Jet pipe regulated and controlled by piezoelectric ceramic piece, jet pipe driving method and servo valve

Abstract

The invention discloses a jet pipe regulated and controlled by piezoelectric ceramic pieces, a jet pipe driving method and a servo valve.The jet pipe comprises a jet plate set, the jet plate set comprises at least two jet plates hinged in sequence, each jet plate is provided with an oil duct, the oil ducts of every two adjacent jet plates are communicated, the jet plates are divided into at least one connecting jet plate and at least one tail jet plate, and the connecting jet plates are connected with the tail jet plate. First connecting pieces are arranged at the two ends of the connecting jet flow plates, the connecting jet flow plates are sequentially hinged, a first connecting piece is arranged at one end of the tail jet flow plate, and the tail jet flow plate is hinged to the connecting jet flow plate at the end; the piezoelectric ceramic pieces are arranged on the two opposite sides of the jet plate and connected with wires. The jet pipe and the piezoelectric ceramic pieces are discretized to form at least two sections of jet plates with Fibonacci coding piezoelectric ceramic piece arrays, the input voltage of each piezoelectric ceramic piece is controlled, and the high-precision long-service-life driving method is combined, so that the jet plate array is formed, and the jet efficiency is improved. The system has the advantages of high precision, high reliability, high dynamic response, good interchangeability and high expansibility.

Description

Technical Field

[0001] The present invention relates to hydraulic transmission and control, and in particular to a jet pipe regulated by a piezoelectric ceramic sheet, a jet pipe driving method, and a servo valve. Background Art

[0002] As a core component of high-end hydraulic transmission and driving equipment, the proportional servo valve has the characteristics of high precision, high reliability, good control performance, etc. At present, it has been widely used in industrial automation, automobiles, aerospace and other fields. The pilot stage of the proportional servo valve can be divided into a spool valve, a nozzle flapper valve, a jet pipe valve, and a deflector jet valve according to the structural form. The jet pipe type proportional servo valve has become one of the two typical two-stage proportional servo valves that are currently more commonly used due to its high reliability. However, limited by the response speed of the torque motor, the frequency response of the jet pipe type proportional servo valve is generally not as good as that of the nozzle flapper type proportional servo valve.

[0003] The Chinese patent application publication text with the publication number CN220748702U discloses a jet pipe valve offset structure, which uses a piezoelectric ceramic component to replace the traditional torque motor to drive the jet pipe. During operation, an electric current is applied to the piezoelectric ceramic component to cause it to deform, and then the ear plate is pushed. The ear plate undergoes elastic deformation and presses against the jet pipe to cause it to deflect. Although this can avoid many problems faced during the assembly of the jet pipe type proportional servo valve that uses a torque motor as the electro-mechanical converter, it does not solve the problem of the low frequency response of the jet pipe type proportional servo valve.

[0004] The Chinese patent application publication text with the publication number CN106337851B discloses a deflecting jet type brake pressure servo valve, which uses a deflecting rod jet hydraulic amplifier as the pre-stage, and drives the deflecting rod through a torque motor to direct the high-speed fluid ejected from the jet disc to the covering area of the two receiving ports. Moreover, the minimum size of the pilot stage of this invention is one order of magnitude larger than that of the nozzle flapper hydraulic amplifier. Although this invention improves the frequency response of the proportional servo valve by increasing the output power of the pilot stage hydraulic amplifier, increasing the output power of the pilot stage necessarily requires an increase in the cross-sectional area or stroke of the power stage spool valve, thereby reducing the hydraulic stiffness at both ends of the power stage spool valve, and further reducing the frequency response of the entire valve. At the same time, increasing the cross-sectional area and stroke of the spool valve will also reduce the frequency response of the entire valve. In addition, the electro-mechanical converter uses a torque motor, which will greatly increase the complexity and difficulty of the assembly process. Summary of the Invention

[0005] In view of the deficiencies in the prior art, the present invention provides a jet pipe regulated by piezoelectric ceramic chips. By changing the traditional jet pipe into a jet plate and discretizing it axially, a jet plate with a Fibonacci-coded piezoelectric ceramic chip array provided in four sections is formed. By controlling the value of the excitation voltage applied to the piezoelectric ceramic chip array, the horizontal offset of the jet plate is controlled, and further the clearance value between the middle position of the orifice of the jet plate nozzle and the receiver is changed. Finally, a pressure difference is generated between the left and right ends of the spool of the proportional servo valve, achieving precise control of the displacement of the proportional servo valve, and having the advantages of high control accuracy, high reliability, high replaceability, and convenient disassembly and assembly.

[0006] To achieve the above object, the present invention provides a jet pipe regulated by piezoelectric ceramic chips. The jet pipe is rotatably connected to the housing of the servo valve. The jet pipe includes: A jet plate group, which includes at least two jet plates rotatably connected in sequence. The jet plates are provided with oil channels, and the oil channels between adjacent two jet plates are communicated. The jet plates are divided into at least one connecting jet plate and a tail jet plate. Both ends of the connecting jet plate are provided with first connectors. The jet plate group is rotatably connected to the housing of the servo valve through the first connectors. Each of the connecting jet plates is rotatably connected in sequence through the first connectors. One end of the tail jet plate is provided with a first connector, and the tail jet plate is rotatably connected to the connecting jet plate at the end through the first connector; Piezoelectric ceramic chips, which are provided on opposite sides of the jet plate. The piezoelectric ceramic chips are connected with wires. Applying a DC voltage to the piezoelectric ceramic chips can cause the jet plate connected to the piezoelectric ceramic chips to deflect.

[0007] Through the above technical solution, the jet pipe is discretized, and the mass of each jet plate is smaller, which can improve the response speed of the jet pipe type proportional servo valve; compared with the traditional jet pipe proportional servo valve, in terms of structure, the present application discretizes a single large-mass jet pipe into multiple small-mass jet plates, and realizes high-frequency motion and high-precision regulation with the help of piezoelectric ceramic chips; in terms of the driving method, the driving combination of the array piezoelectric ceramic chips can be optimally selected according to the target horizontal offset, realizing the minimization of the moving mass.

[0008] Further, the first connector includes a lug. By passing a flow distribution pin through the lugs of adjacent two jet plates, the adjacent two jet plates are hinged; The flow distribution pin is provided with two oil passing windows, and the two oil passing windows communicate with each other inside the flow distribution pin. The oil passing windows are respectively communicated with the oil channels of the two jet plates to communicate the oil channels of the adjacent jet plates.

[0009] Further, within the jet plate group, the length of the jet plates decreases from the side close to the housing of the servo valve to the side far from the housing of the servo valve.

[0010] Furthermore, within the jet plate group, from the side far away from the servo valve housing towards the side close to the servo valve housing, the lengths of the jet plates are arranged in a Fibonacci sequence.

[0011] Furthermore, the length of the piezoelectric ceramic sheet accounts for 5 / 6 to 2 / 3 of the length of the jet plate it is connected to.

[0012] A driving method for the jet pipe regulated by the above piezoelectric ceramic sheet. The jet plate group includes four jet plates. From the side close to the servo valve housing towards the side far away from the servo valve housing, the jet plates are sequentially arranged as the first jet plate, the second jet plate, the third jet plate, and the fourth jet plate. The maximum horizontal displacement amounts of each jet plate are 3E, 2E, E, and E respectively. The driving method is as follows: Obtain the target horizontal displacement amount x; If x is a decimal and x ≤ E, apply voltage excitation only to the piezoelectric ceramic sheet on the fourth jet plate according to the value of x; If x is a decimal and x > E, round x down to get x1; If x1 ∈ (0, E], apply corresponding voltage excitation to the piezoelectric ceramic sheets on the third jet plate and the fourth jet plate according to the value of x; If x1 ∈ (E, 2E], apply corresponding voltage excitation to the piezoelectric ceramic sheets on the second jet plate and the fourth jet plate according to the value of x; If x1 ∈ (2E, 3E], apply corresponding voltage excitation to the piezoelectric ceramic sheets on the second jet plate, the third jet plate, and the fourth jet plate according to the value of x; If x1 > 3E, calculate the remainder m1 when x1 is divided by 3E. If m1 = 0, apply corresponding voltage excitation to the piezoelectric ceramic sheets on the first jet plate, the second jet plate, the third jet plate, and the fourth jet plate according to the value of x; If m1 = 2E, apply corresponding voltage excitation to the piezoelectric ceramic sheets on the first jet plate, the second jet plate, and the fourth jet plate according to the value of x; If m1 = E, apply corresponding voltage excitation to the piezoelectric ceramic sheets on the first jet plate, the third jet plate, and the fourth jet plate according to the value of x; If x is an integer, calculate the values of a, b, c, and d according to the formula 3aE + 2bE + cE + dE = x. Combine the values of a, b, c, and d that meet the formula into the state array M, and write the state array M into the scheme array L in sequence x where the values of a, b, c, and d are 0 or 1; According to the occurrence times of the target horizontal displacement amount x, execute the state array M in the scheme array L in sequence x in turn.

[0013] Furthermore, if x is a decimal and x≤E, only a 0.5U voltage excitation is applied to the piezoelectric ceramic sheet on the fourth ejection plate.

[0014] Further, if x1∈(0,E], a voltage excitation of U is applied to the piezoelectric ceramic sheet 12 on the third jet plate, and a voltage excitation of (x-x1)U is applied to the piezoelectric ceramic sheet on the fourth jet plate, wherein U represents that when a voltage excitation of U is applied to the piezoelectric ceramic sheet, the jet plate connected to the piezoelectric ceramic sheet reaches the maximum offset; If x1∈(E,2E], a voltage of U is applied to the piezoelectric ceramic sheet on the second jet plate, and a voltage of (x-x1)U is applied to the piezoelectric ceramic sheet on the fourth jet plate; If x1∈(2E,3E], a voltage of U is applied to the piezoelectric ceramic sheet on the second jet plate, a voltage of U is applied to the piezoelectric ceramic sheet on the third jet plate, and a voltage of (x-x1)U is applied to the piezoelectric ceramic sheet on the fourth jet plate.

[0015] Further, if m1=0, a voltage of U is applied to the piezoelectric ceramic sheets on the first jet plate, the second jet plate, and the third jet plate, and a voltage of (x-x1)U is applied to the piezoelectric ceramic sheet on the fourth jet plate; If m1=2E, a voltage of U is applied to the piezoelectric ceramic sheets on the first and second jet plates, and a voltage of (x-x1)U is applied to the piezoelectric ceramic sheet on the fourth jet plate; If m1=E, a voltage of U is applied to the piezoelectric ceramic sheets on the first and third jet plates, and a voltage of (x-x1)U is applied to the piezoelectric ceramic sheets on the fourth jet plate.

[0016] A servo valve of a jet tube regulated by the piezoelectric ceramic sheet, comprising: A housing, wherein a convex shaft is disposed in the housing, and the convex shaft has an oil passage; A jet plate group, wherein the jet plate group is hinged to the convex shaft, and an oil passage connecting the jet plates at an inner end of the jet plate group is in communication with an oil passage of the convex shaft; A nozzle, the nozzle being in communication with an oil passage of a jet plate on a side away from the housing; A receiver, wherein the receiver is provided with two receiving oil passages, and the two receiving oil passages are symmetrical about the outlet center of the nozzle; A valve body, wherein the valve body is provided with a valve body oil circuit, a first oil inlet passage and a second oil inlet passage connected to the valve body oil circuit, the first oil inlet passage and the second oil inlet passage are respectively connected to two receiving oil passages of a receiver, a first working oil passage and a second working oil passage connected to the valve body oil circuit are provided between the first oil inlet passage and the second oil inlet passage, and an oil return passage connected to the valve body oil circuit is provided between the first working oil passage and the second working oil passage; The spool valve is arranged in the oil circuit of the valve body. The spool valve separates the first working oil passage and the second working oil passage, the oil return passage and the oil circuit of the valve body, the oil circuit of the valve body and the first oil inlet passage, and the oil circuit of the valve body and the second oil inlet passage. The spool valve can slide along the oil circuit of the valve body to connect the first oil inlet passage or the second oil inlet passage with the oil circuit of the valve body.

[0017] With the above technical solutions, the beneficial effects of the present invention are as follows: Compared with the traditional jet pipe valve, the present invention discretizes the jet pipe, with a smaller mass. At the same time, among various eligible driving schemes, the jet plate with a smaller mass is preferentially selected for movement, which can improve the response speed of the jet pipe type proportional servo valve; compared with the traditional jet pipe proportional servo valve, the dynamic performance is better, which is reflected in the following two aspects: in terms of structure, a single large-mass jet pipe is discretized into multiple small-mass jet plates, and high-frequency movement and high-precision regulation are realized with the help of piezoelectric ceramic sheets; in terms of the driving method, the driving combination of the array piezoelectric ceramic sheets can be optimally selected according to the target horizontal offset amount to minimize the moving mass. Since the axial dimensions of the jet plates proposed by the present invention are arranged according to the Fibonacci numbers, for any given target horizontal offset amount, there are at least two driving schemes. The driving method proposed by the present invention can autonomously switch different driving schemes when receiving the same target horizontal offset amount to ensure that the driving times of each jet plate are as equal as possible, that is, to achieve the long-life control of the jet plate group.

[0018] To make the above and other objects, features, and advantages of the present invention more obvious and understandable, the following specific preferred embodiments are given, and in conjunction with the accompanying drawings, the detailed description is as follows. Description of the Drawings

[0019] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0020] Figure 1 It is a two-dimensional cross-sectional view of a jet pipe regulated by piezoelectric ceramic sheets provided by an embodiment of the present invention; Figure 2 It is a three-dimensional assembly external view schematic diagram of a proportional servo valve provided by an embodiment of the present invention; Figure 3 It is a two-dimensional cross-sectional view of the pilot housing of a proportional servo valve provided by an embodiment of the present invention; Figure 4 It is an installation schematic diagram of the first jet plate and the second jet plate provided by an embodiment of the present invention; Figure 5 A two-dimensional cross-sectional view of the pilot control oil circuit of the proportional servo valve provided by the embodiment of the present invention; Figure 6 A two-dimensional cross-sectional view of the valve body provided by the embodiment of the present invention; Figure 7 A flowchart of the jet pipe driving method regulated by the piezoelectric ceramic sheet provided by the embodiment of the present invention; Figure 8 A working schematic diagram of each jet plate at the target horizontal offset x provided by the embodiment of the present invention.

[0021] Reference numerals of the above drawings: 1. Pilot housing; 101. Convex shaft; 102. Axle shoulder; 2. First right piezoelectric ceramic sheet; 3. First jet plate; 301. First lifting lug; 302. Annular groove; 303. Double lifting lugs; 304. Arc surface; 3004. Flow channel of the first jet plate; 4. First left piezoelectric ceramic sheet; 5. First flow distribution pin shaft; 501. First oil passage window; 502. Second oil passage window; 6. Second right piezoelectric ceramic sheet; 7. Second jet plate; 701. Second lifting lug; 702. Oil circuit inside the second jet plate; 8. Second left piezoelectric ceramic sheet; 9. Second flow distribution pin shaft; 901. Third oil passage window; 902. Fourth oil passage window; 10. Third right piezoelectric ceramic sheet; 11. Third jet plate; 1101. Oil passage of the third jet plate; 12. Third left piezoelectric ceramic sheet; 13. Third flow distribution pin shaft; 1301. Fifth oil passage window; 1302. Sixth oil passage window; 14. Fourth right piezoelectric ceramic sheet; 15. Fourth jet plate; 1501. Oil circuit of the fourth jet plate; 16. Fourth left piezoelectric ceramic sheet; 17. Spool; 18. Valve body; 1801. Internal control oil port; 19. Sealing ring; 20. Receiver mounting seat; 21. Receiver; 22. Lead bolt; 23. Shaft circlip for shaft. Detailed implementation manners

[0022] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0023] It should be noted that in the description of the present invention, the terms first, second, etc. are only used for descriptive purposes to distinguish similar objects, and there is no sequence between them, nor can they be understood as indicating or implying relative importance. In addition, in the description of the present invention, unless otherwise specified, the meaning of "a plurality" is two or more.

[0024] Embodiment: In this embodiment, a servo valve is disclosed, including: The housing 1, as Figure 3 shown, a convex shaft 101 and a shaft shoulder 102 are provided inside the housing 1, and the convex shaft 101 has a flow channel 105.

[0025] The convex shaft 101 is hinged with a jet plate group, the jet plate group includes four sequentially hinged jet plates, each jet plate has a flow channel, and the flow channels of adjacent jet plates are communicated. From the side close to the convex shaft 101 to the side far from the convex shaft 101, the four jet plates are sequentially arranged as the first jet plate 3, the second jet plate 7, the third jet plate 11, and the fourth jet plate 15.

[0026] Combined with Figure 1 、 3 、as shown in Figure 4, a first lifting lug 301 is provided at the upper end of the first jet plate 3, and the housing 1 and the first jet plate 3 are connected by the shaft hole fit of the convex shaft 101 and the first lifting lug 301. The first jet plate 3 can rotate relative to the housing 1, and the axial fixation of the first jet plate is realized by the shaft shoulder 102 and the shaft retaining ring 23, and the oil channel of the first jet plate 3 is communicated with the flow channel 105 of the convex shaft 101. A double lifting lug 303 and an arc surface 304 are designed at the lower end of the first jet plate 3, a second lifting lug 701 is designed at the upper end of the second jet plate 7, the diameter of the arc surface 304 is equal to the outer contour diameter of the second lifting lug 701, and the length between the double lifting lugs 303 is equal to the radial length of the second lifting lug 701. The axial fixation of the second jet plate is realized by the interference fit of the first distribution pin shaft 5 with the inner hole of the double lifting lug 303 and the clearance fit with the inner hole of the second lifting lug 701. Wherein, the diameter of the first distribution pin shaft 5 is equal to the inner hole diameters of the double lifting lug 303 and the second lifting lug 701, and the length of the first distribution pin shaft 5 is equal to the radial lengths of the first jet plate 3 and the second jet plate 7. Wherein, two oil passing windows are provided on the first distribution pin shaft 5, the two oil passing windows are communicated from the inside of the first distribution pin shaft 5, and the oil passing windows are respectively communicated with the oil channels of the first jet plate 3 and the second jet plate 7 to communicate the oil channels of the first jet plate 3 and the second jet plate 7. The installation methods and cooperation relationships between the second jet plate 7 and the third jet plate 11, and between the third jet plate 11 and the fourth jet plate 15 are the same as the installation method and cooperation relationship between the first jet plate 3 and the second jet plate 7.

[0027] The lower end of the fourth jet plate 15 is connected with a nozzle 1502, and the oil channel of the nozzle 1502 is communicated with the fourth jet plate 15.

[0028] Piezoelectric ceramic sheets are respectively connected to the opposite sides of the jet plate, as Figure 1As shown, on both sides of the first jet plate 3, a first right piezoelectric ceramic sheet 2 and a first left piezoelectric ceramic sheet 4 are bonded by epoxy resin glue; on both sides of the second jet plate 7, a second right piezoelectric ceramic sheet 6 and a second left piezoelectric ceramic sheet 8 are bonded by epoxy resin glue; on both sides of the third jet plate 11, a third right piezoelectric ceramic sheet 10 and a third left piezoelectric ceramic sheet 12 are bonded by epoxy resin glue; on both sides of the fourth jet plate 15, a fourth right piezoelectric ceramic sheet 14 and a fourth left piezoelectric ceramic sheet 16 are bonded by epoxy resin glue.

[0029] The housing 1 is fixed with a wire bolt 22 by bolts, and the piezoelectric ceramic sheet is connected to a wire through the wire bolt 22.

[0030] A receiver mounting seat 20 is provided below the nozzle 1502. The receiver mounting seat 20 is used to fix the receiver 21. The receiver mounting seat 20 is in interference connection with the receiver 21. The receiver 21 is provided with two receiving oil channels, and the two receiving oil channels are symmetric about the outlet center of the nozzle 1502.

[0031] A valve body 18 is provided on one side of the receiver mounting seat 20 facing away from the housing 1. The receiver mounting seat 20 and the valve body 18 are fixed by bolts, and the housing 1 and the valve body 18 are fixed by bolts. As Figure 6 shown, the valve body 18 is provided with a valve body oil passage, a first oil inlet passage P1 and a second oil inlet passage P2 communicated with the valve body oil passage. The first oil inlet passage P1 and the second oil inlet passage P2 are respectively communicated with the two receiving oil channels of the receiver. A first working oil passage A and a second working oil passage B communicated with the valve body oil passage are provided between the first oil inlet passage P1 and the second oil inlet passage P2. A return oil passage T communicated with the valve body oil passage is provided between the first working oil passage A and the second working oil passage B. The valve body 18 is also provided with an internal control oil port 1801.

[0032] A valve core 17 is provided in the valve body oil passage. The valve core 17 cuts off the first working oil passage A and the second working oil passage B, the return oil passage T and the valve body oil passage, the valve body oil passage and the first oil inlet passage P1, and the valve body oil passage and the second oil inlet passage P2. The valve core 17 can slide along the valve body oil passage so that the first oil inlet passage P1 or the second oil inlet passage P2 is communicated with the valve body oil passage.

[0033] The two receiving oil channels of the receiver 21 are respectively communicated with both sides of the valve body oil circuit. The pilot fluid from the hydraulic power source flows through the channels 105 and 104 on the housing 1 and is introduced into the jet plate group, and is ejected towards the receiver 21 through the nozzle 1502 of the fourth jet plate 15. When there is no signal input, the jet plate group remains at the middle position between the two receiving holes. The jet kinetic energy received by the two receiving holes is the same, so the recovery pressures of the two receiving holes are also equal, and the spool 17 does not move. When there is a signal input to the jet plate group, the jet plate deviates from the middle position, and the jet kinetic energy received by the two receiving holes is different, so the recovery pressures of the two receiving holes are different, and the pressure difference causes the spool 17 to move.

[0034] In some feasible embodiments, the jet plate group may further include at least two sequentially hinged jet plates, such as two, three, five, etc. And from the side far away from the servo valve housing to the side close to the servo valve housing, the lengths of the jet plates are arranged in a Fibonacci sequence.

[0035] In this embodiment, the pilot fluid flow can adopt two supply methods. One is internal oil supply, where one end of an external pipeline is connected to the channel 105 on the housing 1, and the other end is connected to the internal control oil port 1801 on the valve body 18; the other is external oil supply, where one end of an external pipeline is connected to the channel 105 on the housing 1, and the other end is connected to an independent hydraulic power source.

[0036] Through the above technical solutions, combined with the working characteristics of the jet pipe servo valve, by opening an oil circuit inside the jet plate, the working state of the jet plate is adjusted without affecting the jet. The internal oil circuit of the jet plate group is as Figure 5 shown. The pilot control fluid of the jet plate group flows through the channel 105 on the housing 1 and is introduced into the inside of the camshaft 101. It is communicated with the annular groove 302 inside the first lug 301 above the first jet plate 3 through the vertical hole 104 on the camshaft 101, flows in through the first oil passage window 501 on the first distribution pin 5 through the oil passage 3004 inside the first jet plate 3, and flows out through the second oil passage window 502. The distribution pin is used to convert the rotational speed of the fluid flow into a horizontal speed, so that the relative rotation between the first jet plate 3 and the second jet plate 7 is smooth; similarly, the fluid flows into the oil inlet hole on the second jet plate 7 through the second oil passage window 502 on the first distribution pin 5, flows into the third oil passage window 901 of the second distribution pin 9 through the oil passage 702 inside the second jet plate 7, and flows out through the fourth oil passage window 902; the oil fluid flowing out from the fourth oil passage window 902 passes through the third jet plate 11, flows into the third distribution pin 13 through the oil passage 1101 inside the third jet plate 11, the oil fluid enters through the fifth oil passage window 1301 of the third distribution pin and flows out through the sixth oil passage window 1302; the oil fluid flows into the fourth jet plate 15 through the third distribution pin and is ejected from the nozzle 1502 towards the receiver 21 through the oil passage 1501 inside the fourth jet plate 15.

[0037] In this embodiment, by controlling the horizontal offset of the four jet plates, the offset of the nozzle 1502 on the fourth jet plate 15 relative to the middle position of the receiver 21 is controlled. Among them, the length of the first jet plate 3: the length of the second jet plate 7: the length of the third jet plate 11: the length of the fourth jet plate 15 = 3:2:1:1. According to similar triangles, when the first jet plate 3, the second jet plate 7, the third jet plate 11, and the fourth jet plate 15 are independently driven, their maximum horizontal offsets are arranged in a Fibonacci sequence, that is, x 1max : x 2max : x 3max : x 4max = 3:2:1:1. Among them, the adjustable horizontal offset range of the first jet plate 3 is the largest, and the adjustable horizontal offset ranges of the third jet plate 11 and the fourth jet plate 15 are the smallest.

[0038] Let the driving voltage of the jet plate be U1, the deflection angle be θ, and the axial length be L. Among them, the calculation formula for the deflection angle is θ = f(U1). When the first jet plate, the second jet plate, the third jet plate, and the fourth jet plate are independently driven to deflect, according to trigonometric functions, the offset δ between the middle positions of the two receiving oil channels of the fourth jet plate 15 and the receiver 21 is δ = Lsin(f(U1)).

[0039] This embodiment also discloses a driving method for a jet tube regulated by a piezoelectric ceramic sheet. The driving method is used to realize the displacement closed-loop control of the spool 17, including adaptively driving each jet plate on the premise of ensuring the target horizontal offset of the fourth jet plate 15 to meet the requirements of high precision and long life of the jet plate group. Suppose the first jet plate 3, the second jet plate 7, the third jet plate 11, and the fourth jet plate 15 all deflect to the right. Therefore, voltage excitation needs to be applied to the first left piezoelectric ceramic sheet 4, the second left piezoelectric ceramic sheet 8, the third left piezoelectric ceramic sheet 12, and the fourth left piezoelectric ceramic sheet 16. The rated working voltages of the first left piezoelectric ceramic sheet 4, the second left piezoelectric ceramic sheet 8, the third left piezoelectric ceramic sheet 12, and the fourth left piezoelectric ceramic sheet 16 are all U, that is, when a voltage excitation with a value of U is applied to the first left piezoelectric ceramic sheet 4, the second left piezoelectric ceramic sheet 8, the third left piezoelectric ceramic sheet 12, and the fourth left piezoelectric ceramic sheet 16, the first left piezoelectric ceramic sheet 4, the second left piezoelectric ceramic sheet 8, the third left piezoelectric ceramic sheet 12, and the fourth left piezoelectric ceramic sheet 16 all reach their maximum offsets. Suppose the maximum horizontal offsets of the first jet plate, the second jet plate, the third jet plate, and the fourth jet plate are 3E, 2E, E, and E respectively. The driving method is as follows: Obtain the target horizontal offset x; If x is a decimal and x ≤ E, only apply a voltage excitation of (x - x1)U to the piezoelectric ceramic sheet on the fourth jet plate.

[0040] If x is a decimal and x > E, the integer part of x is obtained as x1; If x1 ∈ (0, E], a voltage excitation of U is applied to the piezoelectric ceramic sheet 12 on the third jet plate, and a voltage excitation of (x - x1)U is applied to the piezoelectric ceramic sheet on the fourth jet plate, where U represents the voltage excitation value of U applied to the piezoelectric ceramic sheet, and the jet plate connected to the piezoelectric ceramic sheet reaches the maximum offset; If x1 ∈ (E, 2E], a voltage excitation of U is applied to the piezoelectric ceramic sheet on the second jet plate, and a voltage excitation of (x - x1)U is applied to the piezoelectric ceramic sheet on the fourth jet plate; If x1 ∈ (2E, 3E], a voltage excitation of U is applied to the piezoelectric ceramic sheet on the second jet plate, a voltage excitation of U is applied to the piezoelectric ceramic sheet on the third jet plate, and a voltage excitation of (x - x1)U is applied to the piezoelectric ceramic sheet on the fourth jet plate.

[0041] If x1 > 3E, calculate the remainder m1 of x1 divided by 3E, If m1 = 0, a voltage excitation of U is applied to the piezoelectric ceramic sheets on the first jet plate, the second jet plate, and the third jet plate, and a voltage excitation of (x - x1)U is applied to the piezoelectric ceramic sheet on the fourth jet plate; If m1 = 2E, a voltage excitation of U is applied to the piezoelectric ceramic sheets on the first jet plate and the second jet plate, and a voltage excitation of (x - x1)U is applied to the piezoelectric ceramic sheet on the fourth jet plate; If m1 = E, a voltage excitation of U is applied to the piezoelectric ceramic sheets on the first jet plate and the third jet plate, and a voltage excitation of (x - x1)U is applied to the piezoelectric ceramic sheet on the fourth jet plate.

[0042] If x is an integer, calculate the values of a, b, c, and d according to the formula 3aE + 2bE + cE + dE = x, combine the values of a, b, c, and d that meet the formula into the state array M, and write the state array M into the scheme array L in sequence x where a, b, c, and d respectively represent the state quantities of the first jet plate, the second jet plate, the third jet plate, and the fourth jet plate, and the values of a, b, c, and d are 0 or 1. If the values of a, b, c, and d are 0, it means that no voltage excitation is applied to the piezoelectric ceramic sheets on the first jet plate, the second jet plate, the third jet plate, and the fourth jet plate. If the values of a, b, c, and d are 1, it means that a voltage excitation is applied to the piezoelectric ceramic sheets on the first jet plate, the second jet plate, the third jet plate, and the fourth jet plate.

[0043] Execute the state array M in the scheme array L in sequence according to the occurrence times of the target horizontal offset x x in.

[0044] Since the axial dimensions of the jet plates proposed in this application are arranged according to Fibonacci numbers, for any given target horizontal offset, there are at least two driving schemes. Through the above driving method, different driving schemes can be automatically switched when the same target horizontal offset is received to ensure that the driving times of each jet plate are as equal as possible, that is, to achieve long-life control of the jet plate assembly.

[0045] In some feasible embodiments, a controller is used to execute the above driving method: Step 1, define a variable N x Used to record the driving scheme loop state of each target horizontal offset x. The counter N is initialized and set to 1, where N x represents the value of N when the target horizontal offset is x.

[0046] Step 2, obtain the target horizontal offset x.

[0047] Step 3, determine whether x is an integer. If the determination result is no, then sequentially execute Step 4; if the determination result is yes, then jump to execute Step 20.

[0048] Step 4, enter the high-precision short-life driving condition, and determine whether x belongs to (0, 1). If the determination result is no, jump to execute Step 7; if the determination result is yes, then sequentially execute Step 5.

[0049] Step 5, apply a voltage excitation of (x - x1)U to the fourth left piezoelectric ceramic sheet 16 on the fourth jet plate 15, and do not apply voltage excitation to the first left piezoelectric ceramic sheets 4, second left piezoelectric ceramic sheets 8, and third left piezoelectric ceramic sheets 12 on the first jet plate 3, second jet plate 7, and third jet plate 11.

[0050] Step 6, jump to execute Step 2.

[0051] Step 7, round down the target horizontal offset x to get x1.

[0052] Step 8, determine whether x1 belongs to (0, 3). If the determination result is no, jump to execute Step 11; if the determination result is yes, then sequentially execute Step 9.

[0053] Step 9, if x1 ∈ (0, 1], apply a voltage excitation of U to the third left piezoelectric ceramic sheet 12 on the third jet plate 11, apply a voltage excitation of (x - x1)U to the fourth left piezoelectric ceramic sheet 16 on the fourth jet plate 15, and do not apply voltage excitation to the first left piezoelectric ceramic sheets 4 and second left piezoelectric ceramic sheets 8 on the first jet plate 3 and second jet plate 7; If \(x1\in(1,2]\), apply a voltage excitation of \(U\) to the second left piezoelectric ceramic sheet 8 on the second jet plate 7, apply a voltage excitation of \((x - x1)U\) to the fourth left piezoelectric ceramic sheet 16 on the fourth jet plate 15, and do not apply voltage excitation to the first left piezoelectric ceramic sheet 4 on the first jet plate 3 and the third left piezoelectric ceramic sheet 12 on the third jet plate 11; If \(x1\in(2,3]\), apply a voltage excitation of \(U\) to the second left piezoelectric ceramic sheet 8 on the second jet plate 7, apply a voltage excitation of \(U\) to the third left piezoelectric ceramic sheet 12 on the third jet plate 11, apply a voltage excitation of \((x - x1)U\) to the fourth left piezoelectric ceramic sheet 16 on the fourth jet plate 15, and do not apply voltage excitation to the first left piezoelectric ceramic sheet 4 on the first jet plate 3.

[0054] Step 10, return to execute Step 2.

[0055] Step 11, calculate the remainder \(m1\) of \(x1\) divided by \(3E\).

[0056] Step 12, determine whether \(m1\) is 0. If the determination result is false, jump to execute Step 15; if the determination result is true, sequentially execute Step 13.

[0057] Step 13, apply a voltage excitation of \(U\) to the first left piezoelectric ceramic sheet 4, the second left piezoelectric ceramic sheet 8, and the third left piezoelectric ceramic sheet 12 on the first jet plate 3, the second jet plate 7, and the third jet plate 11, and apply a voltage excitation of \((x - x1)U\) to the fourth left piezoelectric ceramic sheet 16 on the fourth jet plate 15.

[0058] Step 14, return to execute Step 2.

[0059] Step 15, determine whether \(m1\) is 2. If the determination result is false, jump to execute Step 18; if the determination result is true, sequentially execute Step 16.

[0060] Step 16, apply a voltage excitation of \(U\) to the first left piezoelectric ceramic sheet 4 and the second left piezoelectric ceramic sheet 8 on the first jet plate 3 and the second jet plate 7, apply a voltage excitation of \((x - x1)U\) to the fourth left piezoelectric ceramic sheet 16 on the fourth jet plate 15, and do not apply voltage excitation to the third left piezoelectric ceramic sheet 12 on the third jet plate 11.

[0061] Step 17, return to execute Step 2.

[0062] Step 18, apply a voltage excitation of \(U\) to the first left piezoelectric ceramic sheet 4 and the third left piezoelectric ceramic sheet 12 on the first jet plate 3 and the third jet plate 11, apply a voltage excitation of \((x - x1)U\) to the fourth left piezoelectric ceramic sheet 16 on the fourth jet plate 15, and do not apply voltage excitation to the second left piezoelectric ceramic sheet 8 on the second jet plate 7.

[0063] Step 19, return to execute Step 2.

[0064] Step 20, enter the low-precision and long-life working condition, define and initialize the four-jet plate state variables a, b, c, and d, where a, b, c, and d take values of 0 or 1 respectively. The four-jet plate state variables represent the working state of the jet plate. That is, when a = 0, it means the first jet plate 3 is not working; when a = 1, it means the first jet plate 3 is working.

[0065] Step 21, define a variable T to record the number of cycles, and initialize the counter T and set it to 1.

[0066] Step 22, perform a bitwise operation on the variable T to traverse the four-jet plate state variables a, b, c, and d, and substitute them into the formula 3a + 2b + c + d. Determine whether 3a + 2b + c + d is equal to x. If the determination result is no, jump to and execute Step 25; if the determination result is yes, jump to and execute Step 23.

[0067] Step 23, define a state array M to record the state variables of the four-jet plate, and write the four-jet plate state variables a, b, c, and d at this time into the state array M.

[0068] Step 24, define a solution array L x to record all jet plate action solutions that meet the conditions, and write the state array M into the solution array L x .

[0069] Step 25, use bitwise operations to calculate the values of the four-jet plate state variables a, b, c, and d corresponding to T respectively.

[0070] Step 26, increment the counter T.

[0071] Step 27, determine whether T is greater than or equal to 15. If the determination result is no, return to and execute Step 22; if the determination result is yes, jump to and execute Step 28.

[0072] Step 28, output the solution array L x (N x ), where L x (N x ) represents the Nth x state array M in the solution array L x .

[0073] Step 29, increment N. x .

[0074] Step 30, determine whether N x is greater than length(L x ), where length(L x) represents the number of the state array M that meets the target offset. If the determination result is no, return to execute step 2; if the determination result is yes, jump to execute step 31.

[0075] Step 31, N x Set to 1, that is, N x = 1.

[0076] Step 32, jump to execute step 2.

[0077] The following is an example to illustrate how to determine the driving scheme selected for the jet plate group in a computer language according to different target horizontal offsets x. Assume that the first jet plate 3, the second jet plate 7, the third jet plate 11, and the fourth jet plate 15 all adopt independent driving, and assume their maximum horizontal offsets x 1max , x 2max , x 3max , x 4max are 3μm, 2μm, 1μm, and 1μm respectively.

[0078] Assume that the first target horizontal offset is 0.5μm; Define a variable N to record the adoption situation of each driving scheme under each target horizontal offset, and initialize and set the counter N to 1; Input the target horizontal offset x = 0.5μm; Execute the conditional instruction x - floor(x) = 0?, and the determination result is no, that is, x is not an integer; Enter the high-precision short-life driving condition, and execute the conditional instruction x = 0.5 ∈ (0, 1)?, and the determination result is yes, that is, x ∈ (0, 1); Apply a voltage excitation of 0.5U to the fourth left piezoelectric ceramic sheet 16 on the fourth jet plate 15, and do not apply voltage excitation to the first left piezoelectric ceramic sheet 4, the second left piezoelectric ceramic sheet 8, and the third left piezoelectric ceramic sheet 12 on the first jet plate 3, the second jet plate 7, and the third jet plate 11; Assume that the second horizontal offset is 2μm; Input the target horizontal offset x = 2μm; Execute the conditional instruction x - floor(x) = 0?, and the determination result is yes, that is, x is an integer; Enter the low-precision long-life condition, and respectively define and initialize the four jet plate state variables a, b, c, d = 0. The jet plate state variables represent the working states of the four jet plates. That is, when a = 0, it means that the first jet plate 3 does not work; when a = 1, it means that the first jet plate 3 works; Initialize and set the counter T to 1; Execute the conditional instruction 3a + 2b + c + d = x?, and the determination result is yes; Write the four jet plate state variables a, b, c, d at this time into the state array M; Write the status array M into the solution array L x That is, write the status array M into the solution array L x ; Increment the counter T; Execute the conditional instruction T >= 15?. If the determination result is no, loop the above steps to traverse all values of a, b, c, and d that satisfy 3a + 2b + c + d = x, write them into the status array M, and then store them in the solution array L2. That is, M1 = [0 0 1 1], M2 = [0 1 0 0], L2(1) = M1 = [0 0 1 1], L2(2) = M2 = [0 1 0 0]; Until the determination result of the conditional instruction T >= 15? is yes, output the solution array L2(N x ), that is, output the solution array L2(1) = M1 = [0 0 1 1]. Therefore, the third jet plate 11 and the fourth jet plate 15 act and reach the maximum deflection angle, and the first jet plate 3 and the second jet plate 7 do not act; N x Increment; Execute N x > length(L2)? conditional instruction, and the determination result is no.

[0079] The third target horizontal offset is 2 μm: Input the target horizontal offset x = 2 μm; Execute the conditional instruction x - floor(x) = 0?. The determination result is yes, that is, x is an integer; Enter the low-precision long-life working condition, and respectively define and initialize the four-jet plate status variables a, b, c, d = 0. The jet plate status variables represent the working status of the four-jet plates. That is, when a = 0, it means that the first jet plate 3 does not work; when a = 1, it means that the first jet plate 3 works; Initialize the counter T and set it to 1; Execute the conditional instruction 3a + 2b + c + d = x? The determination result is yes; Write the four-jet plate status variables a, b, c, d at this time into the status array M; Write the status array M into the solution array L x That is, write the status array M into the solution array L x ; Increment the counter T; Execute the conditional instruction of T >= 15?. If the determination result is no, loop the above steps to traverse all the values of a, b, c, and d that satisfy 3a + 2b + c + d = x, write them into the status array M, and then store them in the solution array L2. That is, M1 = [0 0 1 1], M2 = [0 1 0 0], L2(1) = M1 = [0 0 1 1], L2(2) = M2 = [0 1 0 0]; Until the determination result of the conditional instruction of T >= 15? is yes, output the solution array L2(N x ) at the second target horizontal offset of 2 μm, where N x has been incremented, that is, at this time N x = 2. Therefore, output the solution array L2(2) = M2 = [0 1 0 0], that is, the first jet plate, the third jet plate 11, and the fourth jet plate 15 do not act, and the second jet plate 7 acts and reaches the maximum deflection angle; N x is incremented; Execute the conditional instruction of N x > length(L2). After the third target horizontal offset is completed, at this time N x = 3. Because in the case of the target horizontal offset x = 2 μm, there are only two jet plate driving solutions, that is, length(L2) = 2, so the determination result is yes; N x is set to 1, that is, N x = 1.

[0080] The fourth target horizontal offset is 4.3 μm: Input the target horizontal offset x = 4.3 μm; Execute the conditional instruction of x - floor(x) = 0?. The determination result is no, that is, x is not an integer; Enter the high-precision short-life driving condition, execute the conditional instruction of x = 4.3 ∈ (0, 1)?. The determination result is no, that is, x ∉ (0, 1). Execute x1 = floor(x) to round down the target horizontal offset x, so x1 = 4 μm; Execute the conditional instruction of x1 = 4.3 ∈ (0, 3)?. The determination result is no, that is, x ∉ (0, 3), Execute m1 = mod(x1, 3), that is, m1 = 1; Execute the conditional instruction of m1 = 0?. The determination result is no; Execute the conditional instruction of m1 = 2?. The determination result is no; Apply a U voltage excitation to the first left piezoelectric ceramic sheets 4 on the first jet plate 3 and the third left piezoelectric ceramic sheets 12 on the third jet plate 11, apply a 0.3U voltage excitation to the fourth left piezoelectric ceramic sheets 16 on the fourth jet plate 15, and do not apply a voltage excitation to the second left piezoelectric ceramic sheets 8 on the second jet plate 7.

[0081] Similarly, if it is desired to achieve the leftward offset of the first jet plate 3, the second jet plate 7, the third jet plate 11, and the fourth jet plate 15, only need to apply the excitation voltage to the first right piezoelectric ceramic sheets 4 on the first jet plate 3, the second right piezoelectric ceramic sheets 8 on the second jet plate 7, the third right piezoelectric ceramic sheets 12 on the third jet plate 11, and the fourth right piezoelectric ceramic sheets 16 on the fourth jet plate 15, then the leftward offset of the first jet plate 3, the second jet plate 7, the third jet plate 11, and the fourth jet plate 15 can be achieved.

[0082] Combined with the above embodiments of the horizontal offset amount, it can be seen that the driving method proposed by the present invention can autonomously select the working condition according to the input type of the target horizontal offset amount. It can not only ensure the high-precision control of the displacement of the jet pipe regulated by the piezoelectric ceramic sheet, but also take into account the long-life requirements of the jet plate group. Compared with the traditional jet pipe valve, the present invention discretizes the jet pipe, with a smaller mass. At the same time, among various eligible driving schemes, the jet plate with a smaller mass is preferentially selected to move, which can improve the response speed of the jet pipe type proportional servo valve.

[0083] Those skilled in the art can understand that all or part of the processes for implementing the methods of the above embodiments can be completed by programming a computer program into related hardware, and the program can be stored in a readable storage medium on the hardware. Among them, the readable storage medium includes, but is not limited to, memories with storage and memory functions such as single-chip microcomputers.

[0084] In the present invention, specific embodiments are used to elaborate the principles and implementation manners of the present invention. The descriptions of the above embodiments are only used to help understand the method and its core idea of the present invention; at the same time, for those of ordinary skill in the art, according to the idea of the present invention, there will be changes in the specific implementation manners and application scopes. In summary, the content of this specification should not be construed as a limitation to the present invention.

Claims

1. A jet tube controlled by a piezoelectric ceramic sheet, the jet tube being rotatably connected to a housing of a servo valve, characterized in that: The jet tube comprises: A jet plate group, wherein the jet plate group comprises at least two jet plates connected rotatably in sequence, the jet plates are provided with oil passages, the oil passages between two adjacent jet plates are connected, the jet plates are divided into at least one connecting jet plate and a tail jet plate, both ends of the connecting jet plate are provided with a first connecting piece, the jet plate group is rotatably connected to the housing of the servo valve through the first connecting piece, each of the connecting jet plates is rotatably connected in sequence through the first connecting piece, one end of the tail jet plate is provided with a first connecting piece, and the tail jet plate is rotatably connected to the connecting jet plate at the end through the first connecting piece; The piezoelectric ceramic sheet is arranged on two opposite sides of the jet plate. The piezoelectric ceramic sheet is connected to a wire. A direct current voltage is applied to the piezoelectric ceramic sheet, so that the jet plate connected to the piezoelectric ceramic sheet can be deflected.

2. The jet tube controlled by a piezoelectric ceramic sheet according to claim 1, characterized in that: The first connecting member comprises a lifting lug, through which the distribution pin passes through the lifting lugs of two adjacent jet plates, so as to rotatably connect the two adjacent jet plates; The distribution pin shaft is provided with two oil passage windows, the two oil passage windows are connected from the inside of the distribution pin shaft, and the oil passage windows are respectively connected to the oil passages of the two jet plates to connect the oil passages of adjacent jet plates.

3. The jet tube controlled by a piezoelectric ceramic sheet according to claim 2, characterized in that: In the jet plate group, the length of the jet plate decreases from the side close to the servo valve housing to the side far away from the servo valve housing.

4. The jet tube controlled by a piezoelectric ceramic sheet according to claim 3, characterized in that: In the jet plate group, the lengths of the jet plates are arranged in a Fibonacci sequence from a side away from the servo valve housing to a side close to the servo valve housing.

5. The jet tube controlled by a piezoelectric ceramic sheet according to claim 4, characterized in that: The length of the piezoelectric ceramic sheet accounts for 5 / 6 to 2 / 3 of the length of the jet plate connected thereto.

6. A method for driving a fluidic tube controlled by a piezoelectric ceramic sheet according to any one of claims 4 to 5, characterized in that: The jet plate group includes four jet plates, which are arranged in sequence from the side close to the servo valve housing to the side away from the servo valve housing as a first jet plate, a second jet plate, a third jet plate and a fourth jet plate, and the maximum horizontal offset of each jet plate is 3E, 2E, E, E respectively. The driving method is as follows: Get the target horizontal offset x; If x is a decimal and x≤E, voltage excitation is applied only to the piezoelectric ceramic sheet on the fourth ejection plate according to the value of x; If x is a decimal and x>E, round down x to get x1; If x1∈(0,E], apply corresponding voltage excitation to the piezoelectric ceramic sheets on the third jet plate and the fourth jet plate according to the value of x; If x1∈(E,2E], apply corresponding voltage excitation to the piezoelectric ceramic sheets on the second jet plate and the fourth jet plate according to the value of x; If x1∈(2E,3E], apply corresponding voltage excitation to the piezoelectric ceramic sheets on the second jet plate, the third jet plate and the fourth jet plate according to the value of x; If x1>3E, calculate the remainder m1 of x1 divided by 3E, and if m1=0, apply corresponding voltage excitation to the piezoelectric ceramic sheets on the first jet plate, the second jet plate, the third jet plate and the fourth jet plate according to the value of x; If m1=2E, apply corresponding voltage excitation to the piezoelectric ceramic sheets on the first jet plate, the second jet plate and the fourth jet plate according to the value of x; If m1=E, apply corresponding voltage excitation to the piezoelectric ceramic sheets on the first jet plate, the third jet plate and the fourth jet plate according to the value of x; If x is an integer, according to the formula 3aE+2bE+cE+dE=x, traverse the values ​​of a, b, c, and d that meet the formula, where the values ​​of a, b, c, and d are 0 or 1, and combine the values ​​of a, b, c, and d that meet the formula into a state array M, and write the state array M into the solution array L in sequence. x middle; According to the number of occurrences of the target horizontal offset x, the execution plan array L is executed in turn. x The state array M in applies voltage excitation to the piezoelectric ceramic sheets on the first jet plate, the second jet plate, the third jet plate and the fourth jet plate.

7. The driving method according to claim 6, characterized in that: If x is a decimal and x≤E, only the (x-x1)U voltage excitation is applied to the piezoelectric ceramic piece on the fourth ejection plate.

8. The driving method according to claim 7, characterized in that: If x1∈(0,E], a voltage of U is applied to the piezoelectric ceramic sheet 12 on the third jet plate, and a voltage of (x-x1)U is applied to the piezoelectric ceramic sheet on the fourth jet plate, wherein U represents that when a voltage of U is applied to the piezoelectric ceramic sheet, the jet plate connected to the piezoelectric ceramic sheet reaches the maximum offset; If x1∈(E,2E], a voltage of U is applied to the piezoelectric ceramic sheet on the second jet plate, and a voltage of (x-x1)U is applied to the piezoelectric ceramic sheet on the fourth jet plate; If x1∈(2E,3E], a voltage of U is applied to the piezoelectric ceramic sheet on the second jet plate, a voltage of U is applied to the piezoelectric ceramic sheet on the third jet plate, and a voltage of (x-x1)U is applied to the piezoelectric ceramic sheet on the fourth jet plate.

9. The driving method according to claim 8, characterized in that: If m1=0, a voltage of U is applied to the piezoelectric ceramic sheets on the first jet plate, the second jet plate, and the third jet plate, and a voltage of (x-x1)U is applied to the piezoelectric ceramic sheet on the fourth jet plate; If m1=2E, a voltage of U is applied to the piezoelectric ceramic sheets on the first and second jet plates, and a voltage of (x-x1)U is applied to the piezoelectric ceramic sheet on the fourth jet plate; If m1=E, a voltage of U is applied to the piezoelectric ceramic sheets on the first and third jet plates, and a voltage of (x-x1)U is applied to the piezoelectric ceramic sheets on the fourth jet plate.

10. A servo valve of a fluidic tube controlled by the piezoelectric ceramic sheet according to any one of claims 1 to 5, characterized in that: include: A housing, wherein a convex shaft is disposed in the housing, and the convex shaft has an oil passage; A jet plate group, wherein the jet plate group is rotatably connected to the convex shaft, and an oil passage connecting the jet plates at the end of the jet plate group is in communication with the oil passage of the convex shaft; A nozzle, the nozzle being in communication with an oil passage of a jet plate on a side away from the housing; A receiver, wherein the receiver is provided with two receiving oil passages, and the two receiving oil passages are symmetrical about the outlet center of the nozzle; A valve body, wherein the valve body is provided with a valve body oil circuit, a first oil inlet passage and a second oil inlet passage connected to the valve body oil circuit, the first oil inlet passage and the second oil inlet passage are respectively connected to two receiving oil passages of a receiver, a first working oil passage and a second working oil passage connected to the valve body oil circuit are provided between the first oil inlet passage and the second oil inlet passage, and an oil return passage connected to the valve body oil circuit is provided between the first working oil passage and the second working oil passage; A valve core is arranged in the valve body oil circuit, and the valve core separates the first working oil channel and the second working oil channel, the return oil channel and the valve body oil channel, the valve body oil channel and the first oil inlet channel, and the valve body oil channel and the second oil inlet channel. The valve core can slide along the valve body oil channel to connect the first oil inlet channel or the second oil inlet channel with the valve body oil channel.

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