Microminiature double-electric-layer capacitor high-uniformity electrode coating composite device

By designing a multi-axis linkage-controlled micro-electric double-layer capacitor electrode coating composite device, the problem that traditional devices are difficult to adapt to the complex curved surface or porous structure of micro-electrodes is solved, and electrode coating with high uniformity and high precision is achieved, which significantly improves the stability of the electrode interface.

CN120190067APending Publication Date: 2025-06-24ZHEJIANG THREETE ELECTRONICS TECH
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Patent Information

Application Number
CN202510369395.0
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-03-27
Publication Date
2025-06-24

AI Technical Summary

Technical Problem

Traditional electric double layer capacitor electrode coating devices are difficult to adapt to the full coverage needs of complex curved surfaces or porous structures of micro-electrodes, resulting in significant deviations in the coating thickness in the edge area, multi-layer composite coating can easily cause interlayer dislocation, and high-viscosity slurry spraying is prone to poor atomization due to uneven pressure, resulting in particle agglomeration or pinhole defects.

Method used

A micro-scale electric double layer capacitor high uniformity electrode coating composite device is designed, and multi-axis linkage control of servo steering motor, rotating servo motor and flip motor is used to realize the ±180° space angle adjustment of the spray head and the 0.1μm level positioning accuracy. Combining industrial cameras and adaptive algorithms, real-time monitoring of coating thickness and uniformity, and dynamically adjusting spray parameters.

Benefits of technology

The coating thickness deviation of complex curved substrates is controlled within ±1.2μm, reducing the multi-layer coating misalignment rate by 92%, and reducing the incidence of pinhole defects from 12.3% to 0.8%, significantly improving the stability of the electrode interface.

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Abstract

The invention relates to the technical field of capacitor processing, and discloses a microminiature double-electric-layer capacitor high-uniformity electrode coating composite device which is characterized in that a rack is externally provided with a shell, the bottom of the rack is provided with universal wheels and lifting foot supports, and the device is convenient to move and fix; the turntable is driven by a servo motor, and bears and rotates a base material; the coating top seat is mounted on a machine seat on the rack through a steering arm, so that horizontal multi-degree-of-freedom adjustment is realized; the position angle of the spraying head is adjusted through a servo motor to adapt to a complex curved surface; a lateral industrial camera monitors coating parameters in real time, and spraying is adjusted in a linkage mode; and the integrated controller coordinates all the motors to act, so that high-precision coating and slurry adaptation are realized. Through multi-axis linkage control of a servo steering motor, a rotating servo motor and an overturning motor, + / -180-degree space angle adjustment and 0.1-micron-level positioning precision of a spraying head are achieved, the 360-degree continuous rotating function of a rotating disc is matched, the coating thickness deviation of a complex curved surface base material is controlled within + / -1.2 microns, and the problem that the edge of a microporous electrode is not completely coated is effectively solved.
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Description

Technical Field

[0001] The present invention relates to the technical field of capacitor processing, and specifically to a high-uniformity electrode coating composite device for micro-sized electric double-layer capacitors. Background Art

[0002] Due to their high power density and long cycle life, electric double-layer capacitors are widely used in fields such as microelectronic devices and energy storage systems. The core of their performance depends on the uniformity and consistency of electrode coating. Traditional coating devices mostly adopt a single-nozzle fixed design and achieve coating by linearly moving the substrate.

[0003] The following limitations exist: Firstly, the spraying angle and position are fixed, making it difficult to meet the full-coverage requirements of the complex curved surfaces or porous structures of micro-sized electrodes, resulting in significant coating thickness deviations in the edge regions. Secondly, during multi-layer composite coating, multiple positioning is required, and the cumulative error is likely to cause interlayer misalignment, affecting the electrode conductivity and capacitance characteristics. Thirdly, when spraying high-viscosity slurries, poor atomization is likely to occur due to uneven pressure, forming particle agglomeration or pinhole defects, reducing the electrode interface stability. In addition, existing equipment lacks a dynamic regulation module and cannot adapt to the changes in slurry rheological properties and process parameters in real time, further restricting the improvement of coating efficiency and yield.

[0004] Therefore, based on the above technical problems, it is necessary for those skilled in the art to develop a high-uniformity electrode coating composite device for micro-sized electric double-layer capacitors. Summary of the Invention

[0005] The purpose of the present invention is to provide a high-uniformity electrode coating composite device for micro-sized electric double-layer capacitors to solve the problems raised in the above background art.

[0006] To achieve the above purpose, the present invention provides the following technical solutions:

[0007] A technical solution for a high-uniformity electrode coating composite device for micro-sized electric double-layer capacitors, including: a frame, an outer frame shell is arranged outside the frame, and universal wheels and lifting footrests are provided at the bottom of the frame for the movement and fixation of the overall device;

[0008] A turntable, driven by a turntable servo motor, is arranged on the frame and is used to carry and rotate the substrate to be coated;

[0009] A coating top seat is installed on the machine base through a steering arm, and the machine base is installed on the frame to achieve multi-degree-of-freedom adjustment of the coating head in the horizontal direction;

[0010] A spray head is installed on the spray seat, and the steering arm is driven by a servo steering motor to adjust the spraying position, and the spraying angle is adjusted by a rotary servo motor and a flipping motor to adapt to the complex curved surfaces or porous structures of micro-sized electrodes;

[0011] An industrial camera, which is arranged on the side of the spraying head, is used to monitor the coating thickness and uniformity in real time, and communicates with the controller to dynamically adjust the spraying parameters;

[0012] A controller, which is integrated on the outer shell of the frame, is used to coordinate the actions of the turntable servo motor, the servo steering motor, the lifting electric cylinder and the rotating servo motor, so as to achieve high-precision positioning of multi-layer composite coating and adapt to the rheological characteristics of the slurry.

[0013] As a preferred technical solution, an array hole structure is arranged on the spraying head to adapt to electrode slurries with different viscosities.

[0014] As a preferred technical solution, vacuum adsorption grooves are arranged on the surface of the turntable to fix flexible or ultra-thin substrates and prevent substrate displacement during the coating process.

[0015] As a preferred technical solution, the steering arm is connected to the coating top seat, and the steering arm is installed at the output end of the servo steering motor. A joint is arranged at the tail of the servo steering motor. The output end of the lifting electric cylinder is connected to the rotating servo motor. The output end of the rotating servo motor is connected to an L-shaped frame. The L-shaped frame is connected to the flipping motor. The output end of the flipping motor is connected with a T-shaped block. The tail of the T-shaped block is connected to the spraying seat.

[0016] As a preferred technical solution, the controller is built-in with an adaptive algorithm, and according to the coating image data collected by the industrial camera, it can adjust the spraying pressure, the moving speed of the nozzle and the slurry supply amount in real time to eliminate particle agglomeration or pinhole defects.

[0017] As a preferred technical solution, a maintenance door panel is arranged on the outer side of the frame shell and is connected to the frame shell through a hinge. A pull handle is installed on the maintenance door panel to facilitate the maintenance of internal components.

[0018] As a preferred technical solution, the corners of the frame are connected by reinforcing angle seats, and a cabinet is arranged inside the frame for installing components.

[0019] As a preferred technical solution, an anti-sticking coating is arranged on the surface of the spraying seat, and a heating module is integrated inside to keep the slurry temperature constant and prevent the high-viscosity slurry from curing and blocking the nozzle.

[0020] Compared with the prior art, the beneficial effects of the present invention are:

[0021] The present invention relates to a high-uniformity electrode coating composite device for a micro double-layer capacitor. Through the multi-axis linkage control of a servo steering motor, a rotary servo motor, and a flipping motor, the spraying head can be adjusted in a spatial angle of ±180° with a positioning accuracy of 0.1 μm. Combining with the 360° continuous rotation function of the turntable, the coating thickness deviation of complex curved substrates can be controlled within ±1.2 μm, effectively solving the problem of incomplete coating at the edges of microporous electrodes.

[0022] The industrial camera is equipped with a 50-μm macro lens and combines an adaptive algorithm to perform real-time compensation on the spraying trajectory, with a dynamic adjustment parameter response time < 50 ms. Experimental data shows that this technology reduces the multi-layer coating misalignment rate by 92% and the incidence rate of pinhole defects from 12.3% to 0.8%, significantly improving the stability of the electrode interface.

[0023] The array hole nozzle adopts a gradient aperture design (adjustable from 50 to 200 μm), and with a temperature control accuracy of ±0.5 °C for the internal heating module, the slurry with a viscosity range of 20 - 5000 mPa·s can maintain stable rheological properties, and the measured CV value of the coating uniformity of different slurries ≤ 3.5%.

[0024] The vacuum adsorption system on the turntable surface provides an adjustable negative pressure of 0 - 85 kPa. After testing, it can firmly fix a flexible substrate with a thickness of 10-μm level, and the displacement during the coating process < 5 μm, meeting the requirements for manufacturing ultra-thin electrodes.

[0025] The anti-sticking spraying component connected by a quick connector can complete the replacement of the nozzle within 120 seconds. The heating module adopts a plug-and-play structure, with a 70% improvement in maintenance efficiency compared to traditional equipment, and the equipment operation rate is increased to 98.6%. Description of the Drawings

[0026] Figure 1 It is a side schematic view of a high-uniformity electrode coating composite device for a micro double-layer capacitor;

[0027] Figure 2 It is a three-dimensional schematic view of a high-uniformity electrode coating composite device for a micro double-layer capacitor;

[0028] Figure 3 It is a three-dimensional internal structure schematic view of a high-uniformity electrode coating composite device for a micro double-layer capacitor;

[0029] Figure 4 It is a side internal structure schematic view of a high-uniformity electrode coating composite device for a micro double-layer capacitor.

[0030] In the attached drawing reference numerals: 11, frame; 12, cabinet; 13, frame housing; 14, maintenance door panel; 141, pull handle; 15, hinge; 16, controller; 17, caster; 18, lifting foot support; 19, reinforcing corner seat; 21, turntable servo motor; 22, turntable; 23, machine base; 24, servo steering motor; 241, joint; 25, steering arm; 26, coating top seat; 27, lifting electric cylinder; 28, rotary servo motor; 29, L-shaped frame; 30, flipping motor; 31, T-shaped block; 32, spraying seat; 33, spray head; 34, industrial camera. Detailed implementation manners

[0031] The features and exemplary embodiments of various aspects of the present invention will be described in detail below. For the purpose of making the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the attached drawings and specific embodiments. For those skilled in the art, the present invention can be implemented without some of these specific details. The following description of the embodiments is only to provide a better understanding of the present invention by showing examples of the present invention.

[0032] As Figure 1 , Figure 2 , Figure 3 and Figure 4 shown, the present invention provides a technical solution for a high-uniformity electrode coating composite device for a micro-miniature electric double-layer capacitor: including a frame 11, a frame housing 13 is arranged outside the frame, and a controller 16 is integrated on the housing for coordinating the operation of the entire device. Caster 17 and lifting foot support 18 are provided at the bottom of the frame to facilitate the movement and fixation of the device.

[0033] The turntable 22 is driven by a turntable servo motor 21 and is arranged on the frame for carrying and rotating the substrate to be coated. Vacuum adsorption grooves are provided on the surface of the turntable for fixing flexible or ultra-thin substrates to prevent substrate displacement during the coating process.

[0034] The coating top seat 26 is installed on the machine base 23 through the steering arm 25, and the machine base is installed on the frame to realize multi-degree-of-freedom adjustment of the coating head in the horizontal direction.

[0035] The spray head 33 is installed on the spraying seat 32, and the spraying position is adjusted by driving the steering arm 25 through a servo steering motor 24, and the spraying angle is adjusted by a rotary servo motor 28 and a flipping motor 30 to adapt to the complex curved surface or porous structure of the micro-miniature electrode.

[0036] The industrial camera 34 is arranged on the side of the spray head for real-time monitoring of the coating thickness and uniformity, and communicates with the controller to dynamically adjust the spraying parameters.

[0037] The controller 16 is built - in with an adaptive algorithm, which adjusts the spraying pressure, the moving speed of the nozzle, and the slurry supply amount in real - time according to the coating image data collected by the industrial camera to eliminate particle agglomeration or pinhole defects.

[0038] The spraying head 33 is provided with an array - hole structure to adapt to electrode slurries of different viscosities. The surface of the spraying seat is provided with an anti - sticking coating, and a heating module is integrated inside to maintain the constant temperature of the slurry and prevent the high - viscosity slurry from curing and blocking the nozzle.

[0039] An inspection door panel 14 is provided on the outer side of the frame shell 13, which is connected to the frame shell through a hinge 15. A pull - handle 141 is installed on the inspection door panel to facilitate the maintenance of internal components. The frame corners are connected by reinforcing angle seats 19, and a cabinet 12 is arranged inside the frame for installing components.

[0040] The anti - sticking spraying assembly connected by quick connectors can complete the nozzle replacement within 120 seconds. The heating module adopts a plug - and - play structure, which improves the maintenance efficiency by 70% compared with traditional equipment, and increases the equipment operation rate to 98.6%.

[0041] Experimental data shows that this technology reduces the misalignment rate of multi - layer coating by 92%, and the incidence rate of pinhole defects drops from 12.3% to 0.8%, significantly improving the stability of the electrode interface. The array - hole nozzle adopts a gradient aperture design (adjustable from 50 - 200μm), and with the temperature control accuracy of ±0.5℃ of the internal heating module, the slurry in the viscosity range of 20 - 5000mPa·s maintains stable rheological properties, and the measured CV value of the coating uniformity of different slurries is ≤3.5%.

[0042] Through the above design, the micro - sized double - electric - layer capacitor high - uniformity electrode coating composite device of the present invention can achieve high - precision and high - uniformity electrode coating, meeting the manufacturing requirements of micro - sized double - electric - layer capacitors.

[0043] According to the above - mentioned scheme, in this embodiment, the substrate to be coated (such as a 10 - μm - thick flexible graphene film) is placed on the surface of the turntable 22, the vacuum adsorption system (the negative - pressure pipeline is not shown in the figure) is started, and the negative pressure is adjusted to 50 kPa to ensure that the substrate is flat and fits into the adsorption groove of the turntable 22. The rotation speed of the turntable is set to 30 r / min through the touch screen of the controller 16, and the motion mode corresponding to the curvature of the substrate (such as the plane / curved - surface option) is selected.

[0044] The servo steering motor 24 drives the steering arm 25 to rotate horizontally to a preset angle (such as 45° with the central axis of the turntable), the lifting electric cylinder 27 raises the spraying head 33 to a height of 5 mm from the substrate surface. The rotating servo motor 28 drives the L - shaped frame 29 to rotate 120° around the vertical axis, and the flipping motor 30 adjusts the pitching angle of the spraying seat 32 to - 15° through the T - shaped block 31, so that the axis of the array holes of the spraying head 33 is perpendicular to the local curved surface of the substrate (attachedFigure 3 as shown). The positioning accuracy of this process reaches ±0.1 μm, and the time consumption is < 3 seconds.

[0045] Inject the activated carbon-PVDF slurry with a viscosity of 3000 mPa·s into the material cavity of the spraying head 33, start the internal heating module (set temperature 60°C ± 0.5°C), and preheat for 5 min to stabilize the slurry viscosity at 2800 ± 50 mPa·s. Select the spraying mode with a pore size gradient of "150 μm main hole + 50 μm auxiliary hole" through the controller 16, and set the initial spraying pressure to 0.25 MPa.

[0046] The turntable 22 rotates at a constant angular velocity, and the spraying head 33 moves along the preset trajectory and starts spraying. The industrial camera 34 collects the coating images at a frequency of 200 frames per second, and identifies the thickness difference through gray-scale analysis. When the thickness deviation in the edge area is detected to exceed ±1 μm, the adaptive algorithm triggers the following adjustments within 50 ms:

[0047] The spraying pressure is increased to 0.28 MPa to compensate for the insufficient slurry diffusion at the edge

[0048] The tilting motor 30 finely adjusts the pitching angle to -12° to optimize the atomization angle

[0049] The rotation speed of the turntable is reduced to 28 r / min to extend the local spraying time

[0050] After adjustment, the CV value of the coating thickness is reduced from the initial 4.2% to 2.8% (measured data).

[0051] After completing the first layer coating, the controller 16 records the current coordinates and drives the spraying head 33 to reset. The turntable 22 rotates 180° to enter the second working station, and the industrial camera 34 realizes the layer-to-layer positioning at the ±2 μm level through feature point matching. When applying the second layer, the spraying head switches to the 80 μm pore size mode, and the pressure is adjusted to 0.18 MPa to ensure that the slurry penetrates into the pores of the first layer. After three coatings, the interlayer misalignment amount is < 3 μm, and the deviation of the electrode surface density is ≤ 1.5%.

[0052] When switching the slurry type, pull the handle 141 to open the maintenance door panel 14, and disassemble the quick connector of the spraying seat 32. Immerse the clogged spraying head 33 in the solvent for cleaning, and at the same time replace the preheated spare spray head (the internal heating module maintains 60°C). The whole process takes < 2 minutes, and the maintenance efficiency is increased by 70% compared with the traditional equipment.

[0053] Perform coating tests on 100 curved substrates with a diameter of 10 mm:

[0054] Single-layer thickness uniformity: average thickness 52.3 μm, standard deviation 1.8 μm (CV = 3.4%)

[0055] Three-layer misalignment rate: maximum misalignment amount is 4.1 μm, and the qualified rate is 98.6%

[0056] Pinhole defect: 0.7 per square millimeter, a 94% decrease compared to the traditional process

[0057] Data shows that the present invention effectively solves the problems of incomplete microporous coating and interlayer misalignment, meeting the requirements for manufacturing electrodes of micro-sized electric double-layer capacitors.

[0058] The working principle and usage process of the present invention: After assembling the components of this solution in sequence, work according to the above-mentioned embodiments in sequence according to actual needs, and all working steps can be completed.

[0059] As described above, only the preferred specific embodiments of the present invention are provided, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution and inventive concept of the present invention, makes equivalent substitutions or changes, and should be covered within the protection scope of the present invention.

[0060] In the description of the present invention, it should be understood that the orientation or positional relationships indicated by the terms "coaxial", "bottom", "one end", "top", "middle", "the other end", "upper", "one side", "top", "inner", "front", "center", "both ends", etc. are based on the orientation or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention.

[0061] In the present invention, unless otherwise clearly defined and limited, the terms "installation", "setting", "connection", "fixation", "swivel connection", etc. should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal communication of two elements or the interaction relationship between two elements. Unless otherwise clearly defined, for those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0062] According to the embodiments of the present invention as described above, these embodiments do not exhaustively describe all the details and do not limit the invention to only the specific embodiments. Obviously, many modifications and variations can be made based on the above description. The present specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present invention, so that those skilled in the art can make good use of the present invention and its modified use. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A high uniformity electrode coating composite device for a micro double-layer capacitor, characterized in that: include: A frame (11), wherein a frame housing (13) is disposed outside the frame (11), and a universal wheel (17) and a lifting foot support (18) are disposed at the bottom of the frame (11) for moving and fixing the entire device; A turntable (22), driven by a turntable servo motor (21), is disposed on the frame (11) and is used to carry and rotate the substrate to be coated; A coating head seat (26) is mounted on a machine base (23) via a steering arm (25), and the machine base (23) is mounted on a machine frame (11), so as to achieve multi-degree-of-freedom adjustment of the coating head in the horizontal direction; The spray head (33) is mounted on the spray seat (32), and the spray position is adjusted by driving the steering arm (25) through the servo steering motor (24), and the spray angle is adjusted by rotating the servo motor (28) and the flip motor (30) to adapt to the complex curved surface or porous structure of the micro-electrode; An industrial camera (34) is arranged on the side of the spray head (33) and is used to monitor the coating thickness and uniformity in real time and communicate with the controller (16) to dynamically adjust the spraying parameters; The controller (16) is integrated on the frame housing (13) and is used to coordinate the actions of the turntable servo motor (21), the servo steering motor (24), the lifting electric cylinder (27) and the rotating servo motor (28) to achieve high-precision positioning of multi-layer composite coating and adaptation of slurry rheological properties.

2. A high uniformity electrode coating composite device for a micro-sized double-layer capacitor according to claim 1, characterized in that: The spray head (33) is provided with an array hole structure to adapt to electrode slurries of different viscosities.

3. A high uniformity electrode coating composite device for a micro-sized double-layer capacitor according to claim 1, characterized in that: The surface of the turntable (22) is provided with a vacuum adsorption groove, which is used to fix the flexible or ultra-thin substrate to prevent the substrate from shifting during the coating process.

4. A high uniformity electrode coating composite device for a micro-sized double-layer capacitor according to claim 3, characterized in that: The steering arm (25) is connected to the coating top seat (26), and the steering arm (25) is installed at the output end of the servo steering motor (24). The tail of the servo steering motor (24) is provided with a joint (241). The output end of the lifting electric cylinder (27) is connected to the rotating servo motor (28). The output end of the rotating servo motor (28) is connected to the L-shaped frame (29). The L-shaped frame (29) is connected to the flip motor (30). The output end of the flip motor (30) is connected to a T-shaped block (31). The tail of the T-shaped block (31) is connected to the spraying seat (32).

5. A high uniformity electrode coating composite device for a micro-sized double-layer capacitor according to claim 1, characterized in that: The controller (16) has a built-in adaptive algorithm, and adjusts the spraying pressure, the nozzle movement speed and the slurry supply amount in real time according to the coating image data collected by the industrial camera (34) to eliminate particle agglomeration or pinhole defects.

6. A high uniformity electrode coating composite device for a micro-sized double-layer capacitor according to claim 1, characterized in that: An inspection door panel (14) is provided on the outside of the frame housing (13) and is connected to the frame housing (13) via a hinge (15). A handle (141) is installed on the inspection door panel (14) to facilitate maintenance of internal components.

7. A high uniformity electrode coating composite device for a micro-sized double-layer capacitor according to claim 1, characterized in that: The corners of the frame (11) are connected via reinforced corner seats (19), and a cabinet (12) is arranged inside the frame (11) for installing components.

8. A high uniformity electrode coating composite device for a micro-sized double-layer capacitor according to claim 1, characterized in that: The surface of the spray seat (32) is provided with an anti-stick coating, and a heating module is integrated inside to maintain a constant slurry temperature and prevent high-viscosity slurry from solidifying and clogging the spray head.