Method and system for adjusting light beam

Abstract

The invention discloses a method and system for adjusting a light beam, and relates to the technical field of light beam adjustment. The method comprises the steps that a plurality of reflectors are arranged on a light path of an incident light beam, and the reflectors are used for receiving the incident light beam and dividing the incident light beam into a plurality of beams of reflected light; according to the position of the to-be-illuminated point, the placement positions and placement angles of the multiple reflectors are adjusted, so that light paths of the multiple beams of reflected light intersect at the to-be-illuminated point; cylindrical mirrors are arranged on light paths of the multiple beams of reflected light respectively, each cylindrical mirror is used for converting the corresponding reflected light into a linear light spot, and the multiple linear light spots are converged into a target illumination light spot at a point to be illuminated. The scheme can effectively weaken the intensity of speckles on the premise of fully utilizing the power of the light source.

Description

Technical Field

[0001] This application belongs to the technical field of beam adjustment, and particularly relates to a method and system for adjusting a beam. Background Art

[0002] In the dark-field detection scenario of the semiconductor manufacturing process, the speckle effect caused by laser coherence will significantly affect the detection accuracy of wafer defects.

[0003] Although in the related art, there are already various means for speckle suppression and spot control, these methods still have problems such as waste of light source power and difficulty in effectively weakening the intensity of speckles. Summary of the Invention

[0004] Embodiments of this application provide a method and system for adjusting a beam, which can effectively improve the effect of weakening speckles.

[0005] In a first aspect of the embodiments of this application, a method for adjusting a beam is provided. The method includes:

[0006] Setting a plurality of reflectors on the optical path of the incident beam, where the plurality of reflectors are used to receive the incident beam and divide the incident beam into multiple reflected light rays;

[0007] According to the position of the point to be illuminated, adjusting the placement positions and placement angles of the plurality of reflectors so that the optical paths of the multiple reflected light rays intersect at the point to be illuminated;

[0008] Cylindrical lenses are respectively set on the optical paths of the multiple reflected light rays, and each cylindrical lens is used to convert the corresponding reflected light ray into a line spot, and the multiple line spots converge into a target illumination spot at the point to be illuminated.

[0009] In a possible implementation manner of the first aspect, the above-mentioned plurality of reflectors include a total reflector and a plurality of partial reflectors, and the plurality of partial reflectors include at least one first-type partial reflector and at least one second-type partial reflector;

[0010] When setting a plurality of reflectors on the optical path of the incident beam, the method includes:

[0011] Setting a first-type partial reflector, a second-type partial reflector and a total reflector on the optical path of the incident beam; the first-type partial reflector is used to receive the incident beam and emit a first reflected light ray and a first transmitted light ray; the second-type partial reflector is used to receive the first transmitted light ray and emit a second reflected light ray and a second transmitted light ray; the total reflector is used to receive the second transmitted light ray and emit a third reflected light ray.

[0012] In a possible implementation manner of the first aspect, the above-mentioned plurality of reflectors include a total reflector and a partial reflector;

[0013] A plurality of mirrors are arranged on the optical path of the incident light beam. The method includes:

[0014] A partial mirror and a total mirror are arranged on the optical path of the incident light beam. The partial mirror is configured to receive the incident light beam and emit a fourth reflected light beam and a fourth transmitted light beam. The total mirror is configured to receive the fourth transmitted light beam and emit a fifth reflected light beam.

[0015] In a possible implementation manner of the first aspect, the method further includes:

[0016] For each of the multiple reflected light beams, a beam expander is arranged on the optical path of the reflected light beam. The beam expander is located between the mirror corresponding to the reflected light beam and the cylindrical mirror, and is configured to expand the reflected light beam.

[0017] In a possible implementation manner of the first aspect, the method further includes:

[0018] Obtain the speckle situation of the target illumination spot;

[0019] When the speckle situation does not meet the preset requirements, increase the distance between the multiple mirrors and the point to be illuminated.

[0020] In a possible implementation manner of the first aspect, the method further includes:

[0021] Adjust the reflectivity of the multiple mirrors so that the energy difference between the multiple reflected light beams is less than a preset energy threshold.

[0022] In a second aspect of the embodiments of the present application, a system for adjusting a light beam is provided, including a plurality of mirrors and a plurality of cylindrical mirrors;

[0023] The plurality of mirrors are arranged on the optical path of the incident light beam and form different angles with the optical path of the incident light beam. They are configured to receive the incident light beam from the light source and divide the incident light beam into multiple reflected light beams;

[0024] Each of the plurality of cylindrical mirrors is respectively arranged on the optical paths of the multiple reflected light beams and is configured to convert the corresponding reflected light beam into a line spot. The multiple line spots converge at the point to be illuminated to form a target illumination spot.

[0025] In a possible implementation manner of the second aspect, the plurality of mirrors include a total mirror and a plurality of partial mirrors. The plurality of partial mirrors include a first partial mirror and a second partial mirror. The first partial mirror, the second partial mirror, and the total mirror are arranged in sequence on the optical path of the incident light beam;

[0026] The first partial mirror is configured to receive the incident light beam and emit a first reflected light beam and a first transmitted light beam;

[0027] The second part of the mirror is used to receive the first transmitted light and emit the second reflected light and the second transmitted light;

[0028] The total reflection mirror is used to receive the second transmitted light and emit the third reflected light.

[0029] In a third aspect of the embodiments of the present application, an electronic device is provided, which includes: a memory and a program or instruction stored on the memory and executable on a processor. When the program or instruction is executed by the processor, it implements the chip design layout contour calculation method provided in any aspect of the embodiments of the present application as described above.

[0030] In a fourth aspect of the embodiments of the present application, a readable storage medium is provided. A program or instruction is stored on the readable storage medium. When the program or instruction is executed by the processor, it implements the chip design layout contour calculation method provided in any aspect of the embodiments of the present application as described above.

[0031] In a fifth aspect of the embodiments of the present application, a computer program product is provided. When the instructions in the computer program product are executed by the processor of the electronic device, the electronic device is enabled to execute the chip design layout contour calculation method provided in any aspect of the embodiments of the present application as described above.

[0032] In the method for adjusting a light beam provided by the embodiments of the present application, a plurality of mirrors are arranged on the optical path of the incident light beam to divide the incident light beam into multiple light beams, broaden the laser pulse, and convert the light into a light spot through a cylindrical mirror. By adjusting the placement angle of the mirrors, the multiple light spots reach the point to be illuminated at different angles, thereby effectively reducing the intensity of the speckle. At the same time, due to the multi-angle light spot distribution, not only the coherence between the light beams is reduced, the influence of the speckle is reduced, but also the waste of laser power in the traditional method is avoided. Description of the Drawings

[0033] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings required to be used in the embodiments of the present application. For those of ordinary skill in the art, other drawings can also be obtained based on these drawings without creative efforts.

[0034] Figure 1 It is a schematic flowchart of the method for adjusting a light beam provided by an embodiment of the present application;

[0035] Figure 2 It is a schematic structural diagram of the system for adjusting a light beam provided by an embodiment of the present application;

[0036] Figure 3 It is a schematic structural diagram of the system for adjusting a light beam provided by an embodiment of the present application;

[0037] Figure 4It is a schematic diagram of an electronic device provided by an embodiment of the present application. Detailed implementation manners

[0038] The features and exemplary embodiments of various aspects of the present application will be described in detail below. To make the objectives, technical solutions, and advantages of the present application clearer and more understandable, the present application will be further described in detail below in combination with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only intended to explain the present application, rather than to limit the present application. For those skilled in the art, the present application can be implemented without some of these specific details. The following description of the embodiments is only intended to provide a better understanding of the present application by showing examples of the present application.

[0039] It should be noted that, in this document, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover a non-exclusive inclusion, such that a process, method, article or device comprising a series of elements includes not only those elements, but also other elements not expressly listed, or elements inherent to such process, method, article or device. Without further limitation, the elements defined by the statement "comprising..." do not exclude the presence of additional identical elements in the process, method, article or device comprising the said elements.

[0040] It should be noted that the acquisition, storage, use, processing, etc. of data in the technical solution of the present application all comply with the relevant regulations of national laws and regulations. In the embodiments of the present application, certain industry-existing solutions such as software, components, models, etc. may be mentioned, and they should be considered as exemplary. The purpose is only to illustrate the feasibility in the implementation of the technical solution of the present application, but it does not mean that the applicant has already or necessarily used this solution.

[0041] First, the noun terms involved in one or more embodiments of the present application are explained.

[0042] A wafer is a silicon wafer processed by a specific processing technology, on which a series of processes for chip manufacturing can be carried out, such as photolithography, etching, doping, etc.

[0043] Wafer inspection is to check whether there are defects on the surface of the wafer through various inspection means during the semiconductor manufacturing process.

[0044] Source coherence refers to the phase relationship between different light waves emitted by a light source. When a light source has strong coherence, the phase consistency between light waves is relatively high, which causes the light waves to interfere when illuminating the surface of an object, resulting in a speckle effect and affecting the imaging quality. Light sources with strong coherence (such as lasers) usually significantly trigger the speckle phenomenon, while light sources with weak coherence (such as white light) produce less speckle effect.

[0045] Speckle effect is an optical interference phenomenon caused by the surface inhomogeneity when a laser or other coherent light source irradiates the surface of a sample. The speckle effect will produce uneven bright and dark spots in imaging, affecting the quality and detection accuracy of the image.

[0046] In the field of semiconductor integrated circuit technology, with the continuous progress of semiconductor technology, the manufacturing process has become increasingly complex, which has also led to an increase in the number of wafer defects. To ensure the quality of semiconductor products, it is necessary to strictly detect wafer defects during the manufacturing process. Commonly used detection methods include bright-field detection and dark-field detection, which identify defects under different lighting conditions respectively.

[0047] However, during the wafer defect detection process, due to the use of coherent light sources such as lasers for irradiation, the coherence of the light source triggers the speckle effect, which produces uneven light spots in imaging, affecting the image quality and detection accuracy. Especially in the detection of micro-defects, the speckle effect will significantly reduce the detection accuracy.

[0048] Currently, although there are some methods that attempt to reduce the speckle effect by adjusting the light source or improving the optical path design, the effects are still not satisfactory, and the influence of speckles still causes certain interference to the detection accuracy.

[0049] In view of this, the present application provides a method and system for adjusting a light beam. By setting multiple reflectors on the optical path of the incident light beam, the laser is divided into multiple light beams, the laser pulse is broadened, and the light is converted into a light spot through a cylindrical lens. By adjusting the placement angle of the reflectors, multiple light spots reach the point to be illuminated at different angles, reducing the coherence between the light beams, thereby effectively weakening the intensity of the speckles and improving the accuracy and stability of wafer defect detection.

[0050] For example, the method for adjusting a light beam provided by the embodiments of the present application can be applied to the production line of semiconductor manufacturing enterprises for defect detection of semiconductor devices generated during the production process. In practical applications, according to the method for adjusting a light beam provided by the present application, the illumination light beam for defect detection is adjusted and hits the wafer on the workpiece table through a beam splitting optical path and a shaping optical path.

[0051] It should be noted that the application scenarios described in the above embodiments of the present application are for more clearly illustrating the technical solutions of the embodiments of the present application, and do not constitute a limitation on the technical solutions provided by the embodiments of the present application. Those skilled in the art can know that with the emergence of new application scenarios, the technical solutions provided by the embodiments of the present application are equally applicable to similar technical problems.

[0052] Next, specific embodiments of the method, system, device, medium, and product for adjusting a light beam provided by the embodiments of the present application will be introduced. First, the method for adjusting a light beam will be introduced.

[0053] Figure 1 FIG. shows a schematic flow chart of a method for adjusting a light beam provided by an embodiment of the present application. As Figure 1 shown, the method includes steps S110 to S130.

[0054] S110. Set a plurality of reflectors on the optical path of the incident light beam. The plurality of reflectors are used to receive the incident light beam and divide the incident light beam into multiple reflected light rays.

[0055] The incident light beam, the light beam irradiated onto the wafer sample, is used for wafer defect detection.

[0056] Exemplarily, in practical applications, the incident light beam can be a laser, specifically a single-wavelength laser. The single-wavelength laser can provide a light source with high coherence and stability, and is suitable for high-precision defect detection.

[0057] The optical path of the incident light beam is the path along which the incident light travels in a straight line after emitting from the light source.

[0058] A plurality of reflectors are sequentially arranged on the optical path of the incident light beam, which is used to adjust the direction of the incident light beam and divide the incident light beam into multiple light rays.

[0059] A reflector is an optical element for reflecting light, and its main function is to change the propagation direction of light.

[0060] Exemplarily, the plurality of reflectors can be sequentially arranged at a certain interval, and the center point of each reflector is located on the optical path of the incident light beam to ensure that the incident light beam can continue to propagate in the expected direction after passing through each reflector.

[0061] S120. According to the position of the point to be illuminated, adjust the placement position and placement angle of the plurality of reflectors so that the optical paths of the multiple reflected light rays intersect at the point to be illuminated.

[0062] The point to be illuminated is the target position where the incident light beam finally focuses during the detection process.

[0063] Exemplarily, the point to be illuminated can be a specific position on the wafer for defect detection. For example, the point to be illuminated can be a designated area on the worktable for precisely irradiating and inspecting the surface of the wafer to determine whether there are defects.

[0064] Placement position, the specific position of the mirror in the optical path of the incident light beam.

[0065] Placement angle, the tilt angle of the mirror.

[0066] Exemplarily, the placement angle can be defined as the angle between the mirror and the normal perpendicular to the incident light beam.

[0067] By coordinately adjusting the placement position and placement angle of the mirror, the propagation direction of the reflected light can be controlled, thereby ensuring that multiple light beams intersect at a predetermined point to be illuminated.

[0068] It can be understood that to arrange multiple mirrors on the optical path of the incident light beam and ensure that the light rays reflected by each mirror intersect at the same point, it is necessary to reasonably adjust the placement angle of each mirror. Since the path of the reflected light depends on the incident angle and the reflection angle, and multiple mirrors are distributed at different positions on the optical path, the placement angle of each mirror must be different. Correspondingly, the incident angle of each mirror is also different.

[0069] This design enables the light rays reflected by each mirror to converge at the same position from multiple different directions to form an illumination spot. Since the light rays come from multiple different incident angles, the coherence condition is effectively broken, thereby reducing the coherence of the light source. This method can reduce the speckle effect and improve the illumination uniformity, thereby optimizing the spot quality.

[0070] It can be understood that a system composed of multiple mirrors arranged in the manner described in steps S110 and S120 can be regarded as a beam splitting system, which splits the incident light beam into multiple light beams by reflection.

[0071] S130. Cylindrical mirrors are respectively arranged on the optical paths of the multiple reflected light beams, and each cylindrical mirror is used to convert the corresponding reflected light beam into a line spot, and multiple line spots converge into a target illumination spot at the point to be illuminated.

[0072] Cylindrical mirror, an optical element with a surface having a certain curvature, which can focus the light passing through it into a line spot without changing the optical path of the light beam.

[0073] Exemplarily, the types of multiple cylindrical mirrors are all concave mirrors.

[0074] The line-shaped light spot, which is formed after being adjusted by a cylindrical lens, has the characteristic of linear distribution. Different from the conventional circular light spot, the line-shaped light spot forms an extended light band between the light source and the target, and its shape helps to achieve uniform illumination in the area to be illuminated, reduce the interference between light spots, and thus improve the detection accuracy.

[0075] After the debugging in steps S110 and S120, the optical paths of the reflected light rays emitted by each mirror have been determined. On the optical path of each reflected light ray, a cylindrical lens is set, and this cylindrical lens is used to convert this reflected light ray into a line-shaped light spot. That is to say, multiple cylindrical lenses convert multiple reflected light rays emitted by multiple mirrors into multiple line-shaped light spots.

[0076] It should be understood that the main feature of the cylindrical lens is to convert the light ray into a line-shaped light spot while keeping the optical path unchanged. Therefore, on the premise that multiple reflected light rays intersect at the point to be illuminated, multiple line-shaped light spots can also converge at the point to be illuminated.

[0077] Through the precise configuration of multiple cylindrical lenses, multiple line-shaped light spots will converge at the point to be illuminated to form a target illumination light spot. Since these line-shaped light spots converge at the same position from multiple angles, it can effectively weaken the speckle effect caused by the coherence of the light source, thereby improving the detection accuracy and stability.

[0078] It can be understood that the system composed of multiple cylindrical lenses arranged in the manner described in step S130 can be regarded as a shaping system. The function of this shaping system is to convert multiple reflected light rays through the adjustment of the cylindrical lenses into multiple line-shaped light spots, so as to form a precise target illumination light spot and ensure the quality and stability of the light spot.

[0079] The method for adjusting the light beam provided by the embodiment of the present application sets multiple mirrors on the optical path of the incident light beam, divides the incident light beam into multiple light beams, broadens the laser pulse, and converts the light ray into a light spot through a cylindrical lens. By adjusting the placement angle of the mirrors, multiple light spots reach the point to be illuminated at different angles, which not only reduces the coherence between the light beams, reduces the influence of speckles, but also avoids the waste of laser power in the traditional method.

[0080] In some embodiments, the multiple mirrors include at least one partial mirror and one total mirror.

[0081] The partial mirror is an optical mirror surface with the characteristics of partial reflection and partial transmission. After the incident light ray passes through the partial mirror, a part of the light ray is reflected out and becomes the reflected light ray, while another part of the light ray passes through the partial mirror and becomes the transmitted light ray.

[0082] The total mirror is an optical mirror surface with 100% reflection characteristics. All incident light rays will be completely reflected and there will be no transmission.

[0083] On the optical path of the incident light beam, at least one partial reflector and a total reflector are arranged in sequence in the direction away from the incident light beam (or, in the emission direction of the incident light beam).

[0084] It should be noted that according to the characteristics of the partial reflector, the first partial reflector on the path receives the incident light beam, while each subsequent partial reflector receives the transmitted light ray emitted by the previous partial reflector.

[0085] Based on the above differences, in some implementation manners, when there are multiple partial reflectors, the partial reflectors can be divided into two categories:

[0086] At least one first-type partial reflector, which is the first partial reflector arranged on the optical path of the incident light beam along the emission direction of the incident light beam, is used to receive the incident light beam and emit a first reflected light ray and a first transmitted light ray.

[0087] The first reflected light ray is the light ray reflected by the first-type partial reflector, that is, the light ray generated after the incident light beam is reflected.

[0088] The first transmitted light ray is the light ray after the first-type partial reflector transmits the incident light beam.

[0089] At least one second-type partial reflector, which is located between the first-type partial reflector and the total reflector, is used to receive the incident light beam and emit a first reflected light ray and a first transmitted light ray.

[0090] The second reflected light ray is the light ray reflected by the second-type partial reflector, which is the light ray reflected based on the first transmitted light ray.

[0091] The second transmitted light ray is the light ray after the second-type partial reflector transmits the first transmitted light ray.

[0092] In this configuration, the total reflector, which is located at the end of the optical path, is used to receive the second transmitted light ray transmitted by the second-type partial reflector and totally reflect it into a third reflected light ray.

[0093] The third reflected light ray is the light ray reflected by the total reflector, which is the light ray reflected based on the second transmitted light ray.

[0094] In some implementation manners, when there is only one partial reflector, the partial reflector is used to receive the incident light beam and emit a fourth reflected light ray and a fourth transmitted light ray. Correspondingly, in this configuration, the total reflector is used to receive the fourth transmitted light ray and emit a fifth reflected light ray.

[0095] The fourth reflected light ray is the light ray reflected by the partial reflector, that is, the light ray generated by the reflection of the incident light beam.

[0096] The fourth transmitted light is the light after the partial reflector transmits the incident light beam.

[0097] It should be understood that the fourth reflected light and the aforementioned first reflected light are essentially the same, both originate from the incident light beam, and after being processed by the partial reflector, they will eventually point to the corresponding cylindrical mirror; and the fourth transmitted light and the aforementioned first transmitted light have the same source and processing method, but they point in different directions, the former points to the total reflector, and the latter points to the next partial reflector (i.e., the second type of partial reflector).

[0098] The above method adopts a design of combining a total reflector with at least one partial reflector, so that the incident light beam can be effectively split and broadened, thereby reducing the coherence between the light rays and reducing the intensity of the speckle. At the same time, it avoids the problems of inconsistent optical path difference and energy loss in traditional methods, and improves the stability and accuracy of wafer detection.

[0099] It should be noted that with each additional partial reflector, the incident light beam is divided into more light beams, so that the speckle effect is more significantly reduced. In other words, increasing the number of partial reflectors can effectively reduce the speckle effect. However, in practical applications, space limitations should be considered. If too many reflectors are set in a limited space, the paths of the reflected light may interfere due to the close distance, thereby affecting the effect of reducing speckle. Therefore, in practical applications, the number of reflectors can be set according to specific circumstances, and this application does not limit this.

[0100] In some embodiments, for each reflected light beam in the multiple reflected light beams, a beam expander is provided on the optical path of the reflected light beam. The beam expander is located between the reflector and the cylindrical mirror corresponding to the reflected light beam, and is used to expand the reflected light beam.

[0101] Specifically, a beam expander is arranged between each reflector and its corresponding cylindrical mirror.

[0102] Exemplarily, the beam expander may be a lens combination or a prism, and the specific selection may be optimized according to actual needs.

[0103] By adding a beam expander between the reflector and the cylindrical mirror, multiple beams of reflected light can be effectively expanded to ensure the uniformity and consistency of the incident light beam during the transmission process.

[0104] Under the condition that the angle at which the reflected light reaches the point to be illuminated remains unchanged, the optical path difference of each beam of reflected light can be adjusted by adjusting the height of the reflector to minimize the coherence and reduce the speckle effect.

[0105] Based on the above principles, in some embodiments, the present application provides a method for adjusting a light beam, which may also include the following steps.

[0106] S210. Obtain the speckle intensity of the target illumination spot.

[0107] In some implementation manners, the speckle intensity of the target illumination spot can be monitored in real time through an imaging system.

[0108] Specifically, a high-resolution camera or detector is used to obtain the light intensity distribution of the illumination spot, and the intensity and distribution of the speckles are analyzed. For example, statistical analysis or image processing algorithms (such as Fourier transform) can be used to quantify the speckle intensity.

[0109] S220. When the speckle intensity does not reach the preset standard, increase the distance between multiple reflectors and the point to be illuminated.

[0110] The preset standard is a standard or threshold used to evaluate the speckle intensity or spot quality during the beam adjustment process.

[0111] Exemplarily, the preset standard is that the root mean square value of the speckle intensity ≤ 0.1.

[0112] When the speckle intensity does not reach the preset standard, the intensity of the speckles can be reduced by adjusting the distance between multiple reflectors and the point to be illuminated.

[0113] Since multiple reflectors are arranged along the same straight line, the distance between each reflector and the point to be illuminated can be uniformly increased, or the vertical distance between the optical path of the incident beam and the point to be illuminated can be adjusted.

[0114] It should be understood that when executing S220, S120 needs to be re-executed to adjust the placement angle and / or placement position of the reflectors.

[0115] In some implementation manners, a precision mechanical device can be used to gradually increase the distance between the reflector and the point to be illuminated until the speckle condition reaches the preset standard. This adjustment process can be completed through an automated control system to further improve the adjustment accuracy and system flexibility.

[0116] In the above method, when the speckle condition does not meet the preset requirements, by increasing the distance between the reflector and the point to be illuminated, the optical path difference can be effectively increased, thereby increasing the influence of the optical path difference on the laser beam, and further reducing the speckle intensity.

[0117] In some embodiments, the present application provides a method for adjusting a beam, which may further include the following steps:

[0118] Adjust the reflectivity of multiple reflectors so that the energy difference between multiple reflected light beams is less than a preset energy threshold.

[0119] Exemplarily, along the emission direction of the incident light beam, the reflectivity of the mirror gradually increases. Through this adjustment, the mirrors at different positions can more evenly distribute the energy of the reflected light beam emitted, avoiding the non-uniformity caused by excessive energy differences.

[0120] When the energy of each reflected light ray tends to be consistent, this can effectively weaken the coherence of the light spot finally formed at the point to be illuminated. By decomposing a laser beam into multiple laser beams, it is actually equivalent to superposing multiple mutually independent and relatively consistent-energy speckles, thereby reducing the contrast of the speckles. For example, if the laser beam is divided into n light rays, the contrast of the speckles will be weakened to

[0121] By adjusting the reflectivity of the mirror to minimize the energy difference of each reflected light ray, the uniformity of the light spot can be effectively guaranteed, avoiding the non-uniformity of the light spot or the fluctuation of the speckle intensity caused by excessive energy differences. This adjustment method can improve the suppression effect of the speckles, thereby improving the accuracy and stability of the final wafer defect detection.

[0122] Based on the method of adjusting the light beam. Correspondingly, Figure 2 The structural schematic diagram of a system for adjusting a light beam provided by an embodiment of the present application is shown.

[0123] As Figure 2 shown, the system 1000 for adjusting a light beam provided by an embodiment of the present application may include a beam splitting system 1001 and a shaping system 1002.

[0124] The beam splitting system 1001 includes a plurality of mirrors, which are arranged on the optical path of the incident light beam and form different angles with the optical path of the incident light beam, and are used to receive the incident light beam from the light source and split the incident light beam into multiple reflected light rays.

[0125] The shaping system 1002 includes a plurality of cylindrical lenses. Each cylindrical lens among the plurality of cylindrical lenses is respectively arranged on the optical path of the multiple reflected light rays and is used to convert the corresponding reflected light ray into a line light spot, and the multiple line light spots converge into a target illumination light spot at the point to be illuminated.

[0126] Figure 3 The structural schematic diagram of a system for adjusting a light beam provided by an embodiment of the present application is shown.

[0127] Figure 3 It can be regarded as a specific example of the system for adjusting a light beam. In combination with Figure 3 the system for adjusting a light beam in, the method for adjusting a light beam introduced above is specifically described.

[0128] In Figure 3 the example shown, the system for adjusting a light beam includes 4 mirrors and 4 cylindrical lenses.

[0129] 1, 2, and 3 are all partial mirrors, and 4 is a total mirror.

[0130] 1 is a first type of partial mirror, and 2 and 3 are second type of partial mirrors.

[0131] 5, 6, 7, and 8 are all cylindrical lenses.

[0132] Ray A is an example of an incident light beam.

[0133] Ray A1 is an example of a first reflected ray. Ray B1 is an example of a first transmitted ray.

[0134] Rays A2 and A3 are both examples of second reflected rays. Rays B2 and B3 are both examples of second transmitted rays.

[0135] Ray B4 is an example of a third transmitted ray.

[0136] Cylindrical lens 5 corresponds to mirror 1 and is used to convert the ray B1 reflected by mirror 1 into a line spot V1.

[0137] Cylindrical lens 6 corresponds to mirror 2 and is used to convert the ray B2 reflected by mirror 2 into a line spot V2.

[0138] Cylindrical lens 7 corresponds to mirror 3 and is used to convert the ray B3 reflected by mirror 3 into a line spot V3.

[0139] Cylindrical lens 8 corresponds to mirror 4 and is used to convert the ray B4 reflected by mirror 4 into a line spot V4.

[0140] The line spots V1, V2, V3, and V4 converge into a target illumination spot at the point to be illuminated.

[0141] ∠a can be regarded as an example of the placement angle of mirror 1.

[0142] The optical path of ray A can be regarded as an example of the optical path of the incident light beam.

[0143] According to the method for adjusting a light beam provided by the embodiments of the present application.

[0144] Mirrors 1, 2, 3, and 4 are arranged on the optical path of ray A to divide ray A into rays B1, B2, B3, and B4.

[0145] According to the position of the point to be illuminated, adjust the placement position and placement angle of mirrors 1, 2, 3, and 4 so that rays B1, B2, B3, and B4 intersect at the point to be illuminated.

[0146] Cylindrical mirrors 5, 6, 7, and 8 are respectively arranged on the optical paths of light rays B1, B2, B3, and B4 to convert the light rays B1, B2, B3, and B4 into line-shaped light spots V1, V2, V3, and V4, and the line-shaped light spots V1, V2, V3, and V4 converge into a target illumination light spot at the point to be illuminated.

[0147] Based on the method of adjusting the light beam. Correspondingly, the present application also provides a specific embodiment of the electronic device.

[0148] Figure 4 FIG. shows a schematic hardware structure diagram of the electronic device provided by the embodiment of the present application.

[0149] The electronic device may include a processor 7001 and a memory 7002 storing computer program instructions.

[0150] Specifically, the above-mentioned processor 7001 may include a central processing unit (CPU), or an application specific integrated circuit (ASIC), or one or more integrated circuits configured to implement the embodiments of the present application.

[0151] The memory 7002 may include a mass storage for data or instructions. By way of example and not limitation, the memory 7002 may include a hard disk drive (HDD), a floppy disk drive, a flash memory, an optical disc, a magneto-optical disc, a magnetic tape, or a universal serial bus (USB) drive, or a combination of two or more of these. In a suitable case, the memory 7002 may include removable or non-removable (or fixed) media. In a suitable case, the memory 7002 may be internal or external to the integrated gateway disaster recovery device. In a specific embodiment, the memory 7002 is a non-volatile solid state memory.

[0152] The processor 7001 reads and executes the computer program instructions stored in the memory 7002 to implement any one of the methods of adjusting the light beam in the above embodiments.

[0153] In one example, the electronic device may further include a communication interface 7003 and a bus 7004. Among them, as Figure 4 shown, the processor 7001, the memory 7002, and the communication interface 7003 are connected through the bus 7004 and complete communication with each other.

[0154] The communication interface 7003 is mainly used to implement communication between various modules, devices, units, and / or devices in the embodiments of the present application.

[0155] The bus 7004 includes hardware, software, or both, and couples the components of the electronic device to each other. By way of example and not limitation, the bus may include an Accelerated Graphics Port (AGP) or other graphics bus, an Enhanced Industry Standard Architecture (EISA) bus, a Front Side Bus (FSB), a HyperTransport (HT) interconnect, an Industry Standard Architecture (ISA) bus, an InfiniBand interconnect, a Low Pin Count (LPC) bus, a memory bus, a MicroChannel Architecture (MCA) bus, a Peripheral Component Interconnect (PCI) bus, a PCI-Express (PCI-X) bus, a Serial Advanced Technology Attachment (SATA) bus, a Video Electronics Standards Association Local (VLB) bus, or other suitable buses, or a combination of two or more of these. Where appropriate, the bus 7004 may include one or more buses. Although embodiments of the present application describe and illustrate specific buses, the present application contemplates any suitable bus or interconnect.

[0156] In addition, in combination with the method for adjusting a light beam in the above embodiments, an embodiment of the present application can be implemented by providing a computer storage medium. Computer program instructions are stored on the computer storage medium; when the computer program instructions are executed by a processor, any one of the methods for adjusting a light beam in the above embodiments is implemented.

[0157] In addition, in combination with the method for adjusting a light beam in the above embodiments, an embodiment of the present application can be implemented by providing a computer program product. When the instructions in the computer program product are executed by a processor of an electronic device, the electronic device is caused to execute the method for adjusting a light beam provided in any aspect of the above embodiments of the present application.

[0158] It should be clear that the present application is not limited to the specific configurations and processes described above and illustrated in the figures. For the sake of brevity, detailed descriptions of known methods are omitted here. In the above embodiments, several specific steps are described and illustrated as examples. However, the method process of the present application is not limited to the specific steps described and illustrated, and those skilled in the art can make various changes, modifications, and additions, or change the order between steps after understanding the spirit of the present application.

[0159] The functional blocks shown in the above-described structural block diagrams can be implemented as hardware, software, firmware, or a combination thereof. When implemented in hardware, it can be, for example, an electronic circuit, an application-specific integrated circuit (ASIC), appropriate firmware, a plug-in, a functional card, and so on. When implemented in software, the elements of the present application are programs or code segments for performing the required tasks. The program or code segment can be stored in a machine-readable medium or transmitted via a data signal carried in a carrier wave on a transmission medium or a communication link. A "machine-readable medium" can include any medium that can store or transmit information. Examples of machine-readable media include electronic circuits, semiconductor memory devices, ROM, flash memory, erasable ROM (EROM), floppy disks, CD-ROMs, optical discs, hard disks, fiber optic media, radio frequency (RF) links, and so on. The code segment can be downloaded via a computer network such as the Internet, an intranet, and so on.

[0160] It should also be noted that the exemplary embodiments mentioned in the present application describe some methods or systems based on a series of steps or devices. However, the present application is not limited to the order of the above steps, that is, the steps can be executed in the order mentioned in the embodiments, can be different from the order in the embodiments, or several steps can be executed simultaneously.

[0161] Aspects of the present disclosure have been described above with reference to the flowcharts and / or block diagrams of methods, apparatuses (systems), and computer program products according to embodiments of the present disclosure. It should be understood that each block in the flowcharts and / or block diagrams, and the combinations of blocks in the flowcharts and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, or other programmable data processing device to produce a machine, such that the instructions executed by the processor of the computer or other programmable data processing device enable the implementation of the functions / actions specified in one or more blocks of the flowcharts and / or block diagrams. Such a processor can be, but is not limited to, a general-purpose processor, a special-purpose processor, a special application processor, or a field-programmable logic circuit. It can also be understood that each block in the block diagrams and / or flowcharts, and the combinations of blocks in the block diagrams and / or flowcharts, can also be implemented by dedicated hardware for performing the specified functions or actions, or by a combination of dedicated hardware and computer instructions.

[0162] As described above, this is only the specific implementation manner of the present application. Those skilled in the art can clearly understand that for the convenience and brevity of description, the specific working processes of the systems, modules, and units described above can refer to the corresponding processes in the foregoing method embodiments, and will not be elaborated herein. It should be understood that the protection scope of the present application is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present application can easily think of various equivalent modifications or substitutions, and these modifications or substitutions should all be covered within the protection scope of the present application.

Claims

1. A method for adjusting a light beam, characterized in that: include: A plurality of reflectors are arranged on the optical path of the incident light beam, and the plurality of reflectors are used to receive the incident light beam and divide the incident light beam into a plurality of reflected light beams; According to the position of the point to be illuminated, adjusting the placement position and placement angle of the multiple reflectors so that the light paths of the multiple beams of reflected light intersect at the point to be illuminated; Cylindrical mirrors are respectively arranged on the optical paths of the multiple beams of reflected light, and each of the cylindrical mirrors is used to convert its corresponding reflected light into a line light spot, and the multiple line light spots converge into a target illumination light spot at the point to be illuminated.

2. The method according to claim 1, characterized in that The plurality of reflectors include a total reflector and a plurality of partial reflectors, the plurality of partial reflectors include at least one first type of partial reflector and at least one second type of partial reflector; The multiple reflectors are arranged on the optical path of the incident light beam, including: Disposing the first type of partial reflector, the second type of partial reflector and the total reflector on the optical path of the incident light beam; The first type of partial reflector is used to receive the incident light beam and emit a first reflected light and a first transmitted light; the second type of partial reflector is used to receive the first transmitted light and emit a second reflected light and a second transmitted light; the total reflector is used to receive the second transmitted light and emit a third reflected light.

3. The method according to claim 1, characterized in that The plurality of reflectors include a total reflector and a partial reflector; The multiple reflectors are arranged on the optical path of the incident light beam, including: Disposing the partial reflector and the total reflector on the optical path of the incident light beam; The partial reflector is used to receive the incident light beam and emit a fourth reflected light beam and a fourth transmitted light beam; the total reflector is used to receive the fourth transmitted light beam and emit a fifth reflected light beam.

4. The method according to any one of claims 1 to 3, characterized in that The method further comprises: For each reflected light beam in the multiple reflected light beams, a beam expander is arranged on the optical path of the reflected light beam. The beam expander is located between the reflector and the cylindrical mirror corresponding to the reflected light beam and is used to expand the reflected light beam.

5. The method according to any one of claims 1 to 3, characterized in that The method further comprises: Acquiring the speckle intensity of the target illumination spot; When the speckle intensity does not reach a preset standard, the distance between the plurality of reflectors and the point to be illuminated is increased.

6. The method according to any one of claims 1 to 3, characterized in that The method further comprises: The reflectivities of the multiple reflectors are adjusted so that the energy difference of the multiple beams of reflected light is less than a preset energy threshold.

7. A system for adjusting a light beam, characterized in that: comprising a plurality of reflectors and a plurality of cylindrical mirrors; The multiple reflectors are arranged on the optical path of the incident light beam and at different angles with the optical path of the incident light beam, and are used to receive the incident light beam from the light source and divide the incident light beam into multiple reflected light beams; Each of the multiple cylindrical mirrors is respectively arranged on the optical path of the multiple beams of reflected light, and is used to convert the corresponding reflected light into a line light spot. The multiple line light spots converge into a target illumination light spot at the point to be illuminated.

8. The system according to claim 7, characterized in that The multiple reflectors include a total reflector and a plurality of partial reflectors, the multiple partial reflectors include a first partial reflector and a second partial reflector, the first partial reflector, the second partial reflector and the total reflector are sequentially arranged on the optical path of the incident light beam; The first partial reflector is used to receive the incident light beam and emit a first reflected light beam and a first transmitted light beam; The second partial reflector is used to receive the first transmitted light and emit a second reflected light and a second transmitted light; The total reflection mirror is used to receive the second transmitted light and emit the third reflected light.

9. An electronic device, characterized in that: The device comprises: a processor and a memory storing computer program instructions; When the processor executes the computer program instructions, the method for adjusting a light beam according to any one of claims 1 to 6 is implemented.

10. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores computer program instructions, and when the computer program instructions are executed by a processor, the method for adjusting a light beam according to any one of claims 1 to 6 is implemented.

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