Dust cleaning device, tail gas treatment equipment and dust cleaning method

Abstract

The invention provides a dust cleaning device, and relates to the technical field of tail gas treatment. Tail gas treatment equipment comprises a gas inlet pipe and a first cavity; the air inlet pipe comprises a first pipeline; the first pipeline is communicated with the first cavity at a first angle; a cleaning assembly is arranged in the at least one first pipeline in a penetrating manner, the first end of the cleaning assembly extends out of the first pipeline, and the second end of the cleaning assembly extends to the first cavity, so that the cleaning assembly is at least partially in contact with the first cavity; and the driving assembly is connected with the first end of the cleaning assembly and is configured to drive the cleaning assembly to reciprocate in the length direction of the cleaning assembly, so that the cleaning assembly shakes, and the cleaning assembly rubs or collides with the first pipeline and the first cavity to remove dust at the first pipeline and the first cavity. The dust cleaning method comprises the step of cleaning dust at the first pipeline and the first cavity through friction or collision between the cleaning assembly and the first pipeline and the first cavity. Therefore, dust at the airflow channel is removed, blockage is avoided, and the maintenance period is prolonged.

Description

Technical Field

[0001] This application relates to the field of semiconductor-like tail gas treatment equipment, specifically to a dust cleaning device, a tail gas treatment equipment, and a dust cleaning method. Background Art

[0002] In the pan-semiconductor process, the Harsh process refers to a complex, harsh, multi-dust, and highly corrosive process, such as the Boron Phosphorus Silicon Glass (BPSG) process, High Aspect Ratio Process (HARP), Silicon Nitride (SiN) process in Chemical Vapor Deposition (CVD), Metal Etching (MetalETCH) process in Etching (ETCH), Atomic Layer Deposition (ALD) process in Diffusion, and Time-Sensitive Network (TSN) process. In the Harsh process, a large amount of SiO2 dust and highly corrosive harmful substances need to be treated, which easily leads to problems such as poor flow in the tail gas treatment equipment, dust accumulation, blockage, and equipment corrosion and leakage, resulting in the need for the equipment to be shut down for maintenance. Application scenarios can be seen in chemical vapor deposition (CVD) processes in TOPCon (Tunnel Oxide Passivated Contact) or HJT (Heterojunction with Intrinsic Thin Layer) solar semiconductor manufacturing, etc.

[0003] Existing tail gas treatment equipment mainly has a processing load of SiH4: 3 - 40 slm (standard liters per minute) and H2: 11 - 150 slm. During the processing, a large amount of dust is generated, a large amount of dust is produced in the intake cavity, the inner diameter of the reaction cavity is reduced until it is completely blocked, the maintenance cycle is short, and the labor cost is high, which cannot meet the enterprise's requirements. Therefore, it is necessary to improve the equipment structure, reduce the dust accumulation in the intake cavity, and extend the equipment maintenance cycle.

[0004] Most of the existing intake cavity structure devices are circular cavities used in combination with N2 purging. The micron-sized dust particles generated by gas reactions are extremely easy to adhere to the inner wall of the intake cavity. After being heated in the plasma core area, the accumulated dust will be sintered into relatively hard adhesive solid blocks. At this time, N2 purging can no longer achieve the corresponding removal effect (continuous or pulsed N2 purging is only suitable for reducing dust accumulation on the pipe wall and is powerless against the lumps). The formation of adhesive solid blocks exacerbates the dust accumulation and further shortens the maintenance cycle.

[0005] The existing tail gas treatment equipment focuses on preventing blockages in the intake pipe, reaction cavity, and spray tower outlet, but often ignores the blockage problem of the intake cavity for plasma-ionized gas. Summary of the Invention

[0006] The technical problems to be solved by the present invention are: how to effectively remove the accumulated dust in components such as the intake pipe and intake cavity of the tail gas treatment equipment, avoid blocking the air flow channel, and extend the maintenance period of the tail gas treatment equipment.

[0007] To solve the above technical problems, the present invention provides a dust cleaning device, a tail gas treatment equipment and a dust cleaning method, aiming to remove the accumulated dust in the tail gas treatment equipment, avoid blocking the air flow channel, and extend the maintenance period of the tail gas treatment equipment.

[0008] To achieve the above object, the present invention provides a dust cleaning device for a tail gas treatment equipment. The tail gas treatment equipment includes at least one intake pipe and a first cavity. The intake pipe includes a first pipe which is connected to the first cavity at a first angle. The dust cleaning device includes:

[0009] At least one cleaning component. At least one cleaning component is disposed in a first pipe, and a first end of the cleaning component extends out of the first pipe, and a second end of the cleaning component extends into the first cavity, such that the cleaning component is at least partially in contact with the first cavity.

[0010] A driving component, connected to the first end of the cleaning component and configured to drive the cleaning component to reciprocate along its length direction, such that the cleaning component vibrates, and the cleaning component frictions or impacts with the first pipe and the first cavity to remove the dust at the first pipe and the first cavity.

[0011] Preferably, the cleaning component includes a chain. The chain extends from the first pipe into the first cavity and is at least partially in contact with the inner wall of the first cavity. The chain is formed by sequentially buckling a plurality of chain links, and adjacent two chain links are buckled at a first torsion angle.

[0012] Preferably, due to the setting of the first torsion angle, when the cleaning component reciprocates along its length direction, the buckling part of adjacent chain links is blocked by the junction of the first pipe and the first cavity, causing the cleaning component to vibrate.

[0013] Preferably, the first torsion angle is 60° - 120°.

[0014] Preferably, the first pipe is horizontally disposed, and the cleaning component is placed in the first pipe such that it contacts the bottom inner wall of the first pipe under the action of gravity and hangs down to contact the inner wall of the first cavity, and the cleaning component is in a segmented tensioned state.

[0015] Preferably, the cleaning component further includes a tension spring connected to the chain. The tension spring is at least partially located in the first pipe, a second end of the tension spring extends into the first pipe, at least part of the chain is disposed in the first pipe and extends from the first pipe into the first cavity and is in a natural hanging state, and the driving component drives the chain by driving the tension spring.

[0016] Preferably, the driving assembly is arranged outside the intake pipe and the first cavity. The driving assembly is arranged in the vertical direction and reciprocally drives the first end of the tension spring in the vertical direction. The tension spring is bent, so that the second end of the tension spring drives the cleaning assembly to reciprocate along the axis direction of the first pipe.

[0017] Preferably, the length of the cleaning assembly and the stroke of the reciprocating movement of the cleaning assembly are set so that the cleaning assembly always hangs in the first cavity.

[0018] Preferably, the driving assembly is configured to drive the cleaning assembly to reciprocate n times at intervals of a set time interval, where n is a natural number greater than or equal to 1.

[0019] Preferably, it further includes a first pressure sensor, a second pressure sensor, and a control module in signal communication with the first pressure sensor and the second pressure sensor;

[0020] Along the gas flow direction, the first pressure sensor is arranged before the first pipe, and the second pressure sensor is arranged after the first cavity;

[0021] The control module receives the pressure values output by the first pressure sensor and the second pressure sensor, and controls the time interval and the magnitude of n for the driving assembly to drive the cleaning assembly according to the difference between the pressure values output by the second pressure sensor and the first pressure sensor.

[0022] Preferably, the dust cleaning device further includes a nitrogen purging assembly, and the nitrogen purging assembly is arranged at the pipe opening of the first pipe and blows nitrogen into the first pipe.

[0023] To achieve the above object, the present invention also provides an exhaust gas treatment device, which includes the above-mentioned dust cleaning device and further includes a second cavity;

[0024] The second cavity is located below the first cavity; the first cavity and the second cavity are connected;

[0025] The second end of the cleaning assembly extends into the second cavity and is suspended in the second cavity.

[0026] To achieve the above object, the present invention also provides a dust cleaning method for the dust cleaning device as described above, and the method includes the following steps:

[0027] S1: The exhaust gas treatment device is started, and the exhaust gas enters the first cavity from the first pipe;

[0028] S2: The first pressure sensor and the second pressure sensor continuously monitor the pressure values and feedback them to the control module;

[0029] S3: The control module compares the difference between the pressure values of the second pressure sensor and the first pressure sensor it receives with a preset value. When the difference is greater than the preset value, the control module controls the driving component to start, and controls the driving component to drive the cleaning component to reciprocate along its length direction n times within a set time interval, where n is a natural number greater than or equal to 1, and the cleaning component is configured to vibrate during its reciprocating motion, so that the cleaning component rubs or impacts against the first pipe and the first cavity to clean the dust at the first pipe and the first cavity.

[0030] Preferably, in step S3, the greater the difference between the pressure values output by the second pressure sensor and the first pressure sensor, the smaller the time interval.

[0031] Preferably, in step S3, the greater the difference between the pressure values output by the second pressure sensor and the first pressure sensor, the greater n is.

[0032] The present invention provides a dust cleaning device for exhaust gas treatment equipment. The exhaust gas treatment equipment includes at least one intake pipe and a first cavity. The intake pipe includes a first pipe, and the first pipe communicates with the first cavity at a first angle. The dust cleaning device includes: at least one cleaning component, and a cleaning component is disposed through at least one first pipe, and the first end of the cleaning component extends out of the first pipe from the first pipe, and the second end of the cleaning component extends into the first cavity, so that the cleaning component is at least partially in contact with the first cavity; a driving component, connected to the first end of the cleaning component, and configured to drive the cleaning component to reciprocate along its length direction, so that the cleaning component vibrates, and the cleaning component rubs or impacts against the first pipe and the first cavity to remove the dust at the first pipe and the first cavity. The present invention further provides an exhaust gas treatment equipment, including the dust cleaning device, and further including a second cavity; the second cavity is located below the first cavity; the first cavity and the second cavity are connected; the second end of the cleaning component extends into the second cavity and is suspended in the second cavity. The present invention further provides a dust cleaning method, and the method includes the following steps: S1: The exhaust gas treatment equipment starts, and the exhaust gas enters the first cavity from the first pipe; S2: The first pressure sensor and the second pressure sensor monitor the pressure values in real time and feedback them to the control module; S3: The control module compares the difference between the pressure values of the second pressure sensor and the first pressure sensor it receives with a preset value. When the difference is greater than the preset value, the control module controls the driving component to start, and controls the driving component to drive the cleaning component to reciprocate along its length direction n times within a set time interval, where n is a natural number greater than or equal to 1, and the cleaning component is configured to vibrate during its reciprocating motion, so that the cleaning component rubs or impacts against the first pipe and the first cavity to clean the dust at the first pipe and the first cavity.

[0033] Accordingly, compared with the prior art, the present invention can achieve at least one of the following beneficial effects.

[0034] A) For the dust cleaning device provided by the present invention, the driving component drives the cleaning component to reciprocate along its length direction. The cleaning component is resisted at the junction of the first pipeline and the first cavity, thus causing irregular jitter. The cleaning component frictions or collides with the inner walls of the first pipeline and the first cavity, hitting the dust attached to the inner walls of the first pipeline and the first cavity. Then, the dust is twitched and shaken off under the action of air flow and gravity, preventing the first pipeline and the first cavity from being blocked and extending the maintenance period of the tail gas treatment equipment.

[0035] B) For the dust cleaning device provided by the present invention, the nitrogen purging component is used to introduce nitrogen into the first pipeline. The nitrogen gas flow enters the first pipeline to purge the dust attached inside the first pipeline. At the same time, the nitrogen purging component is used in cooperation with the driving component and the cleaning component. After the cleaning component hits the inner wall of the first pipeline and the solid dust attached to the inner wall of the first pipeline is knocked off and falls, the nitrogen gas flow can purge the dust into the first cavity and the dust drops under the action of gravity, ensuring the smoothness of the air flow channel of the first pipeline and extending the maintenance period of the tail gas treatment equipment.

[0036] C) For the dust cleaning device provided by the present invention, the control module receives the pressure signals of the first pressure sensor and the second pressure sensor, controls the time interval and the number of times for the driving component to drive the cleaning component according to the difference between the pressure values output by the second pressure sensor and the first pressure sensor, and controls the start-stop and frequency of the nitrogen purging component, realizing the automatic control of dust cleaning, saving labor costs, reducing maintenance costs, and extending the maintenance period of the tail gas treatment equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the following drawings are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0038] Figure 1 The structural schematic diagram of the first embodiment of the dust cleaning device provided by the present invention is shown.

[0039] Figure 2 The structural schematic diagram of the second embodiment of the dust cleaning device provided by the present invention is shown.

[0040] Figure 3 The structural schematic diagram of the third embodiment of the dust cleaning device provided by the present invention is shown.

[0041] Figure 4A schematic top view showing the positional relationship between the air intake pipe and the first cavity 20 of the first embodiment of the dust cleaning device provided by the present invention is shown.

[0042] Figure 5 A structural schematic diagram of an embodiment of a chain in a dust cleaning device provided by the present invention is shown.

[0043] Figure 6 A structural schematic diagram of a fourth embodiment of the dust cleaning device provided by the present invention is shown.

[0044] Figure 7 A partial enlarged view of the tension spring and pumping pipe of the first embodiment of the dust cleaning device provided by the present invention is shown, and a detailed view of the connection relationship between the tension spring, pumping pipe, air intake pipe, drive assembly, etc. is shown.

[0045] Figure 8 The schematic diagram of the structure of the tail gas treatment equipment provided by the present invention is shown. DETAILED DESCRIPTION

[0046] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application.

[0047] It should be understood that the terms "first", "second", etc. in the claims, specification and drawings of the present application are used to distinguish different objects rather than to describe a specific order. The terms "include" and "comprise" used in the specification and claims of the present application indicate the presence of the described features, wholes, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, wholes, steps, operations, elements, components and / or their collections.

[0048] See also Figure 1 As shown, a dust cleaning device provided by an embodiment of the present invention is applied to Figure 8 In the exhaust gas treatment device 80 shown in FIG. 1 , the exhaust gas treatment device 80 includes a plurality of intake pipes 10 and a first cavity 20. The intake pipe 10 includes a first pipe 11. The first pipe 11 is connected to the first cavity 20 at a first angle α (see FIG. 1 ). Figure 1 and Figure 6As shown in the figure. The dust cleaning device includes a cleaning component 30 and a driving component 40. A cleaning component 30 is disposed in each first duct 11, and a first end 31 of the cleaning component 30 extends out of the first duct 11 from the first duct 11, and a second end 32 of the cleaning component 30 extends into the first cavity 20 and is at least partially in contact with the first cavity 20. The driving component 40 is connected to the first end 31 of the cleaning component 30 and is configured to drive the cleaning component 30 to reciprocate in the length direction, so that the cleaning component 30 vibrates, and the cleaning component 30 rubs or impacts against the first duct 11 and the first cavity 20 to remove the dust at the first duct 11 and the first cavity 20. The dust cleaning device of the present invention can remove the accumulated dust in the tail gas treatment device, avoid the blockage of the air flow channel of the tail gas treatment device, and extend the maintenance period of the tail gas treatment device.

[0049] Figure 1 The case where the first angle α is approximately 90° is shown. Figure 6 The case where the first angle α is approximately 120° is shown. In actual implementation, the first angle can be 90° to 150°.

[0050] Refer to Figure 1 、 Figure 2 、 Figure 3 As shown, the composition structures of different intake ducts 10 are shown.

[0051] Refer to Figure 1 As shown, taking the intake duct 10 on the right as an example to illustrate the structure of the intake duct 10, it can be seen that the intake duct 10 includes a first duct 11 arranged horizontally in the axial direction, a tee 12a, a second duct 13a arranged vertically in the axial direction, and a head 14 is provided at one port of the tee 12a. The horizontal pipe section 121a of the tee 12a is connected to the first duct 11 coaxially and with the same diameter. At this time, part of the cleaning component 30 is also arranged in the horizontal pipe section 121a.

[0052] Refer to Figure 2 As shown, different from Figure 1 the intake duct 10 includes a first duct 11 arranged horizontally in the axial direction, a straight elbow 12b, a second duct 13b arranged vertically in the axial direction, and the straight elbow 12b can be integrally formed with the second duct 13b. The horizontal pipe section part in the straight elbow 12b can also be regarded as a part of the first duct 11.

[0053] Refer to Figure 3 As shown, different from Figure 1In contrast, the intake pipe 10 includes a first pipe 11 arranged horizontally in the axial direction, an inclined joint 12c, and a second pipe 13c arranged vertically in the axial direction. The inclined joint 12c includes a horizontal pipe section 121c and an inclined pipe section 122c. The horizontal pipe section 121c and the first pipe 11 are coaxially and identically-diameter connected to form an integral first pipe 11. That is, part of the cleaning assembly 30 is also arranged in the horizontal pipe section 121c. The inclined pipe section 122c can be integrally formed with the second pipe 13c.

[0054] Refer to Figure 1 , Figure 2 , Figure 3 As shown, the layout of the intake pipe 10 in the cross-section is presented, showing that two intake pipes 10 are arranged relatively around the first cavity 20. Refer to Figure 4 As shown, six intake pipes 10 are evenly arranged around the circumference of the cylindrical cavity 20. Of course, one intake pipe 10 (i.e., the intake pipe 10 is asymmetrically and singly arranged on the side of the first cavity 20), two intake pipes 10, or more than two intake pipes 10 can also be set.

[0055] Figure 1 , Figure 2 , Figure 3 , Figure 6 In , the intake pipe 10, the cleaning assembly 30, and the driving assembly 40 are all symmetrically arranged. If there are six intake pipes 10, six sets of cleaning assemblies 30 and driving assemblies 40 need to be correspondingly arranged respectively. It should be understood that the present invention is not limited to this. The cleaning assembly 30 and the driving assembly 40 can also be set only in some of the intake pipes 10. For example, the cleaning assembly 30 and the driving assembly 40 are symmetrically or asymmetrically arranged in only one intake pipe 10, two intake pipes 10, three intake pipes 10, 4 intake pipes 10, or five intake pipes 10, which also does not depart from the scope of the present invention. Those skilled in the art can set them according to actual needs.

[0056] Combined with Figure 1 and Figure 4 As shown, the inner wall of the first cavity 20 is cylindrical with a vertical axis. The first cavity 20 can also be set as a cube or other shapes.

[0057] Refer to Figure 1 , Figure 2 , Figure 3 As shown, the cleaning assembly 30 includes a chain 33. The chain 33 extends into the first cavity 20 and at least partially contacts the inner wall 21 of the first cavity. Combined with Figure 5 As shown, the chain 33 is formed by sequentially buckling multiple chain links 34. The adjacent two chain links 34 are buckled at a first torsional angle.

[0058] Refer to Figure 5As shown, when three adjacent links 34 in the chain 33 are straightened, two adjacent links 34 are arranged vertically and staggered. The links 34 of the chain are round steel bent into a rectangular shape with semicircular outer contours at both ends. That is, the adjacent links 34 of the chain 33 are not arranged along the same length direction, and there is staggering between adjacent links, that is, at this time, the first torsion angle is 90°.

[0059] Of course, the first torsion angle may not be 90°, see Figure 1 , Figure 2 , Figure 3 and Figure 5 As shown, the setting of the first torsion angle enables the cleaning assembly 30 to reciprocate in its length direction, and the buckles of the adjacent chain links 34 are blocked by the junction of the first pipe 11 and the first cavity 20, so that the cleaning assembly 30 can be shaken. The shaking of the cleaning assembly 30 includes the up and down, left and right, and front and back jumping of the chain 33, that is, the chain 33 will jump irregularly. The movement of the chain 33 of the cleaning assembly 30 can generate friction with the inner wall of the first pipe 11 and the first cavity 20, or can hit the first pipe 11 and the first cavity 20, so that the dust contacting the cleaning assembly 30 is shaken, and the dust in the form of solid agglomerates or mud adhering to the first pipe 11 and the first cavity 20 can also be shaken off with the twitching of the chain 33.

[0060] In actual implementation, the first torsion angle is 60° to 120°. For example, the first torsion angle can be set to 60°, 80°, 100°, or 120°. Figure 5 As shown, the first torsion angle can also be set to 90°.

[0061] See also Figure 1 , Figure 2 , Figure 3 As shown, the first pipe 11 is arranged horizontally, and the cleaning assembly 30 is placed in the first pipe 11, so that the cleaning assembly 30 contacts the bottom of the inner wall of the first pipe 11 under the action of gravity, and hangs downward to contact the inner wall 21 of the first cavity 20, and the cleaning assembly 30 is in a segmented tension state. Figure 1 , Figure 2 , Figure 3As shown, the first pipeline 11 is arranged in a middle circle in the vertical direction of the first cavity 20. The first cavity 20 has an opening at the corresponding position to be connected with the first pipeline 11 for gas flow. The chain 33 contacts the lower half part in the vertical direction of the inner wall 21 of the first cavity (the part below the communication hole). When the chain 33 is stationary, the chain 33 at the first pipeline 11 is taut, and the chain 33 at the first cavity 20 is also taut. Relying on the gravity of the chain 33 at the first cavity 20, the chain 33 at the first pipeline 11 is straightened and taut. The chain 33 has two extreme positions under the action of the driving component 40. The first position is the position where the chain 33 at the first pipeline 11 is the longest, and the second position is the position where the chain 33 at the first pipeline 11 is the shortest. At the two extreme positions, after being stationary, the chain 33 can be segmented and taut.

[0062] Refer to Figure 6 As shown, the first pipeline 11 is arranged at an inclined angle with the horizontal direction. The cleaning component 30 is placed in the first pipeline 11, so that the cleaning component 30 contacts the bottom of the inner wall of the first pipeline 11 under the action of gravity and hangs down to contact the inner wall 21 of the first cavity 20. The cleaning component 30 is in a segmented taut state. The segmented point is at the junction of the first pipeline 11 and the first cavity 20.

[0063] Refer to Figure 1 、 Figure 2 、 Figure 3 As shown, the cleaning component 30 also includes a tension spring 35 connected to the chain 33. The tension spring 35 is at least partially located in the first pipeline 11. The tension spring 35 is connected to the chain 33 and extends out of the first pipeline 11. The chain 33 is at least partially arranged in the first pipeline 11 and extends out of the first pipeline 11 into the first cavity 20 and is in a natural hanging state. The driving component 40 drives the chain 33 by driving the tension spring 35. The tension spring 35 can be bent. Accordingly, by connecting the driving component 30 and the chain 33, the movement direction of the driving component 30 and the movement direction of the chain 33 can form an included angle, completing the transmission of the movement. By setting the tension spring 35, the transformation of the movement direction is realized, saving space. And there is an angle between adjacent links of the chain 33, which will form a resistance at the junction of the first pipeline 11 and the first cavity 20. When the pulling force of the tension spring 35 continuously increases to be greater than the resistance, the sudden contraction of the tension spring 35 will make the chain 33 jump up.

[0064] Refer to Figure 1 、 Figure 2 、 Figure 3 As shown, the driving component 40 is arranged outside the intake pipe 10 and the first cavity 20. The driving component 40 is arranged in the vertical direction. The driving component 40 reciprocally drives the first end of the tension spring 35 in the vertical direction. The tension spring 35 is bent, and further makes the second end of the tension spring 35 drive the chain 33 to reciprocate along the axis direction of the first pipeline 11. Figure 1 、 Figure 2, Figure 3 The movement direction of the second end of the tension spring 35 is horizontal, and the chain 33 is also pulled horizontally to reciprocate, thereby causing the chain 33 to vibrate. Figure 6 In the embodiment, the movement direction of the tension spring 35 is inclined at an angle to the horizontal direction and is parallel to the axial direction of the first pipe 11 .

[0065] See also Figure 1 As shown, the driving assembly 40 includes a hydraulic cylinder or a gas cylinder, and the piston rod of the hydraulic cylinder or the gas cylinder can reciprocate. In order to save layout space, the movement axis direction of the piston rod of the hydraulic cylinder or the gas cylinder is in the vertical direction. Figure 7 As shown, the piston rod is connected to the tension spring 35, a mounting seat 36 is provided on the end cap 14, a pumping pipe 37 is provided on the mounting seat 36, the tension spring 35 moves in the pumping pipe 37, the first end of the tension spring 35 is connected to the piston rod, in order to prevent gas leakage from the intake pipe 10, a dynamic connection gas-tight member can be provided in the pumping pipe 37, and the first section of the pumping pipe 37 is arranged along the movement axis direction of the piston rod ( Figure 1 , Figure 2 , Figure 3 , Figure 6 The second end of the tension spring 35 extends out of the pumping pipe 37 and is connected to the chain 33. The axis of the second section of the pumping pipe 37 is parallel to the axis of the first pipe 11 ( Figure 1 , Figure 2 , Figure 3 They are arranged horizontally. Figure 6 The pumping pipe 37 is connected to the inside of the intake pipe 10, and the first section of the pumping pipe 37 and the second section of the pumping pipe 37 are connected by a circular arc transition bend. According to this, the tension spring 35 can be bent in the circular arc transition section, and the direction of movement is changed, so that the structure of the exhaust gas treatment device is compact. The above-mentioned pumping pipe 37 can be made of PFA (Teflon) pipe. The tension spring 35 can reciprocate in the pumping pipe 37. The first end of the tension spring 37 is connected to the second end of the drive assembly 40, and the second end of the tension spring 37 is always in the first pipe 11 during the reciprocating motion. The pumping pipe 37 can also control the path of the tension spring 35 and guide it, thereby changing the layout of the drive assembly 40 and the exhaust gas treatment device.

[0066] See also Figure 2 As shown, Figure 1 Differently, the mounting seat 36 is disposed on the outer wall of the straight elbow joint 12b. Figure 3 As shown, the end of the flat pipe section 121 c of the bevel joint 12 c is also sealed by the seal head 14 , and the mounting seat 36 is arranged on the seal head 14 .

[0067] See also Figure 1 , Figure 2, Figure 3 As shown, the length of the cleaning assembly 30 and the stroke of the driving assembly 40 driving the cleaning assembly to reciprocate along the length direction of the cleaning assembly 30 are set so that the chain 33 is always suspended in the first cavity 10. Specifically, the length of the chain 33 suspended in the first cavity 10 is always greater than 1 / 2-2 / 3 of the total length of the chain 33. It is ensured that the length of the chain 33 suspended in the first cavity 10 is always greater than 1-2 times the length of the chain 33 located in the first pipe 11. For example, when the driving assembly 40 is a cylinder, the cylinder piston rod is contracted, and when the length of the chain 33 suspended in the first cavity 10 is the shortest, its length is greater than 1-2 times the length of the chain 33 located in the first pipe 11. That is, the weight of the chain 33 suspended in the first cavity 10 is always greater than the weight of the chain 33 located in the first pipe 11, and the friction and other forces are overcome, and the weight of the chain 33 in the first cavity 10 is used to prevent the cleaning assembly 30 from accumulating in the first pipe 11. The weight of the chain 33 in the first cavity 10 can also ensure that the amplitude of the free end of the chain 33 jumping upward is within a set range to prevent it from hitting the components arranged on the upper part or above the first cavity 10. For example, when the drive assembly 40 is a cylinder, the stroke of the cylinder piston rod is selected to be 30mm-75mm, the length of the tension spring 35 is selected to be 200mm-4000mm, and the overall length of the chain 33 is selected to be 300mm-500mm. This setting can make the free end of the chain 33 located outside the first pipe 11 and located in the first cavity 10 when the cylinder piston rod is retracted. When the cylinder piston rod is extended again, the free end of the chain 33 can remain in the state of hanging down into the first cavity 10 and continue to extend forward to remove dust from the inner wall of the first cavity 10; and when the cylinder piston rod is extended, the length of the chain 33 placed in the first cavity 10 is not too long to prevent it from hitting the components arranged above the first cavity 10 and causing damage to them.

[0068] The driving assembly 40 is configured to drive the cleaning assembly 30 to reciprocate n times at a set time interval, where n is a natural number greater than or equal to 1. The driving assembly 40 is configured as a hydraulic cylinder or a pneumatic cylinder, which can realize the reciprocating motion of the hydraulic cylinder or the pneumatic cylinder in two positions through an electromagnetic reversing valve, and the coil of the electromagnetic valve is energized and disconnected corresponding to the two positions.

[0069] See also Figure 1As shown in the figure, the dust cleaning device provided by the present invention further includes a first pressure sensor 71, a second pressure sensor 72, and a control module 73 that is in signal communication with the first pressure sensor 71 and the second pressure sensor 72. Along the gas flow direction, the first pipeline 11 is arranged before the first cavity 20, the first pressure sensor 71 is arranged before the first pipeline 11, and the second pressure sensor 72 is arranged after the first cavity 20. The control module 73 receives the pressure values output by the first pressure sensor 71 and the second pressure sensor 72, and controls the driving assembly 40 to configure its movement according to the difference between the pressure values output by the second pressure sensor 72 and the first pressure sensor 71 in terms of the magnitude of the set time interval and the magnitude of n. Moreover, the cleaning assembly 40 is mainly used to clean the dust at the first pipeline 11 and the first cavity 10. Therefore, the degree of blockage of the first pipeline 11 and the first cavity 20 can be judged by the difference between the pressure values output by the second pressure sensor 72 and the first pressure sensor 71. An electromagnetic valve is used to control the hydraulic cylinder or the air cylinder, that is, to control when the solenoid valve coil is energized and de-energized, the duration of energization and de-energization, and the number of consecutive energizations and de-energizations.

[0070] Figure 1 In the figure, only the arrangement of the first pressure sensor 71, the second pressure sensor 72, and the control module 73 on the left side is shown as an example.

[0071] A further technical solution is that the movement of the cleaning assembly 30 at each first pipeline 11 is independently controlled. Then, correspondingly, the first pressure sensor 71 and the second pressure sensor 72 are respectively arranged before each first pipeline 11 and after the first cavity 20 connected to the first pipeline, and each is connected to a control module 73 that can control the driving assembly 40. In Figure 2 、 Figure 3 、 Figure 6 ,the corresponding arrangements of the first pressure sensor 71, the second pressure sensor 72, and the control module 73 are not shown either. In order to control the movement of the cleaning assembly 30, the corresponding measurement and control elements can also be arranged according to the foregoing provided implementation manners in the corresponding embodiments.

[0072] The dust cleaning device provided by the present invention further includes a nitrogen purging assembly 50. The nitrogen purging assembly 50 is arranged outside the intake pipe 10 and blows nitrogen into the cavity of the intake pipe 10. The nitrogen purging assembly 50 can be arranged such that an air outlet is opened on the intake pipe 10, a nitrogen purging pipeline is connected to the air outlet, the nitrogen purging pipeline is connected to a nitrogen gas source, and a switching valve can be arranged on the nitrogen purging pipeline. The switching valve can be in signal communication with the control module. The control module controls the opening and closing of the switching valve to control the nitrogen purging assembly 50 to supply nitrogen into the intake pipe 10 for purging and cleaning the dust accumulation in the intake pipe 10. Figure 1 In ,the air outlet of the nitrogen purging assembly 50 is arranged at the head 14, so as to be connected to the intake pipe 10.Figure 2 The nitrogen purging assembly 50 is disposed at the outer wall of the straight-bend joint 12b so as to communicate with the intake pipe 10. Figure 3 The gas outlet of the nitrogen purging assembly 50 is disposed at the head 14 so as to communicate with the intake pipe 10.

[0073] The nitrogen purging assembly 50 can be set to blow at regular intervals, blow continuously, or blow after the movement cycle of the cleaning assembly 30 (at this time, the dust is loosened by the shaking of the cleaning assembly 30 and is easy to be blown off). When the first cavity 20 is arranged with its axis vertically, the dust at the first pipe 11 is blown to the first cavity 20 and naturally falls under the action of gravity, and the dust shaken at the first cavity 20 also naturally falls under the action of gravity.

[0074] Figure 1 、 Figure 2 、 Figure 3 、 Figure 6 The nitrogen purging assemblies 50 are symmetrically arranged. A nitrogen purging assembly 50 can be provided on each intake pipe 10, or nitrogen purging assemblies 50 can be provided only on some of the intake pipes 10, for example, one, two or more than two nitrogen purging assemblies 50 are provided symmetrically or asymmetrically.

[0075] The tail gas treatment device 80 provided by the present invention further includes a second cavity 60. The second cavity 60 is located below the first cavity 20. The first cavity 20 and the second cavity 60 are communicated. The second end 32 of the cleaning assembly 30 extends into the second cavity 60. Specifically, the second end of the chain 33 extends into the second cavity 60 and is suspended in the second cavity 60. The outer contour of the second cavity 60 is larger than that of the first cavity 20. When the outer contour of the second cavity 60 is larger than that of the first cavity 20, a swirling water curtain assembly can be provided in the second cavity 60 to clean the dust in the second cavity 60 and prevent dust accumulation; the free end of the chain 33 is in a suspended state. When the outer contour of the second cavity 60 is less than or equal to the outer contour of the first cavity 20, the swirling water curtain assembly may not be provided in the second cavity 60. At this time, when the cleaning assembly 30 shakes, the second end 32 can also rub or impact against the second cavity 60 to remove the dust in the second cavity 60, and the chain 33 is in a hanging contact with the inner wall of the second cavity 60. For example Figure 8 For the tail gas treatment device 80 shown, along the gas flow direction, the intake pipe 10, the intake cavity 81, the reaction cavity 82, the water tank 83 and the spray tower 84 are sequentially communicated. The intake cavity 81 is the first cavity 20 described above, and the reaction cavity 82 is the second cavity 60 described above. The second pressure sensor 72 can be disposed on the reaction cavity 82, the water tank 83 or the spray tower 84, and the first pressure sensor 71 can be disposed on, for example Figure 1 、 Figure 2 、 Figure 3 the second pipes 13a / 13b / 13c shown.

[0076] It should be understood that the dust cleaning device of the present invention is not limited to being arranged on the Figure 8 tail gas treatment equipment shown, and can also be arranged on a tail gas treatment equipment without an air inlet cavity. Along the gas flow direction, the intake pipe 10, the reaction chamber 82, the water tank 83, and the spray tower 84 are connected in sequence. At this time, the first pipe 11 of the intake pipe 10 of the tail gas treatment equipment is connected to the reaction chamber at a first angle, and the second end of the cleaning assembly 30 extends into the reaction chamber. At this time, the reaction chamber is the first cavity 20 described above, and the second pressure sensor 72 can be arranged on the water tank 83 or the spray tower 84, and the first pressure sensor 71 can be arranged on, for example Figure 1 , Figure 2 , Figure 3 the second pipes 13a / 13b / 13c shown, and it also does not depart from the scope of the present invention.

[0077] The dust cleaning method of the dust cleaning device for the tail gas treatment equipment provided by the present invention includes the following steps:

[0078] S1: The tail gas treatment equipment is started, and the tail gas enters the first cavity from the first pipe;

[0079] S2: The first pressure sensor and the second pressure sensor monitor the pressure value in real time and feed it back to the control module;

[0080] S3: The control module compares the difference between the pressure values of the second pressure sensor and the first pressure sensor received with a preset value. When the difference is greater than the preset value, the control module controls to turn on the driving assembly and controls the driving assembly to drive the cleaning assembly to reciprocate along its length direction n times within a set time interval, where n is a natural number greater than or equal to 1, and the cleaning assembly is configured to vibrate when it reciprocates, so that the cleaning assembly rubs or impacts against the first pipe and the first cavity to clean the dust at the first pipe and the first cavity.

[0081] The above-mentioned preset value can be set to 20 Pa - 100 Pa. For example, it is set to 20 Pa, 40 Pa, 80 Pa, or 100 Pa. When the difference between the pressure values of the second pressure sensor and the first pressure sensor is greater than this preset value, the first pipe 11 and the air inlet cavity 81 are blocked, and the driving assembly 40 is turned on. For example, the control driving assembly 40 controls the cleaning assembly 30 to reciprocate along its length direction 1 - 5 times every 10 - 20 minutes to ensure the smoothness of the inner cavities of the first pipe 11 and the air inlet cavity 81, realize the automation of maintenance, save manpower and extend the maintenance period.

[0082] The greater the difference between the pressure values output by the second pressure sensor and the first pressure sensor, the smaller the time interval. The greater the difference between the above-mentioned pressure values, the more serious the blockage at the first pipeline 11 and the intake cavity 81. It is necessary to increase the cleaning frequency. For example, within a shorter time interval, control the driving component 40 to control the cleaning component 30 to reciprocate along its length direction. And the smaller the difference between the above-mentioned pressure values, the less serious the blockage at the first pipeline 11 and the intake cavity 81. The cleaning frequency can be reduced. For example, within a longer time interval, control the driving component 40 to control the cleaning component 30 to reciprocate along its length direction, reduce the maintenance cost, and reduce the friction or impact between the cleaning component and the first pipeline and the first cavity, avoid the cleaning component from causing wear to the first pipeline and the first cavity, and extend the service life of the tail gas treatment equipment. Specifically, when the difference between the pressure values is set between 20 Pa and 40 Pa, control the driving component 40 to control the cleaning component 30 to reciprocate along its length direction 1 - 5 times every 20 minutes; when the difference between the pressure values is between 40 Pa and 80 Pa, control the driving component 40 to control the cleaning component 30 to reciprocate along its length direction 1 - 5 times every 15 minutes; when the difference between the pressure values is between 80 Pa and 100 Pa, control the driving component 40 to control the cleaning component 30 to reciprocate along its length direction 1 - 5 times every 10 minutes.

[0083] The greater the difference between the pressure values output by the second pressure sensor and the first pressure sensor, the greater n is. The greater the difference between the above-mentioned pressure values, the more serious the blockage at the first pipeline 11 and the intake cavity 81. It is necessary to increase the cleaning frequency. For example, within a set time interval, control the driving component 40 to control the cleaning component 30 to reciprocate along its length direction more times. And the smaller the difference between the above-mentioned pressure values, the less serious the blockage at the first pipeline 11 and the intake cavity 81. The cleaning frequency can be reduced. For example, within a set time interval, control the driving component 40 to control the cleaning component 30 to reciprocate along its length direction fewer times, reduce the maintenance cost, and reduce the friction or impact between the cleaning component and the first pipeline and the first cavity, avoid the cleaning component from causing wear to the first pipeline and the first cavity, and extend the service life of the tail gas treatment equipment. For example, when the difference between the pressure values is set between 20 Pa and 40 Pa, control the driving component 40 to control the cleaning component 30 to reciprocate along its length direction 1 time every 20 minutes; when the difference between the pressure values is between 40 Pa and 80 Pa, control the driving component 40 to control the cleaning component 30 to reciprocate along its length direction 3 times every 15 minutes; when the difference between the pressure values is between 80 Pa and 100 Pa, control the driving component 40 to control the cleaning component 30 to reciprocate along its length direction 5 times every 10 minutes.

[0084] It should be understood that when the difference between the pressure values output by the second pressure sensor and the first pressure sensor is larger, the time interval can be controlled to become smaller and n can be increased simultaneously; or n can be increased only while keeping the time interval unchanged; or the time interval can be controlled to become smaller only while keeping n unchanged, all of which are within the scope of the present invention.

[0085] When the difference is greater than a preset value, the control module can also control the nitrogen purging assembly 50 to be turned on to purge the intake pipe 10, and the intake pipe 10 can be purged continuously. It is also possible to turn on the nitrogen purging assembly 50 to purge the intake pipe 10 after the cleaning assembly 30 has moved. It is also possible to turn on the nitrogen purging assembly 50 to purge the intake pipe 10 within a set time interval. When the difference between the pressure values output by the second pressure sensor and the first pressure sensor is larger, the nitrogen purging assembly 50 can be turned on regularly to purge the intake pipe 10 at shorter time intervals; when the difference between the pressure values output by the second pressure sensor and the first pressure sensor is smaller, the nitrogen purging assembly 50 can be turned on regularly to purge the intake pipe 10 at longer time intervals, reducing costs and extending the maintenance period.

[0086] The technical effect provided by the present invention is that it can remove the accumulated dust in the tail gas treatment equipment, avoid the blockage of the air flow channel of the tail gas treatment equipment, and extend the maintenance period of the tail gas treatment equipment.

[0087] The above specific embodiments and the accompanying drawings are only illustrative of the technical solutions and technical effects of the present invention, rather than limiting the present invention. Any person skilled in the art can modify or change the above embodiments within the scope of the claims without departing from the technical principle and spirit of the present invention, and all belong to the scope of the rights protection of the present invention.

Claims

1. A dust cleaning device, characterized in that, For an exhaust gas treatment device, the exhaust gas treatment device includes at least one intake pipe and a first cavity. The intake pipe includes a first pipe, and the first pipe communicates with the first cavity at a first angle. The dust cleaning device includes: At least one cleaning component. At least one cleaning component is disposed in the first pipe, and the first end of the cleaning component extends out of the first pipe, and the second end of the cleaning component extends into the first cavity, such that the cleaning component is at least partially in contact with the first cavity; A driving component, connected to the first end of the cleaning component and configured to drive the cleaning component to reciprocate along its length direction, such that the cleaning component vibrates, and the cleaning component rubs or impacts against the first pipe and the first cavity to remove dust at the first pipe and the first cavity.

2. The dust cleaning device according to claim 1, wherein The cleaning component includes a chain. The chain extends from the first pipe into the first cavity and is at least partially in contact with the inner wall of the first cavity. The chain is formed by sequentially buckling multiple chain links, and adjacent two chain links are buckled at a first torsional angle.

3. The dust cleaning device according to claim 2, characterized in that, The setting of the first torsional angle causes the cleaning component to vibrate when reciprocating in its length direction due to the buckling position of adjacent chain links being blocked by the junction of the first pipe and the first cavity.

4. The dust cleaning device according to claim 3, characterized in that, The first torsional angle is 60° to 120°.

5. The dust cleaning device according to claim 2, wherein, The first pipe is horizontally arranged, and the cleaning component is placed in the first pipe such that it contacts the bottom inner wall of the first pipe under the action of gravity and hangs downward to contact the inner wall of the first cavity, and the cleaning component is in a segmented tensioned state.

6. The dust cleaning device according to claim 2, wherein The cleaning component further includes a tension spring connected to the chain. The tension spring is at least partially located in the first pipe, the second end of the tension spring extends into the first pipe, at least part of the chain is disposed in the first pipe and extends from the first pipe into the first cavity and is in a natural hanging state, and the driving component drives the chain by driving the tension spring.

7. The dust cleaning device according to claim 6, wherein The driving component is arranged outside the intake pipe and the first cavity. The driving component is arranged in the vertical direction. The driving component reciprocally drives the first end of the tension spring in the vertical direction, the tension spring is bent, and further the second end of the tension spring drives the cleaning component to reciprocate along the axis direction of the first pipe.

8. The dust cleaning device according to claim 1, wherein Set the length of the cleaning component and the reciprocating movement stroke of the cleaning component such that the cleaning component always hangs in the first cavity.

9. The dust cleaning device according to claim 1, characterized in that, The driving component is configured to drive the cleaning component to reciprocate n times at every set time interval, where n is a natural number greater than or equal to 1.

10. The dust cleaning device according to claim 9, wherein, It further includes a first pressure sensor, a second pressure sensor, and a control module in signal communication with the first pressure sensor and the second pressure sensor; Along the gas flow direction, the first pressure sensor is arranged before the first pipe, and the second pressure sensor is arranged after the first cavity; The control module receives the pressure values output by the first pressure sensor and the second pressure sensor, and controls the time interval and the magnitude of n for the driving component to drive the cleaning component according to the difference between the pressure values output by the second pressure sensor and the first pressure sensor.

11. The dust cleaning device according to claim 1, characterized in that, It further includes a nitrogen purging component. The nitrogen purging component is arranged at the pipe orifice of the first pipe and blows nitrogen into the first pipe.

12. An exhaust gas treatment device, comprising the dust cleaning device according to any one of claims 1-11, characterized in that, It further includes a second cavity; The second cavity is located below the first cavity; the first cavity and the second cavity are connected and communicate with each other; The second end of the cleaning component extends into the second cavity and is suspended in the second cavity.

13. A dust cleaning method for the dust cleaning device as described in claim 10, characterized in that, The method includes the following steps: S1: The tail gas treatment equipment is started, and the tail gas enters the first cavity from the first pipeline. S2: The first pressure sensor and the second pressure sensor monitor the pressure values in real time and feed them back to the control module. S3: The control module compares the difference between the pressure values of the second pressure sensor and the first pressure sensor received with a preset value. When the difference is greater than the preset value, the control module controls the driving component to be turned on, and controls the driving component to drive the cleaning component to reciprocate along its length direction n times at a set time interval, where n is a natural number greater than or equal to 1, and the cleaning component is configured to vibrate during its reciprocating motion, so that the cleaning component frictions or impacts with the first pipeline and the first cavity to clean the dust at the first pipeline and the first cavity.

14. The dust cleaning method according to claim 13, wherein, In step S3, the greater the difference between the pressure values output by the second pressure sensor and the first pressure sensor, the smaller the time interval.

15. The dust cleaning method according to claim 14, wherein, In step S3, the greater the difference between the pressure values output by the second pressure sensor and the first pressure sensor, the greater n is.

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