Vacuumizing device

Abstract

The invention relates to a vacuumizing device. The vacuumizing device comprises a pump body; the exhaust pipe set comprises multiple levels of exhaust pipes which are sequentially communicated from high to low, multiple branch pipe openings of the exhaust pipes of the high levels are correspondingly communicated with main pipe openings of the adjacent exhaust pipes of the low levels, the exhaust pipe of the highest level is communicated with the pump body, and the exhaust pipe of the lowest level is communicated with a container cavity to be vacuumized. And the pipe diameter of the high-level exhaust pipe is larger than that of the low-level exhaust pipe. According to the vacuumizing device, the air exhaust pipe set is arranged to be the air exhaust pipes distributed in the multiple levels, the pipe diameter of the air exhaust pipe in the high level is set to be larger than that of the air exhaust pipe in the low level, and therefore the vacuumizing device adapts to the change trend that the air pressure on the air exhaust pipeline from the container cavity to the pump body is gradually reduced; and the characteristic that the gas is easier to expand when flowing in a pipeline with the lower air pressure is correspondingly adapted, the probability that turbulence occurs in the flowing process of the gas along the exhaust pipe set is reduced, and therefore the vacuumizing efficiency is improved.

Description

Technical Field

[0001] This application relates to the technical field of vacuum drying equipment, and particularly to a vacuum pumping device. Background Art

[0002] An evacuating device refers to a device that evacuates the air inside a container to reach a predetermined vacuum level.

[0003] In related technologies, there are many right-angle turns (sharp turns) in the air extraction pipeline of the evacuating device. When the air flow turns at the right-angle turn of the air extraction pipeline, it is easy to generate turbulence (vortices) and secondary flow, increasing the flow pressure loss of the air flow. In addition, the diameter of the air extraction pipeline connected to the container is relatively large. When directly evacuating the container, the amount of gas extracted per unit time is large, and it is also easy to form turbulence, increasing the flow pressure loss of the air flow. The above situations will reduce the vacuum pumping efficiency. Summary of the Invention

[0004] This application aims to solve the problem of relatively low vacuum pumping efficiency of the evacuating device in the prior art. For this purpose, this application provides an evacuating device.

[0005] This application provides an evacuating device, including:

[0006] A pump body;

[0007] An air extraction pipe group, including multi-level air extraction pipes that are sequentially connected in descending order. A plurality of branch pipe orifices of the air extraction pipe at a higher level correspond to and are connected to the main pipe orifices of the air extraction pipe at an adjacent lower level. The air extraction pipe at the highest level is connected to the pump body, and the air extraction pipe at the lowest level is connected to the container cavity to be evacuated. Moreover, the diameter of the air extraction pipe at a higher level is larger than that of the air extraction pipe at a lower level.

[0008] The evacuating device according to this application has at least the following beneficial effects:

[0009] The vacuum pumping device of the present application forms multiple gas flow paths by arranging the exhaust pipe group as exhaust pipes distributed in multiple levels, enabling the gas in the container cavity to flow along multiple flow paths to the pump body under the suction of the pump body, exhausting the gas in the container cavity through a more uniform flow path, and making the vacuum degree in the container cavity more uniform. At the same time, by setting the diameter of the exhaust pipe at a higher level to be larger than that of the exhaust pipe at a lower level, the diameter of the exhaust pipe closer to the pump body is larger, so that the diameters of all the exhaust pipes show an increasing trend along the direction from the container cavity to the pump body, thereby adapting to the changing trend of the gradually decreasing air pressure on the air extraction pipeline from the container cavity to the pump body, corresponding to the characteristic that the gas is more likely to expand when flowing in a pipeline with a lower air pressure, so that the gas can be pumped into the pump body more evenly and stably, improving the gas flow efficiency, reducing the probability of turbulence occurring during the gas flow along the exhaust pipe group, and reducing the kinetic energy loss during the gas flow along the exhaust pipe group, thereby improving the vacuum pumping efficiency.

[0010] In some embodiments, the lengths and diameters of the exhaust pipes at the same level are the same.

[0011] In some embodiments, the number of exhaust pipes at a higher level is less than the number of exhaust pipes at a lower level, and each exhaust pipe at a higher level is connected to the same number of exhaust pipes at a lower level.

[0012] In some embodiments, all the exhaust pipes are distributed in three levels.

[0013] In some embodiments, multiple branch nozzles on the exhaust pipe at a higher level are symmetrically distributed relative to the main nozzle of the exhaust pipe at a higher level.

[0014] In some embodiments, multiple branch nozzles of the exhaust pipe at a higher level are connected to the main nozzles of the adjacent exhaust pipes at a lower level through flexible hoses.

[0015] In some embodiments, the vacuum pumping device further includes a voltage stabilizing component, which forms multiple voltage stabilizing cavities distributed at intervals. Multiple exhaust pipes at the lowest level are connected to the multiple voltage stabilizing cavities in a one-to-one correspondence, and all the voltage stabilizing cavities are connected to the container cavity to be evacuated.

[0016] In some embodiments, among all the exhaust pipes at the lowest level, the distance between any two adjacent exhaust pipes is equal.

[0017] In some embodiments, the vacuum pumping device further includes a rectifying mesh plate, which is arranged in the container cavity to be evacuated, and all the voltage stabilizing cavities are connected to the container cavity through the mesh holes on the rectifying mesh plate.

[0018] In some embodiments, a plurality of rectifying regions are formed on the rectifying mesh plate, and the plurality of rectifying regions communicate with the plurality of voltage stabilizing cavities one by one, and the mesh density of all the rectifying regions is equal.

[0019] The above description is only an overview of the technical solution of the present application. In order to be able to understand the technical means of the present application more clearly, it can be implemented according to the content of the specification. And in order to make the above and other purposes, features and advantages of the present application more obvious and understandable, the following specific embodiments of the present application are specifically exemplified. Description of the Drawings

[0020] By reading the following detailed description of the preferred embodiments, various other advantages and benefits will become clear to those of ordinary skill in the art. The drawings are only for the purpose of showing the preferred embodiments and are not considered to be a limitation of the present application. And in all the drawings, the same reference numerals are used to represent the same components. In the drawings:

[0021] Figure 1 It is a schematic structural diagram of the vacuum pumping device according to the embodiment of the present application.

[0022] Figure 2 It is a schematic exploded view of the structure of the air extraction pipe group according to the embodiment of the present application.

[0023] Figure 3 It is another schematic structural diagram of the vacuum pumping device according to the embodiment of the present application.

[0024] Description of the reference numerals: pump body 100; air extraction pipe group 200; air extraction pipe 210; first pipe 211; first main pipe port 2111; first branch pipe port 2112; second pipe 212; second main pipe port 2121; second branch pipe port 2122; third pipe 213; third main pipe port 2131; voltage stabilizing assembly 300; voltage stabilizing cavity 310; outer shell 320; partition plate 330; rectifying mesh plate 400; container cavity 500. Detailed Embodiments

[0025] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0026] In the description of the present application, it should be understood that if there are terms such as "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., the orientation or positional relationship indicated by these terms is based on the orientation or positional relationship shown in the drawings. These are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation on the present application.

[0027] In addition, if there are terms such as "first" and "second", these terms are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In the description of the present application, if there is a term "plurality", the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise specifically defined.

[0028] In the present application, unless otherwise clearly defined and limited, if there are terms such as "mounted", "connected", "coupled", "fixed", etc., these terms should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements or the interaction relationship between two elements, unless otherwise clearly limited. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0029] In the present application, unless otherwise clearly defined and limited, if there is a description such as a first feature being "on" or "under" a second feature, the meaning may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may mean that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "underneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0030] It should be noted that if an element is referred to as "fixed to" or "disposed on" another element, it can be directly on the other element or there may also be an intermediate element. If an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time. If present, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are only for illustrative purposes and do not represent the only implementation.

[0031] In the related art, there are many right-angle turns (sharp turns) in the air extraction pipeline of the vacuum extraction device. When the air flow turns at the right-angle turn of the air extraction pipeline, it is easy to generate turbulence (vortices) and secondary flow, increasing the flow pressure loss of the air flow; in addition, the diameter of the air extraction pipeline connected to the container is relatively large. When directly evacuating the container, the amount of gas extracted per unit time is large, and it is also easy to form turbulence, increasing the flow pressure loss of the air flow. The above situations will reduce the vacuum extraction efficiency.

[0032] Based on this, the embodiments of the present application provide a vacuum extraction device. By setting the air extraction pipe group as air extraction pipes distributed in multiple levels, multiple flow paths for gas flow are formed, so that the gas in the container cavity can flow along multiple flow paths to the pump body under the suction action of the pump body, and the gas in the container cavity is extracted through a more uniform flow path, making the vacuum degree in the container cavity more uniform; at the same time, by setting the diameter of the air extraction pipes at the higher level to be larger than the diameter of the air extraction pipes at the lower level, the diameter of the air extraction pipes closer to the pump body is larger, so that the diameter of all the air extraction pipes shows an increasing trend along the direction from the container cavity to the pump body, so as to adapt to the changing trend of the gradually decreasing air pressure on the air extraction pipeline from the container cavity to the pump body, and correspondingly adapt to the characteristic that the gas is more likely to expand when flowing in the pipeline with lower air pressure, so that the gas is more evenly and smoothly pumped into the pump body, improving the gas flow efficiency, reducing the probability of turbulence occurring during the flow of the gas along the air extraction pipe group, and reducing the kinetic energy loss during the flow of the gas along the air extraction pipe group, thereby improving the vacuum extraction efficiency.

[0033] See Figure 1 and Figure 2 , the embodiments of the present application provide a vacuum extraction device. The vacuum extraction device includes a pump body 100 and an air extraction pipe group 200.

[0034] The air extraction pipe group 200 includes air extraction pipes 210 that are connected in sequence from high to low in multiple levels. The multiple branch pipe orifices of the air extraction pipes 210 at the higher level are correspondingly connected to the main pipe orifices of the adjacent air extraction pipes 210 at the lower level. The air extraction pipes 210 at the highest level are connected to the pump body 100, and the air extraction pipes 210 at the lowest level are connected to the container cavity 500 to be evacuated, and the diameter of the air extraction pipes 210 at the higher level is larger than the diameter of the air extraction pipes 210 at the lower level.

[0035] It should be noted that in this application, the pump body 100 can be, but is not limited to, a rotary vane pump, a liquid ring pump, a turbomolecular pump, a screw pump, etc. The specific structure of the pump body 100 can be selected adaptively according to the structure of the container cavity 500 to be evacuated, and no specific limitation is made.

[0036] In the exhaust pipe group 200 of this application, the exhaust pipes 210 that are connected in sequence from high to low in multiple levels can be understood as follows: there are multiple exhaust pipes 210, and all the exhaust pipes 210 are distributed in a pyramid hierarchy. The exhaust pipes 210 at the higher level are closer to the pump body 100 than the exhaust pipes 210 at the lower level.

[0037] It can be understood that the pump body 100 is connected to the container cavity 500 to be evacuated through the exhaust pipe group 200. When the pump body 100 operates, that is, the air in the container cavity 500 is pumped out through the exhaust pipe group 200 to make the vacuum degree of the container cavity 500 meet the requirements.

[0038] See Figure 2 , taking the case where all the exhaust pipes 210 are distributed in the highest, middle, and lowest three levels as an example to illustrate the structure of the exhaust pipe group 200: The exhaust pipe 210 at the highest level is defined as the first pipe 211. The first pipe 211 can be one or more. One end of the first pipe 211 is defined as the first main pipe port 2111 connected to the pump body 100, and the other end of the first pipe 211 forms a plurality of first branch pipe ports 2112; The exhaust pipe 210 at the middle level is defined as the second pipe 212. There are a plurality of second pipes 212. One end of the second pipe 212 is defined as the second main pipe port 2121, and the other end of the second pipe 212 forms a plurality of second branch pipe ports 2122. The second main pipe ports 2121 of the plurality of second pipes 212 are connected to the plurality of first branch pipe ports 2112 of the first pipe 211 in one-to-one correspondence; The exhaust pipe 210 at the lowest level is defined as the third pipe 213. There are a plurality of third pipes 213, and the number of the third pipes 213 is greater than that of the second pipes 212. One end of the third pipe 213 is defined as the third main pipe port 2131, and the other end of the third pipe 213 is connected to the container cavity 500 to be evacuated. The third main pipe ports 2131 of the plurality of third pipes 213 are connected to the plurality of second branch pipe ports 2122 of the second pipes 212 in one-to-one correspondence; In addition, the pipe diameters of the first pipe 211, the second pipe 212, and the third pipe 213 show a decreasing trend. The above-mentioned first pipe 211 is the main exhaust pipe of the exhaust pipe group 200, and all the second pipes 212 and all the third pipes 213 are the exhaust branch pipes of the exhaust pipe group 200.

[0039] It should be noted that during the process of evacuating the container cavity 500 by the vacuum pumping device, the principle is as follows: The pump body 100 continuously extracts the gas molecules in the container cavity 500 through the gas extraction pipe group 200, gradually reducing the air pressure in the container cavity 500. Since it takes time for the collision and diffusion between gas molecules, the air pressure in the container cavity 500 will not instantaneously reach a predetermined lower air pressure (predetermined vacuum degree), that is, the air pressure in the container cavity 500 will not instantaneously drop to the same air pressure as the air inlet of the pump body 100. Instead, during the process of the pump body 100 extracting the gas molecules in the container cavity 500, the closer the gas extraction pipe group 200 and the container cavity 500 are to the pump body 100, the faster the air pressure drops, and the farther the gas extraction pipe group 200 and the container cavity 500 are from the pump body 100, the slower the air pressure drops. That is, along the gas extraction pipeline from the container cavity 500 to the pump body 100, the air pressure gradually decreases.

[0040] When the gas flows in a pipeline with a lower air pressure, due to the weakening of the relative force between gas molecules, the distance between gas molecules increases, the degree of freedom of gas molecules increases, and the molecules can move and diffuse more freely, resulting in an increase in the gas volume. That is, the lower the air pressure in the pipeline where the gas flows, the easier it is for the gas to expand.

[0041] Based on this, in the present application, the gas extraction pipe group 200 is set as gas extraction pipes 210 distributed in multiple levels, forming multiple flow paths for gas to flow through, so that the gas in the container cavity 500 can flow into the pump body 100 along multiple flow paths under the suction of the pump body 100, and the gas in the container cavity 500 is extracted through a more uniform flow path, making the vacuum degree in the container cavity 500 more uniform; at the same time, by setting the pipe diameter of the high-level gas extraction pipes 210 to be larger than that of the low-level gas extraction pipes 210, the closer the gas extraction pipes 210 are to the pump body 100, the larger the pipe diameter, so that the pipe diameters of all the gas extraction pipes 210 show an increasing trend along the direction from the container cavity 500 to the pump body 100, thereby adapting to the changing trend of the gradually decreasing air pressure along the gas extraction pipeline from the container cavity 500 to the pump body 100, corresponding to the characteristic that the gas is more likely to expand when flowing in a pipeline with a lower air pressure, so as to make the gas be pumped into the pump body 100 more uniformly and stably, improve the gas flow efficiency, reduce the probability of turbulence when the gas flows along the gas extraction pipe group 200, and reduce the kinetic energy loss when the gas flows along the gas extraction pipe group 200, thereby improving the vacuum pumping efficiency.

[0042] In some embodiments of the present application, the lengths and pipe diameters of the gas extraction pipes 210 at the same level are the same.

[0043] Specifically, at an intermediate level of the exhaust pipe group 200, there are two exhaust pipes 210, and the lengths and pipe diameters of the two exhaust pipes 210 are the same. It should be noted that the exhaust pipes 210 on the same level can all be pipes with equal diameters or all be pipes with variable diameters. When the exhaust pipe 210 is a pipe with variable diameter, the pipe diameter of the exhaust pipe 210 shows an increasing trend along the direction from the container cavity 500 to the pump body 100, corresponding to the characteristic that the gas is more likely to expand when flowing in a pipe with lower air pressure, further enabling the gas to be pumped into the pump body 100 more evenly and stably, and improving the gas flow efficiency.

[0044] It is not difficult to understand that by setting the lengths and pipe diameters of all the exhaust pipes 210 on the same level to be the same, the air flow rates in each of the exhaust pipes 210 on the same level are kept roughly consistent, and the pressure losses of the air flow in each of the exhaust pipes 210 on the same level can be kept roughly consistent, which is beneficial to extracting the gas in the container cavity 500 through a more uniform flow path, and further making the vacuum degree in the container cavity 500 more uniform.

[0045] In some embodiments of the present application, the number of exhaust pipes 210 at the higher level is less than the number of exhaust pipes 210 at the lower level, and each exhaust pipe 210 at the higher level is connected to the same number of exhaust pipes 210 at the lower level.

[0046] Specifically, referring to Figure 2 , taking the exhaust pipe group 200 having four levels as an example, from high to low are the first level, the second level, the third level, and the fourth level. The first level has 1 exhaust pipe 210, and this exhaust pipe 210 is connected to two exhaust pipes 210 on the second level. A single exhaust pipe 210 on the second level is connected to two corresponding exhaust pipes 210 on the third level, so that there are four exhaust pipes 210 on the third level. A single exhaust pipe 210 on the third level is connected to the corresponding exhaust pipe 210 on the fourth level, so that there are eight exhaust pipes 210 on the fourth level. In this way, the number of exhaust pipes 210 on the four levels increases exponentially in the direction from the higher level to the lower level, ensuring that each exhaust pipe 210 at the higher level is connected to the same number of exhaust pipes 210 at the lower level.

[0047] It is not difficult to understand that by making each exhaust pipe 210 at the higher level connected to the same number of exhaust pipes 210 at the lower level, the gas flow rates in each of the exhaust pipes 210 on the same level are further kept roughly consistent, and the pressure losses of the air flow in each of the exhaust pipes 210 on the same level can be made roughly consistent, which is beneficial to extracting the gas in the container cavity 500 through a more uniform flow path, and further making the vacuum degree in the container cavity 500 more uniform.

[0048] In some embodiments of the present application, all the extraction pipes 210 are distributed in three levels, and at most four extraction pipes 210 are arranged on each level. In this way, while making the gas in the container cavity 500 flow out more evenly, the number of extraction pipes 210 on the same level is relatively reduced, the pipeline structure layout is simplified, and the length of all the extraction pipes 210 is relatively shortened, thereby reducing the pressure loss of the air flow flowing along the extraction pipes 210 to the pump body 100, and thus improving the vacuum pumping efficiency.

[0049] In some embodiments of the present application, referring to Figure 1 and Figure 2 , a plurality of branch nozzles on the extraction pipe 210 at the high level are symmetrically distributed relative to the main nozzle of the extraction pipe 210 at the high level.

[0050] Specifically, taking the extraction pipe group 200 having two levels as an example, namely the high level and the low level, the high level has one extraction pipe 210, the main nozzle of this extraction pipe 210 is connected to the pump body 100, and two branch nozzles are provided at one end of this extraction pipe 210 close to the middle level, and these two branch nozzles are symmetrically distributed relative to the main nozzle of this extraction pipe 210. At this time, this extraction pipe 210 is in an inverted Y shape. The low level has two extraction pipes 210, one ends of these two extraction pipes 210 are connected to the two branch nozzles of the extraction pipe 210 at the high level in a one-to-one correspondence, and the other ends of these two extraction pipes 210 are connected to the container cavity 500.

[0051] It can be understood that the shape of the extraction pipe 210 at the high level can be changed to make a plurality of branch nozzles on the extraction pipe 210 at the high level symmetrically distributed relative to the main nozzle of the extraction pipe 210 at the high level. In this way, the air flow of the extraction pipes 210 at the low level can flow more evenly to the extraction pipe 210 at the high level, reducing the probability of turbulence in the air flow in the extraction pipe 210 at the high level and improving the vacuum pumping efficiency.

[0052] In some embodiments of the present application, a plurality of branch nozzles of the extraction pipe 210 at the high level are connected to the main nozzles of the adjacent extraction pipes 210 at the low level through flexible hoses (not shown in the figure).

[0053] Specifically, in one embodiment, among all the extraction pipes 210 of the extraction pipe group 200, the extraction pipe 210 located at the highest level is configured as a rigid pipe, so that it has a certain stiffness and strength to be able to stably and reliably connect with the pump body 100, and the extraction pipes 210 on the remaining levels are all configured as flexible hoses, so that they can deform flexibly under the action of external forces, and at the same time can maintain structural stability under a relatively large gas pressure, avoiding deformation of the flexible hoses due to the internal and external pressure difference during vacuum pumping.

[0054] Of course, in another embodiment, all the extraction pipes 210 of the extraction pipe group 200 are rigid pipes, and the connection between two extraction pipes 210 is connected by a flexible hose. The connection manner between the extraction pipe 210 and the flexible hose can be, but is not limited to, flange connection, threaded connection, clamp connection, etc.

[0055] It should be noted that by using a flexible hose to connect the branch pipe orifice of the high-level extraction pipe 210 to the main pipe orifice of the adjacent low-level extraction pipe 210, and utilizing the flexible deformation ability of the flexible hose, the length of the connecting pipe between the branch pipe orifice of the high-level extraction pipe 210 and the main pipe orifice of the adjacent low-level extraction pipe 210 can be shortened to a large extent, reducing the pressure loss. At the same time, the bending radian of the connecting pipe between the branch pipe orifice of the high-level extraction pipe 210 and the main pipe orifice of the adjacent low-level extraction pipe 210 is reduced to a large extent, and the curvature of the connecting pipe is minimized as much as possible, making the connecting pipe approach a straight pipe with a shorter length. In this way, the transformation trend of the pipe diameter from the low-level extraction pipe 210 to the pipe diameter of the adjacent high-level extraction pipe 210 is closer to being linear, enabling a smooth transition connection between the branch pipe orifice of the high-level extraction pipe 210 and the main pipe orifice of the adjacent low-level extraction pipe 210, reducing the probability of a sudden change in pipe diameter when the branch pipe orifice of the high-level extraction pipe 210 is connected to the main pipe orifice of the adjacent low-level extraction pipe 210. Thus, the air flow can flow more smoothly from the low-level extraction pipe 210 to the adjacent high-level extraction pipe 210, reducing the probability of turbulence during the process of the air flow flowing from the low-level extraction pipe 210 to the adjacent high-level extraction pipe 210, further reducing the air flow pressure loss, and improving the vacuum pumping efficiency.

[0056] In other embodiments, among the low-level extraction pipe 210, the main pipe orifice of the low-level extraction pipe 210, the pipe between the main pipe orifice of the low-level extraction pipe 210 and the branch pipe orifice of the adjacent high-level extraction pipe 210, and the adjacent high-level extraction pipe 210, the pipe diameters or cross-sectional areas of the three increase linearly along the direction close to the pump body 100. In this way, the pressure loss during the process of the air flow flowing from the low-level extraction pipe 210 to the adjacent high-level extraction pipe 210 can be minimized to the greatest extent, and the vacuum pumping efficiency can be improved.

[0057] In some embodiments of the present application, referring to Figure 3 , the vacuum pumping device further includes a voltage stabilizing component 300. The voltage stabilizing component 300 is formed with a plurality of voltage stabilizing cavities 310 distributed at intervals. The plurality of extraction pipes 210 at the lowest level are in one-to-one correspondence and communication with the plurality of voltage stabilizing cavities 310, and all the voltage stabilizing cavities 310 are in communication with the container cavity 500 to be evacuated.

[0058] Specifically, in some embodiments, the voltage stabilizing component 300 includes a housing 320 that penetrates up and down, and a plurality of partition plates 330 disposed inside the housing 320. The plurality of partition plates 330 are distributed in parallel and at intervals to divide the cavity of the housing 320 into a plurality of voltage stabilizing cavities 310. It can be understood that all the voltage stabilizing cavities 310 penetrate up and down. The housing 320 of the voltage stabilizing cavity 310 can be installed at the opening of the container cavity 500, so that all the voltage stabilizing cavities 310 are evenly distributed along the opening of the container cavity 500. A plurality of air extraction pipes 210 on the lowest level of the air extraction pipe group 200 are in one-to-one correspondence and communication with the plurality of voltage stabilizing cavities 310, and the lower ends of all the voltage stabilizing cavities 310 are communicated with the container cavity 500.

[0059] Of course, in other embodiments, when the container cavity 500 is an equal-diameter container cavity, such as a regular square cavity or a cylindrical cavity, the size of the opening of the container cavity 500 is equal to its internal cross-section. At this time, the housing 320 of the voltage stabilizing cavity 310 can extend into the container cavity 500 through the opening of the container cavity 500, and the vertical projection of all the voltage stabilizing cavities 310 relative to the opening of the container cavity 500 coincides with the opening of the container cavity 500. In this way, all the voltage stabilizing cavities 310 cover all parts of the container cavity 500, reducing or even eliminating the air flow blind area at the corners of the container cavity 500.

[0060] By making a plurality of air extraction pipes 210 on the lowest level of the air extraction pipe group 200 in one-to-one correspondence and communication with the plurality of voltage stabilizing cavities 310, and the lower ends of all the voltage stabilizing cavities 310 are communicated with the container cavity 500, when evacuating, the air flow inside the container cavity 500 can relatively evenly enter the respective air extraction pipes 210 on the lowest level through the corresponding voltage stabilizing cavities 310 under the shunting action of each voltage stabilizing cavity 310. The pressure field and velocity field of the air flow inside the container cavity 500 are more uniform, so that the vacuum degree inside the container cavity 500 is more uniform.

[0061] Moreover, the plurality of air extraction pipes 210 on the lowest level are in corresponding communication and cooperation with each voltage stabilizing cavity 310, dividing the cavity of the container cavity 500 into several small cavities, so that the air flow is divided into multiple parts and each part flows along the smaller voltage stabilizing cavity 310 to the air extraction pipe 210, which can reduce the probability of turbulence occurring during the process of the air flow flowing from the container cavity 500 to the air extraction pipe 210, reduce the pressure loss, and also improve the vacuum pumping efficiency.

[0062] Further, among all the air extraction pipes 210 on the lowest level, the distance between any two adjacent air extraction pipes 210 is equal. In this way, all the air extraction pipes 210 on the lowest level and all the voltage stabilizing cavities 310 form a plurality of uniformly distributed flow paths, and the air flow in the container cavity 500 flows more evenly under the shunting action of each flow path, reducing the pressure loss.

[0063] Further, refer toFigure 3 The vacuum pumping device further includes a rectifying mesh plate 400, which is disposed in the container cavity 500 to be evacuated, and all the pressure stabilizing cavities 310 communicate with the container cavity 500 through the mesh holes on the rectifying mesh plate 400.

[0064] Specifically, the rectifying mesh plate 400 is disposed at the bottom of the pressure stabilizing assembly 300 and covers the bottom openings of all the pressure stabilizing cavities 310. It can be understood that the pressure stabilizing assembly 300 and the rectifying mesh plate 400 are connected as a whole, and can be selectively disposed at the opening of the container cavity 500 or inside the container cavity 500 according to the shape of the container cavity 500.

[0065] By providing the rectifying mesh plate 400, when the air flow in the container cavity 500 flows into each pressure stabilizing cavity 310 of the pressure stabilizing assembly 300, the rectifying mesh plate 400 can promote the uniform diffusion of gas molecules, help regulate the air flow velocity and distribution in the container cavity 500, reduce the probability of the local air flow velocity in the container cavity 500 being too fast or too slow, and enable the air flow in the container cavity 500 to flow into each pressure stabilizing cavity 310 more smoothly and uniformly, thereby improving the vacuum pumping efficiency.

[0066] In addition, the mesh holes of the rectifying mesh plate 400 can block large particles or impurities in the container cavity 500 from entering the suction pipe 210 and the pump body 100, reducing the probability of the suction pipe 210 being blocked and the pump body 100 malfunctioning.

[0067] Further, a plurality of rectifying regions are formed on the rectifying mesh plate 400, and the plurality of rectifying regions communicate with the plurality of pressure stabilizing cavities 310 in a one-to-one correspondence, and the mesh hole densities of all the rectifying regions are equal.

[0068] In this way, the air flow in the container cavity 500 can flow into each pressure stabilizing cavity 310 more smoothly and uniformly, thereby improving the vacuum pumping efficiency.

[0069] Further, the aperture diameter and quantity of the mesh holes of the rectifying mesh plate 400 can be adjusted. For example, the rectifying mesh plate 400 is configured as a structure in which all the mesh holes thereon can be automatically opened and closed. Specifically, in an embodiment, the surface of the rectifying mesh plate 400 defines a plurality of rectifying regions, each rectifying region has a plurality of mesh holes, and at the same time, each rectifying region is provided with a blocking plate and a driving mechanism. The driving mechanism is used to drive the blocking plate to slide relative to the rectifying mesh plate 400 to block or open all the mesh holes on the rectifying region. The blocking plates corresponding to all the rectifying regions are independently controlled by a control program, and the driving mechanism can be a combined structure of a motor and a connecting rod mechanism.

[0070] According to the actual size and shape of the container cavity 500 and the vacuum degree requirement for the container cavity 500, it is possible to selectively control some of the blocking plates to be in an open or closed state, so as to correspondingly open or close the mesh holes of some of the rectifying regions, thereby regulating the air flow pressure distribution in the container cavity 500 to meet the requirements of different processes.

[0071] The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as falling within the scope described in this specification.

[0072] The above-described embodiments only represent several implementation manners of the present application, and the description thereof is relatively specific and detailed. However, it should not be construed as a limitation on the scope of the patent application. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present application, several modifications and improvements can still be made, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the appended claims.

Claims

1. A vacuum pumping device, characterized in that: include: Pump body; The exhaust pipe group includes multiple levels of exhaust pipes connected in sequence from high to low, the multiple branch pipe openings of the exhaust pipes at the high level are correspondingly connected to the main pipe openings of the exhaust pipes at the adjacent low level, the exhaust pipes at the highest level are connected to the pump body, and the exhaust pipes at the lowest level are connected to the container cavity to be vacuumed, and the diameter of the exhaust pipes at the high level is larger than the diameter of the exhaust pipes at the low level.

2. The vacuum pumping device according to claim 1, characterized in that: The exhaust pipes on the same level have the same length and diameter.

3. The vacuum pumping device according to claim 1, characterized in that: The number of the air extraction pipes at a high level is less than that of the air extraction pipes at a low level, and each of the air extraction pipes at a high level is connected to the same number of air extraction pipes at a low level.

4. The vacuum pumping device according to claim 1, characterized in that: All of the exhaust pipes are distributed in three levels.

5. The vacuum pumping device according to claim 1, characterized in that: The multiple branch pipe openings on the air extraction pipe on the high level are symmetrically distributed relative to the main pipe opening of the air extraction pipe on the high level.

6. The vacuum pumping device according to claim 1, characterized in that: The multiple branch pipe openings of the air extraction pipe at a high level are connected to the main pipe opening of the adjacent air extraction pipe at a low level through a flexible hose.

7. The vacuum extraction device according to any one of claims 1 to 6, characterized in that: The vacuum pumping device also includes a pressure stabilizing component, which forms a plurality of spaced-apart pressure stabilizing cavities, the plurality of exhaust pipes on the lowest level are connected to the plurality of pressure stabilizing cavities in a one-to-one correspondence, and all the pressure stabilizing cavities are connected to the container cavity to be vacuumed.

8. The vacuum pumping device according to claim 7, characterized in that: Among all the exhaust pipes on the lowest level, the distance between any two adjacent exhaust pipes is equal.

9. The vacuum pumping device according to claim 7, characterized in that: The vacuum pumping device further comprises a rectifying mesh plate, which is arranged in the container cavity to be vacuum pumped, and all the pressure-stabilizing cavities are connected to the container cavity through mesh holes on the rectifying mesh plate.

10. The vacuum pumping device according to claim 9, characterized in that: A plurality of rectifying areas are formed on the rectifying mesh plate, and the plurality of rectifying areas are connected to the plurality of voltage-stabilizing cavities in a one-to-one correspondence, and the mesh density of all the rectifying areas is equal.

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