Micro-electro-mechanical loudspeaker
By adopting an elastically connected actuator planar structure in the microelectromechanical speaker, the precise deflection of the replacement plate and the efficient radiation of the acoustic signal are achieved, and the shortcomings of speakers in the prior art in the deflection direction manipulation and acoustic signal radiation are solved.
Patent Information
- Application Number
- CN202380078168.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Priority Date
- 2022-11-11
- Filing Date
- 2023-11-06
- Publication Date
- 2025-06-24
AI Technical Summary
Existing microelectromechanical speakers have shortcomings in the precise manipulation of the deflection direction and the effective radiation of the acoustic signals.
A microelectromechanical speaker design is adopted that includes a housing structure, a replacement plate and an actuator structure, wherein the actuator structure consists of at least two elastically connected actuator planes, and the actuator plane is moved in the deflection direction by the control of the electrode unit, thereby achieving precise deflection of the replacement plate.
Extremely precise control of microelectromechanical speakers is achieved, the acoustic signal can be generated efficiently in the deflection direction, and the overall performance of the speaker is improved through multiple deflection techniques.
Smart Images
Figure CN120202680A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to a microelectromechanical loudspeaker. Background Art
[0002] Different microelectromechanical loudspeakers are known from the prior art. Summary of the Invention
[0003] The object of the present invention is to provide an improved microelectromechanical loudspeaker.
[0004] This object is solved by the microelectromechanical loudspeaker of the independent claims. Advantageous configurations are the subject matter of the dependent claims.
[0005] According to one aspect of the present invention, there is provided a microelectromechanical loudspeaker, comprising:
[0006] A housing structure;
[0007] A replacement plate The replacement plate is supported in the housing structure in a deflectable manner along a deflection direction; and
[0008] An actuator structure for deflecting the replacement plate along the deflection direction, the actuator structure being connected to the replacement plate, wherein the actuator structure comprises at least two actuator planes, the actuator planes being elastically interconnected and arranged one above the other in the deflection direction, wherein the actuator planes comprise electrode units on planar surfaces facing each other, and wherein, by manipulating the electrode units, the actuator planes can be moved relative to each other along the deflection direction, and by the movement of the actuator planes, the replacement plate can be deflected along the deflection direction.
[0009] The following technical advantages can be achieved thereby: An improved MEMS loudspeaker can be provided. The loudspeaker includes a displacement plate for generating sound waves. The displacement plate can be deflected in the direction of the deflection direction by an actuator structure. Here, the actuator structure includes at least two actuator planes that are elastically (federnd) connected to each other, and electrode units are arranged on the actuator planes. By manipulating the electrode units, the elastically connected actuator planes can be moved relative to each other, and thereby the displacement plate can be deflected to generate an acoustic signal. By arranging the actuator planes stacked one above the other along the deflection direction and manipulating the electrode units, an exact deflection of the displacement plate can be generated. This enables extremely precise manipulation of the MEMS loudspeaker. By charging the electrode units of the actuator planes facing each other that are stacked one above the other, the actuator planes can be moved towards each other or away from each other. Thereby, the displacement plate can be placed in corresponding vibrations to generate an acoustic signal thereby. Through the elastic connection of the two actuator planes, it can be achieved that the actuator planes move back to the zero position directly after manipulating the electrode units.
[0010] Furthermore, multiple deflections can be achieved through the entire actuator structure by means of a series mechanical coupling of the individual actuator units. For this purpose, the individual deflections of the individual actuator planes are added up to the total deflection of the entire actuator structure. Here, the total deflection can be directly mechanically transmitted to the displacement plate.
[0011] According to one embodiment, the housing structure further includes an outlet opening arranged opposite to the displacement plate.
[0012] The following technical advantages can be achieved thereby: The sound signal of the displacement plate is radiated from the outlet opening into the environment of the loudspeaker in the best possible way.
[0013] According to one embodiment, at least one actuator plane is configured as a flat plate, and wherein the electrode unit is configured as an electrode surface.
[0014] The following technical advantages can be achieved thereby: By configuring the electrode unit as an electrode surface, the largest possible electrical interaction of the electrode units facing each other can be achieved. This enables precise manipulation of the actuator structure and, in connection therewith, of the loudspeaker.
[0015] According to one embodiment, the electrode unit has at least one electrode protrusion element that protrudes from a planar surface along the deflection direction.
[0016] The following technical advantages can be achieved: The surface of the electrode unit can be increased by the electrode protrusion elements of the electrode unit. Thereby, the electrical interaction of the electrode units of the actuator planes facing each other can be increased. In addition, by the protrusion of the electrode protrusion elements, the distance between the electrode unit and the respectively opposing actuator plane can be reduced, whereby the electrical interaction can be further improved and, in connection therewith, the accuracy of the manipulation can be further improved.
[0017] According to one embodiment, the electrode units of at least two actuator planes each have a plurality of electrode protrusion elements arranged in a comb-like structure, and wherein the comb-like structures of the actuator planes can mesh with each other.
[0018] The following technical advantages can be achieved: By constructing the electrode protrusion elements in a comb-like structure and by the meshing of the comb-like structures of the actuator planes arranged opposite each other, the electrical interaction of the electrode units of the actuator planes can be further improved. By the meshing of the comb-like structures of the electrode units of the actuator planes arranged opposite each other, the distance between the electrode units facing each other can be reduced. Thereby, the electrical interaction can be further increased, and in connection therewith, the manipulation of the actuator structure can be improved.
[0019] According to one embodiment, the electrode protrusion elements are constructed as linear comb-like elements.
[0020] The following technical advantages can be achieved: By linearly constructing the electrode protrusion elements, the surface of the electrode unit can be increased. This in turn leads to a further increase in the electrical interaction of the electrode units facing each other.
[0021] According to one embodiment, the comb-like elements of the actuator plane extend in at least two extension directions, and the extension directions are at an angle to each other respectively.
[0022] The following technical advantages can be achieved: By the extension of the electrode protrusion elements of the electrode unit constructed as linear comb-like elements in extension directions that are at an angle to each other, the movement of two adjacent actuator planes in the movement direction arranged perpendicular to the deflection direction can be prevented. Therefore, the actuator planes are only deflected in the deflection direction. Thereby, it can be achieved that the displacement plate is also only deflected in the deflection direction. This enables extremely precise manipulation of the actuator structure.
[0023] According to one embodiment, at least one actuator plane includes a spacer frame constructed on the outer edge of the actuator plane, and wherein the actuator plane is elastically connected to the respective other actuator plane by at least one spring element constructed on the spacer frame.
[0024] The following technical advantages can be achieved thereby: The stability (Festigkeit) of the actuator plane can be increased by means of the spacing frame. Thereby, vibrations in the actuator plane can be reduced or avoided. Thereby, the accuracy of the control of the actuator structure can be increased. By means of the spring element, as simple a solution as possible for the elastic connection of two adjacent actuator planes can be achieved. By arranging the spring element on the spacer frame, it can be achieved that the entire surface of the corresponding actuator plane can be used for constructing the electrode unit.
[0025] According to one embodiment, the actuator plane is constructed rectangularly, and wherein spring elements are constructed on each side edge of the actuator plane.
[0026] The following technical advantages can be achieved thereby: By constructing spring elements on all side edges of the actuator plane, a uniform elastic connection of two adjacent actuator planes can be achieved. Thereby, tipping of adjacent actuator planes relative to one another can be avoided, and thereby precise control of the actuator structure can be achieved. Thus, by controlling adjacent electrode units, adjacent actuator planes can be moved uniformly relative to one another.
[0027] According to one embodiment, the actuator planes have different sizes and are arranged in a pyramid shape along the deflection direction, and wherein the spring elements are arranged laterally on the side edges and can be deflected in the deflection direction and perpendicular to the deflection direction.
[0028] The following technical advantages can be achieved thereby: By arranging the actuator planes of different sizes in a pyramid shape, a material-saving construction of the actuator structure can be achieved, and in connection therewith a weight-saving construction of the loudspeaker can be achieved. Furthermore, by the pyramid-shaped arrangement, it can be achieved that the spring elements can be constructed laterally on the side edges of the actuator planes. Thereby, it can again be achieved that the spring elements can only be deflected in the deflection direction, and deflection of the actuator plane perpendicular to the deflection direction can be avoided. This enables as precise a control as possible of the actuator structure, in which vibrations of the actuator plane perpendicular to the deflection direction can be avoided.
[0029] According to one embodiment, the spacer frame includes spacer elements extending along the deflection direction.
[0030] The following technical advantages can be achieved thereby: The spacer elements can enable an elastic connection with an adjacent deflection plane by means of the spring element. By means of the spacer elements, the spacing between adjacent deflection planes in the non-offset positions of the two deflection planes can be defined. This enables a predefined vibration path of adjacent deflection planes relative to one another, and in connection therewith precise control of the deflection structure.
[0031] According to one embodiment, the loudspeaker further comprises:
[0032] a frame structure, wherein the frame structure forms a receiving space, wherein the replacement plate and the actuator structure are arranged in the receiving space, and wherein the actuator plane is connected to the frame structure by at least one spring element.
[0033] The following technical advantages can be achieved thereby: A stable construction of the loudspeaker is provided by the frame structure. Furthermore, by the missing connection of at least one actuator plane to the frame structure, it can be achieved that the frame structure serves as a reference structure for the vibration of the actuator structure or the replacement plate. This in turn enables as precise a control as possible of the actuator structure and, in connection therewith, of the loudspeaker.
[0034] According to one embodiment, the actuator plane is formed by the bottom surface of the bottom region of the frame structure.
[0035] The following technical advantages can be achieved thereby: A space-saving construction of the actuator structure can be achieved.
[0036] According to one embodiment, an air gap is formed between the outer edge region of the replacement plate and the wall element of the frame structure.
[0037] The following technical advantages can be achieved thereby: Pressure equalization can be achieved through the air gap, such that the vibration of the actuator plane or the replacement plate of the actuator structure in the receiving space can avoid negative pressure, which would negatively affect the control of the replacement plate.
[0038] According to one embodiment, through openings are respectively constructed in at least one actuator plane and / or in the bottom region of the frame structure
[0039] The following technical advantages can be achieved thereby: Pressure equalization can again be achieved through the through openings, which in turn leads to a higher precision in the control of the actuator structure and, in connection therewith, of the loudspeaker.
[0040] According to one embodiment, the replacement plate is connected to one of the actuator planes in the actuator plane by a connecting projection extending along the deflection direction, and wherein the distance between the replacement plate and the actuator plane is defined by the length of the connecting projection.
[0041] The following technical advantages can be achieved thereby: A secure connection between the replacement plate and the actuator structure can be achieved. By the defined distance between the respective actuator plane and the replacement plate, the vibration transmission between the replacement plate and the actuator plane can be minimized.
[0042] According to one embodiment, bond wiring is constructed on the frame structure.
[0043] The following technical advantages can be achieved: a space-saving structure of the bonding wiring can be realized. BRIEF DESCRIPTION OF THE DRAWINGS
[0044] Embodiments of the present invention will be described below with reference to the drawings. Shown in the drawings:
[0045] Figure 1 A schematic cross-sectional view of a micromechanical speaker according to an embodiment is shown;
[0046] Figure 2 Shown Figure 1 Another schematic cross-sectional view of the micromechanical speaker in
[0047] Figure 3 Shown Figure 1 Another schematic cross-sectional view and a top view of the micromechanical speaker in
[0048] Figure 4 Shown Figure 1 Another schematic cross-sectional view and another top view of the micromechanical speaker in
[0049] Figure 5 Shown Figure 1 Another schematic cross-sectional view and another top view of the micromechanical speaker in
[0050] Figure 6 Shown Figure 1 Another schematic cross-sectional view and another top view of the micromechanical speaker in
[0051] Figure 7 Another schematic cross-sectional view of a micromechanical speaker according to another embodiment is shown;
[0052] Figure 8 Shown Figure 7 Another schematic cross-sectional view and a top view of the micromechanical speaker in
[0053] Figure 9 Shown Figure 7 Another schematic cross-sectional view and another top view of the micromechanical speaker in
[0054] Figure 10 Shown Figure 7 Another schematic cross-sectional view and another top view of the micromechanical speaker in
[0055] Figure 11 Another schematic cross-sectional view of a micromechanical speaker according to another embodiment is shown; and
[0056] Figure 12Shows a further schematic cross-sectional view and a further top view of a micromechanical loudspeaker according to another embodiment. Detailed Description
[0057] Figure 1 Shows a schematic cross-sectional view of a micromechanical loudspeaker 100 according to one embodiment.
[0058] The microelectromechanical loudspeaker 100 includes a housing structure 101 having an outlet opening 103 for providing an acoustic signal. A displacement plate 105 is constructed in the housing structure 101 and is arranged opposite to the outlet opening 103, and an actuator structure 107 connected to the displacement plate 105. The displacement plate 105 can be deflected along a deflection direction D by the actuator structure 107. An acoustic signal of the loudspeaker 100 can be generated by the deflection of the displacement plate 105.
[0059] In the illustrated embodiment, a frame structure 157 is further constructed in the housing structure 101. The frame structure 157 includes a bottom region 159 and a wall element 161. The frame structure 157 defines a receiving space 158 by the bottom region 159 and the wall element 161.
[0060] In the illustrated embodiment, the displacement plate 105 and the actuator structure 107 connected thereto are arranged in the receiving space 158.
[0061] On the wall element 161 of the frame structure 157, a bonding element 163 having a wiring structure 164 is further constructed. The actuator structure 107 can be electrically controlled by the bonding element 163 and the wiring structure 164, and accordingly, the loudspeaker 100 can be electrically controlled.
[0062] According to the present invention, the actuator structure 107 includes at least two actuator planes 109, 111, 113, 115, 117. The actuator planes 109, 111, 113, 115, 117 are arranged one above the other along the deflection direction D and are elastically connected to each other.
[0063] According to the present invention, the actuator planes 109, 111, 113, 115, 117 have electrode units 120, 122, 124, 126, 128, 130, 132, 134 constructed on the planar surfaces 119, 121, 123, 125, 127, 129, 131, 133. The electrode units 120, 122, 124, 126, 128, 130, 132, 134 can be electrically controlled respectively. Therefore, the electrode units 120, 122, 124, 126, 128, 130, 132, 134 arranged opposite to each other can interact through electrical interaction. Thus, the actuator planes 109, 111, 113, 115 and 117 can be moved relative to each other (gegeneinander) respectively. Through the relative movement of the actuator planes 109, 111, 113, 115, 117 of the actuator structure 107 relative to each other, the displacement plate 105 can be vibrated along the deflection direction D. Thus, an acoustic signal of the loudspeaker 100 can be generated.
[0064] In the illustrated embodiment, the actuator structure 107 includes five actuator planes 109, 111, 113, 115, 117.
[0065] Here, the first actuator plane 109 is formed by the bottom surface 160 of the bottom region 159 of the frame structure 157. A corresponding electrode unit 119 is constructed on the bottom surface 160. In this case, the bottom surface forms the flat surface 119 of the actuator plane 109.
[0066] The other actuator plane 111 is arranged opposite to and adjacent to this actuator plane 109. On the planar surface 121 arranged adjacent to the electrode unit 120 of the actuator plane 109, the actuator plane 111 has an electrode unit 122. The actuator plane 111 has a spacer frame 135. A plurality of spring elements 143 are arranged on the spacer frame 135. The actuator plane 111 is elastically connected to the edge element 161 of the frame structure 157 through the spring elements 143. A spacer element 139 is also arranged on the spacer frame 135. The spacer element 139 is constructed along the deflection direction D. In a manner arranged opposite to the planar surface 121, the actuator plane 111 has another planar surface 123, and this other planar surface has another electrode unit 124.
[0067] Another actuator plane 113 is adjacent to the actuator plane 111. The actuator plane 113 has additional electrode units 126 on a planar surface 125 facing the actuator plane 111. The actuator plane 113 also has a spacer frame 141 with spacer elements 145. A plurality of spring elements 143 are arranged on the spacer frame 141. The actuator plane 113 is elastically connected to the spacer elements 139 of the actuator plane 111 by the spring elements 143. On a planar surface 127 arranged opposite to the planar surface 125, the actuator plane 113 has additional electrode units 128.
[0068] Another actuator plane 115 is arranged adjacent to the actuator plane 113. The other actuator plane has additional electrode units 130 on a planar surface 129 facing the actuator plane 113. The actuator plane 115 further has a spacer frame 147 with spacer elements 151, and the spacer elements extend along the deflection direction D. Spring elements 149 are further constructed on the spacer frame 147. The spring elements 149 connect the actuator plane 115 to the spacer elements 145 of the actuator plane 113. On a planar surface 131 arranged opposite to the planar surface 129, the actuator plane 115 has additional electrode units 132.
[0069] Another actuator plane 117 is arranged adjacent to the actuator plane 115. The other actuator plane has additional electrode units 134 on a planar surface 133 facing the actuator plane 115. The actuator plane 117 further has a spacer frame 153, and spring elements 155 are arranged on the spacer frame. The actuator plane 117 is elastically connected to the spacer elements 151 of the actuator plane 115 by the spring elements 155.
[0070] The actuator plane 117 is further connected to the replacement plate 105 via a connecting projection 167.
[0071] By controlling the electrode units 120, 122, 124, 126, 128, 130, 132, 134, a potential difference can be generated between the actuator planes 109, 111, 113, 115, 117 of the actuator structure 107 relative to each other. The actuators 109, 111, 113, 115, 117 can attract or repel each other through the potential difference. Therefore, due to the elastic connection of the actuator planes 109, 111, 113, 115, 117 by the corresponding spring elements, the actuator planes 109, 111, 113, 115, 117 of the actuator structure 107 can be put into vibration, whereby the replacement plate 105 can also be put into vibration along the deflection direction D in the accommodation space 158 of the frame structure 157.
[0072] In the illustrated embodiment, the actuator planes 109, 111, 113, 115, 117 are each configured as flat plates. The electrode units 120, 122, 124, 126, 128, 130, 132, 134 are each configured as electrode surfaces.
[0073] In the illustrated embodiment, the actuator planes 109, 111, 113, 115, 117 have different sizes and are arranged relative to each other in a pyramidal arrangement. Here, the spring elements 137, 143, 149, and 155 are respectively constructed on the side regions of the actuator planes 111, 113, 115, 117. Here, the spring elements 137, 143, 149, 155 can be deflected along the deflection direction D. In addition, the spring elements can be constructed such that deflection perpendicular to the deflection direction D is prevented, such that only deflection of the actuator planes 111, 113, 115, 117 or the replacement plate 105 along the deflection direction D is achieved.
[0074] In the illustrated embodiment, the frame structure 157 additionally has a through-opening 169 in the bottom region 159. The through-opening extends into the receiving space 158 and extends through the actuator plane 109, which has the electrode unit 120 constructed on the actuator plane.
[0075] In addition, the replacement plate 105 has an air gap 166 with an element 161 of the frame structure in the edge region 165 in the receiving space 158.
[0076] Figure 2 Shown Figure 1 is another schematic cross-sectional view of the MEMS speaker 100.
[0077] In FIGS. a) to c), different deflections of the replacement plate 105 along the deflection direction D caused by actuating the actuator structure 107 in the receiving space 158 of the frame structure 157 are shown.
[0078] The illustrated embodiment of the MEMS speaker 100 is based on Figure 1 the embodiment in, and includes all the features described there.
[0079] FIGS. a) to c) show the deflection of the replacement plate 105 between two maximum deflections max_1, max_2.
[0080] In FIG. a), the structure 107 is fully contracted and the spacing between the actuator planes 109, 111, 113, 115, 117 is minimum. Thereby, the replacement plate 105 is pulled into the receiving space 158 to the maximum deflection max_2.
[0081] In figure b), the actuator structure 107 is arranged in the zero position, which is defined by constructing spring elements and spacer elements of the respective actuator planes 109, 111, 113, 115, 117. In this zero position, the actuator structure 107 is neither contracted nor shown in an extended arrangement.
[0082] Figure c) shows the deflection of the actuator structure 107 to the maximum deflection max_1, in which the actuator planes 109, 111, 113, 115, 117 are arranged with the maximum distance from each other.
[0083] By the number of actuator planes 109, 111, 113, 115, 117 of the actuator structure 107, the total stroke of the displacement plate 105 between the maximum deviations max_1 and max_2 can be changed.
[0084] Figure 3 shows Figure 1 a further schematic cross-sectional view and top view of the micromachined speaker 100 in
[0085] Figure a) shows Figure 1 a cross-sectional view of the sensor 100 in the embodiment in Figure 1 For the sake of simplicity of the schematic view of the embodiment in
[0086] Figure b) shows a top view of the displacement plate 105 arranged in the receiving space 158 of the frame structure 157. The frame structure 157 is constructed cuboidally and has four wall elements 161. In the illustrated embodiment, the displacement plate 105 is constructed rectangularly, in particular square, and is arranged in the receiving space 158. A uniform air gap 166 is constructed between the edge region 165 of the displacement plate 105 and the wall elements 161. Furthermore, four bonding elements 163 (Bondelemente) are constructed on the wall elements 161, each of which has a wiring structure 164.
[0087] Figure 4 shows Figure 1 a further schematic cross-sectional view and a further top view of the micromachined speaker 100 in
[0088] Figure a) shows Figure 3 the speaker 100 in
[0089] The shown actuator plane 109 is given by the bottom surface 160 of the bottom region 159 of the frame structure 157. The actuator plane 109 is also constructed rectangularly or squarely. The electrode unit 120 is constructed as an electrode surface having a square base surface. A circular through-opening 169 is constructed in the center of the actuator plane 109 or in the electrode unit 120 constructed on this actuator plane.
[0090] Figure 5 shown Figure 1 Additional schematic cross-sectional views and additional top views of the micromachined speaker 100 in.
[0091] Figure a) shows Figure 3 and Figure 4 of the figure of the speaker 100. Figure b) shows a top view of section B of figure a).
[0092] The shown actuator plane 111 is constructed rectangularly or squarely. The electrode unit 124 constructed on this actuator plane is constructed as an electrode surface having a square base surface. The actuator plane 111 has an overall spacer frame 135, and this spacer frame has spacer elements 139 extending along the z-axis of the shown coordinate system. Spring elements 137 are respectively constructed on each side of the square actuator plane 111 on the corresponding spacer frame 135. The spring element 137 is additionally fixed to one of the four wall elements 161 of the frame structure 157. In the center, the actuator plane 111 also has a circular through-opening 171.
[0093] Figure 6 shown Figure 1 Additional schematic cross-sectional views and additional top views of the micromachined speaker 100 in.
[0094] Figure a) also shows Figures 3 to 5 a cross-sectional view of the speaker 100 of the figure of. Figure b) shows a top view of section C of figure a).
[0095] The shown actuator plane 113 is constructed rectangularly or squarely. The electrode unit 128 arranged on this actuator plane is constructed as having a square base surface The electrode surface. Along the four outer edges of the square actuator plane 113, a spacer frame 141 is constructed, which has spacer elements 145 extending along the z-axis of the shown coordinate system. In addition, a spacer frame 153 is shown, which has spacer elements 139 of the actuator plane 111 arranged below the actuator plane 113 with respect to the z-axis of the shown coordinate system. Along the four outer edges of the square actuator plane 113, spring elements 143 are respectively constructed on the spacer frame 141. The spring elements 143 are respectively connected to the spacer frame 135 or the spacer elements 139 constructed on the spacer frame of the actuator plane 111, and this actuator plane is arranged below the actuator plane 113 and thus not visible in figure b). In the actuator plane 113, a circular through-opening 173 is also constructed in the center.
[0096] Figure 7 Shows another schematic cross-sectional view of the micromechanical speaker 100 according to another embodiment.
[0097] The speaker 100 in Figure 7 The embodiment shown in is based on Figure 1 The embodiment in and includes all the features shown there. For the sake of simplicity of the schematic diagram, the speaker 100 is constructed without a comprehensive housing structure 101.
[0098] Different from the embodiment in Figure 1 The actuator structure 107 only has four actuator planes 109, 111, 113, 115.
[0099] In addition, the actuator planes 109, 111, 113, 115 or the electrode units 120, 122, 124, 126, 128, 130 constructed on the actuator planes have electrode protrusion elements 175, 177, 179, 181, 183, 185.
[0100] Therefore, the electrode unit 120 has a plurality of electrode protrusion elements 175, and the electrode protrusion elements protrude from the actuator plane 109 or the plane surface 119 in the direction of the actuator plane 111 arranged above the actuator plane or the plane surface.
[0101] The electrode unit 122 of the actuator plane 111 also has a plurality of electrode protrusion elements 177, and the electrode protrusion elements extend from the plane surface 121 of the actuator plane 111 in the direction of the actuator plane 109 arranged below the plane surface. The electrode unit 124 of the actuator plane 111 also has a plurality of electrode protrusion elements 179, and the electrode protrusion elements extend from the plane surface 123 in the direction of the actuator plane 113 arranged above the actuator plane 111.
[0102] The electrode unit 126 of the actuator plane 113 further has a plurality of electrode protruding elements 181, which extend from the corresponding planar surface 125 in the direction of the actuator plane 111 arranged below the actuator plane 113. The electrode unit 128 of the actuator plane 115 also has a plurality of electrode protruding elements 183, which extend from the planar surface 127 in the direction of the actuator plane 115 arranged above the actuator plane 113.
[0103] The electrode unit 130 of the actuator plane 115 further has a plurality of electrode protruding elements 185, which extend in the direction of the actuator plane 113 arranged below the actuator plane 115.
[0104] The electrode protruding elements 175, 177, 179, 181, 183, 185 of the actuator planes 109, 111, 113, 115 are respectively configured as comb-like structures. Each of the electrode protruding elements 175, 177, 179, 181, 183, 185 is arranged such that the different comb-like structures of the different actuator planes 109, 111, 113, 115 can mesh with each other.
[0105] Figure 8 Shown Figure 7 Additional schematic cross-sectional view and top view of the micromachined speaker 100 in
[0106] Figure a) shows Figure 7 the speaker 100 in the embodiment of
[0107] The shown embodiment of the actuator plane 109 is based on Figure 4 the embodiment of figure b) in Figure 4 Different from the embodiment in
[0108] Figure 9 Shown Figure 7 Additional schematic cross-sectional view and additional top view of the micromachined speaker 100 in
[0109] Figure a) shows Figure 8 the embodiment of figure a) of Figure 5The figure b) is similar. The figure b) shows a top view of the section B of the figure a).
[0110] The shown actuator plane 111 is based on the embodiment in Figure 5 the figure b), and includes all the features described therein. The difference is that the electrode unit 124 has the electrode protrusion element 179 that has been mentioned. The arrangement of the electrode protrusion element 179 corresponds to the arrangement of the electrode protrusion element 175 of the electrode unit 120 of the actuator plane 109. The linearly configured electrode protrusion element 179 is arranged as four comb-like structures, in which the linear electrode protrusion elements 179 are arranged parallel to each other. The different comb-like structures extend in the x direction or the y direction.
[0111] Figure 10 shows Figure 7 additional schematic cross-sectional views and additional top views of the micromachined speaker 100 in
[0112] The figure a) is again based on Figure 8 and Figure 9 the figure a). Similar to Figure 6 the figure b), the figure b) shows a top view of the section C of the figure a).
[0113] The shown actuator plane 113 is based on the embodiment in Figure 6 the figure b), and includes all the features described therein. The shown electrode unit 128 has the electrode protrusion element 183 that has been mentioned. Similar to Figure 8 and Figure 9 the embodiment, the electrode protrusion element 183 is arranged as four comb-like structures, in which the linear electrode protrusion elements 183 are respectively arranged parallel to each other in a manner extending along the x direction or the y direction of the shown coordinate system.
[0114] Figure 11 shows additional schematic cross-sectional views of the micromachined speaker 100 according to another embodiment.
[0115] In the shown embodiment, the housing structure 101 has a plurality of outlet openings 103. In addition, the frame structure 157 has a plurality of through openings 169 in the bottom region 159.
[0116] In the illustrated embodiment, the actuator structure 107 has three actuator planes 109, 111, 113. The first actuator plane 109 is formed by the bottom surface 160 of the bottom region 159 of the frame structure 157. The additional actuator plane 111 is elastically connected to the frame structure 157 and also has a plurality of through openings. The additional actuator plane 113 is constructed on the surface of the displacement plate 105 facing the actuator plane 111. The displacement plate 105 is elastically connected to the actuator plane 111. The actuator plane 111 is elastically connected to the actuator plane 109. The actuator planes 109, 111, 113 have corresponding electrode units 120, 122, 124, 126.
[0117] Figure 12 Shows a further schematic cross-sectional view of the micromechanical loudspeaker 100 according to another embodiment.
[0118] The illustrated embodiment is based on Figure 11 the embodiment in. In the illustrated embodiment, the actuator structure 107 has five actuator planes 109, 111, 113, 115, 117, which are elastically connected to each other. The actuator planes 109, 111 are formed by the plane of the frame structure 159 and are thus rigidly connected to each other. The respective spring elements are designed such that the volumes between the actuator planes 111, 115, 117 and between the actuator planes 109, 113, 117 are sealed laterally. The displacement or suction into these volumes caused by the actuation through the mentioned actuator planes is achieved via the openings 169, 171 in the actuator planes 115 and 111 on one component side and via the corresponding openings in the actuator planes 113 and 109 on the other component side. The actuator plane 109 is formed by the bottom surface 160 of the bottom region 159 of the frame structure 157. The additional actuator plane 111 is formed by the housing structure 101. The additional actuator planes 113, 115 are elastically connected to the actuator plane 109 and the actuator plane 111, respectively. The additional actuator plane 117 is formed by the displacement plate 105. The displacement plate is arranged between the actuator planes 113, 115 and is elastically connected to these actuator planes. For this purpose, the displacement plate also has electrode units constructed on two planar surfaces.
[0119] In the embodiment shown above, the number of actuator planes of the actuator structure 107 is merely exemplary and can be configured differently. In addition, the structure of the actuator planes, the electrode units, and the electrode protrusion elements constructed on the electrode units can differ in number or embodiment. In addition, the configuration of the spring elements can also be variable.
[0120] The actuator structure 107 can be manipulated by applying corresponding voltages to the corresponding electrode units.
[0121] In particular, the displacement plate 105 and the actuator structure 107, in particular the actuator planes 109, 111, 113, 115, and 117, can be made of silicon material.
[0122] According to one embodiment, the electrode unit can be configured as a metal coating and applied by a coating method.
Claims
1. A microelectromechanical loudspeaker (100), the microelectromechanical loudspeaker comprising: a housing structure (101); a displacement plate (105) supported in the housing structure (101) in a deflectable manner along a deflection direction (D); and an actuator structure (107) for deflecting the displacement plate (105) along the deflection direction (D), the actuator structure being connected to the displacement plate (105), wherein the actuator structure (107) includes at least two actuator planes (109, 111, 113, 115, 117) that are elastically interconnected and arranged one above the other in the deflection direction (D), wherein the actuator planes (109, 111, 113, 115, 117) include electrode units (120, 122, 124, 126, 128, 130, 132, 134) on facing planar surfaces (119, 121, 123, 125, 127, 129, 131, 133), and wherein by manipulating the electrode units (120, 122, 124, 126, 128, 130, 132, 134), the actuator planes (109, 111, 113, 115, 117) can be moved relative to each other along the deflection direction (D), and by the movement of the actuator planes (109, 111, 113, 115, 117), the displacement plate (105) can be deflected along the deflection direction (D).
2. The loudspeaker (100) according to claim 1, wherein, The housing structure (101) further includes an outlet opening (103) arranged opposite to the displacement plate (105).
3. The loudspeaker (100) according to claim 1 or 2, wherein, At least one of the actuator planes (109, 111, 113, 115, 117) is configured as a flat plate, and wherein the electrode units (120, 122, 124, 126, 128, 130, 132, 134) are configured as electrode surfaces.
4. The loudspeaker (100) according to any one of the above claims, wherein, The electrode units (120, 122, 124, 126, 128, 130, 132, 134) have at least one electrode protrusion element (175, 177, 179, 181, 183, 185) that protrudes from the planar surfaces (119, 121, 123, 125, 127, 129, 131, 133) along the deflection direction (D).
5. The loudspeaker (100) according to any one of the above claims, wherein, The electrode units (120, 122, 124, 126, 128, 130, 132, 134) of the at least two actuator planes (109, 111, 113, 115, 117) each have a plurality of electrode protrusion elements (175, 177, 179, 181, 183, 185) arranged in a comb structure, and wherein the comb structures of the actuator planes (109, 111, 113, 115, 117) can engage with each other.
6. The loudspeaker (100) according to claim 5, wherein, The electrode protrusion elements (175, 177, 179, 181, 183, 185) are configured as linear comb elements.
7. The loudspeaker (100) according to claim 6, wherein, The comb-shaped elements of the actuator planes (109, 111, 113, 115, 117) extend in at least two extending directions, and the extending directions have angles relative to each other respectively.
8. The loudspeaker (100) according to any one of the above claims, wherein, At least one actuator plane (109, 111, 113, 115, 117) includes a spacer frame (135, 141, 147, 153) constructed on the outer edge of the actuator plane (109, 111, 113, 115, 117), and wherein the actuator plane (109, 111, 113, 115, 117) is elastically connected to a corresponding another actuator plane (109, 111, 113, 115, 117) through at least one spring element (137, 143, 149, 155) constructed on the spacer frame (135, 141, 147, 153).
9. The loudspeaker (100) according to claim 8, wherein, The actuator plane (109, 111, 113, 115, 117) is constructed rectangularly, and wherein spring elements (137, 143, 149, 155) are constructed on each side edge of the actuator plane (109, 111, 113, 115, 117).
10. The loudspeaker (100) according to claim 8 or 9, wherein, The actuator planes (109, 111, 113, 115, 117) have different sizes and are arranged in a pyramidal arrangement along the deflection direction (D), and wherein the spring elements (137, 143, 149, 155) are arranged laterally on the side edges and can deflect in the deflection direction (D) and deflect perpendicular to the deflection direction (D).
11. The loudspeaker (100) according to any one of the above claims 8 to 10, wherein, The spacer frame (135, 141, 147, 153) includes spacer elements (139, 145, 151) extending along the deflection direction (D).
12. The loudspeaker (100) according to any one of the above claims, the loudspeaker further includes: A frame structure (157), wherein the frame structure (157) forms a receiving space (158), wherein the replacement plate (105) and the actuator structure (107) are arranged in the receiving space (158), and wherein the actuator plane (109, 111, 113, 115, 117) is connected to the frame structure (157) through at least one spring element (137, 143, 149, 155).
13. The loudspeaker (100) according to claim 12, wherein, The actuator plane (109, 111, 113, 115, 117) is formed by the bottom surface (160) of the bottom region (159) of the frame structure (157).
14. The loudspeaker (100) according to claim 12 or 13, wherein, An air gap (166) is formed between the outer edge region (165) of the replacement plate (105) and the wall element (161) of the frame structure (157).
15. The loudspeaker (100) according to any one of the above claims, wherein, Through openings (169, 171, 173) are respectively constructed in at least one actuator plane (109, 111, 113, 115, 117) and / or in the bottom region (159) of the frame structure (157).
16. The loudspeaker (100) according to any one of the above claims, wherein, The replacement plate (105) is connected to one of the actuator planes (109, 111, 113, 115, 117) by a connecting projection (167) extending along the deflection direction (D), and wherein the spacing between the replacement plate (105) and the actuator plane (109, 111, 113, 115, 117) is defined by the length of the connecting projection (167).