Heat insulation device and silicon rod growth system

Abstract

The invention provides a heat insulation device and a silicon rod growth system, and the heat insulation device is applied to a growth furnace and comprises a heat insulation assembly arranged in the growth furnace; the position adjusting assembly is connected with the heat insulation assembly and used for adjusting the position of the heat insulation assembly on the first plane; the lifting assembly is connected with the heat insulation assembly and used for driving the heat insulation assembly to ascend and descend in the first direction, and the first direction intersects with the first plane. Through cooperation of the heat insulation assembly, the position adjusting assembly and the lifting assembly, the heat insulation function of the heat insulation assembly can be started in the melting stage of preparing the silicon rod, so that outward heat radiation of heat in the growth furnace is blocked through the heat insulation assembly, and the heat field heat preservation performance in the growth furnace is improved to reduce heat loss; the material melting efficiency in the material melting stage is further improved; in the non-melting stage of preparing the silicon rod, the heat insulation function of the heat insulation device can be closed, so that the normal growth of the silicon single crystal rod is not influenced, and the service life of the whole heat insulation device is prolonged.

Description

Technical Field

[0001] This application belongs to the technical field of monocrystalline silicon production and manufacturing, and in particular relates to a heat insulation device and a silicon rod growth system. Background Art

[0002] The most common method for preparing monocrystalline silicon rods in the solar photovoltaic industry is the Czochralski method. Solid high-purity polysilicon material is placed in a quartz crucible in a single crystal growth furnace, melted to a liquid state by a heater (i.e., the melting stage), then a seed crystal is used to initiate crystal growth, and then it is slowly pulled upward and crystallized to finally grow into a monocrystalline silicon rod. Among them, the melting stage is the first stage of the Czochralski method, and the working hours of the melting stage account for about 11%.

[0003] In the prior art, since the upper opening and the lower opening of the cooling member in the single crystal growth furnace are open structures, during the melting stage, part of the heat generated by the heater heating the melt is conducted to the furnace cover of the growth furnace through the lower opening and the upper opening of the cooling member. It is found that after the thermal field in the growth furnace reaches a steady state, the cooling member and the furnace cover take away more than 60% of the heat, resulting in a large amount of heat waste and thus affecting the melting efficiency. Summary of the Invention

[0004] This application provides a heat insulation device and a silicon rod growth system to solve the technical problem of low melting efficiency of the existing single crystal growth furnace.

[0005] According to one aspect of this application, a heat insulation device is provided, which includes: a heat insulation component for being arranged in the growth furnace; a position adjustment component connected to the heat insulation component for driving the heat insulation component to move to adjust the position of the heat insulation component on a first plane; and a lifting component connected to the heat insulation component for driving the heat insulation component to move up and down along a first direction, where the first direction intersects with the first plane.

[0006] In an optional solution of this application, the lifting component includes: a lifting rope connected to the heat insulation component; and a lifting drive mechanism arranged outside the growth furnace and connected to the lifting rope for taking in and paying out the lifting rope to drive the heat insulation component to move up and down along the first direction.

[0007] In an optional solution of this application, the lifting drive mechanism includes: a wire winding and unwinding wheel connected to the lifting rope; and a drive unit connected to the wire winding and unwinding wheel, and the drive unit is configured to drive the wire winding and unwinding wheel to rotate to take in and pay out the lifting rope.

[0008] In an alternative embodiment of the present application, the position adjustment assembly includes a rotating connection member and a connecting arm. The rotating connection member is disposed through the growth furnace and connected to the connecting arm. Among them, the connecting arm supports the lifting rope, and the rotating connection member is configured to drive the connecting arm to rotate under the action of force, so as to adjust the position of the heat insulation assembly on the first plane.

[0009] In an alternative embodiment of the present application, the position adjustment assembly further includes a rotating seal. The rotating seal is connected to the end of the rotating connection member away from the connecting arm outside the growth furnace. Among them, the rotating seal is configured to drive the rotating connection member and the connecting arm to rotate under the action of force and be hermetically connected to the growth furnace during the rotation process.

[0010] In an alternative embodiment of the present application, the position adjustment assembly further includes a box body. The box body is connected to the end of the rotating seal away from the rotating connection member outside the growth furnace. Among them, the box body houses at least a part of the lifting drive mechanism and is configured to drive the rotating seal, the rotating connection member and the connecting arm to rotate under the action of force.

[0011] In an alternative embodiment of the present application, the position adjustment assembly includes a telescopic drive mechanism and a connecting arm. The telescopic drive mechanism is located outside the growth furnace and connected to the connecting arm. Among them, the connecting arm supports the lifting rope, and the telescopic drive mechanism is configured to drive the connecting arm to move telescopically along its extending direction, so as to adjust the position of the heat insulation assembly on the first plane.

[0012] In an alternative embodiment of the present application, the position adjustment assembly further includes a telescopic seal. The telescopic seal is outside the growth furnace and connected to the growth furnace and the telescopic drive mechanism at both ends respectively. Among them, the telescopic seal is configured to be compressed or stretched under the action of the telescopic drive mechanism.

[0013] In an alternative embodiment of the present application, the telescopic seal is a bellows.

[0014] In an alternative embodiment of the present application, the position adjustment assembly further includes a box body. The box body is connected to the telescopic drive mechanism outside the growth furnace, and the box body houses at least a part of the lifting drive mechanism.

[0015] In an alternative embodiment of the present application, the heat insulation assembly includes: a heat insulation felt, connected to the lifting assembly.

[0016] In an alternative embodiment of the present application, the heat insulation assembly further includes: a heat insulation cover; a heat insulation seat disposed on the heat insulation cover and enclosing a hollow structure, and the heat insulation felt is disposed inside the heat insulation seat and connected to the heat insulation cover; and a fixed shaft, one end of which is connected to the heat insulation cover, and the other end is connected to the position adjustment assembly and the lifting assembly.

[0017] In an alternative embodiment of the present application, the material of the heat insulation seat includes quartz and / or molybdenum; and / or, the material of the heat insulation felt includes soft felt; and / or, the material of the heat insulation cover includes quartz and / or molybdenum; and / or, the material of the fixed shaft includes molybdenum.

[0018] According to another aspect of the present application, there is provided a silicon rod growth system, including: a growth furnace including a growth channel for a silicon rod to pass through; and the heat insulation device described above, wherein the heat insulation assembly is disposed inside the growth furnace for blocking or opening the growth channel.

[0019] In an alternative embodiment of the present application, the growth furnace includes a furnace body and a furnace cover for blocking or opening the furnace body. The heat insulation assembly is disposed inside the growth furnace, and the position adjustment assembly and the lifting assembly are disposed on the furnace cover.

[0020] In an alternative embodiment of the present application, a cooling member is disposed inside the growth furnace, and the cooling member has an upper opening and a lower opening disposed opposite to each other. Wherein, the position adjustment assembly can adjust the position of the heat insulation assembly relative to the upper opening between the upper opening and the furnace cover; the lifting assembly drives the heat insulation assembly to move up and down along the first direction so that the heat insulation assembly can block or open the lower opening.

[0021] In summary, the heat insulation device and the silicon rod growth system provided by the present application have at least the following beneficial effects:

[0022] In the present application, through the cooperation of the heat insulation assembly, the position adjustment assembly, and the lifting assembly of the heat insulation device, during the melting stage of preparing a single crystal silicon rod, the heat insulation function of the heat insulation assembly can be enabled to block the heat radiation from the inside of the growth furnace to the outside through the heat insulation assembly, thereby improving the heat field insulation performance inside the growth furnace to reduce heat loss, and further improving the melting efficiency during the melting stage. And, during the non-melting stage of preparing a single crystal silicon rod, through the cooperation of the heat insulation assembly, the position adjustment assembly, and the lifting assembly of the heat insulation device, the heat insulation function of the heat insulation device can be turned off, so as not to affect the normal growth process of the single crystal silicon rod, which is beneficial to improving the service life of the entire heat insulation device. In addition, the heat insulation assembly of the present application can be rotated and adjusted into the space between the furnace cover and the heat shield, without removing the single crystal furnace after melting is completed, reducing the pulling crystal working hours and improving the pulling crystal efficiency. Description of the Drawings

[0023] To more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present application. For those skilled in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0024] Figure 1 It is a top view of a silicon rod growth system provided in an embodiment of the present application;

[0025] Figure 2 It is a sectional view taken along the A-A line in Figure 1 ;

[0026] Figure 3 It is a structural schematic diagram of the heat insulation device in Figure 2 ;

[0027] Figure 4 It is a top view of another silicon rod growth system provided in an embodiment of the present application;

[0028] Figure 5 It is a sectional view taken along the B-B line in Figure 4 ;

[0029] Figure 6 It is a structural schematic diagram of the heat insulation device in Figure 4 ;

[0030] Among them, the reference numerals are as follows:

[0031] 100, heat insulation device;

[0032] 10, heat insulation component; 11, heat insulation cover; 12, heat insulation seat; 13, heat insulation felt; 14, fixed shaft;

[0033] 20, position adjustment component; 21, rotating connecting piece; 22, connecting arm; 23, rotating seal; 24, box body; 25, telescopic driving mechanism; 26, telescopic seal; 27, pulley; A1, first opening;

[0034] 30, lifting component; 31, lifting rope; 32, lifting driving mechanism; 321, wire winding and unwinding wheel; 322, driving unit; 33, seal;

[0035] 200, furnace cover; T1, first mounting hole; T2, second mounting hole;

[0036] 300, cooling part; B1, upper opening; B2, lower opening;

[0037] Z, first direction. Specific Embodiments

[0038] To make the above and other features and advantages of the present application clearer, the present invention will be further described below with reference to the accompanying drawings. It should be understood that the specific embodiments given herein are for the purpose of explaining to those skilled in the art and are merely exemplary, not restrictive.

[0039] In the description of the present application, features defined with "first" and "second" are only for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Features defined with "first" and "second" may explicitly or implicitly include at least one of the defined features. When the description "a plurality" appears, it generally means at least two, such as two, three, etc., unless otherwise specifically defined.

[0040] In the present application, unless otherwise clearly specified and limited, terms such as "installed", "connected", "connected to", "fixed" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection, an electrical connection, a direct connection, or an indirect connection through an intermediate medium, and may be the communication inside two components or the interaction relationship between two components. For those skilled in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0041] In the description of the present application, terms such as "an embodiment", "some embodiments", "example", "specific example", or "some examples" mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic descriptions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0042] Please refer to Figures 1 to 6 , the silicon rod growth system provided by the present application includes a growth furnace and a heat insulation device 100 at least partially located in the growth furnace.

[0043] The growth furnace includes a furnace body (not shown) and a furnace cover 200. The furnace body forms a growth cavity for growing a single crystal silicon rod, and the furnace cover 200 is used to block or open the growth cavity.

[0044] The heat insulation device 100 includes a heat insulation component 10, a position adjustment component 20, and a lifting component 30. Among them, the heat insulation component 10 is arranged inside the growth furnace, and the position adjustment component 20 is arranged on the furnace cover 200 and connected to the heat insulation component 10, and is used to drive the heat insulation component 10 to move so as to adjust the position of the heat insulation component 10 on the first plane. The lifting component 30 is arranged on the furnace cover 200 and connected to the heat insulation component 10, and is used to drive the heat insulation component 10 to move up and down along the first direction Z. Among them, the first direction Z intersects with the first plane.

[0045] Understandably, as an implementation manner, the first direction Z is the growth direction of the single crystal silicon rod in the growth furnace, the first plane is the plane where the heat insulation component 10 moves along with the position adjustment component 20, and this first plane intersects with the first direction Z. Preferably, this first plane is perpendicular to the first direction Z. Of course, as other implementation manners, the first direction Z is not limited to the growth direction of the silicon rod and can be other directions; the first direction Z and the first plane may not be perpendicular either.

[0046] Please refer to Figure 2 and Figure 5 , a cooling member 300 is arranged inside the growth furnace. The cooling member 300 is formed with a cavity that penetrates through its two ends in the up and down direction. The cavity has an upper opening B1 and a lower opening B2 that are oppositely arranged and communicated in the up and down direction. Among them, the upper opening B1 faces the furnace cover 200, and the position adjustment component 20 can adjust the position of the heat insulation component 10 relative to the upper opening B1 between the upper opening B1 and the furnace cover 200. For example, the position adjustment component 20 can drive the heat insulation component 10 to rotate relative to the upper opening B1 between the upper opening B1 and the furnace cover 200, or can also drive the heat insulation component 10 to perform a telescopic linear motion relative to the upper opening B1 between the upper opening B1 and the furnace cover 200. The lifting component 20 can drive the heat insulation component 10 to move up and down along the first direction Z so that the heat insulation component 10 can block or open the lower opening B2.

[0047] Here, it should be noted that the first plane where the heat insulation component 10 moves along with the position adjustment component 20 can be any plane that intersects with the first direction Z between the upper opening B1 and the furnace cover 200, as long as it can ensure that when the heat insulation component 10 moves in this plane, the cooling member 300 and the furnace cover 200 will not interfere with the movement of the heat insulation component 10.

[0048] Specifically, in the molten material stage of preparing a single crystal silicon rod through a silicon rod growth system, the heat insulation component 10 can be adjusted to a position directly above the upper opening B1 by the position adjustment component 20 first, and then the heat insulation component 10 is driven by the lifting component 20 to descend along the first direction Z until the lower opening B2 of the cooling member 300 is blocked, so as to reduce the heat in the growth furnace from being conducted to the furnace cover 200 through the cavity of the cooling member 300, thereby reducing heat waste, and thus significantly improving the molten material efficiency in the molten material stage. After the molten material stage is completed, the heat insulation component 10 can be driven by the lifting component 20 to rise along the first direction Z to open the lower opening B2 until the heat insulation component 10 is moved out of the upper opening B1 of the cooling member 300, and then the heat insulation component 10 can be adjusted to any position on one side of the upper opening B1 by the position adjustment component 20 as long as it does not block the upper opening B1. At this time, other processes of the single crystal silicon rod can be carried out.

[0049] In the prior art, due to the long time of the molten material stage and relatively serious heat loss, therefore, in the present application, through the cooperation of the heat insulation component 10, the position adjustment component 20 and the lifting component 30 of the heat insulation device 100, during the molten material stage of preparing a single crystal silicon rod, the heat insulation function of the heat insulation component 10 can be enabled to block the heat radiation from the growth furnace to the outside through the heat insulation component 10, so as to improve the heat field heat preservation performance in the growth furnace to reduce heat loss, and further improve the molten material efficiency in the molten material stage. And, during the non-molten material stage of preparing a single crystal silicon rod, through the cooperation of the heat insulation component 10, the position adjustment component 20 and the lifting component 30 of the heat insulation device 100, the heat insulation function of the heat insulation device 100 can be turned off, so as not to affect the normal growth process of the single crystal silicon rod, which is beneficial to improving the service life of the entire heat insulation device 100.

[0050] It can be understood that the molten material stage of preparing a single crystal silicon rod in the present application may include but is not limited to first crucible charging, secondary charging, and circulating section charging, etc.

[0051] Please refer to Figure 2 and Figure 5 , the lifting component 30 includes a lifting rope 31 and a lifting driving mechanism 32. Among them, the lifting rope 31 passes through the growth furnace and is connected to the heat insulation component 10, and the lifting driving mechanism 32 is arranged outside the growth furnace and is connected to the lifting rope 31 for taking in and releasing the lifting rope 31 to drive the heat insulation component 10 to move up and down along the first direction Z.

[0052] Specifically, the lifting rope 31 can be a heat-resistant tungsten wire rope. And, in order to save effort and adjust the extension direction of the lifting rope 31, structures such as pulleys can be added at different positions on the movement path of the lifting rope 31. In addition, the lifting driving mechanism 32 can adopt any form of power device as long as it can realize the taking in and releasing of the lifting rope 31.

[0053] In this embodiment, the lifting rope 31 and the lifting drive mechanism 32 are used in cooperation to realize the lifting movement of the heat insulation component 10 along the first direction Z. This driving method is not only simple and efficient, but also applicable to the high-temperature environment inside the growth furnace.

[0054] In some embodiments, please refer to Figure 2 and Figure 5 , the lifting drive mechanism 32 includes a wire winding and unwinding wheel 321 and a drive unit 322. The wire winding and unwinding wheel 321 is connected to the lifting rope 31, and the drive unit 322 is connected to the wire winding and unwinding wheel 321. Among them, the drive unit 322 is set to drive the wire winding and unwinding wheel 321 to rotate, so as to wind and unwind the lifting rope 31. Specifically, the drive unit 322 can adopt handwheel drive or motor drive.

[0055] In some embodiments, please refer to Figures 1 to 3 , the furnace cover 200 is provided with a first mounting hole T1 penetrating along the first direction Z. The position adjustment component 20 includes a rotating connecting piece 21 and a connecting arm 22. The connecting arm 22 is arranged inside the growth furnace, and the rotating connecting piece 21 passes through the growth furnace through the first mounting hole T1 and is connected to the connecting arm 22.

[0056] Among them, the connecting arm 22 supports the lifting rope 31 inside the growth furnace, and the rotating connecting piece 21 is set to drive the connecting arm 22 to rotate under the action of force, so as to adjust the position of the heat insulation component 10 relative to the upper opening B1 in the first plane. Among them, the rotational movement of the rotating connecting piece 21 can be realized by manual rotation or by setting a rotation drive mechanism, and the present application does not make specific limitations.

[0057] Specifically, by applying an external force to the rotating connecting piece 21, the rotating connecting piece 21 can be rotated by a certain angle, then the heat insulation component 10 rotates to position one in the first plane along with the rotating connecting piece 21. At this time, the heat insulation component 10 is directly above the upper opening B1 of the cooling member 300. Then, the lifting movement of the heat insulation component 10 along the first direction Z can be carried out through the lifting component 20 to block the lower opening B2 of the cooling member 300 during the melting stage of the single crystal rod. After the melting stage ends, by applying an external force in the same direction or the opposite direction as that in the melting stage to the rotating connecting piece 21, the rotating connecting piece 21 can be rotated by a certain angle, then the heat insulation component 10 rotates to position two in the first plane along with the rotating connecting piece 21. At this time, the heat insulation component 10 can avoid the upper opening B1 position of the cooling member 300, and then other processes of the single crystal rod can be carried out.

[0058] Please refer to Figure 2 and Figure 3The position adjustment assembly 20 further includes two pulleys 27, which are respectively arranged at the two ends of the connecting arm 22. The lifting rope 31 is passed through the first mounting hole T1 into the growth furnace and wound around the two pulleys 27. Thus, the extension direction of the lifting rope 31 in the growth furnace can be adjusted by the two pulleys 27 to support the lifting rope 31 on the connecting arm 22, and based on the arrangement of the two pulleys 27, the force applied by the lifting drive mechanism 32 to the lifting rope 31 can be greatly saved.

[0059] In some embodiments, since the growth furnace is in a high-temperature vacuum environment, in the process of the position adjustment component 20 rotating to adjust the position of the heat insulation component 10, in order not to destroy the high-temperature vacuum environment in the growth furnace, the position adjustment component 20 further includes a rotating seal 23, and the rotating seal 23 is connected to the end of the rotating connector 21 away from the connecting arm 22 outside the growth furnace, and is sealed and connected to the furnace cover 200 of the growth furnace at the first mounting hole T1, such as Figure 2 As shown. The rotating seal 23 is configured to drive the rotating connector 21 and the connecting arm 22 to rotate under the force and is always sealed and connected to the furnace cover 200 of the growth furnace during the rotation process. Specifically, the rotating seal 23 is not limited to magnetic fluid, and a vacuum rubber seal can also be used.

[0060] Please continue reading Figure 2 and Figure 3 The position adjustment assembly 20 further includes a box 24, which is connected to the end of the rotating seal 23 away from the rotating connection member 21 outside the growth furnace, and the box 24 is sealed and connected to the growth furnace through the rotating seal 23. The box 24 accommodates the retractable wire wheel 321 of the lifting assembly 30, and the box 24 is configured to drive the rotating seal 23, the rotating connection member 21 and the connecting arm 22 to rotate under the action of force.

[0061] Specifically, when the box body 24 is rotated to Figure 1 When the heat insulation component 10 is at the solid line position C1 in the first plane, the heat insulation component 10 rotates to the first position along with the rotating connecting member 21 in the first plane. At this time, the heat insulation component 10 is located directly above the upper opening B1 of the cooling member 300. Then, the lifting component 20 drives the heat insulation component 10 to move up and down along the first direction Z to block the lower opening B2 of the cooling member 300. Then, the melting process of the single crystal silicon rod can be carried out. When the box body 24 is rotated to the position C1 by an external force, the heat insulation component 10 is moved up and down along the first direction Z to block the lower opening B2 of the cooling member 300. Figure 1 When the heat insulation component 10 is at the dotted line position C2 in the figure, the heat insulation component 10 rotates to the second position along with the rotating connecting member 21 in the first plane. At this time, the heat insulation component 10 avoids the upper opening B1 position of the cooling member 300, and then other processes of the single crystal silicon rod can be carried out.

[0062] In this embodiment, through the box body 24, on the one hand, the external force can be sequentially transmitted to the rotating seal 23, the rotating connecting piece 21 and the connecting arm 22, so as to realize the rotational movement of the connecting arm 22 in the growth furnace; on the other hand, it serves as a receiving container for the wire winding and unwinding wheel 321. Since the wire winding and unwinding wheel 321 can wind and unwind the lifting rope 31 under the action of the driving unit 322, and the lifting rope 31 passes through the box body 24 and penetrates into the growth furnace, by communicating the box body 24 with the growth furnace, a high-temperature vacuum environment can also be formed inside the box body 24. In this way, it can be ensured that during the process of the lifting assembly 30 driving the heat insulation assembly 10 to move up and down in the first direction Z, the high-temperature vacuum environment inside the growth furnace will not be damaged.

[0063] Specifically, the box body 24 is provided with a first opening A1. One end of the rotating seal 23 away from the rotating connecting piece 21 passes through the first opening A1 and penetrates into the box body 24 and is connected to the box body 24. The lifting rope 31 passes through the first opening A1 of the box body 24 and the first mounting hole T1 of the growth furnace and penetrates into the growth furnace.

[0064] In Figures 1 to 3 In the shown embodiment, in order to improve the adjustment efficiency and accuracy, the position adjustment assembly 20 further includes a rotation driving mechanism (not shown). The rotation driving mechanism is connected to the box body 24. By driving the box body 24 to rotate through the rotation driving mechanism, the rotating seal 23, the rotating connecting piece 21 and the connecting arm 22 are driven to rotate with the box body 24, so as to quickly adjust the position of the connecting arm 22 in the growth furnace.

[0065] In other embodiments, please refer to Figures 4 to 6 , the position adjustment assembly 20 includes a telescopic driving mechanism 25 and a connecting arm 22. The furnace cover 200 is provided with a second mounting hole T2 along the extending direction of the connecting arm 22.

[0066] Wherein, the connecting arm 22 extends in a direction intersecting with the first direction Z. At least part of the connecting arm 222 passes through the second mounting hole T2 and penetrates into the growth furnace and can support the lifting rope 31. The telescopic driving mechanism 25 is located outside the growth furnace and is connected to the connecting arm 22, and the telescopic driving mechanism 25 is used to drive the connecting arm 22 to perform telescopic movement along its extending direction, so as to adjust the position of the heat insulation assembly 10 in the first plane. Preferably, the connecting arm 22 can extend in a direction perpendicular to the first direction Z.

[0067] Specifically, the telescopic driving mechanism 25 can adopt a motor, a cylinder or a handwheel drive, but is not limited thereto, and other forms of driving mechanisms can also be adopted.

[0068] The telescopic driving mechanism 25 can apply a thrust to the connecting arm 22 to push the connecting arm 22 a certain distance. Then, the heat insulation assembly 10 is pushed to position one in the first plane by the connecting arm 22. At this time, the heat insulation assembly 10 is directly above the upper opening B1 of the cooling member 300. Then, the lifting and lowering assembly 20 can be used to perform the lifting and lowering movement of the heat insulation assembly 10 along the first direction Z to block the lower opening B2 of the cooling member 300 during the melting stage of the single crystal silicon rod. After the melting stage is over, the telescopic driving mechanism 25 can apply a pulling force to the connecting arm 22 to pull the connecting arm 22 a certain distance. Then, the heat insulation assembly 10 is pulled to position two in the first plane by the connecting arm 22. At this time, the heat insulation assembly 10 avoids the position of the upper opening B1 of the cooling member 300. Then, other processes of the single crystal silicon rod can be carried out.

[0069] Please refer to Figure 5 and Figure 6 , the position adjusting assembly 20 further includes two pulleys 27. One of the pulleys 27 is arranged at one end of the connecting arm 22 close to the heat insulation assembly 10, and the other pulley 27 is arranged outside the growth furnace and connected to the telescopic driving mechanism 25. The lifting rope 31 is wound around the two pulleys 27. Thus, the stretching direction of the lifting rope 31 can be adjusted through the two pulleys 27 to support the lifting rope 31 on the connecting arm 22, and based on the arrangement of the two pulleys 27, the force applied by the lifting driving mechanism 32 to the lifting rope 31 can be greatly saved.

[0070] Since the inside of the growth furnace is a high-temperature vacuum environment, during the process of the position adjusting assembly 20 telescopically adjusting the position of the heat insulation assembly 10, in order not to damage the high-temperature vacuum environment inside the growth furnace, please refer to Figure 5 and Figure 6 , the position adjusting assembly 20 further includes a telescopic seal 26. The telescopic seal 26 is outside the growth furnace and is respectively connected to the furnace cover 200 of the growth furnace and the telescopic driving mechanism 25 at both ends. Among them, the telescopic seal 26 is arranged to be compressed or stretched under the action of the telescopic driving mechanism 25 and always keep a sealed connection with the growth furnace during the telescopic movement. Specifically, the telescopic seal 26 can be a hollow corrugated pipe.

[0071] Please continue to refer to Figure 5 and Figure 6 , the position adjusting assembly 20 further includes a box body 24. The box body 24 is connected to the telescopic driving mechanism 25 outside the growth furnace. The box body 24 is hermetically connected to and communicated with the growth furnace through the telescopic driving mechanism 25 and the telescopic seal 26. Among them, a wire winding and unwinding wheel 321 of the lifting and lowering assembly 30 is accommodated in the box body 24, and the box body 24 moves telescopically together with the telescopic driving mechanism 25. And the pulley 27 located outside the growth furnace can be arranged on the box body 24 or on the telescopic driving mechanism 25.

[0072] Please refer to Figure 1 andFigure 4 , the box body 24 is provided with a second opening (not shown), the lifting assembly 30 further includes a seal 33, the driving unit 322 is disposed outside the box body 24 and is hermetically connected to the box body 24 through the seal 33, and a part of the driving unit 322 passes through the seal 33 and is connected to the wire winding and unwinding wheel 321, and the driving unit 322 is configured to drive the wire winding and unwinding wheel 321 to rotate so as to wind and unwind the lifting rope 31.

[0073] Please refer to Figure 3 and Figure 6 , the heat insulation assembly 10 includes a heat insulation cover 11, a heat insulation seat 12, a heat insulation felt 13 and a fixed shaft 14. Among them, the heat insulation seat 12 is disposed on the heat insulation cover 11 and encloses a hollow structure, the heat insulation felt 13 is disposed in the heat insulation seat 12 and is connected to the heat insulation cover 11, one end of the fixed shaft 14 is connected to the heat insulation cover 11 and the other end is connected to the lifting rope 31 of the lifting assembly 30, and the lifting rope 31 is supported on the connecting arm 22 of the position adjusting assembly 20 to realize the connection between the heat insulation assembly 10 and the position adjusting assembly 20 and the lifting assembly 30.

[0074] Specifically, in order to ensure the high temperature resistance performance of the heat insulation assembly 10, the material of the heat insulation cover 11 contains quartz and / or molybdenum, the material of the heat insulation seat 12 contains quartz and / or molybdenum, and the material of the fixed shaft 14 contains molybdenum. The content of quartz or molybdenum in the heat insulation cover 11, the heat insulation seat 12 and the fixed shaft 14 can be selected according to actual needs. And in order to ensure the low thermal conductivity performance of the heat insulation felt 13, the material of the heat insulation felt 13 contains soft felt.

[0075] Please refer to Figure 2 and Figure 5 , the silicon rod growth system further includes a thermal shield 400 and a heater (not shown) disposed in the growth furnace. Among them, the cooling member 300 is disposed in the thermal shield 400, and the heater is disposed between the thermal shield 400 and the furnace body.

[0076] In some other embodiments, the silicon rod growth system includes a growth furnace, and the growth furnace includes a growth channel for the silicon rod to pass through. The heat insulation device 100 is disposed in the growth furnace and is used to block or open the growth channel.

[0077] Specifically, the heat insulation device 100 is disposed in the growth furnace, the lifting assembly 30 is connected to the heat insulation assembly 10, and the position adjusting assembly 20 is disposed on the growth furnace, and specifically can be disposed on the furnace cover 200 of the growth furnace or on other structures such as a sub-chamber at the upper part of the growth furnace.

[0078] Specifically, a cooling member 300 is provided in the growth furnace. The cooling member 300 has an upper opening B1 and a lower opening B2 which are oppositely arranged. The regions of the upper opening B1 and the lower opening B2 coincide with at least part of the growth channel region. By means of the heat insulation device 100, the region of the lower opening B2 is blocked or opened, and thus at least part of the growth channel region is blocked or opened.

[0079] In this embodiment, the cooling member 300 may be a cooling component for cooling the silicon rod during silicon rod growth, such as a cooling component through which a coolant is passed, or may be a heat insulation member, such as a graphite member or a composite material member for heat insulation, or a combination of a cooling component and a graphite or composite material member.

[0080] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present application. Those skilled in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of the present application.

Claims

1. A heat insulation device (100), characterized in that: include: A heat insulation component (10) is used to be arranged in a growth furnace; a position adjustment component (20), connected to the thermal insulation component (10), and used to drive the thermal insulation component (10) to move so as to adjust the position of the thermal insulation component (10) on the first plane; and A lifting assembly (30) is connected to the heat insulation assembly (10) and is used to drive the heat insulation assembly (10) to move up and down along a first direction (Z), wherein the first direction (Z) intersects with the first plane.

2. The thermal insulation device (100) according to claim 1, characterized in that: The lifting assembly (30) comprises: a lifting rope (31) connected to the thermal insulation assembly (10); and A lifting drive mechanism (32) is arranged outside the growth furnace and connected to the lifting rope (31), and is used for retracting and releasing the lifting rope (31) to drive the heat insulation component (10) to move up and down along the first direction (Z).

3. The thermal insulation device (100) according to claim 2, characterized in that: The lifting drive mechanism (32) comprises: A reel (321) connected to the lifting rope (31); The driving unit (322) is connected to the retractable wire wheel (321), and the driving unit (322) is configured to drive the retractable wire wheel (321) to rotate so as to retract and release the lifting rope (31).

4. The thermal insulation device (100) according to claim 2, characterized in that: The position adjustment component (20) comprises a rotating connection member (21) and a connection arm (22); the rotating connection member (21) is inserted into the growth furnace and connected to the connection arm (22); Wherein, the connecting arm (22) supports the lifting rope (31), and the rotating connecting member (21) is configured to drive the connecting arm (22) to rotate under the action of force, so as to adjust the position of the thermal insulation component (10) on the first plane.

5. The thermal insulation device (100) according to claim 4, characterized in that: The position adjustment assembly (20) further comprises a rotating seal (23), wherein the rotating seal (23) is connected to an end of the rotating connection member (21) away from the connection arm (22) outside the growth furnace; The rotating seal (23) is sealedly connected to the growth furnace; the rotating seal (23) drives the rotating connection member (21) and the connection arm (22) to move.

6. The thermal insulation device (100) according to claim 5, characterized in that: The position adjustment assembly (20) further comprises a box (24), wherein the box (24) is connected to an end of the rotating seal (23) away from the rotating connection member (21) outside the growth furnace; The box (24) accommodates at least part of the lifting drive mechanism (32) and is configured to drive the rotating seal (23), the rotating connecting member (21) and the connecting arm (22) to rotate under the action of force.

7. The thermal insulation device (100) according to claim 2, characterized in that: The position adjustment component (20) comprises a telescopic drive mechanism (25) and a connecting arm (22); the telescopic drive mechanism (25) is located outside the growth furnace and connected to the connecting arm (22); The connecting arm (22) supports the lifting rope (31), and the telescopic drive mechanism (25) is configured to drive the connecting arm (22) to telescopically move along its extension direction to adjust the position of the thermal insulation assembly (10) on the first plane.

8. The thermal insulation device (100) according to claim 7, characterized in that: The position adjustment assembly (20) further comprises a telescopic seal (26), wherein the telescopic seal (26) is outside the growth furnace and has two ends respectively connected to the growth furnace and the telescopic drive mechanism (25); Wherein, the telescopic sealing element (26) is configured to be compressed or stretched under the action of the telescopic driving mechanism (25).

9. The thermal insulation device (100) according to claim 8, characterized in that: The telescopic seal (26) is a bellows; and / or The position adjustment component (20) further comprises a box (24), wherein the box (24) is connected to the telescopic drive mechanism (25) outside the growth furnace, and the box (24) accommodates at least a portion of the lifting drive mechanism (32).

10. The thermal insulation device (100) according to any one of claims 1 to 9, characterized in that: The heat insulation component (10) comprises: a heat insulation felt (13) connected to the lifting component (30).

11. The thermal insulation device (100) according to claim 10, characterized in that: The thermal insulation assembly (10) further comprises: Insulation cover (11); A heat insulation seat (12) is arranged on the heat insulation cover (11) and forms a hollow structure, and the heat insulation felt (13) is arranged in the heat insulation seat (12) and connected to the heat insulation cover (11); and A fixed shaft (14) has one end connected to the heat insulation cover (11) and the other end connected to the position adjustment component (20) and the lifting component (30).

12. A silicon rod growth system, characterized in that: include: A growth furnace, including a growth channel for silicon rods to pass through; as well as According to the thermal insulation device (100) according to any one of claims 1 to 11, the thermal insulation component (10) is arranged in the growth furnace to shield or open the growth channel.

13. The silicon rod growth system according to claim 12, characterized in that: The growth furnace comprises a furnace body and a furnace cover (200) for sealing or opening the furnace body; The heat insulation component (10) is arranged in the growth furnace, and the position adjustment component (20) and the lifting component (30) are arranged on the furnace cover (200).

14. The silicon rod growth system according to claim 13, characterized in that: A cooling member (300) is arranged in the growth furnace, and the cooling member (300) has an upper opening (B1) and a lower opening (B2) arranged opposite to each other; the upper opening (B1) area and the lower opening (B2) area overlap with at least a part of the growth channel; The position adjustment component (20) is capable of adjusting the position of the heat insulation component (10) relative to the upper opening (B1) between the upper opening (B1) and the furnace cover (200); the lifting component (30) drives the heat insulation component (10) to move up and down along the first direction (Z) so that the heat insulation component (10) can block or open the lower opening (B2).

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