Flexible feedback device and preparation method thereof

Abstract

The invention relates to a flexible feedback device and a preparation method thereof. The flexible feedback device comprises a first flexible annular layer, a second flexible annular layer and a third flexible annular layer which are sequentially stacked, a movable magnetic thin film layer is arranged on the second flexible annular layer, and the area of the magnetic thin film layer is smaller than the area of an inner ring of the second flexible annular layer; a flexible actuating coil layer is arranged on the side, away from the second flexible annular layer, of the third flexible annular layer. The preparation method comprises the following steps: forming a movable magnetic thin film layer on a second flexible annular layer, and forming a flexible actuating coil layer on one side of a third flexible annular layer; the first flexible annular layer, the second flexible annular layer and the third flexible annular layer are sequentially stacked and assembled, and the flexible actuating coil is located on the side, away from the second flexible annular layer, of the third flexible annular layer. The magnetic thin film layer and the flexible actuating coil layer form an integral flexible light and thin force feedback device, the structure is simple, the degree of freedom is high, and integration, expansion and use are facilitated.

Description

Technical Field

[0001] This application relates to the technical field of flexible devices, and particularly to flexible feedback devices and their manufacturing methods. Background Art

[0002] Human-machine interaction refers to the information exchange between humans and machines. In human-machine interaction applications, the lack of tactile feedback can lead to many important information not being fed back to the user, making it difficult to meet the requirements for accuracy and efficiency in human-machine interaction. After years of rapid development, flexible wearable tactile feedback devices have made significant progress in aspects such as flexibility and lightweight, but there are still many challenges in meeting the application requirements. For example, wearable tactile feedback devices still have problems such as poor flexibility, large mass and volume, or high driving voltage. Summary of the Invention

[0003] In view of the above technical problems, this application provides a flexible feedback device and its manufacturing method, which has a simple structure, high degrees of freedom, and is convenient for integrated expansion and use.

[0004] To solve the above technical problems, in a first aspect, this application provides a flexible feedback device, including a first flexible annular layer, a second flexible annular layer, and a third flexible annular layer that are sequentially stacked; a movable magnetic thin film layer is provided on the second flexible annular layer, and the area of the magnetic thin film layer is smaller than the inner ring area of the second flexible annular layer; a flexible actuator coil layer is provided on the side of the third flexible annular layer away from the second flexible annular layer. A force feedback device with overall flexibility and thinness is formed by the magnetic thin film layer and the flexible actuator coil layer, which has a simple structure, high degrees of freedom, and is convenient for integrated expansion and use.

[0005] In an embodiment, the centers of the first flexible annular layer, the second flexible annular layer, and the third flexible annular layer coincide, the inner ring area of the first flexible annular layer is greater than or equal to the inner ring area of the second flexible annular layer, and the inner ring area of the third flexible annular layer is greater than or equal to the inner ring area of the second flexible annular layer. The inner rings of the first flexible annular layer, the second flexible annular layer, and the third flexible annular layer together form a receiving space for receiving the magnetic thin film layer, enabling the magnetic thin film layer to move freely in the receiving space and sensitively realizing force feedback.

[0006] In an embodiment, the fixed end of the magnetic thin film layer is connected to the inner ring of the second flexible annular layer, and the free end of the magnetic thin film layer moves freely in a direction perpendicular to the plane of the second flexible annular layer. When the magnetic field changes, the magnetic thin film layer rotates up and down with the fixed end as the center to achieve force feedback.

[0007] In one embodiment, a temperature feedback coil is provided on a side of the first flexible annular layer away from the second flexible annular layer. By providing the temperature feedback coil, the flexible resistance device has pressure-temperature dual-mode feedback, with fast feedback speed and no mutual interference between pressure feedback and temperature feedback.

[0008] In one embodiment, the material of the temperature feedback coil includes liquid metal. By changing the wire diameter of the flexible liquid metal heating coil, the coil resistance is controlled to control the heating range.

[0009] In one embodiment, the sum of the thicknesses of the first flexible annular layer and the third flexible annular layer is greater than the thickness of the magnetic thin film layer. Through the magnetic thin film layer and the flexible actuator coil layer, an overall flexible and thin force feedback device is formed, with a simple structure, high degree of freedom, and convenient for integrated expansion and use.

[0010] In one embodiment, the mass ratio of the magnetic material in the magnetic thin film layer is 40%wt to 70%wt. The flexible feedback device obtained by controlling the magnetic material within the above parameter range has the characteristic of fast response speed to the magnetic field.

[0011] In a second aspect, the present application also provides a method for preparing a flexible feedback device, including the following steps:

[0012] Provide a first flexible annular layer, a second flexible annular layer, and a third flexible annular layer;

[0013] Form a movable magnetic thin film layer on the second flexible annular layer, and the area of the magnetic thin film layer is smaller than the inner ring area of the second flexible annular layer;

[0014] Form a flexible actuator coil layer on one side of the third flexible annular layer;

[0015] Stack and assemble the first flexible annular layer, the second flexible annular layer, and the third flexible annular layer in sequence, wherein the flexible actuator coil is located on a side of the third flexible annular layer away from the second flexible annular layer to obtain a flexible feedback device. Through the magnetic thin film layer and the flexible actuator coil layer, an overall flexible and thin force feedback device is formed, with a simple structure, high degree of freedom, and convenient for integrated expansion and use.

[0016] In one embodiment, the method further includes:

[0017] Form a temperature feedback coil on a side of the first flexible annular layer away from the second flexible annular layer. By providing the temperature feedback coil, the flexible resistance device has pressure-temperature dual-mode feedback, with fast feedback speed and no mutual interference between pressure feedback and temperature feedback.

[0018] In one embodiment, forming the magnetic thin film layer on the second flexible annular layer includes:

[0019] Adding a magnetic material to a polymer organic material precursor and heating and curing to form a magnetic thin film layer;

[0020] Connecting the fixed end of the magnetic thin film layer to the inner ring of the second flexible annular layer, so that the free end of the magnetic thin film layer moves freely in a direction perpendicular to the plane where the second flexible annular layer is located. When the magnetic field changes, the magnetic thin film layer rotates up and down with the fixed end as the center to achieve force feedback.

[0021] The flexible feedback device and its manufacturing method of the present application, the flexible feedback device includes a first flexible annular layer, a second flexible annular layer and a third flexible annular layer stacked in sequence; a movable magnetic thin film layer is provided on the second flexible annular layer, and the area of the magnetic thin film layer is smaller than the inner ring area of the second flexible annular layer; a flexible actuation coil layer is provided on one side of the third flexible annular layer away from the second flexible annular layer. The manufacturing method of the flexible feedback device includes: providing a first flexible annular layer, a second flexible annular layer and a third flexible annular layer; forming a movable magnetic thin film layer on the second flexible annular layer, and the area of the magnetic thin film layer is smaller than the inner ring area of the second flexible annular layer; forming a flexible actuation coil layer on one side of the third flexible annular layer; stacking and assembling the first flexible annular layer, the second flexible annular layer and the third flexible annular layer in sequence, wherein the flexible actuation coil is located on one side of the third flexible annular layer away from the second flexible annular layer to obtain a flexible feedback device. The present application forms an overall flexible and thin force feedback device through the magnetic thin film layer and the flexible actuation coil layer, with a simple structure, high degrees of freedom, and convenient for integrated expansion and use. Description of the Drawings

[0022] Figure 1 is a schematic diagram of a flexible feedback device shown according to an embodiment of the present application;

[0023] Figure 2 is a schematic flow chart of a manufacturing method of a flexible feedback device shown according to an embodiment of the present application.

[0024] Description of the reference numerals: 11 - temperature feedback coil; 111 - first protrusion; 12 - first flexible annular layer; 13 - magnetic thin film layer; 14 - second flexible annular layer; 141 - second protrusion; 15 - third flexible annular layer; 16 - flexible actuation coil layer; 17 - flexible wire. Detailed Embodiments

[0025] The following specific embodiments illustrate the embodiments of the present application, and those skilled in the art can easily understand other advantages and effects of the present application from the content disclosed in this specification.

[0026] In the following description, reference is made to the accompanying drawings, which illustrate several embodiments of the present application. It should be understood that other embodiments may also be used, and mechanical, structural, electrical, and operational changes may be made without departing from the spirit and scope of the present application. The following detailed description should not be considered restrictive, and the terms used herein are only for the purpose of describing specific embodiments and are not intended to limit the present application.

[0027] Although in some instances the terms first, second, etc. are used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another.

[0028] Furthermore, as used herein, the singular forms "a", "an", and "the" are intended to include the plural forms as well, unless the context indicates otherwise. It should be further understood that the terms "comprising", "including" indicate the presence of the stated features, steps, operations, elements, components, items, kinds, and / or groups, but do not preclude the presence, occurrence, or addition of one or more other features, steps, operations, elements, components, items, kinds, and / or groups. The terms "or" and "and / or" used herein are to be construed as inclusive, or meaning any one or any combination. Thus, "A, B, or C" or "A, B, and / or C" means "any of the following: A; B; C; A and B; A and C; B and C; A, B, and C". Exceptions to this definition occur only when the combination of elements, functions, steps, or operations is inherently mutually exclusive in some way.

[0029] Currently, common haptic feedback research mainly focuses on the field of flexible actuators. Flexible actuators are increasingly applied in electronic skin, soft robotics, medicine, and virtual reality technology (VR). Different types of flexible actuators have been reported using various materials, structures, and morphologies. Common driving methods include electromagnetic driving, pneumatic driving, optical driving, electroactive polymer driving, shape memory alloy driving, etc. Among them, electromagnetic driving is characterized by miniaturization and the ability to directly convert electrical energy into mechanical displacement, allowing battery-free and self-sustainable operation in unattended and distributed sensing scenarios. Some pioneering electromagnetic sensors either contain large-volume coils and rigid permanent magnets or adopt a partially flexible format, where the basic magnetic elements are still based on rigid materials.

[0030] To solve the problems of the prior art, an embodiment of the present invention proposes a flexible feedback device. Figure 1 is a schematic diagram of the flexible feedback device shown according to an embodiment of the present application. As Figure 1As shown in the figure, the flexible feedback device of the embodiment of the present application includes a first flexible annular layer 12, a second flexible annular layer 14, and a third flexible annular layer 15 that are stacked in sequence; a movable magnetic thin film layer 13 is provided on the second flexible annular layer 14, and the area of the magnetic thin film layer 13 is smaller than the inner ring area of the second flexible annular layer 14; a flexible actuator coil layer 16 is provided on the side of the third flexible annular layer 15 away from the second flexible annular layer 14.

[0031] In the flexible feedback device of the embodiment of the present application, an electromagnetic induction coil (not shown in the figure) is provided in the flexible actuator coil layer 16. When current passes through the electromagnetic induction coil via the flexible wire 17, a magnetic field is formed around the flexible actuator coil layer 16. A space for accommodating the magnetic thin film layer 13 is formed inside the first flexible annular layer 12, the second flexible annular layer 14, and the third flexible annular layer 15 that are stacked. Since a magnetic field is generated near the magnetic thin film layer 14 when the flexible actuator coil layer 16 is energized, a magnetic flux is generated inside the magnetic thin film layer 14. If the intensity or direction of the electromagnetic field changes due to a change in current at this time, the magnetic flux inside the magnetic thin film layer 14 changes accordingly, causing the magnetic thin film layer 14 to vibrate and realizing the force feedback of the electrical signal. The magnitude of the magnetic field generated by the force feedback can be controlled by changing the line width and number of turns of the electromagnetic induction coil.

[0032] The electromagnetic induction coil in the flexible actuator coil layer 16 is fixed between two flexible substrates, and the thickness of a single flexible substrate is less than or equal to 50 μm to reduce the influence of the thickness of the flexible substrate on the magnetic field generated by the electromagnetic induction coil. The material of the flexible substrate can be polyimide (PI), which has excellent stability as a substrate and also has good deformation ability.

[0033] In an embodiment, the centers of the first flexible annular layer 12, the second flexible annular layer 14, and the third flexible annular layer 15 coincide, the inner ring area of the first flexible annular layer 12 is greater than or equal to the inner ring area of the second flexible annular layer 14, and the inner ring area of the third flexible annular layer 15 is greater than or equal to the inner ring area of the second flexible annular layer 14.

[0034] The materials of the first flexible annular layer 12, the second flexible annular layer 14, and the third flexible annular layer 15 can be PDMS (Polydimethylsiloxane), which has good flexibility. The inner ring areas of the first flexible annular layer 12, the second flexible annular layer 14, and the third flexible annular layer 15 are equal and their centers coincide. The area of the magnetic thin film layer 13 is smaller than the inner ring area of the second flexible annular layer 14, so that the magnetic thin film layer 13 can move freely in the accommodating space and realize force feedback sensitively.

[0035] In an embodiment, the sum of the thicknesses of the first flexible annular layer 12 and the third flexible annular layer 15 is greater than the thickness of the magnetic thin film layer 13.

[0036] Among them, the first flexible annular layer 12 and the third flexible annular layer 15 have the same shape and size, with a thickness of about 1 mm, an inner ring radius of 4 mm to 7 mm, and an outer ring radius of 7 to 10. The thickness of the second flexible annular layer 14 is less than or equal to 500 um, and the thickness of the magnetic thin film 13 is 500 um to 1 mm. In this way, an overall flexible and thin force feedback device is formed by the magnetic thin film layer 13 and the flexible actuator coil layer 16, with a simple structure, high degrees of freedom, and being convenient for integrated expansion and use.

[0037] In an embodiment, the fixed end of the magnetic thin film layer 13 is connected to the inner ring of the second flexible annular layer 14, and the free end of the magnetic thin film layer 13 moves freely in a direction perpendicular to the plane where the second flexible annular layer 14 is located.

[0038] The inner ring of the second flexible annular layer 14 forms a second protrusion 141 inward, and one end of the magnetic thin film layer 13 is connected to the second protrusion 141 as the fixed end of the magnetic thin film layer 13. The other end of the magnetic thin film layer 13 is the free end, which can move freely in a direction perpendicular to the plane where the second flexible annular layer 14 is located. That is to say, when the magnetic field changes, the magnetic thin film layer 13 rotates up and down with the fixed end as the center to achieve force feedback.

[0039] In an embodiment, a temperature feedback coil 11 is provided on the side of the first flexible annular layer 12 away from the second flexible annular layer 14. The temperature feedback coil 11 winds along one side of the first flexible annular layer 12 to form a ring shape. Two first protrusions 111 are provided at one end of the temperature feedback coil 11, and the first protrusions 111 extend downward in a direction perpendicular to the first flexible annular layer 12, penetrating the first flexible annular layer 12, the second flexible annular layer 14, and the third flexible annular layer 15 to connect the flexible wire 17. Correspondingly, two through holes (not marked in the figure) are provided at the corresponding positions of the first flexible annular layer 12, the second flexible annular layer 14, and the third flexible annular layer 15 with respect to the second protrusions 111. In this way, by providing the temperature feedback coil 11, the flexible resistance device has pressure-temperature dual-mode feedback, with a fast feedback speed and no mutual interference between pressure feedback and temperature feedback.

[0040] In an embodiment, the material of the temperature feedback coil 11 includes liquid metal. The temperature feedback coil 11 can be a flexible liquid metal heating coil formed by wrapping liquid metal with a flexible polymer material doped with carbon black. By changing the wire diameter of the flexible liquid metal heating coil, the coil resistance is controlled to control the temperature rise range.

[0041] Optionally, the overall resistance of the temperature feedback coil 11 should be ≥ 300 Ω. The flexible feedback device obtained by controlling within the above parameter range has the characteristics of a large temperature change range and a fast heating rate under low voltage conditions. If the overall resistance of the liquid metal heating coil is too small, the required heating voltage will be too high, not meeting the safety requirements.

[0042] In one embodiment, the mass ratio of the magnetic material in the magnetic thin film layer 13 is 40% wt - 70% wt.

[0043] Here, the magnetic material can be neodymium iron boron (NdFeB). NdFeB is a rare earth permanent magnet material, a permanent magnet made of an alloy of neodymium, iron, and boron, whose function is to respond to the magnetic field generated by the electromagnetic induction coil as a magnetic material. The flexible feedback device obtained by controlling the magnetic material within the above parameter range has the characteristic of a fast response speed to the magnetic field. If the proportion of the magnetic material is too large, the film is prone to collapse under the action of the magnetic field, and the flexibility of the film will also decrease; if the proportion of the magnetic material is too small, the change generated by the magnetic thin film layer under the action of the external magnetic field will be small, and it is difficult to generate a corresponding feedback effect.

[0044] The flexible feedback device of the present application includes a first flexible annular layer, a second flexible annular layer, and a third flexible annular layer that are sequentially stacked; a movable magnetic thin film layer is provided on the second flexible annular layer, and the area of the magnetic thin film layer is smaller than the inner ring area of the second flexible annular layer; a flexible actuation coil layer is provided on the side of the third flexible annular layer away from the second flexible annular layer. The present application forms an overall flexible and lightweight force feedback device through the magnetic thin film layer and the flexible actuation coil layer, with a simple structure, high degrees of freedom, and being convenient for integrated expansion and use.

[0045] Second Embodiment

[0046] Figure 2 is a schematic flowchart of the preparation method of the flexible feedback device shown in the embodiments of the present application. As Figure 2 shown, the embodiments of the present application also propose a preparation method of a flexible feedback device, including the following steps:

[0047] Step S1: Provide a first flexible annular layer, a second flexible annular layer, and a third flexible annular layer.

[0048] The materials of the first flexible annular layer, the second flexible annular layer, and the third flexible annular layer can be PDMS (Polydimethylsiloxane), which has good flexibility. The inner ring areas of the first flexible annular layer, the second flexible annular layer, and the third flexible annular layer are equal and their centers coincide. Such a concentric ring structure is convenient for processing and manufacturing.

[0049] Step S2: Form a movable magnetic thin film layer on the second flexible annular layer, and the area of the magnetic thin film layer is smaller than the inner ring area of the second flexible annular layer.

[0050] In one embodiment, forming the magnetic thin film layer on the second flexible annular layer includes:

[0051] Add magnetic materials to the polymer organic material precursor, and form a magnetic thin film layer after heating and curing;

[0052] Connect the fixed end of the magnetic thin film layer to the inner ring of the second flexible annular layer, so that the free end of the magnetic thin film layer moves freely in a direction perpendicular to the plane where the second flexible annular layer is located.

[0053] The first flexible annular layer, the second flexible annular layer, and the third flexible annular layer which are stacked are internally formed with a space for accommodating the magnetic thin film layer. The inner ring of the second flexible annular layer forms a second protrusion inward, and one end of the magnetic thin film layer is connected to the second protrusion as the fixed end of the magnetic thin film layer. The other end of the magnetic thin film layer is the free end and can move freely in a direction perpendicular to the plane where the second flexible annular layer is located.

[0054] Step S3: Form a flexible actuator coil layer on one side of the third flexible annular layer.

[0055] The electromagnetic induction coil in the flexible actuator coil layer is fixed in two flexible substrates, and the thickness of a single flexible substrate is less than or equal to 50 um to reduce the influence of the thickness of the flexible substrate on the magnetic field generated by the electromagnetic induction coil. The material of the flexible substrate can be polyimide (PI), which has excellent stability as a substrate and also has good deformation ability.

[0056] Step S4: Stack and assemble the first flexible annular layer, the second flexible annular layer, and the third flexible annular layer in sequence, wherein the flexible actuator coil is located on the side of the third flexible annular layer away from the second flexible annular layer, and a flexible feedback device is obtained.

[0057] When the flexible actuator coil layer is energized, a magnetic field is generated near the magnetic thin film layer, and then magnetic flux is generated inside the magnetic thin film layer. If the current changes cause the intensity or direction of the electromagnetic field to change at this time, the magnetic flux inside the magnetic thin film layer changes, resulting in the vibration of the magnetic thin film layer and realizing the force feedback of the electrical signal.

[0058] In one embodiment, the method further includes:

[0059] Form a temperature feedback coil on the side of the first flexible annular layer away from the second flexible annular layer.

[0060] The material of the temperature feedback coil includes liquid metal. The temperature feedback coil can be a flexible liquid metal heating coil formed by wrapping liquid metal with a flexible polymer material doped with carbon black. By changing the wire diameter of the flexible liquid metal heating coil, the coil resistance is controlled to control the temperature rise range.

[0061] Exemplarily, a method for preparing a flexible feedback device includes the following steps:

[0062] (A) Fix a copper coil with insulation protection between two layers of PI flexible substrates using PDMS colloid.

[0063] (B) Mix and stir the A and B components of PDMS in a ratio of 10:1, and prepare a first flexible annular layer and a second flexible annular layer by casting. It should be noted that the synthesis of PDMS involves two main components: prepolymer A and crosslinking agent B. The main component of prepolymer A is poly(dimethyl-methylvinylsiloxane) prepolymer with vinyl side chains and a trace amount of platinum catalyst. On the other hand, the component of crosslinking agent B is mainly prepolymer with vinyl side chains and crosslinking agent poly(dimethyl-methylhydrogenosiloxane). During the mixing process, the vinyl group and the silicon-hydrogen bond can undergo a hydrosilylation reaction to form a material with a three-dimensional network structure. By controlling the ratio of the A and B components, the mechanical properties of the PDMS material can be effectively regulated. When these two components are mixed in a weight ratio of 10:1, a mixed liquid with medium viscosity can be obtained, and its consistency is similar to that of SAE40 silicone oil. After heating the mixed liquid to 80°C - 120°C, whether it is thick or thin liquid, it will solidify into a tough transparent elastomer. This material has characteristics such as good light transmittance, low dielectric properties, and good electrostatic adsorption and fitting effects.

[0064] (C) Mix and stir the A and B components of PDMS in a ratio of 10:1, add a magnetic material in a certain mass ratio, and heat and cure the mixed material by casting to prepare a magnetic thin film layer.

[0065] (D) Mix and stir the A and B components of PDMS in a ratio of 10:1, add carbon black CB in a certain mass ratio, mix and cure at 80°C, and scan the surface with ultraviolet laser to form a heating coil pattern. Optionally, the ultraviolet laser power ≤ 35W, and the scanning speed ≤ 500mm / s.

[0066] (E) Transfer the liquid metal heating coil to the first flexible annular layer by transfer printing to form a liquid metal heating coil. It is worth mentioning that the transfer printing should be carried out under anaerobic conditions to prevent the influence caused by the rapid oxidation of liquid metal.

[0067] (F) Assemble each part of the device in sequence to obtain a flexible feedback device with pressure-temperature dual-mode feedback.

[0068] In the present invention, by combining electromagnetic induction technology, flexible substrates, resistive heating technology, and the property of rapid cooling of liquid metal, the purpose of non-interference and simultaneous feedback of two signals, namely pressure feedback and temperature feedback, is achieved. For pressure feedback, the setting of the coil pattern, size, and thickness can greatly increase the magnitude and direction of the magnetic field generated by the electromagnetic actuation coil. For temperature feedback, the setting of the coil shape, wire diameter, and thickness can greatly increase the temperature sensitivity of the coil. Compared with other technologies, the main advantages of this method are that it does not require large-scale instruments for preparation, the overall thickness is controllable, and the transfer template can be reused, which is not only beneficial to practical detection applications but also more conducive to mass production. The manufacturing steps of the flexible feedback device with pressure-temperature dual-mode feedback in the present invention are simple, the preparation cycle is short, and the test conditions are relatively simple.

[0069] Preferably, the mass ratio of the magnetic material in the magnetic thin film layer is 40% wt to 70% wt. The flexible feedback device obtained by controlling within the above parameter range has the characteristic of fast response speed to the magnetic field. If the proportion of the magnetic material is too large, the film is prone to collapse under the action of the magnetic field, and the flexibility of the film will also decrease; if the proportion of the magnetic material is too small, the change generated by the magnetic thin film layer under the action of the external magnetic field is small, and it is difficult to generate a corresponding feedback effect.

[0070] Preferably, the overall resistance of the liquid metal heating coil needs to be ≥ 300 Ω. The flexible heating device obtained by controlling within the above parameter range has the characteristics of a large temperature change range and a fast heating rate under low voltage conditions. If the overall resistance of the liquid metal heating coil is too small, the required heating voltage will be too high, which does not meet the safety requirements.

[0071] The present invention has the following beneficial effects:

[0072] (1) The preparation method of the flexible feedback device with pressure-temperature dual-mode feedback of the present invention has the characteristics of simple manufacturing steps, short preparation cycle, and relatively simple test conditions, and has excellent performance of high feedback sensitivity;

[0073] (2) The flexible feedback device with pressure-temperature dual-mode feedback of the present invention can be applied to fields such as human-computer interaction and environmental monitoring, and is suitable for various intelligent products;

[0074] (3) Compared with the previous flexible feedback devices, the flexible feedback device with pressure-temperature dual-mode feedback of the present invention can not only provide pressure feedback but also temperature feedback, realizing the transformation from single mode to multi-mode.

[0075] The preparation method of the flexible feedback device according to the embodiment of the present application includes providing a first flexible annular layer, a second flexible annular layer, and a third flexible annular layer; forming a movable magnetic thin film layer on the second flexible annular layer, where the area of the magnetic thin film layer is smaller than the inner ring area of the second flexible annular layer; forming a flexible actuating coil layer on one side of the third flexible annular layer; and sequentially laminating and assembling the first flexible annular layer, the second flexible annular layer, and the third flexible annular layer, where the flexible actuating coil is located on the side of the third flexible annular layer away from the second flexible annular layer to obtain a flexible feedback device. The present application forms an overall flexible and thin force feedback device through the magnetic thin film layer and the flexible actuating coil layer, which has a simple structure, a high degree of freedom, and is convenient for integrated expansion and use.

[0076] The third embodiment

[0077] This embodiment is used to prepare a flexible feedback device with pressure-temperature dual-mode feedback, where the magnetic thin film material is 40% wt NdFeB / PDMS and the wire diameter of the liquid metal heating coil is 200 um:

[0078] (A) Fix the copper coil with insulation protection between two layers of PI using PDMS colloid.

[0079] (B) Mix and stir the A and B components of PDMS in a ratio of 10:1, and heat and cure for 30 min at 80 °C by casting to prepare the first flexible annular layer and the second flexible annular layer.

[0080] (C) Mix and stir the A and B components of PDMS in a ratio of 10:1, add 60% wt NdFeB material by mass, and heat and cure the mixed material for 30 min by casting to prepare the magnetic thin film layer.

[0081] (D) Mix and stir the A and B components of PDMS in a ratio of 10:1, add 2% wt CB by mass, mix and cure for 30 min at 80 °C, and scan the surface with ultraviolet laser to form a heating coil pattern with a wire diameter of 200 um.

[0082] (E) Transfer the liquid metal heating coil with a wire diameter of 200 um to the first flexible annular layer by transfer printing to form a liquid metal heating coil.

[0083] (F) Assemble each part of the device in sequence to obtain a flexible feedback device with pressure-temperature dual-mode feedback.

[0084] The fourth embodiment

[0085] This embodiment is used to prepare a flexible feedback device with pressure-temperature dual-mode feedback, where the magnetic thin film material is 60% wt NdFeB / PDMS and the wire diameter of the liquid metal heating coil is 200 um:

[0086] (A) Fix the copper coil with insulation protection between two layers of PI using PDMS colloid.

[0087] (B) Mix and stir the A and B components of PDMS in a ratio of 10:1, and prepare the first flexible annular layer and the second flexible annular layer by pouring and curing at 80 °C for 30 min.

[0088] (C) Mix and stir the A and B components of PDMS in a ratio of 10:1, add 60% wt NdFeB material, and prepare the magnetic thin film layer by pouring and curing the mixed material at 80 °C for 30 min.

[0089] (D) Mix and stir the A and B components of PDMS in a ratio of 10:1, add 2% wt of CB, mix and cure at 80 °C for 30 min, and scan the surface with ultraviolet laser to form a heating coil pattern with a wire diameter of 200 μm.

[0090] (E) Transfer the liquid metal heating coil with a wire diameter of 200 μm to the first flexible annular layer by transfer printing to form a liquid metal heating coil.

[0091] (F) Assemble each part of the device in sequence to obtain a flexible feedback device with pressure-temperature dual-mode feedback.

[0092] The fifth embodiment

[0093] This embodiment is used to prepare a flexible feedback device with pressure-temperature dual-mode feedback, where the magnetic thin film material is 60% wt NdFeB / PDMS and the wire diameter of the liquid metal heating coil is 100 μm:

[0094] (A) Fix the copper coil with insulation protection between two layers of PI using PDMS colloid.

[0095] (B) Mix and stir the A and B components of PDMS in a ratio of 10:1, and prepare the first flexible annular layer and the second flexible annular layer by pouring and curing at 80 °C for 30 min.

[0096] (C) Mix and stir the A and B components of PDMS in a ratio of 10:1, add 60% wt NdFeB material, and prepare the magnetic thin film layer by pouring and curing the mixed material at 80 °C for 30 min.

[0097] (D) Mix and stir the A and B components of PDMS in a ratio of 10:1, add 2% wt of CB, mix and cure at 80 °C for 30 min, and scan the surface with ultraviolet laser to form a heating coil pattern with a wire diameter of 100 μm.

[0098] (E) Transfer the liquid metal heating coil with a wire diameter of 100 μm to the first flexible annular layer by means of transfer printing to form a liquid metal heating coil.

[0099] (F) Assemble each part of the device in sequence to obtain a flexible feedback device with pressure-temperature dual-mode feedback.

[0100] Sixth Embodiment

[0101] This embodiment is used to prepare a flexible feedback device with pressure-temperature dual-mode feedback, where the magnetic thin film material is 60% wt NdFeB / PDMS and the wire diameter of the liquid metal heating coil is 300 μm:

[0102] (A) Fix the copper coil with insulation protection between two layers of PI using PDMS colloid.

[0103] (B) Mix and stir the A and B components of PDMS in a ratio of 10:1, and prepare the first flexible annular layer and the second flexible annular layer by means of casting and heating and curing at 80°C for 30 min.

[0104] (C) Mix and stir the A and B components of PDMS in a ratio of 10:1, add NdFeB material with a mass ratio of 60% wt, and prepare the magnetic thin film layer by means of casting and heating and curing the mixed material at 80°C for 30 min.

[0105] (D) Mix and stir the A and B components of PDMS in a ratio of 10:1, add CB with a mass ratio of 2% wt, mix and cure at 80°C for 30 min, and scan the surface with ultraviolet laser to form a heating coil pattern with a wire diameter of 300 μm.

[0106] (E) Transfer the liquid metal heating coil with a wire diameter of 300 μm to the first flexible annular layer by means of transfer printing to form a liquid metal heating coil.

[0107] (F) Assemble each part of the device in sequence to obtain a flexible feedback device with pressure-temperature dual-mode feedback.

[0108] The above embodiments are only illustrative of the principles and effects of the present application, and are not used to limit the present application. Any person familiar with this technology can modify or change the above embodiments without departing from the spirit and scope of the present application. Therefore, all equivalent modifications or changes completed by those with ordinary knowledge in the technical field without departing from the spirit and technical ideas disclosed in the present application should still be covered by the claims of the present application.

Claims

1. A flexible feedback device, characterized in that, It includes a first flexible annular layer, a second flexible annular layer, and a third flexible annular layer that are stacked in sequence; a movable magnetic thin film layer is provided on the second flexible annular layer, and the area of the magnetic thin film layer is smaller than the inner ring area of the second flexible annular layer; a flexible actuation coil layer is provided on one side of the third flexible annular layer away from the second flexible annular layer.

2. The flexible feedback device according to claim 1, characterized in that, The centers of the first flexible annular layer, the second flexible annular layer, and the third flexible annular layer coincide. The inner ring area of the first flexible annular layer is greater than or equal to the inner ring area of the second flexible annular layer, and the inner ring area of the third flexible annular layer is greater than or equal to the inner ring area of the second flexible annular layer.

3. The flexible feedback device according to claim 1, wherein The fixed end of the magnetic thin film layer is connected to the inner ring of the second flexible annular layer, and the free end of the magnetic thin film layer moves freely in a direction perpendicular to the plane where the second flexible annular layer is located.

4. The flexible feedback device according to claim 1, characterized in that, A temperature feedback coil is provided on one side of the first flexible annular layer away from the second flexible annular layer.

5. The flexible feedback device according to claim 4, characterized in that, The material of the temperature feedback coil includes liquid metal.

6. The flexible feedback device according to claim 1, wherein The sum of the thicknesses of the first flexible annular layer and the third flexible annular layer is greater than the thickness of the magnetic thin film layer.

7. The flexible feedback device according to claim 1, characterized in that, The mass ratio of the magnetic material in the magnetic thin film layer is 40%wt to 70%wt.

8. A method for preparing a flexible feedback device, characterized in that, It includes the following steps: Provide a first flexible annular layer, a second flexible annular layer, and a third flexible annular layer; Form a movable magnetic thin film layer on the second flexible annular layer, and the area of the magnetic thin film layer is smaller than the inner ring area of the second flexible annular layer; Form a flexible actuation coil layer on one side of the third flexible annular layer; Stack and assemble the first flexible annular layer, the second flexible annular layer, and the third flexible annular layer in sequence, wherein the flexible actuation coil is located on one side of the third flexible annular layer away from the second flexible annular layer to obtain a flexible feedback device.

9. The method according to claim 8, wherein The method further includes: Form a temperature feedback coil on one side of the first flexible annular layer away from the second flexible annular layer.

10. The method according to claim 8, wherein The forming of the magnetic thin film layer on the second flexible annular layer includes: Add magnetic material to the polymer organic material precursor, and form a magnetic thin film layer after heating and curing; Connect the fixed end of the magnetic thin film layer to the inner ring of the second flexible annular layer, and make the free end of the magnetic thin film layer move freely in a direction perpendicular to the plane where the second flexible annular layer is located.

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