Hooking rod for hooking base of vertical liquid phase epitaxial furnace
By designing a hook rod for a vertical liquid phase epitaxial furnace, and using a rotary adjustment handle to drive the hook structure to switch between different states, the problem of difficulty in hooking and removing the graphite base in the vertical liquid phase epitaxial furnace is solved, and the stable removal of the graphite base is achieved and the working efficiency is improved.
Patent Information
- Application Number
- CN202510342386.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-21
- Publication Date
- 2025-06-20
AI Technical Summary
The prior art is difficult to effectively hook and remove the graphite base in a vertical liquid phase epitaxial furnace, resulting in the graphite base being easily dropped and damaged.
A hook and take-up rod is designed, including a support rod, hook and take-up structure and adjusting handle. By rotating the adjusting handle, the hook and take-up structure is driven to switch between the tightening state and the hook and take-up state, thereby stably hooking and taking-up the graphite base.
It solves the problem that it is difficult to remove the graphite base when the inner space of the vertical liquid phase epitaxial furnace is small, avoiding the risk of falling and damage of the graphite base, and improving working efficiency.
Smart Images
Figure CN120174471A_ABST
Abstract
Description
Technical Field
[0001] This application relates to the technical field of hooking tools, and particularly to a hooking rod for hooking the base of a vertical liquid phase epitaxy furnace. Background Art
[0002] Vertical liquid phase epitaxy furnaces are widely used in the semiconductor and optoelectronic device industries. With the development of these industries, they not only promote the preparation of high-performance electronic components and new photon devices, but also play an important role in a broader technological environment. The graphite base, as a precision-machined mold, is also widely used. The graphite base is made of a material with a relatively high density and is finely processed. During the processing, the graphite base needs to be placed in a vertical liquid phase epitaxy furnace for high-temperature treatment. Since the space between the graphite base and the vertical furnace chamber of the vertical liquid phase epitaxy furnace is small, it is not easy to place an outer clamping device, and the graphite base cannot be taken out through the outer clamping device. The existing technology is to use an iron wire to hook out the graphite base from the vertical furnace chamber of the vertical liquid phase epitaxy furnace. Since the iron wire is relatively soft and not easy to hook, and it is easy to shake, there is a probability that the graphite base will fall and be damaged, and the existing technology cannot solve this problem. Summary of the Invention
[0003] In order to solve the problems existing in the prior art, this application provides a hooking rod for hooking the base of a vertical liquid phase epitaxy furnace.
[0004] This application provides a hooking rod for hooking the base of a vertical liquid phase epitaxy furnace, including: a support rod for connecting the hooking structure and the adjustment handle. The support rod includes a main rod and a central rod. The main rod is sleeved outside the central rod. A first support disk is provided at the first end of the central rod, and a second support disk is provided inside the first support disk on the central rod; a hooking structure, which includes a hooking part, a claw center bracket and a bottom cover. The hooking part includes claw feet and a claw part pin. The claw feet are movably connected to the first end of the claw center bracket through the claw part pin. The bottom cover and the first end of the claw center bracket are fixed by a setscrew. The second end of the claw center bracket is connected to the first end of the main rod; an adjustment handle, which includes a fixed part and an adjustment part. The first end of the fixed part is connected to the second end of the main rod, and the adjustment part is connected to the second end of the central rod. The adjustment part is movably connected to the fixed part.
[0005] Optionally, the fixed part includes an inner cover, a middle cover and a retaining cover arranged in sequence. The inner cover is connected to the second end of the main rod. The inner cover and the middle cover are connected by threads, and the middle cover and the retaining cover are connected by threads.
[0006] Optionally, the inner cover includes an inner cover edge near one side of the hooking structure, the retaining cover includes a retaining cover edge away from the hooking structure, the middle cover is a hollow ring structure, the middle cover is arranged between the inner cover edge and the retaining cover edge, and a bearing is arranged between the inner cover and the middle cover.
[0007] Optionally, the adjusting part includes an upper cover and an outer cover. The upper cover is fixed to the second end of the central rod through a handle pin, and the outer cover is movably connected to the middle cover.
[0008] Optionally, the adjusting handle further includes a handle. A protrusion is arranged on one side of the second end of the main rod. The handle is sleeved outside the main rod, with one end abutting against the protrusion and the other end abutting against the inner cover edge.
[0009] Optionally, the hooking structure further includes a bearing and a gasket, and the bearing and the gasket are located between the claw center bracket and the first end of the main rod.
[0010] Optionally, the claw foot includes a body part and a rotary connection part located on the side wall of the body part. The rotary connection part is perpendicular to the body part and is used for moving between the first support disc and the second support disc.
[0011] Optionally, the hooking part includes at least two claw feet, and the number of the claw part pins and the set screws corresponds to the number of the claw feet.
[0012] Optionally, the hooking rod includes a tightened state and a hooking state; wherein, in the tightened state, the rotary connection part of the claw foot contacts the second support disc, the body part of the claw foot extends along a direction parallel to the central rod, and the first end of the outer cover contacts the inner cover edge; in the hooking state, the rotary connection part of the claw foot contacts the first support disc, the body part of the claw foot extends along a direction perpendicular to the central rod, and the first end of the outer cover is away from the inner cover edge.
[0013] Optionally, the body part of the claw foot includes a first end and a second end. The side away from the adjusting handle in the tightened state is the first end of the body part of the claw foot, and the side close to the adjusting handle is the second end of the claw foot. The length from the first end of the body part to the rotary connection part is less than or equal to the radius of the first support disc.
[0014] Compared with the prior art, the technical solution of the present application has the following beneficial effects:
[0015] A hook rod for hooking the base of a vertical liquid phase epitaxy furnace provided by the present application can drive the hook structure to switch between a tightened state and a hooked state by rotating the adjusting part of the adjusting handle, so as to smoothly take out the graphite base from the cavity tube of the vertical liquid phase epitaxy furnace. It solves the problem of difficult removal of the graphite base in the case of small inner space in the vertical liquid phase epitaxy furnace hearth, avoids the problem of damage to the graphite base caused by using iron wire to hook the graphite base, and improves work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the following drawings are only some embodiments of the present application. For those skilled in the art, without creative efforts, other drawings can also be obtained according to these drawings.
[0017] Figure 1 It is a schematic structural diagram of a hook rod for hooking the base of a vertical liquid phase epitaxy furnace in a hooked state according to an embodiment of the present application;
[0018] Figure 2 It is a schematic structural diagram of a hook rod for hooking the base of a vertical liquid phase epitaxy furnace in a tightened state according to an embodiment of the present application;
[0019] Figure 3 It is a schematic structural diagram of a support rod according to an embodiment of the present application;
[0020] Figure 4 It is a schematic diagram of the connection relationship between the fixing part and the adjusting part of the adjusting handle according to an embodiment of the present application;
[0021] Figure 5 It is an exploded structural diagram of the adjusting handle according to an embodiment of the present application;
[0022] Figure 6 It is a schematic overall structural diagram of the adjusting handle according to an embodiment of the present application;
[0023] Figures 7 - 8 It is a schematic diagram of the connection relationship of the adjusting handle in different states according to an embodiment of the present application;
[0024] Figure 9 It is a schematic diagram of the connection relationship between the upper cover of the adjusting handle and the central rod in the support rod according to an embodiment of the present application;
[0025] Figure 10 It is an exploded structural diagram of the hook structure according to an embodiment of the present application;
[0026] Figure 11 It is a schematic overall structural diagram of the hook structure according to an embodiment of the present application;
[0027] Figures 12 - 13 Schematic diagram of the connection relationship between the claw feet and the central rod in different states in an embodiment of the present application;
[0028] Figures 14 - 15 Schematic diagram of the structure of the hooking structure in different states in an embodiment of the present application;
[0029] Figures 16 - 17 Schematic diagram of the process of the change of the claw feet and the central rod in different states in an embodiment of the present application;
[0030] Figure 18 Schematic diagram of the usage process of the hooking structure in different states in an embodiment of the present application. Detailed implementation manners
[0031] The preferred embodiments of the present application will be described in more detail below. Although the preferred embodiments of the present application are described below, it should be understood that the present application can be implemented in various forms and should not be limited by the embodiments set forth herein.
[0032] In the present application, unless otherwise stated, the orientation terms such as "upper, lower" generally refer to the upper and lower of the device in the normal use state, and "inner, outer" refer to relative to the contour of the device. In addition, the terms "first, second, third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first, second, third" may explicitly or implicitly include one or more of such features. In the description of the present application, "a plurality" means two or more, unless otherwise specifically defined. Since the drawings are descriptions of the same device, the same reference numerals in the drawings represent the same components.
[0033] As described in the background art, during the processing of the graphite base, because the space between the furnace chamber of the vertical liquid phase epitaxy furnace and the graphite base is small, it is not easy to place a clamping device for clamping the graphite base from the outside. In the prior art, a wire is used to hook out the graphite base from the vertical furnace chamber of the vertical liquid phase epitaxy furnace. Since the wire is relatively soft and not easy to hook, it is easy to cause the problem that the graphite base falls and is damaged.
[0034] Therefore, the present application provides a hooking rod for hooking the base of a vertical liquid phase epitaxy furnace, which can effectively solve the above problems and improve work efficiency.
[0035] The present application provides a hook rod for hooking the base of a vertical liquid phase epitaxy furnace, comprising: a support rod for connecting a hooking structure and an adjusting handle, the support rod including a main rod and a central rod, the main rod being sleeved outside the central rod, a first support disc being provided at the first end of the central rod, and a second support disc being provided inside the first support disc on the central rod; a hooking structure including a hooking portion, a claw center bracket and a bottom cover, the hooking portion including claw feet and a claw portion pin, the claw feet being movably connected to the first end of the claw center bracket through the claw portion pin, the bottom cover and the first end of the claw center bracket being fixed by a setscrew, and the second end of the claw center bracket being connected to the first end of the main rod; and an adjusting handle including a fixing portion and an adjusting portion, the first end of the fixing portion being connected to the second end of the main rod, the adjusting portion being connected to the second end of the central rod, and the adjusting portion being movably connected to the fixing portion.
[0036] The following further elaborates on specific examples of the present application with reference to the accompanying drawings.
[0037] The present application provides a hook rod for hooking the base of a vertical liquid phase epitaxy furnace, as Figures 1 - 2 shown, the hook rod includes a hooking structure 100, a support rod 200 and an adjusting handle 300. The hooking structure 100 and the adjusting handle 300 are connected by the support rod 200. During use, by rotating the adjusting handle, the hook rod can transform between a tightened state and a hooking state, so that it can extend into the item to be hooked from the top and lift it smoothly.
[0038] In an embodiment of the present application, the specific structure of the support rod is as Figure 3 shown. The support rod includes a main rod 201 and a central rod 202. The main rod 201 is sleeved outside the central rod 202. A first support disc 203 is provided at the first end of the central rod 202, and a second support disc 204 is provided inside the first support disc 203 on the central rod 202, that is, compared with the first support disc 203, the second support disc 204 is arranged at a position on the central rod 202 closer to the second end; a protrusion 2011 is provided on one side of the second end of the main rod 201.
[0039] In an embodiment of the present application, in combination with Figures 4 - 5 , the adjusting handle includes a fixing portion and an adjusting portion. The adjusting portion is movably connected to the fixing portion. The fixing portion includes an inner cover 302, a middle cover 304 and a retaining cover 305 arranged in sequence. The adjusting portion includes an upper cover 306 and an outer cover 308. For the convenience of description in the specification, it is set that one end of the inner cover 302, the middle cover 304, the retaining cover 305, the upper cover 306 and the outer cover 308 close to the hooking structure is their respective first end, and the end far from the hooking structure is the second end.
[0040] Reference Figure 4 In one embodiment of the present application, the inner cover 302 is a hollow annular structure, the inner portion of the first end of the inner cover 302 is threaded for fixed connection with the second end of the main rod, and the outer portion of the second end of the inner cover 302 is threaded for fixed connection with the first end of the middle cover 304. An inner cover edge 3021 is provided at the first end of the inner cover 302, and the outer diameter of the inner cover edge 3021 is the same as the outer diameter of the outer cover 308. During use, the inner cover edge 3021 is used to abut against the first end of the middle cover 304, thereby fixing the middle cover 304 and limiting the movement range of the outer cover 308.
[0041] Reference Figure 5 and Figure 6 In one embodiment of the present application, the adjustment handle also includes a handle 301, which is sleeved outside the main rod 201, with one end of the handle against the protrusion 2011 on the main rod 201, and the other end against the inner cover edge 3021. The main rod 201 is fixedly connected to the inner cover 302 through the threads inside the first end of the inner cover 302, so that the handle 301 is fixed between the protrusion 2011 and the inner cover edge 3021, which is convenient for the staff to grasp the hook rod during use.
[0042] In one embodiment of the present application, then refer to Figure 4 The first end of the blocking cover 305 has a thread on the outside for fixed connection with the second end of the middle cover 304. The second end of the blocking cover 305 is provided with a blocking cover edge 3051. The outer diameter of the blocking cover edge 3051 is larger than the outer diameter of the middle cover 304. Together with the inner cover 302, the middle cover 304 is fixed and the moving range of the outer cover 308 is limited. The middle cover 304 is arranged between the inner cover 302 and the blocking cover 305. Specifically, the middle cover 304 is arranged between the inner cover edge 3021 and the blocking cover edge 3051. The middle cover 304 is a hollow annular structure. Threads are respectively arranged in the inner through holes of the first end and the second end of the middle cover 304. The threads inside the first end of the middle cover 304 are used to connect with the external threads of the second end of the inner cover 302. The threads inside the second end of the middle cover 304 are used to connect with the external threads of the first end of the blocking cover 305. The second end of the middle cover 304 is also provided with threads on the outside for movably connecting with the internal threads of the first end of the outer cover 308. A bearing 303 is arranged between the inner cover 302 and the middle cover 304. The bearing 303 can play a role in supporting and reducing friction, so that the center rod can flexibly move back and forth in the fixing part of the adjustment handle.
[0043] In one embodiment of the present application, Figure 7 and Figure 8, the outer cover 308 is a hollow annular structure. The inner parts at both ends of the outer cover 308 are respectively provided with threads. The internal thread at the first end of the outer cover 308 is used for movably connecting with the external thread at the second end of the middle cover 304, and the internal thread at the second end of the outer cover 308 is used for fixedly connecting with the external thread at the second end of the upper cover 306. Since the fixing part of the adjusting handle is fixed to the main rod 201 and the adjusting part of the adjusting handle is fixed to the central rod 202, by rotating the outer cover 308, the distance between the first end of the outer cover 308 and the middle cover 304 can be changed, that is, a movement is generated between the fixing part and the adjusting part of the adjusting handle, so that the main rod 201 and the central rod 202 move relatively, and further drive the structural change of the hooking structure, so that the hooking rod enters the tightening state or the hooking state.
[0044] Referring to Figure 9 , a pin hole is provided at the first end of the upper cover 306, and the upper cover 306 is fixedly connected to the central rod 202 through the handle pin 307 inserted in the pin hole.
[0045] As Figures 10 - 11 shown, in an embodiment of the present application, the hooking structure includes a hooking part, a claw center bracket 101 and a bottom cover 104. The hooking part includes claw feet 102 and claw part pins 103. The claw feet 102 are connected to the first end of the claw center bracket 101 through the claw part pins 103. The claw feet 102 can rotate along the claw part pins 103 under the drive of the central rod 202, so that the claw feet 102 tighten in a direction parallel to the central rod 202 or open in a direction perpendicular to the central rod 202. The bottom cover 104 and the first end of the claw center bracket 101 are fixed by a setscrew 105. The second end inside the claw center bracket 101 is provided with a thread, and the claw center bracket 101 is fixedly connected to the external thread at the first end of the main rod 201 through the thread inside the second end.
[0046] In an embodiment of the present application, the hooking structure further includes a bearing 106 and a gasket 107. The bearing 106 and the gasket 107 are located between the claw center bracket 101 and the first end of the main rod 201, and can play a role in supporting and reducing friction, so that the central rod can move flexibly back and forth inside the claw center bracket 101.
[0047] In some embodiments, the hooking part includes at least two claw feet with opposite directions, which are used to maintain balance when hooking an object; the number of the claw part pins and the setscrews corresponds to the number of the claw feet. In different embodiments, due to different production processes, usage scenarios, etc., the number of the claw feet can be set according to actual needs, and the present application does not limit this.
[0048] Preferably, in an embodiment of the present application, as Figure 10 shown, the hooking part includes 4 claw feet 102, 4 claw part pins 103 and 4 setscrews 105.
[0049] Specifically, in Figures 12 - 13 In the embodiment shown, the claw foot 102 includes a main body and a rotating connection portion 1021 located on the side wall of the main body, the rotating connection portion 1021 is arranged between the first support plate 203 and the second support plate 204, the main body of the claw foot 102 includes a first end and a second end, in the tightened state, the side away from the adjustment handle is the first end of the claw foot main body, and the side close to the adjustment handle is the second end of the claw foot. In one embodiment of the present application, Figure 13 As shown, the length from the first end of the body of the claw foot 102 to the rotating connection part 1021 is less than or equal to the radius length of the first support plate, thereby ensuring that the claw foot 102 can move to a direction perpendicular to the center rod 202 in the hooking state.
[0050] like Figure 12 As shown, in the tightened state, the rotating connection portion 1021 of the claw foot 102 contacts the second support plate 204, and the body of the claw foot 102 extends in a direction parallel to the center rod 202. Figure 13 As shown, in the hooking state, the rotating connection portion 1021 of the claw foot 102 contacts the first support plate 203 , and the body of the claw foot 102 extends in a direction perpendicular to the center rod 202 .
[0051] The hooking rod includes a tightening state and a hooking state. By rotating the adjusting portion of the adjusting handle, the central rod can be driven to move, thereby driving the hooking structure to switch between the tightening state and the hooking state. Figure 14 The figure shows the tightened state of the hook structure of the hook rod. Figure 15 The hooking state of the hooking structure of the hooking rod is shown below. Figures 14 - 17 The state transition process of the hooking structure of the hooking rod is described in detail.
[0052] In the tightened state, the first end of the outer cover of the adjusting part of the adjusting handle contacts the inner cover edge, and the adjusting part of the adjusting handle is rotated in a specific direction. Since the outer cover of the adjusting part and the middle cover of the fixed part are threadedly connected, the upper cover of the adjusting part moves with the outer cover of the adjusting part, driving the center rod 202 to move toward the direction of the adjusting handle, and the first support plate 203 hooks the rotating connection part 1021 of the claw foot 102 of the hooking structure, driving the claw foot 102 to rotate along the claw pin 103, so that the main body of the claw foot 102 moves to a direction perpendicular to the center rod 202, and the first support plate 203 resists the rotating connection part 1021 of the claw foot 102, so that the hooking structure of the hooking rod enters a hooking state.
[0053] On the contrary, in the hooking state, the first end of the outer cover of the adjusting part is far from the inner cover edge. Rotate the adjusting part of the adjusting handle in the direction opposite to the above specific direction. Through the thread between the outer cover of the adjusting part and the middle cover of the fixing part, the upper cover of the adjusting part and the outer cover of the adjusting part move together, driving the center rod 202 to move towards the hooking structure direction. The first support disk 203 abuts against the first end of the main body part of the claw 102, driving the claw 102 to rotate along the claw pin 103. Then, the second support disk 204 abuts against the rotating connection part 1021 of the claw 102, driving the claw 102 to continue rotating, so that the main body part of the claw 102 converges to both sides of the center rod 202 along the direction parallel to the center rod 202. The claw 102 is received in the claw center bracket 101, making the surface of the claw 102 and the surface of the claw center bracket 101 flush. The second support disk 204 abuts against the rotating connection part 1021 of the claw 102, making the hooking structure of the hooking rod enter the tightened state.
[0054] In a specific embodiment, the hooking rod can be changed from the tightened state to the hooking state by rotating the adjusting handle clockwise, and the hooking rod can be changed from the hooking state to the tightened state by rotating the adjusting handle counterclockwise. In another embodiment, the state change corresponding to the rotation direction can be opposite, that is, the hooking rod can be changed from the tightened state to the hooking state by rotating the adjusting handle counterclockwise. The relationship between the rotation direction and the state change can be controlled by the thread. In different embodiments, hooking rods with different rotation directions can be produced according to different usage scenarios, the habitual hand of the staff, the production process, etc. to match various situations in actual use. The present application does not limit this.
[0055] The usage process of the hooking rod for hooking the base of a vertical liquid phase epitaxy furnace provided by the present application is as Figure 18 shown. For a graphite base 400 placed in a vertical liquid phase epitaxy furnace, in the tightened state, put the hooking rod into the inner hole 402 of the graphite base through the upper hole 401 of the graphite base 400 in the vertical liquid phase epitaxy furnace, ensure that the hooking structure of the hooking rod passes through the upper hole 401, and then rotate the adjusting part of the adjusting handle to make the second end of the claw 102 open outwards, so that the claw hooks the lower surface of the top of the graphite base 400, making the hooking structure of the hooking rod enter the hooking state; lift the hooking rod to take out the graphite base 400 from the cavity tube of the vertical liquid phase epitaxy furnace; after placing the graphite base 400 at the specified position, rotate the adjusting part of the adjusting handle in the opposite direction to make the claw 102 retract, so that the second end of the claw 102 points to the direction of the adjusting handle, that is, the hooking structure of the hooking rod enters the tightened state. At this time, the hooking structure of the hooking rod can be taken out from the upper hole 401 of the graphite base 400.
[0056] The hook rod provided by the present application can stably take out the graphite base from the vertical liquid phase epitaxy furnace cavity tube, solve the problem of taking out the graphite base from the vertical furnace chamber of the vertical liquid phase epitaxy furnace under the condition of small inner space in the vertical liquid phase epitaxy furnace, avoid the problem of damage caused by dropping of the graphite base when using a wire to hook the graphite base, and improve work efficiency.
[0057] The above are only embodiments of the present application, and do not limit the patent scope of the present application accordingly. Any equivalent structure or equivalent process transformation made by using the content of the specification and drawings of the present application, such as the mutual combination of technical features between embodiments, or direct or indirect application in other related technical fields, shall be equally included in the patent protection scope of the present application.
Claims
1. A hooking rod for hooking a vertical liquid phase epitaxial furnace base, characterized in that: include: A support rod, used to connect the hook structure and the adjustment handle, the support rod comprises a main rod and a center rod, the main rod is sleeved outside the center rod, a first support plate is arranged at the first end of the center rod, and a second support plate is arranged inside the first support plate on the center rod; A hooking structure, the hooking structure comprises a hooking part, a claw center bracket and a bottom cover, the hooking part comprises a claw foot and a claw part latch, the claw foot is movably connected to the first end of the claw center bracket through the claw part latch, the bottom cover and the first end of the claw center bracket are fixed by a top screw, and the second end of the claw center bracket is connected to the first end of the main rod; The adjusting handle comprises a fixing part and an adjusting part, wherein the first end of the fixing part is connected to the second end of the main rod, the adjusting part is connected to the second end of the central rod, and the adjusting part is movably connected to the fixing part.
2. The hooking rod for hooking the base of a vertical liquid phase epitaxial furnace according to claim 1, characterized in that: The fixing part comprises an inner cover, a middle cover and a stop cover which are arranged in sequence, the inner cover is connected to the second end of the main rod, the inner cover and the middle cover are connected by threads, and the middle cover and the stop cover are connected by threads.
3. The hooking rod for hooking the base of a vertical liquid phase epitaxial furnace according to claim 2, characterized in that: The inner cover includes an inner cover edge close to the hook structure, the stop cover includes a stop cover edge away from the hook structure, the middle cover is a hollow annular structure, the middle cover is arranged between the inner cover edge and the stop cover edge, and a bearing is arranged between the inner cover and the middle cover.
4. The hooking rod for hooking the base of a vertical liquid phase epitaxial furnace according to claim 3, characterized in that: The adjusting part comprises an upper cover and an outer cover, wherein the upper cover is fixed to the second end of the central rod through a handle latch, and the outer cover is movably connected to the middle cover.
5. The hooking rod for hooking the base of a vertical liquid phase epitaxial furnace according to claim 3, characterized in that: The adjustment handle also includes a grip, a protrusion is arranged on one side of the second end of the main rod, and the grip cover is arranged outside the main rod, with one end abutting against the protrusion and the other end abutting against the inner cover edge.
6. The hooking rod for hooking the base of a vertical liquid phase epitaxial furnace according to claim 1, characterized in that: The hooking structure also includes a bearing and a gasket, and the bearing and the gasket are located between the claw center bracket and the first end of the main rod.
7. The hooking rod for hooking the base of a vertical liquid phase epitaxial furnace according to claim 4, characterized in that: The claw foot comprises a main body and a rotating connection part located on a side wall of the main body. The rotating connection part is vertically arranged with respect to the main body and is used for moving between the first supporting plate and the second supporting plate.
8. The hooking rod for hooking the base of a vertical liquid phase epitaxial furnace according to claim 1, characterized in that: The hooking portion includes at least two claw feet, and the number of the claw portion pins and top screws corresponds to the number of the claw feet.
9. The hooking rod for hooking the base of a vertical liquid phase epitaxial furnace according to claim 7, characterized in that: The hooking rod includes a tightening state and a hooking state; wherein, In the tightened state, the rotating connection portion of the claw foot contacts the second support plate, the body of the claw foot extends in a direction parallel to the center rod, and the first end of the outer cover contacts the inner cover edge; In the hooking state, the rotating connection portion of the claw foot contacts the first supporting plate, the body of the claw foot extends in a direction perpendicular to the central rod, and the first end of the outer cover is away from the inner cover edge.
10. The hooking rod for hooking the base of a vertical liquid phase epitaxial furnace according to claim 9, characterized in that: The main body of the claw foot includes a first end and a second end. In the tightened state, the side away from the adjustment handle is the first end of the main body of the claw foot, and the side close to the adjustment handle is the second end of the claw foot. The length from the first end of the main body to the rotating connection part is less than or equal to the radius of the first support plate.