A step-and-repeat nanoimprinting device, control method and control system

Abstract

The present invention discloses a step-and-repeat nanoimprinting device, a control method and a control system, which relate to the technical field of semiconductor manufacturing. The imprinting substrate of the nanoimprinting device includes a plurality of areas to be imprinted arranged in an array. The nanoimprinting device includes a displacement module, a dispensing module and an imprinting module which are arranged at intervals along a first horizontal direction. The top of the displacement module is used to place the imprinting substrate. The imprinting module includes an imprinting template matching the area to be imprinted, and the imprinting template is a photolithography template. The displacement module is configured to reciprocate between the dispensing module and the imprinting module along the first horizontal direction under control or move along a second horizontal direction. Each reciprocating motion is used to realize the dispensing and imprinting of one area to be imprinted. The displacement rate of the displacement module along the first horizontal direction is calculated according to formula (1). The control method of the present invention can improve the dispensing uniformity and the compatibility between the nanoimprinting device and the traditional projection lithography process at the same time.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing, and particularly relates to a step-and-repeat nanoimprinting device, a control method, and a control system thereof. Background Art

[0002] As an advanced micro-nano processing technology with high resolution, low cost, and suitable for large-area pattern replication, nanoimprinting technology has been widely applied in fields such as semiconductor manufacturing, micro-nano optical devices, and biochips. The step-and-repeat nanoimprinting device realizes high-precision pattern replication by performing area-by-area pairing imprinting on the imprint template and the imprint substrate, and its production efficiency and imprint quality directly affect the product performance.

[0003] In the prior art, the dispensing module and the imprinting module are often arranged at fixed positions, and the displacement module drives the imprint substrate to pass through the dispensing and imprinting processes in sequence. However, in the prior art, the dispensing module usually performs spin coating for leveling the glue after dispensing on the imprint substrate, resulting in the glue droplets entering the equipment and causing equipment contamination, the volume of the dispensed glue being easily excessive and causing overflow, or the volume of the glue droplets being insufficient and causing uneven filling, thus affecting the product yield. Moreover, traditional nanoimprint lithography usually uses an organic soft template and combines a single imprinting process to achieve the imprinting of the entire wafer, often resulting in low yield, poor structural position accuracy due to the template material and the large imprinting area, and the template manufacturing process being incompatible with the existing semiconductor processes. Summary of the Invention

[0004] An object of the first aspect of the present invention is to provide a step-and-repeat nanoimprinting device, which solves the technical problems of photoresist overflow during the imprinting process of the nanoimprinting device in the prior art and poor compatibility with the projection lithography process.

[0005] Another object of the first aspect of the present invention is to further improve the compatibility of the nanoimprinting device with the projection lithography process.

[0006] An object of the second aspect of the present invention is to provide a control method for a step-and-repeat nanoimprinting device.

[0007] An object of the third aspect of the present invention is to provide a control system for a step-and-repeat nanoimprinting device, which is used to implement the above control method.

[0008] According to the object of the first aspect of the present invention, the present invention provides a step-and-repeat nanoimprinting device for realizing the dispensing and imprinting of an imprint substrate. The imprint substrate includes a plurality of imprinting areas arranged in an array. The nanoimprinting device is characterized in that it includes a displacement module and a dispensing module and an imprinting module that are located above the displacement module and are spaced apart along a first horizontal direction. The top of the displacement module is used to place the imprint substrate;

[0009] The displacement module is configured to reciprocate between the dispensing module and the imprinting module along the first horizontal direction in a controlled manner or move along a second horizontal direction perpendicular to the first horizontal direction. Each reciprocating motion is used to achieve dispensing and imprinting of one area to be imprinted. The displacement rate V of the displacement module along the first horizontal direction is calculated according to the following formula:

[0010] ;

[0011] wherein, R is the volume of a single dispensing drop of the dispensing module, F is the dispensing frequency, P is the spacing between adjacent two dispensing ports, the effective filling height M is the product of the height H of the imprinting module and the duty cycle D of the imprinting module in the unit glue drop area. The imprinting module includes an imprinting template matching the area to be imprinted, and the imprinting template is a photolithography template.

[0012] Optionally, the dispensing module includes:

[0013] a plurality of dispensing ports, which are arranged at intervals along the second horizontal direction, and each dispensing port is configured to be controllable to open and close.

[0014] Optionally, the imprinting module further includes:

[0015] a fixing component, which is sleeved on the periphery of the imprinting template, and the fixing component is fixedly connected with the imprinting template by means of vacuum adsorption.

[0016] Optionally, the photolithography template is any one of a standard 6025 photolithography template, a standard 6012 template or a standard 6009 template.

[0017] Optionally, the imprinting module further includes:

[0018] a correction component, which is sleeved on the periphery of the fixing component. The correction component includes a mounting hole matching the imprinting template, and the mounting hole is engaged with the imprinting module to fix the imprinting template.

[0019] Optionally, the spacing P between adjacent two dispensing ports is any value in the range of 0.01 mm - 2.0 mm.

[0020] Optionally, the imprinting substrate is configured to be fixedly connected with the displacement module by means of vacuum adsorption.

[0021] According to the object of the second aspect of the present invention, the present invention further provides a control method for the step-and-repeat nanoimprinting device described in any one of the above, including:

[0022] Obtain the effective filling height M of the imprinting module within the unit droplet area, the volume R of a single droplet of the dispensing module, the dispensing frequency F, and the spacing P between two adjacent dispensing ports. Here, the effective filling height M is the product of the height H of the imprinting module and the duty cycle D of the imprinting module within the unit droplet area;

[0023] Calculate the displacement rate V of the displacement module along the first horizontal direction according to the following formula,

[0024] ;

[0025] Control the displacement module to move to the position aligned with the dispensing module at the first imprinting area to be imprinted, and control the dispensing module to dispense glue;

[0026] Control the displacement module to move to the position aligned with the imprinting module at the first imprinting area to be imprinted at the displacement rate V, and control the displacement module to move upward for imprinting;

[0027] Control the displacement module to return to the position aligned with the dispensing module at the next imprinting area to be imprinted, and repeat the dispensing and imprinting steps until all the imprinting areas to be imprinted are completed.

[0028] According to the purpose of the third aspect of the present invention, the present invention also provides a control system for a step-and-repeat nanoimprinting device, including a memory and a processor. A control program is stored in the memory, and when the control program is executed by the processor, it is used to implement the control method of the step-and-repeat nanoimprinting device described in any one of the above.

[0029] The present invention adjusts the displacement rate V of the displacement module in the nanoimprinting device using formula (1), that is, when the volume R of a single droplet of the dispensing module, the dispensing frequency F, and the spacing P between two adjacent dispensing ports in the nanoimprinting device are fixed values, the displacement rate V of the displacement module is inversely proportional to the effective filling height M of the imprinting module. That is, in different imprinting modules, as the effective filling height M of the imprinting module increases, the displacement rate V of the displacement module decreases, so that the residence time of the unit area to be imprinted at the dispensing module is extended, thereby increasing the dispensing volume within the unit area to be imprinted, achieving precise control of the matching between the droplet volume distribution and the imprinting structure, preventing the product yield from being affected by insufficient filling or overflow of the photoresist, and at the same time preventing the photoresist from contaminating the nanoimprinting structure caused by the traditional spin coating and spraying methods, ensuring that the boundaries of the imprinting area are neat and the structure is complete. That is, the above formula-based control method is combined with the stepwise displacement mode to achieve a multi-region continuous, efficient, and stable nanoimprinting process while ensuring the resolution of the nanoimprinting process. And by setting the imprinting template of the imprinting module as a photolithography template to be compatible with the projection photolithography process, not only can the product yield be improved, but also the consumable compatibility between the nanoimprinting device and the photolithography process can be achieved.

[0030] Further, in the present invention, the dispensing module is configured to include a plurality of dispensing ports spaced along the second horizontal direction, and the plurality of dispensing ports are configured to selectively open or close one or more of them, that is, the plurality of dispensing ports are configured to selectively open or close along the second horizontal direction, so that the size of the number of dispensing ports in the open state of the dispensing module meets the size requirements of a single imprinting area of the imprinting substrate in the second horizontal direction, improving the dispensing uniformity of the dispensing module and the consumable size compatibility of the nanoimprinting device, and meeting the requirements of multiple different imprinting substrate sizes.

[0031] The above description is only an overview of the technical solution of the present invention. In order to be able to understand the technical means of the present invention more clearly and implement it in accordance with the content of the description, the following takes the preferred embodiments of the present invention and combines the accompanying drawings to describe in detail as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Some specific embodiments of the present invention will be described in detail hereinafter with reference to the accompanying drawings in an exemplary and non-limiting manner. The same reference numerals in the drawings denote the same or similar components or parts. Those skilled in the art should understand that these drawings are not necessarily drawn to scale. In the drawings:

[0033] Figure 1 is a schematic structural diagram of a nanoimprinting device according to an embodiment of the present invention;

[0034] Figure 2 is a schematic structural diagram of an imprinting substrate according to an embodiment of the present invention;

[0035] Figure 3 is a schematic structural diagram of the nanoimprinting device in the dispensing state according to an embodiment of the present invention;

[0036] Figure 4 is a schematic structural diagram of the nanoimprinting device after dispensing is completed according to an embodiment of the present invention;

[0037] Figure 5 is a schematic structural diagram of the nanoimprinting device before the imprinting operation according to an embodiment of the present invention;

[0038] Figure 6 is a schematic structural diagram of the nanoimprinting device in the imprinting state according to an embodiment of the present invention;

[0039] Figure 7 is a schematic structural diagram of the nanoimprinting device after a single imprinting is completed according to an embodiment of the present invention;

[0040] Figure 8 is a schematic structural diagram of the nanoimprinting device after all imprintings are completed according to an embodiment of the present invention;

[0041] Figure 9 is a schematic flow chart of a method for controlling a nanoimprinting device according to an embodiment of the present invention.

[0042] Reference numerals:

[0043] 100 - nanoimprinting device, 10 - displacement module, 20 - dispensing module, 21 - dispensing port, 30 - imprinting module, 31 - fixing component, 32 - imprinting template, 33 - correction component, 331 - mounting hole, 34 - exposure light source, 40 - imprinting substrate, 41 - area to be imprinted, 50 - control module. Detailed implementation manners

[0044] The following will further describe in detail the specific implementation manners of the present invention in conjunction with the accompanying drawings and embodiments. The following embodiments are used to illustrate the present invention, but are not used to limit the scope of the present invention.

[0045] To make the above objects, features and advantages of the present application more obvious and understandable, the following will describe in detail the specific implementation manners of the present application in conjunction with the accompanying drawings. It can be understood that the specific embodiments described herein are only used to explain the present application, rather than limiting the present application. Additionally, it should be noted that for the sake of convenience of description, only parts related to the present application are shown in the accompanying drawings rather than all structures. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present application.

[0046] The terms "including" and "having" and any variations thereof in the present application are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device that includes a series of steps or units is not limited to the listed steps or units, but optionally further includes steps or units not listed, or optionally further includes other steps or units inherent to these processes, methods, products or devices.

[0047] Referring to "embodiments" herein means that the specific features, structures or characteristics described in conjunction with the embodiments may be included in at least one embodiment of the present application. The phrase appears at various positions in the specification and does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment mutually exclusive with other embodiments. Those skilled in the art explicitly and implicitly understand that the embodiments described herein may be combined with other embodiments.

[0048] Figure 1 is a schematic structural diagram of a nanoimprinting device according to an embodiment of the present invention, Figure 2 is a schematic structural diagram of an imprinting substrate according to an embodiment of the present invention, Figure 3Schematic structural diagram of a nanoimprinting device in a state of dispensing glue according to an embodiment of the present invention. Figure 4 Schematic structural diagram of a nanoimprinting device after glue dispensing is completed according to an embodiment of the present invention. Figure 5 Schematic structural diagram of a nanoimprinting device before an imprinting operation according to an embodiment of the present invention. Figure 6 Schematic structural diagram of a nanoimprinting device in an imprinting state according to an embodiment of the present invention. Figure 7 Schematic structural diagram of a nanoimprinting device after a single imprinting is completed according to an embodiment of the present invention. Figure 8 Schematic structural diagram of a nanoimprinting device after all imprintings are completed according to an embodiment of the present invention. Figure 9 Schematic flowchart of a control method for a nanoimprinting device according to an embodiment of the present invention.

[0049] As Figure 1 shown, a step-and-repeat nanoimprinting device 100 of the present invention is used to implement glue dispensing and imprinting on an imprinting substrate 40. The imprinting substrate 40 includes a plurality of imprinting regions 41 arranged in an array. The nanoimprinting device 100 includes a displacement module 10 and a glue dispensing module 20 and an imprinting module 30 that are spaced apart along a first horizontal direction above the displacement module 10. The top of the displacement module 10 is used to place the imprinting substrate 40. The displacement module 10 is configured to be controlled to reciprocate between the glue dispensing module 20 and the imprinting module 30 along the first horizontal direction (refer to Figure 1 the direction indicated by x in Figure 2 or move along a second horizontal direction (refer to

[0050] ;

[0051] wherein, R is the volume of a single glue droplet of the glue dispensing module 20, F is the glue dispensing frequency, P is the pitch between two adjacent glue dispensing ports 21, the effective filling height M is the product of the height H of the imprinting module 30 and the duty cycle D of the imprinting module 30 in the unit glue droplet region. The imprinting module 30 includes an imprinting template 32 that matches the imprinting region, and the imprinting template 32 is a photolithography template. Here, the height H of the imprinting module 30 is the thickness of the hollow pattern in the imprinting template 32.

[0052] In this embodiment, the displacement rate V of the displacement module 10 in the nanoimprinting device 100 is adjusted using formula (1). That is, when the volume R of a single drop of glue, the glue dropping frequency F of the glue dropping module 20, and the distance P between two adjacent glue dropping ports 21 in the nanoimprinting device 100 are fixed values, the displacement rate V of the displacement module 10 is inversely proportional to the effective filling height M of the imprinting module 30. That is, in different imprinting modules 30, as the effective filling height M of the imprinting module 30 increases, the displacement rate V of the displacement module 10 decreases, so that the residence time of the unit area to be imprinted 41 in the glue dropping module 20 is extended, thereby increasing the volume of the glue dropped in the unit area to be imprinted 41, achieving precise control of the matching between the glue drop volume distribution and the imprinting structure, preventing the product yield from being affected due to insufficient filling or overflow of the photoresist, and at the same time preventing the photoresist from contaminating the nanoimprinting structure caused by the traditional spin coating and spraying method, ensuring that the boundary of the imprinting area is neat and the structure is complete. That is, the above formula-based control method is combined with the step-by-step displacement mode to realize a multi-region continuous, efficient, and stable nanoimprinting process while ensuring the resolution of the nanoimprinting process. Moreover, by setting the imprinting template 32 of the imprinting module 30 as a lithography template to be compatible with the projection lithography process, not only can the product yield be improved, but also the consumable compatibility between the nanoimprinting device 100 and the lithography process can be achieved.

[0053] In this embodiment, the imprinting template 32 is set to be detachable, that is, the corresponding imprinting template 32 is selected according to the product pattern or size requirements, enhancing the versatility and adaptability of the nanoimprinting device 100, enabling the nanoimprinting device 100 to be compatible with the traditional projection lithography in terms of consumables and imprinting process, improving the resolution of the nanoimprinting device 100 while reducing the product production cost and enhancing the mass production feasibility.

[0054] In this embodiment, the imprinting template 32 is a lithography template. Since the imprinting template 32 adopts a lithography template, it has high graphic resolution, high flatness, and excellent dimensional consistency, enabling high-precision and good-repeatability micro-nano pattern transfer during the nanoimprinting process. At the same time, the lithography template is highly compatible with the micro-nano processing process, having the advantages of standardization, easy replacement, and strong adaptability, further expanding the application range and forming quality of the nanoimprinting device 100.

[0055] In this embodiment, the effective filling height M is the product of the height H of the imprinting module 30 and the duty cycle D of the imprinting module 30 in the unit droplet area. That is, the effective filling heights M of different imprinting patterns in the unit area of different imprinting modules 30 are different, and the required volume of the photoresist to be filled is also different. By obtaining the effective filling height in the unit area of the imprinting module 30, the volume requirement of the droplets of the imprinting module 30 in the unit area is determined, so as to regulate the displacement rate V of the displacement module 10, so that the dispensing module 20 can fill an equal amount of photoresist in the area 41 to be imprinted, thereby improving the filling uniformity of the photoresist and further improving the imprinting resolution of the nanoimprinting device 100.

[0056] In this embodiment, both the dispensing module 20 and the imprinting module 30 of the nanoimprinting device 100 are step - by - step repeated dispensing or imprinting. By controlling the movement of the displacement module 10, the imprinting substrate 40 is driven to perform step - by - step repeated movement between the dispensing module 20 and the imprinting module 30, so as to perform a plurality of predetermined step cycles in sequence in a plurality of areas 41 to be imprinted on the imprinting substrate 40, thereby ensuring that the nanoimprinting device 100 can stably and efficiently manufacture products. Here, a single predetermined step cycle is to control the displacement module 10 to drive a dispensing and imprinting operation on an area 41 to be imprinted of the imprinting substrate 40.

[0057] As Figure 1 shown, in this embodiment, the nanoimprinting device 100 further includes an exposure light source 34. The exposure light source 34 is an i - line light source. Using this light source can directly use existing i - line photoresist or imprinting glue formulations, reducing the development cost. Moreover, the cost of i - line equipment is lower, it is more convenient to use, and when combined with the transfer structure of the imprinting module 30, it can achieve high - resolution patterns without relying on the light source wavelength, thereby realizing the low - cost and high - resolution product preparation of the nanoimprinting device 100. In addition, using an i - line light source can make the nanoimprinting device 100 compatible with contact lithography and nanoimprinting processes, further enhancing the compatibility of the device with traditional lithography processes.

[0058] As Figure 1 shown, in this embodiment, the nanoimprinting device 100 further includes a control module 50. The control module 50 is used to control the dispensing of the dispensing module 20, the imprinting of the imprinting module 30, and the step - by - step repeated displacement of the displacement module 10. Among them, the control module 50 can control the displacement module 10 in the first horizontal direction (referring to the direction pointed by the arrow x in Figure 1 ), the second horizontal direction (referring to the direction pointed by the arrow y in Figure 2 ), and the vertical direction (referring to the direction pointed by the arrow in Figure 1In addition to the movement along the Z-axis (the arrow z in the figure points), it can also be controlled to move in three degrees of freedom of θx / θy / θz. That is, the control module 50 can also control the displacement module 10 to rotate around the axes of the first horizontal direction, the second horizontal direction, and the vertical direction. That is, θx / θy / θz respectively refer to the pitch angle of the displacement module 10 around the X-axis, the roll angle around the Y-axis, and the yaw angle around the Z-axis for fine angle adjustment, so as to realize the dynamic correction of the imprint alignment accuracy and the precise adjustment of the imprint attitude to meet the high-precision requirements in a variety of imprint scenarios. By controlling the three angular degrees of freedom of θx / θy / θz, small tilts can be compensated to achieve high-precision alignment, and by controlling the inclination angle, the area 41 to be imprinted can be evenly contacted with the imprint module 30, which is beneficial to the complete transfer of the pattern.

[0059] In this embodiment, within a single predetermined step cycle of the step-and-repeat nanoimprinting device 100, first, the control module 50 controls the displacement module 10 to move to a position where a region 41 to be imprinted on the imprint substrate 40 corresponds to a plurality of dispensing ports 21 of the dispensing module 20 (refer to Figure 3 ). The control module 50 adjusts the displacement rate of the displacement module 10 according to the volume of the dispensing liquid required to be filled in the unit area of the imprint template 32 in the imprint module 30 as required by the product. After the dispensing is completed within a region 41 to be imprinted (refer to Figure 4 ), the control module 50 controls the displacement module 10 to move directly below the imprint template 32 (refer to Figure 5 ). Then, the displacement module 10 is controlled to move upward until the region 41 to be imprinted abuts against the imprint template 32 (refer to Figure 6 ) to transfer the pattern of the dispensing liquid in the region 41 to be imprinted. After being irradiated by the exposure light source 34, the displacement module 10 is controlled to drive the imprint substrate 40 to move downward (refer to Figure 7 ) to form a single imprint structure. The above-mentioned step predetermined cycle is repeated until the product imprinting of a plurality of regions 41 to be imprinted on the imprint substrate 40 is completed (refer to Figure 8 ).

[0060] As Figure 1As shown, in a further embodiment, the dispensing module 20 includes a plurality of dispensing ports 21. The plurality of dispensing ports 21 are arranged at intervals along the second horizontal direction, and each dispensing port 21 is configured to be controllable to open and close, that is, the plurality of dispensing ports 21 are configured to selectively open or close at least one. In this embodiment, by configuring the dispensing module 20 to include a plurality of dispensing ports 21 arranged at intervals along the second horizontal direction, and configuring the plurality of dispensing ports 21 to be selectively open or close one or more, that is, the plurality of dispensing ports 21 are configured to be selectively open or close along the second horizontal direction, so that the size of the number of dispensing ports 21 in the dispensing module 20 in the open state meets the size requirements of a single imprinting area 41 of the imprinting substrate 40 in the second horizontal direction, improving the dispensing uniformity of the dispensing module 20 and the compatibility of the consumable size of the nanoimprinting device 100, and meeting the size requirements of a plurality of different imprinting substrates 40.

[0061] In a further embodiment, the distance P between two adjacent dispensing ports 21 is any value in the range of 0.01 mm - 2.0 mm, that is, the distance between two adjacent dispensing ports 21 in the dispensing module 20 is configured to be adjustable, and the distance P between the dispensing ports 21 can be 0.01 mm, 0.05 mm, 0.1 mm, 0.5 mm, 1.0 mm, 1.5 mm or 2.0 mm, or can also be any value in the range of 0.01 mm - 2.0 mm. By designing the distance P between two adjacent dispensing ports 21 in the dispensing module 20 as an adjustable value within the range of 0.01 mm - 2.0 mm, the dispensing droplet arrangement density can be flexibly adjusted according to the specific size of the imprinting area 41, improving the spatial adaptability and uniformity of dispensing, avoiding the occurrence of dispensing droplet stacking or lack of glue phenomenon, thereby improving the integrity and accuracy of the imprinted pattern, and further enhancing the versatility and scalability of the nanoimprinting device 100.

[0062] As Figure 1 As shown, in a further embodiment, the imprinting module 30 includes a fixing component 31. The fixing component 31 is arranged to surround the periphery of the imprinting template 32, and the fixing component 31 and the imprinting template 32 are fixedly connected by means of vacuum adsorption. In this embodiment, by fixing the imprinting template 32 to the bottom of the fixing component 31 of the imprinting module 30 by means of vacuum adsorption, while ensuring the positioning accuracy and imprinting stability of the imprinting template 32, the disassembly and assembly operation process of the imprinting template 32 can be simplified, the replacement efficiency of the imprinting template 32 can be improved, and the deformation problem of the imprinting template 32 caused by mechanical fixing can be effectively avoided, improving the imprinting quality and the adaptability of the nanoimprinting device 100.

[0063] In a further embodiment, the lithography template is any one of a standard 6025 lithography template, a standard 6012 template, or a standard 6009 template. In this embodiment, the imprint template 32 is set to be any one of a standard 6025 lithography template, a standard 6012 template, or a standard 6009 template. By means of these lithography templates with industrial standard sizes and high pattern resolutions, the nanoimprinting device 100 realizes compatibility with a variety of mainstream pattern templates, facilitating rapid template replacement and enhancing production flexibility. At the same time, it supports multi-resolution imprinting requirements from the micron to the nanometer scale, significantly enhancing the versatility and industrial adaptability of the nanoimprinting device 100.

[0064] As Figure 1 shown, in a further embodiment, the imprint module 30 further includes a correction component 33. The correction component 33 is sleeved on the periphery of the fixed component 31. The correction component 33 includes a mounting hole 331 that cooperates with the imprint template 32. The mounting hole 331 is engaged with the imprint module 30 to fix the imprint template 32. In this embodiment, through the precise cooperation and engagement of the mounting hole 331 on the correction component 33 with the edge structure of the imprint template 32, position deviation correction and alignment can be automatically completed during the installation process of the imprint template 32, reducing manual adjustment, ensuring that the position and height of the imprint template 32 are consistent, avoiding imprinting deviation, thereby effectively improving the positioning accuracy, installation and disassembly convenience, and repeatable imprinting consistency of the imprint template 32, while enhancing the stability of the structure of the nanoimprinting device 100 and the modular adaptability.

[0065] In a further embodiment, the imprint substrate 40 is fixedly connected to the displacement module 10 in a vacuum adsorption manner. In this embodiment, since vacuum adsorption can provide uniform and strong fixing force, compared with mechanical buckles or magnetic adsorption methods, it can more stably and firmly adsorb the imprint substrate 40 on the displacement module 10, preventing the loosening or offset of the imprint substrate 40 during the imprinting process due to movement or reaction force, ensuring the accurate position of the imprinted pattern. At the same time, vacuum adsorption can effectively avoid stress concentration or scratches caused by mechanical pressing, and can also achieve rapid loading and unloading of the imprint substrate 40, improving production efficiency, and adapting to different sizes and shapes of the imprint substrate 40, improving the versatility of the device.

[0066] As Figure 9 shown, the present invention also provides a control method for a step-and-repeat nanoimprinting device 100, including:

[0067] Step S100: Obtain the effective filling height M of the imprint module 30 in the unit droplet area, the single droplet volume R of the droplet dispensing module 20, the droplet dispensing frequency F, and the spacing P between two adjacent droplet dispensing ports 21. Among them, the effective filling height M is the product of the height H of the imprint module 30 and the duty cycle D of the imprint module 30 in the unit droplet area;

[0068] Step S200: Calculate the displacement rate V of the displacement module 10 in the first horizontal direction according to the following formula,

[0069] ;

[0070] Step S300: Control the displacement module 10 to move to the position where the first area to be imprinted 41 is aligned with the dispensing module 20, and control the dispensing module 20 to dispense glue;

[0071] Step S400: Control the displacement module 10 to move to the position where the first area to be imprinted 41 is aligned with the imprinting module 30 at the displacement rate V, and control the displacement module 10 to move upward for imprinting;

[0072] Step S500: Control the displacement module 10 to return to the position where the next area to be imprinted 41 is aligned with the dispensing module 20, and repeat the dispensing and imprinting steps until all areas to be imprinted 41 are imprinted.

[0073] In this embodiment, first, obtain the effective filling height M of the imprinting module 30 in the unit glue drop area, the single glue drop volume R of the dispensing module 20, the dispensing frequency F, and the distance P between two adjacent dispensing ports 21, and calculate the displacement rate V of the displacement module 10 in the first horizontal direction according to formula (1). Control the displacement module 10 to move to the position where the first area to be imprinted 41 is aligned with the dispensing module 20, and control the dispensing module 20 to dispense glue to fill the corresponding volume of glue drops in the area to be imprinted 41. Then, control the displacement module 10 to move to the position where the first area to be imprinted 41 is aligned with the imprinting module 30 at the displacement rate V, and control the displacement module 10 to move upward for imprinting. After imprinting is completed, control the displacement module 10 to return to the position where the next area to be imprinted 41 is aligned with the dispensing module 20, and repeat the dispensing and imprinting steps until all areas to be imprinted 41 are imprinted.

[0074] In this embodiment, the imprinting substrate 40 includes a plurality of imprinting area groups arranged at intervals in the second horizontal direction, and each imprinting area group includes a plurality of areas to be imprinted 41 arranged at intervals in the first horizontal direction.

[0075] Step S500 further includes:

[0076] Step S510: Determine whether all areas to be imprinted 41 in the current imprinting area group are imprinted. If so, enter Step S520; otherwise, enter Step S530;

[0077] Step S520: Control the displacement module 10 to move in the second horizontal direction to the position where one area to be imprinted 41 in the next imprinting area group is aligned with the dispensing module 20, and repeat the dispensing and imprinting steps until all areas to be imprinted 41 in the current imprinting area group are imprinted;

[0078] Step S540: determining whether all to-be-imprinted areas 41 in all imprinting area groups have completed imprinting, if so, ending the process, otherwise returning to step S520;

[0079] Step S530: Continue to control the displacement module 10 to drive the imprinting substrate 40 to move to the position where the next area to be imprinted 41 and the glue dispensing module 20 are aligned, and repeat the glue dispensing and imprinting steps until all the areas to be imprinted 41 of the current imprinting area group are imprinted.

[0080] In this embodiment, after all the to-be-imprinted areas 41 of the imprinting area group of the imprinting substrate 40 are imprinted, the control module 50 controls the displacement module 10 to move along the second horizontal direction to a position corresponding to a to-be-imprinted area 41 in the next imprinting area group and the glue dripping module 20, and sequentially performs glue dripping and imprinting until all the to-be-imprinted areas 41 of the corresponding imprinting area group are completed with glue dripping and imprinting, and continues with glue dripping and imprinting of the next imprinting area group until all the to-be-imprinted areas 41 of all the imprinting area groups are completed with glue dripping and imprinting, thereby preventing omissions and ensuring that all the to-be-imprinted areas 41 of the imprinting substrate 40 are completed with imprinting.

[0081] The present invention also provides a control system for a step-and-repeat nanoimprinting device 100, comprising a memory and a processor, wherein a control program is stored in the memory, and when the control program is executed by the processor, it is used to implement any of the above control methods for the step-and-repeat nanoimprinting device 100. The control method will not be described in detail here.

[0082] In a specific embodiment, a computing program is stored in the memory, and the computing program is used to implement the above-mentioned control method when it is executed by the processor. The processor can be a central processing unit (CPU), or a digital processing unit, etc. The processor sends and receives data through a communication interface. The memory is used to store the program executed by the processor. The memory is any medium that can be used to carry or store the desired program code in the form of instructions or data structures and can be accessed by a computer, and can also be a combination of multiple memories. The above-mentioned computing program can be downloaded from a computer-readable storage medium to a corresponding computing / processing device or downloaded to a computer or an external storage device via a network (such as the Internet, a local area network, a wide area network and / or a wireless network).

[0083] For the purposes of the description of this embodiment, a "computer-readable medium" can be any device that can contain, store, communicate, propagate, or transport a program for use by or in connection with an instruction execution system, apparatus, or device. More specific examples (a non-exhaustive list) of the computer-readable medium include the following: an electrical connection (electronic device) having one or more wirings, a portable computer diskette (magnetic device), a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber device, and a portable compact disc read-only memory (CDROM). Additionally, the computer-readable medium can even be paper or other suitable media on which the program can be printed, as the program can be obtained electronically, for example, by optically scanning the paper or other media, followed by editing, interpretation, or, if necessary, other suitable processing, and then storing it in a computer memory.

[0084] The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope described in this specification.

[0085] The above-described embodiments merely represent several implementation manners of the present invention, and their descriptions are relatively specific and detailed. However, they should not be construed as limiting the scope of the invention patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several modifications and improvements can be made, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the present invention patent shall be subject to the appended claims.

Claims

1. A step-and-repeat nanoimprinting device for realizing dispensing and imprinting of an imprinting substrate, wherein the imprinting substrate includes a plurality of imprinting regions arranged in an array, and is characterized in that The nanoimprinting device includes a displacement module, a dispensing module and an imprinting module which are located above the displacement module and arranged at intervals in a first horizontal direction. The top of the displacement module is used to place the imprinting substrate. The imprinting module includes an imprinting template matching the area to be imprinted. The imprinting template is a photolithography template. The dispensing module includes a plurality of dispensing ports which are arranged at intervals in a second horizontal direction. Each of the dispensing ports is configured to be controllable to open and close. The displacement module is configured to be controlled to reciprocate between the dispensing module and the imprinting module in the first horizontal direction or move in the second horizontal direction. Each reciprocating motion is used to achieve dispensing and imprinting of one area to be imprinted. The second horizontal direction is perpendicular to the first horizontal direction. The displacement rate V of the displacement module in the first horizontal direction is calculated according to the following formula: ； wherein, R is the volume of a single dispensing droplet of the dispensing module, F is the dispensing frequency, P is the distance between two adjacent dispensing ports, and the effective filling height M is the product of the height H of the imprinting module and the duty cycle D of the imprinting module in the unit glue droplet area.

2. The nanoimprinting device according to claim 1, wherein, The imprinting module further includes: a fixing component which is sleeved on the periphery of the imprinting template. The fixing component and the imprinting template are fixedly connected by means of vacuum adsorption.

3. The nanoimprinting device according to claim 2, wherein the photolithography template is any one of a standard 6025 photolithography template, a standard 6012 template or a standard 6009 template.

4. The nanoimprinting device according to claim 3, characterized in that, The imprinting module further includes: a correction component which is sleeved on the periphery of the fixing component. The correction component includes a mounting hole which cooperates with the imprinting template. The mounting hole is engaged with the imprinting module to fix the imprinting template.

5. The nanoimprinting device according to claim 4, wherein the distance P between two adjacent dispensing ports is any value in the range of 0.01 mm to 2.0 mm.

6. The nanoimprinting device according to any one of claims 1-5, wherein the imprinting substrate is configured to be fixedly connected to the displacement module by means of vacuum adsorption.

7. A control method for a step-and-repeat nanoimprinting device according to any one of claims 1-6, characterized in that, including: obtaining the effective filling height M of the imprinting module in the unit glue droplet area, the volume R of a single dispensing droplet of the dispensing module, the dispensing frequency F and the distance P between two adjacent dispensing ports. Wherein, the effective filling height M is the product of the height H of the imprinting module and the duty cycle D of the imprinting module in the unit glue droplet area; calculating the displacement rate V of the displacement module in the first horizontal direction according to the following formula, ； controlling the displacement module to move to the position aligned with the dispensing module for the first area to be imprinted, and controlling the dispensing module to dispense glue; controlling the displacement module to move to the position aligned with the imprinting module for the first area to be imprinted at the displacement rate V, and controlling the displacement module to move upward for imprinting; controlling the displacement module to return to the position aligned with the dispensing module for the next area to be imprinted, and repeating the dispensing and imprinting steps until imprinting of all the areas to be imprinted is completed.

8. A control system for a step-and-repeat nanoimprinting device, characterized in that, It includes a memory and a processor, and a control program is stored in the memory. When the control program is executed by the processor, it is used to implement the control method of the step-and-repeat nanoimprinting device described in claim 7.

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