Discharging and cooling device for production of single crystal furnace

Abstract

The invention discloses a single crystal furnace production discharge cooling device which comprises a single crystal furnace, a crucible arranged in the single crystal furnace and a rotating shaft for driving the crucible to rotate, and further comprises a cooling mechanism which is driven by a jacking mechanism so as to be switched inside / outside the single crystal furnace, and the cooling mechanism comprises cooling air pipes which are arranged in a circumferential array relative to a cooling water pipe; the locking mechanism comprises an arc-shaped plate which is rotationally arranged and is used for folding the cooling gas pipe in the locking groove, and when the cooling mechanism moves from the outside to the inside of the single crystal furnace, the cooling gas pipe is unfolded in an umbrella shape so that the gas outlet corresponds to the bottom of the crucible. According to the single crystal furnace production discharge cooling device provided by the invention, the cooling mechanism is pushed into the single crystal furnace through the jacking mechanism, the cooling gas pipe folded in the locking groove is unfolded around the cooling water pipe in an umbrella shape so that the gas outlet corresponds to the bottom of the crucible, and the cooling gas pipe and the cooling water pipe are communicated with the cooling unit, so that segmented rapid uniform cooling is realized; the cooling effect is improved.

Description

Technical Field

[0001] The invention relates to the technical field of single crystal furnace production, and in particular to a single crystal furnace production discharge cooling device. Background Art

[0002] The single crystal furnace is a device used to prepare single crystals. After the single crystal furnace produces the material, the furnace needs to be cooled.

[0003] Publication number CN217438337U, publication date 20220916, discloses a single crystal furnace cooling system, a single crystal furnace cooling system, used to cool the single crystal furnace, a crucible is arranged in the single crystal furnace, an insulation layer is arranged between the crucible and the furnace wall of the single crystal furnace, the furnace bottom of the single crystal furnace is provided with a lifting hole opposite to the insulation layer up and down, the single crystal furnace cooling system includes a first cooling device and a second cooling device, wherein: the first cooling device is arranged below the furnace bottom of the single crystal furnace, the first cooling device is configured to be inserted into the single crystal furnace through the lifting hole, and lift the insulation layer upward to reduce the area of ​​the crucible covered by the insulation layer; the second cooling device is connected to the furnace mouth of the single crystal furnace, and the second cooling device is configured to cool the single crystal furnace through the furnace mouth.

[0004] In the prior art including the above patent, the cooling system pushes the insulation layer in the furnace upwards through the first cooling device to reduce the area of ​​the crucible covered by the insulation layer, thereby improving the cooling effect, and then circulates and cools the gas in the furnace through the second cooling device, and at the same time, by allowing the cooler to enter the furnace, the cooling medium circulates and flows to take away the heat and cool the furnace body. However, after the cooler enters the furnace through the furnace mouth, the furnace body close to the cooler cools faster, while the furnace body away from the cooler cools slower, so that the entire furnace body is cooled unevenly, which not only easily causes the furnace body to deform, but also causes cracks in the single crystal rod due to uneven cooling. Summary of the invention

[0005] The object of the present invention is to provide a single crystal furnace production discharge cooling device for solving the problem of uneven cooling in the prior art.

[0006] In order to achieve the above-mentioned object, the present invention provides the following technical solution: a single crystal furnace production discharge cooling device, comprising a single crystal furnace, a crucible arranged therein, and a rotating shaft for driving the crucible to rotate, and also comprising a cooling mechanism driven by a lifting mechanism to switch between being located inside and outside the single crystal furnace, comprising:

[0007] Regarding cooling water pipes arranged in a circular array of cooling air pipes;

[0008] A locking mechanism, comprising an arc-shaped plate that is rotatably arranged and used to gather the cooling air pipe in the locking groove, wherein when the cooling mechanism moves from the outside of the single crystal furnace to the inside, the cooling air pipe is unfolded in an umbrella shape so that the air outlet corresponds to the bottom of the crucible;

[0009] The stationary ring assembly includes oil seals symmetrically arranged, and the oil seals are clamped around the rotating shaft after the cooling air pipe is umbrellalike folded.

[0010] Preferably, the cooling mechanism further includes a sealing top, and a first airbag is arranged on the outer side of the sealing top. The sealing top is driven to move to compress and deform the first airbag, and the first airbag is in interference fit with a second fixed ring at the bottom of the single crystal furnace.

[0011] Preferably, the stationary ring assembly further includes an oil groove. When the first airbag is pressed, air is inflated into a second airbag in the oil groove, so that the second airbag expands and squeezes the oil in the oil groove to flow along the oil inlet channel to the oil seal.

[0012] Preferably, the stationary ring assembly further includes a stationary ring, which squeezes the oil seal to deliver oil to the gap between the stationary ring and the rotating shaft.

[0013] Preferably, a moving ring is arranged on the rotating shaft. The moving ring includes the following two working positions:

[0014] The first working position: The moving ring is driven to fit with the first side end face of the stationary ring.

[0015] The second working position: The moving ring squeezes the oil seal to deliver oil to the gap between the moving ring and the stationary ring.

[0016] Preferably, the stationary ring assembly further includes a block driven by the cooling water pipe to open and close the oil inlet channel.

[0017] Preferably, the locking mechanism includes an arc-shaped push plate. The arc-shaped push plate includes the following two working positions:

[0018] The first working position: The arc-shaped push plate is driven to push the cooling air pipe out of the locking groove.

[0019] The second working position: When the cooling air pipe is folded, the cooling air pipe drives the arc-shaped push plate to push the block to open the oil inlet channel.

[0020] Preferably, the locking mechanism further includes a rotating ring. The rotating ring is driven to rotate to drive the arc-shaped plate to rotate to block the locking groove to limit the unfolding of the cooling air pipe.

[0021] Preferably, a threaded plate is fixedly arranged on the rotating shaft, threads coupling the threaded plate are arranged in the rotating ring, and the rotating ring is driven to rotate and move along the threaded plate.

[0022] Preferably, a guide cylinder is arranged inside the single crystal furnace, a cooling pipe support is arranged inside the guide cylinder, and the cooling pipe support moves along with the lifting mechanism to be docked with a pipe arranged on the lifting mechanism, so that the cooling pipe support is communicated with the cooling unit.

[0023] In the above technical scheme, a single crystal furnace production discharge cooling device provided by the present invention has the following beneficial effects: in the process of entering the single crystal furnace through the cooling mechanism in the scheme, the arc plate of the locking mechanism is driven to rotate and open the notch of the locking groove, so that the cooling air pipe retracted in the locking groove is expanded in an umbrella shape around the cooling water pipe so that the air outlet corresponds to the bottom of the crucible, and the gas in the single crystal furnace is drawn into the cooling unit for cooling, and then discharged through the cooling air pipe. Since the cooling air pipe is expanded in an umbrella shape, the cooling area is increased, thereby realizing rapid and uniform cooling of the upper and middle parts of the single crystal furnace and the crucible. At the same time, the first water inlet pipe and the first The water outlet pipe is respectively connected with the second water inlet pipe and the second water outlet pipe of the cooling tube rack arranged in the guide tube, so as to be connected with the cooling unit. The cooling water entering the cooling tube rack takes away the heat in the guide tube, so as to evenly cool the crystal rod in the guide tube to avoid cracks in the crystal rod. Through segmented cooling, rapid and even cooling can be achieved to improve the cooling effect. In the scheme, the cooling mechanism is driven out of the single crystal furnace by starting the cylinder, and the sealing top then enters the second fixing ring at the bottom of the single crystal furnace. The first connecting plate arranged at the sliding end of the first airbag contacts the furnace wall at the bottom of the single crystal furnace. When the sealing top moves downward, the first fixing plate will be pushed by the furnace wall at the bottom of the single crystal furnace, thereby The fixed end of the sealing top moves, so that the first airbag is deformed under pressure and has an interference fit with the second fixed ring, thereby achieving a primary seal. As the sealing top completely enters the second fixed ring, the static ring shell on the sealing top docks with the dynamic ring shell fixed on the shaft sleeve of the rotating shaft, thereby completing the assembly of the static ring assembly and the dynamic ring assembly. At this time, the third spring arranged in the spring limiter pushes the ring seat through the dynamic ring push plate, so that the first side end face of the dynamic ring fixed on the dynamic ring seat fits with the first side end face of the static ring, so that the static ring and the dynamic ring form a mechanical seal. When the rotating shaft rotates, the dynamic ring rotates with the rotating shaft, and the friction and pressure between the static ring and the dynamic ring are used to form a A sealing wall is formed to achieve secondary sealing. Part of the gas in the first airbag enters the second airbag through the connecting hose, thereby expanding the second airbag in the oil tank and squeezing the oil in the oil tank to flow to the oil seal through the oil inlet channel. After the dynamic ring assembly and the static ring assembly are assembled, the oil seal is clamped at the fitting place of the static ring and the dynamic ring. The static ring and the dynamic ring squeeze the oil seal, so that the oil seal is pressurized to discharge oil and fill the gap between the static ring and the dynamic ring. When the shaft rotates, a layer of oil seal is formed between the static ring and the dynamic ring, thereby achieving tertiary sealing. At the same time, the wear of the static ring and the dynamic ring is reduced. Through the multi-stage sealing, a good sealing environment is provided for the next preparation work. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] To more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the accompanying drawings required in the embodiments. Obviously, the accompanying drawings in the following description are only some embodiments recorded in the present invention. For those of ordinary skill in the art, other accompanying drawings can also be obtained based on these drawings.

[0025] Figure 1 Schematic diagram of the overall structure provided by the embodiment of the present invention;

[0026] Figure 2 Schematic diagram of the internal structure of the single crystal furnace provided by the embodiment of the present invention;

[0027] Figure 3 Schematic diagram of the internal structure of the bracket provided by the embodiment of the present invention;

[0028] Figure 4 Schematic diagram of the structure of the cooling mechanism provided by the embodiment of the present invention;

[0029] Figure 5 Schematic diagram of the front cross-sectional structure of the cooling mechanism provided by the embodiment of the present invention;

[0030] Figure 6 Schematic diagram of Structure A provided by the embodiment of the present invention;

[0031] Figure 7 Schematic diagram of the cross-sectional structure at the stopper of the cooling mechanism provided by the embodiment of the present invention;

[0032] Figure 8 Schematic diagram of the unfolded structure of the cooling air pipe provided by the embodiment of the present invention;

[0033] Figure 9 Schematic diagram of the structure of the cooling water pipe provided by the embodiment of the present invention;

[0034] Figure 10 Schematic diagram of the overall side cross-sectional structure provided by the embodiment of the present invention;

[0035] Figure 11 Schematic diagram of the overall front cross-sectional structure provided by the embodiment of the present invention;

[0036] Figure 12 Schematic diagram of the structure of the cooling pipe rack provided by the embodiment of the present invention.

[0037] Explanation of reference numerals:

[0038] 1. Single crystal furnace; 2. Bracket; 3. Cooling mechanism; 31. First fixed ring; 32. Fixed rod; 33. Sealing top; 331. First airbag; 332. Locking mechanism; 3321. Rotating ring; 3322. Connecting ring; 3323. Connecting rod; 3324. Arc plate; 3325. Locking groove; 3326. Arc push plate; 3327. First spring; 333. Connecting hose; 334. Stationary ring assembly; 3341. Oil groove; 33411. Oil inlet channel; 3342. Second airbag; 3343. Stationary ring shell; 3344. Stationary ring seat; 3345. Second spring; 3346. Stopper; 33461. Through hole; 33462. Push rod; 3347. Stationary ring; 3348. Oil seal; 3349. Oil seal shell; 34. Cooling air pipe; 35. Fixed plate; 3 6. Cooling water pipe; 37. Limit stop ring; 4. Rotating shaft; 41. Moving ring assembly; 411. Moving ring shell; 412. Spring limiter; 413. Moving ring seat; 414. Third spring; 415. Moving ring push plate; 416. Moving ring; 42. Bushing; 5. Cooling water tank; 51. Air pump; 52. Air inlet pipe; 53. Spiral air pipe; 54. First water pump; 55. Second water pump; 6. Lifting mechanism; 61. Cylinder; 62. Push plate; 63. Push rod; 64. First water inlet pipe; 65. First water outlet pipe; 7. Second fixed ring; 8. Crucible; 9. Guide tube; 91. Cooling pipe rack; 92. Second water inlet pipe; 93. Second water outlet pipe; 10. First insulation tube; 11. Second insulation tube; 12. Third insulation tube; 13. Threaded plate; 14. Annular air pipe; 15. Heater. DETAILED DESCRIPTION

[0039] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings.

[0040] like Figures 1 - 12 As shown, a single crystal furnace production discharge cooling device includes a single crystal furnace 1, a crucible 8 disposed therein, and a rotating shaft 4 for driving the crucible 8 to rotate, and also includes a cooling mechanism 3 driven by a lifting mechanism 6 to switch between being located inside and outside the single crystal furnace 1, which includes:

[0041] Regarding the cooling water pipes 36, the cooling air pipes 34 are arranged in a circumferential array;

[0042] The locking mechanism 332 includes an arc-shaped plate 3324 which is rotatably arranged and used to retract the cooling air pipe 34 into the locking groove 3325. When the cooling mechanism 3 moves from the outside to the inside of the single crystal furnace 1, the cooling air pipe 34 is unfolded in an umbrella shape so that the air outlet corresponds to the bottom of the crucible 8;

[0043] The stationary ring assembly 334 includes symmetrically arranged oil seals 3348 , which are clamped on the rotating shaft 4 after the cooling air pipe 34 is folded into an umbrella shape.

[0044] Specifically, as Figure 2 shown, the single crystal furnace 1 is installed on the bracket 2, and the raw materials in the crucible 8 are heated and melted by the heater 15. The driving shaft 4 is driven to drive the crucible 8 to rotate and cooperate with the rotating seed crystal to form a crystal rod. The first heat preservation cylinder 10, the second heat preservation cylinder 11 and the third heat preservation cylinder 12 are arranged to keep the inside of the single crystal furnace 1 warm. After the crystallization is completed, the cooling mechanism 3 is driven by the driving jacking mechanism 6 to enter the single crystal furnace 1 for cooling. The cooling mechanism 3 is installed on the push plate 62 of the jacking mechanism 6. The cylinder 61 is started to drive the cooling mechanism 3 to enter the single crystal furnace 1 through the push plate 62. At the same time, the push rod 63 arranged on the push plate 62 is used to push the second heat preservation cylinder 11 to move upward and sleeved on the outside of the first heat preservation cylinder 10, so that the air inlet of the air inlet pipe 52 is communicated with the inside of the single crystal furnace 1.

[0045] Further, during the process of the cooling mechanism 3 entering the inside of the single crystal furnace 1, the arc-shaped plate 3324 of the locking mechanism 332 is driven to rotate and open the notch of the locking groove 3325, so that the cooling air pipe 34 retracted in the locking groove 3325 is unfolded in an umbrella shape around the cooling water pipe 36 to make the air outlet correspond to the bottom of the crucible 8. The cooling air pipe 34 is unfolded as Figures 4 to 8 shown in the state. Since the cooling air pipe 34 is unfolded in an umbrella shape, a first fixing ring 31 is arranged on the push plate 62, and a fixing plate 35 for fixing the cooling air pipe 34 is hinged on the first fixing ring 31.

[0046] It should be noted that the driving mode of the arc-shaped plate 3324 in the above embodiment can be gear transmission; or driven by a connecting rod assembly to rotate; or any driving mechanism well-known to those skilled in the art can be used.

[0047] Furthermore, as Figure 3 and Figure 11As shown, the starting air pump 51 sucks the gas in the single crystal furnace 1 into the spiral air pipe 53 through the air inlet pipe 52, and exchanges heat with the cooling water in the cooling water tank 5, thereby cooling the gas in the spiral air pipe 53. Then, it enters the annular air pipe 14 through the first hose, and finally enters the cooling air pipe 34 through the second hose, and blows towards the crucible 8 through the air outlet of the cooling air pipe 34. Since the cooling air pipe 34 is unfolded in an umbrella shape, the cooling area is increased, so as to realize the rapid and uniform cooling of the upper and middle parts of the single crystal furnace 1 and the crucible 8. At the same time, the first water pump 54 is started to pump the cooling water in the cooling water tank 5 into the third hose through the pipe at the water inlet port of the first water pump 54, then into the cooling water pipe 36, and finally circulates back to the cooling water tank 5 through the fourth hose. The heat at the bottom of the single crystal furnace 1 is taken away by the cooling water entering the cooling water pipe 36 through heat exchange, so as to realize the cooling of the bottom of the single crystal furnace 1, and thus realize the segmented, rapid and uniform cooling of the single crystal furnace 1. The cooling water tank 5 is connected to the cooling tower to cool the cooling water in the cooling water tank 5.

[0048] Since both the cooling air pipe 34 and the cooling water pipe 36 are arranged around the rotating shaft 4, in order to prevent the rotating shaft 4 from contacting the hoses connected to the cooling air pipe 34 and the cooling water pipe 36 during rotation, a limiting retaining ring 37 is fixedly arranged inside the first fixing ring 31 to isolate the hoses from the rotating shaft 4. The cooling water pipe 36 is fixed on the limiting retaining ring 37, as Figure 5 shown.

[0049] Furthermore, after cooling is completed, the driving lifting mechanism 6 is driven to drive the cooling mechanism 3 to move out of the single crystal furnace 1. During the process of the cooling mechanism 3 moving out of the single crystal furnace 1 from the inside to the outside, the first fixing ring 31 enters the second fixing ring 7 arranged on the bottom furnace wall of the single crystal furnace 1. As the first fixing ring 31 moves out of the single crystal furnace 1, the second fixing ring 7 will push the fixing plate 35 hinged on the first fixing ring 31 to fold up, so that the cooling water pipe 36 is folded back into the locking groove 3325 again. At the same time, the oil seal part 3348 is clamped on the rotating shaft 4, so that the oil seal part 3348 is pressed to discharge oil to fill the gap between the rotating shaft 4 and the stationary ring assembly 334. When the rotating shaft 4 rotates, an oil seal is formed between the rotating shaft 4 and the stationary ring assembly 334, thus achieving a sealing effect.

[0050] In the above-mentioned technology, during the process of the cooling mechanism 3 entering the interior of the single crystal furnace 1, the arc-shaped plate 3324 of the locking mechanism 332 is driven to rotate and open the notch of the locking groove 3325, so that the cooling gas pipe 34 gathered in the locking groove 3325 unfolds in an umbrella shape around the cooling water pipe 36 to make the air outlet correspond to the bottom of the crucible 8, and the gas in the single crystal furnace 1 is pumped into the cooling unit for cooling, and then discharged through the cooling gas pipe 34. Since the cooling gas pipe 34 unfolds in an umbrella shape, the cooling area is increased, so as to realize rapid and uniform cooling of the upper and middle parts of the single crystal furnace 1 and the crucible 8. At the same time, by circulating the cooling water of the cooling unit into the cooling water pipe 36, uniform cooling of the bottom of the single crystal furnace 1 is realized, and uniform cooling is achieved through segmented cooling, improving the cooling effect. By providing the oil seal member 3348 to fill the gap between the rotating shaft 4 and the stationary ring assembly 334, when the rotating shaft 4 rotates, an oil seal is formed between the rotating shaft 4 and the stationary ring assembly 334, thus playing a sealing role.

[0051] As a further embodiment provided by the present invention, the cooling mechanism 3 further includes a sealing top 33, on the outer side of which there is a first airbag 331. The sealing top 33 is driven to move to compress and deform the first airbag 331, and it is in interference fit with the second fixing ring 7 at the bottom of the single crystal furnace 1.

[0052] Specifically, as Figure 6 shown, the sealing top 33 is fixed by a fixing rod 32 provided on the first fixing ring 31. After the cooling is completed, the cylinder 61 is started to drive the cooling mechanism 3 out of the single crystal furnace 1, and the sealing top 33 then enters the second fixing ring 7 at the bottom of the single crystal furnace 1. The first connecting plate provided at the sliding end of the first airbag 331 contacts the furnace wall at the bottom of the single crystal furnace 1. When the sealing top 33 moves downward, the first fixing plate will be pushed by the furnace wall at the bottom of the single crystal furnace 1, so as to move towards the fixed end of the sealing top 33, so that the first airbag 331 is compressed and deformed and is in interference fit with the second fixing ring 7, thus playing a sealing role.

[0053] To avoid excessive extrusion and damage of the first airbag 331 and air leakage, it is necessary to control the distance between the movable end and the fixed end of the first airbag 331. Therefore, a limiting block is provided on the first connecting plate provided at the sliding end of the first airbag 331, and a limiting groove for the limiting block to slide is opened on the outer surface of the sealing top 33. The distance between the sliding end and the fixed end of the first airbag 331 is controlled by the cooperation of the limiting groove and the limiting block, so as to control the deformation of the first airbag 331 and prevent the first airbag 331 from being excessively deformed.

[0054] As a further embodiment provided by the present invention, the stationary ring assembly 334 further includes an oil groove 3341. When the first airbag 331 is compressed, it inflates the second airbag 3342 in the oil groove 3341, so that the second airbag 3342 expands and squeezes the oil in the oil groove 3341 to flow along the oil inlet channel 33411 to the oil seal member 3348.

[0055] Specifically, after the first airbag 331 is compressed and deformed, part of the gas in the first airbag 331 enters the second airbag 3342 through the connecting hose 333, so that the second airbag 3342 in the oil sump 3341 expands, and the oil in the oil sump 3341 is squeezed through the oil inlet passage 33411 and flows towards the oil seal 3348.

[0056] As a further embodiment provided by the present invention, the stationary ring assembly 334 further includes a stationary ring 3347, which squeezes the oil seal 3348 to supply oil to the gap between the stationary ring 3347 and the rotating shaft 4.

[0057] Specifically, the stationary ring 3347 is fixed on the stationary ring seat 3344. After the first airbag 331 is compressed and deformed, part of the gas in the first airbag 331 enters the second airbag 3342 through the connecting hose 333, so that the second airbag 3342 in the oil sump 3341 expands, and the oil in the oil sump 3341 is squeezed through the oil inlet passage 33411 and flows towards the oil seal 3348. The oil seal 3348 is pressed to supply oil to the gap between the stationary ring 3347 and the rotating shaft 4. When the rotating shaft 4 rotates, an oil seal is formed between the rotating shaft 4 and the stationary ring 3347, so as to achieve a further sealing effect and at the same time play a lubricating role.

[0058] Since the oil seal 3348 is pressed to discharge oil, the oil seal 3348 is an oil-absorbing sponge. In order to make the oil discharge position of the oil seal 3348 located at a preset position, an oil seal housing 3349 is provided outside the oil seal 3348 to fix the oil seal 3348, and an oil outlet is provided on the oil seal housing 3349 so that the oil seal 3348 protrudes from the oil outlet. The stationary ring 3347 squeezes the oil seal 3348 protruding at the oil outlet, so that the oil fills the gap between the stationary ring 3347 and the rotating shaft 4.

[0059] As a further embodiment provided by the present invention, a moving ring 416 is provided on the rotating shaft 4, and the moving ring 416 includes the following two working positions:

[0060] The first working position: the moving ring 416 is driven to fit with the first side end face of the stationary ring 3347;

[0061] The second working position: the moving ring 416 squeezes the oil seal 3348 to supply oil to the gap between the moving ring 416 and the stationary ring 3347.

[0062] Specifically, as Figure 6As shown, after cooling is completed, the starting cylinder 61 drives the cooling mechanism 3 to move out of the single crystal furnace 1. The sealing top 33 then enters the second fixing ring 7 at the bottom of the single crystal furnace 1. The first connecting plate provided at the sliding end of the first airbag 331 contacts the furnace wall at the bottom of the single crystal furnace 1. When the sealing top 33 moves downward, the first fixing plate will be pushed by the furnace wall at the bottom of the single crystal furnace 1, and thus move towards the fixed end of the sealing top 33, causing the first airbag 331 to be compressed and deformed and in interference fit with the second fixing ring 7, thereby achieving primary sealing. When the sealing top 33 completely enters the second fixing ring 7 (as Figure 4 shown), the static ring housing 3343 on the sealing top 33 is docked with the dynamic ring housing 411 fixed on the shaft sleeve 42 of the rotating shaft 4, thus completing the assembly of the static ring assembly 334 and the dynamic ring assembly 41. At this time, the third spring 414 provided in the spring limiting member 412 pushes the dynamic ring seat 413 through the dynamic ring push plate 415, so that the first side end face of the dynamic ring 416 fixed on the dynamic ring seat 413 fits with the first side end face of the static ring 3347 (taking Figure 6 as a reference, the first side end face of the dynamic ring 416 is located on the upper side of the dynamic ring 416, and the first side end face of the static ring 3347 is located on the lower side of the static ring 3347), so that the static ring 3347 and the dynamic ring 416 form a mechanical seal. When the rotating shaft 4 rotates, the dynamic ring 416 rotates together with the rotating shaft 4, and a sealing wall is formed by the frictional force and pressure between the static ring 3347 and the dynamic ring 416, thereby achieving secondary sealing. Part of the gas in the first airbag 331 enters the second airbag 3342 through the connecting hose 333, so that the second airbag 3342 in the oil groove 3341 expands, and the oil in the oil groove 3341 is squeezed through the oil inlet channel 33411 to flow towards the oil seal member 3348. After the dynamic ring assembly 41 and the static ring assembly 334 are assembled, the oil seal member 3348 is clamped around the fitting position of the static ring 3347 and the dynamic ring 416. The static ring 3347 and the dynamic ring 416 squeeze the oil seal member 3348, so that the oil seal member 3348 is pressed to discharge oil, filling the gap between the static ring 3347 and the dynamic ring 416. When the rotating shaft 4 rotates, an oil seal is formed between the static ring 3347 and the dynamic ring 416, thereby achieving tertiary sealing, and at the same time, reducing the wear between the static ring 3347 and the dynamic ring 416.

[0063] As a further embodiment provided by the present invention, the static ring assembly 334 further includes a block 3346 driven by the cooling water pipe 36 to open and close the oil inlet channel 33411.

[0064] Specifically, after cooling is completed, the driving lifting mechanism 6 drives the cooling mechanism 3 to move out of the single crystal furnace 1. During the process of the cooling mechanism 3 moving out of the single crystal furnace 1 from the inside to the outside, the cooling water pipe 36 is re-closed and retracted into the locking groove 3325. The cooling water pipe 36 corresponding to the position of the block 3346 passes through the first side surface fixed on the block 3346 (taking Figure 6For reference, the push rod 33462 on the first side surface (where the first side surface is on the side of the stopper 3346 away from the stationary ring 3347) pushes the stopper 3346 towards the stationary ring 3347, and compresses the second spring 3345 between the stopper 3346 and the stationary ring 3347, so that the through hole 33461 formed in the stopper 3346 corresponds to the oil inlet passage 33411, thereby opening the oil inlet passage 33411. When the cooling mechanism 3 enters the single crystal furnace 1, the arc-shaped plate 3324 of the locking mechanism 332 is driven to rotate and open the notch of the locking groove 3325, so that the cooling air pipe 34 gathered in the locking groove 3325 unfolds in an umbrella shape around the cooling water pipe 36. At this time, the second spring 3345 resumes its elastic deformation, pushing the stopper 3346 to move in a direction away from the stationary ring 3347, so that the through hole 33461 is misaligned with the oil inlet passage 33411, thereby blocking the oil inlet passage 33411.

[0065] As a further embodiment provided by the present invention, the locking mechanism 332 includes an arc-shaped push plate 3326, and the arc-shaped push plate 3326 includes the following two working positions:

[0066] The first working position: The arc-shaped push plate 3326 is driven to push the cooling air pipe 34 out of the locking groove 3325;

[0067] The second working position: When the cooling air pipe 34 is gathered, the cooling air pipe 34 drives the arc-shaped push plate 3326 to push the stopper 3346 to open the oil inlet passage 33411.

[0068] Specifically, when the cooling mechanism 3 enters the single crystal furnace 1, the arc-shaped plate 3324 of the locking mechanism 332 is driven to rotate and open the notch of the locking groove 3325. The arc-shaped push plate 3326 located in the locking groove 3325 is subjected to the thrust of the first spring 3327, so as to push the cooling air pipe 34 out of the locking groove 3325, so that the cooling air pipe 34 gathered in the locking groove 3325 unfolds in an umbrella shape around the cooling water pipe 36. It should be noted that when the cooling air pipe 34 is gathered in the locking groove 3325, the first spring 3327 is in a contracted state.

[0069] When the cooling air pipe 34 is gathered, the arc-shaped push plate 3326 corresponding to the position of the stopper 3346 pushes the stopper 3346 towards the stationary ring 3347 through the push rod 33462 fixed on the first side surface of the stopper 3346, and compresses the second spring 3345 between the stopper 3346 and the stationary ring 3347, so that the through hole 33461 formed in the stopper 3346 corresponds to the oil inlet passage 33411, thereby opening the oil inlet passage 33411, as Figure 6 and Figure 7 shown. With the unfolding and gathering of the cooling air pipe 34, the stopper 3346 can realize the opening and closing of the oil inlet passage 33411 without the need for an additional driving source, simplifying the structure and saving the equipment cost.

[0070] As a further embodiment provided by the present invention, the locking mechanism 332 further includes a rotating ring 3321. The rotating ring 3321 is driven to rotate to drive the arc-shaped plate 3324 to rotate so as to block the locking groove 3325, thereby restricting the expansion of the cooling air pipe 34.

[0071] Specifically, when the cooling mechanism 3 enters the single crystal furnace 1, the rotating ring 3321 is driven to rotate, thereby driving the connecting ring 3322 to rotate, and then driving the arc-shaped plate 3324 to rotate through the connecting rod 3323, thereby opening the notch of the locking groove 3325. The arc-shaped push plate 3326 located in the locking groove 3325 is subjected to the thrust of the first spring 3327, thereby pushing the cooling air pipe 34 out of the locking groove 3325, so that the cooling air pipe 34 retracted in the locking groove 3325 unfolds in an umbrella shape around the cooling water pipe 36.

[0072] Further, after the cooling is completed, the driving lifting mechanism 6 drives the cooling mechanism 3 to move out of the single crystal furnace 1. During the process of the cooling mechanism 3 moving out of the single crystal furnace 1 from the inside to the outside, the first fixing ring 31 enters the second fixing ring 7 provided on the bottom furnace wall of the single crystal furnace 1. As the first fixing ring 31 moves, the second fixing ring 7 will push the fixing plate 35 hinged on the first fixing ring 31 to fold up, so that the cooling water pipe 36 retracts back into the locking groove 3325 again. The rotating ring 3321 is driven to rotate in the reverse direction again, thereby driving the connecting ring 3322 to rotate, and then driving the arc-shaped plate 3324 to rotate through the connecting rod 3323, thereby blocking the locking groove 3325, and thus limiting the cooling air pipe 34 retracted in the locking groove 3325.

[0073] As a further embodiment provided by the present invention, a threaded plate 13 is fixedly arranged on the rotating shaft 4, and threads coupling those on the threaded plate 13 are provided in the rotating ring 3321. The rotating ring 3321 is driven to rotate and move along the threaded plate 13.

[0074] Specifically, when the cooling mechanism 3 enters the single crystal furnace 1, the rotating ring 3321 moves accordingly and is coupled with the threaded plate 13 fixedly arranged on the rotating shaft 4, so that the rotating ring 3321 rotates and moves along the threaded plate 13. The rotating ring 3321 rotates to drive the connecting ring 3322 to rotate, and then drives the arc-shaped plate 3324 to rotate through the connecting rod 3323, thereby opening the notch of the locking groove 3325.

[0075] Further, after the cooling is completed, the driving lifting mechanism 6 drives the cooling mechanism 3 to move out of the single crystal furnace 1. The rotating ring 3321 moves accordingly and is coupled with the threaded plate 13 again, so that the rotating ring 3321 rotates in the reverse direction, thereby driving the connecting ring 3322 to rotate in the reverse direction, and then driving the arc-shaped plate 3324 to rotate in the reverse direction through the connecting rod 3323, thereby blocking the locking groove 3325, and thus limiting the cooling air pipe 34 retracted in the locking groove 3325.

[0076] Since it is necessary to first gather the cooling gas pipe 34 and then limit the cooling gas pipe 34, the inner wall part of the inner ring of the rotating ring 3321 is provided with threads, and part of it is set as a smooth surface and does not contact the thread plate 13, as Figure 6 shown.

[0077] When the cooling mechanism 3 enters the single crystal furnace 1, the threads on the inner wall of the inner ring of the rotating ring 3321 are first coupled with the thread plate 13, so that the rotating ring 3321 rotates and moves along the thread plate 13. The rotating ring 3321 rotates to drive the connecting ring 3322 to rotate synchronously, and then drives the arc plate 3324 to rotate through the connecting rod 3323, so as to open the notch of the locking groove 3325. The rotating ring 3321 continues to move with the cooling mechanism 3, so that the thread plate 13 disengages from the threads on the inner wall of the inner ring of the rotating ring 3321. During the process that the smooth inner wall of the rotating ring 3321 continues to move along the thread plate 13, the fixing plate 35 on the first fixing ring 31 moves synchronously with the rotating ring 3321 and gradually disengages from the limit of the second fixing ring 7. When the fixing plate 35 completely disengages from the limit of the second fixing ring 7, the arc-shaped push plate 3326 in the locking groove 3325 is pushed by the first spring 3327, so as to push the cooling gas pipe 34 out of the locking groove 3325, so that the cooling gas pipe 34 gathered in the locking groove 3325 unfolds in an umbrella shape around the cooling water pipe 36.

[0078] When the cooling is completed and the driving lifting mechanism 6 drives the cooling mechanism 3 to move out of the single crystal furnace 1, the rotating ring 3321 moves with the cooling mechanism 3. The smooth inner wall of the rotating ring 3321 first moves along the thread plate 13. During the movement, the fixing plate 35 on the first fixing ring 31 moves synchronously with the rotating ring 3321 and gradually enters the second fixing ring 7. The second fixing ring 7 will push the fixing plate 35 hinged on the first fixing ring 31 to gradually gather, so that the cooling water pipe 36 gradually gathers back into the locking groove 3325. The rotating ring 3321 continues to move with the cooling mechanism 3, so that the threads on the inner wall of the inner ring of the rotating ring 3321 are coupled with the thread plate 13, so that the rotating ring 3321 rotates reversely and moves along the thread plate 13. The rotating ring 3321 rotates reversely to drive the connecting ring 3322 to rotate synchronously in the reverse direction, and then drives the arc plate 3324 to rotate reversely through the connecting rod 3323, so as to close the notch of the locking groove 3325, so as to limit the cooling gas pipe 34 gathered in the locking groove 3325.

[0079] As a further embodiment provided by the present invention, a guide cylinder 9 is arranged inside the single crystal furnace 1, and a cooling pipe rack 91 is arranged inside the guide cylinder 9. The cooling pipe rack 91 moves with the lifting mechanism 6 and is docked with the pipeline arranged on the lifting mechanism 6, so that the cooling pipe rack 91 is communicated with the cooling unit.

[0080] Specifically, asFigure 10 and Figure 12 As shown, the cooling mechanism 3 is driven by the driving and lifting mechanism 6 to enter the single crystal furnace 1 for cooling. The cooling mechanism 3 is installed on the push plate 62 of the lifting mechanism 6. The starting cylinder 61 drives the cooling mechanism 3 into the single crystal furnace 1 through the push plate 62. At the same time, the push rod 63 arranged on the push plate 62 pushes the second heat preservation cylinder 11 upward and makes it sleeved outside the first heat preservation cylinder 10, so that the air inlet of the air inlet pipe 52 is communicated with the inside of the single crystal furnace 1. At the same time, the first water inlet pipe 64 and the first water outlet pipe 65 arranged on the push plate 62 are respectively butted with the second water inlet pipe 92 and the second water outlet pipe 93 of the cooling pipe rack 91 arranged in the guide cylinder 9. The second water pump 55 is started, and the cooling water in the cooling water tank 5 is pumped into the first water inlet pipe 64 through the fifth hose, then enters the cooling pipe rack 91 through the second water inlet pipe 92, and finally circulates into the cooling water tank 5 through the second water outlet pipe 93, the first water outlet pipe 65 and the sixth hose in sequence. The heat in the guide cylinder 9 is taken away by the cooling water entering the cooling pipe rack 91, so as to uniformly cool the crystal rod in the guide cylinder 9.

[0081] After the cooling is completed, as the cooling mechanism 3 moves out of the single crystal furnace 1, the first water inlet pipe 64 and the first water outlet pipe 65 on the push plate 62 will also be disconnected from the second water inlet pipe 92 and the second water outlet pipe 93 of the cooling pipe rack 91 arranged in the guide cylinder 9. Therefore, a valve is arranged on the first water inlet pipe 64. Before disconnection, first close the valve, then make the second water pump 55 run for a short time to pump the cooling water in the cooling pipe rack 91 back to the cooling water tank 5, and then make the cooling mechanism 3 move out of the single crystal furnace 1.

[0082] Working principle: The raw materials in the crucible 8 are heated and melted by the heater 15. The driving shaft 4 drives the crucible 8 to rotate and cooperate with the rotating seed crystal to form a crystal bar. The first heat preservation cylinder 10, the second heat preservation cylinder 11 and the third heat preservation cylinder 12 are set to keep the single crystal furnace 1 warm. After crystallization, the driving lifting mechanism 6 drives the cooling mechanism 3 into the single crystal furnace 1 for cooling. The cooling mechanism 3 is installed on the push plate 62 of the lifting mechanism 6. The air cylinder 61 is started to drive the cooling mechanism 3 into the single crystal furnace 1 through the push plate 62. At the same time, the push rod 63 arranged on the push plate 62 pushes the second heat preservation cylinder 11 to move upward and sleeve it outside the first heat preservation cylinder 10, so that the air inlet of the air inlet pipe 52 is communicated with the inside of the single crystal furnace 1. During the process of the cooling mechanism 3 entering the inside of the single crystal furnace 1, the thread on the inner ring wall of the rotating ring 3321 is first coupled with the thread plate 13, so that the rotating ring 3321 rotates and moves along the thread plate 13. The rotation of the rotating ring 3321 drives the connecting ring 3322 to rotate synchronously, so as to drive the arc plate 3324 to rotate through the connecting rod 3323, so as to open the notch of the locking groove 3325. The rotating ring 3321 continues to move with the cooling mechanism 3, so that the thread plate 13 disengages from the thread on the inner ring wall of the rotating ring 3321. During the process of the smooth inner wall of the rotating ring 3321 continuing to move along the thread plate 13, the fixing plate 35 on the first fixing ring 31 moves synchronously with the rotating ring 3321 and gradually disengages from the limit of the second fixing ring 7. When the fixing plate 35 completely disengages from the limit of the second fixing ring 7, the arc-shaped push plate 3326 in the locking groove 3325 is pushed by the first spring 3327, so as to push the cooling air pipe 34 out of the locking groove 3325, so that the cooling air pipe 34 retracted in the locking groove 3325 unfolds in an umbrella shape around the cooling water pipe 36. The air pump 51 is started to pump the gas in the single crystal furnace 1 into the spiral air pipe 53 through the air inlet pipe 52, and exchange heat with the cooling water in the cooling water tank 5, so as to cool the gas in the spiral air pipe 53, and then enter the annular air pipe 14 through the first hose, and finally enter the cooling air pipe 34 through the second hose, and blow to the crucible 8 through the air outlet of the cooling air pipe 34. Since the cooling air pipe 34 unfolds in an umbrella shape, the cooling area is increased, so as to realize rapid and uniform cooling of the upper and middle parts of the single crystal furnace 1 and the crucible 8. At the same time, the first water pump 54 is started to pump the cooling water in the cooling water tank 5 into the third hose through the pipeline at the water inlet port of the first water pump 54, then into the cooling water pipe 36, and finally circulate back to the cooling water tank 5 through the fourth hose. The heat at the bottom of the single crystal furnace 1 is taken away by the cooling water entering the cooling water pipe 36 through heat exchange with the bottom of the single crystal furnace 1, so as to realize the cooling of the bottom of the single crystal furnace 1, so as to realize the segmented rapid and uniform cooling of the single crystal furnace 1. The cooling water tank 5 is communicated with the cooling tower to cool the cooling water in the cooling water tank 5. At the same time,The first water inlet pipe 64 and the first water outlet pipe 65 arranged on the jacking plate 62 are respectively butted with the second water inlet pipe 92 and the second water outlet pipe 93 of the cooling pipe rack 91 arranged in the draft tube 9. Start the second water pump 55, draw the cooling water in the cooling water tank 5 into the first water inlet pipe 64 through the fifth hose, then enter the cooling pipe rack 91 through the second water inlet pipe 92, and finally circulate into the cooling water tank 5 through the second water outlet pipe 93, the first water outlet pipe 65 and the sixth hose in sequence. The heat in the draft tube 9 is taken away by the cooling water entering the cooling pipe rack 91, so as to uniformly cool the crystal bar in the draft tube 9. After the cooling is completed, drive the lifting mechanism 6 to drive the cooling mechanism 3 to move out of the single crystal furnace 1. The smooth inner wall of the rotating ring 3321 moves along the threaded plate 13 as the cooling mechanism 3 moves. During the movement, the fixing plate 35 located on the first fixing ring 31 moves synchronously with the rotating ring 3321 and gradually enters the second fixing ring 7. The second fixing ring 7 will push the fixing plate 35 hinged on the first fixing ring 31 to gradually close, so that the cooling water pipe 36 gradually closes back into the locking groove 3325. The rotating ring 3321 continues to move with the cooling mechanism 3, so that the thread on the inner ring wall of the rotating ring 3321 is coupled with the threaded plate 13, so that the rotating ring 3321 rotates reversely and moves along the threaded plate 13. The reverse rotation of the rotating ring 3321 drives the connecting ring 3322 to rotate reversely synchronously, so as to drive the arc plate 3324 to rotate reversely through the connecting rod 3323, so as to close the notch of the locking groove 3325, so as to limit the cooling air pipe 34 retracted into the locking groove 3325. When the cooling air pipe 34 retracts, the arc-shaped push plate 3326 corresponding to the position of the block 3346 pushes the block 3346 to move towards the static ring 3347 through the push rod 33462 fixed on the first side surface of the block 3346, and squeezes the second spring 3345 between the block 3346 and the static ring 3347, so that the through hole 33461 opened on the block 3346 corresponds to the oil inlet passage 33411, so as to open the oil inlet passage 33411, and the sealing top 33 also enters the second fixing ring 7 at the bottom of the single crystal furnace 1 accordingly. The first connecting plate arranged at the sliding end of the first air bag 331 contacts the furnace wall at the bottom of the single crystal furnace 1. When the sealing top 33 moves downward, the first fixing plate will be pushed by the furnace wall at the bottom of the single crystal furnace 1, so as to move towards the fixed end of the sealing top 33, so that the first air bag 331 is compressed and deformed and has an interference fit with the second fixing ring 7, so as to achieve primary sealing. When the sealing top 33 completely enters the second fixing ring 7 (as shown in, Figure 4 shown), the static ring shell 3343 on the sealing top 33 is butted with the moving ring shell 411 fixed on the shaft sleeve 42 of the rotating shaft 4, so as to complete the assembly of the static ring assembly 334 and the moving ring assembly 41. At this time, the third spring 414 arranged in the spring limiting member 412 pushes the moving ring seat 413 through the moving ring push plate 415, so that the first side end face of the moving ring 416 fixed on the moving ring seat 413 fits with the first side end face of the static ring 3347 (in order toFigure 6 For reference, the first side end face of the rotating ring 416 is located on the upper side of the rotating ring 416, and the first side end face of the stationary ring 3347 is located on the lower side of the stationary ring 3347), so that the stationary ring 3347 and the rotating ring 416 form a mechanical seal. When the rotating shaft 4 rotates, the rotating ring 416 rotates together with the rotating shaft 4. A sealing wall is formed by using the frictional force and pressure between the stationary ring 3347 and the rotating ring 416, thereby achieving a secondary seal. Part of the gas in the first airbag 331 enters the second airbag 3342 through the connecting hose 333, so that the second airbag 3342 in the oil sump 3341 expands, and the oil in the oil sump 3341 is squeezed through the oil inlet channel 33411 and flows towards the oil seal 3348. After the rotating ring assembly 41 and the stationary ring assembly 334 are assembled, the oil seal 3348 is clamped at the joint of the stationary ring 3347 and the rotating ring 416. The stationary ring 3347 and the rotating ring 416 press the oil seal 3348, so that the oil seal 3348 is pressured to discharge oil to fill the gap between the stationary ring 3347 and the rotating ring 416. When the rotating shaft 4 rotates, an oil seal is formed between the stationary ring 3347 and the rotating ring 416, thereby achieving a tertiary seal. At the same time, the wear between the stationary ring 3347 and the rotating ring 416 is reduced.

[0083] Only some exemplary embodiments of the present invention have been described by way of illustration above. Undoubtedly, for those of ordinary skill in the art, the described embodiments can be modified in various different ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A single crystal furnace production discharge cooling device, comprising a single crystal furnace (1), a crucible (8) arranged therein, and a rotating shaft (4) for driving the crucible (8) to rotate, characterized in that: It also includes a cooling mechanism (3) driven by the lifting mechanism (6) to switch between being located inside and outside the single crystal furnace (1), which includes: The cooling air pipes (34) are arranged in a circumferential array about the cooling water pipes (36); A locking mechanism (332), comprising an arc-shaped plate (3324) which is rotatably arranged and used to retract the cooling air pipe (34) into the locking groove (3325); when the cooling mechanism (3) moves from the outside to the inside of the single crystal furnace (1), the cooling air pipe (34) is unfolded in an umbrella shape so that the air outlet corresponds to the bottom of the crucible (8); The stationary ring assembly (334) comprises a symmetrically arranged oil seal (3348), wherein the oil seal (3348) is clamped on the rotating shaft (4) after the cooling air pipe (34) is folded into an umbrella shape.

2. A single crystal furnace production discharge cooling device according to claim 1, characterized in that: The cooling mechanism (3) further comprises a sealing top (33), the outer side of which is provided with a first air bag (331), the sealing top (33) is driven to move so that the first air bag (331) is compressed and deformed, and is interference-fitted with a second fixing ring (7) at the bottom of the single crystal furnace (1).

3. A single crystal furnace production discharge cooling device according to claim 2, characterized in that: The stationary ring assembly (334) also includes an oil groove (3341), and the first airbag (331) is pressurized to inflate the second airbag (3342) in the oil groove (3341), so that the second airbag (3342) expands and squeezes the oil in the oil groove (3341) to flow along the oil inlet channel (33411) toward the oil seal (3348).

4. A single crystal furnace production discharge cooling device according to claim 3, characterized in that: The stationary ring assembly (334) further comprises a stationary ring (3347), which squeezes an oil seal (3348) to deliver oil to a gap between the stationary ring (3347) and the rotating shaft (4).

5. The single crystal furnace production discharging cooling device according to claim 3 is characterized in that: The rotating shaft (4) is provided with a moving ring (416), wherein the moving ring (416) comprises the following two stations: First station: the moving ring (416) is driven to fit with the first side end surface of the stationary ring (3347); Second working station: The moving ring (416) squeezes the oil seal (3348) to deliver oil to the gap between the moving ring (416) and the stationary ring (3347).

6. The single crystal furnace production discharge cooling device according to claim 3, characterized in that: The stationary ring assembly (334) also includes a stopper (3346) driven by the cooling water pipe (36) to open and close the oil inlet channel (33411).

7. A single crystal furnace production discharge cooling device according to claim 6, characterized in that: The locking mechanism (332) comprises an arc-shaped push plate (3326), wherein the arc-shaped push plate (3326) comprises the following two stations: First station: the arc-shaped push plate (3326) is driven to push the cooling air pipe (34) out of the locking groove (3325); Second working station: when the cooling air pipe (34) is retracted, the cooling air pipe (34) drives the arc-shaped push plate (3326) to push the stopper (3346) to open the oil inlet channel (33411).

8. The single crystal furnace production discharging cooling device according to claim 1, characterized in that: The locking mechanism (332) further comprises a rotating ring (3321), wherein the rotating ring (3321) is driven to rotate and drives the arc plate (3324) to rotate to block the locking groove (3325) to limit the expansion of the cooling air pipe (34).

9. A single crystal furnace production discharge cooling device according to claim 8, characterized in that: A threaded plate (13) is fixedly arranged on the rotating shaft (4), and a thread coupled to the threaded plate (13) is provided in the rotating ring (3321), and the rotating ring (3321) is driven to rotate and move along the threaded plate (13).

10. The single crystal furnace production discharge cooling device according to claim 1, characterized in that: A guide tube (9) is arranged inside the single crystal furnace (1), and a cooling pipe rack (91) is arranged inside the guide tube (9). The cooling pipe rack (91) moves with the lifting mechanism (6) and docks with a pipeline arranged on the lifting mechanism (6), so that the cooling pipe rack (91) is connected to the cooling unit.

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