Z-axis transfer platform, displacement device and bonding equipment of TCB process

Abstract

The invention provides a Z-axis transfer platform for a TCB process, and the Z-axis transfer device comprises a first transmission block which comprises a first inclined plane, and the upper side of the first inclined plane is provided with a plurality of first fixed blocks; the second transmission block is located on the upper side of the first transmission block, the second transmission block comprises a second inclined plane, at least one first guide rail is arranged on the lower side of the second inclined plane, and the first guide rail is slidably connected to the first fixing block; the motor is connected to the first transmission block and used for driving the first transmission block to move in the X-axis direction. According to the technical scheme of the embodiment, when the first transmission block is driven to move in the X-axis direction through sliding connection between the first inclined face and the second inclined face, the first fixing block moves along the first guide rail fixed to the second inclined face, and the second transmission block is driven to move; the displacement of the second transmission block in the Z-axis direction is inevitably smaller than the displacement of the first transmission block in the X-axis direction, so that the displacement precision of the Z-axis transfer platform in the Z-axis direction is improved.

Description

Technical Field

[0001] The present invention belongs to the technical field of thermal compression bonding, and particularly relates to a Z-axis transfer platform, a displacement device and a bonding device thereof for a TCB process. Background Art

[0002] In the manufacturing process of a chip, the thermal compression bonding (TCB for short) process is used to bond the chip to the substrate. During the bonding process of the chip and the substrate, it is necessary to drive the chip to move along the Z-axis direction.

[0003] In the prior art, the chip is fixed on the carrier plate, and the carrier plate is directly driven by a Z-axis motor to lift and lower along the Z-axis direction. The movement accuracy of the carrier plate completely depends on the movement accuracy of the Z-axis motor. The displacement of the chip in the Z-axis direction is the same as the displacement of the carrier plate driven by the Z-axis motor in the Z-axis direction. However, the minimum movement distance of the Z-axis motor is still too large for the movement distance of the chip bonding in the Z-axis direction, resulting in insufficient movement accuracy of the chip in the Z-axis direction. Summary of the Invention

[0004] The embodiments of the present invention provide a Z-axis transfer platform, a displacement device and a bonding device thereof for a TCB process, which can improve the movement accuracy in the Z-axis direction.

[0005] In a first aspect, the embodiments of the present invention provide a Z-axis transfer platform for a TCB process, including: A first transmission block, the first transmission block includes a first inclined surface, and a plurality of first fixing blocks are arranged on the upper side of the first inclined surface; A second transmission block, the second transmission block is located on the upper side of the first transmission block, the second transmission block includes a second inclined surface, and at least one first guide rail is arranged on the lower side of the second inclined surface, and the first guide rail is slidably connected to the first fixing block; A motor, the motor is connected to the first transmission block, and the motor is used to drive the first transmission block to move along the X-axis direction.

[0006] According to some embodiments of the present invention, it further includes: A vertical mounting plate, a second guide rail is arranged on the front surface of the vertical mounting plate, the second guide rail is arranged along the Z-axis direction, the second transmission block is mounted on the second guide rail, and the second transmission block can slide on the second guide rail.

[0007] According to some embodiments of the present invention, it further includes: A horizontal mounting plate, which is vertically fixed to the upper side of the vertical mounting plate. A third guide rail is provided on the upper side of the horizontal mounting plate. The third guide rail is arranged along the X-axis direction. The first driving block is mounted on the third guide rail and can slide along the third guide rail.

[0008] According to some embodiments of the present invention, it further includes: A coupling and a lead screw. The motor is a servo motor. The servo motor includes an output shaft. The output shaft is parallel to the X-axis direction. The output shaft is connected to the coupling. The coupling is connected to the lead screw. A second fixing block is provided on the lower side of the first driving block. The second fixing block is provided with a threaded hole. The lead screw passes through the threaded hole.

[0009] According to some embodiments of the present invention, it further includes: A limit plate, which is vertically fixed to the upper surface of the horizontal mounting plate. A blind hole is provided on the side of the limit plate close to the lead screw. One end of the lead screw is connected to the coupling, and the other end of the lead screw is located inside the blind hole.

[0010] According to some embodiments of the present invention, it further includes: A controller, a grating ruler, and a grating reading head. The grating ruler is fixed to the second driving block. The grating reading head is fixed to the vertical mounting plate. The controller is electrically connected to the motor and the grating reading head respectively.

[0011] According to some embodiments of the present invention, it further includes: A first photoelectric switch, a second photoelectric switch, and a baffle. The baffle is fixed to the first driving block. The first photoelectric switch and the second photoelectric switch are respectively fixed to the upper surface of the horizontal mounting plate. The first photoelectric switch and the second photoelectric switch are electrically connected to the controller. When the first driving block is located at one end of the third guide rail, the baffle is located inside the groove of the first photoelectric switch. When the first driving block is located at the other end of the third guide rail, the baffle is located inside the groove of the second photoelectric switch.

[0012] According to some embodiments of the present invention, the number of the first guide rails is two, and the number of the first fixing blocks is four. Two of the first fixing blocks are slidably connected to one of the first guide rails, and the other two first fixing blocks are slidably connected to the other first guide rail. The two first guide rails are parallel to each other.

[0013] In a second aspect, an embodiment of the present invention further provides a displacement device, including the Z-axis transfer platform of the TCB process as described in the first aspect.

[0014] In a third aspect, an embodiment of the present invention further provides a bonding device, which includes the Z-axis transfer platform of the TCB process as described in the first aspect, or includes the displacement device as described in the second aspect.

[0015] An embodiment of the present invention includes: a first transmission block, the first transmission block includes a first inclined surface, and a plurality of first fixing blocks are arranged on the upper side of the first inclined surface; a second transmission block, the second transmission block is located above the first transmission block, the second transmission block includes a second inclined surface, and at least one first guide rail is arranged on the lower side of the second inclined surface, and the first guide rail is slidably connected to the first fixing block; a motor, the motor is connected to the first transmission block, and the motor is used to drive the first transmission block to move along the X-axis direction. According to the technical solution of this embodiment, the first transmission block and the second transmission block are connected by the first guide rail installed on the second inclined surface. When the motor drives the first transmission block to move along the X-axis direction, the displacement of the second transmission block in the Z-axis direction is the component of the displacement of the first transmission block in the Z-axis direction. Since the component of the first transmission block in the Z-axis direction is smaller than the displacement of the first transmission block in the X-axis direction, a larger displacement of the first transmission block in the X-axis direction is converted into a smaller displacement of the second transmission block in the Z-axis direction, reducing the displacement in the Z-axis direction under the same output of the motor, thereby improving the displacement accuracy in the Z-axis direction. Description of the Drawings

[0016] Figure 1 is a schematic structural diagram of the Z-axis transfer platform of the TCB process provided by an embodiment of the present invention; Figure 2 is a schematic bottom sectional view of the Z-axis transfer platform of the TCB process provided by another embodiment of the present invention. Detailed Embodiments

[0017] In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0018] It should be noted that although the functional modules are divided in the device schematic diagram and the logical order is shown in the flowchart, in some cases, the steps shown or described can be executed in a different order from the module division in the device or the flowchart in the flowchart. Terms such as "first" and "target" in the specification, claims or the above-mentioned drawings are used to distinguish similar objects and do not necessarily need to describe a specific order or sequence.

[0019] Embodiments of the present invention include: a first transmission block, the first transmission block includes a first inclined surface, and a plurality of first fixing blocks are arranged on the upper side of the first inclined surface; a second transmission block, the second transmission block is located above the first transmission block, the second transmission block includes a second inclined surface, and at least one first guide rail is arranged on the lower side of the second inclined surface, and the first guide rail is slidably connected to the first fixing block; a motor, the motor is connected to the first transmission block, and the motor is used to drive the first transmission block to move in the X-axis direction. According to the technical solution of this embodiment, the first transmission block and the second transmission block are connected by the first guide rail installed on the second inclined surface. When the motor drives the first transmission block to move in the X-axis direction, the displacement of the second transmission block in the Z-axis direction is the component of the displacement of the first transmission block in the Z-axis direction. Since the component of the first transmission block in the Z-axis direction is smaller than the displacement of the first transmission block in the X-axis direction, a relatively large displacement of the first transmission block in the X-axis direction is converted into a relatively small displacement of the second transmission block in the Z-axis direction, reducing the displacement in the Z-axis direction under the same output of the motor, thereby improving the displacement accuracy of the Z-axis transfer platform in the Z-axis direction.

[0020] Referring to Figure 1 , the Z-axis transfer platform of the TCB process provided by this embodiment includes: A first transmission block 100, the first transmission block 100 includes a first inclined surface, and a plurality of first fixing blocks 110 are arranged on the upper side of the first inclined surface; A second transmission block 200, the second transmission block 200 is located above the first transmission block 100, the second transmission block 200 includes a second inclined surface, and at least one first guide rail 210 is arranged on the lower side of the second inclined surface, and the first guide rail 210 is slidably connected to the first fixing block 110; A motor 300, the motor 300 is connected to the first transmission block 100, and the motor 300 is used to drive the first transmission block 100 to move in the X-axis direction.

[0021] It should be noted that the first inclined surface is parallel to the second inclined surface; that is, the first guide rail 210 and the first fixing block 110 installed between the first inclined surface and the second inclined surface will not be subjected to pressure or tension perpendicular to the first inclined surface, reducing the wear of the first guide rail 210 and the first fixing block 110, and extending the service life of the first guide rail 210 and the first fixing block 110.

[0022] It should be noted that, in order to reduce errors and improve accuracy, the longitudinal sections of the first transmission block 100 and the second transmission block 200 are right-angled triangles, and the first inclined surface is parallel to the second inclined surface, so that the bottom surface of the first transmission block 100 is parallel to the horizontal plane, and the top end of the second transmission block 200 is parallel to the horizontal plane, so that the carrier plate installed at the top end of the second transmission block 200 is kept horizontal, ensuring the accuracy requirements between the chip and the substrate in the TCB process.

[0023] It should be noted that the first guide rail 210 is parallel to the vertical plane, that is, when the second transmission block 200 slides above the first inclined plane through the first guide rail 210 and the first fixing block 110, the second transmission block 200 has no displacement in the Y-axis direction.

[0024] It should be noted that the first guide rail 210 is slidably connected to a plurality of first fixing blocks 110, so that the supporting force received by the second transmission block 200 during the movement along the first guide rail 210 is more stable.

[0025] It should be noted that when the number of the first guide rails 210 provided on the lower side of the second inclined plane is greater than or equal to two and the first guide rails 210 are parallel to each other, if the number of the first fixing blocks 110 provided on the upper side of the first inclined plane is equal to the number of the first guide rails 210, one first guide rail 210 slides on one first fixing block 110; when the number of the first fixing blocks 110 is twice the number of the first guide rails 210, one first guide rail 210 slides on two first fixing blocks 110, so that the supporting force of the first guide rail 210 on the second transmission block 200 is more stable.

[0026] It should be noted that the motor 300 drives the first transmission block 100 to generate a displacement in the X-axis direction, and the first fixing block 110 fixed to the first inclined plane generates a displacement in the X-axis direction. The first transmission block and the second transmission block are connected through the first fixing block 110 fixed to the first inclined plane and the first guide rail 210 installed on the second inclined plane. Driven by the first transmission block 100, the second transmission block 200 has a displacement in the X-axis direction and a displacement in the Z-axis direction. The displacement of the second transmission block in the Z-axis direction is the component of the displacement of the first transmission block in the Z-axis direction. Since the component of the first transmission block in the Z-axis direction is smaller than the displacement of the first transmission block in the X-axis direction, the displacement of the second transmission block 200 in the Z-axis direction must be smaller than the displacement of the first transmission block 100 in the X-axis direction. When the motor 300 provides the same output, through the sliding connection between the first inclined plane and the second inclined plane of the present application, the displacement in the Z-axis direction is reduced, thereby improving the displacement accuracy in the Z-axis direction.

[0027] In addition, in an embodiment, referring to Figure 1 , further includes: A vertical mounting plate 400, a second guide rail 410 is provided on the front surface of the vertical mounting plate 400. The second guide rail 410 is provided along the Z-axis direction. The second transmission block 200 is mounted on the second guide rail 410, and the second transmission block 200 can slide on the second guide rail 410.

[0028] It should be noted that the vertical mounting plate 400 and the second guide rail 410 provide limits for the movement of the second drive block 200 in the X-axis direction, enabling the second drive block 200 to move only in the Z-axis direction. The setting of the second guide rail 410 can more accurately control the displacement of the second drive block 200 in the Z-axis direction.

[0029] It should be noted that the longitudinal section of the second drive block 200 is a right triangle, and the second inclined plane is the plane opposite to the right angle of the right triangle. The longitudinal section of the second drive block 200 being a right triangle makes the contact surface between the second drive block 200 and the second guide rail 410 a vertical plane, providing vertical rough calibration for the second drive block 200 mounted on the second guide rail 410 and achieving a better movement effect in the Z-axis direction.

[0030] It should be noted that the second guide rail 410 is a crossed roller guide rail. By using a crossed roller guide rail, the second drive block 200 can bear a greater load in the Z-axis direction, and has higher movement precision in the Z-axis direction, meeting the requirements of high precision and large pressure in the TCB process.

[0031] It should be noted that when the number of the second guide rails 410 is two, the two second guide rails 410 are parallel to each other and are respectively arranged at both ends of the second drive block 200, making the supporting force received by the second drive block 200 stable and balanced, enabling the second drive block 200 to bear a greater Z-axis load.

[0032] In addition, in an embodiment, referring to Figure 1 , it further includes: A horizontal mounting plate 500, which is vertically fixed to the upper side of the vertical mounting plate 400. A third guide rail 510 is arranged on the upper side of the horizontal mounting plate 500. The third guide rail 510 is arranged along the X-axis direction. The first drive block 100 is mounted on the third guide rail 510 and can slide along the third guide rail 510.

[0033] It should be noted that by setting the horizontal mounting plate 500 and the third guide rail 510, driven by the motor 300, the first drive block 100 moves along the third guide rail 510, ensuring that the first drive block 100 moves only in the X-axis direction and preventing damage to the first guide rail 210 caused by deviation in the movement direction of the first drive block 100.

[0034] It should be noted that the longitudinal section of the first drive block 100 is a right triangle, and the first inclined plane is the plane opposite to the right angle of the right triangle. The longitudinal section of the first drive block 100 being a right triangle makes the contact surface between the first drive block 100 and the third guide rail 510 a horizontal plane, providing horizontal rough calibration for the first drive block 100 mounted on the third guide rail 510 and achieving better displacement precision in the X-axis direction.

[0035] In addition, in one embodiment, referring to Figure 1 and Figure 2 , it further includes: A coupling 610 and a lead screw 620. The motor 300 is a servo motor. The servo motor 300 includes an output shaft. The output shaft is parallel to the X-axis direction. The output shaft is connected to the coupling 610. The coupling 610 is connected to the lead screw 620. A second fixing block 120 is provided on the lower side of the first transmission block 100. The second fixing block 120 is provided with a threaded hole. The lead screw 620 passes through the threaded hole.

[0036] It should be noted that the coupling 610, the lead screw 620 and the output shaft are all parallel to the X-axis direction. The servo motor 300 drives the second fixing block 120 to move along the X-axis direction through the coupling 610 and the lead screw 620, so that the first transmission block 100 moves linearly along the X-axis direction.

[0037] It should be noted that through the coupling 610 and the lead screw 620, lead screws 620 of different specifications can be replaced according to actual needs to meet the displacement accuracy requirements of the first transmission block 100 in the X-axis direction, thereby further improving the displacement accuracy of the second transmission block 200 in the Z-axis direction.

[0038] In addition, in one embodiment, referring to Figure 1 and Figure 2 , it further includes: A limit plate 630. The limit plate 630 is vertically fixed to the upper surface of the horizontal mounting plate 500. A blind hole is provided on one side of the limit plate 630 close to the lead screw 620. One end of the lead screw 620 is connected to the coupling 610, and the other end of the lead screw 620 is located inside the blind hole.

[0039] It should be noted that the limit plate 630 provides a limit in the X-axis direction for the second fixing block 120 moving on the lead screw 620, preventing the second fixing block 120 from continuously moving in the direction away from the coupling 610 under the drive of the servo motor 300 and the lead screw 620, resulting in the second fixing block 120 falling off the lead screw 620, and making the second fixing block 120 located between the limit plate 630 and the coupling 610.

[0040] In addition, in one embodiment, referring to Figure 1 , it further includes: A controller, a grating scale 710 and a grating reading head 720. The grating scale 710 is fixed to the second transmission block 200. The grating reading head 720 is fixed to the vertical mounting plate 400. The controller is electrically connected to the motor 300 and the grating reading head 720 respectively.

[0041] It should be noted that through the relative displacement between the grating scale 710 and the grating reading head 720, the accurate displacement of the second transmission block 200 in the Z-axis direction is obtained; the controller obtains the feedback signal of the grating reading head 720 and controls the motor 300 based on the feedback signal to more accurately control the displacement of the second transmission block 200, meeting the chip displacement accuracy requirements in the TCB process.

[0042] In addition, in one embodiment, referring to Figure 1 , it further includes: A first photoelectric switch 810, a second photoelectric switch 820, and a baffle 830. The baffle 830 is fixed to the first transmission block 100. The first photoelectric switch 810 and the second photoelectric switch 820 are respectively fixed to the upper surface of the horizontal mounting plate 500. The first photoelectric switch 810 and the second photoelectric switch 820 are electrically connected to the controller. When the first transmission block 100 is at one end of the third guide rail 510, the baffle 830 is inside the groove of the first photoelectric switch 810. When the first transmission block 100 is at the other end of the third guide rail 510, the baffle 830 is inside the groove of the second photoelectric switch 820.

[0043] It should be noted that the first photoelectric switch 810 and the second photoelectric switch 820 are groove-type photoelectric switches. On both sides inside the groove of the groove-type photoelectric switch are an infrared light emitting end and an infrared light receiving end respectively. When the L-shaped piece is at the first photoelectric switch 810 or at the second photoelectric switch 820, and the L-shaped piece is between the emitting end and the receiving end, when the receiving end cannot receive the optical signal, an electrical signal is sent to the host computer, and the host computer controls the motor 300 to stop running and no longer drives the first transmission block 100 to continue moving in the same direction, so as to prevent the first transmission block 100 from damaging the third guide rail 510.

[0044] In addition, in one embodiment, referring to Figure 1 and Figure 2 , the number of the first guide rails 210 is two, and the number of the first fixing blocks 110 is four. Two first fixing blocks 110 are slidably connected to one first guide rail 210, and the other two first fixing blocks 110 are slidably connected to the other first guide rail 210. The two first guide rails 210 are parallel to each other.

[0045] It should be noted that the first fixing block 110 is slidably mounted on the first guide rail 210, and relative movement can be achieved between the first fixing block 110 and the first guide rail 210. By setting two mutually parallel first guide rails 210, with the number of the first guide rails 210 being two and the number of the first fixing blocks 110 being four, the number of the first fixing blocks 110 mounted on the first guide rail 210 is increased, dispersing the load pressure on the first guide rail 210, making the supporting force received by the second transmission block 200 balanced and stable, and reducing the jitter during the movement of the second transmission block 200.

[0046] It should be noted that the servo motor 300 drives the second fixed block 120 to move along the direction of the lead screw 620 through the coupling 610 and the lead screw 620, thereby driving the first transmission block 100 to move along the third guide rail 510. When the servo motor 300 drives the first transmission block 100 to approach the second transmission block 200 along the X-axis direction, the first fixed block 110 generates a thrust perpendicular to the first inclined plane on the second transmission block 200 through the first guide rail 210. The thrust has components in the X-axis direction and the Z-axis direction, and the component of the thrust in the Z-axis direction causes the second transmission block 200 to rise along the Z-axis direction. When the servo motor 300 drives the first transmission block 100 to move away from the second transmission block 200 along the X-axis direction, the first fixed block 110 generates a pulling force perpendicular to the first inclined plane on the second transmission block 200 through the first guide rail 210. The pulling force has components in the X-axis direction and the Z-axis direction, and the component of the pulling force in the Z-axis direction causes the second transmission block 200 to descend along the Z-axis direction. When the second transmission block 200 moves on the second guide rail 410, the grating reading head 720 sends a signal to the controller, and the controller controls the servo motor 300 based on the signal of the grating reading head 720 to control the displacement of the second transmission block 200 in the Z-axis direction. When the first transmission block 100 moves to the end of the third guide rail 510, the baffle 830 is located inside the groove of the first photoelectric switch 810, and the first photoelectric switch 810 sends an electrical signal to the controller, and the controller turns off the servo motor 300 to prevent the first transmission block 100 from damaging the third guide rail 510.

[0047] Exemplarily, when the angle between the first inclined plane and the horizontal plane is 45°, the first transmission block 100 moves along the X-axis direction under the drive of the servo motor 300, moving in the direction closer to the second transmission block 200. The displacement of the first transmission block 100 is 1 centimeter, the displacement of the first fixed block 110 in the X-axis direction is 1 centimeter, the first guide rail 210 slides along the direction of the first inclined plane on the first fixed block 110, and the second transmission block 200 receives a thrust perpendicular to the second inclined plane. The thrust has components in the X-axis direction and the Z-axis direction. The vertical mounting plate 400 and the second guide rail 410 provide a supporting force in the X-axis direction for the second transmission block 200, so that the second transmission block 200 does not have a displacement in the X-axis direction, and the second transmission block 200 only slides on the second guide rail 410. Under ideal conditions, the second transmission block 200 rises 0.5 centimeters along the Z-axis direction under the drive of the component of the thrust in the Z-axis direction, that is, the displacement of the second transmission block 200 in the Z-axis is the component of the first transmission block 100 in the Z-axis direction, thereby realizing that the displacement of the second transmission block 200 in the Z-axis is less than the displacement of the servo motor 300 driving the first transmission block 100 in the X-axis. When the output of the motor 300 is the same, the moving accuracy of the second transmission block 200 in the Z-axis direction can be improved.

[0048] In one embodiment, the embodiment of the present invention further provides a displacement device, including the Z-axis transfer platform of the TCB process as described above.

[0049] It should be noted that the displacement device can be the Z-axis transfer platform of the TCB process itself, or other devices that apply the Z-axis transfer platform of the TCB process, such as the rectangular coordinate transfer platform of the TCB process. The rectangular coordinate transfer platform of the TCB process can realize the movement of the carrier plate installed on the rectangular coordinate transfer platform in the X-axis direction, Y-axis direction, and Z-axis direction. The specific type of the displacement device is not limited in this embodiment, as long as it can apply the Z-axis transfer platform of the above TCB process.

[0050] In addition, the embodiment of the present invention further provides a bonding device, including the Z-axis transfer platform of the TCB process as described above, or including the displacement device as described above.

[0051] It should be noted that the bonding device can be the displacement device itself, such as the rectangular coordinate transfer platform of the TCB process, or other devices that apply the Z-axis transfer platform of the TCB process, such as a chip bonding device. The specific type of the bonding device is not limited in this embodiment, as long as it can apply the Z-axis transfer platform of the above TCB process.

[0052] Those skilled in the art will readily conceive of other embodiments of the present application after considering the specification and practicing the embodiments disclosed herein. The present application is intended to cover any variations, uses, or adaptations of the present application, which follow the general principles of the present application and include the common general knowledge or conventional technical means in the technical field not disclosed in the present application.

[0053] It should be understood that the present application is not limited to the exact structures described above and shown in the drawings, and various modifications and changes can be made without departing from its scope. The scope of the present application is only limited by the appended claims.

[0054] The above is a specific description of the preferred embodiment of the present invention, but the present invention is not limited to the above embodiments. Those skilled in the art can also make various equivalent deformations or substitutions without departing from the spirit of the present invention, and these equivalent deformations or substitutions are all included in the scope defined by the claims of the present invention.

Claims

1. A Z-axis transfer platform for TCB process, characterized in that: include: A first transmission block, wherein the first transmission block comprises a first inclined surface, and a plurality of first fixing blocks are arranged on an upper side of the first inclined surface; a second transmission block, the second transmission block being located on an upper side of the first transmission block, the second transmission block comprising a second inclined surface, at least one first guide rail being arranged on a lower side of the second inclined surface, and the first guide rail being slidably connected to the first fixed block; A motor is connected to the first transmission block, and is used to drive the first transmission block to move along the X-axis direction.

2. The Z-axis transfer platform of the TCB process according to claim 1, characterized in that: Also includes: A vertical mounting plate, wherein a second guide rail is disposed on the front surface of the vertical mounting plate, wherein the second guide rail is disposed along the Z-axis direction, wherein the second transmission block is mounted on the second guide rail, and wherein the second transmission block can slide on the second guide rail.

3. The Z-axis transfer platform of the TCB process according to claim 2, characterized in that: Also includes: A horizontal mounting plate, wherein the horizontal mounting plate is vertically fixed to the upper side of the vertical mounting plate, a third guide rail is arranged on the upper side of the horizontal mounting plate, the third guide rail is arranged along the X-axis direction, the first transmission block is installed on the third guide rail, and the first transmission block can slide along the third guide rail.

4. The Z-axis transfer platform of the TCB process according to claim 3, characterized in that: Also includes: A coupling and a screw rod, the motor is a servo motor, the servo motor includes an output shaft, the output shaft is parallel to the X-axis direction, the output shaft is connected to the coupling, the coupling is connected to the screw rod, a second fixed block is provided on the lower side of the first transmission block, the second fixed block is provided with a screw hole, and the screw rod is passed through the screw hole.

5. The Z-axis transfer platform of the TCB process according to claim 4, characterized in that: Also includes: A limit plate is vertically fixed to the upper surface of the horizontal mounting plate, a blind hole is arranged on one side of the limit plate close to the screw rod, one end of the screw rod is connected to the coupling, and the other end of the screw rod is located inside the blind hole.

6. The Z-axis transfer platform of the TCB process according to claim 3, characterized in that: Also includes: A controller, a grating ruler and a grating reading head, wherein the grating ruler is fixed to the second transmission block, the grating reading head is fixed to the vertical mounting plate, and the controller is electrically connected to the motor and the grating reading head respectively.

7. The Z-axis transfer platform of the TCB process according to claim 6, characterized in that: Also includes: A first photoelectric switch, a second photoelectric switch and a baffle, wherein the baffle is fixed to the first transmission block, the first photoelectric switch and the second photoelectric switch are respectively fixed to the upper surface of the horizontal mounting plate, the first photoelectric switch and the second photoelectric switch are electrically connected to the controller, when the first transmission block is located at one end of the third guide rail, the baffle is located inside the groove of the first photoelectric switch, and when the first transmission block is located at the other end of the third guide rail, the baffle is located inside the groove of the second photoelectric switch.

8. The Z-axis transfer platform of the TCB process according to claim 1, characterized in that: The number of the first guide rails is two, the number of the first fixing blocks is four, two of the first fixing blocks are slidably connected to one of the first guide rails, and the other two of the first fixing blocks are slidably connected to another of the first guide rails, and the two first guide rails are parallel to each other.

9. A displacement device, characterized in that: A Z-axis transfer platform comprising a TCB process as described in any one of claims 1 to 8.

10. A bonding device, characterized in that: A Z-axis transfer platform for a TCB process comprising any one of claims 1 to 8, or a displacement device comprising the displacement device according to claim 9.

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