Heavy load displacement adjusting mechanism

Abstract

The invention relates to the technical field of semiconductor equipment, and discloses a heavy load displacement adjusting mechanism, which comprises a first plate body, a second plate body and a third plate body, the first floating part is provided with a first pressing piece; an output shaft of the first driving piece is connected with the first connecting part; the first connecting part is pressed and fixed on the first plate body by the first pressing piece; the pressing force of the first pressing piece is adjustable; the second floating part is provided with a second pressing piece; an output shaft of the second driving piece is connected with the second connecting part; the second connecting part is pressed and fixed on the second plate body by the second pressing piece; the pressing force of the second pressing piece is adjustable; according to the heavy-load displacement adjusting mechanism, the driving piece and the plate body are in floating connection through the floating part, the floating part can solve the problems of jamming and mechanical jamming in the displacement process through pressure relief and pressurization adjustment, the precision of heavy-load structure displacement adjustment is guaranteed, and the purpose of heavy-load precise adjustment is achieved; and the requirements of heavy load and high-precision precise displacement adjustment are met.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and particularly relates to a heavy-load displacement adjustment mechanism. Background Art

[0002] In the field of semiconductor chip processing, the smaller the feature size of the chip, the higher the integration degree and the better the performance of the chip; the smaller the chip, the more precise the line lithography, and the higher the requirements for the illumination lens; the illumination lens ensures the line precision by increasing the magnification, resulting in a significant increase in the volume and weight of the illumination lens.

[0003] In the prior art, a heavy-load adjustment mechanism is usually used to adjust the fixed position of the lens, and the adjustment directions are at least two mutually perpendicular directions in the same horizontal plane, specifically the first direction and the second direction. The first direction corresponds to the y direction, and the second direction corresponds to the x direction; due to the significant increase in the weight of the illumination lens, when adjusting the position of the illumination lens, it is extremely easy for the connecting parts, driving structures, and other positions of the heavy-load adjustment mechanism to generate jamming and mechanical jamming phenomena, making it difficult to achieve precise displacement of the heavy-load illumination lens and affecting the quality of the dimension adjustment work of the illumination lens. Summary of the Invention

[0004] In view of this, the present invention provides a heavy-load displacement adjustment mechanism to solve the problem that it is difficult to achieve precise position adjustment of a heavy-load illumination lens on the adjustment mechanism.

[0005] The present invention provides a heavy-load displacement adjustment mechanism, including: a first plate body and a second plate body that are at least partially stacked and slidably connected in sequence; a first floating part fixed to the first plate body, the first floating part having a first pressing member, and the pressing force of the first pressing member being adjustable; a first driving member fixed to the second plate body; a first connecting part connected to the first driving member; the first connecting part is pressed by the first pressing member and is floatingly connected to the first plate body; in the normal state, the first connecting part is pressed and fixed to the first plate body by the first pressing member, and the first driving member is adapted to drive the first plate body to move; in the first abnormal state, the first pressing member adjusts the pressing force acting on the first connecting part, and is adapted to make the first connecting part loose or re-press with the first plate body.

[0006] Beneficial effect: The floating part floats and presses the connecting part against the plate body, thereby making the driving part float and connect to the plate body. The floating part can change the floating pressing force acting on the connecting part, thereby solving the jamming and mechanical jamming during the movement by adding or subtracting pressure, and increasing or reducing pressure to avoid loosening of the connecting part and thus reducing the transmission sensitivity. The precision of heavy-load structures such as lighting lenses during displacement adjustment is always guaranteed, and the purpose of heavy-load precision adjustment is achieved, taking into account both the heavy-load demand and the high-precision precision displacement adjustment demand, achieving both, and having a strong use effect. In addition, the floating part provides an initial preload force acting on the connecting part, effectively eliminating the mechanical clearance error, reducing the drive displacement return amount, and driving the precision transition.

[0007] Beneficial effects: The connecting part is composed of a release part and a driving part, so that the connecting part is provided with a release function. The release part is floated and pressed to the plate body by the floating part in normal use. When an emergency situation occurs and cannot be adjusted and restored with the help of the floating part, the release part will withdraw from the floating part and the plate body in time, and then directly disconnect the connection between the driving part and the plate body to prevent structural damage. The emergency release mechanism can quickly cut off the connection between the driving end and the transmission end, effectively eliminating system risks.

[0008] Beneficial effect: The first clamping member cooperates with the fourth driving member, and the second clamping member cooperates with the third driving member. By linking the force-applying elements with the same force direction, the control accuracy of the mechanism is improved, and the safety of system operation is improved to prevent any single force-applying element from losing control or insufficient force to cause a risk of failure. At the same time, a buckle and a compensation mechanism are provided in the linkage mechanism. The buckle controls the connection and disconnection of the linkage mechanism, so that the clamping member and the driving member work independently of each other under normal conditions. When one of them fails, the linkage is set up. The compensation mechanism is used to compensate for the pressure transmitted by the clamping member or the linkage member during the linkage process, to prevent the linkage force from affecting its own working state, and to ensure the normal realization of the driving and clamping functions.

[0009] In an optional embodiment, it also includes: a third plate body, slidably connected to the side of the second plate body facing away from the first plate body; a second floating part, fixed to the second plate body, the second floating part has a second clamping member, and the clamping force of the second clamping member is adjustable; a second driving member, fixed to the third plate body; a second connecting part, connected to the second driving member; the second connecting part is pressed by the second clamping member and floatingly connected to the second plate body; in a normal state, the second connecting part is clamped and fixed to the second plate body by the second clamping member, and the second driving member is suitable for driving the second plate body to move; in the first abnormal state, the second clamping member adjusts the clamping force acting on the second connecting part), which is suitable for loosening or re-tightening the second connecting part and the second plate body.

[0010] In an alternative embodiment, the first connecting portion includes a third driving member and a first disengaging member. The third driving member is fixedly connected to the output shaft of the first driving member. In a normal state, the first disengaging member is floatingly connected to the first plate body by means of the first floating portion. The third driving member is connected to the first disengaging member. In a second abnormal state, the third driving member drives the first disengaging member to move so as to disengage it from the first floating portion and the first plate body.

[0011] In an alternative embodiment, the first disengaging member has a first large end and a first small end. The size of the first large end in a first direction is greater than that of the first small end. In a normal state, the first large end is pressed by the first pressing member and is floatingly connected to the first plate body. In a second abnormal state, the first disengaging member moves, the first large end disengages from the first pressing member and the first plate body, and the first small end is disposed at an interval between the first pressing member and the first plate body, being adapted to disconnect the connection between the first driving member and the first plate body.

[0012] In an alternative embodiment, the second connecting portion includes a fourth driving member and a second disengaging member. The fourth driving member is fixedly connected to the output shaft of the second driving member. In a normal state, the second disengaging member is floatingly connected to the second plate body by means of the second floating portion.

[0013] The fourth driving member is connected to the second disengaging member. In a second abnormal state, the fourth driving member drives the second disengaging member to move so as to disengage it from the second floating portion and the second plate body.

[0014] In an alternative embodiment, the second disengaging member has a second large end and a second small end. The size of the second large end in a second direction is greater than that of the second small end. In a normal state, the second large end is pressed by the second pressing member and is floatingly connected to the second plate body. In a second abnormal state, the second disengaging member moves, the second large end disengages from the second pressing member and the second plate body, and the second small end is disposed at an interval between the second pressing member and the second plate body, being adapted to disconnect the connection between the second driving member and the second plate body.

[0015] In an alternative embodiment, the first pressing member and the fourth driving member are connected by means of a linkage system. The second pressing member and the third driving member are connected by means of a linkage system. A connection switch and a compensation structure are provided in the linkage system. The connection switch is adapted to disconnect or connect the linkage system, and the compensation mechanism is adapted to compensate for pressure.

[0016] In an alternative embodiment, the direction of the pressing force of the first pressing member is parallel to the first direction, and the direction of the pressing force of the second pressing member is parallel to the second direction; in the normal state, the first driving member drives the first plate body to move along the first direction, and the second driving member drives the second plate body to move along the second direction.

[0017] In an alternative embodiment, a first relief groove is provided at the first large end, and the output shaft of the third driving member is in contact with the inner wall of the first relief groove; in the second abnormal state, the first disengaging member moves, and the first relief groove gradually fits over the third driving member.

[0018] In an alternative embodiment, a second relief groove is provided at the second large end, and the output shaft of the fourth driving member is in contact with the inner wall of the second relief groove; in the second abnormal state, the second disengaging member moves, and the second relief groove gradually fits over the fourth driving member.

[0019] In an alternative embodiment, it further includes: a first slide rail, sandwiched between the first plate body and the second plate body and extending along the first direction, adapted to enable the first plate body to slide relative to the second plate body along the first direction; the first slide rail includes a first slideway and a plurality of first sliders slidably connected to the first slideway; at least one of the first sliders is connected to the first disengaging member; at least one of the first sliders is connected to the first disengaging member by means of a third slide rail extending along the second direction.

[0020] In an alternative embodiment, it further includes: a second slide rail, sandwiched between the second plate body and the third plate body and extending along the second direction, adapted to enable the second plate body to slide relative to the third plate body along the second direction; the second slide rail includes a second slideway and a plurality of second sliders slidably connected to the second slideway; at least one of the second sliders is connected to the second disengaging member; at least one of the second sliders is connected to the second disengaging member by means of a fourth slide rail extending along the first direction.

[0021] In an alternative embodiment, a groove is provided on one side of the first plate body along the second direction, and the two end faces of the first large end along the first direction are respectively in contact with the inner wall of the groove and the first pressing member; the second plate body is formed with a protrusion; in the normal state, the two end faces of the second large end along the second direction are respectively in contact with the protrusion and the second pressing member.

[0022] In an alternative embodiment, the first floating portion further has a first connecting member, the first connecting member is fixed to the first plate body, and the first pressing member is disposed at the first connecting member; the second floating portion further has a second connecting member, the second connecting member is fixed to the second plate body, and the second pressing member is disposed at the second connecting member.

[0023] In a second aspect, the present invention provides an electronic device electrically connected to the heavy-duty displacement adjustment mechanism described in any one of the above. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for use in the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0025] Figure 1 Schematic diagram of the heavy-duty displacement adjustment mechanism of the present invention;

[0026] Figure 2 Exploded view of the heavy-duty displacement adjustment mechanism of the present invention along the first direction;

[0027] Figure 3 Exploded view of the heavy-duty displacement adjustment mechanism of the present invention along the second direction;

[0028] Figure 4 Schematic diagram of the heavy-duty displacement adjustment mechanism of the present invention in the disengaged state;

[0029] Figure 5 Top view schematic diagram of the heavy-duty displacement adjustment mechanism of the present invention in the disengaged state;

[0030] Figure 6 Schematic diagram of the third rail and the fourth rail of the present invention;

[0031] Figure 7 Schematic diagram of the first connecting portion of the present invention;

[0032] Figure 8 Schematic diagram of the heavy-duty displacement adjustment mechanism of the present invention in the linked state;

[0033] Figure 9 Schematic diagram of the second disengaging method of the disengaging member of the heavy-duty displacement adjustment mechanism of the present invention;

[0034] Figure 10 Schematic diagram of the third disengaging method of the disengaging member of the heavy-duty displacement adjustment mechanism of the present invention;

[0035] Figure 11This is a schematic diagram of the second floating connection method of the heavy-load displacement adjustment mechanism of the present invention.

[0036] Description of the reference numerals:

[0037] 1. First plate body; 2. Second plate body; 3. Third plate body; 4. First floating part; 41. First pressing member; 42. First connecting member; 5. First driving member; 6. First connecting part; 61. Third driving member; 62. First disengaging member; 621. First large end; 622. First small end; 623. First relief groove; 7. Second floating part; 71. Second pressing member; 72. Second connecting member; 8. Second driving member; 9. Second connecting part; 91. Fourth driving member; 92. Second disengaging member; 921. Second large end; 922. Second small end; 923. Second relief groove; 10. First slide rail; 101. First slideway; 102. First slider; 11. Second slide rail; 111. Second slideway; 112. Second slider; 12. Groove; 13. Protrusion; 14. Third slide rail; 15. Fourth slide rail. Detailed implementation manners

[0038] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Apparently, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0039] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0040] In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0041] In addition, the technical features involved in different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0042] The embodiments of the present invention will be described below in conjunction with Figures 1 to 11 .

[0043] In a first aspect, an embodiment of the present invention provides a heavy-duty displacement adjustment mechanism, which includes a first plate body 1, a second plate body 2, and a third plate body 3 that are at least partially stacked and slidably connected in sequence. It also includes a first driving member 5 and a second driving member 8 for driving the movement of the plate bodies, a first connecting portion 6 and a second connecting portion 9 for connecting the driving members to the plate bodies and for emergency disengagement, and a first floating portion 4 and a second floating portion 7 for floatingly connecting the connecting portions to the plate bodies; in this embodiment, the output shaft of the driving portion is floatingly connected to the plate body. By changing the magnitude of the pressing force at the connecting portion, the adjustment structure can solve the problems of jamming and mechanical jamming during movement through loosening and pressing, and increase the pressure to avoid loosening at the connecting portion and thus reduce the transmission sensitivity, always ensuring the precision of the heavy-duty structure during displacement adjustment and achieving the purpose of heavy-duty precise adjustment.

[0044] It should be noted that the connecting portion is floatingly connected to the plate body by means of a pressing member at the floating portion. The floating connection can provide a relaxation buffer amount for the adjustment mechanism during movement and adaptively adjust the jamming and mechanical jamming phenomena.

[0045] The first connecting portion 6 includes a third driving member 61 and a first disengaging member 62. The first floating portion 4 includes a first connecting member 42 and a first pressing member 41; the first pressing member 41 is fixed to the first plate body 1 by means of the first connecting member 42; the first disengaging member 62 includes a first large end 621 and a first small end 622, and the dimension of the first large end 621 in the first direction is greater than that of the first small end 622; wherein, the output shaft of the third driving member 61 is fixed to the first disengaging member 62, and the base body of the third driving member 61 is fixed to the output shaft of the first driving member 5. In this embodiment, the first large end 621 is arranged close to the base body, and the output shaft of the third driving member 61 is arranged parallel to the second direction; when the adjustment mechanism is in a normal use state, the first pressing member 41 presses and abuts against one end face of the first large end 621 along the first direction, and at the same time, the other end face of the first large end 621 along the first direction abuts against the first plate body 1, so that the first disengaging member 62 is tightly connected to the first plate body 1; the magnitude of the pressing force of the first pressing member 41 is adjustable, and the first disengaging member 62 is floatingly pressed against the first plate body 1, and further, the first driving member 5 is floatingly connected to the first plate body 1.

[0046] The second connecting portion 9 includes a fourth driving member 91 and a second disengaging member 92, and the second floating portion 7 includes a second connecting member 72 and a second pressing member 71; the second pressing member 71 is fixed to the second plate body 2 by means of the second connecting member 72; the second disengaging member 92 includes a second large end 921 and a second small end 922, and the dimension of the second large end 921 in the second direction is greater than that of the second small end 922; wherein, the output shaft of the third driving member 61 is fixed to the second disengaging member 92, and the base body of the third driving member 61 is fixed to the output shaft of the second driving member 8. In this embodiment, the second large end 921 is arranged close to the base body, and the output shaft of the fourth driving member 91 is arranged parallel to the first direction; when the adjusting mechanism is in a normal use state, the second pressing member 71 presses and abuts against one end face of the second large end 921 along the second direction, and at the same time, the other end face of the second large end 921 along the second direction abuts against the second plate body 2, so that the second disengaging member 92 is tightly connected to the second plate body 2; the magnitude of the pressing force of the second pressing member 71 is adjustable, and the second disengaging member 92 is floatingly pressed against the second plate body 2, and further, the second driving member 8 is floatingly connected to the second plate body 2.

[0047] Further, the acting directions of the first pressing member 41 and the fourth driving member 91 are both the first direction, and the first pressing member 41 and the fourth driving member 91 are linked by means of a mechanical structure; the acting directions of the second pressing member 71 and the third driving member 61 are both the second direction, and the second pressing member 71 and the third driving member 61 are linked by means of a mechanical structure; the mechanical structure can be, but is not limited to, directly connected structural forms such as hinges, slide rails, and mechanical direct connections; a connection switch and a compensation mechanism are provided in the mechanical structure, and the connection switch can be a fully automatic disengaging connection buckle to automatically control the connection or disconnection of the linkage structure according to actual conditions.

[0048] It should be noted that the adjustment direction of the adjusting mechanism is at least two mutually perpendicular directions in the same horizontal plane, specifically, the first direction and the second direction. Among them, the first direction corresponds to the y direction, and the second direction corresponds to the x direction.

[0049] It should be noted that the base body of the first driving member 5 is fixed to the second plate body 2, and the output shaft is floatingly connected to the first plate body 1 for driving the first plate body 1 to move in the y direction; the base body of the second driving member 8 is fixed to the third plate body 3, and the output shaft is floatingly connected to the second plate body 2 for driving the second plate body 2 and the first plate body 1 to move in the x direction.

[0050] The specific working process of the overload displacement adjustment mechanism is as follows. On the one hand, during the process of the first plate body 1 adjusting its displacement along the first direction, i.e., the y direction, due to the relatively large weight of the lens, mechanical jamming may occur at the first driving member 5. In the first abnormal state, that is, when there is a tendency of jamming or mechanical jamming at the first driving member 5, the first floating part 4 immediately performs a loosening and pressing adjustment, reducing the pressing force of the first pressing member 41, alleviating the pressing effect on the first large end 621, loosening the connection between the first driving member 5 and the first plate body 1. The degree of loosening depends on specific circumstances. The first driving member 5 obtains a relaxation buffer amount along the first direction, and uses this relaxation buffer amount to eliminate or alleviate jamming and mechanical jamming phenomena. Subsequently, the pressure of the first pressing member 41 is slowly increased again, so that the first pressing member 41 is re-pressed against the first large end 621, and the displacement adjustment work along the first direction and the y direction is carried out again. On the other hand, during the process of the second plate body 2 driving the second plate body 2 to adjust its displacement along the first direction, i.e., the x direction, due to the relatively large weight of the lens, mechanical jamming may occur at the second driving member 8. When there is a tendency of jamming or mechanical jamming at the second driving member 8, the second floating part 7 immediately performs a loosening and pressing adjustment, reducing the pressing force of the second pressing member 71, alleviating the pressing effect on the second large end 921, loosening the connection between the second driving member 8 and the second plate body 2. The degree of loosening depends on specific circumstances. The second driving member 8 obtains a relaxation buffer amount along the second direction, and uses this relaxation buffer amount to eliminate or alleviate jamming and mechanical jamming phenomena. Subsequently, the pressure of the second pressing member 71 is slowly increased again, so that the second pressing member 71 is re-pressed against the second large end 921, and the displacement adjustment work along the second direction and the x direction is carried out again. On the other hand, the floating part is pre-pressed at the connecting part, so that an initial pre-tightening force is obtained at the connecting part between the driving member and the plate body, which can effectively eliminate mechanical clearance errors, reduce the driving displacement return amount, and achieve a leap in mechanical precision.

[0051] Furthermore, when the connection between the driving member and the plate body is slightly loosened, the pressing member at the floating part can timely increase the pressing force acting on the disengaging part, so that the connection between the driving part and the plate body is always kept stable, preventing the reduction of transmission sensitivity and ensuring displacement accuracy.

[0052] It should be noted that a pressure sensor is provided at the pressing member for real-time detection of the pressure relationship between the pressing member and the disengaging part, and a displacement sensor is provided at the plate body for real-time detection of the movement displacement state of the plate body.

[0053] The working process of the disengaging structure of the overload displacement adjusting mechanism is as follows. In the second abnormal state, that is, in the case of an emergency risk situation, it is necessary to disconnect the connection between the driving member and the plate body by means of the disengaging structure. On the one hand, when a risk situation is encountered during the displacement adjustment work in the first direction, the third driving member 61 is activated. The output shaft of the third driving member 61 contracts and drives the first disengaging member 62 to retreat from the first plate body 1 and the first pressing member 41. The first large end 621 disengages from the floating connection with the first plate body 1 and the first pressing member 41, and the first small end 622 is placed in the gap between the first pressing member 41 and the first plate body 1, thereby disconnecting the connection between the first driving member 5 and the first plate body 1. The first plate body 1 is in a free state, and the emergency disengagement process is completed. On the other hand, when a risk situation is encountered during the displacement adjustment work in the second direction, the fourth driving member 91 is activated. The output shaft of the fourth driving member 91 contracts and drives the second disengaging member 92 to retreat from the second plate body 2 and the second pressing member 71. The second large end 921 disengages from the floating connection with the second plate body 2 and the second pressing member 71, and the second small end 922 is placed in the gap between the second pressing member 71 and the second plate body 2, thereby disconnecting the connection between the second driving member 8 and the second plate body 2. The second plate body 2 is in a free state, and the emergency disengagement process is completed.

[0054] It should be noted that the first abnormal state is a state that can be adaptively restored through floating connection, such as mechanism jamming or mechanical locking; the second abnormal state is other working conditions that cannot be automatically adjusted and restored through floating connection during the displacement adjustment process of the adjustment mechanism, and manual or other methods are required to correct and reset.

[0055] The working process of the linkage structure of the overload displacement adjusting mechanism is as follows. The pressing member and the disengaging driving member are linked by a mechanical structure to improve the control accuracy of the mechanism and the safety of the system operation, and prevent the risk of failure caused by any single force-applying element getting out of control or having insufficient force. In the normal working state, the buckle is disengaged and the linkage structure is disconnected. The first pressing member 41 and the fourth driving member 91 operate independently, and the second pressing member 71 and the third driving member 61 operate independently, respectively undertaking the corresponding driving work. When an emergency occurs, the emergency can be that one of the pressing member and the disengaging driving member is stuck or does not operate, that is, a special situation where part or all of the power of one party in the linkage system fails. The buckle is automatically connected, and the pressing member and the disengaging driving member are linked, and then an auxiliary driving or pressing operation is performed on the failed party, adding a force in the same direction to the place with insufficient force or the failed place. At the same time, the compensation mechanism can compensate the pressure transmitted during the linkage process for the pressing member or the linkage member in the force-applying party, preventing the influence of the linkage on its own working state and ensuring the normal realization of the driving and pressing functions.

[0056] The auxiliary displacement structure of the overload displacement adjustment mechanism is a slide rail, including a first slide rail 10, a second slide rail 11, a third slide rail 14 and a fourth slide rail 15. Among them, the first slide rail 10 and the second slide rail 11 are used to realize the relative movement between the plate bodies, and the third slide rail 14 and the fourth slide rail 15 are used to assist the movement of the ejection member; the first slide rail 10 is clamped between the first plate body 1 and the second plate body 2 and extends along the first direction. The first slide rail 10 cooperates with the first driving member 5 to realize the sliding of the first plate body 1 relative to the second plate body 2 along the first direction; the second slide rail 11 is clamped between the second plate body 2 and the third plate body 3 and extends along the second direction. The second slide rail 11 cooperates with the second driving member 8 to realize the sliding of the second plate body 2 relative to the third plate body 3 along the second direction. At the same time, the second plate body 2 drives the first plate body 1 to slide synchronously along the second direction; the first slide rail 10 includes a first slideway 101 and a first slider 102. The first slide rail 10 is fixed to the side plate surface of the second plate body 2 close to the first plate body 1. A plurality of first sliders 102 are slidably connected to the first slide rail 10. One of the first sliders 102 is connected to the first ejection member 62, and the rest of the first sliders 102 are fixed to the plate surface of the first plate body 1. Among them, the first ejection member 62 is connected to the first slider 102 by means of the third slide rail 14. The third slide rail 14 extends along the second direction to ensure the stability of the connection between the first ejection member 62 and the plate body, and at the same time assist the movement of the first ejection member 62; the second slide rail 11 includes a second slideway 111 and a second slider 112. The second slide rail 11 is fixed to the side plate surface of the third plate body 3 close to the second plate body 2. A plurality of second sliders 112 are slidably connected to the second slide rail 11. One of the second sliders 112 is connected to the second ejection member 92, and the rest of the second sliders 112 are fixed to the plate surface of the second plate body 2. Among them, the second ejection member 92 is connected to the second slider 112 by means of the fourth slide rail 15. The fourth slide rail 15 extends along the first direction to ensure the stability of the connection between the second ejection member 92 and the plate body, and at the same time assist the movement of the second ejection member 92.

[0057] The specific connection forms between the connecting part, the floating part and the plate body can be that a groove 12 is formed by inward depression at one side edge of the first plate body 1 along the second direction. The two end faces of the first large end 621 along the first direction are respectively abutted against one inner wall of the groove 12 along the first direction and the first pressing member 41, and the first slider 102 is connected to the first ejection member 62 by means of the groove 12; a through groove is penetrated along the height direction at one side of the second plate body 2 along the first direction, and a protrusion 13 is formed at the edge of the through groove. The two end faces of the second large end 921 along the second direction are respectively abutted against the protrusion 13 and the second pressing member 71, and the second slider 112 is connected to the second ejection member 92 by means of the through groove.

[0058] Optionally, both the first pressing member 41 and the second pressing member 71 can be other feasible pressing structures such as electric cylinders, hydraulic cylinders, telescopic rods, etc.; both the first driving member 5 and the second driving member 8 can be other linear driving structures such as ball screws, direct drive motors, high-precision gears, etc.; both the third driving member 61 and the fourth driving member 91 can be other driving structures such as electric cylinders, hydraulic cylinders, air cylinders, etc.

[0059] Optionally, a first relief groove 623 is recessed at one end of the first large end 621 close to the third driving member 61. The output shaft of the third driving member 61 is in contact with the inner wall of the first relief groove 623, and the notch spacing of the first relief groove 623 in the first direction is slightly larger than the dimension of the base body of the third driving member 61 in the first direction. When the output shaft drives the first disengaging member 62 to retract, the first large end 621 is sleeved on the base body of the third driving member 61, realizing the disengagement with the minimum moving distance.

[0060] Optionally, a second relief groove 923 is recessed at one end of the second large end 921 close to the fourth driving member 91. The output shaft of the fourth driving member 91 is in contact with the inner wall of the second relief groove 923, and the notch spacing of the second relief groove 923 in the second direction is slightly larger than the dimension of the base body of the fourth driving member 91 in the second direction. When the output shaft drives the second disengaging member 92 to retract, the second large end 921 is sleeved on the base body of the fourth driving member 91, realizing the disengagement with the minimum moving distance.

[0061] In this embodiment, the floating part floatingly presses the connecting part against the plate body, so that the driving part is floatingly connected to the plate body. The floating part can change the floating pressing force acting on the connecting part, and can solve the problems of jamming and mechanical jamming generated during the movement through pressure increase and decrease adjustment, and can increase the pressure to avoid loosening at the connecting part and reduce the transmission sensitivity, always ensuring the precision of the heavy-duty structure such as the illumination lens during the displacement adjustment in the x and y directions, achieving the purpose of heavy-duty precision adjustment, taking into account both the heavy-duty requirements and the requirements of high-precision precise displacement adjustment, with both achieved and strong use effects; in addition, the floating part provides an initial pre-tightening force acting on the connecting part, effectively eliminating the mechanical clearance error, reducing the driving displacement return amount, and improving the driving precision.

[0062] In this embodiment, the connecting part is composed of a disengaging member and a driving member, so that the connecting part is provided with a disengaging function. The disengaging member is floatingly pressed and connected to the plate body by the floating part in the normal use state. In the event of a critical situation where it is suddenly impossible to adjust and recover with the help of the floating part, the disengaging member immediately retreats from the floating part and the plate body, thereby directly disconnecting the connection between the driving part and the plate body, preventing the structure from being damaged. The emergency disengaging mechanism can quickly cut off the connection between the driving end and the transmission end, effectively eliminating the system risk.

[0063] In this embodiment, the first pressing member 41 and the fourth driving member 91 are linked and cooperated, and the second pressing member 71 and the third driving member 61 are linked and cooperated. By linking the force-applying elements with the same direction of the acting force, the control precision of the mechanism is improved, and the safety of the system operation is enhanced, preventing the risk of failure caused by the out-of-control or insufficient force of any single force-applying element. At the same time, a buckle is provided in the linkage mechanism, and the connection and disconnection of the linkage mechanism are controlled by means of the buckle, so that the pressing member and the driving member work independently of each other under normal conditions, and are linked when one of them fails, ensuring the normal realization of the driving and pressing functions.

[0064] In some embodiments, as shown in Figure 9 the direction in which the disengaging member disengages can also be that the disengaging member moves upward perpendicular to the plate body direction, so as to disengage from the connection between the floating portion and the plate body, realizing complete disconnection and disengagement. The driving member can be an electric cylinder, a cylinder, a hydraulic cylinder or other mechanical structures.

[0065] In some embodiments, as shown in Figure 10 the direction in which the disengaging member disengages can also be that the disengaging member folds and rotates counterclockwise, so as to disengage from the connection between the floating portion and the plate body, realizing complete disconnection and disengagement. The driving member can be an electric cylinder, a cylinder, a hydraulic cylinder or other mechanical structures.

[0066] In some embodiments, as shown in Figure 11 the floating and pressing connection manner between the floating portion and the connecting portion can also be that at least two floating portions are oppositely arranged at the plate body, and the pressing members are oppositely arranged. At the same time, the disengaging member is clamped between the two pressing members, and both sides of the disengaging member are floatingly pressed by the pressing members, realizing a more delicate floating adjustment work.

[0067] In a second aspect, an embodiment of the present invention provides an electronic device, which is electrically connected to the driving member, the pressing member, the sensor and other electronic components in the heavy-duty displacement adjustment structure. A central control system is provided in the electronic device for receiving, processing and feedback motion signals in real time to ensure the smooth progress of the heavy-duty precision displacement adjustment process.

[0068] Obviously, the above embodiments are only examples clearly described and not limitations on the implementation manners. Although the embodiments of the present invention are described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the present invention.

Claims

1. An overload displacement adjustment mechanism, characterized in that, Comprising: A first plate body (1) and a second plate body (2) that are at least partially overlapped and slidably connected in sequence; A first floating portion (4) fixed to the first plate body (1), the first floating portion (4) having a first pressing member (41) with an adjustable pressing force; A first driving member (5) fixed to the second plate body (2); A first connecting portion (6) connected to the first driving member (5); the first connecting portion (6) is pressed by the first pressing member (41) and is floatingly connected to the first plate body (1); In a normal state, the first connecting portion (6) is pressed and fixed to the first plate body (1) by the first pressing member (41), and the first driving member (5) is adapted to drive the first plate body (1) to move; In a first abnormal state, the first pressing member (41) adjusts the pressing force acting on the first connecting portion (6), and is adapted to loosen or re-press between the first connecting portion (6) and the first plate body (1).

2. The overload displacement adjusting mechanism according to claim 1, wherein Further comprising: A third plate body (3) slidably connected to a side of the second plate body (2) facing away from the first plate body (1); A second floating portion (7) fixed to the second plate body (2), the second floating portion (7) having a second pressing member (71) with an adjustable pressing force; A second driving member (8) fixed to the third plate body (3); A second connecting portion (9) connected to the second driving member (8); the second connecting portion (9) is pressed by the second pressing member (71) and is floatingly connected to the second plate body (2); In a normal state, the second connecting portion (9) is pressed and fixed to the second plate body (2) by the second pressing member (71), and the second driving member (8) is adapted to drive the second plate body (2) to move; In a first abnormal state, the second pressing member (71) adjusts the pressing force acting on the second connecting portion (9), and is adapted to loosen or re-press between the second connecting portion (9) and the second plate body (2).

3. The heavy-load displacement adjusting mechanism according to claim 2, characterized in that The first connecting portion (6) includes a third driving member (61) and a first disengaging member (62), the third driving member (61) is fixedly connected to the output shaft of the first driving member (5); in a normal state, the first disengaging member (62) is floatingly connected to the first plate body (1) by means of the first floating portion (4); The third driving member (61) is connected to the first disengaging member (62); In a second abnormal state, the third driving member (61) drives the first disengaging member (62) to move so as to disengage it from the first floating portion (4) and the first plate body (1).

4. The heavy-load displacement adjustment mechanism according to claim 3, wherein, The first disengaging member (62) has a first large end (621) and a first small end (622), and the dimension of the first large end (621) in a first direction is greater than that of the first small end (622); In a normal state, the first large end (621) is pressed by the first pressing member (41) and is floatingly connected at the first plate body (1); In the second abnormal state, the first disengaging member (62) moves, the first large end (621) disengages from the first pressing member (41) and the first plate body (1), and the first small end (622) is disposed at an interval between the first pressing member (41) and the first plate body (1), being adapted to disconnect the connection between the first driving member (5) and the first plate body (1).

5. The heavy-load displacement adjustment mechanism according to claim 4, characterized in that, The second connecting portion (9) includes a fourth driving member (91) and a second disengaging member (92), and the fourth driving member (91) is fixedly connected to the output shaft of the second driving member (8); in the normal state, the second disengaging member (92) is floatingly connected to the second plate body (2) by means of the second floating portion (7); The fourth driving member (91) is connected to the second disengaging member (92); In the second abnormal state, the fourth driving member (91) drives the second disengaging member (92) to move so as to disengage it from the second floating portion (7) and the second plate body (2).

6. The overload displacement adjusting mechanism according to claim 5, characterized in that, The second disengaging member (92) has a second large end (921) and a second small end (922), and the dimension of the second large end (921) in the second direction is larger than that of the second small end (922); In the normal state, the second large end (921) is pressed by the second pressing member (71) and is floatingly connected to the second plate body (2); In the second abnormal state, the second disengaging member (92) moves, the second large end (921) disengages from the second pressing member (71) and the second plate body (2), and the second small end (922) is disposed at an interval between the second pressing member (71) and the second plate body (2), being adapted to disconnect the connection between the second driving member (8) and the second plate body (2).

7. The heavy-duty displacement adjusting mechanism according to claim 5, characterized in that The first pressing member (41) and the fourth driving member (91) are connected by means of a linkage system; The second pressing member (71) and the third driving member (61) are connected by means of a linkage system; A connection switch and a compensation mechanism are provided in the linkage system, the connection switch is adapted to disconnect or connect the linkage system, and the compensation mechanism is adapted to compensate for pressure.

8. The overload displacement adjusting mechanism according to claim 4, characterized in that, A first relief groove (623) is provided at the first large end (621), and the output shaft of the third driving member (61) is in contact with the inner wall of the first relief groove (623); In the second abnormal state, the first disengaging member (62) moves, and the first relief groove (623) gradually sheathes over the third driving member (61).

9. The overload displacement adjusting mechanism according to claim 6, characterized in that, A second relief groove (923) is provided at the second large end (921), and the output shaft of the fourth driving member (91) is in contact with the inner wall of the second relief groove (923); In the second abnormal state, the second disengaging member (92) moves, and the second relief groove (923) gradually sheathes over the fourth driving member (91).

10. The overload displacement adjustment mechanism according to claim 5, characterized in that Further comprising: A first slide rail (10), clamped between the first plate body (1) and the second plate body (2) and extending along the first direction, being adapted to enable the first plate body (1) to slide relative to the second plate body (2) along the first direction; The first slide rail (10) includes a first slideway (101) and a plurality of first sliders (102) slidably connected to the first slideway (101); At least one of the first sliders (102) is connected to the first disengaging member (62) by means of a third slide rail (14), and the third slide rail (14) is arranged to extend along the second direction; The second slide rail (11) is clamped between the second plate body (2) and the third plate body (3) and is arranged to extend along the second direction, and is adapted to enable the second plate body (2) to slide relative to the third plate body (3) along the second direction; The second slide rail (11) includes a second slideway (111) and a plurality of second sliders (112) slidably connected to the second slideway (111); At least one of the second sliders (112) is connected to the second disengaging member (92) by means of a fourth slide rail (15), and the fourth slide rail (15) is arranged to extend along the first direction.

11. The heavy-duty displacement adjustment mechanism according to claim 6, wherein A groove (12) is provided on one side of the first plate body (1) along the second direction, and both end faces of the first large end (621) along the first direction are respectively in contact with the inner wall of the groove (12) and the first pressing member (41); The direction of the pressing force of the first pressing member (41) is parallel to the first direction; The second plate body (2) is formed with a protrusion (13); In the normal state, both end faces of the second large end (921) along the second direction are respectively in contact with the protrusion (13) and the second pressing member (71); The direction of the pressing force of the second pressing member (71) is parallel to the second direction.

12. The heavy-duty displacement adjustment mechanism according to claim 2, wherein The first floating portion (4) further has a first connecting member (42), the first connecting member (42) is fixed to the first plate body (1), and the first pressing member (41) is provided at the first connecting member (42); The second floating portion (7) further has a second connecting member (72), the second connecting member (72) is fixed to the second plate body (2), and the second pressing member (71) is provided at the second connecting member (72).

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