High-frequency vibration main shaft device

Abstract

A high-frequency vibration spindle device comprises a spindle unit, a power transmission unit, a transduction unit, a vibration isolation unit and a vibration conduction unit. The main shaft unit comprises a rotating shaft capable of rotating and defining a shaft cavity. The transduction unit is arranged in the shaft cavity in a penetrating mode, is spaced from the rotating shaft and is used for converting electric energy into vibration energy of ultrasonic waves. The vibration isolation unit comprises two buffer parts which are arranged between the rotating shaft and the transduction unit in a surrounding mode. The vibration conduction unit comprises a vibration conduction disc connected with the rotating shaft, the transduction unit and the grinding element. The vibration conduction disc is used for conducting the vibration energy to the grinding element. Therefore, the transduction unit is supported by the buffer piece, vibration conducted to the rotating shaft is reduced, and the concentricity and stability of the transduction unit and the rotating shaft are improved.

Description

Technical Field

[0001] The present invention relates to a spindle device, and particularly to a high-frequency vibration spindle device. Background Art

[0002] Referring to Figure 1 , a known ultrasonic vibration tool shank 1 disclosed in the patent case with Chinese Patent Publication No. CN112935941A is described. It includes a housing 11, a transducer 12 installed in the housing 11 and converting electrical energy into ultrasonic waves, a horn assembly 13 connecting the transducer 12 and the housing 11 and used to amplify the amplitude of the ultrasonic waves, and a grinding wheel assembly 14 connected to the horn assembly 13. Thereby, during the process of the grinding wheel assembly 14 machining a hard and brittle material (not shown in the figure), the grinding efficiency is improved and the machining damage is reduced through the vibration of the ultrasonic waves.

[0003] However, since the transducer 12 is suspended in the housing 11, during the ultrasonic oscillation process, the transducer 12 is prone to offset, unable to maintain concentricity with the housing 11, affecting the conduction of ultrasonic waves.

[0004] Moreover, the horn assembly 13 is in direct contact with the housing 11. Not only will the ultrasonic waves be conducted to the housing 11, easily dispersing the energy of the amplitude, but it will also cause the housing 11 or even the entire machine tool to vibrate.

[0005] Moreover, the size and weight of the grinding wheel assembly 14 that the horn assembly 13 can drive are usually relatively small, and it is impossible to excite a grinding wheel assembly 14 with too large a size or too heavy a weight. Summary of the Invention

[0006] The purpose of the present invention is to provide a high-frequency vibration spindle device that can improve concentricity and stability, can excite a large-sized grinding element, and thereby effectively improve machining efficiency and machining quality.

[0007] The high-frequency vibration spindle device of the present invention is suitable for connecting a grinding element and includes a spindle unit, a power transmission unit, a transducer unit, a vibration isolation unit, and a vibration conduction unit.

[0008] The spindle unit is installed in the spindle unit and is used for inputting electrical energy.

[0009] The power transmission unit is installed in the spindle unit and is used for inputting electrical energy.

[0010] The transducer unit is inserted into the shaft cavity and is spaced from the rotating shaft. The transducer unit is electrically connected to the power transmission unit and is used for converting the electrical energy into ultrasonic vibration energy.

[0011] The vibration isolation unit includes a plurality of buffers that surround between the rotating shaft and the transducer unit and are used to limit the transducer unit and block the vibration energy.

[0012] The vibration conduction unit includes a vibration conduction disk that connects the rotating shaft, the transducer unit and the grinding element, and the vibration conduction disk is adapted to conduct the vibration energy to the grinding element.

[0013] For the high-frequency vibration spindle device of the present invention, the vibration isolation unit further includes two annular members spaced apart along the direction of the axis, each of the annular members surrounds the transducer unit, and each of the buffers is blocked between the corresponding annular member and the rotating shaft.

[0014] For the high-frequency vibration spindle device of the present invention, the vibration conduction unit further includes a central bolt. The vibration conduction disk has a central portion located at the center and a centrifugal portion surrounding the central portion. The central portion has a groove. The central bolt passes through the groove along the direction of the axis, and abuts against the central portion and is connected to the transducer unit.

[0015] For the high-frequency vibration spindle device of the present invention, the vibration conduction unit further includes a plurality of first bolts and a plurality of first convex portions formed between the vibration conduction disk and the rotating shaft. The vibration conduction disk also has a first disk surface formed on one side. The first bolts are equally angularly distributed around the axis. Each of the first bolts passes through the vibration conduction disk along the direction of the axis, and abuts against the vibration conduction disk and is connected to the rotating shaft. The first convex portion contacts the first disk surface of the rotating shaft and the vibration conduction disk.

[0016] For the high-frequency vibration spindle device of the present invention, the vibration conduction unit further includes a plurality of second bolts. The vibration conduction disk also has a second disk surface formed on the other side opposite to the first disk surface and an annular rib formed around the axis and on the second disk surface. The annular rib abuts against the grinding element. The second bolts are equally angularly distributed around the axis. Each of the second bolts passes through the vibration conduction disk along the direction of the axis and abuts against the vibration conduction disk and is connected to the grinding element.

[0017] For the high-frequency vibration spindle device of the present invention, the vibration conduction unit further includes a plurality of second convex portions formed between the vibration conduction disk and the grinding element. The first disk surface is spaced apart from the grinding element. The second convex portion contacts the second disk surface of the vibration conduction disk and the grinding element, and is adapted to conduct the vibration energy to the grinding element. The amplitude of the portion of the vibration conduction disk adjacent to the second convex portion is greater than the amplitude of the portion adjacent to the first convex portion.

[0018] In the high-frequency vibration spindle device of the present invention, each of the second bolts defines a spacing from the axis in a direction perpendicular to the axis, and the spacing is between 60 mm and 80 mm, or between 90 mm and 110 mm.

[0019] In the high-frequency vibration spindle device of the present invention, during the process that the vibration energy is transmitted from the transducer unit to the grinding element through the vibration conduction disk, the vibration conduction disk vibrates at a high frequency in a resonance mode, and the resonance mode is a concentric circle resonance mode.

[0020] In the high-frequency vibration spindle device of the present invention, the rotating shaft further defines a flow passage that communicates with the outside and extends from one end face to the other end face along the direction of the axis. The flow passage is adapted to guide the fluid from the outside through the rotating shaft. The vibration conduction disk further has at least one outlet that communicates the outside with the flow passage, and the at least one outlet is used to discharge the fluid so that the fluid is adapted to cool or lubricate the workpiece to be processed.

[0021] In the high-frequency vibration spindle device of the present invention, the spindle unit further includes a housing. The rotating shaft extends along the direction of the axis and is rotatably installed in the housing. The power transmission unit includes a first induction element installed in the housing and used for transmitting the electric energy, and a second induction element installed on the rotating shaft and electrically connected to the transducer unit. The second induction element and the first induction element transmit the electric energy through electromagnetic induction.

[0022] The beneficial effects of the present invention are as follows: By supporting the transducer unit through the buffer member, not only can the vibration be reduced from being transmitted to the rotating shaft, but also the concentricity and stability between the transducer unit and the rotating shaft can be improved, and a large-sized grinding element can be excited, thereby effectively improving the processing efficiency and the processing quality. Description of the Drawings

[0023] Other features and effects of the present invention will be clearly presented in the embodiments with reference to the drawings, wherein:

[0024] Figure 1 is a cross-sectional view showing a known ultrasonic vibration tool shank disclosed in the patent case with Chinese Patent Publication No. CN112935941A;

[0025] Figure 2 is a perspective view showing an embodiment of the high-frequency vibration spindle device of the present invention;

[0026] Figure 3 is a cross-sectional view of the embodiment;

[0027] Figure 4 is an incomplete exploded perspective view of the embodiment;

[0028] Figure 5is an incomplete three-dimensional exploded view of the embodiment viewed from another direction;

[0029] Figure 6 is a partial enlarged cross-sectional view of the embodiment;

[0030] Figure 7 is a partial enlarged cross-sectional view, showing that there are a plurality of first convex portions between the vibration conduction disk and the rotating shaft of the embodiment;

[0031] Figure 8 is another partial enlarged cross-sectional view, showing that there are a plurality of second convex portions between the vibration conduction disk and the grinding element of the embodiment;

[0032] Figure 9 is along Figure 6 the cross-sectional view taken along line IX-IX in;

[0033] Figure 10 Frequency response curve graph, showing that when the vibration conduction disk of the embodiment has grooves, it can generate periodic vibrations;

[0034] Figure 11 is an energy gradient simulation diagram, showing the energy distribution of the vibration conduction disk of the embodiment;

[0035] Figure 12 is similar to Figure 11 the energy gradient simulation diagram, but the amplitude of the part where the vibration conduction disk is connected to the grinding element is greater than the amplitude of the part where the vibration conduction disk is connected to the rotating shaft. Detailed implementation mode

[0036] Refer to Figures 2 to 5 , an embodiment of the high-frequency vibration spindle device of the present invention, is suitable for connecting a grinding element 2. In this embodiment, the grinding element 2 is a grinding wheel and has a wheel frame 21 and a plurality of abrasives 22 connected to the wheel frame 21. The wheel frame 21 has an inner ring surface 211 surrounding an axis X, an outer ring surface 212 surrounding the inner ring surface 211, a frame surface 213 connecting the inner ring surface 211 and the outer ring surface 212, and a wheel surface 214 opposite to the frame surface 213. The abrasive 22 is connected to the wheel surface 214 and adjacent to a periphery of the wheel surface 214. The abrasive 22 is suitable for grinding a workpiece to be processed, such as a wafer (not shown in the figure).

[0037] The high-frequency vibration spindle device includes: a spindle unit 3, a transducer unit 4, a vibration isolation unit 5, a vibration conduction unit 6, and a power transmission unit 7.

[0038] The main shaft unit 3 extends along an axis X direction. The main shaft unit 3 includes a housing 31, a rotating shaft 32 that extends along the axis X direction and is rotatably mounted in the housing 31, and a bushing 33.

[0039] In this embodiment, the rotating shaft 32 can be driven by a motor (not shown in the figure). The rotating shaft 32 defines a shaft cavity 321 around the axis X, and a flow channel 322 that communicates with the outside and extends from one end face along the axis X direction to the other end face. The flow channel 322 is adapted to guide the fluid from the outside into the rotating shaft 32. The flow channel 322 has a main flow section 323 that extends along the axis X, and a plurality of branch flow sections 324 that communicate with the main flow section 323 and are distributed around the axis X. In this embodiment, the fluid can be but is not limited to gas or water.

[0040] The bushing 33 is connected to one end of the housing 31 and defines a through hole 331 for the rotating shaft 32 to pass through around the axis X.

[0041] Refer to Figures 3 to 6 , the transducer unit 4 is inserted along the axis X direction in the shaft cavity 321 and is spaced apart from the rotating shaft 32. The transducer unit 4 includes a transducer 41 for converting electrical energy into ultrasonic vibration energy, and a horn 42 connected to the transducer 41 and extending along the axis X direction. The horn 42 is used to amplify the amplitude of the vibration energy. In this embodiment, the frequency range of the vibration energy is between 15 kHz and 100 kHz, preferably 15 kHz to 25 kHz.

[0042] The vibration isolation unit 5 includes two annular members 51 spaced apart along the axis X direction, and two buffer members 52. Each of the annular members 51 surrounds the transducer unit 4. Each of the buffer members 52 surrounds between the rotating shaft 32 and the corresponding annular member 51, and is used to limit the transducer unit 4 and block the conduction of the vibration energy from the transducer unit 4 along the direction perpendicular to the axis X.

[0043] The vibration conduction unit 6 includes a vibration conduction disk 61, a plurality of first protrusions 62, a plurality of second protrusions 63, a central bolt member 64, a plurality of first bolt members 65, and a plurality of second bolt members 66.

[0044] The vibration conduction disk 61 connects the horn 42 and the grinding element 2, and is adapted to conduct the vibration energy to the grinding element 2. The vibration conduction disk 61 has a central portion 610 that is substantially perpendicular to the axis X and located at the center, a centrifugal portion 611 surrounding the central portion 610, a first disk surface 612 formed on one side, a second disk surface 613 formed on the other side opposite to the first disk surface 612, an annular rib 614 formed on the second disk surface 613 and surrounding the axis X, and a plurality of outlets 615 extending from the first disk surface 612 to the second disk surface 613. The central portion 610 has a groove 616. The first disk surface 612 contacts the horn 42 and is spaced from the rotating shaft 32. The second disk surface 613 is spaced from the frame surface 213 of the grinding element 2. The annular rib 614 abuts against the inner ring surface 211 of the grinding element 2. Each of the outlets 615 communicates with a corresponding one of the flow dividing sections 324 and is adapted to discharge the fluid.

[0045] In this embodiment, the vibration conduction disk 61 is circular and defines a maximum diameter D centered on the axis X. The maximum diameter D is greater than a maximum width d1 of the transducer unit 4 in a direction perpendicular to the axis X and less than a maximum width d2 of the grinding element 2 in a direction perpendicular to the axis X.

[0046] Refer to Figure 6 、 Figure 7 and Figure 8 In this embodiment, the number of the first convex portions 62 is six, which are formed on the first disk surface 612 of the vibration conduction disk 61 and are generally circular. The first convex portions 62 contact the rotating shaft 32 and the first disk surface 612.

[0047] In this embodiment, the number of the second convex portions 63 is six, which are formed on the second disk surface 613 of the vibration conduction disk 61 and are generally semi-circular. The second convex portions 63 contact the frame surface 213 of the grinding element 2 and the second disk surface 613.

[0048] It should be noted that the first convex portions 62 are not limited to being formed on the end surface of the first disk surface 612. In other variations of this embodiment, they can also be formed on the rotating shaft 32. Additionally, the second convex portions 63 are not limited to being formed on the second disk surface 613. In other variations of this embodiment, they can also be formed on the frame surface 213 of the grinding element 2. Further, in this embodiment, the first convex portions 62 and the second convex portions 63 are integrally formed with the vibration conduction disk 61. The first convex portions 62 and the second convex portions 63 can also be gaskets separated from the vibration conduction disk 61.

[0049] The central bolt 64 has a central bolt head 641 that abuts against the central portion 610 of the vibration conduction disk 61 and is inserted through the central groove 616 along the axis X, and a central bolt rod 642 that passes through the vibration conduction disk 61 in the direction of the axis X from the central bolt head 641 and is connected to the horn 42.

[0050] The first bolts 65 are equally angularly distributed around the axis X. Each of the first bolts 65 has a first bolt head 651 that abuts against the vibration conduction disk 61, and a first bolt rod 652 that passes through the vibration conduction disk 61 in the direction of the axis X from the first bolt head 651 and is connected to the rotating shaft 32.

[0051] It should be noted that the vibration conduction disk 61 uses the first bolts 65 as nodes to distinguish the central portion 610 from the centrifugal portion 611. That is, the portion between the first bolts 65 and the axis X is defined as the central portion 610. The remaining portion is the centrifugal portion 611.

[0052] The second bolts 66 are equally angularly distributed around the axis X. Each of the second bolts 66 has a second bolt head 661 that abuts against the centrifugal portion 611 of the vibration conduction disk 61, and a second bolt rod 662 that passes through the vibration conduction disk 61 in the direction of the axis X from the second bolt head 661 and is connected to the grinding element 2.

[0053] In this embodiment, each of the second bolts 66 defines a spacing T with the axis X in a direction perpendicular to the axis X. The spacing T is between 50 mm and 120 mm, preferably between 80 mm and 100 mm, 85 mm and 95 mm, 60 mm and 80 mm, 80 mm and 120 mm, or 90 mm and 110 mm.

[0054] Refer to Figure 3 , the power transmission unit 7 includes a first induction element 71 installed in the housing 31 and used for transmitting the electric energy, and a second induction element 72 installed on the rotating shaft 32 and electrically connected to the transducer unit 4. The second induction element 72 transmits the electric energy to the first induction element 71 through electromagnetic induction.

[0055] Refer to Figures 6 to 9 , in the process of the vibration energy being conducted from the horn 42 through the vibration conduction disk 61 to the grinding element 2, first, the horn 42 will be subjected to the stress of the vibration energy and generate a telescopic deformation in the direction of the axis X, and vibrate at a high frequency in a first mode.

[0056] When the vibration energy is conducted from the horn 42 to the vibration conduction disc 61, the central portion 610 of the vibration conduction disc 61 is prone to deformation due to the presence of the groove 616. At this time, in addition to generating telescopic deformation in the direction of the axis X, the central portion 610 of the vibration conduction disc 61, the centrifugal portion 611 of the vibration conduction disc 61 will also twist and bend with the first bolt 65 as a node, generating shear deformation in the direction perpendicular to the axis X. Thereby, the vibration conduction disc 61 will vibrate at a high frequency in a second mode.

[0057] Referring to Figure 6 , and Figure 10 the frequency response curve shown, it can be known that when the vibration conduction disc 61 has the groove 616, compared with the design without the groove 616, it is more capable of generating periodic vibration. Thereby, the effectiveness and stability in conducting the vibration energy are improved.

[0058] When the vibration energy is conducted from the vibration conduction disc 61 to the grinding element 2 through the second convex portion 63, the vibration conduction disc 61 and the grinding element 2 will vibrate at a high frequency in a resonance mode. The resonance mode is as Figure 11 shown as a concentric circle resonance mode. Referring to Figure 9 and Figure 11 , that is, the vibration energy propagates from the central bolt 64 towards the annular rib 614 in a concentric circle mode.

[0059] It should be noted that during the process of conducting the vibration energy, the vibration energy will also be conducted from the vibration conduction disc 61 to the rotating shaft 32 through the first convex portion 62. Referring to Figure 11 , Figure 12 the energy gradient simulation diagram shown, it can be found that the central portion 610 is directly connected to the horn 42, and the vibration energy is the largest. However, from the perspective of the concentric circle resonance mode, the darker concentric circles have smaller vibration energy and the amplitude is close to 0. The lighter concentric circles have larger vibration energy and the amplitude is close to the peak. Among them, the innermost dark concentric circle 8a corresponds to the portion of the vibration conduction disc 61 adjacent to the first convex portion 62. The outermost light concentric circle 8b corresponds to the portion of the vibration conduction disc 61 adjacent to the second convex portion 63. Obviously, the amplitude of the portion of the vibration conduction disc 61 adjacent to the second convex portion 63 is greater than the amplitude of the portion adjacent to the first convex portion 62.

[0060] Thus, when the abrasive 22 is adjacent to the second convex portion 63 and vibrates at a high frequency together with the centrifugal portion 611, the vibration amplitude of the abrasive 22 is effectively increased. Through the telescopic cutting force in the direction of the axis X and the shearing cutting force in the direction perpendicular to the axis X, the wafer is ground more quickly, and the probability of damaging the wafer is greatly reduced.

[0061] It should be noted that during the process of vibration energy conduction, external fluid can be introduced into the flow channel 322 of the rotating shaft 32 through a pressurizing device (such as a pump). At this time, the fluid entering the flow dividing section 324 from the main flow section 323 of the flow channel 322 will flow towards the outlet 615 of the vibration conduction disc 61. Finally, the fluid is discharged from the outlet 615 and sprayed between the workpiece to be processed and the abrasive 22. Thus, heat exchange is carried out between the fluid, the abrasive 22, and the workpiece to be processed, achieving the effects of heat dissipation, cooling, or lubrication.

[0062] It should be noted that the outlet 615 for discharging the fluid is not limited to being directly connected to the outside. In other variations of this embodiment, a channel (not shown in the figure) connecting the outside and the outlet 615 can also be formed in the grinding element 2, so that after the fluid passes through the outlet 615, it is discharged through the channel.

[0063] Through the above description, the advantages of the foregoing embodiments can be summarized as follows:

[0064] 1. The transducer unit 4 of the present invention contacts the rotating shaft 32 only in a point contact manner through the ring member 51 and the buffer member 52. In addition to maintaining the concentricity between the transducer unit 4 and the rotating shaft 32 through the ring member 51, the buffer member 52 can also reduce the transmission of vibration waves to the rotating shaft 32.

[0065] 2. The present invention can also, with the special spacing T between the first bolt member 65 and the axis X, and the special designs of the first convex portion 62, the second convex portion 63, and the groove 616, reduce the loss of the vibration energy, increase the vibration energy of the portion of the vibration conduction disc 61 adjacent to the second convex portion 63, and reduce the vibration energy of the portion adjacent to the first convex portion 62. Thus, not only can the vibration of the rotating shaft 32 be effectively avoided, but also the vibration amplitude of the abrasive 22 can be increased, and the wafer can be ground more quickly, and the grinding element 2 with a larger size or heavier weight can be applied.

[0066] 3. In addition, the first sensing element 71 and the second sensing element 72 of the present invention transmit electrical energy through electromagnetic induction and do not require wire connection, which not only avoids physical direct contact, but also can reduce wear and tear and extend the service life.

[0067] 4. The present invention can also, through the special design of the flow channel 322 and the outlet 615, enable the external fluid to flow from the flow channel 322 through the outlet 615 towards the workpiece to be processed. Thereby, heat exchange is performed between the fluid, the abrasive 22, and the workpiece to be processed, achieving the effects of heat dissipation, cooling, or lubrication.

[0068] The above are only embodiments of the present invention, and the scope of implementation of the present invention cannot be limited thereby. That is, all simple equivalent changes and modifications made according to the claims and the content of the specification of the present invention still fall within the scope of the present invention.

Claims

1. A high-frequency vibration spindle device, applicable to connecting a grinding element, comprising: A spindle unit, including a rotating shaft that can rotate and defines a shaft cavity around an axis; A power transmission unit, installed on the spindle unit and used for inputting electric energy; A transducer unit, inserted into the shaft cavity and spaced from the rotating shaft, the transducer unit being electrically connected to the power transmission unit and used for converting the electric energy into ultrasonic vibration energy; A vibration conduction unit, including a vibration conduction disk connecting the rotating shaft, the transducer unit and the grinding element, the vibration conduction disk being applicable to conduct the vibration energy to the grinding element; Characterized in that the high-frequency vibration spindle device further comprises a vibration isolation unit: The vibration isolation unit includes a plurality of buffer members surrounding between the rotating shaft and the transducer unit and used for limiting the transducer unit and blocking the vibration energy.

2. The high-frequency vibration spindle device according to claim 1, characterized in that: The vibration isolation unit further includes two annular members spaced along the direction of the axis, each annular member surrounding the transducer unit, and each buffer member being blocked between the corresponding annular member and the rotating shaft.

3. The high-frequency vibration spindle device according to claim 1, characterized in that: The vibration conduction unit further includes a central bolt member, the vibration conduction disk has a central portion at the center and a centrifugal portion surrounding the central portion, the central portion has a groove, the central bolt member passes through the groove along the direction of the axis, and abuts against the central portion and is connected to the transducer unit.

4. The high-frequency vibration spindle device according to claim 3, wherein: The vibration conduction unit further includes a plurality of first bolt members and a plurality of first convex portions formed between the vibration conduction disk and the rotating shaft, the vibration conduction disk further has a first disk surface formed on one side, the first bolt members are equally angularly distributed around the axis, each first bolt member passes through the vibration conduction disk along the direction of the axis, and abuts against the vibration conduction disk and is connected to the rotating shaft, the first convex portion contacts the first disk surface of the rotating shaft and the vibration conduction disk.

5. The high-frequency vibration spindle device according to claim 4, characterized in that: The vibration conduction unit further includes a plurality of second bolt members, the vibration conduction disk further has a second disk surface formed on the other side opposite to the first disk surface and an annular rib formed around the axis and on the second disk surface, the annular rib abuts against the grinding element, the second bolt members are equally angularly distributed around the axis, each second bolt member passes through the vibration conduction disk along the direction of the axis and abuts against the vibration conduction disk and is connected to the grinding element.

6. The high-frequency vibration spindle device according to claim 5, characterized in that: The vibration conduction unit further includes a plurality of second convex portions formed between the vibration conduction disk and the grinding element, the first disk surface is spaced from the grinding element, the second convex portion contacts the second disk surface of the vibration conduction disk and the grinding element, and is applicable to conduct the vibration energy to the grinding element, and the amplitude of the portion of the vibration conduction disk adjacent to the second convex portion is greater than the amplitude of the portion adjacent to the first convex portion.

7. The high-frequency vibration spindle device according to claim 5, characterized in that: Each second bolt member defines a spacing with the axis in a direction perpendicular to the axis, and the spacing is between 60 mm and 80 mm, or between 90 mm and 110 mm.

8. The high-frequency vibration spindle device according to claim 7, characterized in that: During the process that the vibration energy is transmitted from the transducer unit to the grinding element via the vibration conduction disk, the vibration conduction disk vibrates at a high frequency in a resonance mode, and the resonance mode is a concentric circle resonance mode.

9. The high-frequency vibration spindle device according to claim 1, wherein: The rotating shaft further defines a flow passage that communicates with the outside and extends from one end face to the other end face along the direction of the axis. The flow passage is adapted to guide the fluid from the outside through the rotating shaft. The vibration conduction disk further has at least one outlet that communicates the outside with the flow passage, and the at least one outlet is used to discharge the fluid so that the fluid is adapted to cool or lubricate the workpiece to be machined.

10. The high-frequency vibration spindle device according to claim 1, characterized in that: The main shaft unit further includes a housing. The rotating shaft extends along the direction of the axis and is rotatably mounted in the housing. The power transmission unit includes a first induction element mounted on the housing and used for transmitting the electric energy, and a second induction element mounted on the rotating shaft and electrically connected to the transducer unit. The second induction element and the first induction element transmit the electric energy through electromagnetic induction.

Images