Intelligent positioning welding device for quartz boat assembly

Abstract

The present invention discloses an intelligent positioning welding device for quartz boat assembly, comprising a base, a clamping component 1, a clamping component 2 and a welding mechanism, wherein the clamping component 1 comprises a slide 1, a support column and a clamping plate mechanism, and the clamping plate mechanism comprises a fixed plate, a telescopic rod 1, a telescopic rod 2, a clamping block 1 and a clamping block 2, wherein the clamping block 1 and the clamping block 2 are arranged in a cross shape in the clamping component 1 to clamp the test piece and limit the position of the test piece on four sides, so that the test piece is always located at the center position of the clamping plate mechanism, and the positions of the clamping block 1 and the clamping block 2 can be changed, thereby enabling the clamping plate mechanism to clamp test pieces of different specifications, and the clamping component 2 is provided to firmly clamp slot rods of various specifications, and the position of the slot rods can be changed after clamping so that the slot rods and the test piece are accurately positioned and connected, thereby enabling accurate positioning and welding of quartz boats of various specifications, effectively improving the welding quality and welding efficiency of the quartz boats.

Description

Technical Field

[0001] The invention relates to the technical field of quartz boat assembly and welding, in particular to an intelligent positioning welding device for quartz boat assembly. Background Art

[0002] A quartz boat is a container or carrier made of high-purity quartz material with excellent optical properties, chemical stability, and electrical properties. In the semiconductor manufacturing process, the quartz boat serves as a container for carrying silicon wafers. It can remain stable in a high-temperature environment, ensuring that the silicon wafers will not be contaminated or deformed.

[0003] A quartz boat is usually formed by welding a test piece and multiple slot rods. Before welding, the test piece and the slot rods usually need to be accurately positioned and falsely connected to ensure welding accuracy and product quality. The false connection accuracy and positioning accuracy have a great impact on the welding quality of the quartz boat. At present, the positioning of the test piece and the slot rod is usually clamped and positioned by a clamping mechanism. However, the existing clamping mechanism can generally only fix slot rods and test pieces of the same specification. There are many types of quartz boats, which are rectangular and cylindrical in shape. The corresponding test pieces may be rectangular or circular in shape. The existing clamping mechanism cannot firmly clamp test pieces of different specifications, and the positioning with the slot rods is also inaccurate, which will affect the welding quality of the quartz boat.

[0004] Therefore, it is necessary to provide an intelligent positioning welding device for quartz boat assembly to solve the problems raised in the above background technology. Summary of the Invention

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a quartz boat assembly intelligent positioning welding device, comprising a base, a clamping component 1, a clamping component 2 and a welding mechanism, wherein a slide groove 1 is provided on the base, two clamping components 1 driven by a coaxial counter-screw are symmetrically slidably arranged in the slide groove 1, a plurality of groups of slide grooves 2 are provided on the base in a direction perpendicular to the slide groove 1, two slide grooves 2 in the plurality of groups of slide grooves 2 are symmetrically arranged relative to the slide groove 1, and the number of groups of slide grooves 2 is a multiple of 4, a clamping component 2 is slidably arranged in each group of slide grooves 2, a sliding frame is fixedly provided on the base, and a welding mechanism is slidably provided on the sliding frame;

[0006] The clamping assembly includes a slide seat, a support column and a clamping mechanism, wherein the slide seat is slidably set in the slide groove, a support column is fixedly set on the slide seat, two clamping mechanisms are configured, and the two clamping mechanisms are slidably connected, and one of the clamping mechanisms is fixedly connected to the support column.

[0007] Further, as a preference, the clamping mechanism includes a fixed plate, telescopic rod 1, telescopic rod 2, clamping block 1 and clamping block 2, wherein the fixed plate is symmetrically fixed with telescopic rod 1 along the vertical direction, the fixed plate is symmetrically fixed with telescopic rod 2 along the horizontal direction, the output end of the telescopic rod 1 is fixedly provided with clamping block 1, and the output end of the telescopic rod 2 is rotatably provided with clamping block 2.

[0008] Furthermore, as a preference, a receiving plate is slidably provided between the two clamping blocks 1 at the bottom and the two clamping blocks 2 at opposite positions in the two clamping plate mechanisms and connected by a telescopic rod 3;

[0009] A support plate is fixedly provided at the output end of the telescopic rod 2, and a telescopic rod 4 is hinged between the support plate and the clamping block 2.

[0010] Furthermore, preferably, a pressure plate is fixedly provided on one of the two clamping blocks located at the top of the two clamping plate mechanisms, an extension plate is slidably provided in the pressure plate, and the lower bottom surfaces of the pressure plate and the extension plate and the upper top surface of the clamping block are all in the same plane.

[0011] Further, as a preference, the clamping assembly 2 includes a slide 2, a telescopic rod 5 and a clamping groove mechanism, wherein the slide 2 is slidably arranged in the slide 2, the telescopic rod 5 is fixedly arranged on the slide 2, the output end of the telescopic rod 5 is fixedly arranged with an L-shaped support rod, and the output end of the L-shaped support rod is fixedly arranged with a clamping groove mechanism.

[0012] Further, as a preference, the clamping groove mechanism includes a clamping seat, a clamping bar and a deflection block, wherein the clamping seat is fixedly arranged at the output end of the L-shaped support rod, an arc-shaped receiving groove is opened in the clamping seat, a plurality of clamping bars are arranged in a circular sliding manner in the receiving groove, a deflection block is also symmetrically rotated on the clamping seat, and a telescopic rod six is hinged between the deflection block and the clamping seat.

[0013] Furthermore, as a preferred embodiment, a driving disk is rotatably provided in the clamping seat, and a plurality of arc-shaped driving grooves are provided on the driving disk;

[0014] Guide blocks are fixedly provided at both ends of the clamping bar. The guide blocks are clamped into the arc-shaped driving groove and are slidably provided along the arc-shaped driving groove.

[0015] Furthermore, preferably, an arc-shaped hydraulic cavity is provided on the driving disk, an arc-shaped hydraulic rod is fixedly provided in the clamp seat, the arc-shaped hydraulic rod slides sealingly along the arc-shaped hydraulic cavity, and a cavity is provided in the arc-shaped hydraulic rod, and the cavity is connected to an external hydraulic driving device.

[0016] Compared with the prior art, the present invention provides an intelligent positioning welding device for quartz boat assembly, which has the following beneficial effects:

[0017] In the present invention, the test piece is clamped by clamping blocks 1 and 2 arranged in a cross shape in the clamping component 1 and the position of the test piece is restricted on four sides, so that the test piece is always located at the center position of the clamping plate mechanism, thereby facilitating the positioning of the slot rod and the test piece, and the positions of clamping blocks 1 and 2 can be changed, so that the clamping plate mechanism can clamp test pieces of different specifications. At the same time, the clamping component 2 is provided to firmly clamp slot rods of various specifications, and the position of the slot rod can be changed after clamping so that the slot rod and the test piece are accurately positioned and connected, so that quartz boats of various specifications can be accurately positioned and welded, effectively improving the welding quality and welding efficiency of the quartz boats. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0019] Figure 2 Schematic diagram of the structure of the clamping component 1 in the present invention;

[0020] Figure 3 Schematic diagram of the structure of the splint mechanism of the present invention;

[0021] Figure 4 Schematic diagram of the structure of the clamping block 1 and the pressing plate in the present invention;

[0022] Figure 5 Schematic diagram of the structure of the clamping component 2 in the present invention;

[0023] Figure 6 for Figure 5 A magnified schematic diagram of the structure of part A in the middle;

[0024] In the figure: 1. base; 11. slide 1; 12. slide 2; 13. sliding frame; 2. clamping assembly 1; 21. slide seat 1; 22. support column; 23. clamping plate mechanism; 231. fixed plate; 232. telescopic rod 1; 233. telescopic rod 2; 234. clamping block 1; 235. clamping block 2; 236. receiving plate; 237. telescopic rod 3; 238. support plate; 239. telescopic rod 4; 24. pressure plate; 241. extension plate; 3. clamping assembly 2; 31. slide seat 2; 32. telescopic rod 5; 33. clamping groove mechanism; 331. clamping seat; 332. clamping strip; 333. deflection block; 334. telescopic rod 6; 335. drive plate; 336. arc-shaped drive groove; 337. arc-shaped hydraulic chamber; 338. arc-shaped hydraulic rod; 34. L-shaped support rod; 4. welding mechanism. DETAILED DESCRIPTION

[0025] See also Figures 1 to 6In an embodiment of the present invention, a quartz boat assembly intelligent positioning welding device includes a base 1, a clamping component 2, a clamping component 3 and a welding mechanism 4, wherein the base 1 is provided with a slide groove 11, and two clamping components 2 driven by a coaxial counter-screw are symmetrically slidably arranged in the slide groove 11, and multiple groups of slide grooves 12 are provided on the base 1 along a direction perpendicular to the slide groove 11, and two slide grooves 12 in the multiple groups of the slide grooves 12 are symmetrically arranged relative to the slide groove 11, and the number of groups of the slide grooves 12 is a multiple of 4, and a clamping component 3 is slidably arranged in each group of the slide grooves 12, and a sliding frame 13 is fixedly provided on the base 1, and a welding mechanism 4 is slidably provided on the sliding frame 13;

[0026] The clamping assembly 2 includes a slide 21, a support column 22, and a clamping mechanism 23, wherein the slide 21 is slidably disposed in the slide groove 11, the support column 22 is fixedly disposed on the slide 21, and two clamping mechanisms 23 are provided, and the two clamping mechanisms 23 are slidably connected, and one of the clamping mechanisms 23 is fixedly connected to the support column 22;

[0027] The clamping mechanism 23 includes a fixed plate 231, a telescopic rod 1 232, a telescopic rod 233, a clamping block 1 234, and a clamping block 235. The fixed plate 231 is symmetrically fixed with the telescopic rod 1 232 in the vertical direction, and the fixed plate 231 is symmetrically fixed with the telescopic rod 233 in the horizontal direction. The output end of the telescopic rod 1 232 is fixedly provided with the clamping block 1 234, and the output end of the telescopic rod 233 is rotatably provided with the clamping block 235.

[0028] A receiving plate 236 is slidably provided between the two clamping blocks 1 234 at the bottom and the two clamping blocks 235 at the opposite positions in the two clamping plate mechanisms 23 and connected by a telescopic rod 3 237;

[0029] A support plate 238 is fixedly provided at the output end of the second telescopic rod 233, and a fourth telescopic rod 239 is hinged between the support plate 238 and the second clamping block 235;

[0030] The second clamping block 235 is driven to deflect by the fourth telescopic rod 239, so that the fourth telescopic rod 239 can drive the second clamping block 235 to deflect, that is, the receiving plate 236 slidably connected to the second clamping block 235 is deflected, so that the receiving plate 236 can fit the side of the test piece when facing test pieces of different shapes. For example, when the shape of the test piece is an inverted trapezoid, the two side surfaces of the test piece are two inclined inclined surfaces, and as the specifications of the test piece change, the inclination angle of the side surface also changes accordingly. Therefore, the fourth telescopic rod 239 is used to drive the second clamping block 235 to deflect, so that no matter how the side angle of the inverted trapezoidal test piece changes, the receiving plate 236 can fit the side surface of the test piece, that is, the three receiving plates 236 can restrict the test piece.

[0031] A pressure plate 24 is fixedly provided on one of the two clamping blocks 234 located at the top of the two clamping plate mechanisms 23. An extension plate 241 is slidably provided on the pressure plate 24. The lower bottom surfaces of the pressure plate 24 and the extension plate 241 and the upper top surface of the clamping block 234 are all in the same plane.

[0032] The second clamping assembly 3 includes a second slide 31, a fifth telescopic rod 32, and a clamping groove mechanism 33, wherein the second slide 31 is slidably disposed in the second slide groove 12, the fifth telescopic rod 32 is fixedly disposed on the second slide 31, an L-shaped support rod 34 is fixedly disposed at the output end of the fifth telescopic rod 32, and the output end of the L-shaped support rod 34 is fixedly disposed at the clamping groove mechanism 33;

[0033] In addition, the sliding power of the second slide 31 along the second slide groove 12 comes from an external drive mechanism, such as a hydraulic drive mechanism, a screw-nut mechanism, and a gear rack mechanism, and the provision of the L-shaped support rod 34 can enable the multiple clamping assemblies 2 3 located on the same side of the base 1 to be in the same horizontal position, that is, when the multiple slot rods on one side of the base 1 are in the same vertical position, the clamping groove mechanism 33 receiving the slot rods can also move to the same vertical position, and will not be affected by the slot rods during movement, thereby achieving precise positioning of test pieces of different shapes and specifications and the slot rods;

[0034] The clamping groove mechanism 33 includes a clamping seat 331, a clamping bar 332, and a deflection block 333. The clamping seat 331 is fixedly arranged at the output end of the L-shaped support rod 34. The clamping seat 331 is provided with an arc-shaped receiving groove, and a plurality of clamping bars 332 are provided in the receiving groove in a circular sliding manner. The deflection block 333 is also symmetrically rotated on the clamping seat 331, and a telescopic rod 334 is hinged between the deflection block 333 and the clamping seat 331.

[0035] It should be noted that the telescopic rod 1 232, the telescopic rod 233, the telescopic rod 3 237, the telescopic rod 4 239, the telescopic rod 5 32 and the telescopic rod 6 334 are all electric telescopic rods and are connected to an external control mechanism. For the positioning of the clamping assembly 2 3, that is, the positioning of the slot rod, a positioning sensor and a laser emitter can be embedded in the clamping seat 331. The position of the slot rod on the test piece is determined by stimulating the emitter to emit laser. At the same time, the position of the slot rod at this time is transmitted to the external controller by the positioning sensor. The external controller controls the sliding of the slide seat 2 31 and the extension and retraction of the telescopic rod 5 32, so as to accurately position the slot rod and the test piece.

[0036] A driving disk 335 is rotatably disposed in the clamping seat 331 , and a plurality of arc-shaped driving slots 336 are formed on the driving disk 335 ;

[0037] Guide blocks are fixedly provided at both ends of the clamping bar 332 , and the guide blocks are inserted into the arc-shaped driving groove 336 and slide along the arc-shaped driving groove 336 ;

[0038] During implementation, the test piece is placed on the clamping assembly 2 for clamping. When the test piece is placed on the clamping assembly 2, the test piece is received by the receiving plate 236 provided at the bottom of the clamping mechanism 23. At the same time, the telescopic rod 1 232 and the telescopic rod 233 are driven to slide according to the size of the test piece, so that the positions of the clamping block 1 234 and the clamping block 2 235 are changed, that is, the three receiving plates 236 are respectively located at the top and both sides of the test piece, that is, the three receiving plates 236 are used to restrict the test piece on three sides according to the size of the test piece, so that the test piece is in the middle position of the clamping mechanism 23, and then the multiple receiving plates 236 are driven to move. The telescopic rod 239 contracts, so that the two clamping plate mechanisms 23 firmly clamp the test piece. After the two clamping plate mechanisms 23 clamp the test piece, the telescopic rod 232 located on the top of the fixed plate 231 is driven to contract, and at the same time the extension plate 241 is driven to protrude from the pressure plate 24 and extend to another clamping block 234, so that the pressure plate 24 is further pressed on the top of the test piece, that is, the test piece is fixed on the clamping component 2 in four directions. Then, the slot rods to be welded are placed on the multiple clamping components 2 3, and the slot rods are received by the receiving grooves on the clamping seat 331, and the same slot rod is received by two clamping components 3. When the slot rod is placed in the receiving slot, the driving disk 335 is driven to rotate so that the multiple clamping strips 332 slide along the clamping seat 331, so that the outer surfaces of the multiple clamping strips 332 are in contact with the outer surface of the slot rod, that is, the multiple clamping strips 332 are used to limit the slot rod so that the slot rod is located at the center position of the receiving slot, and then the slide seat 2 31 is driven to slide along the slide slot 2 12 and the telescopic rod 5 32 is driven to slide and telescopically change the position of the slot rod so that the slot rod corresponds to the position of the test piece, and then the coaxial anti-thread screw is driven to rotate so that the two slide seats 1 21 slide and drive the two clamping strips 332 to move. Component 1 2 slides so that the two test pieces are in contact with the two ends of the slot rod respectively, and during the sliding of the slide 1 21, the test piece can push the slot rod to slide, so that the ends of multiple slot rods are aligned, and then the telescopic rod 6 334 is used to drive the deflection block 333 to deflect and press the cover on the slot rod, that is, the deflection block 333 and the clamping bar 332 are used to completely fix the slot rod, thereby completing the precise positioning and false connection of the test piece and the slot rod, and then using the welding mechanism 4 to weld the test piece and the slot rod, thereby achieving effective welding of quartz boats of various specifications, and the false connection positioning is accurate and the welding precision is high, effectively improving the welding quality of the quartz boat.

[0039] In this embodiment, Figure 5 and Figure 6An arc-shaped hydraulic cavity 337 is provided on the driving disk 335, and an arc-shaped hydraulic rod 338 is fixedly provided in the clamping seat 331. The arc-shaped hydraulic rod 338 slides sealedly along the arc-shaped hydraulic cavity 337, and a cavity is provided in the arc-shaped hydraulic rod 338, which is connected to an external hydraulic driving device. That is to say, it is only necessary to inject hydraulic medium into the cavity to change the pressure in the arc-shaped hydraulic cavity 337, thereby driving the arc-shaped hydraulic rod 338 to slide and drive the driving disk 335 to rotate.

[0040] In summary, when the present invention is implemented, the test piece is clamped by the clamping block 1 234 and the clamping block 2 235 arranged in a cross shape in the clamping component 1 2 and the position of the test piece is restricted on four sides, so that the test piece is always located at the center position of the clamping plate mechanism 23, thereby facilitating the positioning of the slot rod and the test piece, and the positions of the clamping block 1 234 and the clamping block 2 235 can be changed, so that the clamping plate mechanism 23 can clamp test pieces of different specifications, and at the same time, the clamping component 2 3 is set to be able to firmly clamp slot rods of various specifications, and after clamping, the position of the slot rod can be changed so that the slot rod and the test piece are accurately positioned and connected, so that quartz boats of various specifications can be accurately positioned and welded, effectively improving the welding quality and welding efficiency of the quartz boats.

[0041] The above is only a preferred specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any technician familiar with this technical field, within the technical scope disclosed by the present invention, who makes equivalent replacements or changes based on the technical solutions and inventive concepts of the present invention, should be covered by the scope of protection of the present invention.

Claims

1. Intelligent positioning welding device for quartz boat assembly, characterized by: The invention comprises a base (1), a clamping assembly 1 (2), a clamping assembly 2 (3) and a welding mechanism (4), wherein the base (1) is provided with a slide groove 1 (11), two clamping assemblies 1 (2) driven by a coaxial counter-screw are symmetrically arranged in the slide groove 1 (11), and a plurality of groups of slide grooves 2 (12) are provided on the base (1) in a direction perpendicular to the slide groove 1 (11), two slide grooves 2 (12) in the plurality of groups of slide grooves 2 (12) are symmetrically arranged relative to the slide groove 1 (11), and the number of groups of slide grooves 2 (12) is a multiple of 4, and the sliding arrangement in each group of slide grooves 2 (12) is symmetrical. A clamping assembly 2 (3) is provided, a sliding frame (13) is fixedly provided on the base (1), and a welding mechanism (4) is slidably provided on the sliding frame (13); the clamping assembly 1 (2) includes a sliding seat 1 (21), a support column (22) and a clamping plate mechanism (23), wherein the sliding seat 1 (21) is slidably provided in the sliding groove 1 (11), a support column (22) is fixedly provided on the sliding seat 1 (21), and two clamping plates mechanisms (23) are configured, and the two clamping plates mechanisms (23) are slidably connected, and one of the clamping plates mechanisms (23) is fixedly connected to the support column (22); The clamping mechanism (23) comprises a fixed plate (231), a telescopic rod 1 (232), a telescopic rod 2 (233), a clamping block 1 (234) and a clamping block 2 (235), wherein the fixed plate (231) is symmetrically fixed with the telescopic rod 1 (232) in a vertical direction, the fixed plate (231) is symmetrically fixed with the telescopic rod 2 (233) in a horizontal direction, the output end of the telescopic rod 1 (232) is fixedly provided with the clamping block 1 (234), and the output end of the telescopic rod 2 (233) is rotatably provided with the clamping block 2 (235); A receiving plate (236) is slidably provided between the two clamping blocks (234) at the bottom and the two clamping blocks (235) at the opposite positions in the two clamping plate mechanisms (23) and is connected by a telescopic rod (237); A support plate (238) is fixedly provided at the output end of the second telescopic rod (233), and a fourth telescopic rod (239) is hinged between the support plate (238) and the second clamping block (235).

2. The intelligent positioning welding device for quartz boat assembly according to claim 1, characterized in that: A pressure plate (24) is fixedly provided on one of the two clamping blocks (234) located at the top of the two clamping plate mechanisms (23), an extension plate (241) is slidably provided on the pressure plate (24), and the lower bottom surfaces of the pressure plate (24) and the extension plate (241) and the upper top surface of the clamping block (234) are all in the same plane.

3. The intelligent positioning welding device for quartz boat assembly according to claim 1, characterized in that: The clamping assembly 2 (3) includes a slide 2 (31), a telescopic rod 5 (32) and a clamping groove mechanism (33), wherein the slide 2 (31) is slidably arranged in the slide groove 2 (12), the telescopic rod 5 (32) is fixedly arranged on the slide 2 (31), the output end of the telescopic rod 5 (32) is fixedly arranged with an L-shaped support rod (34), and the output end of the L-shaped support rod (34) is fixedly arranged with the clamping groove mechanism (33).

4. The intelligent positioning welding device for quartz boat assembly according to claim 3, characterized in that: The clamping groove mechanism (33) comprises a clamping seat (331), a clamping bar (332) and a deflection block (333), wherein the clamping seat (331) is fixedly arranged at the output end of the L-shaped support rod (34), an arc-shaped receiving groove is provided in the clamping seat (331), a plurality of clamping bars (332) are provided in the receiving groove in a circular sliding manner, a deflection block (333) is also symmetrically rotated on the clamping seat (331), and a telescopic rod (334) is hinged between the deflection block (333) and the clamping seat (331).

5. The intelligent positioning welding device for quartz boat assembly according to claim 4, characterized in that: A driving disk (335) is rotatably provided in the clamping seat (331), and a plurality of arc-shaped driving grooves (336) are provided on the driving disk (335); Guide blocks are fixedly provided at both ends of the clamping bar (332), and the guide blocks are clamped into the arc-shaped driving groove (336) and slidably provided along the arc-shaped driving groove (336).

6. The intelligent positioning welding device for quartz boat assembly according to claim 5, characterized in that: An arc-shaped hydraulic cavity (337) is provided on the driving disc (335), and an arc-shaped hydraulic rod (338) is fixedly provided in the clamping seat (331). The arc-shaped hydraulic rod (338) slides along the arc-shaped hydraulic cavity (337) in a sealed manner, and a cavity is provided in the arc-shaped hydraulic rod (338), and the cavity is connected to an external hydraulic driving device.

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