A metering pump for high-precision delivery of hydrofluoric acid

Abstract

The present invention discloses a metering pump for high-precision delivery of hydrofluoric acid, which belongs to the technical field of metering equipment. The pump comprises a metering pump body, on which a collection module, a control module, and a drive motor are installed. The drive motor provides driving force for the operation of the metering pump body. The collection module comprises a liquid pressure sensor and a flow rate sensor. The liquid pressure sensor is installed at the liquid inlet of the metering pump body. The liquid pressure sensor is used to collect liquid pressure data in the liquid inlet at each moment when the metering pump body is operating. The present invention can realize the installation of the collection module on the metering pump body, which can collect liquid pressure and flow rate data at the liquid inlet and liquid outlet in real time. Combined with the processing of these data by the control module, it can accurately determine whether the metering pump is stably delivering liquid, and timely adjust the speed of the drive motor to ensure high-precision delivery of hydrofluoric acid. This can accurately improve the raw material ratio of fluorine-containing materials and effectively improve product quality.

Description

Technical Field

[0001] The present invention relates to the technical field of metering equipment, and more particularly to a metering pump for delivering hydrofluoric acid with high precision. Background Art

[0002] In the production of fluorine-containing materials, hydrofluoric acid is an indispensable raw material. Its precise proportion is crucial to ensuring product quality. Therefore, when mixing multiple raw materials, metering pumps are often used to ensure accurate fluid delivery. Metering pumps, also known as fixed-displacement or proportional pumps, have the core function of precisely controlling the fluid delivery volume to meet the stringent precision requirements of the production process.

[0003] However, in actual applications, metering pumps often encounter a series of problems when transporting liquids, such as fluctuations in extraction pressure caused by changes in the liquid level in the supply tank. Specifically, when the liquid level in the supply tank rises, the static pressure faced by the metering pump when extracting the liquid will increase accordingly; conversely, when the liquid level drops, the static pressure will decrease. This pressure fluctuation caused by the liquid level change will directly affect the stability of the metering pump's liquid extraction. Once the extraction stability is affected, it may cause the metering pump to add too much or too little hydrofluoric acid, which in turn has a negative impact on the production quality of fluorine-containing materials.

[0004] In addition to changes in the liquid level in the supply tank, changes in pipeline resistance are also a major factor contributing to unstable flow rates. During the liquid delivery process, factors such as the roughness of the pipeline wall, the degree of curvature of the pipeline, the valve opening, and the properties of the fluid itself (such as density and viscosity) all affect pipeline resistance. Changes in these factors can cause corresponding changes in the pressure required by the metering pump to deliver the liquid. Pressure changes, in turn, further affect flow stability. If the flow rate is unstable, the metering pump will find it difficult to accurately control the fluid delivery volume, thus failing to meet the strict precision requirements of the production process. Summary of the Invention

[0005] In response to the problems existing in the prior art, the purpose of the present invention is to provide a metering pump for high-precision delivery of hydrofluoric acid. By installing a collection module on the metering pump body, the liquid pressure and flow rate data at the liquid inlet and outlet can be collected in real time. Combined with the processing of these data by the control module, it is possible to accurately determine whether the metering pump is stably delivering liquid and adjust the speed of the drive motor in time to ensure high-precision delivery of hydrofluoric acid. This can accurately improve the raw material ratio of fluorine-containing materials and effectively improve product quality.

[0006] To solve the above problems, the present invention adopts the following technical solutions.

[0007] A metering pump for high-precision delivery of hydrofluoric acid includes a metering pump body, on which are mounted a collection module, a control module, and a drive motor. The drive motor provides driving force for the operation of the metering pump body. The collection module includes a liquid pressure sensor and a flow rate sensor. The liquid pressure sensor is mounted at the liquid inlet of the metering pump body and is used to collect liquid pressure data in the liquid inlet at each moment when the metering pump body is operating. The flow rate sensor is mounted at the liquid outlet of the metering pump body and is used to collect liquid flow rate data in the liquid outlet at each moment when the metering pump body is operating.

[0008] The control module pre-sets the liquid pressure data in the liquid inlet and the liquid flow rate data in the liquid outlet when the metering pump body is working stably. The control module performs difference processing on the collected liquid pressure data and the pre-set liquid pressure data, and performs difference processing on the collected liquid flow rate data and the pre-set liquid flow rate data, and judges whether the metering pump is stably delivering liquid based on the two sets of differences obtained;

[0009] If the output liquid of the metering pump fluctuates, the two sets of difference-processed data are multiplied by the conversion coefficient, and the converted data are averaged to obtain a comprehensive difference. The comprehensive difference is multiplied by the weight coefficient for adjusting the metering pump motor to obtain control data for adjusting the metering pump motor. The control data is input into the control system that controls the drive motor to adjust the speed of the drive motor.

[0010] Furthermore, the comprehensive difference is multiplied by the weight coefficient for adjusting the metering pump motor to obtain control data for adjusting the metering pump motor, including:

[0011] The adjustment of the drive motor is determined according to the absolute value of the comprehensive difference, and the weight coefficient is adjusted. Make corrections, and the corrected weight coefficient The calculation formula is:

[0012] ;

[0013] in Expressed as the original weight coefficient for regulating the metering pump motor, it determines the overall regulation strength; Expressed as an adjustment coefficient, it is used to control the amplitude of nonlinear adjustment. The larger the value, the more obvious the effect of nonlinear adjustment. The smaller the value, the closer the adjustment is to linearity; is a scaling factor that controls the speed of change of the hyperbolic tangent function. The larger the value, the greater the change in the hyperbolic tangent function can be achieved with a smaller difference. The smaller the value, the smoother the function changes; Expressed as a comprehensive difference.

[0014] The direction of the drive motor adjustment is determined based on the positive or negative value of the comprehensive difference, and then the corrected weight coefficient is used. , get the control data for adjusting the metering pump drive motor ;

[0015] .

[0016] Furthermore, the metering pump was tested several times under different working conditions, and the comprehensive difference was recorded each time. Adjust the speed of the driving motor so that the liquid pressure in the liquid inlet of the metering pump reaches the preset liquid pressure and the flow rate in the liquid outlet reaches the preset flow rate; determine different comprehensive differences through experimental analysis and the corresponding 、 Take the value and store it. When the metering pump is working, the comprehensive difference Retrieve the corresponding and The value of .

[0017] Furthermore, when the liquid supply tank is filled to a full liquid state for the first time, when the metering pump is turned on and draws liquid from the liquid supply tank, the control module records the pressure data at each moment measured by the liquid pressure sensor and the flow rate data at each moment measured by the flow rate sensor;

[0018] Subsequently, the liquid supply tank is filled to a full liquid state. When the metering pump extracts liquid from the liquid supply tank, based on the pressure data and flow rate data stored in the control module during the extraction process of the liquid supply tank, the control module retrieves the pressure data and flow rate data of the next moment based on the stored data, and calculates the control data of the drive motor at the next moment based on the pressure data and flow rate data of the next moment. , and input it into the control system that controls the drive motor to adjust the speed of the drive motor in advance.

[0019] Furthermore, the control module records the pressure data at each moment measured by the liquid pressure sensor and the flow rate data at each moment measured by the flow rate sensor, and uses them as training samples for the learning model and inputs them into the learning model. The trained model is used to estimate the pressure data and flow rate data at the next moment, and the control data for driving the motor at the next moment is calculated based on the estimated pressure data and flow rate data. , and input it into the control system that controls the drive motor to adjust the speed of the drive motor in advance;

[0020] The estimated pressure data and flow rate data are calculated to obtain an estimated comprehensive difference. The comprehensive difference at the current moment is calculated based on the liquid pressure sensor and flow rate sensor data at the current moment. The estimated comprehensive difference and the comprehensive difference at the current moment are both processed as absolute values, and then subjected to difference processing. The difference is used as a feedback signal to adjust the learning model to obtain a new learning model. The new learning model is used to predict future pressure data and flow rate data. The prediction model is automatically adjusted according to the difference so that the subsequent predicted pressure data and flow rate data are similar to the pressure data and flow rate data at the previous moment. The new learning model is used to predict future pressure data and flow rate data to obtain new predicted pressure data and flow rate data.

[0021] Furthermore, the pressure data and flow rate data collected by the sensor are filtered and filtered using an exponentially weighted moving average. The specific filtering process is to first set the smoothing coefficient to ;

[0022] in , for pressure data, the output after exponentially weighted moving average filtering is , where the initial value , Expressed as time The collected raw data of the metering pump inlet pressure is obtained by real-time measurement by the liquid pressure sensor; Expressed as time The filtered inlet pressure data is used to participate in the moment Filter calculation; Represented as the initial moment The filtered pressure data is directly taken from the original pressure data at the initial moment , as the starting value for filtering calculation;

[0023] For velocity data, the output after exponentially weighted moving average filtering is , where the initial value , Expressed as at time ,After exponentially weighted moving average filtering, the flow velocity data at the outlet of the metering pump is the output result after filtering; Expressed as time The collected original flow rate data of the metering pump outlet is obtained by real-time measurement by the flow rate sensor; Expressed as time The filtered outlet flow rate data is used to participate in the moment Filter calculation; Initial moment The filtered velocity data is directly taken from the original velocity data at the initial moment , as the starting value for filtering calculation; is the smoothing coefficient, The larger it is, the higher the weight of the current original data is, and the faster the filtered data responds to new data; The smaller it is, the higher the weight of historical filtering data is, and the smoother the filtering effect is.

[0024] Furthermore, an error range is set. If the comprehensive difference falls within this range, the motor adjustment is not performed; when the comprehensive difference exceeds the range, the drive motor is adjusted accordingly according to the size and direction of the difference.

[0025] Furthermore, control data is set Within the physical allowable range of the drive motor, set the upper limit of the control data to The sum is the lower limit , limit the control data, the specific processing formula is:

[0026] .

[0027] Furthermore, the metering pump body also has a wireless transmitting module and a wireless receiving module, and both the wireless transmitting module and the wireless receiving module are electrically connected to the control module.

[0028] Furthermore, the control module also pre-sets the alarm threshold range ,like The alarm is triggered when the threshold value is not within the range.

[0029] Compared with the prior art, the present invention has the following beneficial effects:

[0030] (1) This solution can collect the liquid pressure and flow rate data of the liquid inlet and outlet in real time by installing a collection module on the metering pump body. Combined with the processing of these data by the control module, it can accurately determine whether the metering pump is stably transporting liquid and adjust the speed of the drive motor in time to ensure high-precision transportation of hydrofluoric acid. This can accurately improve the raw material ratio of fluorine-containing materials and effectively improve product quality.

[0031] (2) This solution can dynamically calculate and adjust the control data of the metering pump motor based on the difference between the collected data and the preset value through the control module. By introducing the nonlinear correction formula of the weight coefficient, the adjustment of the drive motor with different amplitudes is determined according to the absolute value of the comprehensive difference, making the adjustment more accurate and efficient. This adaptive adjustment capability can cope with various complex working conditions such as changes in the liquid level of the liquid supply tank and changes in pipeline resistance, ensuring stable flow.

[0032] (3) By recording and analyzing the data of the metering pump under different working conditions, this solution can establish a learning model to estimate the pressure and flow rate data at the next moment. Based on these estimated data, the speed of the drive motor can be adjusted in advance to achieve more accurate flow control. This prediction and advance adjustment capability can significantly improve the response speed and stability of the system. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] To more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. Those skilled in the art can also derive other drawings based on these drawings without inventive effort.

[0034] Figure 1 This is an appearance view of the overall structure of the present invention.

[0035] Description of the numbers in the figure:

[0036] 1. Metering pump body; 2. Liquid pressure sensor; 3. Flow rate sensor. DETAILED DESCRIPTION

[0037] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention; it is obvious that the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0038] Example 1

[0039] See also Figure 1 A metering pump for high-precision delivery of hydrofluoric acid includes a metering pump body 1, on which are mounted a collection module, a control module, and a drive motor. The drive motor provides driving force for the operation of the metering pump body 1. The collection module includes a liquid pressure sensor 2 and a flow rate sensor 3. The liquid pressure sensor 2 is mounted at the liquid inlet of the metering pump body 1. The liquid pressure sensor 2 is used to collect the liquid pressure data in the liquid inlet at each moment when the metering pump body 1 is working. ; The flow rate sensor 3 is installed at the liquid outlet of the metering pump body 1. The flow rate sensor 3 is used to measure the liquid flow rate data in the liquid outlet of the metering pump body 1 at each moment. ;

[0040] The control module pre-sets the liquid pressure data in the liquid inlet when the metering pump body 1 is working stably. and the liquid flow rate data in the liquid outlet The control module performs difference processing on the collected liquid pressure data and the pre-set liquid pressure data to obtain , the collected liquid flow rate data and pre-set liquid flow rate data Perform difference processing to obtain , according to the two sets of differences, it is judged whether the metering pump is delivering liquid stably. The specific judgment method is: if the metering pump is delivering liquid stably, then The test result should be equal to , The test result should be equal to If it appears and If the situation occurs, it can be determined that the output liquid of the metering pump is unstable; if and , indicating that the liquid flow in the metering pump is less than the original flow rate, and the liquid supply capacity of the metering pump has decreased; if and , indicating that the liquid flow in the metering pump is greater than the original flow rate, and the metering pump is supplying liquid too quickly. When the metering pump is delivering liquid, supplying liquid too quickly or too slowly will cause the accuracy of controlling the addition of raw materials to decrease, affecting the quality of the product. In fact, the data collected by either the liquid pressure sensor 2 or the flow rate sensor 3 can be used to determine whether the flow pump has a stable output. The present invention uses data collected by both sensors as a basis for judgment, which can greatly improve the accuracy of the flow pump judgment.

[0041] If the output liquid of the metering pump fluctuates, the two sets of difference processed data are multiplied by the conversion coefficient. The purpose is to convert the two different dimensional data into data of the same dimension to facilitate subsequent processing and calculation. The converted data is averaged to obtain the comprehensive difference. , multiply the comprehensive difference by the weight coefficient of the metering pump motor , get the control data for adjusting the metering pump motor , and control data is input into the control system that controls the drive motor to adjust the speed of the drive motor, because the metering pump is generally driven by the installed drive motor, and the speed of the drive motor affects the speed of the liquid delivered by the metering pump.

[0042] In a preferred embodiment of the present invention, the comprehensive difference is multiplied by a weight coefficient for adjusting the metering pump motor to obtain control data for adjusting the metering pump motor, including:

[0043] The adjustment of the drive motor is determined according to the absolute value of the comprehensive difference, and the weight coefficient is adjusted. Correction is performed because when the comprehensive difference is large, it means that the actual delivery situation of the metering pump is very different from the preset stable delivery situation, and a large adjustment is required at this time; when the comprehensive difference is small, a small adjustment is made to avoid over-adjustment and system instability. Therefore, the correction weight coefficient needs to be dynamically adjusted according to the gap between the actual delivery situation and the preset stable delivery situation. , the modified weight coefficient The calculation formula is:

[0044] ;

[0045] in Expressed as the original weight coefficient for regulating the metering pump motor, it determines the overall regulation strength; Expressed as an adjustment coefficient, it is used to control the amplitude of nonlinear adjustment. The larger the value, the more obvious the effect of nonlinear adjustment. The smaller the value, the closer the adjustment is to linearity; is a scaling factor that controls the speed of change of the hyperbolic tangent function. The larger the value, the greater the change in the hyperbolic tangent function can be achieved with a smaller difference. The smaller the value, the smoother the function changes; Expressed as a comprehensive difference.

[0046] According to the comprehensive difference The positive or negative value determines the direction of the drive motor adjustment. If the comprehensive difference If it is a positive number, it means that the actual flow rate per unit time of the metering pump is greater than the flow rate per unit time of the preset unit time, and the drive motor needs to be adjusted to reduce the speed; if the comprehensive difference If it is a negative number, it means that the actual flow rate per unit time of the metering pump is less than the flow rate per unit time of the preset unit time, and the speed of the drive motor needs to be increased; then according to the corrected weight coefficient , get the control data for adjusting the metering pump drive motor ;

[0047] , among which is a sign function, when hour, ;when hour, ;when hour, .

[0048] In a preferred embodiment of the present invention, multiple experiments are conducted on the metering pump under different working conditions, and the comprehensive difference value is recorded each time. Adjust the speed of the driving motor so that the liquid pressure in the liquid inlet of the metering pump reaches the preset liquid pressure and the flow rate in the liquid outlet reaches the preset flow rate; determine different comprehensive differences through experimental analysis and the corresponding 、 Take the value and store it. When the metering pump is working, the comprehensive difference You can call the corresponding and and enter the value of In the formula, it is convenient to calculate the corrected weight coefficient .

[0049] In a preferred embodiment of the present invention, when the liquid supply tank is filled to a full liquid state for the first time, when the metering pump is turned on and draws liquid from the liquid supply tank, the control module records the pressure data at each moment measured by the liquid pressure sensor 2 and the flow rate data at each moment measured by the flow rate sensor 3;

[0050] When the liquid supply tank is subsequently filled to a full liquid state, when the metering pump extracts liquid from the liquid supply tank, based on the pressure data and flow rate data of the liquid supply tank extraction process previously stored by the control module, the control module retrieves the pressure data and flow rate data of the next moment based on the pressure data and flow rate data measured at the current moment according to the stored data, and calculates the control data of the drive motor at the next moment based on the pressure data and flow rate data of the next moment. , and input it into the control system that controls the drive motor to adjust the speed of the drive motor in advance, so as to predict the speed of the drive motor at the next moment in advance, which can improve the accuracy of liquid delivery by the metering pump.

[0051] Example 2

[0052] In a preferred embodiment of the present invention, the control module records the pressure data at each moment measured by the liquid pressure sensor 2 and the flow rate data at each moment measured by the flow rate sensor 3, and uses them as training samples of the learning model and inputs them into the learning model. The trained model is used to estimate the pressure data and flow rate data at the next moment, and the control data of the drive motor at the next moment is calculated based on the estimated pressure data and flow rate data. , and input it into the control system that controls the drive motor to adjust the speed of the drive motor in advance;

[0053] The estimated pressure data and flow rate data are calculated to obtain an estimated comprehensive difference. The current comprehensive difference is calculated based on the data from the current liquid pressure sensor 2 and flow rate sensor 3. The estimated comprehensive difference and the current comprehensive difference are both processed as absolute values and then subjected to difference processing. The difference is used as a feedback signal to adjust the learning model to obtain a new learning model. The new learning model is used to predict future pressure data and flow rate data. The above steps are repeated, that is, the new predicted pressure data and flow rate data are compared with the current pressure data and flow rate data, the difference is calculated, the feedback signal is generated, the model is adjusted, and the prediction is repeated. A convergence criterion is set (such as the prediction error is less than a certain threshold). When the convergence criterion is met, the learning model is considered to be sufficiently accurate and the iteration is stopped. The learning model is a recurrent neural network model, which can be an RNN neural network model or an LSTM model. Compared with Example 1, Example 2 has self-optimization and adaptability. By continuously comparing the estimated pressure and flow rate data with the data at the current moment, calculating the difference and generating a feedback signal, the model can dynamically adjust its own parameters to adapt to changes under different working conditions. This adaptive ability enables the system to maintain high prediction accuracy and control effects under different working conditions.

[0054] In a preferred embodiment of the present invention, the pressure data and flow rate data collected by the sensor are filtered. The filtering process can effectively smooth the data and reduce the influence of noise, so that the collected data can better reflect the actual working state of the metering pump. The filtering is performed by exponential weighted moving average. The specific filtering process is to first set the smoothing coefficient to be ;

[0055] in , for pressure data, the output after exponentially weighted moving average filtering is , where the initial value , Expressed as time The collected raw data of the metering pump inlet pressure is measured in real time by the liquid pressure sensor 2; Expressed as time The filtered inlet pressure data is used to participate in the moment Filter calculation; Represented as the initial moment The filtered pressure data is directly taken from the original pressure data at the initial moment , as the starting value for filtering calculation;

[0056] For velocity data, the output after exponentially weighted moving average filtering is , where the initial value , Expressed as at time ,After exponentially weighted moving average filtering, the flow velocity data at the outlet of the metering pump is the output result after filtering; Expressed as time The collected original data of the flow rate at the outlet of the metering pump is obtained by real-time measurement by the flow rate sensor 3; Expressed as time The filtered outlet flow rate data is used to participate in the moment Filter calculation; Initial moment The filtered velocity data is directly taken from the original velocity data at the initial moment , as the starting value for filtering calculation; is the smoothing coefficient, The larger it is, the higher the weight of the current original data is, and the faster the filtered data responds to new data; The smaller it is, the higher the weight of historical filtering data is, and the smoother the filtering effect is.

[0057] In a preferred embodiment of the present invention, an error range of the comprehensive difference, that is, a dead zone, is set. If the comprehensive difference falls within this range (dead zone), the motor adjustment is not performed; when the comprehensive difference exceeds the range (dead zone), the drive motor is adjusted accordingly according to the size and direction of the difference. The purpose of this is to avoid frequent adjustment of the drive motor due to small fluctuations in the measurement data, thereby reducing motor wear and system energy consumption.

[0058] In a preferred embodiment of the present invention, the control data is set Within the physical allowable range of the drive motor, set the upper limit of the control data to The sum is the lower limit , limit the control data, the specific processing formula is:

[0059] , if the calculated , at this time will The data is input into the control system of the drive motor; if the calculated Data in In the interval, the calculated The data is input into the control system of the drive motor; if the calculated , at this time will The data is input into the control system that drives the motor.

[0060] In a preferred embodiment of the present invention, the metering pump body 1 also has a wireless transmitting module and a wireless receiving module, which are both electrically connected to the control module. The control module also has a pre-set alarm threshold range. ,like The alarm is triggered when the threshold value is not within the range.

[0061] In the calculated data Not present When the metering pump is running, it means that the metering pump can no longer be stably adjusted. At this time, an alarm is triggered. The alarm can be a buzzer that sounds an alarm to alert the on-site staff, or it can be a wireless transmission module that sends an alarm signal to the mobile terminal used by the staff, such as a mobile phone, tablet computer, etc. The alarm signal can include text prompts, sound prompts or vibration prompts to ensure that the staff can receive the alarm information in a timely manner. At the same time, each alarm will be recorded, including the alarm time, alarm cause, treatment measures and other information for subsequent query and analysis. In addition, when the metering pump is working, the staff can use the wireless transmission module and the wireless receiving module to view in real time various data on the current working status of the metering pump. The staff can monitor the working status of the metering pump in real time without being on site, thereby improving work efficiency and safety. The long-term accumulated working status data can be used for subsequent data analysis to optimize the working parameters and maintenance plan of the metering pump. Through real-time data transmission and alarm mechanism, potential faults can be discovered in time to avoid more serious consequences.

[0062] The above description is merely a preferred embodiment of the present invention; however, the scope of protection of the present invention is not limited thereto. Any person skilled in the art who, within the technical scope disclosed by the present invention, makes equivalent substitutions or modifications based on the technical solutions and improved concepts of the present invention shall be covered by the scope of protection of the present invention.

Claims

1. A metering pump for high-precision delivery of hydrofluoric acid, comprising a metering pump body (1), characterized in that: A collection module, a control module and a drive motor are installed on the metering pump body (1). The drive motor provides driving force for the metering pump body (1). The collection module includes a liquid pressure sensor (2) and a flow rate sensor (3). The liquid pressure sensor (2) is installed at the liquid inlet of the metering pump body (1). The liquid pressure sensor (2) is used to collect liquid pressure data in the liquid inlet when the metering pump body (1) is working at each moment; the flow rate sensor (3) is installed at the liquid outlet of the metering pump body (1). The flow rate sensor (3) is used to collect liquid flow rate data in the liquid outlet when the metering pump body (1) is working at each moment. The control module pre-sets the liquid pressure data in the liquid inlet and the liquid flow rate data in the liquid outlet when the metering pump body (1) is working stably. The control module performs difference processing on the collected liquid pressure data and the pre-set liquid pressure data, and performs difference processing on the collected liquid flow rate data and the pre-set liquid flow rate data, and judges whether the metering pump is stably delivering liquid based on the two sets of differences. If the output liquid of the metering pump fluctuates, the two sets of difference-processed data are multiplied by the conversion coefficient, and the converted data are averaged to obtain a comprehensive difference. The comprehensive difference is multiplied by the weight coefficient for adjusting the metering pump motor to obtain control data for adjusting the metering pump motor. The control data is input into the control system in the drive motor to adjust the speed of the drive motor. The adjustment of the drive motor is determined according to the absolute value of the comprehensive difference, and the weight coefficient is adjusted. Make corrections, and the corrected weight coefficient The calculation formula is: ； in Expressed as the original weight coefficient for regulating the metering pump motor, it determines the overall regulation strength; Expressed as an adjustment coefficient, it is used to control the amplitude of nonlinear adjustment. The larger the value, the more obvious the effect of nonlinear adjustment. The smaller the value, the closer the adjustment is to linearity; is a scaling factor that controls the speed of change of the hyperbolic tangent function. The larger the value, the greater the change in the hyperbolic tangent function can be achieved with a smaller difference. The smaller the value, the smoother the function changes; Expressed as comprehensive difference; The direction of the drive motor adjustment is determined based on the positive or negative value of the comprehensive difference, and then the corrected weight coefficient is used. , get the control data for adjusting the metering pump drive motor ; 。 2. A metering pump for high-precision delivery of hydrofluoric acid according to claim 1, characterized in that: Conduct multiple experiments on the metering pump under different working conditions and record the comprehensive difference each time. Adjust the speed of the driving motor so that the liquid pressure in the liquid inlet of the metering pump reaches the preset liquid pressure and the flow rate in the liquid outlet reaches the preset flow rate; determine different comprehensive differences through experimental analysis and the corresponding 、 Take the value and store it. When the metering pump is working, the comprehensive difference Retrieve the corresponding and The value of .

3. A metering pump for high-precision delivery of hydrofluoric acid according to claim 2, characterized in that: When the liquid supply tank is filled to a full liquid state for the first time, when the metering pump is turned on and draws liquid from the liquid supply tank, the control module records the pressure data at each moment measured by the liquid pressure sensor (2) and the flow rate data at each moment measured by the flow rate sensor (3); Subsequently, the liquid supply tank is filled to a full liquid state. When the metering pump extracts liquid from the liquid supply tank, based on the pressure data and flow rate data stored in the control module during the extraction process of the liquid supply tank, the control module retrieves the pressure data and flow rate data of the next moment based on the stored data, and calculates the control data of the drive motor at the next moment based on the pressure data and flow rate data of the next moment. , and input it into the control system that controls the drive motor to adjust the speed of the drive motor in advance.

4. A metering pump for high-precision delivery of hydrofluoric acid according to claim 3, characterized in that: The control module records the pressure data at each moment measured by the liquid pressure sensor (2) and the flow rate data at each moment measured by the flow rate sensor (3), and uses them as training samples of the learning model and inputs them into the learning model. The trained model is used to estimate the pressure data and flow rate data at the next moment, and the control data of the drive motor at the next moment is calculated based on the estimated pressure data and flow rate data. , and input it into the control system that controls the drive motor to adjust the speed of the drive motor in advance; The estimated pressure data and flow rate data are calculated to obtain an estimated comprehensive difference, the comprehensive difference at the current moment is calculated based on the data of the liquid pressure sensor (2) and the flow rate sensor (3) at the current moment, and the estimated comprehensive difference and the comprehensive difference at the current moment are both processed as absolute values, and then subjected to difference processing. The difference is used as a feedback signal to adjust the learning model to obtain a new learning model, and the new learning model is used to predict future pressure data and flow rate data. The prediction model is automatically adjusted according to the difference so that the subsequent predicted pressure data and flow rate data tend to be the same as the pressure data and flow rate data at the previous moment, and the new learning model is used to predict the future pressure data and flow rate data to obtain new predicted pressure data and flow rate data.

5. A metering pump for high-precision delivery of hydrofluoric acid according to claim 1, characterized in that: The pressure data and flow rate data collected by the sensor are filtered and filtered using the exponential weighted moving average method. The specific filtering process is to first set the smoothing coefficient to ; in , for pressure data, the output after exponentially weighted moving average filtering is , where the initial value , Expressed as time The collected raw data of the metering pump inlet pressure is obtained by real-time measurement by the liquid pressure sensor (2); Expressed as time The filtered inlet pressure data is used to participate in the moment Filter calculation; Represented as the initial moment The filtered pressure data is directly taken from the original pressure data at the initial moment , as the starting value for filtering calculation; For velocity data, the output after exponentially weighted moving average filtering is , where the initial value , Expressed as at time ,After exponentially weighted moving average filtering, the flow velocity data at the outlet of the metering pump is the output result after filtering; Expressed as time The collected original data of the flow rate at the outlet of the metering pump is obtained by real-time measurement by the flow rate sensor (3); Expressed as time The filtered outlet flow rate data is used to participate in the moment Filter calculation; Initial moment The filtered velocity data is directly taken from the original velocity data at the initial moment , as the starting value for filtering calculation; is the smoothing coefficient, The larger it is, the higher the weight of the current original data is, and the faster the filtered data responds to new data; The smaller it is, the higher the weight of historical filtering data is, and the smoother the filtering effect is.

6. A metering pump for high-precision delivery of hydrofluoric acid according to claim 2, characterized in that: An error range is set. If the comprehensive difference falls within this range, the motor adjustment is not performed. When the comprehensive difference exceeds the range, the drive motor is adjusted accordingly according to the size and direction of the difference.

7. A metering pump for high-precision delivery of hydrofluoric acid according to claim 6, characterized in that: Setting control data Within the physical allowable range of the drive motor, set the upper limit of the control data to The sum is the lower limit , limit the control data, the specific processing formula is: 。 8. A metering pump for high-precision delivery of hydrofluoric acid according to claim 7, characterized in that: The metering pump body (1) also has a wireless transmitting module and a wireless receiving module, and both the wireless transmitting module and the wireless receiving module are electrically connected to the control module.

9. A metering pump for high-precision delivery of hydrofluoric acid according to claim 8, characterized in that: The control module also has a pre-set alarm threshold range ,like The alarm is triggered when the threshold value is not within the range.

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