Glass substrate defect detection equipment

Abstract

The invention relates to the technical field of glass substrate detection, in particular to glass substrate defect detection equipment which comprises a bottom frame, a connecting device, a workbench, a Y-axis transmission device, a vacuum carrying table device, a detection device and a turnover device, the connecting device is arranged on the bottom frame, the workbench is arranged on the connecting device, the Y-axis transmission device is arranged on the Y-axis transmission device, and the turnover device is arranged on the Y-axis transmission device. The Y-axis transmission device is arranged on the workbench, the vacuum carrying table device is arranged on the Y-axis transmission device, and the Y-axis transmission device is used for driving the vacuum carrying table device to conduct reciprocating transmission on the feeding station, the detection device and the turnover device. The vacuum carrying table device is used for fixing a glass substrate and driving the glass substrate to move. According to the OLED display panel glass substrate double-sided defect detection device, efficient and accurate OLED display panel glass substrate double-sided 2D plane defect detection and 3D size defect detection are achieved, and the product quality is powerfully guaranteed.

Description

Technical Field

[0001] The present invention relates to the technical field of glass substrate detection, and particularly to a glass substrate defect detection device. Background Art

[0002] During the production and manufacturing process of OLED glass substrates, defect detection is crucial, and its detection accuracy directly affects the product quality and yield. However, the existing detection technologies have certain limitations, and one prominent problem is the difficulty in achieving synchronous detection of flatness and dimensions.

[0003] Most of the current detection methods focus on single - dimension detection. For example, some detection devices only focus on the flatness detection of glass substrates, obtaining flatness information through means such as optical interference or laser scanning. However, during the detection process, the accurate measurement of dimensions is often ignored. A single detection method cannot comprehensively evaluate whether a glass substrate meets the production standards because even if the flatness meets the standard, dimensional deviations may cause problems in subsequent production processes. For other technologies mainly for dimension detection, insufficient consideration is given to flatness when detecting dimension accuracy. They may use image recognition or mechanical measurement methods to determine the size parameters such as the length and width of the glass substrate, but cannot monitor the change of flatness in real - time.

[0004] Since in the production process of OLED glass substrates, flatness and dimensions are interrelated and affect each other, the defect of unable to perform synchronous detection makes it difficult to quickly and accurately determine whether the glass substrate is qualified on the production line, increasing the defective rate and production cost, and also restricting the improvement of production efficiency. There is an urgent need for more advanced detection technologies to solve this problem. Summary of the Invention

[0005] To solve the above problems, the present invention realizes efficient and accurate double - sided 2D flat defect detection and 3D dimension defect detection of OLED display panel glass substrates, and a glass substrate defect detection device that effectively guarantees the product quality.

[0006] The technical solution adopted by the present invention is as follows: A glass substrate defect detection device includes a chassis, a connecting device, a workbench, a Y-axis transmission device, a vacuum chuck device, a detection device, and a flipping device. The connecting device is arranged on the chassis, the workbench is arranged on the connecting device, the Y-axis transmission device is arranged on the workbench, the vacuum chuck device is arranged on the Y-axis transmission device, and the Y-axis transmission device is used to drive the vacuum chuck device to reciprocally move between the loading station, the detection device, and the flipping device; the vacuum chuck device is used to fix the glass substrate and drive the glass substrate to move; the detection device includes a gantry, a 2D defect detection module, and a 3D defect detection module. The 2D defect detection module and the 3D defect detection module are respectively arranged on both sides of the gantry. The 2D defect detection module is used to detect the planar defects of the glass substrate; the 3D defect detection module is used to detect the size of the glass substrate, and the flipping device is used to grab the glass substrate from the vacuum chuck device and then flip it back onto the vacuum chuck device.

[0007] A further improvement to the above solution is that the chassis is a rectangular frame composed of multiple square metal pipes; multiple support frames are arranged at the bottom of the chassis, and support feet are arranged on the support frames.

[0008] A further improvement to the above solution is that the connecting device includes a support frame and pneumatic vibration isolators. Support connecting plates are arranged on both sides of the support frame, and the support connecting plates are used to connect the support frame and the workbench; multiple pneumatic vibration isolators are arranged, and the multiple pneumatic vibration isolators are used to connect the chassis and the bottom surface of the workbench to isolate vibration of the workbench; the workbench is a marble workbench.

[0009] A further improvement to the above solution is that the vacuum chuck device includes a fixed bracket, a first-direction positioning module, a second-direction positioning module, a vacuum lifting module, and a vacuum chuck; the vacuum chuck is arranged on the fixed bracket, and multiple vacuum suction holes are arranged on the vacuum chuck; the first-direction positioning module and the second-direction positioning module are used to position the product on the vacuum chuck; the vacuum lifting module includes a lifting driving element, a lifting connecting plate, and multiple suction ejector rods. Suction cups are arranged at the ends of the suction ejector rods, and one end of the suction ejector rod passes through the vacuum chuck to adsorb and place the product on the vacuum chuck or lift the product from the vacuum chuck.

[0010] A further improvement to the above solution is that the first-direction positioning module includes an end-face positioning component and an end-face clamping component. The end-face positioning component is arranged on one side of the vacuum stage, and the end-face positioning component is opposite to the end-face clamping component. The end-face clamping component includes an end-face clamping driving element, an end-face clamping bracket, and an end-face clamping shaft. An end-face clamping chute is arranged on the vacuum stage. The end-face clamping driving element is arranged on the fixed bracket and is used to drive the end-face clamping bracket to drive the end-face clamping shaft to slide along the end-face clamping chute.

[0011] A further improvement to the above solution is that the end-face positioning component includes an end-face positioning bracket, an end-face positioning driving element, an end-face positioning moving frame, and an end-face positioning shaft. The end-face positioning bracket is arranged on the fixed bracket. The end-face positioning driving element is arranged on the end-face positioning bracket. The end-face positioning moving frame is arranged at the driving end of the end-face driving element. The end-face positioning shaft is arranged on the end-face positioning moving frame. The end-face positioning shaft is opposite to the end-face clamping shaft for positioning the two end faces of the product.

[0012] A further improvement to the above solution is that the end-face clamping driving element includes an end-face driving base, an end-face driving motor, an end-face driving lead screw, and an end-face driving guide rail. The end-face driving base is arranged on the fixed bracket. The end-face driving motor is arranged on the end-face driving base. The end-face driving lead screw is connected to the driving end of the end-face driving motor. The end-face driving guide rails are arranged on both sides of the end-face driving base. The end-face clamping bracket is slidably arranged on the end-face driving guide rails and is connected to the end-face driving lead screw. The end-face driving motor is used to drive the end-face driving lead screw to drive the end-face clamping bracket to slide along the end-face driving guide rails.

[0013] A further improvement to the above solution is that there are two sets of second-direction positioning modules, and the two sets of second-direction positioning modules are arranged oppositely on both sides of the vacuum stage.

[0014] A further improvement to the above solution is that the second-direction positioning module includes a side clamping driving element, a side clamping bracket, and a side clamping shaft. Side clamping chutes are arranged on both sides of the vacuum stage. The side clamping driving element is arranged on the fixed bracket and is used to drive the side clamping bracket to drive the side clamping shaft to slide along the side clamping chutes for clamping and positioning the side of the product.

[0015] A further improvement to the above solution is that the side clamping drive element includes a side drive base, a side drive motor, a side drive lead screw, and side drive guide rails. The side drive base is arranged on the fixed bracket, the side drive motor is arranged on the side drive base, the side drive lead screw is connected to the drive end of the side drive motor, and the side drive guide rails are arranged on both sides of the side drive base; the side clamping bracket is slidably arranged on the side drive guide rails and is connected to the side drive lead screw; the side drive motor is used to drive the side drive lead screw to drive the side clamping bracket to slide along the side drive guide rails.

[0016] A further improvement to the above solution is that a plurality of through holes are arranged on the vacuum carrier table, and one end of the adsorption ejector rod passes through the through holes; a buffer element is arranged between the lifting connecting plate and the vacuum carrier table.

[0017] A further improvement to the above solution is that the Y-axis transmission device includes a Y-axis linear motor and a rotation module. The Y-axis linear motor is provided with a Y-axis guide rail and a Y-axis transmission seat. The Y-axis linear motor is used to drive the Y-axis transmission seat to slide along the Y-axis guide rail, and the rotation module is used to drive the vacuum carrier table device to rotate to adjust the direction of the vacuum carrier table device.

[0018] A further improvement to the above solution is that the 2D defect detection module includes a first X-axis linear motor, a first X-axis transmission seat, a first Z-axis transmission module, and a 2D defect detection camera. The first X-axis linear motor is arranged on the gantry. The first X-axis linear motor is used to drive the first X-axis transmission seat to move linearly. The first Z-axis transmission module is arranged on the first X-axis transmission seat, and the 2D defect detection camera is arranged on the first X-axis transmission seat. The 2D defect detection camera is a 2D microscopic camera with a pixel accuracy of 1μm.

[0019] A further improvement to the above solution is that the 3D defect detection module includes a second X-axis linear motor, a second X-axis transmission seat, a second Z-axis transmission module, and a 3D defect detection camera. The second X-axis linear motor is arranged on the gantry. The second X-axis linear motor is used to drive the second X-axis transmission seat to move linearly. The second Z-axis transmission module is arranged on the second X-axis transmission seat, and the 3D defect detection camera is arranged on the second X-axis transmission seat. The 3D defect detection camera is a 3D measurement lens for measuring the size of the glass substrate.

[0020] A further improvement to the above solution is that the flipping device includes a flipping lifting module, a flipping module, a connecting module, and a material taking module. The flipping module is arranged on the flipping lifting module, the connecting module is arranged on the flipping module, the connecting module includes a connecting base and a connecting cover plate. The connecting cover plate is arranged on one side of the connecting base. The connecting base is provided with a plurality of connecting grooves, and multiple groups of the material taking modules are provided. The multiple groups of the material taking modules are respectively arranged on the multiple connecting grooves. The material taking module includes a material taking arm and a vacuum suction cup. A plurality of the vacuum suction cups are provided, and the plurality of the vacuum suction cups are continuously arranged along the length direction of the material taking arm.

[0021] A further improvement to the above solution is that the flipping module includes a flipping base, a flipping driving element, and a turntable. The flipping base is arranged on the flipping lifting module, the flipping driving element is arranged on the flipping base, the turntable is arranged on the driving end of the flipping driving element, and one end of the connecting base is connected to the turntable. A direction sensor is arranged on one side of the turntable, and the direction sensor is used to sense the flipping direction of the turntable.

[0022] A further improvement to the above solution is that a connecting fork arm is arranged on one side of the connecting base, and the connecting grooves are arranged on the connecting fork arm. The material taking arm is a hollow square tube, an installation pulling groove is arranged on one side of the material taking arm, and the vacuum suction cup is arranged on the installation pulling groove. The vacuum suction cup is provided with a material taking base, and the material taking base is fixed on the material taking arm by screws.

[0023] The beneficial effects of the present invention are as follows:

[0024] Compared with the existing glass substrate defect detection, the chassis of the present invention serves as the basic support for the entire device, providing a stable installation platform for each device and ensuring the stability of the device during operation. The setting of the connecting device connects the workbench and the chassis, not only playing a connecting role, but also buffering the vibration generated during the operation of the device to a certain extent and reducing the impact on the detection accuracy. The design of the Y-axis transmission device realizes the precise reciprocating transmission of the vacuum carrier device between the loading station, the detection device, and the flipping device. This function enables the glass substrate to accurately move to each working position according to the preset process, greatly improving the detection efficiency. Moreover, its transmission accuracy is high, which can ensure the position accuracy of the glass substrate during the transfer process. The vacuum carrier device can firmly fix the glass substrate, preventing the glass substrate from shifting or shaking during the transfer process and ensuring the accuracy of the detection. At the same time, it drives the glass substrate to be smoothly transferred, further improving the stability and smoothness of the device operation.

[0025] The gantry of the detection device provides a stable installation framework for the 2D defect detection module and the 3D defect detection module, ensuring the stability of the detection modules during operation. The 2D defect detection module can detect planar defects of the glass substrate with high precision. Whether it is a tiny scratch, crack or other surface flaw, it can be accurately identified. The 3D defect detection module focuses on detecting the size of the glass substrate. Through advanced measurement techniques, it can accurately obtain various size parameters of the glass substrate and promptly detect problems such as size deviation. The presence of the flipping device enables the equipment to achieve double-sided detection of the glass substrate. It can accurately grasp the glass substrate from the vacuum chuck device, perform precise flipping, and then place it back on the vacuum chuck device, realizing the detection of the other side of the glass substrate. This improves the comprehensiveness of detection and ensures the quality of the glass substrate for OLED display panels.

[0026] Through the collaborative work of each device, the present invention realizes efficient and precise double-sided 2D planar defect detection and 3D size defect detection of the glass substrate for OLED display panels, effectively guaranteeing the product quality and improving the production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 is a three-dimensional schematic diagram of the glass substrate defect detection equipment of the present invention;

[0028] Figure 2 is Figure 1 a three-dimensional schematic diagram of the glass substrate defect detection equipment from another perspective in;

[0029] Figure 3 is Figure 1 a top view schematic diagram of the glass substrate defect detection equipment in;

[0030] Figure 4 is Figure 1 a schematic diagram of a partial structure of the glass substrate defect detection equipment in;

[0031] Figure 5 is Figure 1 a schematic diagram of a partial structure of the glass substrate defect detection equipment in;

[0032] Figure 6 is Figure 1 a schematic diagram of the structure of the vacuum chuck device of the glass substrate defect detection equipment in;

[0033] Figure 7 is Figure 1 an exploded schematic diagram of the vacuum chuck device of the glass substrate defect detection equipment in;

[0034] Figure 8 is Figure 1 a schematic diagram of the structure of the detection device of the glass substrate defect detection equipment in;

[0035] Figure 9 is Figure 1 a schematic structural diagram of the detection device of the glass substrate defect detection equipment in

[0036] Figure 10 is Figure 1 a schematic structural diagram of the flipping device of the glass substrate defect detection equipment in

[0037] Figure 11 is Figure 1 a schematic structural diagram of the flipping device of the glass substrate defect detection equipment in

[0038] Explanation of reference numerals: chassis 1, support frame 11, support foot cup 12;

[0039] connecting device 2, support frame 21, pneumatic vibration isolator 22, support connecting plate 23;

[0040] workbench 3, Y-axis transmission device 4, Y-axis linear motor 41, Y-axis guide rail 411, Y-axis transmission seat 412, rotation module 42;

[0041] vacuum carrier device 5, fixed bracket 51, first-direction positioning module 52, end-face positioning component 521, end-face positioning bracket 5211, end-face positioning driving element 5212, end-face positioning moving frame 5213, end-face positioning shaft 5214, end-face clamping component 522, end-face clamping driving element 5221, end-face driving base 52211, end-face driving motor 52212, end-face driving lead screw 52213, end-face driving guide rail 52214, end-face clamping bracket 5222, end-face clamping shaft 5223, second-direction positioning module 53, side clamping driving element 531, side driving base 5311, side driving motor 5312, side driving lead screw 5313, side driving guide rail 5314, side clamping bracket 532, side clamping shaft 533, vacuum lifting module 54, lifting driving element 541, lifting connecting plate 542, adsorption ejector rod 543, suction cup 5431, vacuum carrier 55, vacuum adsorption hole 551, end-face clamping chute 552, side clamping chute 553, through hole 554;

[0042] detection device 6, gantry 61, 2D defect detection module 62, first X-axis linear motor 621, first X-axis transmission seat 622, first Z-axis transmission module 623, 2D defect detection camera 624, 3D defect detection module 63, second X-axis linear motor 631, second X-axis transmission seat 632, second Z-axis transmission module 633, 3D defect detection camera 634;

[0043] Inverting device 7, inverting lifting module 71, inverting module 72, inverting base 721, inverting drive element 722, turntable 723, direction sensor 7231, connecting module 73, connecting base 731, connecting groove 7311, connecting fork arm 7312, connecting cover plate 732, material taking module 74, material taking arm 741, mounting slot 7411, vacuum suction cup 742. Detailed implementation mode

[0044] For the convenience of understanding the present invention, the present invention will be described more comprehensively below with reference to the relevant drawings. Preferred embodiments of the present invention are shown in the drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, these embodiments are provided so that the understanding of the disclosure of the present invention is more thorough and comprehensive.

[0045] It should be noted that when an element is referred to as being "fixed to" another element, it can be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time.

[0046] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the technical field to which the present invention belongs. The terms used in the description of the present invention in this specification are only for the purpose of describing specific embodiments and are not intended to limit the present invention.

[0047] Such as Figures 1 to 11As shown in the figure, in an embodiment of the present invention, a glass substrate defect detection device is involved, including a chassis 1, a connecting device 2, a workbench 3, a Y-axis transmission device 4, a vacuum chuck device 5, a detection device 6, and a flipping device 7. The connecting device 2 is arranged on the chassis 1, the workbench 3 is arranged on the connecting device 2, the Y-axis transmission device 4 is arranged on the workbench 3, and the vacuum chuck device 5 is arranged on the Y-axis transmission device 4. The Y-axis transmission device 4 is used to drive the vacuum chuck device 5 to reciprocally drive between the loading station, the detection device 6, and the flipping device 7. The vacuum chuck device 5 is used to fix the glass substrate and drive the glass substrate to be transferred. The detection device 6 includes a gantry 61, a 2D defect detection module 62, and a 3D defect detection module 63. The 2D defect detection module 62 and the 3D defect detection module 63 are respectively arranged on both sides of the gantry 61. The 2D defect detection module 62 is used to detect the planar defects of the glass substrate. The 3D defect detection module 63 is used to detect the size of the glass substrate. The flipping device 7 is used to grab the glass substrate from the vacuum chuck device 5 and then flip it back onto the vacuum chuck device 5. In this embodiment, the chassis 1 serves as the basic support of the entire device, providing a stable installation platform for each device to ensure the stability of the device during operation. The setting of the connecting device 2 connects the workbench 3 to the chassis 1, which not only plays a connecting role but also can buffer the vibration generated during the operation of the device to a certain extent, reducing the impact on the detection accuracy. The design of the Y-axis transmission device realizes the precise reciprocating transmission of the vacuum chuck device 5 between the loading station, the detection device 6, and the flipping device 7. This function enables the glass substrate to accurately move to each working position according to the preset process, greatly improving the detection efficiency. Moreover, its transmission accuracy is high, which can ensure the position accuracy of the glass substrate during the transfer process. The vacuum chuck device 5 can firmly fix the glass substrate, preventing the glass substrate from shifting or shaking during the transfer process, ensuring the accuracy of the detection. At the same time, driving the glass substrate to be transferred smoothly further improves the stability and smoothness of the device operation.

[0048] In the above embodiments, the gantry 61 of the detection device 6 provides a stable installation framework for the 2D defect detection module and the 3D defect detection module, ensuring the stability of the detection module during operation. The 2D defect detection module can detect the planar defects of the glass substrate with high precision. Whether it is a tiny scratch, crack or other surface flaw, it can be accurately identified. The 3D defect detection module focuses on detecting the size of the glass substrate. Through advanced measurement techniques, it can accurately obtain various size parameters of the glass substrate and timely detect problems such as size deviation. The presence of the flipping device 7 enables the device to achieve double-sided detection of the glass substrate. It can accurately grasp the glass substrate from the vacuum chuck device 5, perform precise flipping, and then place it back on the vacuum chuck device 5, realizing the detection of the other side of the glass substrate. This function greatly improves the comprehensiveness of detection and ensures the quality of the glass substrate for the OLED display panel.

[0049] Through the collaborative work of each device in the above embodiments, high-efficiency and precise double-sided 2D planar defect detection and 3D size defect detection of the glass substrate for the OLED display panel are achieved, effectively guaranteeing the product quality and improving the production efficiency.

[0050] Refer to Figure 4As shown, the chassis 1 is a rectangular frame composed of multiple square metal pipes; multiple support frames 11 are provided at the bottom of the chassis 1, and support foot cups 12 are provided on the support frames 11; specifically, the connecting device 2 includes a support frame 21 and a pneumatic vibration isolator 22. Support connecting plates 23 are provided on both sides of the support frame 21, and the support connecting plates 23 are used to connect the support frame 21 to the workbench 3; multiple pneumatic vibration isolators 22 are provided, and the multiple pneumatic vibration isolators 22 are used to connect the chassis 1 to the bottom surface of the workbench 3 to isolate vibration from the workbench 3; the workbench 3 is a marble workbench 3. In this embodiment, the chassis 1 is a rectangular frame composed of multiple square metal pipes. This structural design has high strength and stability, can provide a solid support foundation for the entire device, effectively bear various weights and stresses during the operation of the device, and ensure that the device will not shake due to the instability of the chassis 1 during operation, thereby affecting the detection accuracy. The multiple support frames 11 and support foot cups 12 provided at the bottom not only further enhance the support capacity of the chassis 1, but also the support foot cups 12 can finely adjust the height of the device, enabling the device to adapt to different installation ground conditions and ensuring that the device is in a horizontal state, which is crucial for the high-precision detection of glass substrate defects. The support frame 21 and the pneumatic vibration isolator 22 in the connecting device 2 play a key role. The support connecting plate 23 firmly connects the support frame 21 to the workbench 3, ensuring the integrity of the structure. The multiple pneumatic vibration isolators 22 connect the chassis 1 to the bottom surface of the workbench 3, can effectively isolate the interference of external vibrations to the workbench 3, greatly reduce the impact of vibrations on the glass substrate detection, and improve the accuracy and reliability of the detection. The use of a marble workbench 3, due to its good rigidity, stability, and low expansion coefficient and other characteristics, can further reduce the errors caused by thermal deformation and mechanical vibration, provide an ideal working plane for the precise detection of glass substrates, and help improve the overall performance and detection quality of the detection device.

[0051] Refer to Figures 5 to 7As shown in the figure, the vacuum stage device 5 includes a fixed bracket 51, a first-direction positioning module 52, a second-direction positioning module 53, a vacuum lifting module 54, and a vacuum stage 55. The vacuum stage 55 is arranged on the fixed bracket 51, and a plurality of vacuum suction holes 551 are provided on the vacuum stage 55. The first-direction positioning module 52 and the second-direction positioning module 53 are used for positioning the product on the vacuum stage 55. The vacuum lifting module 54 includes a lifting driving element 541, a lifting connection plate 542, and a plurality of suction ejector rods 543. A suction cup 5431 is provided at the end of the suction ejector rod 543. One end of the suction ejector rod 543 passes through the vacuum stage 55 to adsorb and place the product on the vacuum stage 55 or lift the product from the vacuum stage 55. In this embodiment, the fixed bracket 51 provides a stable support foundation for the entire device, ensuring the stability of each component during the detection process and effectively avoiding detection errors caused by device shaking. The first-direction positioning module 52 and the second-direction positioning module 53 work together to accurately position the glass substrate on the vacuum stage 55. This enables the glass substrate to be in the accurate detection position each time, greatly improving the repeatability and accuracy of the detection and reducing misjudgment or missed detection situations caused by positioning deviation. The design of the vacuum lifting module 54 is ingenious. The lifting driving element 541 precisely controls the lifting of the lifting connection plate 542, and then drives a plurality of suction ejector rods 543 to act. The suction ejector rod 543 with a suction cup 5431 at the end can stably adsorb the glass substrate and place it smoothly on the vacuum stage 55. After the detection is completed, it can accurately lift the glass substrate from the vacuum stage 55. It not only has a smooth operation but also avoids damage to the glass substrate that may be caused by manual operation. The plurality of vacuum suction holes 551 on the vacuum stage 55 can generate a uniform and stable suction force to firmly fix the glass substrate, ensuring that the glass substrate does not displace during the detection process, providing a reliable guarantee for high-quality defect detection, and comprehensively improving the overall performance and detection efficiency of the glass substrate defect detection equipment.

[0052] The first-direction positioning module 52 includes an end-face positioning component 521 and an end-face clamping component 522. The end-face positioning component 521 is arranged on one side of the vacuum stage 55, and the end-face positioning component 521 faces the end-face clamping component 522. The end-face clamping component 522 includes an end-face clamping driving element 5221, an end-face clamping bracket 5222, and an end-face clamping shaft 5223. An end-face clamping chute 552 is arranged on the vacuum stage 55. The end-face clamping driving element 5221 is arranged on the fixed bracket 51 and is used to drive the end-face clamping bracket 5222 to drive the end-face clamping shaft 5223 to slide along the end-face clamping chute 552. In this embodiment, the end-face positioning component 521 and the opposite end-face clamping component 522 work together, greatly improving the positioning accuracy of the glass substrate during the detection process. The end-face positioning component 521 accurately determines the position reference of the glass substrate on one side, laying a foundation for subsequent accurate detection. The unique design of the end-face clamping component 522 further ensures the stable clamping of the glass substrate. The end-face clamping driving element 5221 is installed on the fixed bracket 51 and can accurately drive the end-face clamping bracket 5222 to drive the end-face clamping shaft 5223 to slide smoothly along the end-face clamping chute 552 on the vacuum stage 55. This precise driving method enables the glass substrate to achieve precise position adjustment and fixation when being clamped, effectively avoiding detection errors caused by the position change of the glass substrate during the detection process. At the same time, the stable clamping also ensures the attitude stability of the glass substrate in the detection device, enabling various detection probes of the detection device to accurately scan and analyze the surface of the glass substrate, thereby improving the reliability and accuracy of the detection results. This module significantly enhances the overall performance of the glass substrate defect detection device, provides strong support for the high-quality detection of the glass substrate, and helps to improve the quality control level during the production process of the glass substrate.

[0053] The end face positioning assembly 521 includes an end face positioning bracket 5211, an end face positioning driving element 5212, an end face positioning moving frame 5213, and an end face positioning shaft 5214. The end face positioning bracket 5211 is arranged on the fixed bracket 51. The end face positioning driving element 5212 is arranged on the end face positioning bracket 5211. The end face positioning moving frame 5213 is arranged at the driving end of the end face positioning driving element 5212. The end face positioning shaft 5214 is arranged on the end face positioning moving frame 5213. The end face positioning shaft 5214 faces the end face clamping shaft 5223 for positioning the two end faces of the product. In this embodiment, the end face positioning bracket 5211 is stably arranged on the fixed bracket 51, providing a reliable installation foundation for the entire assembly, ensuring its stability during the operation of the equipment, reducing the position deviation caused by factors such as vibration, and thus guaranteeing the accuracy of positioning. The end face positioning driving element 5212 is installed on the end face positioning bracket 5211 and can precisely control the movement of the end face positioning moving frame 5213. Through precise driving control, the end face positioning moving frame 5213 can move according to a preset trajectory and distance, providing strong support for accurately positioning the two end faces of glass substrates of different sizes. The end face positioning moving frame 5213 arranged at the driving end of the end face positioning driving element 5212 can accurately respond to the instructions of the driving element and drive the end face positioning shaft 5214 to move. This enables the end face positioning shaft 5214 to flexibly approach or move away from the end face clamping shaft 5223 to effectively position the two end faces of the product. Finally, the relatively arranged end face positioning shaft 5214 and end face clamping shaft 5223 can cooperate to precisely define the positions of the two ends of the glass substrate. During the detection process, it can effectively avoid the detection error caused by the position deviation of the glass substrate, greatly improving the accuracy and reliability of the glass substrate defect detection.

[0054] The end-face clamping drive element 5221 includes an end-face drive base 52211, an end-face drive motor 52212, an end-face drive lead screw 52213, and an end-face drive guide rail 52214. The end-face drive base 52211 is arranged on the fixed bracket 51. The end-face drive motor 52212 is arranged on the end-face drive base 52211. The end-face drive lead screw 52213 is connected to the drive end of the end-face drive motor 52212. The end-face drive guide rails 52214 are arranged on both sides of the end-face drive base 52211. The end-face clamping bracket 5222 is slidably arranged on the end-face drive guide rails 52214 and is connected to the end-face drive lead screw 52213. The end-face drive motor 52212 is used to drive the end-face drive lead screw 52213 to drive the end-face clamping bracket 5222 to slide along the end-face drive guide rails 52214. In this embodiment, the end-face drive base 52211 is stably arranged on the fixed bracket 51, providing a solid and reliable support foundation for the entire drive structure, ensuring that during the operation of the equipment, each component will not be displaced due to factors such as vibration, thus ensuring the stability and accuracy of the detection. The end-face drive motor 52212 is arranged on the end-face drive base 52211 and can accurately output power. Its connection with the end-face drive lead screw 52213 enables the power provided by the motor to be efficiently and stably converted into the rotation of the lead screw. This power transmission method not only has a rapid response but also can precisely control the rotation speed and rotation amount of the lead screw. The end-face drive guide rails 52214 are arranged on both sides of the end-face drive base 52211, providing accurate guidance for the sliding of the end-face clamping bracket 5222. The end-face clamping bracket 5222 slides smoothly on the guide rails and can ensure extremely high straightness and accuracy. When the end-face drive motor 52212 drives the end-face drive lead screw 52213 to rotate, the lead screw drives the end-face clamping bracket 5222 to make a smooth linear slide along the end-face drive guide rails 52214, enabling the glass substrate to be accurately clamped and positioned at the detection position.

[0055] There are two sets of second-direction positioning modules 53, which are relatively arranged on both sides of the vacuum stage 55; the second-direction positioning module 53 includes a side clamping driving element 531, a side clamping bracket 532 and a side clamping shaft 533. Side clamping chutes 553 are arranged on both sides of the vacuum stage 55. The side clamping driving element 531 is arranged on the fixed bracket 51 and is used to drive the side clamping bracket 532 to drive the side clamping shaft 533 to slide along the side clamping chute 553 to clamp and position the side of the product; in this embodiment, the two sets of second-direction positioning modules 53 arranged relatively on both sides of the vacuum stage 55 can apply clamping forces from both sides of the product at the same time to achieve precise positioning of the side of the product. By driving the side clamping bracket 532 by the side clamping driving element 531 to drive the side clamping shaft 533 to slide along the side clamping chute 553, the clamping position and force can be flexibly and precisely adjusted according to the requirements of glass substrate products of different sizes. It effectively avoids detection errors caused by position deviation or shaking of the product during the detection process, and greatly improves the accuracy and stability of the detection. The structural design of this positioning module enhances the fixing effect on the product, enabling the glass substrate to maintain a stable posture on the vacuum stage 55. Even during a long-term detection process, the consistency of the product position can be ensured, which helps to improve the reliability and repeatability of the detection results. This way of bilateral relative arrangement can also evenly disperse the clamping force, avoid local stress concentration on the glass substrate, reduce the risk of product damage caused by improper clamping, and further ensure the quality and integrity of the product.

[0056] The side clamping drive element 531 includes a side drive base 5311, a side drive motor 5312, a side drive lead screw 5313, and a side drive guide rail 5314. The side drive base 5311 is arranged on the fixed bracket 51. The side drive motor 5312 is arranged on the side drive base 5311. The side drive lead screw 5313 is connected to the drive end of the side drive motor 5312. The side drive guide rails 5314 are arranged on both sides of the side drive base 5311. The side clamping bracket 532 is slidably arranged on the side drive guide rails 5314 and is connected to the side drive lead screw 5313. The side drive motor 5312 is used to drive the side drive lead screw 5313 to drive the side clamping bracket 532 to slide along the side drive guide rails 5314. In this embodiment, the side drive base 5311 is firmly arranged on the fixed bracket 51, providing a solid and reliable foundation for the entire drive system, ensuring that there is no shaking or displacement during the operation of the equipment, and guaranteeing the stability and accuracy of the detection. The side drive motor 5312 is arranged on the side drive base 5311, and its precise power output can accurately control the rotation of the side drive lead screw 5313. The lead screw is tightly connected to the drive end of the motor, efficiently converting the rotational motion of the motor into a linear motion, and then driving the sliding of the side clamping bracket 532. The side drive guide rails 5314 are arranged on both sides of the side drive base 5311, providing precise sliding guidance for the side clamping bracket 532. This enables the side clamping bracket 532 to slide smoothly along a specific direction, effectively reducing the deviation and jitter during the sliding process, and greatly improving the accuracy of the clamping position of the glass substrate. The side clamping bracket 532 is slidably arranged on the guide rail and is connected to the lead screw, so that when the side drive motor 5312 drives the lead screw, it can accurately drive the bracket to slide. The side clamping bracket 532 is slidably arranged on the guide rail and is connected to the lead screw, so that when the side drive motor 5312 drives the lead screw, it can accurately drive the bracket to slide. The precise side clamping and positioning of the glass substrate are realized, and the clamping position and force can be flexibly adjusted according to the detection requirements, ensuring that the glass substrate remains stable during the detection process, thereby improving the accuracy and reliability of the glass substrate defect detection.

[0057] A plurality of through holes 554 are provided on the vacuum stage 55, and one end of the adsorption ejector rod 543 passes through the through holes 554. A buffer element 553 is arranged between the lifting connection plate 542 and the vacuum stage 55. In this embodiment, the layout of the plurality of through holes 554 can effectively enhance the adsorption stability of the vacuum stage 55 to the glass substrate. When the adsorption ejector rod 543 passes through the through holes 554 and acts on the glass substrate, it can ensure the accurate positioning of the glass substrate during the detection process, avoid detection errors caused by slight shaking, and greatly improve the detection accuracy. It helps to evenly disperse the adsorption force, prevent damage to the glass substrate caused by excessive local adsorption force, and is especially suitable for the detection of thin, light, and fragile glass substrates.

[0058] The Y-axis drive device 4 includes a Y-axis linear motor 41 and a rotation module 42. The Y-axis linear motor 41 is provided with a Y-axis guide rail 411 and a Y-axis drive seat 412. The Y-axis linear motor 41 is used to drive the Y-axis drive seat 412 to slide along the Y-axis guide rail 411, and the rotation module 42 is used to drive the vacuum stage 55 device 5 to rotate to adjust the direction of the vacuum stage 55 device 5. In this embodiment, the Y-axis guide rail 411 and the Y-axis drive seat 412 equipped with the Y-axis linear motor 41 provide a drive with high precision and high stability for the linear motion of the vacuum stage 55 device 5. Its precise driving force control enables the Y-axis drive seat 412 to slide smoothly and precisely along the Y-axis guide rail 411, ensuring that the positioning accuracy error of the vacuum stage 55 device 5 in the Y-axis direction is extremely small, thereby improving the detection position accuracy of the glass substrate in this direction and effectively reducing the detection errors caused by position deviation. The rotation module 42 can flexibly drive the vacuum stage 55 device 5 to rotate and can quickly and precisely adjust the direction of the vacuum stage 55 device 5 according to the detection requirements. This enables all angles of the glass substrate to be comprehensively and carefully detected, greatly improving the comprehensiveness and accuracy of the detection.

[0059] Refer to Figures 8 to 9As shown in the figure, the 2D defect detection module 62 includes a first X-axis linear motor 621, a first X-axis transmission seat 622, a first Z-axis transmission module 623, and a 2D defect detection camera 624. The first X-axis linear motor 621 is arranged on the gantry 61. The first X-axis linear motor 621 is used to drive the first X-axis transmission seat 622 to move linearly. The first Z-axis transmission module 623 is arranged on the first X-axis transmission seat 622. The 2D defect detection camera 624 is arranged on the first X-axis transmission seat 622. The 2D defect detection camera 624 is a 2D microscopic camera with a pixel accuracy of 1μm. Specifically, the 3D defect detection module 63 includes a second X-axis linear motor 631, a second X-axis transmission seat 632, a second Z-axis transmission module 633, and a 3D defect detection camera 634. The second X-axis linear motor 631 is arranged on the gantry 61. The second X-axis linear motor 631 is used to drive the second X-axis transmission seat 632 to move linearly. The second Z-axis transmission module 633 is arranged on the second X-axis transmission seat 632. The 3D defect detection camera 634 is arranged on the second X-axis transmission seat 632. The 3D defect detection camera 634 is a 3D measurement lens for measuring the size of the glass substrate. In this embodiment, the first X-axis linear motor of the 2D defect detection module is arranged on the gantry 61, which accurately drives the first X-axis transmission seat to move linearly. Cooperating with the first Z-axis transmission module arranged on it, the position of the 2D defect detection camera can be flexibly adjusted to ensure that the camera can comprehensively cover and detect each area on the surface of the glass substrate. It uses a 2D microscopic camera with a pixel accuracy of 1μm, which can clearly capture the tiny defects on the surface of the glass substrate, such as two-dimensional defects like scratches and cracks, providing high-resolution image data for subsequent analysis and processing, and greatly improving the detection ability of microscopic defects. The 3D defect detection module is also arranged based on the gantry 61. The second X-axis linear motor drives the second X-axis transmission seat to move linearly, and the second Z-axis transmission module assists in positioning the 3D defect detection camera. The 3D measurement lens equipped with this module can accurately measure the size of the glass substrate, not only detecting whether there are size deviations in the glass substrate, but also effectively identifying three-dimensional defects such as unevenness on the substrate surface. Through the organic combination of these two modules, the glass substrate defect detection device realizes the all-round and multi-dimensional defect detection of the glass substrate, greatly improving the accuracy and reliability of the detection, and effectively ensuring the quality of the glass substrate.

[0060] Refer to Figures 10 to 11As shown, the flip device 7 includes a flip lifting module 71, a flip module 72, a connecting module 73 and a material taking module 74, wherein the flip module 72 is arranged on the flip lifting module 71, the connecting module 73 is arranged on the flip module 72, the connecting module 73 includes a connecting base 731 and a connecting cover 732, the connecting cover 732 is arranged on one side of the connecting base 731, the connecting base 731 is provided with a plurality of connecting grooves 7311, the material taking module 74 is provided with a plurality of groups, and the plurality of groups of the material taking modules 74 are respectively arranged on a plurality of connecting grooves 7311. The connecting groove 7311; the material picking module 74 includes a material picking arm 741 and a vacuum suction cup 742, and the vacuum suction cup 742 is provided with a plurality of vacuum suction cups 742, and the plurality of vacuum suction cups 742 are arranged continuously along the length direction of the material picking arm 741; in this embodiment, the coordinated operation of the flipping and lifting module 71 and the flipping module 72 can accurately control the flipping angle and height of the glass substrate, so that the glass substrate can be presented in the detection area in all directions, effectively solving the problem of defect detection on different surfaces and different positions of the glass substrate, and greatly improving the comprehensiveness and accuracy of the detection. The adaptive installation of the multiple connecting grooves 7311 on the connecting base 731 and the multiple groups of material picking modules 74 not only realizes the stable setting of the material picking module 74, but also provides a flexible combination method. According to the detection requirements of glass substrates of different sizes and shapes, the number and layout of the material picking modules 74 can be adjusted conveniently and quickly, which enhances the versatility and adaptability of the equipment. The multiple vacuum suction cups 742 arranged continuously along the length direction of the picking arm 741 in the picking module 74 can evenly and stably adsorb the glass substrate, ensure the position accuracy of the glass substrate during the flipping process, avoid deviation or shaking caused by unstable adsorption, and thus ensure the reliability of the detection data.

[0061] The flipping module 72 includes a flipping base 721, a flipping driving element 722, and a turntable 723. The flipping base 721 is arranged on the flipping lifting module 71. The flipping driving element 722 is arranged on the flipping base 721. The turntable 723 is arranged at the driving end of the flipping driving element 722. One end of the connecting base 731 is connected to the turntable 723. A direction sensor 7231 is arranged on one side of the turntable 723. The direction sensor 7231 is used to sense the flipping direction of the turntable 723. Specifically, a connecting fork arm 7312 is arranged on one side of the connecting base 731. The connecting groove 7311 is arranged on the connecting fork arm 7312. The material taking arm 741 is a hollow square tube. An installation pulling groove 7411 is arranged on one side of the material taking arm 741. The vacuum suction cup 742 is arranged on the installation pulling groove 7411. The vacuum suction cup 742 is provided with a material taking base 7421. The material taking base 7421 is fixed on the material taking arm 741 by screws. In this embodiment, the flipping base 721 is arranged on the flipping lifting module 71, ensuring a solid support foundation for the entire flipping action and guaranteeing stability. The flipping driving element 722 is installed on the flipping base 721, capable of precisely driving the turntable 723 to rotate, enabling the connecting base 731 and the components connected thereto to achieve precise flipping, meeting the requirements of different angles during the detection of the glass substrate, and thus comprehensively detecting the defect conditions of each surface of the glass substrate. The setting of the direction sensor 7231 is of crucial significance. It can sense the flipping direction of the turntable 723 in real time, providing accurate direction data for the entire detection process, helping the equipment control system to make precise action adjustments, ensuring that the glass substrate is flipped to the appropriate position, and enhancing the accuracy and reliability of the detection. The connecting base 731 is connected to other components through the connecting fork arm 7312, with a clever structural design, ensuring the stability and flexibility of the connection between components. The material taking arm 741 adopts a hollow square tube design, reducing its own weight while ensuring sufficient strength. The vacuum suction cup 742 is fixed on the material taking arm 741 through the material taking base 7421, capable of reliably adsorbing the glass substrate and ensuring that the glass substrate does not fall off during the flipping process.

[0062] The above embodiments only represent several implementation manners of the present invention. The description is relatively specific and detailed, but it should not be construed as a limitation to the scope of the patent of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several deformations and improvements can still be made, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention should be subject to the appended claims.

Claims

1. A glass substrate defect detection device, characterized in that: The invention comprises a base frame, a connecting device, a workbench, a Y-axis transmission device, a vacuum stage device, a detection device and a flipping device, wherein the connecting device is arranged on the base frame, the workbench is arranged on the connecting device, the Y-axis transmission device is arranged on the workbench, the vacuum stage device is arranged on the Y-axis transmission device, and the Y-axis transmission device is used to drive the vacuum stage device to reciprocate between the loading station, the detection device and the flipping device; the vacuum stage device is used to fix the glass substrate and drive the glass substrate to move; the detection device comprises a gantry, a 2D defect detection module and a 3D defect detection module, the 2D defect detection module and the 3D defect detection module are respectively arranged on both sides of the gantry, the 2D defect detection module is used to detect the plane defects of the glass substrate; the 3D defect detection module is used to detect the size of the glass substrate, and the flipping device is used to grab the glass substrate from the vacuum stage device and flip it back to the vacuum stage device.

2. The glass substrate defect detection device according to claim 1, characterized in that: The base frame is a rectangular frame composed of a plurality of square metal pipes; a plurality of support frames are arranged at the bottom of the base frame, and support foot cups are arranged on the support frames; The connecting device includes a supporting frame and a pneumatic vibration isolator. Support connecting plates are arranged on both sides of the supporting frame, and the supporting connecting plates are used to connect the supporting frame with the workbench. A plurality of pneumatic vibration isolators are arranged, and the plurality of pneumatic vibration isolators are used to connect the base frame with the bottom surface of the workbench to isolate the workbench from vibration. The workbench is a marble workbench.

3. The glass substrate defect detection device according to claim 1, characterized in that: The vacuum carrier device includes a fixed bracket, a first direction positioning module, a second direction positioning module, a vacuum lifting module and a vacuum carrier; the vacuum carrier is arranged on the fixed bracket, and a plurality of vacuum adsorption holes are arranged on the vacuum carrier; the first direction positioning module and the second direction positioning module are used for positioning the product on the vacuum carrier; the vacuum lifting module includes a lifting drive element, a lifting connecting plate and a plurality of adsorption push rods, a suction cup is arranged at the end of the adsorption push rod, and one end of the adsorption push rod passes through the vacuum carrier to adsorb and place the product on the vacuum carrier or lift the product from the vacuum carrier.

4. The glass substrate defect detection device according to claim 3, characterized in that: The first direction positioning module includes an end surface positioning component and an end surface clamping component, wherein the end surface positioning component is arranged on one side of the vacuum stage, and the end surface positioning component is opposite to the end surface clamping component; the end surface clamping component includes an end surface clamping driving element, an end surface clamping bracket and an end surface clamping shaft, an end surface clamping slide groove is arranged on the vacuum stage, and the end surface clamping driving element is arranged on the fixed bracket and is used to drive the end surface clamping bracket to drive the end surface clamping shaft to slide along the end surface clamping slide groove; The end surface positioning assembly includes an end surface positioning bracket, an end surface positioning driving element, an end surface positioning movable frame and an end surface positioning shaft, wherein the end surface positioning bracket is arranged on a fixed bracket, the end surface positioning driving element is arranged on the end surface positioning bracket, the end surface positioning movable frame is arranged on a driving end of the end surface driving element, and the end surface positioning shaft is arranged on the end surface positioning movable frame, and the end surface positioning shaft is opposite to the end surface clamping shaft, so as to position the two end surfaces of the product; The end face clamping driving element includes an end face driving base, an end face driving motor, an end face driving screw and an end face driving guide rail, the end face driving base is arranged on a fixed bracket, the end face driving motor is arranged on the end face driving base, the end face driving screw is connected to the driving end of the end face driving motor, and the end face driving guide rail is arranged on both sides of the end face driving base; the end face clamping bracket is slidably arranged on the end face driving guide rail and is connected to the end face driving screw; the end face driving motor is used to drive the end face driving screw to drive the end face clamping bracket to slide along the end face driving guide rail.

5. The glass substrate defect detection device according to claim 4, characterized in that: The second direction positioning modules are provided in two groups, and the two groups of second direction positioning modules are relatively arranged on two sides of the vacuum stage; The second direction positioning module includes a side clamping driving element, a side clamping bracket and a side clamping shaft. Side clamping slide grooves are arranged on both sides of the vacuum stage. The side clamping driving element is arranged on the fixed bracket and is used to drive the side clamping bracket to drive the side clamping shaft to slide along the side clamping slide groove to clamp and position the side of the product. The side clamping drive element includes a side drive base, a side drive motor, a side drive screw and a side drive guide rail. The side drive base is arranged on a fixed bracket, the side drive motor is arranged on the side drive base, the side drive screw is connected to the drive end of the side drive motor, and the side drive guide rail is arranged on both sides of the side drive base; the side clamping bracket is slidably arranged on the side drive guide rail and is connected to the side drive screw; the side drive motor is used to drive the side drive screw to drive the side clamping bracket to slide along the side drive guide rail.

6. The glass substrate defect detection device according to claim 5, characterized in that: The vacuum stage is provided with a plurality of through holes, and one end of the adsorption ejector rod passes through the through hole; a buffer element is provided between the lifting connecting plate and the vacuum stage.

7. The glass substrate defect detection device according to claim 1, characterized in that: The Y-axis transmission device includes a Y-axis linear motor and a rotating module. The Y-axis linear motor is provided with a Y-axis guide rail and a Y-axis transmission seat. The Y-axis linear motor is used to drive the Y-axis transmission seat to slide along the Y-axis guide rail. The rotating module is used to drive the vacuum stage device to rotate to adjust the direction of the vacuum stage device.

8. The glass substrate defect detection device according to claim 1, characterized in that: The 2D defect detection module includes a first X-axis linear motor, a first X-axis transmission seat, a first Z-axis transmission module and a 2D defect detection camera. The first X-axis linear motor is arranged on the gantry. The first X-axis linear motor is used to drive the first X-axis transmission seat to move linearly. The first Z-axis transmission module is arranged on the first X-axis transmission seat. The 2D defect detection camera is arranged on the first X-axis transmission seat. The 2D defect detection camera is a 2D microscope camera with a pixel accuracy of 1μm.

9. The glass substrate defect detection device according to claim 8, characterized in that: The 3D defect detection module includes a second X-axis linear motor, a second X-axis transmission seat, a second Z-axis transmission module and a 3D defect detection camera, wherein the second X-axis linear motor is arranged on the gantry, the second X-axis linear motor is used to drive the second X-axis transmission seat to move linearly, the second Z-axis transmission module is arranged on the second X-axis transmission seat, and the 3D defect detection camera is arranged on the second X-axis transmission seat, and the 3D defect detection camera is a 3D measuring lens to measure the size of the glass substrate.

10. The glass substrate defect detection device according to claim 1, characterized in that: The flipping device includes a flipping and lifting module, a flipping module, a connecting module and a material taking module. The flipping module is arranged on the flipping and lifting module. The connecting module is arranged on the flipping module. The connecting module includes a connecting base and a connecting cover plate. The connecting cover plate is arranged on one side of the connecting base. The connecting base is provided with a plurality of connecting grooves. The material taking module is provided with a plurality of groups. The plurality of groups of the material taking modules are respectively arranged on a plurality of connecting grooves. The material taking module includes a material taking arm and a vacuum suction cup. The plurality of vacuum suction cups are provided. The plurality of vacuum suction cups are continuously arranged along the length direction of the material taking arm. The flip module comprises a flip base, a flip driving element and a turntable, wherein the flip base is arranged on the flip lifting module, the flip driving element is arranged on the flip base, the turntable is arranged at the driving end of the flip driving element, and one end of the connecting base is connected to the turntable; a direction sensor is arranged on one side of the turntable, and the direction sensor is used to sense the flipping direction of the turntable; A connecting fork arm is provided on one side of the connecting base, and the connecting groove is provided on the connecting fork arm; the material picking arm is a hollow square tube, and a mounting groove is provided on one side of the material picking arm, and the vacuum suction cup is provided on the mounting groove; the vacuum suction cup is provided with a material picking base, and the material picking base is fixed to the material picking arm by screws.

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