Dynamic temperature measuring device and temperature measuring and controlling method for superconducting material coating area

Abstract

The invention provides a superconducting material coating area dynamic temperature measuring device and a temperature measuring and controlling method. The superconducting material coating area dynamic temperature measuring device comprises a fixing part, a temperature measuring part and a driving part. The fixing part is used for fixing the whole device and is provided with a preset limiting opening for limiting a temperature measuring position; the number of the temperature measuring component is one, and the temperature measuring component comprises a thermocouple. The driving part comprises a vacuum isolation transmission device and is used for driving the temperature measuring part to change the position in a high-vacuum-degree environment, and the temperature measuring part is in contact with a measured object in the direction perpendicular to / parallel to the tape walking direction of the superconducting material and measures the temperature of the measured object at the corresponding position in the film coating area; the measured object comprises a superconducting material or a heating substrate of a coating area. According to the invention, large-range, high-fineness and high-consistency temperature gradient scanning can be realized, so that high-fineness temperature control is realized.

Description

Technical Field

[0001] The present invention relates to the field of superconducting materials, and in particular, to a dynamic temperature measurement device for a superconducting material coating area and a temperature measurement and control method. Background Art

[0002] In the description of this application, the deposition of REBCO film layer by PLD (Pulsed Laser Deposition) is used as an example for narration, but this application is not limited to a single superconducting material such as REBCO or a single method such as PLD.

[0003] The deposition temperature is one of the most critical parameters in the superconducting layer process. The temperature range for the growth of REBCO thin film is very narrow, generally only 20°C. Traditional superconducting coating temperature measurement devices often adopt a static embedded temperature measurement structure, and a group of multiple thermocouples are buried inside the substrate, which can roughly monitor the temperature within the entire coating area. However, due to its embedded structure, it is difficult to ensure the consistency of the assembly position each time during maintenance and loading / unloading, resulting in temperature differences between multiple measurements; static embedded temperature measurement is prone to poor thermal contact after high-temperature deformation, affecting its temperature measurement accuracy; at the same time, due to the long-term high-temperature working environment of the thermocouple, its service life is short, and temperature data drift is likely to occur in the middle and late stages of its life, affecting the temperature measurement quality. In production, the common situation of applying static embedded temperature measurement is that: the temperature measured by a certain thermocouple suddenly drops by hundreds of degrees Celsius due to aging, directly resulting in local temperature control failure; or after replacing a new thermocouple, it is found that the temperature difference between different thermocouples measuring the same object is 50°C, which is much larger than the deviation of ±5°C required for high-quality coating. These problems of inconsistent temperature measurement and poor reliability caused by traditional static embedded temperature measurement seriously affect the high-quality deposition of superconducting materials and result in a large number of defective products.

[0004] In addition to the above-mentioned test stability issues, the biggest problems with static embedded temperature measurement are as follows: 1. Since the thermocouple is embedded inside the substrate, there is often a significant difference between the measured temperature and the actual temperatures of the substrate surface and the superconducting tape surface. 2. It is unable to provide more refined temperature gradient data. In actual superconducting production applications, the superconducting tape undergoes multiple coating passes with reciprocating coating. There are obvious differences in the film thickness and coating rate of each coating pass of the tape. Also, because the thicker the superconducting film layer, the less heat radiation dissipation on the surface, and the surface temperature will be higher compared to the thinner superconducting film layer. Therefore, it is necessary to adjust the temperature of each pass according to the superconducting film layer thickness, reducing the deposition temperature of the thicker film layer passes and increasing the deposition temperature of the thinner film layer passes, that is, a temperature gradient needs to be set between passes. On the other hand, for a certain coating pass, in order to improve the coating quality, it will go through processes of rapid heating, small heating, small cooling, small heating, and finally rapid cooling. Such a dynamic change process can ensure that the surface temperature of the tape is always within the range of ±5°C of the optimal coating temperature of this coating pass set based on the superconducting film layer thickness. That is, within the same coating pass, along the movement direction of the tape, a specific temperature gradient also needs to be set to achieve high-quality coating. Due to the fact that static embedded temperature measurement relies on thermocouples buried at different positions inside the substrate to achieve large-range temperature measurement, restricted by its own volume and substrate space, they can only be buried sparsely and scattered, and only scattered and sparse temperature point data can be obtained. The high-precision requirements for temperature control in superconducting coating are no longer satisfied with this kind of temperature point data. What is needed is a fine temperature scan of the entire coating area and high-precision temperature control based on this. For the above reasons, there is an urgent need to develop a dynamic temperature measurement device and temperature control method for the superconducting material coating area that overcomes the many drawbacks of the existing static embedded temperature measurement.

[0005] The patent document with the authorization publication number CN114438468B discloses a heating device applicable to superconducting coating. In this patent, the thermocouple is placed inside the drum-shaped heating plate in a static embedded manner. Due to space limitations, this device can only measure the temperature at individual positions. With the embedded method, the thermal contact situation of the thermocouple cannot be confirmed, and temperature drift is likely to occur, which is not conducive to the continuous and stable production of superconducting tapes. Summary of the Invention

[0006] Aiming at the defects in the prior art, the purpose of the present invention is to provide a dynamic temperature measurement device and temperature measurement and control method for the superconducting material coating area.

[0007] A dynamic temperature measurement device for the superconducting material coating area according to the present invention includes: a fixing component, a temperature measurement component, and a driving component; The fixing component is used to fix the entire device and has a preset limit opening to define the temperature measurement position; The number of the temperature measurement components is one, and it includes a thermocouple; The driving component is used to drive the temperature measuring component to change its position in a high vacuum environment, contact the object to be measured along the direction perpendicular / parallel to the tape running direction of the superconducting material, and measure the temperature of the object to be measured at the corresponding position in the coating area; The object to be measured includes a superconducting material or a heating substrate in the coating area.

[0008] Further, the fixing component includes: a temperature measuring limit plate and a mounting base; The temperature measuring limit plate is connected to the mounting base, and a limit opening is formed on the temperature measuring limit plate for defining the temperature measuring position.

[0009] Further, the limit opening is composed of a plurality of mutually parallel first limit holes; The first limit holes correspond to different temperature measuring positions in the coating area; The interval between the first limit holes meets the temperature measuring point density required for temperature measurement.

[0010] Further, the driving component includes: A vacuum isolation transmission device; A lead screw, one end of which is rotatably connected to the fixing component, and the other end is connected to the vacuum isolation transmission device through a vacuum adapter flange; A manual adjustment wheel, connected to the vacuum isolation transmission device, and driving the lead screw to rotate through the vacuum isolation transmission device; A thermocouple front-back adjustment plate, having a threaded hole, and being threadedly connected to the lead screw between the fixing component and the vacuum adapter flange through the threaded hole. A second limit hole is formed on the thermocouple front-back adjustment plate, and the first limit hole and the second limit hole correspond to each other one by one; A thermocouple left-right adjustment rod, detachably connected to the second limit hole in the vertical direction.

[0011] Further, the temperature measuring component includes: A thermocouple fixing device, one end of which is connected to the thermocouple left-right adjustment rod. A fixing groove is formed on the thermocouple fixing device, and the other end is inclined upward / downward by a preset angle to facilitate contact with the object to be measured; A thermocouple, connected in the fixing groove, and the temperature measuring head of the thermocouple is exposed outside the fixing groove and can contact the surface of the object to be measured; The thermocouple left-right adjustment rod adjusts the temperature measuring height of the thermocouple by changing the fixing position in the vertical direction on the second limit hole, and controls the thermocouple to closely contact the object to be measured; The thermocouple is bent at a specific angle, and the generated elastic restoring force drives the thermocouple to closely contact the object to be measured.

[0012] A dynamic temperature measurement and control method for a superconducting material coating area provided by the present invention uses the described dynamic temperature measurement device for the superconducting material coating area and performs the steps: Step 1: Fix the described dynamic temperature measurement device for the superconducting material coating area on one side of the coating area in a preset spatial position relationship; Step 2: Adjust the installation position of the temperature measurement component in a second limit hole of the driving component, drive the temperature measurement component into the coating area through the driving component, and contact the surface of the object to be measured along a direction perpendicular or parallel to the tape running direction of the superconducting material to obtain temperature data; Connect the temperature measurement component to the next second limit hole and adjust the installation position, and repeat the detection in this way to obtain temperature data, temperature gradient or temperature distribution data at multiple positions in the coating area; Step 3: Compare the differences between the detected temperature data, temperature gradient or temperature distribution data and the preset target temperature data, target temperature gradient or target temperature distribution data, and adjust the temperature of the coating area based on the differences.

[0013] Further, it includes temperature control method 1: Contact the surface of the object to be measured along a direction perpendicular to the tape running direction of the superconducting material to obtain temperature data of all coating passes at the same detection position / temperature gradient between all coating passes; Unify all coating passes to a certain optimal coating temperature, and control the temperature based on the above Step 3 to obtain a uniform temperature coating area with the same temperature for each coating pass.

[0014] Further, it includes temperature control method 2: Contact the surface of the object to be measured along a direction perpendicular to the tape running direction of the superconducting material to obtain temperature data of all coating passes at the same detection position / temperature gradient between all coating passes; Set a certain linear temperature gradient between each coating pass, and control the temperature based on the above Step 3 to obtain a non-uniform temperature coating area with a linear temperature distribution for each coating pass.

[0015] Further, it includes temperature control method 3: Contact the surface of the object to be measured along a direction perpendicular to the tape running direction of the superconducting material to obtain temperature data of all coating passes at the same detection position / temperature gradient between all coating passes; Based on the thickness of the superconducting film layer on each coating pass, set a certain complex non-linear temperature gradient, and control the temperature based on the above Step 3 to obtain a non-uniform temperature coating area with a complex non-linear temperature distribution for each coating pass, and the coating quality is optimal.

[0016] Further, it includes temperature control method 4: Contact the surface of the object to be measured along a direction parallel to the tape running direction of the superconducting material to obtain the temperature gradient along the tape running direction of one coating pass; Around the optimal coating temperature of this pass, high, low, and high temperature zones are arranged at intervals along the strip running direction and the temperature is controlled based on Step 3. The temperature of the high temperature zone is slightly higher than the optimal coating temperature, and the temperature of the low temperature zone is slightly lower than the optimal coating temperature, so as to achieve stable temperature control during the dynamic high-speed running process of the strip.

[0017] Compared with the prior art, the present invention has the following beneficial effects: 1. By using a single thermocouple to measure the temperature at different positions in the entire heating zone, the present invention avoids the temperature measurement data differences between thermocouples caused by using multiple thermocouples in static temperature measurement, and improves the consistency of temperature measurement data.

[0018] 2. By using dynamic temperature measurement, the present invention avoids the thermocouple being in a high-temperature environment for a long time, greatly extends the life of the thermocouple, and ensures the stability of temperature measurement.

[0019] 3. By directly contacting the substrate surface and the superconducting strip surface with the thermocouple, the present invention greatly improves the temperature measurement accuracy and truly measures the process temperature of the most core coating area of the superconducting coating.

[0020] 4. By using the thermocouple to dynamically measure the temperature at multiple positions in the entire heating area, the present invention can achieve extremely fine temperature gradient scanning and temperature control.

[0021] 5. The present invention can achieve a uniform temperature superconducting coating area with the same temperature in each coating pass, thereby solving the problem of large-range temperature drift existing in traditional temperature measurement and control, and the superconducting coating quality is better.

[0022] 6. The present invention can achieve a non-uniform temperature coating area with a linear temperature distribution in each coating pass, and the superconducting coating quality is better than that of the uniform temperature coating area, which is difficult to achieve by traditional temperature measurement and control methods.

[0023] 7. The present invention can achieve a non-uniform temperature coating area with a complex non-linear temperature distribution in each coating pass, the temperature gradient setting between each coating pass is more scientific, the superconducting coating quality is the best, and it is difficult to achieve by traditional temperature measurement and control methods.

[0024] 8. The present invention can achieve a complex temperature zone setting along the strip running direction, and achieve the suppression of temperature drift during the high-speed dynamic movement of the superconducting strip, which is difficult to achieve by traditional temperature measurement and control methods. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] By reading the following detailed description of the non-restrictive embodiments with reference to the accompanying drawings, other features, objects, and advantages of the present invention will become more apparent: Figure 1 It is a schematic structural diagram of a dynamic temperature measurement device for a superconducting material coating area provided by an embodiment of this specification; Figure 2Schematic diagram of other viewing angles of the structure of a dynamic temperature measurement device for a superconducting material coating area provided in an embodiment of this specification; Figure 3 Schematic diagram of the spatial position relationship between a dynamic temperature measurement device for a superconducting material coating area provided in an embodiment of this specification, the measured strip, and the substrate; Figure 4 Flowchart of a dynamic temperature measurement and control method for a superconducting material coating area provided in an embodiment of this specification; Figure 5 Schematic diagram of dynamic temperature measurement along the direction perpendicular to the strip running direction of a dynamic temperature measurement device for a superconducting material coating area provided in an embodiment of this specification and ideal uniform temperature data; Figure 6 Schematic diagram of a typical temperature drift problem of traditional static embedded temperature measurement provided in an embodiment of this specification; Figure 7 Schematic diagram of a typical large-range temperature drift problem of traditional static embedded temperature measurement provided in an embodiment of this specification; Figure 8 Schematic diagram of realizing channel-by-channel dynamic temperature measurement based on a dynamic temperature measurement device and control method for a superconducting material coating area provided in an embodiment of this specification; Figure 9 Schematic diagram of realizing channel-by-channel dynamic temperature measurement and controlling temperature drift based on a dynamic temperature measurement device and control method for a superconducting material coating area provided in an embodiment of this specification; Figure 10 Schematic diagram of realizing channel-by-channel dynamic temperature measurement and controlling temperature according to a specific temperature gradient based on a dynamic temperature measurement device and control method for a superconducting material coating area provided in an embodiment of this specification; Figure 11 Schematic diagram of the superconducting film layer thickness data of each coating pass and the influence relationship between the superconducting film layer thickness and the deposition temperature provided in an embodiment of this specification; Figure 12 Schematic diagram of realizing channel-by-channel dynamic temperature measurement and implementing high-precision temperature gradient control according to the superconducting film layer thickness based on a dynamic temperature measurement device and control method for a superconducting material coating area provided in an embodiment of this specification; Figure 13 Schematic diagram of realizing dynamic temperature measurement along the strip running direction and controlling temperature according to a specific temperature gradient based on a dynamic temperature measurement device and control method for a superconducting material coating area provided in an embodiment of this specification; In the figure: Temperature measurement limit plate 101; mounting base 102; first limit hole 103; thermocouple fixing device 201; thermocouple 202; thermocouple left and right adjusting rod 301; thermocouple front and back adjusting plate 302; lead screw 303; vacuum adapter flange 304; vacuum isolation transmission device 305; manual adjusting wheel 306; second limit hole 307. Detailed implementation manners

[0026] The present invention will be described in detail below in conjunction with specific embodiments. The following embodiments will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several changes and improvements can still be made. These all belong to the protection scope of the present invention.

[0027] As Figure 1 、 Figure 2 and Figure 3 shown, the present invention provides a dynamic temperature measuring device for a superconducting material coating area, including: a fixing component 1, a temperature measuring component 2, and a driving component 3. The fixing component 1 is used to fix the entire device and has a preset limit opening for defining the temperature measuring position. The number of the temperature measuring components 2 is one, and includes a thermocouple. The driving component 3 is used to drive the temperature measuring component 2 to change its position in a high vacuum environment, contact the object to be measured along the vertical / parallel direction of the superconducting material running direction, and measure the temperature of the object to be measured at the corresponding position in the coating area.

[0028] The fixing component 1 includes: a temperature measuring limit plate 101 and a mounting base 102. The temperature measuring limit plate 101 is connected to the mounting base 102 to achieve fixation. A plurality of first limit holes 103 in the vertical direction are arranged side by side on the temperature measuring limit plate 101, corresponding to different detection positions in the coating area. The size of the first limit hole 103 depends on the geometric relationship between the temperature measuring component 2 and the object to be measured. As Figure 2 、 3 shown, in terms of width, the first limit hole 103 is slightly larger than the width of the temperature measuring component 2 to facilitate the entry of the temperature measuring component 2. In terms of length, it is necessary to ensure that the temperature measuring component 2 can contact the surface of the object to be measured through vertical displacement within the first limit hole 103. In addition, the arrangement density of the first limit holes 103 depends on the temperature measuring point density requirement.

[0029] The driving component 3 includes: a thermocouple left and right adjustment rod 301; a thermocouple front and rear adjustment plate 302; a screw 303; a vacuum adapter flange 304; a vacuum isolation transmission device 305; and a manual adjustment wheel 306. One end of the screw 303 is rotatably connected to the fixed component 1, and the other end is connected to the vacuum isolation transmission device 305 through the vacuum adapter flange 304. The manual adjustment wheel 306 is connected to the vacuum isolation transmission device 305, and drives the screw 303 to rotate through the vacuum isolation transmission device 305. The thermocouple front and rear adjustment plate 302 has a threaded hole, which is threadedly connected to the screw 303 between the fixed component 1 and the vacuum adapter flange 304 through the threaded hole. The thermocouple front and rear adjustment plate 302 is provided with a plurality of second limiting holes 307 arranged side by side and in a vertical direction, which correspond to the first limiting holes 103 one by one. The thermocouple left and right adjustment rod 301 is detachably connected to the second limiting hole 307 along the vertical direction. The adjustment action of the manual adjustment wheel 306 is transmitted to the screw 303 through the vacuum isolation transmission device 305 with high vacuum sealing and the vacuum adapter flange 304, so as to realize the in-situ circumferential rotation control of the screw 303 under the high vacuum environment. When the screw 303 performs the above-mentioned in-situ rotation movement, the thermocouple front and rear adjustment plates 302 move forward and backward in conjunction. The driving component 3 can drive the temperature measuring component 2 to pass through the first limiting hole 103, contact the object to be measured in a direction perpendicular to / parallel to the running direction of the superconducting material, and measure the temperature of the object to be measured at the corresponding position in the coating area. The object to be measured can be the superconducting material itself, or the heating substrate in the coating area.

[0030] The thermocouple left and right adjustment rod 301 is connected and fixed in the vertical direction at the second limit hole 307 on the thermocouple front and back adjustment plate 302 by bolts. The thermocouple left and right adjustment rod 301 adjusts the relative height of the thermocouple left and right adjustment rod 301 by changing the upper and lower positions of the fixing bolts in the second limit hole 307 of the thermocouple front and back adjustment plate 302. The thermocouple left and right adjustment rod 301 is fixed to different second limit holes 307 on the thermocouple front and back adjustment plate 302 to adjust its left and right position. The temperature measuring component 2 realizes the position control capability in three dimensions by adjusting the front and back position of the thermocouple front and back adjustment plate 302, adjusting the left and right position of the thermocouple left and right adjustment rod 301, and adjusting the relative height of the thermocouple left and right adjustment rod 301 by changing the fixed position in the limit hole of the thermocouple front and back adjustment plate 302.

[0031] The number of the temperature measuring component 2 is one, and the temperature measuring component 2 includes: a thermocouple fixture 201 and a thermocouple 202. One end of the thermocouple fixture 201 is connected to the thermocouple left and right adjustment rod 301, and a fixing groove is provided on the thermocouple fixture 201 along the length direction, and the other end is tilted upward / downward at a preset angle to facilitate contact with the object to be measured. The thermocouple 202 is connected to the fixing groove, and the temperature measuring head of the thermocouple 202 is exposed outside the fixing groove and can contact the surface of the object to be measured.

[0032] The thermocouple 202 and the thermocouple fixing device 201 pass through the limiting holes of the temperature measuring limiting plate 101 at a certain angle, and based on the one-to-one correspondence between the limiting holes of the thermocouple front and rear adjusting plate 302 and the limiting holes of the temperature measuring limiting plate 101, the left and right positions of the thermocouple 202 are fixed, avoiding position deviation during the temperature measurement process. This passing angle depends on the spatial geometric relationship between the object to be measured and the temperature measuring component, facilitating the close contact between the thermocouple and the object to be measured, such as Figure 3 shown

[0033] such as Figure 1 、 Figure 2 、 Figure 3 shown, in the embodiments provided by the present invention, during the measurement process, the thermocouple 202 is fixed in the groove of the thermocouple fixing device 201. Through the fixing of the thermocouple fixing device 201 and the movement conduction of the driving component 3, the free adjustment of the temperature measurement position in the three dimensions of front and back, up and down, and left and right can be realized. During the measurement process, the operator can drive the internal transmission mechanism (generally a magneto-fluid sealing transmission device) in the vacuum isolation transmission device 305 to directly control the in-situ rotation of the lead screw 303 through the vacuum transfer flange 304 by rotating the manual adjustment wheel 306. The in-situ rotation movement of the lead screw 303 drives the thermocouple front and rear adjusting plate 302 to move forward and backward in a controlled manner through gear engagement. The fixed positions of the thermocouple left and right adjusting rods 301 and the thermocouple front and rear adjusting plate 302 adjust the left and right and up and down positions of the temperature measurement of the thermocouple 202, thereby realizing the temperature measurement position adjustment in the above-mentioned three dimensions of front and back, up and down, and left and right in a narrow space.

[0034] Due to the adoption of a non-embedded temperature measurement method, the good contact between the thermocouple 202 and the object to be measured or a specific position of the object to be measured can be visually observed, ensuring that during the temperature measurement process, the thermocouple 202 can accurately measure the temperature of the target position, and the thermocouple 202 can directly contact the surface of the strip or substrate to be measured, avoiding the temperature difference between the temperature measurement area of the embedded thermocouple and the target area. During the entire temperature measurement process, only one set of thermocouples is used to quickly complete the temperature measurement of all different positions, avoiding the introduction of a large number of thermocouples in the embedded temperature measurement and the temperature drift caused by different service lives and states between thermocouples (such as Figure 6 、 Figure 7 shown), ensuring the consistency and reliability of the test data (such as Figure 5 shown). After the temperature measurement process is completed, the thermocouple can be adjusted away from the high-temperature object to be measured by rotating the manual adjustment wheel, so that the thermocouple does not need to be in a high-temperature working environment for a long time, greatly extending the service life of the thermocouple.

[0035] Figure 4 is a flow chart of a dynamic temperature measurement and control method for a superconducting material coating area provided by an embodiment of this specification. According toFigure 4 As shown, the method for dynamically measuring and controlling the temperature of the superconducting material coating area includes the following steps.

[0036] Step S1: Fix the dynamic temperature measurement device for the superconducting material coating area on one side of the coating area in a preset spatial position relationship.

[0037] Determine the spatial position relationship through the spatial distance and spatial angle between the temperature measurement limit plate 101 and the substrate or strip to be measured. After installation, ensure that by adjusting the manual adjustment wheel 306 and the left and right adjustment rods 301 of the thermocouple, full coverage of the target temperature measurement area can be achieved.

[0038] In the production application of superconducting tapes, usually adjust the temperature measurement position of the dynamic temperature measurement device described in the present invention to ensure that the projection of the thermocouple 202 on the surface of the tape or substrate should be perpendicular to the tape running direction or perpendicular to each running pass of the substrate surface. At the same time, ensure that the manual adjustment wheel 306 is rotated so that the thermocouple moves back and forth, and the back and forth movement range ensures that the thermocouple 202 can measure all tapes or running passes; adjust the left and right adjustment rods of the thermocouple so that the thermocouple moves left and right, and the left and right movement directions are parallel to the tape running direction or the substrate running pass; adjust the relative height adjustment achieved by the fixed position of the left and right adjustment rods of the thermocouple in the limit holes of the front and back adjustment plates of the thermocouple. At the same time, the thermocouple 202 is bent at a specific angle, and the elastic restoring force generated drives the thermocouple to closely contact the object to be measured. So that during the temperature measurement process, the thermocouple can always closely adhere to the surface of the tape or substrate to be measured. In this way, full coverage of the target temperature measurement area is ensured.

[0039] By setting the spacing of the limit holes on the temperature measurement limit plate 101, the temperature measurement point density required for temperature measurement is satisfied, and the smaller the spacing, the denser the temperature measurement points.

[0040] Step S2: Adjust the installation position of the temperature measurement component in a second limit hole of the driving component. Drive the temperature measurement component into the coating area through the driving component, and contact the surface of the object to be measured along the direction perpendicular / parallel to the running direction of the superconducting material to obtain temperature data; connect the temperature measurement component to the next second limit hole and adjust the installation position, and repeat the detection in this way to obtain temperature data, temperature gradient or temperature distribution data at multiple positions in the coating area.

[0041] In the actual superconducting production application, the superconducting tape adopts multi-coating passes for reciprocating coating. The tape will move from the head end to the tail end of a certain coating pass on the substrate, and then precess to the head end of the next coating pass through the motion mechanism and move to the tail end again, and continue this process until the tape passes through all coating passes to complete the superconducting coating. Therefore, special attention is paid to the temperature change data when the tape moves along the coating pass (such as Figure 13 ) or the temperature gradient data between coating passes (such as Figure 5 , Figure 6 ,Figure 7 ), and the temperature distribution data on the target coating area. Usually, the temperature measurement paths are set in two ways: one is to dynamically measure the temperature along the running direction of the strip parallel to each coating pass to obtain the temperature gradient data of each coating pass along the running direction of the strip; the other is to dynamically measure the temperature perpendicular to the running direction of the strip and across all coating passes to obtain the temperature gradient data between each coating pass. By changing the starting positions of the above two paths and repeating the above process multiple times, the temperature distribution data on the target coating area can be obtained. Based on these data, the subsequent temperature control process can be guided.

[0042] Step S3: Compare the measured temperature data, temperature gradient or temperature distribution with the preset target temperature, target temperature gradient or distribution, and adjust the temperature based on the difference.

[0043] Specifically, based on the temperature data of each coating pass, temperature control is performed on each coating pass respectively based on the corresponding target temperature data (for example, uniformity control, controlling the temperatures at different positions of each coating pass to be the same). Based on the temperature gradient between each coating pass, temperature gradient control is performed on multiple coating passes based on the corresponding target temperature gradient. Based on the temperature gradient of each coating pass, temperature control is performed on each coating pass based on the corresponding target temperature gradient.

[0044] Repeat the above steps until the temperature difference is within the target range.

[0045] The target temperature gradient or target temperature distribution is preset according to the superconducting coating practice experience or certain scientific basis (such as superconducting film thickness), and can be further iterated and adjusted through repeated practice.

[0046] Temperature control example 1: Traditionally, it is recognized that the superconducting coating temperature zone needs to be more uniform and within the range of ±5°C of the optimal temperature for superconducting coating. That is, in production, it is necessary to ensure that the temperatures of each coating pass are the same and within the range of ±5°C of the optimal temperature for superconducting coating. However, due to factors such as the lifespan differences of each thermocouple, the degree of good contact, and the distance between the temperature measurement area and the target area in the traditional static buried temperature measurement system, the actual strip surface or the temperatures of each coating pass often drift ( Figure 6 ), or even drift significantly ( Figure 7 ). After applying the dynamic temperature measurement device of the present invention and performing dynamic temperature measurement according to path 2 above, the difference between the actual temperature gradient and the target temperature is obtained (such as Figure 8 ). According to this difference, the temperature is adjusted repeatedly, and finally, it can be ensured that the temperatures of each coating pass are uniform and within the range of ±5°C of the target temperature (such as Figure 9 ).

[0047] Temperature control Example 2: According to practical experience, it is found that setting a reasonable temperature gradient between each coating pass can improve the coating quality. Simply, a linear temperature change is used to set the target temperature gradient (such as Figure 10 ) Figure 10 The target temperature gradients set in are: -0°C, -0°C, -3°C, -3°C, -6°C, -6°C, -9°C. After using the dynamic temperature measurement device of the present invention to perform dynamic temperature measurement according to Path 2 above, the difference between the actual temperature gradient and the target temperature gradient is obtained. According to this difference, the temperature is adjusted repeatedly, and finally it can be ensured that the temperatures of each coating pass can be distributed according to the target temperature gradient (such as Figure 10 )

[0048] Temperature control Example 3: Based on practical experience and scientific basis, further, the target temperature gradient should be set according to the thickness of the superconducting film layer in each coating pass rather than a simple linear change (such as Figure 11 ). The target temperature gradient is set according to the thickness of the superconducting film layer in each coating pass and the change data of the superconducting film layer thickness between adjacent coating passes. The target temperature of the pass with a larger superconducting film layer thickness is set lower, and the target temperature of the pass with a smaller superconducting film layer thickness is set higher. The difference between the target temperature settings between adjacent coating passes needs to be proportional to the change amplitude of the superconducting film layer thickness between adjacent passes. The difference between the target temperature settings between adjacent coating passes with a large thickness change is larger, and vice versa. This complex temperature gradient setting cannot be obtained through a reasonable number of limited attempts. The more coating passes there are, the more difficult it is to obtain. Figure 12 The target temperature gradients set in are: -0°C, -1°C, -3°C, -6°C, -9°C, -11°C, -12°C. After using the dynamic temperature measurement device of the present invention to perform dynamic temperature measurement according to Path 2 above, the difference between the actual temperature gradient and the target temperature gradient is obtained. According to this difference, the temperature is adjusted repeatedly, and finally it can be ensured that the temperatures of each coating pass can be distributed according to the target temperature gradient (such as Figure 12 )

[0049] Fourth temperature control example: In addition to the temperature gradient between each coating pass perpendicular to the running direction of the strip, the temperature gradient along the running direction of the strip in each coating pass is also crucial for the coating quality. When the strip moves at high speed in the corresponding coating pass, it will experience a process of rapid temperature rise, slight temperature rise, slight temperature drop, slight temperature rise, and finally rapid temperature drop. Such a dynamic change process can ensure that the surface temperature of the strip always remains within the range of ±5°C of the optimal coating temperature for this coating pass set based on the thickness of the superconducting film layer. Therefore, in a certain coating pass, different high and low temperature zones need to be set along the moving direction of the strip. The temperature settings of the high and low temperature zones will be based on the optimal coating temperature determined by the thickness of the superconducting film layer in this coating pass. The temperature of the high temperature zone is slightly higher than the optimal temperature, and the temperature of the low temperature zone is slightly lower than the optimal temperature. Generally, these temperature zones are arranged in an alternating pattern of high, low, and high temperature zones, and finally, the target temperature gradient along the moving direction of the strip in this coating pass is set. The specific temperature settings and the layout of each temperature zone depend on the running speed of the strip. After dynamically measuring the temperature according to the above Path 1 using the dynamic temperature measurement device of the present invention, the difference between the actual temperature gradient and the target temperature gradient is obtained. According to this difference, the temperature is adjusted repeatedly, and finally, it can be ensured that the temperatures of each coating pass can be distributed according to the target temperature gradient (such as Figure 13 )

[0050] Based on the dynamic temperature measurement device and temperature control method for the superconducting coating area of the present invention, it is possible to achieve fine control of the superconducting coating temperature through large-range, high-density, and high-consistency dynamic measurement of the temperature gradient, and improve the quality of the superconducting coating. However, for the traditional embedded temperature measurement method, due to problems such as the limited embedding space, temperature drift, and measurement consistency, it is impossible to achieve the above large-range, high-density, and high-consistency temperature gradient measurement, and it is difficult to meet the above high-precision temperature control requirements.

[0051] In the description of this application, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing this application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to this application.

[0052] The specific embodiments of the present invention have been described above. It should be understood that the present invention is not limited to the above specific embodiments, and those skilled in the art can make various changes or modifications within the scope of the claims, which does not affect the essence of the present invention. Without conflict, the embodiments of this application and the features in the embodiments can be combined with each other arbitrarily.

Claims

1. A dynamic temperature measurement device for a superconducting material coating area, characterized in that, Comprising: A fixed component (1), a temperature measuring component (2), and a driving component (3); The fixed component (1) is used to fix the entire device and has a preset limit opening for defining the temperature measuring position; The number of the temperature measuring components (2) is one, including a thermocouple; The driving component (3) is used to drive the temperature measuring component (2) to change its position in a high vacuum environment, contact the object to be measured along the direction perpendicular / parallel to the tape running direction of the superconducting material, and measure the temperature of the object to be measured at the corresponding position in the coating area; The object to be measured includes a superconducting material or a heating substrate in the coating area.

2. The dynamic temperature measuring device for the superconducting material coating area according to claim 1, characterized in that, The fixed component (1) includes: a temperature measuring limit plate (101), a mounting base (102); The temperature measuring limit plate (101) is connected to the mounting base (102), and the limit opening is formed on the temperature measuring limit plate (101) for defining the temperature measuring position.

3. The dynamic temperature measurement device for the superconducting material coating area according to claim 2, wherein The limit opening is composed of a plurality of mutually parallel first limit holes (103); The first limit holes (103) correspond to different temperature measuring positions in the coating area; The interval between the first limit holes (103) meets the temperature measuring point density required for temperature measurement.

4. The dynamic temperature measuring device for the superconducting material coating area according to claim 3, characterized in that, The driving component (3) includes: A vacuum isolation transmission device (305); A lead screw (303), one end of which is rotatably connected to the fixed component (1), and the other end is connected to the vacuum isolation transmission device (305) through a vacuum adapter flange (304); A manual adjustment wheel (306), connected to the vacuum isolation transmission device (305), and driving the lead screw (303) to rotate through the vacuum isolation transmission device (305); A thermocouple front-back adjustment plate (302), having a threaded hole, and being threadedly connected to the lead screw (303) between the fixed component (1) and the vacuum adapter flange (304) through the threaded hole. A second limit hole (307) is formed on the thermocouple front-back adjustment plate (302), and the first limit hole (103) corresponds to the second limit hole (307) one by one; A thermocouple left-right adjustment rod (301), detachably connected to the second limit hole (307) in the vertical direction.

5. The dynamic temperature measurement device for the superconducting material coating area according to claim 1, characterized in that The temperature measuring component (2) includes: A thermocouple fixing device (201), one end of which is connected to the thermocouple left-right adjustment rod (301). A fixing groove is formed on the thermocouple fixing device (201), and the other end is inclined upward / downward at a preset angle to facilitate contact with the object to be measured; A thermocouple (202), connected in the fixing groove, and the temperature measuring head of the thermocouple (202) is exposed outside the fixing groove and can contact the surface of the object to be measured; The thermocouple left-right adjustment rod (301) adjusts the temperature measuring height of the thermocouple (202) by changing the fixing position in the vertical direction on the second limit hole (307) to control the thermocouple (202) to closely contact the object to be measured; The thermocouple (202) is bent at a specific angle, and the generated elastic restoring force drives the thermocouple to closely contact the object to be measured.

6. A dynamic temperature measurement and control method for a superconducting material coating area, characterized in that, Using the dynamic temperature measuring device for the superconducting material coating area according to any one of claims 1-5, performing the steps: Step 1: Fix the dynamic temperature measuring device for the superconducting material coating area at one side of the coating area in a preset spatial position relationship; Step 2: Adjust the installation position of the temperature measuring component in a second limit hole of the driving component, drive the temperature measuring component into the coating area through the driving component, and contact the surface of the object to be measured along the direction perpendicular to / parallel to the tape running direction of the superconducting material to obtain temperature data; Connect the temperature measuring component to the next second limit hole and adjust the installation position, and repeat the detection in this way to obtain temperature data, temperature gradient or temperature distribution data at multiple positions in the coating area; Step 3: Compare the differences between the detected temperature data, temperature gradient or temperature distribution data and the preset target temperature data, target temperature gradient or target temperature distribution data, and adjust the temperature of the coating area based on the differences; 7. The dynamic temperature measurement and control method for the superconducting material coating area according to claim 6, characterized in that, Including temperature control method 1: Contact the surface of the object to be measured along the direction perpendicular to the tape running direction of the superconducting material to obtain the temperature data of all coating passes at the same detection position / the temperature gradient between all coating passes; Set all coating passes to a certain optimal coating temperature uniformly, and control the temperature based on the above Step 3 to obtain a uniform temperature coating area with the same temperature for each coating pass; 8. The dynamic temperature measurement and control method for the superconducting material coating area according to claim 6, characterized in that, Including temperature control method 2: Contact the surface of the object to be measured along the direction perpendicular to the tape running direction of the superconducting material to obtain the temperature data of all coating passes at the same detection position / the temperature gradient between all coating passes; Set a certain linear temperature gradient between each coating pass, and control the temperature based on the above Step 3 to obtain a non-uniform temperature coating area with a linear temperature distribution for each coating pass; 9. The dynamic temperature measurement and control method for the superconducting material coating area according to claim 6, characterized in that, Including temperature control method 3: Contact the surface of the object to be measured along the direction perpendicular to the tape running direction of the superconducting material to obtain the temperature data of all coating passes at the same detection position / the temperature gradient between all coating passes; Set a certain complex non-linear temperature gradient based on the thickness of the superconducting film layer on each coating pass, and control the temperature based on the above Step 3 to obtain a non-uniform temperature coating area with a complex non-linear temperature distribution for each coating pass, and the coating quality is the best; 10. The dynamic temperature measurement and control method for the superconducting material coating area according to claim 6, characterized in that, Including temperature control method 4: Contact the surface of the object to be measured along the direction parallel to the tape running direction of the superconducting material to obtain the temperature gradient along the tape running direction of one coating pass; Around the optimal coating temperature of this pass, set high, low, and high different temperature zones at intervals along the tape running direction and control the temperature based on Step 3. The temperature of the high temperature zone is slightly higher than the optimal coating temperature, and the temperature of the low temperature zone is slightly lower than the optimal coating temperature to achieve stable temperature control during the dynamic high-speed tape running process of the tape;

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