present application.

[0033] Description of reference numerals: 01 - first carrier plate; 02 - second carrier plate; 03 - third carrier plate; 10 - loading chamber; 11 - heating chamber; 12 - first transition chamber; 121 - third detection site; 13 - second transition chamber; 131 - first detection site; 132 - second detection site; 14 - coating chamber. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0034] To facilitate the understanding of the present application, the present application will be described more comprehensively below with reference to the relevant accompanying drawings. Embodiments of the present application are shown in the drawings. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, these embodiments are provided to make the disclosure of the present application more thorough and comprehensive.

[0035] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field to which this application belongs. The terms used in the description of this application herein are only for the purpose of describing specific embodiments and are not intended to limit this application.

[0036] It should be understood that when a layer is referred to as "on", "adjacent to", or "connected to" another layer, it can be directly on, adjacent to, or connected to the other layer, or there may be intervening layers. In contrast, when an element is referred to as "directly on", "directly adjacent to", or "directly connected to" another layer, there are no intervening layers.

[0037] As used herein, the singular forms "a", "an", and "the" may also include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms "comprising", "including", or "having", etc., specify the presence of the stated features, wholes, steps, operations, components, parts, or combinations thereof, but do not exclude the possibility of the presence or addition of one or more other features, wholes, steps, operations, components, parts, or combinations thereof.

[0038] Based on the content in the background art, adjacent carrier plates sequentially enter the transition chamber from the heating chamber, and the chasing between two adjacent carrier plates is realized in the transition chamber, so that the distance between the two carrier plates is minimized in the coating chamber. The smaller the gap between the carrier plates means the less loss of the coating material. To achieve the above technical effect, usually, the carrier plates enter the transition chamber from the heating chamber and are chased at a relatively high transmission speed. However, the inventor found that after the temperature of the heating chamber is increased, when the carrier plate carrying the substrate enters the transition chamber from the heating chamber, due to the large deformation of the carrier plate after high-temperature treatment, and the combination of the deformation of the carrier plate and the fast transmission speed, it is easy to cause the dropping and offset of the substrate, thus affecting the subsequent coating.

[0039] Based on this, the present application provides a carrier plate transfer method and a vacuum coating device. Among them, the first carrier plate enters the coating chamber at a first speed. At this time, the front end of the first carrier plate enters the coating chamber, while the rear end of the first carrier plate has not reached the first detection site in the second transition chamber. Continuously perform carrier plate transfer. When it is detected that the rear end of the first carrier plate leaves the first detection site in the second transition chamber, the second carrier plate waiting in the first transition chamber is transferred to the coating chamber at a second speed. When the front end of the second carrier plate reaches the first detection site in the second transition chamber, the transfer speed of the second carrier plate is reduced from the second speed to the first speed. At the same time as it is detected that the rear end of the first carrier plate leaves the first detection site in the second transition chamber, the third carrier plate is transferred from the heating chamber to the first transition chamber at a third speed for waiting.

[0040] Among them, the second speed > the first speed, and the third speed < the second speed. Setting the third speed to be less than the second speed increases the time of the carrier plate in the heating chamber, ensuring that the carrier plate has sufficient outgassing efficiency before coating. At this time, when the third carrier plate enters the first transition chamber from the heating chamber, the speed is relatively small, which can reduce the dropping and offset of the third carrier plate. Setting the second speed to be greater than the first speed, that is, setting the acceleration process in the second transition chamber, reduces the dropping and offset caused when the carrier plate enters the first transition chamber from the heating chamber. Accelerating in the second transition chamber can increase the speed to a very high level, so as to achieve large-speed pursuit, ensure that the distance between carrier plates is small enough, and reduce the waste of the target material.

[0041] In order to make the above objects, features, and advantages of the present application more obvious and understandable, the following further detailed description of the present application will be given in conjunction with the accompanying drawings and specific embodiments.

[0042] Please refer to Figure 1-2 , Figure 1 which is a schematic flow chart of a carrier plate transfer method provided by an embodiment of the present application; Figure 2 which is a schematic structural diagram of a vacuum coating device provided by an embodiment of the present application. When transferring the carrier plate, a plurality of carrier plates are sequentially transferred from the heating chamber 11, the first transition chamber 12, the second transition chamber 13, and the coating chamber 14; among them, a first detection site 131 is provided in the second transition chamber 13, and the carrier plate has a front end and a rear end (as Figure 3 shown). The carrier plate transfer method includes the following steps:

[0043] S10: Control the first carrier plate 01 to enter the coating chamber 14 at a first constant speed; and when the front end of the first carrier plate 01 enters the coating chamber 14, the rear end of the first carrier plate 01 has not reached the first detection site 131 of the second transition chamber 13.

[0044] In this step, when the carrier plate is coated, multiple carrier plates enter the coating device. The front end of the carrier plate is the end that enters the coating device first in the direction of carrier plate transmission, and the rear end of the carrier plate is the end that enters the coating device later in the direction of carrier plate transmission. The carrier plate whose front end is entering the coating chamber 14 is regarded as the first carrier plate 01.

[0045] Multiple carrier plates will be transmitted through the coating device. First, they will enter the loading chamber 10, which can realize the transition between the atmospheric environment and the vacuum chamber, ensuring the vacuum stability and process continuity of the coating device. Then they will pass through the heating chamber 11, the first transition chamber 12, and the second transition chamber 13 in sequence, and finally enter the coating chamber 14 for coating.

[0046] During this transmission process, first control the first carrier plate 01 to enter the coating chamber 14 at a uniform speed of the first speed. At this time, since the length of the second transition chamber 13 is greater than the length of the first carrier plate 01, when the front end of the first carrier plate 01 enters the coating chamber 14, the rear end of the first carrier plate 01 has not reached the first detection site 131 of the second transition chamber 13.

[0047] Moreover, the longer length of the second transition chamber 13 can enable the carrier plates waiting in the heating chamber 11 to have enough time to outgas, thereby reducing the influence of the water vapor adsorbed on the carrier plates on the coating quality, and due to reducing the risk of wafer drop and offset, after the carrier plates enter the transition chamber at a low speed, they have enough length to catch up.

[0048] It should be noted that the first detection site 131 is provided with a first detection device. For example, the first detection device can include but is not limited to a position sensor, which can detect the position information of the carrier plate.

[0049] S20: When it is detected that the rear end of the first carrier plate 01 leaves the first detection site 131 of the second transition chamber 13, transmit the second carrier plate 02 waiting in the first transition chamber 12 to the coating chamber 14 at the second speed, and when the front end of the second carrier plate 02 reaches the first detection site 131 of the second transition chamber 13, reduce the transmission speed from the second speed to the first speed, where the second speed > the first speed;

[0050] When it is detected that the rear end of the first carrier plate 01 leaves the first detection site 131 of the second transition chamber 13, control the third carrier plate 03 to be transmitted from the heating chamber 11 to the first transition chamber 12 to wait, where the third speed < the second speed.

[0051] In this step, when the first carrier plate 01 enters the coating chamber 14, the second carrier plate 02 is already waiting in the first transition chamber 12. When the detection device detects that the rear end of the first carrier plate 01 leaves the first detection site 131 of the second transition chamber 13, the second carrier plate 02 waiting in the first transition chamber 12 is transmitted towards the coating chamber 14 at a second speed, where the second speed > the first speed. That is, the acceleration process of the carrier plate is set in the second transition chamber 13, reducing the dropping and offset of the substrate located on the carrier plate when the carrier plate enters the first transition chamber 12 from the heating chamber 11. At the same time, it can ensure that the distance between adjacent carrier plates can be reduced to a smaller value. When the front end of the second carrier plate 02 reaches the first detection site 131 of the second transition chamber 13, the transmission speed is reduced from the second speed to the first speed, which can avoid the problem of collision between the first carrier plate 01 and the second carrier plate 02 due to the too fast speed of the second carrier plate 02.

[0052] At the same time when the detection device detects that the rear end of the first carrier plate 01 leaves the first detection site 131 of the second transition chamber 13, control the third carrier plate 03 to be transmitted from the heating chamber 11 to the first transition chamber 12 at a third speed to wait. At this time, the third speed < the second speed. Let the speed of the third carrier plate 03 entering the first transition chamber 12 from the heating chamber 11 be less than the speed of the second carrier plate 02 chasing the first carrier plate 01, which can make the heating time of the third carrier plate 03 in the heating chamber 11 sufficient, so as to ensure that the third carrier plate 03 has sufficient outgassing efficiency before coating, thus avoiding the dropping and offset of the substrate and further affecting the subsequent coating. And at this time, when the third carrier plate 03 enters the first transition chamber 12 from the heating chamber 11, the speed is relatively small, which can reduce the dropping and offset of the substrate on the third carrier plate 03.

[0053] It should be noted that during the continuous transmission process, when the rear end of the second carrier plate 02 leaves the first detection site 131 of the second transition chamber 13, the front end of the second carrier plate 02 has entered the coating chamber 14. The second carrier plate 02 is used as the next first carrier plate 01, and this transmission process is cycled to achieve the dynamic coating process.

[0054] In this embodiment, the second speed > the first speed, and the third speed < the second speed. Setting the third speed less than the second speed increases the time of the third carrier plate 03 in the heating chamber 11, ensuring that the carrier plate has sufficient outgassing efficiency before coating. At this time, when the third carrier plate 03 enters the first transition chamber 12 from the heating chamber 11, the speed is relatively small, which can reduce the dropping and offset of the substrate on the third carrier plate 03. Setting the second speed greater than the first speed, that is, setting the acceleration process in the second transition chamber 13, reduces the dropping and offset of the substrate on the carrier plate when the carrier plate enters the first transition chamber 12 from the heating chamber 11. And after the carrier plate enters the first transition chamber 12, its temperature drops. Accelerating in the second transition chamber 13 can increase the speed to a very high level, so as to achieve large-speed chasing, ensure that the distance between the carrier plates is small enough, and reduce the waste of the target material.

[0055] In another embodiment of the present application, the third speed ≥ the first speed.

[0056] Specifically, in this embodiment, the second speed > the third speed ≥ the first speed. At this time, the speed at which the third carrier plate 03 is transferred from the heating chamber 11 to the first transition chamber 12 is between the first speed and the second speed, and is transferred at a relatively small chasing speed and a relatively large or the same process speed. It should be noted that the first speed can be the process speed. At this time, it can be ensured that the carrier plate stays in the heating chamber 11 for enough time, ensuring that the carrier plate has sufficient outgassing efficiency before coating, and at the same time, it can ensure that the production rhythm is not affected while further reducing the distance between two adjacent substrates entering the coating chamber 14 and reducing the waste of the target material.

[0057] In another embodiment of the present application, during the transfer of the third carrier plate 03 from the heating chamber 11 to the first transition chamber 12, the third speed remains unchanged.

[0058] Specifically, in this embodiment, during the transfer of the third carrier plate 03 from the heating chamber 11 to the first transition chamber 12, keeping the third speed unchanged can make the transfer of the carrier plate more stable and further reduce the possibility of the carrier plate falling and shifting.

[0059] In another embodiment of the present application, during the transfer of the third carrier plate 03 from the heating chamber 11 to the first transition chamber 12, the third speed gradually increases but is less than the second speed.

[0060] Specifically, in this embodiment, during the transfer of the third carrier plate 03 from the heating chamber 11 to the first transition chamber 12, the third speed is set to a gradually increasing speed. For example, the third speed is equal to the first speed at the beginning and then gradually increases. In this way, the transfer speed of the first section from the heating chamber 11 to the first transition chamber 12 can be reduced, making the acceleration process more linear, reducing the inertial impact, and further reducing the possibility of the carrier plate falling and shifting.

[0061] In another embodiment of the present application, n second detection sites 132 (as Figure 3 shown) are further provided in the second transition chamber 13 along the transfer direction of the carrier plate. The second detection sites 132 are located between the first detection site 131 and the coating chamber 14; when it is detected that the rear end of the first carrier plate 01 leaves the first detection site 131, the second carrier plate 02 waiting in the first transition chamber 12 is transferred to the coating chamber 14 at the second speed, and when the front end of the second carrier plate 02 reaches the first detection site 131, the transfer speed is reduced from the second speed to the first speed, including:

[0062] When it is detected that the rear end of the first carrier plate 01 leaves the i-th second detection site 132, the second carrier plate 02 is accelerated to be transported towards the coating chamber 14, and when the front end of the second carrier plate 02 reaches the i-th second detection site 132, the transport speed is reduced to the first speed, where 1 ≤ i ≤ n, and both i and n are positive integers.

[0063] Specifically, n second detection sites 132 are also provided in the second transition chamber 13 in sequence along the transport direction of the carrier plate. For example, 1 or 2 or 3 second detection sites 132 are provided between the first detection site 131 and the coating chamber 14 to form two or three or four chasing processes, thereby reducing the distance between the first carrier plate 01 and the second carrier plate 02.

[0064] Taking the case where there are 2 second detection sites 132 in the second transition chamber 13 as an example for illustration, the positioning of the initial carrier plate is as follows: the front end of the first carrier plate 01 enters the coating chamber 14 and starts to be transported at a uniform speed at the first speed; the second carrier plate 02 is located in the first transition chamber 12 waiting; the third carrier plate 03 is located in the heating chamber 11 (as Figure 3 shown).

[0065] The specific transmission process includes: when the rear end of the first carrier plate 01 leaves the first detection site 131, the distance between the second carrier plate 02 and the first carrier plate 01 is X1 (as Figure 2 shown). At this time, the second carrier plate 02 and the third carrier plate 03 are controlled to be transported simultaneously, including:

[0066] Controlling the second carrier plate 02 to accelerate to the second speed to chase the first carrier plate 01. When the front end of the second carrier plate 02 reaches the first detection site 131, the second carrier plate 02 decelerates to the first speed and follows. At this time, the distance between the second carrier plate 02 and the first carrier plate 01 is X2 (as Figure 3 shown), where X2 < X1. At the same time, the third carrier plate 03 enters the first transition chamber 12 from the heating chamber 11 at the third speed and stops waiting after completely entering the first transition chamber 12 (as Figure 4 shown). At this time, the valve between the heating chamber 11 and the first transition chamber 12 can be closed to facilitate the subsequent entry of the carrier plate into the heating chamber 11. It should be noted that in this embodiment, the second speed > the third speed ≥ the first speed.

[0067] After that, the first carrier plate 01 and the second carrier plate 02 continue to be transported. Before the rear end of the first carrier plate 01 leaves the first second detection site 132a, the distance between the first carrier plate 01 and the second carrier plate 02 is still X2 (as Figure 3As shown). When the rear end of the first carrier plate 01 leaves the first second detection site 132a, the second carrier plate 02 is controlled to accelerate to the fourth speed to chase the first carrier plate 01. When the front end of the second carrier plate 02 reaches the first second detection site 132a, the second carrier plate 02 decelerates to the first speed to follow. At this time, the distance between the second carrier plate 02 and the first carrier plate 01 is X3 (as Figure 4 shown), where X3 < X2 < X1.

[0068] The first carrier plate 01 and the second carrier plate 02 continue to be transported. When the rear end of the first carrier plate 01 leaves the second second detection site 132b, the second carrier plate 02 chases again. The second carrier plate 02 is controlled to accelerate to the fifth speed to chase the first carrier plate 01. When the front end of the second carrier plate 02 reaches the second second detection site 132b, the second carrier plate 02 decelerates to the first speed to follow. At this time, the distance between the second carrier plate 02 and the first carrier plate 01 is X4 (as Figure 5 shown), where X4 < X3 < X2 < X1. At this time, X4 is the final distance between the second carrier plate 02 and the first carrier plate 01, and at the same time, it enters the coating chamber 14 at the first speed, meeting the mass production process requirements. It should be noted that in this embodiment, the second speed ≥ the fourth speed ≥ the fifth speed > the third speed ≥ the first speed, and the chasing speed gradually decreases, which can make the acceleration process more linear.

[0069] When the rear end of the second carrier plate 02 leaves the first detection site 131, the second carrier plate 02 is used as the first carrier plate 01, and the subsequent carrier plates continue this chasing mode to form a complete action loop.

[0070] In this embodiment, a specific embodiment is also provided for easy understanding. It should be noted that in this embodiment, the length of the second transition chamber 13 is set to be greater than the length of the carrier plate. In this way, the carrier plate waiting in the heating chamber 11 has enough time to outgas, thereby reducing the influence of the water vapor adsorbed on the carrier plate on the coating quality, and reducing the risk of dropping and offset. After the carrier plate enters the transition chamber at a low speed, it has enough length to chase. The following is an example.

[0071] For example, assume that the length of the carrier plate is 2000 mm, the length of the second transition chamber 13 is greater than the length of the first transition chamber 12, and the length of the second transition chamber 13 is greater than the length of the carrier plate. The first speed of the first carrier plate 01 is 4 m / min. When the second carrier plate 02 is waiting in the first transition chamber 12, the distance between the front end of the second carrier plate 02 and the first detection site 131 is 400 mm, the distance between the first detection site 131 and the first second detection site 132a is 250 mm, and the distance between the first second detection site 132a and the second second detection site 132b is 150 mm. At this time, the carrier plate transmission method can be:

[0072] The first carrier plate 01 and the second carrier plate 02 always maintain a fixed distance of 320 mm in the first transition cavity 12 and the second transition cavity 13. When the rear end of the first carrier plate 01 leaves the first detection site 131, the second carrier plate 02 accelerates to a second speed of 15 m / min to chase the first carrier plate 01; when the front end of the second carrier plate 02 reaches the first detection site 131, it decelerates to the first speed and maintains a fixed distance of about 85 mm from the first carrier plate 01; meanwhile, the third carrier plate 03 enters the first transition cavity 12 at a low third speed which is greater than or equal to the first speed of 4 m / min and less than the second speed of 15 m / min.

[0073] When the rear end of the first carrier plate 01 leaves the first second detection site 132a, the second carrier plate 02 accelerates again to a fourth speed of 10 m / min to chase the first carrier plate 01. When the front end of the second carrier plate 02 reaches the first second detection site 132b, it decelerates to the first speed and maintains a fixed distance of about 34 mm from the first carrier plate 01.

[0074] When the rear end of the first carrier plate 01 leaves the second second detection site 132b, the second carrier plate 02 accelerates again to a fifth speed of 8 m / min to chase the first carrier plate 01. When the front end of the second carrier plate 02 reaches the second second detection site 132b, it decelerates to the first speed and maintains a fixed distance of about 17 mm from the first carrier plate 01. Then, the first carrier plate 01 and the second carrier plate 02 enter the coating chamber 14 at a constant speed for coating.

[0075] In this embodiment, the second carrier plate 02 chases the first carrier plate 01 multiple times, which can further reduce the distance between the carrier plates. During the coating process of the continuous coating equipment, the distance between the carrier plates is controlled below 20 mm and can be freely controlled, reducing the waste of the target material and improving the process stability and product yield of the coating.

[0076] In another embodiment of the present application, the first transition cavity 12 is provided with a third detection site 121; when it is detected that the rear end of the first carrier plate 01 leaves the first detection site 131, controlling the third carrier plate 03 to be transferred from the heating chamber 11 to the first transition cavity 12 at the third speed and wait, includes:

[0077] The third carrier plate 03 is transferred at the third speed. When it is detected that the front end of the third carrier plate 03 reaches the third detection site 121 of the first transition cavity 12, controlling the third carrier plate 03 to stop transferring; and when the third carrier plate 03 stops transferring, the third carrier plate 03 is completely placed inside the first transition cavity 12.

[0078] Specifically, a third detection site 121 is further provided in the first transition chamber 12. The third detection site 121 is located on the side of the first transition chamber 12 close to the second transition chamber 13. When the front end of the second carrier plate 02 reaches the third detection site 121, the second carrier plate 02 stops transmitting and waits.

[0079] It should be noted that the distance between the third detection site 121 and the first detection site 131 is the distance between the front end of the second carrier plate 02 and the first detection site 131 when the second carrier plate 02 is waiting in the first transition chamber 12.

[0080] In this embodiment, setting the third detection site 121 can ensure that it is detected that the third carrier plate 03 is completely placed in the first transition chamber 12, thereby realizing the transmission process.

[0081] Based on the above-described carrier plate transmission method, in another embodiment of the present application, a vacuum coating device is further provided. The vacuum coating device includes:

[0082] A heating chamber 11, a first transition chamber 12, a second transition chamber 13, a coating chamber 14, and a carrier plate transmission control module (not shown). A first detection site 131 is provided in the second transition chamber 13 (as Figure 2 shown), and the carrier plate transmission control module includes:

[0083] A first control unit for controlling the first carrier plate 01 to be uniformly transmitted into the coating chamber 14 at a first speed; and when the front end of the first carrier plate 01 enters the coating chamber 14, the rear end of the first carrier plate 01 has not reached the first detection site 131 of the second transition chamber 13;

[0084] A second control unit for, when it is detected that the rear end of the first carrier plate 01 leaves the first detection site 131 of the second transition chamber 13, transmitting the second carrier plate 02 waiting in the first transition chamber 12 to the coating chamber 14 at a second speed, and when the front end of the second carrier plate 02 reaches the first detection site 131 of the second transition chamber 13, reducing the transmission speed from the second speed to the first speed, where the second speed > the first speed;

[0085] A third control unit for, when it is detected that the rear end of the first carrier plate 01 leaves the first detection site 131 of the second transition chamber 13, controlling the third carrier plate 03 to be transmitted from the heating chamber 11 to the first transition chamber 12 to wait at a third speed, where the third speed < the second speed.

[0086] Specifically, the vacuum coating apparatus includes a heating chamber 11, a first transition chamber 12, a second transition chamber 13, and a coating chamber 14 that are sequentially arranged in the transport direction of the carrier plate. It should be noted that a loading chamber 10 can also be provided before the heating chamber 11 to achieve the transition between the atmospheric environment and the vacuum chamber. It should also be noted that gate valves can be provided between the loading chamber 10 and the heating chamber 11, and between the heating chamber 11 and the first transition chamber 12 to reduce contamination and isolate pressure, etc. The carrier plate transport control module is used to control the sequential transport of multiple carrier plates from the loading chamber 10, the heating chamber 11, the first transition chamber 12, the second transition chamber 13, and the coating chamber 14 to achieve coating.

[0087] The carrier plate transport control module includes: a first control unit, a second control unit, and a third control unit. The first control unit can control the first carrier plate 01 to be transported at a constant speed at a first speed. The first carrier plate 01 can control the transport speed of the first carrier plate 01 based on the position information of the first carrier plate 01 detected by the first detection site 131.

[0088] The second control module can receive the information detected by the first detection site 131 to control the transport speed of the second carrier plate 02. It should be noted that a position sensor can be set at the first detection site 131. When the rear end of the first carrier plate 01 leaves the first detection site 131 of the second transition chamber 13, the light of the position sensor changes from on to off. The second control module receives the signal that the rear end of the first carrier plate 01 leaves the first detection site 131 of the second transition chamber 13 and controls the second carrier plate 02 to be transported at a second speed. When it is detected that the front end of the second carrier plate 02 reaches the first detection site 131 of the second transition chamber 13, the light of the position sensor changes from off to on. When the second control module receives the signal that the front end of the second carrier plate 02 reaches the first detection site 131 of the second transition chamber 13, it controls the second carrier plate 02 to reduce to the first speed for transport.

[0089] The third control module can receive the information detected by the first detection site 131 to control the transmission speed of the third carrier plate 03. It should be noted that a position sensor can be set at the first detection site 131. When the rear end of the first carrier plate 01 leaves the first detection site 131 of the second transition cavity 13, the light of the position sensor changes from on to off. The third control module receives the signal that the rear end of the first carrier plate 01 leaves the first detection site 131 of the second transition cavity 13, and controls the third carrier plate 03 to be transmitted from the heating cavity 11 to the first transition cavity 12 at the third speed and wait. It should be noted that a third detection site 121 is provided in the first transition cavity 12, and a position sensor can also be set at the third detection site 121. The third control module can also receive the information detected by the third detection site 121. When it is detected that the front end of the third carrier plate 03 reaches the third detection site 121 of the first transition cavity 12, the light of the position sensor changes from off to on. The third control module receives the information that the front end of the third carrier plate 03 reaches the third detection site 121, and controls the third carrier plate 03 to stop transmitting.

[0090] In this embodiment, the second speed > the first speed, and the third speed < the second speed. Setting the third speed to be less than the second speed increases the time of the carrier plate in the heating cavity 11, ensuring that the carrier plate has sufficient outgassing efficiency before coating. At this time, when the third carrier plate 03 enters the first transition cavity 12 from the heating cavity 11, the speed is relatively small, which can reduce the dropping and offset of the substrate on the third carrier plate 03. Setting the second speed to be greater than the first speed, that is, setting the acceleration process in the second transition cavity 13, reduces the dropping and offset of the substrate on the carrier plate when the carrier plate enters the first transition cavity 12 from the heating cavity 11. Accelerating in the second transition cavity 13 can increase the speed to a very high level, so as to achieve large-speed pursuit, ensure that the distance between the carrier plates is small enough, and reduce the waste of the target material.

[0091] In another embodiment of the present application, the length of the second transition cavity 13 ≥ the length of the first transition cavity 12 ≥ the length of the carrier plate.

[0092] Specifically, the lengths of the first transition cavity 12 and the second transition cavity 13 can both be greater than or equal to the length of the carrier plate, and the length of the second transition cavity 13 can be greater than or equal to the length of the first transition cavity 12. At this time, the carrier plate can have sufficient distance to be transmitted in the transition cavity to achieve multiple pursuits.

[0093] In this embodiment, since the length of the second transition cavity 13 is greater than the length of the carrier plate, the carrier plate waiting in the heating cavity 11 has sufficient time to outgas, thereby reducing the impact of the water vapor adsorbed on the carrier plate on the coating quality. Also, due to reducing the risk of chip dropping and offset, after the carrier plate enters the transition cavity at a low speed, it has sufficient length to catch up. There is a long enough distance to achieve multiple catch-ups, avoiding the need to catch up by entering the first transition cavity 12 from the heating cavity 11 at a high speed, which can reduce the risk of the substrate on the carrier plate falling and offsetting.

[0094] In another embodiment of the present application, the second transition cavity 13 includes at least two second detection sites 132.

[0095] Specifically, the second transition cavity 13 includes a first detection site 131. According to the position information of the first carrier plate 01 detected by the first detection site 131, the transmission and stop of the second carrier plate 02 can be controlled.

[0096] In this embodiment, the second transition cavity 13 includes at least two second detection sites 132. The at least two second detection sites 132 can enable the second carrier plate 02 to catch up with the first carrier plate 01 at least three times, increasing the number of catch-ups, thereby reducing the speed of each catch-up. The originally relatively high limit catch-up speed is decomposed into multiple relatively low catch-up speeds, which can significantly improve the transmission stability and reduce the product defect rate.

[0097] In another embodiment of the present application, when there are n second detection sites 132, in the direction from the first transition cavity 12 to the second transition cavity 13, the distance between adjacent second detection sites 132 gradually decreases; where n > 1 and n is a positive integer.

[0098] Specifically, when there are n second detection sites 132, in the transmission direction of the carrier plate, the distance between adjacent second detection sites 132 gradually decreases, that is, the distance between the first second detection site and the second second detection site is greater than the distance between the second second detection site and the third second detection site. At the same time, the distance between the first detection site 131 and the first second detection site is greater than the distance between the first second detection site and the second second detection site.

[0099] In this embodiment, in the direction from the first transition cavity 12 to the second transition cavity 13, the distance between adjacent second detection sites 132 gradually decreases, which can save the size of the chamber as much as possible and reduce the cost of the cavity.

[0100] In the description of this specification, the descriptions referring to terms such as "some embodiments", "another embodiment", etc. mean that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic descriptions of the above terms do not necessarily refer to the same embodiment or example.

[0101] The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features of the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered to be within the scope described in this specification.

[0102] The above-described embodiments merely represent several implementation manners of the present application. The descriptions thereof are relatively specific and detailed, but should not be construed as limiting the scope of the patent application. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present application, several modifications and improvements can still be made, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the appended claims.

Claims

1. A carrier board transmission method, characterized in that: It is used to sequentially transfer multiple carriers from the heating chamber, the first transition chamber, the second transition chamber and the coating chamber; wherein the second transition chamber is provided with a first detection site, and the carrier has a front end and a rear end; the carrier transfer method comprises: Controlling the first carrier to enter the coating chamber at a uniform speed of a first speed; and when the front end of the first carrier enters the coating chamber, the rear end of the first carrier does not reach the first detection position of the second transition chamber; When it is detected that the rear end of the first carrier leaves the first detection position of the second transition chamber, the second carrier waiting in the first transition chamber is transported to the coating chamber at a second speed, and when the front end of the second carrier reaches the first detection position of the second transition chamber, the transport speed is reduced from the second speed to the first speed, and the second speed is greater than the first speed; When it is detected that the rear end of the first carrier leaves the first detection position of the second transition chamber, the third carrier is controlled to be transferred from the heating chamber to the first transition chamber at a third speed to wait, and the third speed is less than the second speed.

2. The carrier board transmission method according to claim 1, characterized in that: The third speed ≥ the first speed.

3. The carrier board transmission method according to claim 1, characterized in that: During the transmission of the third carrier plate from the heating chamber to the first transition chamber, the third speed remains unchanged.

4. The carrier board transmission method according to claim 1, characterized in that: During the transmission of the third carrier plate from the heating chamber to the first transition chamber, the third speed gradually increases.

5. The carrier board transmission method according to claim 1, characterized in that: The second transition chamber is further provided with n second detection sites arranged in sequence along the transmission direction of the carrier, and the second detection sites are located between the first detection sites and the coating chamber; when it is detected that the rear end of the first carrier leaves the first detection site, the second carrier waiting in the first transition chamber is transmitted to the coating chamber at a second speed, and when the front end of the second carrier reaches the first detection site, the transmission speed is reduced from the second speed to the first speed, including: When it is detected that the rear end of the first carrier leaves the i-th second detection position, the second carrier is accelerated to be transmitted to the coating chamber, and when the front end of the second carrier reaches the i-th second detection position, the transmission speed is reduced to the first speed, where 1≤i≤n, and i and n are both positive integers.

6. The carrier board transmission method according to claim 1, characterized in that: The first transition chamber is provided with a third detection site; when it is detected that the rear end of the first carrier leaves the first detection site, the third carrier is controlled to be transferred from the heating chamber to the first transition chamber at a third speed to wait, including: The third carrier is transported at the third speed, and when it is detected that the front end of the third carrier reaches the third detection position of the first transition chamber, the third carrier is controlled to stop transporting; and when the third carrier stops transporting, the third carrier is completely placed in the first transition chamber.

7. A vacuum coating device, characterized in that: The vacuum coating device comprises: A heating chamber, a first transition chamber, a second transition chamber, a coating chamber, and a carrier transmission control module, wherein a first detection site is provided in the second transition chamber, and the carrier transmission control module comprises: A first control unit is used to control the first carrier to be uniformly transferred into the coating chamber at a first speed; and when the front end of the first carrier enters the coating chamber, the rear end of the first carrier does not reach the first detection position of the second transition chamber; a second control unit, configured to, when detecting that the rear end of the first carrier leaves the first detection position of the second transition chamber, transport the second carrier waiting in the first transition chamber to the coating chamber at a second speed, and when the front end of the second carrier reaches the first detection position of the second transition chamber, reduce the transport speed from the second speed to the first speed, wherein the second speed is greater than the first speed; The third control unit is used to control the third carrier to be transferred from the heating chamber to the first transition chamber at a third speed to wait when it is detected that the rear end of the first carrier leaves the first detection position of the second transition chamber, and the third speed is less than the second speed.

8. The vacuum coating device according to claim 7, characterized in that: The length of the second transition cavity is greater than or equal to the length of the first transition cavity and greater than or equal to the length of the carrier plate.

9. The vacuum coating device according to claim 7, characterized in that: The second transition chamber includes at least two second detection sites.

10. The vacuum coating device according to claim 9, characterized in that: When n second detection sites are provided, in the direction from the first transition cavity to the second transition cavity, the distance between adjacent second detection sites gradually decreases; wherein n>1, and n is a positive integer.

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