Method, system and equipment for monitoring operation state of workpiece table

Abstract

The invention discloses a method, a system and equipment for monitoring the operation state of a workpiece table, and relates to the technical field of semiconductors. The method comprises the steps that a current sequence to be analyzed is obtained from multiple collected current sequences in the period of controlling a workpiece table to execute a pre-configured operation task for multiple times, and each current sequence in the multiple current sequences is a set of power supply currents of a workpiece table motor collected according to a preset sampling interval in the period of executing one operation task; and comparing the current sequence to be analyzed with a reference current sequence, and determining the operation state of the workpiece table. The method has stronger current signal anti-interference performance, can effectively monitor the operation state of the workpiece table, and realizes high-precision fault prediction and performance monitoring.

Description

Technical Field

[0001] This application belongs to the field of semiconductor technology, and particularly relates to a method, system, and device for monitoring the operating state of a workpiece table. Background Art

[0002] In the field of semiconductor equipment, the workpiece table is a key component responsible for high-precision wafer positioning. Due to long-term operation, the various components of the workpiece table will be worn, affecting its motion performance and positioning accuracy, resulting in a decline in equipment stability and possible abnormal situations.

[0003] Existing anomaly detection schemes use the total operating duration or the jitter amplitude at a single moment as the judgment criteria, which have the problems of being too broad or being easily affected by interference noise and cannot accurately reflect the actual operating state of the workpiece table. Summary of the Invention

[0004] The embodiments of this application provide a method, system, and device for monitoring the operating state of a workpiece table, which can accurately detect the actual operating state of the workpiece table.

[0005] In a first aspect of the embodiments of this application, a method for monitoring the operating state of a workpiece table is provided. The method includes:

[0006] During the period when the workpiece table motor is controlled to drive the workpiece table to execute a pre-configured operating task multiple times, obtain a current sequence to be analyzed from the multiple collected current sequences; each current sequence in the multiple current sequences is a set of supply currents of the workpiece table motor collected at a preset sampling interval during the execution of one operating task.

[0007] Compare the current sequence to be analyzed with a reference current sequence to determine the operating state of the workpiece table. The reference current sequence is used to characterize the current characteristics of the workpiece table when executing the operating task in a normal operating state.

[0008] In a possible implementation manner of the first aspect, the above method further includes:

[0009] Obtain N current sequences from the multiple current sequences, where N≥2 and N is a positive integer, and the N current sequences are collected within a preset time period after the workpiece table starts to execute the above operating task;

[0010] Determine the reference current sequence according to the N current sequences.

[0011] In a possible implementation manner of the first aspect, to determine a reference current set according to the N current sequences, the method includes:

[0012] Calculate the three times standard deviation of each current sequence in the N current sequences;

[0013] Determine the consistency index of N current sequences according to the three - times standard deviation of each current sequence in the N current sequences, where the consistency index is an indicator for measuring the consistency of the N - current set;

[0014] When the consistency index meets the preset requirements, take the average value of the supply currents at the same sampling points in the N current sequences as the supply current at the corresponding sampling points in the reference current sequence, and obtain the reference current sequence.

[0015] In a possible implementation manner of the first aspect, to determine the consistency index of N current sequences according to the three - times standard deviation of each current sequence in the N current sequences, the method includes:

[0016] Calculate the differences between the three - times standard deviations of every two current sequences in the N current sequences to obtain a plurality of differences;

[0017] Determine the maximum value among the plurality of differences as the consistency index.

[0018] In a possible implementation manner of the first aspect, compare the current sequence to be analyzed with the reference current sequence to determine the operating state of the workpiece stage. The method includes:

[0019] Fit the current curve to be analyzed according to the current sequence to be analyzed;

[0020] Fit the reference current curve according to the reference current sequence;

[0021] Align the current curve to be analyzed and the reference current curve according to the operation task;

[0022] Calculate the coincidence degree between the current curve to be analyzed and the reference current curve;

[0023] When the coincidence degree is lower than the preset coincidence - degree threshold, determine that the workpiece stage is in an abnormal operating state.

[0024] In a possible implementation manner of the first aspect, compare the current sequence to be analyzed with the reference current sequence to determine the operating state of the workpiece stage. The method includes:

[0025] Compare the deviation values of the supply currents at the same sampling points between the current sequence to be analyzed and the reference current sequence;

[0026] Count the number of sampling points where the deviation values exceed the preset deviation threshold;

[0027] When the number of sampling points exceeds the preset number threshold, determine that the workpiece stage is in an abnormal operating state.

[0028] In a possible implementation of the first aspect, the above-mentioned running task includes a running trajectory and working condition motion parameters, and the working condition motion parameters include at least one of speed, acceleration, and jerk.

[0029] In a second aspect of the embodiments of the present application, a monitoring device for the running state of a workpiece stage is provided, including:

[0030] An acquisition module, configured to obtain a current sequence to be analyzed from a plurality of current sequences during the period when the workpiece stage motor is controlled to drive the workpiece stage to execute a pre-configured running task multiple times; each current sequence in the plurality of current sequences is a set of supply currents of the workpiece stage motor collected at a preset sampling interval during the execution of one running task.

[0031] An analysis module, configured to compare the current sequence to be analyzed with a reference current sequence to determine the running state of the workpiece stage, and the reference current sequence is used to characterize the current characteristics of the workpiece stage when executing the running task in a normal running state.

[0032] In a third aspect of the embodiments of the present application, a monitoring system for the running state of a workpiece stage is provided, and the system includes:

[0033] A power supply module, a workpiece stage controller, a workpiece stage motor, and a workpiece stage;

[0034] The power supply module is used to supply power to the workpiece stage controller and the workpiece stage motor;

[0035] The workpiece stage motor is used to drive the workpiece stage to move;

[0036] The workpiece stage controller is configured to execute the monitoring method for the running state of the workpiece stage as described in any possible implementation manner of the first aspect.

[0037] In a fourth aspect of the embodiments of the present application, an electronic device is provided, and the device includes: a memory and a program or instruction stored on the memory and executable on a processor, and when the program or instruction is executed by the processor, it implements the monitoring method for the running state of the workpiece stage provided in any possible implementation manner of the first aspect of the above embodiments of the present application.

[0038] In a fifth aspect of the embodiments of the present application, a readable storage medium is provided, and a program or instruction is stored on the readable storage medium, and when the program or instruction is executed by the processor, it implements the monitoring method for the running state of the workpiece stage provided in any possible implementation manner of the first aspect of the above embodiments of the present application.

[0039] In a sixth aspect of the embodiments of the present application, a computer program product is provided, and when the instructions in the computer program product are executed by the processor of the electronic device, the electronic device is caused to execute the monitoring method for the running state of the workpiece stage provided in any possible implementation manner of the first aspect of the above embodiments of the present application.

[0040] In the monitoring method for the operating state of the workpiece stage provided by the embodiments of the present application, the power supply current sequence of the workpiece stage motor conforms to certain regular characteristics during the execution of a fixed pre-configured operation task. Therefore, during the process of controlling the workpiece stage to execute the pre-configured operation task multiple times, by obtaining the current sequence to be analyzed from the multiple collected current sequences and comparing it with the reference current sequence, it is possible to accurately determine whether there is an abnormality in the operating state of the workpiece stage. This solution has stronger anti-interference ability for current signals, can effectively eliminate the influence of noise, and at the same time monitor the healthy development trend of the workpiece stage, realizing high-precision fault prediction and performance monitoring. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings required to be used in the embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0042] Figure 1 is a schematic diagram of the architecture of a monitoring system for the operating state of a workpiece stage provided by an embodiment of the present application;

[0043] Figure 2 is a schematic flowchart of a monitoring method for the operating state of a workpiece stage provided by an embodiment of the present application;

[0044] Figure 3 is a schematic structural diagram of a monitoring device for the operating state of a workpiece stage provided by an embodiment of the present application;

[0045] Figure 4 is a schematic diagram of an electronic device provided by an embodiment of the present application. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0046] The following will describe in detail the features and exemplary embodiments of various aspects of the present application. In order to make the purpose, technical solutions and advantages of the present application clearer, the following will further describe the present application in detail in combination with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only intended to explain the present application, rather than to limit the present application. For those skilled in the art, the present application can be implemented without some of these specific details. The following description of the embodiments is only to provide a better understanding of the present application by showing examples of the present application.

[0047] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variant thereof are intended to cover non-exclusive inclusion, such that a process, method, article or device comprising a series of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "comprising..." does not exclude the presence of additional identical elements in the process, method, article or device comprising the said element.

[0048] It should be noted that in the technical solution of this application, the acquisition, storage, use, processing, etc. of data all comply with the relevant provisions of national laws and regulations. In the embodiments of this application, certain industry-existing solutions such as software, components, models, etc. may be mentioned, and they should be considered exemplary. The purpose is only to illustrate the feasibility in the implementation of the technical solution of this application, but it does not mean that the applicant has already or necessarily used this solution.

[0049] First, the noun terms involved in one or more embodiments of this application are explained.

[0050] The workpiece stage is a core component of semiconductor equipment, undertaking the tasks of moving and positioning the wafer in each process. Its main function is to accurately position the wafer to the specified working position with sub-micron accuracy.

[0051] As described in the background art section, the workpiece stage needs to run continuously for a long time, which will cause wear or loss of its various components (such as guide rails, lubricating materials, etc.), resulting in the gradual degradation of indicators such as the motion performance, positioning accuracy, and steady-state jitter of the workpiece stage. With the change of these indicators, the stability of the workpiece stage is affected, and abnormal phenomena such as overcurrent and overheating are likely to occur.

[0052] Currently, there is no technical solution that can accurately reflect the actual operating state of the workpiece stage. In view of this, this application provides a method, device, and system for monitoring the operating state of the workpiece stage.

[0053] For example, the method for monitoring the operating state of the workpiece stage provided by the embodiments of this application can be applied to the production line of semiconductor manufacturing enterprises to monitor the state of the workpiece stage running for a long time. In actual application, when using the workpiece stage to move the wafer, the operating state is judged by monitoring the supply current of the motor. This detection method based on current change can effectively reflect the working state of the workpiece stage and timely discover potential problems.

[0054] Figure 1The figure shows a schematic framework diagram of a monitoring system for the operating state of a workpiece stage provided by an embodiment of the present application. As Figure 1 shown, the monitoring system 100 for the operating state of the workpiece stage may include a power supply 10, a workpiece stage controller 20, a workpiece stage motor 30, a workpiece stage 40, and a current recording device 50.

[0055] The power supply 10 is an example of a power supply module, which is used to provide necessary power for the entire system to ensure the normal operation of all components. Specifically, the power supply 10 provides power support for the workpiece stage controller 20, the current recording device 50, and the workpiece stage motor 30.

[0056] The workpiece stage controller 20 is the core control unit of the system and is responsible for directing the specific operations of the workpiece stage motor 30. The workpiece stage controller 20 is built-in with a motor driver, and the motor driver controls the workpiece stage motor 30 by sending instructions to the workpiece stage motor 30.

[0057] The workpiece stage motor 30 drives the movement of the workpiece stage 40 according to the instructions of the motor driver to ensure that the workpiece stage 40 executes the set operating tasks.

[0058] In addition, the workpiece stage controller 20 is also responsible for real-time acquisition of the supply current data of the workpiece stage motor 30.

[0059] The current recording device 50 is deployed with current recording software, which is used to record and save the supply current data collected by the workpiece stage controller 20. Exemplarily, the current recording device 50 may be integrated in the workpiece stage controller 20 or may be provided independently of the workpiece stage controller 20. This embodiment does not make any limitations in this regard.

[0060] Through the collaborative work of the above-mentioned various hardware components, the system 100 can monitor the operating state of the workpiece stage 30 in real time, capture current anomalies in a timely manner and perform fault warnings to ensure the stability and reliability of the equipment.

[0061] It should be noted that the application scenarios described in the above embodiments of the present application are for more clearly explaining the technical solutions of the embodiments of the present application, and do not constitute a limitation on the technical solutions provided by the embodiments of the present application. Those of ordinary skill in the art know that with the emergence of new application scenarios, the technical solutions provided by the embodiments of the present application are equally applicable to similar technical problems. The method provided by the embodiments of the present application can be applied to various application scenarios that require state detection of the workpiece stage.

[0062] Next, the method for monitoring the operating state of the workpiece stage provided by the embodiments of the present application will be introduced. In actual applications, the execution subject of the method for monitoring the operating state of the workpiece stage in the embodiments of the present application may be the workpiece stage controller or an electronic device integrated with the workpiece stage controller.

[0063] Figure 2The flowchart shows the monitoring method for the operating state of a workpiece stage provided by an embodiment of the present application. As Figure 2 shown, the method includes steps S210 to S220.

[0064] S210. During the period when the workpiece stage motor is controlled to drive the workpiece stage to perform multiple operating tasks, obtain the current sequence to be analyzed from multiple current sequences.

[0065] An operating task refers to a set of a series of instructions preset for the workpiece stage motor to indicate its driving of the workpiece stage to move.

[0066] That is to say, the operating task remains fixed throughout the monitoring process.

[0067] Exemplarily, the operating task may include two parts: an operating trajectory and working condition motion parameters.

[0068] The operating trajectory refers to the moving path that the workpiece stage needs to follow during the execution of the task. The setting of the operating trajectory is usually based on the geometric shape and processing requirements of the wafer, including the starting point and ending point of each movement of the workpiece stage, as well as the movement mode of each step along the path. For example, during the wafer processing, the workpiece stage moves sequentially along each grain within the wafer range with a grain pitch of 8 mm vector distance.

[0069] The working condition motion parameters refer to the setting requirements for the motion performance of the workpiece stage in the operating task. By way of example and not limitation, the working condition motion parameters may include at least one of speed, acceleration, and jerk. For example, at different time periods of the operating task, the workpiece stage needs to move at a speed of 200 mm / s, an acceleration of 2000 mm / s 2 and a jerk of 20000 mm / s 3 respectively.

[0070] The workpiece stage motor is used to convert electrical energy into mechanical energy to drive the movement of the workpiece stage.

[0071] The supply current of the workpiece stage motor refers to the current obtained by the workpiece stage motor from the power source during operation. The magnitude and change of the supply current directly reflect the operating state, load condition, and energy consumption of the workpiece stage motor.

[0072] Generally speaking, when performing different running tasks, or in different motion states of the same running task, the supply current of the workpiece table motor will be dynamically adjusted according to the changes in the running trajectory and working condition motion parameters. Therefore, in order to achieve stable running state monitoring, the solution of this application is limited to the scenario of state monitoring when the workpiece table repeatedly executes a fixed pre-configured running task. In this scenario, since the running task (including the running trajectory and working condition motion parameters) remains unchanged, the change of the supply current of the workpiece table will show a certain stability and regularity. Specifically, it can be understood from the following two aspects:

[0073] On the one hand, at the same sampling point of each running task, the supply current of the workpiece table motor has stability.

[0074] Exemplarily, the same sampling point can be the same position point in the running trajectory, or can be the same time point after the start of the running task.

[0075] This stability is because under a fixed running task, the motion states (such as speed, acceleration, load, etc.) of the workpiece table at the same position or time point are consistent, so the energy requirements of the motor also tend to be the same.

[0076] On the other hand, within the entire running task cycle, the change trend of the supply current of the workpiece table motor should show a certain regularity. This regularity is closely related to the working condition parameters such as the running trajectory, speed and acceleration of the workpiece table. For example, it can be manifested as: in the acceleration stage, the current will increase to meet the acceleration demand; in the constant speed stage, the current will tend to be stable to maintain a constant speed; in the deceleration stage, the current will decrease to reduce energy consumption to achieve deceleration.

[0077] In one manifestation, ideally, the undulating shape of the supply current change curve (that is, the curve of the current changing with time or position) within the same running task cycle should remain the same. For example, the peak value, valley value and change trend of the current curve should be highly similar in each running task.

[0078] It can be understood that once during the execution of the same running task, the current fluctuation amplitude shows an abnormal increase or irregular change, this indicates that some components of the workpiece table may have abnormalities or wear, resulting in changes in its motion performance, thereby affecting the motor load and changing the current characteristics. At this time, through the deviation between the current sequence to be analyzed and the reference current sequence detected, it can be judged in time that the workpiece table has a fault or is running unstably.

[0079] In this application, the current sequence is used to characterize the current characteristics of the workpiece table motor during each running task.

[0080] During the process of controlling the workpiece table to execute a pre-configured running task multiple times, multiple current sequences are collected. Each current sequence in the multiple sequences is an ordered set of the supply currents of the workpiece table motor collected at preset sampling intervals during the execution of one running task.

[0081] The supply current of the workpiece table motor refers to the supply bus current of the workpiece table motor and can be represented by the RMS (Root Mean Square) value.

[0082] In some embodiments, in order to avoid wasting computing resources and increasing the processing pressure, it is not necessary to perform anomaly judgment for each current sequence. Exemplarily, a part of the current sequences to be analyzed can be selected from the multiple current sequences, such as one current sequence to be analyzed for judgment.

[0083] Exemplarily, the current sequence to be analyzed can be the current sequence collected during the most recent execution of the running task, or the current sequence collected during a certain specific running task.

[0084] In some implementation manners, during the process of continuously controlling the workpiece table to execute the running task, at every preset detection period, the current sequence corresponding to the current running task is obtained as the current sequence to be analyzed. Specifically, at every preset sampling period, the motor supply current data is obtained once until the current running task is completed, and finally the complete set of currents to be analyzed is obtained.

[0085] The preset detection period refers to the time interval for monitoring the running state of the workpiece table and collecting data.

[0086] The preset sampling period refers to the time interval for collecting each data point during the monitoring process.

[0087] It can be understood that the preset detection period is longer than the preset sampling period. That is, the data of the running task is collected once every relatively long time, and during this running task, the motor supply current data is continuously collected at short time intervals.

[0088] For example, a set of currents to be analyzed is obtained every 10 days, and each set of currents to be analyzed consists of the motor supply currents collected every 100 milliseconds during the execution of one running task.

[0089] In some other implementation manners, starting from the moment when the workpiece table is started, the set of motor supply current data during each execution of the running task is obtained in real time. For example, the supply bus current of the workpiece table motor is recorded every 100 milliseconds, and the data is written into a storage file in the form of RMS values for storage. At every preset detection period, the supply current data in the historical or current running task is extracted from the storage file to form a set of currents to be analyzed.

[0090] S220. Compare the current sequence to be analyzed with the reference current sequence to determine the operating state of the worktable.

[0091] The reference current sequence is used to characterize the current characteristics of the worktable when performing operating tasks in a normal operating state. To some extent, the current data in the reference current sequence reflects the ideal state of the worktable when all parts of the equipment have not been severely worn or damaged during the initial operation.

[0092] Exemplarily, the reference current sequence may include multiple theoretical supply currents, and the acquisition methods may include the following:

[0093] In some embodiments, the theoretical supply currents in the reference current sequence are preset. By performing theoretical calculations on the current requirements of the worktable under different working conditions. For example, the corresponding current values under different working conditions (such as acceleration stage, constant speed stage, deceleration stage) can be set. The advantage of this solution lies in its simplicity.

[0094] In some embodiments, the theoretical supply currents in the calculated current sequence are determined by measurement. Considering that the wear and loss of the worktable are relatively small during the initial operation, the deviation of the motor supply current during the execution of the operating task at this time is relatively small and can be regarded as the theoretical supply current. By analyzing the supply current data collected during the previous or previous several operating tasks, a reference current sequence can be determined. The advantage of this method is that the reference current is more accurate and conforms to the actual situation based on the data obtained from the actual application environment, which helps to better reflect the current characteristics of the worktable during long-term operation.

[0095] By comparing the current data in the current sequence to be analyzed with the current data in the reference current sequence, the operating state of the worktable can be determined. When there is an obvious deviation between the currently collected current data and the current values in the reference current sequence, it may indicate that there are abnormalities during the operation of the worktable, such as overcurrent, overheating, etc., or it may indicate that its components have started to wear or other performance degradation.

[0096] In some embodiments, the operating state of the worktable can be judged by fitting the current curves of the current sequence to be analyzed and the reference current sequence and calculating the coincidence degree between the two. If the coincidence degree of the fitted curve exceeds the preset threshold, it indicates that the worktable is in a normal operating state; if the coincidence degree is lower than the threshold, it is judged as an abnormal operating state. This solution can effectively detect the performance changes and potential abnormalities of the worktable by comparing the similarity of the current curves.

[0097] In some embodiments, the current deviation values of the current sequence to be analyzed and the reference current sequence at the same sampling points can be calculated, and the number of sampling points where the deviation values exceed a preset threshold can be counted. When the number of sampling points exceeds a preset quantity threshold, it is determined that the worktable is in an abnormal operating state. This method determines the health status of the worktable by detecting abnormal changes in the current deviation.

[0098] It can be understood that if the total operating duration is used as the judgment criterion, there is a problem that the index is too broad, because a long total operating time of the worktable does not necessarily mean a large wear degree of the worktable, and it cannot accurately reflect its true operating state. In addition, if the vibration amplitude of the worktable at a certain moment is used as the judgment criterion, it is easy to cause misjudgment due to the difficulty of excluding interference factors such as environmental noise, and it is impossible to comprehensively and accurately evaluate the actual operating conditions of the worktable.

[0099] The power supply current sequence of the worktable motor conforms to certain regular characteristics during the execution of a fixed pre-configured operation task. Based on this, in the solution of this application, during the process of controlling the worktable to execute the pre-configured operation task multiple times, by obtaining the current sequence to be analyzed from the collected multiple current sequences and comparing it with the reference current sequence, it is possible to accurately determine whether there is an abnormality in the operating state of the worktable. This solution has stronger anti-interference ability for current signals, can effectively exclude the influence of noise, and at the same time monitors the healthy development trend of the worktable, realizing high-precision fault prediction and performance monitoring.

[0100] It should be noted that the operation task given in the embodiments of this application can be a test task specifically designed to monitor the operating state of the worktable and is run regularly.

[0101] For example, in the initial stage of the worktable being put into use, first execute this operation task for a period of time to collect the initial current sequence, and then put it into use for other specific tasks; in a specific time period (such as monthly or quarterly) after being put into use, run this operation task again to collect a new current sequence.

[0102] Correspondingly, when designing this operation task, various working condition parameters (such as different speeds, accelerations, motion trajectories, etc.) can be set in combination with the actual working requirements and motion characteristics of the worktable to simulate the motion state of the worktable under different working conditions, so as to cover various motion scenarios that the worktable may encounter in actual operation, thereby comprehensively detecting the operating states of various components (such as motors, guide rails, bearings, etc.) of the worktable. The specific content of the operation task in this application is not limited.

[0103] Compared with the real-time monitoring method, the low-frequency monitoring method proposed in this application can significantly reduce the data volume and computational burden, avoid interference problems in real-time monitoring, and capture potential and progressive faults of the workpiece table (such as bearing wear, guide rail deformation, etc.), so as to achieve early warning and preventive maintenance.

[0104] In addition, it can be understood that in the semiconductor manufacturing process, the movement trajectory and working condition parameters of the workpiece table are complex and variable, resulting in significant non-linear characteristics of the current signal. Therefore, extracting effective information related to the operating state from the complex current signal is a technical difficulty. This solution can effectively reduce the complexity of signal analysis and improve the accuracy of condition monitoring by pre-designing reasonable operating tasks for testing and limiting the current comparison in the scenario of repeatedly executing the operating task.

[0105] The method for measuring and calculating the theoretical supply current in the current sequence given in step S220 will be introduced below.

[0106] In some embodiments, the process of determining the reference current sequence may include steps S310 - S320.

[0107] S310. Obtain N current sequences from multiple current sequences.

[0108] Wherein, N≥2 and N is a positive integer.

[0109] It should be understood that in the scenario where the workpiece table repeatedly executes the pre-configured operating task, the state of the workpiece table is usually better in the initial stage. Therefore, the current data in the reference current sequence can actually reflect the ideal state of the equipment when each part has not been severely worn or damaged during the initial operation of the workpiece table.

[0110] In some implementation manners, the N current sequences are collected within a preset time period after the workpiece table starts to execute the operating task. The preset time period can be, for example, one day, one week, or other appropriate time ranges.

[0111] In some implementation manners, N current sequences with earlier collection times can be selected from multiple current sequences. For example, three current sequences collected during the 1st, 2nd, and 3rd executions of the plan are obtained from multiple current sequences.

[0112] S320. Determine the reference current sequence according to the N current sequences.

[0113] In some implementation manners, step S320 can be implemented by the following process:

[0114] S321. Calculate the three times standard deviation of each current sequence in the N current sequences.

[0115] The three - times standard deviation refers to multiplying the standard deviation of a certain current sequence by three, which is used to measure the fluctuation range of the sequence. The standard deviation reflects the degree of dispersion of the data, while the three - times standard deviation gives a more stringent fluctuation range for identifying and excluding large abnormal fluctuations.

[0116] The following uses a specific example to introduce the calculation process of the three - times standard deviation.

[0117] Suppose there are 3 current sequences (i.e., N = 3), and each sequence has 5 sampling points (i.e., each current sequence has 5 supply current data). These three current sequences are respectively:

[0118] Sequence 1: 1.0, 3.0, 1.2, 1.0, 5.0;

[0119] Sequence 2: 1.1, 3.2, 1.3, 1.0, 5.2;

[0120] Sequence 3: 1.3, 3.3, 1.2, 1.1, 5.3.

[0121] First, calculate the average value of each current sequence:

[0122] The average value of Sequence 1 is 2.24;

[0123] The average value of Sequence 2 is 2.36;

[0124] The average value of Sequence 3 is 2.44.

[0125] Secondly, calculate the three - times standard deviation of each current sequence:

[0126] The three - times standard deviation of Sequence 1 is approximately 4.71;

[0127] The three - times standard deviation of Sequence 2 is approximately 4.89;

[0128] The three - times standard deviation of Sequence 3 is approximately 4.95.

[0129] S322. Determine the consistency index of the N current sequences according to the three - times standard deviation of each current sequence in the N current sequences.

[0130] The consistency index is an index for measuring the consistency of the N current sets.

[0131] In some implementation manners, the process of determining the consistency index may include the following steps.

[0132] S3221. Calculate the difference between the three - times standard deviations of any two current sequences in the N current sequences to obtain a plurality of differences.

[0133] S3222. Determine the maximum value among the plurality of differences as the consistency index.

[0134] In some implementations, the process of determining the consistency index may include the following steps.

[0135] S3223. Sort the multiple three - standard - deviations corresponding to the N current sequences to determine the maximum three - standard - deviation and the minimum three - standard - deviation.

[0136] S3224. Determine the difference between the maximum three - standard - deviation and the minimum three - standard - deviation as the consistency index.

[0137] For example, continuing with the previous example, the maximum three - standard - deviation is 4.95 and the minimum three - standard - deviation is 4.71. Calculate the consistency index: 4.95 - 4.71 = 0.24.

[0138] In the above implementation, by calculating the maximum difference of the three - standard - deviations as the consistency index, the maximum inconsistency of the N current sequences can be effectively captured.

[0139] S323. When the consistency index meets the preset condition, take the mean value of the supply currents at the same sampling points in the N current sequences as the supply current at the corresponding sampling points in the reference current sequence, and obtain the reference current sequence.

[0140] Exemplarily, the preset condition may be less than a preset threshold.

[0141] For example, continuing with the previous example, assume the preset threshold is 0.4, and the calculated consistency index of the 3 current sequences in this example is 0.24, 0.24 < 0.4, that is, the consistency index of the 3 current sequences in this example is less than the preset threshold, indicating that the consistency index meets the preset requirements.

[0142] After the consistency index meets the preset condition, calculate the mean value of the supply current values at the same sampling points for each current sequence. That is, for each sampling point in each current sequence, take the average of the current values at the same sampling moment of these sequences. This mean value represents the typical current characteristics of the stage motor under normal operating conditions.

[0143] By calculating the mean value of the current values at each sampling point, a new current sequence is finally obtained, and this sequence is the reference current sequence. The reference current sequence reflects the current characteristics of the stage in the normal state and serves as a reference for judging whether the current is abnormal. As the stage operates, if the deviation between the collected current sequence and the reference current sequence is too large, the abnormal state of the stage can be identified in a timely manner.

[0144] For example, continuing with the previous example, assume that the three - times standard deviation of the three current sequences in the previous example meets the preset conditions. Take the average of the current values at the same sampling points for each current sequence, and the obtained reference current sequence is: 1.13, 3.17, 1.23, 1.03, 5.17.

[0145] In this implementation method, by introducing the calculation of the three - times standard deviation, it is ensured that the collected current data has high stability and consistency, thereby effectively filtering out abnormal fluctuations or noise interference, and improving the reliability of the reference current. The consistency of N current sequences is evaluated according to the standard deviation, and the reference current is determined only when the consistency meets the conditions, enhancing the representativeness of the reference current for the normal operating state of the worktable, and further improving the accuracy and precision of equipment condition monitoring.

[0146] In the above - mentioned embodiment, the method of determining the reference current sequence through the historical current sequences collected when performing the same operation task can dynamically generate the reference current sequence based on the actual operation situation, thus being more in line with the real application scenario and more accurately reflecting the normal operating state of the worktable under specific working conditions, avoiding the possible errors or inadaptabilities of the pre - deployed reference current.

[0147] In some embodiments, step S220 may include the following steps:

[0148] S410. Fit the current curve to be analyzed according to the current sequence to be analyzed.

[0149] S420. Fit the reference current curve according to the reference current sequence.

[0150] Exemplarily, polynomial fitting or other curve - fitting methods (such as the least - squares method) can be used to fit the current data to generate two current curves to reflect the change trend of the current.

[0151] S430. Align the current curve to be analyzed and the reference current curve according to the operation task.

[0152] Specifically, the two curves need to be consistent and aligned in the operation path and working - condition motion parameters. That is to say, ensure that the motion trajectories and each working condition (such as acceleration, constant - speed, deceleration stages, etc.) corresponding to the two current curves are the same, avoiding errors caused by stage differences. This can be achieved through time synchronization or interpolation methods, so that the two curves are compared at the same sampling points.

[0153] S440. Calculate the coincidence degree between the current curve to be analyzed and the reference current curve.

[0154] The coincidence degree reflects the degree of consistency between the current curve to be analyzed and the reference current curve.

[0155] For example, the dynamic time warping (DTW) algorithm can be used to calculate the similarity of two curves in terms of the overall trend, and this similarity can be used to characterize the degree of coincidence.

[0156] For another example, the Pearson correlation coefficient can be used to evaluate the similarity of two curves, and this similarity can also be used to characterize the degree of coincidence.

[0157] S450. Determine the operating state of the workpiece table according to the degree of coincidence.

[0158] In the case where the degree of coincidence exceeds the preset degree-of-coincidence threshold, it is determined that the workpiece table is in a normal operating state.

[0159] In the case where the degree of coincidence is lower than the preset degree-of-coincidence threshold, it is determined that the workpiece table is in an abnormal operating state.

[0160] The preset degree-of-coincidence threshold is a critical value that is preset and used to define normal and abnormal operations.

[0161] For example, assuming that the preset degree-of-coincidence threshold is 0.8, when the calculated degree of coincidence between the current curve to be analyzed and the reference current curve is 0.5, it can be determined that the workpiece table is in an abnormal operating state.

[0162] In this solution, by fitting the current sequence to be analyzed and the reference current sequence, two current curves are generated, and through alignment and degree-of-coincidence calculation, the operating state of the workpiece table can be accurately evaluated.

[0163] In some embodiments, step S220 may further include the following steps:

[0164] S510. Compare the deviation values of the supply currents at the same sampling points in the current sequence to be analyzed and the reference current sequence.

[0165] The deviation value refers to the difference in current values at the same sampling point in the current sequence to be analyzed and the reference current sequence.

[0166] In this step, the current sequence to be analyzed is compared with the reference current sequence. Specifically, each current sequence is composed of multiple sampling points, and the current values at the same sampling points are compared one by one to calculate their deviation values.

[0167] S520. Count the number of sampling points whose deviation values exceed the preset deviation threshold.

[0168] The preset deviation threshold refers to the preset maximum allowable deviation and is used to determine whether the deviation belongs to the normal fluctuation range.

[0169] It should be understood that the preset deviation threshold can be set based on the operating characteristics or historical data of the workpiece table, and this application does not limit this.

[0170] The number of sampling points refers to the number of sampling points in the current sequence to be analyzed that meet the condition that the deviation value exceeds the deviation threshold.

[0171] In this step, the number of sampling points whose deviation values exceed the preset deviation threshold will be counted. By setting the preset deviation threshold, slight errors in normal fluctuations can be effectively filtered out, and only those deviations beyond the normal range are concerned. These deviations may be caused by faults, performance degradation, or other abnormal factors.

[0172] S530. When the number of sampling points exceeds the preset quantity threshold, it is determined that the workpiece table is in an abnormal operating state.

[0173] The preset quantity threshold is a preset value.

[0174] Compare the counted number of deviation points with the preset quantity threshold. If it exceeds the preset quantity threshold, it indicates that the current deviation is large and abnormal conditions may exist widely, and then it is determined that the workpiece table is in an abnormal operating state. If the number of deviation points is less than this threshold, it can be considered that the workpiece table is operating normally.

[0175] For example, assume:

[0176] Current sequence to be analyzed: 4.3, 4.8, 4.1, 4.7, 5.1 (A);

[0177] Reference current sequence: 4.0, 4.7, 4.0, 4.6, 5.0 (A);

[0178] Preset deviation threshold: 0.2 A;

[0179] Preset quantity threshold: 2.

[0180] Calculate the deviation of each sampling point, and the deviation of the first sampling point is 0.3 A (exceeding the threshold), and the deviations of the remaining sampling points are all less than 0.2 A.

[0181] The number of sampling points with deviation exceeding the threshold is 1, which is lower than the preset quantity threshold of 2. Therefore, it can be judged that the workpiece table is in a normal operating state.

[0182] This solution, through detailed deviation analysis of the current sequence to be analyzed and the reference current sequence, combined with deviation thresholds and quantity thresholds for judgment, effectively eliminates slight fluctuations and ensures high sensitivity in anomaly detection. By counting the number of sampling points exceeding the threshold, it can accurately determine whether there are widespread anomalies, rather than relying solely on the anomalies of individual sampling points. This enables the solution to more robustly and accurately identify the operating state of the workpiece table in the face of complex current fluctuations, improves the reliability of fault detection, and ensures timely warning and maintenance during stable operation of the equipment.

[0183] In some embodiments, when it is detected that the workpiece table is in an abnormal operating state, the operation of the workpiece table is stopped and an alarm message is displayed on the front-end interface.

[0184] In some embodiments, an automatic recovery function can be designed. After the operation of the workpiece table is stopped when it is detected that the workpiece table is in an abnormal operating state, after cooling or adjustment for a preset time, the system can automatically resume the operation of the workpiece table and perform re-detection. If the workpiece table is still in a normal state after recovery, it continues to operate; if an abnormality is still detected, it stops again and the alarm level is increased.

[0185] A monitoring method based on the operating state of the workpiece table. Correspondingly, the present application also provides a specific embodiment of a monitoring device for the operating state of the workpiece table.

[0186] As Figure 3 shown, the monitoring device 1000 for the operating state of the workpiece table provided by the embodiment of the present application includes an acquisition module 1001 and a processing module 1002.

[0187] The acquisition module 1001 is configured to obtain a current sequence to be analyzed from a plurality of current sequences during a period when the workpiece table motor is controlled to drive the workpiece table to perform a plurality of running tasks.

[0188] Each current sequence in the plurality of current sequences is a set of supply currents of the workpiece table motor collected at a preset sampling interval during a period of performing one running task.

[0189] The workpiece table motor is used to drive the operation of the workpiece table.

[0190] The processing module 1002 is configured to compare the current sequence to be analyzed with a reference current sequence to determine the operating state of the workpiece table.

[0191] The reference current sequence is used to characterize the current characteristics of the workpiece table when performing running tasks in a normal operating state.

[0192] A monitoring method based on the operating state of the workpiece table. Correspondingly, the present application also provides a specific embodiment of an electronic device.

[0193] In some embodiments, the processing module 1002 can also be used to execute steps S310 - S320.

[0194] In some embodiments, the processing module 1002 can also be used to execute steps S321 - S323.

[0195] In some embodiments, the processing module 1002 can also be used to execute steps S3221 - 3222.

[0196] In some embodiments, the processing module 1002 can also be used to execute steps S3223 - 3224.

[0197] Figure 4 The figure shows a schematic diagram of the hardware structure of the electronic device provided by the embodiments of the present application.

[0198] The electronic device may include a processor 7001 and a memory 7002 storing computer program instructions.

[0199] Specifically, the above-mentioned processor 7001 may include a central processing unit (CPU), or an application specific integrated circuit (ASIC), or one or more integrated circuits configured to implement the embodiments of the present application.

[0200] The memory 7002 may include a mass storage for data or instructions. By way of example and not limitation, the memory 7002 may include a hard disk drive (HDD), a floppy disk drive, a flash memory, an optical disk, a magneto-optical disk, a magnetic tape, or a universal serial bus (USB) drive, or a combination of two or more of these. In a suitable case, the memory 7002 may include a removable or non-removable (or fixed) medium. In a suitable case, the memory 7002 may be internal or external to the integrated gateway disaster recovery device. In a particular embodiment, the memory 7002 is a non-volatile solid-state memory.

[0201] The processor 7001 reads and executes the computer program instructions stored in the memory 7002 to implement the monitoring method for any one of the workpiece table operating states in the above embodiments.

[0202] In one example, the electronic device may further include a communication interface 7003 and a bus 7004. Among them, as Figure 4 shown, the processor 7001, the memory 7002, and the communication interface 7003 are connected through the bus 7004 to complete communication with each other.

[0203] The communication interface 7003 is mainly used to implement communication between the various modules, devices, units, and / or devices in the embodiments of the present application.

[0204] The bus 7004 includes hardware, software, or both, and couples the components of the electronic device to each other. By way of example and not limitation, the bus may include an Accelerated Graphics Port (AGP) or other graphics bus, an Enhanced Industry Standard Architecture (EISA) bus, a Front Side Bus (FSB), a HyperTransport (HT) interconnect, an Industry Standard Architecture (ISA) bus, an InfiniBand interconnect, a Low Pin Count (LPC) bus, a memory bus, a MicroChannel Architecture (MCA) bus, a Peripheral Component Interconnect (PCI) bus, a PCI-Express (PCI-X) bus, a Serial Advanced Technology Attachment (SATA) bus, a Video Electronics Standards Association Local (VLB) bus, or other suitable buses, or a combination of two or more of these. Where appropriate, the bus 7004 may include one or more buses. Although embodiments of the present application describe and illustrate specific buses, the present application contemplates any suitable bus or interconnect.

[0205] In addition, in combination with the method for monitoring the operating state of the workpiece table in the above embodiments, embodiments of the present application can be implemented by providing a computer storage medium. Computer program instructions are stored on the computer storage medium; when the computer program instructions are executed by a processor, the method for monitoring the operating state of the workpiece table in any of the above embodiments is implemented.

[0206] In addition, in combination with the method for monitoring the operating state of the workpiece table in the above embodiments, embodiments of the present application can be implemented by providing a computer program product. When the instructions in the computer program product are executed by a processor of an electronic device, the electronic device is caused to execute the method for monitoring the operating state of the workpiece table provided in any aspect of the above embodiments of the present application.

[0207] It should be clear that the present application is not limited to the specific configurations and processes described above and illustrated in the figures. For the sake of brevity, detailed descriptions of known methods are omitted here. In the above embodiments, several specific steps are described and illustrated as examples. However, the method process of the present application is not limited to the specific steps described and illustrated, and those skilled in the art can make various changes, modifications, and additions, or change the order between steps after understanding the spirit of the present application.

[0208] The functional blocks shown in the above-described structural block diagrams can be implemented as hardware, software, firmware, or a combination thereof. When implemented in hardware, it can be, for example, an electronic circuit, an application-specific integrated circuit (ASIC), appropriate firmware, a plug-in, a functional card, and so on. When implemented in software, the elements of the present application are programs or code segments for performing the required tasks. The program or code segment can be stored in a machine-readable medium or transmitted over a transmission medium or communication link via a data signal carried in a carrier wave. A "machine-readable medium" can include any medium that can store or transmit information. Examples of machine-readable media include electronic circuits, semiconductor memory devices, ROMs, flash memories, erasable ROMs (EROMs), floppy disks, CD-ROMs, optical discs, hard disks, fiber optic media, radio frequency (RF) links, and so on. The code segment can be downloaded via a computer network such as the Internet, an intranet, and so on.

[0209] It should also be noted that the exemplary embodiments mentioned in the present application describe some methods or systems based on a series of steps or devices. However, the present application is not limited to the order of the above steps, that is, the steps can be executed in the order mentioned in the embodiments, or different from the order in the embodiments, or several steps can be executed simultaneously.

[0210] Aspects of the present disclosure have been described above with reference to the flowcharts and / or block diagrams of methods, apparatuses (systems), and computer program products according to embodiments of the present disclosure. It should be understood that each block in the flowcharts and / or block diagrams, and the combinations of blocks in the flowcharts and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, or other programmable data processing device to produce a machine such that the instructions executed by the processor of the computer or other programmable data processing device enable the implementation of the functions / actions specified in one or more blocks of the flowchart and / or block diagram. Such a processor can be, but is not limited to, a general-purpose processor, a special-purpose processor, a special application processor, or a field-programmable logic circuit. It is also understood that each block in the block diagram and / or flowchart, and the combinations of blocks in the block diagram and / or flowchart, can also be implemented by dedicated hardware that performs the specified functions or actions, or by a combination of dedicated hardware and computer instructions.

[0211] As described above, this is only the specific implementation manner of the present application. Those skilled in the art can clearly understand that for the convenience and brevity of description, the specific working processes of the systems, modules, and units described above can refer to the corresponding processes in the foregoing method embodiments, and will not be elaborated herein. It should be understood that the protection scope of the present application is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present application can easily think of various equivalent modifications or substitutions, and these modifications or substitutions should all be covered within the protection scope of the present application.

Claims

1. A method for monitoring the operating status of a workpiece platform, characterized in that: include: During the period of controlling the workpiece stage motor to drive the workpiece stage to perform operation tasks multiple times, a current sequence to be analyzed is obtained from multiple current sequences, each current sequence in the multiple current sequences is a collection of power supply currents of the workpiece stage motor collected at a preset sampling interval during the period of performing the operation task once; The current sequence to be analyzed is compared with a reference current sequence to determine the operating state of the workpiece stage, wherein the reference current sequence is used to characterize the current characteristics of the workpiece stage when performing the operating task under normal operating conditions.

2. The method according to claim 1, characterized in that The method further comprises: Acquire N current sequences from the multiple current sequences, where N≥2 and N is a positive integer, and the N current sequences are collected within a preset time period after the workpiece platform starts to perform the operation task; The reference current sequence is determined according to the N current sequences.

3. The method according to claim 2, characterized in that The step of determining the reference current set according to the N current sequences includes: Calculating three times the standard deviation of each current sequence in the N current sequences; Determining a consistency index of the N current sequences according to three times the standard deviation of each current sequence in the N current sequences, wherein the consistency index is an indicator for measuring the consistency of the N current sets; When the consistency index meets the preset requirement, the power supply currents at the same sampling points in the N current sequences are averaged as the power supply currents at the corresponding sampling points in the reference current sequence to obtain the reference current sequence.

4. The method according to claim 3, characterized in that The step of determining the consistency index of the N current sequences according to three times the standard deviation of each current sequence in the N current sequences comprises: Calculating a difference of three times the standard deviation of every two current sequences in the N current sequences to obtain a plurality of differences; The maximum value among the multiple differences is determined as the consistency index.

5. The method according to any one of claims 1 to 4, characterized in that The step of comparing the current sequence to be analyzed with a reference current sequence to determine the operating state of the workpiece platform includes: Fitting a current curve to be analyzed according to the current sequence to be analyzed; Fitting a reference current curve according to the reference current sequence; According to the running task, aligning the current curve to be analyzed and the reference current curve; Calculating the degree of overlap between the current curve to be analyzed and the reference current curve; When the overlap degree is lower than a preset overlap degree threshold, it is determined that the workpiece platform is in an abnormal operating state.

6. The method according to any one of claims 1 to 4, characterized in that The step of comparing the current sequence to be analyzed with a reference current sequence to determine the operating state of the workpiece platform includes: Comparing the deviation value of the power supply current at the same sampling point in the current sequence to be analyzed and the reference current sequence; Counting the number of sampling points whose deviation values ​​exceed a preset deviation threshold; When the number of the sampling points exceeds a preset number threshold, it is determined that the workpiece stage is in an abnormal operating state.

7. The method according to any one of claims 1 to 4, characterized in that The operation task includes an operation trajectory and operating motion parameters, and the operating motion parameters include at least one of speed, acceleration and jerk.

8. A monitoring system for the operation status of a workpiece platform, characterized in that: include: Power supply module, workpiece table controller, workpiece table motor and workpiece table; The power supply module is used to supply power to the workpiece stage controller and the workpiece stage motor; The workpiece table motor is used to drive the workpiece table to move; The workpiece stage controller is used to execute the method for monitoring the operating status of the workpiece stage as described in any one of claims 1-7.

9. An electronic device, characterized in that: The device comprises: a processor and a memory storing computer program instructions; When the processor executes the computer program instructions, the method for monitoring the operating status of the workpiece platform as described in any one of claims 1-7 is implemented.

10. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores computer program instructions, and when the computer program instructions are executed by a processor, the method for monitoring the operating status of a workpiece platform as described in any one of claims 1 to 7 is implemented.

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