Cleaning machine for multi-channel condensation and recovery of cleaning liquid

Abstract

The invention discloses a cleaning machine for multi-channel condensation and recovery of cleaning fluid, and relates to the technical field of PCBA and semiconductor cleaning equipment. Cleaning fluid steam is condensed through a double-channel condensation assembly, so that the cleaning fluid in the air is cooled and liquefied and flows back into a cleaning fluid box through a backflow pipeline, so that repeated utilization is achieved, and the cleaning efficiency is improved. Meanwhile, cleaning liquid steam is condensed by means of the rotatable condenser, the condenser and airflow rotate in the opposite direction, the relative speed of the cooling face of the condenser and the airflow is increased, the turbulence intensity is increased, the effective releasing path is prolonged, and the heat dissipation effect is enhanced; condensate drops are thrown away from the condensation surface through centrifugal force, the liquid film thickness is reduced, and the heat conduction efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of PCBA and semiconductor cleaning equipment, and specifically provides a cleaning machine with multi-channel condensation recovery of cleaning liquid. Background Technique

[0002] PCBA and semiconductor cleaning machines are key equipment indispensable in the semiconductor manufacturing process. Their core function is to remove contaminants on the surface of PCBA and semiconductors, such as particles, metal ions, organic substances, and oxide layers, to ensure high yield and performance stability in chip manufacturing. As the cleaning nodes of PCBA and semiconductors continue to shrink, the requirements for cleaning technology are becoming increasingly stringent, which has promoted the continuous innovation and technological iteration of cleaning equipment.

[0003] Since PCBA and semiconductor cleaning machines usually control the temperature between 65 - 85°C using heating plates during cleaning, although it can improve cleaning efficiency, it also causes the evaporation and loss of the cleaning liquid, increasing the consumption of the cleaning liquid and the cleaning cost. At the same time, the organic substances in the cleaning liquid are prone to evaporation and will also pollute the air, increasing the pressure of waste gas treatment. Summary of the Invention

[0004] The purpose of the present invention is to provide a cleaning machine with multi-channel condensation recovery of cleaning liquid to solve the problem that the traditional PCBA and semiconductor cleaning machines are prone to evaporation and loss of the cleaning liquid during cleaning as mentioned in the above background.

[0005] To achieve the above purpose, the present invention provides the following technical solution: A cleaning machine with multi-channel condensation recovery of cleaning liquid includes a cleaning liquid tank. Above the cleaning liquid tank, there is a dual-channel condensation component. Inside the dual-channel condensation component, there are a first condensation channel and a second condensation channel. On one side of the cleaning liquid tank, there is an air knife. Above the air knife, there is a first exhaust pipe. The first exhaust pipe is connected to one end of the first condensation channel. The other end of the first condensation channel is connected to a first exhaust pipe, and the first exhaust pipe is connected to a first exhaust port. On the other side of the cleaning liquid tank, there is an inlet board isolation section. Above the inlet board isolation section, there is a second exhaust pipe. The second exhaust pipe is connected to one end of the second condensation channel. The other end of the second condensation channel is connected to a second exhaust pipe, and the second exhaust pipe is connected to a second exhaust port;

[0006] Inside the dual-channel condensation component, there are a first rotary condenser and a second rotary condenser rotatably connected. At the bottom of the first condensation channel inside the dual-channel condensation component, there is a first channel external condensation water drain ball valve. At the bottom of the second condensation channel, there is a second channel external condensation water drain ball valve. The first channel external condensation water drain ball valve and the second channel external condensation water drain ball valve are commonly connected to an external condensation water drain total ball valve through a pipeline. The external condensation water drain total ball valve is connected to the cleaning liquid tank through a pipeline.

[0007] In one example, the first rotary condenser and the second rotary condenser straddle the first condensation channel and the second condensation channel, and the centers of the first rotary condenser and the second rotary condenser are located between the first condensation channel and the second condensation channel.

[0008] In one example, the steam flow directions in the first condensation channel and the second condensation channel are opposite, and the rotation directions of the first rotary condenser and the second rotary condenser are opposite to the steam flow directions in the first condensation channel and the second condensation channel.

[0009] In one example, the first rotary condenser and the second rotary condenser have the same structure. The first rotary condenser and the second rotary condenser both include a disc condenser and a disc radiator. The disc condenser is located inside the first condensation channel and the second condensation channel, and the disc radiator is located outside the first condensation channel and the second condensation channel. The disc condenser and the disc radiator are penetrated by heat pipes together.

[0010] In one example, the disc condenser is composed of condensation discs arranged densely and parallelly. The heat pipes penetrate the condensation discs, and the heat pipes are fixed to the condensation discs by welding. The condensation discs are made of aluminum.

[0011] In one example, the disc radiator is composed of heat dissipation discs arranged densely and parallelly. The heat pipes penetrate the heat dissipation discs, and the heat pipes are fixed to the heat dissipation discs by welding. The heat dissipation discs are made of aluminum.

[0012] In one example, a first rotating shaft penetrates through and is fixedly connected to the center of the disc condenser. The first rotating shaft is rotationally connected to the housing of the dual-channel condensation assembly. The bottom of the first rotating shaft is connected to a driving motor through a gear drive.

[0013] In one example, an internal gear disc is fixedly connected to the bottom of the first rotating shaft. A planetary gear is meshed inside the internal gear disc, and a central gear is meshed inside the planetary gear. The central gear is fixedly connected to the driving motor.

[0014] In one example, a second rotating shaft penetrates through the first rotating shaft. The second rotating shaft is fixedly connected to the central gear. The second rotating shaft penetrates through the disc condenser and the disc radiator, and a heat dissipation fan is fixedly connected to the upper end of the second rotating shaft. An air intake central hole is formed in the center of the heat dissipation disc, and a centrifugal impeller is arranged around the disc radiator. The centrifugal impeller is welded around the heat dissipation disc.

[0015] In one example, a bypass pipeline is provided between the first channel pipe external condensate drain ball valve and the second channel pipe external condensate drain ball valve. A pipe external condensate sampling ball valve is provided on the bypass pipeline.

[0016] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0017] A cleaning machine for multi-channel condensation recovery of cleaning liquid proposed by the present invention condenses the cleaning liquid steam by using a dual-channel condensation component, so that the cleaning liquid in the air is cooled and liquefied and flows back into the cleaning liquid tank through a return pipeline to achieve reuse, reduce the consumption of cleaning liquid, save costs, and at the same time use a rotatable condenser to condense the cleaning liquid steam, making the condenser rotate in the opposite direction to the air flow, increasing the relative speed between the cooling surface of the condenser and the air flow, increasing the turbulence intensity, extending the effective removal path, enhancing the heat dissipation effect, and at the same time the rotation of the condenser will also generate a centrifugal force, so as to use the centrifugal force to throw the condensed liquid droplets away from the condensation surface, reduce the liquid film thickness, and improve the heat conduction efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The disclosure of the present invention will be described with reference to the accompanying drawings. It should be understood that the drawings are only for illustrative purposes and are not intended to limit the scope of protection of the present invention. In the drawings, the same reference numerals are used to refer to the same components. Among them:

[0019] Figure 1 Schematically shows an external structural diagram of a cleaning machine for multi-channel condensation recovery of cleaning liquid proposed according to an embodiment of the present invention;

[0020] Figure 2 Schematically shows a recovery path diagram of a cleaning machine for multi-channel condensation recovery of cleaning liquid proposed according to an embodiment of the present invention;

[0021] Figure 3 Schematically shows a structural diagram of a rotating condenser of a cleaning machine for multi-channel condensation recovery of cleaning liquid proposed according to an embodiment of the present invention;

[0022] Figure 4 Schematically shows a structural diagram of a dual-channel condensation component of a cleaning machine for multi-channel condensation recovery of cleaning liquid proposed according to an embodiment of the present invention;

[0023] Figure 5 Schematically shows a structural diagram of a condensation channel of a cleaning machine for multi-channel condensation recovery of cleaning liquid proposed according to an embodiment of the present invention;

[0024] Figure 6 Schematically shows a cross-sectional structural diagram of a dual-channel condensation component of a cleaning machine for multi-channel condensation recovery of cleaning liquid proposed according to an embodiment of the present invention;

[0025] Figure 7 Schematically shows a structural diagram of a rotating condenser of a cleaning machine for multi-channel condensation recovery of cleaning liquid proposed according to an embodiment of the present invention;

[0026] Figure 8Schematically shows a schematic structural diagram of a centrifugal impeller of a cleaning machine for multi-channel condensation recovery of a cleaning liquid according to an embodiment of the present invention;

[0027] Figure 9 Schematically shows a schematic cross-sectional structural diagram of a rotary condenser of a cleaning machine for multi-channel condensation recovery of a cleaning liquid according to an embodiment of the present invention;

[0028] Figure 10 Schematically shows a schematic structural diagram of a gear transmission of a cleaning machine for multi-channel condensation recovery of a cleaning liquid according to an embodiment of the present invention;

[0029] Figure 11 Schematically shows a schematic structural diagram of a condensation return pipeline of a cleaning machine for multi-channel condensation recovery of a cleaning liquid according to an embodiment of the present invention.

[0030] Reference numerals in the figure: 1, cleaning liquid tank; 2, dual-channel condensation assembly; 3, first condensation channel; 4, second condensation channel; 5, air shear; 6, first suction pipe; 7, first exhaust pipe; 8, first exhaust port; 9, inlet plate isolation section; 10, second suction pipe; 11, second exhaust pipe; 12, second exhaust port; 13, first rotary condenser; 14, second rotary condenser; 15, disc condenser; 16, disc radiator; 17, condensation disc; 18, heat dissipation disc; 19, heat pipe; 20, first rotating shaft; 21, internal gear disc; 22, planetary gear; 23, central gear; 24, drive motor; 25, second rotating shaft; 26, heat dissipation fan; 27, intake central hole; 28, centrifugal impeller; 29, first outer-channel condensate drain ball valve; 30, second outer-channel condensate drain ball valve; 31, total outer-channel condensate drain ball valve; 32, outer-channel condensate sampling ball valve. Detailed implementation manners

[0031] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0032] Example 1: As Figures 1-11As shown in the figure, a cleaning machine for multi-channel condensation recovery of cleaning liquid includes a cleaning liquid tank 1. Above the cleaning liquid tank 1, there is a dual-channel condensation component 2. Inside the dual-channel condensation component 2, there are a first condensation channel 3 and a second condensation channel 4. On one side of the cleaning liquid tank 1, there is an air knife 5. Above the air knife 5, there is a first exhaust pipe 6. The first exhaust pipe 6 is connected to one end of the first condensation channel 3. The other end of the first condensation channel 3 is connected to a first exhaust pipe 7. The first exhaust pipe 7 is connected to a first exhaust port 8. On the other side of the cleaning liquid tank 1, there is an inlet plate isolation section 9. Above the inlet plate isolation section 9, there is a second exhaust pipe 10. The second exhaust pipe 10 is connected to one end of the second condensation channel 4. The other end of the second condensation channel 4 is connected to a second exhaust pipe 11. The second exhaust pipe 11 is connected to a second exhaust port 12;

[0033] Inside the dual-channel condensation component 2, there are a first rotating condenser 13 and a second rotating condenser 14 rotatably connected. The first rotating condenser 13 and the second rotating condenser 14 straddle the first condensation channel 3 and the second condensation channel 4, and the centers of the first rotating condenser 13 and the second rotating condenser 14 are located between the first condensation channel 3 and the second condensation channel 4. When the cleaning liquid in the cleaning liquid tank 1 evaporates, it will overflow along both sides of the cleaning machine. When it overflows from the right side, it will be blocked by the air knife 5, and then be sucked into the first condensation channel 3 through the first exhaust pipe 6. The steam overflowing from the left side of the cleaning liquid tank 1 will be blocked by the inlet plate isolation section 9 and be drawn into the second condensation channel 4 through the second exhaust pipe 10. Thus, the steam flow directions in the first condensation channel 3 and the second condensation channel 4 are opposite. Here, the rotation directions of the first rotating condenser 13 and the second rotating condenser 14 are also opposite to the steam flow directions in the first condensation channel 3 and the second condensation channel 4, so that the effective contact path between the condenser and the steam is artificially increased by the self-rotation of the first rotating condenser 13 and the second rotating condenser 14.

[0034] Both the first rotary condenser 13 and the second rotary condenser 14 include a disc condenser 15 and a disc radiator 16. The disc condenser 15 is located inside the first condensation channel 3 and the second condensation channel 4, and the disc radiator 16 is located outside the first condensation channel 3 and the second condensation channel 4. The disc condenser 15 and the disc radiator 16 are both penetrated by a heat pipe 19. The disc condenser 15 is composed of condensation discs 17 arranged in dense parallel. The heat pipe 19 penetrates the condensation discs 17, and the heat pipe 19 is fixed to the condensation discs 17 by welding. The disc radiator 16 is composed of heat dissipation discs 18 arranged in dense parallel. The heat pipe 19 penetrates the heat dissipation discs 18, and the heat pipe 19 is fixed to the heat dissipation discs 18 by welding. Both the heat dissipation discs 18 and the condensation discs 17 are made of aluminum. Therefore, the hot steam passing through the first condensation channel 3 and the second condensation channel 4 will pass through the gaps between the condensation discs 17, thereby quickly conducting the heat to the condensation discs 17, and then transferring it to the heat pipe 19. The heat pipe 19 quickly conveys the heat to the disc radiator 16 to complete the heat transfer, enabling the cleaning liquid steam to be quickly condensed.

[0035] A first channel external condensate drain ball valve 29 is provided at the bottom of the first condensation channel 3 in the dual-channel condensation assembly 2, and a second channel external condensate drain ball valve 30 is provided at the bottom of the second condensation channel 4. The first channel external condensate drain ball valve 29 and the second channel external condensate drain ball valve 30 are jointly connected to an external condensate drain main ball valve 31 through a pipeline. The external condensate drain main ball valve 31 is connected to the cleaning liquid tank 1 through a pipeline. A bypass pipeline is provided between the first channel external condensate drain ball valve 29 and the second channel external condensate drain ball valve 30, and an external condensate sampling ball valve 32 is provided on the bypass pipeline for sampling and detecting the condensate.

[0036] Embodiment 2: A first rotating shaft 20 passes through the center of the disc condenser 15 and is fixedly connected thereto. The first rotating shaft 20 is rotationally connected to the housing of the dual-channel condensing assembly 2. The bottom of the first rotating shaft 20 is connected to a driving motor 24 through a gear drive. The bottom of the first rotating shaft 20 is fixedly connected to an internal gear disc 21. A planetary gear 22 is engaged inside the internal gear disc 21. A central gear 23 is engaged inside the planetary gear 22. The central gear 23 is fixedly connected to the driving motor 24. A second rotating shaft 25 passes through the first rotating shaft 20. The second rotating shaft 25 is fixedly connected to the central gear 23. The second rotating shaft 25 passes through the disc condenser 15 and the disc radiator 16. The upper end of the second rotating shaft 25 is fixedly connected to a cooling fan 26. An air intake central hole 27 is formed in the center of the heat dissipation disc 18. Centrifugal impellers 28 are arranged around the disc radiator 16. The centrifugal impellers 28 are welded to the periphery of the heat dissipation disc 18. Thus, the driving motor 24 can drive the first rotating condenser 13 and the second rotating condenser 14 to rotate slowly by the cooperation of the central gear 23, the planetary gear 22 and the internal gear disc 21. At the same time, the driving motor 24 also drives the cooling fan 26 to rotate at a high speed through the second rotating shaft 25. Thus, the outside cold air is conveyed downward from the air intake central hole 27 in the center of the heat dissipation disc 18. Thus, the cold air enters the gap between the multi-layer heat dissipation discs 18 to perform forced air cooling on the disc radiator 16. While the first rotating condenser 13 and the second rotating condenser 14 rotate slowly, the centrifugal impellers 28 outside the disc radiator 16 will also rotate, cooperating with the cooling fan 26 to dissipate heat from the disc radiator 16.

[0037] Working principle: During cleaning, the hot air containing the cleaning liquid vapor enters the first condensation channel 3 and the second condensation channel 4 from both ends respectively. The flow directions of the two are opposite, and both will pass through the gaps between the condensation discs 17 on the disc radiator 16. At the same time, the driving motor 24 drives the disc radiator 16 to rotate, and the rotation direction is opposite to the air flow direction. Thus, when the disc radiator 16 rotates, the relative speed between the surface of the heat dissipation disc 18 and the reverse air flow increases. Let the flow speed of the air flow in the first condensation channel 3 and the second condensation channel 4 be v. After the heat dissipation disc 18 rotates, the relative speed v r is:

[0038] v r = v + ωR;

[0039] ω is the angular velocity, R is the radius of the heat dissipation disc 18. If the rotation speed of the heat dissipation disc 18 is the same as the flow speed of the air flow in the first condensation channel 3 and the second condensation channel 4, then the relative speed v r is twice the air flow speed v, and the change in the Reynolds number is:

[0040]

[0041] Where L is the characteristic length, ρ is the fluid density, and μ is the dynamic viscosity.

[0042] The empirical relationship between the convective heat transfer coefficient h and the Reynolds number is:

[0043] h ∝ Re 0.8 × Pr 0.4 ;

[0044] Where Pr is the Prandtl number. When Re is doubled:

[0045]

[0046] It can be known that when the rotation speed of the heat dissipation disc 18 is the same as the flow speed of the air flow in the first condensation channel 3 and the second condensation channel 4, the heat transfer coefficient is increased by 74%.

[0047] The overall heat transfer coefficient U is determined by the series connection of the convective thermal resistance and the liquid film thermal resistance:

[0048]

[0049] Assume that h 静止 = 100 W / (m 2 ·K), R 液膜，静止 = 0.01 (m 2 ·K) / W, then:

[0050]

[0051] After rotation, h 旋转 = 1.74 × 100 = 174 W / (m 2 ·K), R 液膜，旋转 = 0.5 × 0.01 = 0.005 (m 2 ·K) / W, then:

[0052]

[0053] The condensation rate is determined by the overall heat transfer equation:

[0054]

[0055] If the heat transfer area A and the temperature difference ▽T remain unchanged, then:

[0056]

[0057] That is, the condensation efficiency is increased by 95%. If the rotation is considered to extend the air flow path, when the path length is increased by 20%, A eff ∝ 1.2A, and the final efficiency improvement can reach:

[0058] 1.95 × 1.2 ≈ 2.34;

[0059] Then, when the reverse rotation of the heat dissipation disc 18 doubles the relative velocity of the air flow, the heat transfer coefficient increases by 74%, the liquid film thermal resistance decreases by 50%, and the comprehensive condensation efficiency can increase by 134% according to the degree of path optimization.

[0060] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements not only includes those elements, but also includes other elements not expressly listed, or further includes elements inherent to such process, method, article or device.

[0061] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A cleaning machine with multi-channel condensation and recovery of cleaning liquid, characterized in that: A cleaning liquid tank is included, a dual-channel condensation assembly is arranged above the cleaning liquid tank, a first condensation channel and a second condensation channel are arranged in the dual-channel condensation assembly, a wind cut is arranged on one side of the cleaning liquid tank, a first air extraction pipe is arranged above the wind cut, the first air extraction pipe is communicated with one end of the first condensation channel, the other end of the first condensation channel is connected to a first exhaust pipe, the first exhaust pipe is connected to a first exhaust port, an inlet plate isolation section is arranged on the other side of the cleaning liquid tank, a second air extraction pipe is arranged above the inlet plate isolation section, the second air extraction pipe is communicated with one end of the second condensation channel, the other end of the second condensation channel is connected to a second exhaust pipe, and the second exhaust pipe is connected to a second exhaust port; A first rotary condenser and a second rotary condenser are rotatably connected in the dual-channel condensation assembly, a first channel external condensation water drain ball valve is arranged at the bottom of the first condensation channel in the dual-channel condensation assembly, a second channel external condensation water drain ball valve is arranged at the bottom of the second condensation channel, the first channel external condensation water drain ball valve and the second channel external condensation water drain ball valve are connected to an external condensation water drain main ball valve through a pipeline, and the external condensation water drain main ball valve is connected to the cleaning liquid tank through a pipeline.

2. The cleaning machine for multi-channel condensation and recovery of cleaning liquid as claimed in claim 1, characterized in that: The first rotary condenser and the second rotary condenser span the first condensation channel and the second condensation channel, and the centers of the first rotary condenser and the second rotary condenser are located between the first condensation channel and the second condensation channel.

3. The cleaning machine for multi-channel condensation and recovery of cleaning liquid as claimed in claim 1, characterized in that: The steam flows in the first condensation channel and the second condensation channel in opposite directions, and the rotation directions of the first rotary condenser and the second rotary condenser are opposite to the steam flows in the first condensation channel and the second condensation channel.

4. The cleaning machine for multi-channel condensation and recovery of cleaning liquid as claimed in claim 1, characterized in that: The first rotary condenser and the second rotary condenser have the same structure. Both the first rotary condenser and the second rotary condenser include a disc condenser and a disc radiator. The disc condenser is located inside the first condensation channel and the second condensation channel, and the disc radiator is located outside the first condensation channel and the second condensation channel. The disc condenser and the disc radiator are penetrated by heat pipes.

5. The cleaning machine for multi-channel condensation and recovery of cleaning liquid as claimed in claim 4, characterized in that: The disc condenser is composed of densely arranged parallel condensing discs, the heat pipe runs through the condensing disc, and the heat pipe and the condensing disc are fixed by welding, and the condensing disc is an aluminum metal component.

6. The cleaning machine for multi-channel condensation and recovery of cleaning liquid as claimed in claim 4, characterized in that: The disc radiator is composed of densely arranged parallel cooling discs, the heat pipe runs through the cooling discs, and the heat pipe and the cooling discs are fixed by welding, and the cooling discs are aluminum metal components.

7. The cleaning machine for multi-channel condensation and recovery of cleaning liquid as claimed in claim 4, characterized in that: A first rotating shaft passes through the center of the disc condenser and is fixedly connected thereto. The first rotating shaft is rotatably connected to the housing of the dual-channel condensation assembly. The bottom of the first rotating shaft is connected to a driving motor via a gear transmission.

8. The cleaning machine for multi-channel condensation and recovery of cleaning liquid as claimed in claim 7, characterized in that: An inner gear disc is fixedly connected to the bottom of the first rotating shaft, a planetary gear is meshed inside the inner gear disc, a central gear is meshed inside the planetary gear, and the central gear is fixedly connected to the driving motor.

9. The cleaning machine for multi-channel condensation and recovery of cleaning liquid as claimed in claim 8, characterized in that: A second rotating shaft passes through the first rotating shaft, the second rotating shaft is fixedly connected to the central gear, the second rotating shaft passes through the disc condenser and the disc radiator, and a cooling fan is fixedly connected to the upper end of the second rotating shaft, an air intake center hole is opened in the center of the cooling disc, centrifugal impellers are arranged around the disc radiator, and the centrifugal impellers are welded around the cooling disc.

10. The cleaning machine for multi-channel condensation and recovery of cleaning liquid as claimed in claim 1, characterized in that: A bypass pipeline is arranged between the first channel external condensate drain ball valve and the second channel external condensate drain ball valve, and an external condensate sampling ball valve is arranged on the bypass pipeline.

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