Parameter testing method and device for hemispherical resonator

Abstract

The invention relates to the technical field of inertial instrument control, and provides a hemispherical resonator parameter test method and equipment, and the method comprises the steps: generating and detecting a natural vibration signal of a hemispherical resonator through an excitation detection module; carrying out assembly error iterative calibration, collecting a vibration signal of the hemispherical resonator in assembly error calibration, and carrying out processing and mathematical operation to obtain a calibration error parameter; changing the vibration state of the hemispherical resonator device through the calibrated excitation detection module, collecting a vibration signal of the hemispherical resonator device, and carrying out digital processing on the vibration signal of the hemispherical resonator device to obtain a control vibration signal; and performing recursive least square calculation on the control vibration signal to obtain a performance index parameter of the hemispherical resonator. Performance index parameters of the hemispherical resonator are detected through an automatic testing means, the comprehensive performance of the hemispherical resonator is evaluated, the production efficiency of the hemispherical resonator is improved, and the production cost is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of inertial instrument control, and particularly relates to a method and device for testing parameters of a hemispherical resonator device. Background Art

[0002] The hemispherical resonator device is the core component of a quartz hemispherical resonator gyroscope. The quartz hemispherical resonator gyroscope has the advantages of short startup time, long service life, and good stability, and is widely used in high-precision inertial navigation systems. The quartz hemispherical resonator gyroscope consists of a coated quartz hemispherical resonator and an electrode base. The resonator film layer and the electrode base together form the detection and excitation capacitors. The quality of the quartz hemispherical resonator gyroscope depends to a large extent on the performance of its core device, and the quartz hemispherical resonator is a kind of hemispherical resonator device. Due to the constraints of processing accuracy and manufacturing technology, the mass distribution and stiffness distribution of the quartz hemispherical resonator are anisotropic, and there are unevenly distributed microcracks on the surface, resulting in a decline in its performance.

[0003] Currently, the testing methods of hemispherical resonator devices mainly rely on manual adjustment and single-parameter measurement. The traditional methods require manual intervention, have low testing efficiency and low automation degree, and are difficult to meet the needs of mass production. Assembly errors and environmental impacts (such as air pressure and temperature) are not effectively compensated, resulting in large deviations in measurement results. Summary of the Invention

[0004] The present invention aims to at least solve one of the technical problems existing in the related art. For this purpose, the present invention provides a method and device for testing parameters of a hemispherical resonator device, which detect its parameter indicators and evaluate its comprehensive performance through automated testing means, improve the production efficiency of the hemispherical resonator device, and reduce the production cost.

[0005] The present invention provides a method for testing parameters of a hemispherical resonator device, including: S1: The control and data processing system is connected to the vacuum chamber equipment controller and the excitation detection module through a cable, and the hemispherical resonator device and the excitation detection module are installed in the vacuum chamber; S2: An excitation signal of the natural frequency of the hemispherical resonator device is generated through the excitation detection module, and the vibration signal of the hemispherical resonator device is detected to obtain the natural vibration signal; S3: Iteratively calibrate the assembly error of the excitation detection module according to the natural vibration signal; S4: Change the vibration state of the hemispherical resonator device through the calibrated excitation detection module, collect the vibration signal of the hemispherical resonator device, and perform digital processing on the vibration signal of the hemispherical resonator device to obtain the control vibration signal; S5: Perform recursive least squares calculation on the control vibration signal to obtain the performance index parameters of the hemispherical resonator device.

[0006] A method for testing parameters of a hemispherical resonator device according to the present invention further includes the control and data processing system for controlling no more than three hemispherical resonator excitation detection modules; The excitation detection module includes a hemispherical base, on which a plurality of uniformly distributed and centrosymmetric spherical electrode plates are mounted. A capacitance effect is generated between the spherical electrode plates and the hemispherical resonator device, and the capacitance effect generates an excitation signal and detects a vibration signal.

[0007] A method for testing parameters of a hemispherical resonator device according to the present invention further includes that step S3 includes: S31: Apply a calibration signal to calibrate the assembly error of the excitation detection module according to the change of the natural vibration signal; S32: Collect the vibration signals detected by the spherical electrode plates during the assembly error calibration; S33: Calculate the assembly error generated during the installation process by comparing the vibration signals detected by the spherical electrode plates with the natural vibration signals, and perform digital processing and mathematical operations to obtain calibration error parameters; S34: Send the calibration error parameters to the excitation detection module and iterate the calibration error parameters until convergence.

[0008] A method for testing parameters of a hemispherical resonator device according to the present invention further includes that in step S32, the calibration error parameters include the installation angle between the axis of the hemispherical resonator device and the axis of the base of the hemispherical resonator excitation detection module, the distribution azimuth error of the spherical electrode plates on the hemispherical base, and the gap error between the spherical electrode plates and the hemispherical resonator device.

[0009] A method for testing parameters of a hemispherical resonator device according to the present invention further includes that the digital processing is to convert the current signal generated by the vibration of the hemispherical resonator device into a digital signal through an analog-to-digital converter in the excitation detection module.

[0010] A method for testing parameters of a hemispherical resonator device according to the present invention further includes that in step S33, the mathematical operations include least squares fitting and low-pass filtering algorithms.

[0011] A method for testing parameters of a hemispherical resonator device according to the present invention further includes that in step S4, the vibration state of the hemispherical resonator device includes the vibration mode angle and the vibration amplitude. Changing the vibration state of the hemispherical resonator device by the calibrated excitation detection module includes: Aligning the excitation direction with the vibration mode angle, keeping the vibration amplitude at a set value, keeping the phase of the excitation signal consistent with the vibration phase of the hemispherical resonator device, and the amplitude of the excitation signal is: Among them, is the amplitude of the excitation signal when the vibration amplitude of the hemispherical resonator device is , and the amplitude of the excitation signal is the rate of change of is time, is the natural frequency of the hemispherical resonator device, is the vibration phase of the hemispherical resonator device; The included angle between the excitation direction and the vibration mode angle is 45°, the vibration amplitude remains 0, the phase of the excitation signal differs from the vibration phase of the hemispherical resonator device by 90°, and the amplitude of the excitation signal is: Among them, is the amplitude of the excitation signal when the vibration amplitude of the hemispherical resonator device is ; The excitation direction is consistent with the excitation signal, the phase of the excitation signal is consistent with the vibration phase of the hemispherical resonator device, and the amplitude of the excitation signal is: Among them, is the amplitude of the excitation signal when the vibration mode angle of the hemispherical resonator device is , is the derivative of

[0012] According to a method for testing parameters of a hemispherical resonator device provided by the present invention, the performance index parameters of the hemispherical resonator device further include the quality factor of the hemispherical resonator device and its circumferential distribution, and the natural frequency of the hemispherical resonator device and its circumferential distribution.

[0013] According to a method for testing parameters of a hemispherical resonator device provided by the present invention, the quality factor of the hemispherical resonator device also changes with the azimuth of its vibration standing wave. When the standing wave azimuth is at different circumferential azimuths, the quality factor of the device is sinusoidally distributed. The calculation expressions for the quality factor and its distribution and the natural frequency and its distribution are: Among them, is the quality factor of the hemispherical resonator device and its circumferential distribution, is the circumferential average value of the quality factor of the hemispherical resonator device, is the amplitude of the sinusoidal distribution of the quality factor, is the phase angle of the sinusoidal distribution of the quality factor, is the natural frequency of the hemispherical resonator device and its circumferential distribution, is the vibration mode angle of the hemispherical resonator device, is the circumferential average value of the natural frequency of the hemispherical resonator device, is the frequency with a sinusoidal distribution of the natural frequency, is the phase angle with a sinusoidal distribution of the natural frequency.

[0014] The present invention also provides a hemispherical resonator device parameter testing apparatus for performing the method for testing parameters of a hemispherical resonator device described in any one of the above, including: a connection unit for connecting a control and data processing system to a vacuum chamber device controller and an excitation detection module through a cable, and installing the hemispherical resonator device and the excitation detection module into the vacuum chamber; an excitation detection unit for generating an excitation signal of the natural frequency of the hemispherical resonator device through the excitation detection module, and detecting the vibration signal of the hemispherical resonator device to obtain an inherent vibration signal; an assembly error calibration unit for iteratively calibrating the assembly error of the excitation detection module according to the inherent vibration signal; a vibration control unit for changing the vibration state of the hemispherical resonator device through the calibrated excitation detection module, collecting the vibration signal of the hemispherical resonator device, and digitally processing the vibration signal of the hemispherical resonator device to obtain a control vibration signal; a calculation unit for performing a recursive least squares method calculation on the control vibration signal to obtain the performance index parameters of the hemispherical resonator device.

[0015] One or more of the above technical solutions in the embodiments of the present invention have at least one of the following technical effects: In the present invention, the hemispherical resonator device and the excitation test module are simply installed in the vacuum chamber device, and the assembly error during the test of the hemispherical resonator device is compensated by means of automatic error iteration of the system, realizing the measurement of the parameter indexes of the hemispherical resonator device. The present invention can achieve high-precision testing of the parameters of the hemispherical resonator device without rotating or translating the internal mechanism, but by controlling the vibration mode angle. In the same cavity, several hemispherical resonator devices can be tested simultaneously, which can significantly improve the testing efficiency and reduce the labor cost and time cost.

[0016] The additional aspects and advantages of the present invention will be partially given in the following description, partially become apparent from the following description, or be understood through the practice of the present invention. Description of the Drawings

[0017] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0018] Figure 1 It is a schematic flowchart of a method for testing parameters of a hemispherical resonator device provided by the present invention.

[0019] Figure 2 It is a schematic structural diagram of a device for testing parameters of a hemispherical resonator device provided by the present invention.

[0020] Reference numerals: 101, connection unit; 102, excitation detection unit; 103, assembly error calibration unit; 104, vibration control unit; 105, calculation unit. Detailed implementation manners

[0021] To make the objectives, technical solutions and advantages of the present invention clearer, the following will clearly and completely describe the technical solutions in the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present invention. The following embodiments are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0022] In the description of the embodiments of the present invention, it should be noted that unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present invention can be understood according to specific situations.

[0023] In the description of this specification, the description referring to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the embodiments of the present invention. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0024] The following will Figures 1 to 2 describe a method and device for testing parameters of a hemispherical resonator device of the present invention.

[0025] As Figure 1 shown, a method for testing parameters of a hemispherical resonator device includes: S1: Control the connection between the data processing system and the vacuum chamber equipment controller and the excitation detection module through a cable. The hemispherical resonator device and the excitation detection module are installed in the vacuum chamber; The control and data processing system is used to control less than or equal to three hemispherical resonator excitation detection modules; it can receive the digital signals generated by the excitation detection module, store and perform mathematical operations, calibrate the errors caused by the assembly of the hemispherical resonator device and the excitation detection module, and feedback the relevant parameters obtained by calibration to the excitation detection module for iteration. The result obtained by the mathematical operation is the parameter test result of the hemispherical resonator device to be tested, and it can also verify the verification information returned by the control and data processing system and the hemispherical resonator excitation detection module in real time, and monitor the correctness of the test method process.

[0026] The excitation detection module includes a hemispherical base, and a plurality of uniformly distributed and centrally symmetric spherical electrode plates are installed on the hemispherical base. A capacitance effect is generated between the spherical electrode plates and the hemispherical resonator device, and the capacitance effect generates an excitation signal and detects a vibration signal; the excitation detection module is used to control the vibration mode of the hemispherical resonator device and detect the vibration signal, including the amplitude, vibration mode, and vibration frequency of the hemispherical resonator device. The excitation detection module can provide an excitation signal acting on the natural frequency of the hemispherical resonator device.

[0027] The surface of the hemispherical resonator device is coated with a metal film layer; The vacuum chamber equipment is used to provide the vacuum environment required for the vibration of the hemispherical resonator device, and perform exhaust and gas release operations on the chamber according to the required environmental vacuum degree during the measurement process.

[0028] In some specific embodiments of the present invention, the number of spherical electrode plates is 16.

[0029] S2: Generate an excitation signal of the inherent frequency of the hemispherical resonator device through the excitation detection module, and detect the vibration signal of the hemispherical resonator device to obtain the inherent vibration signal; The hemispherical resonator device can receive the excitation signal of the excitation detection module, generate vibration in a vacuum environment, start the control and data processing system, maintain the air pressure in the vacuum cavity below the set value, generate an excitation signal of the inherent frequency of the hemispherical resonator device to be measured through the excitation detection module, detect the vibration signal of the resonator, maintain the vibration state of the resonator, and obtain the inherent vibration signal.

[0030] S3: Iteratively calibrate the assembly error of the excitation detection module according to the inherent vibration signal; S31: Apply a calibration signal and calibrate the assembly error of the excitation detection module according to the change of the inherent vibration signal; S32: Collect the vibration signal detected by the spherical electrode plate during the assembly error calibration; S33: Calculate the assembly error generated during the installation process by comparing the vibration signal detected by the spherical electrode plate with the inherent vibration signal, and perform digital processing and mathematical operations to obtain the calibration error parameter; S34: Send the calibration error parameter to the excitation detection module and iteratively calibrate the error parameter until it converges.

[0031] After the control and data processing system confirms that the hemispherical resonator device is in a vibration state, calibrate the assembly error of the excitation detection module; The calibration error parameter includes the installation angle between the axis of the hemispherical resonator device and the axis of the base of the excitation detection module, the distribution azimuth error of the spherical electrode plates on the hemispherical base, and the gap error between the spherical electrode plates and the hemispherical resonator device.

[0032] The digital processing is the current signal generated by the vibration of the hemispherical resonator device, which is converted into a digital signal by the analog-to-digital converter in the excitation detection module; The mathematical operations include the least squares fitting and the low-pass filtering algorithm.

[0033] The advantage of this way of calculating and processing the error is that before measuring the resonator device, it compensates for the detection principle defects of the vibration signal, rather than restoring the vibration signal with errors through mathematical operations, reducing the calculation cost and reducing the distortion degree of the obtained vibration signal.

[0034] For the hemispherical resonator and the excitation detection module after the assembly error calibration, for any one of the electrode plates, the detected vibration displacement of the resonator is: Among them, is the vibration displacement of the resonator, is the vibration amplitude of the hemispherical resonator device in the azimuth of the vibration mode angle, is the vibration mode angle of the hemispherical resonator device, is the electrode plate number, and the azimuth of adjacent numbered electrode plates differs by 22.5°, is the vibration phase of the hemispherical resonator device, is the vibration amplitude of the hemispherical resonator device at an azimuth 45° different from the vibration mode angle.

[0035] S4: Change the vibration state of the hemispherical resonator device through the calibrated excitation detection module, collect the vibration signal of the hemispherical resonator device, and perform digital processing on the vibration signal of the hemispherical resonator device to obtain a control vibration signal; The vibration state of the hemispherical resonator device includes the vibration mode angle and the vibration amplitude, The control and data processing system completes the control of the vibration mode angle and vibration amplitude of the hemispherical resonator device by operating the calibrated excitation detection module.

[0036] The excitation direction is aligned with the vibration mode angle, the vibration amplitude is maintained at a set value, the phase of the excitation signal is consistent with the vibration phase of the hemispherical resonator device, and the amplitude of the excitation signal is: Among them, is the amplitude of the excitation signal when the vibration amplitude of the hemispherical resonator device is the excitation signal amplitude, is the rate of change of, is time, is the natural frequency of the hemispherical resonator device, is the vibration phase of the hemispherical resonator device; The included angle between the excitation direction and the vibration mode angle is 45°, the vibration amplitude is maintained at 0, the phase of the excitation signal differs from the vibration phase of the hemispherical resonator device by 90°, and the amplitude of the excitation signal is: Among them, is the amplitude of the excitation signal when the vibration amplitude of the hemispherical resonator device is the excitation signal amplitude; The excitation direction is consistent with the excitation signal, the phase of the excitation signal is consistent with the vibration phase of the hemispherical resonator device, and the amplitude of the excitation signal is: Among them, is when the vibration mode angle of the hemispherical resonator device is The amplitude of the excitation signal, is the derivative of.

[0037] There is no need to rotate or move the excitation detection module and the hemispherical resonator device. It is only necessary to keep the amplitude of the resonator device stable, and the measurement and collection of vibration data can be realized by controlling the vibration mode angle of the resonator device.

[0038] S5: Perform recursive least squares calculation on the controlled vibration signal to obtain the performance index parameters of the hemispherical resonator device; The performance index parameters of the hemispherical resonator device include the quality factor of the hemispherical resonator device and its circumferential distribution, and the natural frequency of the hemispherical resonator device and its circumferential distribution.

[0039] The quality factor and its distribution, and the natural frequency and its distribution are obtained by recursive least squares calculation of the data during the vibration process.

[0040] The quality factor of the hemispherical resonator device changes with the azimuth of its vibration standing wave. When the standing wave azimuth is at different circumferential azimuths, the quality factor of the device is sinusoidally distributed.

[0041] Among them, is the quality factor of the hemispherical resonator device and its circumferential distribution, is the circumferential average value of the quality factor of the hemispherical resonator device, is the amplitude of the sinusoidal distribution of the quality factor, is the phase angle of the sinusoidal distribution of the quality factor, is the natural frequency of the hemispherical resonator device and its circumferential distribution, is the vibration mode angle of the hemispherical resonator device, is the circumferential average value of the natural frequency of the hemispherical resonator device, is the frequency of the sinusoidal distribution of the natural frequency, is the phase angle of the sinusoidal distribution of the natural frequency.

[0042] The larger, the smaller, the better the performance of the hemispherical resonator device, the closer to the design value, the smaller, the better the performance of the hemispherical resonator device, which reflects a higher processing level and better uniformity of the hemispherical resonator device.

[0043] Save the natural vibration signal, calibration error parameters, controlled vibration signal, and performance index parameters of the hemispherical resonator device.

[0044] Save the calibration error parameters, the operation log of the control and data processing system, the control vibration signal, and the performance index parameters of the hemispherical resonator device.

[0045] Record the performance index parameters of the resonator device under test and evaluate its performance. When repeated testing is required, relevant parameters can be directly called without repeated testing. Record the data during the testing process, and if an abnormality occurs, it can be traced.

[0046] As Figure 2 shown, a hemispherical resonator device parameter testing device for implementing a hemispherical resonator device parameter testing method, comprising: The connection unit 101 is used to connect the control and data processing system to the vacuum chamber device controller and the excitation detection module through a cable. The hemispherical resonator device and the excitation detection module are installed in the vacuum chamber. The excitation detection unit 102 generates an excitation signal of the natural frequency of the hemispherical resonator device through the excitation detection module and detects the vibration signal of the hemispherical resonator device to obtain the natural vibration signal. The assembly error calibration unit 103 performs iterative calibration of the assembly error of the excitation detection module according to the natural vibration signal. The vibration control unit 104 changes the vibration state of the hemispherical resonator device through the calibrated excitation detection module, collects the vibration signal of the hemispherical resonator device, and performs digital processing on the vibration signal of the hemispherical resonator device to obtain the control vibration signal. The calculation unit 105 performs recursive least squares calculation on the control vibration signal to obtain the performance index parameters of the hemispherical resonator device.

[0047] Through the collaborative work of the above units, by simply installing the hemispherical resonator device and the excitation test module in the vacuum chamber device and through the automatic error iteration method of the system, the compensation of the assembly error during the testing process of the hemispherical resonator device is realized, and the parameter index measurement of the hemispherical resonator device is realized. The present invention can achieve high-precision testing of the parameters of the hemispherical resonator device without rotating or translating the internal mechanism, but by controlling the vibration mode angle. In the same cavity, several hemispherical resonator devices can be tested simultaneously, which can significantly improve the testing efficiency and reduce the labor cost and time cost.

[0048] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some of the technical features; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A method for testing parameters of a hemispherical resonant device, characterized in that: include: S1: The control and data processing system is connected to the vacuum chamber equipment controller and the excitation detection module through cables, and the hemispherical resonant device and the excitation detection module are installed in the vacuum chamber; S2: generating an excitation signal of the natural frequency of the hemispherical resonant device through an excitation detection module, and detecting a vibration signal of the hemispherical resonant device to obtain a natural vibration signal; S3: Iteratively calibrate the assembly error of the excitation detection module according to the natural vibration signal; S4: changing the vibration state of the hemispherical resonant device through the calibrated excitation detection module, collecting the vibration signal of the hemispherical resonant device, and digitally processing the vibration signal of the hemispherical resonant device to obtain a control vibration signal; S5: Perform recursive least squares calculation on the control vibration signal to obtain performance index parameters of the hemispherical resonant device.

2. A method for testing parameters of a hemispherical resonant device according to claim 1, characterized in that: The control and data processing system is used to realize the control of less than or equal to three hemispherical resonator excitation detection modules; The excitation detection module includes a hemispherical base, on which a plurality of evenly distributed and centrally symmetrical spherical electrode plates are mounted, and a capacitance effect is generated between the spherical electrode plates and the hemispherical resonant device, and the capacitance effect generates an excitation signal and detects a vibration signal.

3. A method for testing parameters of a hemispherical resonant device according to claim 2, characterized in that: The S3 steps include: S31: applying a calibration signal, and calibrating the assembly error of the excitation detection module according to the change of the natural vibration signal; S32: collecting vibration signals detected by the spherical electrode plate in assembly error calibration; S33: by comparing the difference between the vibration signal detected by the spherical electrode plate and the natural vibration signal, calculating the assembly error generated during the installation process, and performing digital processing and mathematical operations to obtain a calibration error parameter; S34: Send the calibration error parameter to the excitation detection module, and iterate the calibration error parameter until convergence.

4. A method for testing parameters of a hemispherical resonant device according to claim 3, characterized in that: In step S32, the calibration error parameters include the installation angle between the axial direction of the hemispherical resonator device and the axial direction of the base of the hemispherical resonator excitation detection module, the distribution azimuth error of the spherical electrode plate on the hemispherical base, and the gap error between the spherical electrode plate and the hemispherical resonator device.

5. A method for testing parameters of a hemispherical resonant device according to claim 1, characterized in that: The digital processing is to convert the current signal generated by the vibration of the hemispherical resonant device into a digital signal through an analog-to-digital converter in the excitation detection module.

6. A method for testing parameters of a hemispherical resonant device according to claim 3, characterized in that: In step S33, the mathematical operation includes least squares fitting and low-pass filtering algorithm.

7. A method for testing parameters of a hemispherical resonant device according to claim 1, characterized in that: In step S4, the vibration state of the hemispherical resonant device includes a vibration mode angle and a vibration amplitude, and changing the vibration state of the hemispherical resonant device through the calibrated excitation detection module includes: The excitation direction is aligned with the vibration mode angle, the vibration amplitude is kept at the set value, the phase of the excitation signal is consistent with the vibration phase of the hemispherical resonator, and the amplitude of the excitation signal is: in, The vibration amplitude of the hemispherical resonant device is The excitation signal amplitude is for The rate of change, For time, is the natural frequency of the hemispherical resonator, is the vibration phase of the hemispherical resonator; The angle between the excitation direction and the vibration mode angle is 45°, the vibration amplitude is kept at 0, the phase of the excitation signal is 90° different from the vibration phase of the hemispherical resonator, and the amplitude of the excitation signal is: in, The vibration amplitude of the hemispherical resonant device is The excitation signal amplitude; The excitation direction is consistent with the excitation signal, the phase of the excitation signal is consistent with the vibration phase of the hemispherical resonator, and the amplitude of the excitation signal is: in, The vibration angle of the hemispherical resonator is The excitation signal amplitude is for The derivative of .

8. A method for testing parameters of a hemispherical resonant device according to claim 1, characterized in that: The performance index parameters of the hemispherical resonant device include the quality factor of the hemispherical resonant device and its circumferential distribution, the natural frequency of the hemispherical resonant device and its circumferential distribution.

9. A method for testing parameters of a hemispherical resonant device according to claim 8, characterized in that: The quality factor of a hemispherical resonant device changes with the orientation of its vibration standing wave. When the standing wave orientation is at different circumferential orientations, the quality factor of the device is sinusoidally distributed. The calculation expressions of the quality factor and its distribution and the natural frequency and its distribution are: in, is the quality factor of the hemispherical resonator and its circumferential distribution, is the circumferential average value of the quality factor of the hemispherical resonator, is the amplitude of the sinusoidal distribution of the quality factor, is the phase angle of the sinusoidal distribution of the quality factor, is the natural frequency of the hemispherical resonator and its circumferential distribution, is the vibration angle of the hemispherical resonator, is the circumferential average of the natural frequency of the hemispherical resonator, is the frequency of the natural frequency sinusoidal distribution, is the phase angle of the sinusoidal distribution of the natural frequency.

10. A hemispherical resonant device parameter testing device, characterized in that: A method for testing parameters of a hemispherical resonant device according to any one of claims 1 to 9, comprising: A connecting unit, wherein the connecting unit is used to connect the control and data processing system to the vacuum chamber device controller and the excitation detection module through cables, and the hemispherical resonant device and the excitation detection module are installed in the vacuum chamber; An excitation detection unit, wherein the excitation detection unit generates an excitation signal of the natural frequency of the hemispherical resonant device through the excitation detection module, and detects a vibration signal of the hemispherical resonant device to obtain a natural vibration signal; An assembly error calibration unit, wherein the assembly error calibration unit performs an assembly error iterative calibration on the excitation detection module according to the inherent vibration signal; A vibration control unit, wherein the vibration control unit changes the vibration state of the hemispherical resonant device through the calibrated excitation detection module, collects the vibration signal of the hemispherical resonant device, and digitally processes the vibration signal of the hemispherical resonant device to obtain a control vibration signal; A calculation unit is used to perform a recursive least squares calculation on the control vibration signal to obtain performance index parameters of the hemispherical resonant device.

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