Workbench device

Abstract

The table device includes: a base portion; the first straight moving mechanism comprises a first guide rail and a first sliding part; the supporting part comprises a first supporting surface mounted on the first sliding piece; and a second support surface disposed at a distance from the first support surface in a direction perpendicular to the base surface. The first sliding part can move along the first direction together with the first sliding part; the second direct-acting mechanism comprises a second guide rail and a second sliding part; the workbench part comprises a first workbench surface, a second workbench surface, a third workbench surface and a fourth workbench surface, and can move along the second direction together with the second sliding piece; the third direct-acting mechanism comprises a third guide rail and a third sliding part; the fourth direct-acting mechanism comprises a fourth guide rail and a fourth sliding part which are mounted on a fourth working table; a first drive unit that linearly reciprocates a first moving unit attached to the third slider in the first direction; and a second drive unit that linearly reciprocates a second moving unit attached to the fourth slider in the first direction.

Description

Technical Field

[0001] The present disclosure relates to a workbench device. This application claims priority based on Japanese Application No. 2023-005776 filed on January 18, 2023, and incorporates all the descriptions recorded in the Japanese application into this application. Background Art

[0002] There is disclosed a workbench device including a workbench capable of moving in the horizontal direction and the lifting direction (for example, refer to Patent Document 1).

[0003] Prior Art Documents

[0004] Patent Documents

[0005] Patent Document 1: Japanese Unexamined Patent Application Publication No. 2011-112625 Summary of the Invention

[0006] Problems to be Solved by the Invention

[0007] In a workbench device, there are cases where the workbench moves in the horizontal direction, i.e., the X direction, and the Y direction orthogonal thereto. In such a workbench device, a lower cross-section of the device is required.

[0008] Therefore, one of the objects of the present disclosure is to provide a workbench device capable of achieving a lower cross-section of the device.

[0009] Technical Means for Solving the Problems

[0010] The workbench device of the present disclosure includes:

[0011] A base portion having a base surface;

[0012] A first linear motion mechanism including: a first guide rail installed on the base surface and extending in a first direction; and a first slider installed on the first guide rail and capable of moving in the first direction;

[0013] A support portion including: a first support surface facing the base surface and installed on the first slider; and a second support surface disposed at an interval from the first support surface in a direction perpendicular to the base surface; the support portion can move in the first direction together with the first slider;

[0014] A second linear motion mechanism including: a second guide rail installed on the second support surface and extending in a second direction intersecting the first direction; and a second slider installed on the second guide rail and capable of moving in the second direction;

[0015] The workbench section includes: a first workbench surface, facing the second support surface and mounted on the second slider; a second workbench surface, disposed at an interval from the first workbench surface in a direction perpendicular to the base surface; a third workbench surface, intersecting the first workbench surface and the second workbench surface respectively; and a fourth workbench surface, intersecting the first workbench surface, the second workbench surface, and the third workbench surface respectively; and it can move along the second direction together with the second slider.

[0016] The third linear motion mechanism includes: a third guide rail, mounted on the third workbench surface and extending along a third direction intersecting the first direction and the second direction respectively; and a third slider, mounted on the third guide rail and capable of moving along the third direction.

[0017] The fourth linear motion mechanism includes: a fourth guide rail, mounted on the fourth workbench surface and extending along a fourth direction intersecting the first direction, the second direction, and the third direction respectively; and a fourth slider, mounted on the fourth guide rail and capable of moving along the fourth direction.

[0018] The first driving part includes a first moving part mounted on the third slider, which makes the first moving part perform linear reciprocating motion in the first direction; and

[0019] The second driving part includes a second moving part mounted on the fourth slider, which makes the second moving part perform linear reciprocating motion in the first direction.

[0020] Advantages of the Invention

[0021] According to the above workbench device, low-profile of the device can be achieved. Description of the Drawings

[0022] Figure 1 It is a schematic perspective view showing the workbench device in Embodiment 1 of the present disclosure.

[0023] Figure 2 It is Figure 1 a schematic top view of the shown workbench device.

[0024] Figure 3 It is Figure 1 a schematic side view of the shown workbench device.

[0025] Figure 4 It is Figure 1 a schematic front view of the shown workbench device.

[0026] Figure 5 It is at Figure 2 a schematic cross-sectional view when cut at the cross-section shown by the arrow V-V in

[0027] Figure 6 It is at Figure 1Schematic perspective view of the workbench device when removing the workbench part described below.

[0028] Figure 7 is Figure 6 Schematic top view of the workbench device shown.

[0029] Figure 8 is Figure 6 Schematic side view of the workbench device shown.

[0030] Figure 9 is Figure 6 Schematic front view of the workbench device shown.

[0031] Figure 10 is in Figure 6 Schematic perspective view of the workbench device when removing the support part and the second linear motion device described below.

[0032] Figure 11 is Figure 10 Schematic top view of the workbench device shown.

[0033] Figure 12 is Figure 10 Schematic side view of the workbench device shown.

[0034] Figure 13 is Figure 10 Schematic front view of the workbench device shown.

[0035] Figure 14 is the schematic top view of the workbench device when the workbench part moves in the first direction in the direction shown by the arrow D1.

[0036] Figure 15 is the schematic top view of the workbench device when the workbench part moves in the first direction in the direction shown by the arrow D2.

[0037] Figure 16 is the schematic top view of the workbench device when the workbench part moves in the second direction in the direction shown by the arrow D3.

[0038] Figure 17 is the schematic top view of the workbench device when the workbench part moves in the second direction in the direction shown by the arrow D4.

[0039] Figure 18 is the schematic perspective view showing the workbench device in Embodiment 2 of the present disclosure.

[0040] Figure 19 is Figure 18 Schematic top view of the workbench device shown.

[0041] Figure 20 isFigure 18 Schematic side view of the workbench device shown

[0042] Figure 21 is Figure 18 Schematic front view of the workbench device shown

[0043] Figure 22 is at Figure 18 Schematic perspective view when removing the rotating table described below in the workbench device shown

[0044] Figure 23 is Figure 22 Schematic top view of the workbench device shown

[0045] Figure 24 is Figure 22 Schematic side view of the workbench device shown

[0046] Figure 25 is Figure 22 Schematic front view of the workbench device shown

[0047] Figure 26 Schematic perspective view showing the rotating table included in the workbench device described below

[0048] Figure 27 Schematic perspective view of the workbench device showing the state of rotating the rotating table described below

[0049] Figure 28 is Figure 27 Schematic top view of the workbench device shown

[0050] Figure 29 is Figure 27 Schematic side view of the workbench device shown

[0051] Figure 30 is Figure 27 Schematic front view of the workbench device shown Detailed implementation mode

[0052] [Summary of the implementation mode]

[0053] The workbench device of the present disclosure has:

[0054] A base portion having a base surface

[0055] A first linear motion mechanism including: a first guide rail installed on the base surface and extending in a first direction; and a first slider installed on the first guide rail and capable of moving in the first direction

[0056] The support part includes: a first support surface, facing the base surface and mounted on the first slider; and a second support surface, arranged at an interval from the first support surface in a direction perpendicular to the base surface; the support part can move along the first direction together with the first slider;

[0057] The second linear motion mechanism includes: a second guide rail, mounted on the second support surface and extending along a second direction intersecting the first direction; and a second slider, mounted on the second guide rail and capable of moving along the second direction;

[0058] The workbench part includes: a first workbench surface, facing the second support surface and mounted on the second slider; a second workbench surface, arranged at an interval from the first workbench surface in a direction perpendicular to the base surface; a third workbench surface, intersecting the first workbench surface and the second workbench surface respectively; and a fourth workbench surface, intersecting the first workbench surface, the second workbench surface and the third workbench surface respectively; the workbench part can move along the second direction together with the second slider;

[0059] The third linear motion mechanism includes: a third guide rail, mounted on the third workbench surface and extending along a third direction intersecting the first direction and the second direction respectively; and a third slider, mounted on the third guide rail and capable of moving along the third direction;

[0060] The fourth linear motion mechanism includes: a fourth guide rail, mounted on the fourth workbench surface and extending along a fourth direction intersecting the first direction, the second direction and the third direction respectively; and a fourth slider, mounted on the fourth guide rail and capable of moving along the fourth direction;

[0061] The first driving part includes a first moving part mounted on the third slider, which makes the first moving part perform a linear reciprocating motion in the first direction; and

[0062] The second driving part includes a second moving part mounted on the fourth slider, which makes the second moving part perform a linear reciprocating motion in the first direction.

[0063] According to the workbench device of the present disclosure, through the control of the linear reciprocating motion of the first moving part by the first driving part and the control of the linear reciprocating motion of the second moving part by the second driving part, and by using the guidance of the third linear motion mechanism and the guidance of the fourth linear motion mechanism, the workbench part can be moved to any position in the first direction and the second direction on the plane defined by the first direction and the second direction. In this case, the movement of the workbench part in the first direction is guided by the first linear motion mechanism, and the movement of the workbench part in the second direction is guided by the second linear motion mechanism, so the workbench part can be moved smoothly. Here, the first slider included in the first linear motion mechanism is installed on the first support surface of the support part, and the second guide rail included in the second linear motion mechanism is installed on the second support surface of the support part. Therefore, the mechanism for moving the workbench part in the first direction and the second direction can be reduced in the direction perpendicular to the base surface. Therefore, according to such a workbench device, the low-profile of the device can be achieved.

[0064] In the above workbench device, the first direction and the second direction may also be orthogonal. In this way, the movement of the workbench part in the first direction and the movement in the second direction in the above plane can be carried out more effectively.

[0065] In the above workbench device, the third direction and the fourth direction may also be orthogonal. In this way, the movement of the workbench part in the first direction and the movement in the second direction in the above plane can be carried out more effectively.

[0066] In the above workbench device, the first linear motion mechanism may also include a plurality of first guide rails and a plurality of first sliders. In this way, by using the plurality of first guide rails and the plurality of first sliders, the movement of the workbench part in the first direction can be carried out more stably.

[0067] In the above workbench device, the second linear motion mechanism may also include a plurality of second guide rails and a plurality of second sliders. In this way, by using the plurality of second guide rails and the plurality of second sliders, the movement of the workbench part in the second direction can be carried out more stably.

[0068] In the above workbench device, at least one of the first driving part and the second driving part may also include: a ball screw having a screw shaft and a nut; and a motor for rotating the screw shaft. In this way, it is easier to more strictly control the linear reciprocating motion of at least one of the first moving part and the second moving part. Therefore, it is easier to carry out strict positioning of the workbench part.

[0069] In the above workbench device, the third workbench surface and the fourth workbench surface may also be orthogonal. In this way, the movement of the workbench part in the first direction and the movement in the second direction in the above plane can be carried out more effectively.

[0070] In the above-described workbench device, the first drive unit and the second drive unit may also be arranged at intervals in the second direction. In this way, the extending directions of the cables connected to the first drive unit and the cables connected to the second drive unit can be made to coincide, and the handling of the cables during installation can be facilitated. Therefore, it is easier to achieve a lower cross-sectional area of the device.

[0071] In the above-described workbench device, the first linear motion mechanism may also include a pair of first guide rails and a pair of first sliders. The second linear motion mechanism may also include a pair of second guide rails and a pair of second sliders. The pair of first guide rails may be arranged in parallel. The pair of second guide rails may be arranged in parallel. The second guide rails may also be orthogonal to the first guide rails. In this way, the loads applied in the direction orthogonal to the base surface to the first linear motion mechanism and the second linear motion mechanism can be appropriately and dispersedly borne. Therefore, the movement of the workbench unit in the first direction and the second direction can be controlled more stably.

[0072] In the above-described workbench device, the third workbench surface and the fourth workbench surface may also extend in directions perpendicular to the base surface respectively to form the side surfaces of the workbench unit. In this way, the workbench unit can be formed with a simple structure. Therefore, the structure of the workbench device can be further simplified.

[0073] In the above-described workbench device, the first drive unit may also include a fifth linear motion mechanism. The second drive unit may also include a sixth linear motion mechanism. The fifth linear motion mechanism may also include: a fifth guide rail, which is installed on the base surface and extends in the first direction; and a fifth slider, which is installed on the fifth guide rail and can move in the first direction. The first moving part may also be installed on the fifth slider. The sixth linear motion mechanism may also include: a sixth guide rail, which is installed on the base surface and extends in the first direction; and a sixth slider, which is installed on the sixth guide rail and can move in the first direction. The second moving part may also be installed on the sixth slider. In this way, in the first drive unit, the fifth linear motion mechanism can be used to smoothly move the first moving part in the first direction. In addition, in the second drive unit, the sixth linear motion mechanism can be used to smoothly move the second moving part in the first direction. Therefore, the movement of the workbench unit can be made smoother.

[0074] In the above-mentioned workbench device, it may further include: a third driving part, including a third moving part capable of moving in a third direction intersecting the first direction, and causing the third moving part to perform a linear reciprocating motion in the third direction; a shaft part, extending in a direction perpendicular to the plane defined by the first direction and the third direction; a rotating part, installed on the third moving part and rotating around the shaft part as the third moving part moves; and a rotating table, arranged on the second workbench surface, installed on the rotating part and capable of rotating as the third moving part moves. In this way, the rotating table can be rotated on the plane defined by the first direction and the third direction. Then, the workbench part can be moved in the first direction and the second direction, and the rotating table can be rotated. Therefore, the convenience can be further improved.

[0075] In the above-mentioned workbench device, the third direction may also be orthogonal to the first direction and the same as the second direction. In this way, when the rotating table is rotated, the possibility of interference between the third driving part and the rotating table can be reduced, and it can be rotated efficiently.

[0076] In the above-mentioned workbench device, the third driving part may also include a seventh linear motion mechanism. The seventh linear motion mechanism may also include: a seventh guide rail, installed on the base table surface and extending in the third direction; and a seventh sliding part, installed on the seventh guide rail and capable of moving in the third direction. The third moving part may also be installed on the seventh sliding part. In this way, in the third driving part, the seventh linear motion mechanism can be used to smoothly move the third moving part in the third direction. Therefore, the rotation of the rotating table can be performed more smoothly.

[0077] In the above-mentioned workbench device, the rotating part may also include a bearing for supporting the shaft part. In this way, the rotation of the rotating part can be performed more smoothly. Therefore, the rotation of the rotating table can be performed more smoothly.

[0078] In the above-mentioned workbench device, the rotating part may also include: a mounting part, installed on the side surface of the rotating table; and an eighth linear motion mechanism. The eighth linear motion mechanism may also include: an eighth guide rail, installed on the mounting part and extending in the radial direction of the rotating table; and an eighth sliding part, installed on the eighth guide rail and capable of moving in the radial direction of the rotating table. The third moving part may also be installed on the eighth sliding part. In this way, the movement of the mounting part can be performed more smoothly. Therefore, the rotation of the rotating table can be performed more smoothly.

[0079] [Specific Example of Embodiment]

[0080] Next, an example of a specific embodiment of the workbench device of the present disclosure will be described with reference to the drawings. In the following drawings, the same or corresponding parts are given the same reference numerals and the description thereof will not be repeated.

[0081] (Embodiment 1)

[0082] First, an embodiment of the present disclosure, i.e., Embodiment 1, will be described. Figure 1 is a schematic perspective view showing a workbench device in Embodiment 1 of the present disclosure. In Figure 1 , the arrow X indicates the direction from the front to the back of the workbench device, the arrow Y indicates the direction from the left side to the right side of the workbench device, and the arrow Z indicates the direction from the bottom to the top of the workbench device. The direction indicated by the arrow Z is set as the height direction of the workbench device. The same applies to the following figures.

[0083] Figure 2 is Figure 1 a schematic top view of the workbench device shown. In addition, regarding the cables described later, they are only illustrated in Figure 2 , Figure 7 and Figure 11 , and the illustration in other figures is omitted. Figure 3 is Figure 1 a schematic side view of the workbench device shown. Figure 4 is Figure 1 a schematic front view of the workbench device shown. Figure 5 is a schematic cross-sectional view when cut at the cross-section indicated by the arrow V-V in Figure 2 . Figure 6 is a schematic perspective view of the workbench device shown in Figure 1 when removing the workbench part described later. Figure 7 is Figure 6 a schematic top view of the workbench device shown. Figure 8 is Figure 6 a schematic side view of the workbench device shown. Figure 9 is Figure 6 a schematic front view of the workbench device shown. Figure 10 is a schematic perspective view of the workbench device shown in Figure 6 when removing the support part and the second linear motion device described later. Figure 11 is Figure 10 a schematic top view of the workbench device shown. Figure 12 is Figure 10 a schematic side view of the workbench device shown. Figure 13 is Figure 10 a schematic front view of the workbench device shown.

[0084] Referring to Figures 1 to 13 , the workbench device 10 in Embodiment 1 of the present disclosure moves the workbench part 13 described later in the first direction, i.e., the X direction, and the second direction, i.e., the Y direction, to determine its position.

[0085] The table device 10 includes a base portion 11, a support portion 12, and a table portion 13. The base portion 11 is plate-shaped. In the present embodiment, when viewed from the height direction of the table device 10, that is, the thickness direction (Z direction), the base portion 11 is a rectangle whose length in the X direction is longer than the length in the Y direction. The base portion 11 includes a base surface 14 on one side in the thickness direction. The base surface 14 is a surface on which the first linear motion mechanism and the like, which will be described later, are placed. The base surface 14 is a flat surface and is parallel to the X-Y plane.

[0086] The support portion 12 includes: a first support surface 15 facing the base surface 14; and a second support surface 16 disposed at an interval from the first support surface 15 in the direction perpendicular to the base surface 14, that is, the Z direction. The support portion 12 is disposed at an interval from the base portion 11 and the table portion 13 respectively between the base portion 11 and the table portion 13 in the Z direction. That is, the support portion 12 is disposed between the base portion 11 and the table portion 13 in the Z direction.

[0087] The table portion 13 includes: a first table surface 21 facing the second support surface 16; a second table surface 22 disposed at an interval from the first table surface 21 in the Z direction; a third table surface 23 intersecting the first table surface 21 and the second table surface 22 respectively; and a fourth table surface 24 intersecting the first table surface 21, the second table surface 22, and the third table surface respectively. An object is placed on the second table surface 22 or the object is mounted using four mounting holes 27 opened on the second table surface 22. That is, the second table surface 22 functions as a table surface for placing an object in the table device 10. The third table surface 23 and the fourth table surface 24 extend in a direction perpendicular to the base surface 14 respectively. The third table surface 23 and the fourth table surface 24 are disposed adjacent to each other. The third table surface 23 and the fourth table surface 24 respectively constitute the side surfaces of the table portion 13. The structures of the support portion 12 and the table portion 13 will be described in detail later.

[0088] The table device 10 includes a first linear motion mechanism 31, a second linear motion mechanism 32, a third linear motion mechanism 33, and a fourth linear motion mechanism 34. In addition, the table device 10 includes a first drive portion 61 and a second drive portion 62.

[0089] The first linear motion mechanism 31 is installed on the base portion 11. The first linear motion mechanism 31 includes: first guide rails 41a, 41b extending along the first direction, i.e., the X direction; and first sliders 51a, 51b respectively installed on the first guide rails 41a, 41b and capable of moving along the first direction, i.e., the X direction. That is, the first guide rails 41a, 41b are respectively arranged such that the length direction is the X direction. In the present embodiment, the workbench device 10 includes a plurality of first guide rails 41a, 41b, specifically, a pair (two) of first guide rails 41a, 41b. The first guide rails 41a, 41b are respectively installed on the base table surface 14. The first guide rails 41a, 41b are respectively fixed to the base table surface 14 by bolts (not shown). The pair of first guide rails 41a, 41b are arranged in parallel at intervals in the Y direction. Guide rail raceways are provided on both side surfaces of the first guide rails 41a, 41b in the Y direction, and the raceways are for rolling elements, which are balls in the present embodiment, to roll.

[0090] The first slider 51a installed on the first guide rail 41a can move along the X direction. The first slider 51a can smoothly perform linear reciprocating motion in the X direction by using a plurality of balls arranged between the first slider 51a and the guide rail raceway of the first guide rail 41a. The first slider 51b installed on the first guide rail 41b also moves along the X direction in the same manner as the first slider 51a. The first slider 51b can smoothly perform linear reciprocating motion in the X direction by using a plurality of balls arranged between the first slider 51b and the guide rail raceway of the first guide rail 41b.

[0091] The support portion 12 is in a flat plate shape. When observed from a direction perpendicular to the base table surface 14, the support portion 12 is in a shape with the corners of a rectangle removed. The support portion 12 is installed on the first sliders 51a, 51b. Specifically, the first support surface 15 of the support portion 12 facing the base table surface 14 is installed in a manner of being placed on the first sliders 51a, 51b. The support portion 12 is fixed to the first sliders 51a, 51b by bolts (not shown). Since the support portion 12 is installed on the first sliders 51a, 51b, when the support portion 12 moves in the X direction, it is guided by the first linear motion mechanism 31. That is, the support portion 12 can move along the first direction, i.e., the X direction, together with the first sliders 51a, 51b.

[0092] The second linear motion mechanism 32 is installed on the support portion 12. The second linear motion mechanism 32 includes: second guide rails 42a, 42b extending along a second direction, i.e., the Y direction; and second sliders 52a, 52b respectively installed on the second guide rails 42a, 42b and capable of moving along the second direction, i.e., the Y direction. That is, the second guide rails 42a, 42b are respectively arranged such that the longitudinal direction is the Y direction. In the present embodiment, the table device 10 includes a plurality of second guide rails 42a, 42b, specifically, a pair (two) of second guide rails 42a, 42b. The second guide rails 42a, 42b are respectively installed on the second support surface 16. The second guide rails 42a, 42b are respectively fixed to the second support surface 16 by bolts (not shown). The pair of second guide rails 42a, 42b are arranged in parallel at intervals in the X direction. In addition, the second guide rails 42a, 42b are respectively orthogonal to the first guide rails 41a, 41b. Guide rail raceways are provided on both side surfaces in the X direction of the respective second guide rails 42a, 42b, and the raceways are for rolling surfaces of rolling elements, which are balls in the present embodiment, to roll.

[0093] The second slider 52a installed on the second guide rail 42a can move along the Y direction. The second slider 52a can smoothly perform linear reciprocating motion in the Y direction by means of a plurality of balls arranged between the second slider 52a and the guide rail raceway of the second guide rail 42a. The second slider 52b installed on the second guide rail 42b can also move along the Y direction in the same manner as the second slider 52a. The second slider 52b can smoothly perform linear reciprocating motion in the Y direction by means of a plurality of balls arranged between the second slider 52b and the guide rail raceway of the second guide rail 42b.

[0094] The table portion 13 is in a flat plate shape. When viewed from a direction perpendicular to the base table surface 14, the table portion 13 is rectangular. The table portion 13 is mounted on the second sliding members 52a and 52b. Specifically, the first table surface 21 of the table portion 13 facing the second support surface 16 is mounted in a manner of being placed on the second sliding members 52a and 52b. In addition, the third table surface 23 and the fourth table surface 24 of the table portion 13 are inclined by 45 degrees with respect to the X direction and the Y direction, respectively. The table portion 13 is fixed to the second sliding members 52a and 52b by bolts (not shown). Since the table portion 13 is mounted on the second sliding members 52a and 52b, when the table portion 13 moves in the Y direction, it is guided by the second linear motion mechanism 32. That is, the table portion 13 can move in the second direction, i.e., the Y direction, together with the second sliding members 52a and 52b. In addition, since the table portion 13 is mounted on the support portion 12 that can move in the X direction, it can move in the X direction together with the support portion 12. That is, the table portion 13 can move in the X direction and the Y direction. When the table portion 13 moves in the X direction, it is guided by the first linear motion mechanism 31, and when the table portion 13 moves in the Y direction, it is guided by the second linear motion mechanism 32.

[0095] The third linear motion mechanism 33 is mounted on the third table surface 23. The third linear motion mechanism 33 includes: a third guide rail 43a extending in a third direction that intersects the first direction, i.e., the X direction, and the second direction, i.e., the Y direction, respectively; and a third sliding member 53a mounted on the third guide rail 43a and capable of moving in the third direction. In the present embodiment, the third direction is a direction inclined by 45 degrees with respect to both the X direction and the Y direction. The third guide rail 43a is arranged such that the length direction is a direction inclined by 45 degrees with respect to both the X direction and the Y direction. In the present embodiment, the third guide rail 43a is fixed to the third table surface 23 by bolts (not shown). Guide rail raceways are provided on both side surfaces of the third guide rail 43a, and the guide rail raceways are for the rolling surfaces of rolling elements, which are balls in the present embodiment, to roll.

[0096] The fourth linear motion mechanism 34 is mounted on the fourth table surface 24. The fourth linear motion mechanism 34 includes: a fourth guide rail 44a extending in a fourth direction that intersects the first direction, i.e., the X direction, the second direction, i.e., the Y direction, and the third direction, respectively; and a fourth sliding member 54a mounted on the fourth guide rail 44a and capable of moving in the fourth direction. In the present embodiment, the fourth direction is a direction inclined by 45 degrees with respect to both the X direction and the Y direction, and is a direction orthogonal to the third direction. The fourth guide rail 44a is arranged such that the length direction is a direction inclined by 45 degrees with respect to both the X direction and the Y direction. In the present embodiment, the fourth guide rail 44a is fixed to the fourth table surface 24 by bolts (not shown). Guide rail raceways are provided on both side surfaces of the fourth guide rail 44a, and the guide rail raceways are for the rolling surfaces of rolling elements, which are balls in the present embodiment, to roll.

[0097] The first drive unit 61 and the second drive unit 62 are respectively attached to the base unit 11. Specifically, the first drive unit 61 and the second drive unit 62 are arranged at a distance from each other in the Y direction, which is the second direction.

[0098] The first driving part 61 includes a first moving part 63a. The first moving part 63a is block-shaped and includes a first mounting surface 25 facing the third work table 23. The first mounting surface 25 is a plane and is inclined 45 degrees with respect to both the X direction and the Y direction. In this embodiment, the first mounting surface 25 is parallel to the third work table 23. The first moving part 63a is mounted on the third sliding member 53a. In this case, it is also mounted using bolts not shown.

[0099] The first drive unit 61 includes: a ball screw 65a having a screw shaft 64a and a nut 67a; and a motor 66a that rotates the screw shaft 64a. The nut 67a is mounted on the screw shaft 64a. The first moving unit 63a is mounted on the nut 67a. The screw shaft 64a can be rotated by supplying power to the motor 66a to rotate the rotating shaft of the motor 66a. The motor 66a can also rotate the screw shaft 64a in the reverse direction. That is, the motor 66a can rotate the screw shaft 64a in the forward direction or the reverse direction. The cable 68a connected to the first drive unit 61 and extending from the side of the motor 66a on the side facing the motor 66b extends from the motor 66a in the direction of arrow Y (see in particular). Figure 2 , Figure 7 and Figure 11 ).

[0100] In addition, the first drive unit 61 includes a fifth direct-acting mechanism 35. The fifth direct-acting mechanism 35 is mounted on the base portion 11. The fifth direct-acting mechanism 35 includes: a fifth guide rail 45a extending in a first direction, i.e., the X direction; and a fifth sliding member 55a, mounted on the fifth guide rail 45a, and capable of moving in the first direction, i.e., the X direction. That is, the fifth guide rail 45a is configured so that the length direction becomes the X direction. The fifth guide rail 45a is mounted on the base surface 14. The fifth guide rail 45a is fixed to the base surface 14 by bolts not shown. Guide rail track surfaces are provided on both side surfaces in the Y direction of the fifth guide rail 45a, and the guide rail track surfaces are provided for the rolling surfaces of the rolling bodies, which are balls in this embodiment, to roll.

[0101] The fifth slider 55a mounted on the fifth guide rail 45a can move in the X direction. The fifth slider 55a can smoothly perform linear reciprocating motion in the X direction by using a plurality of balls arranged between the fifth slider 55a and the guide rail surface of the fifth guide rail 45a. The first moving portion 63a is mounted on the fifth slider 55a. When the first moving portion 63a performs linear reciprocating motion in the X direction, it is appropriately guided by the fifth direct-acting mechanism 35.

[0102] The second driving part 62 includes a second moving part 63b. The second moving part 63b is block-shaped and includes a second mounting surface 26 facing the fourth work table 24. The second mounting surface 26 is a plane and is inclined 45 degrees with respect to both the X direction and the Y direction. In addition, the second mounting surface 26 is orthogonal to the first mounting surface 25. In this embodiment, the second mounting surface 26 is parallel to the fourth work table 24. The second moving part 63b is mounted on the fourth sliding member 54a. In this case, it is also mounted using bolts not shown.

[0103] The second drive unit 62 includes: a ball screw 65b having a screw shaft 64b and a nut 67b; and a motor 66b that rotates the screw shaft 64b. The nut 67b is mounted on the screw shaft 64b. The second moving unit 63b is mounted on the nut 67b. The screw shaft 64b can be rotated by supplying power to the motor 66b to rotate the rotating shaft of the motor 66b. The motor 66b can also rotate the screw shaft 64b in the reverse direction. That is, the motor 66b can rotate the screw shaft 64b in the forward direction or the reverse direction. The cable 68b connected to the second drive unit 62 and extending from the side of the motor 66b on the side facing the motor 66a extends from the motor 66b in the direction of arrow Y (see in particular). Figure 2 , Figure 7 and Figure 11 ).

[0104] In addition, the second drive unit 62 includes a sixth direct-acting mechanism 36. The sixth direct-acting mechanism 36 is installed on the base portion 11. The sixth direct-acting mechanism 36 includes: a sixth guide rail 46a extending in a first direction, i.e., the X direction; and a sixth sliding member 56a installed on the sixth guide rail 46a, which can move in the first direction, i.e., the X direction. That is, the sixth guide rail 46a is configured so that the length direction becomes the X direction. The sixth guide rail 46a is installed on the base surface 14. The sixth guide rail 46a is fixed to the base surface 14 by bolts not shown. Guide rail track surfaces are installed on both side surfaces in the Y direction of the sixth guide rail 46a, and the guide rail track surfaces are for the rolling surfaces of the rolling bodies, which are balls in this embodiment, to roll.

[0105] The sixth slide 56a mounted on the sixth guide rail 46a can move in the X direction. The sixth slide 56a can smoothly perform linear reciprocating motion in the X direction by using a plurality of balls disposed between the sixth slide 56a and the guide rail surface of the sixth guide rail 46a. The second moving portion 63b is mounted on the sixth slide 56a. When the second moving portion 63b performs linear reciprocating motion in the X direction, it is appropriately guided by the sixth direct-acting mechanism 36.

[0106] Next, the operation of the workbench device 10 of the above structure is described. The workbench device 10 moves the workbench portion 13 in a first direction, i.e., the X direction, and in a second direction, i.e., the Y direction, for positioning. When the motor 66a rotates, the first moving portion 63a mounted on the nut 67a is moved in the direction indicated by the arrow X or in the opposite direction thereof by the ball screw 65a. In addition, when the motor 66b is rotated, the second moving portion 63b mounted on the nut 67b is moved in the direction indicated by the arrow X or in the opposite direction thereof by the ball screw 65b. The movement of the first moving portion 63a and the movement of the second moving portion 63b are linked to each other, and the movement of the workbench portion 13 is guided by the third direct-acting mechanism 33 and the fourth direct-acting mechanism 34, so that the workbench portion 13 can be moved on the XY plane.

[0107] Next, the specific operation of the stage unit 13 during movement will be described. Figures 14 to 17 is a schematic top view of the workbench device 10, showing a further simplified Figure 2 The state of the workbench device 10 is shown. Figure 14 It is a schematic plan view of the table device 10 when the table portion 13 is moved in the first direction in the direction indicated by the arrow D1. Figure 15 It is a schematic plan view of the table device 10 when the table portion 13 is moved in the direction indicated by the arrow D2 in the first direction. Figure 16 It is a schematic plan view of the table device 10 when the table portion 13 is moved in the direction indicated by the arrow D3 in the second direction. Figure 17 1 is a schematic top view of the table device 10 when the table portion 13 is moved in the direction indicated by the arrow D4 in the second direction. Figures 14 to 17 In the figure, the reference line 70a indicated by the dashed line indicates the reference position of the table 13 in the X direction, and the center line 71a indicated by the double dashed line indicates the center position of the table 13 in the X direction. In addition, the reference line 70b indicated by the dashed line indicates the reference position of the table 13 in the Y direction, and the center line 71b indicated by the double dashed line indicates the center position of the table 13 in the Y direction. Arrow D1 and arrow D2 are opposite in the first direction (X direction). Arrow D3 and arrow D4 are opposite in the second direction (Y direction).

[0108] First, refer to Figure 14, when it is desired to move the table portion 13 in the first direction in the direction indicated by arrow D1, for example, the motor 66a is rotated in the positive direction to rotate the lead screw shaft 64a in the positive direction. Then, the first moving portion 63a moves in the direction indicated by arrow V1. Further, for example, the motor 66b is rotated in the positive direction to rotate the lead screw shaft 64b in the positive direction. Then, the second moving portion 63b moves in the direction indicated by arrow W1. In this way, in the first direction (X direction), it is possible to achieve the movement of the table portion 13 with a stroke of length L1 in the direction indicated by arrow D1.

[0109] Next, referring to Figure 15 , when it is desired to move the table portion 13 in the first direction in the direction indicated by arrow D2, for example, the motor 66a is rotated in the reverse direction to rotate the lead screw shaft 64a in the reverse direction. Then, the first moving portion 63a moves in the direction indicated by arrow V2. Further, for example, the motor 66b is rotated in the reverse direction to rotate the lead screw shaft 64b in the reverse direction. Then, the second moving portion 63b moves in the direction indicated by arrow W2. In this way, in the first direction (X direction), it is possible to achieve the movement of the table portion 13 with a stroke of length L2 in the direction indicated by arrow D2.

[0110] Next, referring to Figure 16 , when it is desired to move the table portion 13 in the second direction in the direction indicated by arrow D3, for example, the motor 66a is rotated in the reverse direction to rotate the lead screw shaft 64a in the reverse direction. Then, the first moving portion 63a moves in the direction indicated by arrow V3. Further, for example, the motor 66b is rotated in the positive direction to rotate the lead screw shaft 64b in the positive direction. Then, the second moving portion 63b moves in the direction indicated by arrow W3. In this way, in the second direction (Y direction), it is possible to achieve the movement of the table portion 13 with a stroke of length L3 in the direction indicated by arrow D3.

[0111] Next, referring to Figure 17 , when it is desired to move the table portion 13 in the second direction in the direction indicated by arrow D4, for example, the motor 66a is rotated in the positive direction to rotate the lead screw shaft 64a in the positive direction. Then, the first moving portion 63a moves in the direction indicated by arrow V4. Further, for example, the motor 66b is rotated in the reverse direction to rotate the lead screw shaft 64b in the reverse direction. Then, the second moving portion 63b moves in the direction indicated by arrow W4. In this way, in the second direction (Y direction), it is possible to achieve the movement of the table portion 13 with a stroke of length L4 in the direction indicated by arrow D4.

[0112] According to the above-described workbench device 10, by controlling the linear reciprocating motion of the first moving part 63a by the first driving part 61 and the linear reciprocating motion of the second moving part 63b by the second driving part 62, and using the guidance by the third linear motion mechanism 33 and the guidance by the fourth linear motion mechanism 34, the workbench part 13 can be moved to any position in the first direction and the second direction on the plane defined by the first direction and the second direction. In this case, the movement of the workbench part 13 in the first direction is guided by the first linear motion mechanism 31, and the movement of the workbench part 13 in the second direction is guided by the second linear motion mechanism 32, enabling the workbench part 13 to move smoothly. Here, the first sliders 51a, 51b included in the first linear motion mechanism 31 are mounted on the first support surface 15 of the support part 12, and the second guide rails 42a, 42b included in the second linear motion mechanism 32 are mounted on the second support surface 16 of the support part 12. Therefore, the mechanism for moving the workbench part 13 in the first direction and the second direction can be reduced in the direction perpendicular to the base surface 14. Thus, according to such a workbench device 10, the low-profile of the device can be achieved. That is, according to such a workbench device 10, the length in the Z direction, which is perpendicular to the X-Y plane, can be reduced.

[0113] In the present embodiment, the first direction and the second direction are orthogonal. Therefore, the movement of the workbench part 13 in the first direction and the movement in the second direction in the above-described plane (X-Y plane) can be performed more effectively.

[0114] In the present embodiment, the third direction and the fourth direction are orthogonal. Therefore, the movement of the workbench part 13 in the first direction and the movement in the second direction in the above-described plane (X-Y plane) can be performed more effectively.

[0115] In the present embodiment, the first linear motion mechanism 31 includes a plurality of first guide rails 41a, 41b and a plurality of first sliders 51a, 51b. Therefore, by using the plurality of first guide rails 41a, 41b and the plurality of first sliders 51a, 51b, the movement of the workbench part 13 in the first direction can be performed more stably.

[0116] In the present embodiment, the second linear motion mechanism 32 includes a plurality of second guide rails 42a, 42b and a plurality of second sliders 52a, 52b. Therefore, by using the plurality of second guide rails 42a, 42b and the plurality of second sliders 52a, 52b, the movement of the workbench part 13 in the second direction can be performed more stably.

[0117] In the present embodiment, both the first drive unit 61 and the second drive unit 62 include: ball screws 65a, 65b having screw shafts 64a, 64b; and electric motors 66a, 66b for rotating the screw shafts 64a, 64b. Therefore, it is easier to more strictly control the linear reciprocating motions of both the first moving unit 63a and the second moving unit 63b. Accordingly, it is possible to more easily perform strict positioning of the worktable unit 13.

[0118] In the present embodiment, the third worktable surface 23 and the fourth worktable surface 24 are orthogonal. Therefore, it is possible to more effectively perform the movement of the worktable unit 13 in the first direction and the movement in the second direction in the above-mentioned plane (X - Y plane).

[0119] In the present embodiment, the first drive unit 61 and the second drive unit 62 are arranged at intervals in the second direction. Therefore, it is possible to make the extension directions (X direction) of the cable 68a connected to the first drive unit 61 and the extension direction (X direction) of the cable 68b connected to the second drive unit 62 coincide, and it is possible to facilitate the handling of the cables 68a, 68b during installation. Accordingly, it is easier to achieve a lower cross - sectional area of the device.

[0120] In the present embodiment, the first linear motion mechanism may also include a pair of first guide rails and a pair of first sliding members. The second linear motion mechanism may also include a pair of second guide rails and a pair of second sliding members. The pair of first guide rails may be arranged in parallel. The pair of second guide rails may be arranged in parallel. The second guide rails may also be orthogonal to the first guide rails. In this way, it is possible to appropriately and dispersedly bear the loads applied to the first linear motion mechanism and the second linear motion mechanism in the direction orthogonal to the base surface. Therefore, it is possible to more stably control the movement of the worktable unit in the first direction and the second direction.

[0121] In the present embodiment, the third worktable surface 23 and the fourth worktable surface 24 respectively extend in a direction perpendicular to the base surface 14 and constitute the side surfaces of the worktable unit 13. Therefore, the worktable unit 13 can be formed with a simpler structure. Accordingly, the structure of the worktable device 10 can be further simplified.

[0122] (Embodiment 2)

[0123] Another embodiment, namely Embodiment 2, will be described. Figure 18 It is a schematic perspective view of the worktable device in Embodiment 2 of the present disclosure. Figure 19 is Figure 18 the schematic top view of the worktable device shown. Figure 20 is Figure 18 the schematic side view of the worktable device shown. Figure 21 is Figure 18 the schematic front view of the worktable device shown. Figure 22 is inFigure 18 Schematic perspective view of the workbench device when removing the rotary table described below. Figure 23 is Figure 22 Schematic top view of the workbench device shown. Figure 24 is Figure 22 Schematic side view of the workbench device shown. Figure 25 is Figure 22 Schematic front view of the workbench device shown. Figure 26 is a schematic perspective view showing the rotary table described below included in the workbench device. In addition, in Figure 19 , the reference line 91a before rotation of the rotary table 77 and the mounting portion 79 described below is indicated by a dotted line.

[0124] The workbench device 17 in the second embodiment has substantially the same structure as that in the first embodiment and exhibits the same effects. However, the difference between the workbench device 17 in the second embodiment and the first embodiment lies in the structure of the workbench portion, and it has a structure in which the rotary table mounted on the workbench portion can rotate in the XY plane.

[0125] Referring to Figures 18 to 26 , similar to the first embodiment, the workbench device 17 in the second embodiment includes a base portion 18, a support portion 12, a first linear motion mechanism 31, a second linear motion mechanism 32, a third linear motion mechanism 33, a fourth linear motion mechanism 34, a first drive portion 61, and a second drive portion 62. The structures of the support portion 12, the first linear motion mechanism 31, the second linear motion mechanism 32, the third linear motion mechanism 33, the fourth linear motion mechanism 34, the fifth linear motion mechanism 35, the sixth linear motion mechanism 36, the first drive portion 61, and the second drive portion 62 included in the workbench device 17 are the same as those in the first embodiment. In addition, the base portion 18 included in the workbench device 17 has the same structure as that in the first embodiment except that the length in the length direction, i.e., the X direction, is longer than the base portion 11 included in the workbench device 10 in the first embodiment.

[0126] The workbench device 17 includes a workbench portion 19. The workbench portion 19 has substantially the same structure as the workbench portion 13 included in the workbench device 10 in the first embodiment, but the structure of the second workbench surface is different from that of the workbench portion 13 included in the first embodiment. The second workbench surface 29 included in the workbench portion 19 of the workbench device 17 is not only composed of a plane but also provided with a cylindrical concave portion 73. The concave portion 73 is provided at the center of the second workbench surface 29. The concave portion 73 is sized to be able to embed the cylindrical convex portion 74 provided on the back surface 86 of the rotary table 77 described below. Specifically, the diameter of the concave portion 73 is configured to be slightly larger than the diameter of the convex portion 74.

[0127] The workbench device 17 includes a third drive unit 69, a shaft 75, a rotating unit 76 and a rotating table 77. The third drive unit 69 includes a third movable unit 63c that can move along a third direction that intersects the first direction. The third direction is orthogonal to the first direction (X direction) and is the same direction as the second direction (Y direction). The third drive unit 69 causes the third movable unit 63c to perform linear reciprocating motion in the third direction (Y direction). The third drive unit 69 is installed on the base unit 18 in the same manner as the first drive unit 61 and the second drive unit 62. Specifically, the third drive unit 69 is arranged to be spaced apart from the first drive unit 61 and the second drive unit 62 in the X direction.

[0128] The third driving unit 69 includes: a ball screw 65c having a screw shaft 64c and a nut 67c; and a motor 66c, which rotates the screw shaft 64c. In addition, with respect to the motor 66c, the substantially rotating part is arranged inside it, and the reference numeral 66c refers to the frame part. The same is true for the above-mentioned motors 66a and 66b. The nut 67c is mounted on the screw shaft 64c. The third moving part 63c is mounted on the nut 67c. The screw shaft 64c can be rotated by rotating the rotating shaft of the motor 66c by supplying power to the motor 66c. The motor 66c can also rotate the screw shaft 64c in the reverse direction. That is, the motor 66c can rotate the screw shaft 64c in the positive direction or the reverse direction. The cable 68c connected to the third driving unit 69 and extending from the side of the motor 66c extends from the motor 66c in the direction of the arrow X.

[0129] The third moving part 63c is block-shaped. A rotating part 76 is mounted on the third moving part 63c. The third moving part 63c includes a seventh direct-acting mechanism 37. The seventh direct-acting mechanism 37 is mounted on the base part 18 in the same manner as the first direct-acting mechanism 31. The seventh direct-acting mechanism 37 includes: a seventh guide rail 47a extending in the second direction, i.e., the Y direction; and a seventh slide 57a mounted on the seventh guide rail 47a and capable of moving in the second direction, i.e., the Y direction. That is, the seventh guide rail 47a is configured so that the length direction becomes the Y direction. In the present embodiment, only one seventh guide rail 47a is provided and fixed on the base surface 28. The seventh guide rail 47a is provided on the extension line of the length direction of the first guide rails 41a and 41b at intervals in the X direction relative to a pair of first guide rails 41a and 41b. The seventh guide rail 47a extends in a direction orthogonal to the first guide rails 41a and 41b, respectively. Guide rail track surfaces are provided on both side surfaces in the X direction of the seventh guide rail 47 a , and rolling surfaces on which rolling elements, which are balls in this embodiment, roll.

[0130] The seventh slider 57a mounted on the seventh guide rail 47a is capable of moving in the Y direction. The seventh slider 57a can smoothly perform a linear reciprocating motion in the Y direction by means of a plurality of balls disposed between the guide rail surface of the seventh slider 57a and the seventh guide rail 47a. The third moving part 63c is mounted on the seventh slider 57a. When the third moving part 63c performs a linear reciprocating motion in the Y direction, it is properly guided by the seventh linear motion mechanism 37.

[0131] The shaft portion 75 extends in a direction perpendicular to the plane defined by the first direction and the third direction. In the present embodiment, it is provided to extend in a direction perpendicular to the X-Y plane. The shaft portion 75 is rod-shaped and is a solid cylindrical shape.

[0132] The rotating part 76 is mounted on the third moving part 63c. The rotating part 76 rotates about the center 90 of the rotating table 77 in the X-Y plane. Specifically, the rotating part 76 performs a swinging motion about the center 90 as the third moving part 63c moves. This will be described later. The rotating part 76 includes a circular plate part 88 and a bearing 78 that supports the shaft portion 75 (specifically refer to Figure 20 ). The circular plate part 88 is connected and integrated with one end of the shaft portion 75, specifically the upper end portion in the Z direction. The bearing 78 is, for example, a rolling bearing, and specifically a crossed roller bearing is adopted. The rotating part 76 includes a shaft holding part 87. The bearing 78 is disposed in the shaft holding part 87, specifically on the inner side of the shaft holding part 87. The shaft holding part 87 is block-shaped and is mounted and fixed on the side surface of the third moving part 63c. A through hole penetrating in the Z direction is provided in the shaft holding part 87, and the shaft portion 75 and the bearing 78 are disposed in this through hole. The shaft holding part 87 is a structure included in the rotating part 76, but the shaft holding part 87 itself does not rotate and performs a linear reciprocating motion in the third direction, that is, the Y direction, together with the third moving part 63c.

[0133] The rotating part 76 includes a mounting part 79. The mounting part 79 is plate-shaped with the Z direction as the thickness direction and includes a long first strip part 81 and a second strip part 82 extending in a direction orthogonal to the first strip part 81. When viewed from the thickness direction, the mounting part 79 is substantially T-shaped. The mounting part 79 is mounted on the side surface 83 of the rotating table 77.

[0134] The rotating part 76 includes an eighth linear motion mechanism 38. The eighth linear motion mechanism 38 is installed on the mounting part 79. The eighth linear motion mechanism 38 includes: an eighth guide rail 48a; and an eighth slider 58a, which is installed on the eighth guide rail 48a and can move along the eighth guide rail 48a. In the present embodiment, only one eighth guide rail 48a is provided and is fixed to the lower surface 84 in the mounting part 79. Guide rail raceways are provided on both side surfaces of the eighth guide rail 48a, and the rolling surfaces of rolling elements (which are balls in the present embodiment) roll on the guide rail raceways. The eighth slider 58a is installed and fixed to the upper surface 89 of the circular plate part 88.

[0135] The eighth guide rail 48a is provided so as to extend in the radial direction of the shaft part 75. The eighth slider 58a installed on the eighth guide rail 48a can move in the radial direction of the shaft part 75. The eighth slider 58a can smoothly perform linear reciprocating motion in the radial direction of the shaft part 75 by means of a plurality of balls arranged between the eighth slider 58a and the guide rail raceway of the eighth guide rail 48a.

[0136] The rotating table 77 is in the shape of a circular plate, and except for the side surface 83 where the mounting part 79 is installed, the side surfaces are arc-shaped. The surface 85 of the rotating table 77 is a plane. As described above, a convex part 74 is provided on the back surface 86 of the rotating table 77 (specifically refer to Figure 26 ). The rotating table 77 is installed by fitting the convex part 74 on the back surface 86 into the concave part 73 of the second workbench surface 29 provided on the workbench part 19. The convex part 74 is fitted into the concave part 73 via a rolling bearing (not shown). As the rolling bearing, for example, a crossed roller bearing is applied. With such a structure, the rotating table 77 is rotatably supported by the workbench part 19.

[0137] Next, the operation of rotating the rotating table 77 will be described. Figure 27 FIG. is a schematic perspective view of the workbench device 17 showing the state of rotating the rotating table 77. Figure 28 It is Figure 27 a schematic top view of the workbench device 17 shown in FIG. Figure 29 It is Figure 27 a schematic side view of the workbench device 17 shown in FIG. Figure 30 It is Figure 27 a schematic front view of the workbench device 17 shown in FIG. In addition, in Figure 28 , the reference line 91b after rotation of the rotating table 77 and the mounting part 79 is shown by a dotted line. Figures 27 to 30 FIG. shows the state where the rotating table 77 is rotated by an angle θ with respect to the reference line 91a.

[0138] Refer to simultaneously Figures 27 to 30, in the workbench device 17, the third drive unit 69 is driven to move the third moving unit 63c in the Y direction. Specifically, the third moving unit 63c is moved in the direction indicated by the arrow Y. Then, following the movement of the third moving unit 63c in the direction indicated by the arrow Y, the shaft holding unit 87 also moves in the direction indicated by the arrow Y. Moreover, the shaft portion 75 also moves in the direction indicated by the arrow Y. Here, a force to move in the direction of the arrow Y is also applied to the disk portion 88, the eighth linear motion mechanism 38, and the mounting portion 79 that are integrally formed with the shaft portion 75. However, the mounting portion 79 is mounted on the rotating table 77. In addition, the shaft portion 75 is supported by the bearing 78 included in the rotating portion 76, and the eighth linear motion mechanism 38 allows the rotating table 77 to move in the radial direction. Therefore, the mounting portion 79 and the eighth linear motion mechanism 38 do not move in the direction of the arrow Y, but the rotating table 77 is moved so as to rotate by an angle θ about the center 90 of the rotating table 77. In this way, the rotating table 77 is rotated by the angle θ.

[0139] According to such a workbench device 17, the rotating table 77 can be rotated in the X-Y plane, which is a plane defined by the first direction and the third direction. Then, the workbench portion 19 can be moved in the first direction and the second direction, and the rotating table 77 can be rotated. Therefore, it is possible to further improve convenience.

[0140] In the present embodiment, the third direction is orthogonal to the first direction and is the same direction as the second direction. Therefore, when the rotating table 77 is rotated, the possibility of interference between the third drive unit 69 and the rotating table 77 can be reduced, and efficient rotation can be achieved.

[0141] In the present embodiment, the third drive unit 69 includes a seventh linear motion mechanism 37. The seventh linear motion mechanism 37 includes: a seventh guide rail 47a mounted on the base table surface 28 and extending in the third direction; and a seventh slider 57a mounted on the seventh guide rail 47a and capable of moving in the third direction. The third moving unit 63c is mounted on the seventh slider 57a. Therefore, in the third drive unit 69, the seventh linear motion mechanism 37 can be used to smoothly move the third moving unit 63c in the third direction. Therefore, the rotation of the rotating table 77 can be performed more smoothly.

[0142] In the present embodiment, the rotating portion 76 includes a bearing 78 that supports the shaft portion 75. Therefore, the rotation of the rotating portion 76 can be performed more smoothly. Therefore, the rotation of the rotating table 77 can be performed more smoothly.

[0143] In the present embodiment, the rotating portion 76 includes: a mounting portion 79 mounted on the side surface 83 of the rotating table 77; and an eighth linear motion mechanism 38. The eighth linear motion mechanism 38 includes: an eighth guide rail 48a mounted on the mounting portion 79 and extending in the radial direction of the shaft portion 75; and an eighth slider 58a mounted on the eighth guide rail 48a and capable of moving in the radial direction of the rotating table 77. The third moving portion 63c is mounted on the eighth slider 58a. Therefore, the movement of the mounting portion 79 can be performed more smoothly. Therefore, the rotation of the rotating table 77 can be made more smooth.

[0144] (Other embodiments)

[0145] In addition, in the above-described embodiment, the first direction and the second direction may not be orthogonal. That is, the second direction may be an acute angle or an obtuse angle with respect to the first direction. Also, the third direction and the fourth direction may not be orthogonal. That is, the fourth direction may be an acute angle or an obtuse angle with respect to the third direction.

[0146] In addition, in the above-described embodiment, when viewed from a direction perpendicular to the base surface, the pair of first guide rails and the pair of second guide rails may be arranged at intervals. Even with such a structure, it is possible to appropriately disperse the loads applied to the first linear motion mechanism and the second linear motion mechanism in the direction orthogonal to the base surface. Therefore, the movement of the work table portion in the first direction and the second direction can be controlled more stably.

[0147] In addition, in the above-described embodiment, at least one of the first drive portion and the second drive portion may include a ball screw having a screw shaft and a motor for rotating the screw shaft. In this way, it is easier to more strictly control the linear reciprocating motion of at least one of the first moving portion and the second moving portion. Therefore, it is possible to more easily perform strict positioning of the work table portion.

[0148] The embodiments disclosed herein are illustrative in all respects and should be understood as having no limitation in any respect. The scope of the present invention is not defined by the above description, but by the claims, and is intended to include all modifications within the meaning and scope equivalent to the claims.

[0149] Explanation of reference numerals

[0150] 10, 17 Workbench device; 11, 18 Base portion; 12 Support portion; 13, 19 Workbench portion; 14, 28 Workbench surface; 15 First support surface; 16 Second support surface; 21 First workbench surface; 22, 29 Second workbench surface; 23 Third workbench surface; 24 Fourth workbench surface; 25 First mounting surface; 26 Second mounting surface; 27 Mounting hole; 31 First linear motion mechanism; 32 Second linear motion mechanism; 33 Third linear motion mechanism; 34 Fourth linear motion mechanism; 35 Fifth linear motion mechanism; 36 Sixth linear motion mechanism; 37 Seventh linear motion mechanism; 38 Eighth linear motion mechanism; 41a, 41b First guide rail; 42a, 42b Second guide rail; 43a Third guide rail; 44a Fourth guide rail; 45a Fifth guide rail; 46a Sixth guide rail; 47a Seventh guide rail; 48a Eighth guide rail; 51a, 51b First sliding member; 52a, 52b Second sliding member; 53a Third sliding member; 54a Fourth sliding member; 55a Fifth sliding member; 56a Sixth sliding member; 57a Seventh sliding member; 58a Eighth sliding member; 61 First driving portion; 62 Second driving portion; 63a First moving portion; 63b Second moving portion; 63c Third moving portion; 64a, 64b, 64c Lead screw shaft; 65a, 65b, 65c Ball screw; 66a, 66b, 66c Motor; 67a, 67b, 67c Nut; 68a, 68b, 68c Cable; 69 Third driving portion; 70a, 70b, 91a, 91b Reference line; 71a, 71b Center line; 73 Recess; 74 Protrusion; 75 Shaft portion; 76 Rotating portion; 77 Rotating table; 78 Bearing; 79 Mounting portion; 81 First strip portion; 82 Second strip portion; 83 Side; 84 Lower surface; 85 Surface; 86 Back; 87 Shaft holding portion; 88 Circular plate portion; 89 Upper surface; 90 Center.

Claims

1. A workbench device, wherein, it has: a base part having a base surface; a first linear motion mechanism including: a first guide rail installed on the base surface and extending in a first direction; and a first slider installed on the first guide rail and capable of moving in the first direction; a support part including: a first support surface facing the base surface and installed on the first slider; and a second support surface arranged at an interval from the first support surface in a direction perpendicular to the base surface; the support part can move in the first direction together with the first slider; a second linear motion mechanism including: a second guide rail installed on the second support surface and extending in a second direction intersecting the first direction; and a second slider installed on the second guide rail and capable of moving in the second direction; a workbench part including: a first workbench surface facing the second support surface and installed on the second slider; a second workbench surface arranged at an interval from the first workbench surface in a direction perpendicular to the base surface; a third workbench surface intersecting the first workbench surface and the second workbench surface respectively; and a fourth workbench surface intersecting the first workbench surface, the second workbench surface and the third workbench surface respectively; the workbench part can move in the second direction together with the second slider; a third linear motion mechanism including: a third guide rail installed on the third workbench surface and extending in a third direction intersecting the first direction and the second direction respectively; and a third slider installed on the third guide rail and capable of moving in the third direction; a fourth linear motion mechanism including: a fourth guide rail installed on the fourth workbench surface and extending in a fourth direction intersecting the first direction, the second direction and the third direction respectively; and a fourth slider installed on the fourth guide rail and capable of moving in the fourth direction; a first driving part including a first moving part installed on the third slider, causing the first moving part to perform a linear reciprocating motion in the first direction; and a second driving part including a second moving part installed on the fourth slider, causing the second moving part to perform a linear reciprocating motion in the first direction.

2. The workbench device according to claim 1, wherein, the first direction and the second direction are orthogonal.

3. The workbench device according to claim 1 or 2, wherein, the third direction and the fourth direction are orthogonal.

4. The workbench device according to claim 1 or 2, wherein, the first linear motion mechanism includes a plurality of the first guide rails and a plurality of the first sliders.

5. The workbench device according to claim 1 or 2, wherein, the second linear motion mechanism includes a plurality of the second guide rails and a plurality of the second sliders.

6. The workbench device according to claim 1 or 2, wherein, at least one of the first driving part and the second driving part includes: a ball screw having a screw shaft and a nut; and a motor for rotating the screw shaft.

7. The workbench device according to claim 1 or 2, wherein, The third workbench surface and the fourth workbench surface are orthogonal to each other.

8. The workbench device according to claim 1 or 2, wherein the first driving part and the second driving part are arranged at intervals in the second direction.

9. The workbench device according to claim 1 or 2, wherein the first linear motion mechanism includes a pair of the first guide rails and a pair of the first sliding members, the second linear motion mechanism includes a pair of the second guide rails and a pair of the second sliding members, a pair of the first guide rails are arranged in parallel, a pair of the second guide rails are arranged in parallel, the second guide rail and the first guide rail are orthogonal to each other.

10. The workbench device according to claim 1 or 2, wherein the third workbench surface and the fourth workbench surface respectively extend in a direction perpendicular to the base workbench surface, forming the side surfaces of the workbench part.

11. The workbench device according to claim 1 or 2, wherein the first driving part includes a fifth linear motion mechanism, the second driving part includes a sixth linear motion mechanism, the fifth linear motion mechanism includes: a fifth guide rail, installed on the base workbench surface and extending in the first direction; and a fifth sliding member, installed on the fifth guide rail and capable of moving in the first direction; the first moving part is installed on the fifth sliding member, the sixth linear motion mechanism includes: a sixth guide rail, installed on the base workbench surface and extending in the first direction; and a sixth sliding member, installed on the sixth guide rail and capable of moving in the first direction; the second moving part is installed on the sixth sliding member.

12. The workbench device according to claim 1 or 2, wherein it further has: a third driving part, including a third moving part capable of moving in a third direction intersecting with the first direction, and causing the third moving part to perform a linear reciprocating motion in the third direction; a shaft part, extending in a direction perpendicular to the plane defined by the first direction and the third direction; a rotating part, installed on the third moving part and rotating around the shaft part as the third moving part moves; and a rotating table, arranged on the second workbench surface, installed on the rotating part and capable of rotating as the third moving part moves.

13. The workbench device according to claim 12, wherein the third direction and the first direction are orthogonal to each other and are the same direction as the second direction.

14. The workbench device according to claim 12, wherein the third driving part includes a seventh linear motion mechanism, the seventh linear motion mechanism includes: a seventh guide rail, installed on the base workbench surface and extending in the third direction; and a seventh sliding member, installed on the seventh guide rail and capable of moving in the third direction; the third moving part is installed on the seventh sliding member.

15. The workbench device according to claim 12, wherein the rotating part includes a bearing for supporting the shaft part.

16. The workbench device according to claim 12, wherein the rotating part includes: a mounting part, installed on the side surface of the rotating table; and an eighth linear motion mechanism; the eighth linear motion mechanism includes: The eighth guide rail is installed on the installation part and extends along the radial direction of the rotary table; and The eighth slider is installed on the eighth guide rail and can move along the radial direction of the rotary table; The third moving part is installed on the eighth slider.

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